經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（1 ) 〔本發明所屬之技術領域〕 本發明係有關於一種爲捕獲、除去自粉塵發生發生的 粉塵之粉塵除去裝置及粉塵除去方法，尤其是有關於能將 半導體元件製造過程中所生成的0.3左右以下的粉 塵，長期間有效的捕獲，且能達到裝置小型化之粉塵除去 裝置及粉塵除去方法。 〔習知技術〕 所謂粉塵發生源，係就半導體元件製造工業、汽車工 業、塑膠工業、資源工業、陶瓷工業、粉末冶金工業、洗 劑工業、觸媒工業、鐵素體工業、顏料工業、農藥工業、 飼料加工業、食品工業、廢棄物處理產業、生物關連產業 、化妝品工業及醫藥品工業等領域，自各種設備產生粉塵 之問題，譬如眾所周知產生粒徑0 . 〇 1至5 0 Ai m左右 非常微細的粉塵。 尤其是最近電腦及應用電腦的電子控制裝置的進步爲 瞠目而視，隨此，使用在電腦的半導體元件的製造技術及 其生產量也明顯的急速成長，作爲該半導體元件的原料之 半導體，實際使用鍺（G e )、矽（S i )、鎵砷 (GaAs)、鎵燐（GaP)等，但在該些半導體元件 製造過程所發生的粉塵，其本身從公害防止的觀點即爲禁 止散發的有害物質，又含有這@_氣體爲有害物質，甚至會 吸附環境中的有害物質均爲眾所周知。 針對半導體製造過程所使用，或者生成的有害物質’ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -4- 徵II (諳先閱讀背面之注意事項再填寫本頁) 訂 A7 ____'___B7 五、發明説明（2 ) 係爲砂系、硼系、氧化金屬二二羧系、鹵素、鹵化物、氮 氧化物、其他等，但現今不許含有該些有害成份或粉塵的 排放氣體依然排放在大氣中，首先，除了從排放氣體中除 去粉塵外’還要施以種種處理’得以安全淸淨的氣體排放 〇 於是，爲除去含在來自上述粉塵發生源的氣體中的粉 塵’提供利用旋風除塵器、洗滌器、文丘里洗滌器、袋濾 器、電子集塵機、通風口、沈澱室等。 但，以該些裝置捕獲的塵埃的極限粒徑，係旋風除塵 器爲3 . Oym，洗滌器爲1 . Oym，通風口爲10 y m，沈澱室爲5 0 Mm，該些習知裝置有效範圍在 0 · 0 1至5 0 的廣泛範圍，但不能捕獲非常微細的 粉塵。 又，雖利用文丘里洗滌器、袋濾器及電子集塵機，即 能捕獲0 . 1 //m的粉塵，但該些裝置龐大昂貴，而具有 捕集的粉塵廢棄處理麻煩等之問題。 經滴部中央標準局員工消費合作社印製 粉塵發生源，尤其是觀察半導體製造過程所發生的粉 塵粒徑分佈，0 . 3 M m左右以下的粉塵佔大部份，於是 ，以開發能捕獲該0.3左右以下的塵埃之集塵裝置 而反覆實驗，但在其過程，一旦採用由厚度1 mm左右的 賣毛狀的不織布所製成之過濾網，即知能充分捕獲〇 . 3 β m左右以上的粉塵。 _ 於是爲達到該過濾網的實用化，得到高壓的逆壓來洗 淨該過濾網，試著達到其再利用的情形。但是’由於過濾 -5- (請先閱讀背面之注意事項再填寫本頁) 本纸張尺度適用中國國家榇準（CNS ) A4規格（2】0X297公釐） 經濟部中央標隼局員工消费作社印製 A 7 ___B7______ 五、發明説明（3 ) 網的網目很微小，需得到相當高壓的逆壓，因此，硏判必 須爲大型且高性能之洗淨裝置，裝置整體的舖設面積大， 而除了裝置非常昂貴外，維護費用也很昂貴。 對此，提供一如第6圖所示，將過濾網1 0 1形成縱 軸的圓筒形，同時設有黏在該過濾網1 0 1內側面的刷 1 0 2，邊將該刷1 0 2滑接在過濾網1 0 1邊在其一端 導入氣體，通至刷1 0 2之中而從過濾網1 0 1的內側自 外側穿流，一方面將附著在過濾網1 0 1的粉塵利用旋轉 刷1 0 2掃落之自動再生型集塵裝置。 該過濾網1 0 1的內側及外側，一旦除去含在粉塵的 氣體中的水份及油份之後，將含在該粉塵的氣體貫通至過 濾網以除去該粉塵爲主旨，理所當然有關導入氣體的這側 爲內側，該氣體流經過濾網1 0 1，排出除去粉塵的淸淨 化的氣體的這側爲外側。 〔本發明欲解決之課題〕 因而，硏判將該自動再生型集塵裝置，譬如實際作爲 半導體元件製造過程的粉塵除去裝置來試用時，在比預想 更短期間過濾網1 0 1的壓力損失變大，且即使旋轉刷 1 0 2還是無法再生過濾網1 0 1。 於是，甚至重新銳意檢討的結果，從使用在半導體製 造過程等的粉塵發生源的真空^_浦或油旋轉機漏出的油份 ，或者用於硏磨或切斷等的水性或油性的工作液等的液體 成份係飄浮在成爲微小滴狀所處理的氣體之中，附著在油 - I ί II— - - . I In - ( n I I ^^^1 UK ^^1· (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -6- A7 _______B7____ 五、發明説明U ) 槽周面之後，隨著氣流，運SJJ過濾網1 0 1而與粉塵一同 附著在其表面，硏判爲該過濾網堵塞的原因。 且附著在該過濾網1 0 1表面的油份或水份係藉由氣 體壓力或毛細管現象而滲透儲存在過濾網1〇1的網目中 ’而一旦與粉塵一同睹滿附著在過濾網1 0 1的表面，並 無法以刷1 0 2掃除的程度除去，其結果，硏判爲引起過 濾網堵塞不能再生的情形。 本發明係有鑑於上述技術性課題而完成者，其目的爲 提供一將從粉塵發生源，尤其是半導體元件製造過程所發 生的0 . 3 Zim左右以下的粉塵於長期間有效捕獲，且達 到裝置小型化之粉塵除去裝置及粉塵除去方法。 〔用以解決課題之手段〕 經濟部中央標準局員工消費合作社印製 (請先閱讀背面之注意事項再填寫本頁) 亦即，有關本發明之粉塵除去裝置（以下簡稱本發明 裝置），係具有關於將含在從粉塵發生源導入氣體中的粉 塵，除去之粉塵除去裝置者，將從粉塵發生源導入氣體中 的水份及油份，除去之液分離裝置和、從該液分離裝置的 氣體導入之集塵裝置，該集麈裝置，係具備有形成筒狀之 過濾網和、形成在該過濾網外側之淨氣室和、具有包圍該 些個過濾網及淨氣室，且在過濾網內側導入來自前述液分 離裝置的氣體之導入口和在過濾網外側將前述淨氣室連通 至外部之導出口之匣體和、滑接在前述過濾網內側之粉塵 除去具，驅動該粉塵除去具之驅動裝置，一方面，前述液 分離裝置，係具備有導入來自前述粉塵發生源的氣體之導 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 經满部中央標準局員工消費合作社印製 A7 B7 五、發明説明（5 ) 入口和連通至上述集塵裝置的導入的導出口之匣體和、從 該匣體內的導入口至導出口的液分離室分隔配置之圓盤狀 液分離用旋轉刷和、驅動該刷之驅動裝置，且該液分離用 旋轉刷的厚度，爲上述集塵裝置的過濾網長度的1至7 5 %的尺寸。 本發明裝置中，滑接在過濾網內側的粉塵除去具，係 列舉可以除掉、擦拭或拍打過濾網的內側，譬如使用刷子 或刮刀等，將該些邊接觸在過濾網的內側邊向圓周方向旋 轉（單一方向旋轉）、轉動（交互重複順時針方向或者逆 時針方向旋轉），或者將刷子等向軸向上下或者左右運動 ，或者組合該些個運動。 具體而言，譬如刷子或刮刀接觸在過濾網內側旋轉或 轉動，過濾網爲縱型時，刷子或刮刀是接觸在過濾網內側 ，將該刷子等做上下運動，過濾網爲橫型時，刷子或刮刀 是接觸在過濾網的內側，將該刷子等做左右運動，對軟管 通過加壓氣體，使該管做激烈運動，像鞭子拍打過濾網的 內側也可。 又，本發明裝置之淨氣室，係將含粉塵的氣體貫通至 過濾網，從除去該粉塵的這一側（過濾網的外周面）到達 連通外部的導出之間的空間之意。 本發明裝置中，過濾網的內側及外側，除去含粉塵的 氣體中的水份及油份之後，將含_該粉塵的氣體貫通至過濾 網，除去該粉塵爲宗旨時，導入有關的氣體這一側爲內側 ，該氣體會流過過濾網，不必說排出除去粉塵的淸淨化氣 (請先閲讀背面之注意事項再填寫本頁) 裝· 訂 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ 8 - 經濟部中央標準局貝工消费合作社印繁 A7 B7 五、發明説明（6 ) 體這一側爲外側。 ._ 又，本發明裝置中，希望設有加上以上的構成，從粉 塵發生源依序經過液分離裝置、集塵裝置，形成流至外部 的氣流之送風機。 又’本發明裝置中，希望對應需求，在液分離室的底 部配置吸水性聚合物、吸油性聚合物或者吸水性聚合物和 吸油性聚合物的積層體，在此吸收氣體中的分份及油份， 後處理簡便。 甚至，本發明裝置中，液分離室的下部也能從其上部 分離。藉由此種構成，希望液分離室內的維護管理極容易 〇 又’本發明裝置中，集塵裝置的粉塵除去具乃由粉塵 除去用旋轉刷製成，該粉塵除去用旋轉刷，以位於前述集 塵裝置的過濾網軸心的中心軸爲中心，毛乃由形成螺旋面 並排的螺旋刷製成，該螺旋刷也可爲利用前述集麈裝置的 驅動裝置旋轉的構成，藉此，能有效除去粉塵。此時，形 成螺旋狀的粉塵除去用旋轉刷，除爲連續形成外，也可爲 間斷形成，整體做成螺旋狀也可。 又，本發明裝置中，集塵裝置的粉塵除去具，乃由以 位於集塵裝置的過濾網的軸心之中心軸和將此植毛於中心 軸的毛所製成，該植毛的毛爲滑接在前述集塵裝置的過濾 網’亦即，如前所述，亦可構邊接觸至前述集塵裝置的 過濾網邊向圓周方向旋轉、轉動，或者向軸向運動，藉由 利用前述驅動裝置的驅動，除去附著在該過濾網的粉塵。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -9 - I-------C裝II (讀先閱讀背面之注意事項再填寫本頁) •訂 經满部中央標準局員工消費合作社印掣 A7 _____B7___ 五、發明説明（7 ) 甚至，本發明裝置中，有關的裝置爲縱型的粉塵除去 裝置時，集塵裝置則配置在液分離裝置的上方，也兼作集 塵裝置之導入口和液分離裝置之導出口。藉由這麼做，裝 置小型化，構造簡單，拆除極容易，且極經濟。 又，本發明裝置中，集塵裝置的粉塵除去具和液分離 裝置的液分離用旋轉刷具有共通的中心軸，粉塵除去具的 驅動裝置和液分離用旋體刷的驅動裝置可爲兼用構成，藉 此構造簡單化。 尤其1本發明裝置中，集塵裝置的過濾網係用積層從 内側至外側依序變小網目的三層以上的過濾網之積層過濾 網所構成，若依此也可有效除去微細的粉塵。 此時，積層過濾網，係由目網大小爲2 0 0 // m左右 之第一層過濾網和、網目大小爲5 0至2 0 0.// m左右之 第二層過濾網和、網目大小爲比第二層過濾網小比1 y m 大之第三層過濾網所製成，但希望能長時間有效除去粉塵 〇 本發明裝置中，.積層過濾網的厚度，若是能在有效且 經濟除去粉麈的範圍並不特別限定，但一般爲〇 . 5至 2 Omm。亦即’積層過濾網的厚度未滿〇 . 5mm時， 無法達成所要的粉塵除去率，超過2 〇mm時，過爐網的 壓力損失增大，其結果需要大型的送風機，設備費用增加 。由該些觀點，希望積層過濾的厚度最好爲1至1 〇 mm，更好爲1 . 5至7 · 5mm。此時，希望第一層過 濾網的厚度爲積層過濾網整體厚度的2 0至5 0%，第二 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ 1〇 · ' -----------i;裝-- fJ (請先閱讀背面之注意事項再填寫本頁) ,va 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（8 ) 層過濾網的厚度爲積層過濾辑整體厚度的3 0至6 0%， 第三層過濾網的厚度爲積層過濾網整體厚度的1至2 5 % 〇 本發明裝置，適用於有效除去來自上述粉塵發生源的 粉塵，但尤其最適用於粉塵發生源發生於大量含有微粉塵 的半導體元件製造過程中的粉塵之粉塵設備及以附帶於此 的粉塵設備。 有關本發明之粉塵除去方法（以下簡稱本發明方法） ，係針對附去含在從粉塵發生源所發生的氣體中的粉塵之 粉塵除去方法，其特徵爲：包含爲達成上述目的，將前述 氣體導入集塵裝置之前，從前述氣體除去油份及水份之過 程和、在從形成筒形的集塵裝置的過濾網的內側至外側， 流過前述氣體而過濾之過程。 本發明方法，過濾網的內側及外側，除至含有粉塵的 氣體中的水份及油份之後，使含在該粉塵的氣體貧通至過 濾網，除去該粉塵爲宗旨時，導入有關的氣體的這一側爲 內側，該氣體流過過濾網，不必說排出除去粉塵的淸淨化 氣體的這一側爲外側.。 本發明方法，藉由粉塵除去具滑接至集塵裝置的過濾 網，亦即，如前所述，藉由邊接觸在集塵裝置的過濾網邊 向圓周方向旋轉或者轉動或者軸向運動，或者也可組合該 些個運動，淸理該過濾網的表面」除去過濾網捕捉的粉塵 〇 此時，粉塵除去具乃藉由隨時，總之間斷或者經常連 本紙張尺度適用中國國家標準（CNS ) A4规格（210X297公釐） -H · 〈^— (讀先閱讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印製 A7 _______B7 _ 五、發明説明（9 ) 續滑接至集塵裝置的過濾網亦即，藉由邊接觸在集塵裝 置的過濾網邊向圓周方向旋轉或者往復運動或者軸向往復 運動，或者也可藉由組合該些運動，淸理該過濾網的表面 ，除去過濾網捕捉的粉塵。 粉麈除去方法中，所用的粉塵除去具，乃列舉與本發 明裝置相同者。 亦即，粉塵除去具，係列舉可以除掉、擦拭或拍打過 濾網的內側，譬如使用刷子或刮刀等，將該些邊接觸在過 濾網的內側邊向圓周方向旋轉（單一方向旋轉）、轉動（ 交互重複順時針方向或者逆時針方向旋轉），或者將刷子 等向軸向上下或者左右運動，或者組合該些個運動者。 具體而言，譬如刷子或刮刀接觸在過濾網內側旋轉或 轉動，過濾網爲縱型時，刷子或刮刀是接觸在過濾網內側 ，將該刷子等做上下運動，過濾網爲橫型時，刷子或刮刀 是接觸在過濾網的內側，將該刷子等做左右運動，對軟管 通過加壓氣體，使該管做激烈運動·，像鞭子拍打過濾網的 內側也可。 藉由如以上之構成，若按本發明（包含本發明裝置和 本發明方法之兩者），將來自粉塵發生源含有粉塵的氣體 導入液分離裝置，分離水份、油份等之後，導入集塵裝置 。因而在集塵裝置的過濾網表面，不必擔心會附著水份、 油份或者與這些一同吸附的粉q_，利用氣體中的水份或油 份以促進防止過濾網的堵塞。 而且，因所謂集塵裝置，使用過濾網形成筒狀，將氣 (請先閲讀背面之注意事項再填窍本頁) 裝. 訂 X- 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -12- 經滴部中央標準局員工消費合作社印製 A7 ___B7____^_ 五、發明説明（1〇 ) 體從其內側流過至外側，一方面，以配置在其內側的粉塵 除去具，自該過濾網除去粉塵，達到集塵力的回復之自動 再生型集塵裝置，故因集塵用過濾網的再生不必設置大規 模的逆洗裝置，可將裝置整體小型化。 然後，尤其是因本發明中，藉由液分離裝置的液分離 用旋轉刷子的厚度，爲集塵裝置的筒狀過濾網厚度的1至 7 5%，最好爲3至6 0%，更理想爲5至5 0%的尺寸 ，由於該旋轉刷子徒增通氣性不良，不會導致送風機的大 型化或處理能力降低，能有效除去來自粉塵發生源的氣體 中的水份或油份，防止集塵裝置的過濾網的水份或油份的 附著，或隨此的該過濾網的自動再生能力降低乃至喪失。 亦即，液分離用旋轉刷子的厚度，未滿筒狀谭濾網長度的 .1%時，無法達成所要的水份及油份的除去率，一方面， 超過7 5%時，會導致壓力損失增大，降低處理氣體的導 入效率，爲達成所要的氣體處理效率，必需將設備大型化 ，增加設備費用，故任一種情形均不理想。 〔發明之實施形態〕 以下，根據圖面具體說明本發明之實施形態。 有關本實施形態之粉塵除去裝置，粉塵發生源乃爲於 半導體元件製造過程中發生微粒子粉塵之微粒子粉塵發生 源1 ，如第1圖構成所示；該粉-除去裝置，係具有在上 述微粒子粉塵發生源1以導出管2連通之液分離裝置3和 、直接結合在該液分離裝置3的上側之自動再生型集塵裝 I I I: - - —I— :- I I -i V'*良 i I I - I— 1^1 X , 03 *τ (諳先閱讀背面之注意事項再4荈本頁} 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） -13- A 7 ______B7_ 五、發明説明（11 ) 置4和、自該集塵裝置導出之..辨氣管5和、介設在該排氣 管5之有害氣體處理裝置6及送風機7。 上述送風機7，係可爲將氣體自微粒子粉塵發生源1 經由導出管2、液分離裝置3、集塵裝置4、排氣管5以 及有害氣體處理裝置6排出大氣中的構成，如圖所示，除 設在排氣管5上之外，譬如即可介設在吸入設在微粒子粉 塵發生源1的大氣之吸氣管’又可介設在導出管2，或者 也可設在液分離裝置3內或者集塵裝置4內。 藉由該送風機7，將來自微粒子粉麈發生源1的氣體 ，經由導出管2、液分離裝置3、集麈裝置4、排氣管5 以及有害氣體處理裝置6，形成排出大氣中之氣流時，在 微粒子粉塵發生源1所發生的微粒子粉塵及侵入該微粒子 粉塵發生源1的水份及油份，附著該氣流，或者壓在該氣 流，經由導出管2，導入液分離裝置3，如後面詳加說明 ，以該液分離裝置3除去水份、油份及比較大的徼粒子粉 塵之後，更除去導入集塵裝置4所殘留的微粒子粉塵。 經滴部中央標準局員工消費合作社印繁 因從集塵裝置4排出的氣體，係爲除去水份、油份及 微粒子粉塵者，但包含有害氣體成份，甚至導入有害氣體 處理裝置6，此例主要以氧化、還原、中和等的化學處理 或活性碳或沸石等的吸附材料來處理，無害化之後，排出 大氣中。 上述液分離裝置3係具有匣3 1，在該匣體3 1的 內部形成液分離室3 2。又，從該匣Μ 3 Γ的下端在所定 高度的位置，形成將液分離室3 2連通至導出管2之入口 -14- (讀先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） 經漪部中决標準局員工消費合作社印製 A7 ______B7___ 五、發明説明（12 ) 33，同時在上壁34，係發成圓筒狀之開口部，將液分 離室3 2連通至集塵裝置4之出口 3 5。 上述匣體3 1的材料並不特別限定，譬如可使用紙、 木、合成樹脂或者金屬等，但必需具有耐氣流壓力程度的 機械強度，特別是剛性。 本實施形態，係以機械強度優，而耐候性、耐藥品性 及耐酸性、耐鹼性及耐熱性優之纖維強化合成樹脂（ FRP)形成匣體31。 又，上述匣體3 1的形狀，係只要爲可在內部形成液 分離室3 2的中空形狀，並不特別限定，可形.成立方形、 直方形等之多角立方形、圓筒形、橢圓形等。 本實施形態，匣體3 1，係藉由彎曲平板材料、手工 層壓法、沖壓層壓法、真空袋成型法、加壓袋成型法、高 壓成型法、板材冷壓成型法、擠壓成型法、儲油成型法、 射出成型法、減壓注入成型法、配模成型法、SMC成型 法等公知之F R P成型法形成簡單成型之圓筒形。 甚至，上述匣體3 1的大小可配合預先求得的單位時 間之處理量、後述的吸油性聚合物8、吸水性聚合物9等 的交換週期等之處理能力來設計。 上述液分離室3 2，係最好形成在匣體3 1的內部， 也可以在匣體3 1的內部設置區隔液分離室3 2的分隔壁 ，但本實施形態，係爲簡單構成_，同時爲達小型化及輕量 化，以匣體3 1本身構成液分離室3 2的周圍壁。 甚至，上述液分離裝置3，係設有內接在液分離室 (讀先閲讀背面之注意事項再填寫本頁) I h. p 裝- 訂 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -15- 經濟部中央標卑局負工消費合作社印絮 A7 _______B7 ___ 五、發明説明（Ί3 ) 3 2 2的圓筒形出口 3 5的J|[圍壁，可向縱軸旋轉的圓盤 狀之液分離用旋轉刷3 6，同時其驅動源，具備兼具集塵 裝置4的粉塵除去具的粉塵除去用螺旋刷4 2的驅動裝置 之驅動裝置Μ，將液分離室3 2內自入口 3 3向出口 3 5 上昇的氣流，全部通過連續旋轉的液分離用旋轉刷3 6的 構成。 該液分離用旋轉刷3 6的毛材料並未特別限定，譬如 可從天然或或合成纖維鋼、黃銅、銅等之金屬線，該些複 合材料等，使用一般刷毛之中自由選擇。 又，該液分離用旋轉刷3 6的毛尖長度並未特別限定 ，從毛尖稍微離開匣體3 1的內周面的程度，至毛尖接觸 匣體31的內周面的程度最佳。 因毛尖長至接觸匣體3 1的內周面程度的情形，會在 匣體3 1的內周面產生摩耗之虞，故使用金屬線作爲毛材 料並不理想，而毛尖過於離開匣體3 1的內周面時，會產 生液分離用旋轉刷3 6和匣體3 1之間含有油份或水份的 氣流上昇之虞並不理想。 但，假定毛尖爲稍微離開匣體3 1的內周面的程度， 隨著液分離用旋轉刷3 6的旋轉，在液分離用旋轉刷3 6 的周緣和匣體3 1之間會產生離心流動的氣流，該氣流防 止液分離用旋轉刷3 6和匣體3 1之間含有油份或水份的 氣體上昇是毫無問題。 _ 液分離用旋轉刷3 6接觸氣流時，含在該氣流的油份 及水份會捕捉在液分離用旋轉刷3 6的毛之間，從氣流分 ί I · - - ^^1 in 士^^^1 m 1^1 1^1 U5 、言 (请先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -16- A7 ___^____B7____ 五、發明説明（Ί4 ) 離。被捕捉在液分離用旋轉剛_3 6的油份及水份，會隨著 該刷3 6旋轉的離心力運至液分離室3 2的周圍，沿著液 分離室3 2的周壁3 9，以自重流至液分離室3 2的底部 ，油份和水.份會上下分離儲存。 又，、含在氣流的粉麈的一部份，尤其是粒徑比較大的 粉塵也被捕捉至液分離用旋轉刷3 6的毛之間，吸收附著 在該刷3 6的油份或者.水份，藉由離心力與油份或水份一 起運至液分離室3 2的周壁3 9，甚至流至液分離室3 2 的底‘部。 然後，殘留的粉塵會隨著通過液分離用旋轉刷3 6的 毛之間的氣流，從出口吸入集塵裝置4。 此例，上述液分離用旋轉刷3 6的厚度X，係爲了能 有效捕捉水份及粒徑比較大的粉塵，同時減少因該刷3 6 的壓損，使用小型的送風機7，故可設定在後述的集麈裝 置4的圓筒狀過濾網4 3的軸線之有效長度y之1至7 5 %，理想爲3厓6 0 %，更理想爲5至5 0 %.。 經漪部中央標準局員工消費合作社印製 (讀先閱讀背面之注意事項再填寫本頁) 又，本實施形態中，爲易於油份、水份或者油份和水 份的廢棄處理，故在液分離室3 2的底部，配合需求，配 置吸油性聚合物8、吸水性聚合物9或者吸油性聚合物8 和吸水性聚合物9的積層，使流至液分離室3 2底部的、油 份、水份或者油份和水份，吸收在該些聚合物，將該些聚 合物取出液分離室32即可廢棄： 此時，在液分離室3 2的底部配置吸油性聚合物8或 者吸水性聚合物9的形態並未特別限定，譬如將粒狀或# 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨0X297公釐） .17 _ ' 經濟部中央標準局員工消費合作社印繁 A7 ___ _B7 五、發明説明（15 ) 粉末狀者，以適當厚度舖設¥液分離室3 2的底部，此時 ，也可混合兩者而舖設，但將吸油性聚合物8和吸水性聚 合物9，分成上下層狀而舖設，將兩者分開來進行廢棄處 理佳。 除將兩者分開來廢棄處理外，爲提高廢棄處理的作業 性，比使用粒狀的吸油性聚合物8和吸水性聚合物9，還 好的是各別將吸油性聚合物8和吸水性聚合物9形成一體 物品，此種一體物品，是考慮負擔吸油性聚合物8和吸水 性聚合物9之多孔質體或配合吸油性聚合物8和吸水性聚 合物9之合成樹脂。又，此種一體物品的形狀並不特別限 定，但爲避免因液分離室3 2的容積增大的大型化，故譬 如最好形成收容在液分離室3 2的底部內的過濾網、薄膜 或者板狀。 此例，若使用吸油性聚合物8吸收、保持油並不特別’ 限定，此情形乃爲眾所周知可使用。 又，此例，若使用吸水性聚合物9吸收、保持水並不 特別限定，此情形乃爲眾所周知可使用。 甚至，比此匣體3 1的入口 3 3更下側的部份3 1 a 係可由其上側的部份3 1 b分解，所定量的水份或油份甚 至粉塵積存在液分離室3 2內的底部時，或吸油性聚合物 8和吸水份聚合物9或者吸油性聚合物8和吸水性聚物9 的積層體等的交換時期到來之時-，可分解此匣體3 1的 下部3 1 a，區別包含水份油份或水份或油份或者該些和 粉麈的聚合物及其他粉塵運至各別處理場。然後，區別後 &張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -18 - (請先閲讀背面之注意事項再填寫本頁)Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (1) [Technical Field to which the Invention belongs] The present invention relates to a dust removal device and dust removal for capturing and removing dust generated from dust generation The method, in particular, relates to a dust removing device and a dust removing method capable of effectively capturing dust generated in a semiconductor element manufacturing process of about 0.3 or less in a long period of time and achieving miniaturization of the device. [Knowledge technology] The so-called dust generation sources are semiconductor manufacturing industry, automobile industry, plastic industry, resource industry, ceramic industry, powder metallurgy industry, detergent industry, catalyst industry, ferrite industry, pigment industry, pesticides. Industrial, feed processing, food industry, waste treatment industry, bio-related industry, cosmetics industry and pharmaceutical industry, etc., the problem of dust generation from various equipment, such as the well-known particle size of about 0. 001 to 50 Ai m. Very fine dust. In particular, the recent progress of computers and electronic control devices using computers has been stunned. With this, the manufacturing technology and production volume of semiconductor components used in computers have also grown significantly. The semiconductors used as raw materials for semiconductor components have actually grown rapidly. The use of germanium (G e), silicon (S i), gallium arsenide (GaAs), gallium gallium (GaP), etc., but the dust generated during the manufacturing process of these semiconductor elements is prohibited from the perspective of pollution prevention It is well known that the harmful substances contained in this kind of @_gas are harmful substances, and even adsorb harmful substances in the environment. For the harmful substances used or generated in the semiconductor manufacturing process' This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -4- Zheng II (谙 Please read the precautions on the back before filling this page) Order A7 ____'___ B7 V. Description of the invention (2) is sand-based, boron-based, oxidized dicarboxylic acid-based, halogen, halide, nitrogen oxide, etc., but it is not allowed to contain these harmful components or dust emissions. It is still emitted into the atmosphere. First of all, in addition to removing dust from the exhaust gas, various treatments must be performed to safely and cleanly release the gas. Therefore, it is provided to remove the dust contained in the gas from the dust generation source. Use cyclones, scrubbers, venturi scrubbers, bag filters, electronic dust collectors, vents, sedimentation chambers, etc. However, with the limiting particle size of the dust captured by these devices, the cyclone dust collector is 3.0 Oym, the scrubber is 1.0 Oym, the vent is 10 ym, and the sedimentation chamber is 50 Mm. The effective range of these conventional devices Wide range from 0 · 0 1 to 50, but cannot capture very fine dust. In addition, although Venturi scrubbers, bag filters, and electronic dust collectors can be used to capture dust of 0.1 / 1m, these devices are large and expensive, and they have problems such as troublesome disposal of the collected dust. The sources of dust produced by the Consumer Cooperative of the Central Standards Bureau of the Drip Division were printed, especially when the particle size distribution of the dust produced in the semiconductor manufacturing process was observed. Most of the dust below 0.3 M m accounted for most of the dust. 3 β m 的 约 More than about 0.3 β m or more in the process of repeated experiments, but in the process, once a filter made of wool-like non-woven fabric with a thickness of about 1 mm is used dust. _ In order to achieve the practical use of the filter, get a high-pressure back pressure to clean the filter and try to achieve its reuse. But 'Since filtering-5- (Please read the notes on the back before filling this page) This paper size applies to China National Standards (CNS) A4 specifications (2) 0X297 mm. A 7 ___B7______ printed by the company V. Description of the invention (3) The mesh of the net is very small and needs to be backed up at a relatively high pressure. Therefore, it must be a large and high-performance cleaning device, and the overall installation area of the device is large, In addition to being very expensive to install, maintenance is also expensive. To this end, as shown in FIG. 6, a filter 1 0 1 is formed into a cylindrical shape with a vertical axis, and a brush 1 0 2 attached to the inner side of the filter 1 1 is provided. 0 2 slides into the filter 1 0 1 side and introduces gas at one end, passes into the brush 10 2 and flows from the inside of the filter 1 0 1 from the outside. On the one hand, it will adhere to the filter 1 0 1 The dust is automatically regenerated by a rotating brush 102 for dust collection. Once the water and oil contained in the dust gas are removed from the inside and outside of the filter screen 101, the gas containing the dust is passed through the filter screen to remove the dust. Of course, the introduction of the gas This side is the inner side, and the gas flows through the filter screen 101, and the side from which the dust-removed purge gas is discharged is the outer side. [Problems to be Solved by the Present Invention] Therefore, when this automatic regenerative dust collecting device is actually used as a dust removing device in a semiconductor device manufacturing process, it is judged that the pressure loss of the filter 1 1 in a shorter period than expected. It becomes large, and the filter 1 0 1 cannot be regenerated even if the brush 10 2 is rotated. As a result, even the results of the review were renewed, and oil leaked from vacuum pumps or oil rotating machines used as dust sources in semiconductor manufacturing processes, or aqueous or oily working fluids used for honing or cutting. And other liquid components are floating in the gas treated as a small droplet, and are attached to the oil-I ί II —--. I In-(n II ^^^ 1 UK ^^ 1 · (Please read the back Note: Please fill in this page again.) This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) -6- A7 _______B7____ V. Description of the invention U) After the surface of the tank, the SJJ filter is transported with the airflow 1 0 1 It adheres to the surface with dust, and it is judged that the filter is clogged. And the oil or water adhering to the surface of the filter screen 101 is penetrated and stored in the mesh of the filter screen 101 by gas pressure or capillary phenomenon, and once it is attached to the filter screen, it is attached to the filter screen 10 The surface of 1 cannot be removed to the extent that it is swept by 102. As a result, it is judged that the filter is blocked and cannot be regenerated. The present invention has been made in view of the above-mentioned technical problems, and an object thereof is to provide a device capable of efficiently capturing dust of about 0.3 Zim or less from a dust generation source, particularly a semiconductor device manufacturing process, over a long period of time, and reaching the device. Miniaturized dust removal device and dust removal method. [Methods for solving problems] Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page), that is, the dust removal device of the present invention (hereinafter referred to as the device of the present invention) is A person who has a dust removing device for removing dust contained in a gas introduced from a dust generating source, a liquid separating device for removing water and oil introduced into the gas from a dust generating source, and a liquid separating device for removing the water and oil from the dust generating source. A gas introduction dust collecting device, the dust collecting device is provided with a cylindrical filter screen, a clean air chamber formed on the outside of the filter screen, and a plurality of filter screens and clean air chambers surrounding the filter screen. An inlet for introducing gas from the liquid separation device inside the mesh, a box for communicating the air purifying chamber to the outside of the filter outside, and a dust removing tool slidingly connected to the inside of the filter to drive the dust removal. On the one hand, the aforementioned liquid separation device is provided with a guide for introducing gas from the aforementioned dust generation source. Standard (CNS) A4 specification (210X297 mm) Printed by the Central Bureau of Standards Employee Consumption Cooperative A7 B7 V. Description of the invention (5) The inlet and the outlet box connected to the lead-in outlet of the above dust collector The disk-shaped liquid-separating rotary brush and the driving device for driving the brush are separated from the liquid-separating chamber from the inlet to the guide-out in the box, and the thickness of the liquid-separating rotary brush is the filtration of the dust collecting device. Dimensions of 1 to 75% of the net length. In the device of the present invention, the dust removing tool slidingly connected to the inside of the filter can be removed, wiped, or patted on the inside of the filter in series, for example, using a brush or a scraper, the edges contact the inside of the filter. Rotate in the circumferential direction (single direction rotation), rotate (reciprocally rotate clockwise or counterclockwise), or move the brush, etc. up and down or left and right, or combine these movements. Specifically, for example, when a brush or a scraper contacts and rotates or rotates inside the filter, when the filter is vertical, the brush or scraper is in contact with the inside of the filter, and the brush or the like is moved up and down. When the filter is horizontal, the brush Or, the scraper is in contact with the inside of the filter, and the brush and the like are moved left and right, and the tube is pressurized to make the tube perform fierce movement, and the inside of the filter can also be beaten with a whip. The clean room of the device of the present invention is intended to pass the dust-containing gas to the filter screen, and the space between the side from which the dust is removed (the outer peripheral surface of the filter screen) and the outlet leading to the outside. In the device of the present invention, after the moisture and oil in the dust-containing gas are removed from the inside and outside of the filter, the gas containing the dust is passed through the filter and the purpose of removing the dust is to introduce the relevant gas. One side is the inside, and the gas will flow through the filter. Needless to say, the plutonium purifying gas to remove the dust (please read the precautions on the back before filling this page). The size of the paper is applicable to China National Standard (CNS) A4. (210X297 mm) _ 8-Ing A7 B7, Shellfish Consumer Cooperative, Central Standards Bureau, Ministry of Economic Affairs 5. Description of Invention (6) The side of the body is outside. ._ In the device of the present invention, it is desirable to provide a blower having the above structure and sequentially passing the dust generation source through the liquid separation device and the dust collecting device to form an air flow to the outside. In the apparatus of the present invention, it is desirable to arrange a water-absorbing polymer, an oil-absorbing polymer, or a layered body of the water-absorbing polymer and the oil-absorbing polymer at the bottom of the liquid separation chamber in accordance with the demand, and to absorb the portion and Oil content, easy post-treatment. Even in the apparatus of the present invention, the lower part of the liquid separation chamber can be separated from the upper part. With this configuration, it is desirable that maintenance and management in the liquid separation chamber is extremely easy. In the device of the present invention, the dust removing tool of the dust collecting device is made of a rotating brush for dust removal, and the rotating brush for dust removal is located in the aforementioned position. The center axis of the filter shaft center of the dust collecting device is the center, and the hair is made of a spiral brush forming a spiral surface side by side. The spiral brush may also be configured to rotate by the driving device of the dust collecting device, thereby being effective. Remove dust. In this case, the rotating brush for removing dust formed in a spiral shape may be formed intermittently instead of continuously, or may be formed spirally as a whole. Moreover, in the device of the present invention, the dust removing device of the dust collecting device is made of a central axis located at the axial center of the filter screen of the dust collecting device and hair planted on the central axis. The hair of the planted hair is slippery. The filter screen connected to the dust collecting device, that is, as described above, the filter screen that is in contact with the dust collecting device can also be rotated, rotated, or moved axially while contacting the filter screen of the dust collection device by using the aforementioned drive. The device is driven to remove dust attached to the filter. This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) -9-I ------- C Pack II (Read the precautions on the back before filling this page) Standard Bureau employee consumer cooperative stamp A7 _____B7___ V. Invention description (7) Even when the relevant device in the device of the present invention is a vertical dust removal device, the dust collection device is arranged above the liquid separation device and also serves as a collection device. The inlet of the dust device and the outlet of the liquid separation device. By doing so, the device is miniaturized, has a simple structure, is easy to dismantle, and is extremely economical. Further, in the device of the present invention, the dust removing device of the dust collecting device and the liquid separating rotary brush of the liquid separating device have a common central axis, and the driving device of the dust removing device and the driving device of the liquid separating rotary brush may have a combined configuration. This simplifies the structure. In particular, in the device of the present invention, the filter of the dust collecting device is constituted by a laminated filter having three or more layers of filters which are sequentially reduced in size from the inside to the outside. If this is the case, fine dust can be effectively removed. At this time, the layered filter is composed of a first layer of mesh with a mesh size of about 20 0 // m and a second layer of mesh with a mesh size of about 50 to 2 0. // m The mesh size is made of the third layer filter which is smaller than the second layer filter and larger than 1 ym, but it is hoped that the dust can be effectively removed for a long time. In the device of the present invention, the thickness of the laminated filter is effective and The range of economical removal of powdery mash is not particularly limited, but is generally 0.5 to 2 Omm. That is, when the thickness of the laminated filter is less than 0.5 mm, the required dust removal rate cannot be achieved. When it exceeds 20 mm, the pressure loss of the furnace network increases, and as a result, a large blower is required, and the equipment cost is increased. From these viewpoints, it is desirable that the thickness of the laminated filter is preferably 1 to 10 mm, and more preferably 1.5 to 7.5 mm. At this time, it is desirable that the thickness of the first layer of the filter is 20 to 50% of the total thickness of the laminated filter, and the second paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) _ 1〇 · '- ---------- i; equipment-fJ (please read the precautions on the back before filling this page), va printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Description (8) The thickness of the layer filter is 30 to 60% of the overall thickness of the laminated filter, and the thickness of the third layer filter is 1 to 25% of the overall thickness of the laminated filter. The device of the present invention is suitable for effectively removing the dust from the above. Dust generation source, but it is particularly suitable for dust equipment where the dust generation source generates dust during the manufacturing of semiconductor elements containing a large amount of fine dust, and dust equipment attached thereto. The dust removing method of the present invention (hereinafter referred to as the method of the present invention) is a dust removing method for removing dust contained in a gas generated from a dust generating source, and is characterized in that it includes: Before the introduction of the dust collecting device, the process of removing oil and water from the gas and the process of filtering the gas flowing from the inside to the outside of the filter net forming the cylindrical dust collecting device. In the method of the present invention, after removing the water and oil in the gas containing dust from the inside and outside of the filter, the gas contained in the dust is depleted to the filter and the related gas is introduced for the purpose of removing the dust. This side is the inside, and the gas flows through the filter. Needless to say, the side that discharges the purge gas that removes dust is outside. In the method of the present invention, the dust filter is slidingly connected to the filter of the dust collection device, that is, as described above, by rotating or rotating or axially moving in the circumferential direction while touching the filter of the dust collection device, Or you can combine these movements and take care of the surface of the filter screen "to remove the dust captured by the filter screen. At this time, the dust removal tool is used at any time, always intermittently or often even the paper size is applicable to the Chinese National Standard (CNS) A4 specifications (210X297 mm) -H · 〈^ — (Read the precautions on the back before filling in this page) Order printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs A7 _______B7 _ V. Description of the invention (9) Continue sliding connection The filter to the dust collector means that the filter is rotated or reciprocated in the circumferential direction or axially reciprocated by contacting the filter of the dust collector, or the filters can be managed by combining these movements Remove dust trapped on the surface of the filter. In the dust removing method, the dust removing tool used is the same as the device of the present invention. That is, the dust removal tool can be used to remove, wipe, or pat the inside of the filter, such as using a brush or a scraper, and touching the sides to the inside of the filter to rotate in a circumferential direction (single direction rotation), Rotate (reciprocally rotate clockwise or counterclockwise alternately), or move the brush, etc. up and down or left and right, or combine these athletes. Specifically, for example, when a brush or a scraper contacts and rotates or rotates inside the filter, when the filter is vertical, the brush or scraper is in contact with the inside of the filter, and the brush or the like is moved up and down. When the filter is horizontal, the brush Or the scraper is in contact with the inside of the filter, and the brush is moved left and right, and the tube is pressurized by the pressurized gas to make the tube perform a fierce movement. You can also slap the inside of the filter with a whip. With the above structure, according to the present invention (including both the device of the present invention and the method of the present invention), a gas containing dust from a dust generation source is introduced into a liquid separation device, and water, oil, etc. are separated, and then introduced into a collection unit. Dust device. Therefore, on the surface of the filter of the dust collecting device, there is no need to worry about moisture, oil or powder q_ adsorbed together, and the use of water or oil in the gas is used to promote the prevention of filter blockage. In addition, because of the so-called dust collector, the filter is used to form a cylindrical shape, and the gas (please read the precautions on the back before filling this page). Order X- This paper size applies the Chinese National Standard (CNS) A4 specification ( 210X297 mm) -12- Printed by the Consumer Standards Cooperative of the Central Bureau of Standards, A7 ___ B7 ____ ^ _ V. Description of the invention (1〇) The body flows from the inside to the outside, on the one hand, it is removed by the dust disposed on the inside. It is an automatic regeneration type dust collection device that removes dust from the filter and recovers the dust collection power. Therefore, it is not necessary to install a large-scale backwash device for the regeneration of the dust collection filter, and the entire device can be miniaturized. Then, especially in the present invention, the thickness of the rotating brush for liquid separation by the liquid separation device is 1 to 75%, preferably 3 to 60%, more preferably 3 to 60% of the thickness of the cylindrical filter of the dust collection device. Ideally, the size is 5 to 50%. Because the rotating brush increases the poor ventilation, it will not cause the fan to increase in size or reduce the processing capacity. It can effectively remove water or oil from the gas from the dust source and prevent it. The adhesion of water or oil to the filter of the dust collection device, or the automatic regeneration ability of the filter is reduced or even lost. That is, if the thickness of the rotating brush for liquid separation is less than .1% of the length of the cylindrical strainer, the required water and oil removal rate cannot be achieved. On the other hand, if it exceeds 75%, it will cause pressure. The loss increases, and the introduction efficiency of the processing gas is reduced. In order to achieve the desired gas processing efficiency, it is necessary to increase the size of the equipment and increase the equipment cost. Therefore, it is not ideal in any case. [Embodiments of the Invention] Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings. Regarding the dust removal device of this embodiment, the dust generation source is the particle dust generation source 1 that generates particulate dust during the manufacturing process of the semiconductor device, as shown in the structure of FIG. 1; The powder-removing device includes the above-mentioned particulate dust. The generation source 1 is connected to the liquid separation device 3 connected to the outlet pipe 2 and the automatic regeneration type dust collecting device III directly connected to the upper side of the liquid separation device 3:---I-:-II -i V '* 良 i II -I— 1 ^ 1 X, 03 * τ (谙 Read the precautions on the back first and then 4 荈 This page} This paper size applies to China National Standard (CNS) Α4 specification (210X297 mm) -13- A 7 ______B7_ V. Description of the invention (11) The 4th and the 4th, and the derivation from the dust collecting device .. The gas discriminating pipe 5 and the harmful gas processing device 6 and the blower 7 interposed in the exhaust pipe 5. The above-mentioned blower 7 may be a gas The structure in which the fine particles are discharged from the source 1 through the outlet pipe 2, the liquid separation device 3, the dust collection device 4, the exhaust pipe 5, and the harmful gas treatment device 6, as shown in the figure, except that it is provided on the exhaust pipe 5. In addition, for example, it can be placed in the inhalation set in the particulate powder The atmospheric air suction tube 'of the dust generation source 1 may be interposed in the lead-out tube 2 or may be disposed in the liquid separation device 3 or the dust collection device 4. The blower 7 is used to send the particles from the dust generation source. The gas of 1 passes through the outlet pipe 2, the liquid separation device 3, the collecting device 4, the exhaust pipe 5, and the harmful gas treatment device 6 to form the particulate dust generated by the particulate dust generation source 1 when the air flow is discharged from the atmosphere. Moisture and oil intruding into the particulate dust generation source 1 are attached to the airflow, or are pressed against the airflow, and are introduced into the liquid separation device 3 through the outlet pipe 2. As described in detail later, the liquid separation device 3 is used to remove water. After removing dust, oil, and relatively large dust particles, the particulate dust remaining in the dust collecting device 4 is removed. The gas discharged from the dust collecting device 4 by the Consumer Cooperative of the Central Standards Bureau Employees Cooperative of the Drip Division is to remove water. People, oil and particulate dust, but containing harmful gas components, and even introducing harmful gas treatment equipment 6, this example mainly uses chemical treatment such as oxidation, reduction, neutralization or activated carbon or zeolite. It is processed by adsorbing materials and rendered harmless, and then discharged into the atmosphere. The liquid separation device 3 has a box 31, and a liquid separation chamber 32 is formed inside the box 31. The lower end of the box M 3 Γ is at The position of the predetermined height forms the entrance connecting the liquid separation chamber 3 2 to the outlet pipe -14- (read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) Α4 size (210X297) (%) Printed by A7 ______B7___ of the Consumers' Cooperatives of the Bureau of Standards and Standards of the Ministry of Economic Affairs. 5. Description of the invention (12) 33. At the same time, a cylindrical opening is made on the upper wall 34 to connect the liquid separation chamber 32 to the collection The outlet 3 of the dust device 4 5. The material of the box body 31 is not particularly limited. For example, paper, wood, synthetic resin, or metal can be used, but it must have mechanical strength, particularly rigidity, that is resistant to air pressure. In this embodiment, the box 31 is formed of a fiber-reinforced synthetic resin (FRP) having excellent mechanical strength and excellent weather resistance, chemical resistance, acid resistance, alkali resistance, and heat resistance. In addition, the shape of the box body 31 is not particularly limited as long as it is a hollow shape capable of forming the liquid separation chamber 32 inside, and it can be shaped. Polygonal cubes such as squares, rectangular squares, cylindrical shapes, and oval shapes are established. Shape etc. In this embodiment, the box body 31 is formed by bending a flat plate material, a manual lamination method, a press lamination method, a vacuum bag forming method, a pressure bag forming method, a high pressure forming method, a plate cold pressing method, and an extrusion forming method. Well-known FRP molding methods such as oil storage method, oil injection molding method, injection molding method, reduced pressure injection molding method, die-molding method, and SMC molding method are formed into a simple cylindrical shape. Furthermore, the size of the above-mentioned case 31 can be designed in accordance with the processing capacity per unit time obtained in advance, the processing capacity of the oil-absorbing polymer 8 and the water-absorbing polymer 9 to be described later, and the processing capacity. The above-mentioned liquid separation chamber 32 is preferably formed inside the casing 31, and a partition wall for partitioning the liquid separation chamber 32 can also be provided inside the casing 31, but this embodiment has a simple structure. At the same time, in order to achieve miniaturization and weight reduction, the casing 31 itself constitutes the surrounding wall of the liquid separation chamber 32. Moreover, the above-mentioned liquid separation device 3 is provided with an internally connected liquid separation chamber (read the precautions on the back before filling in this page) I h. P Packing-The paper size of the booklet applies the Chinese National Standard (CNS) A4 specification ( 210X297 mm) -15- Printed A7 of the Consumers' Cooperatives of the Central Standards and Happiness Bureau of the Ministry of Economic Affairs _______B7 ___ V. Description of the invention (Ί3) 3 2 2 of the cylindrical exit 3 J | Rotating disk-shaped rotating brush 36 for liquid separation, and its driving source is a driving device M provided with a driving device of a dust removing spiral brush 4 2 that also serves as a dust removing device for the dust collecting device 4 to separate the liquid separation chamber. The air flow rising from the inlet 3 3 to the outlet 3 5 inside 3 2 is all configured by the rotating brush 36 for liquid separation that continuously rotates. The hair material of the liquid-separating rotary brush 36 is not particularly limited. For example, natural or synthetic fiber steel, brass, copper, and other metal wires, and these composite materials can be freely selected using ordinary bristles. The length of the burr tip of the liquid-separating rotating brush 36 is not particularly limited, and it is optimal from the extent that the burr tip is slightly separated from the inner peripheral surface of the case 31 to the extent that the burr tip contacts the inner peripheral surface of the case 31. Since the hair tip is long enough to contact the inner peripheral surface of the box body 31, wear may occur on the inner peripheral surface of the box body 31. Therefore, it is not ideal to use a metal wire as the wool material, and the hair tip is too far away from the box body 3. In the case of the inner peripheral surface of 1, it is not desirable that an air flow containing oil or water between the rotary brush 36 for liquid separation and the case 31 may rise. However, it is assumed that the tip of the hair is slightly apart from the inner peripheral surface of the case body 31. As the liquid separation rotary brush 36 is rotated, centrifugation occurs between the peripheral edge of the liquid separation rotary brush 3 6 and the case body 31. There is no problem with the flowing airflow, which prevents the gas containing oil or water from rising between the rotary brush 36 for liquid separation and the case 31. _ When the rotary brush 3 6 for liquid separation comes into contact with the air flow, the oil and water contained in the air stream will be trapped between the hairs of the rotary brush 3 6 for liquid separation, and will be separated from the air stream. I ·--^^ 1 in taxi ^^^ 1 m 1 ^ 1 1 ^ 1 U5, words (please read the precautions on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 (210X297 mm) -16- A7 ___ ^ ____B7____ 5. Description of the invention (Ί4) Li. The oil and water captured in the rotating separator 36 for liquid separation will be transported around the liquid separation chamber 32 with the centrifugal force of the rotation of the brush 36, along the peripheral wall 39 of the liquid separation chamber 32, It flows to the bottom of the liquid separation chamber 32 by its own weight, and the oil and water are separated and stored up and down. Also, a part of the powder dust contained in the airflow, especially the relatively large particle size is also captured between the hairs of the liquid separation rotary brush 3 6 to absorb the oil attached to the brush 36 or. The water is transported to the peripheral wall 39 of the liquid separation chamber 32 together with the oil or water by centrifugal force, and even flows to the bottom portion of the liquid separation chamber 32. Then, the remaining dust is sucked into the dust collecting device 4 from the outlet by the air current passing through the hairs of the rotary brush 36 for liquid separation. In this example, the thickness X of the rotary brush 36 for liquid separation is used to effectively capture dust with relatively large moisture and particle size, and to reduce the pressure loss due to the brush 3 6. Therefore, a small blower 7 is used, so it can be set. The effective length y of the axis of the cylindrical filter screen 43 of the collecting device 4 described later is 1 to 75%, preferably 3 to 60%, and more preferably 5 to 50%. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (read the precautions on the back before filling out this page). In this embodiment, it is easy to dispose of oil, water, or oil and water. According to the needs of the bottom of the liquid separation chamber 32, an oil-absorbing polymer 8, a water-absorbing polymer 9, or a laminate of the oil-absorbing polymer 8 and the water-absorbing polymer 9 is arranged so that the oil flowing to the bottom of the liquid separation chamber 32 Water, oil, or oil and water are absorbed in the polymers, and the polymers are taken out of the liquid separation chamber 32 to be discarded: At this time, an oil-absorbing polymer 8 or The shape of the water-absorptive polymer 9 is not particularly limited, such as applying granular or # paper sizes to Chinese National Standard (CNS) A4 specifications (2 丨 0X297 mm). 17 _ 'Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs繁 A7 ___ _B7 V. Description of the invention (15) For powders, lay the bottom of the liquid separation chamber 32 at an appropriate thickness. At this time, you can also mix the two to lay, but polymerize the oil-absorbing polymer 8 and water-absorbing polymer. Object 9, spread into upper and lower layers It is better to separate the two for disposal. In addition to separate the two for disposal, in order to improve the workability of disposal, it is better than using granular oil-absorbing polymer 8 and water-absorbing polymer 9 to separate the oil-absorbing polymer 8 and water-absorbing polymer. The polymer 9 forms an integrated article, and such an integrated article is considered to bear the porous body of the oil-absorbing polymer 8 and the water-absorbing polymer 9 or a synthetic resin blended with the oil-absorbing polymer 8 and the water-absorbing polymer 9. In addition, the shape of such an integrated article is not particularly limited, but in order to avoid an increase in the size of the volume of the liquid separation chamber 32, it is desirable to form, for example, a filter or a film housed in the bottom of the liquid separation chamber 32. Or plate-like. In this example, if the oil-absorbing polymer 8 is used to absorb and retain the oil, it is not particularly limited, and this case is well known and can be used. In this example, the water-absorbing polymer 9 is not particularly limited as long as it absorbs and retains water. This case is well known and can be used. In addition, the lower part 3 1 a than the inlet 3 3 of the box 3 1 can be decomposed by the upper part 3 1 b, and the amount of water or oil or even dust is accumulated in the liquid separation chamber 3 2 When the bottom of the inside, or when the exchange period of the oil-absorbing polymer 8 and the water-absorbing polymer 9 or the laminated body of the oil-absorbing polymer 8 and the water-absorbing polymer 9 comes,-the lower part of the box 3 1 can be decomposed. 3 1 a, distinguish between polymers containing water and oil or water or oil or these powders and other dusts and other dusts are transported to the respective treatment sites. Then, after the difference & Zhang scale is applicable to China National Standard (CNS) A4 specification (210X297 mm) -18-(Please read the precautions on the back before filling this page)
經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（16 ) ’在成空的匣體3 1的下部_3 1 a放入新的吸水性聚合物 9和吸油性聚合物8之後，該下部3 1 a組裝在匣體3 1 的上部3 1 b。 而且也可準備複數個匣體3 1的下部3 1 a，作爲交 換放入回收的油份、水份、粉塵等的匣體3 1之下部3 1 r a和、放入新的吸水性聚合物9和吸油份聚合物之另一匣 體3 1之下部3 1 a。 若這麼做，可以提高作業者不接觸直接吸收有害粉塵 或有害物質的吸油性聚合物8或者吸水性聚合物9或者吸 油性聚合物8和吸水性聚合物9的積層體等之安全性。 又’此情形，分離放入回收的油份、水份、粉塵等之 匣體3 1的下部3 1 a之後，除利用蓋3 1 c密閉其上面 開口提高安全性外還很理想。 集麈裝置4，在與液分離裝置3之間從氣流分離堆積 粉塵’或防止來自液分離裝置3的流路阻力之壓損，同時 將裝置整體更進一步小型化，而爲了提高被回收的粉塵等 之後處理場的搬運安全性，故本實施形態爲直接結合在液 分離裝置3。 亦即，本實施形態之集塵裝置4，係在液分離裝置3 之上側，具有配置在與其匣體3 1同軸心的縱軸之有蓋圓 筒形之匣體4 1 ，且具備有作爲使用配置與該匣體4 1同 軸心狀的粉塵除去具之螺旋刷4_2和、接在該螺旋刷4 2 的圓筒狀之過濾網4 3。 本實施例形態，係使用作爲粉塵除去具之螺旋刷4 2 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -19- --------1 裝-----_--訂 --------Λ (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 ________B7____ 五、發明説明（17 ) ’但若得以除去粉塵本發明雖不限定於此。譬如連其他形 狀的刷子或者刮刀狀的構件，只要能除去捕捉在過濾網的 粉塵均可使用作爲粉塵除去具。 .又，在上述過濾網4 3和匣體4 1的周壁4 1 a之間 ，形成圓環狀之淨氣室4 4，同時在匣體4 1的上部形成 連通至排氣管5之導出口45。 上述匣體4 1的下面係用液分離裝置3的匣體3 1的 上壁3 4覆蓋，在該上壁3 4的中央部，就俯視.而言，爲 形成與粉塵除去用螺旋刷4 2的輪廓一致的圓形的液分離 裝置3之出口 3 5的位置，該出口 3 5兼具集塵裝置4之 導入口。 形成上述匣體4 1的材料並未特別限定，譬如可用紙 、樹木、合成樹脂、金屬等，但必需具有耐得住氣流壓力 程度的機械強度，尤其是剛性。 本實施形態，係以機械強度優、耐候性、耐藥品性、 耐酸性、耐鹼性及耐熱性優的合成樹脂形成匣體4 1。 又，上述匣體4 1的形狀，係形成中空形狀，在過濾 網4 3與匣體4 1的周壁4 1 a之間形成圓環狀之淨氣室 4 4，但過濾網4 3係形成在全周圍，或者部份連接在圓 周方向，或者也可連續形成。 亦即匣體4 1 ，係譬如可形成立方形、直方形等的多 角立方體、圓筒形、橢圓筒形等__，最好可達到減低製造成 本的單純形狀，又，爲了在圓筒形過濾網4 3的整體進行 均等的過濾，最好在過濾網4 3的全周圍形成淨氣室4 4 --------裝-- {讀先閱讀背面之注意事項再填寫本頁) 訂 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -20- 經濟部中央標準局員工消費合作社印製 A7 ____B7_ 五、發明説明（18 ) 。由此種觀點本實施形態’谭、將匣體4 1形成有蓋圓筒形 〇 甚至，上述匣體4 1的大小係配合預先所求得的單位 時間之處理量、螺旋刷4 2、過濾網4 3等的交換週期等 之處理能力來設計。 使用作爲粉塵除去具的上述粉塵除去用螺旋刷4 2， 係具備有中心軸4 2 a ’以該中心軸4 2 a爲中心的毛 4 2 b爲形成螺旋面並排刷子’在毛4 2的並排之間形成 一定的螺旋狀之通氣路4 2 c。 該粉塵除去用螺旋刷4 2的毛2 b的材料，並未特別 限定，具體而言係譬如天然或者合成的纖維鋼黃銅銅等的 金屬線等，一般可從使用於刷毛之中自由選擇，本實施形 態，爲長期間防止粉麈除去用螺旋刷4 2的毛尖或過濾網 4 3的內側面的摩耗，故使用合成樹脂製的毛作爲粉塵除 去用螺旋刷4 2。 該毛4 2 b的毛根長度，至少在過濾網4 3的內側面 ，必需具有接觸毛4 2 b的前端程度的壓力的程度，毛 4 2 b的前端部最好在過濾網4 3的內側面近傍彎曲，並 在所定長度沿著過濾網4 3的內側面的程度。 上述粉塵除去用螺旋刷4 2的中心軸4 2 a，係連結 於裝載在匣體4 1的上壁4 1 b上，又，在該中心軸4 2 a的下端部，係連結液分離裝^_3之液分離用旋轉刷3 6 ，利用驅動裝置Μ，同時向同方向驅動粉塵除去用螺旋刷 4 2和液分離裝置3之液分離用旋轉刷3 6 » 本紙張尺度適Λ中國國家標準（CNS ) Α4規格（210X297公釐）~ ~21 - ： (#先閱讀背面之注意事項再填寫本頁) 裝.Printed by the Consumers 'Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (16)' After placing the new water-absorbing polymer 9 and oil-absorbing polymer 8 in the lower part of the empty case 3 1_a The lower part 3 1 a is assembled on the upper part 3 1 b of the box body 3 1. In addition, the lower part 3 1 a of the plurality of boxes 3 1 can also be prepared, and the lower part 3 1 ra of the box 3 1 can be placed in exchange for the recovered oil, water, dust and the like, and a new water-absorbing polymer can be placed therein. 9 and another case 3 1 of the oil-absorbing polymer 3 1 a. By doing so, the safety of the operator can be improved without touching the oil-absorbing polymer 8 or the water-absorbing polymer 9 or the laminated body of the oil-absorbing polymer 8 and the water-absorbing polymer 9 which directly absorb harmful dust or harmful substances. In this case, it is desirable to separate the lower portion 3 1 a of the case 3 1 into which the recovered oil, moisture, dust, and the like are put, and then seal the upper opening with the cover 3 1 c to improve safety. The collecting device 4 separates and accumulates dust from the air flow between the liquid separation device 3 and the pressure loss of the flow path resistance from the liquid separation device 3, and further miniaturizes the entire device. In order to improve the recovered dust, Since the safety of transportation in the processing site is waited for, the present embodiment is directly coupled to the liquid separation device 3. That is, the dust collecting device 4 of the present embodiment is provided on the upper side of the liquid separation device 3, and has a cover-shaped cylindrical body 4 1 arranged on a longitudinal axis coaxial with the housing 3 1 of the liquid-separating device 3 and provided for use. A spiral brush 4_2 of a dust removing tool coaxial with the box body 41 and a cylindrical filter mesh 43 connected to the spiral brush 4 2 are arranged. The form of this embodiment is a spiral brush used as a dust removing tool. 4 2 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). -19- -------- 1 Pack ---- -_-- Order -------- Λ (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 ________B7____ V. Invention Description (17) 'But if Removal of dust The present invention is not limited to this. For example, even other shaped brushes or scraper-shaped members can be used as a dust removing tool as long as it can remove the dust trapped in the filter. In addition, a ring-shaped clean air chamber 4 4 is formed between the filter screen 43 and the peripheral wall 4 1 a of the box 41, and at the same time, a guide communicating with the exhaust pipe 5 is formed on the upper part of the box 41. Exit 45. The lower surface of the above-mentioned case body 41 is covered with the upper wall 34 of the case body 3 1 of the liquid separation device 3, and the center part of the upper wall part 34 is viewed from the top by a spiral brush 4 for formation and dust removal. The position of the outlet 3 5 of the circular liquid separation device 3 having the same contour as 2 is also the inlet of the dust collection device 4. The material for forming the box 41 is not particularly limited. For example, paper, trees, synthetic resin, metal, etc. can be used, but it must have mechanical strength, especially rigidity, that can withstand the pressure of air flow. In this embodiment, the box body 41 is formed of a synthetic resin having excellent mechanical strength, weather resistance, chemical resistance, acid resistance, alkali resistance, and heat resistance. In addition, the shape of the box body 41 is formed into a hollow shape, and a ring-shaped clean air chamber 4 4 is formed between the filter screen 4 3 and the peripheral wall 4 1 a of the box body 41. However, the filter screen 4 3 is formed It may be connected all around, or partly in the circumferential direction, or it may be formed continuously. That is, the box body 4 1 is, for example, a polygonal cube, a cylindrical shape, or an elliptical cylindrical shape that can form a cube, a rectangular shape, or the like. It is desirable to achieve a simple shape that reduces manufacturing costs. The whole of the filter 4 3 is evenly filtered. It is best to form a clean room 4 4 around the filter 4 3 -------- install-{Read the precautions on the back before filling in this page ) The size of the paper used for this edition is in accordance with the Chinese National Standard (CNS) A4 (210X297 mm) -20- Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 ____B7_ V. Description of Invention (18). From this point of view, the embodiment of the present embodiment 'tan, the box body 41 is formed into a cylindrical shape with a cover. Moreover, the size of the above-mentioned box body 41 is matched with the processing amount per unit time obtained in advance, the spiral brush 4 2, and the filter screen. 4 3 and other exchange cycles to design. The dust-removing spiral brush 4 2 used as a dust-removing tool is provided with a central axis 4 2 a 'bristles 4 2 b centered on the central axis 4 2 a as a side-by-side brush forming a spiral surface. A certain spiral ventilation path 4 2 c is formed between the side by side. The material of the bristles 2 b of the spiral brush 42 for dust removal is not particularly limited. Specifically, it is a metal wire such as natural or synthetic fiber steel, brass, copper, etc., and can generally be selected freely from the bristles used. In this embodiment, in order to prevent the abrasion of the burrs of the spiral brush 42 for powder dust removal or the inner side of the filter mesh 4 3 for a long period of time, synthetic resin hairs are used as the spiral brush 42 for dust removal. The length of the hair root of the hair 4 2 b must be at least on the inner side of the filter 4 3. The pressure of the hair 4 2 b must be in contact with the front end of the hair 4 2 b. The front end of the hair 4 2 b is preferably inside the filter 4 3. The side surface is curved to the extent that it follows the inner side surface of the filter 4 3 at a predetermined length. The central axis 4 2 a of the dust-removing spiral brush 42 is connected to the upper wall 4 1 b of the casing 41 and the lower end of the central axis 4 2 a is connected to separate the liquid. ^ _3 Rotary brush 3 6 for liquid separation, using the driving device M to drive the spiral brush 4 for dust removal and the rotary brush 3 for liquid separation 3 in the same direction at the same time »This paper is suitable for Λ Chinese National Standard (CNS) Α4 specification (210X297 mm) ~ ~ 21-: (#Read the precautions on the back before filling this page).
、1T 經濟部中央標草局員工消費合作社印裝 A7 B7 五、發明説明（19 ) 如上述實施例，可固定螺.旋刷且旋轉過濾網4 3，或 將螺旋刷與過濾網兩者互相反向旋轉以取代用驅動裝置Μ 旋轉粉塵除去用螺旋刷4 2，。 因粉塵除去用螺旋刷4 2，係將毛4 2 b並排成螺旋 狀，使該刷4 2旋轉時，上昇或下降過濾網4 3的中空部 內的氣體，但以集塵爲主的運轉之間，爲在過濾網4 3的 全面均等地運輸粉麈，故氣體會向上昇的方向旋轉 > 將由 導入口導入的氣體通過通氣路4 2 c而上昇，有利於在過 濾網4 3全體以均等的壓力流入。 一旦含有粉塵的氣體接觸在粉塵除去用螺旋刷4 2， 粉塵被捕捉在毛4 2 b之間，利用離心力運輸至過濾網 4 3的內側面。又，未接觸在該粉塵除去用螺旋刷4 2的 毛4 2 b，通過通氣路4 2 c而飄浮在到達過濾網4 3的 內側面的氣體中的微粒子粉塵，係利用氣體從過濾網4 3 內側流經外側捕捉在過濾網4 3。 針對本發明裝置及本發明方法，過濾網的內側及外側 ’因該發明乃以使得除去水份及油份的氣體流經過濾•網爲 主旨，當然如上所述是以導入含有粉塵的氣體這一側爲內 側，以排出除去粉塵的氣體這一側爲外側。 過濾網4 3的構成，係以能捕獲〇 . 3 // m以下的粉 塵即可並未特別的限定，但譬如可捕集的微粒子粉塵的最 小粒徑爲0 . 3#m時，可用一斤厚度1. 5mm程度的 過濾網所構成。 但是本實施形態，爲了能捕集微粒子粉塵的最小粒徑 本纸張尺度適用中國國家標準（CNS ) Α4規格（2丨Ο X 297公釐） -22- --------------ΐτ------4 (請先閲請背面之注意事項再填疼本頁) 經濟部中央標準局貝工消費合作社印掣 A7 ______B7 ___ 五、發明説明（20 ) 爲0 . 01#m程度，故以遺層從內側至外側依序縮小網 目的三層以上的過濾網之積層網所構成。 構成上述過濾網（積層過濾網）4 3的過濾網4 3 A 、43B、43C的積層數爲三層以上，根據用途，因爲 一層或兩層無法捕獲粒徑0.01的微粒子粉塵故不 理想。 又，雖在積層過濾網4 3的上流側配置網目小的過濾 網43B或者43C，能以其過濾網43B或者43C的 網目大小捕獲比較小的粉塵，但堵塞快，可使用時間短不 理想。、 1T Printed by the Consumer Standards Cooperative of the Central Standardization Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (19) According to the above embodiment, the screw can be fixed. Rotate the brush and rotate the filter 4 3, or both the spiral brush and the filter Rotate in the reverse direction instead of rotating the spiral brush 42 for dust removal with the driving device M. The spiral brush 4 2 for dust removal is formed by arranging the bristles 4 2 b side by side in a spiral shape. When the brush 4 2 is rotated, the gas in the hollow portion of the filter 4 3 is raised or lowered. In order to transport the powder powder uniformly throughout the filter 4 3, the gas will rotate in the upward direction > The gas introduced from the inlet is raised through the ventilation path 4 2 c, which is beneficial to the entire filter 4 3 Inflow with equal pressure. Once the dust-containing gas comes into contact with the dust-removing spiral brush 4 2, the dust is captured between the hairs 4 2 b and transported to the inner side of the filter 4 3 by centrifugal force. In addition, the dust 4 2 b of the spiral brush 4 2 for dust removal was not in contact with the dust, and the particulate dust floating in the gas reaching the inner side of the filter 4 3 through the air passage 4 2 c was removed from the filter 4 by the gas. 3 The inside flow captures the filter 4 3 through the outside. According to the device and the method of the present invention, the inner and outer sides of the filter screen are due to the fact that the gas that removes water and oil flows through the filter and screen. Of course, as described above, the introduction of dust-containing gas One side is the inside, and the side where the dust-removing gas is discharged is the outside. The structure of the filter mesh 4 3 is not particularly limited so long as it can capture dust below 0.3 // m, but for example, when the minimum particle size of the trappable particulate dust is 0.3 #m, one The thickness of the filter is about 1.5mm. However, in this embodiment, in order to capture the smallest particle size of the particulate dust, the paper size applies the Chinese National Standard (CNS) A4 specification (2 丨 〇 X 297 mm) -22- ---------- ---- ΐτ ------ 4 (please read the precautions on the back before filling this page) Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperative, A7 ______B7 ___ V. Description of Invention (20) is 0 01 # m level, so it is composed of a layered net of three or more filter screens in order to reduce the mesh sequentially from the inside to the outside. The number of layers of the filters 4 3 A, 43B, and 43C constituting the above-mentioned filter (layer filter) 4 3 is three or more. Depending on the application, one or two layers cannot capture fine particles with a particle diameter of 0.01, which is not desirable. In addition, although a small-mesh filter 43B or 43C is arranged on the upstream side of the laminated filter 43, the relatively small dust can be captured by the mesh size of the filter 43B or 43C, but the clogging is fast and the usable time is short.
積層過濾網43的各過濾網43A、43B、43C 的網目大小，係考慮用途、捕獲的微粒子粉塵的粒徑分佈 等而適當設定。 本實施形態，係積層網目大小爲2 0 0 // m程度之第 一層過濾網4 3 A、網目大小爲50至200ym程度之 第二層過濾網4 3 B、網目大小爲1至5 0 // m程度之第 三層過濾網4 3 C。一旦在過濾網4 3流過含有微粒子粉 塵的氣流，比第一層過濾網4 3 A的網目a的大小大的粒 徑的塵埃會全部捕獲在第一層過濾網4 3 A，捕獲的塵埃 塞在第一層過濾網4 3 A的網目a的面積會漸漸擴大。 據此，雖然第一層過濾網4 3 A的網目a的平均大小 變小，但假定此例塵埃爲球形，^濾網的網目爲正方形， 與第一層過濾網4 3 A的網目a同大小的塵埃能捕獲在第 一層過濾網4 3 A的網目a，堵塞塵埃的網目可通過其網 (許先閩讀背面之注意事碩再填寫本頁) 鲁批衣IT---------------- 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -23- A7 ___ B7 五、發明説明（21 ) 目大小約0 . 2倍以下的塵埃_。 雖然該値是以第一層過濾網4 3 A略爲完全堵塞的狀 態爲理論的集塵極限粒徑，但若積層過濾網4 3的壓力損 失變大，即可旋轉粉塵除去用螺旋刷4 2，以再生積層過 濾網4 3。 如第2圖的模式圖，第一層過濾網4 3A和第二層過 濾網4 3 B的邊界，第一層過濾網4 3 A的網目a係分割 比這網目的大小小的第二層過濾網4 3 B的網目b，而第 二層過濾網4 3 B的網目b的一部份係利用第一層過濾網 4 3 A的網目a分割。 因此，第一層過濾網4 3 A和第二層過濾網4 3 B的 邊界網目的平均値係比第二層過濾網4 3 B的網目b的大 小還小，於此邊界大量捕獲比第二層過濾網4 3 B的網目 b還小的塵埃，依此本邊界實際的網目大小比第二層過濾 網43B的網目b還小。 經濟部中央標準局長工消費合作社印製 根據過濾網43A、43B、43C的積層數，各層 過濾網43A、43B、43C的網目a 、b、c的大小 等，即使最後層的過濾網（此例爲第三層過濾網4 3 C ) 及其前層的過濾網4 3 B的邊界也能決定實際的網目大小 ，以決定過濾網4 3的集塵極限粒徑。 因爲事實上最後層的過濾網4 3 C的網目c的大小不 能只製造lym以上，故一旦最莖層的過濾網4 3 C的網 目大小，如上所述選定其前層的過濾網4 3 B的網目b的 大小，藉由增加過濾網的積層枚數，可將集塵界限粒徑做 -24- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4规格（2丨0X297公釐） 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（22 ) 成0 . 0 1 μιη程度或者0.〇 1 //m以下。 積層過濾網4 3的厚度，可考慮微粒子粉塵發生源1 和送風機7的吸入壓的壓力差，過濾網4 3的通氣性至壓 力損失，過濾網4 3的的機械強度等來決定，本實施形態 係設定在5 m m以上。 而積層過濾網43的各過濾網43A、43B、43 C的厚度也同樣可考慮微粒子粉塵發生源1和送風機7的 吸入壓的壓力差，過濾網4 3的通氣性至壓力損失，過濾 網4 3的的機械強度等來決定，本實施形態係第一層過濾 網4 3 A的厚度爲積層過濾網4 3的全厚的2 0至5 0% ，第二層過濾網4 3 B的厚度爲積層過濾網4 3的全厚的 3 0至6 0%，第三層過濾網4 3 C的厚度爲積層過濾網 43的全厚的1至25%。 構成上述積層過濾網4 3的各過濾網4 3 A、4 3 B 、4 3 C的材料並未特別限定，譬如可使用溶解天然纖維 、合成纖維或者該些混合物、延伸合成樹脂薄膜、發泡合 成樹脂、合成樹脂的可溶混鍊物所形成的多孔質體、陶瓷 多孔質體等，而使用纖維的情形，其組織可採用編成組織 '織成組織、不織組織的任一組織。 上述天然纖維可分類成有機和無機，有機天然纖維係 舉綿、人造短纖維、紙漿等植物纖維、羊毛、牛毛、豬毛 、馬毛、絹等的動物性纖維爲例_，而無機天然纖維係舉玻 璃纖維等的陶瓷纖維、玻璃棉、石棉等爲例。 上述合成纖維可分類成有機和無機，有機合成纖維係 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -25- (請先閲讀背面之注意事項再填寫本頁) .€ 訂 ! A7 B7 經濟部中央標準局貝工消費合作社印¾ 五、發明説明（23 ) 舉聚胺纖維、聚酯纖維 '丙樓酸纖維、乙酸纖維等爲例， 無機合成纖維係舉碳纖維、佛爾酮纖維等爲例。 可是，各過瀘網的材料必需使用能與含在處理的氣流 中的物質反應而分解，又不會腐蝕的材料。 本實施形態係重疊厚度約4 m m的聚兩烯纖維來形成 第一層過濾網4 3 A，重疊厚度約3 mm的聚丙烯纖維來 形成第二層過濾網4 3 B，重疊厚度約1 mm的聚丙烯纖 維來形成第三層過濾網4 3 C。 又，此例積層所謂複數層的過濾網4 3 A、過濾網 4 3 B及過濾網4 3 C，係依序密貼各層的過濾網4 3A 、過濾網4 3 B及過濾網4 3 C而設之意，未必各層的過 濾網4 3 A、過濾網4 3 B及過濾網4 3 C均需利用譬如 黏貼等手法，也可以是不可分的一體化。 而積層過濾網4 3係可用補強件加以補強，補強件係 譬如舉由金屬、合成樹脂等所製成的有孔板、網爲例。該 補強件係黏貼在積層過濾網4 3的任一層的過濾網4 3 A 、過濾網4 3 B或者過濾網4 3 C，利用螺固、鉚固、卡 固等方法固定，而也可不與該任何~過濾網結合。 甚至，上述積層過濾網4 3也可利用樹脂浸泡補強， 此時樹脂可以只浸泡在任一層的過濾網4 3 A、過濾網 4 3 B或者過濾網4 3 C，也可浸泡在複數層的過濾網， 還可浸泡在全層的過濾網43>_、43B、43C。 附著在積層過濾網4 3的微粒子粉塵，係藉由一邊旋 轉粉塵除去螺旋刷4 2 —邊接觸在過濾網4 3的內側面淸 (許先閱讀背面之注意事項再填寫本頁) •裝· 丁 -3 .專_ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -26- 經濟部中央標準局貝工消費合作社印繁 A7 __B7 五、發明説明（24 ) 除，並以自重落至下方。 __ 粉塵除去用螺旋刷4 2，係隔著適當時間於週期或者 隨時使驅動裝置Μ反向作動，毛4 2 b可將過濾網4 3的 內面面從上而下掃除的方向逆轉。然後， 經過需要掃落來自積層過濾網4 3及粉塵除去用螺旋 刷4 2的微粒子.粉塵適當時間之後，一旦從逆轉再回到原 來的旋轉方向，過濾網4 3的內外壓力差會回到原來，效 率佳的過濾作用係能回復到過濾網4 3的整面。 又，積層過濾網4 3，係利用粉塵除去用螺旋刷4 2 淸掃內側面，除去堵塞該網目的微粒子粉塵而再生，又， 該粉塵除去用螺旋刷4 2，係藉由以淸掃積層過濾網4 3 的內側面的反動來震動毛4 2 b，堵塞在毛4 2 b之間的 微粒子粉塵會被掃落而再生。又，雖然本實施形態，係進 行除去利用粉塵除去用螺旋刷4 2所捕獲的粉塵再生積層 過濾網4 3，但本發明並未特別限定此，即使是其形狀的 刷或者刮刀狀的構件，還是可藉此除去過濾網所捕獲的粉 塵，積層過網可再生。 粉塵除去用螺旋刷4 2連續旋轉的本實施形態，係同 時並行且連續進行利用粉塵除去用螺旋刷4 2及積層過濾 網4 3之粉塵除去和粉塵除去用螺旋刷4 2及積層過濾網 4 3的再生，能長期間維持高集塵能力。 又，因爲導入集塵裝置4的塵體，係如上所述爲除去 油份及水份的氣體，故油份、水份甚至粉塵不會黏滿附著 在積層過濾網4 3。其結果，即可防止積層過濾網4 3的 (請先閱讀背面之注意事項再填寫本頁) •裝. 訂 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -27- A7 _ _B7 五、發明説明（25 ) 堵塞進行，更因油份或水份复浸透積層過濾網4 3而無不 能除去，故能更進一步長期間維持高集塵能力。 從粉塵除去螺旋刷4 2及積層過濾網4 3掃落的粉麈 ，可從兼具集塵裝置4的導入口的液分離裝置3的出口 3 5通過液分離用旋轉刷3 6的周圍或毛之間而落至液分 離室3 2，最後會落至液分離室3 2的底部，與分離在該 液分離室3 2的粉塵一起儲存。因而，能同時將利用集塵 裝置4所分離除去的粉麈和分離在液分離裝置3的廢棄物 運至分別處理場等之後處理場，作業員接觸有害物質的機 會少，安全性高。 又，就本實施形態，回收在液分離裝置3底部的粉塵 廢棄之際，爲確保對有害物質的不特定多數的第三者的安 全，可將回收在匣體3 i內的底部的粉塵及配合需要所設 計的包含吸油性聚合物8和吸水性聚合物9的積層體的袋 等之廢棄用容器，配置在匣體3 1的下部3 1 a內。 經濟部中央標準局兵工消費合作社印製 (請先閱讀背面之注意事項存填离本育) 又，也可以雙層軸構成上述中心軸4 2 a ，且以共通 的驅動裝置Μ或者個別的驅動裝置|互相獨立的向同方向 或者反方向旋轉液分離旋轉刷3 6和粉塵除去用螺旋刷 4 2° 甚至，如第3圖所示，使液分離裝置3和集塵裝置4 互相獨立，可將液分離裝置3的出口 3 5和集塵裝置4的 導入口 4 7以中間導管1 0連通此例，雖然各別設置驅 動液分離裝置3的液分離旋轉刷3 6之驅動裝置Μ 1和、 驅動集塵裝置4的粉塵用除去螺旋刷4 2之驅動裝置Μ 2 本紙張尺度適用中國國家標準（CNS ) Α4規格（2丨0X297公釐） ~2β - 經濟部中央標隼局員工消費合作社印製 A7 .____B7_ 五、發明説明（26 ) ，但也可以具有連動液分離甩旋轉刷3 6和螺旋刷4 2的 適當傳動機構的共通驅動裝置來共同驅動兩者。 尤其是如第3圖所示，設置一與匣體4 1的上壁4 1 b獨立’從上側蓋住過濾網4 3的中空部份或者過濾網 4 3的上面整體之蓋體4Λ c，在該蓋體4 1 c的上側形 成均等連通連接在過濾網4 3的外側整周的淨氣室4 4之 集合室4 6，在該集合室4 6的中央構成導出口 4 5的開 口，從過濾網4 3的外側面至導出口 4 5的流路阻力在周 邊爲均等。而且，藉由此種從過濾網4 3的外側面至導出 口 4 5的流路阻力在周邊爲均等的情形，將過濾網4 3的 過濾能力在周邊更進一步的變均勻。 又，即使本實施形態，針對液分離裝置3的液分離用 旋轉刷的厚度，設定在集塵裝置4的過濾網43的有 效長度y /的1至7 5%，最好爲3至6 0%，更理想爲 5至5 0%，因而，可回避該旋轉刷3 6的壓加損失增大 乃至送風機7的大型化，有效捕捉油份、水份及粒徑比較 大的粉塵。亦即，一旦液分離用旋轉刷的厚度未滿筒狀過 濾網長度的1 %，即不能達成水份及油份所要的除去率， 一 ϋ超過7 5 %會導致壓力損失增大降低處理氣體的導入 效率，爲達成所要的氣體處理效率，必要產生大型化設備 ，設備費用增加。 又，上述集塵裝置4的匣體j 1、粉塵除去用螺旋刷 4 2及過濾網4 3並不限定在縱軸，如第4圖所示也可配 置在橫軸。而且，即使本實施形態，也藉由針對液分離裝 --------------IT-----« ^ (#先閱讀背面之注意事邛再填艿本頁) 本紙張尺度適用中國國家標準（CNS ) A4現格（210X297公釐） -29- 經濟部中央標準局員工消費合作社印^ Α7 Β7 五、發明説明（27 ) 置3的液分離用旋轉刷的厚度X "，係設定爲集塵裝置4 的過濾網4 3的有效長度y 〃的1至7 5%，最好爲3至 6 0%，更理想爲5至5 0%產生同樣的效果。 甚至，就上述各實施形態，如第4圖匠示，將液分離 裝置3的底壁3 1 d形成漏斗型，於連設在其下端的取出 口 3 1 e設閘閥3 7，可藉由該閘閥3 7的開關，隨時取 出回收在液分離裝置3內的油份、水份，甚至微粒子粉塵 等之廢棄物。 上述各實施形態，雖是說明有關採用粉塵除去螺旋刷 4 2作爲粉塵除去具，接觸在集塵裝置4的過濾網4 3的 內側面，可在定位形成旋轉，但本發明並不限定於此。亦 即，除粉塵除去用螺旋刷等，可採用粉塵刮取用之刮刀等 ，可藉由一邊將該些接觸在集塵裝置的過濾網一邊向圓周 方向旋轉或者往復運動或者向軸向做往復運動，或者組合 該些運動，除去、回收捕捉在該過濾網4 3的粉塵。 又，上述粉塵除去用螺旋刷或粉塵刮取用之刮刀形成 螺旋狀的情形，除了可將該些形成連續性的情形外，也可 間歇性形成，將整體作爲螺旋形狀。 又，如第5圖所示，可將導入含有粉塵的氣體的這一 側和導入除去粉塵的氣體的這一側以過濾網4 3的形狀爲 基準而改變，此時，粉塵除去用螺旋刷4 2的位置也過濾 網4 3的形狀爲基準而改變。也藉由驅動裝置Μ驅動粉 塵除去用螺旋刷4 2，或者固定粉塵除去用螺旋刷4 2， 反之即可利用驅動裝置Μ驅動過濾網4 3。就第5圖所示 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） -30- 先聞讀背面之注意事項再填寫本頁) :裝 訂 經濟部中央標準局員工消費合作社印製 A7 _____ 』 B7 五、發明説明（28 ) 之集塵除去具，其過濾網的既狀可採用長方形等之其他形 狀取代粉塵除去用螺旋刷4 2。 甚至’上述各實施形態，雖是說明有關大量產生微粒 子粉塵的半導元件製造業的例子作爲粉塵的發生源，但本 發明並不限定於此，譬如也適於應用在塑膠工業、資源產 業、陶瓷工業、粉末冶金工業、洗劑工業、觸媒工業、鐵 素體工業、顏料工業、農藥工業、飼料加工業、食品工業 、廢棄物處理產業、生物關連產業、化妝品工業及醫藥品 工業等作爲粉塵的發生源。 〔發明之效果〕 如以上’若藉由有關本發明之粉塵除去裝置，從粉塵 發生源將含有粉塵的氣體導入液分離裝置，分離水份、油 份等之後導入集麈裝置。因而，不可能會在集塵裝置的過 濾網的表面附著水份、油份或者與該些一同吸附在此的粉 塵，可利用氣體中的水份或油份來促進防止過濾網的堵塞 進行。 但，因採用形成筒狀過濾網，將氣體從其內側流穿至 外側的一方，以配置在過濾網內側的粉塵除去用具除去捕 獲在過濾網的粉塵，達到該過濾網的集塵能力的回復之自 動再生型之集塵裝置作爲集塵裝置，故不必設置作爲集麈 用過濾網再生的大規模逆洗裝^_，可將裝置整體小型化。 而且，尤其是本發明，液分離裝置的液分離用旋轉刷 的厚度，係爲根據集塵裝置的筒狀過濾網的長度的1至 1-- ---- ·- - I ί 1— - - - - - 11 ~ II I - - - ^^1 m ^^1 V U2. ,τ (讀先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） -31 - A 7 B7 五、發明説明（29 ) 75%，最好爲3至60% _，..更理想爲5至5 0%的尺寸 ，由於該旋轉刷只會造成通氣性差，即不會因壓力損失增 大導致送風機的大型化等，又不會降低處理能力，能有效 除去來自粉塵發生源的氣體中的水份或油份，而防止集塵 裝置過濾網的水份或油份的附著，或隨此的該過濾網的自 動再生能力之下降乃至喪失。其結果，能更進一步將裝置 小型化，同時能削減設備成本及週轉資金。 又，針對本發明裝置，係在液分離裝置的液分離室的 底部，配置吸油性聚合物、吸水性聚合物或者吸油性聚合 物和吸水性聚合物之積層體，此時，因能實施將分離的油 份或者水份或油份和水份，吸收在該聚合物，而與該聚合 物一同廢棄之方法，故藉由實施此情形，即能很容易進行 分離的油份或者水份或者油份與水份的廢棄處理。 經濟部中央標準局員工消費合作社印^ 又，因上述液分離室的下部能形成從其上部分開的情 形，即能實施在該液分離室分離，將儲存在其底部的廢棄 物搬運至如液分離室的下部的後處理場的方法，故可藉由 實施此情形，於向後處理場搬運時，作業員不必接觸廢棄 物，能更進一步提高安全性。 又，針對本發明裝置，採用以位於過濾網的軸心的中 心軸爲中心，將毛形成螺旋面成並排的螺旋刷作爲集塵裝 置的粉塵除去具的情形，該螺旋刷乃利用集塵裝置的驅動 裝置來旋轉，能使過濾網內側氣體從刷的氣體導入側流 至相反側（導出側），其結果，過濾網的整面爲均等的壓 力流入氣體，將過濾網的過濾作用在整面平均化，藉此， -32- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨0X297公釐） 經濟部中央標準局貝工消費合作社印製 A7 _ B7 五、發明説明（3〇 ) 防止在過濾網局部性集中粉獒而產生堵塞的情形。 甚至，針對本發明裝置，採用以位於過濾網的軸心的 中心軸爲中心，將毛形成螺旋面成並排的螺旋刷作爲集塵 裝置的粉塵除去具的情形，將該螺旋刷隨時利用集塵裝置 的驅動裝置，將過濾網的內側面利用從上至下掃的方向驅 動，即可自該螺旋刷及過濾網圓滑且有效的掃落微粒子粉 塵。 又，針對本發明裝置，於集塵裝置被配置在液分離裝 置的上方，集塵裝置導入口兼具液分離裝置之導出口的情 形，能將自集塵裝置落下的粉塵掉落在液分離室而儲存在 液分離室的底部，藉此，可在液分離裝置和集麈裝置之間 自氣流分離並堆積粉塵，或防止因從液分離裝置至集塵裝 置的流路阻力產生壓損，同時將裝置整體更進一步小型化 ，又，能提高回收的粉塵等向後處理場搬運的安全性。 加上，針對本發明裝置，集塵裝置的過濾網係以積層 由內側向外側依序縮小網目的三層以上的過濾網的積層過 濾網所構成的情形，藉由各層過濾網的網目重疊，尤其是 最後層和最後層之前的一層的過濾網的網目的重疊，將可 捕集的粉塵的最小粒徑爲比0 . 3 # m更小。 此時，上述積層過濾網，係由網目大小爲2 0 0 /im 左右的第一層過濾網和、網目大小爲5 0至2 0 0 /zm左 右的第二層過濾網和、網目大4、_爲1至5 Ο μηι左右的第 三層過濾網所製成之三層積層過濾網的情形，能捕集的粉 塵最後粒徑爲0 . 0 1 μιη左右。 (諳先閲讀背面之注意事項再填寫本頁) 訂 本紙張尺度適用中國國家標隼（CNS ) Α4規格（210Χ297公釐〉 _ 33 - A 7 _______B7 ______ 五、發明説明（31 ) 而且’以該三層積層過獲網構成集塵裝置的過濾網的 情形’藉由積層過濾網的厚度爲〇 . 5至2 0 m m以上， 第一層過濾網的厚度爲積層過濾網全厚的2 0至5 0%， 第二層過濾網的厚度爲積層過濾網全厚的3 0至6 0%， 第三層過濾網的厚度爲積過濾網全厚的1至2 5%，不僅 能得到足夠的機械強度，還可得到優良的粉塵除去效果。 〔圖面之簡單說明〕 第1圖係本發明裝置之構成圖： 第2圖係表示使用本發明的第一層和第二層過德網的 關係之模式圖：. 第3圖係表示本發明裝置之另一實施形態之構成圖： 第4僵係表示本發明裝置之又另一實施形態之構成圖The mesh size of each of the filters 43A, 43B, and 43C of the laminated filter 43 is appropriately set in consideration of the use, the particle size distribution of the captured fine particles, and the like. In this embodiment, the mesh layer of the ensemble layer has a mesh size of 2 0 0 // m of the first layer of mesh 4 3 A, the mesh size of the second layer of meshes of 50 to 200 ym 4 3 B, and the mesh size of 1 to 50 // The third layer of filters with a degree of m 4 3 C. Once the air flow containing particulate dust flows through the filter 4 3, dust with a larger particle size than the mesh a of the first layer 4 3 A will be captured in the first layer 4 3 A and the captured dust The area of mesh a which is plugged in the first layer of filter 4 3 A will gradually expand. According to this, although the average size of the mesh a of the first-layer filter 4 3 A becomes smaller, it is assumed that the dust in this example is spherical, and the mesh of the filter is square, which is the same as the mesh a of the first-layer filter 4 3 A. The size of the dust can be captured in the mesh a of the first-layer filter 4 3 A, and the mesh clogging the dust can pass through its net (Xu Xianmin read the caution on the back and then fill out this page) Lu Yiyi IT ------- --------- This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) -23- A7 ___ B7 V. Description of the invention (21) Dust with a mesh size of about 0.2 times or less _. Although the dust collection limit particle diameter is theoretically based on the state where the first layer of the filter 4 3 A is slightly completely blocked, if the pressure loss of the layered filter 4 3 becomes large, the spiral brush 4 for removing dust can be rotated. 2. To regenerate laminated filters 4 3. As shown in the pattern diagram in Figure 2, the boundary between the first layer of filter 4 3A and the second layer of filter 4 3 B, and the mesh a of the first layer of filter 4 3 A divides the second layer smaller than the size of this mesh. The mesh b of the filter 4 3 B, and a part of the mesh b of the second-layer filter 4 3 B is divided by the mesh a of the first-layer filter 4 3 A. Therefore, the average mesh size of the boundary meshes of the first layer of filter 4 3 A and the second layer of filter 4 3 B is smaller than the size of mesh b of the second layer of filter 4 3 B. At this boundary, a large number of traps are The mesh b of the second-layer filter 4 3 B is still small, so the actual mesh size of this boundary is smaller than the mesh b of the second-layer filter 43B. According to the number of layers of filters 43A, 43B, 43C and the size of meshes a, b, and c of each layer of filters 43A, 43B, 43C, etc., even the filter of the last layer (this example The boundary of the third filter layer 4 3 C) and the previous filter layer 4 3 B can also determine the actual mesh size to determine the dust collection limit particle size of the filter 4 3. In fact, the size of the mesh c of the filter layer 4 3 C in the last layer cannot be made more than lym. Therefore, once the mesh size of the filter layer 4 3 C in the top layer is selected, the filter layer 4 3 B in the previous layer is selected as described above. The size of the mesh b can be increased to -24- by increasing the number of layers of the filter. (Please read the precautions on the back before filling this page.) This paper size applies to the Chinese National Standard (CNS) A4 specifications (2 丨 0X297 mm) A7 B7 printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (22) to a level of 0. 01 μm or less than 0. 〇 // // m. The thickness of the laminated filter 4 3 can be determined by considering the pressure difference between the suction pressure of the particulate dust generation source 1 and the blower 7, the air permeability of the filter 4 3, the pressure loss, and the mechanical strength of the filter 4 3. The morphology is set above 5 mm. The thickness of each of the filters 43A, 43B, and 43C of the laminated filter 43 can also consider the pressure difference between the suction pressure of the particulate dust generation source 1 and the blower 7, the air permeability of the filter 4 3 to the pressure loss, and the filter 4 The mechanical strength of 3 is determined. The thickness of the first filter 4 3 A in this embodiment is 20 to 50% of the full thickness of the laminated filter 4 3 and the thickness of the second filter 4 3 B. The thickness of the laminated filter 43 is 30 to 60%, and the thickness of the third filter 43 C is 1 to 25% of the thickness of the laminated filter 43. The material of each of the filters 4 3 A, 4 3 B, and 4 3 C constituting the laminated filter 4 3 is not particularly limited. For example, dissolved natural fibers, synthetic fibers or these mixtures, stretched synthetic resin films, and foams can be used. Porous bodies, ceramic porous bodies, and the like formed of synthetic resins and soluble chains of synthetic resins. When fibers are used, the organization can be any of a woven structure, a woven structure, and a non-woven structure. The above-mentioned natural fibers can be classified into organic and inorganic. Organic natural fibers are plant fibers such as cotton, artificial staple fibers, and pulp, and animal fibers such as wool, cow hair, pig hair, horse hair, and silk. Take ceramic fibers such as glass fibers, glass wool, asbestos, etc. as examples. The above synthetic fibers can be classified into organic and inorganic. The organic synthetic fibers are applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) on this paper scale. -25- (Please read the precautions on the back before filling this page). A7 B7 Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Ⅴ. Description of the Invention (23) Take polyamine fiber, polyester fiber, propionate fiber, acetate fiber, etc. as examples. Inorganic synthetic fibers include carbon fiber, fur Ketone fibers and the like are examples. However, it is necessary to use a material that can be decomposed by reacting with the substance contained in the air stream to be treated, without corrosive materials. In this embodiment, polydiene fibers with a thickness of about 4 mm are stacked to form a first layer of filter 4 3 A, and polypropylene fibers with a thickness of about 3 mm are stacked to form a second layer of filter 4 3 B, with an overlap thickness of about 1 mm. Polypropylene fiber to form a third layer of filter 4 C. In this example, the so-called multiple layers of filter mesh 4 3 A, filter mesh 4 3 B, and filter mesh 4 3 C are successively closely adhered to each layer of filter mesh 4 3A, filter mesh 4 3 B, and filter mesh 4 3 C. The purpose of the design is not necessarily that the filters 4 3 A, 4 3 B, and 4 3 C of each layer need to use methods such as sticking, and can also be inseparable integration. The multilayer filter screens 4 and 3 can be reinforced with reinforcements, such as perforated plates and nets made of metal, synthetic resin, and the like. The reinforcing piece is adhered to the filter 4 3 A, the filter 4 3 B, or the filter 4 3 C of any layer of the laminated filter 4 3, and is fixed by means of screwing, riveting, or clamping, or the like. This any ~ filter combination. Even the above-mentioned laminated filter 4 3 can be reinforced by resin soaking. At this time, the resin can be immersed in only one layer of the filter 4 3 A, the filter 4 3 B, or the filter 4 3 C, or it can be immersed in a plurality of layers of filtering. Net, can also be immersed in the whole layer of filter 43> _, 43B, 43C. The particulate dust adhering to the laminated filter 4 3 is removed by rotating the spiral brush 4 2 while rotating the dust-contacting the inner side of the filter 4 3 (read the precautions on the back before filling in this page) • Installation · Ding-3. Special _ This paper size is applicable to Chinese National Standard (CNS) A4 (210X297 mm) -26- The Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperatives, India, Fan A7 __B7 V. Description of Invention (24) Dead weight falls below. __ The spiral brush 4 2 for dust removal is to reversely drive the driving device M at intervals or at any time. The hair 4 2 b can reverse the inner surface of the filter 4 3 from top to bottom. Then, the particles from the laminated filter 4 3 and the dust removing spiral brush 4 2 need to be swept off. After a proper time of the dust, once it is reversed and returned to the original rotation direction, the pressure difference between the inside and outside of the filter 4 3 will return. It turned out that the efficient filtering effect can be restored to the entire surface of the filter 4 3. In addition, the laminated filter 4 3 sweeps the inner side with a dust removing spiral brush 4 2 to remove and regenerate the particulate dust clogging the mesh, and the dust removing spiral brush 4 2 is used to sweep the laminate. The reaction of the inner side of the filter 4 3 shakes the hair 4 2 b, and the particulate dust clogged between the hair 4 2 b is swept away and regenerated. In addition, although the present embodiment is to remove the dust regeneration laminated filter 4 3 captured by the dust removing spiral brush 42, the present invention is not particularly limited to this, even if it is a brush or a spatula-shaped member, This can still be used to remove the dust captured by the filter, and the layer can be regenerated by passing through the mesh. Spiral brush 42 for dust removal This embodiment of continuous rotation is performed simultaneously and continuously using the spiral brush 4 2 for dust removal and the laminated filter 4 3 spiral brush 4 2 for dust removal and the laminated filter 4 The regeneration of 3 can maintain high dust collection ability for a long time. In addition, since the dust introduced into the dust collecting device 4 is a gas for removing oil and water as described above, oil, water, and even dust do not stick to and adhere to the laminated filter 43. As a result, it is possible to prevent the laminated filter 4 3 (please read the precautions on the back before filling in this page) • Packing. The size of the paper is applicable to the Chinese National Standard (CNS) A4 (210X297 mm) -27- A7 _ _B7 V. Description of the invention (25) The clogging is carried out, and it is impossible to remove the oil or water due to the permeation of the laminated filter 4 3, so it can maintain a high dust collection capacity for a longer period of time. The dust powder sweeping off the spiral brush 4 2 and the laminated filter 4 3 from the dust can be passed from the outlet 3 5 of the liquid separation device 3 which also has the inlet of the dust collection device 4 through the liquid separation rotary brush 3 6 or It falls between the hairs to the liquid separation chamber 32, and finally falls to the bottom of the liquid separation chamber 32, and is stored together with the dust separated in the liquid separation chamber 32. Therefore, it is possible to simultaneously transport the powder and dust separated and removed by the dust collection device 4 and the waste separated in the liquid separation device 3 to a separate treatment site and the like, and the operator has less chance of contacting harmful substances and has high safety. Moreover, in the present embodiment, when the dust recovered at the bottom of the liquid separation device 3 is discarded, in order to ensure the safety of an unspecified majority of harmful substances to a third party, the dust recovered at the bottom of the box 3 i and A waste container, such as a bag containing a laminated body of the oil-absorbing polymer 8 and the water-absorbing polymer 9, which is designed to be used, is placed in the lower portion 3 1 a of the case 31. Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Military Industry Cooperatives (please read the precautions on the back, and fill in this education). Alternatively, the above-mentioned central axis 4 2 a can also be composed of a double-layer shaft, with a common drive device M or individual Driving device | Separate the liquid separation rotary brush 36 and the dust removing spiral brush 4 2 ° in the same direction or opposite directions independently of each other. As shown in FIG. 3, the liquid separation device 3 and the dust collection device 4 are independent of each other. The outlet 3 5 of the liquid separation device 3 and the inlet 4 7 of the dust collection device 4 can be communicated by an intermediate duct 10 in this example. Although the liquid separation rotary brush 36 for driving the liquid separation device 3 is separately provided with the driving device M 1 And, driving device for removing the spiral brush 4 2 of the dust collecting device 4 The driving device M 2 of this paper size is in accordance with China National Standard (CNS) A4 specification (2 丨 0X297 mm) ~ 2β-Consumption by employees of the Central Bureau of Standards, Ministry of Economic Affairs The cooperative prints A7 .____ B7_ V. Description of the invention (26), but it may also have a common driving device with a suitable transmission mechanism that links the liquid separating and rotating brush 36 and the spiral brush 42 to drive the two together. In particular, as shown in FIG. 3, a cover body 4Λc, which is independent of the upper wall 4 1 b of the box body 41 and covers the hollow part of the filter mesh 43 or the entire upper surface of the filter mesh 43 from the upper side, is provided. On the upper side of the cover body 4 1 c, a collection chamber 46 is formed, which is evenly connected to the entire periphery of the outside of the filter screen 43. The collection chamber 46 is formed at the center of the collection chamber 46. The flow path resistance from the outer surface of the filter mesh 4 3 to the outlet 45 is uniform around the periphery. In addition, by such a situation that the flow path resistance from the outer surface of the filter 4 3 to the outlet 45 is uniform around the periphery, the filtering ability of the filter 4 3 is further uniformed around the periphery. In addition, even in the present embodiment, the effective length y / of the filter 43 of the dust collection device 4 is set to 1 to 7 5% of the thickness of the liquid separation rotating brush of the liquid separation device 3, and preferably 3 to 60. %, More preferably 5 to 50%. Therefore, the increase in pressure loss of the rotary brush 36 and even the enlargement of the blower 7 can be avoided, and dust with a relatively large oil content, moisture content and particle size can be effectively captured. That is, once the thickness of the rotary brush for liquid separation is less than 1% of the length of the cylindrical filter, the desired removal rate of water and oil cannot be achieved. If the thickness exceeds 75%, the pressure loss will increase and the processing gas will be reduced. In order to achieve the required gas processing efficiency, it is necessary to produce large-scale equipment and increase the equipment cost. The case j1, the dust removing spiral brush 4 2 and the filter 43 of the dust collecting device 4 are not limited to the vertical axis, and may be disposed on the horizontal axis as shown in Fig. 4. In addition, even in this embodiment, it is also installed for liquid separation -------------- IT ----- «^ (#Read the precautions on the back first, and then fill out this page ) This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) -29-Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs ^ Α7 Β7 V. Description of the invention (27) Rotary brush for liquid separation at 3 The thickness X " is set to the effective length y of the filter screen 4 3 of the dust collection device 1 1 to 7 5%, preferably 3 to 60%, and more preferably 5 to 50% to produce the same effect. . Furthermore, in the above-mentioned embodiments, as shown in FIG. 4, the bottom wall 3 1 d of the liquid separation device 3 is formed into a funnel shape, and a gate valve 37 is connected to the take-out port 3 1 e provided at the lower end thereof. The gate valve 37 is opened and closed to take out oil, water, and even particulate dust and other waste recovered in the liquid separation device 3 at any time. Each of the embodiments described above is related to the use of the dust-removing spiral brush 42 as the dust-removing tool, which can be positioned and rotated while contacting the inner side surface of the filter screen 4 3 of the dust collection device 4, but the present invention is not limited to this . That is, a spiral brush for dust removal, a scraper for dust scraping, etc. can be used to rotate or reciprocate in the circumferential direction or reciprocate in the axial direction while contacting the filters in the dust collecting device. The movement, or a combination of these movements, removes and collects the dust trapped in the filter 43. When the spiral brush for dust removal or the scraper for dust scraping is formed in a spiral shape, it may be formed intermittently in addition to the case where these are formed continuously, and the entire shape may be a spiral shape. In addition, as shown in FIG. 5, the side where the gas containing dust and the side where the dust-removing gas is introduced can be changed based on the shape of the filter 43. At this time, the spiral brush for dust removal is used. The position of 4 2 is also changed based on the shape of the filter 4 3. The spiral brush 42 for dust removal is also driven by the driving device M, or the spiral brush 42 for dust removal is fixed by the driving device M, otherwise the filter 43 can be driven by the driving device M. The paper size shown in Figure 5 applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -30- Read the precautions on the back before filling out this page): Printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 _____ 』B7 V. Description of the invention (28) The dust collector of the filter can be rectangular or other shapes instead of the spiral brush for dust removal 4 2. Even the above-mentioned embodiments describe examples of the manufacturing of semiconductor devices that generate a large amount of particulate dust as a source of dust generation, but the present invention is not limited to this. For example, the present invention is also applicable to the plastic industry, the resource industry, Ceramic industry, powder metallurgy industry, lotion industry, catalyst industry, ferrite industry, pigment industry, pesticide industry, feed processing industry, food industry, waste treatment industry, bio-related industry, cosmetics industry and pharmaceutical industry, etc. Source of dust generation. [Effects of the Invention] As described above, if the dust removing device according to the present invention is used, a gas containing dust is introduced into a liquid separation device from a dust generation source, and water, oil, etc. are separated and then introduced into a dust collection device. Therefore, it is impossible to attach water or oil to the surface of the filter of the dust collecting device or dust adsorbed together with the surface, and the water or oil in the gas can be used to promote prevention of clogging of the filter. However, because a cylindrical filter is formed, the gas is passed from the inside to the outside, and the dust trapped on the inside of the filter is used to remove the dust trapped in the filter, and the dust collection ability of the filter is restored. The automatic regenerative dust collecting device is used as a dust collecting device, so it is not necessary to provide a large-scale backwashing device for regeneration as a filter for collecting dust, and the entire device can be miniaturized. Moreover, particularly in the present invention, the thickness of the liquid-separating rotating brush of the liquid-separating device is 1 to 1 according to the length of the cylindrical filter of the dust-collecting device. ---- ·--I ί 1-- ----11 ~ II I---^^ 1 m ^^ 1 V U2., Τ (Read the precautions on the back before filling in this page) This paper size applies the Chinese National Standard (CNS) Α4 specification (210X297 (Mm) -31-A 7 B7 V. Description of the invention (29) 75%, preferably 3 to 60% _, .. more preferably 5 to 50%, because the rotating brush will only cause poor air permeability That is, it will not increase the size of the blower due to the increase in pressure loss, and it will not reduce the processing capacity. It can effectively remove the water or oil in the gas from the dust generation source, and prevent the water in the filter of the dust collection device. Or the adhesion of oil, or the automatic regeneration capacity of the filter is reduced or even lost. As a result, it is possible to further reduce the size of the device, and at the same time reduce equipment costs and working capital. In addition, according to the device of the present invention, an oil-absorbing polymer, a water-absorbing polymer, or a laminated body of an oil-absorbing polymer and a water-absorbing polymer is arranged at the bottom of a liquid separation chamber of a liquid separation device. Separated oil or water or oil and water are absorbed into the polymer and discarded with the polymer. Therefore, by implementing this situation, it is easy to separate the oil or water or Dispose of oil and water. Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs ^ Because the lower part of the liquid separation chamber can be separated from the upper part, the liquid separation chamber can be separated and the waste stored at the bottom can be transported to The method of the post-treatment field in the lower part of the liquid separation chamber can be implemented in this way, and the operator does not have to touch the waste during the transport to the post-treatment field, which can further improve the safety. In addition, with the device of the present invention, a spiral brush with hairs formed in a spiral plane side by side with the central axis located at the center of the filter screen as the dust removing device of the dust collecting device is used. The spiral brush uses the dust collecting device. The rotation of the driving device can make the gas inside the filter flow from the gas introduction side of the brush to the opposite side (export side). As a result, the entire surface of the filter screen flows into the gas at an even pressure, and the filtering effect of the filter screen is adjusted. The average surface area is used to take advantage of this, -32- (Please read the precautions on the reverse side before filling out this page) This paper size is applicable to China National Standard (CNS) A4 specification (2 丨 0X297 mm). Cooperatives printed A7 _ B7 V. Description of the invention (30) Prevent the localized concentration of powder dust on the filter screen to cause blockage. Furthermore, in the case of the device of the present invention, a spiral brush with the hairs forming a spiral surface side by side is used as the dust removing device of the dust collecting device with the central axis located at the axis of the filter screen as the dust collecting device. The driving device of the device drives the inner side of the filter screen in a sweeping direction from top to bottom, so that the spiral brush and the filter screen can smoothly and effectively remove particulate dust. In addition, according to the device of the present invention, in a case where the dust collection device is disposed above the liquid separation device, and the inlet of the dust collection device also serves as the outlet of the liquid separation device, the dust falling from the dust collection device can be dropped to the liquid separation. It is stored in the bottom of the liquid separation chamber, so that dust can be separated and accumulated from the air flow between the liquid separation device and the dust collection device, or pressure loss can be prevented due to the resistance of the flow path from the liquid separation device to the dust collection device. At the same time, the entire device is further miniaturized, and the safety of conveying the recovered dust and the like to the post-processing plant can be improved. In addition, according to the device of the present invention, the filter screen of the dust collecting device is composed of a laminated filter layer with three or more layers of filters that are sequentially reduced from the inside to the outside, and the meshes of the filter layers of each layer overlap. In particular, the meshes of the filters in the last layer and the layer before the last layer overlap, and the minimum particle size of the trappable dust is smaller than 0.3 # m. At this time, the above-mentioned laminated filter is composed of a first-layer filter with a mesh size of about 200 / im and a second-layer filter with a mesh size of about 50 to 200 / zm. In the case of a three-layer laminated filter made of a third-layer filter with a diameter of about 1 to 50 μm, the final particle diameter of the dust that can be captured is about 0.01 μm. (谙 Please read the notes on the back before filling this page) The size of the paper is applicable to the Chinese National Standard (CNS) Α4 size (210 × 297 mm) _ 33-A 7 _______B7 ______ 5. Description of the invention (31) The case of a three-layer laminated net to form a filter of a dust collection device. 'The thickness of the laminated filter is 0.5 to 20 mm or more, and the thickness of the first layer of the filter is 20 to the full thickness of the laminated filter. 50%. The thickness of the second filter is 30 to 60% of the thickness of the laminated filter. The thickness of the third filter is 1 to 25% of the thickness of the laminated filter. Not only can it get enough Mechanical strength can also get excellent dust removal effect. [Simplified description of the drawing] Figure 1 is a structural diagram of the device of the present invention: Figure 2 shows the use of the first layer and the second layer of the present invention Schematic diagram of the relationship: FIG. 3 is a diagram showing the structure of another embodiment of the device of the present invention: FIG. 4 is a diagram showing the structure of another embodiment of the device of the present invention
I 第3圖係表本發明明裝置之又另一實施形態之構成圖 % 第6圖係本發明之前所發明的自動再生型集塵裝置之 經满部中央標準局貝工消費合作社印掣 (請先閱讀背面之注意事項再填寫本頁) 構成圖。 [符號之說明〕 1 微粒子粉麈發生源 3 液分離裝置 _ 4 集塵裝置 7 送風機 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） · 34 - 五、發明説明（32 ) A7 B7 經濟部中央標準局負工消費合作社印紫 8 吸 油 性 聚 合 物 9 吸 水 性 聚 合 物 3 1 匣 體 3 1 a 下 部 3 1 b 上 部 3 2 液 分 離 室 3 3 入 □ 3 4 上 壁 3 5 出 □ 3 6 液 分 離 用 旋 轉 刷 3 8 驅 動 裝 置 4 1 匣 體 4 2 粉 塵 除 去 用 螺 旋 4 3 積 層 過 濾 網 ( 過 4 3 A 第 — 層 過 濾 網 4 3 B 第 二 層 過 濾 網 4 3 C 第 三 層 過 濾 網 4 4 淨 氣 室 4 5 導 出 □ (#先閱讀背面之注意事項再填寫本頁) 裝. 訂 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -35-I Figure 3 shows the structure of yet another embodiment of the device of the present invention.% Figure 6 shows the printed parts of the Central Standards Bureau, Shellfish Consumer Cooperative, of the automatic regeneration type dust collector invented before the present invention. (Please read the notes on the back before filling out this page). [Explanation of Symbols] 1 Microparticle powder dust source 3 Liquid separation device _ 4 Dust collection device 7 Air blower The paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) · 34-V. Description of the invention (32) A7 B7 Yinzi 8, Consumer Work Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 9 Oil-absorbing polymer 9 Water-absorbing polymer 3 1 Casing 3 1 a Lower 3 1 b Upper 3 2 Liquid separation chamber 3 3 Into 3 4 Outer wall 3 5 Out □ 3 6 Rotary brush for liquid separation 3 8 Driving device 4 1 Casing 4 2 Spiral for dust removal 4 3 Laminated filter (pass 4 3 A First-layer filter 4 3 B Second-layer filter 4 3 C Third Layer filter 4 4 Clean room 4 5 Outlet □ (#Read the precautions on the back before filling out this page) Packing. The size of the paper is applicable to China National Standard (CNS) A4 (210X297 mm) -35-