TW202421386A - Industrial robot hand and industrial robot - Google Patents
Industrial robot hand and industrial robot Download PDFInfo
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- 238000007789 sealing Methods 0.000 claims abstract description 347
- 239000007788 liquid Substances 0.000 claims abstract description 57
- 230000002093 peripheral effect Effects 0.000 claims abstract description 50
- 230000000149 penetrating effect Effects 0.000 claims abstract description 17
- 238000003825 pressing Methods 0.000 claims description 70
- 238000003780 insertion Methods 0.000 claims description 19
- 230000037431 insertion Effects 0.000 claims description 19
- 235000012431 wafers Nutrition 0.000 description 41
- 239000004065 semiconductor Substances 0.000 description 13
- 230000032258 transport Effects 0.000 description 12
- 230000008595 infiltration Effects 0.000 description 6
- 238000001764 infiltration Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 239000003814 drug Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Abstract
本發明提供一種工業用機器人的手，包括：搭載部，搭載搬送對象物；搭載支撐部，固定搭載部的基端側；以及保持機構，用於將搭載於搭載部的搬送對象物保持於水平方向上的一定位置，即使在使用液體的環境下使用，也能夠有效果地抑制液體浸入至收容有構成保持機構的一部分的驅動機構的搭載支撐部的內部的配置空間。工業用機器人的手包括：多個密封構件（20、21），用於防止液體浸入至搭載支撐部（16）的內部；以及氣體供給機構，向搭載支撐部（16）的內部供給氣體。多個密封構件（20、21）沿軸部（32）的軸向排列並配置於軸配置孔（41a）中，並且與軸部（32）的外周面接觸。氣體供給機構向搭載支撐部（16）的內部的配置空間（S）供給氣體並使配置空間（S）為正壓。The present invention provides a hand of an industrial robot, comprising: a loading part for loading a transport object; a loading support part for fixing the base end side of the loading part; and a holding mechanism for holding the transport object loaded on the loading part at a certain position in the horizontal direction, and even when used in an environment where liquid is used, the liquid can be effectively prevented from penetrating into the configuration space inside the loading support part that accommodates a driving mechanism that constitutes a part of the holding mechanism. The hand of the industrial robot comprises: a plurality of sealing components (20, 21) for preventing liquid from penetrating into the inside of the loading support part (16); and a gas supply mechanism for supplying gas to the inside of the loading support part (16). A plurality of sealing components (20, 21) are arranged along the axial direction of the shaft portion (32) and are arranged in the shaft arrangement hole (41a), and are in contact with the outer peripheral surface of the shaft portion (32). A gas supply mechanism supplies gas to an arrangement space (S) inside the mounting support portion (16) and makes the arrangement space (S) positively pressurized.
Description
本發明涉及一種在對搬送對象物進行搬送的工業用機器人中使用的工業用機器人的手。另外，本發明涉及一種包括所述手的工業用機器人。The present invention relates to an industrial robot hand used in an industrial robot for conveying a conveying object. In addition, the present invention relates to an industrial robot including the hand.
以往，已知有一種用於搬送半導體晶圓（Wafer）的水平多關節型的工業用機器人（例如，參照專利文獻1）。專利文獻1中記載的工業用機器人包括搭載半導體晶圓的手、在前端側能夠轉動地連結有手的臂、以及能夠轉動地連結有臂的基端側的主體部。手包括：搭載部，搭載半導體晶圓；手基部，構成手的基端側部分；以及保持機構，用於將搭載於搭載部的半導體晶圓保持於水平方向上的一定位置。搭載部的基端側固定於手基部。手基部能夠轉動地連結於臂的前端側。In the past, there is known a horizontal multi-joint industrial robot for transporting semiconductor wafers (for example, refer to Patent Document 1). The industrial robot described in Patent Document 1 includes a hand for carrying semiconductor wafers, an arm rotatably connected to the hand at the front end side, and a main body rotatably connected to the base side of the arm. The hand includes: a carrying part for carrying the semiconductor wafer; a hand base constituting the base side of the hand; and a holding mechanism for holding the semiconductor wafer carried on the carrying part at a certain position in the horizontal direction. The base side of the carrying part is fixed to the hand base. The hand base is rotatably connected to the front end side of the arm.
在專利文獻1中記載的工業用機器人中，保持機構包括：端面抵接構件，具有與半導體晶圓的端面抵接的抵接面；按壓構件，與半導體晶圓的端面接觸並將半導體晶圓的端面按壓至端面抵接構件的抵接面；以及驅動機構，使按壓構件在水平方向上直線性地移動。驅動機構收容於形成為中空狀的手基部的內部。按壓構件的基端部連結於驅動機構，並收容於手基部的內部。按壓構件的前端側部分配置於手基部的外部，按壓構件的前端能夠與半導體晶圓的端面接觸。在手基部形成有供按壓構件插通的開口部。 [現有技術文獻] [專利文獻] In the industrial robot described in Patent Document 1, the holding mechanism includes: an end face abutting member having an abutting surface abutting against the end face of a semiconductor wafer; a pressing member contacting the end face of the semiconductor wafer and pressing the end face of the semiconductor wafer to the abutting surface of the end face abutting member; and a driving mechanism that causes the pressing member to move linearly in the horizontal direction. The driving mechanism is accommodated in the interior of the hand base formed in a hollow shape. The base end of the pressing member is connected to the driving mechanism and accommodated in the interior of the hand base. The front end side portion of the pressing member is arranged outside the hand base, and the front end of the pressing member can contact the end face of the semiconductor wafer. An opening portion for inserting the pressing member is formed in the hand base. [Prior art literature] [Patent literature]
[專利文獻1]日本專利特開2015-36186號公報[Patent Document 1] Japanese Patent Publication No. 2015-36186
[發明所要解決的問題] 專利文獻1中記載的工業用機器人在對半導體晶圓使用水等液體的環境下使用的情況下（即，搭載半導體晶圓的手在使用液體的環境下使用的情況下），有液體從手基部的開口部浸入至手基部的內部的擔憂。另外，若液體浸入至手基部的內部，則產生收容於手基部的內部的驅動機構發生腐蝕的擔憂。 [Problem to be solved by the invention] When the industrial robot described in Patent Document 1 is used in an environment where liquids such as water are used for semiconductor wafers (i.e., when the hand carrying the semiconductor wafer is used in an environment where liquids are used), there is a concern that liquid may penetrate into the inside of the hand base from the opening of the hand base. In addition, if liquid penetrates into the inside of the hand base, there is a concern that the drive mechanism housed inside the hand base may be corroded.
因此，本發明的課題在於提供一種手，其為工業用機器人的手，包括：搭載部，搭載搬送對象物；搭載支撐部，固定搭載部的基端側；以及保持機構，用於將搭載於搭載部的搬送對象物保持於水平方向上的一定位置，所述工業用機器人的手即使在使用液體的環境下使用，也能夠有效果地抑制液體浸入至收容有構成保持機構的一部分的驅動機構的搭載支撐部的內部的配置空間。另外，本發明的課題在於提供一種包括所述手的工業用機器人。 [解決問題的技術手段] Therefore, the subject of the present invention is to provide a hand, which is a hand of an industrial robot, comprising: a loading part for loading a transport object; a loading support part for fixing the base end side of the loading part; and a holding mechanism for holding the transport object loaded on the loading part at a certain position in the horizontal direction, and the hand of the industrial robot can effectively prevent the liquid from penetrating into the internal configuration space of the loading support part that accommodates a driving mechanism that constitutes a part of the holding mechanism even when used in an environment where liquid is used. In addition, the subject of the present invention is to provide an industrial robot including the hand. [Technical means for solving the problem]
為了解決所述課題，本發明的一方式的工業用機器人的手是對搬送對象物進行搬送的工業用機器人的手，其特徵在於，包括：搭載部，搭載搬送對象物；搭載支撐部，至少一部分形成為中空狀並且固定搭載部的基端側；保持機構，用於將搭載於搭載部的搬送對象物保持於水平方向上的一定位置；多個密封構件，用於防止液體浸入至搭載支撐部的內部；以及氣體供給機構，向搭載支撐部的內部供給氣體，保持機構包括：端面抵接構件，具有與搬送對象物的端面抵接的抵接面且安裝於搭載部的前端側；按壓構件，具有與搬送對象物的端面接觸並將搬送對象物的端面按壓至抵接面的按壓部、及在前端側安裝有按壓部的軸狀的軸部，並被保持於搭載支撐部；以及驅動機構，收容於搭載支撐部的內部的配置空間，並且連結軸部的基端側，且使按壓構件相對於搭載支撐部在水平方向上直線性地移動，在搭載支撐部形成有配置有軸部的一部分並且與配置空間連通的軸配置孔，多個密封構件沿軸部的軸向排列並配置於軸配置孔中，並且與軸部的外周面接觸，氣體供給機構向配置空間供給氣體並使配置空間為正壓。In order to solve the above-mentioned problem, the hand of an industrial robot of one embodiment of the present invention is a hand of an industrial robot for transporting a transport object, and is characterized in that it includes: a carrying portion for carrying the transport object; a carrying support portion, at least a part of which is formed into a hollow shape and fixes the base end side of the carrying portion; a holding mechanism for holding the transport object carried on the carrying portion at a certain position in the horizontal direction; a plurality of sealing components for preventing liquid from penetrating into the interior of the carrying support portion; and a gas supply mechanism for supplying gas to the interior of the carrying support portion, the holding mechanism including: an end face abutting component having an abutting surface abutting against the end face of the transport object and installed on the front end side of the carrying portion; a press The pressing member comprises a pressing portion which contacts with the end face of the conveyed object and presses the end face of the conveyed object to the abutting face, and an axial shaft portion on which the pressing portion is installed at the front end side and is retained by the carrying support portion; and a driving mechanism which is accommodated in the configuration space inside the carrying support portion and is connected to the base end side of the shaft portion and causes the pressing member to move linearly in the horizontal direction relative to the carrying support portion. An axial configuration hole in which a part of the shaft portion is configured and which communicates with the configuration space is formed in the carrying support portion. A plurality of sealing members are arranged along the axial direction of the shaft portion and are configured in the axial configuration hole and are in contact with the outer peripheral surface of the shaft portion. A gas supply mechanism supplies gas to the configuration space and causes the configuration space to be at a positive pressure.
本方式的工業用機器人的手包括：多個密封構件，用於防止液體浸入至搭載支撐部的內部；以及氣體供給機構，向搭載支撐部的內部供給氣體。另外，在本方式中，多個密封構件沿軸部的軸向排列並配置於軸配置孔中，並且與軸部的外周面接觸，氣體供給機構向配置空間供給氣體並使配置空間為正壓。因此，在本方式中，即使在使用液體的環境下使用手，也能夠有效果地抑制液體通過軸配置孔浸入至搭載支撐部的內部的配置空間。The industrial robot hand of this method includes: a plurality of sealing components for preventing liquid from penetrating into the interior of the mounting support portion; and a gas supply mechanism for supplying gas to the interior of the mounting support portion. In addition, in this method, a plurality of sealing components are arranged along the axial direction of the shaft portion and arranged in the shaft arrangement hole, and are in contact with the outer peripheral surface of the shaft portion, and the gas supply mechanism supplies gas to the arrangement space and makes the arrangement space positive pressure. Therefore, in this method, even if the hand is used in an environment where liquid is used, it is possible to effectively prevent the liquid from penetrating into the arrangement space inside the mounting support portion through the shaft arrangement hole.
在本方式中，例如手包括在軸部的軸向上以相互隔開間隔的狀態配置的第一密封構件及第二密封構件這兩個密封構件作為密封構件，當將在軸部的軸向上配置有按壓部的一側設為第一方向側時，第一密封構件配置於比第二密封構件更靠第一方向側處。In this method, for example, the hand includes two sealing members, a first sealing member and a second sealing member, which are arranged in a state of being spaced apart from each other in the axial direction of the shaft portion. When the side where the pressing portion is arranged in the axial direction of the shaft portion is set as the first direction side, the first sealing member is arranged closer to the first direction side than the second sealing member.
在本方式中，優選為在搭載支撐部形成有從搭載支撐部的外側面連通到軸配置孔的第一密封構件與第二密封構件之間的部分的液體的排出孔。若以所述方式構成，則即使液體通過軸配置孔的配置有第一密封構件的部分，液體浸入至軸配置孔的第一密封構件與第二密封構件之間的部分，也能夠將浸入的液體從排出孔排出。因此，能夠更有效果地抑制液體通過軸配置孔而浸入至搭載支撐部的內部的配置空間。In this embodiment, it is preferred that a discharge hole for liquid is formed in the loading support portion, which is connected from the outer side surface of the loading support portion to the portion between the first sealing member and the second sealing member of the shaft configuration hole. If configured in this manner, even if the liquid passes through the portion of the shaft configuration hole where the first sealing member is disposed and penetrates into the portion between the first sealing member and the second sealing member of the shaft configuration hole, the penetrated liquid can be discharged from the discharge hole. Therefore, it is possible to more effectively suppress the liquid from penetrating into the configuration space inside the loading support portion through the shaft configuration hole.
在本方式中，優選為第一密封構件是全密封圈，第二密封構件是U形密封件或V形密封件。若以所述方式構成，則例如與第一密封構件及第二密封構件為O形環的情況相比，能夠減少第一密封構件及第二密封構件與軸部的滑動摩擦。因此，能夠在抑制第一密封構件及第二密封構件的磨損的同時，有效果地抑制液體浸入至搭載支撐部的內部的配置空間。另外，若以所述方式構成，則第一密封構件是全密封圈，由於第一密封構件的密封性高，因此能夠更有效果地抑制液體浸入至搭載支撐部的內部的配置空間。In this embodiment, it is preferred that the first sealing member is a full seal ring and the second sealing member is a U-shaped seal or a V-shaped seal. If configured in the manner described above, the sliding friction between the first sealing member and the second sealing member and the shaft can be reduced, for example, compared to the case where the first sealing member and the second sealing member are O-rings. Therefore, while suppressing the wear of the first sealing member and the second sealing member, it is possible to effectively suppress the infiltration of liquid into the internal configuration space of the loading support portion. In addition, if configured in the manner described above, the first sealing member is a full seal ring, and since the first sealing member has high sealing performance, it is possible to more effectively suppress the infiltration of liquid into the internal configuration space of the loading support portion.
在本方式中，優選為驅動機構使按壓構件在如下把持位置、即按壓部與搬送對象物的端面接觸並將搬送對象物的端面按壓至抵接面的把持位置、和按壓部從搬送對象物的端面離開的退避位置之間移動，在按壓構件配置於把持位置時，軸部的一部分配置於搭載支撐部的外部，當將在軸部的軸向上配置有按壓部的一側設為第一方向側，且將軸部的、在按壓構件配置於把持位置時配置於搭載支撐部的外部的部分設為外部配置部時，在按壓構件配置於退避位置時，外部配置部配置於比配置於最靠第一方向側的密封構件更靠第一方向側處。In the present embodiment, it is preferred that the driving mechanism causes the pressing member to move between a holding position, i.e., a holding position in which the pressing portion contacts the end face of the conveyed object and presses the end face of the conveyed object to the abutment surface, and a retreat position in which the pressing portion is separated from the end face of the conveyed object, and when the pressing member is arranged at the holding position, a portion of the shaft portion is arranged outside the loading support portion, and when a side of the shaft portion on which the pressing portion is arranged axially is set as the first direction side, and a portion of the shaft portion that is arranged outside the loading support portion when the pressing member is arranged at the holding position is set as an externally arranged portion, when the pressing member is arranged at the retreat position, the externally arranged portion is arranged closer to the first direction side than the sealing member arranged closest to the first direction side.
若以所述方式構成，則能夠在按壓構件配置於把持位置時防止配置於搭載支撐部的外部且附著有液體的外部配置部與密封構件接觸。因此，例如即使在使用包含研磨劑的藥液的環境下使用手，也能夠防止附著有藥液中所含的研磨劑的外部配置部與密封構件接觸。其結果，即使在使用包含研磨劑的藥液的環境下使用手，也能夠防止由附著於外部配置部的研磨劑引起的密封構件的損傷。If configured in the above manner, when the pressing member is arranged at the holding position, it is possible to prevent the external arrangement portion to which the liquid is attached, which is arranged outside the carrying support portion, from contacting the sealing member. Therefore, for example, even when the hand is used in an environment where a liquid containing an abrasive is used, it is possible to prevent the external arrangement portion to which the abrasive contained in the liquid is attached from contacting the sealing member. As a result, even when the hand is used in an environment where a liquid containing an abrasive is used, it is possible to prevent the sealing member from being damaged by the abrasive attached to the external arrangement portion.
在本方式中，優選為搭載支撐部包括：筒狀的密封保持構件，形成有軸配置孔並且在內周側保持多個密封構件；以及支撐部主體，與密封保持構件分體形成並且固定密封保持構件，在支撐部主體形成有配置有密封保持構件並且與配置空間連通的密封保持構件配置孔，密封保持構件相對於支撐部主體能夠裝卸，在密封保持構件的外周面或密封保持構件配置孔的內周面形成有外周側密封配置凹部，所述外周側密封配置凹部配置有用於防止液體浸入至配置空間的外周側密封構件。若以所述方式構成，則若從支撐部主體拆卸密封保持構件，則能夠將多個密封構件一起從支撐部主體拆卸。因此，能夠容易地進行多個密封構件的更換作業。In this embodiment, the supporting part preferably includes: a cylindrical sealing member having an axial arrangement hole and holding a plurality of sealing members on the inner circumference; and a supporting part body, which is formed separately from the sealing member and fixes the sealing member, a sealing member arrangement hole in which the sealing member is arranged and communicated with the arrangement space is formed in the supporting part body, the sealing member can be loaded and unloaded relative to the supporting part body, and an outer circumferential sealing arrangement recess is formed on the outer circumferential surface of the sealing member or the inner circumferential surface of the sealing member arrangement hole, and the outer circumferential sealing member for preventing liquid from entering the arrangement space is arranged in the outer circumferential sealing recess. If the configuration is made in the above manner, if the sealing member is removed from the supporting part body, the plurality of sealing members can be removed from the supporting part body together. Therefore, the replacement work of a plurality of sealing members can be easily performed.
在本方式中，優選為手包括在軸部的軸向上以相互隔開間隔的狀態配置的第一密封構件及第二密封構件這兩個密封構件作為密封構件，當將在軸部的軸向上配置有按壓部的一側設為第一方向側且將第一方向側的相反側設為第二方向側時，第一密封構件配置於比第二密封構件更靠第一方向側處，第一密封構件是全密封圈，第二密封構件是U形密封件或V形密封件，密封保持構件包括：筒狀的密封保持構件主體，在內周側形成有配置有第二密封構件的內周側密封配置凹部；以及蓋構件，具有從第一方向側***至密封保持構件主體的內周側的筒狀的***部，蓋構件與密封保持構件主體分體形成，並且能夠相對於密封保持構件主體裝卸，在密封保持構件主體的內周側形成有限制第一密封構件向第二方向側移動的第一限制面，***部的第二方向側的端面成為限制第一密封構件向第一方向側移動的第二限制面。In this method, it is preferred that the first sealing member and the second sealing member are configured in a state of being spaced apart from each other in the axial direction of the shaft portion as the sealing member, when the side on which the pressing portion is configured in the axial direction of the shaft portion is set as the first direction side and the opposite side of the first direction side is set as the second direction side, the first sealing member is configured closer to the first direction side than the second sealing member, the first sealing member is a full seal ring, the second sealing member is a U-shaped seal or a V-shaped seal, and the sealing holding member includes: a cylindrical sealing holding member A main body, having an inner circumferential side sealing configuration recess configured with a second sealing member formed on the inner circumferential side; and a cover member, having a cylindrical insertion portion inserted from the first direction side to the inner circumferential side of the sealing retaining member main body, the cover member being formed separately from the sealing retaining member main body and being loadable and unloadable relative to the sealing retaining member main body, a first limiting surface for limiting the movement of the first sealing member to the second direction side being formed on the inner circumferential side of the sealing retaining member main body, and an end face of the second direction side of the insertion portion serving as a second limiting surface for limiting the movement of the first sealing member to the first direction side.
若以所述方式構成，則例如與第一密封構件及第二密封構件為O形環的情況相比，能夠減少第一密封構件及第二密封構件與軸部的滑動摩擦。因此，能夠在抑制第一密封構件及第二密封構件的磨損的同時，有效果地抑制液體浸入至搭載支撐部的內部的配置空間。另外，若以所述方式構成，則第一密封構件是全密封圈，由於第一密封構件的密封性高，因此能夠更有效果地抑制液體浸入至搭載支撐部的內部的配置空間。If the configuration is made in the above manner, the sliding friction between the first sealing member and the second sealing member and the shaft can be reduced, for example, compared to the case where the first sealing member and the second sealing member are O-rings. Therefore, while suppressing the wear of the first sealing member and the second sealing member, it is possible to effectively suppress the infiltration of liquid into the internal configuration space of the mounting support portion. In addition, if the configuration is made in the above manner, the first sealing member is a full seal ring, and since the first sealing member has high sealing performance, it is possible to more effectively suppress the infiltration of liquid into the internal configuration space of the mounting support portion.
另外，若以所述方式構成，則形成有限制第一密封構件向第一方向側移動的第二限制面的蓋構件與密封保持構件主體分體形成，相對於密封保持構件主體能夠裝卸，因此即使與U形密封件或V形密封件相比剛性高的全密封圈作為第一密封構件配置於密封保持構件的內周側，通過從密封保持構件主體拆卸蓋構件，也能夠容易地在密封保持構件的內周側配置第一密封構件。In addition, if constructed in the manner described above, a cover member having a second limiting surface for limiting lateral movement of the first sealing member in the first direction is formed separately from the sealing retaining member main body and can be loaded and unloaded relative to the sealing retaining member main body. Therefore, even if a full sealing ring having higher rigidity than a U-shaped seal or a V-shaped seal is arranged on the inner circumference of the sealing retaining member as the first sealing member, the first sealing member can be easily arranged on the inner circumference of the sealing retaining member by removing the cover member from the sealing retaining member main body.
本方式的手可用於包括連結有手的臂、以及連結有臂的主體部的工業用機器人。在所述工業用機器人中，即使在使用液體的環境下使用手，也能夠有效果地抑制液體通過軸配置孔浸入至搭載支撐部的內部的配置空間。 [發明的效果] The hand of this method can be used for an industrial robot including an arm connected to the hand and a main body connected to the arm. In the industrial robot, even if the hand is used in an environment where liquid is used, it is possible to effectively prevent the liquid from penetrating into the internal configuration space of the mounting support part through the shaft configuration hole. [Effect of the invention]
如上所述，在本發明中，一種工業用機器人的手，包括：搭載部，搭載搬送對象物；搭載支撐部，固定搭載部的基端側；以及保持機構，用於將搭載於搭載部的搬送對象物保持於水平方向上的一定位置，所述工業用機器人的手即使在使用液體的環境下使用，也能夠有效果地抑制液體浸入至收容有構成保持機構的一部分的驅動機構的搭載支撐部的內部的配置空間。As described above, in the present invention, a hand of an industrial robot includes: a carrying portion for carrying an object to be transported; a carrying support portion for fixing the base end side of the carrying portion; and a holding mechanism for holding the object to be transported carried on the carrying portion at a certain position in the horizontal direction. Even when the hand of the industrial robot is used in an environment where liquid is used, it is possible to effectively prevent liquid from infiltrating into the internal configuration space of the carrying support portion that accommodates a driving mechanism that constitutes a part of the holding mechanism.
以下，參照附圖說明本發明的實施方式。Hereinafter, the implementation of the present invention will be described with reference to the accompanying drawings.
（工業用機器人的概略結構） 圖1是本發明的實施方式的工業用機器人1的側面圖。圖2是圖1所示的工業用機器人1的平面圖。 (Schematic structure of industrial robot) Fig. 1 is a side view of an industrial robot 1 according to an embodiment of the present invention. Fig. 2 is a plan view of the industrial robot 1 shown in Fig. 1 .
本形態的工業用機器人1（以下，設為“機器人1”）是用於搬送作為搬送對象物的半導體晶圓2（以下，設為“晶圓2”）的水平多關節型的機器人。晶圓2形成為圓板狀。機器人1組裝於半導體製造系統中使用。機器人1包括：搭載晶圓2的手3、連結有手3的臂4、以及連結有臂4的主體部5。本形態的機器人1在對晶圓2使用水等液體的環境下使用。即，在本形態中，搭載晶圓2的手3在使用液體的環境下使用。The industrial robot 1 of this form (hereinafter referred to as "robot 1") is a horizontal multi-joint robot used to transport a semiconductor wafer 2 (hereinafter referred to as "wafer 2") as a transport object. The wafer 2 is formed in a disk shape. The robot 1 is assembled in a semiconductor manufacturing system for use. The robot 1 includes: a hand 3 carrying the wafer 2, an arm 4 connected to the hand 3, and a main body 5 connected to the arm 4. The robot 1 of this form is used in an environment where liquids such as water are used for the wafer 2. That is, in this form, the hand 3 carrying the wafer 2 is used in an environment where liquids are used.
手3能夠轉動地連結於臂4的前端側。臂4的基端側能夠轉動地連結於主體部5。臂4包括：臂部7，基端側能夠轉動地連結於主體部5；以及臂部8，基端側能夠轉動地連結於臂部7的前端側。手3及臂部7、臂部8以上下方向為轉動的軸向進行轉動。臂4在水平方向上進行伸縮動作。The hand 3 is rotatably connected to the front end of the arm 4. The base end of the arm 4 is rotatably connected to the main body 5. The arm 4 includes: an arm 7, the base end of which is rotatably connected to the main body 5; and an arm 8, the base end of which is rotatably connected to the front end of the arm 7. The hand 3 and the arm 7 and the arm 8 rotate with the vertical direction as the axis of rotation. The arm 4 performs extension and contraction in the horizontal direction.
主體部5包括：升降體11，能夠轉動地連結有臂4的基端側（具體而言，臂部7的基端側）；框體12，收容升降體11；以及升降機構，使升降體11相對於框體12升降。臂部7的基端側能夠轉動地連結於升降體11的上端部。升降機構收容於框體12中。主體部5、臂部7、臂部8及手3在上下方向上從下側依次配置。另外，機器人1包括使臂部7、臂部8及手3轉動並使臂4伸縮的臂驅動機構等。The main body 5 includes: a lifting body 11 to which the base end of the arm 4 (specifically, the base end of the arm 7) is rotatably connected; a frame 12 to accommodate the lifting body 11; and a lifting mechanism to lift the lifting body 11 relative to the frame 12. The base end of the arm 7 is rotatably connected to the upper end of the lifting body 11. The lifting mechanism is accommodated in the frame 12. The main body 5, the arm 7, the arm 8, and the hand 3 are arranged in order from the lower side in the up-down direction. In addition, the robot 1 includes an arm driving mechanism that rotates the arm 7, the arm 8, and the hand 3 and extends and retracts the arm 4.
（手的結構） 圖3是用於說明圖2所示的手3的結構的平面圖。圖4是用於說明圖3的E-E剖面的結構的剖面圖。 (Structure of the hand) Fig. 3 is a plan view for explaining the structure of the hand 3 shown in Fig. 2. Fig. 4 is a cross-sectional view for explaining the structure of the E-E section of Fig. 3.
手3例如形成為從上下方向觀察時的形狀為長方形形狀。手3包括：搭載部15，搭載晶圓2；搭載支撐部16，固定搭載部15的基端側；以及手基部17，構成手3的基端側部分。手基部17能夠轉動地連結於臂部8的前端側。手基部17能夠以上下方向為轉動的軸向相對於臂部8轉動。搭載支撐部16能夠轉動地連結於手基部17。搭載支撐部16能夠以水平方向為轉動的軸向相對於手基部17轉動。搭載支撐部16的至少一部分形成為中空狀。The hand 3 is formed, for example, in a rectangular shape when viewed from the top and bottom. The hand 3 includes: a carrying portion 15 for carrying the wafer 2; a carrying support portion 16 for fixing the base end side of the carrying portion 15; and a hand base 17 constituting the base end side portion of the hand 3. The hand base 17 is rotatably connected to the front end side of the arm 8. The hand base 17 can rotate relative to the arm 8 with the up-and-down direction as the axis of rotation. The carrying support portion 16 is rotatably connected to the hand base 17. The carrying support portion 16 can rotate relative to the hand base 17 with the horizontal direction as the axis of rotation. At least a portion of the carrying support portion 16 is formed to be hollow.
搭載部15、搭載支撐部16及手基部17在水平方向上依次排列。在以下的說明中，將為水平方向且搭載部15、搭載支撐部16及手基部17排列的方向設為“前後方向”，將與上下方向（鉛垂方向）及前後方向正交的圖3等的Y方向設為“左右方向”。另外，將作為前後方向的其中一側的圖3等的X1方向側設為“前”側，將作為其相反側的圖3等的X2方向側設為“後”側。搭載部15配置於搭載支撐部16的前側，搭載支撐部16配置於手基部17的前側。搭載支撐部16能夠以前後方向為轉動的軸向相對於手基部17轉動。The carrying portion 15, the carrying support portion 16, and the hand base 17 are arranged in sequence in the horizontal direction. In the following description, the horizontal direction in which the carrying portion 15, the carrying support portion 16, and the hand base 17 are arranged is referred to as the "front-rear direction", and the Y direction of FIG. 3, etc., which is orthogonal to the up-down direction (plumb-vertical direction) and the front-rear direction, is referred to as the "left-right direction". In addition, the X1 direction side of FIG. 3, etc., which is one side of the front-rear direction, is referred to as the "front" side, and the X2 direction side of FIG. 3, etc., which is the opposite side, is referred to as the "rear" side. The carrying portion 15 is arranged on the front side of the carrying support portion 16, and the carrying support portion 16 is arranged on the front side of the hand base 17. The carrying support portion 16 can rotate relative to the hand base 17 with the front-rear direction as the axis of rotation.
手3包括：保持機構19（參照圖2），用於將搭載於搭載部15的晶圓2保持於水平方向上的一定位置；多個密封構件20、21，用於防止液體浸入至搭載支撐部16的內部；以及氣體供給機構22（參照圖2），向搭載支撐部16的內部供給氣體。本形態的手3包括作為第一密封構件的密封構件20、以及作為第二密封構件的密封構件21這兩個密封構件20、21。另外，手3包括以前後方向為轉動的軸向使搭載部15及搭載支撐部16相對於手基部17至少轉動180°的轉動機構（省略圖示）。在機器人1中，能夠使搭載於搭載部15的晶圓2與搭載部15一起反轉。The hand 3 includes: a holding mechanism 19 (see FIG. 2 ) for holding the wafer 2 mounted on the mounting portion 15 at a certain position in the horizontal direction; a plurality of sealing members 20 and 21 for preventing liquid from penetrating into the interior of the mounting support portion 16; and a gas supply mechanism 22 (see FIG. 2 ) for supplying gas to the interior of the mounting support portion 16. The hand 3 of this form includes two sealing members 20 and 21, namely, a sealing member 20 as a first sealing member and a sealing member 21 as a second sealing member. In addition, the hand 3 includes a rotating mechanism (not shown) for rotating the mounting portion 15 and the mounting support portion 16 at least 180° relative to the hand base 17 in the forward and backward direction as the axis of rotation. In the robot 1, the wafer 2 mounted on the mounting portion 15 can be reversed together with the mounting portion 15.
搭載部15例如形成為長方形的平板狀。搭載部15配置成搭載部15的厚度方向與上下方向一致。另外，搭載部15配置成形成為長方形形狀的搭載部15的長邊方向與前後方向一致。搭載支撐部16形成為上下方向的厚度薄的扁平的長方體的塊狀。搭載部15的後端部固定於搭載支撐部16的前端部。The loading portion 15 is formed, for example, in a rectangular flat plate shape. The loading portion 15 is arranged so that the thickness direction of the loading portion 15 coincides with the vertical direction. In addition, the loading portion 15 is arranged so that the long side direction of the loading portion 15 formed in a rectangular shape coincides with the front-rear direction. The loading support portion 16 is formed in a flat rectangular block shape with a thin thickness in the vertical direction. The rear end portion of the loading portion 15 is fixed to the front end portion of the loading support portion 16.
保持機構19是從三個方向與搭載於搭載部15的晶圓2的端面（外周面）接觸並將搭載於搭載部15的晶圓2在水平方向上保持於一定位置的邊側插接（edgegrip）型的保持機構。保持機構19包括：端面抵接構件25，具有與晶圓2的端面抵接的抵接面25a；按壓構件27，具有與晶圓2的端面接觸並將晶圓2的端面按壓至端面抵接構件25的抵接面25a的作為按壓部的輥部26；以及驅動機構28，使按壓構件27在水平方向上直線性地移動。The holding mechanism 19 is an edge grip type holding mechanism that contacts the end face (peripheral face) of the wafer 2 mounted on the mounting portion 15 from three directions and holds the wafer 2 mounted on the mounting portion 15 at a certain position in the horizontal direction. The holding mechanism 19 includes: an end face abutting member 25 having an abutting face 25a abutting against the end face of the wafer 2; a pressing member 27 having a roller 26 as a pressing portion that contacts the end face of the wafer 2 and presses the end face of the wafer 2 to the abutting face 25a of the end face abutting member 25; and a driving mechanism 28 that moves the pressing member 27 linearly in the horizontal direction.
端面抵接構件25安裝於搭載部15的前端側。即，端面抵接構件25安裝於搭載部15的前端側。具體而言，端面抵接構件25固定於搭載部15的上表面的前端部的兩個部位。載置有晶圓2的兩個晶圓載置構件29固定於搭載部15的基端側的上表面（即，搭載部15的後端側的上表面）。搭載於搭載部15的晶圓2的下表面與端面抵接構件25及晶圓載置構件29接觸。此外，在圖1中，省略了端面抵接構件25及晶圓載置構件29的圖示。The end face abutment member 25 is mounted on the front end side of the loading portion 15. That is, the end face abutment member 25 is mounted on the front end side of the loading portion 15. Specifically, the end face abutment member 25 is fixed to two locations of the front end portion of the upper surface of the loading portion 15. Two wafer loading members 29 on which the wafers 2 are loaded are fixed to the upper surface of the base end side of the loading portion 15 (that is, the upper surface of the rear end side of the loading portion 15). The lower surface of the wafer 2 loaded on the loading portion 15 is in contact with the end face abutment member 25 and the wafer loading member 29. In addition, in FIG. 1 , the illustration of the end face abutment member 25 and the wafer loading member 29 is omitted.
按壓構件27保持於搭載支撐部16。具體而言，按壓構件27以能夠向前後方向直線移動的方式保持於搭載支撐部16。按壓構件27包括在前端側安裝有輥部26的軸狀的軸部32。軸部32形成為在前後方向上細長的圓柱狀。軸部32的軸向與前後方向一致。即，前後方向為軸部32的軸向。The pressing member 27 is held on the loading support portion 16. Specifically, the pressing member 27 is held on the loading support portion 16 in a manner capable of linear movement in the front-rear direction. The pressing member 27 includes an axial shaft portion 32 having the roller portion 26 mounted on the front end side. The shaft portion 32 is formed into a cylindrical shape that is elongated in the front-rear direction. The axial direction of the shaft portion 32 is consistent with the front-rear direction. That is, the front-rear direction is the axial direction of the shaft portion 32.
輥部26安裝於軸部32的前端部。輥部26包括輥33、以及能夠旋轉地保持輥33的輥保持構件34。輥保持構件34固定於軸部32的前端部。輥33保持於輥保持構件34，使得能夠進行以上下方向為旋轉的軸向的旋轉。本形態的前側（X1方向側）為在軸部32的軸向上配置有作為按壓部的輥部26的一側即第一方向側，後側（X2方向側）為第一方向側的相反側即第二方向側。The roller portion 26 is mounted on the front end portion of the shaft portion 32. The roller portion 26 includes a roller 33 and a roller holding member 34 that can rotatably hold the roller 33. The roller holding member 34 is fixed to the front end portion of the shaft portion 32. The roller 33 is held by the roller holding member 34 so that it can rotate in the axial direction with the up-and-down direction as the rotation. The front side (X1 direction side) of this form is a side of the shaft portion 32 where the roller 26 as a pressing portion is arranged in the axial direction, that is, the first direction side, and the rear side (X2 direction side) is the opposite side of the first direction side, that is, the second direction side.
驅動機構28收容於形成為中空狀的搭載支撐部16的內部的配置空間S（參照圖4）中。驅動機構28包括作為驅動源的氣缸35、以及利用氣缸35的動力在前後方向上直線性地移動的滑塊36。滑塊36連結於氣缸35的杆。導向塊37固定於滑塊36。導向塊37與固定於搭載支撐部16的導軌38卡合。The drive mechanism 28 is accommodated in the configuration space S (see FIG. 4 ) formed inside the hollow loading support portion 16. The drive mechanism 28 includes a cylinder 35 as a driving source, and a slider 36 that moves linearly in the front-rear direction using the power of the cylinder 35. The slider 36 is connected to the rod of the cylinder 35. The guide block 37 is fixed to the slider 36. The guide block 37 is engaged with a guide rail 38 fixed to the loading support portion 16.
滑塊36由導向塊37及導軌38在前後方向上引導。軸部32的基端側連結於滑塊36。具體而言，軸部32的後端部固定於滑塊36。軸部32的後端部通過一根螺釘39固定於滑塊36的前端部。螺釘39例如是帶六角孔的固定螺釘。通過擰鬆螺釘39，按壓構件27能夠從滑塊36拆卸。The slider 36 is guided in the front-rear direction by the guide block 37 and the guide rail 38. The base end side of the shaft 32 is connected to the slider 36. Specifically, the rear end of the shaft 32 is fixed to the slider 36. The rear end of the shaft 32 is fixed to the front end of the slider 36 by a screw 39. The screw 39 is, for example, a fixing screw with a hexagonal hole. By loosening the screw 39, the pressing member 27 can be removed from the slider 36.
驅動機構28使按壓構件27相對於搭載支撐部16在前後方向上直線性地移動。另外，驅動機構28使按壓構件27在如下把持位置、即輥部26與晶圓2的端面接觸（具體而言，輥33與晶圓2的端面接觸）並將晶圓2的端面按壓至抵接面25a的把持位置（參照圖3的雙點劃線）、和輥部26從晶圓2的端面離開（具體而言，輥33從晶圓2的端面離開）的退避位置（參照圖3的實線）之間移動。按壓構件27朝向把持位置向前側移動，並且朝向退避位置向後側移動。The driving mechanism 28 moves the pressing member 27 linearly in the front-rear direction relative to the loading support portion 16. In addition, the driving mechanism 28 moves the pressing member 27 between a holding position (refer to the double-dotted line in FIG. 3 ) where the roller 26 contacts the end surface of the wafer 2 (specifically, the roller 33 contacts the end surface of the wafer 2) and presses the end surface of the wafer 2 to the abutment surface 25a, and a retreat position (refer to the solid line in FIG. 3 ) where the roller 26 is separated from the end surface of the wafer 2 (specifically, the roller 33 is separated from the end surface of the wafer 2). The pressing member 27 moves forward toward the holding position and moves backward toward the retreat position.
搭載支撐部16包括：筒狀的密封保持構件41，在內周側保持密封構件20、密封構件21；支撐部主體42，與密封保持構件41分體形成；以及蓋構件43，與支撐部主體42分體形成並固定於支撐部主體42。支撐部主體42形成為上表面開口的長方體的箱狀。蓋構件43形成為平板狀。蓋構件43以覆蓋支撐部主體42的上表面的開口的方式固定於支撐部主體42的上表面側。配置空間S由支撐部主體42及蓋構件43劃定。驅動機構28配置於支撐部主體42的內部。The supporting portion 16 includes: a cylindrical sealing retaining member 41 that retains the sealing member 20 and the sealing member 21 on the inner circumference; a supporting portion main body 42 that is formed separately from the sealing retaining member 41; and a cover member 43 that is formed separately from the supporting portion main body 42 and fixed to the supporting portion main body 42. The supporting portion main body 42 is formed in a rectangular box shape with an opening on the upper surface. The cover member 43 is formed in a flat plate shape. The cover member 43 is fixed to the upper surface side of the supporting portion main body 42 in a manner covering the opening on the upper surface of the supporting portion main body 42. The configuration space S is defined by the supporting portion main body 42 and the cover member 43. The drive mechanism 28 is arranged inside the supporting portion main body 42.
在支撐部主體42的前端部的內側形成有保持密封保持構件41的保持部42a。保持部42a形成於支撐部主體42的左右方向的中心位置。在保持部42a形成有配置有密封保持構件41的密封保持構件配置孔42b。即，在支撐部主體42形成有密封保持構件配置孔42b。密封保持構件配置孔42b是在前後方向上貫通保持部42a的圓孔。密封保持構件配置孔42b在支撐部主體42的前端面開口，並且與配置空間S連通。A retaining portion 42a for retaining the sealing retaining member 41 is formed on the inner side of the front end portion of the support portion main body 42. The retaining portion 42a is formed at the center position of the support portion main body 42 in the left-right direction. A sealing retaining member configuration hole 42b in which the sealing retaining member 41 is configured is formed in the retaining portion 42a. That is, a sealing retaining member configuration hole 42b is formed in the support portion main body 42. The sealing retaining member configuration hole 42b is a circular hole that penetrates the retaining portion 42a in the front-rear direction. The sealing retaining member configuration hole 42b opens at the front end surface of the support portion main body 42 and is connected to the configuration space S.
密封保持構件41形成為帶凸緣的圓筒狀。密封保持構件41的除了凸緣部以外的部分從前側***至密封保持構件配置孔42b中。密封保持構件41配置成密封保持構件41的軸向與前後方向一致。密封保持構件41的凸緣部構成密封保持構件41的前端部。密封保持構件41固定於支撐部主體42。具體而言，密封保持構件41的凸緣部固定於保持部42a的前端側。另外，密封保持構件41通過多個螺釘44固定於支撐部主體42。螺釘44例如是帶有六角孔的螺栓。密封保持構件41能夠通過拆卸螺釘44而從支撐部主體42拆卸。即，密封保持構件41能夠相對於支撐部主體42裝卸。The sealing retaining member 41 is formed into a cylindrical shape with a flange. The portion of the sealing retaining member 41 other than the flange portion is inserted into the sealing retaining member configuration hole 42b from the front side. The sealing retaining member 41 is configured so that the axial direction of the sealing retaining member 41 is consistent with the front-rear direction. The flange portion of the sealing retaining member 41 constitutes the front end portion of the sealing retaining member 41. The sealing retaining member 41 is fixed to the supporting portion main body 42. Specifically, the flange portion of the sealing retaining member 41 is fixed to the front end side of the retaining portion 42a. In addition, the sealing retaining member 41 is fixed to the supporting portion main body 42 by a plurality of screws 44. The screw 44 is, for example, a bolt with a hexagonal hole. The sealing retaining member 41 can be removed from the supporting portion main body 42 by removing the screw 44. That is, the sealing holding member 41 can be attached to and detached from the supporting portion main body 42 .
密封保持構件41的內周側成為配置有軸部32的一部分的軸配置孔41a。即，在搭載支撐部16形成有軸配置孔41a。具體而言，在密封保持構件41形成有軸配置孔41a。輥部26配置於比密封保持構件41更靠前側處。在軸部32的徑向上，在軸部32的外周面與軸配置孔41a的內周面之間形成有間隙。軸配置孔41a與配置空間S連通。在軸配置孔41a中配置有密封構件20、密封構件21。密封構件20與密封構件21在前後方向上以相互隔開間隔的狀態配置。即，密封構件20與密封構件21在前後方向上排列。在本形態中，密封構件20配置於比密封構件21更靠前側處。The inner peripheral side of the sealing retaining member 41 becomes a shaft configuration hole 41a in which a part of the shaft portion 32 is configured. That is, the shaft configuration hole 41a is formed in the mounting support portion 16. Specifically, the shaft configuration hole 41a is formed in the sealing retaining member 41. The roller portion 26 is arranged at a position closer to the front side than the sealing retaining member 41. In the radial direction of the shaft portion 32, a gap is formed between the outer peripheral surface of the shaft portion 32 and the inner peripheral surface of the shaft configuration hole 41a. The shaft configuration hole 41a is connected to the configuration space S. The sealing member 20 and the sealing member 21 are arranged in the shaft configuration hole 41a. The sealing member 20 and the sealing member 21 are arranged in a state of being spaced apart from each other in the front-to-back direction. That is, the sealing member 20 and the sealing member 21 are arranged in the front-to-back direction. In this embodiment, the sealing member 20 is arranged at the front side of the sealing member 21 .
密封構件20、密封構件21是唇形密封件，形成為環狀。具體而言，密封構件20是全密封圈，密封構件21是U形密封件或V形密封件（Y形密封件）。密封構件20、密封構件21配置於軸部32的外周側。密封構件20、密封構件21與軸部32的外周面接觸。具體而言，密封構件20、密封構件21的唇形部分密接於軸部32的外周面。密封構件20、密封構件21起到防止液體從軸配置孔41a浸入至配置空間S的功能。The sealing members 20 and 21 are lip seals formed in a ring shape. Specifically, the sealing member 20 is a full seal ring, and the sealing member 21 is a U-shaped seal or a V-shaped seal (Y-shaped seal). The sealing members 20 and 21 are arranged on the outer peripheral side of the shaft portion 32. The sealing members 20 and 21 are in contact with the outer peripheral surface of the shaft portion 32. Specifically, the lip portions of the sealing members 20 and 21 are in close contact with the outer peripheral surface of the shaft portion 32. The sealing members 20 and 21 have the function of preventing liquid from penetrating into the configuration space S from the shaft configuration hole 41a.
在密封保持構件41的內周面形成有配置有密封構件20的密封配置凹部41b、以及配置有密封構件21的密封配置凹部41c。即，在軸配置孔41a形成有密封配置凹部41b、密封配置凹部41c。密封配置凹部41b、密封配置凹部41c形成為朝向密封保持構件41的徑向外側凹陷的環狀。密封配置凹部41b限制密封構件20的前後方向上的移動，密封配置凹部41c限制密封構件21的前後方向上的移動。密封配置凹部41b形成於比密封配置凹部41c更靠前側處。本形態的密封配置凹部41c是內周側密封配置凹部。A sealing configuration recess 41b in which the sealing member 20 is configured, and a sealing configuration recess 41c in which the sealing member 21 is configured are formed on the inner circumferential surface of the sealing retaining member 41. That is, the sealing configuration recess 41b and the sealing configuration recess 41c are formed in the axial configuration hole 41a. The sealing configuration recess 41b and the sealing configuration recess 41c are formed in a ring shape that is recessed toward the radial outer side of the sealing retaining member 41. The sealing configuration recess 41b restricts the movement of the sealing member 20 in the front-rear direction, and the sealing configuration recess 41c restricts the movement of the sealing member 21 in the front-rear direction. The sealing configuration recess 41b is formed at a position closer to the front side than the sealing configuration recess 41c. The sealing configuration recess 41c of this form is an inner circumferential side sealing configuration recess.
在密封保持構件41的外周側配置有密封構件45，所述密封構件45用於防止液體從密封保持構件41的外周面與密封保持構件配置孔42b的內周面之間的間隙浸入至配置空間S。密封構件45為O形環，且形成為環狀。在密封保持構件41的外周面形成有配置有密封構件45的密封配置凹部41d。密封配置凹部41d形成為朝向密封保持構件41的徑向內側凹陷的環狀。本形態的密封構件45是外周側密封構件，密封配置凹部41d是外周側密封配置凹部。A sealing member 45 is arranged on the outer peripheral side of the sealing retaining member 41, and the sealing member 45 is used to prevent liquid from penetrating into the configuration space S from the gap between the outer peripheral surface of the sealing retaining member 41 and the inner peripheral surface of the sealing retaining member configuration hole 42b. The sealing member 45 is an O-ring and is formed in a ring shape. A sealing configuration recess 41d in which the sealing member 45 is configured is formed on the outer peripheral surface of the sealing retaining member 41. The sealing configuration recess 41d is formed in the shape of a ring that is recessed radially inwardly toward the sealing retaining member 41. The sealing member 45 in this form is a peripheral side sealing member, and the sealing configuration recess 41d is an peripheral side sealing configuration recess.
另外，密封保持構件41包括：筒狀的密封保持構件主體47，在內周側形成有密封配置凹部41c；以及筒狀的蓋構件48，與密封保持構件主體47分體形成。本形態的密封保持構件41包括密封保持構件主體47及蓋構件48。The seal holding member 41 includes a cylindrical seal holding member body 47 having a seal placement recess 41c formed on the inner circumference thereof and a cylindrical cover member 48 formed separately from the seal holding member body 47. The seal holding member 41 of this embodiment includes the seal holding member body 47 and the cover member 48.
密封保持構件主體47形成為帶凸緣的圓筒狀。密封保持構件主體47的除了凸緣部以外的部分***至密封保持構件配置孔42b中。密封保持構件主體47配置成密封保持構件主體47的軸向與前後方向一致。密封保持構件主體47的凸緣部構成密封保持構件主體47的前端部。密封配置凹部41d形成於密封保持構件主體47的外周面。The sealing and holding member body 47 is formed into a cylindrical shape with a flange. The portion of the sealing and holding member body 47 other than the flange is inserted into the sealing and holding member configuration hole 42b. The sealing and holding member body 47 is configured so that the axial direction of the sealing and holding member body 47 is consistent with the front-rear direction. The flange of the sealing and holding member body 47 constitutes the front end of the sealing and holding member body 47. The sealing configuration recess 41d is formed on the outer peripheral surface of the sealing and holding member body 47.
蓋構件48形成為帶凸緣的圓筒狀。蓋構件48包括從前側***至密封保持構件主體47的內周側的筒狀的***部48a。***部48a形成為圓筒狀。***部48a的長度（前後方向上的長度）比密封保持構件主體47的長度（前後方向上的長度）短。例如***部48a的長度為密封保持構件主體47的長度的一半左右。The cover member 48 is formed into a cylindrical shape with a flange. The cover member 48 includes a cylindrical insertion portion 48a inserted from the front side into the inner peripheral side of the sealing member body 47. The insertion portion 48a is formed into a cylindrical shape. The length of the insertion portion 48a (the length in the front-back direction) is shorter than the length of the sealing member body 47 (the length in the front-back direction). For example, the length of the insertion portion 48a is about half the length of the sealing member body 47.
蓋構件48配置成蓋構件48的軸向與前後方向一致。蓋構件48的凸緣部與***部48a的前端連接，構成蓋構件48的前端部。蓋構件48的凸緣部配置於密封保持構件主體47的凸緣部的前側。蓋構件48的凸緣部的後表面與密封保持構件主體47的凸緣部的前表面接觸。密封保持構件主體47與蓋構件48通過螺釘44而一起固定於保持部42a。蓋構件48相對於密封保持構件主體47能夠裝卸。The cover member 48 is arranged so that the axial direction of the cover member 48 is consistent with the front-rear direction. The flange portion of the cover member 48 is connected to the front end of the insertion portion 48a, forming the front end portion of the cover member 48. The flange portion of the cover member 48 is arranged on the front side of the flange portion of the sealing retaining member body 47. The rear surface of the flange portion of the cover member 48 is in contact with the front surface of the flange portion of the sealing retaining member body 47. The sealing retaining member body 47 and the cover member 48 are fixed together to the retaining portion 42a by screws 44. The cover member 48 can be loaded and unloaded relative to the sealing retaining member body 47.
供***部48a***至內周側的密封保持構件主體47的前側部分的內徑比密封保持構件主體47的後側部分的內徑大。密封保持構件主體47的後側部分的內徑與蓋構件48的內徑大致相等。密封配置凹部41c形成於密封保持構件主體47的後側部分的內周側。在密封保持構件主體47的前側部分的內周面與密封保持構件主體47的後側部分的內周面的邊界形成有與前後方向正交的圓環狀的階差面47a。The inner diameter of the front side portion of the sealing holding member body 47 to which the insertion portion 48a is inserted into the inner circumference is larger than the inner diameter of the rear side portion of the sealing holding member body 47. The inner diameter of the rear side portion of the sealing holding member body 47 is substantially equal to the inner diameter of the cover member 48. The sealing configuration recess 41c is formed on the inner circumference of the rear side portion of the sealing holding member body 47. A circular step surface 47a orthogonal to the front-rear direction is formed at the boundary between the inner circumference of the front side portion of the sealing holding member body 47 and the inner circumference of the rear side portion of the sealing holding member body 47.
密封配置凹部41b形成於階差面47a與***部48a的後端面48b之間。即，密封構件20配置於階差面47a與後端面48b之間。本形態的階差面47a成為限制密封構件20向後側移動的第一限制面。即，在密封保持構件主體47的內周側形成有第一限制面。另外，***部48a的後端面48b成為限制密封構件20向後側移動的第二限制面。另外，在本形態中，在密封保持構件主體47的後側部分的內周側與***部48a的內周側形成有軸配置孔41a。The sealing configuration recess 41b is formed between the step surface 47a and the rear end surface 48b of the insertion portion 48a. That is, the sealing member 20 is configured between the step surface 47a and the rear end surface 48b. The step surface 47a of this form becomes a first limiting surface that limits the rearward movement of the sealing member 20. That is, a first limiting surface is formed on the inner circumference of the sealing retaining member main body 47. In addition, the rear end surface 48b of the insertion portion 48a becomes a second limiting surface that limits the rearward movement of the sealing member 20. In addition, in this form, an axial configuration hole 41a is formed on the inner circumference of the rear portion of the sealing retaining member main body 47 and the inner circumference of the insertion portion 48a.
在搭載支撐部16形成有從搭載支撐部16的外側面連通到軸配置孔41a的、密封構件20與密封構件21之間的部分的液體的排出孔16a。排出孔16a是從搭載支撐部16的下表面貫通至軸配置孔41a的、密封構件20與密封構件21之間的部分的貫通孔。如圖4所示，排出孔16a包括形成於密封保持構件主體47的後側部分的貫通孔、以及形成於支撐部主體42的下表面部的貫通孔。排出孔16a形成於比密封構件45更靠前側處。The loading support portion 16 is provided with a discharge hole 16a for liquid in the portion between the sealing member 20 and the sealing member 21, which is connected from the outer side surface of the loading support portion 16 to the shaft arrangement hole 41a. The discharge hole 16a is a through hole that penetrates from the lower surface of the loading support portion 16 to the shaft arrangement hole 41a, and is a through hole in the portion between the sealing member 20 and the sealing member 21. As shown in FIG. 4 , the discharge hole 16a includes a through hole formed in the rear side portion of the sealing holding member main body 47, and a through hole formed in the lower surface portion of the support portion main body 42. The discharge hole 16a is formed at a position closer to the front side than the sealing member 45.
如上所述，驅動機構28使按壓構件27在如下把持位置、即輥33與晶圓2的端面接觸並將晶圓2的端面按壓至抵接面25a的把持位置、和輥33從晶圓2的端面離開的退避位置之間移動。在按壓構件27配置於把持位置時，軸部32的前端側的一部分配置於搭載支撐部16的外部。若將軸部32的在按壓構件27配置於把持位置時配置於搭載支撐部16的外部的部分設為外部配置部32a，則例如圖4的被虛線包圍的部分成為外部配置部32a。如圖4所示，在按壓構件27配置於退避位置時，外部配置部32a配置於比配置於前側的密封構件20更靠前側處。As described above, the driving mechanism 28 moves the pressing member 27 between a holding position where the roller 33 contacts the end surface of the wafer 2 and presses the end surface of the wafer 2 to the abutment surface 25a, and a retreat position where the roller 33 is separated from the end surface of the wafer 2. When the pressing member 27 is arranged at the holding position, a part of the front end side of the shaft portion 32 is arranged outside the loading support portion 16. If the part of the shaft portion 32 arranged outside the loading support portion 16 when the pressing member 27 is arranged at the holding position is set as the external arrangement portion 32a, for example, the part surrounded by the dotted line in FIG. 4 becomes the external arrangement portion 32a. As shown in FIG. 4 , when the pressing member 27 is arranged at the retracted position, the outer arrangement portion 32 a is arranged at the front side relative to the sealing member 20 arranged at the front side.
氣體供給機構22向配置空間S供給氣體並使配置空間S為正壓。本形態的氣體供給機構22向配置空間S供給空氣。氣體供給機構22包括：向配置空間S輸送壓縮空氣的送風機等壓縮空氣的供給源、以及連接壓縮空氣的供給源與配置空間S的配管等。The gas supply mechanism 22 supplies gas to the configuration space S and makes the configuration space S positively pressurized. The gas supply mechanism 22 of this form supplies air to the configuration space S. The gas supply mechanism 22 includes: a compressed air supply source such as a blower that transports compressed air to the configuration space S, and a pipe connecting the compressed air supply source and the configuration space S.
（本形態的主要效果） 如以上所說明，在本形態中，手3包括：兩個密封構件20、21，用於防止液體浸入至搭載支撐部16的內部；以及氣體供給機構22，向搭載支撐部16的內部供給氣體。另外，在本形態中，與軸部32的外周面接觸的兩個密封構件20、21配置於軸配置孔41a中，氣體供給機構22向配置空間S供給氣體並使配置空間S為正壓。因此，在本形態中，即使在使用液體的環境下使用手3，也能夠有效果地抑制液體通過軸配置孔41a而浸入至搭載支撐部16的內部的配置空間S。 (Main effect of this form) As described above, in this form, the hand 3 includes: two sealing members 20, 21 for preventing liquid from penetrating into the interior of the loading support portion 16; and a gas supply mechanism 22 for supplying gas to the interior of the loading support portion 16. In addition, in this form, the two sealing members 20, 21 in contact with the outer peripheral surface of the shaft portion 32 are arranged in the shaft arrangement hole 41a, and the gas supply mechanism 22 supplies gas to the arrangement space S and makes the arrangement space S positive pressure. Therefore, in this form, even if the hand 3 is used in an environment where liquid is used, it is possible to effectively suppress the liquid from penetrating into the arrangement space S inside the loading support portion 16 through the shaft arrangement hole 41a.
在本形態中，在搭載支撐部16形成有從搭載支撐部16的外側面連通到軸配置孔41a的、密封構件20與密封構件21之間的部分的液體的排出孔16a。因此，在本形態中，即使液體通過軸配置孔41a的配置有密封構件20的部分，且液體浸入至軸配置孔41a的、密封構件20與密封構件21之間的部分，也能夠將浸入的液體從排出孔16a排出。特別是，在本形態中，由於排出孔16a與搭載支撐部16的下表面連通，因此即使液體浸入至軸配置孔41a的、密封構件20與密封構件21之間的部分，由於重力的作用，也容易將浸入的液體從排出孔16a排出。因此，在本形態中，能夠更有效果地抑制液體通過軸配置孔41a而浸入至配置空間S。In this embodiment, a discharge hole 16a for liquid is formed in the loading support portion 16, which is connected from the outer side surface of the loading support portion 16 to the portion between the sealing member 20 and the sealing member 21 of the shaft configuration hole 41a. Therefore, in this embodiment, even if the liquid passes through the portion of the shaft configuration hole 41a where the sealing member 20 is arranged, and the liquid penetrates into the portion between the sealing member 20 and the sealing member 21 of the shaft configuration hole 41a, the penetrated liquid can be discharged from the discharge hole 16a. In particular, in this embodiment, since the discharge hole 16a is connected to the lower surface of the loading support portion 16, even if the liquid penetrates into the portion between the sealing member 20 and the sealing member 21 of the shaft configuration hole 41a, the penetrated liquid can be easily discharged from the discharge hole 16a due to the effect of gravity. Therefore, in this embodiment, it is possible to more effectively suppress the liquid from entering the arrangement space S through the shaft arrangement hole 41a.
在本形態中，密封構件20為全密封圈，密封構件21為U形密封件或V形密封件。因此，在本形態中，例如與密封構件20、密封構件21為O形環的情況相比，能夠減少密封構件20、密封構件21與軸部32的滑動摩擦。因此，在本形態中，能夠在抑制密封構件20、密封構件21的磨損的同時，有效果地抑制液體浸入至配置空間S。另外，在本形態中，密封構件20為全密封圈，由於密封構件20的密封性高，因此能夠更有效果地抑制液體浸入至配置空間S。In this embodiment, the sealing member 20 is a full seal ring, and the sealing member 21 is a U-shaped seal or a V-shaped seal. Therefore, in this embodiment, compared with, for example, a case where the sealing members 20 and 21 are O-rings, the sliding friction between the sealing members 20 and 21 and the shaft portion 32 can be reduced. Therefore, in this embodiment, while suppressing the wear of the sealing members 20 and 21, it is possible to effectively suppress the infiltration of liquid into the configuration space S. In addition, in this embodiment, the sealing member 20 is a full seal ring, and since the sealing member 20 has high sealing performance, it is possible to more effectively suppress the infiltration of liquid into the configuration space S.
在本形態中，在按壓構件27配置於退避位置時，軸部32的外部配置部32a配置於比配置於前側的密封構件20更靠前側處。因此，在本形態中，能夠在按壓構件27配置於把持位置時防止配置於搭載支撐部16的外部且附著有液體的外部配置部32a與密封構件20、密封構件21接觸。因此，在本形態中，例如即使在使用包含研磨劑的藥液的環境下使用手3，也能夠防止附著有藥液中所含的研磨劑的外部配置部32a與密封構件20、密封構件21接觸。其結果，在本形態中，即使在使用包含研磨劑的藥液的環境下使用手3，也能夠防止由附著於外部配置部32a的研磨劑引起的密封構件20、密封構件21的損傷。In this embodiment, when the pressing member 27 is arranged at the retreat position, the external arrangement portion 32a of the shaft portion 32 is arranged at the front side more than the sealing member 20 arranged at the front side. Therefore, in this embodiment, when the pressing member 27 is arranged at the gripping position, the external arrangement portion 32a arranged at the outside of the carrying support portion 16 and having liquid attached thereto can be prevented from contacting the sealing members 20 and 21. Therefore, in this embodiment, for example, even when the hand 3 is used in an environment where a liquid medicine containing an abrasive is used, the external arrangement portion 32a having the abrasive contained in the liquid medicine attached thereto can be prevented from contacting the sealing members 20 and 21. As a result, in this embodiment, even when the hand 3 is used in an environment where a chemical solution containing an abrasive is used, it is possible to prevent the sealing members 20 and 21 from being damaged by the abrasive adhering to the external arrangement portion 32a.
在本形態中，搭載支撐部16包括：密封保持構件41，在內周側保持密封構件20、密封構件21；以及支撐部主體42，與密封保持構件41分體形成並且固定密封保持構件41，密封保持構件41能夠相對於支撐部主體42裝卸。另外，在本形態中，若擰鬆螺釘39而從滑塊36拆卸按壓構件27，並且拆卸螺釘44而從支撐部主體42拆卸密封保持構件41，則能夠將兩個密封構件20、21一起從支撐部主體42拆卸。因此，在本形態中，能夠容易地進行兩個密封構件20、21的更換作業。In this embodiment, the supporting portion 16 includes: a sealing retaining member 41 that retains the sealing member 20 and the sealing member 21 on the inner circumference; and a supporting portion main body 42 that is formed separately from the sealing retaining member 41 and fixes the sealing retaining member 41, and the sealing retaining member 41 can be loaded and unloaded relative to the supporting portion main body 42. In addition, in this embodiment, if the pressing member 27 is removed from the slider 36 by loosening the screw 39, and the sealing retaining member 41 is removed from the supporting portion main body 42 by removing the screw 44, the two sealing members 20 and 21 can be removed from the supporting portion main body 42 together. Therefore, in this embodiment, the two sealing members 20 and 21 can be easily replaced.
另外，在本形態中，由於在密封保持構件41的外周面形成有配置有密封構件45的密封配置凹部41d，因此若從支撐部主體42拆卸密封保持構件41，則密封構件45也可與兩個密封構件20、21一起從支撐部主體42拆卸。因此，在本形態中，能夠容易地進行三個密封構件20、21、45的更換作業。In addition, in this embodiment, since the seal arrangement recess 41d in which the seal member 45 is arranged is formed on the outer peripheral surface of the seal holding member 41, when the seal holding member 41 is removed from the support portion main body 42, the seal member 45 can also be removed from the support portion main body 42 together with the two seal members 20 and 21. Therefore, in this embodiment, the three seal members 20, 21, and 45 can be easily replaced.
在本形態中，形成有限制密封構件20向前側移動的後端面48b的蓋構件48與密封保持構件主體47分體形成，相對於密封保持構件主體47能夠裝卸。因此，在本形態中，即使為剛性比U形密封件或V形密封件高的全密封圈的密封構件20配置於密封保持構件41的內周側，也能夠通過從密封保持構件主體47拆卸蓋構件48而容易地在密封保持構件41的內周側配置密封構件20。In this embodiment, the cover member 48 having the rear end face 48b for limiting the forward movement of the sealing member 20 is formed separately from the sealing member body 47, and can be attached and detached relative to the sealing member body 47. Therefore, in this embodiment, even if the sealing member 20 of a full seal ring having higher rigidity than a U-shaped seal or a V-shaped seal is arranged on the inner peripheral side of the sealing member 41, the sealing member 20 can be easily arranged on the inner peripheral side of the sealing member 41 by removing the cover member 48 from the sealing member body 47.
（其他實施方式） 所述形態雖然是本發明的適合的形態的一例，但並不限定於此，能夠在不變更本發明的主旨的範圍內實施各種變形。 (Other implementations) The above-mentioned form is an example of a suitable form of the present invention, but it is not limited thereto, and various modifications can be implemented within the scope of not changing the gist of the present invention.
在所述形態中，密封構件20可為U形密封件或V形密封件。另外，在所述形態中，密封構件21也可為全密封圈。另外，在所述形態中，密封構件20、密封構件21也可為O形環。進而，在所述形態中，手3也可包括配置於軸配置孔41a中的三個以上的密封構件。In the above embodiment, the sealing member 20 may be a U-shaped sealing member or a V-shaped sealing member. In addition, in the above embodiment, the sealing member 21 may also be a full seal ring. In addition, in the above embodiment, the sealing members 20 and 21 may also be O-rings. Furthermore, in the above embodiment, the hand 3 may also include three or more sealing members arranged in the shaft arrangement hole 41a.
在所述形態中，密封保持構件41也可包含一個構件。即，密封保持構件主體47與蓋構件48也可一體地形成。另外，在所述形態中，密封保持構件41與支撐部主體42也可一體地形成。進而，在所述形態中，也可不在搭載支撐部16形成排出孔16a。另外，在所述形態中，也可在密封保持構件配置孔42b的內周面形成有配置有密封構件45的外周側密封配置凹部。In the above embodiment, the sealing retaining member 41 may include one member. That is, the sealing retaining member main body 47 and the cover member 48 may be formed integrally. In addition, in the above embodiment, the sealing retaining member 41 and the support portion main body 42 may be formed integrally. Furthermore, in the above embodiment, the discharge hole 16a may not be formed in the supporting portion 16. In addition, in the above embodiment, a peripheral sealing configuration recess in which the sealing member 45 is configured may be formed on the inner peripheral surface of the sealing retaining member configuration hole 42b.
在所述形態中，驅動機構28也可包括馬達等驅動源而代替氣缸35。另外，在所述形態中，輥33也可無法相對於輥保持構件34旋轉。另外，在所述形態中，按壓構件27也可包括輥部26以外的按壓部。進而，在所述形態中，搭載支撐部16也可無法相對於手基部17轉動。另外，在所述形態中，氣體供給機構22也可向配置空間S供給空氣以外的氣體。In the above embodiment, the drive mechanism 28 may include a drive source such as a motor instead of the air cylinder 35. In the above embodiment, the roller 33 may not rotate relative to the roller holding member 34. In the above embodiment, the pressing member 27 may include a pressing portion other than the roller portion 26. Furthermore, in the above embodiment, the carrying support portion 16 may not rotate relative to the hand base 17. In the above embodiment, the gas supply mechanism 22 may supply a gas other than air to the configuration space S.
在所述形態中，機器人1也可包括能夠轉動地與臂4的前端側連結的兩個手3。另外，在所述形態中，臂4也可包括三個以上的臂部。另外，在所述形態中，由機器人1搬送的搬送對象物也可為晶圓2以外的物體。在所述情況下，例如搬送對象物可形成為正方形或長方形的平板狀。In the above embodiment, the robot 1 may include two hands 3 rotatably connected to the front end of the arm 4. In the above embodiment, the arm 4 may include three or more arm parts. In the above embodiment, the object to be transported by the robot 1 may be an object other than the wafer 2. In the above case, the object to be transported may be formed into a square or rectangular flat plate, for example.
適用本發明的工業用機器人也可為水平多關節型的工業用機器人以外的機器人。例如，適用本發明的工業用機器人也可為如下工業用機器人，所述工業用機器人包括：以能夠進行手3的直線往復移動的方式連結有手3的臂、能夠轉動地連結有臂的主體部、以及使手3相對於臂直線往復移動的線性驅動部。The industrial robot to which the present invention is applicable may also be a robot other than a horizontal multi-joint industrial robot. For example, the industrial robot to which the present invention is applicable may also be an industrial robot comprising: an arm to which the hand 3 is connected in a manner that enables the hand 3 to reciprocate in a straight line, a main body to which the arm is rotatably connected, and a linear drive unit that enables the hand 3 to reciprocate in a straight line relative to the arm.
（本技術的結構） 此外，本技術能夠採用如以下那樣的結構。 （1）一種手，是對搬送對象物進行搬送的工業用機器人的手，所述手的特徵在於， 包括：搭載部，搭載所述搬送對象物；搭載支撐部，至少一部分形成為中空狀並且固定所述搭載部的基端側；保持機構，用於將搭載於所述搭載部的所述搬送對象物保持於水平方向上的一定位置；多個密封構件，用於防止液體浸入至所述搭載支撐部的內部；以及氣體供給機構，向所述搭載支撐部的內部供給氣體， 所述保持機構包括：端面抵接構件，具有與所述搬送對象物的端面抵接的抵接面且安裝於所述搭載部的前端側；按壓構件，具有與所述搬送對象物的端面接觸並將所述搬送對象物的端面按壓至所述抵接面的按壓部、及在前端側安裝有所述按壓部的軸狀的軸部，並被保持於所述搭載支撐部；以及驅動機構，收容於所述搭載支撐部的內部的配置空間，並且連結所述軸部的基端側，且使所述按壓構件相對於所述搭載支撐部在水平方向上直線性地移動， 在所述搭載支撐部形成有配置有所述軸部的一部分並且與所述配置空間連通的軸配置孔， 多個所述密封構件沿所述軸部的軸向排列並配置於所述軸配置孔中，並且與所述軸部的外周面接觸， 所述氣體供給機構向所述配置空間供給氣體並使所述配置空間為正壓。 （2）根據（1）所述的手，其特徵在於，包括在所述軸部的軸向上以相互隔開間隔的狀態配置的第一密封構件及第二密封構件這兩個所述密封構件作為所述密封構件， 當將在所述軸部的軸向上配置有所述按壓部的一側設為第一方向側時， 所述第一密封構件配置於比所述第二密封構件更靠所述第一方向側處。 （3）根據（2）所述的手，其特徵在於，在所述搭載支撐部形成有從所述搭載支撐部的外側面連通到所述軸配置孔的、所述第一密封構件與所述第二密封構件之間的部分的液體的排出孔。 （4）根據（2）或（3）所述的手，其特徵在於，所述第一密封構件是全密封圈， 所述第二密封構件是U形密封件或V形密封件。 （5）根據（1）至（4）中任一項所述的手，其特徵在於，所述驅動機構使所述按壓構件在如下把持位置、即所述按壓部與所述搬送對象物的端面接觸並將所述搬送對象物的端面按壓至所述抵接面的把持位置、和所述按壓部從所述搬送對象物的端面離開的退避位置之間移動， 在所述按壓構件配置於所述把持位置時，所述軸部的一部分配置於所述搭載支撐部的外部， 當將在所述軸部的軸向上配置有所述按壓部的一側設為第一方向側，且將所述軸部的、在所述按壓構件配置於所述把持位置時配置於所述搭載支撐部的外部的部分設為外部配置部時， 在所述按壓構件配置於所述退避位置時，所述外部配置部配置於比配置於最靠所述第一方向側的所述密封構件更靠所述第一方向側處。 （6）根據（1）至（5）中任一項所述的手，其特徵在於，所述搭載支撐部包括：筒狀的密封保持構件，形成有所述軸配置孔並且在內周側保持多個所述密封構件；以及支撐部主體，與所述密封保持構件分體形成並且固定所述密封保持構件， 在所述支撐部主體形成有配置有所述密封保持構件並且與所述配置空間連通的密封保持構件配置孔， 所述密封保持構件相對於所述支撐部主體能夠裝卸， 在所述密封保持構件的外周面或所述密封保持構件配置孔的內周面形成有外周側密封配置凹部，所述外周側密封配置凹部配置有用於防止液體浸入至所述配置空間的外周側密封構件。 （7）根據（6）所述的手，其特徵在於，包括在所述軸部的軸向上以相互隔開間隔的狀態配置的第一密封構件及第二密封構件這兩個所述密封構件作為所述密封構件， 當將在所述軸部的軸向上配置有所述按壓部的一側設為第一方向側且將所述第一方向側的相反側設為第二方向側時， 所述第一密封構件配置於比所述第二密封構件更靠所述第一方向側處， 所述第一密封構件是全密封圈， 所述第二密封構件是U形密封件或V形密封件， 所述密封保持構件包括：筒狀的密封保持構件主體，在內周側形成有配置有所述第二密封構件的內周側密封配置凹部；以及蓋構件，具有從所述第一方向側***至所述密封保持構件主體的內周側的筒狀的***部， 所述蓋構件與所述密封保持構件主體分體形成，並且能夠相對於所述密封保持構件主體裝卸， 在所述密封保持構件主體的內周側形成有限制所述第一密封構件向所述第二方向側移動的第一限制面， 所述***部的所述第二方向側的端面成為限制所述第一密封構件向所述第一方向側移動的第二限制面。 （8）一種工業用機器人，其特徵在於，包括：根據（1）至（7）中任一項所述的手、連結有所述手的臂、以及連結有所述臂的主體部。 (Structure of the present technology) In addition, the present technology can adopt a structure such as the following. (1) A hand is a hand of an industrial robot for transporting a transport object, the hand being characterized in that it includes: a carrying portion for carrying the transport object; a carrying support portion, at least a portion of which is formed into a hollow shape and fixes the base end side of the carrying portion; a holding mechanism for holding the transport object carried on the carrying portion at a certain position in the horizontal direction; a plurality of sealing components for preventing liquid from penetrating into the interior of the carrying support portion; and a gas supply mechanism for supplying gas to the interior of the carrying support portion, The holding mechanism includes: an end face abutting member having an abutting surface abutting against the end face of the transported object and mounted on the front end side of the loading portion; a pressing member having a pressing portion that contacts the end face of the transported object and presses the end face of the transported object to the abutting surface, and an axial shaft portion on which the pressing portion is mounted at the front end side and is held by the loading support portion; and a driving mechanism that is accommodated in the configuration space inside the loading support portion and is connected to the base end side of the shaft portion and causes the pressing member to move linearly in the horizontal direction relative to the loading support portion. An axis configuration hole is formed in the loading support portion, in which a part of the axis portion is configured and which is connected to the configuration space. The plurality of sealing members are arranged along the axial direction of the shaft and arranged in the axial arrangement hole, and are in contact with the outer peripheral surface of the shaft. The gas supply mechanism supplies gas to the arrangement space and makes the arrangement space positive pressure. (2) The hand according to (1), characterized in that the sealing members include a first sealing member and a second sealing member arranged in a state of being spaced apart from each other in the axial direction of the shaft. When the side on which the pressing portion is arranged in the axial direction of the shaft is set as the first direction side, the first sealing member is arranged closer to the first direction side than the second sealing member. (3) The hand according to (2), characterized in that a discharge hole for liquid is formed in the loading support portion, which is connected from the outer side surface of the loading support portion to the shaft configuration hole and is between the first sealing member and the second sealing member. (4) The hand according to (2) or (3), characterized in that the first sealing member is a full seal ring, and the second sealing member is a U-shaped seal or a V-shaped seal. (5) The hand according to any one of (1) to (4), characterized in that the driving mechanism moves the pressing member between a gripping position in which the pressing portion contacts the end face of the conveyed object and presses the end face of the conveyed object to the abutment surface, and a retreat position in which the pressing portion is separated from the end face of the conveyed object, When the pressing member is arranged at the gripping position, a portion of the shaft portion is arranged outside the carrying support portion, When a side of the shaft portion on which the pressing portion is arranged in the axial direction is set as a first direction side, and a portion of the shaft portion that is arranged outside the carrying support portion when the pressing member is arranged at the gripping position is set as an external arrangement portion, When the pressing member is arranged at the retreat position, the external arrangement portion is arranged closer to the first direction side than the sealing member arranged closest to the first direction side. (6) The hand according to any one of (1) to (5), characterized in that the carrying support portion includes: a cylindrical sealing retaining member, which is formed with the shaft configuration hole and retains a plurality of the sealing members on the inner circumference; and a support portion main body, which is formed separately from the sealing retaining member and fixes the sealing retaining member, A sealing retaining member configuration hole is formed in the support portion main body, in which the sealing retaining member is configured and communicated with the configuration space, The sealing retaining member can be loaded and unloaded relative to the support portion main body, An outer peripheral sealing configuration recess is formed on the outer peripheral surface of the sealing retaining member or the inner peripheral surface of the sealing retaining member configuration hole, and the outer peripheral sealing configuration recess is configured with an outer peripheral sealing member for preventing liquid from penetrating into the configuration space. (7) The hand according to (6), characterized in that the sealing member comprises a first sealing member and a second sealing member which are arranged in a state of being spaced apart from each other in the axial direction of the shaft portion, when the side on which the pressing portion is arranged in the axial direction of the shaft portion is set as the first direction side and the side opposite to the first direction side is set as the second direction side, the first sealing member is arranged closer to the first direction side than the second sealing member, the first sealing member is a full seal ring, the second sealing member is a U-shaped seal or a V-shaped seal, the sealing retaining member comprises: a cylindrical sealing retaining member body having an inner peripheral side sealing configuration recess formed on the inner peripheral side thereof and having the second sealing member arranged thereon; and a cover member having a cylindrical insertion portion inserted from the first direction side into the inner peripheral side of the sealing retaining member body, The cover member is formed separately from the main body of the sealing member and can be loaded and unloaded relative to the main body of the sealing member. A first limiting surface for limiting the movement of the first sealing member in the second direction is formed on the inner peripheral side of the main body of the sealing member. The end surface of the insertion portion on the second direction side becomes a second limiting surface for limiting the movement of the first sealing member in the first direction. (8) An industrial robot, characterized in that it includes: a hand according to any one of (1) to (7), an arm connected to the hand, and a main body connected to the arm.
1:機器人（工業用機器人） 2:晶圓（半導體晶圓、搬送對象物） 3:手 4:臂 5:主體部 7、8:臂部 11:升降體 12:框體 15:搭載部 16:搭載支撐部 16a:排出孔 17:手基部 19:保持機構 20:密封構件（第一密封構件） 21:密封構件（第二密封構件） 22:氣體供給機構 25:端面抵接構件 25a:抵接面 26:輥部（按壓部） 27:按壓構件 28:驅動機構 29:晶圓載置構件 32:軸部 32a:外部配置部 33:輥 34:輥保持構件 35:氣缸 36:滑塊 37:導向塊 38:導軌 39、44:螺釘 41:密封保持構件 41a:軸配置孔 41b:密封配置凹部 41c:密封配置凹部（內周側密封配置凹部） 41d:密封配置凹部（外周側密封配置凹部） 42:支撐部主體 42a:保持部 42b:密封保持構件配置孔 43:蓋構件 45:密封構件（外周側密封構件） 47:密封保持構件主體 47a:階差面（第一限制面） 48:蓋構件 48a:***部 48b:後端面（***部的第二方向側的端面、第二限制面） S:配置空間 X1:第一方向側 X2:第二方向側 Y:方向 1: Robot (industrial robot) 2: Wafer (semiconductor wafer, object to be transported) 3: Hand 4: Arm 5: Main body 7, 8: Arm 11: Lifting body 12: Frame 15: Loading part 16: Loading support part 16a: Exhaust hole 17: Hand base 19: Holding mechanism 20: Sealing member (first sealing member) 21: Sealing member (second sealing member) 22: Gas supply mechanism 25: End surface contact member 25a: Contact surface 26: Roller (pressing member) 27: Pressing member 28: Driving mechanism 29: Wafer loading member 32: Shaft 32a: External configuration part 33: Roller 34: Roller holding member 35: Cylinder 36: Slider 37: Guide block 38: Guide rail 39, 44: Screw 41: Seal holding member 41a: Shaft configuration hole 41b: Seal configuration recess 41c: Seal configuration recess (inner peripheral side seal configuration recess) 41d: Seal configuration recess (outer peripheral side seal configuration recess) 42: Supporting part body 42a: Holding part 42b: Seal holding member configuration hole 43: Cover member 45: Seal member (outer peripheral side seal member) 47: Seal holding member body 47a: Step surface (first limiting surface) 48: Cover member 48a: Insertion part 48b: rear end surface (end surface on the second direction side of the insertion portion, second limiting surface) S: configuration space X1: first direction side X2: second direction side Y: direction
圖1是本發明的實施方式的工業用機器人的側面圖。 圖2是圖1所示的工業用機器人的平面圖。 圖3是用於說明圖2所示的手的結構的平面圖。 圖4是用於說明圖3的E-E剖面的結構的剖面圖。 FIG. 1 is a side view of an industrial robot according to an embodiment of the present invention. FIG. 2 is a plan view of the industrial robot shown in FIG. 1 . FIG. 3 is a plan view for explaining the structure of the hand shown in FIG. 2 . FIG. 4 is a cross-sectional view for explaining the structure of the E-E cross-section of FIG. 3 .
16:搭載支撐部 16: Mounting support part
16a:排出孔 16a: discharge hole
20:密封構件(第一密封構件) 20: Sealing member (first sealing member)
21:密封構件(第二密封構件) 21: Sealing member (second sealing member)
26:輥部(按壓部) 26: Roller (pressing part)
27:按壓構件 27: Press components
32:軸部 32: Shaft
32a:外部配置部 32a: External configuration section
33:輥 33: Roller
34:輥保持構件 34: Roller retaining member
36:滑塊 36: Slider
39、44:螺釘 39, 44: Screws
41:密封保持構件 41: Sealing and retaining member
41a:軸配置孔 41a: Shaft configuration hole
41b:密封配置凹部 41b: Sealing configuration recess
41c:密封配置凹部(內周側密封配置凹部) 41c: Sealing configuration recess (inner peripheral side sealing configuration recess)
41d:密封配置凹部(外周側密封配置凹部) 41d: Sealing configuration recess (peripheral sealing configuration recess)
42:支撐部主體 42: Main body of the support part
42a:保持部 42a: Holding part
42b:密封保持構件配置孔 42b: Sealing and retaining component configuration hole
43:蓋構件 43: Cover component
45:密封構件(外周側密封構件) 45: Sealing member (peripheral sealing member)
47:密封保持構件主體 47: Sealing and retaining component body
47a:階差面(第一限制面) 47a: Step surface (first limiting surface)
48:蓋構件 48: Cover component
48a:***部 48a: Insertion part
48b:後端面(***部的第二方向側的端面、第二限制面) 48b: rear end surface (end surface on the second direction side of the insertion portion, second limiting surface)
S:配置空間 S: configuration space
X1:第一方向側 X1: First direction side
X2:第二方向側 X2: Second direction side
Y:方向 Y: Direction
Claims (8)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022-189428 | 2022-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202421386A true TW202421386A (en) | 2024-06-01 |
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