TW339461B - Device for conditioning polishing pads utilizing brazed cubic boron nitride technologies - Google Patents
Device for conditioning polishing pads utilizing brazed cubic boron nitride technologiesInfo
- Publication number
- TW339461B TW339461B TW086112211A TW86112211A TW339461B TW 339461 B TW339461 B TW 339461B TW 086112211 A TW086112211 A TW 086112211A TW 86112211 A TW86112211 A TW 86112211A TW 339461 B TW339461 B TW 339461B
- Authority
- TW
- Taiwan
- Prior art keywords
- conditioner
- boron nitride
- cubic boron
- polishing pads
- conditioning polishing
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
A osrt of polishign pad conditioner having the polishing pad including the panel on the polishing unit, used for polishing the surface of the workpiece, having the unit: conditioner by means of contact with the polishing pad, having the conditioner been solded by the cutting element of cubic boron nitride in the bottom of the conditioner; and the joining unit for the conditioner and the polishing pad for turning of the conditioner on top of the polishing pad for oscillation of the conditioner on it.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US70408896A | 1996-08-28 | 1996-08-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW339461B true TW339461B (en) | 1998-09-01 |
Family
ID=24828012
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086112211A TW339461B (en) | 1996-08-28 | 1997-08-26 | Device for conditioning polishing pads utilizing brazed cubic boron nitride technologies |
Country Status (2)
Country | Link |
---|---|
TW (1) | TW339461B (en) |
WO (1) | WO1998008651A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003535462A (en) * | 2000-05-31 | 2003-11-25 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Polishing method and apparatus for manufacturing semiconductors and integrated circuits |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1313762C (en) * | 1985-11-19 | 1993-02-23 | Sumitomo Electric Industries, Ltd. | Hard sintered compact for a tool |
US5011514A (en) * | 1988-07-29 | 1991-04-30 | Norton Company | Cemented and cemented/sintered superabrasive polycrystalline bodies and methods of manufacture thereof |
US4954139A (en) * | 1989-03-31 | 1990-09-04 | The General Electric Company | Method for producing polycrystalline compact tool blanks with flat carbide support/diamond or CBN interfaces |
US5216843A (en) * | 1992-09-24 | 1993-06-08 | Intel Corporation | Polishing pad conditioning apparatus for wafer planarization process |
US5456627A (en) * | 1993-12-20 | 1995-10-10 | Westech Systems, Inc. | Conditioner for a polishing pad and method therefor |
US5486131A (en) * | 1994-01-04 | 1996-01-23 | Speedfam Corporation | Device for conditioning polishing pads |
-
1997
- 1997-08-26 TW TW086112211A patent/TW339461B/en active
- 1997-08-28 WO PCT/US1997/015380 patent/WO1998008651A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO1998008651A1 (en) | 1998-03-05 |
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