TW279263B - Precision capacitor array - Google Patents
Precision capacitor arrayInfo
- Publication number
- TW279263B TW279263B TW84113917A TW84113917A TW279263B TW 279263 B TW279263 B TW 279263B TW 84113917 A TW84113917 A TW 84113917A TW 84113917 A TW84113917 A TW 84113917A TW 279263 B TW279263 B TW 279263B
- Authority
- TW
- Taiwan
- Prior art keywords
- top plate
- erased
- micro
- load
- electrode
- Prior art date
Links
Landscapes
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
A precision capacitor array structure comprises of: one storage node; one dielectric layer covering the storage node; one top plate of array on the dielectric layer; micro-load erased electrode locating around the array, making the space between top plate and micro-load erased electrode equal to the space among top plates; passivation layer covering the top plate and the micro-load erased electrode; via hole etching, through the passivation layer to expose the top plate surface; one conductive layer covering the passivation layer, and electrically contacting with the top plate via the hole on the layer bottom, and being molded to individual conductive body connected to the top plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW84113917A TW279263B (en) | 1995-12-27 | 1995-12-27 | Precision capacitor array |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW84113917A TW279263B (en) | 1995-12-27 | 1995-12-27 | Precision capacitor array |
Publications (1)
Publication Number | Publication Date |
---|---|
TW279263B true TW279263B (en) | 1996-06-21 |
Family
ID=51397508
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW84113917A TW279263B (en) | 1995-12-27 | 1995-12-27 | Precision capacitor array |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW279263B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7522692B2 (en) | 1998-02-27 | 2009-04-21 | Hitachi, Ltd. | Isolator and a modem device using the isolator |
-
1995
- 1995-12-27 TW TW84113917A patent/TW279263B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7522692B2 (en) | 1998-02-27 | 2009-04-21 | Hitachi, Ltd. | Isolator and a modem device using the isolator |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK4A | Expiration of patent term of an invention patent |