TW224182B - - Google Patents

Info

Publication number
TW224182B
TW224182B TW082104644A TW82104644A TW224182B TW 224182 B TW224182 B TW 224182B TW 082104644 A TW082104644 A TW 082104644A TW 82104644 A TW82104644 A TW 82104644A TW 224182 B TW224182 B TW 224182B
Authority
TW
Taiwan
Application number
TW082104644A
Other languages
Chinese (zh)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP92480109A external-priority patent/EP0582016B1/en
Priority claimed from EP92480112A external-priority patent/EP0582019B1/en
Priority claimed from EP92480110A external-priority patent/EP0582017B1/en
Priority claimed from EP92480111A external-priority patent/EP0582018B1/en
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of TW224182B publication Critical patent/TW224182B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW082104644A 1992-08-04 1993-06-11 TW224182B (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP92480109A EP0582016B1 (en) 1992-08-04 1992-08-04 Pressurized sealable transportable containers for storing a semiconductor wafer in a protective gaseous environment
EP92480112A EP0582019B1 (en) 1992-08-04 1992-08-04 Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transportable containers
EP92480110A EP0582017B1 (en) 1992-08-04 1992-08-04 Dispatching apparatus with a gas supply distribution system for handling and storing pressurized sealable transportable containers
EP92480111A EP0582018B1 (en) 1992-08-04 1992-08-04 Pressurized interface apparatus for transferring a semiconductor wafer between a pressurized sealable transportable container and a processing equipment

Publications (1)

Publication Number Publication Date
TW224182B true TW224182B (ja) 1994-05-21

Family

ID=27442478

Family Applications (1)

Application Number Title Priority Date Filing Date
TW082104644A TW224182B (ja) 1992-08-04 1993-06-11

Country Status (3)

Country Link
KR (1) KR970006725B1 (ja)
BR (1) BR9302933A (ja)
TW (1) TW224182B (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI638757B (zh) 2015-12-24 2018-10-21 披考安泰拉有限公司 晶圓儲存容器
TWI743169B (zh) * 2016-09-09 2021-10-21 日商大福股份有限公司 物品搬送裝置
TWI781800B (zh) * 2021-10-22 2022-10-21 銓發科技股份有限公司 束帶儲存裝置及其儲存盤

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004021413A1 (en) * 2002-08-31 2004-03-11 Applied Materials, Inc. Substrate carrier having door latching and substrate clamping mechanisms
CN108107672B (zh) 2016-11-25 2021-03-02 上海微电子装备（集团）股份有限公司 一种掩模版版盒

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI638757B (zh) 2015-12-24 2018-10-21 披考安泰拉有限公司 晶圓儲存容器
TWI743169B (zh) * 2016-09-09 2021-10-21 日商大福股份有限公司 物品搬送裝置
TWI781800B (zh) * 2021-10-22 2022-10-21 銓發科技股份有限公司 束帶儲存裝置及其儲存盤

Also Published As

Publication number Publication date
KR940005476A (ko) 1994-03-21
BR9302933A (pt) 1994-03-15
KR970006725B1 (ko) 1997-04-29

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees