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Priority claimed from JP5270362Aexternal-prioritypatent/JP2584187B2/en
Priority claimed from JP7057143Aexternal-prioritypatent/JP2742238B2/en
Cleaning And De-Greasing Of Metallic Materials By Chemical Methods
(AREA)
Abstract
The cleaning apparatus of the present invention is composed of a cleaning chamber 1 of vacuum-tight structure in which a work W to be cleaned is contained, an organic solvent vapor generating tank 4 communicated with the cleaning chamber 1 via piping, and a vacuum pump 6 for evacuating the cleaning chamber 1. A heat exchange member 3 through which a cooling medium passes is provided above the work W in the cleaning chamber 1. After the cleaning chamber 1 is reduced in pressure, the cooling medium is supplied into the heat exchange member 3 while organic solvent vapor is introduced from the vapor generating tank 4 into the cleaning chamber 1. Thus, a cleaning process is executed in combination of vapor cleaning by the vapor condensing on the surface of a work W and shower cleaning by the vapor being liquefied by the heat exchange member 3 and dropping onto the work W.