TW283787B - Golden wafer process - Google Patents

Golden wafer process

Info

Publication number
TW283787B
TW283787B TW85100504A TW85100504A TW283787B TW 283787 B TW283787 B TW 283787B TW 85100504 A TW85100504 A TW 85100504A TW 85100504 A TW85100504 A TW 85100504A TW 283787 B TW283787 B TW 283787B
Authority
TW
Taiwan
Prior art keywords
wafer process
golden
golden wafer
wafer
bpsg
Prior art date
Application number
TW85100504A
Other languages
Chinese (zh)
Inventor
guang-zhao Chen
Yuh-Tarng Tuu
Original Assignee
Mos Electronics Taiwan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mos Electronics Taiwan Inc filed Critical Mos Electronics Taiwan Inc
Priority to TW85100504A priority Critical patent/TW283787B/en
Application granted granted Critical
Publication of TW283787B publication Critical patent/TW283787B/en

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Landscapes

  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

A process of golden wafer by barrier film comprises the steps of: supplying one silicon wafer; depositing one boronphosphosilicate glass(BPSG) or one phosphosilicate glass(PSG) on the above silicon wafer by chemical vapor deposition; depositing one barrier film such as Si3N4 etc. on the BPSG or PSG film to complete the process of golden wafer.
TW85100504A 1996-01-16 1996-01-16 Golden wafer process TW283787B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW85100504A TW283787B (en) 1996-01-16 1996-01-16 Golden wafer process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW85100504A TW283787B (en) 1996-01-16 1996-01-16 Golden wafer process

Publications (1)

Publication Number Publication Date
TW283787B true TW283787B (en) 1996-08-21

Family

ID=51397814

Family Applications (1)

Application Number Title Priority Date Filing Date
TW85100504A TW283787B (en) 1996-01-16 1996-01-16 Golden wafer process

Country Status (1)

Country Link
TW (1) TW283787B (en)

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