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Priority to TW82100831ApriorityCriticalpatent/TW207584B/en
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Method of preparing spin-on-glass oxidizing film contains: preparing a semiconductor element; preparing a layer of metal on the surface of the semiconductor element; precipitating an oxidizing layer; coating organic oxidizing film on the surface and holes; etching the surface until organic oxidizing film removed; coating inorganic oxidizing film on the surface and applying hot plate to remove solvent at low temperature; drying the product at high temperature; precipitating a layer of oxidizing film to obtain a flat product.
TW82100831A1993-02-041993-02-04Method of preparing spin-on-glass oxiding film
TW207584B
(en)
Coated substrate with metallic surface impression, method for adhesively coatingsubstrates with corrosive optical layers and use of said coated substrate and p roducts obtained from a method for adhesively coating with corrosive optical layers