TW279263B - Precision capacitor array - Google Patents

Precision capacitor array

Info

Publication number
TW279263B
TW279263B TW84113917A TW84113917A TW279263B TW 279263 B TW279263 B TW 279263B TW 84113917 A TW84113917 A TW 84113917A TW 84113917 A TW84113917 A TW 84113917A TW 279263 B TW279263 B TW 279263B
Authority
TW
Taiwan
Prior art keywords
top plate
erased
micro
load
electrode
Prior art date
Application number
TW84113917A
Other languages
Chinese (zh)
Inventor
Jyh-Gang Ding
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW84113917A priority Critical patent/TW279263B/en
Application granted granted Critical
Publication of TW279263B publication Critical patent/TW279263B/en

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  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

A precision capacitor array structure comprises of: one storage node; one dielectric layer covering the storage node; one top plate of array on the dielectric layer; micro-load erased electrode locating around the array, making the space between top plate and micro-load erased electrode equal to the space among top plates; passivation layer covering the top plate and the micro-load erased electrode; via hole etching, through the passivation layer to expose the top plate surface; one conductive layer covering the passivation layer, and electrically contacting with the top plate via the hole on the layer bottom, and being molded to individual conductive body connected to the top plate.
TW84113917A 1995-12-27 1995-12-27 Precision capacitor array TW279263B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW84113917A TW279263B (en) 1995-12-27 1995-12-27 Precision capacitor array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW84113917A TW279263B (en) 1995-12-27 1995-12-27 Precision capacitor array

Publications (1)

Publication Number Publication Date
TW279263B true TW279263B (en) 1996-06-21

Family

ID=51397508

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84113917A TW279263B (en) 1995-12-27 1995-12-27 Precision capacitor array

Country Status (1)

Country Link
TW (1) TW279263B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7522692B2 (en) 1998-02-27 2009-04-21 Hitachi, Ltd. Isolator and a modem device using the isolator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7522692B2 (en) 1998-02-27 2009-04-21 Hitachi, Ltd. Isolator and a modem device using the isolator

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