TW406507B - SECS-I and HSMS converting method - Google Patents
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40650V 五、發明說明(l) " " " 〈發明領域及習知技術說明〉 本發明之發明領域係有關於SEMI (國際半導體設備及 材料)之SECS - I協定及HSMS協定之間互相轉換的轉換方 法。 在半導體工業中’隨著通訊觀念的導入,已了解測試 可增加方法上的生產量,藉由線上半導體工廠、製造設 備、量測設備、觀察設備等其他使用電腦主機的設備,此 乃集中化管理的一項方法。為了在半導體設備之間達到有 效的通訊,SEMI建立多種不同的協定(或標準),為了在技 術上達到所需要的準確度,且可指定專門的許多領域中達 到可用性’為SEMI協定標準化的SEMI ISO在國際會議中充 分地採用其他的標準以在任何時間中檢查技術的準確性、 一致性及時機等適當性等。 SECS(半導體設備通訊標準),為讣…協定中的一項協 定’自1980年即廣泛地使用。在5£以中包含sECs _ I及 SECS - II,其為半導體製造設備及電腦主機之間的通訊 方法。此通訊資訊係經由串列點對點線,其用於處理實質 連結、信號大小、數據速度、邏輯協定,以在電腦主機及 設備之間交換訊息(資訊)。SECS - I的規定說明如下: 通訊協定:使用美國EIAKS - 232C的連結器及電壓位 準,或者是日本JIS C6361協定。 通訊方法:不同步雙向通訊,且可一次單向傳送;由 特定的字元及交遞方式決定傳送方向。40650V V. Description of Invention (l) " " " <Invention Field and Known Technical Explanation> The invention field of the present invention relates to the SECS-I agreement and the HSMS agreement on SEMI (International Semiconductor Equipment and Materials) Conversion method of the conversion. In the semiconductor industry, with the introduction of the concept of communication, it has been understood that testing can increase the production volume of methods. With online semiconductor factories, manufacturing equipment, measuring equipment, observation equipment and other equipment using computer hosts, this is centralized A method of management. In order to achieve effective communication between semiconductor devices, SEMI establishes a variety of different protocols (or standards), in order to achieve the required accuracy in technology, and can be specified in many specialized areas to achieve availability 'SEMI standardized for the SEMI agreement ISO fully adopts other standards in international conferences to check the accuracy of the technology, consistency, timeliness, and appropriateness at any time. SECS (Semiconductor Equipment Communication Standard) is an agreement in the… agreement that has been widely used since 1980. Includes sECs_I and SECS-II under 5 £, which is the method of communication between semiconductor manufacturing equipment and the host computer. This communication information is through a serial point-to-point line, which is used to process the physical connection, signal size, data speed, and logical protocol to exchange messages (information) between the host computer and the device. The regulations of SECS-I are explained as follows: Communication protocol: use the American EAIKS-232C connector and voltage level, or the Japanese JIS C6361 agreement. Communication method: asynchronous two-way communication, and one-way transmission at a time; the transmission direction is determined by specific characters and delivery methods.
A:\872416-IL ptd 第5頁 _40650^ ___ 五、發明說明(2) 傳送單元:由訊息塊單元傳送數據,一訊息塊為254 個位元組。各訊息塊包含1 〇位元組的表頭及接下來的大量 數據。訊息塊的各個表頭所包含的資訊係用於指定訊息中 的特定訊息塊’該訊息之架構包含一對的回覆訊息及包含 交易訊息的要求。依據此方式’ SECS - I不在訊息中指示- 數據的型式。訊息的數據型式係由另一協定,Secs - 11 指示。 · 而且,因為電腦主機及設備之間的連結為一比.一,所 以很難另外連結其他的設備。 在圖1中使用SECS - I協定,可表示工廠之電腦主機 (1)及設備(2a ’ 2b,2c)之間連結的概念。由rs - 232C電 纜線(3a,3b,3c),使電腦主機與各設備連:结進行一對一 的連結,此將於下文中加以說明。 在SECS - I 及SECS _ II 後,在 1 995 年,SEMI 建立 HSMS(高速SECS訊息服務)。建立HSMS,使得在需要與SECS - 1進行尚速通訊時可加以利用,但是其不足以使用在簡 單的串列線路中。基本上HSMS可使用在應用TCP/IP(表示 訊息表示)處。對於半導體工廠的電腦之間的訊息交換, HSMS為了足敷應用的通訊協定。 HSMS為一高速的協定,可傳送大量的訊息,係因為使 用架構LAN之通訊方法的TCP/IP完成訊息傳送及數據交 換’且可在不另加其他的攔截裝置下,截取通訊線路,此 外尚可觀察通訊線路’以增加介面密度,且可核驳與非行 動設備之間的介接。而且,依據TCP/ IP的基本設備,其可A: \ 872416-IL ptd Page 5 _40650 ^ ___ V. Description of the invention (2) Transmission unit: The data is transmitted by the message block unit. One message block is 254 bytes. Each message block contains a 10-byte header and a large amount of data that follows. The information contained in each header of the message block is used to specify a specific message block in the message. The message structure includes a pair of reply messages and a request containing a transaction message. In this way, 'SECS-I does not indicate in the message-the type of data. The data format of the message is indicated by another protocol, Secs-11. Also, because the connection between the host computer and the device is one to one, it is difficult to connect other devices separately. The use of the SECS-I agreement in Fig. 1 shows the concept of the connection between the host computer (1) and the equipment (2a '2b, 2c) of the factory. The rs-232C cable (3a, 3b, 3c) connects the host computer with each device: a one-to-one connection, which will be described below. After SECS-I and SECS_II, in 1995, SEMI established HSMS (High-Speed SECS Message Service). The HSMS was established so that it can be used when high-speed communication with SECS-1 is required, but it is not sufficient for simple serial lines. Basically, HSMS can be used at the application TCP / IP (Representation Message Representation). For the exchange of information between computers in a semiconductor factory, HSMS is a communication protocol for application. HSMS is a high-speed protocol that can transmit a large number of messages because TCP / IP uses a LAN-based communication method to complete message transmission and data exchange. It can also intercept communication lines without adding other interception devices. The communication lines can be observed to increase the interface density, and the interface with non-mobile devices can be verified. Moreover, according to the basic equipment of TCP / IP, it can
_ 40650^(_ 五 '發明說明(3) 證明網路現在截止及多介面控制的能力。 圖2之示意圖表示使用HSMS協定之設備之間的連結狀 態。其顯示工廠的電腦主機(11)及設備(12a,12b,12c) 應用各分路(13d,13a,13b,13c)連接主電腦線路(13)。 在圖1中,各設備(2a,2b,2c)及電腦主機(1)與圖2 中的串列通訊線路相連接,但是在圖2中,因為電腦主機 (11)及設備(12a,12b,12c)具有共同的連結分路 TCP/ IP,設備可搖控,且可快速地進行大量的訊息傳送; 另外,可簡單地進行新設備的擴充。 雖然HSMS相當有用,但是除非可適用,否則現今,對 於歷史相當短的HSMS僅有相當少的設備來支援HSMS協定。 〈達成本發明所需要的技術〉 本發明的目的係提供一種支援的方法,其可將SECS _ I及RS - 232C轉換成HSMS及TCP/IP,反之亦然,使得現存 的SECS - I支援設備可作為HSMS的支援設備。 本發明的另一目的為提供一記錄介質記錄程式,其配 置協定轉換方法,以符合上述目的。 〈圖式之簡單說明〉 圖1 為作用在SECS - I之工廠中電腦主機與設備之間 的結構示意圖。_ 40650 ^ (_ Five 'invention description (3) Prove that the network is now cut off and multi-interface control capability. The schematic diagram of Figure 2 shows the connection status between equipment using the HSMS protocol. It shows the computer host (11) and The equipment (12a, 12b, 12c) is connected to the main computer line (13) by each branch (13d, 13a, 13b, 13c). In Figure 1, each device (2a, 2b, 2c) and the computer host (1) and The serial communication lines in Figure 2 are connected, but in Figure 2, because the computer host (11) and the device (12a, 12b, 12c) have a common connection branch TCP / IP, the device can be remotely controlled and can quickly In addition, a large number of messages can be easily transmitted. In addition, new equipment can be simply expanded. Although HSMS is quite useful, unless applicable, today, there are relatively few equipment to support the HSMS agreement for a relatively short history of HSMS. The technology required by the present invention> The object of the present invention is to provide a support method that can convert SECS_I and RS-232C into HSMS and TCP / IP, and vice versa, so that existing SECS-I support equipment can be used as Supporting equipment for HSMS. Another purpose is to provide a recording medium recording program, which configures a protocol conversion method to meet the above purpose. <Simplified description of the diagram> Figure 1 is a schematic diagram of the structure between the computer host and the equipment in the SECS-I factory.
A:\872416-IL.ptd 第7頁 40650^ 五、發明說明(4) 圖2為作用在HSMS之工廠電腦主機與設備之間的結構 示意圖。 圖3 為本發明中轉換方法之位置的結構示意圖。 圖4 為採用本發明轉換方法之轉換設備的外觀結構 圖。 圖5 為依據本發明之轉換方法的示意圖° 圖6 為依據本發明之訊息結構示意圖。 圖7 為依據本發明之Η欄位訊息示意圖。 圖8a為表示將SECS訊息轉換成HSMS訊息的關念示意圖。 圖8b為表示將HSMS訊息轉換成SECS訊息的關念示意圖。A: \ 872416-IL.ptd Page 7 40650 ^ V. Description of the invention (4) Figure 2 is a schematic diagram of the structure between the host computer and the equipment of the HSMS factory. FIG. 3 is a schematic structural diagram of a position of a conversion method in the present invention. FIG. 4 is an external structural diagram of a conversion device using the conversion method of the present invention. FIG. 5 is a schematic diagram of a conversion method according to the present invention. FIG. 6 is a schematic diagram of a message structure according to the present invention. FIG. 7 is a schematic diagram of a field message according to the present invention. FIG. 8a is a schematic diagram showing the concept of converting SECS messages into HSMS messages. FIG. 8b is a schematic diagram showing the conversion of HSMS messages into SECS messages.
(12a,12b,12c)設備 I /電腦主機轉換設備 (201) HSMS ( 203 )LAN等的通訊線路 ( 3 0 5 )第一HSMS緩衝器 (313)第二SECS緩衝器 (Π )電腦主機 (1 0 0 )設備 (202) TCP/IP 圖號說明 (1 )電腦主機 (13d ’ 13a , 13b , 13c)分支 (102) RS - 232C(300)SECS ( 300 )SECS/HSMS 轉換設備 - I 2 3 2C電纜線 -Ι/HSMS轉換設備 ( 304 )SECS - HSMS 轉換部門(12a, 12b, 12c) Equipment I / computer host conversion equipment (201) HSMS (203) LAN and other communication lines (305) First HSMS buffer (313) Second SECS buffer (Π) Computer host ( 1 0 0) Equipment (202) TCP / IP drawing number description (1) Computer host (13d '13a, 13b, 13c) branch (102) RS-232C (300) SECS (300) SECS / HSMS conversion equipment-I 2 3 2C cable-I / HSMS conversion equipment (304) SECS-HSMS conversion department
(2 0 0 )電腦主機 ( 3 0 3 )第一SECS緩衝器 ( 3 0 9 )第二HSMS緩衝器 (2a ’2b ’2c)設備 (101)SECS (103) RS -(300)SECS (301 )SECS處理器(2 0 0) Host computer (3 0 3) First SECS buffer (3 0 9) Second HSMS buffer (2a '2b' 2c) Device (101) SECS (103) RS-(300) SECS (301 SECS processor
40650rt . 五、發明說明(5) (311)HSMS - SECS 轉換部門 (307)HSMS處理器 〈發明之詳細說明 圖3為本發明之連結圖,其表示本發明系統之轉換方 法的定位。基於SECS - 1(1〇)及SECS - I/HSMS轉換裝置 ( 3 0 0 )所形成的設備採用之RS _ 232cn 〇2)連接RS - 232(: 電纜線(103);以及基於HSMS(201)及TCP/IP(202)的電腦 主機應用如LAN的通訊線路連接SECS - I/HSMS轉換裝置。 應用類似的架構,用於現存SECS - I的設備可經轉換 裝置(300)連接用於H SMS的電腦主機,其間應用相當短的 串聯RS - 232C電缆線。為了使本發明的優點可發揮到最 大’在SECS - I/HSMS轉換裝置(30 0)連接位置上,有必要 使RS - 2 3 2C電纟覽線的長度相當的短且通訊線路(2〇3 )則相 當的長。在下文中’ SECS - I將縮寫成SECS。換言之,此 後SECS即意指SECS - I。 圖4之訊息塊圖’簡要地表示圖3中SECS/HSMS電腦主 機(300 )的内部架構。與圖4類似,SECS/HSMS電腦主機 (300)包含SECS處理器(301),第一SECS緩衝器(305), SECS - HSMS 轉換部門(304) ’ 第一HSMS 緩衝器( 305), HSMS 處理器( 307),第二HSMS 緩衝器(309),HSMS _ SECS 轉換部門(311)及第二SECS緩衝器(313)。 控制SECS處理器(301) ’以傳送經_ 232C接收的 SECS訊息予第一SECS緩衝器(303)或傳送儲存在MCS緩衝40650rt. V. Description of the invention (5) (311) HSMS-SECS conversion department (307) HSMS processor <Detailed description of the invention Figure 3 is a connection diagram of the invention, which shows the positioning of the conversion method of the system of the invention. RS_232cn (2) used by equipment formed based on SECS-1 (10) and SECS-I / HSMS conversion device (300) to connect RS-232 (: cable (103); and based on HSMS (201 ) And TCP / IP (202) computer host applications such as LAN communication lines to connect the SECS-I / HSMS conversion device. Applying a similar architecture, the equipment used for the existing SECS-I can be connected for H through the conversion device (300) The host computer of the SMS uses a relatively short serial RS-232C cable. In order to maximize the advantages of the present invention, it is necessary to make the RS-at the connection position of the SECS-I / HSMS conversion device (300). The length of the 2C cable is relatively short and the communication line (203) is quite long. In the following, 'SECS-I will be abbreviated as SECS. In other words, SECS means SECS-I. Figure 4 of The message block diagram 'briefly shows the internal architecture of the SECS / HSMS host computer (300) in Fig. 3. Similar to Fig. 4, the SECS / HSMS host computer (300) contains a SECS processor (301), and a first SECS buffer (305). ), SECS-HSMS conversion department (304) '' First HSMS buffer (305), HSMS processor (307), second HSMS buffer (309), HSMS_SECS conversion department (311), and second SECS buffer (313). Control the SECS processor (301) 'to transmit the SECS message received via _232C to the first SECS buffer (303 ) Or transfer stored in MCS buffer
A:\872416-IL. ptd 第9頁 40650^ 五、發明說明(6) - 器(31 3 )中的SECS訊息而經rs - 23 2C到外部。 第一secs緩衝器儲存接eSECS處理器(3〇1)的“以訊 息。以傳統的技術說明’來自SECS處理器(3〇1)的別以訊 息由訊息塊單元傳送到第一SECS緩衝器,此係因為“以訊 息包含許多訊息塊,因此可由各訊息塊單元加以轉換。.第 一SECS緩衝器(303 )輸出一完全的訊息,以在這些訊息被 傳送後,可合併所有的訊息塊。 SECS - HSMS轉換部門轉換從第一secs緩衝器( 303 )輸 出的S E C S §fl息成為H S M S訊息。於說明本發明的方法時,將 一併說明轉換之方法。 第一HSMS緩衝器暫時儲存在SECS - HSMS轉換部門 (304)中轉換的HSMS訊息。該緩衝器傳送儲存的hsms訊息 予HSMS處理器(3 0 7 ),然後輸出予外部單元。 控制HSMS處理器(307)以傳送訊息予第二hsmS緩衝器 (3 0 9) ’其經由T C P / IP通訊線路接收訊息或經由τ c p / I p傳 送HSMS訊息予外部單元,該訊息係儲存在第一 jjSMS緩衝号 ( 305 )中。 第二HSMS緩衝器(309)暫時儲存來自USMS處理器(307) 的HSMS訊息。 SECS - HSMS轉換部門(311)將HSMS訊息轉換成SECS訊 息。下文將立即說明轉換之方法。由訊息塊將此轉換的 SECS訊息傳送予下一第二SECS緩衝器。 第二SECS缓衝器(313)傳送來自SECS - HSMS轉換部門 (311)的SECS訊息,然後,由訊息塊單元傳送此訊息予A: \ 872416-IL. Ptd page 9 40650 ^ V. Description of the invention (6)-The SECS message in the device (31 3) goes to the outside via rs-23 2C. The first secs buffer stores the "messages" connected to the eSECS processor (301). According to the conventional technical description, the messages from the SECS processor (301) are not transmitted from the message block unit to the first SECS buffer This is because "a message contains many message blocks and can be converted by each message block unit. The first SECS buffer (303) outputs a complete message to combine all message blocks after these messages have been transmitted. The SECS-HSMS conversion section converts the S E C S §fl information output from the first secs buffer (303) into an H S M S message. In describing the method of the present invention, the method of conversion will be described together. The first HSMS buffer temporarily stores HSMS messages converted in the SECS-HSMS conversion department (304). The buffer transmits the stored hsms message to the HSMS processor (307), and then outputs to the external unit. Control the HSMS processor (307) to send a message to the second hsmS buffer (309) 'It receives a message via a TCP / IP communication line or transmits an HSMS message to an external unit via τ cp / IP, the message is stored in In the first jjSMS buffer number (305). The second HSMS buffer (309) temporarily stores HSMS messages from the USMS processor (307). The SECS-HSMS conversion department (311) converts HSMS messages into SECS messages. The method of conversion will be explained immediately below. The converted SECS message is transmitted to the next SECS buffer by the message block. The second SECS buffer (313) transmits the SECS message from the SECS-HSMS conversion department (311), and then transmits this message to the message block unit.
40650*; 五、發明說明(7) SECS 處理器(301)。 圖5表示操作SECS - HSMS轉換襞置(3〇〇)之程式的流 程圖。下文中應用附圖說明本發明之SECS _ HSMS轉換之 方法。 (S1)中辨識是否從SECS處理器(301)的外部單元中接 收經RS - 232C的SECS訊息。在此附帶說明,由訊息塊單 元傳送的SECS訊息,之後又被儲存在第_SECS緩衝器中 (303) 。 、 ° (S2 )如果接收到SECS訊息,則決定該是否為訊息中最 後的一個訊息塊。 (S 3 )除非是最後的一個訊息塊,否則儲存在第一 $ e c s 緩衝器中。 (S 4)如果該訊息塊為最後之訊息塊’則將所有訊息塊 中的SECS訊息傳送予SECS - HSMS轉換部門(3〇4),然後在 將該§fl息轉換成HSMS訊息後,儲存該訊息於第一 jjsms緩衝 盗(305)中。下文中應用其他的附圖說明轉換方法。 (55) 如果在S1步驟丁中SECS處理器(301)沒有接收到 ^何訊息,則讀取第二SECS緩衝器(313)中的訊息以辨識 疋否存在任何訊息。 (56) 如果存在第二SECS緩衝器,則傳送訊息塊予secs 處理斋,此時,如果訊息塊為最後一個訊息塊時,清楚第 二SECS 緩衝器(31 3)。 (57) 如果在第二SECS緩衝器中沒有任何訊息,則再度 考慮是否訊息存在第二HSMS緩衝器( 309 )中。40650 *; 5. Description of the invention (7) SECS processor (301). Fig. 5 shows a flowchart of a procedure for operating the SECS-HSMS conversion unit (300). The method of SECS_HSMS conversion of the present invention is explained below using the drawings. (S1) identifies whether or not an SECS message via RS-232C is received from an external unit of the SECS processor (301). Incidentally, the SECS message transmitted by the message block unit is then stored in the _SECS buffer (303). ° (S2) If a SECS message is received, it is determined whether it is the last message block in the message. (S 3) Unless it is the last message block, it is stored in the first $ e c s buffer. (S 4) If the message block is the last message block, then the SECS messages in all message blocks are transmitted to the SECS-HSMS conversion department (304), and then the §fl information is converted into HSMS messages and stored. The message is stored in the first jjsms buffer (305). The conversion method will be described below using other drawings. (55) If the SECS processor (301) does not receive any message in step S1, the message in the second SECS buffer (313) is read to identify whether there is any message. (56) If there is a second SECS buffer, the message block is transmitted to the secs processing module. At this time, if the message block is the last message block, the second SECS buffer is cleared (31 3). (57) If there is no message in the second SECS buffer, consider again whether the message exists in the second HSMS buffer (309).
A:\872416-IL. ptd 第11頁 40650*1 五、發明說明(8) (58) 如果訊息存在第二HSMS緩衝器(3〇9)中,傳送此 緩衝器SECS - HSMS轉換部門(311),然後轉換為SECS訊 息’且儲存在第二SECS緩衝器(31 3 )中,此係因為此訊息 為HSMS訊息之故。 、 在執行一連串的步驟之後,執行下列HSMS訊息的路 由:A: \ 872416-IL. Ptd Page 11 40650 * 1 V. Description of the invention (8) (58) If the message exists in the second HSMS buffer (309), send this buffer SECS-HSMS conversion department (311 ), Then converted into a SECS message 'and stored in the second SECS buffer (31 3), because this message is an HSMS message. After executing a series of steps, the following routes of HSMS messages are executed:
(59) 辨識是否經由外部單元經Tcp/Ip線路接收到HSMS 訊息。與SECS訊息不同的是’ 一起傳送沒有任何訊息塊觀 念的H S M S訊息。 (s 1 〇)當接收到訊息時,將此訊息儲存在HSMS緩衝器 ( 309 )中。然後,在HSMS訊息轉換為“以訊息時,儲存此 HSMS訊息在第二SECS緩衝器(313)中。此步驟與步驟S8具 相關性。 (S11)如果沒有接收到託⑽訊息,則讀取第一旧託緩 衝器( 30 5 ) ’然後辨識是否有任何的HSMS訊息必需傳送。 如上所述’在轉換來自SECS處理器的託以訊息後,將hsms 訊息儲存在第一 HSMS緩衝器( 30 5 )内。 (S1 2)如果在第一HSMS緩衝器中沒有任何訊息時,則 再回到前一項’且執rSECS訊息的路由。如果在第一Hsms 缓衝器(305)中存在訊息,則HSMS處理器( 307)經TCP/IP傳 送此訊息予外部單元。 現在’文中已說明轉換SECS及HSMS訊息的方法。在說 明轉換方法之前,先說明各訊息的基本格式。圖6(a)表示 SECS訊息的架構’ 6(b)表示SECS訊息的架構β各別以訊息(59) Identifies whether HSMS message is received via external unit via Tcp / Ip line. The difference from the SECS message is that the MH message is transmitted without any message block concept. (s 1 0) When a message is received, the message is stored in the HSMS buffer (309). Then, when the HSMS message is converted into a "message, this HSMS message is stored in the second SECS buffer (313). This step is relevant to step S8. (S11) If no trust message is received, read First old buffer (30 5) 'Then identify if there are any HSMS messages that must be transmitted. As described above' After converting the entrusted messages from the SECS processor, the hsms message is stored in the first HSMS buffer (30 5). (S1 2) If there is no message in the first HSMS buffer, then return to the previous item and execute the rSECS message routing. If there is a message in the first Hsms buffer (305) Then, the HSMS processor (307) transmits this message to the external unit via TCP / IP. Now the method of converting SECS and HSMS messages has been explained in the article. Before explaining the conversion method, the basic format of each message is explained. Figure 6 (a ) Indicates the structure of the SECS message '6 (b) indicates the structure of the SECS message β
A:\872416-IL. ptd 第12頁 406507 五、發明說明(9) ---- 的訊息塊包含四個欄位,為長度位元組,表頭位元組,本 體及核對和(checksum) eHSMS訊息包含長度位元纟且, 及本體。 、、衣頌 與SECS訊息不同的是,長度位元組,表頭中包含的訊 息更多。下文中,吾人將各攔位簡寫成對應的L,H, ° C ° 圖7只表示Η欄位的訊息。(a)表示SECS訊息的H攔位, (b)為HSMS訊息之H dECS訊息之Η只有10位元組,其包含’,, 裝置ID"兩個欄位以指定一種設備,"串列"及"功能,,棚= 各1位元組,"訊息塊編號,,欄位佔2個位元組以指定欄位編 號,糸統位元組"攔位有4個位元組,"p型式”欄位為—保 留攔位,且如果"S型式"欄位為〇的話,則型式欄位總是為 零。即訊息為數據,且如果"S型式"欄位為1,則為控制訊 息。”審理"欄位對應SECS訊息表頭之”裝置id"攔位。 現在說明S E C S及H S M S之間訊息型式轉換方法。圖8 a表 示將SECS訊息轉換成HSMS訊息的觀念^ (a)顯示表頭轉換 方法,(b)為訊息塊轉換方法。在表(a)中,複製acs表頭 裝置ID 串列",’’功能系統位元組"欄位而不加改 變’且轉換成對應的H S M S表頭之"審理","串列",”功能η 及糸統位元組"。均設定為0的Μ ρ型式"及M s型式"欄位轉 換成HSMS表頭。配置HSMS表頭以複合Β攔位及SECS訊息之 各訊息塊中的Η。依據此方式將SECS訊息轉換成HSMS訊 息。 圖8b表示在HSMS訊息轉換成SECS訊息的觀念,且(a)A: \ 872416-IL. Ptd Page 12 406507 V. Description of the invention (9) The message block of ---- contains four fields, which are length byte, header byte, body and checksum (checksum ) The eHSMS message contains the length bits and the body. Unlike the SECS message, the length of the byte contains more information in the header. In the following, I will abbreviate each block to the corresponding L, H, ° C ° Figure 7 only shows the message of the Η field. (A) H block of SECS message, (b) H dECS message of HSMS message is only 10 bytes, which contains' ,, Device ID " Two fields to specify a device, " " and " function, shed = 1 byte each, " message block number, " the field occupies 2 bytes to specify the field number, the standard byte " block has 4 bits Tuple, " p-type " field is-reserved, and if " S-type " field is 0, the type field is always zero. That is, the message is data, and if " S-type " The field is 1, it is the control message. The "review" field corresponds to the "device id" block in the header of the SECS message. The method of message type conversion between SECS and HSMS will now be described. Figure 8a shows the SECS message Concept of conversion to HSMS message ^ (a) Display header conversion method, (b) Message block conversion method. In table (a), copy the acs header device ID string ", `` Function System Bytes '' " column without change 'and converted into the corresponding "HS &L; ", " serial "," And system which can η bytes ". The fields of the M ρ type " and M s type ", both of which are set to 0, are converted into HSMS headers. The HSMS header is configured to compound the B block and the Η in each message block of the SECS message. In this way, SECS messages are converted into HSMS messages. Figure 8b shows the concept of converting HSMS messages into SECS messages, and (a)
A:\872416-IL. ptd 第13頁 40650 五、發明說明(10) ^示表頭轉換方法,(b)為訊息塊轉換方法。在(a)中’複 製HSMS表頭的"審理”,”串列",,,功能”及"系統位元組”而 不加^改變’且轉換成對應的SECS表頭之π裝置IDM,1,串 列’功能","系統位元組"欄位。依序對"p型式及"s型 式搁位=的各個訊息塊指定訊息塊編號,且將最後訊息城 的MSB(最大有效位元)設定成”厂,然後將SECS表頭轉換成 HSMS表頭。與(b)相同’使用從HSMS訊息中取出的Η及B複 合SECS訊息的各訊息塊。因此,SECS訊息複轉換成HSMS訊 息。 依據此動作由電腦程式配置SECS AHSMS的互相轉換方 法。此程式可儲存在多種記錄介質中,如EpR〇M、光罩 R〇M(mask ROM) , CDROM 等。 〈本發明之效應〉 如上述說明,由本發明的SECS _ I/HSMS轉換方法, 雖其為一項設備但仍可支援HSMS ’更可利用此設備用於支 援傳統的SECS - I ’因此其具有HSMS的優點;由於wan之 故’其可増加設備的控制距離,因此很玄县高速傳送大量 的訊息’以及擴充新的設備。因此,對於新設備不需要不 必要的投資,且可減少生產成本。A: \ 872416-IL. Ptd page 13 40650 5. Description of the invention (10) ^ shows the header conversion method, (b) is the message block conversion method. In (a) "copy the" trial of the HSMS header "," serial ",", function "and" system bytes "without changing ^" and convert to the corresponding π of the SECS header Device IDM, 1, serialize the 'functions', " system bytes " field. Specify the message block number for each message block of " p-type and " s-type shelf = sequentially, and set the MSB (maximum significant bit) of the last message city to "factory", and then convert the SECS header to HSMS Header. Same as (b) 'Using 讯息 from HSMS message and each message block of B compound SECS message. Therefore, SECS message is reconverted into HSMS message. According to this action, a computer program configures the mutual conversion method of SECS AHSMS. This program can be stored in a variety of recording media, such as EpROM, mask ROM, CDROM, etc. <Effects of the present invention> As explained above, the SECS_I / HSMS conversion method of the present invention, Although it is a device, it can still support HSMS 'It can be used to support traditional SECS-I', so it has the advantages of HSMS; because of wan ', it can increase the control distance of the device, so it is very Xuan County Send a large number of messages at high speed 'and expand new equipment. Therefore, no unnecessary investment is needed for new equipment, and production costs can be reduced.
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KR1019980046147A KR100283401B1 (en) | 1998-10-30 | 1998-10-30 | SECS-I and HSMS Conversion |
JP32223099A JP2001154931A (en) | 1998-10-30 | 1999-11-12 | Secs-i-to-hsms conversion method |
SG9905647A SG91843A1 (en) | 1998-10-30 | 1999-11-12 | Secs-i and hsms converting method |
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US8090875B2 (en) | 2005-10-28 | 2012-01-03 | Nikon Corporation | Device and method for connecting device manufacturing processing apparatuses, program, device manufacturing processing system, exposure apparatus and method, and measurement and inspection apparatus and method |
WO2007049704A1 (en) * | 2005-10-28 | 2007-05-03 | Nikon Corporation | Device manufacturing apparatus connecting apparatus and connecting method, program, device manufacturing system, exposing apparatus, exposing method, determining/testing apparatus and determining/testing method |
JP2008118485A (en) * | 2006-11-07 | 2008-05-22 | Meidensha Corp | Secs message data preparing device |
JP6419309B2 (en) * | 2015-03-25 | 2018-11-07 | 三菱電機株式会社 | Communication system, facility management apparatus, communication method, and program |
CN115002080B (en) * | 2022-06-27 | 2024-04-02 | 上海轩田智能科技股份有限公司 | SECS/GEM SECSII transaction-based information distribution method and distribution device |
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