TW357399B - Method of forming conductor structures separated by gaps - Google Patents

Method of forming conductor structures separated by gaps

Info

Publication number
TW357399B
TW357399B TW086116152A TW86116152A TW357399B TW 357399 B TW357399 B TW 357399B TW 086116152 A TW086116152 A TW 086116152A TW 86116152 A TW86116152 A TW 86116152A TW 357399 B TW357399 B TW 357399B
Authority
TW
Taiwan
Prior art keywords
reflective coating
gaps
coating layer
forming
conductor structures
Prior art date
Application number
TW086116152A
Other languages
Chinese (zh)
Inventor
Jr-Jian Liou
Da-Shan Tseng
Wen-Bin Shie
Jiun-Yuan Wu
Huo-Tie Lu
Shr-Wei Suen
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW086116152A priority Critical patent/TW357399B/en
Application granted granted Critical
Publication of TW357399B publication Critical patent/TW357399B/en

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Abstract

A method of forming conductor structures separated by gaps, including at least the following steps: provision of a substrate, with a conductor layer; forming the first reflective coating layer on the conductor layer; forming a second reflective coating layer on said first reflective coating layer; where the first and the second reflective coating layer are of different material; etching the first reflective coating layer, the second reflective coating layer and the conductor layer, for forming a conductor layer separated by gap; and deposition of a dielectric material in the gap between the conductors.
TW086116152A 1997-10-30 1997-10-30 Method of forming conductor structures separated by gaps TW357399B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086116152A TW357399B (en) 1997-10-30 1997-10-30 Method of forming conductor structures separated by gaps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086116152A TW357399B (en) 1997-10-30 1997-10-30 Method of forming conductor structures separated by gaps

Publications (1)

Publication Number Publication Date
TW357399B true TW357399B (en) 1999-05-01

Family

ID=57940428

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086116152A TW357399B (en) 1997-10-30 1997-10-30 Method of forming conductor structures separated by gaps

Country Status (1)

Country Link
TW (1) TW357399B (en)

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