經濟部中央標準局員工消費合作社印繁 A7 B7五、發明説明（1 ) 發明背景 發明領诚 本發明係翮於一種液體輸送裝置，其係用Μ輸送一種 特定之化學溶液，諸如半導體裝置製程上所使用之一種防 護溶液、晶圓保護溶液或類似溶液，Μ及關於一種用Μ控 制此一液體輸送裝置之方法，Κ及關於一種用Μ輸送此一 特定化學溶液之液體輸送泵。 先前持術夕說明 一種普遍習知之用Μ輸送特定化學溶液之液體輸送裝 置，係包含一正向位移活塞配置在液體輸送管路中，其中 之液體輸送管路係相互連接至一液體供應源Κ及一液體消 耗場，用以在一預定之壓力下輸送該化學溶液。 此液體輸送裝置具有一入口閥，其係配置在液體輸送 管路之注入管，其中此注入管係連接至正向位移活塞泵之 注入口，Μ及一排放閥，其係配置在液體輸送管路之排放 管，其中此排放管係連接至正向位移活塞泵之排放口，此 注入及排放閥係用Μ防止化學溶液回流至正向位移活塞泵 。此液體輸送裝置係需要具有一節流閥，用Μ調節化學溶 液之流動速率。 另一種廣泛使用在此技藝中之液體輸送裝置，係一種 同軸泵，其包含一泵及一電動機之一體式組件，而可Μ簡 易地安裝在一液體輸送管路中。此同軸泵具有一主動軸桿 ,其係可藉由電動機而以一推進器來加Κ轉動，此主動軸 桿係藉由滾動軸承及滑動軸承而加Μ支撐成為可旋轉。 (請λ-,閲讀背面之注意事項再填寫本頁) 裝. 訂 115 1--1.11:=-^11 _- 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ 297公釐） 1 3 9 48 5 A7 B7 五、發明説明（2 ) 此正向位移活塞泵向來所具有之缺點係在於，其管路 糸統係相當地複雜，這是因為閥門係配置在液體輸送管路 中。若欲輸送之化學溶液係包含一溶劑，則當正向位移活 塞泵在已輸送一定量之化學溶液後而加Μ關閉時，則殘留 在排放管內之化學溶液便會在排放管之排放口處暴露於空 氣，而使溶劑會被蒸發至開口空間内。因此，該化學溶液 便會在排放管之排放口處凝固，因而阻塞排放管。 經濟部中央標準局員工消費合作社印製 (請先閱讀背面之注意事項再填寫本頁) 使用於同軸泵之滾動軸承及滑動軸承，會由於在滾動 及滑動軸承之滑動構件之間的磨擦接觸，而產生细小微粒 。若此同軸泵使用於製造半導體裝置時，則由滾動及滑動 軸承所產生之此類细小微粒，將會污染由此同軸泉所輸送 之化學溶液，因而造成半導體晶圓在品質上大打折扣。在 同軸泵之運轉期間，該化學溶液會自行流入小鏠隙中，而 其中這些小縫隙係在此同軸泵由不同零件組裝時所產生。 殘留在這些小缝隙內之化學溶液係會隨著時間而傾向於退 化及造成污染，因而大大地破壊半導體晶圓之品質。沉積 在鏠隙中之化學溶液會固化而附著在泵之零件上，造成此 同軸泵在維修保養上之困難。 搿明摘要 因此本發明之目的係要提供一種液體輸送裝置，其在 结構上係相當簡單，且可有效地減少所輸送之液體在液體 輸送管路上所形成之沉積物，且可有效地防止微粒之產生 ,Μ及其結構係設計成可Μ消除停滞及靜滯液體區域。 本發明之另一目的係提供一種用以控制此一液體輸送 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） 2 3 9 48 5 A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明（ 3 ) :丨. 1 裝 置 之 方 法 0 1 | 本 發 明 之 又 一 巨 的 係 提 供 一 種 可 使 用 在 此 一 液 體 輸 送 1 I 裝 置 中 之 液 體 輸 送 泵 〇 1 依 照 本 發 明 之 一 種 樣 態 9 其 係 提 供 種 液 體 輸 送 裝 置 先:， 閱 1 1 9 其 係 使 用 於 液 體 輸 送 管 路 中 用 Μ 輸 送 液 體 〇 此 液 體 WaL 輸 送 背 1¾ 之 注 意 事 1 1 裝 置 包 含 一 螺 旋 泵 t 此 螺 旋 泵 包 括 一 具 有 注 入 口 及 排 放 P 之 外 殻 Μ 及 一 可 轉 動 地 安 裝 在 外 殻 內 之 泵 轉 子 9 且 具 有 項 再. 填 1 U 與 該 注 入 口 及 排 放 □ 相 連 通 之 螺 紋 * Μ 及 一 可 反 轉 可 寫 本 頁 裝 | 控 制 速 度 之 電 動 機 t 其 係 安 裝 在 外 殼 中 而 用 Μ 轉 動 泵 轉 子 、 1 I > Μ 將 液 體 由 該 注 入 P 通 過 螺 紋 而 輸 送 至 排 放 α Ο 藉 由 1 1 I 控 制 螺 旋 泵 之 Μ TO 動 速 度 及 轉 動 方 向 » 在 一 定 量 之 液 體 已 由 1 1 注 入 0 輸 送 至 排 放 口 之 後 » 便 可 將 液 體 由 m 放 Ρ 吸 回 至 注 " 訂 1 入 D 〇 如 此 便 可 避 免 液 體 /3X& 餘 留 在 排 放 α 或 泵 體 内 部 Ο 再 者 1 1 $ 藉 由 螺 旋 泵 本 身 即 可 阻 斷 液 體 之 流 動 > 而 不 爾 要 使 用 防 1 1 逆 閥 〇 ( i、 該 可 反 轉 可 控 制 速 度 之 電 動 機 係 由 一 直 流 無 刷 電 動 1 1 4itk m 所 構 成 t 且 該 泵 轉 子 係 藉 由 可 做 為 潤 滑 劑 之 液 體 而 在 1 1 I 一 -ftnr m 軸 承 環 境 中 被 可 轉 動 地 支 撐 0 此 直 流 無 刷 電 動 機 可 使 1 1 1 得 泵 轉 子 之 轉 動 能 夠 輕 易 地 受 到 控 制 〇 由 於 泵 轉 子 係 由 液 1 體 AJX& 將 其 可 轉 動 地 支 撐 而 不 需 要 使 用 軸 承 » 因 此 液 體 便 可 免 1 於 受 到 潤 滑 劑 或 细 小 微 粒 之 污 染 * 否 則 在 其 他 情 況 下 » 這 1 1 種 污 染 係 會 由 於 在 滑 動 表 面 之 間 的 磨 擦 接 觸 1 而 產 生 〇 1 I 依 照 本 發 明 之 另 一 樣 態 9 其 係 提 供 一 種 控 制 液 體 輸 送 1 I 裝 置 之 方 法 9 其 中 該 液 體 輸 送 裝 置 包 括 一 外 殻 $ 此 外 殻 具 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 3 3 9 48 5 經濟部中央標隼局員工消費合作社印掣 一具可泵此 b管 e 轉通放免 泵及之功口上 轉嫘制閥 及且 、該。1S入 泉 口排避 該以度之放構 而 、控一 Μ ,轉動口 Μ 注 U 該放由而 動紋速門排结 ，口可同 ，子反轉放 該;>動排係進 轉螺制閥及在 機入、如 度 口轉可Μ排gfl由中轉該體， 而 、控一 Μ 置 動注轉有 放泵一用至1¾體管機由液中 ，口可同紋裝 電過反具 排之及 ，送 Η 液放動 ，於管 機入 、如螺送 之通可泵 及動Μ中輸If之排電體由放 動注轉有 、輸 度管該旋 口轉 ，殻而 量至之液 。排 電過反具口體 速入 ，螺 入可紋外紋 — 定送度量中在 之通可泵入液 。制注後該 辱 注：螺該螺Rf一輸速定管留。度管該旋注之閥控該之使 之內之在過1M將而制一入餘管速入，螺過制止可由中而 管殻通裝通¾而口 控之注會放制注後該通控閉、體管 ， 放外連安口 一 子放可中該不排控該之使管受用轉液放制 劫 排在相係入¾¾轉排 、管至便 塞可由中而入 此 使反 之排控 及裝 口其注:6fe泵及轉放回體阻 、體管 ，注如要可量至M 管安放 ，該為該以反排吸液而轉液放制該 。需該定送加 入一排機由驟動紋可該而此化反之排控由中不動預輸可 丨注括及動體步轉螺該在 口因固可量至M體管而啟將而便 β 至包口 電液之 Μ 、制留入 ，中該定送加液放 -在 Μ 口機 ί接其入 之將含 ，口 控餘注 回管動預輸可止排單 ，子放動 1連 ，注度 Μ 包驟入 ，將及吸放啟將而便阻至簡 者轉 '排電 Μ別泵該速 ，所步注後而紋被，排在Μ口機 Μ 入當或泵及之 分旋與制子法之過之 ，螺中在 子放動，流相 該 Μ 度 有螺有控轉方機通此子過管其 轉排電能而便 動紋速 五 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Λ4規格（210Χ297公釐） 4 39 485 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（5 ) 門之功能，Μ調節液體由該注入管通過注入口、螺紋Μ及 排放口而流入至排放管中之速率。如此受控制之液體輸送 裝置在結構上便相當簡單，而不需要使用節流閥。 依照本發明之另一樣態，其係提供一種用Μ輸送液體 之螺旋泵，其包含一外殻，此外殻具有注入口及排放口； 一泵定子，其係安裝在該外殻内；一泵轉子，其係可轉動 地安裝在該泵定子內，且具有形成於其周緣表面而可與該 注入口及排放口相連通之螺紋；一電動機，其係用以轉動 該泵轉子，以將液體由該注入口通過該螺紋而輸送至排放 口，該電動機具有一配置在泵轉子内之電動機轉子，以及 一配置成可環繞該泵轉子之電動機定子；複數個徑向磁性 軸承，而該具有各自相對末端之泵轉子係由該等徑向磁性 軸承加Μ可轉動地支撐；Κ及至少一軸向磁性軸承，而該 泵轉子之至少一相對末端係由該至少一軸向磁性軸承加Μ 可轉動地支撐。由於泉轉子係磁性地懸浮而未與周圍之零 件接觸，因此該泵轉子便可穩定地轉動而不會產生细小微 粒，否則在其他情況下，由於在固定及轉動零件之間的接 觸而產生之细小微粒，係會污染該液體。 該泵定子及泵轉子所用Μ與液體接觸之表面，係由防 水性材料所製成或加Μ包覆之。此防水性材料製成或加以 包覆之表面，係可以抗拒被輸送之液體，且可防止液體殘 留在泉轉子及泵定子之間的縫隙中。此防水性材料係可使 得表面具有化學穩定性，而可Μ抵抗液體之侵蝕，而其中 之液體通常係一種化學溶液。 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ 297公釐) 5 3948 5 (請先閱讀背面之注意事項再填寫本頁)Employees' Cooperatives of the Central Bureau of Standards, Ministry of Economic Affairs, Consumer Cooperatives, A7, B7 V. Description of the Invention (1) Background of the Invention The invention is based on a liquid transport device that uses M to transport a specific chemical solution, such as a semiconductor device process. A protective solution, a wafer protection solution or the like used, M, and a method for controlling the liquid transport device using M, and K, and a liquid pump for transporting the specific chemical solution by M. Previously, a conventional liquid conveying device for conveying a specific chemical solution using M was described, which includes a forward displacement piston arranged in a liquid conveying pipeline, wherein the liquid conveying pipelines are mutually connected to a liquid supply source K And a liquid consumption field for conveying the chemical solution under a predetermined pressure. The liquid conveying device has an inlet valve, which is an injection pipe arranged in a liquid conveying pipeline, wherein the injection pipe is connected to an injection port of a forward displacement piston pump, and a discharge valve, which is arranged in a liquid conveying pipe. The discharge pipe of the road, wherein the discharge pipe is connected to the discharge port of the positive displacement piston pump, and the injection and discharge valve is used to prevent the chemical solution from flowing back to the positive displacement piston pump. This liquid conveying device is required to have a throttle valve, and the flow rate of the chemical solution is adjusted by M. Another type of liquid conveying device widely used in this technology is a coaxial pump, which includes a pump and a motor, and can be easily installed in a liquid conveying pipeline. This coaxial pump has an active shaft which can be rotated by a motor and a thruster by K. The active shaft is supported by a rolling bearing and a sliding bearing to be rotatable. (Please λ-, read the precautions on the back and fill in this page again) Binding. Order 115 1--1.11: =-^ 11 _- This paper size applies to China National Standard (CNS) Α4 size (210 × 297 mm) 1 3 9 48 5 A7 B7 V. Description of the invention (2) The disadvantage of this positive displacement piston pump is that its pipeline system is quite complicated, because the valve is arranged in the liquid conveying pipeline. If the chemical solution to be conveyed contains a solvent, when the positive displacement piston pump is turned off after adding a certain amount of chemical solution, the chemical solution remaining in the discharge pipe will be at the discharge port of the discharge pipe. Exposed to air, the solvent will be evaporated into the open space. Therefore, the chemical solution solidifies at the discharge port of the discharge pipe, thereby blocking the discharge pipe. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). Rolling bearings and plain bearings used in coaxial pumps may be caused by frictional contact between the sliding members of the rolling and plain bearings. Produces fine particles. If this coaxial pump is used in the manufacture of semiconductor devices, such fine particles generated by rolling and sliding bearings will contaminate the chemical solution transported by this coaxial spring, resulting in a significant reduction in the quality of semiconductor wafers. During the operation of the coaxial pump, the chemical solution will flow into small gaps by itself, and these small gaps are generated when the coaxial pump is assembled from different parts. The chemical solution remaining in these small gaps tends to degenerate and cause contamination over time, thus greatly deteriorating the quality of the semiconductor wafer. The chemical solution deposited in the gap will solidify and adhere to the parts of the pump, which makes the coaxial pump difficult to maintain.搿 明 Abstract Therefore, the object of the present invention is to provide a liquid conveying device, which is quite simple in structure, can effectively reduce the deposits formed by the liquid being conveyed on the liquid conveying pipeline, and can effectively prevent particles As a result, M and its structure are designed to eliminate stagnant and stagnant liquid regions. Another object of the present invention is to provide a paper used to control the transport of this paper. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 × 297 mm) 2 3 9 48 5 A7 B7 printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs V. Description of the invention (3): 丨. 1 Device method 0 1 | Another huge aspect of the present invention is to provide a liquid delivery pump which can be used in this liquid delivery 1 I device. State 9 It provides a kind of liquid conveying device. First, see 1 1 9 It is used in the liquid conveying pipeline to convey liquid with M. This liquid WaL conveys the back 1 ¾ Note 1 1 The device contains a screw pump t this screw pump Including a housing M with an injection port and a discharge P and a pump rotor 9 rotatably mounted in the housing and having a term refill. Fill in 1 U with a thread * Μ communicating with the injection port and the discharge □ and a can Reversible writable page mounted | speed controlled motor t It is installed in the housing and rotates the pump rotor with Μ, 1 I > Μ sends the liquid from this injection P through the thread to the discharge α 〇 by 1 1 I Control the M TO movement speed and rotation direction of the screw pump »After a certain amount of liquid has been injected from 1 1 to 0 and transferred to the discharge port» the liquid can be sucked back from m to P to the injection " order 1 into D 〇 so so Can avoid the liquid / 3X & remaining in the discharge α or the inside of the pump body 0 Furthermore 1 1 $ The flow of the liquid can be blocked by the screw pump itself> Instead of using a 1 1 reverse valve 〇 (i, the The reversible speed-controllable electric motor is composed of a DC brushless electric motor 1 1 4itk m and the pump rotor is used in a 1 1 I-ftnr m bearing environment by a liquid that can be used as a lubricant. Rotating ground support 0 This DC brushless The motive can easily control the rotation of the pump rotor. The pump rotor is rotatably supported by the liquid 1 body AJX & without the use of bearings »so the liquid is free from lubricant or Contamination with fine particles * Otherwise in other cases »This 1 1 type of pollution is caused by frictional contact 1 between sliding surfaces. 0 1 I According to another aspect of the invention 9 it provides a controlled liquid delivery 1 I Method 9 of the device, wherein the liquid conveying device includes an outer shell $ 1 outer shell 1 1 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 3 3 9 48 5 Employee Consumer Cooperatives, Central Bureau of Standards, Ministry of Economic Affairs There is a switch that can pump the b-tube, e-switch, pump-free, and turn-up valve on the power port and and that. The 1S entrance to the spring avoids the angle of the structure and controls one M, turning the opening M. Note U The discharge is caused by the moving pattern of the speed gate, the mouth can be the same, the child reverses the release; > The screw valve and the machine inlet, such as the mouth can be turned M row gfl from the body, and the control of a M set injection pump with a pump to 1¾ body tube machine from the liquid, the mouth can be installed with the same pattern When the electricity is passed, the liquid is pumped, and the fluid is pumped into the tube machine, such as a screw pump, and the If is discharged from the discharge body. , Shell and measure to the liquid. Quickly enter the drain through the mouth, screw into the outer grain — the pump can be pumped in the fixed measurement. After making a note, this note: The screw Rf stays in a fixed speed. The control valve of the rotary injection valve should be controlled within 1M to make one into the remaining pipe, and the screw stop can be stopped by the middle and the shell can be installed through the ¾ and the mouth-controlled injection will be placed after the injection. Control the closed, body tube, put the outside and connect to the mouth, put it in the middle, do not control it, make the tube, use the liquid transfer system, and place it in the line ¾ ¾, turn the tube to the stopper, and vice versa Discharge control and loading. Note: 6fe pump and transfer back to body resistance, body tube. Note that if it can be measured to M tube, it should be reversed to aspirate and transfer liquid. If the order is required, a row of machines can be added. The sudden pattern can be reversed. The reverse control can be pre-entered by the motion. Note and moving step screw should be started at the mouth because the solid can be measured to the M body tube. Then β to the mouth of the electro-hydraulic M, the system reserves, the order should be sent to add liquid-put it in the M mouth machine, will be included, the mouth control surplus injection back to the pipeline, pre-input can stop the list, sub put Move 1 for 1 minute, enter the M package suddenly, and stop the suction and release, and then stop until Jane transfers to the 'Exhaust M' pump at the speed. After the injection, the quilt will be placed in the M mouth machine. The rotation of the pump and the rotation of the sub-system are passed, and the snail is moved in the sub-phase, and the phase has a screw-controlled transfer machine that passes through the sub-tube to discharge its electrical energy, and then the speed is 5 (please first Read the notes on the reverse side and fill in this page) This paper size is applicable to Chinese National Standard (CNS) Λ4 specification (210 × 297 mm) 4 39 485 A7 B7 printed by Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of invention (5) Function, M regulates the rate at which liquid flows from the injection pipe into the discharge pipe through the injection port, the thread M, and the discharge port. Such a controlled liquid delivery device is relatively simple in structure and does not require the use of a throttle valve. According to another aspect of the present invention, it provides a screw pump for transporting liquid by using M, which includes a casing, the casing has an injection port and a discharge port; a pump stator, which is installed in the casing; a pump A rotor, which is rotatably installed in the pump stator, and has a thread formed on a peripheral surface thereof, which can communicate with the injection port and the discharge port; an electric motor, which is used to rotate the pump rotor to transfer liquid From the injection port to the discharge port through the thread, the motor has a motor rotor arranged in a pump rotor, and a motor stator arranged to surround the pump rotor; a plurality of radial magnetic bearings, each having a respective The opposite end of the pump rotor is rotatably supported by the radial magnetic bearings plus M; K and at least one axial magnetic bearing, and at least one opposite end of the pump rotor is by the at least one axial magnetic bearing plus M can Rotatingly supported. Because the spring rotor is magnetically suspended without contacting the surrounding parts, the pump rotor can be stably rotated without generating fine particles, otherwise it is generated due to contact between fixed and rotating parts in other cases Fine particles can contaminate the liquid. The surfaces of the pump stator and the pump rotor that are in contact with the liquid are made of or coated with a water-repellent material. The surface made of or coated with this waterproof material is resistant to the liquid being transported, and prevents liquid from remaining in the gap between the spring rotor and the pump stator. This water-repellent material makes the surface chemically stable and resists the attack of liquids, which are usually a chemical solution. This paper size applies to Chinese National Standard (CNS) Α4 specification (210 × 297 mm) 5 3948 5 (Please read the precautions on the back before filling this page)
A7 __B7 五、發明説明（6 ) 該注入口、由該螺紋所形成之液體通道、以及該排放 口係大致排列成直線狀。注入口、由該螺紋所形成之液體 通道、以及該排放口之大致直線狀的排列，係可Μ有效地 消除在螺旋泵中之停滯及靜滯液體區域。 該螺旋泵進一步包含一對導引構件，其係分別配置在 該注入口及排放口，每一導引構件係具有大致圼角錐之形 狀，其包括一面向外側之球狀頭部，Μ及具有逐漸徑向朝 外擴張之近端。該導引構件係在注入口及排放口中形成液 體通道，而此通道係平順地融入於由該螺紋所形成之液體 通道中。Μ此設計，液體便可由注入口平順地輸送至排放 口，而不會在注入口及排放口之間產生停滯及靜滯液體區 域。 該注入口及排放口相對於該泵轉子，在结構上係圼對 稱的，Μ使液體可Μ輕易地沿一方向或另一方向而輸送通 過該螺旋泵。 經濟部中央標準局員工消費合作社印製 (請先閲讀背面之注意事項再填寫本頁) 本發明之上述及其他目的、特徵及優點，將可由Μ下 之說明並配合所附之圖式而得到更深入之瞭解，其中圖示 之本發明較佳實施例僅係做為示例性之例子。 _忒夕簡塑說明 第1圖係一片段截面圖，其中顯示依照本發明第一實 施例而做為液體輸送裝置之螺旋泵； 第2圖係一截面圖，其中顯示依照本發明；第二實施例 而做為液體輸送裝置之螺旋泵； 第3圖係一截面圖，其中顯示圖2所示之螺旋泵的一種 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） 6 3 9 4 8 5 A7 B7 五、發明説明（7 ) 修飾變化； 第4圖係一截面圖，其中顯示依照本發明第三實施例 而做為液體輸送裝置之螺旋泵；以及 第5圖係一截面圖，其中顯示圖4所示之螺旋泵的一種 修飾變化。 較佳置施例_之詳_ ..细說_朋 如第1圖所示，一依照本發明第一實施例而做為液體 輸送裝置之螺旋泵2,係Μ串連之方式配置在液體輸送管 路1上，而此液體輸送管路則係相互連接至一液體供應源 Μ及一液體消耗場。此螺旋泵2具有一注入口 2a,其係連 接至液體輸送管路1之注入管3, Μ及一排放口 2b,其係連 接至液.體輸送管路1之排放管4。此螺旋泵2具有一轉動中 央軸，其係對齊且鄰接至注入及排放管3、4之中央軸。 經濟部中央標準局員工消費合作社印繁 (讀先閱讀背面之注意事項再填寫本頁) 此螺旋泵2基本上係包含一外殻10、一被包圍在外殻 10内且具有一圓筒狀罐體11a之泵定子11、K及一圓筒狀 之泵轉子12,此泵轉子12係可旋轉式地配置在罐體11a内 ，且在其周緣表面上係形成有螺紋12a。外骰10包括一體 式之圓筒狀軸柄l〇a,此軸柄10a之軸線係與注入及排放口 2a、2b之中央軸成一直線。此外殻10亦具有穿孔l〇b,其 係形成於軸柄l〇a之其中一端的附近。泵轉子12係配置成 可繞著軸柄l〇a而轉動，且罐體11a則係配置成可繞著泉 轉子12而轉動。 ^ 當泵轉子12繞著其自己之軸線而沿著一個方向轉動時 ，由注入管3經由注入口 2a而被抽取出來之液體，便會流 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 7 3 948 5 A7 B7 五、發明説明（8 ) 過穿孔l〇b,且接著流經在軸柄l〇a與定子罐體lla之間沿 著螺紋12a所形成之縫隙13,而在此期間，該液體便會由 螺紋12a壓縮至一預定之壓力。之後，此液體便由排放口 2b而釋放至排放管4。 此螺旋泵2亦具有一可反轉、可控制速度之直流無刷 電動機20,其係用Μ轉動泵轉子12。此直流無刷電動機20 包含一其型式為磁石埋入於泵轉子12中之電動機轉子21, Μ及一安裝在泵定子11中且環繞罐體11a之周緣Κ轉動電 動機轉子21之電動機定子22。 經濟部中央標準局員工消費合作社印^ (請先閲讀背面之注意事項再填寫本頁) 由於泵轉子12係藉由直流無刷電動機20來加Μ轉動之 ，因此泉轉子12之轉動方向及轉動速度便可輕易地由電動 機驅動.器（未顯示）來加Μ控制，其中此電動機驅動器係可 供應電流至電動機定子22之線圈。泵轉子12係在一無軸承 環境中藉由流經縫隙13之液體來加Μ支撐。流經縫隙13之 液體亦可做為繞著泵轉子12而流動之潤滑劑。因此，由螺 旋泵2所輸送之液體便可免於受到潤滑劑之污染，而其中 該潤滑劑在其他情況中係必須分開地加入至螺旋泵2中。 一種控制此螺旋泵2之方法將在Μ下加Μ說明。 為了使液體能在一預定壓力下由螺旋泵2之排放口 2b 加K輸送之，該泵轉子12係K 一預定之轉動速度而沿著一 方向來加Μ轉動，亦即，沿著可使螺紋12aK —種螺旋狀 流動模式將液體由注入口 2a輸送至排放口 2b；i方向。在所 需要之液體數量已由螺旋泵2所輸送之後，該泵轉子12便 會反轉其方向，亦即，K相反之方向轉動，或者係以降低 本紙張尺度適用中國國家標準（CNS ) Λ4規格（210X 297公楚) 8 39485 發 '五 至 吸 回 13 Ann 液 之 中 4 管 放 5 在 留 餘 將 K τηη v轉 y 來 ί度 明速 說動 明轉 之 ο 3 管 入 注 注子 在轉 於泵 由 則 擭 AM , 液時 若流管 , 回 放 時法排 動無在 轉而留 止差餘 停力將 已壓 Μ 2 ] 1 的 ， 子間動 轉之轉 泉 2 向 當 、方 a , « 2 之 之口反 言 放相 kh. /\ 詩？R>J 及便 人12 回 禮 80S 液 之 中 4 地 反 相 子 轉 泵 當 3 2 ο 放 «W 及 入 注 30在 管於 入由 注力 至壓 吸體 液 若 時 轉 止 停 已 足 到 大 而 差 力 壓 的 間 之 以 低 降 要 需 度 速 轉 之 2 11 子 轉 泵 則 ο 3 管 入 注 至 吸 回 攢 液 之 中 , 4 時管 流放 回排 體在 液留 使餘 M將 注 排二了 ®學罾 回 b 阻 被_-ί而 、 之 係 固 體@凝 液 g 處 之 f 口 容 中II放 4 當 _ 3¾ 管相 之 放種 4 排一管 在係放 留體排 餘液在 為該免 因當避 至可 甚 便 3 管 入 , 體 中液 此 因 0 4 管 放 回 被 而 2 1* 子 轉 泉 轉 反 由 藉 禮 JVC 液 之 中 4 管 放 bh 3® 在 留 餘 當 定 一 至 低 降 會 fic 0 度 Ms a 一 轉 之 2 1 子 轉 泉 後 之 3 管 入 注 至 吸 管 放 bh. 0 在 留 餘 當 ο 力 壓 之 中 a 2 Π 入 注 在 合 配 可 而 度 程 之 入 注 至 吸 回 被 而 度 遴 動 轉 之 2 11 子 轉 泵 低 降 由 藉 TM* 體 液 之 中 4 回 之 體 液 止 阻 M 加 增 會 度 AV| »^¥«y ΠΒΠ 轉 之 2 11 子 轉 泵 後 之 3 (請先閲請背面之注意事項再填寫本頁) ,裝· 經濟部中央標準局員工消費合作社印製 之 體 液 止 中 M 用 可 HJ P 閥 一 如 猶 能 功 之 此 如 2 泵 旋 螺 0 流 率 遵 動 流 之 擭 液 節 raw 係 者 或 送 輸 要 需 不 而 πηη 流 之 Η am 液 制 控 可 BC 身 本 2 泵 旋 螺 此 因 第 照 依 此 因 ο 閥 流 節 及 Μ 閥 制 控 關 開 ' 閥 逆 防 用 使 置 裝 送 輸 攪 液 之 例第 施 實 示 顯 圖 2 泵 旋 螺 之 置 裝 單 簡 埤 當 相. 係 上 構 结 在 其 送 輸 禮 液 為 做 而 例 施 實 二 第 明 發 本 照 依 殻 外 對 1 含 包 ο 3 泉 旋 螺 此 示 所 2 圖 如 本紙張尺度適用中國國家標準（CNS ) A4規格（210Χ 297公釐） 9 3 9 48 5 Μ Β7 五、發明説明（1Q) 31, 其分別具有一注入口 30aM及一排放口 30b，該注入口 30a及排放口 30b係分別連接至類似於如圖1所示之注入及 排放管3、4之注入管及排放管。此螺旋泵30具有一泵定子 32, 其係配置且固定在外殻31上，K及一泵轉子（主動軸 桿）33,其係可轉動地配置在泵定子32中。 泵轉子33*本上包含一中央較大直徑構件33a ,以及 一對分別連接至較大直徑構件33a之軸向相對兩端的軸稈 33b、33c。該中央較大直徑構件33a在其外緣表面上係形 成有螺紋33d。一薄的內部圓筒34係K 一種包圍該中央較 大直徑構件33a之關係而配置且牢固在外殻31上。 經濟部中央標率局員工消t合作社印製 (諳先閱讀背面之注意事項再填寫本頁) 螺旋泵30具有一可反轉、可控制速度之直流無刷電動 機35,其係用Μ轉動泵轉子33。此直流無刷電動機35係包 含一其型式為磁石埋入於中央較大直徑構件33a中之電動 機轉子36, Μ及一安裝在泉定子32中，且包含環內部圓筒 34之周緣而隔開之電磁石以轉動電動機轉子36之電磁石組 件37。當泵轉子33由直流無刷電動機35加Μ轉動時，該螺 紋33d便隨著轉動，而將液體，諸如化學溶液，加Μ輸送 ,使其由注入口 30a流經在内部圓筒34與泵轉子33之較大 直徑構件33a之間沿著螺紋33a所形成之縫隙13。 螺旋泵30之主要零件係由防水性材料所製成，諸如螢 光塑膠。在螺旋泵30將與位在可動及固定零件之間的鏠隙 中之液體相接觸的至少那些部位上，係須由輦光塑膠或者 係包镘有螢光塑膠之材料所製成，而因此在其表面上便不 會有暴露出來之金鼷或類似材料。 本紙張尺度適用中國國家標率（CNS ) A4規格（210X297公釐) Γ0 3948 5 A7 B7 五、發明説明（11) 安裝在各自之外殻31中之徑向磁性軸承40、41,係各 自具有分別固定至軸桿33b、 33c之轉子磁極40a、41a, 且亦各自具有固定至外殻31且其部分係與轉子磁極40a、 41a成徑向相對之定子磁極40b、41b。轉子磁極40a、 41a 及定子磁極40b、41b係分別由永久磁石所構成。彼此徑向 相對之轉子磁槿40a、41a及定子磁極40b、41b,係具有相 同之極性而產生互斥力，Μ支撐泵轉子33使其不與外殻31 相接觸。轉子磁極40a、41a及定子磁極40b、41b係具有Μ 螢光塑膠加以包覆之表面，而可Μ排拒由螺旋泵30所輸送 之化學溶液，並且可保持其本身相對於化學溶液之化學穩 定性。 經濟部中央標準局員工消費合作社印製 (讀先閲讀背面之注意事項再填寫本頁) 一可控制之軸向磁性軸承44係安裝在其中一外殻31上 ，其係鄰接於徑向磁性軸承41。軸向磁性軸承44係具有一 標的圓盤44a及一對電磁石44b、44c。該標的圓盤44a係配 置成軸向相對於電磁石44b、44c之相對表面。一軸向感應 器45係配置成與標的圓盤44a之外側表面形成軸向相對之 關係。該標的圓盤44a與電磁石44b、44c係具有Μ螢光塑 膠加以包覆之表面，Μ使其相對於化學溶液而能具有化學 穩定性。 作用在泵轉子33上之徑向作用力係由徑向磁性軸承40 、41所產生，而作用在泵轉子33上之軸向推進力則係由軸 向磁性軸承44所產生，用Μ藉此使泵轉子33昇有磁性懸浮 之狀態，而不會與周圍的固定零件相接觸，這些固定零件 包括内部圓筒34及外殻31。 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐) Π 39485 經濟部中央標準局負工消費合作社印^ A7 B7 五、發明説明（1 2 ) 由於泵轉子33係藉由徑向磁性軸承40、41及軸向磁性 軸承44而磁性地懸浮，因而未與周圍固定零件相接觸，因 此該泵轉子33便可穩定地轉動而不會產生细小微粒，否則 在其他情況下將會產生之细小微粒係會污染由螺旋泵30所 輸送之液體或化學溶液。由於固定地與液體相接觸之零件 的表面，係由螢光塑膠或包覆有螢光塑膠之材料所製成， 因此這些表面係可抗拒化學溶液，且由於其可抵抗化學溶 液之侵蝕，因此具有化學穩定性。 依照第二實施例之嫘旋泵30,係Μ相同於該用K控制 圖1所示之螺旋泵2的方式來加Μ控制，使其可不需要使用 防逆閥、開關控制閥及節流閥即可控制液體之流動。 第.3圖顯示圖2所示之螺旋泵30的一種修飾變化。第3 圖所示之相同於圖2的那些零件係Μ相同之參考標號來加 以標示。圖3所示之經過修飾的螺旋泵30,其與圖2所示之 螺旋泵30的相異處，係在於泵轉子33之較大直徑構件33a 在其各別的軸向相對末端處係形成有凹部46,且徑向磁性 軸承40、41係分別配置在凹部46中。罐體34,其係較圖3 所示之罐體34遨薄，係與泵定子32 —體成型，且注入口 30a 、由螺紋桿33d所界定之液體通道、以及排放口 30b 係大致排列成直線狀。圖3所示之經過修飾的螺旋泵30係 相當地小且密實，且在其中亦可具有較少之停滞及靜滞液 體區域。 '' 第4圖顯示一依照本發明第三實施例而做為液體輸送 裝置之螺旋泵50。此螺旋泵50包含一對外殻51,其分別具 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 12 39485 (請先閲讀背面之注意事項再填寫本頁)A7 __B7 V. Description of the invention (6) The injection port, the liquid channel formed by the screw thread, and the discharge port are arranged substantially linearly. The substantially linear arrangement of the injection inlet, the liquid passage formed by the thread, and the discharge opening can effectively eliminate the stagnant and stagnant liquid area in the screw pump. The screw pump further includes a pair of guide members, which are respectively arranged at the injection port and the discharge port, and each guide member has a generally pyramidal shape, which includes a spherical head facing outward, and M and a The proximal end that gradually expands radially outward. The guide member forms a liquid passage in the injection port and the discharge port, and the passage is smoothly integrated into the liquid passage formed by the thread. With this design, liquid can be smoothly transferred from the injection port to the discharge port without creating a stagnant and stagnant liquid area between the injection port and the discharge port. The injection port and the discharge port are symmetrical in structure with respect to the pump rotor, so that the liquid can be easily transported through the screw pump in one direction or the other. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) The above and other objects, features and advantages of the present invention will be obtained from the description below and in conjunction with the attached drawings For further understanding, the illustrated preferred embodiment of the present invention is merely an exemplary example. _Xi Xi Brief Description of the Figure 1 is a fragmentary cross-sectional view showing a screw pump as a liquid delivery device according to the first embodiment of the present invention; FIG. 2 is a cross-sectional view showing the device according to the present invention; the second The embodiment is used as a screw pump for a liquid conveying device; FIG. 3 is a cross-sectional view showing one of the screw pumps shown in FIG. 2. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 × 297 mm) 6 3 9 4 8 5 A7 B7 V. Description of the invention (7) Modification and variation; FIG. 4 is a cross-sectional view showing a screw pump as a liquid conveying device according to the third embodiment of the present invention; and FIG. 5 is a cross-section Figure, which shows a modification of the screw pump shown in Figure 4. The preferred embodiment _detailed _ .. detailed description _ As shown in Fig. 1, a screw pump 2 as a liquid conveying device according to the first embodiment of the present invention is arranged in series in the M The liquid pipeline 1 is connected to a liquid supply source M and a liquid consumption field. This screw pump 2 has an injection port 2a, which is connected to the injection pipe 3, M, and a discharge port 2b of the liquid delivery pipe 1, which is connected to the discharge pipe 4, which is a liquid delivery pipe 1. This screw pump 2 has a rotating central shaft which is aligned and abuts the central shafts of the injection and discharge pipes 3,4. Yin Fan, a Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (read the precautions on the back before filling this page) This screw pump 2 basically includes a casing 10, a cylindrical tank surrounded by the casing 10 The pump stator 11 and K of 11a and a cylindrical pump rotor 12 are rotatably arranged in the tank body 11a, and threads 12a are formed on the peripheral surface thereof. The outer die 10 includes an integrated cylindrical shaft shank 10a, and the axis of this shaft shank 10a is aligned with the central shafts of the injection and discharge ports 2a, 2b. In addition, the casing 10 also has a perforation 10b, which is formed near one end of the shank 10a. The pump rotor 12 is configured to be rotatable about the shaft shank 10a, and the tank body 11a is configured to be rotatable about the spring rotor 12. ^ When the pump rotor 12 rotates in one direction around its own axis, the liquid extracted by the injection pipe 3 through the injection port 2a will flow through the paper. The paper size applies the Chinese National Standard (CNS) A4 specification ( 210X297 mm) 7 3 948 5 A7 B7 V. Description of the invention (8) Perforation 10b, and then flow through the gap 13 formed along the thread 12a between the shaft shank 10a and the stator tank 11a, During this time, the liquid is compressed by the thread 12a to a predetermined pressure. After that, this liquid is released to the discharge pipe 4 through the discharge port 2b. This screw pump 2 also has a reversible, speed-controllable DC brushless motor 20, which rotates the pump rotor 12 by M. The DC brushless motor 20 includes a motor rotor 21, M, of which the type is magnet embedded in the pump rotor 12, and a motor stator 22 which is installed in the pump stator 11 and rotates the motor rotor 21 around the periphery K of the tank body 11a. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs ^ (Please read the notes on the back before filling this page) Since the pump rotor 12 is rotated by the DC brushless motor 20, the rotation direction and rotation of the spring rotor 12 The speed can be easily controlled by the motor drive (not shown), which is a coil that can supply current to the motor stator 22. The pump rotor 12 is supported in a bearingless environment by a liquid flowing through the gap 13. The liquid flowing through the gap 13 can also be used as a lubricant flowing around the pump rotor 12. Therefore, the liquid conveyed by the screw pump 2 can be prevented from being contaminated by the lubricant, and the lubricant must be added to the screw pump 2 separately in other cases. A method of controlling the screw pump 2 will be described below with M added. In order to enable the liquid to be conveyed by the discharge port 2b of the screw pump 2 and K at a predetermined pressure, the pump rotor 12 is rotated at a predetermined rotation speed by M in one direction, that is, along the Thread 12aK-a spiral flow pattern that transports liquid from the injection port 2a to the discharge port 2b; i direction. After the required amount of liquid has been transported by the screw pump 2, the pump rotor 12 will reverse its direction, that is, K rotates in the opposite direction, or it is to reduce the size of this paper and apply the Chinese National Standard (CNS) Λ4 Specifications (210X 297 Gongchu) 8 39485 Send 'five to suck back 13 Ann liquid 4 tube put 5 in the remainder, turn K τηη v to y to make it clear, say 3, put the note in the When the pump is turned by the pump, AM, if the liquid tube flows, the playback method will not change when the playback is stopped without leaving the differential pressure. The pressure will be pressed M 2] 1, and the sub-rotation will turn to the spring 2 to the side and side. a, «2 of the mouth estoppel kh. / \ poem? R > J and convenience person 12 return 80S liquid in 4 ground phase sub-rotational pumps when 3 2 ο put «W and injection 30 into the tube from injection to pressure to suck the body fluid if it stops turning enough to stop and then The differential pressure is low in order to reduce the speed of the 2 11 sub-rotation pump. 3 The tube is injected and sucked back into the mash. At 4 o'clock, the tube is put back into the drainage body, and the remaining liquid will be injected.二 ®® 学 罾 回 b obstruction _-ί Er, the system solid @ 凝 液 g 的 f in the mouth II put 4 when _ 3¾ tube phase seed 4 rows a tube in the system drain the remaining fluid In order to avoid this cause, 3 tubes can be inserted, and the body fluid is replaced by 0 4 tubes. 2 1 * The child turns to the spring, and 4 tubes are placed in the JVC liquid. Bh 3® is left over. Once set to a low drop, it will be fic 0 degrees Ms a 2 of a turn 3 1 of the sub-springs into the straw into the straw bh. 0 in the remainder when ο the pressure of a 2 Π into the mix The 2nd sub-rotation pump of Cheng Zhi injection to the suction back was lowered by borrowing TM * body fluid Middle 4 times the body fluid stop resistance M will increase the degree of AV | »^ ¥« y ΠΒΠ turn 2 11 after the sub-rotation pump 3 (please read the precautions on the back before filling this page), installed in the center of the Ministry of Economic Affairs The stoppage of body fluids printed by the Consumer Cooperatives of the Standards Bureau. The use of an HJ P valve is as effective as 2 pumps. The screw flow rate is 0. The flow rate is determined by the fluid flow. The raw system or the delivery needs to be more than πηη. Η 之 Η am fluid control can be BC body 2 pump rotary screw according to the reasons and so on ο valve flow section and M valve control closed to open 'the example of the implementation of the valve anti-reverse use to send infusion Shown in Figure 2 is a simple installation of the pump screw. The system is structured to give gifts as an example. The second implementation of the present invention is based on the outside of the shell. This display 2 is shown in the figure. The paper size is applicable to the Chinese National Standard (CNS) A4 (210 × 297 mm) 9 3 9 48 5 Μ B7 V. Description of the invention (1Q) 31, which has an injection port 30aM and an emission Port 30b, the injection port 30a and the discharge port 30b It is connected to the discharge pipe and the like as shown in FIG injection of the injection tube 1 and the discharge pipe 3,4. The screw pump 30 has a pump stator 32, which is arranged and fixed on the casing 31, and K and a pump rotor (active shaft) 33, which are rotatably arranged in the pump stator 32. The pump rotor 33 * originally includes a central large-diameter member 33a, and a pair of shaft stalks 33b, 33c connected to the axially opposite ends of the larger-diameter member 33a, respectively. The central large-diameter member 33a is formed with a thread 33d on its outer edge surface. A thin inner cylinder 34 is arranged in a relation to surround the centrally larger-diameter member 33a and is secured to the casing 31. Printed by the staff of the Central Standards Bureau of the Ministry of Economic Affairs of the cooperative (read the precautions on the back before filling this page). The screw pump 30 has a reversible, speed-controllable DC brushless motor 35, which is a rotary pump Rotor 33. The DC brushless motor 35 includes a motor rotor 36, M of which the type is magnets embedded in the central larger diameter member 33a, and a spring stator 32 which is installed in the spring stator 32 and includes a peripheral edge of a ring inner cylinder 34 to separate them. The electromagnet rotates the electromagnet assembly 37 of the motor rotor 36. When the pump rotor 33 is rotated by the DC brushless motor 35 plus M, the screw thread 33d is rotated to convey liquid, such as a chemical solution, plus M, so that it flows from the injection port 30a through the inner cylinder 34 and the pump. A gap 13 formed between the larger-diameter members 33a of the rotor 33 along the thread 33a. The main parts of the screw pump 30 are made of a waterproof material, such as fluorescent plastic. At least those parts of the screw pump 30 that come into contact with the liquid in the gap between the movable and fixed parts must be made of varnished plastic or a material covered with fluorescent plastic, and therefore There will be no exposed gold tincture or similar material on its surface. This paper scale applies Chinese National Standard (CNS) A4 specification (210X297 mm) Γ0 3948 5 A7 B7 V. Description of the invention (11) Radial magnetic bearings 40, 41 installed in their respective housings 31, each with its own The rotor magnetic poles 40a, 41a are respectively fixed to the shafts 33b, 33c, and each has stator magnetic poles 40b, 41b, which are fixed to the housing 31 and whose parts are radially opposed to the rotor magnetic poles 40a, 41a. The rotor magnetic poles 40a and 41a and the stator magnetic poles 40b and 41b are made of permanent magnets, respectively. The rotor magnets 40a and 41a and the stator poles 40b and 41b, which are radially opposite to each other, have the same polarity and generate mutual repulsive force. The M supports the pump rotor 33 so as not to contact the casing 31. The rotor magnetic poles 40a, 41a and the stator magnetic poles 40b, 41b have a surface coated with M fluorescent plastic, which can reject the chemical solution transported by the screw pump 30 and maintain its own chemical stability relative to the chemical solution. Sex. Printed by the Employees' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (Read the precautions on the back before filling out this page) A controllable axial magnetic bearing 44 is mounted on one of the housings 31, which is adjacent to the radial magnetic bearing 41. The axial magnetic bearing 44 has a standard disc 44a and a pair of electromagnets 44b, 44c. The target disc 44a is configured to face axially opposite surfaces of the electromagnets 44b, 44c. An axial sensor 45 is arranged in an axially opposed relationship with the outer surface of the target disc 44a. The target disc 44a and the electromagnets 44b and 44c have a surface coated with M fluorescent plastic, which makes it chemically stable relative to a chemical solution. The radial force acting on the pump rotor 33 is generated by the radial magnetic bearings 40 and 41, and the axial thrust force acting on the pump rotor 33 is generated by the axial magnetic bearings 44. The pump rotor 33 is lifted in a magnetic suspension state without contacting the surrounding fixed parts, which include an inner cylinder 34 and a casing 31. This paper size applies to Chinese National Standard (CNS) A4 specification (210 × 297 mm) Π 39485 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs ^ A7 B7 V. Description of the invention (1 2) Because the pump rotor 33 is radial magnetic The bearings 40, 41 and the axial magnetic bearing 44 are magnetically suspended, so they are not in contact with the surrounding fixed parts, so the pump rotor 33 can stably rotate without generating fine particles, otherwise it will be generated in other cases. The fine particles may contaminate the liquid or chemical solution delivered by the screw pump 30. Because the surfaces of parts that are in fixed contact with liquid are made of fluorescent plastic or a material covered with fluorescent plastic, these surfaces are resistant to chemical solutions, and because they are resistant to attack by chemical solutions, With chemical stability. According to the rotary pump 30 of the second embodiment, the control method is the same as that of the screw pump 2 shown in FIG. 1 by using K to increase the control, so that it is not necessary to use a check valve, a control valve and a throttle You can control the flow of liquid. FIG. 3 shows a modification of the screw pump 30 shown in FIG. 2. The parts shown in Fig. 3 which are the same as those shown in Fig. 2 are designated by the same reference numerals. The modified screw pump 30 shown in FIG. 3 is different from the screw pump 30 shown in FIG. 2 in that the larger diameter member 33a of the pump rotor 33 is formed at its respective axially opposite ends. There are recessed portions 46, and the radial magnetic bearings 40 and 41 are respectively arranged in the recessed portions 46. The tank body 34 is thinner than the tank body 34 shown in FIG. 3, and is formed integrally with the pump stator 32, and the injection port 30a, the liquid channel defined by the threaded rod 33d, and the discharge port 30b are roughly arranged Straight. The modified screw pump 30 shown in Fig. 3 is relatively small and dense, and also has less stagnation and stagnant liquid regions therein. '' Fig. 4 shows a screw pump 50 as a liquid delivery device according to a third embodiment of the present invention. This screw pump 50 includes a pair of shells 51, each of which has the paper size applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 12 39485 (Please read the precautions on the back before filling this page)
A7 . B7 五、發明説明（13) 有一注入口 50a以及一排放口 50b,該注入口 50a及排放口 50b係分別連接至類似於如圖1所示之注入及排放管3、4之 注入管及排放管。此螺旋泵50具有一泵定子32,其係K串 連方式配置且固定在外殻51之間，Μ及一泵轉子（主動軸 桿）53,其係可轉動地配置在泵定子52中。A7. B7 V. Description of the invention (13) There is an injection port 50a and a discharge port 50b, which are connected to injection pipes similar to the injection and discharge pipes 3 and 4 shown in FIG. 1, respectively. And discharge pipe. This screw pump 50 has a pump stator 32, which is arranged in series K and is fixed between the housings 51, and a pump rotor (active shaft) 53, which is rotatably arranged in the pump stator 52.
一圓筒狀罐體52a係固定至泵定子52之內部周緣表面 上，而在其外部周緣表面上則係形成有螺紋53a,而此螺 紋則係徑向地面對該罐體52a。泵轉子53之外部周緣表面 可Μ由螢光塑膠所製成，且該螺紋53a亦可形成於螢光塑 膠之表面上。或者，泵轉子53之外部周緣表面可Μ包含一 層金屬，而該螺紋53a則可Μ形成於此金屬層中，且將會 與欲輸.送之液體接觸之金屬表面係Μ螢光塑膠加Μ包覆。 依照第三實施例，螺旋泵50之主要零件係由螢光塑膠所製 成，且用以與欲輸送之液體接觸之金屬表面則係以螢光塑 膠加Κ包覆D 經濟部中央標準局負工消費合作社印繁 (讀先間讀背面之注意事項再填寫本頁) 螺旋泵50具有一可反轉、可控制速度之直流無刷電動 機55,其係用以轉動泵轉子53。此直流無刷電動機55係包 含一其型式為磁石埋入於泵轉子53之電動機轉子56, Μ及 包含一安裝在泵定子52中，且包含環繞罐體52a周緣而隔 開之電磁石Μ轉動電動機轉子56之電磁石組件57。當泵轉 子53由直流無刷電動機55加Μ轉動時，該螺紋53a便隨著 轉動，而將液體，諸如化學溶液，加以輸送，使其由注入 口 50a流經在罐體52a與泵轉子53之間沿著螺紋53a所形 成之鏠隙。 本紙張尺度適用中國國家標率（CNS ) A4規格（210X 297公釐） ~ 7777η 13 39485 A7 B7 經濟部中央標準局員工消費合作社印製 五、 發明説明（4 I 安 裝 在 各 白 之 外 殻 51中 之 徑 向 磁 性 軸 承 60 6 1 > 係 各 1 白 具 有 分 別 固 定 在 泵轉子53之 軸 向 相 對 末 端 之 轉 子 磁 極 I 1 6 0 a λ 6 la » 且 各 白 具 有 固 定 在 套 筒 62之 内 部 周 緣 表 面 上 ， 1 | 且 其 部 分 係 與 轉 子 磁 極 60 a、 6 la 成 徑 向 相 對 之 定 子 磁 極 請 Η 1 1 I 60b % 6 lb 9 其 中 該 套 筒62係分 別 牢 固 在 外 殼 5 1上 〇 轉 子 磁 讀 背 1 1 極 60 a、 6 la 及 定 子 磁 極 60b ^ 6 lb 分別由永久磁石所構 之 注 意 事 項 再 1 1 成 f 用 在 磁 性 互 斥 力 之 作 用 下 將 泵 轉 子 53K磁 力 方 式 支 I 撐 在 徑 向 方 向 上 〇 轉 子 磁 極 60 a、 6 1 a 及 定 子 磁 極 60b, 6 lb 矿 % 本 1 ，裝 係 具 有 Μ 螢 光 塑 膠 加 包 覆 之 表 面 > 而 可 Μ 抗 拒 由 螺 旋 泉 頁 1 1 50所 輸 送 之 化 學 溶 液 9 並 且 可 保 持 其 本 身 相 對 於 化 學 溶 液 1 1 之 化 學 m 定 性 〇 1 | 分 別 安 裝 在 外 殼 5 1内 之 軸 向 磁 性 軸 承 64 6 5係分 別 具 訂 I 有 標 的 圓 盤 6 4 a ^ 6 5 a » 其 係 配 置 成 與 徑 向 磁 性 軸 承 60 6 1 1 1 1 同 軸 > Μ 及 分 別 具 有 電 磁 石 6 4 b 及 6 5 b 其 係 配 置 成 與 標 的 1 1 1 圓 盤 64 a、 6 5 a 之 外 側 表 面 成 軸 向 相 對 〇 1 作 用 在 泵 轉 子 53上 之 徑 向 作 用 力 係 由 徑 向 磁 性 軸 承 60 響線 1 61所 產 生 ， 而 作 用 在 泵 轉 子 53上 之 軸 向 推 進 力 則 係 由 軸 1 I 向 磁 性 軸 承 64 、 6 5所 產 生 9 用 Μ 藉 此 使 泵 轉 子 53具有 磁 性 1 I 懸 浮 之 狀 態 ， 而 不 會 與 周 圍 的 固 定 零 件 相 接 觸 > 這 些 固 定 I 1 I 零 件 包 括 罐 鹏 菔 52 a及； +骰5 1 C 1 Γ | 由 於 泵 纏 臀 子 53係 藉 由 徑 向 磁 性 軸 承 6 0 ^ 61及 軸 向 磁 性 1 1 軸 承 64, 65而 磁 性 地 懸 浮 > 因 而 未 與 周 pm 圍 固 定 零 件 相 接 觸 1 1 > 因 此 該 泵 轉 子 5 3便 可 穩 定 地 轉 動 而 不 會 產 生 细 小 微 粒 > 1 1 否 則 在 其 他 情 況 下 將 會 產 生 之 细 小 微 粒 係 會 污 染 由 螺 旋 泵 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 1 4 3948 5 A 7 B7 五、發明説明（15) 50所輸送之液體或化學溶液。 在第三實施例中，軸向磁性軸承64、65係分別由導引 構件66所支撐，而其中之導引構件則係分別配置在注入及 排放口 5〇a、50b,且由支撐脚67將其支撐在外殼51中。大 致圼圓錐狀之導引構件66係分別具有球狀頭部，其係朝外 面向該注入及排放口 50a、50b,且具有逐漸徑向朝外擴張 之近端，而此近端係分別位在靠近磁性軸承60、61之處。 此導引構件66係在注入及排放口 50a、50b中形成軸向直線 狀之液體通道68,此通道68係平順地融入於鏠隙60c,其 中該縫隙60c係由徑向磁性軸承60、61之轉子磁極60a、 61a及定子磁極60b、61b之間，Μ及由螺紋53a所界定之液 體通道.所形成。如前所述，由螺紋53a所界定之液體通道 係由螢光塑膠之表面所界定。由於在注入及排放口 50a、 50 b中之液體通道68係平順地融入鏠隙60c Μ及由螺紋53a 所界定之液體通道，因此在螺旋泵50內部便不會有停滯及 靜滞液體區。 經濟部中央標準局員工消費合作社印裂 (請先閲讀背面之注意事項再填寫本頁) 依照第三實施例之螺旋泵50,其注入及排放口 50a、 50b,相對於軸向配置在注入及排放口 50a、 50b之間的泉 轉子53之大致中央位置，在结構上係呈對稱的。該螺旋泵 50之對稱特性係可使注入及排放口 50a、50b能夠變換其功 能，亦即，當泵轉子53反向轉動時，其可分別做為排放及 注入口。因此，液體或化學溶液在螺旋泉5〇θ之流動方向 ,便可藉由改變泵轉子53之轉動方向而輕易地加Μ改變。 第5圖顯示第4圖所示之螺旋泵50的一種修飾變化。第 本紙張尺度適用中國國家標準（CNS ) Λ4規格（210Χ 297公釐） 15 39485 A 7 B7 五、發明説明（16) 5圖所示之相同於圖4的那些零件係Μ相同之參考標號來加 以標示。圖5所示之經過修飾的螺旋泉50，其與圖4所示之 螺旋泵50的相異處，係在於其軸桿53b、53c係同軸地連接 至泵轉子53之各自的軸向相對末端，且係分別配置在導引 構件66之近端部位。徑向磁性軸承60、61之轉子磁極60a 、61a係分別固定地安裝在軸桿53b、53c之外側周緣表面 ，而徑向磁性軸承60、61之轉子磁極60b、61b則係固定地 安裝在導引構件66之內部周緣表面，而與轉子磁極60a、 61a形成徑向相對之關係。軸向磁性軸承64、65之標的圓 盤64a、65a係安裝在各自軸桿53b、53 c之外側端部，而 軸向磁性軸承64、65之電磁石64b、65b則係配置在導引構 件66中.，而與標的圓盤64a、65a形成徑向相對之關係。 經濟部中央標準局員工消費合作社印製 依照第5圖所示之修飾變化，由螺旋泵50所輸送之液 體，係不會流經在徑向磁性蚰承60、61之轉子磁極60a、 61a及定子磁極60b、61b之間的縫隙，而係直接由注入口 50a流入在罐體52a與泵轉子53之間的縫隙，且接著由該縫 隙直接地流入排放口 50b。圖5所示之經過修飾的螺旋泵50 係相當地精巧密實，且其中具有較少之停滞及靜滯液體區 ,且由於在鏠隙與注入或排放口之間的直接連接，因此能 Μ較高之效率來運轉。 由 ，κ 係者加 件！或料 零。材 要之性 主 覆水。 之 包防蓋 泵Μ之覆 旋加膠Μ 螺或塑加 , 成光料 中製螢材 例所如性 施料諸水 實材 Μ 防 之性 係之 明水件類 說防零此 所之要 Μ 在 膠主係 塑之者 光泵或 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） 39485 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（17) 雖然在所示之實施例中，係Μ直流無刷電動機做為轉 動泵轉子之電動機，然而該泵轉子亦可由一種磁阻型電動 機或一種感應電動機來加Μ轉動之，瑄些電動機可藉由一 反用換流裝置或類似裝置來加Μ控制其速度。 雖然本發明之特定的較佳實施例已經加Κ詳细地顯示 及說明，然而應可瞭解的是，於其中亦可實施各種之變化 及修飾，而不會脫離後附之申請專利範圍。 本紙張尺度適用中國國家標準（CNS ) Α4規格（21〇Χ297公釐） 3948 5 (請先閲讀背面之注意事項再填寫本頁)A cylindrical tank body 52a is fixed to the inner peripheral surface of the pump stator 52, and a thread 53a is formed on the outer peripheral surface thereof, and this thread is radially facing the tank body 52a. The outer peripheral surface of the pump rotor 53 may be made of fluorescent plastic, and the thread 53a may be formed on the surface of the fluorescent plastic. Alternatively, the outer peripheral surface of the pump rotor 53 may include a layer of metal, and the thread 53a may be formed in this metal layer, and the metal surface that will be in contact with the liquid to be conveyed is M fluorescent plastic plus M Wrapped. According to the third embodiment, the main parts of the screw pump 50 are made of fluorescent plastic, and the metal surface used to contact the liquid to be transported is coated with fluorescent plastic and K. Industrial and Consumer Cooperatives India Fan (read the precautions on the back and fill in this page) The screw pump 50 has a reversible, speed-controllable DC brushless motor 55, which is used to rotate the pump rotor 53. The DC brushless motor 55 includes a motor rotor 56, which is a type of magnet embedded in the pump rotor 53, and an electromagnet M rotating motor which is installed in the pump stator 52 and is spaced around the periphery of the tank 52a. The magnet assembly 57 of the rotor 56. When the pump rotor 53 is rotated by the DC brushless motor 55 plus M, the thread 53a is rotated to transport liquid, such as a chemical solution, so that it flows from the injection port 50a through the tank 52a and the pump rotor 53. The gap formed along the thread 53a. This paper size applies to China's National Standards (CNS) A4 specifications (210X 297 mm) ~ 7777η 13 39485 A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (4 I installed in each white shell 51 The radial magnetic bearing 60 6 1 in the series has rotor poles I 1 6 0 a λ 6 la each fixed at the axially opposite ends of the pump rotor 53, and each has a fixed inside the sleeve 62. On the peripheral surface, 1 | and its parts are the stator poles that are radially opposite to the rotor poles 60 a and 6 la. Please Η 1 1 I 60b% 6 lb 9 where the sleeves 62 are fixed on the housing 5 1 respectively. Magnetic read back 1 1 poles 60 a, 6 la and stator poles 60 b ^ 6 lb are made of permanent magnets. Note 1 1 and f are used to support the 53K magnetic force of the pump rotor I under the effect of magnetic repulsion. 〇Rotor magnetic poles 60 a, 6 1 a and stator magnetic poles 60 b, 6 lb 1. The device has a surface coated with fluorescein plastic and it can resist the chemical solution 9 delivered by the spiral spring sheet 1 1 50 and can maintain its own qualitative chemistry with respect to the chemical solution 1 1 | Axial magnetic bearings 64 6 5 respectively installed in the housing 5 1 are individually ordered I labeled discs 6 4 a ^ 6 5 a »They are configured to be coaxial with the radial magnetic bearings 60 6 1 1 1 1 & gt Μ and the electromagnets 6 4 b and 6 5 b respectively, which are arranged to be axially opposed to the outer surfaces of the target 1 1 1 discs 64 a, 6 5 a, and the radial force acting on the pump rotor 53 It is generated by the radial magnetic bearing 60 ring line 1 61, and the axial propulsion force acting on the pump rotor 53 is generated by the shaft 1 I to the magnetic bearings 64, 6 5. The pump rotor 53 is thereby used by M It has magnetic 1 I suspension state, and will not be connected with the surrounding Contact with fixed parts > These fixed I 1 I parts include tank peng 52 a and; + dice 5 1 C 1 Γ | Because the pump is wrapped around the buttocks 53 by radial magnetic bearings 6 0 ^ 61 and axial magnetic 1 1 Bearings 64, 65 are magnetically suspended > so they are not in contact with the surrounding fixed parts 1 1 > Therefore, the pump rotor 5 3 can stably rotate without generating fine particles > 1 1 otherwise in other cases The fine particles that will be generated below will be contaminated by the screw pump. 1 1 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 1 4 3948 5 A 7 B7 V. Description of the invention (15) 50 Liquid or chemical solution. In the third embodiment, the axial magnetic bearings 64 and 65 are supported by guide members 66, respectively, and the guide members are disposed at the injection and discharge ports 50a and 50b, respectively, and are supported by the support legs 67. It is supported in the casing 51. The roughly conical guide members 66 each have a spherical head, which is directed outward toward the injection and discharge ports 50a, 50b, and has a proximal end that gradually expands radially outward, and the proximal ends are respectively located Near the magnetic bearings 60, 61. This guide member 66 forms an axial linear liquid passage 68 in the injection and discharge ports 50a and 50b. This passage 68 is smoothly integrated into the gap 60c. The gap 60c is supported by the radial magnetic bearings 60 and 61. Between the rotor magnetic poles 60a, 61a and the stator magnetic poles 60b, 61b, M and a liquid channel defined by the thread 53a are formed. As mentioned earlier, the liquid channel defined by the thread 53a is defined by the surface of the fluorescent plastic. Since the liquid passage 68 in the injection and discharge ports 50a and 50b smoothly fits into the gap 60cM and the liquid passage defined by the thread 53a, there will be no stagnant and stagnant liquid area inside the screw pump 50. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). According to the third embodiment of the screw pump 50, the injection and discharge ports 50a and 50b are arranged in the injection and The approximately central position of the spring rotor 53 between the discharge ports 50a and 50b is symmetrical in structure. The symmetrical characteristics of the screw pump 50 enable the injection and discharge ports 50a, 50b to change their functions, that is, when the pump rotor 53 rotates in the reverse direction, it can be used as a discharge and injection port, respectively. Therefore, the flow direction of the liquid or chemical solution in the spiral spring 50 ° can be easily changed by changing the rotation direction of the pump rotor 53. FIG. 5 shows a modification of the screw pump 50 shown in FIG. 4. This paper size applies the Chinese National Standard (CNS) Λ4 specification (210 × 297 mm) 15 39485 A 7 B7 V. Description of the invention (16) 5 The parts shown in the figure are the same as those in Figure 4 Mark it. The modified spiral spring 50 shown in FIG. 5 is different from the spiral pump 50 shown in FIG. 4 in that its shafts 53b and 53c are coaxially connected to respective axially opposite ends of the pump rotor 53 And are respectively arranged at the proximal end portions of the guide member 66. The rotor magnetic poles 60a and 61a of the radial magnetic bearings 60 and 61 are fixedly mounted on the outer peripheral surface of the shafts 53b and 53c, respectively, and the rotor magnetic poles 60b and 61b of the radial magnetic bearings 60 and 61 are fixedly mounted on the guides. The inner peripheral surface of the lead member 66 forms a radial relative relationship with the rotor magnetic poles 60a, 61a. The disks 64a and 65a of the axial magnetic bearings 64 and 65 are mounted on the outer ends of the respective shafts 53b and 53c, and the magnets 64b and 65b of the axial magnetic bearings 64 and 65 are arranged on the guide member 66. Medium, and form a radial relative relationship with the target discs 64a, 65a. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs according to the modification shown in Figure 5. The liquid transported by the screw pump 50 will not flow through the rotor magnetic poles 60a, 61a and The gap between the stator magnetic poles 60b, 61b flows directly from the injection port 50a into the gap between the tank body 52a and the pump rotor 53, and then flows directly from the gap into the discharge port 50b. The modified screw pump 50 shown in FIG. 5 is quite compact and compact, and has less stagnant and stagnant liquid regions. Because of the direct connection between the gap and the injection or discharge port, it can be relatively small. High efficiency to operate. Added by κ series! Or expected zero. Material to the nature of the main water. The anti-covering pump M is covered with a screw M, screw or plastic, which is used to make fluorescent materials in the light material. The water is used as the material. The property of the water is clear. If the plastic pump in the main plastic system or the size of this paper applies the Chinese National Standard (CNS) Α4 specification (210 × 297 mm) 39485 (Please read the precautions on the back before filling this page) Employees of the Central Standards Bureau of the Ministry of Economic Affairs Printed by the cooperative A7 B7 V. Description of the invention (17) Although in the embodiment shown, the brushless DC motor is used as the motor for rotating the pump rotor, the pump rotor can also be a reluctance motor or an induction motor To increase the speed of these motors, the speed of these motors can be controlled by a reverse inverter or similar device. Although the specific preferred embodiment of the present invention has been shown and described in detail, it should be understood that various changes and modifications can be implemented therein without departing from the scope of the attached patent application. This paper size applies Chinese National Standard (CNS) Α4 size (21〇 × 297 mm) 3948 5 (Please read the precautions on the back before filling this page)