TW202342285A

TW202342285A - A positioning and film-peeling structure

Info

Publication number: TW202342285A
Application number: TW111115396A
Authority: TW
Inventors: 張德勇
Original assignee: 鴻鉑科技有限公司
Priority date: 2022-04-22
Filing date: 2022-04-22
Publication date: 2023-11-01
Also published as: TWI792989B

Abstract

容後補呈

Description

定位撕膜結構Positioning tear film structure

本創作係有關一種定位撕膜結構，尤指一種可將薄膜順暢且全面性剝離者。This invention relates to a positioning film tearing structure, especially one that can peel off the film smoothly and comprehensively.

在印刷電路板的製造過程中，基板在曝光之前，皆會在基板之上、下表面分別形成光阻層及黏附於光阻層表面之薄膜，在曝光之後，再將薄膜剝離以使光阻層外露，以進行後續之顯影及蝕刻程序。而現有剝膜機剝離薄膜之方式，主要是藉由一前輸送段以輸送上述印刷電路板之類的薄板，使沿著由前朝後的輸送方向移動，薄板經由一阻擋單元之阻擋定位，再經由一組壓花輪在薄膜表面上滾壓之後，即會讓薄板繼續延著一後輸送段向後輸送，並以一組黏輪將前端緣產生皺摺之薄膜逐步剝離。In the manufacturing process of printed circuit boards, before the substrate is exposed, a photoresist layer and a film adhered to the surface of the photoresist layer are formed on the upper and lower surfaces of the substrate. After exposure, the film is peeled off to remove the photoresist. The layer is exposed for subsequent development and etching processes. The existing method of peeling off films by film stripping machines mainly uses a front conveying section to convey thin plates such as the above-mentioned printed circuit boards, so that the thin plates move along the conveying direction from front to back, and the thin plates are blocked and positioned by a blocking unit. After rolling on the film surface through a set of embossing wheels, the sheet will continue to be transported backward along a rear conveying section, and a set of adhesive wheels will gradually peel off the wrinkled film on the front edge.

藉由上述剝膜機結構，確實可以提升剝離薄膜之效率。惟在實際剝離薄膜的過程中發現，由於基板本身之厚度不大，容易會有彎曲不平的現象，當外徑一致的長直筒形黏輪黏著薄膜時，各個黏著位置之黏著力並不會完全相同，常無法順暢且全面性的讓薄膜逐漸剝離；且由於薄膜之厚度很薄且脆弱，薄膜剝離之後，仍舊會有部份的薄膜脆片黏附於光阻層之表面上，並常由於薄膜脆片之面積太小而無法被偵測到，此種現象將會在整個印刷電路板的製造過程中，讓基板面臨報廢的結果。因此，目前即有利用不同機型以分別進行薄膜之前端緣剝離之後，再經由一剝膜模組將薄膜完全剝離者，惟其在作業時僅能適用於固定厚度範圍的薄板，但是對於厚度在0.1mm以下，甚至於0.04mm的薄板或是軟板而言，其在實際薄膜剝離的過程中，由於剝膜模組主要是以垂直於薄板板面之方向拉起薄膜，容易會有同時拉動或捲起整個薄板之現象產生，而讓基板因此而報廢、影響生產效率，甚至於讓剝膜機之機件損壞。Through the above-mentioned film stripping machine structure, the efficiency of stripping the film can indeed be improved. However, during the actual process of peeling off the film, it was discovered that since the thickness of the substrate itself is not large, it is prone to bending and unevenness. When a long straight cylindrical adhesive wheel with the same outer diameter is used to adhere the film, the adhesion force at each adhesive position will not be perfect. Similarly, it is often impossible to gradually peel off the film smoothly and comprehensively; and because the thickness of the film is very thin and fragile, after the film is peeled off, some film flakes will still adhere to the surface of the photoresist layer, and often due to the film The area of brittle chips is too small to be detected. This phenomenon will cause the substrate to be scrapped during the entire printed circuit board manufacturing process. Therefore, there are currently different models of machines that are used to peel off the front edge of the film and then completely peel off the film through a peeling module. However, they can only be applied to thin plates with a fixed thickness range during operation. However, for those with a thickness within For thin plates or soft plates below 0.1mm or even 0.04mm, during the actual film peeling process, since the film peeling module mainly pulls up the film in the direction perpendicular to the surface of the thin plate, it is easy to pull the film at the same time. Or the phenomenon of rolling up the entire sheet may occur, causing the substrate to be scrapped, affecting production efficiency, and even damaging the parts of the film stripping machine.

有鑑於此，為了提供一種有別於習用技術之結構，並改善上述之缺點，創作人積多年的經驗及不斷的研發改進，遂有本創作之產生。In view of this, in order to provide a structure that is different from the conventional technology and improve the above-mentioned shortcomings, the creator has accumulated many years of experience and continuous research and development and improvement, and thus came into being this creation.

本創作之一目的在提供一種定位撕膜結構，俾能解決習用剝膜機在薄板或是軟板的薄膜剝離過程中，容易會有同時拉動或捲起整個平板的問題，而能使薄膜能順暢且全面性的與基板分離，以提高作業品質，增加良率，並有效避免因捲起整個平板所產生之機件損壞，或因平板報廢所造成之材料浪費。One of the purposes of this creation is to provide a positioning film tearing structure so as to solve the problem of conventional film peeling machines easily pulling or rolling up the entire flat plate at the same time during the film peeling process of thin plates or soft plates, so that the film can be Smoothly and comprehensively separates from the substrate to improve work quality, increase yield, and effectively avoid mechanical damage caused by rolling up the entire flat panel, or material waste caused by scrapping the flat panel.

為達上述創作之目的，本創作所設之定位撕膜結構係連接於一機架上，機架之前端具有一前輸送段，供輸送一薄板使沿著由前端朝向後端之輸送方向移動，經由一上剝膜模組將薄板之一基板上表面之一上薄膜剝離之後，再經由一後輸送段向後輸送，其主要之技術特點在於：定位撕膜結構連結於上剝膜模組之後端，且定位撕膜結構包括一上定位件以及一下定位件，其中之上定位件具有至少一第一吹氣口，供向前吹氣；而下定位件連接於上定位件之下方，上定位件與下定位件之間具有一通道，供基板由前端朝向後端之方向通過。In order to achieve the purpose of the above creation, the positioning tear film structure set up in this creation is connected to a frame. The front end of the frame has a front conveying section for conveying a thin plate to move along the conveying direction from the front end to the rear end. , after peeling off the upper film on the upper surface of one of the substrates through an upper peeling module, it is then transported backward through a rear conveying section. Its main technical feature is: the positioning peeling structure is connected behind the upper peeling module end, and the positioning tear film structure includes an upper positioning piece and a lower positioning piece, wherein the upper positioning piece has at least one first air blowing port for blowing air forward; and the lower positioning piece is connected below the upper positioning piece, and the upper positioning piece There is a channel between the component and the lower positioning component for the substrate to pass from the front end to the rear end.

實施時，至少一第一吹氣口連通上定位件與下定位件之間之通道，供向前吹氣。During implementation, at least one first air blowing port communicates with the passage between the upper positioning part and the lower positioning part for forward blowing.

實施時，下定位件具有至少一第二吹氣口，供向前吹氣。During implementation, the lower positioning member has at least one second air blowing port for blowing air forward.

實施時，上定位件與下定位件分別為上下對稱之平板，上定位件之前端具有一第一凸部，第一凸部由上定位件之後端朝向前端之方向向前延伸；下定位件之前端具有一第二凸部，第二凸部與第一凸部上下對稱，且第二凸部由下定位件之後端朝向前端之方向向前延伸。During implementation, the upper positioning member and the lower positioning member are respectively upper and lower symmetrical flat plates. The front end of the upper positioning member has a first convex portion, and the first convex portion extends forward from the rear end of the upper positioning member toward the front end; the lower positioning member The front end has a second convex portion, the second convex portion is vertically symmetrical with the first convex portion, and the second convex portion extends forward from the rear end of the lower positioning member toward the front end.

實施時，第一凸部之一側具有一第一上斜邊，第一凸部之另一側具有一第二上斜邊，第一上斜邊與第二上斜邊分別以一角度向後延伸；第二凸部之一側具有一第一下斜邊，第二凸部之另一側具有一第二下斜邊，第一下斜邊與第二下斜邊分別以一角度向後延伸。During implementation, one side of the first convex portion has a first upper bevel, and the other side of the first convex portion has a second upper bevel. The first upper bevel and the second upper bevel are respectively rearward at an angle. Extend; one side of the second convex part has a first lower hypotenuse, the other side of the second convex part has a second lower hypotenuse, the first lower hypotenuse and the second lower hypotenuse extend backward at an angle respectively .

實施時，本創作更包括至少一前薄膜剝離單元，前薄膜剝離單元包括一上支軸、一上懸臂以及一第一驅動件，上支軸連接於機架上；上懸臂之一端樞接上支軸，上懸臂之另一端具有一下勾部，下勾部向下抵壓基板之上表面，藉以剝離上薄膜之前端緣；第一驅動件之下端連接上懸臂之中段位置，供上下移動上懸臂之下勾部。When implemented, the invention further includes at least one front film peeling unit. The front film peeling unit includes an upper support shaft, an upper cantilever and a first driving member. The upper support shaft is connected to the frame; one end of the upper cantilever is pivotally connected to the The other end of the support shaft and the upper cantilever has a lower hook portion, and the lower hook portion presses downwardly against the upper surface of the substrate to peel off the front edge of the upper film; the lower end of the first driving member is connected to the middle position of the upper cantilever for moving the upper cantilever up and down. The lower hook of the cantilever.

實施時，本創作更包括一上吹氣單元，上吹氣單元連接機架，且上吹氣單元位於後輸送段之上方，供以朝向下勾部之方向吹出空氣。During implementation, the invention further includes an upper air blowing unit, which is connected to the frame and is located above the rear conveying section for blowing air toward the lower hook.

實施時，本創作更包括一下支軸、至少一下懸臂以及一第二驅動件，下支軸連接機架，並對應設置於上支軸之下方；下懸臂之一端樞接下支軸，下懸臂之中段位置具有一限位部，供定位一彈性件，下懸臂之另一端具有一上勾部，上勾部向上抵壓基板之下表面，藉以剝離基板下表面之一下薄膜之前端緣；第二驅動件之上端具有一推壓部，推壓部連接彈性件，供推壓以向上移動下懸臂之上勾部。When implemented, the invention further includes a lower support shaft, at least a lower cantilever and a second driving member. The lower support shaft is connected to the frame and is correspondingly arranged below the upper support shaft; one end of the lower cantilever is pivotally connected to the lower support shaft, and the lower cantilever is connected to the lower support shaft. There is a limiting portion in the middle position for positioning an elastic member, and the other end of the lower cantilever has an upper hook portion. The upper hook portion presses upward against the lower surface of the substrate to peel off the front end edge of the lower film on the lower surface of the substrate; The upper end of the two driving parts has a pushing part, and the pushing part is connected to the elastic member for pushing to move the upper hook part of the lower cantilever upward.

實施時，本創作更包括一下吹氣單元，下吹氣單元連接機架，下吹氣單元位於後輸送段之下方，供以朝向上勾部之方向吹出空氣。During implementation, the invention further includes a down blowing unit, which is connected to the frame. The down blowing unit is located below the rear conveying section for blowing air in the direction of the upper hook.

實施時，上剝膜模組係為橫向設置之圓筒，上剝膜模組定位於前輸送段之後端上方並平行薄板之前端緣，上剝膜模組之圓筒筒身上具有複數個吸氣孔，供吸附該上薄膜。During implementation, the upper film stripping module is a horizontally arranged cylinder. The upper film stripping module is positioned above the rear end of the front conveying section and parallel to the front end edge of the thin plate. The cylindrical body of the upper film stripping module has a plurality of suction There are pores for adsorption of the upper film.

為進一步了解本創作，以下舉較佳之實施例，配合圖式、圖號，將本創作之具體構成內容及其所達成的功效詳細說明如下：In order to further understand this creation, the following is a preferred embodiment, and together with the drawings and drawing numbers, the specific components of this creation and the effects achieved are described in detail as follows:

本創作之定位撕膜結構主要包括一上定位件以及一下定位件，其中之上定位件具有至少一第一吹氣口，下定位件連接於上定位件之下方，且上定位件與下定位件之間具有一通道，藉以在一基板之前端穿入通道內以定位基板，一第一吹氣口向前吹氣，且一上剝膜模組同時剝離基板上之一上薄膜之後，可以讓基板通過通道，再經由一後輸送段向後輸送。The positioning peeling film structure of this invention mainly includes an upper positioning piece and a lower positioning piece, wherein the upper positioning piece has at least one first air blowing port, the lower positioning piece is connected below the upper positioning piece, and the upper positioning piece and the lower positioning piece There is a channel between them, whereby the front end of a substrate penetrates into the channel to position the substrate, a first air blowing port blows forward, and an upper film stripping module simultaneously peels off an upper film on the substrate, and then the substrate can be Through the channel, it is transported backward through a rear conveying section.

請參閱圖1~圖4所示，其為本創作定位撕膜結構1之較佳實施例，係供連接於一機架11上，並位於一上剝膜模組9與一下剝膜模組91之後端。其中，機架11輸入薄板12之一端界定為機架11之前端，輸出薄板12之一端界定為機架11之後端，機架11之前端具有一前輸送段13，機架11之後端具有一後輸送段14，前輸送段13與後輸送段14分別由複數水平間隔排列之滾筒所組成，供輸送薄板12使沿著機架11之前端朝向後端之方向移動。上剝膜模組9與下剝膜模組91分別為橫向設置之圓筒，上剝膜模組9定位於前輸送段13之後端上方並平行薄板12之前端緣，上剝膜模組9之圓筒筒身上具有複數個吸氣孔92，且上剝膜模組9之一端具有連通複數個吸氣孔92之一鼓風機，藉以在鼓風機吸氣時，讓上剝膜模組9之筒身外部的空氣能經由複數個吸氣孔92進入筒身內部，形成負壓狀態以吸附一基板121上表面之一上薄膜122；而上剝膜模組9與下剝膜模組91上下相對應，並具有相同之結構，同樣可以經由下剝膜模組91以吸附基板121下表面之一下薄膜123。Please refer to Figures 1 to 4, which are the preferred embodiments of the positioning film peeling structure 1 of the present invention. It is connected to a frame 11 and is located in an upper film peeling module 9 and a lower film peeling module. 91 backend. Among them, one end of the input sheet 12 of the frame 11 is defined as the front end of the frame 11, and one end of the output sheet 12 is defined as the rear end of the frame 11. The front end of the frame 11 has a front conveying section 13, and the rear end of the frame 11 has a The rear conveying section 14, the front conveying section 13 and the rear conveying section 14 are respectively composed of a plurality of horizontally spaced rollers for conveying the thin plate 12 to move along the front end of the frame 11 toward the rear end. The upper film peeling module 9 and the lower film peeling module 91 are respectively horizontally arranged cylinders. The upper film peeling module 9 is positioned above the rear end of the front conveying section 13 and parallel to the front edge of the thin plate 12. The upper film peeling module 9 The cylindrical body has a plurality of suction holes 92, and one end of the upper film peeling module 9 has a blower connected to the plurality of suction holes 92, so that when the blower suctions, the barrel of the upper film peeling module 9 The air outside the body can enter the inside of the barrel through a plurality of suction holes 92, forming a negative pressure state to adsorb an upper film 122 on the upper surface of a substrate 121; Correspondingly and having the same structure, the lower film 123 on the lower surface of the substrate 121 can also be adsorbed through the lower film peeling module 91 .

本創作之定位撕膜結構1主要包括一前薄膜剝離單元2、一上定位件3以及一下定位件4。其中之前薄膜剝離單元2包括一上支軸21、一上懸臂22、一第一驅動件23、一上吹氣單元24、一下支軸25、一下懸臂26、一第二驅動件27以及一下吹氣單元28。實施時，前薄膜剝離單元2亦可設有複數個，複數個前薄膜剝離單元2在同一水平面上橫向間隔排列，且複數個前薄膜剝離單元2之排列方向垂直薄板12之輸送方向。The positioning and tearing film structure 1 of this invention mainly includes a front film peeling unit 2, an upper positioning part 3 and a lower positioning part 4. The previous film peeling unit 2 includes an upper supporting shaft 21, an upper cantilever 22, a first driving member 23, an upper blowing unit 24, a lower supporting shaft 25, a lower cantilever 26, a second driving member 27 and a lower blowing unit. Gas unit 28. During implementation, a plurality of front film peeling units 2 may also be provided. The plurality of front film peeling units 2 are arranged at intervals laterally on the same horizontal plane, and the arrangement direction of the plurality of front film peeling units 2 is perpendicular to the conveying direction of the thin plate 12 .

上支軸21連接機架11；上懸臂22之一端樞接上支軸21，上懸臂22之另一端具有一下勾部221，下勾部221之一尖角以遠離上懸臂22之方向向下凸出；第一驅動件23為一活塞組，第一驅動件23之下端連接上懸臂22之中段位置，藉以上、下移動上懸臂22之下勾部221；而上吹氣單元24係連接機架11，上吹氣單元24位於後輸送段14之上方，且上吹氣單元24之吹氣口朝向下勾部221之方向。藉此，當下勾部221向下抵壓基板121之上表面，薄板12向後移動，且上吹氣單元24朝向下勾部221吹出空氣時，即可剝離上薄膜122之前端緣。The upper support shaft 21 is connected to the frame 11; one end of the upper cantilever 22 is pivotally connected to the upper support shaft 21, and the other end of the upper cantilever 22 has a lower hook portion 221. A sharp corner of the lower hook portion 221 points downward in a direction away from the upper cantilever 22. protruding; the first driving member 23 is a piston group, the lower end of the first driving member 23 is connected to the middle position of the upper cantilever 22, and the lower hook 221 of the upper cantilever 22 is moved up and down; and the upper blowing unit 24 is connected In the frame 11, the upper air blowing unit 24 is located above the rear conveying section 14, and the air blowing port of the upper air blowing unit 24 faces the direction of the lower hook 221. Thereby, when the lower hook 221 presses downwardly against the upper surface of the substrate 121 , the thin plate 12 moves backward, and the upper air blowing unit 24 blows air toward the lower hook 221 , the front edge of the upper film 122 can be peeled off.

下支軸25連接機架11，並對應設置於上支軸21之下方；下懸臂26之一端樞接下支軸25，下懸臂26之中段位置具有一凸塊，凸塊具有底部開放之一凹槽，該凸塊做為限位部261，供定位一壓縮彈簧之頂端，該壓縮彈簧做為彈性件29；下懸臂26之另一端具有一上勾部262，上勾部262之一尖角以遠離下懸臂26之方向向上凸出；第二驅動件27為一活塞組，第二驅動件27之上端具有一推壓部271，推壓部271向上連接彈性件29之底端，藉以向上推壓移動下懸臂26之上勾部262；而下吹氣單元28係連接於機架11上，下吹氣單元28位於後輸送段14之下方，且下吹氣單元28之吹氣口朝向上勾部262之方向。藉此，當上勾部262之尖角向上抵壓基板121之下表面，且下吹氣單元28朝向上勾部262吹出空氣時，即可剝離下薄膜123之前端緣。The lower support shaft 25 is connected to the frame 11 and is correspondingly arranged below the upper support shaft 21; one end of the lower cantilever 26 is pivotally connected to the lower support shaft 25, and the lower cantilever 26 has a bump in the middle, and the bump has an open bottom. The groove is used as the stopper 261 for positioning the top of a compression spring, which is used as the elastic member 29; the other end of the lower cantilever 26 has an upper hook 262, and a tip of the upper hook 262 The corner protrudes upward in a direction away from the lower cantilever 26; the second driving member 27 is a piston group, and the upper end of the second driving member 27 has a pushing part 271, and the pushing part 271 is upwardly connected to the bottom end of the elastic member 29, thereby Push upward to move the upper hook 262 of the lower cantilever 26; and the lower blowing unit 28 is connected to the frame 11, the lower blowing unit 28 is located below the rear conveying section 14, and the blowing port of the lower blowing unit 28 faces In the direction of the upward hook 262 . Thereby, when the sharp corner of the upper hook portion 262 presses upward against the lower surface of the substrate 121 and the lower air blowing unit 28 blows air toward the upper hook portion 262 , the front edge of the lower film 123 can be peeled off.

如圖5~圖7所示，上定位件3為一平板，上定位件3之前端中央位置具有一第一凸部31，第一凸部31由上定位件3之後端朝向前端之方向向前延伸；第一凸部31之一側具有一第一上斜邊32，第一凸部31之另一側具有一第二上斜邊33，第一上斜邊32與第二上斜邊33分別以一角度向後延伸；上定位件3之底面後端具有複數個間隔排列之第一吹氣口34，複數個第一吹氣口34之一端連接鼓風機以向前吹氣。As shown in Figures 5 to 7, the upper positioning member 3 is a flat plate. The upper positioning member 3 has a first protrusion 31 at the center of the front end. The first protrusion 31 extends from the rear end of the upper positioning member 3 toward the front end. Extending forward; one side of the first convex portion 31 has a first upper hypotenuse 32, the other side of the first convex portion 31 has a second upper hypotenuse 33, the first upper hypotenuse 32 and the second upper hypotenuse 33 respectively extend backward at an angle; the rear end of the bottom surface of the upper positioning member 3 has a plurality of first air blowing ports 34 arranged at intervals, and one end of the plurality of first blowing ports 34 is connected to a blower to blow air forward.

上定位件3與下定位件4分別為上、下對稱之平板，上定位件3的底面與下定位件4的頂面之間具有一通道5；下定位件4之前端中央位置具有一第二凸部41，第一凸部31與第二凸部41上、下相對稱，第二凸部41由下定位件4之後端朝向前端之方向向前延伸；第二凸部41之一側具有一第一下斜邊42，第二凸部41之另一側具有一第二下斜邊43，第一下斜邊42與第二下斜邊43分別以一角度向後延伸；另，下定位件4之頂面後端具有複數個間隔排列之第二吹氣口44，複數個第二吹氣口44之一端連接鼓風機以向前吹氣。The upper positioning member 3 and the lower positioning member 4 are respectively upper and lower symmetrical flat plates. There is a channel 5 between the bottom surface of the upper positioning member 3 and the top surface of the lower positioning member 4; the lower positioning member 4 has a first center position at the front end. Two protrusions 41, the first protrusion 31 and the second protrusion 41 are symmetrical up and down, the second protrusion 41 extends forward from the rear end of the lower positioning member 4 toward the front end; one side of the second protrusion 41 There is a first lower hypotenuse 42, and the other side of the second protrusion 41 has a second lower hypotenuse 43. The first lower hypotenuse 42 and the second lower hypotenuse 43 respectively extend backward at an angle; in addition, the lower hypotenuse 42 extends backward at an angle; The rear end of the top surface of the positioning member 4 has a plurality of second air blowing ports 44 arranged at intervals. One end of the plurality of second blowing ports 44 is connected to a blower to blow air forward.

藉此，當薄板12為印刷電路板之類的平板時，其主要包括一基板121，基板121之上表面具有上薄膜122，基板121之下表面具有下薄膜123。一薄板12由前輸送段13朝向後輸送段14向後輸送，在經由下勾部221之尖角剝離上薄膜122之前端緣，同時上勾部262之尖角剝離下薄膜123之前端緣之後，薄板12會繼續向後移動。當基板121之前端緣先***第一凸部31與第二凸部41之間的通道5，再漸進式的***第一上斜邊32、第二上斜邊33與第一下斜邊42、第二下斜邊43之間的通道5時，基板121維持定向移動，縱然是上剝膜模組9與下剝膜模組91分別形成負壓狀態以吸附上薄膜122與下薄膜123，仍可讓基板121在通過通道5之後，再經由後輸送段14向後輸出。而當通道5內之空氣由後端朝向前端之方向吹送，並分別通過上薄膜122、基板121之間的間隙與基板121、下薄膜123之間的間隙時，則有助於完全剝離上薄膜122與下薄膜123。Therefore, when the thin plate 12 is a flat plate such as a printed circuit board, it mainly includes a substrate 121 with an upper film 122 on the upper surface and a lower film 123 on the lower surface of the substrate 121 . A thin plate 12 is conveyed backward from the front conveying section 13 to the rear conveying section 14. After the front end edge of the upper film 122 is peeled off through the sharp corner of the lower hook portion 221, and the front end edge of the lower film 123 is peeled off by the sharp corner of the upper hook portion 262, The thin plate 12 will continue to move backward. When the front edge of the base plate 121 is first inserted into the channel 5 between the first convex part 31 and the second convex part 41, the first upper bevel 32, the second upper bevel 33 and the first lower bevel 42 are then progressively inserted. , the channel 5 between the second lower bevel 43, the substrate 121 maintains directional movement, even if the upper film peeling module 9 and the lower film peeling module 91 respectively form a negative pressure state to adsorb the upper film 122 and the lower film 123, The substrate 121 can still be output backward through the rear conveying section 14 after passing through the channel 5 . When the air in the channel 5 is blown from the rear end toward the front end and passes through the gap between the upper film 122 and the substrate 121 and the gap between the substrate 121 and the lower film 123, it will help to completely peel off the upper film. 122 and lower film 123.

綜上所述，本創作能經由下勾部與上勾部分別剝離上薄膜與下薄膜之前端緣，以利於後續之整體薄膜剝離作業；能經由上定位件與下定位件之定位作用，在上剝膜模組與下剝膜模組分別吸附以捲起上薄膜與下薄膜時，仍能讓基板定位於通道內以維持定向移動，進而避免整個薄板之前端緣被捲起；並能經由將空氣吹進上薄膜與基板之間以及基板與下薄膜之間，在上剝膜模組與下剝膜模組同時作動時，讓上薄膜與下薄膜能夠更順暢且全面性的與基板分離；再者，由於第一凸部之兩側具有第一上斜邊與第二上斜邊，第二凸部之兩側具有第一下斜邊與第二下斜邊，則能夠讓基板之前端緣漸進式的***上定位件與下定位件之間的通道內，以確保定位之效果。To sum up, this invention can peel off the front edges of the upper film and the lower film respectively through the lower hook part and the upper hook part, so as to facilitate the subsequent overall film peeling operation; it can also use the positioning function of the upper positioning part and the lower positioning part to peel off the front edges of the upper film and the lower film respectively. When the upper film peeling module and the lower film peeling module are adsorbed to roll up the upper film and the lower film respectively, the substrate can still be positioned in the channel to maintain directional movement, thus preventing the front edge of the entire thin plate from being rolled up; and can pass through Blow air between the upper film and the substrate and between the substrate and the lower film. When the upper film peeling module and the lower film peeling module operate at the same time, the upper film and the lower film can be separated from the substrate more smoothly and comprehensively. Furthermore, since the first convex portion has a first upper hypotenuse and a second upper hypotenuse on both sides, and the second convex portion has a first lower hypotenuse and a second lower hypotenuse on both sides, the substrate can be The front edge is progressively inserted into the channel between the upper positioning piece and the lower positioning piece to ensure the positioning effect.

本創作雖為實現上述目的而揭露了較佳的具體實施例，惟其並非用以限制本創作之構造特徵，任何該技術領域之通常知識者應知，在本創作的技術精神下，任何輕易思及之變化或修飾皆是可能的，且皆為本創作之申請專利範圍所涵蓋。Although this invention discloses preferred specific embodiments to achieve the above objectives, they are not intended to limit the structural features of this invention. Any person with ordinary knowledge in the technical field should know that within the technical spirit of this invention, any easily imagined Any changes or modifications are possible and are covered by the patentable scope of this invention.

1:定位撕膜結構 11:機架 12:薄板 121:基板 122:上薄膜 123:下薄膜 13:前輸送段 14:後輸送段 2:前薄膜剝離單元 21:上支軸 22:上懸臂 221:下勾部 23:第一驅動件 24:上吹氣單元 25:下支軸 26:下懸臂 261:限位部 262:上勾部 27:第二驅動件 271:推壓部 28:下吹氣單元 29:彈性件 3:上定位件 31:第一凸部 32:第一上斜邊 33:第二上斜邊 34:第一吹氣口 4:下定位件 41:第二凸部 42:第一下斜邊 43:第二下斜邊 44:第二吹氣口 5:通道 9:上剝膜模組 91:下剝膜模組 92:吸氣孔 1: Positioning the film tearing structure 11:Rack 12:Thin plate 121:Substrate 122: Apply film 123:Lower film 13: Front conveyor section 14: Rear conveying section 2: Front film peeling unit 21: Upper pivot 22: Upper cantilever 221: lower hook 23: First driving part 24: Upper blowing unit 25:Lower pivot 26:Lower cantilever 261: Limiting part 262: Upper hook 27:Second drive part 271:Pushing part 28:Down blowing unit 29: Elastic parts 3: Upper positioning piece 31: First convex part 32: First upper hypotenuse 33:Second upper hypotenuse 34: The first blowing port 4: Lower positioning piece 41:Second convex part 42: First hypotenuse 43: Second hypotenuse 44: Second blowing port 5:Channel 9: Upper film stripping module 91: Lower peeling module 92:Suction hole

﹝圖1﹞為本創作之較佳實施例安裝於機架上之立體外觀示意圖。 ﹝圖2﹞為圖1之A-A’剖面圖。。 ﹝圖3﹞為本創作之較佳實施例之前薄膜剝離單元之立體外觀圖。 ﹝圖4﹞為本創作之較佳實施例之前薄膜剝離單元之使用狀態示意圖。 ﹝圖5﹞為本創作之較佳實施例之上定位件與下定位件之組合立體外觀圖。 ﹝圖6﹞為本創作之較佳實施例之上定位件與下定位件之分解立體外觀圖。 ﹝圖7﹞為本創作之較佳實施例之上定位件與下定位件之使用狀態示意圖。 (Figure 1) is a schematic three-dimensional view of the preferred embodiment of this invention installed on a rack. ﹝Figure 2﹞is the A-A’ cross-sectional view of Figure 1. . ﹝Figure 3﹞is a three-dimensional appearance view of the film peeling unit before the preferred embodiment of this invention. ﹝Figure 4﹞is a schematic diagram of the use state of the film peeling unit before the preferred embodiment of the present invention. ﹝Figure 5﹞is a three-dimensional appearance view of the combination of the upper positioning member and the lower positioning member of the preferred embodiment of this invention. ﹝Figure 6﹞is an exploded three-dimensional appearance view of the upper positioning member and the lower positioning member of the preferred embodiment of the present invention. ﹝Figure 7﹞is a schematic diagram of the use status of the upper positioning member and the lower positioning member of the preferred embodiment of the present invention.

3:上定位件 3: Upper positioning piece

31:第一凸部 31: First convex part

32:第一上斜邊 32: First upper hypotenuse

33:第二上斜邊 33:Second upper hypotenuse

4:下定位件 4: Lower positioning piece

41:第二凸部 41:Second convex part

42:第一下斜邊 42: First hypotenuse

43:第二下斜邊 43: Second hypotenuse

5:通道 5:Channel

Claims

一種定位撕膜結構，其連接於一機架上，該機架之前端具有一前輸送段，供輸送一薄板使沿著由前端朝向後端之輸送方向移動，經由一上剝膜模組將該薄板之一基板上表面之一上薄膜剝離之後，再經由一後輸送段向後輸送，其特徵在於，該定位撕膜結構連結於該上剝膜模組之後端，且該定位撕膜結構包括：一上定位件，其具有至少一第一吹氣口，供向前吹氣；以及一下定位件，其連接於該上定位件之下方，該上定位件與該下定位件之間具有一通道，供該基板由前端朝向後端之方向通過。 A positioning peeling film structure, which is connected to a frame. The front end of the frame has a front conveying section for conveying a thin plate to move along the conveying direction from the front end to the rear end. The film is peeled off through an upper film module. After the upper film on the upper surface of one of the substrates of the thin plate is peeled off, it is then transported backward through a rear conveying section. It is characterized in that the positioning and tearing film structure is connected to the rear end of the upper film peeling module, and the positioning and tearing film structure includes : An upper positioning member has at least one first air blowing port for blowing air forward; and A lower positioning piece is connected below the upper positioning piece. There is a channel between the upper positioning piece and the lower positioning piece for the substrate to pass from the front end to the rear end.

如請求項1之定位撕膜結構，其中該至少一第一吹氣口係連通該上定位件與該下定位件之間之該通道，供向前吹氣。The positioning and tearing film structure of claim 1, wherein the at least one first air blowing port is connected to the channel between the upper positioning part and the lower positioning part for forward blowing.

如請求項1之定位撕膜結構，其中該下定位件具有至少一第二吹氣口，供向前吹氣。The positioning and tearing film structure of claim 1, wherein the lower positioning member has at least one second air blowing port for forward blowing.

如請求項1、2或3之定位撕膜結構，其中該上定位件與該下定位件分別為上下對稱之平板，該上定位件之前端具有一第一凸部，該第一凸部由該上定位件之後端朝向前端之方向向前延伸；該下定位件之前端具有一第二凸部，該第二凸部與該第一凸部上下對稱，且該第二凸部由該下定位件之後端朝向前端之方向向前延伸。The positioning and tearing film structure of claim 1, 2 or 3, wherein the upper positioning part and the lower positioning part are respectively vertically symmetrical flat plates, and the front end of the upper positioning part has a first convex part, and the first convex part is formed by The rear end of the upper positioning member extends forward in the direction of the front end; the front end of the lower positioning member has a second convex portion, the second convex portion is symmetrical up and down with the first convex portion, and the second convex portion is formed from the lower positioning member. The rear end of the positioning member extends forward toward the direction of the front end.

如請求項4之定位撕膜結構，其中該第一凸部之一側具有一第一上斜邊，該第一凸部之另一側具有一第二上斜邊，該第一上斜邊與該第二上斜邊分別以一角度向後延伸；該第二凸部之一側具有一第一下斜邊，該第二凸部之另一側具有一第二下斜邊，該第一下斜邊與該第二下斜邊分別以一角度向後延伸。The positioning tear film structure of claim 4, wherein one side of the first convex portion has a first upper bevel, and the other side of the first convex portion has a second upper bevel, and the first upper bevel The second upper hypotenuse extends rearward at an angle respectively; one side of the second protrusion has a first lower hypotenuse, and the other side of the second protrusion has a second lower hypotenuse. The lower hypotenuse and the second lower hypotenuse extend backward at an angle respectively.

如請求項1之定位撕膜結構，其更包括至少一前薄膜剝離單元，該前薄膜剝離單元包括一上支軸、一上懸臂以及一第一驅動件，該上支軸連接於該機架上；該上懸臂之一端樞接該上支軸，該上懸臂之另一端具有一下勾部，該下勾部向下抵壓該基板之上表面，藉以剝離該上薄膜之前端緣；該第一驅動件之下端連接該上懸臂之中段位置，供上下移動該上懸臂之該下勾部。The positioning film peeling structure of claim 1, further comprising at least one front film peeling unit, the front film peeling unit including an upper support shaft, an upper cantilever and a first driving member, the upper support shaft is connected to the frame on; one end of the upper cantilever is pivotally connected to the upper support shaft, and the other end of the upper cantilever has a lower hook portion, which presses downwardly against the upper surface of the base plate to peel off the front edge of the upper film; the first The lower end of a driving member is connected to the middle position of the upper cantilever for moving the lower hook portion of the upper cantilever up and down.

如請求項6之定位撕膜結構，其更包括一上吹氣單元，該上吹氣單元連接該機架，且該上吹氣單元位於該後輸送段之上方，供以朝向該下勾部之方向吹出空氣。The positioning film tearing structure of claim 6 further includes an upper air blowing unit connected to the frame, and the upper air blowing unit is located above the rear conveying section for facing the lower hook. Blow out the air in the direction.

如請求項6或7之定位撕膜結構，其更包括一下支軸、一下懸臂以及一第二驅動件，該下支軸連接該機架，並對應設置於該上支軸之下方；該下懸臂之一端樞接該下支軸，該下懸臂之中段位置具有一限位部，供定位一彈性件，該下懸臂之另一端具有一上勾部，該上勾部向上抵壓該基板之下表面，藉以剝離該基板下表面之一下薄膜之前端緣；該第二驅動件之上端具有一推壓部，該推壓部連接該彈性件，供推壓以向上移動該下懸臂之該上勾部。The positioning and tearing film structure of claim 6 or 7 further includes a lower support shaft, a lower cantilever and a second driving member. The lower support shaft is connected to the frame and is correspondingly disposed below the upper support shaft; One end of the cantilever is pivotally connected to the lower support shaft. The lower cantilever has a limiting portion in the middle position for positioning an elastic member. The other end of the lower cantilever has an upper hook portion that presses upward against the base plate. The lower surface is used to peel off the front end edge of the lower film on the lower surface of the substrate; the upper end of the second driving member has a pushing part, which is connected to the elastic member for pushing to move the upper part of the lower cantilever upward. hook part.

如請求項8之定位撕膜結構，其更包括一下吹氣單元，該下吹氣單元連接該機架，該下吹氣單元位於該後輸送段之下方，供以朝向該上勾部之方向吹出空氣。For example, the positioning film tearing structure of claim 8 further includes a lower air blowing unit connected to the frame, and the lower air blowing unit is located below the rear conveying section for facing the direction of the upper hook. Blow out the air.

如請求項1之定位撕膜結構，其中該上剝膜模組係為橫向設置之圓筒，該上剝膜模組定位於該前輸送段之後端上方並平行該薄板之前端緣，該上剝膜模組之圓筒筒身上具有複數個吸氣孔，供吸附該上薄膜。The positioning film peeling structure of claim 1, wherein the upper film peeling module is a horizontally arranged cylinder, and the upper film peeling module is positioned above the rear end of the front conveying section and parallel to the front end edge of the thin plate, and the upper film peeling module is The cylindrical body of the film peeling module has a plurality of suction holes for adsorbing the film.