TW402665B - Vacuum pump - Google Patents

Abstract

To provide a vacuum pump which can refrain the temperature from raising up at air discharge port, even under the huge air volume, the high air flow speed, and the high compression ratio, it could still running continuously. That vacuum pump consists of: a housing 11, rotary shaft 23, 24, being supported at two ends by housing 11; and rotor 21, 22, inside rotary chamber 14 to be unified rotated with the Rotary shafts 23, 24 and to suck the compressed air or fluid into the Rotary chamber 14 from the air suction port 12 and it is discharged out from discharge port 13; an outside pass way 41a, 42a and inside pass way 41b, 42b are formed at one end side of rotary shaft 23, 24 as an individual opening, meanwhile to connect two pass ways internally for Rotors 21, 22 to form a cooling pass way 41, 42.

Description

Ttt 【發明之領域】 之i Ϊ =與—種真空泵、例如與排除空氣或其他氣體混合 二性流體之容積移送型之真空泵有關。 【先前之技藝】 壓ί二二為獲得低壓作業空間之真空排氣等而與機械式增 泵，多用根部(R°〇ts)型、爪 i、螺旋型之容積移送型泵。 侧iU:f ’係i外殼與轉子間之氣體移送室從吸氣口 一連通ί 口側中以所定壓縮比一邊減少其容積一邊逐 (排氣口 Z i 口、排氣。故、由於壓縮熱或洩漏從大氣側 等致泵内之氣體再度返回大氣側之損失循環 采之排氣口侧達相當之高溫。 之：如以真空排除半導體製造用真空室 空室，並蔣Φ #今量機械式增壓泵（例如根部泵）連接於真 使機械式增壓栗旁通至真空室内壓留:\)連接於其排乳侧’ 以主真m空排氣，下’僅 同工作以耩# π A β ;:後將機械式增壓泵與主真空泵一 如此運轉時，主真空系之排氣：：：： = % 溫，惟製造之半導體尺寸小，故在 2達 採取在外殼設置水套冷、^泵之今量小時， 【發明欲解決之課題】 ，、，、置A P軍嫩 然而、例如製造之半導體為大 型時，主真空泵加逮需大容量 “用真空至相對大 更為了獲得所定排氣速Ttt [Field of the invention] i Ϊ = related to a vacuum pump, such as a volume transfer type vacuum pump for removing amphoteric fluid mixed with air or other gases. [Previous technique] Pressure pumps and mechanical pumps are used to obtain vacuum exhaust in low-pressure working spaces. Roots, claws, and screw-type volume transfer pumps are commonly used. The side iU: f 'is the air transfer chamber between the casing and the rotor, which communicates from the suction port. The port side reduces its volume at a predetermined compression ratio while reducing the volume (exhaust port Zi port, exhaust. Therefore, due to compression Heat or leakage from the atmospheric side causes the gas in the pump to return to the atmospheric side again. The exhaust port side of the cycle recovery reaches a relatively high temperature. For example: if the vacuum chamber for semiconductor manufacturing is used to exclude the vacuum chamber, and Jiang Φ # 今 量A mechanical booster pump (such as a root pump) is connected to the true booster pump and bypassed to the vacuum chamber for pressure retention: \) Connected to its breast discharge side 'exhaust with the main true air, the following' only work with耩 # π A β;: When the mechanical booster pump and the main vacuum pump are operated in this way, the exhaust of the main vacuum system is: ::: =% temperature, but the semiconductor manufactured is small in size, so it is taken in the shell at 2 up Set the water jacket cooling, the amount of pump is small, [the problem to be solved by the invention] ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, Get the set exhaust speed

度，並需將機械式增壓眾r - 以大半時間同時運轉機械段(大氣壓附近)工作，即 望將此等兩系功能合為曰壓栗與主真空泵。因此、希 泵。 大夺量高壓縮比多段容積型 惟泵如此大容量化時，因 大 之運轉障礙 大，而真空泵之大部分動力2 =動所需動力亦遙比先前 述排氣口側之溫度上昇顯著，排氣口侧發熱之原因，致上 殼間之燒結、或轉子軸承繞結乂至產生容易發生轉子與外 溫度上昇具體加以說明，先前門嗓。茲就此排氣口側之 強制冷卻）之外殼在運轉中維^之栗/被曝露在大氣（或被 在高真空狀態氣體移迸室之、比較低溫，而相對被包圍 與轴端之少許大氣冷郤，以 t為因輻射之外殼侧熱傳導 20〇 t溫度差之情形。因此、占卜殼與轉子間產生超過 而相對外殼之熱膨漲# 為轉子及轉子軸熱膨漲 障礙。 a並不大之運轉狀態，產生因燒結 由於此種理田：砍長眛pq古、*级 缩比之多段容積型主真連續運轉大容量、高層 縮 μ ^ ai '^系'，而需長期連續運轉之用$、 例如半導體裝把裝置之真空排氣使 之 '、 了真空泵之保養而降低生產性先…時’存有為 本發明f鑑於：上逑應解決之課題，其目的在 大容量、高速：：f縮比亦能連續運轉之真空泵。^ [解決課題之方法】 為達成上述f的’申請專利範圍第1項之發明. 外殼，具有吸氣口及排氣口、内部形成轉子收容室；V子It is necessary to operate the mechanical pressure booster r-to operate the mechanical section (near the atmospheric pressure) for more than half of the time at the same time. It is hoped that these two series of functions can be combined into a pressure pump and a main vacuum pump. So Greek pump. Large pumping capacity, high compression ratio, multi-stage volumetric type, but when the pump is so large in capacity, due to the large operating obstacles, and most of the power of the vacuum pump 2 = the power required to move is also significantly higher than the temperature of the exhaust port side, The cause of heat generation at the exhaust port side is caused by the sintering between the upper shells or the winding of the rotor bearing to the point where a rise in temperature between the rotor and the outside is prone to be explained in detail. For this reason, the casing on the side of the exhaust port is forced to cool during operation / is exposed to the atmosphere (or is in a high-vacuum state gas transfer chamber at a relatively low temperature, and is relatively surrounded by a small amount of atmosphere at the shaft end. For cooling, let t be the temperature difference of 20 ° t due to the heat conduction on the casing side due to radiation. Therefore, the dilation between the casing and the rotor and the thermal expansion relative to the casing # are the obstacles for the thermal expansion of the rotor and the rotor shaft. The large running state is caused by sintering. Because of this sort of field: the multi-stage volume-type main truth that cuts the length of the pq ancient, * -level reduction, continuous operation of large capacity, high-level contraction μ ^ ai '^ system', and requires long-term continuous operation. The use of $, such as the vacuum exhaust of semiconductor devices to reduce the productivity of the vacuum pump maintenance, the first time ... In view of the above: in order to solve the problem, the purpose is to large-capacity, High-speed :: Vacuum pump capable of continuous operation with f reduction ratio. ^ [Method to solve the problem] In order to achieve the invention of the first patent application scope of f above, the casing has a suction port and an exhaust port, and a rotor housing is formed inside. Room

-仙2 6 65 五、發明說明（3) 丄在吸氣口側及排氣口侧兩邊被支持在外殼或在排氣口 =單邊被支持在外殼；&轉子，在前述轉子收容室内與該 轉子轴一體旋轉、從前述吸氣口將壓縮性流體吸入轉子收 容室並壓縮該流體從排氣口排出，並在該外殼與前述轉子 之間，，，形成由前述轉子之旋轉向前述轉子之軸線方向—方 側移送之流體移送室之真空泵，其特徵為：在前述轉子 軸，形成具有延伸至前述轉子轴内部在前述軸線方向一方 侧分別開口之外側通路部及内側通路部，並在前述轉子内 方折返連接兩通路部而成之冷卻通路。 明因大 在高真 惟藉由 卻通路 口側之 申請專 内具有 該轉子 狀壁部 路部， 氣側之 空狀態 前述排 ，轉子 溫度上 利範圍 底面向 轴深孔 之間折 即能以 被包圍 高溫， 内之冷 在排氣 又如 述轉子 遊插在 前述筒 内侧通 卻通路 外殼在運轉中維持比較低溫，一方面/ ^轉子由於排氣口侧之壓縮排氣成為 氣口側至轉子内折返位置進入轉子轴 在排氣口側有效被冷卻，故可將轉子 昇抑制在適度範圍内。 第2項之發明，在前述轉子軸形成前 該轉子軸轴方向延伸之深孔，並設置 内之筒狀壁部，並在前述深孔底部與 =接前述冷卻通路之外側通路部及 構件容易構成内外折返之細長冷 更如申請專利範圍第3項之發明，將前 通路部及内御m路部肖_述轉子轴# 7八部通路之夕 子軸外周面上，並在前述轉子軸與 ：開開口在 於該開口之2個環狀液通路，即與双之間形成 ％轉無關，复-仙 2 6 65 V. Description of the invention (3) 丄 Supported on the casing on both the suction port side and the exhaust port side, or supported on the casing at the exhaust port = single side; & Rotor in the aforementioned rotor housing room It rotates integrally with the rotor shaft, draws a compressive fluid into the rotor accommodation chamber from the suction port, and compresses the fluid to be discharged from the exhaust port. Between the casing and the rotor, a rotation of the rotor toward the rotor is formed. Axial direction of the rotor—a vacuum pump for a fluid transfer chamber that is transported on a side, characterized in that the rotor shaft is formed with an outer passage portion and an inner passage portion that extend to the inside of the rotor shaft and open on one side of the axial direction. A cooling passage formed by connecting the two passage portions is folded back inside the rotor. Ming Yin Da Gao Zhen only has the rotor-like wall section in the application section on the entrance side of the passage. The air side is in the empty state as described above. The upper range of the rotor temperature can be folded between the bottom of the shaft and the deep hole of the shaft. It is surrounded by high temperature, and the exhaust inside is cooled as described above. The rotor is inserted inside the cylinder, but the passageway is kept at a relatively low temperature during operation. On the one hand, the rotor becomes compressed from the exhaust port side and the exhaust gas becomes the port side to the rotor. The inner return position enters the rotor shaft and is effectively cooled at the exhaust port side, so the rotor lift can be suppressed to a moderate range. According to the second invention, a deep hole extending in the axial direction of the rotor shaft is formed before the rotor shaft is formed, and an inner cylindrical wall portion is provided, and the bottom of the deep hole is easily connected to the passage portion and the member outside the cooling passage. The slender cold that forms the inner and outer turns is more like the invention in the scope of patent application No. 3, the front passage part and the inner section of the road section are described in _mentioned rotor shaft # 7 八 部 道 之 夕子 轴 outer peripheral surface, and on the rotor shaft and : The opening is due to the two annular liquid passages of the opening, that is, it has nothing to do with the formation of% turn between the double,

第6頁 倒 轉 通 -4^24^5- 五、發明說明（4) " --- 易將冷卻通路連接於外部之冷卻液循環通路等。 又如申清專利範圍第4項之發明，設置檢測前述外殼、 轉子及，子軸之令至少】種之溫度感測器，並設置依該溫 度感測器之檢測溫度將冷卻液供排於前述冷卻通路之 排機構，即能更有效冷卻轉子之排氣口側。 /、 【發明之實施形態】 以下參考附圖說明本發明之較佳實施形態。 圖1、圖2係將本發明有關之真空泵於2 實施形態。 神珲％泵之 首先、說明其構造，圖i中1〇係螺旋泵（真空泵），且 泵外殼11。該泵外殼11包含吸氣口丨2及排氣口丨3、以、 所連通之内部轉子收容室14。21、22係分別在栗外 具有微小間隙（例如約50 # m)可旋轉被收容之公 :，螺旋轉子Π、22之中公螺旋轉州形成 螺狀旋轉 :螺旋轉子22形成與轉子21反螺旋方向之 ：狀： 螺旋轉子2卜22係在泵外殼u内具有微小：二等 以瓜）平行鄰接配置，由後述驅動機構相互 21在=外殼11與轉子21、22間，形成被區隔於子 21、22部分之多數螺旋狀流體移送室（未詳靠1轉子 子21、22旋轉時，在此等流體移送 不），當轉 虱侧移送區間，增加容積至所定值進行吸 2之吸 不連通於吸氣口 12亦不連通於排氣口 13之中 ，而在既 以一定容積或階段減少容積，—方面從吸區間’ 13侧之轉子轴線方向一方側移送，而 j向排氣口 於排氣口丨3之Page 6 Reverse pass -4 ^ 24 ^ 5- V. Description of the invention (4) " --- Easy to connect the cooling passage to the external coolant circulation passage, etc. Another example is the invention of claim 4 of the patent scope, which is provided with a temperature sensor that detects the aforementioned casing, rotor, and sub-shafts, and sets a cooling liquid supply and discharge according to the detection temperature of the temperature sensor. The exhaust mechanism of the cooling passage can cool the exhaust port side of the rotor more effectively. [Embodiments of the invention] The following describes preferred embodiments of the present invention with reference to the drawings. Fig. 1 and Fig. 2 show a vacuum pump according to the present invention in a second embodiment. Kobe% pump First, the structure will be described. In FIG. I, a 10-series screw pump (vacuum pump) and a pump casing 11 are provided. The pump casing 11 includes an air inlet 丨 2 and an air outlet 丨 3, and an inner rotor storage chamber 14 connected to the pump. 21 and 22 are rotatably received with a small gap (for example, about 50 # m) outside the chestnut. The male: The male spiral in the helical rotors Π and 22 forms a helical rotation: The helical rotor 22 forms a reverse spiral direction with the rotor 21: Shape: The helical rotor 2 and 22 are tiny in the pump casing u: second-class (Melon) are arranged adjacent to each other in parallel, and the driving mechanism described later is located between the casing 11 and the rotors 21 and 22 to form a majority of spiral fluid transfer chambers (not rotated by the rotors 21 and 22). At this time, when these fluids are not transported), when the tick transfer area is increased, the volume is increased to a predetermined value for suction. The suction of 2 is not connected to the suction port 12 or the exhaust port 13, but at a certain level. The volume or phase decreases the volume, which is transferred from one side of the rotor axis direction of the suction section '13 side, and j is to the exhaust port to the exhaust port.

五、發明說明（5) 排容…至最小值以進行排出作用。 且成A二栌 1與突出軸方向兩端侧之轉子軸2 3同軸 子LI;:且Η螺旋轉子22則與突出軸方向兩端侧之轉 端==上；體分別形成。而轉子軸23、24於各兩 自如兩邊被支持於泵外殼11，使轉子 s 又、軸承26、27具有限制轉子21、22對 ^殼11之轴方向位移之功能，軸承28、29具有容許轉子 、^對泵外殼11之軸方向位移（具體而言即承 m一 1 之軸方向位移之轉子21、22隨著熱膨羅伸 長而另一知位移）之功能。 13^1肖承28、29並非一定需要，而採用轉子21藉排氣口 i之轴承2 6、27單邊被支持於外殼之構造亦可。 30係獎動螺旋轉子21、22之驅動機構，包含：電動機 ，連接在公螺旋轉子21之轉子軸23 ;及同步齒輪32、 二Ζί別固定在轉子轴23、24。同步齒輪32、33互相遗合 2形成在泵外殼11之傳動機構收容室15内 轉子21、22之功能。 另J 7杌得 :mi3側冷卻轉子21、22之冷卻機構。該冷卻 機構40包含：冷卻通路部41、42(冷卻通路），經轉子軸 ^24之軸線方向一方侧、即排氣口 13側之端部及 ίΐ部冷卻轉子21、22;通路連接部43、44，將各冷卻通 卜42連接在外部肖；及外部冷卻液供排機祕，藉 等通路連接部43、44連接在冷卻通路部41、42於轉子 2 1、2 2内折返之所定冷卻經路使冷卻液循環。 'V. Description of the invention (5) Displacement ... to the minimum value for discharge. Let A 2 栌 1 be coaxial with the rotor shaft 2 3 on both ends in the direction of the protruding axis; and Η the spiral rotor 22 and the turning ends on both ends in the direction of the protruding shaft == up; the bodies are formed separately. The rotor shafts 23 and 24 are supported by the pump housing 11 at two free sides, so that the rotor s and the bearings 26 and 27 have the function of restricting the axial displacement of the rotors 21 and 22 to the housing 11 and the bearings 28 and 29 have allowance. The function of the rotor and displacement of the pump housing 11 in the axial direction (specifically, the rotors 21 and 22 bearing displacement in the axial direction of m-1 are known as displacement due to thermal expansion). 13 ^ 1 Xiao Cheng 28 and 29 are not necessarily required, but the structure in which the bearings 2 6, 27 of the rotor 21 through the exhaust port i are supported on one side by the casing is also possible. The driving mechanism of the 30 series of award-winning spiral rotors 21 and 22 includes a motor and a rotor shaft 23 connected to the male spiral rotor 21; and synchronous gears 32 and 2 are fixed to the rotor shafts 23 and 24, respectively. The synchronizing gears 32 and 33 are combined with each other. 2 The functions of the rotors 21 and 22 are formed in the transmission mechanism housing chamber 15 of the pump housing 11. In addition, J 7 won the cooling mechanism of the cooling rotors 21 and 22 on the mi3 side. The cooling mechanism 40 includes: cooling passage portions 41 and 42 (cooling passages), cooling rotors 21 and 22 passing through one end of the rotor shaft ^ 24 in the axial direction side, that is, the exhaust port 13 side, and the flange portion; the passage connection portion 43 , 44, each cooling channel 42 is connected to the external shaft; and the external cooling liquid supply and exhaust machine secret, by the passage connection portions 43, 44 are connected to the cooling passage portions 41, 42 to return in the rotor 2 1, 2 2 The cooling path circulates the coolant. '

~啦665 五、發明說明（6) 具體而言，形成在轉子軸23之冷卻通路部41，具有：向 轉子軸線方向延伸於排氣口 13側端部附近分別開口'之外侧 通路部41a及内側通路部41b，成為在轉子21内折返連接兩 通路部41a、41b之冷卻通路。又、同樣形成在轉子軸以之 冷卻通路部42，纟有：向轉子轴線方向延伸於排氣口⑴則 端部附近分別開口之外側通路部42a及内侧通路部42b，成 為在轉子22内折返連接兩通路部42a、42b之冷卻通路。 又、轉子轴23、24，形成轉子21、22内具有底面向軸方 向延伸之深孔23a、24a，在此等深孔23a、24a内設筒狀壁 部23b、24b，並在前述深孔23a、24a之底部與筒狀壁部 23b、2 4b之間折返連接冷卻通路部4 1、42之外側通路^ 41a、42a及内側通路部41b、42b。更又、冷卻通路部、 42之外側通路部41a、42a及内側通路部41b、42b，在向轉 子軸23、24之軸方向分離之所定位置，分別開口於轉子軸 23、24之外周面上。 通路連接部43、44 ’包含：各一對環狀側壁部23c、 23d、24c、24d ’夹冷卻通路部41、42兩端之上述開口設 在轉子軸23、24 ;各一對環狀密封構件51、52，夹各冷卻 通路部41或42與其兩端之各一對環狀侧壁部23c、23d、 24c或24d配置在此等轴方向兩侧；及多數彈菁（彈性構 件），將各環狀密封構件51或52壓在環狀侧壁部23c、 23d、24c、24d，更包含：接頭外殼部55，在轉子軸23周 圍收容環狀侧壁部23c、23d、環狀密封構件51及彈簧“全 部設在泵外殼；及接頭外殼部56 ’在轉子軸24周圍收容環~ 啦 665 V. Description of the invention (6) Specifically, the cooling passage portion 41 formed in the rotor shaft 23 has the outer passage portion 41a and the outer passage portion 41a extending in the vicinity of the end portion of the exhaust port 13 in the rotor axis direction and The inner passage portion 41b serves as a cooling passage that returns to and connects the two passage portions 41a and 41b in the rotor 21. The cooling passage portion 42 is also formed on the rotor shaft. The cooling passage portion 42 extends toward the exhaust axis in the rotor axis direction, and the outer passage portion 42a and the inner passage portion 42b are respectively opened near the end portions and are formed in the rotor 22. The cooling passage connecting the two passage portions 42a and 42b is folded back. In addition, the rotor shafts 23 and 24 form deep holes 23a and 24a in the rotors 21 and 22 with bottom surfaces extending in the axial direction, and cylindrical wall portions 23b and 24b are provided in the deep holes 23a and 24a. The bottoms of 23a and 24a and the cylindrical wall portions 23b and 24b are folded back to connect the outer passages 41a and 42a of the cooling passages 41 and 42 and the inner passages 41b and 42b. Furthermore, the cooling passage portions 42 and the outer passage portions 41a and 42a and the inner passage portions 41b and 42b are opened at predetermined positions separated from each other in the axial direction of the rotor shafts 23 and 24 on the outer peripheral surfaces of the rotor shafts 23 and 24, respectively. . The passage connecting portions 43 and 44 ′ include: each of a pair of annular side wall portions 23 c, 23 d, 24 c, and 24 d. The openings at both ends of the cooling passage portions 41 and 42 are provided on the rotor shafts 23 and 24; each pair of annular seals The members 51, 52, each of the cooling passage portions 41 or 42 and a pair of annular side wall portions 23c, 23d, 24c, or 24d at both ends thereof are arranged on both sides in this axial direction; and most of the elastic members (elastic members), Each ring-shaped seal member 51 or 52 is pressed against the ring-shaped side wall portions 23c, 23d, 24c, and 24d, and further includes a joint housing portion 55, which houses the ring-shaped side wall portions 23c, 23d, and the ring seal around the rotor shaft 23. The member 51 and the spring are all provided in the pump housing; and the joint housing portion 56 ′ receives a ring around the rotor shaft 24.

五、發明說明（7) 狀側壁部2 4 c、2 4 d、環狀密封構件5 2及彈簧5 3全部設在泵 外殼。又、環狀密封構件5 1、5 2，包含：附外周溝耐磨性 環51a、52a，分別滑接於環狀側壁部23c、23d、24ε、24d 之金屬或與此同等硬質材料製；及彈性密封環51b、52b， 裝在此等耐磨性環51a、52a外周溝之〇環等。又、57、58 係分別形成在各一對環狀側壁部23c、23d、24c、24d與接 頭外殼部55、56間之環狀通路，連通於冷卻通路部41或^ 兩端部。 ~ 冷卻機構4 0更包含：檢測泵外殼丨丨、轉子2丨、2 2及轉子 轴2 3、2 4中至少1個溫度之溫度感測器、例如圖3 ( a )或圖 3 ( b )所示溫度感測器6 1。該溫度感測器6丨係在排氣口丨3附 近檢測泵外殼1 1之溫度，依其檢測溫度經冷卻通路部4 1、’ 42供排由冷卻液供排機構45供排之冷卻液，於所定循 I 路使其循環。 & 如此構成之本實施形態之真空泵，以驅動機構3〇之 機31驅動公螺旋轉子21，藉傳動齒輪32、33同步驅動兩轉 子21、22時’此等前述多數螺旋狀流體移送室在前述吸 入侧之移送區間將容積增加至所定值產生吸氣作用， 述中間之移送區間以所定容積被移送，而在前述排出2 移送區間則減少容積產生排出作用。 ，此狀態，流體移送室在排氣口侧1 3逐步連續被開放於 大氣侧而排氣，惟因壓縮該排氣產生之熱、及洩漏從' 側經排氣口 1 3侵入泵外殼丨丨内之氣體再度被排出於大 之損失循環等，排氣口丨3側達相當之高溫。又、由於運轉5. Description of the invention (7) The side wall portions 2 4 c, 2 4 d, the ring-shaped sealing member 5 2 and the spring 5 3 are all provided in the pump casing. In addition, the annular sealing members 51 and 52 include: wear-resistant rings 51a and 52a with peripheral grooves, which are respectively slidably connected to the annular side wall portions 23c, 23d, 24ε, and 24d, or are made of the same hard material; And elastic sealing rings 51b, 52b, and the o-rings of the peripheral grooves of these wear-resistant rings 51a, 52a, etc. 57 and 58 are annular passages formed between the pair of annular side wall portions 23c, 23d, 24c, and 24d and the connector housing portions 55 and 56, respectively, and communicated with the cooling passage portion 41 or both end portions. ~ The cooling mechanism 40 further includes: a temperature sensor that detects at least one of the temperature of the pump casing 丨 丨, the rotor 2 丨, 2 2 and the rotor shaft 2 3, 2 4, such as FIG. 3 (a) or FIG. 3 (b ) Shown temperature sensor 6 1. The temperature sensor 6 丨 detects the temperature of the pump casing 1 1 near the exhaust port 3, and supplies and discharges the cooling liquid supplied and discharged by the cooling liquid supply and discharge mechanism 45 according to the detected temperature through the cooling passage part 41 and '42. ， I cycled at the given route. & The vacuum pump of this embodiment thus constructed drives the male spiral rotor 21 by the drive mechanism 31 and drives the two rotors 21 and 22 synchronously by the transmission gears 32 and 33. The aforementioned suction-side transfer interval increases the volume to a predetermined value to generate an inspiratory effect, the intermediate transfer interval is transferred at a predetermined volume, and the aforementioned discharge 2 transfer interval reduces the volume to generate a discharge effect. In this state, the fluid transfer chamber is continuously opened to the atmosphere side and exhausted on the exhaust port side 13 gradually, but the heat generated by the compression of the exhaust gas and the leakage enter the pump casing from the exhaust port 13 through the exhaust side. The gas inside 丨 is discharged again in a large loss cycle, etc., and the exhaust port 丨 3 side reaches a considerable temperature. Also, due to operation

五、發明說明（8) 在排氣Dl3附近成高真空狀態’致轉子轴 tb輕低，、W Mm泵外殼11不僅可放熱於外氣而 泵外殼u侧易^溫之螺旋轉子21、22側傳導至該 然而、本實施形離之吉处 ki U侧端部至轉子2 ，轉子軸23、24藉從排氣口 之冷卻通路部41、42 置進入轉子軸23、24内 齑口 1 3 t 4 i 實質上吸軋口 1 2並不被冷卻，僅排 、田产上昇ίΪΪί部。故、可將轉子21、22之排氣口 13侧 声範圍内’將轉子21、22整體上維持在 =:ίίΓ;ίΓ使大容量、胃速及高廢縮比亦不 易產生麂釔等，可長時間連續運轉之真空泵。 ，、以速運轉時’可減少轉子21、22之間或此盘果外 :古=度之間隙變動’故可得各部間隙'卜即氣密 性问、性忐良好之真空泵。 故、將此使用於真空排氣半導體製造裝置用真空室之設 備時，可將易積存因半導體製造氣體之反應產生之固形物 之泵吸氣側維持在固形物不易產生之所需溫 i，，rc)，一方面運轉控制轉子21、22與=〜如溫 =不致過大’無需頻繁實施大修，❿能長時間穩定繼續 排耽運轉。 更因本實施形態，在轉子轴23、24形成轉子21、22内方 具有底面向轉子軸方向延伸之深孔23a、24a ’並設置遊插 在此等孔内之筒狀壁部23b、24b，並在前述深孔23a、2“ 底部與筒狀壁部23b、24b之内端間折返連接冷 u、V. Description of the invention (8) A high vacuum state near the exhaust Dl3 'causes the rotor shaft tb to be low, and the W Mm pump casing 11 can not only radiate heat to the outside air but the pump casing u side is easy to warm the spiral rotors 21, 22 However, the side ends of this embodiment are connected to the rotor 2 and the rotor shafts 23 and 24 enter the rotor shafts 23 and 24 through the cooling passages 41 and 42 of the exhaust ports. 3 t 4 i In essence, the suction rolling port 1 2 is not cooled, only the row and field products are raised. Therefore, it is possible to maintain the rotors 21 and 22 as a whole within the sound range of the side of the exhaust port 13 of the rotors 21 and 22 =: ίίΓ; ΓΓ so that large-capacity, stomach speed, and high waste reduction ratio are not easy to produce yttrium, etc. Vacuum pump that can run continuously for a long time. ， When running at high speed ’can reduce the gap between the rotors 21 and 22 or the outside of the plate: the gap variation of the degree = degree, so you can get the gap of each part, that is, the vacuum pump with good air tightness and good performance. Therefore, when this equipment is used in a vacuum chamber for a vacuum exhaust semiconductor manufacturing device, the suction side of the pump, which easily accumulates solids generated by the reaction of semiconductor manufacturing gas, can be maintained at the required temperature i, which is not easily generated by solids. , Rc), on the one hand, the operation control rotors 21, 22 and = ~ such as temperature = not too large 'do not need to perform frequent overhaul, and can continue to run for a long time and stable. Furthermore, in the present embodiment, deep holes 23a, 24a 'are formed in the rotor shafts 23, 24 on the inside of the rotors 21, 22, and the cylindrical walls 23b, 24b are inserted in the holes, and the deep walls 23a, 24a' extend in the direction of the rotor shaft. And fold back the connection between the bottom of the aforementioned deep holes 23a, 2 "and the inner ends of the cylindrical wall portions 23b, 24b.

五明—(9) 攸嶋 ' '一一 之外侧通路部41 a、42a及内侧通路部41b、42b，故能以 $單構件容易形成内外折返之細長冷卻通路41、42，而可 滅低製造成本。 又、因將冷卻通路部41、42之外側通路部4la、42a及内 側通路部41b、42b向轉子軸23、24軸方向分開開口在轉子 轴23、24外周面上，並在轉子軸23、24與泵外殼11之間形 成連通於刖述開口之2個環狀液通路，故與轉子21、22之 旋轉無關，容易將冷卻通路部41、42連接於含外部之冷卻 液循環通路等之冷卻液供排機構45。 又、因設置檢測泵外殼11、轉子21、22及轉子軸23、24 ( ，中至少1種之度感測器6丨，並設置依其檢測溫度將冷 部液供排於冷卻通路部4 1、42内之供排機構45，故能於 氣口13侧更有效冷卻轉子21、22、轉子轴㈡、24 承徘 26、27等。 取 【發明之效果】 依本申凊之發明，因轉子軸藉從排氣口側端部至轉 方折返位置進入轉子輛内之冷卻通路，僅排氣 内 ，’故：可，能抑制轉子之排氣卩側溫度上昇有，破 大谷量、咼速及咼壓縮比亦不易產生燒結：使 又、採用將筒狀壁部插 以簡單構件容易構成内外折 構1^ ’即能 製造成本。 卜折返之細長冷卻通路，而可減低Wuming— (9) You 嶋 '' One outside passage sections 41a, 42a and inside passage sections 41b, 42b, so it is easy to form a slender cooling passage 41, 42 with inner and outer turns back with a single member, and it can be destroyed. manufacturing cost. In addition, the outer passage portions 41a, 42a and the inner passage portions 41b, 42b of the cooling passage portions 41, 42 are opened to the rotor shafts 23, 24 in the direction of the rotor shafts 23, 24, and are opened on the outer peripheral surfaces of the rotor shafts 23, 24. Two annular fluid passages are formed between the pump casing 11 and the pump housing 11 so as to communicate with the openings described above. Therefore, it is easy to connect the cooling passage portions 41 and 42 to external coolant circulation passages regardless of the rotation of the rotors 21 and 22. Cooling liquid supply and exhaust mechanism 45. In addition, since the pump casing 11, the rotors 21, 22, and the rotor shafts 23, 24 (, at least one of the degree sensors 6) are provided, and the cold liquid is supplied and discharged to the cooling passage portion 4 according to the detection temperature thereof. The supply and exhaust mechanism 45 in 1, 42 can more effectively cool the rotors 21, 22, rotor shafts, 24 bearing 26, 27, etc. on the side of port 13. Take the effect of the invention according to the invention of this application, because The rotor shaft enters the cooling passage in the rotor vehicle from the end of the exhaust port side to the turning-back position, only inside the exhaust gas, so 'Yes: Yes, it is possible to suppress the temperature rise on the exhaust side of the rotor. The speed and compression ratio are not easy to sinter: so that the cylindrical wall portion can be easily inserted into the inner and outer folding structure by inserting a simple component, that is, the manufacturing cost can be reduced. The slender cooling path of the return can reduce the cost.

更因藉轉子軸與外殼間之2個環狀液通路連 子轴外周面之冷卻通路’即與轉子之旋轉無關開容口在轉^ =通路連接於外部之冷卻液循環通路等，並因設置檢測夕; 殼 轉子及轉子軸之中至少1種之溫度感測器，並依其檢 測溫度將冷卻液供排於冷卻通路，即可更有效冷卻轉子軸 及軸承等。 【圖式之簡單說明】 圖1係依照本發明之真空泵之一實施形態斷面圖。 圖2係圖1之真空泵之要部斷面圖。 圖3係圖1之真空泵所裝溫度感測器之裝置狀態圖，（a) 係檢測轉子軸外周面溫度之情形，（b )係檢測外殼溫度之 情形。 圖號說明 10 ·.. 11·.. 12 ·.. 13 · · · 14 · · · 21 · · · 22 · · · 23 、 24 . 2 3a、24a 螺旋泵（真空泵） 泵外殼（外殼）（H〇using) 吸氣α 排氣〇 轉子（Rotor)收容室 公螺旋轉子（轉子） 母螺旋轉子（轉子） • •轉子軸 • ••深孔 23b 、 24b · 26 >27 '28 •筒狀壁部 29 · · ·軸承The reason is that the two cooling fluid passages between the rotor shaft and the casing are connected to the cooling path of the outer peripheral surface of the sub-shaft, that is, the opening of the volume is independent of the rotation of the rotor. ^ = The passage is connected to the external coolant circulation passage, etc. Set detection temperature; at least one kind of temperature sensor in the shell rotor and the rotor shaft, and supply the cooling liquid to the cooling passage according to the detection temperature, so that the rotor shaft and bearings can be cooled more effectively. [Brief description of the drawings] FIG. 1 is a sectional view of an embodiment of a vacuum pump according to the present invention. FIG. 2 is a sectional view of a main part of the vacuum pump of FIG. 1. FIG. Fig. 3 is a device state diagram of the temperature sensor installed in the vacuum pump of Fig. 1, (a) is a case of detecting the outer peripheral surface temperature of the rotor shaft, and (b) is a case of detecting a case temperature. Description of the drawing number H〇using) Intake α Exhaust 〇 Rotor (Rotor) accommodation chamber Male spiral rotor (rotor) Female spiral rotor (rotor) • • Rotor shaft • • • Deep holes 23b, 24b · 26 > 27 '28 • Cylinder Wall 29 · · · Bearing

402665 五、發明說明（11) 30 · · ·驅動機構 31 · · ·電動機 32、33· .•同步齒輪 4 0 · · ·冷卻機構 41、42 ···冷卻通路部（冷卻通路） 4 1 a、4 2 a . ·.外側通路部 4 1 b、4 2 b · · ·内侧通路部 43、44 · ••通路連接部 4 5 ···冷卻液供排機構402665 V. Description of the invention (11) 30 · · · Drive mechanism 31 · · · Motor 32, 33 · · · Synchronous gear 4 0 · · · Cooling mechanism 41, 42 ··· Cooling passage section (cooling passage) 4 1 a · 4 2 a · · Outer passages 4 1 b, 4 2 b · · · Inner passages 43, 44 · · · Connections 4 5 · · Coolant supply and discharge mechanism

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Claims (1)

-- 1. 一種真空泵，包含： 外殼，具有吸氣口及排氣口、内部形成轉子收容 室； 轉子轴’在吸氣口側及排氣口側兩邊被支持在外殼 或在排氣口侧早邊被支持在外殼；及 轉子’在前述轉子收容室内與該轉子軸—體旋轉、 從前述吸氣口將壓縮性流體吸入轉子收容室並壓縮該流體 從排氣口排出， 並在該外殼與前述轉子之間，形成由前述轉子之旋 轉向刖述轉子之軸線方向一方側移送之流體移送室之空 泵，其特徵為： 一十' ϋ在姑月』士述轉子軸形成具有延伸至前述轉子轴内部在 3 1 ^向一方侧分別開口之外側通路部及内侧通路 路]s刚述_子内方折返連4兩通路部而成之冷卻通 2.如申研專利範圍第1項之真空泵，其 形成前述轉子内異右在二丄斗其中在則述轉子袖 並設置遊插/·兮經I 向ι轉子軸軸方向延伸之深孔， 置*遊插在該轉子軸深孔内之筒狀壁部， 述冷卻通路Μ &壁部之間折返連接前 |通路之外侧通路部及内側通路部。 •如申請專利範圍第ljg之直处石 路之外侧its h /二泵，其中將前述冷卻通 …轉；：：；：：通；轉子軸轴方向分開開 形成連通於該開口之2個二刖通迷路轉子抽與前述外殼之間-1. A vacuum pump, comprising: a housing having an intake port and an exhaust port, and a rotor receiving chamber is formed inside the rotor shaft; the rotor shaft is supported on the casing or the exhaust port side on both sides of the intake port and the exhaust port side; The rotor is supported on the casing at an early stage; and the rotor is rotated with the rotor shaft in the rotor accommodating chamber, draws a compressive fluid into the rotor accommodating chamber from the suction port, and compresses the fluid to be discharged from the exhaust port. An air pump is formed between the rotor and the rotor to move the fluid to the side of the axial direction of the rotor. The air pump is characterized by: "Ten ten years old" The shaft of the rotor is extended to The inside of the aforementioned rotor shaft is opened at the outer side and the inner passageway at 3 1 ^ to one side, respectively] s just described _ the cooling passage formed by the two inner passages that are folded back into the two passages. 2. As mentioned in the first patent application scope A vacuum pump is formed in the rotor, and the rotor is sleeved in the rotor, and a deep hole extending in the direction of the rotor shaft axis is provided. The deep hole is inserted in the rotor shaft. Inner tubular wall Said cooling passage Μ & folded between the front wall portion connected | passage portion of the outer path and the inner passage portion. • If the patent application scope is ljg, its h / two pumps outside the straight stone road, where the aforementioned cooling passage is turned ::; :: pass; the rotor shaft axis direction is separated to form two two communicating with the opening.刖 Between the labyrinth of the lost rotor and the aforementioned casing 第15頁 六 :申III颜5 4.如申請專利範圍第1、2或3項之真空泵，其中設置檢 測前述外殼、轉子及轉子軸之中至少1種之溫度感測器， 並設置依該溫度感測器之檢測溫度將冷卻液供排於前述冷 卻通路内之供排機構。Page 15 VI: Shen III Yan 5 4. If the vacuum pump of the scope of patent application No. 1, 2 or 3, which is provided with a temperature sensor that detects at least one of the aforementioned casing, rotor and rotor shaft, and the corresponding The detection temperature of the temperature sensor supplies and discharges the cooling liquid to the supply and discharge mechanism in the cooling passage. 第16頁Page 16