TW382037B - Damper - Google Patents

Abstract

The invention provides a kind of damper which employs simple structure to eliminate unpredictable vibration; and, according to the requirement, the damper can be set to have no flexible support function to make the damping object stand still. In order to solve the problem, the method is to install a plurality of leaf spring components as deformation switching method between damping object and substratum separated in vertical direction. These leaf spring components are separately fixed with damping objects and substratum, and change the up and down relative deformation of damping object and substratum passed from fixed portion to horizontal deformation. In order to transmit deformations, there are connectors fixed with these leaf spring components connecting these leaf spring components to transmit horizontal deformations between each leaf spring component. Between the damping object and substratum, the fixing method is set for the damping object to be fixed on the substratum.

Description

A7 . ... __B7______ 五、發明說明（1 ) 【發明所屬之技術領域】 請 先 閱 讀 背- 面 之 注 本發明係關於被使用於例如製造精密機器的製造設備 中，用來除去施加在該製造設備上之日常震動等的震動之 裝置（以下稱爲除震裝置）。 【習知技術】 以往，在精密機器等的製造設備中，在台面或地基等 的地基部分、以及裝置類或載置此裝置類之機台等的除震 對象物之間，有除震裝置。而且，藉由此除震裝置，可以 防止外部的震動傳遞至除震對象物。 訂 經濟部智慧財產局員工消費合作社印製 例如，在積體電路之製造設備中，利用拉起法（CZ 法）來使矽單結晶成長成圓柱狀，然後將此圓柱體切片而 得到做爲基板的晶圓。此矽晶圓，其表面的平坦度以及電 阻係數的均一性是重要的。但是，若在矽單結晶的成長過 程中有震動發生時，成長中的矽單結晶內會發生不均一的 現象。此震動的原因，例如由於周邊區域的交通震動或是 裝置周邊人的移動所產生，亦即所謂的生活震動等。.這種 交通震動或生活震動雖然爲微小震動，但是即使是此種微 小震動，也會重大地妨礙矽單結晶的均一成長。因此，在 此種製造設備中，要將除震裝置設置在地基部分和除震對 象物之間，來除去要施加在除震對象物上的震動。 除震裝置係將彈性體設置在載置除震對象物之機台和 地基部分之間來構成，於是機台成爲除震台。彈性體一邊 支持除震台一邊吸收往上下方向作用的震動能量，藉由此 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -4 A7 ____ B7_ . 五、發明說明（2 ) 手段來除去從外部傳遞至除震台的震動。對於在精密機器 之製造設備中的除震裝置，從除去微小震動的觀點來考量 ，做爲彈性體，例如使用空氣彈簧等。又，通常設置複數 個彈性體。而且，利用使用複數個彈性體來吸收震動能量 ，可以提高震動的除去效果。 另外，在使用複數個彈性體來構成除震裝置時，全部 的彈性體的震動狀態並不一定相同。又，使全部的彈性體 之除震性能全部相等也是困難的。例如，當作用在各彈性 體上的震動不相等、或是除震台上的負荷分布有偏心時， 僅有特定的彈性體之上下伸縮量變大，而會使除震台發生 傾斜。結果，對於除震台上的除震對象物，由於傾斜而產 生旋轉力矩，發生搖動震動。因此，當使用複數個彈性體 時，必須施行解決此種搖動震動之對策。 第1種方法：使除震台下部的重量增加、或是使設備 本身的寬度變寬，來相對地降低設備的高度，使除震台上 的除震對象物之重心下降。但是，此種方法只能夠抑制由 搖動震動所造成之一定程度之除震台的傾斜，無法完全阻 止傾斜發生。 又，第2種方法：在地基部分和機台之間，藉由具備 與彈性體並排之減振器等的衰減裝置，來抑制搖動震動。 但是，此種方法，若衰減裝置的衰減係數低，則無法充分 地抑制搖動震動。相反地，若將衰減係數設定成高數値， r 則雖然可以得到搖動震動的抑制效果，但是會對彈性體所 能達成之上下震動吸收性能產生不良影響。因此，除震裝A7. ... __B7______ V. Description of the invention (1) [Technical field to which the invention belongs] Please read the back-to-side note. The present invention relates to manufacturing equipment used in, for example, precision machinery, to remove A device that generates vibrations such as daily vibrations on equipment (hereinafter referred to as vibration isolation devices). [Knowledge technology] In the past, in manufacturing equipment such as precision equipment, there is a vibration isolation device between a base part such as a table or a foundation, and a vibration isolation object such as a device or a machine on which the device is placed. . In addition, with this shock absorbing device, it is possible to prevent external vibration from being transmitted to the shock absorbing object. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. For example, in the manufacturing equipment of integrated circuits, the silicon single crystal is grown into a cylindrical shape by the pull-up method (CZ method), and this cylinder is sliced to obtain Wafer of the substrate. In this silicon wafer, the surface flatness and the uniformity of the resistivity are important. However, if vibration occurs during the growth of the silicon single crystal, unevenness may occur in the growing silicon single crystal. The reason for this vibration is, for example, the traffic vibration in the surrounding area or the movement of people around the device, so-called life vibration. Although this kind of traffic vibration or life vibration is a small vibration, even this small vibration can greatly hinder the uniform growth of silicon single crystals. Therefore, in such manufacturing equipment, a shock-absorbing device is provided between the foundation portion and the shock-removing object to remove the vibration to be applied to the shock-removing object. The shock absorbing device is constructed by placing an elastic body between the machine on which the shock absorbing object is placed and the ground part, so the machine becomes a shock absorbing table. The elastic body absorbs the vibration energy acting in the up and down direction while supporting the shock absorbing platform, so that this paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -4 A7 ____ B7_. V. Description of the invention ( 2) Means to remove vibration transmitted from the outside to the vibration platform. For the shock absorbing device in the manufacturing equipment of precision machinery, consider from the viewpoint of removing small vibrations, and use it as an elastic body, such as an air spring. Moreover, a plurality of elastic bodies are usually provided. Moreover, by using a plurality of elastic bodies to absorb vibration energy, the effect of removing vibrations can be improved. In addition, when a plurality of elastic bodies are used to construct the shock absorbing device, the vibration states of all the elastic bodies are not necessarily the same. It is also difficult to make all the elastic bodies have the same shock-absorbing performance. For example, when the vibrations acting on the respective elastic bodies are not equal, or the load distribution on the shock-absorbing table is eccentric, only the elasticity of the specific elastic body increases and decreases, which causes the shock-absorbing table to tilt. As a result, a vibration moment is generated in the shock-absorbing object on the shock-absorbing table due to the tilt, and a shaking vibration occurs. Therefore, when using a plurality of elastic bodies, it is necessary to take measures to resolve such shaking vibrations. The first method: increase the weight of the lower part of the seismic isolation platform or widen the width of the equipment itself to relatively reduce the height of the equipment and lower the center of gravity of the seismic isolation objects on the seismic isolation platform. However, this method can only restrain the tilt of the vibration platform to a certain extent caused by shaking vibration, and cannot completely prevent the tilt from occurring. In the second method, a vibration damping device such as a shock absorber arranged side by side with the elastic body is provided between the ground part and the machine to suppress the shaking vibration. However, in this method, if the attenuation coefficient of the attenuation device is low, it is impossible to sufficiently suppress the shaking vibration. Conversely, if the attenuation coefficient is set to a high number 値, r can obtain the effect of suppressing shaking vibration, but it will adversely affect the elastic vibration absorption performance of the elastic body. Therefore, shock absorbing equipment

本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) T (請先閲讀背面之注意事項再填寫本頁) • l_f ϋ t— II訂.！1! ·線丨 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（3 ) • * · 置原本的震動除去效果降低。總而言之，此種方法之衰減 係數的設定是相當微妙的，而很難設定出最佳的衰減係數 經濟部智慧財產局員工消費合作社印製 又， 具備感測 斜時，感 來的測量 傾斜的力 種方法之 關於 設的搖動 從設計階 定原因， 上述對策 放棄要除 另一 動加以隔 內拉起後 以除震裝 Ιί |> 台匕 疋狀I?、。 製造設備 發生碰撞 第3方 器以及 測器檢 値來驅 ，來使 瞬間的 除震裝 震動量 段便開 所以很 ，對於 去做爲 方面， 斷。但 ，從製 置加以 而且， 搖動， 時，矽 發明之揭示 法爲以主動方式來控制搖動震動。此情況 驅動裝置。當由於搖動震動而除震台要傾 測出此震動狀態。根據感測器所檢檢測出 動該驅動裝置，施加使除震台往相反方向 除震台的傾斜角度維持在0度。但是，此 反應性差，其構造複雜。 置的搖動震動，在上述習知對策中，所假 、或是關於反向力矩量的詳細檢討，需要 始進行。又，由於震動的發生存在著不確 難完全預測出搖動震動。因此，即使實施 搖到震動的除去，也有其限度。有時甚至 搖動震動發生原因之上下震動。 在上述矽單結晶的成長過程中，希望將震 是，若考慮將成長完成後的矽單結晶從爐 造設備取出時，在載置製造設備之除震台 彈性支持之狀態下，製造設備會處於不安 當取出矽單結晶時，若彈性支持狀態下的 則矽單結晶有可能會碰撞到製造設備。當 單結晶的商品價値會下降。 閲 讀 背― 面 之 注 項 再 填 寫 本 頁 訂 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 Β7 經濟部智慧財產局員工消費合作社印製· 五、發明說明（4 ) .本發明係考慮上述各問題點而發明出來。本發明的目 的在於提供一種除震裝置，能夠以簡單的構造來餘去難以 預測的搖動震動；又，可以根據需要，使除震裝置失去彈 性支持機能，而可以使除震對象物維持在靜止狀態。 本發明的除震裝置，其特徵爲具備： 變位變換手段，係配置複數個位於上下方向隔開間隔 之除震對象物和地基部分之間，分別固定結合在該除震對 象物以及該地基部分上，而將從該固定結合部分傳達來之 該除震對象物以及該地基部分的上下方向相對變位，變換 成水平方向變位；以及 變位傳達手段，係分別固定結合在該變位變換手段上 ，將這些變位變換手段相互地連結，使上述水平方向變位 在各變位變換手段間相互地傳達。 當震動作用在地基部分和除震對象物之間時，各變位 變換手段，將上下震動分別變換成對應之水平震動後，傳 達至變位傳達手段。變位傳達手段由於將變位變換手段相 互地連結，所以水平震動在變位變換手段相互之間傳達。 換言之，’藉由變位傳達手段所傳達的水平震動輸入（施加 )在各變位變換手段上，此水平震動利用變位變換手段變 換成上下震動。亦即，本發明的除震裝置，將在各變位變 換手段中所發生之會引起搖動震勸之不諧調的上下震動， 變換成水平震動，然後將此水平震動經由變位傳達手段而 在變位變換手段έ間相互傳達。藉由此水平震動之相互傳 達，在全部的變位變換手段中，可以產生相同的上下震動 (請先閲讀背面之注意事項再填寫本頁) • — ϋ iw tt n* 本紙張尺度適用中國國家標準（CNS)A4規格(210 X 297公釐）This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) T (Please read the precautions on the back before filling out this page) • l_f ϋ t— II order.! 1! · Line 丨 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (3) • * · The original vibration removal effect is reduced. All in all, the setting of the attenuation coefficient of this method is quite delicate, and it is difficult to set the optimal attenuation coefficient. It is printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. It also has the force to measure tilt when sensing tilt. The shaking of the device in this method depends on the design order, and the above-mentioned countermeasures are given up by removing another movement and then pulling it up in the compartment to isolate the device. I > The collision occurred in the manufacturing equipment. The third party and the detector inspected to drive, so that the instant vibration isolation device will open the vibration section, so it is very important to do it. However, when the system is shaken and shaken, the disclosure method of the silicon invention is to control the shaking vibration in an active manner. This situation drives the device. When the vibration platform shakes and shakes, the vibration state should be measured. The driving device is detected according to the detection of the sensor, and the tilting angle of the shock absorbing table to the opposite direction is maintained at 0 degrees. However, this is poor in reactivity and its structure is complicated. In the above-mentioned conventional countermeasures, the detailed shaking and vibration of the installed vibration need to be started. In addition, due to the occurrence of vibration, it is difficult to fully predict the shaking vibration. Therefore, there is a limit to the removal of shaking to vibration. Sometimes even shaking occurs due to shaking. During the growth of the silicon single crystal described above, it is hoped that if the silicon single crystal that has been grown is taken out of the furnace manufacturing equipment, the manufacturing equipment will be supported by the elastic support of the vibration isolation table on which the manufacturing equipment is placed When the silicon single crystal is taken out in an uneasy state, if the silicon single crystal is in an elastically supported state, the silicon single crystal may collide with the manufacturing equipment. The commodity price of single crystals will decrease. Read the back-fill in the note on this page, and then fill in this page. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) A7 Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs · 5. Description of the invention (4 ). The present invention was invented in consideration of the above problems. The object of the present invention is to provide a shock absorbing device that can remove unpredictable shaking vibrations with a simple structure; and, according to need, the shock absorbing device can lose its elastic support function and can keep the shock absorbing object stationary status. The shock absorbing device of the present invention is characterized by comprising: a displacement transformation means, which is provided with a plurality of shock absorbing objects located at intervals in the up-down direction and a foundation portion, which are fixedly coupled to the shock absorbing object and the foundation, respectively. Partly, the relative displacements of the seismic isolation object and the foundation part transmitted from the fixed combination part are relatively displaced in the up-down direction and transformed into horizontal displacements; and the means of displacement transmission are fixedly combined in the displacements respectively. In the conversion means, these displacement conversion means are connected to each other so that the above-mentioned horizontal displacements are transmitted to each other. When the vibration acts between the ground part and the shock-removing object, each displacement conversion means converts the upper and lower vibrations into corresponding horizontal vibrations respectively, and then reaches the displacement transmission means. The displacement transmission means connects the displacement conversion means to each other, so the horizontal vibration is transmitted between the displacement conversion means. In other words, the horizontal vibration input (applied) transmitted by the displacement transmission means is applied to each displacement conversion means, and the horizontal vibration is converted into vertical vibration by the displacement conversion means. That is, the shock absorbing device of the present invention converts the up-and-down vibrations that would cause shaking vibrations to occur in each displacement conversion means, and transforms them into horizontal vibrations. The means of displacement change communicate with each other. Through the mutual transmission of this horizontal vibration, the same up-and-down vibration can be generated in all the displacement transformation methods (please read the precautions on the back before filling this page) • — ϋ iw tt n * This paper size applies to China Standard (CNS) A4 size (210 X 297 mm)

· n ^ 1· I ^ ϋ n I ^ ·1 ϋ ϋ ϋ «I ϋ n ϋ ti n n I ^ I ϋ 1« I- I 1« ^ ^ I A7 '_B7_______ 五、發明說明（5 ) (請先闓讀t面之注意事項再填寫本頁> 。如此，全部的變位變換手段，由於產生等量的上下方向 變位，所以可以阻止搖動震動的發生。總而言之，藉由組 合變位變換手段和變位傳達手段，來互相抵銷上下震動的 不諧調，可以阻止搖動震動的發生。特別是藉由將變位變 換手段與地基部分和除震對象物固定地結合，且藉由將變 位變換手段和變位傳達手段固定地結合，由於構造上完全 沒有間隙，所以本發明的除震裝置可以對所輸入的震動瞬 間地反應，可以防止搖動震動的發生。 變位變換手段，係由上下重疊地配置在除震對象物和 地基部分之間的一對板材所構成；這一對板材，其兩端部 分別彎曲規定的角度而沿著該板材之長度方向相互之間大 致成平行，其一方的彎曲端部相互重疊而固定結合在一起 ，且另一方的彎曲端部則分別固定結合在上述除震對象物 以及上述地基部分上。 經濟部智慧財產局員工消費合作社印製. 由於震動而發生上下方向相對變位時，一對板材以固 定結合在地基部分以及除震對象物上的彎曲端部爲基準， 變化其傾斜角度。此傾斜角度的變化，使互相重疊之彎曲 端部發生水平方向變位。此水平方向變位以拉伸力或壓縮 .力的形態傳達至變位變換手段上。而利用此力的傳達，可 以達成將水平震動在變位變換手段之間相互傳達。 板材爲可以彈性恢復的彈簧。 板材可以將上下震動變換成水平震動。又，板材藉由 其彈性作用來吸收要從地基部分傳遞至除震對象物之上下 震動的能源，可以阻止震動傳遞至除震對象物。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ~~~ 經濟部智慧財產局員工消費合作社印製 A7 __^_B7_ ' 五、發明說明（6 ) 變位變換手段之相互重疊的上述彎曲端部、以及連結 上述各彎曲端部之上述變位傳達手段，係藉由接合在這些 構件上的補強構件來加以一體化。 利用補強構件使其一體化，可以提高重疊的彎曲端部 以及變位傳達手段的剛性，以及包含固定連結部分之全體 剛性。藉由此剛性，利用變位變換手段所變換的水平變位 ，不停滯地傳達至變位傳達手段，可以有效率地阻止搖動 震動的發生。 變位傳達手段，係具有對於壓縮力不易發生變形的高 剛性。 可以將由變位變換手段所變換的水平變位不停滯地確 實傳達，來確實埤阻止搖動震動_。 變位傳達手段，爲中空的筒狀構件。 不但重量輕，且可以確保高強度，可以得到優異的變 位傳達性能。 在除震對象物和上述地基部分之間，配置和上述變位 變換手段並排的上下方向彈性支持手段。 上下方向彈性支持手段，吸收要從地基部分傳遞至除 震對象物之上下震動的能源。藉由此上下方向彈性支持手 段，可以抑制上下震動傳遞至除震對象物。 上下方向彈性支持手段爲彈簧》 利用上下方向的彈簧作用，可以除去從地基部分施加 在除震對象物上的士下震動。 在除震對象物和地基部分之間，設置上下震動吸收用 本k張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) (請先《讀5T面之注意事項再填寫本頁)· N ^ 1 · I ^ ϋ n I ^ · 1 ϋ ϋ ϋ «I ϋ n ϋ ti nn I ^ I ϋ 1« I- I 1 «^ ^ I A7 '_B7_______ 5. Description of the invention (5) (please first闿 Read the notes on the t side, and then fill out this page>. In this way, all the displacement transformation means can generate the same amount of vertical displacement, so it can prevent the occurrence of shaking vibration. In short, by combining the displacement transformation means And displacement transmission means to offset the dissonance of up and down vibrations, which can prevent the occurrence of shaking vibrations. In particular, by combining the displacement conversion means with the ground part and the shock-absorbing object fixedly, and by changing the displacement The conversion means and the displacement transmission means are fixedly combined, and because there is no gap in the structure, the shock absorbing device of the present invention can instantly respond to the input vibration and prevent the occurrence of shaking vibration. A pair of plates arranged between the shock-absorbing object and the foundation; the pair of plates are respectively bent at a predetermined angle at both ends and are substantially parallel to each other along the length of the plate. One of the curved ends overlaps each other and is fixedly bonded together, and the other bent end is fixedly bonded to the above-mentioned shock absorbing object and the above-mentioned ground part respectively. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Due to vibration When the relative displacement occurs in the up-down direction, a pair of plates change the inclination angle based on the bent end fixedly bonded to the foundation and the shock-absorbing object. This change in the inclination angle makes the curved ends overlapping each other horizontal. Directional displacement. This horizontal displacement is transmitted to the displacement conversion means in the form of tensile force or compression. The use of this force transmission can achieve the horizontal vibration transmission between the displacement conversion means. It is a spring that can be elastically restored. The plate can convert the up and down vibration into a horizontal vibration. In addition, the plate absorbs the energy to be transmitted from the foundation to the shock-absorbing object by its elastic effect, which can prevent the vibration from being transmitted to the shock. Objects: This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) ~~~ Ministry of Economic Affairs Printed by the Consumer Property Cooperative of the Intellectual Property Bureau A7 __ ^ _ B7_ 'V. Description of the Invention (6) The above-mentioned curved ends overlapping the displacement conversion means and the above-mentioned displacement transmission means connecting the above-mentioned curved ends are made by The reinforcement members joined to these members are integrated. The integration of the reinforcement members can increase the rigidity of the overlapping curved ends and the displacement transmission means, and the overall rigidity including the fixed connection portion. With this rigidity, The horizontal displacement converted by the displacement conversion means is transmitted to the displacement transmission means without stagnation, which can effectively prevent the occurrence of shaking vibration. The displacement transmission means has high rigidity which is not easily deformed by compressive force. Can The horizontal displacement transformed by the displacement transformation means is transmitted without stopping, so as to prevent the shaking vibration. Displacement transmission means is a hollow cylindrical member. Not only is it light in weight, it can also ensure high strength and excellent displacement transmission performance. Between the shock-absorbing object and the above-mentioned ground part, an elastic support means in the up-down direction is arranged side by side with the above-mentioned displacement conversion means. The elastic support means in the up-and-down direction absorbs the energy to be transmitted from the foundation to the vibrations above and below the shock-absorbing object. The elastic support means in the up-down direction can suppress the transmission of the up-down vibration to the shock-absorbing object. The elastic support means in the up-and-down direction is a spring. "The spring action in the up-and-down direction can remove the vibration of taxis from the foundation to the shock-absorbing object. Set the k scales for the absorption of up-and-down vibration between the shock-absorbing object and the ground part. Applicable to China National Standard (CNS) A4 (210 X 297 mm) (please read the precautions for 5T surface before filling this page) )

A7 — . _B7_ _ 五、發明說明（7 ) 的減振器。 除了藉由上下方向彈性支持手段來吸收震動以外，可 以藉由減振器來使上下震動衰減。 在除震對象物和地基部分之間，配置和上述變位變換 手段呈直線排列的水平方向除震手段。 水平方向除震手段，吸收要從地基部分傳遞至除震對 象物之水平震動的能源。藉由此水平方向除震手段，可以 抑制水平震動傳遞至除震對象物。 水平方向除震手段的除震對象物側端部，相互連結成 一體。 水平方向除震手段之除震對象物側端部的動作，係利 用一體地連結之其他水平方向除震手段的端部來限制。藉 由此連結，各水平方向除震手段獨自地傾斜，可以防止除 震對象物局部地下沉。又，當從除震對象物側對水平方向 除震手段施加偏心負荷時，可以防止除震對象物發生傾斜 〇 水平方向除震手段的除震對象物側端部’係藉由剛性 構件相互地連結在一起。 水平方向除震手段之除震對象物側端部的動作’係利 用剛性構件來連結在一起之其他水平方向除震手段的端部 來限制。藉由此連結，各水平方向除震手段獨自地傾斜， 可以防止除震對象物局部地下沉。又，當從除震對象物側 對水平方向除震手段施加偏心負荷時’可以防止除震對象 物發生傾斜。 本紙張尺度適用中國國家標準（CNS〉A4規格（210 X 297公爱Ίί _-|〇 . (請先M讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製A7 —. _B7_ _ 5. The shock absorber of invention description (7). In addition to absorbing vibrations by means of elastic support in the up and down direction, damping can be used to attenuate the up and down vibrations. Between the shock-absorbing object and the ground part, horizontal shock-absorbing means arranged in a straight line with the above-mentioned displacement conversion means are arranged. The horizontal shock absorption means absorbs the horizontal vibration energy to be transmitted from the ground part to the shock-absorbing object. With this horizontal vibration isolation method, it is possible to suppress the transmission of horizontal vibration to the object to be isolated. The end portions on the object side of the shock absorbing means in the horizontal direction are connected to each other as a whole. The movement of the end portion of the shock absorbing object on the horizontal shock absorbing means is restricted by the ends of the other horizontal shock absorbing means that are integrally connected. With this connection, each of the horizontal vibration isolation means is tilted independently, and it is possible to prevent the localization of the vibration isolation object. In addition, when an eccentric load is applied to the horizontal shock absorbing means from the side of the shock absorbing object, it is possible to prevent the shock absorbing object from tilting. The ends of the shock absorbing side of the horizontal shock absorbing means are mutually connected by rigid members Linked together. The action of the horizontal side shock absorbing means on the object-side end portion is restricted by the ends of the other horizontal direction shock absorbing means connected by a rigid member. With this connection, each of the horizontal shock absorbing means is tilted independently, and it is possible to prevent the shock absorbing object from sinking locally. In addition, when an eccentric load is applied to the horizontal shock absorbing means from the side of the shock absorbing object, it is possible to prevent the shock absorbing object from tilting. This paper size applies to Chinese national standards (CNS> A4 specifications (210 X 297 public love Ί _- | 〇. (Please read the precautions on the back before filling out this page)) Printed by the Employees ’Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs

_______It· — — ———-----.——I_______ It · — — ———-----.—— I

-1 n i I A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（8 ) 水平方向除震手段爲疊層橡膠。 藉由疊層橡膠所產生之水平方向的彈簧作用，可以除 去從地基部分施加在除震對象物上的水平震動。 在除震對象物和地基部分之間，設置水平震動吸收用 的減振器。 除了藉由水平方向除震手段來吸收震動以外，可以藉 由減振器來衰減水平震動。 具備：設置在除震對象物和地基部分之間，當水平方 向除震手段往水平方向變形時，可以滑動自如地支承在該 地基部分上的支承手段。 當由於施加大幅度的震動，而水平方向除震手段往水 平方向大幅地變形時，支承手段支承在地基部分上。藉由 此支承，可以阻止水平方向除震手段過度地下沉。 支承手段在支承狀態下，相對於地基部分滑動自如。 而藉由滑動時的接觸摩擦所產生的衰減力，可以使震動衰 減。 在除震對象物和地基部分之間，設置使該除震對象物 固定自如地在該地基部分上的固定手段。 藉由固定手段，可以將除震對象物固定在地基部分上 而使除震對象物成爲靜止狀態。另一方面，若解除固定手 段所產生的固定狀態，除震裝置的彈性支持機能恢復，可 以有效地隔斷從地基部分傳遞至除震對象物的震動。 又，本發明的除震裝置，係針對將除震對象物彈性支 持在地基部分上的除震裝置，其特徵爲： (請先閱讀賞面之注§項再填寫本頁>-1 n i I A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (8) Horizontal vibration isolation means is laminated rubber. The horizontal spring action produced by the laminated rubber can remove the horizontal vibration applied to the shock-absorbing object from the foundation portion. A shock absorber for horizontal vibration absorption is installed between the shock-absorbing object and the foundation. In addition to absorbing vibration by means of horizontal shock absorption, you can attenuate horizontal vibration by means of a shock absorber. It is equipped with support means that can be slidably supported on the foundation part when the seismic isolation means in the horizontal direction is deformed in the horizontal direction between the shock-absorbing object and the foundation part. When a large-scale vibration is applied, the horizontal vibration isolation means is largely deformed in the horizontal direction, and the support means is supported on the foundation portion. With this support, it is possible to prevent the horizontal seismic isolation means from sinking excessively. The support means can slide freely with respect to the foundation part in the support state. The damping force generated by contact friction during sliding can reduce the vibration. Between the shock absorbing object and the foundation portion, a fixing means is provided for fixing the shock absorbing object on the foundation portion freely. With the fixing means, the shock absorbing object can be fixed on the ground part, and the shock absorbing object can be brought into a stationary state. On the other hand, if the fixed state generated by the fixed means is released, the elastic support function of the shock absorbing device is restored, and the vibration transmitted from the foundation portion to the shock absorbing object can be effectively blocked. In addition, the shock absorbing device of the present invention is directed to a shock absorbing device that elastically supports a shock absorbing object on a ground portion, and is characterized by: (Please read the note § of the reward first and then fill out this page>

: -^- -ϋ H 1 1· n I * 1 t «I n ί ί ϋ I 1 1 -I n n 1· I» n n n I» n ϋ 1 ϋ ϋ n I I I 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 ___^_B7______ 五、發明說明（9 ) 在上述除震對象物和上述地基部分之間，設置將該除 震對象物固定自如地在該地基部分上的固定手段。 c請先閱讀r面之注意事項再填寫本頁) 藉由固定手段，可以將除震對象物固定在地基部分上 。亦即，可以使除震裝置之彈性支持除震對象物的彈性支 持機能喪失，而將除震對象物維持在靜止狀態。 另一方面，若解除固定手段所所產生的固定狀態，除 震對象物藉由除震裝置所具有之原本的彈性支持機能而被 彈性支持。藉由此彈性支持，可以有效地隔斷從地基部分 傳遞至除震對象物的震動，防止除震對象物發生震動。 此除震裝置具備= 變位變換手段，係配置複數個位於上述除震對象物和 上述地基部分之間，分別固定結合在該除震對象物以及該 地基部分上，而將從該固定結合部分傳達來之該除震對象 物以及該地基部分的上下方向相對變位，變換成水平方向 變位； 經濟部智慧財產局員工消費合作社印製 變位傳達手段，係分別固定結合在該變位變換手段上 ，將這些變位變換手段相互地連結，使上述水平方向變位 在各變位變換手段間相互地傳達； 上下方向彈性支持手段，係位於上述除震對象物和上 述地基部分之間，配置成和上述變位變換手段並排；以及 水平方向除震手段，係位於上述除震對象物和上述地 基部分之間，配置成和上述變位變換手段直線排列，而將 各個自由端部相互連結。 在此除震裝置中，藉由上下方向彈性支持手段，吸收 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -12- A7 B7 五、發明說明（10 ) 要從地基部分傳遞至除震對象物之上下震動的能源。藉由 此吸收作用，可以抑制上下震動傳遞至除震對象物。 又，藉由水平方向除震手段，吸收要從地基部分傳遞 至除震對象物之水平震動的能源，可以抑制水平震動傳遞 至除震對象物。 特別是分別固定地結合在地基部分和除震對象物上的 變位變換手段·、以及連結變位變換手段的變位傳達手段，. 將搖動震動所產生之不諧調的上下震動。在變位變換手段 相互之間，相互地傳遞。藉由此傳遞作用，在全部的變位 變換手段中的上下震動，可以均勻化。亦即，由於全部的 變位變換手段產生等量的上下方向變位，所以可以阻止搖 動震動的發生。 進而，水平方向除震手段之自由.端部的動作，係利用 一體地連結之其他水平方向除震手段的自由端部來限制。 藉由此連結，各水平方向除震手段獨自地傾斜，可以防止 除震對象物局部地下沉。又，當從除震對象物側對水平方 向除震手段施加偏心負荷時，可以防止除震對象物發生傾 斜。 地基部分的頂面，係由將水平調整用之不收縮泥漿 (non-shrink mortar)施工成規定厚度所形成。 由於將地基部分的頂面，以保持高精度之水平度的狀 態下形成，所以可以保證設置在其上之除震裝置的適當動 作。 上下方向彈性支持手段，爲膨脹和收縮自如的空氣彈 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公* ) 閲 讀 背― 面 之 注 意 事 項 再 填 % 本 頁 訂 經濟部智慧財產局員工消費合作社印製 13- A7 B7 五、發明說明（n ) 簧。 {請先M讀t-面之注意事項再填寫本頁) 空氣彈簧利用往上下方向的彈簧作用，可以除去從地 基部分施加在除震對象物上的上下震動。 空氣彈簧與氣箱連接，由氣箱供給空氣或排出空氣， 來使空氣彈簧膨脹或.收縮。 固定手段係藉由從與氣箱連接之空氣彈簧排出空氣， 使空億彈簧收縮，而支承在地基部分上。藉由此支承，可 以固定除震對象物。 在除震對象物和地基部分之間，設置使該除震對象物 升降的千斤頂。 藉由千斤頂的收縮動作，可以使固定手段接觸在地基 部分上。 在固定手段之面向地基部分的端部上，安裝摩擦材’ 且在地基部分之對應固定手段的安裝位置處，設置滑板； 而在摩擦材和滑板之間設有間隙。 經濟部智慧財產局員工消費合作社印製 固定手段之摩擦材和地基部分之滑板接觸，而藉由麼 擦材和滑板之間的接觸摩擦，可以使除震對象物安定地靜 止於地基部分上。 在固定手段上，設置用來調整間隙的間隙調整手段。 可以微調整固定手段和地基部分之間的間隙，保證除 • ϋ at 1· n i-i · 震裝置之適當的動作。 在除震對象物和地基部分之間，設置上下震動吸收用 的減振器。 除了藉由上下方向彈性支持手段來吸收震動以外，可 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 A7 _B7_____ 五、發明說明（12 ) 以藉由減振器來使上下震動衰減。 水平方向除震手段爲疊層橡膠。 利用疊層橡膠之水平方向的彈簧作用，可以除去從地 基部分施加在除震對象物上的水平震動。 ’ 在除震對象物和地基部分之間，設置水平震動吸收用 的減振器。 除了藉由水平方向除震手段來吸收震動以外，可以藉 由減振器來使水平震動衰減。 具備：設置在除震對象物和地基部分之間，當水平方 向除震手段往水平方向變形時，可以滑動自如地支承在該 地基部分上的支承手段。 當由於施加大幅度的震動，.而水平方向除震手段往水 平方向大幅地變形時，支承手段支承在地基部分上。藉由 此支承，可以阻止水平方向除震手段過度地下沉。 支承手段在支承狀態下，相對於地基部分滑動自如。 而藉由滑動時的接觸摩擦所產生的衰減力，可以使震動衰 減。 在支承手段之面向地基部分的端部上，安裝摩擦材， 且在地基部分之對應支持手段的安裝位置處，設置滑板； 而在摩擦材和滑板之間設有間隙。 在支承手段支承在地基部分上的狀態下，若滑板和滑 勳材互相滑動，則藉由接觸摩擦而產生衰減力，可以使震 動衰減。 ' 在支承手段上，設置用來調整間隙的間隙調整手段。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) :15^ (請先閱讀贪面之注专苯項再填寫本頁>:-^--ϋ H 1 1 · n I * 1 t «I n ί ϋ I 1 1 -I nn 1 · I» nnn I »n ϋ 1 ϋ ϋ n III This paper size applies to Chinese national standards (CNS ) A4 size (210 X 297 mm) A7 ___ ^ _ B7______ 5. Description of the invention (9) Between the above-mentioned shock-absorbing object and the above-mentioned foundation part, a device for fixing the shock-absorbing object on the foundation part freely is provided. Fixed means. c Please read the precautions on the r side before filling in this page.) By means of fixing, you can fix the shock-absorbing object on the foundation. In other words, the elastic support function of the shock-absorbing device to support the shock-absorbing object can be lost, and the shock-absorbing object can be maintained in a stationary state. On the other hand, if the fixed state produced by the fixing means is released, the shock-absorbing object is elastically supported by the original elastic support function of the shock-absorbing device. With this elastic support, it is possible to effectively block the vibration transmitted from the foundation to the shock-absorbing object and prevent the shock-absorbing object from vibrating. This shock absorbing device is provided with a means of displacement transformation, and a plurality of shock absorbing objects and the ground part are arranged, and are fixedly coupled to the shock absorbing object and the ground part, respectively, and the fixed joint part The transmitted relative displacements of the seismic isolation object and the foundation are shifted in the horizontal direction; the displacement transmission methods printed by the employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs are fixedly combined with the displacement transformation. In terms of means, these displacement transformation means are connected to each other so that the horizontal displacements are mutually transmitted between the displacement transformation means; the elastic support means in the up and down direction is located between the seismic isolation object and the foundation portion, It is arranged side by side with the above-mentioned displacement conversion means; and the horizontal direction shock absorption means is located between the above-mentioned shock-absorbing object and the ground part, and is arranged in a straight line with the above-mentioned displacement conversion means, and each free end is connected to each other . In this shock absorbing device, by means of elastic support in the up and down direction, the paper size is applied to the Chinese National Standard (CNS) A4 (210 X 297 mm) -12- A7 B7 V. Description of the invention (10) Part of the energy is transmitted to the vibration object above and below. This absorption can suppress the transmission of up and down vibrations to the object to be isolated. In addition, the horizontal direction vibration absorbing means absorbs the horizontal vibration energy to be transmitted from the ground portion to the shock absorbing object, and can suppress the transmission of the horizontal vibration to the shock absorbing object. In particular, the displacement conversion means, which are fixedly combined with the ground part and the shock-removing object, and the displacement transmission means connecting the displacement conversion means, are used to shake the up-and-down vibration generated by shaking vibration. The transformation means are transmitted to each other. By this transmission effect, the up-and-down vibration in all the displacement conversion means can be made uniform. That is, since all the displacement conversion means generate the same amount of displacement in the vertical direction, the occurrence of shaking vibration can be prevented. Furthermore, the freedom of the horizontal shock absorbing means. The movement of the end is restricted by the free ends of the other horizontal shock absorbing means integrally connected. With this connection, each of the horizontal vibration isolation means is tilted independently, and it is possible to prevent the seismic isolation object from sinking locally. In addition, when an eccentric load is applied to the horizontally-oriented shock-absorbing means from the side of the shock-absorbing object, it is possible to prevent the shock-absorbing object from tilting. The top surface of the foundation part is formed by applying a non-shrink mortar for leveling to a predetermined thickness. Since the top surface of the foundation portion is formed in a state of maintaining a high level of accuracy, proper operation of the shock absorbing device provided thereon can be ensured. The elastic support means in the up and down direction, for the air bomb that expands and contracts freely. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm *). Read the back-fill in the precautions on this page. 13- A7 B7 printed by the Bureau's Consumer Cooperatives V. Invention Description (n) Spring. {Please read the precautions on t-plane before filling in this page.) The air spring uses the spring action in the up-and-down direction to remove the up-and-down vibration applied to the shock-absorbing object from the ground. The air spring is connected to the air box, and the air box supplies or discharges air to expand or contract the air spring. The fixing means is to support the foundation part by exhausting air from an air spring connected to the air box, so that the air spring is contracted. With this support, the shock-absorbing object can be fixed. A jack is provided between the shock absorbing object and the foundation to raise and lower the shock absorbing object. With the shrinking action of the jack, the fixing means can be brought into contact with the foundation. On the end of the fixing means facing the foundation, a friction material is installed, and at the installation position of the corresponding fixing means of the foundation, a sliding plate is provided; and a gap is provided between the friction material and the sliding plate. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the friction material of the fixed means and the sliding plate of the foundation part, and the contact friction between the friction material and the sliding plate can make the shock-absorbing object stably rest on the foundation part. On the fixing means, a gap adjusting means for adjusting the gap is provided. The gap between the fixing means and the foundation part can be fine-adjusted to ensure the proper action of the 除 at 1 · n i-i · vibration device. A shock absorber is installed between the shock-absorbing object and the foundation to absorb vertical vibration. In addition to absorbing vibration by means of elastic support in the up and down direction, this paper size can be applied to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 12) To attenuate the up and down vibrations with a shock absorber. The horizontal vibration isolation means is laminated rubber. The horizontal spring action of the laminated rubber can remove the horizontal vibration applied to the shock-absorbing object from the foundation portion. ’Between the object to be isolated and the foundation, a shock absorber for horizontal vibration absorption is installed. In addition to absorbing vibration by means of horizontal shock absorption, horizontal vibration can be attenuated by a shock absorber. It is equipped with support means that can be slidably supported on the foundation part when the seismic isolation means in the horizontal direction is deformed in the horizontal direction between the shock-absorbing object and the foundation part. When a large-scale vibration is applied and the horizontal shock-absorbing means is largely deformed in the horizontal direction, the supporting means is supported on the foundation portion. With this support, it is possible to prevent the horizontal seismic isolation means from sinking excessively. The support means can slide freely with respect to the foundation part in the support state. The damping force generated by contact friction during sliding can reduce the vibration. A friction material is installed on the end of the supporting means facing the foundation, and a sliding plate is provided at the installation position of the corresponding supporting means of the foundation; a gap is provided between the friction material and the sliding plate. In the state where the supporting means is supported on the foundation portion, if the sliding plate and the sliding material slide against each other, a damping force is generated by contact friction, and the vibration can be damped. 'On the supporting means, a gap adjusting means for adjusting the gap is provided. This paper size applies to Chinese National Standard (CNS) A4 specification (210 X 297 mm): 15 ^ (Please read the note on benzene first and then fill out this page >

A7 經濟部智慧財產局員工消費合作社印製 ____B7__. . .五、發明說明（13 ) 可以微調整支承手段和地基部分之間的間隙，保證除 震裝置之適當的動作。 【本發明之實施形態】 本發明之第一實施形態的構造 以下，參照圖面來說明本發明之除震裝置的第一實施 形態。在第1〜4圖中，圖號101係表示關於本發明之 第一'實施形態之除震裝置的全體構成。此除震裝置1 0 1 ，具有使用連結構件4來連結彈性支持部2、3的構造。 彈性支持部2的構造爲：將鋼製的板彈簧構件5、6的長 度方向的兩端部，以一定的角度彎曲成平行，其中一方的 彎曲端部5 a、6 a係互相重疊在一起。同樣地，彈性支 持部3的構造爲：將鋼製的板彈簧構件7、8的長度方向 的兩端部，以一定的角度彎曲成平行，其中一方的彎曲端 部7a、8 a係互相重疊在一起。又，連結構件4爲中空 狀的角柱構件，分別在其長度方向的兩端上，安裝金屬板 9、1 0。做爲連結構件4，根據後述的理由，係使用相 對於壓縮力不會發生屈曲，而具有充分的剛性之構件， 金屬板9係被夾在板彈簧構件5、6之一方的端部 5a、6a之間。同樣的，金屬板10係被夾在板彈簧構 件7、8之一方的端部7a、8a之間。彎曲端部5a、 6 a和金屬板9係使用螺栓加以固定結合在一起。彎曲端 部7a、8 a和金屬板10，也使用螺栓加以固定結合在 —起。藉由此結合，彈性支持部2、3利用連結構件4而 張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) ~16 _ (請先閲讀t-面之注意事項再填寫本頁)A7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs ____B7__.. V. Description of the invention (13) The gap between the support means and the foundation can be finely adjusted to ensure the proper operation of the shock absorbing device. [Embodiment of the present invention] Structure of the first embodiment of the present invention Hereinafter, a first embodiment of the shock absorbing device of the present invention will be described with reference to the drawings. In Figs. 1 to 4, reference numeral 101 indicates the overall configuration of a vibration isolator according to a first embodiment of the present invention. This shock absorbing device 1 0 1 has a structure in which elastic supporting portions 2 and 3 are connected using a connecting member 4. The structure of the elastic support portion 2 is such that both end portions in the longitudinal direction of the steel leaf spring members 5 and 6 are bent in parallel at a certain angle, and one of the bent end portions 5 a and 6 a overlaps each other. . Similarly, the elastic support portion 3 is structured such that both end portions in the longitudinal direction of the steel leaf spring members 7 and 8 are bent in parallel at a certain angle, and one of the bent end portions 7a and 8a overlaps each other. Together. The connecting member 4 is a hollow corner pillar member, and metal plates 9, 10 are attached to both ends in the longitudinal direction. As the connecting member 4, a member having sufficient rigidity without buckling against compressive force is used for reasons described later, and the metal plate 9 is sandwiched between the end portions 5a of one of the plate spring members 5 and 6, 6a. Similarly, the metal plate 10 is sandwiched between one of the end portions 7a, 8a of the plate spring members 7, 8. The curved end portions 5a, 6a and the metal plate 9 are fixedly joined together using bolts. The curved end portions 7a, 8a and the metal plate 10 are also fixed together using bolts. With this combination, the elastic support sections 2 and 3 use the connecting member 4 and the scale is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ~ 16 _ (Please read the precautions on t-plane before filling out this page)

A7 Β7 經濟部智慧財產局員工消費合作社印製 五、發明說明（14 ) 被連結在一起。配置成橫跨在彎曲端部5 a、6 a和連結 構件4的兩側面上的板構件1 1、1 2 ’藉由焊接等方式 固定結合在上述構件的兩側面上。同樣的’配置成橫跨在 彎曲端部7 a、8 a和連結構件4的兩側面上的板構件 1 1、1 2,藉由焊接等方式固定結合在上述構件的兩側 面上。此耩造如第3圓和第4圖所示。根據此構造’可以 提高壓實部分和連結構件4的剛性。彈簧1 3被配置在彎 曲端部5b、6b之間；又’在彎曲端部7b、8b之間 ，也配置有彈簧1 4。彈簧1 3、1 4抑制上下震動的傳 播。做爲彈簧1 3、1 4，希望使用也可以吸收微小震動 的空氣彈簧（air spring)。 將除震裝置10 1之彈性支持部2、3之另一方的彎 曲端部5b、7b，藉由螺栓等，固定結.合在台座支持部 1 5的底部。同樣的，將彈性支持部2、3之另一方的彎 曲端部6 b、8 b ’藉由螺栓等，固定結合在基板1 6上 。將除震台1 9載置於台座支持部1 5上，而將除震對象 物20載置於除震台19上。 在固定結合有彎曲端部6 b、8 b之基板.1 6的下部 ，分別配置用來除去震動的除震橡膠17、1 8。除震橡 膠1 7、1 8係設計成用來抑制傳播至除震裝置1 〇 1的 水平震動。除震橡膠1 7、1 8的一端，被固定結合在基 板1 6上，另一端則固定結合在地基上。根據此構造，除 震裝置101被固定在地基21上。 如第5圖所示’除震裝置1 0 1，沿·著除震台1 9的 I 丨！丨 III _ I !· <請先閲讀背面之注意事項再填寫本頁) ·1 amt te ϋ < 訂 -----：. 線丨m. 本紙張尺度適用中國國家標準（CNS>A4規格（210 X 297公釐〉 -17- A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（15 ) . 1' . 周邊’配置有由Η型鋼所構成的台座支持部1 5。台座支 持部1 5係被配置成「井」狀θ除震台1 9被配置在台座 支持部1 5上，而藉由螺栓或焊接等手段，固定地結合在 台座支持部1 5上。各台座支持部1 5的兩端，從除震台 1 9之側面突出。在台座支持部1 5之各突出部分的底面 上’分別固定結合著除震裝置10 1之彎曲端部5 a、 7 a。藉由此構造，除震裝置1 〇 1被安裝在沿著除震台 1 9周邊之位置處。而根據此配置形態，除震裝置1 〇 1 可以發揮出除震效果以及防止搖動震動的效果。 • 在本實施形態中，台座支持部15和除震台19，介 於除震裝置101和除震對象物20之間。但是，也可以 省略台座支持部1 5或除震台1 9，或者是直接將除震對 象物20固定結合在除震裝置101上。 又，在本實施形態中，係藉由將金屬板9夾在彎曲端 部5a、6a之間，又將金屬板10夾在彎曲端部7a、 8 a之間的構造，利用連結構件4將彈性支持部2、3相 互地連結在一起。但是，本發明並不限於此構造，也可以 沒有板狀的突出部分之角柱形狀的連結構件。亦即，也可 以將角柱形狀之連結構件的兩端，直接夾在彎曲端部5 a 、6 a之間以及彎曲端部7 a、8 a之間來加以接合在一 起。 本發明之第二實施形態的構造 第6圖係表示關於本發明之第二實施形態的除震裝置 <靖先閲讀t-面之注意事項再填寫本頁) 訂· --線 ml 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 A7 ---；_____B7_______ 五、發明說明（16 ) 2 〇 1。在上述第一實施形態的除震裝置1 〇 1中，除震 橡膠1 7、1 8在其地基2 1側爲固定端部，而在其基板 1 6側則爲自由端部。在該構造中，各除震橡膠1 7、 1 8獨立地變形，除震對象物有可能局部地下沉，當偏心 負荷施加在除震對象物上時，除震台1 9有可能會傾斜。 第二實施形態考慮此點，藉由高剛性的樑構件3 4，將除 震橡膠1 7、1 8的自由端部上的基板1 6，相互地連結 在一起。 第二實施型態的除震裝置2 0 1，當然能發揮出與第 一實施形態之除震裝置1〇1相同的水平以及上下方向的 除震效果、以及防止搖動震動的效果。進而，如第6圖所 示’藉由基板1 6的相互連結，可以使除震橡膠1 7、 1 8之自由端部的動作互相地限制，防止各除震橡膠1 7 、1 8獨自地變形。根據此構造，即使除震對象物局部的 下沉、或是偏心負荷施加在除震對象物上時，也可以確實 地防止除震台19發生傾斜。 在圖所示的例子中，係藉由樑構件3 4，將除震橡膠 17、18之自由端部的基板16連結在一起。但是，也 可以不使用樑構件3 4，而使基板1 6本身延長，將基板 1 6相互地連結在一起。又，也可以藉由其他構造體來連 結基板1 6。連結兩邊的基板1 6之構造，當然充分的具 備限制除震橡膠1 7、1 8之動作的剛性。 第一和第二賣施形態，雖然是以機密機械之製造設備 的情況爲例來進行說明，但是本發明不限於此種例子，也 本紙張尺度適用中國國家標準（CNS〉A4規格（210 X 297公釐） -19- A7 B7 五、發明說明（17 ) 可以應用於建築物上。 本發明之第三實施形態的構造 若根據本發明之第一和第二實施形態的除震裝置 1 0 1、2 0 1，適合用於抑制由於微震動所產生之除震 對象物2 0的水平震動、上下震動以及搖動震動。而且， 例如爲了除去地震般的劇烈水平震動或上下震動，也可以 在上述除震裝置1 0 1、2 0 1上，更進一步地具備下述 的構造。 本發明之第三實施形態之除震裝置3 0 1的基本構造 ，相對於上述除震裝置2 0 1 ，在除震對象物2 0和地基 部分2 1之間，具備支承手段32。此支承手段32，當 水平方向除震手段1 7、1 8超過規定量地往水平方向變 形時，平順且滑動自如地支承在地基部分2 1上。進而， 也具有用來吸收上下震動之黏性減振器42。又，在本實 施形態中，係採用空氣彈簧4 3、4 4 (air spring)做爲彈簧 ，進而取代基板1 6而採用氣箱（air tank) 4 6。 如第7圖所示，除震裝置3 0 1係被設置在做爲地基 部分的地基2 1上。除震裝置3 0 1的平面形狀如第8圖 所示，全體呈矩形。在此矩形的各>邊上，如第7圖所示， 分別配置做爲變位變換手段的彈性支持部2、3 ;做爲變 位傳遞手段的連結構件4;做爲上下方向彈性支持手段的 空氣彈簧4 3、44 ;做爲水平方向除震手段的除震橡膠 17、18 ;以及支承手段3 2。地基2 1係由將水平調 本紙張尺度適用中國國豕標準（CNS)A4規格（210 x 297公釐）.20 - (請先閱讀貧面之注意事項再填寫本頁)A7 Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. The invention description (14) is linked together. The plate members 1 1, 1 2 ′, which are arranged so as to straddle both side surfaces of the curved end portions 5 a and 6 a and the connecting member 4, are fixedly joined to both side surfaces of the members by welding or the like. Similarly, the plate members 1 1 and 1 2 which are arranged on both sides of the curved end portions 7 a and 8 a and the connecting member 4 are fixedly joined to the both sides of the member by welding or the like. This fabrication is shown in Figure 3 and Figure 4. According to this structure ', the rigidity of the compacted portion and the connecting member 4 can be increased. The springs 13 are disposed between the curved end portions 5b and 6b; and the springs 14 are also disposed between the curved end portions 7b and 8b. The springs 1 3, 1 4 suppress the transmission of up and down vibrations. As the springs 1, 3, and 4, it is desirable to use an air spring that can also absorb small vibrations. The other bent end portions 5b and 7b of the elastic support portions 2 and 3 of the shock absorbing device 101 are fixed to each other with bolts and the like, and are joined to the bottom of the pedestal support portion 15. Similarly, the other curved end portions 6 b, 8 b ′ of the elastic supporting portions 2 and 3 are fixed to the base plate 16 by bolts or the like. The seismic isolation table 19 is placed on the pedestal support portion 15 and the seismic isolation object 20 is placed on the seismic isolation table 19. On the lower part of the base plate 16.6 to which the curved end portions 6b and 8b are fixedly coupled, shock-absorbing rubbers 17, 18 for removing vibrations are respectively disposed. The shock-absorbing rubber 17 and 18 series are designed to suppress horizontal vibration transmitted to the shock-absorbing device 101. One end of the shock-absorbing rubbers 17 and 18 is fixedly bonded to the base plate 16 and the other end is fixedly bonded to the foundation. According to this configuration, the shock absorbing device 101 is fixed to the foundation 21. As shown in FIG. 5 ', the shock-absorbing device 1 0 1 follows I of the shock-absorbing table 1 9!丨 III _ I! · ≪ Please read the notes on the back before filling in this page) · 1 amt te ϋ < Order ----- :. Line 丨 m. This paper standard is applicable to Chinese national standard (CNS > A4 Specifications (210 X 297 mm) -17- A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (15). 1 '. The periphery' is equipped with a pedestal support section 15 made of Η steel. The pedestal support portion 15 is arranged in a "well" shape θ vibration isolation table 19 on the pedestal support portion 15 and fixedly coupled to the pedestal support portion 15 by means such as bolts or welding. Each Both ends of the pedestal support portion 15 protrude from the side of the shock absorbing table 19. On the bottom surface of each protruding portion of the pedestal support portion 15, the curved end portions 5 a, 7 of the shock absorbing device 10 1 are fixedly combined, respectively. a. With this structure, the shock-absorbing device 1 〇1 is installed at a position along the periphery of the shock-absorbing table 19. According to this configuration, the shock-absorbing device 1 〇1 can exert a shock-absorbing effect and prevent shaking vibration • In this embodiment, the pedestal support portion 15 and the vibration isolation table 19 are interposed between the vibration isolation device 101 and Between the seismic objects 20. However, the pedestal support portion 15 or the seismic isolation platform 19 may be omitted, or the seismic isolation object 20 may be directly fixedly coupled to the seismic isolation device 101. In this embodiment, With the structure in which the metal plate 9 is sandwiched between the curved end portions 5 a and 6 a and the metal plate 10 is sandwiched between the curved end portions 7 a and 8 a, the elastic supporting portions 2 and 3 are mutually connected by the connecting member 4. They are connected together. However, the present invention is not limited to this structure, and there may not be a corner pillar-shaped connecting member having a plate-like protruding portion. That is, both ends of the corner pillar-shaped connecting member may be directly clamped at the curved end portion. 5 a and 6 a and the curved ends 7 a and 8 a are joined together. Structure of a second embodiment of the present invention FIG. 6 shows a shock absorbing device according to a second embodiment of the present invention < Jing first read the t-face precautions before filling out this page) Order · --line ml This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs System A7 ---; _____B7_______ V. Description of the invention 16) 2 0. In the shock absorbing device 1 0 of the first embodiment described above, the shock absorbing rubbers 17 and 18 are fixed end portions on the foundation 2 1 side and free on the substrate 16 side. In this structure, each of the shock-absorbing rubbers 17 and 18 is deformed independently, and the shock-absorbing object may sink locally, and when an eccentric load is applied to the shock-absorbing object, the shock-absorbing table 19 is possible. The second embodiment takes this into consideration, and the substrates 16 on the free ends of the shock-absorbing rubbers 17 and 18 are connected to each other by the highly rigid beam members 34. The shock absorbing device 201 of the second embodiment can of course exert the same level of shock absorption effect as the shock absorbing device 101 of the first embodiment and the up-down direction and the effect of preventing shaking vibration. Further, as shown in FIG. 6, by the mutual connection of the substrates 16, the movements of the free ends of the shock-absorbing rubbers 17 and 18 can be restricted to each other, and the respective shock-absorbing rubbers 17 and 18 can be prevented from being independent. Deformation. According to this structure, even when the shock-absorbing object is partially sunk or an eccentric load is applied to the shock-absorbing object, it is possible to reliably prevent the shock-absorbing table 19 from tilting. In the example shown in the figure, the base plates 16 at the free ends of the shock-absorbing rubbers 17 and 18 are connected by the beam members 34. However, instead of using the beam member 34, the substrate 16 itself may be extended to connect the substrates 16 to each other. The substrate 16 may be connected by another structure. The structure of the substrates 16 connecting the two sides is naturally sufficiently rigid to limit the movement of the shock-absorbing rubbers 17 and 18. Although the first and second selling forms are described by taking the case of manufacturing equipment of confidential machinery as an example, the present invention is not limited to such an example, and this paper size applies the Chinese national standard (CNS> A4 specification (210 X 297 mm) -19- A7 B7 V. Description of the invention (17) can be applied to buildings. The structure of the third embodiment of the present invention is if the shock absorbing device according to the first and second embodiments of the present invention 10 1, 2 0 1 is suitable for suppressing the horizontal vibration, vertical vibration, and shaking vibration of the shock-removing object 20 caused by micro-vibration. In addition, for example, in order to remove violent horizontal vibration or vertical vibration like an earthquake, The above-mentioned shock-absorbing devices 1 0 1 and 201 further include the following structures. The basic structure of the shock-absorbing device 3 0 1 according to the third embodiment of the present invention is compared with the above-mentioned shock-absorbing device 2 0 1, Between the shock absorbing object 20 and the ground part 21, there is a supporting means 32. This supporting means 32 smoothes and slides smoothly when the horizontal shock absorbing means 17 and 18 are deformed in a horizontal direction beyond a predetermined amount. Ground It bears on the foundation part 21. It also has a viscous vibration damper 42 for absorbing up and down vibrations. In this embodiment, air springs 4 and 4 4 are used as springs. An air tank 4 6 is used instead of the base plate 16. As shown in Fig. 7, the shock absorber 3 0 1 is installed on the foundation 2 1 as the foundation part. The shock absorber 3 0 1 The planar shape is as shown in Fig. 8 and is generally rectangular. On each side of the rectangle, as shown in Fig. 7, elastic support portions 2 and 3 serving as displacement conversion means are respectively arranged; The connecting member 4 of the transmission means; the air springs 4 and 44 as elastic support means in the up-and-down direction; the shock-absorbing rubbers 17 and 18 as the horizontal direction shock-absorbing means; and the support means 3 2. The foundation 2 1 is made by the horizontal The paper size for this adjustment applies to China National Standard (CNS) A4 (210 x 297 mm). 20-(Please read the precautions for the poor side before filling out this page)

-卜^_4 ·!1 訂·！ •線 I β, 經濟部智慧財產局員工消費合作社印製 A7 B7 經濟部智慧財產局員工消费合作社印製 五、發明說明（18 ) 整用之不收縮泥漿（non-shrink mortar)施工成規定厚度所形 成。因此，地基2 1的頂面保持高精度的水平度。 空氣彈簧43、44，係被配置在台座支持部1 5和 氣箱46之間。空氣彈簧43、44，一邊支持包含台座 支持部1 5之除震台19和除震對象物2 0的重量，一邊 專門發揮上下方向的彈簧作用。 氣箱46全體係形成上下端封閉的筒狀。氣箱4 6儲 存用來供給空氣彈簧4 3、4 4之加壓空氣。而且，藉由 未圖示的閥回路，從各氣箱4 6將加壓空氣供給至各空氣 彈簧43、44內，於是空氣從空氣彈簧43、44排出 。在氣箱4 6之下端和地基2 1之間，設置除震橡膠1 7 ' 1 8。對於一個氣箱4 6，安定性佳地配置1個或數個 除震橡膠1 7、1 8。 支承手段3 2係被設置在樑構件3 4的中央部。支承 手段3 2在其著地之地基2 1的頂面上，敷設不銹鋼製的 滑板3 6。 支承手段3 2係藉由螺栓等，固定在樑構件3. 4的下. 側。在支承手段3 2的下端面上，安裝有特氟隆（Teflon)等 的滑動材4 0，而在此滑動材4 0和滑板3 6之間.，具備 擁有調整用柄3 2 a的間隙調整部3 2 b。藉由旋轉柄 3 2 a ，可以微調整間隙△。在支承手段3 2的上方，位 於樑構件34和台座支持部1 5之間，設置有上下震動吸 收用的黏性減振器·4 2。又，雖然省略其圖示，在基板 1 6和地基2 1之間，設置有水平震動吸收用的黏性減振 {請先閲讀貧面之注意事項再填寫本頁) t MM I I < Γ _ΐ 訂· — ! 線 —ί --------卜 ^ _4 ·! 1 Order! • Line I β, printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the invention (18) Non-shrink mortar for the whole construction to a specified thickness Formed. Therefore, the top surface of the foundation 21 maintains a high level of precision. The air springs 43 and 44 are arranged between the pedestal support portion 15 and the air tank 46. The air springs 43 and 44 specifically support the vertical spring function while supporting the weight of the shock absorbing table 19 including the pedestal support portion 15 and the shock absorbing object 20. The entire system of the gas tank 46 is formed into a cylindrical shape with closed upper and lower ends. The air tank 4 6 stores pressurized air for supplying the air springs 4 3 and 4 4. Then, the air is supplied from each of the air tanks 46 to each of the air springs 43 and 44 through a valve circuit (not shown), and the air is discharged from the air springs 43 and 44. Between the lower end of the air box 4 6 and the foundation 2 1, a shock-absorbing rubber 1 7 ′ 1 8 is provided. For one air box 4 6, one or more shock-absorbing rubbers 17 and 18 are provided with good stability. The support means 32 is provided in the center of the beam member 34. The supporting means 32 is provided on the top surface of the ground 2 1 with a slide plate 36 made of stainless steel. The supporting means 3 2 is fixed to the lower side of the beam member 3.4 by bolts or the like. A sliding material 40 such as Teflon is mounted on the lower end surface of the supporting means 32. Between this sliding material 40 and the sliding plate 36, there is a gap provided with an adjusting handle 3 2a. Adjustment section 3 2 b. By rotating the handle 3 2 a, the clearance Δ can be finely adjusted. Above the supporting means 32, between the beam member 34 and the pedestal support portion 15 are provided a viscous vibration damper 42 for up-and-down vibration absorption. In addition, although the illustration is omitted, a viscous vibration damping for horizontal vibration absorption is provided between the substrate 16 and the foundation 21 (please read the precautions of the poor surface before filling this page) t MM II < Γ _ΐ Order · —! 线 —ί -------

-·1 1 ΛΜΨ 1 I-· 1 1 ΛΜΨ 1 I

w bn ϋ I 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公« ) . 21 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（19 ) 器。 在此除震裝置3 0 1中，載置除震對象物2 0的除震 台19，係藉由彈性支持部2、3和空氣彈簧4 3、44 以及除震橡膠1 7、1 8而被彈性地支持；於是， (1 )微震動中的水平震動係藉由除震橡膠1 7、 1 8來除去； (2 )微震動中的上下震動係藉由空氣彈簧4 3、 4 4來除去； (3 )微震動中的搖動震動係藉由彈性支持部2、3 來除去。 又’ （4 )當地震時的劇烈水平震動，係利用除震橡 膠17、18來除去。此時，水平變位極.大，在除震橡膠 1 7、1 8傾斜而發生下沉時，支承手段3 2支承在地基 2 1上來阻止下沉。（5 )地震時的劇烈上下震動，係利 用空氣彈簧4 3、44和彈性支持部2之合成彈簧來除去 。此時，上下震動係藉由黏性減振器4 2而減振。 上述說明的除震裝置30 1 ，具備震動除去功.能，可 以遮斷交通震動或生活震動使其不會傳達至除震對象物 2 0。因此，當除震對象物2 0爲積體電路的製造設備時 ，可以製造出商品價値高的均勻的矽單結晶。做爲除震對 象物2 0，不限於上述討厭震動之積體電路的製造設備， 包括精密機器、硏究室和實驗室以及手術室等的地板、或 者是重心高的家具和日常用具以及美術品、以及住宅或是 重心高的板狀建築物等，爲了除去這些物品的震動，也可 &lt;請先《讀背面之注意事項再填寫本頁) ij. •線· 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（20 ) 以應用本發明的除震裝置。 在本實施形態中，當除震橡膠1 7、1 8大幅地下沉 時，支承手段3 2支承在地基2 1上，可以阻止除震橡膠 17、18的下沉。進而，在支承手段32支持在地基 2 1上的狀態下，由於滑板3 6和滑動材4 0可以相互地 滑動，藉由兩者之間的摩擦接觸所得到的減振力，可以使 震動減振。 本發明之第四實施形態的構造 第9圖以及第1 0圖係表示本發明之第四實施形態的 除震裝置4 0 1。雖然根據上述任一個實施形態，皆可以 得到良好的震動除去效果以及瑤動震動的阻止效果，除震 對象物2 0之適用範圍也可以擴展至各種對象。然而，例 如在積體電路之製造設備中，當從爐內取出矽單結晶時， 希望可以固定除震對象物20。 本發明之第四實施形態的基本構造，係以在地基2 1 部分上，彈性地支持除震對象物2 0的除震裝置爲.基本， 而在除震對象物2 0和地基2 1之間，具備可以將除震對 象物2 0固定在地基部分2 1上的固定手段3 0 »例如， 藉由在上述第三實施形態之除震裝置3 0 1中設置固定手 段3 0 ’便可以完成第四實施型態的除震裝置401 〇在 本實施形態中，與上述第三實施形態同樣地，採用空氣彈 簧43、44來做爲彈簧，且取代基板1 6而採用氣箱 4 6。 (請先閱讀r面之注意事項再填寫本頁) ,ί • 1· .^1 ϋ n n I ϋ 訂-----w bn ϋ I This paper size applies to China National Standard (CNS) A4 (210 X 297) «. 21 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of Invention (19). In this shock absorbing device 3 0 1, a shock absorbing table 19 on which a shock absorbing object 20 is placed is formed by elastic support portions 2 and 3, air springs 4 3 and 44 and shock absorbing rubbers 17 and 18. It is elastically supported; therefore, (1) the horizontal vibration in the micro-vibration is removed by the shock-absorbing rubbers 17 and 18; (2) the vertical vibration in the micro-vibration is obtained by the air spring 4 3, 4 4 Removal; (3) The shaking vibration in the micro-vibration is removed by the elastic support portions 2, 3. (4) The severe horizontal vibration during the earthquake is removed by using shock-absorbing rubbers 17,18. At this time, the horizontal displacement is extremely large. When the shock-absorbing rubbers 17 and 18 tilt and sink, the supporting means 32 is supported on the foundation 21 to prevent the sinking. (5) The violent up and down vibration during the earthquake is removed by using the air spring 4 3, 44 and the synthetic spring of the elastic support 2. At this time, the up-and-down vibration is damped by the viscous vibration damper 42. The above-described shock absorbing device 30 1 is provided with a vibration removing function, and can block traffic vibrations or daily vibrations from being transmitted to the shock absorbing object 20. Therefore, when the shock-absorbing object 20 is a manufacturing device of an integrated circuit, a uniform silicon single crystal with a high commercial price can be manufactured. As the shock absorbing object 20, it is not limited to the manufacturing equipment of the integrated circuit that hates vibrations, including the floor of precision machines, research rooms, laboratories, and operating rooms, or furniture and daily appliances with high center of gravity and art Products, and houses or plate-shaped buildings with a high center of gravity, etc., in order to remove the vibration of these items, you can also <Please read the precautions on the back before filling out this page) ij. Standard (CNS) A4 specification (210 X 297 public love) A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention description (20) To apply the shock absorbing device of the present invention. In this embodiment, when the shock-absorbing rubbers 17 and 18 sink substantially, the support means 32 is supported on the foundation 21 to prevent the shock-absorbing rubbers 17 and 18 from sinking. Furthermore, in a state where the supporting means 32 is supported on the foundation 21, since the sliding plate 36 and the sliding material 40 can slide with each other, the vibration damping force obtained by the frictional contact between the two can reduce the vibration. Zhen. Structure of the fourth embodiment of the present invention Figs. 9 and 10 show a shock absorbing device 401 of a fourth embodiment of the present invention. Although according to any of the above-mentioned embodiments, a good vibration removing effect and a dynamic vibration preventing effect can be obtained, the application range of the shock absorbing object 20 can also be extended to various objects. However, for example, in the manufacturing equipment of a integrated circuit, when the silicon single crystal is taken out of the furnace, it is desirable to fix the shock-absorbing object 20. The basic structure of the fourth embodiment of the present invention is based on a shock-absorbing device that elastically supports a shock-absorbing object 20 on a portion of the ground 2 1. Basically, between the shock-absorbing object 20 and the ground 2 1 There are fixing means 3 0 for fixing the shock-absorbing object 20 to the ground part 21 »For example, the fixing means 3 0 'may be provided in the shock-absorbing device 3 0 1 of the third embodiment. In the fourth embodiment, the shock absorbing device 401 is completed. In this embodiment, as in the third embodiment, air springs 43 and 44 are used as springs, and an air box 46 is used instead of the base plate 16. (Please read the notes on r side before filling out this page), ί • 1 ·. ^ 1 ϋ n n I ϋ Order -----

SI ϋ ϋ I 線. .»1 I M9 ϋ ϋ Β— · 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐〉 A7 ___；_B7 __ 五、發明說明h ) • 1' . 在第四實施形態中所採用的固定手段3 0，係位於支 承手段3 2的兩側，而設置在台座支持部1 5中。與第三 實施形態的除震裝置3 0 1相同，在固定手段3 0和支承 _手段3 2支持於地基2 1的頂面之處，預先敷設不銹鋼製 的滑板3 6。 固定手段3 0係藉由焊接等手段而被固定在台座支持 部1 5的下側。固定手段3 0，在其下端面，安裝蘇瑪鐵 卜）等摩擦材38。在摩擦材38和滑板36之間 ’設定規定的間隙（5。而在固定手段3 0的下端部，具備 擁有調整用柄3 0 a的間隙調整部3 0 b。利用旋轉柄3 0 a，可以微調整間隙ό。 當固定除震對象物2 0時，例如在積體電路之製造設 備中，當從爐內取出矽單結晶時，排出空氣使空氣彈簧 43、44收縮。利用此空氣彈簧43、44的收縮動作 ’台座支持部1 5、除震台1 9以及除震對象物2 0全體 地下降。然後，固定手段30之摩擦材3 8，支承在地基 2 1之滑板3 6上，於是除震裝置40 1全體藉由固定手 段30而被支持在地基21上。 在除震裝置4 01之支承狀態下，喪失由彈性支持部 2、3和空氣彈簧43、44以及除震橡膠1 7、1 8所 產生的彈性支持機能，於是除震對象物2 0被確實地固定 。因此，不會影響到周圍的構造體，而能夠將矽單結晶取 出。在除震對象物2 0爲手術室或展示品時，當將.床或展 示品搬出之際，能夠平順地進行作業。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先《讀背面之注意事項再填寫本頁)SI ϋ ϋ I line .. »1 I M9 ϋ ϋ Β — · This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm> A7 ___; _B7 __ V. Description of the invention h) • 1 '. The fixing means 30 used in the fourth embodiment is located on both sides of the support means 32 and is provided in the pedestal support portion 15. Similar to the shock absorbing device 3 0 1 of the third embodiment, a stainless steel slide plate 36 is laid in advance where the fixing means 30 and the supporting means 3 2 are supported on the top surface of the foundation 2 1. The fixing means 30 is fixed to the lower side of the pedestal support portion 15 by means such as welding. The fixing means 30 is provided with a friction material 38 such as Sumatra on the lower end surface. A predetermined gap (5) is set between the friction material 38 and the slide plate 36. The lower end portion of the fixing means 30 is provided with a gap adjusting portion 3 0 b having an adjusting handle 3 0 a. The rotating handle 3 0 a, The clearance can be finely adjusted. When the shock-absorbing object 20 is fixed, for example, in the manufacturing equipment of integrated circuits, when the silicon single crystal is taken out of the furnace, the air is discharged to shrink the air springs 43 and 44. Use this air spring Shrinking action of 43, 44 'pedestal support 15, shock absorbing table 19, and shock absorbing object 20 all descend. Then, the friction material 3 8 of the fixing means 30 is supported on the slide plate 3 6 of the foundation 2 1 Therefore, the entire shock absorbing device 40 1 is supported on the foundation 21 by the fixing means 30. In the support state of the shock absorbing device 40 01, the elastic support portions 2, 3, and air springs 43, 44 and the shock absorbing rubber are lost. The elastic support function produced by 17, 18 causes the shock absorbing object 20 to be fixed securely. Therefore, the silicon single crystal can be taken out without affecting the surrounding structures. At the shock absorbing object 20 When operating room or display, when removing the bed or display Occasion, work can be done smoothly. This paper scales applicable Chinese National Standard (CNS) A4 size (210 X 297 mm) (please, "read the back of the Notes then fill out this page)

- - 一 .IV^·1111111 1111111* I 經濟部智慧財產局員工消費合作社印製 __________ -24- A7 B7 五、發明說明（22 ) 經濟部智慧財產局員工消費合作社印製 當然’若從氣箱4 6將加壓空氣供給至空氣彈簧4 3 、4 4內’使空氣彈簧4 3、4 4膨脹，則可以使固定手 段3 0從地基2 1浮上。而藉由使此固定手段3 0浮上， 可以回復除震裝置401之原本的震動除去機能。 在本發明之除震裝置4 0 1中，由於利用空氣彈簧 4 3、4 4的收縮作用，固定手段3 0便被支承在地基 2 1上，所以在此省略其構造。其他，也可以設置油壓缸 等的千斤頂裝置來使固定手段3 0支承在地基2 1上。又 ，在本實施形態中，除震橡膠1 7、1 8的自由端部，係 經由氣箱4 6以及樑構件3 4而連結在一起。除此以外， 也可以將除震橡膠1 7、1 8的自由端部，經由鋼板等而 直接連結在一起。 在上述任一實施形態中，藉由連結構件4，二個彈性 支持部（彈性支持手段）2、3連結在一起。但是，也可 以將3個以上的彈性支持手段相互地連結在一起。 第四實施形態係表示將固定手段3 0應用在第三實施 形態之除震裝置3 0 1中的情況。但是，固定手段3 0也 可以應用於第一和第二實施形態的除震裝置101、 2 0 1中，也可以應用於習知的除震裝置中。 榣動震動的除去原理 上述任何實施形態的除震裝置，其彈性支持部2、3 可以有效的除去_震台1 9所產生的搖動震動。亦即，在 除震台1 9和地基2 1之間，若施加會產生上下方向相對 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 閱 讀 背- 面 之 注 項 再 填 寫 本 頁 訂 A7 B7 五、發明說明（23 ) 變位的震動，則在彈性支持部2、3中，發生不諧調的上 下震動。然而，在本發明中，由於將在各彈性支持部2、 3中所發生.的上下震動變換成水平震動，.所以可以阻止此 搖動震動。以下，參照第1 1〜13圖，詳細說明具備本 發明之彈性支持部的.動作》 彈性支持部2、3由板彈簧構件5〜8所形成，其各 個板彈簧構件一方的端部5 b〜8 b，分別與台座支持部 1 5或基板1 6固定地結合。藉由此構造，由於上下方向 的彈性變形，板彈簧構件5〜8的傾斜角發生變化，而發 生水平方向的變位。藉由此方式，可以將上下震動變換成 水平震動。由變換而得的水平震動，藉由與彈性支持部2 、3固定地結合在一起的連結構件4，在彈性支持部2、 3相互之間傳達。分別從彈性支持部2、3施加在連結構 件4之各水平震動，爲由於不諧調之相異的上下震動所產 生’而不一致。此不一致的水平震動，對結合在彈性支持 部2、3上的連結構件4 ’施加壓縮力或拉伸力，而在該 連結構件4中，發生力的相抵作用而水平震動變平.均。此 平均後的水平震動，傳達至彈性支持部2、3。結果，不 .諧調的上下震動全部被平均化，此平均化後的上下震動， 使彈性支持部2、3往上下方向變位。 例如’如第1 1圖所示，偏向一邊的向下力（震動） W1 ’施加在和台座支持部1 5 (未圖示）固定地結合之 彈性支持部3的彎曲端部7 b上，假想除震台1 9上發生 搖動震動的情況。此情況，由於彎曲端部8 b與基板1 6 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閲讀r面之注意事項再填寫本頁&gt; -kil_丨丨丨—訂--------線 ,ρ. 經濟部智慧財產局員工消費合作社印製--I. IV ^ · 1111111 1111111 * I Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs __________ -24- A7 B7 V. Invention Description (22) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The box 46 supplies pressurized air into the air springs 4 3 and 4 4 to expand the air springs 4 3 and 4 4 so that the fixing means 30 can be floated from the foundation 21. By floating this fixing means 30, the original vibration removing function of the shock absorbing device 401 can be restored. In the shock absorbing device 401 of the present invention, the fixing means 30 are supported on the foundation 21 because of the contraction action of the air springs 4 3 and 4 4, so the structure is omitted here. Alternatively, a jack device such as a hydraulic cylinder may be provided to support the fixing means 30 on the foundation 21. In this embodiment, the free ends of the shock-absorbing rubbers 17 and 18 are connected to each other via the air box 46 and the beam member 34. Alternatively, the free ends of the shock-absorbing rubbers 17 and 18 may be directly connected to each other via a steel plate or the like. In any of the above embodiments, the two elastic supporting portions (elastic supporting means) 2 and 3 are connected together by the connecting member 4. However, three or more elastic support means may be connected to each other. The fourth embodiment shows a case where the fixing means 30 is applied to the shock absorbing device 301 of the third embodiment. However, the fixing means 30 may be applied to the shock absorbing devices 101 and 201 of the first and second embodiments, and may also be applied to a conventional shock absorbing device. Removal principle of vibration vibration The vibration support device 2 or 3 of the vibration isolation device of any of the above embodiments can effectively remove the shaking vibration generated by the vibration platform 19. That is, between the seismic platform 19 and the foundation 21, if it is applied, the vertical direction will be relative to the paper size. The Chinese National Standard (CNS) A4 specification (210 X 297 mm) will be applied. Fill in this page to order A7 B7 V. Description of the invention (23) The vibration of the displacement, in the elastic support parts 2, 3, an up and down vibration of dissonance occurs. However, in the present invention, since the up-and-down vibration occurring in each of the elastic support portions 2, 3 is converted into a horizontal vibration, this shaking vibration can be prevented. Hereinafter, referring to FIGS. 1 to 13, the operation including the elastic support portion of the present invention will be described in detail. The elastic support portions 2 and 3 are formed by the leaf spring members 5 to 8, and one end portion 5 b of each leaf spring member is provided. ~ 8 b are fixedly connected to the pedestal support portion 15 or the base plate 16 respectively. With this structure, due to the elastic deformation in the vertical direction, the inclination angles of the leaf spring members 5 to 8 change, and horizontal displacement occurs. In this way, the vertical vibration can be transformed into a horizontal vibration. The horizontal vibration resulting from the conversion is transmitted between the elastic support portions 2 and 3 via the connection member 4 fixedly coupled to the elastic support portions 2 and 3. The horizontal vibrations applied to the connecting member 4 from the elastic support portions 2, 3, respectively, are inconsistent due to the different up-and-down vibrations caused by dissonance. This inconsistent horizontal vibration exerts a compressive force or a tensile force on the coupling member 4 'coupled to the elastic support portions 2, 3, and in the coupling member 4, a counteracting force occurs and the horizontal vibration becomes flat. The averaged horizontal vibration is transmitted to the elastic support portions 2 and 3. As a result, the up-and-down vibrations that are not harmonized are all averaged, and the averaged up-and-down vibrations cause the elastic support portions 2 and 3 to be displaced in the up-down direction. For example, as shown in FIG. 11, a downward force (vibration) W1 biased to one side is applied to the curved end portion 7 b of the elastic support portion 3 fixedly coupled to the pedestal support portion 15 (not shown), Imagine a situation in which a shaking vibration occurs on the seismic isolation table 19. In this case, because the curved end portion 8 b and the base plate 1 6 are in accordance with the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the precautions on the r side before filling out this page &gt; -kil_丨 丨 丨 --Order -------- line, ρ. Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs

經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（24 ) 固定地結合而成爲固定點，所以彎曲端部7 b由於力W 1 而下沉。此時，對應彎曲端部7 b的下沉，彈性支持部3 變形，於是彈性支持部3之和連結構件4之間的連接部分 水平地移動。結果，水平方向的拉伸力T 1作用在連結構 件4上。由於連結構件4也固定地結合在彈性支持部2上 ，所以作用在連結構件4上的拉伸力T 1傳達至彈性支持 部2。而且，藉由此拉伸力T 1，彈性支持部2之和連結 構件4的連接部分，被拉往水平方向移動。彎曲端部6 b 由於與彎曲端部8b同樣是與基板16固定結合在一起的 固定點，所以對應作用在彈性支持部2之和連結構件4的 連接部分上的拉伸力T1，彈性支持部2發生變形。藉由 此手段，與台座支持部1 5 (未圖示）固定結合的彎曲端 部5 b下沉。由上述說明可知，施加在彎曲端部7 b上的 力W 1，經由連結構件4，而在彈性支持部2、3之間被 平均化，變成分別作用一半的力在各彈性支持部2、3上 。因此，力（震動）W1 ，使彎曲端部5b、7b以相同 的變位量下沉。 又，例如第1 2圖所示，偏向一邊的向下力（震動） W2，施加在和台座支持部1 5 (未圖示）固定地結合之 彈性支持部2的彎曲端部5 b上，假想除震台1 9上發生 搖動震動的情況。此情況，由於彎曲端部6 b與基板1 6 固定地結合而成爲固定點，所以彎曲端部5 b由於力W2 而下沉。此時，對·應彎曲端部5 b的下沉，彈性支持部2 變形，於是彈性支持部2之和連結構件4之間的連接部分 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）-27 - &lt;請先wtlt··面之a.·意事項再填寫本頁)Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (24) Fixedly combined to become a fixed point, the curved end 7 b sinks due to the force W 1. At this time, in response to the sinking of the curved end portion 7b, the elastic supporting portion 3 is deformed, so that the connecting portion between the elastic supporting portion 3 and the connecting member 4 moves horizontally. As a result, a tensile force T 1 in the horizontal direction acts on the connecting structural member 4. Since the connecting member 4 is also fixedly coupled to the elastic supporting portion 2, the tensile force T 1 acting on the connecting member 4 is transmitted to the elastic supporting portion 2. Then, the connecting portion of the elastic support portion 2 and the connecting member 4 is pulled in the horizontal direction by the tensile force T1. Since the curved end portion 6 b is the same as the fixed end of the curved end portion 8 b and fixed to the base plate 16, the elastic support portion corresponds to the tensile force T1 acting on the connection portion of the elastic support portion 2 and the connection member 4. 2 Deformation occurs. By this means, the curved end portion 5b fixedly combined with the pedestal support portion 15 (not shown) sinks. As can be seen from the above description, the force W 1 applied to the curved end portion 7 b is averaged between the elastic supporting portions 2 and 3 through the connecting member 4, and the forces acting on each of the elastic supporting portions 2 are halved. 3 on. Therefore, the force (vibration) W1 causes the curved end portions 5b, 7b to sink by the same amount of displacement. Further, for example, as shown in FIG. 12, a downward force (vibration) W2 biased to one side is applied to the curved end portion 5 b of the elastic support portion 2 fixedly coupled to the pedestal support portion 15 (not shown), Imagine a situation in which a shaking vibration occurs on the seismic isolation table 19. In this case, since the curved end portion 6 b is fixedly coupled to the substrate 16 to become a fixed point, the curved end portion 5 b sinks due to the force W2. At this time, the bending end portion 5 b should sink, and the elastic support portion 2 deforms, so the connecting portion between the elastic support portion 2 and the connecting member 4 applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -27-&lt; Please wtlt ·· A. · Identities before filling in this page)

A7 經濟部智慧財產局員工消費合作社印製 •____B7五、發明說明05 ) 水平地移動。結果，水平方向的 件4上。由於連結構件4也固定 ，所以作用在連結構件4上的壓 部3。而且，藉由此壓縮力C 1 構件4的連接部分，被壓向水平 由於與彎曲端部6 b同樣是與基 固定點，所以對應作用在彈性支 連接部分上的壓縮力C 1，彈性 此手段，與台座支持部1 5 (未 部7 b下沉。由上述說明可知， 力W2，經由連結構件4，而在 平均化，變成分別作用一半的力 。因此，力（震動）W2，使彎 的變位量下沉。 進而，例如在第1 3圖中 的例子所示，偏向一邊的向上 性支持部2的彎曲端部5 b上 動）W4，施加在彈性支持部 想除震台19上發生搖動震動 5 b要往上方浮起，而彎曲端 時，對應彎曲端部5 b之浮起 ，於是彈性支持部2之和連結 向移動。此結果，水平方向的 4上。同時，對應彎曲端部7 壓縮力C 1作 地結合在彈性 縮力C 1傳達 ，彈性支持部 方向移動。彎 板1 6固定結 持部3之和連 支持部3發生 圖示）固定結 施加在彎曲端 彈性支持部2 在各彈性支持 曲端部5 b、 以實線 力（震 ，且偏 3之彎 的情況 部7 b ，彈性 構件4 拉伸力 b之下 來表示力 動）W 3 向一邊的 曲端部7 。此情況 則要往下 支持部2 的連接部 T 2作用 沉，彈性 用在連結構 支持部3上 至彈性支持 3之和連結 曲端部8 b 合在一起的 結構件4的 變形。藉由 合的彎曲端 部5 b上的 、3之間被 部2、3上 7 b以相同 的作用方向 ，施加在彈 向下力（震 b上’來假 ，彎_端部 方下沉。此 要發生變形 分往水平方 在連結構件 支持部3要 (锖先閲讀賞面之生$項再填寫本1} --」^ ϋ kl n n 1· 1« amme mb mm aiw mm 喔 I erne n tm n kl n n n 私紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）_ 28 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（26〉 發生變形，於是彈性支持部3之和連結構件4的連接部分 往水平方向移動。結果，水平方向的拉伸力T 2作用在連 結構件4上。這些拉伸力T 2相等的情況，亦即力w 3、 W 4相等的情況，往相反方向作用的拉伸力亇2同時作用 在連結構件4上而互相抵銷。因此，連結構件4不會往任 —方向移動。亦即，彎曲端部5 b、7 b不會搖動。另一 方面’當力W3比W4大時，連結構件4由於（W3 — W4 )的拉伸力而往彈性支持部2側移動。結果，彎曲端 部5b、7b皆往上浮起。另一方面，當力W4比力W3 大時’連結構件4由於（W4 — W3 )的拉伸力而往彈性 支持部3側移動。結果，彎曲端部5b'7b皆往下沉。 又，如在第13圖中以虛線.來表示力的作用方向的例 子所示，偏向一邊的向下力（震動）W3 ，施加在彈性支 持部2的彎曲端部5 b上，且偏向一邊的向上力（震動） W4，施加在彈性支持部3之彎曲端部7 b上，來假想除 震台1 9上發生搖動震動的情況。此情況，彎曲端部5 b 要往下方下沉，而彎曲端部7 b則要往上方浮起。.此時， 對應彎曲端部5 b之下沉，彈性支持部2要發生變形，於 是彈性支持部2之和連結構件4的連接部分往水平方向移 動。此結果，水平方向的壓縮力C 2作用在連結構件4上 。同時，對應彎曲端部7 b之浮起，彈性支持部3要發生 變形’於是彈性支持部3之和連結構件4的連接部分往水 平方向移動。結果，水平方向的壓縮力C 2作用在連結構 件4上。這些壓縮力C2相等的情況，亦即力W3、W4 (锖先閲讀背面之注意事項再填寫本頁&gt; • ·1 ϋ i— 1_· n |&gt;1 一 _aJt 1· *1 * -線 J&amp;L ——I-------------1 Μ 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -29- A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（27 ) • .... 相等的情況，往相反方向作用的壓縮力C 2同時作用在連 結構件4上而互相抵銷。因此，連結構件4不會往任一方 向移動。亦即，彎曲端部5b、7b不會搖動。另一方面 ’當力W3比W4大時，連結構件4由於（W3 — W4) 的壓縮力而往彈性支持部3側移動。結果，彎曲端部5 b 、7 b皆往下方下沉。另一方面，當力W4比力W3大時 ’連結構件4由於（W4 - W3 )的壓縮力而往彈性支持 部2側移動。結果，彎曲端部5b、7b皆往上浮起。 對於本發明的除震裝置，由於在各彈性支持部2、3 中的上下方向之震動狀態不諧調，所以當在除震台i 9上 發生搖動震動時，彈性支持部2藉由板彈簧構件5、6， 將上下震動變換成水平震動：又，彈性支持部3藉由板彈 簧構件7、8 ’將上下震動變化成水平震動。變換後的水 平震動’經由連結構件4，在彈性支持部2、3相互間傳 達時變成均勻化。藉由此均勻化後的水平震動，可以在所 有的彈性支持部2、3上，發生均勻的上下震動。 又，在本發明的除震裝置中，彈性支持部2、.3之一 方的端部5 b〜8 b，固定地結合在台座支持部1 5和基 板1 6上，且另一方的端部5 a〜8 a固定地與連結構件 4結合。藉由此固定的結合，由於沒有構造上的間隙，所 以彈性支持部2、3和連結構件4，可以瞬間地對所施加 的震動加以反應。 在連結構件4上，有由彈性支持部2、3雙方作用壓 縮力的情況（參照第1 2圖）。因此，連結構件4要以具 本紙張尺度適用中國國家標準（CNS&gt;A4規格（210 X 297公爱） (請先《讀背面之注意事項再填寫本頁) -·. 訂. --線- A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（28 ) 有充分的強度的構件來形成，不會由於壓縮力而變形。 在第1 3圖之震動狀態中，當拉伸力T 2或壓縮力 C2相等時，這些力會互相抵銷，彎曲端部5 b、7 b不 會搖動。但是，實際上，會由於各構件的彈性變形而有稍 微的上下震動。爲了解決此種問題，本發明之任一實施形 態的除震裝置，各構件皆使用剖面性能優異的構件。 以上所述的任一實施形態的除震裝置，皆可以適當地 除去上下方向以及水平方向的震動，不但構造簡單，且可 以阻止發生預測困難的搖動震動。 【圖面之簡單說明】 第1圖.係關於本發明之第一實施形態的除震裝置的全 體槪要側視圖。 第2圖係被使用在第1圖之除震裝置中的變位變換手 段的平面圖。 第3圖係從第1圖之B線所示方向來看的剖面圖。 第4圖係從第1圖之A線所示方向來看的剖面圖。 第5圖係表示本發明所採用之變位變換手段之除震台 的配置構造圖。 第6圖係關於本發明之第二實施形態的除震裝置的全 體槪要側視圖。 第7圖係關於本發明之第三實施形態的除震裝置的全 體前視圖。 第8圖係從第7圖之X-X線所示方向來看的剖面圖 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) ~31 - f請先閲讀背面之汉意事項再填寫本頁) 訂· •線_ 經濟部智慧財產局員工消費合作社印製 A7 '_；_B7__；_ 五、發明說明（29 ) 〇 第9圖係關於本發明之第四實施形態的_震裝置的全 體前視圖。 第1 0圖係從第9圖之Y — Y線所示方向來看的剖面 圖。 . 第1 1圖係用來說明本發明所採用之變位變換手段的 機能之槪略圖。 第12圖係用來說明本發明所採用之變位變換手段的 機能之槪略圖。 第13圖係用來說明本發明所採用之變位變換手段的 機能之槪略圖。 【圖號說明】 2、3 :彈性支持部 4:連結構件 5、6 :板彈簧構件 5a、6a、7a、8a:彎曲端部 7、8 :板彈簧構件 9、1 0 :金屬板 1 1、1 2 :板構件 1 3、1 4 :彈簧 1 5 :台座支持部 1 6 :基板 1 7、1 8 :除震橡膠 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -32- -------------• I 1 (請先閱讀r面之注意事項再填寫本頁) --線 fe丨 A7 B7 19 2 0 2 1 3 2 3 0 3 0 3 4 3 6 3 8 4 0 4 2 4 3 4 6 10 柄 間隙調整部 五、發明說明（30 ) :除震台 :除震對象物 :地基（部分） :支承手段 a、3 2 a b ' 3 2 b :樑構件 :滑板 :摩擦材 :滑動材 :黏性減振器 、4 4 :空氣彈簧 :氣箱 1'201、301、401:除震裝置 請 先 閱 讀 背· 面 之 注 意 事 項 再 填 寫 本 頁 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -33-A7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs • ____ B7 V. Invention Description 05) Move horizontally. As a result, the member 4 in the horizontal direction is on. Since the connecting member 4 is also fixed, the pressing portion 3 acting on the connecting member 4 is fixed. Furthermore, the compressive force C 1 of the connection portion of the member 4 is pressed horizontally because it is the same as the fixed end of the curved end portion 6 b. Therefore, the compressive force C 1 acting on the elastic branch connection portion corresponds to the elasticity. Means, the pedestal support part 15 (not part 7 b sinks.) From the above description, it can be seen that the force W2, through the connecting member 4, is averaged and becomes half of the acting force. Therefore, the force (vibration) W2 makes The amount of bending displacement sinks. Further, for example, as shown in the example in FIG. 13, the bent end portion 5 b of the upward support portion 2 that is biased to one side moves up) W4 and is applied to the elastic support portion. A shaking vibration 5 b occurs on 19 to float upward, and when the bent end is raised, the floating end 5 b corresponding to the bent end rises, so that the sum of the elastic support portions 2 is moved in a forward direction. The result is 4 in the horizontal direction. At the same time, the compressive force C 1 corresponding to the bending end 7 is combined with the elastic contraction force C 1 to convey and the elastic support portion moves in the direction. Bend plate 1 6 The combination of the fixed holding part 3 and the supporting part 3 is shown) The fixed knot is applied to the elastic support part 2 at the curved end. At each elastic support curved end part 5 b, a solid line force (shock, and partial 3) The curved case portion 7 b, the elastic member 4 indicates the force movement under the tensile force b) W 3, a curved end portion 7 directed to one side. In this case, the connecting portion T 2 of the supporting portion 2 acts downward, and the elasticity is used to connect the structural supporting portion 3 to the elastic supporting portion 3 and the curved end portion 8 b is deformed. With the curved end portion 5 b, between the 3 quilt portions 2 and 3 on 7 b, the elastic downward force (shock b ') is applied in the same direction of action, and the bend _ end portion sinks The deformation will occur in the horizontal direction in the supporting member support section 3 (锖 first read the reward $ item and then fill out this 1)-'' ^ l kl nn 1 · 1 «amme mb mm aiw mm oh I erne n tm n kl nnn Private paper size applies to China National Standard (CNS) A4 (210 X 297 mm) _ 28 A7 B7 Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (26) deformed, so flexible The connecting portion of the supporting portion 3 and the connecting member 4 moves in the horizontal direction. As a result, a horizontal tensile force T 2 acts on the connecting member 4. When these tensile forces T 2 are equal, that is, the forces w 3 and W In the case of 4 being equal, the tensile force 亇 2 acting in the opposite direction simultaneously acts on the connecting member 4 to cancel each other out. Therefore, the connecting member 4 does not move in either direction. That is, the curved ends 5 b, 7 b does not shake. On the other hand, when the force W3 is greater than W4, the connecting member 4 is due to (W3-W4) The tensile force moves toward the elastic support portion 2. As a result, the curved ends 5b and 7b both float upward. On the other hand, when the force W4 is greater than the force W3, the 'connecting member 4 is stretched by (W4-W3). The force moves toward the elastic support portion 3. As a result, the curved end portions 5b'7b all sink. Further, as shown in the example shown by the dotted line in FIG. 13, the direction of the force is biased downward. A force (vibration) W3 is applied to the curved end portion 5 b of the elastic support portion 2 and an upward force (vibration) W4 is applied to the curved end portion 7 b of the elastic support portion 3 to imagine a vibration isolation table A shaking vibration occurs on 19. In this case, the curved end portion 5 b sinks downward, and the curved end portion 7 b floats upward. At this time, the corresponding curved end portion 5 b sinks, The elastic supporting portion 2 is deformed, so the connecting portion between the elastic supporting portion 2 and the connecting member 4 moves horizontally. As a result, the horizontal compressive force C 2 acts on the connecting member 4. At the same time, corresponding to the curved end portion 7 b rises, the elastic supporting portion 3 is deformed. The connecting portion of the structural member 4 moves horizontally. As a result, the horizontal compression force C 2 acts on the connecting member 4. In the case where these compression forces C 2 are equal, that is, the forces W3, W4 (read the precautions on the back side first, and then Fill in this page &gt; • · 1 ϋ i— 1_ · n | &gt; 1 a_aJt 1 · * 1 * -line J &amp; L ——I ------------- 1 Μ Paper size applies Chinese National Standard (CNS) A4 (210 X 297 mm) -29- A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (27) • ... The compressive forces C 2 acting in opposite directions simultaneously act on the connecting member 4 and cancel each other out. Therefore, the connecting member 4 does not move in either direction. That is, the curved end portions 5b and 7b do not shake. On the other hand, when the force W3 is greater than W4, the connecting member 4 moves to the elastic support portion 3 side due to the compressive force of (W3-W4). As a result, the curved ends 5 b and 7 b both sink downward. On the other hand, when the force W4 is greater than the force W3, the 'connecting member 4 moves to the elastic support portion 2 side due to the compressive force of (W4-W3). As a result, the curved end portions 5b, 7b both float upward. For the shock absorbing device of the present invention, since the vibration state in the up and down directions in each of the elastic support portions 2 and 3 is not tuned, when a shaking vibration occurs on the vibration isolation platform i 9, the elastic support portion 2 is provided with a plate spring member. 5, 6 to convert the vertical vibration to a horizontal vibration: Also, the elastic support portion 3 changes the vertical vibration to a horizontal vibration by the plate spring members 7, 8 '. The converted horizontal vibrations' are uniformized when the elastic support portions 2 and 3 reach each other via the connecting member 4. With the horizontal vibration thus uniformized, uniform up-and-down vibration can be generated on all the elastic support portions 2 and 3. Further, in the shock absorbing device of the present invention, one end portion 5 b to 8 b of one of the elastic support portions 2 and. 3 is fixedly coupled to the pedestal support portion 15 and the base plate 16 and the other end portion 5 a to 8 a are fixedly connected to the connecting member 4. With this fixed combination, since there is no structural gap, the elastic supporting portions 2, 3 and the connecting member 4 can instantly respond to the applied vibration. In the connecting member 4, a compressive force may be applied to both of the elastic supporting portions 2 and 3 (see Fig. 12). Therefore, the connecting member 4 must be in accordance with the Chinese paper standard (CNS &gt; A4 specification (210 X 297 public love)) at the current paper size (please read the precautions on the back before filling this page)-·. Order. --Line- A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention Description (28) A member with sufficient strength to be formed and not deformed by compressive force. In the vibration state shown in Figure 13 when the tensile force When T 2 or compressive force C 2 are equal, these forces will cancel each other out, and the curved ends 5 b and 7 b will not shake. However, in fact, there will be a slight up and down vibration due to the elastic deformation of each member. In order to solve this In some cases, the vibration isolation device according to any one of the embodiments of the present invention uses a member with excellent cross-sectional performance. The vibration isolation device according to any of the foregoing embodiments can appropriately remove vibrations in the vertical and horizontal directions. Not only is the structure simple, but it can prevent the occurrence of shaking vibrations that are difficult to predict. [Simplified description of the drawing] Figure 1. This is a side view of the whole of the vibration isolation device according to the first embodiment of the present invention. The figure is a plan view of the displacement conversion means used in the shock absorbing device of Fig. 1. Fig. 3 is a cross-sectional view viewed from the direction shown by line B in Fig. 1. Fig. 4 is a view from Fig. 1 A cross-sectional view in the direction shown by line A. Fig. 5 is a diagram showing the arrangement and structure of a seismic isolation table using the displacement conversion means of the present invention. Fig. 6 is a seismic isolation device according to a second embodiment of the present invention. Fig. 7 is an overall front view of a shock absorbing device according to a third embodiment of the present invention. Fig. 8 is a cross-sectional view viewed from the direction indicated by line XX in Fig. 7. Paper dimensions Applicable to China National Standard (CNS) A4 specification (210 X 297 mm) ~ 31-f (Please read the Hanyi items on the back before filling out this page) Order · • Line _ Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs Consumer Cooperatives A7 ' _; _B7__; _ 5. Explanation of the invention (29) 〇 FIG. 9 is an overall front view of the _ seismic device according to the fourth embodiment of the present invention. Fig. 10 is a cross-sectional view seen from a direction indicated by a Y-Y line in Fig. 9. Fig. 11 is a schematic diagram for explaining the function of the displacement conversion means used in the present invention. Fig. 12 is a schematic diagram for explaining the function of the displacement conversion means used in the present invention. Fig. 13 is a schematic diagram for explaining the function of the displacement conversion means used in the present invention. [Illustration of drawing number] 2, 3: Elastic support part 4: Connecting member 5, 6: Leaf spring member 5a, 6a, 7a, 8a: Bend end 7, 8: Leaf spring member 9, 1 0: Metal plate 1 1 1 2: plate member 1 3, 1 4: spring 1 5: pedestal support 1 6: base plate 1 7, 1 8: shock-absorbing rubber This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ) -32- ------------- • I 1 (Please read the notes on r side before filling in this page) --linefe 丨 A7 B7 19 2 0 2 1 3 2 3 0 3 0 3 4 3 6 3 8 4 0 4 2 4 3 4 6 10 Handle clearance adjustment section V. Description of the invention (30): Seismic table: Objects for seismic isolation: Foundation (part): Support means a, 3 2 ab '3 2 b: Beam member: Sliding plate: Friction material: Sliding material: Viscous shock absorber, 4 4: Air spring: Air box 1'201, 301, 401: Shock absorber Please read the notes on the back and front Fill out this page Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is printed in accordance with China National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

$ A8B8C8S 六、申請專利範圍 1 . 一種除震裝置，其特徵爲具備： 變位變換手段，係配置複數個位於上下方向隔開間隔 之除震對象物和地基部分之間，分別固定結合在該除震對 象物以及該地基部分上，而將從該固定結合部分傳達來之 該除震對象物以及該地基部分的上下方向相對變位，變換 成水平方向變位；以及 變位傳達手段，係分別固定結合在該變位變換手段上 ，將這些變位變換手段相互地連結，使上述水平方向變位 在各變位變換手段間相互地傳達。 .2 .如申請專利範圍第1項所述的除震裝置，其中上 述變位變換手段，係由上下重疊地配置在上述除震對象物 和上述地基部分之間的一對板材所構成；這一對板材，其 兩端部分別彎曲規定的角度而沿著該板材之長度方向相互 之間大致成平行，其一方的彎曲端部相互重疊而固定結合 在一起，且另一方的彎曲端部則分別固定結合在上述除震 對象物以及上述地基部分上。 J$ A8B8C8S VI. Patent application scope 1. A shock absorbing device, which is characterized by: a displacement conversion means, which is provided with a plurality of shock absorbing objects located at intervals in the up-down direction and the ground part, which are fixedly combined respectively On the seismic isolation object and the foundation portion, the vertical displacement of the seismic isolation object and the foundation portion transmitted from the fixed combination portion is relatively displaced in the horizontal direction, and the displacement transmission means is These displacement conversion means are fixedly combined with each other, and these displacement conversion means are connected to each other so that the above-mentioned horizontal displacements are transmitted to each other. .2. The shock absorbing device according to item 1 of the scope of the patent application, wherein the displacement transformation means is composed of a pair of plates arranged between the shock absorbing object and the foundation portion in an overlapping manner; A pair of end plates are respectively bent at a predetermined angle and are substantially parallel to each other along the length direction of the plate. One of the curved ends overlaps each other and is fixedly combined, and the other curved end is They are fixedly coupled to the shock-absorbing object and the ground part, respectively. J - 3.如申請專利範圍第2項所述的除震裝置，其中上 述板材爲可以彈性恢復的彈簧。^ 4 .如申請專利範圍第2項所述的除震裝置，其中上 述變位變換手段之相互重疊的上述彎曲端部、以及連結上 述各彎曲端部之上述變位傳達手段，係藉由接合在這些構 件上的補強構件來加以一體化。 5 .如申請專利範圍第1項所述的除震裝置，其中上 述變位傳達手段，係具有對於壓縮力不易發生變形的高剛 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -34 - — — —— I!!— — — — — — &gt;111— — — — 11!1111 &lt;請先Μ讀背面之注意事項再填寫本頁) $ A8B8C8S 六、申請專利範圍 1 . 一種除震裝置，其特徵爲具備： 變位變換手段，係配置複數個位於上下方向隔開間隔 之除震對象物和地基部分之間，分別固定結合在該除震對 象物以及該地基部分上，而將從該固定結合部分傳達來之 該除震對象物以及該地基部分的上下方向相對變位，變換 成水平方向變位；以及 變位傳達手段，係分別固定結合在該變位變換手段上 ，將這些變位變換手段相互地連結，使上述水平方向變位 在各變位變換手段間相互地傳達。 .2 .如申請專利範圍第1項所述的除震裝置，其中上 述變位變換手段，係由上下重疊地配置在上述除震對象物 和上述地基部分之間的一對板材所構成；這一對板材，其 兩端部分別彎曲規定的角度而沿著該板材之長度方向相互 之間大致成平行，其一方的彎曲端部相互重疊而固定結合 在一起，且另一方的彎曲端部則分別固定結合在上述除震 對象物以及上述地基部分上。 J-3. The shock absorbing device according to item 2 of the scope of patent application, wherein the plate is a spring that can be elastically restored. ^ 4. The shock absorbing device according to item 2 of the scope of the patent application, wherein the curved end portions of the displacement conversion means overlapping each other and the displacement transmission means connecting the curved end portions are connected by joining The reinforcing members on these members are integrated. 5. The shock absorbing device according to item 1 of the scope of patent application, wherein the above-mentioned displacement transmission means has a high-rigidity paper size that is not easily deformed by compressive force, and applies Chinese National Standard (CNS) A4 specification (210 X 297). (Mm) -34-— — — I !! — — — — — — &gt; 111— — — — 11! 1111 &lt; Please read the notes on the back before filling out this page) $ A8B8C8S VI. Apply for a patent Scope 1. A shock absorbing device, comprising: a displacement transformation means, which is provided with a plurality of shock absorbing objects located at intervals in the up-down direction and a foundation portion, which are fixedly combined with the shock absorbing object and the On the foundation part, the vertical displacement of the seismic isolation object and the foundation part transmitted from the fixed combination part is relatively displaced in the horizontal direction, and the displacement transmission means are fixedly combined in the change respectively. In the bit conversion means, these displacement conversion means are connected to each other so that the above-mentioned horizontal displacements are transmitted to each other. .2. The shock absorbing device according to item 1 of the scope of the patent application, wherein the displacement transformation means is composed of a pair of plates arranged between the shock absorbing object and the foundation portion in an overlapping manner; A pair of end plates are respectively bent at a predetermined angle and are substantially parallel to each other along the length direction of the plate. One of the curved ends overlaps each other and is fixedly joined together, and the other curved end is They are fixedly coupled to the shock-absorbing object and the ground part, respectively. J - 3.如申請專利範圍第2項所述的除震裝置，其中上 述板材爲可以彈性恢復的彈簧。^ 4 .如申請專利範圍第2項所述的除震裝置，其中上 述變位變換手段之相互重疊的上述彎曲端部、以及連結上 述各彎曲端部之上述變位傳達手段，係藉由接合在這些構 件上的補強構件來加以一體化。 5 .如申請專利範圍第1項所述的除震裝置，其中上 述變位傳達手段，係具有對於壓縮力不易發生變形的高剛 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -34 - — — —— I!!— — — — — — &gt;111— — — — 11!1111 &lt;請先Μ讀背面之注意事項再填寫本頁) 六、申請專利範圍 性。 6 .如申請專利範圍第1項所述的除震裝置，其中上 述變位傳達手段，爲中空的筒狀構件。 7 .如申請專利範圍第1項所述的除震裝置，其中在 上述除震對象物和上述地基部分之間，配置和上述變位變 換手段並排的上下方向彈性支持手段。 8 .如申請專利範圍第7項所述的除震裝置，其中上 述上下方向彈性支持手段爲彈簧。 9 .如申請專利範圍第7項所述的除震裝置，其中在 上述除震對象物和上述地基部分之間，設置上下震動吸收 用的減振器。 1 〇 .如申請專利範圍第1項所述的除震裝置，其中 在上述除震對象物和上述地基部分之間，配置‘和上述變位 變換手段呈直線排列的水平方向除震手段。 1 1.如申請專利範圍第1 0項所述的除震裝置，其 中上述水平方向除震手段的除震對象物側端部’相互連結 成一體。 1 2 .如申請專利範圍第1 0項所述的除震裝置’其 中上述水平方向除震手段的除震對象物側端部’係藉由剛 性構件相互地連結在一起。 1 3 .如申請專利範圍第1 〇項所述的除震裝置’其 中上述水平方向除震手段爲疊層橡膠。 1 4 .如申請專利範圍第1 〇項所述的除震裝置’其 中在上述除震對象物和上述地基部分之間’設置水平震動 ·!11!------· I I (請先閱讀r面之#i意事項再填寫本頁) * 50 . -線. 本紙張尺度適用中國國家標準（CNS)A4規格（210 * 297公釐） -35--3. The shock absorbing device according to item 2 of the scope of patent application, wherein the plate is a spring that can be elastically restored. ^ 4. The shock absorbing device according to item 2 of the scope of the patent application, wherein the curved end portions of the displacement conversion means overlapping each other and the displacement transmission means connecting the curved end portions are connected by joining The reinforcing members on these members are integrated. 5. The shock absorbing device according to item 1 of the scope of patent application, wherein the above-mentioned displacement transmission means has a high-rigidity paper size that is not easily deformed by compressive force, and applies Chinese National Standard (CNS) A4 specification (210 X 297). (Mm) -34-— — — — I !! — — — — — — &gt; 111— — — — 11! 1111 &lt; Please read the notes on the back before filling this page) 6. Scope of patent application . 6. The shock absorbing device according to item 1 of the scope of patent application, wherein the above-mentioned displacement transmission means is a hollow cylindrical member. 7. The shock absorbing device according to item 1 of the scope of patent application, wherein an elastic support means in the vertical direction is arranged between the shock absorbing object and the foundation portion side by side with the displacement changing means. 8. The shock absorbing device according to item 7 of the scope of patent application, wherein the elastic support means in the up-down direction is a spring. 9. The shock absorbing device according to item 7 of the scope of patent application, wherein a shock absorber for absorbing vertical vibration is provided between the shock absorbing object and the foundation portion. 10. The shock absorbing device according to item 1 of the scope of the patent application, wherein a horizontal direction shock absorbing means that is aligned in a straight line with the displacement transformation means is disposed between the shock absorbing object and the ground portion. 1 1. The shock absorbing device according to item 10 of the scope of patent application, wherein the shock-absorbing object-side end portions ′ of the horizontal shock absorbing means are connected to each other as a whole. 12. The shock absorbing device ′ according to item 10 of the scope of patent application, in which the shock-absorbing object-side end portions of the horizontal shock absorbing means described above are connected to each other by rigid members. 1 3. The shock absorbing device according to item 10 of the scope of patent application, wherein the horizontal shock absorbing means is laminated rubber. 1 4. The shock absorbing device described in item 10 of the scope of the patent application, wherein a horizontal vibration is provided between the above-mentioned shock absorbing object and the above-mentioned ground part.! 11! ------ · II (please first Read the # i-Issue on the r side and fill out this page) * 50. -Line. This paper size applies to China National Standard (CNS) A4 (210 * 297 mm) -35- A8SSD8 六、申請專利範圍 • 吸收用的減振器。 1 5 .如申請專利範圍第1 0項所述的除震裝置，其 中具備：設置在上述除震對象物和上述地基部分之間，當 上述水平方向除震手段往水平方向變形時，可以滑動自如 地支承在該地基部分上的支承手段。 1 6 .如申請專利範圍第1項所述的除震裝置，其中 在上述除震對象物和上述地基部分之間，設置使該除震對 象物固定自如地在該地基部分上的固定手段。 1 7 . —種除震裝置，係針對將除震對象物彈性支持 在地基部分上的除震裝置，其特徵爲： 在上述除震對象物和上述地基部分之間，設置將該除 震對象物固定自如地在該地基部分上的固定手段。 1 8 .如申請專利範圍第1 7項所述的除震裝置，其 中具備： 變位變換手段，係配置複數個位於上述除震對象物和 上述地基部分之間，分別固定結合在該除震對象物以及該 地基部分上，而將從該固定結合部分傳達來之該除震對象 物以及該地基部分的上下方向相對變位，變換成水平方向 變位； 變位傳達手段，係分別固定結合在該變位變換手段上 ，將這些變位變換手段相互地連結，使上述水平方向變位 在各變位變換手段間相互地傳達；. 上下方向彈性支持手段，係位於上述除震對象物和上 述地基部分之間，配置成和上述變位變換手段並排；以及 (請先閱讀背面之注意事項再填寫本頁)A8SSD8 6. Scope of Patent Application • Absorber for shock absorption. 15. The shock absorbing device according to item 10 of the scope of patent application, which is provided between the shock absorbing object and the foundation portion, and can slide when the horizontal shock absorbing means deforms horizontally. Support means for freely supporting the foundation. 16. The shock absorbing device according to item 1 of the scope of patent application, wherein a fixing means is provided between the shock absorbing object and the foundation portion to fix the shock absorbing object on the foundation portion freely. 1 7. A kind of shock absorbing device is a shock absorbing device for elastically supporting a shock absorbing object on a foundation portion, characterized in that: between the shock absorbing object and the foundation portion, the shock absorbing object is provided Fixing means for fixing the object freely on the foundation part. 18. The shock absorbing device according to item 17 of the scope of the patent application, which includes: a displacement transformation means, which is configured with a plurality of located between the shock absorbing object and the foundation portion, and is fixedly combined with the shock absorbing respectively. On the object and the foundation part, the vertical displacement of the shock absorbing object and the foundation part transmitted from the fixed combination part is relatively displaced and transformed into a horizontal displacement; the means of displacement transmission are fixed and combined respectively. On the displacement conversion means, these displacement conversion means are connected to each other, so that the horizontal displacement is transmitted between the displacement conversion means; and the elastic support means in the up and down direction is located between the above-mentioned shock absorption target and The above-mentioned foundation parts are arranged side by side with the above-mentioned displacement transformation means; and (please read the precautions on the back before filling this page) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -36- -37- A8 B8 C8 D8 六、申請專利範圍 水平方向除震手段，係位於上述除震對象物和上述地 基部分之間，配置和上述變位變換手段呈直線排列，而將 各個自由端部相互連結。 1 9 .如申請專利範圍第1 8項所述的除震裝置，其 中上述地基部分的頂面，係由將水平調整用之不收縮泥漿 (non-shrink mortar)施工成規定厚度所形成。 2 〇 .如申請專利範圍第1 8項所述的除震裝置，其 中上述上下方向彈性支持手段，爲膨脹和收縮自如的空氣 彈簧。 .21·如申請專利範圍第20項所述的除震裝置，其 中上述空氣彈簧與氣箱連接，由氣箱供給空氣或排出空氣 ，來使空氣彈簧膨脹或收縮。 2 2 .如申請專利範圍第1 7項所述的除震裝置，其 中在上述除震對象物和上述地基部分之間，設置使該除震 對象物升降的千斤頂。 2 3 .如申請專利範圍第1 7項所述的除震裝置，其 中在上述固定手段之面向上述地基部分的端部上，安裝摩 擦材，且在上述地基部分之對應上述固定手段的安裝位置 處，設置滑板；而在上述摩擦材和上述滑板之間設有間隙 〇 2 4 .如申請專利範圍第2 3項所述的除震裝置，其 中在上述固定手段上，設置用來調整上述間隙的間隙調整 手段。 . 2 5 .如申請專利範圍第1 8項所述的除震裝置，其 本紙張尺度適用中國國家標準（CNS〉A4規格（210 X 297公釐） (請先Μ讀背面之注意事項再填寫本頁) •SJ· 線 A8B8C8D8 六、申請專利範圍 中在上述除震對象物和上述地基部分之間，設置上下震動 吸收用的減振器。 2 6 .如申請專利範圍第1 8項所述的除震裝置，其 中上述水平方向除震手段爲疊層橡膠。 2 7 .如申請專利範圍第1 8項所述的除震裝置，其 中在上述除震對象物和上述地基部分之間，設置水平震動 吸收用的減振器。. 2 8 .如申請專利範圍第1 8項所述的除震裝置，其 中具備：設置在上述除震對象物和上述地基部分之間，當 上述水平方向除震手段往水平方向變形時，可以滑動自如 地支承在該地基部分上的支承手段。 2 9 .如申請專利範圍第2 8項所述的除震裝置，其 中在上述支承手段之面向上述地基部分的端部上，安裝摩 擦材，且在上述地基部分之對應上述支持手段的安裝位置 處，設置滑板；而在上述摩擦材和上述滑板之間設有間隙 〇 3 0 .如申請專利範圍第2 9項所述的除震裝置，其 中在上述支承手段上，設置用來調整上述間隙的間隙調整 .手段。 (請先閱讀背面之注意事項再填寫本頁) -SJ· :線· 本紙張尺度適用中國國家標準（CNS)A4規格（210 * 297公釐） -38-This paper scale is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) -36- -37- A8 B8 C8 D8 VI. Patent application Horizontal vibration isolation means, located on the above-mentioned seismic isolation objects and the above-mentioned foundation Between the parts, the arrangement and the above-mentioned displacement conversion means are arranged in a straight line, and the free ends are connected to each other. 19. The shock absorbing device according to item 18 of the scope of patent application, wherein the top surface of the above-mentioned foundation portion is formed by applying a non-shrink mortar for level adjustment to a predetermined thickness. 20. The shock absorbing device according to item 18 of the scope of patent application, wherein the elastic support means in the up-down direction is an air spring that can expand and contract freely. .21. The shock absorbing device according to item 20 of the scope of patent application, wherein the air spring is connected to an air box, and air is supplied or discharged from the air box to expand or contract the air spring. 2 2. The shock absorbing device according to item 17 of the scope of the patent application, wherein a jack is provided between the shock absorbing object and the ground part to raise and lower the shock absorbing object. 2 3. The shock absorbing device according to item 17 of the scope of patent application, wherein a friction material is installed on an end of the fixing means facing the foundation portion, and an installation position of the foundation portion corresponding to the fixing means is installed. A sliding plate is provided at the place; and a gap is provided between the friction material and the sliding plate. The shock absorbing device according to item 23 of the patent application scope, wherein the fixing means is provided to adjust the clearance. Means of gap adjustment. 2 5. As for the shock absorption device described in item 18 of the scope of patent application, the paper size of this paper applies to Chinese national standard (CNS> A4 specification (210 X 297 mm)) (Please read the precautions on the back before filling in (This page) • SJ line A8B8C8D8 6. In the scope of the patent application, a shock absorber for up-and-down vibration absorption is set between the above-mentioned shock-absorbing object and the above-mentioned ground part. 2 6. As described in item 18 of the scope of patent application The shock absorbing device of the present invention, wherein the horizontal shock absorbing means is a laminated rubber. 2 7. The shock absorbing device according to item 18 of the scope of patent application, wherein between the shock absorbing object and the foundation portion, Shock absorber for horizontal vibration absorption. 2 8. The shock absorbing device according to item 18 of the scope of patent application, which is provided between the shock absorbing object and the foundation portion, and When the seismic means is deformed in the horizontal direction, the supporting means on the foundation portion can be slidably supported. 29. The vibration isolation device according to item 28 of the patent application scope, wherein the supporting means faces the above On the end of the base part, a friction material is installed, and a slide plate is provided at the installation position of the foundation portion corresponding to the support means; and a gap is provided between the friction material and the slide plate. The shock absorbing device according to item 29, wherein the support means is provided with a clearance adjustment means for adjusting the clearance. (Please read the precautions on the back before filling this page) -SJ:: Line · This Paper size applies to China National Standard (CNS) A4 (210 * 297 mm) -38-