TW370707B - Method for forming planarized trench isolation structure - Google Patents
Method for forming planarized trench isolation structureInfo
- Publication number
- TW370707B TW370707B TW087109355A TW87109355A TW370707B TW 370707 B TW370707 B TW 370707B TW 087109355 A TW087109355 A TW 087109355A TW 87109355 A TW87109355 A TW 87109355A TW 370707 B TW370707 B TW 370707B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- forming
- substrate material
- insulation layer
- stack
- Prior art date
Links
Landscapes
- Element Separation (AREA)
Abstract
The method of the present invention includes following procedures: first of all, forming a liner layer on a substrate material; and forming a first stack layer on the liner layer; then forming a second stack layer on the first stack layer; and defining an opening extending to the substrate material; then removing part of the substrate material to form an upper-part trench using the second stack layer as a mask; and forming a side-wall structure on the side-wall of the opening; removing part of the substrate material to form a lower-part trench using the side-wall structure as a mask; then removing the side-wall structure and the second stack layer; and forming a first insulation layer on the surface inside the trench; forming a second insulation layer on the first insulation layer and the first stack layer; and forming a semiconductor layer on the second insulation layer; then oxidizing part of the semiconductor layer to form a third insulation layer; and forming a capping layer on the third insulation layer; last of all, performing a planarization process for the substrate material, thus obtaining a planarized deep-shallow trench isolation structure.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW087109355A TW370707B (en) | 1998-06-12 | 1998-06-12 | Method for forming planarized trench isolation structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW087109355A TW370707B (en) | 1998-06-12 | 1998-06-12 | Method for forming planarized trench isolation structure |
Publications (1)
Publication Number | Publication Date |
---|---|
TW370707B true TW370707B (en) | 1999-09-21 |
Family
ID=57941512
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW087109355A TW370707B (en) | 1998-06-12 | 1998-06-12 | Method for forming planarized trench isolation structure |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW370707B (en) |
-
1998
- 1998-06-12 TW TW087109355A patent/TW370707B/en not_active IP Right Cessation
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Legal Events
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MK4A | Expiration of patent term of an invention patent |