TW352464B - Method for reducing cross contamination in ion implantor - Google Patents
Method for reducing cross contamination in ion implantorInfo
- Publication number
- TW352464B TW352464B TW086113090A TW86113090A TW352464B TW 352464 B TW352464 B TW 352464B TW 086113090 A TW086113090 A TW 086113090A TW 86113090 A TW86113090 A TW 86113090A TW 352464 B TW352464 B TW 352464B
- Authority
- TW
- Taiwan
- Prior art keywords
- air
- disc
- cross contamination
- reducing cross
- chamber
- Prior art date
Links
Landscapes
- Cleaning In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The process for reducing cross contamination in the ion implantor comprises a disc chamber containing a disc tray and a plurality of gates, the steps are: (a) to close up all valves for the gates of the disc chamber; (b) a air source supplying air required to the disc chamber, the air inported will react with the contaminant to be eradicated; (c) to cut off the air supply; (d) using vacuum cleaner to remove out of the chamber the by-products created by reaction of air with the contaminants; (e) repeating the above steps (a) through (d) several times will ensure the complete removal of contaminant from the disc surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086113090A TW352464B (en) | 1997-09-10 | 1997-09-10 | Method for reducing cross contamination in ion implantor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086113090A TW352464B (en) | 1997-09-10 | 1997-09-10 | Method for reducing cross contamination in ion implantor |
Publications (1)
Publication Number | Publication Date |
---|---|
TW352464B true TW352464B (en) | 1999-02-11 |
Family
ID=57940072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086113090A TW352464B (en) | 1997-09-10 | 1997-09-10 | Method for reducing cross contamination in ion implantor |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW352464B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI412620B (en) * | 2004-10-26 | 2013-10-21 | Advanced Tech Materials | Methods and apparatus for cleaning semiconductor manufacturing tool |
-
1997
- 1997-09-10 TW TW086113090A patent/TW352464B/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI412620B (en) * | 2004-10-26 | 2013-10-21 | Advanced Tech Materials | Methods and apparatus for cleaning semiconductor manufacturing tool |
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