TW427547U - Scanning exposure machine - Google Patents

Scanning exposure machine

Info

Publication number
TW427547U
TW427547U TW88222056U TW88222056U TW427547U TW 427547 U TW427547 U TW 427547U TW 88222056 U TW88222056 U TW 88222056U TW 88222056 U TW88222056 U TW 88222056U TW 427547 U TW427547 U TW 427547U
Authority
TW
Taiwan
Prior art keywords
scanning exposure
exposure machine
machine
scanning
exposure
Prior art date
Application number
TW88222056U
Other languages
Chinese (zh)
Inventor
Meng-Chun Li
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW88222056U priority Critical patent/TW427547U/en
Publication of TW427547U publication Critical patent/TW427547U/en

Links

TW88222056U 1999-12-24 1999-12-24 Scanning exposure machine TW427547U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW88222056U TW427547U (en) 1999-12-24 1999-12-24 Scanning exposure machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW88222056U TW427547U (en) 1999-12-24 1999-12-24 Scanning exposure machine

Publications (1)

Publication Number Publication Date
TW427547U true TW427547U (en) 2001-03-21

Family

ID=21657905

Family Applications (1)

Application Number Title Priority Date Filing Date
TW88222056U TW427547U (en) 1999-12-24 1999-12-24 Scanning exposure machine

Country Status (1)

Country Link
TW (1) TW427547U (en)

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model