TW396256B - Modular surface mount manifold assemblies - Google Patents

Abstract

A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communicating with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may be mounted within a channel of a backing plate for structural support. An optional locator plate may be utilized which is mounted within a channel of a backing plate for structural support. An optional locator plate may be utilized which is mounted over the ends of the bridge fittings in order to align the inlet and outlet ports of the fluid components with the inlet and outlet ends of the bridge fittings. The bridge fittings may also be mounted to the locator plate in multiple layers where bridge fittings of one layer may be in fluid communication with bridge fittings of another layer. The invention may further comprise seals provided in a recess between the fluid ports and the mating bridge fittings ends.

Description

A7 五 經濟部智慧財產局員工消費合作社印製 、發明說明（[) 本發明大體上係相關於一種用於流體系統之歧管，本 發明尤其相關於一種用於高純度流體系統以及腐飩性流體 系統之模組化氣體分布系統，其中該系統例如是用於製造 半導體晶圓之無塵室環境。 發明背暑 本申請案係要求1 9 9 8年3月5日所提出申請之美 國臨時申請案第6 0/07 6，8 71號、19 9 8年5 月1 8日所提出申請之美國臨時申請案第6 〇/〇 8 5 ’ 8 1 7號、以及1 9 9 8年9月2 9日所提出申請之美國 臨時申請案第60/102，277號之利益。 爲了要製造半導體’產業界係使用許多不同的高純度 氣體。這些氣體係藉由一種系統所控制，該系統係包括有 藉由焊接與高純度金屬密封零件而連接在一起之高純度閥 體、調節器、壓力傳感器、質量流量控制器、以及其他部 件。在許多的應用中’這些連接係非吾人所期望者，這是 因爲這些連接係增加了用於焊接操作之額外時間與成本、 在部件之間非必要的空間、並且使得在其他部件之間替換 一個部件變得相當困難。此外，這些系統典型地係爲依照 顧客需求所設計及製造者，而這係使得製造成本以及替換 零件之採購變得相當昂貴。 爲了要克服這些問題，新穎的模組化歧管系統在最近 係已被引進產業界中。這些系統中例如是閥體、壓力調節 表紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） (請先閱讀背面之注意事項再填寫本頁) · 線； B7 五、發明說明（7 ) 經濟部智慧財產局員Η消費合作杜印製 器、以及其他典型流體部件等等的典型部件係已被重新構 型，以使其進口埠與出口埠以及連結機構能夠與表面裝設 歧管相容。這些歧管典型地係爲油模組化區段所構成者， 這些區段係以高純度金屬加工，並且具有已加工之內部流 軌通道。這些習知技術中的模組化系統係典型地利用一種 在諸部件與一模組化區塊表面之間的金屬密封件，用以確 保近乎不會洩漏之密封完整性。此種系統之一個目的係爲 使用已工業標準爲基礎之表面裝設標準構型，用以容許表 面裝設部件之互換性。習知技術中這種類型之模組化系統 所具有的缺點是，整個模組化區段係爲由高純度金屬所製 成。因此，金錢與天然資源係被無效率地利用。此外，由 於在一個單一區段上加工多通道的複雜性，這些區段部件 係具有相當高的製造成本，並且由於製造上的複雜性，這 些區段部件亦具有形成昂貴殘餘材料之較高風險。再者， 相配的區段係需要在區段間使用相配的密封件’而此係需 要額外的製造時間，並且爲了確保緊密的密封’相配的區 段更需要訂元件之適當安裝與閉合轉矩。 發明槪要 因此，吾人係期望能夠提供一種模組化歧管設計，其 係能夠消除在模組化相配區段之間的密封件’顯著地降低 所利用昂貴之材料量，並且造成一種在製造上較簡單且較 便宜的系統，並在同時提供一種縮減的系統軌跡或輪廓’ 而能夠符合或是超越現存系統之效能、完整性、以及可靠 5 (請先閱讀背面之注意事項再填寫本頁) 訂_ 線； —F;:E~r.....ij.; 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 A7 _____^_Έ7___ 五、發明說明（4) 性。 本發明在第一個方面係提供了一種橋接零件，其係使 用於流體歧管系統中，用以與兩個或是更多個例如是閥體 、調節器、壓力傳感器、質量流量控制器、以及相似部件 等等之流體部件以流體相連通。該橋接零件係包括有一個 第一肘管零件，該第一軸管零件係被連接至一個第二肘管 零件，而所連接之肘管零件係具有一個流經其間之內部流 體通道。該橋接零件之內部通道係具有一個進口端部以及 一個出口端部，而該橋接元件之進口端部係與該第一流體 部件之一個出口埠以流體相連通，並且該橋接元件之出口 端部則係與一個第二流體部件之一個進口埠以流體相連通 〇 本發明在另一方面係提供了一種橋接零件，其係使用 於流體歧管系統中，用以與三個或是更多個流體部件以流 體相連通，其中一個或是更多個該流體部件係具有一個單 一埠。該橋接零件係具有一個第一與第二肘管零件，而這 兩個零件則個別有一個端部連接至一T形零件。該T形零 件係座落在諸肘管零件之間，而每一個肘管零件與該T形 零件係具有一個使其彼此以流體相連通之內部流體通道。 該零件之內部通道係具有一個進口端部以及一個第一與第 二出口端部，而該進口端部係與該第一流體部件之一個出 口埠以流體相連通，並且該流體通道之諸出口端部則係分 別與一個第二與第三流體部件之一個進口端部以流體相連 通。 6 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁)A7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs of the People ’s Republic of China. ([) The present invention is generally related to a manifold for fluid systems. The present invention is particularly related to a high-purity fluid system and corrosive A modular gas distribution system for a fluid system, where the system is, for example, a clean room environment for manufacturing semiconductor wafers. This application is based on the United States Provisional Application No. 6 0/07 6, 8 71 filed on March 5, 198, and the United States filed on May 18, 1998. Benefits of Provisional Application No. 60 / 0085'8 17 and U.S. Provisional Application No. 60 / 102,277, filed on September 29, 1998. To manufacture semiconductors, the industry uses many different high-purity gases. These gas systems are controlled by a system that includes high-purity valve bodies, regulators, pressure sensors, mass flow controllers, and other components connected together by welding and high-purity metal sealing parts. In many applications' these connections are not what we expect because they add extra time and cost to the welding operation, unnecessary space between components, and allow replacement between other components One component becomes quite difficult. In addition, these systems are typically designed and manufactured according to customer requirements, which makes manufacturing costs and the purchase of replacement parts quite expensive. To overcome these problems, novel modular manifold systems have recently been introduced into the industry. In these systems, for example, the valve body and the pressure adjustment gauge are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 public love) (please read the precautions on the back before filling this page) · Line; B7 V. Description of the invention (7) The typical components of the consumer cooperation du printed device, and other typical fluid components, etc., of the Intellectual Property Bureau of the Ministry of Economic Affairs have been restructured so that the inlet and outlet ports and the connection mechanism can be installed on the surface. Tube compatible. These manifolds are typically composed of oil modularized sections that are machined from high-purity metal and have machined internal flow channels. Modular systems in these conventional technologies typically utilize a metal seal between the components and the surface of a modular block to ensure seal integrity that is nearly non-leakable. One purpose of such a system is to use industry-standard surface mount standard configurations to allow interchangeability of surface mount components. A disadvantage of this type of modular system in the prior art is that the entire modular section is made of high-purity metal. Therefore, money and natural resources are inefficiently used. In addition, due to the complexity of processing multiple channels on a single section, these section components have a relatively high manufacturing cost, and due to the manufacturing complexity, these section components also have a higher risk of forming expensive residual materials . Furthermore, the matching sections require the use of matching seals between the sections, and this system requires additional manufacturing time, and in order to ensure a tight seal, the matching sections require the proper installation and closing torque of the components. . Therefore, we hope to provide a modular manifold design, which can eliminate the seals between the modular matching sections, 'significantly reduce the amount of expensive materials used, and create a kind of manufacturing Simpler and cheaper systems, and at the same time provide a reduced system trajectory or profile 'that can meet or exceed the performance, integrity, and reliability of existing systems 5 (Please read the precautions on the back before filling out this page ) Order line; —F;: E ~ r ..... ij .; This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 _____ ^ _ Έ7 ___ V. Description of the Invention (4) Nature. In a first aspect, the present invention provides a bridging part, which is used in a fluid manifold system to communicate with two or more such as a valve body, a regulator, a pressure sensor, a mass flow controller, And the fluid components of similar components and so on are in fluid communication. The bridge part includes a first elbow tube part, the first shaft tube part is connected to a second elbow tube part, and the connected elbow tube part has an internal fluid passageway passing therethrough. The internal passage of the bridge component has an inlet end and an outlet end, and the inlet end of the bridge element is in fluid communication with an outlet port of the first fluid component, and the outlet end of the bridge element It is in fluid communication with an inlet port of a second fluid component. The present invention, on the other hand, provides a bridging part, which is used in a fluid manifold system to communicate with three or more The fluid components are in fluid communication, and one or more of the fluid components have a single port. The bridge part has a first and a second elbow part, and the two parts each have an end connected to a T-shaped part. The T-shaped part is located between the elbow tube parts, and each elbow tube part and the T-shaped part have an internal fluid passage for fluid communication with each other. The internal passage of the part has an inlet end and a first and a second outlet end, and the inlet end is in fluid communication with an outlet port of the first fluid component, and the outlets of the fluid passage The ends are in fluid communication with an inlet end of a second and third fluid component, respectively. 6 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page)

A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（中） 本發明在另一方面係提供了一種模組化流體歧管系統 ’其係用於連接一個或是多個表面裝設類型而具有一個進 口埠與一個出口璋之流體部件，該模組化系統係包括有： 一個或是多個橋接零件，其係具有一個流經其間之內部流 體通道；該橋接零件之內部通道係具有一個進口端部，其 係用於連接至該第一流體部件之一個出口埠，該橋接零件 之內部通道並具有一個出口端部，其係用於連接至該第二 流體部件之一個進口埠，因此，當系統係被組合時，該橋 接零件之內部通道係與該第一及第二流體部件以流體相連 通。 最後，本發明係提供了一種模組化流體歧管系統，其 係用於連接一個或是多個流體部件，該流體部件係包括有 一個進口埠以及一個或是多個出口埠。該歧管系統係包括 有一個或是多個橋接零件，其係具有一個進口端部以及一 個出口端部以及一個連接該端部之內部通道。該系統更包 括有一個定位板，其係具有一個用於將該流體部件裝設於 其上之上方表面，以及複數個與該流體部件之該進口及出 口埠對準之穿孔。該定位板係具有一個用於裝設該橋接零 件之下方表面。每一個橋接零件之進口端部係與一個流體 部件之一個出口埠以流體相連通，並且每一個橋接零件之 出口端部係與另一個流體部件之一個進口埠以流體相連通 0 本發明的這些及其他特點與優點將在詳細的說明書與 申請專利範圍中，並連同伴隨之圖示而將變得更明顯。 7 (請先閱讀背面之注意事項再填寫本頁) --線 -lui'-'l I: 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 B7 五、發明說明（< ) 圖示簡單說明 本發明在未指明之部件與部件之配置上係可以採用自 然的形式，本發明之一個較佳實施例將在此說明書中詳細 的敘述，並且在形成說明書一部份之伴隨圖示中舉例說明 ’其中該圖不係爲· 第一圖係爲一個完整歧管組件之立體圖’其係以合倂 有本發明特點之代表性部件以及密封件所顯示； 第二圖係爲一個歧管組件之分解立體圖’而合倂有本 發明特點之代表性部件以及密封件係爲如同第一圖中所顯 示者； 第三圖係爲第二圖中歧管之一部份的分解立體圖’其 係顯示了一個完整的氣體橋接部’該氣體橋接部係座落在 兩個部分說明之氣體橋接部之間’並且顯示了一個選配的 代表性密封件； 第三A圖係爲第二圖中已組合歧管部分的截面圖； 第三B圖另一個氣體橋接部之截面圖，該氣體橋接部 除了在第三圖以及第三A圖所說明之完整氣體橋接部8中 的兩個肘管及管件部分之外，該氣體橋接部係合倂有一個 T形零件以及一個額外的管件部分； 第四圖係爲本發明另一個歧管系統之立體圖’其係合 倂有在不同方向上延伸之多流動路徑； 第五圖係爲合倂有本發明特點之歧管組件的另一個實 施例的分解立體圖； 第五A圖至第五C圖係爲本發明之彈簧夾的立體圖； 8 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------------- 部"·-1- (請先閱讀背面之注意事項再填寫本頁) ----訂---------線 經濟部智慧財產局員工消費合作社印製 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（t) 第六圖係爲顯示在第五圖中該組件之所選擇部件的分 解縱向截面圖； 第七圖係爲包含有多流體路徑之一個更複雜流體系統 的平面圖； 第八圖係爲第一圖中歧管組件之另一個實施例的立體 圖，其係使用複數個流體通道及交叉淨化特點； 第九圖及第九A圖係爲兩個歧管基板以及一個交叉淨 化通道之立體圖； 第十A圖至第十D圖係說明了兩個末端朝前連接基板 之組合的不同階段，而第十D圖係爲截面圖； 第十一A圖以及第十一B圖係說明了用於連接基板的 另一個實施例，該基板係被使用在例如是第八圖中之歧管 組件中； 第十二A圖以及第十二B圖係說明了一個其中裝設有 一單向閥體之基板； 第十三圖係爲本發明歧管組件之另一個實施例； 第十四A圖係爲第十三圖中本發明之立體圖，其中流 勤元件係從該歧管組件移除； 第十四B圖係爲第十四A圖中本發明之俯視圖； 第十五A圖、第十五B圖、以及第十五C圖係分別說 明了流動橋接部之另一個實施例的立體圖、俯視圖、以及 側視圖， 第十六A圖至第十六C圖係分別說明了一個下落流動 橋接部之立體圖、俯視圖、以及側視圖； 9 -------------i (請先閱讀背面之注意事頊再填寫本頁) ----訂---------線 義A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (middle) The invention on the other hand provides a modular fluid manifold system which is used to connect one or more surface installations Type fluid components with one inlet port and one outlet, the modular system includes: one or more bridge parts, which have an internal fluid channel flowing between them; the internal channel system of the bridge part Has an inlet end for connecting to an outlet port of the first fluid component, the internal passage of the bridge part and an outlet end for connecting to an inlet port of the second fluid component Therefore, when the system is combined, the internal passage of the bridge part is in fluid communication with the first and second fluid components. Finally, the present invention provides a modular fluid manifold system for connecting one or more fluid components. The fluid component includes an inlet port and one or more outlet ports. The manifold system includes one or more bridge parts having an inlet end and an outlet end and an internal passage connected to the end. The system further includes a positioning plate having an upper surface for mounting the fluid component thereon, and a plurality of perforations aligned with the inlet and outlet ports of the fluid component. The positioning plate has a lower surface for mounting the bridge part. The inlet end of each bridge part is in fluid communication with an outlet port of a fluid part, and the outlet end of each bridge part is in fluid communication with an inlet port of another fluid part. And other features and advantages will become more apparent in the detailed description and patent application scope, together with the accompanying drawings. 7 (Please read the precautions on the back before filling this page) --line-lui '-' l I: This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) A7 B7 V. Description of the invention (&) The diagrams simply illustrate that the present invention can take a natural form on unspecified parts and the arrangement of the parts. A preferred embodiment of the present invention will be described in detail in this specification, and will be formed in the first part of the specification. The accompanying illustrations of the examples illustrate 'where the drawing is not. · The first drawing is a perspective view of a complete manifold assembly.' It is shown by combining representative components and seals with the characteristics of the present invention. The figure is an exploded perspective view of a manifold assembly, and the representative components and seals incorporating the features of the present invention are as shown in the first figure; the third figure is a part of the manifold in the second figure An exploded perspective view 'shows a complete gas bridge' the gas bridge is located between the two described gas bridges' and shows an optional representative seal; third A The picture is A sectional view of the combined manifold part in the second figure; a sectional view of another gas bridging part in FIG. 3B, except for two of the complete gas bridging part 8 described in the third and third A figures. In addition to the elbow and pipe parts, the gas bridging system has a T-shaped part and an additional pipe part. The fourth figure is a perspective view of another manifold system according to the present invention. Multiple flow paths extending in the direction; The fifth diagram is an exploded perspective view of another embodiment of a manifold assembly incorporating the characteristics of the present invention; the fifth diagram A to the fifth C are perspective views of the spring clip of the present invention ; 8 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------------- Ministry " · -1- (Please read the precautions on the back before (Fill in this page) ---- Order --------- Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 Printed by the Employees’ Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The figure is an exploded longitudinal sectional view showing selected components of the assembly shown in the fifth figure; The seventh diagram is a plan view of a more complex fluid system containing multiple fluid paths. The eighth diagram is a perspective view of another embodiment of the manifold assembly in the first diagram, which uses a plurality of fluid channels and cross-purification features. Figures 9 and 9A are perspective views of two manifold substrates and a cross-purification channel; Figures 10A to 10D illustrate different stages of the combination of two end-to-front connection substrates, and The tenth D diagram is a cross-sectional view; the eleventh A diagram and the eleventh B diagram illustrate another embodiment for connecting a substrate used in, for example, a manifold assembly in the eighth diagram Figures 12A and 12B illustrate a base plate in which a one-way valve body is installed; Figure 13 is another embodiment of the manifold assembly of the present invention; Figure 14A It is a perspective view of the present invention in the thirteenth figure, wherein the flow component is removed from the manifold assembly; FIG. Fourteenth B is a top view of the present invention in the fourteenth A; the fifteenth A, the tenth Figures 5B and 15C illustrate the flow bridge, respectively. A perspective view, a top view, and a side view of another embodiment of this part. Figures 16A to 16C respectively illustrate a perspective view, a top view, and a side view of a falling flow bridge; 9 ----- -------- i (Please read the notes on the back 顼 before filling out this page) ---- Order --------- Line Meaning

:-s-:M 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 A7 _；_B7___ 五、發明說明（q ) 第十七圖係爲第十四B圖中本發明沿著1 7 — 1 7方 向上所截之截面圖； 第十八圖係爲第十四B圖中本發明沿著18-18方 向上所截之截面圖； 第十九圖係爲第十四B圖中本發明沿著1 9 - 1 9方 向上所截之截面圖； 第二十A圖、第二十B圖、以及第二十C圖係分別爲 流動橋接部之另一個實施例的立體圖、俯視圖、以及側視 圖，. 第二十一圖係說明了一個已不同尺寸所顯示之歧管焊 件的立體圖； 第二十二A圖以及第二十二B圖係搓明了一個密封保 持器之立體圖及側視圖，而第二十二C圖則係說明了與一 個下落流動橋接部一起使用之第二十二A圖與第二十二B 圖中的密封保持器； 第二十三A圖以及第二十三B圖係說明了一個密封保 持器之另一個實施例的立體圖及側視圖； 第二十四A圖以及第二十四B圖係說明了一個密封保 持器之再一個實施例的立體圖及側視圖； 第二十五A圖以及第二十五B圖係分別說明了之基板 歧管之另一個賓施例的俯視圖與立體圖，該基板歧管係具 有扁平裝設凸緣； 第二十六圖係顯示了以保持器捆札之歧管組件的立體 圖， 10 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 訂---- 線 A7 B7 五、發明說明（彡） 第二十七A圖係爲第二十六圖中的歧管組件在2 7 A —2 7 A方向上的側視圖； 第二十七B圖至第二十七D圖係爲上方及下方基板之 側視圖，其係顯示了較低基板高度的另一個實施例； 第二十八圖上方及下方基板高度之另一個實施例的立 體圖； 第二十九A圖以及第二十九B圖係分別說明了一個已 加熱歧管組件之預負載與負載狀況；以及 第三十A圖以及第三十B圖係顯示了上方基板高度之 另一個實施例的截面圖。 較佳實施例詳細說明 現在來參照圖示，其中圖示係僅爲了說明本發明較佳 實施例的目的，而非用以限制本發明，一個獨特的歧管系 統係被顯示在第一圖至第三十圖中。如同在圖示中所顯示 並說明之本發明係爲相當有用的，例如是作爲一種用於半 導體裝置製造之高純度模組化氣體分布系統的一部份，或 者是用於必須承受腐蝕性流體之其他流體系統的一部份。 本發明並未受限於使用在高純度流體系統中，並且在相關 於流體流動控制之任何應用中可能是相當有用的。 現在參照圖示，尤其是參照第一圖，所顯示之一個模 組化流體歧管系統1 0係經由例如是閥體1 2、流量調節 器1 3、過濾器1 4、以及其他相似部件等流體流動控制 部件而被組合在一起。流體部件係可以連同本發明來使用 11 n n H ϋ ϋ 1 ^ n I n n 1 -Λ-> l I V," (請先間讀背面之注意事項再先寫本頁) . 線： 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 B7 五、發明說明（y) ，但並非本發明的一部份。流體部件1 2 — 1 4較好係爲 表面裝設類型之部件，並且每一個部件係具有一個進口埠 1 6，並且係可以另外地包括有一個或是多個出口埠1 8 ，如同在第三A圖中所顯示者，這些埠係允許以流體連通 至流體部件。流體部件之一連串的固定件係穿過在流體部 件之基底凸緣2 6中的開口 2 4，用以將該部件固定至該 模組化歧管系統1 0。 經濟部智慧財產局員工消費合作社印製 本發明之模組化歧管系統10係可以包括有一個或是 多個橋接零件5 0、一個選配的定位板3 0、一個選配的 墊板4 0、選配的端部零件4 5、以及選配的密封元件6 0。這些元件將在下文中做更詳細的敘述。如同在第三圖 中所顯示者，該橋接零件5 〇係可以爲兩個肘管零件5 2 的形式，所顯示之該軸管零件係藉由一個選配的扁平延伸 部5 4而連接，該選配的扁平延伸部係藉由例如是焊接等 傳統方式而連接至該肘管零件5 2的個別端部。該肘管零 件5 2係具有一個內部流體通道5 6，該內部流體通道係 具有一個進口端部5 8以及出口端部6 2、6 4，而該進 口端部5 8係具有一個相對於該出口端部6 2、6 4的9 0度的方向。該選配的扁平延伸部5 4係具有一個內部流 體通道，該內部流體通道係與兩個相鄰之肘管零件5 2之 鄰接流體通道相連接，以使得一個U形的流體通道係被形 成在該橋接零件5 0之內部之中，而該U形的流體通道則 係具有一個進口端部6 2以及一個出口端部6 4。 如同在第三A圖中所顯示者，該橋接零件5 0之進口 _______ 12 本紙張尺度適用中國國豕標準（CNS)A4規格（210 X 297公爱) A7 五、發明說明（\^) 經濟部智慧財產局員工消費合作社印製 端部6 2彳系與-個流體部件丨2之個別出日開口 i 8以流 體相連通，迎該_零件$ 〇之出口端部 6 4則係與相 鄰流體部件1 3之進□埠1 6以流體相麵。_，該橋 接零件5 0係_-個、、购〃般地作用，用以使流體在 相鄰之流體部件（例如1 2、丨3 )之_送，而在相鄰 橋接零件5 0之間係不需要金屬密封件，而金屬密封件在 習知技術中相鄰模組區塊間的配合係爲所必須者 。較佳的 情況是，該橋接零件5 0係爲由例如是3 i 6或s c Q之 不銹鋼所構成者，或者可以由其他適合連同半導體處理流 體一起使用的材料所構成。再者，該橋接零件5 〇係爲一 種縮小的尺寸，以使得昂塊材料量係可以被最小化。然而 ，對於典型的工業應用而言，例如是塑膠或是金屬等等任 何適合的材料將可以在本發明中使用。 如同在第一圖中所顯示者，該模組化系統1 〇亦可以 包括有端部零件4 5，其係包括有一個連接至一個標準零 件4 6之9 0度的內部流體通道，其中標準零件係例如是 一個V C R類型的零件或是其他用於與一流體管線連接適 合的零件。該端部零件4 5係可以被利用作爲一個進口零 件或是一個出口零件，而與該流體管線（並未顯示）相配 合。因此，該肘管零件之出口或進口端部係被連接至一個 流體部件之個別進口或是出口端部。較佳的情況是，該端 部零件4 5係爲由例如是3 1 6或S C Q之不銹鋼所構成 者，或者可以由其他適合連同半導體處理流體一起使用的 材料所構成。對於典型的工業應用而言，該端部零件4 5 13 (請先閱讀背面之注意事項再填寫本頁) --線 #: ii 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） A7 B7 五、發明說明（U) 係可以由例如是塑膠或是金屬等等任何適合的材料所構成 〇 本發明之模組化歧管系統1〇係可以選擇地更包括有 一個墊板4 0。該墊板4 0係可以包括有一個平板，但是 該平板在較好的情況下是具有一個內部的溝槽或通道4 2 ’用於將複數個橋接零件5 0以及端部零件4 5容置並固 定於其中。該橋接零件50之每一個肘管零件52以及該 端部零件4 5係具有一個精確尺寸之外部造型主體，其係 與該溝槽或通道4 2的形狀相配合，用以防止該橋接零件 5 0在該通道4 2之中旋轉。較佳但非必要的情況是，該 肘管零件5 2之外部形狀係爲矩形或是方形者。亦爲較佳 的情況是，形成該通道4 2之內部側壁4 4係具有適當的 尺寸，用以緊密地容置一個方形造型的主體，或者兩個相 對的側壁係具有一個適當的尺寸，用以容置一個矩形造型 的主體。本發明並未受限於上文中所提及之形狀，相對於 該肘管零件5 2之造型主體的任何互補造型之通道係可以 爲本發明所使用。該墊板4 0係可以由例如是金屬或是金 屬塡料合成物等等適當材料所構成，但是較好的情況係爲 由一種低成本、輕量化材料所製成，例如是鋁。 在本發明的一個實施例中（並未顯示），該通道4 2 係具有一個充足的深度，以致於該橋接零件5 0以及該端 部零件4 5能夠完全地容置在該通道4 2之中，而使得一 個凹部係被形成（並未顯示）而將一個密封件6 0容置在 該橋接零件5 0之進口埠6 2及出口埠6 4與相對的通道 14 私紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ^ ..κΰ (請先閱讀背面之注意事項再填寫本頁) 訂· ,線· 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（（>) 內部側壁4 4之間。爲了組合此一實施例中的系統，該橋 接零件5 0係被***該墊板4 0之通道4 2之中，以使得 該橋接零件5 〇係被分隔開而在相鄰的嚼零件5 〇之間具 有最小的間隙。接著，該流體部件1 2 - 1 4之進口埠與 出口埠6 2、6 4係仔細地對準相關橋接零件5 〇之個別 出口埠與進口埠1 8、1 6。舉例來說，一個第一橋接零 件5 0之一個進口端部係被對準而能夠與一個第一流體部 件之一個出口以流體相連通。接下來，該橋接零件5 〇之 —個出口端部係對準一個第二流體部件之進口，其中該第 二流體部件係與該第一流體部件相毗鄰。在進口埠與出口 埠係被仔細地對準之後，固定件2 2係被***穿過該流體 部件之凸緣2 6上的穿孔2 4，並且進入該墊板4 0之相 配穿孔（並未顯示），以使得該流體部件係能夠被固定至 該墊板4 0。 較佳的情況是，該歧管系統1 0更包括有密封件6 0 ，該密封件係被容置在該橋接零件5 0之相配進口埠/出 口埠與該流體部件之間。該密封件6 0係可以由例如是彈 性體、塑膠、橡膠、或是聚合材料等等適當材料所製成， 並且較佳的情況是由一種例如是鎳的軟金屬所製成。C形 密封件以及合成的密封件亦可以被使用來提出另外的例子 。可以連同本發明一起使用的其他密封技術對於那些熟習 此項技術者係爲能夠輕易地了解者。 在本發明的第二個實施例中，如同在第二圖、第三圖 、以及第三A圖中所顯示者，一個選配的定位板3 0係可 一 _ 15 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） •^° β (請先閲讀背面之注意事項再填寫本頁): -s-: M This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm). Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs. A7 _; Fig. 14 is a cross-sectional view of the present invention taken along the direction of 17-17 in Fig. 14B; Fig. 18 is a cross-sectional view of the present invention taken along the direction of 18-18 in Fig. 14B The nineteenth diagram is a cross-sectional view of the present invention taken in the direction of 19-19 in the fourteenth diagram B; the twentyth diagram A, the twentyth diagram B, and the twentyth diagram C A perspective view, a top view, and a side view of another embodiment of the flow bridging portion, respectively. Figure 21 illustrates a perspective view of a manifold weldment shown in different sizes; Figure 22A and Figure 22B is a perspective view and a side view of a sealed retainer, and Figure 22C is a diagram illustrating the 22nd A and 22B used with a falling flow bridge. Seal holder in the figure; Figures 23A and 23B illustrate another seal holder A perspective view and a side view of each embodiment; Figures 24A and 24B are perspective and side views illustrating still another embodiment of a seal retainer; Figure 25A and Twenty Figure 5B is a top view and a perspective view of another example of a substrate manifold, which has a flat mounting flange; Figure 26 shows a manifold bundled with a retainer. Three-dimensional view of the components, 10 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) Order ---- Line A7 B7 V. Description of the invention (彡) Figure 27A is a side view of the manifold assembly in the direction of 2 7 A-2 7 A in Figure 26; Figures 27B to 27D are above And a side view of the lower substrate, which show another embodiment of a lower substrate height; a perspective view of another embodiment of the upper and lower substrate heights of FIG. 28; FIG. 29A and 29 Figure B illustrates the preload and load of a heated manifold assembly, respectively. Status; and A thirtieth and thirty-B in FIG. FIG lines showed a sectional view of another embodiment of a substrate height above embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference is now made to the drawings, which are for the purpose of illustrating the preferred embodiments of the present invention and are not intended to limit the present invention. A unique manifold system is shown in the first figures to Figure thirty. The invention, as shown and illustrated in the drawings, is quite useful, for example, as part of a high-purity modular gas distribution system for semiconductor device manufacturing, or for use in applications that must withstand corrosive fluids. Part of other fluid systems. The invention is not limited to use in high purity fluid systems and may be quite useful in any application related to fluid flow control. Referring now to the drawings, and especially to the first figure, a modular fluid manifold system 10 is shown via, for example, valve body 1, flow regulator 1, 3, filter 1, 4, and other similar components. The fluid flow control components are combined together. Fluid components can be used in conjunction with the present invention 11 nn H ϋ ϋ 1 ^ n I nn 1 -Λ- > l IV, " (Please read the precautions on the back before writing this page). Line: Ministry of Economic Affairs The paper size printed by the Intellectual Property Bureau's Consumer Cooperatives applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) A7 B7 5. Description of the invention (y), but not part of the invention. The fluid components 1 2-1 4 are preferably surface-mounted components, and each component has an inlet port 16 and may additionally include one or more outlet ports 1 8, as in the first section. As shown in Figure 3A, these ports allow fluid communication to fluid components. A series of fasteners of the fluid component pass through openings 24 in the base flange 26 of the fluid component to secure the component to the modular manifold system 10. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed the modular manifold system 10 of the present invention, which may include one or more bridge parts 50, an optional positioning plate 3 0, and an optional pad 4 0, optional end parts 4 5 and optional sealing elements 60. These elements are described in more detail below. As shown in the third figure, the bridge part 50 can be in the form of two elbow pipe parts 5 2, and the shaft pipe part shown is connected by an optional flat extension 5 4. The optional flat extension is connected to an individual end of the elbow tube part 52 by conventional means such as welding. The elbow part 5 2 has an internal fluid passage 56 having an inlet end 58 and an outlet end 6 2 and 64, and the inlet end 5 8 has an The direction of the exit end 6 2, 6 4 at 90 degrees. The optional flat extension 54 is provided with an internal fluid passage, which is connected to adjacent fluid passages of two adjacent elbow pipe parts 52, so that a U-shaped fluid passage system is formed. Inside the bridge part 50, the U-shaped fluid channel has an inlet end 62 and an outlet end 64. As shown in Figure 3A, the import of the bridge part 50 0 _______ 12 This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 public love) A7 V. Description of the invention (\ ^) The consumer end of the Intellectual Property Bureau of the Ministry of Economic Affairs, the printed end 6 2 is connected to an individual opening i 8 of a fluid component 2, which is in fluid communication, and the outlet end 6 4 that welcomes the _ part $ 0 is related to The inlet ports 16 of the adjacent fluid components 13 face each other in fluid. _, The bridging part 50 is a _, and acts like a purchase, to make the fluid flow in the adjacent fluid parts (such as 1, 2, 丨 3), and in the adjacent bridging parts 50 The system does not require a metal seal, and the cooperation between the adjacent module blocks of the metal seal in the conventional technology is necessary. Preferably, the bridging part 50 is made of stainless steel such as 3 i 6 or s c Q, or may be made of other materials suitable for use with the semiconductor processing fluid. Furthermore, the bridge part 50 is a reduced size, so that the amount of material of the on-block can be minimized. However, for typical industrial applications, any suitable material such as plastic or metal will be used in the present invention. As shown in the first figure, the modular system 10 can also include end parts 45, which includes an internal fluid channel connected to a standard part 46 to 90 degrees, where the standard The part is, for example, a VCR type part or other suitable parts for connecting to a fluid pipeline. The end part 45 can be used as an inlet part or an outlet part to fit the fluid line (not shown). Therefore, the outlet or inlet end of the elbow part is connected to the individual inlet or outlet end of a fluid component. Preferably, the end part 45 is made of stainless steel such as 3 16 or S C Q, or may be made of other materials suitable for use with the semiconductor processing fluid. For typical industrial applications, this end part 4 5 13 (please read the precautions on the back before filling this page) --line #: ii This paper size applies to China National Standard (CNS) A4 (210 x 297) (Mm) A7 B7 5. Description of the invention (U) The system can be made of any suitable material such as plastic or metal. The modular manifold system 1 of the present invention 10 can optionally include a pad Board 4 0. The backing plate 40 may include a flat plate, but in the best case, the flat plate has an internal groove or channel 4 2 ′ for receiving a plurality of bridge parts 50 and end parts 45. And fixed in it. Each elbow tube part 52 and the end part 45 of the bridging part 50 have an outer body with a precise size, which is matched with the shape of the groove or channel 42 to prevent the bridging part 5 0 rotates in the channel 4 2. Preferably, but not necessarily, the external shape of the elbow tube part 52 is rectangular or square. It is also preferable that the inner side wall 4 4 forming the channel 4 2 has a proper size for tightly accommodating a square-shaped main body, or two opposite side walls have a proper size. To accommodate a rectangular shaped body. The present invention is not limited to the shapes mentioned above, and any complementary shaped channel relative to the shape main body of the elbow tube part 52 can be used for the present invention. The backing plate 40 may be made of a suitable material such as metal or metal compound, but is preferably made of a low-cost, lightweight material such as aluminum. In an embodiment of the present invention (not shown), the channel 4 2 has a sufficient depth so that the bridge part 50 and the end part 45 can be completely accommodated in the channel 4 2. And a recess is formed (not shown) and a seal 60 is housed in the inlet port 6 2 and the outlet port 6 4 of the bridging part 50 and the opposite passage 14 The private paper standard is applicable to the country of China Standard (CNS) A4 specification (210 X 297 mm) ^ ..κΰ (Please read the notes on the back before filling out this page) Order, line · Intellectual Property Bureau, Ministry of Economic Affairs, Consumer Cooperatives, Printed by Intellectual Property Bureau, Ministry of Economic Affairs Printed by the employee consumer cooperative A7 B7 V. Description of the invention (>) between the inner side walls 4 4. In order to combine the system in this embodiment, the bridge part 50 is inserted into the channel 4 2 of the pad 40 Among them, the bridge part 50 is separated to have the smallest gap between the adjacent chewing parts 50. Then, the inlet port and the outlet port 6 of the fluid part 1 2-1 4 2 6 4 series carefully align the individual bridge parts 5 〇 Ports and inlet ports 18, 16. For example, an inlet end of a first bridge part 50 is aligned to be in fluid communication with an outlet of a first fluid component. Next, the One of the bridge parts 50a—an outlet end is aligned with the inlet of a second fluid part, wherein the second fluid part is adjacent to the first fluid part. After the inlet port and the outlet port are carefully aligned The fixing member 2 2 is inserted through the perforation 2 4 on the flange 26 of the fluid component, and into the corresponding perforation (not shown) of the pad 40, so that the fluid component can be fixed to The backing plate 40. Preferably, the manifold system 10 further includes a seal 60, which is accommodated in a matching inlet port / outlet port of the bridge part 50 and the fluid component. The seal 60 may be made of a suitable material such as elastomer, plastic, rubber, or polymer material, and is preferably made of a soft metal such as nickel. C-shaped seals and synthetic seals can also be used Use to suggest other examples. Other sealing techniques that can be used in conjunction with the present invention are easily understood by those skilled in the art. In the second embodiment of the present invention, as in the second figure, the first As shown in Figure 3 and Figure 3A, an optional positioning plate 3 0 series can be _ 15 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) • ^ ° β ( (Please read the notes on the back before filling out this page)

A7 B7 五、發明說明（θ) 經濟部智慧財產局員工消費合作社印製 以連同本發明來使用。該定位板3 0係具有複數個穿孔， 該等穿孔係被對準而使該橋接零件5 〇之端部6 2、6 4 容置在其中。該橋接零件5 0之端部較好係稍微短於該定 位板3 0之厚度’以使得一個凹部係被形成而用以將一個 密封件6 0容置於其中。因此，爲了根據本發明之第二實 施例來組合此一系統，該橋接零件係被置放在該墊板4 〇 之通道4 2之中’並且接著該定位板之穿孔係被對準該橋 接零件5 0之進口及出口端部。接著，該定位板係被下降 至適切位置’以使得該橋接零件5 0之端部係被***穿過 該定位板3 0之對準穿孔3 4。固定件3 6接著係被*** 穿過該墊板之對準穿孔3 8，用以容置進入到該定位板3 0之對準穿孔3 9之中。最後，流體部件1 2 — 1 4係使 用固定件2 2而被固定至該定位板3 〇。 一個橋接Τ形零件7 0之另一個實施例係被顯示在第 三Β圖中。此一橋接零件7 0係可以連同三個相鄰的流體 部件而一起被使用，其中中間的流體部件係僅具有一個進 口淳，例如是一個壓力傳感器。該橋接零件7 0係由兩個 肘管零件5 2所構成，每一個肘管零件係具有與一個丁形 零件7 2以流體相連通的一個內部流體通道。該τ形零件 7 2係具有一個進口端部7 4以及兩個出口端部7 6、7 8。該Τ形零件7 0之出口端部7 6係與一個單一埠之流 體部件（例如是壓力傳感器）以流體相連通。該Τ形零件 之出口端部7 8則係與該橋接零件之出口端部8 0以流體 相連通。因此，該橋接Τ形零件7 0係具有一個進口端部 -I-------------- bnr 一 (請先閱讀背面之注意事項再填寫本頁) ®! 線 16 A7A7 B7 V. Description of the Invention (θ) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs for use in conjunction with the present invention. The positioning plate 30 has a plurality of perforations, and the perforations are aligned so that the ends 6 2 and 6 4 of the bridge part 50 are accommodated therein. The end of the bridge part 50 is preferably slightly shorter than the thickness' of the positioning plate 30 so that a recess is formed to accommodate a seal 60 therein. Therefore, in order to combine the system according to the second embodiment of the present invention, the bridging part is placed in the channel 42 of the backing plate 40, and then the perforation system of the positioning plate is aligned with the bridge Import and export ends of part 50. Next, the positioning plate is lowered to a proper position 'so that the end of the bridge part 50 is inserted through the alignment hole 34 of the positioning plate 30. The fixing member 36 is then inserted through the alignment hole 38 of the backing plate for receiving into the alignment hole 39 of the positioning plate 30. Finally, the fluid components 1 2-1 4 are fixed to the positioning plate 30 using the fixing members 2 2. Another embodiment of a bridge T-shaped part 70 is shown in the third B diagram. This bridge part 70 can be used together with three adjacent fluid parts, where the middle fluid part has only one inlet, such as a pressure sensor. The bridge part 70 is composed of two elbow tube parts 52, and each elbow tube part has an internal fluid passage in fluid communication with a T-shaped part 72. The τ-shaped component 7 2 has one inlet end portion 74 and two outlet end portions 76, 78. The outlet end 76 of the T-shaped part 70 is in fluid communication with a single-port fluid component (such as a pressure sensor). The exit end 78 of the T-shaped part is in fluid communication with the exit end 80 of the bridging part. Therefore, the bridging T-shaped part 7 0 has an inlet end-I -------------- bnr one (Please read the precautions on the back before filling this page) ®! Line 16 A7

五、發明說明Ut) 8 2以及兩個出口端部7 6、8 〇，並且係可以被使用而 ------------- \ ./< (請先閱讀背面之注意事碩再填寫本I) 在二個相鄰流體部件之間橋接或是傳送流體，其中中間的 流體部件僅具有一個單一埠。 經濟部智慧財產局員工消費合作社印製 第四圖係顯示了定位板8 0之另一個實施例，其係被 設rf*而能夠使用於在多流動路徑a、b、C、以及D中流 動的流體。爲了更淸楚地說明本發明，定位板之後方係相 反於橋接零件5 0而被顯示（亦即相反於第二圖）。橋接 零件5 0在定位板之穿孔8 2中的配置係允許來自一個或 是多個流動路徑之流體的組合或混合。因此，如同在第四 圖中所顯示者’四個獨立的流動路徑係被顯示（A、B、 C、以及D) ’其係可以藉由流體部件（並未顯示）而已 所期望的比率混合在一起，而將導致系統之流體出口 8 6 能夠經由一種以所期望比率混合之流體A、B、C、以及 D所構成。此係藉由使用一種流體部件所完成，該等流體 部件例如是具有三個埠構型（在位置8 4處）之閥體，用 以允許來自分離流動路徑之不同流體能夠混合在一起。必 須注意的是，爲了逢成如同上文所述之所期望之結果，該 橋接零件5 0係被組合在一種'''插銷板（p e g b 〇 a r d ) 〃形式的配置中。因此，爲了達成流體的混合而不需 要任何特殊的適合部件，該橋接零件5 0係被使用來連結 或是連接分離的流動路徑。這是一種凌越習知區段類型模 組化設計之獨特優點，如同具有三個埠的一個特殊區段將 被需要。 在本發明之此一實施例中，定位板8 0係可以被使用 17 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）V. Description of the invention Ut) 8 2 and the two exit ends 7 6 and 8 〇, and can be used ------------- \ ./< (Please read the back Note that I will fill in this I) Bridge or transfer fluid between two adjacent fluid parts, where the middle fluid part only has a single port. Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the fourth picture shows another embodiment of the positioning plate 80, which is set to rf * and can be used to flow in multiple flow paths a, b, C, and D Of fluid. In order to explain the present invention more clearly, the rear side of the positioning plate is shown opposite to the bridge part 50 (that is, opposite to the second figure). The arrangement of the bridge part 50 in the perforation 82 of the positioning plate allows the combination or mixing of fluids from one or more flow paths. Therefore, as shown in the fourth figure, 'the four independent flow paths are shown (A, B, C, and D)', which can be mixed by fluid components (not shown) at the desired ratio Together, this will result in the fluid outlets 8 6 of the system being able to be constituted by a fluid A, B, C, and D mixed in a desired ratio. This is accomplished by using a fluid component, such as a valve body with a three port configuration (at position 84), to allow different fluids from separate flow paths to be mixed together. It must be noted that, in order to achieve the desired result as described above, the bridging part 50 is combined in a configuration of a '' 'pin plate (pe g b 0 a r d) 〃. Therefore, in order to achieve the mixing of fluids without any special suitable components, the bridge part 50 is used to connect or connect separate flow paths. This is a unique advantage of Ling Yue's conventional sector type modular design, as if a special sector with three ports would be needed. In this embodiment of the present invention, the positioning plate 80 can be used. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm).

五、發明說明 作爲該橋接零件5 0之支撐，並且作爲一個★***〃而 不需要一個支撐板。該橋接零件5 0更可以包括有一個螺 端部（並未顯示），該螺紋端部係可以被***該定位板 8 0之對準螺紋穿孔8 2中。該橋接零件5 0之端部6 2 、6 4亦可以被下壓而配合在該定位板8 0之對準穿孔8 2之中，或者藉由保持夾（並未顯示）而被連結至該定位 板。其他的連結方法對於那些熟習此項技術者係爲能夠輕 易地了解者。 在本發明之此一實施例中，該橋接零件5 0之端部6 2 ' 6 4係可以在高度上改變，而具有一個足夠容許多層 橋接零件（並未顯示）之高度。此交叉層特徵將是相當有 用的，舉例來說，如果吾人係希望將管線A中之淨化氣體 提供至其他的氣體管線B、C、以及D的話。爲了達成此 一特點，一個修正的橋接零件5 0將被需要，其將另外包 括有一個T形零件，用以與一個上層的橋接零件相配合。 該T形零件將被座落在該肘管零件之間，如同在第三B圖 中所顯示者，並且係具有與該肘管零件之內部流體通道以 流體相建通之一個內部流體通道。然而，不像第三B圖中 所顯示者，T形零件之開口將以1. 8 0度相反於該肘管零 件之開口，用以與座落在另一層之橋接零件的T形零件相 配合。因此，本發明之此一實施例將造成一種具有多流體 流動路徑之流體歧管系統，而該路徑係能夠驗多方向上延 伸。再者，此一實施例係允許氣體流動路徑之多維或是三 維分層，其中一層之流體流動路徑係可以與另一層之流體 -----— — — — — — — --- (請先閱讀背面之注意事項再私寫本頁) 訂 •線 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 B7V. Description of the Invention As a support for the bridge part 50, and as a ★ positioner〃, a support plate is not required. The bridge part 50 can further include a screw end (not shown), and the screw end can be inserted into the alignment screw hole 82 of the positioning plate 80. The end portions 6 2, 6 4 of the bridge part 50 can also be pressed down to fit into the alignment holes 8 2 of the positioning plate 80, or be connected to the retaining clip (not shown). Positioning plate. Other methods of connection are easily understood by those skilled in the art. In this embodiment of the present invention, the end portions 62 2 '6 4 of the bridge part 50 can be changed in height, and have a height sufficient to allow a multilayer bridge part (not shown). This cross-layer feature will be quite useful, for example, if we want to supply the purge gas from line A to other gas lines B, C, and D. To achieve this feature, a modified bridge part 50 will be needed, which will additionally include a T-shaped part to cooperate with an upper bridge part. The T-shaped part will be seated between the elbow parts, as shown in Figure 3B, and has an internal fluid passage in fluid communication with the internal fluid passage of the elbow part. However, unlike the one shown in Figure 3B, the opening of the T-shaped part will be opposite to the opening of the elbow part at 1.80 degrees to match the T-shaped part of the bridge part located on another layer. Cooperate. Therefore, this embodiment of the present invention will result in a fluid manifold system having a multi-fluid flow path, and the path can be extended in multiple directions. Moreover, this embodiment allows multi-dimensional or three-dimensional layering of the gas flow path. The fluid flow path of one layer can be connected with the fluid of the other layer ------- — — — — — — --- (please (Please read the notes on the back before writing this page in private.) Order • Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Printed by the Consumer Cooperative of this paper. Applicable to China National Standard (CNS) A4 (210 X 297 mm).

五、發明說明（Λ U 流動路徑以流體相連通。 總而言之，本發明係提供了一種橋接零件，其係能夠 連周流體部件一起被使用來形成一個氣體或是流體流動路 徑，該流體部件較好係爲表面裝設部件。這些橋接零件係 消除了相配密封件之需要，而相配密封件係爲在前技中相 鄰區段之間所需要者，並且這些橋接零件在製造上係爲較 簡單且較便宜者。此外，本發明係提供了將多流體流動路 徑以及流體部件安裝在多方向上以及多層中。本發明亦提 供流體部件之互換性，而在同時允許對部件進行容易的存 取而進行維修工作。 在本發明的另一個實施例中，如同在第五圖以及第六 圖中所顯示者，選配的定位板3 0係已被移除。代替該定 位板3 0的是，密封件6 0係藉由撓性保持器9 0而被保 持在適切位置，該保持器9 0係爲由一種例如是塑膠之薄 撓性材料所製成者。該保持器9 0之穿孔9 2係對準用以 接收被容置在該墊板或通道區段4 0之穿孔3 2 —中的固 定件2 2。例如是C形密封件之密封件6 0係藉由一個或 是多個支撐元件9 2而被保持在適切位置。該密封件6 0 係精確地定位在該保持器9 0中，以使得當該穿孔9 2對 準該固定件2 2時，該密封件6 0係精確地對準流體部件 1 2、1 4之進口1 6與出口1 8，以及鄰近流動橋接部 5 0之個別出口 6 4與進口 6 2。該流動橋接部5 0係已 被修正，而使得垂直管狀延伸部係已被消除，而當該流動 橋接部5 0係被定位在該通道之中時，進口端部以及出口 (請先閱讀背面之注意事項再填寫本頁) --------訂----- 經濟部智慧財產局員工消費合作杜印製V. Description of the invention (Λ U The flow path communicates with fluid. In short, the present invention provides a bridge part that can be used together with surrounding fluid components to form a gas or fluid flow path. The fluid component is better These are surface-mounted components. These bridge parts eliminate the need for matching seals, which are required between adjacent sections in the prior art, and these bridge parts are simpler to manufacture And cheaper. In addition, the present invention provides the installation of multiple fluid flow paths and fluid components in multiple directions and in multiple layers. The present invention also provides interchangeability of fluid components while allowing easy access to the components at the same time Maintenance work is performed. In another embodiment of the present invention, as shown in the fifth and sixth figures, the optional positioning plate 30 has been removed. Instead of the positioning plate 30, The seal 60 is held in place by a flexible retainer 90, which is made of a thin flexible material such as plastic. The perforation 9 2 of the holder 90 is aligned to receive the fixing member 2 2 received in the perforation 3 2 —of the pad or channel section 40. For example, the seal 6 of the C-shaped seal 6 It is held in place by one or more supporting elements 92. The seal 60 is precisely positioned in the holder 90, so that when the perforation 92 is aligned with the fixing element 22, At this time, the seal 60 is precisely aligned with the inlet 16 and outlet 18 of the fluid component 12 and 14, and the individual outlet 6 4 and inlet 62 adjacent to the flow bridge 50. The flow bridge 5 The 0 series has been corrected, so that the vertical tubular extension system has been eliminated, and when the flow bridge 50 series is positioned in the channel, the inlet end and the exit (please read the precautions on the back before filling (This page) -------- Order ----- Printed by the Intellectual Property Bureau of the Ministry of Economy

A7 ___；_____ 五、發明說明（\α) 端部6 2、6 4係能夠與該通道區段4 0之上方表面4 3 齊平或是稍微地下凹。另外，第五圖係顯示了一個不同形 狀的肘管零件5 2，該軸管零件係形成了流動橋接部。所 顯示之該肘管零件5 2係具有一個矩形的主體，並內部流 體通道係被加工而使得進口端部大略與出口端部成9◦度 的方向。 如同在第五圖中所顯示者，在所有的肘管零件5 2係 被固定在一起而形成一個流動橋接部5 0之後，該流動橋 接部係被置放在該墊板4 0之通道中。選配彈簧夾9 5係 可以被容置在每一個橋接部處，欲影將該橋接部保持在該 通道之中。該彈簧夾9 5係可以被***在每一個流動橋接 部5 0處，例如在收縮成頸部狀的區域中，其係界定了在 相鄰肘管零件5 2之間的焊接互聯。如同在第五Α圖中可 以較佳地看出的，該彈簧夾9 5較好係爲一個U形的構型 而具有平行的彎曲腿部9 6，該等腿部9 6係具有一個較 通道寬度爲寬的間隔，而此係產生一個類似彈簧作用的特 徵。因此，當該平行腿埠9 6係在該流動橋接部5 0處被 ***通道之中，也由於該腿部9 6的彈簧作用力，該流動 橋接部係被保持在該通道之中。另外，其他實施例之彈簧 夾97、98、以及9 9係被顯示在第五B圖至第五D圖 中。 如同可以更進一步地被了解的是，該墊板或通道區段 4 0係可以更進一步地包括有複數個帶有被定位於其中之 流動橋接部的通道，用以將已對準流動部件之流體流動在 ____20____ 本紙張尺度適用中國國家標準（CNS)A4規袼（210 X 297公釐） A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（0) —個第一方向上傳送；以及一個或是多個帶有被定位於其 中之流動橋接部的連結橫斷物或是分支通道4 1，用以將 流體在一個第二方向上傳送。因此，多流動路徑係被形成 ，而允許了通過不同流動管線之流體能夠相互混合。該分 支通道較好係在該第一方係上橫向地延伸通過該通道而到 達其他相鄰的通道。這在例如是需要淨化空氣或是流體流 動彼此混合的流體系統中是相當有用的。 接下來參照第八圖，根據本發明的另一個方面，一個 交叉淨化特點係爲了一種使用複數個流動通道歧管之歧管 配置而被舉例說明。每一個流動通道歧管之基本部件係可 以如同下文中相對於上述實施例所述者，而某些修正將在 下文中簡短地說明。 在第八圖中係提供有三個流動通道歧管1 0 0、1 〇 2、以及1 0 4。每一個歧管在其基本結構部件上係類似 於其他的歧管，因此在下文中僅對一個歧管加以詳細說明 。在這一個實施例中，這三個歧管1 0 0、1 0 2、以及 1 ◦ 4大體上係彼此平行且在同一個平面上對準。在這個 例子中，第一流動通道1 0 0係包括有一連串的基板結構 1 0 6，此等基板結構係端部對端部地連接，用以形成一 個氣體停留歧管。其他的歧管1 0 2與1 0 4係包括有基 板1 0 9，其係爲不同之可使用流動路徑構型。每一個基 板1 0 6係在第九圖中以一種示例性的方式而被說明。在 這一個例子中，每一個基板1 〇 6至少是夠大的，而能夠 具有一個裝設於其上的表面裝設部件1〇。或者，不同的 ___ 21 (請先間讀背面之注意事項再填寫本頁) 訂 ，線 ^A7 ___; _____ 5. Description of the invention (\ α) The ends 6 2 and 6 4 can be flush with the surface 4 3 above the channel section 40 or be slightly concave. In addition, the fifth diagram shows an elbow tube part 52 of a different shape, and the shaft tube part forms a flow bridge. The elbow tube part 52 shown has a rectangular body, and the internal fluid passage is processed so that the inlet end is approximately 9 ° from the outlet end. As shown in the fifth figure, after all the elbow parts 52 are fixed together to form a flow bridge 50, the flow bridge is placed in the channel of the pad 40. . The optional spring clip 9 5 series can be accommodated at each bridge, and the bridge is to be kept in the channel. The spring clip 95 can be inserted at each of the flow bridges 50, for example in a neck-shaped region, which defines a welded interconnection between adjacent elbow tube parts 52. As can be better seen in the fifth A figure, the spring clip 95 is preferably a U-shaped configuration with parallel curved legs 96, and the legs 96 are provided with a The channel width is a wide interval, and this system produces a spring-like feature. Therefore, when the parallel leg port 96 is inserted into the channel at the flow bridge 50, the flow bridge is also held in the channel due to the spring force of the leg 96. In addition, the spring clips 97, 98, and 99 of the other embodiments are shown in Figs. 5B to 5D. As can be further understood, the backing plate or channel section 40 may further include a plurality of channels with flow bridges positioned therein for aligning the aligned flow components. Fluid flow is ____20____ This paper size applies Chinese National Standard (CNS) A4 regulations (210 X 297 mm) A7 B7 Printed by the Consumers ’Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention (0) — in the first direction Transmission; and one or more connecting cross-sections or branch channels 41 with flow bridges positioned therein for transmitting fluid in a second direction. As a result, multiple flow paths are formed, allowing fluids that pass through different flow lines to mix with each other. The branch channel preferably extends laterally through the channel on the first system to reach other adjacent channels. This is quite useful, for example, in fluid systems that require purified air or fluid flows to mix with each other. Referring next to Figure 8, according to another aspect of the invention, a cross-purification feature is illustrated for a manifold configuration using a plurality of flow channel manifolds. The basic components of each flow channel manifold can be as described below with respect to the above embodiments, and certain modifications will be briefly described below. Three flow channel manifolds 100, 102, and 104 are provided in the eighth figure. Each manifold is similar to other manifolds in its basic structural components, so only one manifold will be described in detail below. In this embodiment, the three manifolds 100, 102, and 4 are substantially parallel to each other and aligned on the same plane. In this example, the first flow channel 100 includes a series of substrate structures 106 connected end-to-end to form a gas retention manifold. Other manifolds 102 and 104 include a base plate 109, which has a different usable flow path configuration. Each substrate 106 is illustrated in an exemplary manner in the ninth figure. In this example, each substrate 106 is at least large enough to have a surface mounting member 10 mounted thereon. Or, a different ___ 21 (please read the notes on the back first and then fill out this page) Order, line ^

.1. JiL 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 x 297公釐） 經濟部智慧財產局員工消費合作社印製 B7 五、發明說明（\f) 或是所有的基板1 0 6係可以被加長，用以允許多於一個 的表面裝設部件係能夠被裝設於其上，如同在例如是第五 圖中所顯示的實施例一般。而更進一步的選擇則係爲具有 一個具有充分長度的單一基板1 〇 6，用以適應所有對於 一種特殊氣體停留所需要的表面裝設部件。 現在參照第九圖，所顯示的兩個基板係彼此相鄰地置 放在一起’每一個基板係來自第八圖中歧管1 〇 〇、1 〇 2、或1 0 4中相鄰的一對。每一個基板結構或是組合1 〇 6在某些方面係相似於第五圖中所說明之基本基板結構 ’該基板1 0 6係包括有一個其中形成有一通道1 1 〇之 通道區段1 0 8。由一個或是多個流動橋接部區段3 0所 形成之流動橋接部112的至少一個係緊密地容置在該通 道1 1 0中，並且係可以藉由一個未顯示之夾子4 4 (如 果需要的話）而被固定在其中。流動橋接部1 1 2係包括 有兩個埠1 14、1 1 6，當一個表面裝設流動控制裝置 係被裝設在該基板1 〇 6上時，這兩個埠係對準該流動控 制裝置（並未顯示）之進口及出口埠1 2、1 4。例如是 C形密封件之密封件6 〇係可以被使用，用以在該裝置埠 1 2、1 4與該橋接部區段埠1 1 4、1 1 6之間形成流 體密封連接’如同在先前實施例中所敘述者。如同在上文 中所敘述者，末端朝前相鄰基板（例如是第八圖中之1 0 6 a與1 〇 6 b )之流動橋接部區段3 〇係可以使用管件 延伸部而被焊接在一起。 根據本發明，該通道區段1 0 8既好係由一種例如是 22 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 言 衾/ (請先閱讀背面之注意事項再填寫本頁).1. JiL This paper size is in accordance with Chinese National Standard (CNS) A4 (21 × 297 mm). Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economics. B7. 5. Description of invention (\ f) or all substrates. 1 0 The 6 series can be lengthened to allow more than one surface mounting component system to be mounted thereon, as in the embodiment shown in, for example, the fifth figure. A further option is to have a single substrate 106 of sufficient length to accommodate all surface mount components required for a particular gas hold. Referring now to the ninth figure, the two substrate systems shown are placed next to each other. 'Each substrate system is from the adjacent one of the manifolds 100, 102, or 104 in the eighth figure. Correct. Each substrate structure or combination 1 06 is similar in some respects to the basic substrate structure illustrated in the fifth figure. The substrate 10 6 includes a channel section 1 0 in which a channel 1 1 0 is formed. 8. At least one of the flow bridging sections 112 formed by one or more flow bridging section sections 30 is tightly received in the channel 1 10, and can be connected by an unshown clip 4 4 (if (If needed) and are fixed in it. The flow bridging section 1 1 2 series includes two ports 1 14 and 1 16. When a surface-mounted flow control device is mounted on the base plate 106, the two ports are aligned with the flow control. Inlet and outlet ports of the device (not shown) 1 2, 1 4. For example, a C-shaped seal 6 can be used to form a fluid-tight connection between the device port 1 2, 14 and the bridge section port 1 1 4, 1 1 6 'as in As described in the previous embodiment. As described above, the flow bridging section 3 of the adjacent substrate (for example, 106a and 106b in the eighth figure) facing forward may be welded on the pipe extension using a pipe extension. together. According to the present invention, the channel section 108 is preferably composed of a paper size such as 22, which is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). / / (Please read the precautions on the back before (Fill in this page)

經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（户） 鋁之低成本輕量化材料所製成，而引導半導體處理氣體之 流動橋接部區段3 0則係由更昂貴之半導體品質鋼材所製 成。 如同在第九圖中所說明者，三個氣體停留歧管1 0 0 ' 1 0 2、以及1 〇 4係可以藉由一個或是多個交叉排列 的淨化通道1 2 0，而經由機械方式被連接在一起成爲一 個單一個組件。在這一個實施例中，該交叉淨化通道1 2 0大體上係彼此平行且在同一平面上被置放，並且係被裝 設在該歧管1 0 2、1 0 4、以及1 0 6的下側。該淨化 流動通道係可以被使用，例如是用來將淨化氣體供應至每 一個氣體停留歧管1 0 0、1 0 2、以及1 0 4。 每一個淨化通道1 2 0係可以從一種例如是鋁或非S C Q不銹鋼之低成本金屬區段而被加工。該淨化通道1 2 0係可以包括有分別容置基板1 0 6之凹部1 2 2，用以 簡化在組合期間之對準。該淨化通道1 2 0係具有一個形 成於其中之縱向凹部1 2 4，該凹部1 2 4係緊密地容置 有許多淨化橋接部區段1 2 6，而該等淨化橋接部區段1 2 6係爲藉由管件延伸部而以端部對端部的形式被連接， 其中該管件延伸部係藉由例如是焊接的方式所連接。該淨 化橋接部區段1 2 6係可以大致上相似於該流動橋接部區 段3 0而被製造及互連。一個淨化埠1 2 8係被設置而與 一個表面裝設部件1 0之淨化埠經由一個通過在上方裝設 之基板1 0 6的導管1 3 0而能夠以流體相連通。一個接 頭或是轉換管件區段1 3 2係可以被使用，用以提供一個 23Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention (household) Aluminum is made of low-cost and lightweight materials, while the bridge section 30, which guides the flow of semiconductor processing gas, is made of more expensive semiconductors. Made of high quality steel. As illustrated in the ninth figure, the three gas retention manifolds 1 0 0 '1 0 2 and 1 0 4 can be mechanically connected by one or more cross-connected purification channels 1 2 0. Are connected together into a single component. In this embodiment, the cross purification channels 1 2 0 are substantially parallel to each other and are placed on the same plane, and are installed in the manifolds 1 0 2, 1 0 4, and 1 6 Underside. The purge flow channel system may be used, for example, to supply purge gas to each of the gas retention manifolds 100, 10, and 104. Each purge channel 120 can be processed from a low cost metal segment such as aluminum or non-SQ stainless steel. The purge channel 12 0 may include recesses 1 2 2 for accommodating the substrates 106, respectively, to simplify alignment during assembly. The purification channel 1 2 0 has a longitudinal recess 1 2 4 formed therein, and the recess 1 2 4 tightly accommodates a plurality of purification bridge sections 1 2 6, and the purification bridge sections 1 2 6 is connected end-to-end by a pipe extension, wherein the pipe extension is connected by, for example, welding. The clean bridge section 1 2 6 series can be manufactured and interconnected substantially similar to the mobile bridge section 30. A purge port 1 28 is provided to be in fluid communication with a purge port of a surface-mounted component 10 through a conduit 1 30 through a base plate 106 mounted on the top. A joint or conversion pipe section 1 3 2 series can be used to provide a 23

(請先閱讀背面之注意事項再填寫本頁)(Please read the notes on the back before filling this page)

本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（>/ ) 用於如同所需般地連接至該表面裝設部件1 0之淨化埠1 3 3，並且例如是C形密封件之適當的密封件係可以被使 用，用以提供在該淨化區段1 2 6與該導管1 3 0之間並 且提供在該導管1 3 0與該轉換區段1 3 2以及/或者表 面裝設部件淨化埠之間的流體密封連接。如同顯示在第五 A圖至第五D圖中的保持夾9 5，其係可以被使用而將該 淨化區段1 2 6保持在縱向凹部1 2 4中，特別是在運送 期間。該轉換管件1 3 2係可以被置放在該通道1 1 〇之 中，以便在流動控制裝置1 0係被裝設於該基板1 〇 6上 時，能夠對準該裝置1 0之淨化埠。在第五圖以及第八圖 的實施例中，淨化埠係被座落在進口流動埠及出口流動埠 之間的中間區域。 現在參照第十A圖至第十D圖，每一個基板1 〇 6係 包括有縱向的狹槽140a與140b，該狹槽係形成在 該基板而在接近該基板底壁1 4 2之相對側邊上。在這一 個實施例中，該狹槽1 4 0係在該基板之整個長度上延伸 ，雖然這並非爲所必須者。該狹槽之長度僅需要能夠適應 一個連接器套板，而此將在下文中敘述。每一個基板1 〇 6更包括有複數個螺紋螺釘穿孔1 4 4，較佳的情況是在 該基板1 0 6的每一個角落上具有一個螺紋螺釘穿孔，該 穿孔係向下通過該基板而至少延伸至該狹槽1 4 0。 兩個基板106a與l〇6b係以端部對端部的方式 而被連接器套板1 4 6所連接，而在這一個實施例中係爲 藉由一對連接器套板1 4 6 a與1 4 6 b所連接。每一個 24 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 言 (請先間讀背面之注意事頊再填寫本頁)This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (> /) Used to connect to the The surface cleaning unit 1 10 has a cleaning port 1 3 3 and a suitable seal such as a C-shaped seal can be used to provide between the cleaning section 1 2 6 and the duct 1 3 0 and A fluid-tight connection is provided between the conduit 130 and the conversion section 132 and / or the surface-mounted component purge port. Like the retaining clips 95 shown in the fifth A to fifth D drawings, it can be used to hold the purification section 1 2 6 in the longitudinal recess 1 2 4 especially during transportation. The conversion pipe 1 32 can be placed in the channel 1 10, so that when the flow control device 10 is installed on the substrate 10, it can be aligned with the purification port of the device 10 . In the fifth and eighth embodiments, the purge port is located in the middle area between the inlet flow port and the outlet flow port. Referring now to FIGS. 10A to 10D, each substrate 106 includes longitudinal slots 140a and 140b, which are formed on the substrate and on opposite sides close to the substrate bottom wall 1 42. On the edge. In this embodiment, the slot 140 extends over the entire length of the substrate, although this is not required. The length of the slot need only be able to accommodate a connector sleeve, which will be described later. Each substrate 1 06 further includes a plurality of threaded screw holes 1 4 4. Preferably, each of the corners of the substrate 1 10 has a threaded screw hole. The hole passes downward through the substrate and at least Extends to the slot 1 4 0. The two substrates 106a and 106b are connected end-to-end by the connector sleeve 1 4.6, and in this embodiment are connected by a pair of connector sleeves 1 4 6 a Connected to 1 4 6 b. Each of the 24 paper sizes applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) (please read the notes on the back first, and then fill out this page)

五、發明說明（ A7 B7 經濟部智慧財產局員工消費合作社印製 連接器套板1 4 6大約有一半係可滑動地容置在兩個基板 1 0 6 a與1 〇 6 b之相鄰狹槽1 4 0中的一個個別端部 中。在這個例子中，第一連接器套板1 4 6 a係配合在該 第一基板1 〇 6 a之狹槽1 4 〇 a以及該第二基板1 〇 6 b之相應狹槽1 4 0 a中。該連接器套板1 4 6較好是不 會比該狹槽1 4 0寬，以使得基板之平滑側壁輪廓係能夠 被維持。該連接器套板1 4 6係設有穿孔1 4 8，該穿孔 1 4 8係大體上對準該螺釘穿孔1 4 4。螺紋定位螺釘1 5 0係可以被螺入該穿孔1 4 4中，並且係具有足夠的長 度而能夠同時螺入在連接器套板1 4 6中的該穿孔1 4 8 。然而，爲了將該基板1 0 6 a與1 0 6 b固定地保持在 一起，當該基板106a與106b係以端部朝前方式而 被鄰接時，該連接器套板穿孔1 4 8較好係以在其間隔上 稍微地偏斜（例如是0.0 2 0英吋）的方式而被形成，而 此係爲與該定位螺釘1 4 4之間隔相較之下所得。當該定 位螺釘1 5 0係被螺入該連接器套板穿孔1 4 8之中時， 該基板1 0 6 a與1 〇 6 b將被緊密地被推在一起，如同 在第十D圖中所顯示者。 再一次地參照第八圖以及第九A圖，該基板1 〇 6中 的一些亦可以被連接至該交叉淨化通道1 2 0。該交叉淨 化通道1 2 0係包括有螺紋穿孔1 5 2，該螺紋穿孔1 5 2係能夠容置裝設螺栓1 8 0。在這一個實施例中，覆蓋 在該交叉淨化通道1 2 0上之該基板係設有一個裝設套板 1 8 2，該裝設套板1 8 2係包括有一個向外延伸的凸緣 _ _ 25 ------------- 11 (請先閱讀背面之注意事項再填寫本頁) 訂---------線 _ 5, 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公1 ) A7 A7 經濟部智慧財產局員工消費合作杜印製 B7 五、發明說明（〆） 1 8 4。該凸緣1 8 4係包括有對準該淨化通道穿孔1 5 2之穿孔，以使得螺栓1 8 0能夠將該基板1 〇 6固定至 該交叉淨化通道1 2 0。由於在一個單一氣體停留中之基 板1 ϋ β亦經由該連接器套板而被相互連接，第八圖之整 個組件係爲一個被固定地保持在一起的穩固組件。在第十 一Α圖的另一個實施例中’當該連接器插銷1 6 4係被使 用十，該基板1 〇 6係設有凸緣1 7 2以及對準該淨化通 道穿孔1 5 2之相應穿孔。因此，該螺栓1 8 〇係將該基 板固定至該淨化通道120° 現在參照第十一 A圖以及第~f—·Β圖’其係顯不了另 一個以端部朝前方式相連的基板。取代該狹槽1 4 0的是 ，每一個基板1 0 6係在基板（第十一圖中之1 0 6 a與 1 0 6 b )的毗鄰表面處以及在該流動橋接部容置通道1 1 0之每一側上設有縱向延伸穿孔1 6 0。渾圓的插銷1 6 2係被良好地容置在該穿孔1 6 0中。每一個插銷1 6 2係延伸進入相應及對準的穿孔1 6 0 ’用以將該基板1 06a與106b連接在一起。每一個插銷1 6 2亦可以 包括有刻痕16 4。定位螺釘1 6 6係可以經由對準螺釘 穿孔1 6 8而被螺入，並且在該刻痕1 6 4處與該插銷1 6 2相銜接。當每一個螺釘端部1 7 0係銜接一個相應的 插銷刻痕1 6 4時，該插銷1 6 2係被固定地保持在該基 板主體1 6 0之中。相對於該螺釘穿孔1 6 8間隔之該刻 痕1 6 4軸向間隔係可以被偏斜，用以在該螺釘1 6 6係 向下鎖緊時能夠致使該基板一起被上拉。 __ 26 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 訂 --線： 經濟部智慧財產局員工消費合作社印製 A7 ._.____Β7_____ 五、發明說明（士） 在這一個實施例中，該基板1 0 6係設有底部延伸唇 部1 7 2，用以使該基板經由螺栓（在第十一圖中並未顯 示，但在第九圖與第九Α圖中係可以看到）而固定至一個 交叉淨化通道1 2 0 ° 第十二A圖以及第十二B圖係說明了本發明的另一個 方面。在這一個實施例中，一個基板2 0 0，例如是使用 在第八圖之氣體停留中基板的一個，其係被修正而包含有 一個中央開口202 ’該中央開口202對於在該基板中 之流動區段凹部1 1 〇係爲開放者。一個單向閥體組件2 0 4係被***該開口 2 0 2中。該單向閥體係包括有一個 進口埠2 0 6以及一個出口埠2 0 8。如同在第十二A圖 中可以最淸楚地看到的，該單向閥體2 0 4係包括有一個 流動區段2 1 0，該流動區段2 1 0係被***到該通道1 1 0之中。額外的流動區段（並未顯示）係可以被***在 該單向閥體2 1 0兩側上的凹部1 1 0之中。該單向閥體 2 0 4係可以被使用來檢查淨化氣體流動。在此等示例中 ，該單向閥體區段2 1 0將取代該轉換區段1 3 2 (見第 九圖）。 現在參照第十三圖，根據本發明的另一個方面，一個 用以引導流體在兩個或是更多平面上之多流動路徑的多高 度歧管排列3 0 0係在此說明。基本系統部件係可以如同 在本文中相對於上述實施例所敘述者，而某些的修正則將 下文中簡短地敘述。 該歧管系統3 0 0係包括有一個選配的底板3 1 〇以 27 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁)V. Description of the invention (A7 B7 About half of the printed connector sleeves printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1 4 6 are slidably accommodated in two adjacent substrates 10 6 a and 1 06 b In one of the individual end portions of the slot 1 40. In this example, the first connector sleeve 1 4 6a is fitted in the slot 1 4 0a of the first substrate 1 06a and the second substrate The corresponding slot 1 0 0a of 1 06 b. The connector sleeve 1 4 6 is preferably not wider than the slot 1 4 0 so that the smooth sidewall profile of the substrate can be maintained. The connection The sleeve plate 1 4 6 is provided with a perforation 1 4 8, the perforation 1 4 8 is substantially aligned with the screw perforation 1 4 4. The threaded set screw 1 50 0 can be screwed into the perforation 1 4 4 and Is a sufficient length to be able to be screwed into the perforations 1 4 8 in the connector sleeve 1 4 6 at the same time. However, in order to hold the substrates 10 6 a and 1 6 b fixedly together, when the substrate When 106a and 106b are abutted with the ends facing forward, the connector sleeve holes 1 4 8 are preferably slightly inclined at intervals (for example, 0.0 2 0 inches). ), And this is obtained in comparison with the spacing of the positioning screws 1 4 4. When the positioning screws 1 50 are screwed into the hole 1 4 8 of the connector sleeve, The substrates 10 6 a and 10 6 b will be pushed tightly together, as shown in the tenth diagram D. Referring again to the eighth and ninth diagrams A, the substrate 10 Some of them can also be connected to the cross-cleaning channel 1 2 0. The cross-cleaning channel 1 2 0 includes a threaded perforation 1 5 2, and the threaded perforation 1 5 2 can accommodate a mounting bolt 1 8 0. Here In one embodiment, the base plate covering the cross-cleaning channel 1 2 0 is provided with a mounting sleeve 1 8 2. The mounting sleeve 1 8 2 includes an outwardly extending flange _ _ 25 ------------- 11 (Please read the precautions on the back before filling out this page) Order --------- line_ 5, This paper size applies Chinese national standards ( CNS) A4 specification (210 X 297 male 1) A7 A7 Consumer Cooperation of Intellectual Property Bureau of the Ministry of Economic Affairs Du printed B7 5. Description of the invention (〆) 1 8 4. The flange 1 8 4 includes alignment with the purification channel The perforations of holes 15 2 enable bolts 180 to fix the substrate 1 06 to the cross-cleaning channel 1 2 0. Since the substrate 1 ϋ β in a single gas residence also passes through the connector sleeve, Being connected to each other, the entire assembly of FIG. 8 is a stable assembly fixedly held together. In another embodiment of FIG. 11A, 'When the connector pin 1 6 4 is used, ten, the The base plate 106 is provided with a flange 172 and a corresponding perforation aligned with the perforation 152 of the purification channel. Therefore, the bolt 180 is used to fix the substrate to the cleaning channel 120 °. Referring now to Figure 11A and Figures ~ f- · B ', it does not show another substrate connected end-to-end. Instead of the slot 1 40, each of the substrates 106 is located adjacent to the surface of the substrate (10 6a and 10 6 b in the eleventh figure) and the channel 1 is accommodated in the flow bridge. A longitudinally extending perforation 160 is provided on each side of the 10. The round pins 16 2 are well received in the perforations 160. Each pin 16 extends into a corresponding and aligned perforation 16 0 'to connect the substrates 106a and 106b together. Each latch 1 6 2 may also include a notch 16 4. The set screw 1 6 6 can be screwed in through the alignment screw hole 1 6 8, and is engaged with the latch 1 6 2 at the score 16 4. When each of the screw end portions 170 is engaged with a corresponding pin nick 16 4, the pin 16 2 is fixedly held in the base plate body 160. The nicks 1 6 4 axially spaced with respect to the holes 1 6 8 of the screw may be skewed to enable the substrate to be pulled up together when the screws 1 6 are locked downward. __ 26 This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) (Please read the notes on the back before filling out this page) Order: Line: Printed by A7, Consumer Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs ._.____ Β7 _____ V. Description of the Invention (Shi) In this embodiment, the base plate 106 is provided with a bottom extension lip 1 72 for passing the base plate through a bolt (not shown in the eleventh figure). Shown, but can be seen in Figures 9 and A) and fixed to a cross purification channel 120 ° Figures 12A and 12B illustrate another aspect of the present invention. In this embodiment, a substrate 200, for example, one of the substrates used in the gas residence of the eighth figure, is modified to include a central opening 202 ' The flow section recess 1 10 is an opener. A one-way valve body assembly 204 is inserted into the opening 202. The check valve system includes an inlet port 206 and an outlet port 208. As can be seen most clearly in Figure 12A, the one-way valve body 2 0 4 series includes a flow section 2 1 0, which is inserted into the channel 1 10 out of 10. Additional flow sections (not shown) can be inserted into the recesses 110 on both sides of the check valve body 210. The one-way valve body 204 can be used to check the flow of purge gas. In these examples, the one-way valve body section 2 10 will replace the switching section 1 2 2 (see figure 9). Referring now to the thirteenth figure, according to another aspect of the present invention, a multi-height manifold arrangement 3 0 0 for directing multiple flow paths of fluid in two or more planes is described herein. The basic system components may be as described herein with respect to the above embodiments, and some modifications will be briefly described below. The manifold system 3 0 0 includes an optional base plate 3 1 〇 27 paper size applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) (Please read the precautions on the back before filling out this page)

經濟部智慧財產局員工消費合作社印製 A7 ____B7__ 五、發明說明（〆） 及選配的支撐區段3 1 2，用以允許該系統能夠在安裝前 被組合。如同在第十四A圖、第十四B圖、以及第十五圖 中所顯示者，其中流體部件係被移除，該系統係包括有一 個上方基板層3 1 4以及一個下方基板層3 1 6。該上方 基板層3 1 4係包括有複數個通道區段4 0，此等通道區 段4 0係可以爲不同長度並且係可以在一個平面定向上更 緊密地分隔者，如同圖示中所顯示者。該通道區段4 0係 可以藉由固定件而被固定至該支撐區段3 1 2，並且接著 該支撐區段3 1 2係可以被固定至該支撐板3 1 0。 定位在該通道區段4 0之每一通道4 2中的是流動橋 接部5 0，如同在第十五A圖至第十五C圖以及在第十六 A圖至第十六C圖中可以最淸楚地看到。如同在第十五A 圖中所顯示者，流動橋接部5 0之另一個實施例係包括有 兩個方形的肘管零件5 2，該軸管零件5 2係具有連結在 一起之扁平延伸部，用以形成一個U形的流動通道。該流 動橋接部5 0之進口埠與出口埠的外側表面較好係爲與該 通道區段4 0之上方表面齊平。該流動橋接部5 0之進口 埠與出口埠6 2、6 4係具有一個下凹的區域，用於將一 個密封件6 0局部地接收在其中，以使得一個密封件係能 夠被維持在該流動橋接部50之進口埠與出口埠62、6 4與該流體部件1 2 — 1 4之相配埠1 6、1 8之間。 如同在第十六A圖至第十六C圖中所顯示者，所顯示 之一個下落橋接部3 2 0係被使用來允許在上方基板層中 相鄰流動部件與在下方基板層中一個流動橋接部或歧管焊 28 (請先閱讀背面之注意事項再填寫本頁) . -線 ©! 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 B7 五、發明說明（>) 件4 0 〇 (見第二十一圖）之間的流體連通。如同在第十 六A圖中所顯示者，該下落橋接部3 2 〇係由一個肘管零 件§ 2以及一個T形零件3 2 2所構成’該τ形零件3 2 2係具有一個充分長度之扁平延伸部3 2 4 ’以使得該進 口埠3 2 6係與在下方基板高度3 1 6中一個流動橋接部 5 0之對準埠或歧管焊件4 0 0以流體相連通。該下落橋 接部3 2 0更包括有兩個上方基板高度3 1 4埠3 2 8、 3 3 0以及一個下方基板部326。埠328、33 ◦係 具有一個下凹的圓形區域3 3 2，用於接收例如是一個c 形密封件之選配的密封件。該下落橋接部3 2 0係被定位 在該通道區段4 0之該通道之中，以使得該扁平延伸部3 2 4係被接收在該通道壁4 2之穿孔3 2 5之中（見第十 四Β圖）。所顯示之該扁平延伸部的埠326係與在第十 九圖中的一個歧管焊件4 0 0以流體相連通。 該下落橋接部3 2 0之埠3 2 6、3 2 8、以及3 3 0係可以依據流動的方向而如同進口埠或出口埠般地作用 。舉例來說，如果該下方基板高度3 1 6之一個歧管焊件 4 0 0係被使用來將淨化氣體提供至該流動部件1 2 - 1 4，則埠3 2 6將會作用如同一個進口埠，而在同時埠3 2 8與3 3 0則將作用如同一個出口埠，用以將淨化氣體 提供至相鄰的流動部件。另一例子是，埠328與330 中的一個將被連接至一個流動部件三向閥體1 2，以使得 流體係可以依據閥體設定而被引導至上方或下方基板高度 3 1 4或3 1 6或是其二者之組合。因此，該下落橋接部 29 (請先閱讀背面之注意事項再填寫本頁) > --------訂---------線一 1一--'.1...二·- 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 B7 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 五、發明說明（) 3 2 0之設計將允許氣體流動能夠從一個基板層移動至另 一個基板層。該下落橋接部3 2 0之另一個實施例將爲如 同i述之轉換管件，其中係使用一個直通流動路徑。 爲了幫助在該下落橋接部3 2 0之埠3 2 6與一個座 落在該下方基板高度3 1 6中流動橋接部5 0之埠1 6、 1 8之間的密封，選配的下落夾3 5 0係可以如同第二十 二A圖至第二十二C圖所顯示般地被使用，用以使該密封 件6 0保持在與該埠3 2 6之一個密封關係中。該下落夾 3 5 0係包括有一個撓性C形凸緣，其係被接收在該下落 橋接部3 2 0之凸緣3 5 2上。選配之剪切塊3 5 4在將 該下落夾3 5 0安裝在該凸緣3 5 2上時係能夠允許較大 的撓性。爲了將該下落夾3 5 0安裝在該凸緣3 5 2上， 首先該密封件6 0係藉由將該密封件6 0***穿過該開口 3 5 8而被裝設在該下方邊緣3 5 6上。接下來，該下落 橋接部3 2 0之凸緣3 5 2係被***通過該口 3 5 8，以 使得該凸緣3 5 2係能夠銜接該下落夾3 5 0之上方邊緣 3 5 9。下落夾之另一個實施例3 6 〇係被顯示在第二十 二A圖至第二十三b圖。在這一個實施例中，該上方邊緣 3 6 2係銜接該下落橋接部之該凸緣3 5 2，但是該上方 邊緣3 6 2係允許該下落夾3 6 0能夠從兩個側方開口或 者是從該下落夾之頂部開口而被安裝在該橋接部3 2 〇之 底部上。第二十四A圖係顯示了下落夾之另—個實施例3 7 〇，該下落夾3 7 0係被接收在下落橋接部3 2 〇之一 個圓柱形凹部3 7 2之中。該下落夾3 7 0係類似於在第 (請先閱讀背面之注意事項再蜞寫本頁) --線： .Ei..;Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ____B7__ V. Description of the invention (〆) and optional support section 3 1 2 to allow the system to be assembled before installation. As shown in Figures 14A, 14B, and 15 with the fluid component removed, the system includes an upper substrate layer 3 1 4 and a lower substrate layer 3 1 6. The upper substrate layer 3 1 4 includes a plurality of channel sections 40. These channel sections 40 can be of different lengths and can be more closely separated in a plane orientation, as shown in the illustration. By. The passage section 40 series can be fixed to the support section 3 1 2 by a fixing member, and then the support section 3 1 2 series can be fixed to the support plate 3 1 0. Positioned in each channel 4 2 of the channel section 40 is a flow bridging portion 50 as in Figures 15A to 15C and Figures 16A to 16C You can see it most clearly. As shown in the fifteenth figure A, another embodiment of the flow bridging portion 50 includes two square elbow tube parts 52, which have flat extensions connected together. To form a U-shaped flow channel. The outer surfaces of the inlet port and the outlet port of the flow bridging portion 50 are preferably flush with the upper surface of the channel section 40. The inlet port and the outlet port 6 2 and 6 of the flow bridging portion 50 have a recessed area for locally receiving a seal 60 therein, so that a seal system can be maintained at the Between the inlet port and the outlet port 62, 6 4 of the flow bridging portion 50 and the matching ports 16, 18 of the fluid component 12-14. As shown in Figures 16A to 16C, a drop bridge 3 2 0 shown is used to allow adjacent flow members in the upper substrate layer and one in the lower substrate layer to flow. Bridging or manifold welding 28 (Please read the precautions on the back before filling this page). -Line ©! This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) A7 B7 V. Description of the invention (≫) Fluid communication between pieces 40 (see figure 21). As shown in Figure 16A, the drop bridge 3 2 0 is composed of an elbow part § 2 and a T-shaped part 3 2 2 'The τ-shaped part 3 2 2 has a sufficient length The flat extension 3 2 4 ′ is such that the inlet port 3 2 6 is in fluid communication with the alignment port or manifold weldment 400 of a flow bridge 50 at the lower substrate height 3 1 6. The falling bridge connecting part 3 2 0 further includes two upper substrate heights 3 1 4 and 3 2 8, 3 3 0 and a lower substrate part 326. Ports 328, 33 ◦ have a recessed circular area 3 3 2 for receiving optional seals such as a c-shaped seal. The drop bridge 3 2 0 is positioned in the channel of the channel section 40 so that the flat extension 3 2 4 is received in the perforation 3 2 5 of the channel wall 4 2 (see Fourteenth B picture). Port 326 of the flat extension is shown in fluid communication with a manifold weldment 400 in the nineteenth figure. Ports 3 2 6, 3 2 8 and 3 3 0 of the drop bridge 3 2 can act as inlet ports or outlet ports depending on the direction of flow. For example, if a manifold weldment 4 0 0 of the lower substrate height 3 1 6 is used to supply purge gas to the flow part 1 2-1 4, port 3 2 6 will function as an inlet The ports 3 28 and 3 3 0 will act as an outlet port to supply the purge gas to adjacent flow components. Another example is that one of the ports 328 and 330 will be connected to a flow part three-way valve body 12 so that the flow system can be guided to the upper or lower substrate height 3 1 4 or 3 1 depending on the valve body setting. 6 or a combination of both. Therefore, the drop bridge 29 (Please read the precautions on the back before filling out this page) > -------- Order --------- Line 1 1 1-'. 1. .. ·· Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is printed in accordance with the Chinese National Standard (CNS) A4 (210 X 297 mm) A7 B7 () The design of 3 2 0 will allow gas flow to move from one substrate layer to another. Another embodiment of the drop bridge 3 2 0 will be a conversion tube as described above, in which a through flow path is used. In order to help seal between the 3 3 0 port 3 2 0 of the drop bridge and the 1 6 and 1 8 port of the flow bridge 50 located at the lower substrate height 3 1 6, the optional drop clip The 3 50 series can be used as shown in Figures 22A to 22C to keep the seal 60 in a sealed relationship with the port 3 2 6. The drop clamp 3 5 0 includes a flexible C-shaped flange which is received on the flange 3 5 2 of the drop bridge 3 2 0. The optional shear block 3 5 4 allows greater flexibility when the drop clip 3 50 is mounted on the flange 3 5 2. In order to mount the drop clip 3 50 on the flange 3 52, the seal 60 is first installed at the lower edge 3 by inserting the seal 60 through the opening 3 5 8 5 6 on. Next, the flange 3 5 2 of the drop bridge 3 2 0 is inserted through the opening 3 5 8 so that the flange 3 5 2 can engage the upper edge 3 5 9 of the drop clamp 3 5 0. Another embodiment of the drop clamp 36 is shown in Figures 22A to 23b. In this embodiment, the upper edge 3 6 2 is connected to the flange 3 5 2 of the drop bridge, but the upper edge 3 6 2 allows the drop clip 3 6 0 to be opened from both sides or It is opened from the top of the drop clip and is installed on the bottom of the bridge portion 3 2 0. Figure 24A shows another embodiment of the drop clamp 370. The drop clamp 370 is received in one of the cylindrical recesses 372 of the drop bridge 302. The drop clip 3 7 0 is similar to the first (please read the precautions on the back before writing this page)-line: .Ei ..;

A7 _____B7_____ 五、發明說明（>S) 二十二A圖至第二十二C圖中所顯示之下落夾3 5 0而被 造型，但是不具有上方邊緣3 5 9。該下落夾3 7 0係在 該密封件6 0係已被***其中之後而被***該橋接部3 2 0之凹部3 7 2之中，並且係稍微地被壓縮，以使其能夠 由於一個類似彈簧的作用而被保持在該凹部之中。最後， 第二十四Β圖以及第二十四C圖係說明了下落夾的另一個 實施例3 8 0，其係使用了複數個圓周的扁平端部3 8 2 ，由於一個類似彈簧的作用，該扁平端部3 8 2係使該保 持夾3 8 0保持在該落橋接部3 2 0之扁平延伸部3 2 4 的外直徑上。上文中所述之任一個下落夾的實施例係可以 由例如是塑膠或是金屬等任何撓形材料所構成。 如同上文中所敘述者，下方基板層3 1 6係包括有複 數個流動橋接部50以及/或者歧管焊件400，如同在 第二十Α圖至二十C圖以及第二十一圖中所顯示者。該歧 管焊件4 0 0係包括有一個或是多個進口埠4 0 2以及一 個或是多個出口埠4 0 4，其係能夠與來自上方基板層3 1 4中一個下落橋接部3 2 0之埠以流體相連通。該歧管 焊件4 0 0係可以由兩個具有方形造型主體之肘管零件5 2以及一個中間部分4 1 0所形成，其中該中間部分4 1 0較佳係具有一個矩形造型主體而一個內部直通流動通道 則係帶有一個或是多個埠404。該中間部分410係可 以經由冷拉管件所形成，其係被焊接至該肘管零件5 2。 另外，該歧管焊件4 0 0亦可以包括有一個例如是V C R 類型零件之標準端部零件4 6，而不是一個肘管零件5 2。 ______31___ 紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） (請先間讀背面之注意事項再填寫本頁) ----訂---------線 _ 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（>p 下方基板層316係可以包括有不同長度的通道區段 4 0，其係具有用於接收匣殼加熱器（並未顯示）之狹槽 4 1 2。該通道區段4 0係經由固定件4 2 2而被固定至 座落在上方基板層3 1 6的通道區段，該固定件4 2 2係 被定位在上方通道區段之穿孔4 1 4中，並且進入該下方 通道區段4 0之對準穿孔4 1 6之中。此係允許該通道區 段4 0能夠從該上方基板層脫離並從下方滑出，而允許了 較容易之存取性。 第二十五圖係說明了通道區段5 0 0之另一個實施例 ，該通道區段5 0 0係具有扁平凸緣5 0 2，而該扁平凸 緣5 0 2係與一個相鄰通道區段之相鄰凹部5 0 4相嚙合 或相連結。該扁平凸緣5 0 2係具有用以將固定件（並未 顯示）接收於其中之裝設穿孔5 0 6。該扁平凸緣5 0 2 之連結係允許該區段5 0 0能夠緊密地分隔，而在同時允 許固定件能夠被存取而不需要移除表面裝設流體部件12 -1 4。下方基板通道區段4 0係可以經由被固定在對角 相對之穿孔5 0 8中的固定件，而被固定至該通道區段5 0 0。因此，在將該區段5 0 0固定至該支撐區段3 1 2 以及固定至該下方高度基板316之固定件係經由該扁平 凸緣5 0 2而能夠完整地存取時，隨著將流體部件1 2 — 1 4裝設於其上所完成之整個通道區段5 0 0係可以從該 組件移除。 在本發明的另一方面，如同在第二十六圖以及第二十 七A圖中所顯示者，該流動橋接部5 0或是歧管焊件4 0 _ 32 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先Μ讀背面之注意事項再填寫本頁> --------訂---------線i 經濟部智慧財產局員Η消費合作杜印製 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（>；〇) 0係可以經由套板5 5 0而被固定至上方基板高度3 1 6 之東澳區段4 0。該套板5 5 0係可以爲不同長度者，並 且係具有一個形成於其中的通道5 5 2，該通道5 5 2係 用以接收並支撐該流動橋接部5 0與該歧管焊件4 0 0。 該套板係可以經由固定件5 5 4或熟於此技者能夠輕易思 及之任何其他方法而被固定至通道區段4 〇。該通道區段 4 0係可以選擇地包括有凹部5 5 6，用於使歧管焊件4 〇 0或是流動橋接部5 0局部地接收在其中。 某些氣體歧管系統之應用係需要被加熱的氣體，而此 加熱的氣體係可以藉由被裝設在模組化區段歧管之狹槽（ 例如是通道區段4 0之狹槽5 0 0 )中的加熱器匣殻5 7 0所達成。例如是加熱帶之其他加熱元件通常亦能夠被使 用。如果氣體路徑部件4 0、5 0係爲由不同的材料所製 成的話，則該部件之加熱將會導致熱膨脹。對於半導體系 統而言，較佳的情況是該流動橋接部5 0係包括有如同在 上文中所述之半導體品質材料，而鋁係可以被使用於歧管 通道區段4 0。鋁通道區段4 0將以一個較鋼流動橋接部 5 0爲大的速率而進行熱膨脹，而導致在該流動橋接部5 〇與表面部件12之相配璋或是上方基板高度中一個部件 之間的一個間隙，而此間隙可能會造成洩漏。如同在第二 十九圖中以誇大的方式所顯示者，該系統係可以被設計而 能夠預先負載，用以補償熱擴張的情形。爲了達成此一情 形，該流動橋接部5 0或是焊件4 0 0之高度係被製成稍 微大於該通道的高度，以使得當該系統被加熱至其操作溫 33 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） JH° 在'·- (請先閱讀背面之注意事項再填寫本頁)A7 _____B7_____ V. Description of the invention (> S) The drop clips 3 5 0 shown in Figures 22A to 22C are shaped, but do not have an upper edge 3 5 9. The drop clip 3 7 0 is inserted into the recess 3 7 2 of the bridging portion 3 2 0 after the seal 60 0 has been inserted therein, and is slightly compressed so that it can be compressed by a similar The spring is held in the recess. Finally, Figures 24B and 24C illustrate another embodiment of the drop clamp 3 8 0, which uses a plurality of flat flat ends 3 8 2 of the circumference, due to a spring-like action The flat end portion 3 8 2 keeps the holding clip 3 8 0 on the outer diameter of the flat extension portion 3 2 4 of the drop bridge portion 3 2 0. Any of the embodiments of the drop clip described above can be made of any flexible material such as plastic or metal. As described above, the lower substrate layer 3 1 6 includes a plurality of flow bridges 50 and / or manifold weldments 400, as in the twentieth A to twenty C and twenty-first figures. Shown by. The manifold weldment 400 includes one or more inlet ports 402 and one or more outlet ports 404, which are capable of communicating with a drop bridge 3 from an upper substrate layer 3 1 4 Port 20 is in fluid communication. The manifold weldment 4 0 0 can be formed by two elbow pipe parts 52 having a square shaped body and an intermediate portion 4 1 0, wherein the intermediate portion 4 1 0 preferably has a rectangular shaped body and one The internal through-flow channel is provided with one or more ports 404. The intermediate portion 410 may be formed by a cold-drawn pipe, which is welded to the elbow pipe part 52. In addition, the manifold weldment 400 may also include a standard end part 46 such as a V CR type part, instead of an elbow part 52. ______31___ The paper size is applicable to China National Standard (CNS) A4 (210 X 297 public love) (Please read the precautions on the back before filling this page) ---- Order --------- Line_ Economy Printed by the Intellectual Property Bureau employee consumer cooperative A7 B7 V. Description of the invention (&p; p The substrate layer 316 below can include channel sections 40 of different lengths, which has a heater for receiving the casing (not shown) ) Slot 4 1 2. The channel section 40 is fixed to the channel section located on the upper substrate layer 3 1 6 through the fixing member 4 2 2, and the fixing member 4 2 2 is positioned above. The perforation 4 1 4 of the channel section and into the alignment perforation 4 1 6 of the lower channel section 40. This allows the channel section 40 to be detached from the upper substrate layer and slide out from below And allows easier access. The twenty-fifth figure illustrates another embodiment of the channel section 500, which has a flat flange 502, and the flat The flange 5 0 2 is engaged or connected with the adjacent recess 5 0 4 of an adjacent channel section. The flat flange 50 2 has The mounting perforation 5 0 6 is used to receive the fixing member (not shown). The connection of the flat flange 5 2 allows the section 5 0 to be tightly separated, while at the same time allowing the fixing member to be Access without removing the surface-mounted fluid components 12 -1 4. The lower substrate channel section 40 can be fixed to the channel area via a fixing member fixed in a diagonally opposite perforation 508. Segment 5 0 0. Therefore, the fixing member for fixing the section 5 0 0 to the supporting section 3 1 2 and the lower height substrate 316 can be completely accessed through the flat flange 5 0 2 At this time, the entire channel section 5 0 0 can be removed from the assembly with the fluid components 1 2-1 4 installed thereon. In another aspect of the invention, as in the twenty-sixth figure And as shown in Figure 27A, the flow bridging part 50 or the manifold weldment 40 0 _ 32 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (please first Μ Read the notes on the back and then fill out this page > -------- Order --------- line i Member of the Intellectual Property Bureau of the Ministry of Economic Affairs Η Consumption Printed by Du printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and printed by the Consumer Cooperative of the A7 B7 V. Description of the invention (>; 〇) 0 is the Dongao section that can be fixed to the upper substrate height 3 1 6 via the cover plate 5 50 0 40. The cover plate 5 50 0 can be of different lengths, and has a channel 5 5 2 formed therein, the channel 5 5 2 is used to receive and support the flow bridge 50 and the manifold. Weldment 4 0 0. The cover plate can be fixed to the channel section 40 by means of a fixing member 5 54 or any other method that a person skilled in the art can easily think of. The channel section 40 can optionally include a recessed portion 5 56 for partially receiving the manifold weldment 400 or the flow bridge portion 50 therein. Some applications of gas manifold systems require heated gas, and the heated gas system can be installed in the slot of the modular section manifold (for example, slot 5 of channel section 40). 0 0). Other heating elements such as heating belts can usually also be used. If the gas path components 40 and 50 are made of different materials, the heating of the components will cause thermal expansion. For a semiconductor system, it is preferable that the flow bridging section 50 series includes a semiconductor-quality material as described above, and the aluminum series may be used in the manifold channel section 40. The aluminum channel section 40 will undergo thermal expansion at a rate greater than that of the steel flow bridge 50, resulting in the flow bridge 50 matching the surface member 12 or one of the components in the upper substrate height. A gap that could cause a leak. As shown exaggeratedly in Figure 29, the system can be designed to be pre-loaded to compensate for thermal expansion. In order to achieve this, the height of the flow bridge 50 or welding piece 400 is made slightly higher than the height of the channel, so that when the system is heated to its operating temperature 33, this paper size is applicable to China Standard (CNS) A4 (210 X 297 mm) JH ° in '·-(Please read the precautions on the back before filling this page)

經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（y ) 度時’該流動橋接部5 0或是焊件4 0 0的上方表面係能 夠相對於該通道之上方表面而齊平，如同在第二十九B圖 中所顯示者。另外，螺栓2 2係被預先負載，以使得當系 統被加熱至其操作溫度時，該螺栓係具有一個充分的張力 0 實現熱擴張問題的其他方式係顯示在第二十七B圖至 第二十七D圖。一個衝壓件580係具有形成於其中而用 於接收一個焊件4 0 0或流動橋接部5 0之通道。該通道 5 8 2係具有一個上升的凸出部5 8 4，該凸出部5 8 4 係具有一個類似彈簧的作用。該衝壓件5 8 0較佳係爲由 鋼所製成者，並且係被支撐在兩個托架6 0 0 (較好亦爲 由鋼所製成者）之間。該衝壓件5 8 0以及該托架6 0 ◦ 係可以藉由固定件而被固定至上方基板高度，其係可以由 一種例如是鋁等不同材料所製成。爲了補償系統之熱膨脹 ，該流動橋接部5 0或是焊件4 0 0之高度係被製成稍微 大於該衝壓件通道的高度，而由於其類似彈簧的特質將會 造成上升凸出部的變形。因此，當該系統被加熱至其操作 溫度時，該流動橋接部5 0或是焊件4 0 0的上方表面在 該上升凸出部5 8 4返回至其原始形狀時將能夠相對於該 通道之上方表面而齊平。因此，該上升凸出部5 8 4係作 用如同一個彈簧，而使該流動橋接部5 0或是焊件4 0 0 上升或下降，用以補償在上方基板高度與下方基板高度之 間熱膨脹之無法配合。或者，衝壓件係可以製造而具有一 個U形的通道.，而一個彈簧5 9 0係被置放在其中，如同 34 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -ϋ n n I n n n eat 1 ^-OJa an 1 ϋ ϋ (請先闓讀背面之注意事項再填寫本頁〉 線 :|5';;: A7Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (y) The upper surface of the mobile bridge 50 or welding piece 400 can be flush with the upper surface of the channel , As shown in Figure 29B. In addition, the bolts 2 and 2 are pre-loaded so that when the system is heated to its operating temperature, the bolts have a sufficient tension. 0 Other ways to achieve the thermal expansion problem are shown in Figures 27 to 2 Seventeen D figure. A stamping piece 580 has a passage formed therein for receiving a welding piece 400 or a flow bridge 50. The channel 5 8 2 has a raised protrusion 5 8 4, and the protrusion 5 8 4 has a spring-like function. The stamped part 5 8 0 is preferably made of steel, and is supported between two brackets 6 0 0 (preferably also made of steel). The stamped part 580 and the bracket 60 can be fixed to the height of the upper substrate by a fixing member, and can be made of a different material such as aluminum. In order to compensate for the thermal expansion of the system, the height of the flow bridge 50 or the weldment 400 is made slightly larger than the height of the passage of the stamped part, and the rising protrusions will deform due to its spring-like characteristics . Therefore, when the system is heated to its operating temperature, the upper surface of the flow bridging portion 50 or the weldment 4 0 0 will be able to be relative to the channel when the rising projection 5 8 4 returns to its original shape. The top surface is flush. Therefore, the raised projection 5 8 4 acts as a spring, so that the flow bridging portion 50 or the welding piece 400 rises or falls to compensate for the thermal expansion between the height of the upper substrate and the height of the lower substrate. Unable to cooperate. Alternatively, stamped parts can be manufactured with a U-shaped channel, and a spring 590 is placed in it, as 34 paper sizes are applicable to China National Standard (CNS) A4 (210 X 297 mm) -ϋ nn I nnn eat 1 ^ -OJa an 1 ϋ ϋ (Please read the precautions on the back before filling out this page> Line: | 5 ';;: A7

五、發明說明（彳〆) 在第二十七c圖中所顯示者。 第二十八圖係說明了本發明的另—個實施例，其中上 方基板高度3 1 6係由兩種不同的材料所形成。如同在第 二十八圖中所顯示者’-個底板6 i Q係嫌同形成麵6 2 2之側桿6 2 0而形成了一個u形的通道區段。該底板 6 0 0係可以由鋼或是金屬材料製成，而側壁6 2 〇則係 由較輕量且較便宜的不同材料（例如是鋁）所製成。鋼側 桿6 2 0連同鋼板6 1 0—起之使用係使得一個具有降低 熱膨脹之通道區段無法配合由S C Q材料所製成之流動橋 接部5 0。 第三十A圖以及第三十B圖係說明了通道區段7 〇 〇 之另一個實施例。如同在圖示中所顯示者，一個輕量化且 不昂貴而形成的通道區段7 0 0係可以藉由使用一個底板 7 1 0而實現，該底半7 1 0係可以由片狀金屬所形成， 而側壁則由U形片狀金屬衝壓件所形成。一個下凹區域係 被提供，這是爲了允許固定件能夠將側壁結構固定至底板 上，而在固定件被裝設在通道中時，能夠允許固定件之頭 部能夠與該流動橋接部5 0或是焊件4 0 0的上方表面齊 平。第三十B圖係爲第三十A圖之變化形式，其中一個具 有外壁及U形通道之上方衝壓件7 3 0係與一個具有凸緣 端部之下方底板相配合’其中該凸緣端部係被焊接至該外 壁的內部。 當本發明之較佳實施例係已被說明且敘述之時’必須 了解的是對於熟習此技者將能夠輕易地思及其他的變化形 35 _ (請先間讀背面之注意事項再填寫本頁) * --------訂---------線、 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 B7__ 五、發明說明（以） 式。因此，本發明並非受限於文中所敘述與說明之特殊實 施例，而是以所附之申請專利範圍來界定本發明之範圍與 精神。 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）V. Description of the invention (i) The one shown in figure 27c. The twenty-eighth figure illustrates another embodiment of the present invention, in which the upper substrate height 3 1 6 is formed of two different materials. As shown in the twenty-eighth figure, a bottom plate 6 i Q is a side bar 6 2 0 forming a surface 6 2 2 and forming a u-shaped channel section. The bottom plate 6 0 0 can be made of steel or metal materials, and the side wall 6 2 0 is made of a lighter and cheaper different material (such as aluminum). The use of the steel side rod 6 2 0 together with the steel plate 6 1 0 makes a channel section with reduced thermal expansion unable to fit the flow bridge portion 50 made of S C Q material. Figures 30A and 30B illustrate another embodiment of the channel segment 700. As shown in the illustration, a lightweight and inexpensive channel section 7 0 0 series can be realized by using a bottom plate 7 1 0, which can be made of sheet metal. Is formed, and the side wall is formed by a U-shaped sheet metal stamping. A recessed area is provided to allow the fixture to secure the side wall structure to the floor, and to allow the head of the fixture to communicate with the flow bridge when the fixture is installed in the channel. Or the top surface of the weldment 400 is flush. Figure 30B is a variation of Figure 30A, in which an upper stamped part with an outer wall and a U-shaped channel 7 30 is matched with a lower base plate with a flanged end, wherein the flanged end The system is welded to the inside of the outer wall. When the preferred embodiment of the present invention has been described and narrated, 'must understand that those skilled in the art will be able to easily think about other variations. 35 _ (Please read the precautions on the back before filling in this Page) * -------- Order --------- line, printed by the Consumers' Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs, this paper is printed in accordance with China National Standard (CNS) A4 (210 X 297) (Centi) A7 B7__ 5. Description of the invention (in). Therefore, the present invention is not limited to the specific embodiments described and illustrated herein, but the scope and spirit of the present invention is defined by the scope of the attached patent application. (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is in accordance with China National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

經濟部智慧財產局員工消費合作社印製， Α8 Β8 C8 D8 六、申請專利範圍 1、 一種橋接零件’其係使用於流體歧管系統中，用 以與兩個或是更多個例如是閥體、調節器、壓力傳感器、 質量流量控制器、以及相似部件等等之流體部件以流體相 連通，該橋接零件係包括有： 一個第一肘管零件，其係被連接至一個第二肘管零件 ，而該所連接之肘管零件係具有一個流經其間之內部流體 通道；該橋接零件之該內部通道係具有一個進口端部以及 一個出口端部，而該進口端部係與該第一流體部件之一個 出口埠以流體'相連通，並且該橋接元件之出口端部則係與 一個第二流體部件之一個進口埠以流體相連通。 2、 根據申請專利範圍第1項所述之橋接零件，其更 包括有複數個金屬密封件，該金屬密封件其係被***在該 橋接零件之內部通道與該流體部件之埠之間，並且以該流 體部件之埠來密封該橋接零件之內部通道。 3、 根據申請專利範圍第1項所述之橋接零件，其中 該橋接零件係爲由不銹鋼材料所製成者。 4、 一種橋接零件，其係使用於流體歧管系統中，用 以與三個或是更多個流體部件以流體相連通，其中一個或 是更多個該流體部件係具有一個單一埠，該橋接零件係包 括有： 一個第一與第二肘管零件，其分別有一個端部連接至 —T形零件；該T形零件係座落在諸肘管零件之間；該肘 管零件之每一個與該τ形零件係具有一個使其彼此以流體 相連通之內部流體通道； 本紙張尺度適用中國國家梂準（CNS ) Α4規格（210Χ297公釐） 責· ίΊ (請先閱讀背面之法意事項再填寫本頁)Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs, Α8 Β8 C8 D8 VI. Application for Patent Scope 1. A bridging component 'It is used in a fluid manifold system to communicate with two or more such as valve bodies The fluid components of regulators, pressure sensors, mass flow controllers, and similar components are in fluid communication. The bridging parts include: a first elbow part connected to a second elbow part And the connected elbow pipe part has an internal fluid passage flowing therethrough; the internal passage of the bridge part has an inlet end and an outlet end, and the inlet end is connected with the first fluid An outlet port of the component is in fluid communication, and an outlet end of the bridging element is in fluid communication with an inlet port of a second fluid component. 2. The bridging part according to item 1 of the scope of the patent application, further comprising a plurality of metal seals which are inserted between the internal passage of the bridging part and the port of the fluid part, and The internal passage of the bridge part is sealed by the port of the fluid part. 3. The bridging part according to item 1 of the scope of patent application, wherein the bridging part is made of stainless steel. 4. A bridge part used in a fluid manifold system for fluid communication with three or more fluid components, one or more of which have a single port, the The bridging part system includes: a first and a second elbow tube part, each of which has an end connected to a T-shaped part; the T-shaped part is located between the elbow tube parts; each of the elbow tube parts An internal fluid channel is connected with the τ-shaped part to allow them to communicate with each other in fluid; This paper size is applicable to China National Standard (CNS) A4 specification (210 × 297 mm). Ί 请 (Please read the legal meaning on the back first) (Fill in this page again) 經濟部智慧財產局員工消費合作社印製 A8 B8 SI 六、申請專利範園 該零件之該內部通道係具有一個進口端部以及一個第 一與第二出口端部’而該進口端部係與該第一流體部件之 一個出口璋以流體相連通’並且該流體通道之諸出口端部 則係分別與一個第二與第三流體部件之一個進口端部以流 體相連通。 5、 一種模組化流體歧管系統，其係用於連接一個或 是多個表面裝設類型而具有一個進口埠與一個出口堤之流 體部件，該模組化系統係包括有： 一個或是多個橋接零件，其係具有一個流經其間之內 部流體通道；該橋接零件之內部通道係具有一個進口端部 以及一個出口端部，該進口端部係用於連接至該第一流體 部件之一個出口捧’而該出口端部係用於連接至該第二流 體部件之一個進口埠，因此’當系統係被組合時’該橋接 零件之內部通道係與該第一及第二流體部件以流體相連通 〇 6、 根據申請專利範圍第5項所述之模組化系統’其 更包括有： 一個墊板，其係用於以一種接近地分隔的方式來支撐 該橋接零件，並且將該流體部件裝設於其上’其中該墊板 係支承並連接該橋接零件與該流體部件。 7、 根據申請專利範圍第5項所述之模組化系統’其 中該墊板更包括有一個溝槽，其係用於以一種接近地分隔 的方式而使該橋接零件***於其中。 8、 根據申請專利範圍第5項所述之模組化系統’其 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先聞讀背面之注意事項再填寫本頁)Printed by A8 B8 SI of the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 6. The internal passageway of the part for patent application has an inlet end and a first and a second outlet end. An outlet 璋 of the first fluid component is in fluid communication 'and the outlet ends of the fluid channel are in fluid communication with an inlet end of a second and third fluid component, respectively. 5. A modular fluid manifold system, which is used to connect one or more surface-mounted fluid components with an inlet port and an outlet bank. The modular system includes: one or A plurality of bridge parts having an internal fluid passage flowing therethrough; the internal passage of the bridge part has an inlet end and an outlet end, and the inlet end is used for connecting to the first fluid part An outlet port, and the outlet end is used to connect to an inlet port of the second fluid component, so that when the system is combined, the internal passage of the bridge component is connected with the first and second fluid components Fluid communication. According to the modularized system described in item 5 of the scope of the patent application, it further includes: a pad, which is used to support the bridge part in a closely spaced manner, and A fluid component is mounted thereon, wherein the backing plate supports and connects the bridge component and the fluid component. 7. The modular system according to item 5 of the scope of the patent application, wherein the backing plate further includes a groove for inserting the bridge part therein in a closely spaced manner. 8. According to the modular system described in item 5 of the scope of the patent application, the paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the precautions on the back before filling this page) A8 B8 C8 D8 六、申請專利範圍 更包括有一個或是多個密封件，其係用於密封在該橋接零 件之該端部與該流體部件之該埠之間的連接。 9、根據申請專利範圍第5項所述之模組化系統，其 更包括有一個定位板，其係被裝設在該流體部件與該橋接 零件之間；該定位板更包括有對準穿孔，用於將該流體部 件裝設於其上；該定位板係具有埠穿孔，其係被對準而能 夠將該橋接零件之進口及出口端部容置於其中，以使得該 部件之進口及出口埠能夠與該橋接零件之該進口及出口端 部以流體相連通。 1 0、根據申請專利範圍第9項所述之模組化系統， 其中用於容置一個墊圈之凹部係被設在定位板上方表面與 該橋接零件之進口和出口端部之間。 1 1、根據申請專利範圍第1 〇項所述之模組化系統 ，其中該墊圈係爲金屬者。 1 2、一種模組化流體歧管系統’其係用於連接一個 或是多個流體部件，該流體部件係包括有一個進口埠以及 一個或是多個出口埠，該歧管系統係包括有： 一個或是多個橋接零件’其係具有一個進口端部以及 一個出口端部以及一個連接該端部之內部通道； 一個定位板，其係具有一個用於將該流體部件裝設於 其上之上方表面’以及複數個與該流體部件之該進口及出 口埠對準之穿孔； 該定位板係具有一個用於裝設該橋接零件之下方表面 ;每一個橋接零件之該進口端部係與一個流體部件之一個 私紙張尺度適用中國國家標準（CNS ) A4规格（210X297公釐） (請先聞讀背面之注意事項再填寫本頁) 訂 AT. 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 A8 B8 ______S__ 六、申請專利範圍 出口埠以流體相連通，並且每一個橋接零件之出口端部係 與另一個流體部件之一個進口埠以流體相連通。 1 3、根據申請專利範圍第1 2項所述之模組化系統 ，其中用於容置一個墊圈之凹部係被設在定位板上方表面 與該橋接零件之進口和出口端部之間。 1 4、根據申請專利範圍第1 3項所述之模組化系統 ，其中該墊圈係爲金屬者。 1 5、根據申請專利範圍第1 2項所述之模組化系統 ，其中保持夾係被設置，用以將該橋接零件固定至該定位 板。 1 6、根據申請專利範圍第12項所述之模組化系統 ，其中該橋接零件之該端部係被按壓而配合在該定位板之 該穿孔中。 1 7、根據申請專利範圍第1 2項所述之模組化系統 ’其中該橋接零件中的一個或是多値更包括有一個T形零 件，該T形零件係座落在一個第一與第二肘管零件之間； 該T形零件與該肘管零件係具有一個使其彼此以流體相連 通之內部流體通道；該T形零件係具有一個與該肘管零件 埠相對的埠，並且被對準而與另一層之一個橋接零件相配 合。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁)A8 B8 C8 D8 6. The scope of patent application even includes one or more seals, which are used to seal the connection between the end of the bridge part and the port of the fluid part. 9. The modular system according to item 5 of the scope of patent application, which further includes a positioning plate, which is installed between the fluid component and the bridge component; the positioning plate further includes an alignment perforation For positioning the fluid component thereon; the positioning plate is provided with a port perforation which is aligned so as to accommodate the inlet and outlet ends of the bridging component therein so that the inlet and outlet of the component The outlet port can be in fluid communication with the inlet and outlet ends of the bridge part. 10. The modular system according to item 9 of the scope of the patent application, wherein a recess for accommodating a gasket is provided between the upper surface of the positioning plate and the inlet and outlet ends of the bridge part. 11 1. The modular system according to item 10 of the scope of patent application, wherein the gasket is made of metal. 1 2. A modular fluid manifold system is used to connect one or more fluid components. The fluid component includes an inlet port and one or more outlet ports. The manifold system includes: : One or more bridging parts' having an inlet end and an outlet end and an internal passage connecting the end; a positioning plate having a means for mounting the fluid component thereon The upper surface 'and a plurality of perforations aligned with the inlet and outlet ports of the fluid component; the positioning plate has a lower surface for mounting the bridge part; the inlet end of each bridge part is connected with A private paper size of a fluid part applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the notes on the back before filling out this page) Order AT. Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives, Printing Economy Printed by the Consumer Cooperatives of the Ministry of Intellectual Property Bureau A8 B8 ______S__ VI. Patent application scope The outlet ports are fluidly connected, and each bridge The outlet end of tie with a member of the other fluid inlet port in fluid communication. 1 3. The modular system according to item 12 of the scope of the patent application, wherein a recess for accommodating a gasket is provided between the upper surface of the positioning plate and the inlet and outlet ends of the bridge part. 14. The modular system according to item 13 of the scope of patent application, wherein the gasket is made of metal. 15. The modular system according to item 12 of the scope of the patent application, wherein a retaining clip is provided to fix the bridge part to the positioning plate. 16. The modular system according to item 12 of the scope of patent application, wherein the end of the bridge part is pressed to fit in the perforation of the positioning plate. 17. According to the modular system described in item 12 of the scope of the patent application, 'wherein one or more of the bridge parts further includes a T-shaped part, the T-shaped part is located in a first and Between the second elbow tube part; the T-shaped part and the elbow tube part have an internal fluid channel for fluid communication with each other; the T-shaped part has a port opposite the port of the elbow tube part, and Aligned to mate with a bridge part on another level. This paper size applies to China National Standard (CNS) A4 (210X297 mm) (Please read the precautions on the back before filling this page)