經濟部中央標準局員工消費合作杜印製 A7 B7 五、發明説明（1 ) 本發明係關於附設追縱產生器（Tracking Generator Μ下簡稱「TG」）之頻譜分析儀，係可Μ測定散亂行列參 數（Scattering Matrix Pavamcfer- Κ下簡稱S參數）之S 參數用頻譜分析儀。 S參數係著限於波幅，主要用在微波領域Μ表示零件 之傳遞特性等而所諝S參數係指「S」行列之各要素。S參· 數之物理意義如下。例如在具有Ν開口之導波管等，波幅· 值1之電波從第i開口進入，而其他開口全為無反射終端。 這時之第1開口之反射係數為Sh，第j開口之傳遞（輸出） 係數為S^。 具有兩個開口之諸如衰減器之零件，若從第1開口輸 出波幅值1之電波，其他之第2開口為無反射終端時，Sn 表示反射係數，S21則表示向第2開口之傳遞係數。反之， 從第2開口輸入波幅值1之電波，使第1開口為無反射終端 時，S22表示第第2開口之反射係數，S12表示向第1開口之 傳遞係數。因之，例如輸入輸出匹配時，值。 要測定這些S參數時，使用網路分析儀。網路 分析儀係解析高頻用類比電路網特性與性之 ________________________-•一--1- 專用測定器。第2圖表示使用網路分析儀測定之說明圖。 第2圖（Α)係測定之概念圖，第2圖（Β)表示傳遞特性之測 方法，第2圖（C)表示反射特性之測定方法。測定之概念 是，解析輸入DUT(被測定物）15之正弦波信號變化成什麽 樣子出現在DUT輸出。 先說明第2圖（A)。網路分析儀由可輸出掃描正弦波 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公綮） ---------^ -- (請九閱讀资面之注意事項再填寫本頁) 訂 線 經濟部中央標準局貝工消費合作社印製 ^20685 A7 B7 __ 五、發明k明（2 ) 之掃描信號源10，及比較基準信號輸入與應答信號輸入之 解析部11，所構成。掃描正弦波由輸出端子12輸出後分開 ，一方當作基準信號輸入解析部11之基準信號輸入端子13 ，另一方則經由DUT(被测定物）而當作應答信號輸入應答 信號輸入端子14。解析部11則比較解析基準信號與應答信 號，算出各種傳遞特性或反射特性而顯示之。 再參照第2圖（B)說明傳遞特性之測定方法。以電力 分割器16將掃描信號源10之輸出端子12之輸出信號分割為 2，一方供給解析部之基準信號輸入端子13,另一方供給 DUT15，將DUT15之輸出信號供給應答信號輸入端子14。解 析部11則比較分析輸入之基準信號與應答信號，求出S參 數S21，S12外，尚可求得波幅特性，相位特性或群延遲時 間特性等。 再參照第2圖（C)說明反射特性之測定方法。以電力 分割器16將掃描信號源10之輸出端子12之輸出信號分割為 2，一方供給解析部之基準信號輸入端子13，另一方經由 方向性结合器（ref lection brideg) 17供給DUT15。與方向 性結合器17之間，縱a端子之輸入信號傳送至b端子，從b 端子之輸入信號傳送至c端子。DUT15之另一端子使成無反 射終端。於是，2分割之另一方之測定信號由方向性结合 器17之a端子傳送至b端子而供給DUT15，DUT15之反射波由 方向性給合器17之b端子傳送給c端子，而供給解析部11之 應答信號輸入端子14。解析部11則比較輸入之基準信號與 應答信號，求得S參數之外，尚可求得回流損失， 不匹配衰減量或駐在波比等。 本纸張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） --------f丨裝------訂-----f 線 (請t閲讀f·面之注意事項再填寫本頁) 5 經濟部中央標準局員工消費合作社印製 A7 _B7___ 五、發明説明（3 ) 對高頻零件之專用測定器之網路分析儀，要解析從高 頻機器放射之電波之頻譜之測定器有頻譜分析儀。更有附 設TG之頻譜分析儀。附設TG之頻譜分析儀可解析頻譜，同 時也可測定高頻零件之波幅特性。 在第3圖表示以往之附設TG之頻譜分析儀之架構。首 先簡單說明頻譜分析儀之架構。外來信號f7經由輸入端子 21在衰減器（ATT)22衰減成通當位準之信號f70,而輸入第 1混波器23。第1混波器23之另一輸入端子輸入由YTO(YIG 振盪器）構成之掃描振盪器33之掃描信號f71，其差信號 f72被當作第1中間頻率，而由BPF(band Pass filter)24 取出。 而以第2混波器25將此第1中間頻率f72變換成第2中間 頻率f74,再度換成信號處理較容易之約3MHz前後之第3中 間頻率f76，而從BPF27取出，以對數放大器28對數變換而 放大，再以檢波器29檢波，於A/D變換器30度換成數位值 後，當Y軸信號供給顯示器31。 指示燈電壓產生器32產生鋸齒狀波電壓，供給掃描振 盡器33與顯示器31，掃描振盪器33則產生相當於指示燈電 壓之微波頻率，顯示器31則當作X軸之掃描信號使用。 而從TG部40之輸出端子46則輸出，與頻率分析儀之被 解析頻率，即與輸入到輸入端子21之有效頻率相同之頻率 。產生此TG輸入頻率時係利用頻譜分析儀之局部振盪器之 振盪頻率，使其有頻率漂移時仍可以一致。振盪器41則產 生與輸入對數放大器28之頻率相同之頻率f76,而供給第4 本纸張尺度適用中國國家標準（CNS〉A4規格（210X297公帑） ---------^ 1裝------訂-----(線 (請九閱讀胥面之注意事項再填寫本 經濟部中央標準局員工消費合作社印製 320685 A7 B7 五、發明説明（4 ) 混波器42，而在第4混波器42與第3局部振盪器35產生之頻 率f75混合，將其和頻率f74供給第5混波器43。第5混波器 43則接受第2局部振還器34之頻率f73，將其和頻率Π2送 出到第6混波器44。 第6混波器44接受掃描振盪器33之掃描頻率Π1而加以 混合，而輸出其和頻率f70。其輸出信號f?〇在ATT45衰減 成通當之位準，而從輸出端子46輸出與頻譜分析儀之解析 頻率相同之頻率f7。因此，如第3圖所示，可K在TG部40 之輸出端子46與頻譜分析儀之輸入端子21之間連接DUT15 藉此在第3圖之顯示器31顯示DUT15之波幅特性。 為了要調整高頻機器之頻率，在調整現場使用很多這 種附設TG之頻譜分析儀。網路分析儀係高頻零件之專用測 定器，本來其使用目的是與頻譜分析儀不相同，因此高頻 機器之調整現場並不常有。因此高頻機器之調整者則不僅 為了要看所使用之高頻零件之各項特性，同時也看S參數 ，尤其是其反射特性。這個時需外加方向性结合器來測定 Ο 然而，為了要提高测定準確度，必須校正測定時所用 之高頻零件，而且又是外加，因此每一次測定又需要變更 TG out/input之連接，準確度也不高，又不方便。 本發明正提供，使用附設TG之頻譜分析儀，不僅可進 行通常之頻譜解析，高頻ίϊ之波i特性，反 射特及傳遞特性之s參數測定用頻譜分析儀。 為了達成上述目的，本發明係在附設TG之頻譜分析儀 本紙乐尺度適用中國國家標準（CNS ) Α4規格（2丨0:<297公釐 ---------I裝-----丨訂-----「線 (請先閲讀膂面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 B7 _ 五、發明説明（5 ) 之輸入輸出部分配設寬頻帶之方向性结合器及輸入切換開 關使成RF前端部，在信號處理部配設蓮算構件與記憶預先 測定之RF前端部之高頻特性之記憶器，而藉輸入切換開關 之切換，以高準確度測定各種特性。在此所稱之方向性结 合器係用Μ將輸入信號，例如由a端子引至b端子，從b端 子引至c端子者，包含反射结合器等之結合器。 為此，將TG部之輸出信號連接在方向性结合器之a端 子，將b端子連接在輸出端子。DUT之反射波從b端子引至c 端子，c端子連接在輸入切換開關之y端子。輸入切換開關 之z端子連接在輸入端子，從共同端子之X端子引至頻譜分 析儀之輸入側。 信號處理部則以預先測定之已知之RF前端部之高頻特 性當作補正資料記憶在記憶器，將被測定信號A/D變換後 之解析資料加上補正資料K蓮算構件運算，而在顯示器顯 示S參數或其他之測定結果值。 K方向性结合器與輸入切換開關構成附設TG之頻譜分 析儀之輸入輸出部，即RF前端部，方向性结合器將TG部送 出之輸出信號引導至測定器之輸出端子，輸出端子之反射 波則引至輸入切換開關。亦即，從TG部之輸出信號全由測 定器之輸出端子輸出到外部。如果從外部有反射波而要測 定反射係數時，將其反射波引至輸入切換開關，當作被测 定輸入信號。因此，要能K高準確度測定，需預先測定方 向性结合器與輸入切換開關，即RF前端部之高頻特特性， 而當作補正資料使用。 本紙張尺度適用中國國家標準（CNS ) Λ4規格（210Χ 297公釐） (請先閲讀背面之注意事項再填寫本頁) •裝. 钉 經濟部中央標準局員工消費合作社印製 A7 .__B7五、發明說明（6 ) 輸入切換開關將頻譜分析部之輸入，切換成從測定器 之輸入端子來之輸入，與從方向性结合器來之輸入。從測 定器之輸入端子來之輸入係供通常之頻譜解析之外來頻率 或傳遞係數之s21或s12之測定時使用。從方向性结合器來 之輸入信號係供反射係數之Sll測定或S22測定時使用。 輸入之被解析頻率係經由數级之降頻變頻器變換成信 號處理較容易之約3MHz前後之頻率，再經由對數放大器， 檢波器，A/D變換器，變換成解析數位資料。在蓮算構件 將此解析資料加上記憶於記憶器之補正資料，即RF前端部 之髙頻特性而予K補正，蓮算，頻譜解析時在顯示器顯示 頻譜，測定傳遞係數或反射係數時，則顯示Su,S21,S12, S22等。因此，運算構件以nCPU(微電腦）構成較佳。 K下說明實施例。 第1圖表示本發明一實施例之架構圖。對應第3圖部 分標示同一記號。第1圖係測定DUT15之反射係數Sn及 S22時之構成例子。因此，DUT15之第2開口係K無反射終 端器終端，第1開口接受測定器之輸出端子57之輸出信號 ，向輸出端子57送出反射信號。測定傳遞係數S21及S12之 情形後述。 TG部40與傳統之TG部一樣，送出與頻譜分析儀之被解 析信號相同之信號。從ATT45送出之輸出信號連接在RF前 端部51之方向性结合器52之a端子，向b端子送出信號，將 其引導至測定器之輸出端子57，而送出波幅值1之信號。 從DUT15送出之反射信號由方向性结合器52之b端子引至c 請 先- 閱 讀 背- 2 食 1 裝 訂 線 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 32〇685 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（7 ) 端子，從輸入切換開關53之y端子經X端子，輸入頻譜分析 儀之ATT22。 頻譜分析儀則與K往一樣，在第1，第2，第3混波器 降頻變換，從BPFM約3MHz前後之頻率取出。此被解析信 號在對數放大器28對數變換而放大，檢波，再於A/D變換 器30變換成被解析資料，送至運算構件54。在蓮算構件54 則加工預先記憶在記憶器55之RF前端部51之高頻特性之補 正資料，運算出反射係數Su或S22，送至記憶器或顯示器 31而加Μ顯示。 欲測定傳遞係數S21及S12時，則令DUT15之第2開口之 輸出信號輸入到輸入端子58(未圖示），將輸入切換開關53 切換到z端子側，即切換到測定器之輸入端子58側進行測 定。而在上述蓮算構件54加上RF前端部51之高頻特性之資 料，運算傳遞係數S21及S12，記憶下來或送別顯示器31加 Μ顯示。 測定DUT15之波幅特性時，與Κ往一樣在輸出端子57 與輸入端子58間***DUT15進行測試則可。而外來頻率之 頻譜之解析也是與以往一樣連接到輸入端子58測試即可。 如Κ上所詳述，本發明係配設由方向性结合器52與輸 入切換開關53構成之RF前端部51，預先測定此RF前端部51 之高頻特性而記憶在記憶器55，而運算構件54則在反射係 數或傳遞係數S21,S12之解析資料加上RF前端部51 之高頻特性而進行蓮算，顯示在顯示器，因此可解析頻譜 並測定S參數。 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） I--------^ Ί 裝-- (請先閲讀t·面之注意事項再填寫本頁) 、·ιτ 線 A7 B7 五、發明說明（8 ) 因此，在高頻機器之調整現場，可由調整者調整頻率 之同時，Μ同一測定器測定調整高頻機器所使用之高頻零 件，其技術效果很大。 圖式之簡單說明 第1圖係本發明之一實施例之架構圖； 第2圖係使用網路分析儀之測定例子之說明圖； (Α)係測定之概念圖； (Β)係傳遞特性之測定說明圖； (C)係反射特性之測定說明圖； 第3圖係附設有TG之頻譜分折儀之架構圖。 f I裝------訂-----(線 (請先•閱讀t面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 本纸張尺度適用中國國家標準（CNS ) Λ4規格（210X29?公釐）A7 B7 is printed by the consumer cooperation of the Central Standards Bureau of the Ministry of Economic Affairs. V. Description of the invention (1) The present invention relates to a spectrum analyzer with a tracking generator (hereinafter referred to as "TG"), which can be used to determine the scattered The S-parameters of the rank parameters (Scattering Matrix Pavamcfer-K hereinafter referred to as S-parameters) are used with a spectrum analyzer. The S parameter is limited to the amplitude, and is mainly used in the microwave field to indicate the transmission characteristics of the parts. The S parameter refers to the elements of the "S" line. The physical meaning of the S parameter · number is as follows. For example, in a wave guide tube having an N opening, a radio wave of amplitude and value 1 enters from the i-th opening, and the other openings are all non-reflective terminals. At this time, the reflection coefficient of the first opening is Sh, and the transmission (output) coefficient of the jth opening is S ^. For a part with two openings such as an attenuator, if a radio wave of amplitude 1 is output from the first opening, and the other second opening is a non-reflective terminal, Sn represents the reflection coefficient, and S21 represents the transmission coefficient to the second opening . Conversely, when a radio wave of amplitude 1 is input from the second opening and the first opening is a non-reflective terminal, S22 represents the reflection coefficient of the second opening, and S12 represents the transmission coefficient to the first opening. Therefore, for example, when the input and output match, the value. To determine these S parameters, use a network analyzer. The network analyzer is a special measuring instrument for analyzing the characteristics and properties of analog circuit networks for high-frequency use. Figure 2 shows an explanatory diagram of measurement using a network analyzer. Fig. 2 (A) is a conceptual diagram of measurement, Fig. 2 (B) shows the measurement method of transmission characteristics, and Fig. 2 (C) shows the measurement method of reflection characteristics. The concept of measurement is to analyze how the sine wave signal input to the DUT (measured object) 15 changes to appear on the DUT output. First, Fig. 2 (A) will be explained. The network analyzer can output the scanned sine wave book. The paper standard is applicable to the Chinese National Standard (CNS) A4 specification (210X297 male 綮) --------- ^-(please read the precautions of the capital before filling in This page) Printed by Bei Gong Consumer Cooperative of Central Bureau of Standards, Ministry of Economics, ^ 20685 A7 B7 __ 5. Scanning signal source 10 of invention k Ming (2), and parsing section 11 for comparing reference signal input and response signal input Pose. The scanned sine wave is output by the output terminal 12 and separated. One side is used as a reference signal input to the reference signal input terminal 13 of the analysis unit 11, and the other is input to the response signal input terminal 14 as a response signal via a DUT (object to be measured). The analyzing unit 11 compares and analyzes the reference signal and the response signal, calculates various transfer characteristics or reflection characteristics, and displays them. The method of measuring transfer characteristics will be described with reference to FIG. 2 (B) again. The output signal of the output terminal 12 of the scanning signal source 10 is divided into 2 by the power divider 16, one is supplied to the reference signal input terminal 13 of the analyzing section, the other is supplied to the DUT 15, and the output signal of the DUT 15 is supplied to the response signal input terminal 14. The analyzing unit 11 compares and analyzes the input reference signal and the response signal, and obtains the S-parameters S21 and S12, and the amplitude characteristic, phase characteristic, group delay time characteristic, etc. can be obtained. The measurement method of the reflection characteristic will be described with reference to FIG. 2 (C) again. The output signal of the output terminal 12 of the scanning signal source 10 is divided into 2 by the power splitter 16, one is supplied to the reference signal input terminal 13 of the analyzing section, and the other is supplied to the DUT 15 via a directional coupler (ref lection brideg) 17. Between the directional coupler 17, the input signal of terminal a is transmitted to terminal b, and the input signal from terminal b is transmitted to terminal c. The other terminal of DUT15 is a non-reflective terminal. Therefore, the measurement signal of the other side divided by two is transmitted from terminal a to terminal b of directional coupler 17 and supplied to DUT15. 11 的 答 信号 Inputterminal14. The analyzing unit 11 compares the input reference signal and the response signal, and in addition to the S parameter, the return loss, mismatch attenuation, or standing wave ratio can be obtained. The size of this paper is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -------- f 丨 installed ------ order ----- f line (please read f · Please pay attention to this page before filling out this page) 5 Printed A7 _B7___ by the Employees ’Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (3) The network analyzer for the special measuring device of high-frequency parts must be analyzed from the high-frequency machine The spectrum analyzer of the spectrum of the radiated electric wave has a spectrum analyzer. There is also a spectrum analyzer with TG. The spectrum analyzer with TG can analyze the spectrum and also measure the amplitude characteristics of high-frequency parts. Figure 3 shows the structure of a conventional spectrum analyzer with TG. First, a brief description of the architecture of the spectrum analyzer. The external signal f7 is attenuated by the input terminal 21 at the attenuator (ATT) 22 to the signal f70 of the current level, and then input to the first mixer 23. The other input terminal of the first mixer 23 inputs the scan signal f71 of the scan oscillator 33 composed of YTO (YIG oscillator), and the difference signal f72 is regarded as the first intermediate frequency, and the BPF (band pass filter) 24 Remove. The second intermediate frequency f72 is converted into the second intermediate frequency f74 by the second mixer 25, and then replaced by the third intermediate frequency f76 around 3MHz, which is easier for signal processing, and taken out from the BPF 27 to the logarithmic amplifier 28. It is amplified by logarithmic conversion, and then detected by the detector 29. After the A / D converter is converted to a digital value at 30 degrees, the Y-axis signal is supplied to the display 31. The indicator voltage generator 32 generates a sawtooth wave voltage and supplies it to the scan oscillator 33 and the display 31. The scan oscillator 33 generates a microwave frequency corresponding to the indicator voltage, and the display 31 is used as an X-axis scan signal. The output terminal 46 of the TG unit 40 outputs the same frequency as the frequency analyzed by the frequency analyzer, that is, the effective frequency input to the input terminal 21. When the TG input frequency is generated, the oscillation frequency of the local oscillator of the spectrum analyzer is used so that it can be consistent even if there is a frequency drift. The oscillator 41 generates the frequency f76 which is the same as the frequency of the input log amplifier 28, and the fourth paper standard is applicable to the Chinese national standard (CNS> A4 specification (210X297 public money) --------- ^ 1 pack ------ Subscribe ----- (Line (please read nine notes of Xu Nian and fill in printed by the Ministry of Economy Central Standards Bureau employee consumer cooperative printed 320685 A7 B7 V. Invention description (4) Mixer 42 , And the frequency f75 generated by the fourth mixer 42 and the third local oscillator 35 is mixed, and the frequency f74 is supplied to the fifth mixer 43. The fifth mixer 43 receives the second local regenerator 34 The frequency f73 is sent to the sixth mixer 44 with its frequency Π2. The sixth mixer 44 receives and mixes the scanning frequency Π1 of the scanning oscillator 33, and outputs its sum frequency f70. Its output signal f? At ATT45, it is attenuated to a proper level, and the output terminal 46 outputs the frequency f7 which is the same as the analytical frequency of the spectrum analyzer. Therefore, as shown in FIG. 3, the output terminal 46 of the TG unit 40 can be analyzed with the spectrum Connect the DUT15 between the input terminals 21 of the instrument to display the amplitude characteristics of the DUT15 on the display 31 in Figure 3. In order to adjust Many frequency analyzers with TG are used at the site of adjustment. The network analyzer is a special measuring device for high-frequency parts. Its original purpose is not the same as the spectrum analyzer, so the adjustment of the high-frequency machine It is not common on the spot. Therefore, the adjuster of the high-frequency machine is not only to see the characteristics of the high-frequency parts used, but also to see the S parameters, especially its reflection characteristics. This requires an additional directional coupler Measurement Ο However, in order to improve the accuracy of the measurement, the high-frequency parts used in the measurement must be calibrated, and it is added, so each measurement needs to change the TG out / input connection, the accuracy is not high, and it is inconvenient. The present invention is providing a spectrum analyzer for measuring not only normal spectrum analysis, high-frequency wave i characteristics, reflection characteristics and transfer characteristics of s-parameters by using a spectrum analyzer with TG. In order to achieve the above object, the present invention The paper analyzer standard attached to the spectrum analyzer with TG is applicable to the Chinese National Standard (CNS) Α4 specification (2 丨 0: < 297mm -------- I installed ----- 丨 order- ---- "Line (please read the notes on the noodles before filling out this page) A7 B7 _ printed by the employee consumer cooperative of the Central Standards Bureau of the Ministry of Economy The sexual coupler and input switch are used as the RF front end. The signal processing part is equipped with a lotus component and a memory that stores the high-frequency characteristics of the RF front end measured in advance. The input switch is switched to achieve high accuracy. Various characteristics are measured. The directional coupler referred to herein is a coupler that uses M to route input signals from, for example, terminal a to terminal b, and terminal b to terminal c, including reflective couplers. For this purpose, the output signal of the TG unit is connected to the a terminal of the directional coupler, and the b terminal is connected to the output terminal. The reflected wave of the DUT is led from the b terminal to the c terminal, and the c terminal is connected to the y terminal of the input changeover switch. The z terminal of the input changeover switch is connected to the input terminal and leads from the X terminal of the common terminal to the input side of the spectrum analyzer. The signal processing unit uses the pre-measured high-frequency characteristics of the known RF front end as correction data and stores it in the memory. The analysis data after the A / D conversion of the measured signal is added to the correction data. The display shows S-parameters or other measured results. The K directional coupler and the input switch constitute the input and output part of the spectrum analyzer with TG, that is, the RF front end. The directional coupler guides the output signal sent by the TG part to the output terminal of the measuring device, and the reflected wave of the output terminal Then lead to the input switch. That is, all output signals from the TG part are output to the outside through the output terminal of the measuring device. If there is a reflected wave from the outside and the reflection coefficient is to be measured, the reflected wave is led to the input selector switch as the input signal to be measured. Therefore, in order to be able to measure K with high accuracy, it is necessary to measure the high-frequency characteristics of the directional coupler and input changeover switch, that is, the RF front end in advance, and use it as correction data. This paper scale is applicable to the Chinese National Standard (CNS) Λ4 specification (210Χ 297 mm) (please read the notes on the back before filling in this page) • Packed. Printed by A7 .__ B7 printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. DESCRIPTION OF THE INVENTION (6) The input selector switch switches the input of the spectrum analysis unit to the input from the input terminal of the measuring device and the input from the directional coupler. The input from the input terminal of the calibrator is used for the measurement of s21 or s12 of the external frequency or transfer coefficient during normal spectrum analysis. The input signal from the directional coupler is used for Sll measurement or S22 measurement of the reflection coefficient. The input analyzed frequency is converted into a frequency of about 3MHz which is easier for signal processing by a number of down-converters, and then converted to analytical digital data by a logarithmic amplifier, detector, and A / D converter. The lotus calculation component adds this analysis data to the correction data memorized in the memory, that is, the high-frequency characteristics of the RF front-end part to make K corrections, lotus calculation, the spectrum is displayed on the display during spectrum analysis, and the transfer coefficient or reflection coefficient is measured. It displays Su, S21, S12, S22, etc. Therefore, the arithmetic component is preferably constituted by nCPU (microcomputer). Examples are described below. Fig. 1 shows an architectural diagram of an embodiment of the present invention. Correspond to the part of Figure 3 with the same symbol. Fig. 1 shows an example of the configuration when the reflection coefficients Sn and S22 of the DUT 15 are measured. Therefore, the second opening of the DUT 15 is the K non-reflective terminator terminal, and the first opening receives the output signal from the output terminal 57 of the measuring device and sends the reflected signal to the output terminal 57. The case of measuring the transmission coefficients S21 and S12 will be described later. The TG unit 40, like the conventional TG unit, sends the same signal as the analyzed signal of the spectrum analyzer. The output signal sent from the ATT 45 is connected to the a terminal of the directional coupler 52 of the RF front end 51, sends a signal to the b terminal, and leads it to the output terminal 57 of the measuring device, and sends a signal of amplitude 1. The reflected signal sent from DUT15 is led to terminal b from terminal b of directional coupler 52. Please read first-Read back-2 Food 1 Binding line The paper size is applicable to China National Standard (CNS) A4 specification (210X 297 mm) 32〇685 The A7 B7 is printed by the Staff Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. V. Description of the invention (7) Terminal, from the y terminal of the input changeover switch 53 to the ATT22 of the spectrum analyzer via the X terminal. The spectrum analyzer is the same as K, down-converted in the first, second, and third mixers, and is taken out from the frequency around 3MHz of BPFM. This analyzed signal is log-transformed and amplified by the logarithmic amplifier 28, detected, and then converted into the analyzed data in the A / D converter 30, and sent to the arithmetic unit 54. The lotus calculation unit 54 processes the correction data of the high-frequency characteristics pre-stored in the RF front end portion 51 of the memory 55, calculates the reflection coefficient Su or S22, and sends it to the memory or display 31 to display it. To measure the transmission coefficients S21 and S12, the output signal of the second opening of the DUT 15 is input to the input terminal 58 (not shown), and the input selector switch 53 is switched to the z terminal side, that is, to the input terminal 58 of the measuring device Side. In addition, the data of the high-frequency characteristic of the RF front end 51 is added to the lotus calculation member 54 to calculate the transfer coefficients S21 and S12, and the memory 31 is memorized or sent to the display 31 for display. When measuring the amplitude characteristic of DUT15, it is sufficient to insert DUT15 between output terminal 57 and input terminal 58 as in the case of K and test. The analysis of the frequency spectrum of the external frequency can also be connected to the input terminal 58 for testing as before. As described in detail above, the present invention is equipped with an RF front end portion 51 composed of a directional coupler 52 and an input changeover switch 53. The high frequency characteristics of the RF front end portion 51 are measured in advance and stored in the memory 55, and the operation is performed The component 54 performs the calculation by adding the high-frequency characteristics of the RF front end 51 to the analysis data of the reflection coefficients or transfer coefficients S21 and S12, and displays them on the display. Therefore, the spectrum can be analyzed and the S parameters can be measured. The size of this paper is applicable to the Chinese National Standard (CNS) Α4 specification (210X 297mm) I -------- ^ Ί Packing-- (please read the precautions on the surface before filling this page), ιτ Line A7 B7 V. Description of the invention (8) Therefore, at the adjustment site of the high-frequency machine, the frequency can be adjusted by the adjuster, and the same measuring device measures the high-frequency parts used by the high-frequency machine. The technical effect is great. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a structural diagram of an embodiment of the present invention; FIG. 2 is an explanatory diagram of a measurement example using a network analyzer; (A) is a conceptual diagram of measurement; (B) is a transfer characteristic Measurement explanation chart; (C) is the measurement explanation chart of the reflection characteristic; Figure 3 is the architecture diagram of the spectrum analyzer with TG attached. f I installed ------ ordered ----- (line (please first read the notes on the t side before filling out this page) printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. (CNS) Λ4 specification (210X29? Mm)