TW202323806A - Defect detection method for lead frame and detection template based on standard lead frame capable of improving the accuracy of defect detection on lead frames and reducing overkill when detecting defects of lead frames - Google Patents

Defect detection method for lead frame and detection template based on standard lead frame capable of improving the accuracy of defect detection on lead frames and reducing overkill when detecting defects of lead frames Download PDF

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TW202323806A
TW202323806A TW111146223A TW111146223A TW202323806A TW 202323806 A TW202323806 A TW 202323806A TW 111146223 A TW111146223 A TW 111146223A TW 111146223 A TW111146223 A TW 111146223A TW 202323806 A TW202323806 A TW 202323806A
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韓浩
明 溫
志聰 何
達志 陳
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大陸商先進半導體材料（深圳）有限公司
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Abstract

A defect detection method for a lead frame and a detection template based on a standard lead frame are disclosed. The defect detection method includes the steps of providing a standard lead frame, wherein the standard lead frame includes a plurality of standard units that are repeated and arranged in an array; obtaining a source image of the standard lead frame; establishing a first detection template according to the source image of the standard lead frame when the standard lead frame has a preset attribute; providing a lead frame to be tested, wherein the provided lead frame to be tested includes a plurality of units to be tested corresponding to the plurality of standard units of the standard lead frame; obtaining a source image of the lead frame to be tested; and performing defect detection on the plurality of units to be tested according to the first detection template and the source image of the lead frame to be tested. Therefore, the accuracy of defect detection on the lead frame is improved and the overkill when detecting defects of the lead frame is reduced.

Description

引線框架的瑕疵檢測方法及基於標準引線框架的檢測範本 Defect detection method of lead frame and detection template based on standard lead frame

本發明涉及引線框架檢測技術領域，尤其涉及一種引線框架的瑕疵檢測方法及基於標準引線框架的檢測範本。 The invention relates to the technical field of lead frame detection, in particular to a defect detection method of a lead frame and a detection template based on a standard lead frame.

本發明要求於2021年12月01日提交中國專利局、申請號為202111455412.0、發明名稱為“引線框架的瑕疵檢測方法及基於標準引線框架的檢測範本”的中國專利申請的優先權，其全部內容通過引用結合在本發明中。 The present invention claims the priority of the Chinese patent application submitted to the China Patent Office on December 01, 2021, with the application number 202111455412.0, and the title of the invention is "Defect detection method for lead frame and detection template based on standard lead frame", the entire content of which Incorporated herein by reference.

引線框架作為很多積體電路的晶片載體，其品質是否可靠穩定決定了後續最終半導體產品的功能和性能，因此在實際生產過程中需要對引線框架物料進行品質檢查。 As the chip carrier of many integrated circuits, the quality of the lead frame is reliable and stable, which determines the function and performance of the final semiconductor product. Therefore, the quality inspection of the lead frame material is required in the actual production process.

常規的引線框架檢測設備，通常根據1個基於標準引線框架的檢測範本，對輸入的待檢測的引線框架進行瑕疵(defect)檢查，然後根據瑕疵檢查的結果，判斷引線框架的出貨分類：危害程度較高的直接報廢，危害程度低或不影響功能的判斷為良品。 Conventional lead frame inspection equipment usually checks the input lead frame for defects based on a standard lead frame inspection template, and then judges the shipping classification of the lead frame based on the result of the defect inspection: hazard Those with a high degree of damage are directly scrapped, and those with a low degree of harm or no impact on function are judged as good products.

然而，基於現有技術的檢測範本和引線框架的瑕疵檢測方法對引線框架進行瑕疵檢測時，準確度較差，導致檢測引線框架時的導致過殺嚴重。 However, the defect detection method of the lead frame based on the detection template and the lead frame defect detection method in the prior art has poor accuracy, which leads to serious overkill in the detection of the lead frame.

本發明解決的技術問題是提供一種引線框架的瑕疵檢測方法及基於標準引線框架的檢測範本，以提高對引線框架進行瑕疵檢測時的準確度，降低檢測引線框架的瑕疵時的過殺。 The technical problem solved by the present invention is to provide a defect detection method of a lead frame and a detection template based on a standard lead frame, so as to improve the accuracy of the defect detection of the lead frame and reduce overkill when detecting the defect of the lead frame.

為解決上述技術問題，本發明的技術方案提供一種引線框架的 瑕疵檢測方法，包括：提供標準引線框架，所述標準引線框架包括重複且呈陣列排布的多個標準單元，所述陣列排布的行方向為所述標準引線框架的寬度方向，所述陣列排布的列方向為所述標準引線框架的長度方向；獲取所述標準引線框架的源圖像；當所述標準引線框架具有預設屬性時，根據所述標準引線框架的源圖像建立第一檢測範本，所述第一檢測範本包括：第一範本圖像和第一預設單元偏差範圍，所述第一範本圖像至少包括1行標準圖像，所述標準圖像是無瑕疵的標準單元的源圖像，所述第一預設單元偏差範圍同時對應每個標準圖像；提供待測引線框架，所述待測引線框架包括分別與所述標準引線框架的多個標準單元對應的多個待測單元；獲取所述待測引線框架的源圖像；根據所述第一檢測範本和待測引線框架的源圖像，對所述多個待測單元進行瑕疵檢測，所述瑕疵檢測的方法包括：根據所述待測引線框架的源圖像中任一待測單元的源圖像在行方向上的位置，在所述第一範本圖像中，獲取在行方向上位於相同位置的標準圖像作為指定標準圖像；根據所述任一待測單元的源圖像、所述指定標準圖像和所述第一預設單元偏差範圍，檢測所述任一待測單元的瑕疵。 In order to solve the above technical problems, the technical solution of the present invention provides a lead frame The defect detection method includes: providing a standard lead frame, the standard lead frame includes a plurality of standard units repeated and arranged in an array, the row direction of the array arrangement is the width direction of the standard lead frame, and the array The column direction of the arrangement is the length direction of the standard lead frame; the source image of the standard lead frame is obtained; when the standard lead frame has preset attributes, the first step is established according to the source image of the standard lead frame A detection model, the first detection model includes: a first model image and a first preset unit deviation range, the first model image includes at least one row of standard images, and the standard images are flawless The source image of the standard unit, the deviation range of the first preset unit corresponds to each standard image at the same time; the lead frame to be tested is provided, and the lead frame to be tested includes a plurality of standard units corresponding to the standard lead frame respectively a plurality of units to be tested; obtain the source image of the lead frame to be tested; perform defect detection on the plurality of units to be tested according to the first detection template and the source image of the lead frame to be tested, the The defect detection method includes: according to the position in the row direction of the source image of any unit under test in the source image of the lead frame to be tested, in the first sample image, obtain the same position in the row direction The standard image of the specified standard image is used as the specified standard image; according to the source image of the specified any unit to be tested, the specified standard image and the deviation range of the first preset unit, the defect of any of the units to be tested is detected .

可選的，所述預設屬性包括：所述標準引線框架的厚度在預設最小厚度以下、所述標準引線框架的寬度在預設最大寬度以上、所述標準引線框架的單元數量在預設最大單元數量以上、以及所述標準引線框架在行方向上的剛性在預設最小剛性以下中的一者或多者。 Optionally, the preset attributes include: the thickness of the standard lead frame is below the preset minimum thickness, the width of the standard lead frame is above the preset maximum width, and the number of units of the standard lead frame is within the preset One or more of above the maximum number of units, and the rigidity of the standard lead frame in the row direction below the preset minimum rigidity.

可選的，根據所述標準引線框架的源圖像建立第一檢測範本的方法包括：對所述標準引線框架的源圖像進行第一區域劃分，在所述標準引線框架的源圖像中獲取初始標準行區，所述初始標準行區內具有1行標準圖像；對所述初始標準行區進行第二區域劃分，在所述初始標準行區中獲取1個標準單元區，所述標準單元區內具有1個標準圖像；根據所述1個標準單元區對所述初始標準行區進行第三區域劃分，獲取1行標準單元區，以形成1個標準行區；在形成所述1個標準行區之後，為每個標準單元區配置所述第一預設單元偏差範圍。 Optionally, the method for establishing the first detection template according to the source image of the standard lead frame includes: dividing the source image of the standard lead frame into a first area, in the source image of the standard lead frame Acquiring an initial standard row area, wherein there is one row of standard images in the initial standard row area; performing a second area division on the initial standard row area, obtaining one standard unit area in the initial standard row area, the There is 1 standard image in the standard unit area; according to the 1 standard unit area, the third area is divided into the initial standard row area to obtain 1 row of standard cell areas to form 1 standard row area; After the one standard row area, the first preset unit deviation range is configured for each standard unit area.

可選的，對所述初始標準行區進行第二區域劃分的方法包括：對所述初始標準行區進行初始第二區域劃分，在所述初始標準行區中獲取1個初始標準單元區，所述初始標準單元區內具有1個標準圖像；對所述初始標準單元區進行功能區劃分，在所述初始標準單元區中獲取若干相互獨立的標準功能區，每個標準功能區具有一種功能區類型。 Optionally, the method for dividing the initial standard row area into a second area includes: performing an initial second area division on the initial standard row area, obtaining an initial standard unit area in the initial standard row area, There is one standard image in the initial standard unit area; the initial standard unit area is divided into functional areas, and a number of mutually independent standard functional areas are obtained in the initial standard unit area, and each standard functional area has a Ribbon type.

可選的，所述功能區類型的種類包括：電鍍及關鍵區、半蝕刻區、功能區、非功能區和低閾值區中的一種或多種。 Optionally, the types of functional areas include: one or more of electroplating and critical areas, half-etched areas, functional areas, non-functional areas, and low threshold areas.

可選的，所述第一預設單元偏差範圍包括：與若干種功能區類型一一對應的若干第一預設功能區偏差範圍；為每個標準單元區配置所述第一預設單元偏差範圍的方法包括：根據每個標準功能區的功能區類型，為每個標準功能區配置對應的第一預設功能區偏差範圍。 Optionally, the first preset unit deviation range includes: a number of first preset functional area deviation ranges corresponding to several functional area types; the first preset unit deviation is configured for each standard unit area The range method includes: according to the functional area type of each standard functional area, configuring a corresponding first preset functional area deviation range for each standard functional area.

可選的，在為每個標準單元區配置所述第一預設單元偏差範圍之前，根據所述標準引線框架的源圖像建立第一檢測範本的方法還包括：根據所述1個標準行區，對所述標準行區以外的全部標準引線框架的源圖像進行第四區域劃分，形成若干個標準行區；根據所述待測引線框架的源圖像中任一待測單元的源圖像在行方向上的位置，在所述第一範本圖像中，獲取在行方向上位於相同位置的標準圖像作為指定標準圖像的方法進一步包括：根據所述待測引線框架的源圖像中任一待測單元的源圖像在行方向以及列方向上的位置，在所述第一範本圖像中，獲取在行方向以及列方向上位於相同位置的標準圖像作為指定標準圖像。 Optionally, before configuring the first preset cell deviation range for each standard cell area, the method of establishing the first detection template according to the source image of the standard lead frame further includes: according to the one standard row area, divide the source images of all standard lead frames other than the standard line area into fourth areas to form several standard line areas; The position of the image in the row direction, in the first sample image, the method of acquiring a standard image at the same position in the row direction as the specified standard image further includes: according to the source image of the lead frame to be tested The position of the source image of any unit under test in the row direction and the column direction, in the first sample image, obtain the standard image at the same position in the row direction and the column direction as the designated standard image .

可選的，根據所述任一待測單元的源圖像、所述指定標準圖像和所述第一預設單元偏差範圍，檢測所述任一待測單元的瑕疵的方法包括：將所述任一待測單元的源圖像與所述指定標準圖像進行對比，獲取對應的單元偏差特徵資料；當所述對應的單元偏差特徵資料超出所述第一預設單元偏差範圍時，檢測到所述任一待測單元具有若干瑕疵。 Optionally, according to the source image of any unit under test, the specified standard image and the first preset unit deviation range, the method for detecting the defect of any unit under test includes: The source image of any unit to be tested is compared with the designated standard image to obtain the corresponding unit deviation characteristic data; when the corresponding unit deviation characteristic data exceeds the first preset unit deviation range, the detection to any of the units under test having several defects.

可選的，當所述標準引線框架不具有所述預設屬性時，根據所 述標準引線框架的源圖像建立第二檢測範本，所述第二檢測範本包括：1個標準圖像、以及與所述1個標準圖像對應的第二預設單元偏差範圍；根據所述第二檢測範本和所述待測引線框架的源圖像，對每個待測單元進行瑕疵檢測。 Optionally, when the standard lead frame does not have the preset attribute, according to the The source image of the standard lead frame is used to establish a second detection template, and the second detection template includes: 1 standard image and a second preset unit deviation range corresponding to the 1 standard image; according to the The second detection template and the source image of the lead frame to be tested are used to perform defect detection on each unit to be tested.

相應的，本發明的技術方案還提供一種基於標準引線框架的檢測範本，其特徵在於，所述標準引線框架包括：重複且呈陣列排布的多個標準單元，所述陣列排布的行方向為標準引線框架的寬度方向，所述陣列排布的列方向為標準引線框架的長度方向；所述檢測範本包括：第一範本圖像和第一預設單元偏差範圍，所述第一範本圖像至少包括1行標準圖像，所述標準圖像是無瑕疵的標準單元的源圖像，所述第一預設單元偏差範圍同時對應每個標準圖像。 Correspondingly, the technical solution of the present invention also provides a test template based on a standard lead frame, characterized in that the standard lead frame includes: a plurality of standard units that are repeated and arranged in an array, and the row direction of the array arrangement is the width direction of the standard lead frame, and the column direction of the array arrangement is the length direction of the standard lead frame; the detection template includes: a first template image and a first preset unit deviation range, and the first template image The image includes at least one row of standard images, the standard images are source images of flawless standard units, and the first preset unit deviation range corresponds to each standard image at the same time.

可選的，所述第一範本圖像包括：至少1個標準行區，每個標準行區內具有1行標準圖像，每個標準行區包括1行標準單元區，每個所述標準單元區內具有1個標準圖像，且每個所述標準單元區內的1個標準圖像配置所述第一預設單元偏差範圍。 Optionally, the first sample image includes: at least 1 standard row area, each standard row area has 1 row of standard image, each standard row area includes 1 row of standard unit area, each of the standard There is one standard image in the unit area, and each standard image in the standard unit area configures the first preset unit deviation range.

可選的，所述標準單元區包括若干相互獨立的標準功能區，每個標準功能區具有一種功能區類型，所述第一預設單元偏差範圍包括與若干種功能區類型一一對應的若干第一預設功能區偏差範圍，並且，每個標準功能區配置有與每個標準功能區的功能區類型對應的第一預設功能區偏差範圍。 Optionally, the standard unit area includes several mutually independent standard functional areas, each standard functional area has a type of functional area, and the first preset unit deviation range includes a number of A first preset functional zone deviation range, and each standard functional zone is configured with a first preset functional zone deviation range corresponding to the functional zone type of each standard functional zone.

可選的，所述功能區類型的種類包括：電鍍及關鍵區、半蝕刻區、功能區、非功能區和低閾值區中的一種或多種。 Optionally, the types of functional areas include: one or more of electroplating and critical areas, half-etched areas, functional areas, non-functional areas, and low threshold areas.

與現有技術相比，本發明實施例的技術方案具有以下有益效果： Compared with the prior art, the technical solutions of the embodiments of the present invention have the following beneficial effects:

本發明的技術方案提供的引線框架的瑕疵檢測方法中，當所述標準引線框架具有預設屬性時，根據所述標準引線框架的源圖像建立第一檢測範本，所述第一檢測範本包括：第一範本圖像和第一預設單元偏差範圍，所述第一範本圖像至少包括1行標準圖像，所述標準圖像是無瑕疵的標準單元的源圖像，所述第一預設單元偏差範圍同時對應每個標準圖像。並且，對所述 多個待測單元進行瑕疵檢測的方法包括：根據所述待測引線框架的源圖像中任一待測單元的源圖像在行方向上的位置，在所述第一範本圖像中，獲取在行方向上位於相同位置的標準圖像作為指定標準圖像；根據所述任一待測單元的源圖像、所述指定標準圖像和所述第一預設單元偏差範圍，檢測所述任一待測單元的瑕疵。因此，在進行瑕疵檢測時，提高了與待測引線框架的源圖像進行比對的基準(所述第一範本圖像)的準確性，減少了待測引線框架的源圖像在行方向上受光亮度變化影響而引起的超出第一預設單元偏差範圍的風險，從而，提高了對引線框架進行瑕疵檢測時的準確度，降低檢測引線框架的瑕疵時的過殺。 In the defect detection method of the lead frame provided by the technical solution of the present invention, when the standard lead frame has preset attributes, a first detection template is established according to the source image of the standard lead frame, and the first detection template includes : the deviation range between the first sample image and the first preset unit, the first sample image includes at least one row of standard image, the standard image is the source image of a flawless standard unit, the first The preset unit deviation range corresponds to each standard image at the same time. And, for the The method for detecting defects of multiple units under test includes: according to the position of the source image of any unit under test in the source image of the lead frame under test in the row direction, in the first sample image, obtain The standard image located at the same position in the row direction is used as the specified standard image; according to the source image of any unit to be tested, the specified standard image and the deviation range of the first preset unit, detect the any A defect of the unit under test. Therefore, when performing defect detection, the accuracy of the reference (the first template image) compared with the source image of the lead frame to be tested is improved, and the number of the source images of the lead frame to be tested is reduced in the row direction. The risk of exceeding the deviation range of the first preset unit due to the influence of the brightness change improves the accuracy of defect detection of the lead frame and reduces the overshoot when detecting the defect of the lead frame.

10:送料機構 10: Feeding mechanism

100:標準引線框架 100: standard lead frame

101:標準單元 101: Standard unit

11:導軌 11: guide rail

12:夾持機構 12: Clamping mechanism

20:引線框架 20: Lead frame

200,400,401:源圖像 200, 400, 401: source image

201:標準圖像 201: standard image

21:單元 21: unit

210:初始標準行區 210: Initial standard row area

22:正面 22: front

220:初始標準單元區 220: Initial standard unit area

221:標準功能區 221: Standard functional area

23:反面 23: reverse side

230:標準單元區 230: standard unit area

231:指定標準圖像 231:Specify standard image

240:標準行區 240: standard line area

300:待測引線框架 300: lead frame to be tested

301:待測單元 301: unit under test

500:第一範本圖像 500: The first template image

600:第二範本圖像 600: the second template image

S10,S11,S13,S14,S15,S100,S200,S300,S400,S500,S510,S520,S530,S540,S550,S600,S610,S620,S700,S800:步驟 Step

X,Y:方向 X, Y: direction

圖1是一種待測引線框架的俯視送料示意圖； Fig. 1 is a kind of top view feeding schematic diagram of lead frame to be tested;

圖2是圖1中沿方向Y的側視送料示意圖； Fig. 2 is a side-view feeding schematic diagram along direction Y in Fig. 1;

圖3是本發明一實施例的引線框架的瑕疵檢測方法的流程示意圖； 3 is a schematic flowchart of a defect detection method for a lead frame according to an embodiment of the present invention;

圖4是本發明一實施例的標準引線框架的結構示意圖； Fig. 4 is a schematic structural view of a standard lead frame according to an embodiment of the present invention;

圖5是本發明一實施例的標準引線框架的源圖像示意圖； 5 is a schematic diagram of a source image of a standard lead frame according to an embodiment of the present invention;

圖6是本發明一實施例的待測引線框架的結構示意圖； 6 is a schematic structural view of a lead frame to be tested according to an embodiment of the present invention;

圖7是本發明一實施例的待測引線框架的源圖像示意圖； 7 is a schematic diagram of a source image of a lead frame to be tested according to an embodiment of the present invention;

圖8是本發明一實施例中建立第一檢測範本的流程示意圖； Fig. 8 is a schematic flow chart of establishing a first detection template in an embodiment of the present invention;

圖9至圖13是本發明一實施例中建立第一檢測範本的各步驟的示意圖； 9 to 13 are schematic diagrams of the steps of establishing the first detection template in an embodiment of the present invention;

圖14是本發明一實施例的基於第一檢測範本進行瑕疵檢測的方法的流程示意圖； 14 is a schematic flowchart of a method for detecting defects based on a first detection template according to an embodiment of the present invention;

圖15是本發明一實施例中基於第一檢測範本進行瑕疵檢測的步驟示意圖； Fig. 15 is a schematic diagram of the steps of flaw detection based on the first detection template in an embodiment of the present invention;

圖16至圖17是本發明一實施例中建立第二檢測範本的各步驟的示意圖。 16 to 17 are schematic diagrams of the steps of establishing the second detection template in an embodiment of the present invention.

如背景技術所述，基於現有技術的檢測範本和引線框架的瑕疵檢測方法對引線框架進行瑕疵檢測時，準確度較差，導致檢測引線框架時的導致過殺嚴重。現結合具體的實施例進行分析說明。 As mentioned in the background art, when the defect detection method of the lead frame based on the detection template and the lead frame defect detection method of the prior art is performed, the accuracy is poor, which leads to serious overkill in the detection of the lead frame. Now analyze and illustrate in conjunction with specific embodiment.

具體的，為了對具有多個重複的單元的引線框架進行瑕疵檢測，提出了一種引線框架的瑕疵檢測方法，包括： Specifically, in order to perform defect detection on a lead frame with multiple repeated units, a method for detecting a defect in a lead frame is proposed, including:

步驟S10，將1個無瑕疵的單元的源圖像作為標準範本圖像； Step S10, using a source image of a flawless unit as a standard template image;

步驟S11，為所述標準範本圖像配置預設偏差範圍； Step S11, configuring a preset deviation range for the standard template image;

步驟S13，通過光學平臺採集引線框架的源圖像，所述引線框架的源圖像包括所述多個重複的單元的源圖像； Step S13, collecting the source image of the lead frame through the optical platform, the source image of the lead frame includes the source image of the plurality of repeated units;

步驟S14，將所述標準範本圖像與引線框架的每個單元的源圖像進行比較； Step S14, comparing the standard template image with the source image of each unit of the lead frame;

當所述標準範本圖像與引線框架的任意單元的源圖像之間的偏差，超出所述預設偏差範圍時，執行步驟S15，判斷所述任意單元具有對應的瑕疵。 When the deviation between the standard template image and the source image of any unit of the lead frame exceeds the preset deviation range, step S15 is executed to determine that the arbitrary unit has a corresponding defect.

從而，通過將1個無瑕疵的單元的源圖像(所述標準範本圖像)作為引線框架的每個單元的源圖像的比對基準，判斷引線框架每個單元的源圖像所出現的偏差是否超出預設偏差範圍，實現對引線框架的瑕疵檢測。 Therefore, by using the source image of one flawless unit (the standard template image) as a reference for comparing the source image of each unit of the lead frame, it is judged where the source image of each unit of the lead frame appears. Whether the deviation exceeds the preset deviation range, to realize the defect detection of the lead frame.

在上述引線框架的瑕疵檢測方法中，需要通過送料機構實現光學平臺對於引線框架的源圖像的採集。 In the above defect detection method of the lead frame, it is necessary to realize the acquisition of the source image of the lead frame by the optical platform through a feeding mechanism.

具體的，請參考圖1和圖2，圖1是一種待測引線框架的俯視送料示意圖，圖2是圖1中沿方向Y的側視送料示意圖，送料機構10包括：2個在方向X上排列且沿方向Y延伸的導軌11，方向X和方向Y之間互相垂直，2個導軌11在方向X上的間距可調；位於每個導軌11在方向X上一側的夾持機構12。 Specifically, please refer to FIG. 1 and FIG. 2. FIG. 1 is a top view feeding schematic diagram of a lead frame to be tested. FIG. 2 is a side view feeding schematic diagram along the direction Y in FIG. 1. The feeding mechanism 10 includes: two The guide rails 11 arranged and extending along the direction Y, the direction X and the direction Y are perpendicular to each other, and the distance between the two guide rails 11 in the direction X is adjustable; the clamping mechanism 12 located on one side of each guide rail 11 in the direction X.

請繼續參考圖1和圖2，將引線框架20放置於導軌11上，並 且，使夾持機構12夾持引線框架20的邊緣，從而，引線框架20能夠穩定地沿方向Y進行送料。 Please continue to refer to FIG. 1 and FIG. 2, place the lead frame 20 on the guide rail 11, and Moreover, the clamping mechanism 12 clamps the edge of the lead frame 20 , so that the lead frame 20 can be stably fed along the direction Y.

所述引線框架20包括多個重複的單元21。 The lead frame 20 includes a plurality of repeating units 21 .

在送料過程中，位於送料機構10上方和下方的光學平臺(未圖示)，分別掃描引線框架20的正面22和反面23，獲取引線框架20的正面源圖像(未圖示)和反面源圖像(未圖示)。 During the feeding process, the optical platform (not shown) located above and below the feeding mechanism 10 scans the front side 22 and the back side 23 of the lead frame 20 respectively to obtain the front side source image (not shown) and the back side of the lead frame 20 Source image (not shown).

為了便於理解，以下將引線框架20的正面源圖像(未圖示)，作為上述引線框架的瑕疵檢測方法中的引線框架的源圖像進行說明。 For ease of understanding, the front-side source image (not shown) of the lead frame 20 will be described below as the source image of the lead frame in the above-mentioned defect detection method of the lead frame.

當引線框架20在方向X上的寬度較大、引線框架20很薄、或是引線框架20的單元數量很少時，由於重力原因，位於2個夾持機構12之間的引線框架20容易下垂，導致從正面22掃描引線框架20時，在遠離導軌11的區域(即靠近2個導軌11的中間區域)會更暗，並在靠近導軌11的區域會更亮。從而，在正面源圖像中，各單元在方向X上的源圖像會受到光亮度影響而發生較大差異。 When the width of the lead frame 20 in the direction X is large, the lead frame 20 is very thin, or the number of units of the lead frame 20 is small, the lead frame 20 located between the two clamping mechanisms 12 tends to sag due to gravity. , when the lead frame 20 is scanned from the front side 22, the area away from the guide rails 11 (that is, the middle area near the two guide rails 11) will be darker, and the area near the guide rails 11 will be brighter. Therefore, in the front source image, the source image of each unit in the direction X will be greatly different due to the influence of brightness.

與此同時，由於將1個無瑕疵的單元的源圖像作為標準範本圖像，因此，標準範本圖像基本不受到光亮度變化的影響。 At the same time, since the source image of one flawless unit is used as the standard template image, the standard template image is basically not affected by the brightness change.

由此，在進行步驟S14和步驟S15時，標準範本圖像與引線框架20的各單元的源圖像之間的偏差，容易超出預設偏差範圍，導致對瑕疵的錯誤判斷，使得進行瑕疵檢測時，準確度較差，導致檢測引線框架時的導致過殺嚴重。 Thus, when step S14 and step S15 are performed, the deviation between the standard template image and the source image of each unit of the lead frame 20 is likely to exceed the preset deviation range, resulting in a wrong judgment of the defect, so that the defect detection , the accuracy is poor, resulting in serious overkill when detecting lead frames.

需要理解的是，類似的將引線框架20的反面源圖像(未圖示)，作為上述引線框架的瑕疵檢測方法中的引線框架的源圖像時，會導致從反面23掃描引線框架20時，在遠離導軌11的區域更亮，並在靠近導軌11的區域更暗。從而，同樣會在進行瑕疵檢測時，發生準確度較差，造成檢測引線框架時的導致過殺嚴重的情況。 It should be understood that similarly using the reverse source image (not shown) of the lead frame 20 as the source image of the lead frame in the above-mentioned lead frame defect detection method will result in scanning the lead frame 20 from the reverse side 23 , is brighter in areas farther from the guide rail 11 and darker in areas closer to the guide rail 11. As a result, poor accuracy may also occur when performing defect detection, resulting in serious overkill when detecting lead frames.

為解決上述技術問題，本發明的技術方案提供一種引線框架的瑕疵檢測方法及基於標準引線框架的檢測範本，由於根據所述第一檢測範本和待測引線框架的源圖像，對所述多個待測單元進行瑕疵檢測，且所述瑕疵檢測的方法包括：根據所述待測引線框架的源圖像中任一待測單元的源圖像在行方向上的位置，在所述第一範本圖像中，獲取在行方向上位於相同位置的標準圖像作為指定標準圖像；根據所述任一待測單元的源圖像、所述指定標準圖像和所述第一預設單元偏差範圍，檢測所述任一待測單元的瑕疵。因此，在進行瑕疵檢測時，提高了與待測引線框架的源圖像進行比對的基準的準確性，減少了待測引線框架的源圖像在行方向上受光亮度變化影響而引起的超出第一預設單元偏差範圍的風險，從而，提高了對引線框架進行瑕疵檢測時的準確度，降低檢測引線框架的瑕疵時的過殺。 In order to solve the above-mentioned technical problems, the technical solution of the present invention provides a defect detection method of a lead frame and a detection template based on a standard lead frame. According to the first detection template and the source image of the lead frame to be tested, multiple Each unit under test performs defect detection, and the defect detection method includes: according to the position of the source image of any unit under test in the source image of the lead frame to be tested in the row direction, in the first template In the image, a standard image located at the same position in the row direction is obtained as a specified standard image; according to the source image of any unit under test, the specified standard image and the first preset unit deviation range , detecting the defect of any unit under test. Therefore, when performing defect detection, the accuracy of the benchmark compared with the source image of the lead frame to be tested is improved, and the source image of the lead frame to be tested is affected by the brightness change in the row direction. The risk of a preset cell deviation range, thereby improving the accuracy of defect detection of the lead frame and reducing overkill when detecting the defect of the lead frame.

為使本發明的上述目的、特徵和有益效果能夠更為明顯易懂，下面結合圖式對本發明的具體實施例做詳細的說明。 In order to make the above objects, features and beneficial effects of the present invention more obvious and comprehensible, specific embodiments of the present invention will be described in detail below in conjunction with the drawings.

圖3是本發明一實施例的引線框架的瑕疵檢測方法的流程示意圖。 FIG. 3 is a schematic flowchart of a defect detection method for a lead frame according to an embodiment of the present invention.

請參考圖3，所述引線框架的瑕疵檢測方法包括： Please refer to FIG. 3, the defect detection method of the lead frame includes:

步驟S100，提供標準引線框架，所述標準引線框架包括重複且呈陣列排布的多個標準單元，所述陣列排布的行方向為所述標準引線框架的寬度方向，所述陣列排布的列方向為所述標準引線框架的長度方向； Step S100, providing a standard lead frame, the standard lead frame includes a plurality of repeated standard cells arranged in an array, the row direction of the array arrangement is the width direction of the standard lead frame, and the array arrangement The column direction is the length direction of the standard lead frame;

步驟S200，獲取所述標準引線框架的源圖像； Step S200, acquiring the source image of the standard lead frame;

步驟S300，提供待測引線框架，所述待測引線框架包括分別與所述標準引線框架的多個標準單元對應的多個待測單元； Step S300, providing a lead frame to be tested, the lead frame to be tested including a plurality of units to be tested respectively corresponding to a plurality of standard units of the standard lead frame;

步驟S400，獲取所述待測引線框架的源圖像； Step S400, acquiring the source image of the lead frame to be tested;

當所述標準引線框架具有預設屬性時，執行步驟S500，根據所述標準引線框架的源圖像建立第一檢測範本；以及，步驟S600，根據所述第 一檢測範本和待測引線框架的源圖像，對所述多個待測單元進行瑕疵檢測； When the standard lead frame has preset attributes, perform step S500, establish a first detection template according to the source image of the standard lead frame; and, step S600, according to the first detection template A detection template and a source image of the lead frame to be tested, and performing defect detection on the plurality of units to be tested;

當所述標準引線框架不具有預設屬性時，執行步驟S700，根據所述標準引線框架的源圖像建立第二檢測範本；以及，步驟S800，根據所述第二檢測範本和所述待測引線框架的源圖像，對每個待測單元進行瑕疵檢測。 When the standard lead frame does not have a preset attribute, perform step S700, establish a second detection template according to the source image of the standard lead frame; and, step S800, according to the second detection template and the to-be-tested template Source image of the lead frame for flaw detection for each unit under test.

需要理解的是，步驟S300和步驟S400與步驟S100、步驟S200、步驟S500和步驟S700之間不具有固定的先後執行順序，步驟S300和步驟S400僅需在步驟S600和步驟S800之前執行即可。 It should be understood that there is no fixed order of execution between steps S300 and S400 and steps S100, S200, S500 and S700, and steps S300 and S400 only need to be executed before steps S600 and S800.

以下結合圖式進行詳細說明。 A detailed description will be given below in conjunction with the drawings.

請參考圖4，圖4是本發明一實施例的標準引線框架的結構示意圖，提供標準引線框架100。 Please refer to FIG. 4 . FIG. 4 is a schematic structural diagram of a standard lead frame according to an embodiment of the present invention, and a standard lead frame 100 is provided.

所述標準引線框架100包括：重複且呈陣列排布的多個標準單元101。 The standard lead frame 100 includes: a plurality of standard cells 101 that are repeated and arranged in an array.

所述陣列排布的行方向X為所述標準引線框架100的寬度方向，所述陣列排布的列方向Y為所述標準引線框架100的長度方向。 The row direction X of the array arrangement is the width direction of the standard lead frame 100 , and the column direction Y of the array arrangement is the length direction of the standard lead frame 100 .

需要說明的是，所述標準單元101可以是標準引線框架100中的最小重複單元，也可以包括2個以上的最小重複單元。 It should be noted that the standard unit 101 may be the smallest repeating unit in the standard lead frame 100 , or may include more than two smallest repeating units.

需要說明的是，標準引線框架100具有相對的正面(圖中未標識)和反面(圖中未標識)，本實施例中的標準單元101是指標準引線框架100在正面或者反面中的單面上的結構。 It should be noted that the standard lead frame 100 has an opposite front side (not marked in the figure) and a back side (not marked in the figure), and the standard unit 101 in this embodiment refers to a single side of the standard lead frame 100 on the front side or the back side on the structure.

此外，為了便於解釋和理解，圖4中僅示意性地表示出多個標準單元101中的一部分，並且，儘管圖4中在行方向X上，相鄰標準單元101之間鄰接(無間距)，但是，無論是在行方向X上，或是在列方向Y上，相鄰標準單元101之間的間距可以根據實際需求而決定，所述實際需求例如是具體需要檢測瑕疵的區域、引線框架的結構設計等。 In addition, for the convenience of explanation and understanding, only a part of the plurality of standard cells 101 is schematically shown in FIG. 4 , and although in the row direction X in FIG. , however, whether in the row direction X or in the column direction Y, the spacing between adjacent standard cells 101 can be determined according to actual requirements, such as the specific need to detect defects in the region, lead frame structural design, etc.

請參考圖5，圖5是本發明一實施例的標準引線框架的源圖像 示意圖，獲取所述標準引線框架100的源圖像200。 Please refer to Fig. 5, Fig. 5 is the source image of the standard lead frame of an embodiment of the present invention A schematic diagram of obtaining a source image 200 of the standard lead frame 100 .

在本實施例中，利用光學平臺採集所述標準引線框架100的源圖像200，所述光學平臺包括CCD相機等。 In this embodiment, the source image 200 of the standard lead frame 100 is collected by using an optical platform, and the optical platform includes a CCD camera and the like.

需要理解的是，本實施例中採集源圖像的光學平臺、相關設備及方法不應成為限制本發明的保護範圍的特徵。 It should be understood that the optical platform, related equipment and method for collecting source images in this embodiment should not be the features that limit the protection scope of the present invention.

需要說明的是，由於本實施例中的多個標準單元101是指標準引線框架100在正面或者反面中的單面上的結構，因此，相應的，所述標準引線框架100的源圖像200是指：標準引線框架100在正面或者反面中的單面的源圖像。 It should be noted that, since the plurality of standard units 101 in this embodiment refers to the structure of the standard lead frame 100 on the front or back side of a single surface, therefore, correspondingly, the source image 200 of the standard lead frame 100 Refers to: the source image of a single side of the standard lead frame 100 on the front side or the back side.

請參考圖6，圖6是本發明一實施例的待測引線框架的結構示意圖，提供待測引線框架300。 Please refer to FIG. 6 . FIG. 6 is a schematic structural diagram of a lead frame to be tested according to an embodiment of the present invention, and a lead frame to be tested 300 is provided.

所述待測引線框架300：包括分別與所述標準引線框架100的多個標準單元101對應的多個待測單元301。 The lead frame to be tested 300 includes a plurality of units to be tested 301 respectively corresponding to the plurality of standard units 101 of the standard lead frame 100 .

具體而言，所述待測引線框架300與標準引線框架100是結構一致的引線框架，相應的，待測單元301與標準單元101是結構一致的單元。 Specifically, the lead frame to be tested 300 is a lead frame with the same structure as the standard lead frame 100 , and correspondingly, the unit to be tested 301 is a unit with the same structure as the standard unit 101 .

所述待測引線框架300與標準引線框架100的區別在於：所述標準引線框架100是用於建立第一檢測範本或第二檢測範本的引線框架。具體的，當需要建立第一檢測範本時，標準引線框架100中的多個標準單元101中，至少包括一行無瑕疵的單元，以實現第一檢測範本的建立；當需要建立第二檢測範本時，標準引線框架100中的多個標準單元101中，至少包括一個無瑕疵的單元，以實現第二檢測範本的建立。與此同時，待測引線框架300則是需要被檢測是否具有瑕疵的引線框架。 The difference between the lead frame to be tested 300 and the standard lead frame 100 is that: the standard lead frame 100 is a lead frame used to establish a first test pattern or a second test pattern. Specifically, when it is necessary to establish the first detection template, among the plurality of standard cells 101 in the standard lead frame 100, at least one row of flawless cells is included to realize the establishment of the first detection template; when it is necessary to establish the second detection template , among the plurality of standard units 101 in the standard lead frame 100, at least one unit without defects is included, so as to realize the establishment of the second detection template. At the same time, the lead frame 300 to be tested is a lead frame that needs to be tested for defects.

優選的，在試產階段提供標準引線框架100，並完成第一檢測範本的建立。並且，在量產階段提供待測引線框架300，以對待測引線框架300進行瑕疵檢測。由此，無需在量產階段花費時間建立第一檢測範本，從而，能 夠更好地提高量產的效率。 Preferably, a standard lead frame 100 is provided during the trial production stage, and the establishment of the first testing template is completed. Moreover, the lead frame to be tested 300 is provided in the mass production stage, so as to perform defect detection on the lead frame to be tested 300 . Therefore, it is not necessary to spend time in the mass production stage to establish the first detection template, thus, it is possible to Enough to better improve the efficiency of mass production.

請參考圖7，圖7是本發明一實施例的待測引線框架的源圖像示意圖，獲取所述待測引線框架300的源圖像400。 Please refer to FIG. 7 , which is a schematic diagram of a source image of a lead frame to be tested according to an embodiment of the present invention, and a source image 400 of the lead frame to be tested 300 is acquired.

在本實施例中，利用光學平臺採集所述待測引線框架300的源圖像400，所述光學平臺包括CCD相機等。 In this embodiment, an optical platform is used to collect the source image 400 of the lead frame 300 to be tested, and the optical platform includes a CCD camera and the like.

需要說明的是，所述待測引線框架300的源圖像400是指：待測引線框架300在正面或者反面中的單面的源圖像。 It should be noted that the source image 400 of the lead frame to be tested 300 refers to the source image of a single side of the lead frame to be tested 300 on the front side or the back side.

請繼續參考圖3，在本實施例中，當標準引線框架100具有預設屬性時，根據所述標準引線框架100的源圖像200建立第一檢測範本。 Please continue to refer to FIG. 3 , in this embodiment, when the standard lead frame 100 has preset attributes, a first detection template is established according to the source image 200 of the standard lead frame 100 .

在本實施例中，所述預設屬性包括：所述標準引線框架100的厚度在預設最小厚度以下、所述標準引線框架100的寬度在預設最大寬度以上、所述標準引線框架100的單元數量在預設最大單元數量以上、以及所述標準引線框架在行方向X上的剛性(Rigidity，單位為N/m)在預設最小剛性以下中的一者或多者。 In this embodiment, the preset attributes include: the thickness of the standard lead frame 100 is below the preset minimum thickness, the width of the standard lead frame 100 is above the preset maximum width, the standard lead frame 100 One or more of the number of units being greater than a preset maximum number of units, and the rigidity (Rigidity, in N/m) of the standard lead frame in the row direction X being below a preset minimum rigidity.

其中，所述標準引線框架100的單元數量是指：標準引線框架100在行方向X上，一行標準單元101的標準單元101數量。所述預設屬性用於判斷所述標準引線框架100是否屬於容易受重力影響而發生形變的較寬、較薄、單元數量較多的引線框架。 Wherein, the number of units of the standard lead frame 100 refers to: the number of standard units 101 of a row of standard units 101 of the standard lead frame 100 in the row direction X. The preset attributes are used to determine whether the standard lead frame 100 is a lead frame that is wider, thinner, and has a large number of units that is easily deformed by gravity.

所述第一檢測範本包括：第一範本圖像和第一預設單元偏差範圍，所述第一範本圖像至少包括1行標準圖像，所述標準圖像是無瑕疵的標準單元101的源圖像200，所述第一預設單元偏差範圍同時對應每個標準圖像。 The first detection template includes: a first template image and a first preset unit deviation range, the first template image includes at least one row of standard images, and the standard image is of a flawless standard unit 101 For the source image 200, the deviation range of the first preset unit corresponds to each standard image at the same time.

需要理解的是，由於第一範本圖像至少包括1行標準圖像，因此，標準引線框架100至少包括一行無瑕疵的標準單元101。具體的，標準引線框架100至少需要具有與第一範本圖像中的標準圖像相當的無瑕疵的標準 單元101。 It should be understood that since the first sample image includes at least one row of standard images, the standard lead frame 100 includes at least one row of standard cells 101 without defects. Specifically, the standard lead frame 100 at least needs to have a flawless standard comparable to the standard image in the first sample image. Unit 101.

請參考圖8，圖8是本發明一實施例中建立第一檢測範本的流程示意圖，根據所述標準引線框架的源圖像建立第一檢測範本的方法包括： Please refer to FIG. 8. FIG. 8 is a schematic flow chart of establishing the first detection template in an embodiment of the present invention. The method for establishing the first detection template according to the source image of the standard lead frame includes:

步驟S510，對所述標準引線框架的源圖像進行第一區域劃分，在所述標準引線框架的源圖像中獲取初始標準行區，所述初始標準行區內具有1行標準圖像； Step S510, dividing the source image of the standard lead frame into a first region, obtaining an initial standard line area in the source image of the standard lead frame, and the initial standard line area has one line of standard image;

步驟S520，對所述初始標準行區進行第二區域劃分，在所述初始標準行區中獲取1個標準單元區，所述標準單元區內具有1個標準圖像； Step S520, performing a second area division on the initial standard row area, obtaining one standard unit area in the initial standard row area, and one standard image in the standard unit area;

步驟S530，根據所述1個標準單元區對所述初始標準行區進行第三區域劃分，獲取1行標準單元區，以形成1個標準行區； Step S530, performing a third area division on the initial standard row area according to the one standard cell area, and obtaining one row of standard cell areas to form one standard row area;

步驟S540，根據所述1個標準行區，對所述標準行區以外的全部標準引線框架的源圖像進行第四區域劃分，形成若干個標準行區； Step S540, according to the one standard line area, perform fourth area division on the source images of all standard lead frames other than the standard line area to form several standard line areas;

步驟S550，在形成若干個標準行區之後，為每個標準單元區配置所述第一預設單元偏差範圍。 Step S550, after forming several standard row regions, configure the first preset cell deviation range for each standard cell region.

圖9至圖13是本發明一實施例中建立第一檢測範本的各步驟的示意圖，以下結合圖9至圖13對建立第一檢測範本的各步驟進行詳細說明。 9 to 13 are schematic diagrams of the steps of establishing the first detection template in an embodiment of the present invention. The steps of establishing the first detection template will be described in detail below with reference to FIGS. 9 to 13 .

請參考圖9，對所述標準引線框架100的源圖像200進行第一區域劃分，在所述標準引線框架100的源圖像200中獲取初始標準行區210。 Referring to FIG. 9 , the first area division is performed on the source image 200 of the standard lead frame 100 , and an initial standard line area 210 is obtained in the source image 200 of the standard lead frame 100 .

所述初始標準行區內具有1行標準圖像201，所述標準圖像201是無瑕疵的標準單元101的源圖像200。 There is one row of standard image 201 in the initial standard row area, and the standard image 201 is the source image 200 of the standard unit 101 without defects.

接著，對所述初始標準行區210進行第二區域劃分，在所述初始標準行區210中獲取1個標準單元區，所述標準單元區內具有1個標準圖像201。具體對所述初始標準行區210進行第二區域劃分的步驟請參考圖10和圖11。 Next, the second area division is performed on the initial standard row area 210 , and one standard unit area is obtained in the initial standard row area 210 , and one standard image 201 is contained in the standard unit area. Please refer to FIG. 10 and FIG. 11 for specific steps of dividing the initial standard row area 210 into the second area.

請參考圖10，對所述初始標準行210進行初始第二區域劃分， 在所述初始標準行區210中獲取1個初始標準單元區220，所述初始標準單元區220內具有1個標準圖像201。 Please refer to FIG. 10, the initial second area division is performed on the initial standard row 210, An initial standard cell area 220 is acquired in the initial standard row area 210 , and there is a standard image 201 in the initial standard cell area 220 .

優選的，所述初始標準單元區220內的標準圖像201是：在1行標準圖像201中，兩端的標準圖像201中的一個(如圖10中所示)。從而，能夠利於建立第一檢測範本的設備在形成標準行區時進行更準確的區域劃分。 Preferably, the standard image 201 in the initial standard unit area 220 is: in one row of standard images 201, one of the standard images 201 at both ends (as shown in FIG. 10 ). Therefore, it can be beneficial for the device establishing the first detection template to perform more accurate area division when forming the standard row area.

請參考圖11，對所述初始標準單元區220進行功能區劃分，在所述初始標準單元區220中獲取若干相互獨立的標準功能區221。 Referring to FIG. 11 , the initial standard unit area 220 is divided into functional areas, and several mutually independent standard functional areas 221 are obtained in the initial standard unit area 220 .

由此，形成1個標準單元區230，所述1個標準單元區230包括：所述若干相互獨立的標準功能區221。 Thus, one standard unit area 230 is formed, and the one standard unit area 230 includes: the plurality of mutually independent standard function areas 221 .

在本實施例中，每個標準功能區221具有一種功能區類型。 In this embodiment, each standard functional area 221 has a type of functional area.

在本實施例中，所述功能區類型的種類包括：電鍍及關鍵區(Plating and Key)、半蝕刻區(Half-etched)、功能區(Functional)、非功能區(Non-functional)和低閾值區(Large Low-value)中的一種或多種。 In this embodiment, the types of functional areas include: Plating and Key, Half-etched, Functional, Non-functional and Low One or more of the threshold areas (Large Low-value).

也就是說，對於1個標準功能區221的功能區類型而言，該功能區類型可以是電鍍及關鍵區、半蝕刻區、功能區、非功能區或者低閾值區。 That is to say, for the functional area type of one standard functional area 221 , the functional area type may be an electroplating and key area, a half-etching area, a functional area, a non-functional area or a low threshold area.

在一些實際的應用場合中，可以由技術人員執行第一區域劃分和第二區域劃分。 In some practical application scenarios, the first area division and the second area division may be performed by technicians.

請參考圖12，根據所述1個標準單元區230對所述初始標準行區210進行第三區域劃分，獲取1行標準單元區230，以形成1個標準行區240。 Referring to FIG. 12 , the initial standard row area 210 is divided into a third area according to the one standard cell area 230 to obtain one row of standard cell areas 230 to form one standard row area 240 .

具體而言，所述第三區域劃分是通過將1個標準單元區230作為範本，對初始標準行區210中，除所述1個標準單元區230以外的其餘區域進行的區域劃分。 Specifically, the third area division is performed on the remaining areas in the initial standard row area 210 except the one standard cell area 230 by using one standard cell area 230 as a template.

在一些實際的應用場合中，在由技術人員執行第一區域劃分和第二區域劃分獲取初始標準行區210和1個標準單元區230後，通過用於建 立第一檢測範本的設備根據所述1個標準單元區230自動對初始標準行區210中的剩餘區域進行劃分，形成1行標準單元區230。 In some practical applications, after the technician performs the first area division and the second area division to obtain the initial standard row area 210 and one standard cell area 230, the The device for establishing the first detection template automatically divides the remaining area in the initial standard row area 210 according to the one standard cell area 230 to form a one-row standard cell area 230 .

請參考圖13，根據所述1個標準行區240，對所述標準行區240以外的全部標準引線框架100的源圖像200進行第四區域劃分，形成若干個標準行區240。 Referring to FIG. 13 , according to the one standard line area 240 , the source images 200 of all standard lead frames 100 other than the standard line area 240 are divided into fourth areas to form several standard line areas 240 .

由此，根據若干個標準行區240形成第一範本圖像500。 Thus, the first sample image 500 is formed according to the several standard row regions 240 .

具體而言，第一範本圖像500包括所述若干個標準行區240。也就是說，本實施例中的第一範本圖像500包括：與所述全部的標準單元101一一對應的標準圖像201。 Specifically, the first sample image 500 includes the plurality of standard row areas 240 . That is to say, the first sample image 500 in this embodiment includes: standard images 201 corresponding to all the standard units 101 one-to-one.

相應的，在本實施例中的標準引線框架100的全部標準單元101無瑕疵。 Correspondingly, all the standard units 101 of the standard lead frame 100 in this embodiment are free from defects.

具體而言，所述第四區域劃分是通過將1個標準行區240作為範本，對標準引線框架100的源圖像200中，除所述1個標準行區240以外的其餘區域進行的區域劃分。 Specifically, the fourth area division is performed on the remaining areas in the source image 200 of the standard lead frame 100 except the one standard line area 240 by using one standard line area 240 as a template divided.

在一些實際的應用場合中，通過用於建立第一檢測範本的設備根據所述1個標準行區240，自動對標準引線框架100的源圖像200中除所述1個標準行區240以外的其餘區域進行的區域劃分，形成若干個標準行區240。 In some practical applications, according to the one standard line area 240, the equipment used to establish the first detection template automatically checks the source image 200 of the standard lead frame 100 except for the one standard line area 240 The remaining regions are divided into several standard row regions 240 .

在另一實施例中，不進行所述第四區域劃分，第一範本圖像包括1個標準行區240。從而，第一範本圖像包括1行標準圖像201。 In another embodiment, the fourth area division is not performed, and the first sample image includes one standard line area 240 . Therefore, the first sample image includes one row of the standard image 201 .

請繼續參考圖13，為每個標準單元區230配置第一預設單元偏差範圍。 Please continue to refer to FIG. 13 , a first preset unit deviation range is configured for each standard unit area 230 .

具體的，根據任一標準單元區230中的標準圖像201，能夠獲取基準資料。任一標準單元區230對應的第一預設單元偏差範圍，是以任一標準單元區230中的標準圖像201的基準資料為基準的偏差範圍。 Specifically, based on the standard image 201 in any standard unit area 230 , reference data can be obtained. The first preset unit deviation range corresponding to any standard unit area 230 is the deviation range based on the reference data of the standard image 201 in any standard unit area 230 .

由此，通過劃分標準單元區230，能夠實現為每個標準圖像201 配置第一預設單元偏差範圍。 Thus, by dividing the standard cell area 230, it can be realized that each standard image 201 Configure the deviation range of the first preset unit.

所述基準資料包括：面積參數、對角線長度參數和對比度參數中的至少一者。相應的，所述第一預設單元偏差範圍包括：面積參數的偏差範圍、對角線長度參數的偏差範圍和對比度參數的偏差範圍中的至少一者。 The reference data includes: at least one of an area parameter, a diagonal length parameter and a contrast parameter. Correspondingly, the first preset unit deviation range includes: at least one of a deviation range of an area parameter, a deviation range of a diagonal length parameter, and a deviation range of a contrast parameter.

在本實施例中，在第四區域劃分之後，進行第一預設單元偏差範圍的配置。 In this embodiment, after the fourth area is divided, the configuration of the first preset unit deviation range is performed.

在另一實施例中，在執行第三區域劃分後進行第一預設單元偏差範圍的配置。 In another embodiment, the configuration of the first preset unit deviation range is performed after the third area division is performed.

在本實施例中，所述第一預設單元偏差範圍包括：與若干種功能區類型一一對應的若干第一預設功能區偏差範圍。即：每種功能區類型具有各自的預設偏差範圍(第一預設功能區偏差範圍)。 In this embodiment, the first preset unit deviation range includes: several first preset functional area deviation ranges corresponding to several functional area types one-to-one. That is: each type of functional area has its own preset deviation range (the first preset deviation range of the functional area).

相應的，每種功能區類型對應的第一預設功能區偏差範圍包括：面積參數的偏差範圍、對角線長度參數的偏差範圍和對比度參數的偏差範圍中的至少一者。 Correspondingly, the first preset deviation range of the functional area corresponding to each type of functional area includes: at least one of the deviation range of the area parameter, the deviation range of the diagonal length parameter and the deviation range of the contrast parameter.

需要理解的是，不同種類的功能區類型對應的第一預設功能區偏差範圍之間是獨立的，相互之間可以相同，也可以不相同。 It should be understood that the deviation ranges of the first preset functional areas corresponding to different functional area types are independent, and may or may not be the same with each other.

在本實施例中，為每個標準單元區230配置所述第一預設單元偏差範圍的方法包括：根據每個標準功能區221的功能區類型，為每個標準功能區221配置對應的第一預設功能區偏差範圍。 In this embodiment, the method for configuring the first preset unit deviation range for each standard unit area 230 includes: configuring each standard function area 221 with a corresponding first a preset functional area deviation range.

由此，完成第一檢測範本的建立。具體的，所述第一檢測範本包括：所述第一範本圖像500和所述第一預設單元偏差範圍。 Thus, the establishment of the first detection template is completed. Specifically, the first detection template includes: the first template image 500 and the first preset unit deviation range.

接著，根據所述第一檢測範本和待測引線框架300的源圖像400，對所述多個待測單元301進行瑕疵檢測。 Next, according to the first inspection template and the source image 400 of the lead frame 300 to be tested, flaw detection is performed on the plurality of units under test 301 .

請參考圖14，圖14是本發明一實施例的基於第一檢測範本進行瑕疵檢測的方法的流程示意圖，根據所述第一檢測範本和待測引線框架的 源圖像，對所述多個待測單元進行瑕疵檢測的方法包括： Please refer to FIG. 14. FIG. 14 is a schematic flowchart of a method for detecting defects based on a first detection template according to an embodiment of the present invention. According to the first detection template and the lead frame to be tested The source image, the method for performing defect detection on the plurality of units under test includes:

步驟S610，根據所述待測引線框架的源圖像中任一待測單元的源圖像在行方向以及列方向上的位置，在所述第一範本圖像中，獲取在行方向以及列方向上位於相同位置的標準圖像作為指定標準圖像； Step S610, according to the position of the source image of any unit under test in the row direction and the column direction in the source image of the lead frame to be tested, in the first sample image, obtain the position in the row direction and the column direction The standard image at the same position in the direction is used as the designated standard image;

步驟S620，根據所述任一待測單元的源圖像、所述指定標準圖像和所述第一預設單元偏差範圍，檢測所述任一待測單元的瑕疵。 Step S620 , according to the source image of any unit under test, the specified standard image and the first preset unit deviation range, detect the defect of any unit under test.

由於當所述標準引線框架具有預設屬性時，根據所述標準引線框架的源圖像建立第一檢測範本，所述第一檢測範本包括：第一範本圖像和第一預設單元偏差範圍，所述第一範本圖像至少包括1行標準圖像，所述標準圖像是無瑕疵的標準單元的源圖像，所述第一預設單元偏差範圍同時對應每個標準圖像。並且，對所述多個待測單元進行瑕疵檢測的方法包括：根據所述待測引線框架的源圖像中任一待測單元的源圖像在行方向上的位置，在所述第一範本圖像中，獲取在行方向上位於相同位置的標準圖像作為指定標準圖像；根據所述任一待測單元的源圖像、所述指定標準圖像和所述第一預設單元偏差範圍，檢測所述任一待測單元的瑕疵。因此，在進行瑕疵檢測時，提高了與待測引線框架的源圖像進行比對的基準(所述第一範本圖像)的準確性。具體而言，通過將在行方向上與任一待測單元位於相同位置的標準圖像作為比對基準，因此，減少了待測引線框架的源圖像在行方向上受光亮度變化影響而引起的超出第一預設單元偏差範圍的風險。由此，提高了對引線框架進行瑕疵檢測時的準確度，降低檢測引線框架時的過殺。 Because when the standard lead frame has preset attributes, the first detection template is established according to the source image of the standard lead frame, and the first detection template includes: a first template image and a first preset unit deviation range , the first template image includes at least one row of standard images, the standard image is a source image of a flawless standard unit, and the deviation range of the first preset unit corresponds to each standard image at the same time. Moreover, the method for performing defect detection on the plurality of units under test includes: according to the position of the source image of any unit under test in the source image of the lead frame under test in the row direction, in the first template In the image, a standard image located at the same position in the row direction is obtained as a specified standard image; according to the source image of any unit under test, the specified standard image and the first preset unit deviation range , detecting the defect of any unit under test. Therefore, when performing defect detection, the accuracy of the reference (the first sample image) compared with the source image of the lead frame to be tested is improved. Specifically, by using the standard image at the same position as any unit under test in the row direction as a comparison reference, the overshoot caused by the brightness change of the source image of the lead frame to be tested in the row direction is reduced. The risk of the deviation range of the first preset unit. As a result, the accuracy of defect detection on the lead frame is improved, and the overkill in the detection of the lead frame is reduced.

此外，在本實施例中，由於作為比對基準的標準圖像還在列方向上與所述任一待測單元位於相同位置，因此，能夠進一步提高引線框架進行瑕疵檢測時的準確度。不僅如此，由於在行方向和列方向上的位置相同，因此，基於第一檢測範本對待測引線框架的源圖像進行瑕疵檢測時，二者之間可以直接根據絕對座標確定進行指定標準圖像的確定，避免了對相對座標的轉換，從而，有利於減少設備在瑕疵檢測時的資料運算量，能夠進一步提升瑕疵檢測 的效率，以提高引線框架的生產效率。 In addition, in this embodiment, since the standard image used as a reference for comparison is located at the same position as any unit under test in the column direction, the accuracy of defect detection of the lead frame can be further improved. Not only that, because the positions in the row direction and the column direction are the same, when performing defect detection on the source image of the lead frame to be tested based on the first detection template, the specified standard image can be directly determined according to the absolute coordinates The determination of the relative coordinates avoids the conversion of the relative coordinates, thereby helping to reduce the amount of data calculation of the equipment during the defect detection, and can further improve the defect detection The efficiency to improve the production efficiency of the lead frame.

在另一實施例中，第一範本圖像包括1行標準圖像，並且，根據所述第一檢測範本和待測引線框架的源圖像，對所述多個待測單元進行瑕疵檢測的方法包括：根據所述待測引線框架的源圖像中任一待測單元的源圖像在行方向上的位置，在所述第一範本圖像中，獲取在行方向上位於相同位置的標準圖像作為指定標準圖像；根據所述任一待測單元的源圖像、所述指定標準圖像和所述第一預設單元偏差範圍，檢測所述任一待測單元的瑕疵。 In another embodiment, the first template image includes one row of standard images, and, according to the first inspection template and the source image of the lead frame to be tested, the defect detection is performed on the plurality of units to be tested. The method includes: according to the position in the row direction of the source image of any unit to be tested in the source images of the lead frame to be tested, in the first sample image, obtain a standard image located at the same position in the row direction The image is used as a specified standard image; according to the source image of any of the units under test, the specified standard image and the first preset unit deviation range, the flaw of any of the units under test is detected.

圖15是本發明一實施例中基於第一檢測範本進行瑕疵檢測的步驟示意圖，以下結合圖15對根據所述第一檢測範本和待測引線框架300的源圖像400，對所述多個待測單元301進行瑕疵檢測的的各步驟進行詳細說明。 FIG. 15 is a schematic diagram of the steps of flaw detection based on the first detection template in an embodiment of the present invention. In conjunction with FIG. 15 , the multiple Each step of flaw detection performed by the unit under test 301 will be described in detail.

請參考圖15，根據所述待測引線框架300的源圖像400中任一待測單元301的源圖像400在行方向X以及列方向Y上的位置，在所述第一範本圖像500中，獲取在行方向X以及列方向X上位於相同位置的標準圖像201作為指定標準圖像231。 Please refer to FIG. 15 , according to the position of the source image 400 of any unit under test 301 in the source image 400 of the lead frame 300 to be tested in the row direction X and the column direction Y, in the first sample image In 500 , the standard image 201 located at the same position in the row direction X and the column direction X is acquired as the designated standard image 231 .

在本實施例中，所述源圖像400和第一範本圖像500上，位於行方向X以及列方向Y上的相同位置，具有各自的原點座標以及相對於各自原點座標的絕對座標。從而，能夠根據源圖像400中任一待測單元301的源圖像401的絕對座標，在第一範本圖像500確定相同的絕對座標，以此獲取在行方向X以及列方向X上位於相同位置的標準圖像201作為指定標準圖像231。 In this embodiment, the source image 400 and the first sample image 500 are located at the same position in the row direction X and the column direction Y, and have respective origin coordinates and absolute coordinates relative to the respective origin coordinates . Therefore, according to the absolute coordinates of the source image 401 of any unit under test 301 in the source image 400, the same absolute coordinates can be determined in the first sample image 500, so as to obtain the location in the row direction X and the column direction X The standard image 201 at the same position is designated as the standard image 231 .

需要理解的是，所述絕對座標僅僅是用於體現任一待測單元301的源圖像401、標準圖像201的位置的一種位置資訊類型，還可以通過相對座標、排序位置等等其他體現位置的位置資訊類型，實現指定標準圖像231的確定。 It should be understood that the absolute coordinates are only a type of positional information used to reflect the position of the source image 401 and the standard image 201 of any unit under test 301, and can also be represented by relative coordinates, sorting positions, etc. The type of location information of the location realizes the determination of the specified standard image 231 .

在另一實施例中，第一範本圖像具有原點座標、以及相對於原 點座標的相對座標。源圖像400中的每行待測單元301的源圖像具有原點座標，且每行待測單元301的源圖像的原點座標至少在行方向X上與第一範本圖像的原點座標的位於相同位置。每行待測單元301的源圖像還至少在行方向X上具有相對於每行待測單元301的源圖像的原點座標的相對座標。從而，能夠根據源圖像400中任一待測單元301的源圖像的相對座標，在第一範本圖像確定相同的相對座標，以此獲取在行方向X上位於相同位置的標準圖像201作為指定標準圖像。 In another embodiment, the first sample image has origin coordinates, and Relative coordinates of point coordinates. In the source image 400, the source image of each row of the unit under test 301 has an origin coordinate, and the origin coordinate of the source image of each row of the unit under test 301 is at least in line with the original image of the first sample image in the row direction X. point coordinates are located at the same location. The source images of each row of units under test 301 also have relative coordinates relative to the origin coordinates of the source images of each row of units under test 301 at least in the row direction X. Therefore, according to the relative coordinates of the source image of any unit under test 301 in the source image 400, the same relative coordinates can be determined in the first sample image, so as to obtain the standard image at the same position in the row direction X 201 as the designated standard image.

請繼續參考圖15，將所述任一待測單元301的源圖像401與所述指定標準圖像231進行對比，獲取對應的單元偏差特徵資料。 Please continue to refer to FIG. 15 , and compare the source image 401 of any unit under test 301 with the designated standard image 231 to obtain corresponding unit deviation feature data.

由於所述基準資料包括：面積參數、對角線長度參數和對比度參數中的至少一者，所述第一預設單元偏差範圍包括：面積參數的偏差範圍、對角線長度參數的偏差範圍和對比度參數的偏差範圍中的至少一者，因此，相應的，所述單元偏差特徵資料包括：面積偏差資料、對角線長度偏差資料和對比度偏差資料中的至少一種。 Since the reference data includes: at least one of an area parameter, a diagonal length parameter and a contrast parameter, the deviation range of the first preset unit includes: a deviation range of an area parameter, a deviation range of a diagonal length parameter and At least one of the deviation range of the contrast parameter, therefore, correspondingly, the unit deviation characteristic data includes: at least one of area deviation data, diagonal length deviation data and contrast deviation data.

請繼續參考圖15，當所述對應的單元偏差特徵資料超出所述第一預設單元偏差範圍時，檢測到所述任一待測單元301具有若干瑕疵。 Please continue to refer to FIG. 15 , when the corresponding unit deviation characteristic data exceeds the first preset unit deviation range, it is detected that any unit under test 301 has some defects.

具體而言，當基於任一待測單元301的源圖像401與所述指定標準圖像231之間的每處偏差所獲取的單元偏差特徵資料，超出第一預設單元偏差範圍時，判斷所述任一待測單元301具有與該處偏差對應的瑕疵。 Specifically, when the unit deviation characteristic data obtained based on each deviation between the source image 401 of any unit under test 301 and the specified standard image 231 exceeds the first preset unit deviation range, it is judged that Any unit under test 301 has a defect corresponding to the deviation.

在本實施例中，基於任一待測單元301的源圖像401與所述指定標準圖像231之間的每處偏差所獲取的單元偏差特徵資料，超出第一預設單元偏差範圍是指：基於任一處偏差所獲取的單元偏差特徵資料，超出該處偏差所在標準功能區221對應的第一預設功能區偏差範圍。 In this embodiment, based on the unit deviation characteristic data obtained for each deviation between the source image 401 of any unit under test 301 and the specified standard image 231, exceeding the first preset unit deviation range means : The unit deviation characteristic data obtained based on any deviation exceeds the deviation range of the first preset functional area corresponding to the standard functional area 221 where the deviation is located.

請繼續參考圖3，在本實施例中，當所述標準引線框架100不具有所述預設屬性時，根據所述標準引線框架100的源圖像200建立第二檢測範本。 Please continue to refer to FIG. 3 , in this embodiment, when the standard lead frame 100 does not have the preset attribute, a second detection template is established according to the source image 200 of the standard lead frame 100 .

所述第二檢測範本包括：1個標準圖像201、以及與所述1個標準圖像201對應的第二預設單元偏差範圍。 The second detection template includes: one standard image 201 and a second preset unit deviation range corresponding to the one standard image 201 .

也就是說，在本實施例中，當所述標準引線框架100屬於容易受重力影響而發生形變的較寬、較薄、單元數量較多的引線框架時，建立第一檢測範本。而當所述標準引線框架100不屬於容易受重力影響而發生形變的較寬、較薄、單元數量較多的引線框架時，建立第二檢測範本。 That is to say, in this embodiment, when the standard lead frame 100 is a lead frame that is wider, thinner, and has a large number of units, which is easily deformed by gravity, the first detection template is established. And when the standard lead frame 100 is not a lead frame that is wider, thinner, and has a large number of units that is easily deformed by gravity, a second detection template is established.

由此，能夠基於標準引線框架100的特點，針對性的建立檢測範本：當標準引線框架100容易受重力影響而發生形變時，建立精度更高的第一檢測範本，減少光亮度的影響；當標準引線框架100不容易受重力影響而發生形變時，建立複雜度更低的第二檢測範本，提高檢測範本的建立效率。 Therefore, based on the characteristics of the standard lead frame 100, a targeted detection template can be established: when the standard lead frame 100 is easily deformed by gravity, a first detection template with higher accuracy can be established to reduce the influence of brightness; When the standard lead frame 100 is not easily deformed by gravity, a second detection template with lower complexity is established to improve the efficiency of establishing the detection template.

在其他實施例中，當所述標準引線框架100不具有所述預設屬性時，也建立所述第一檢測範本。 In other embodiments, when the standard lead frame 100 does not have the preset attribute, the first detection template is also established.

本實施例中建立第二檢測範本的方法包括：對標準引線框架100的源圖像200進行第五區域劃分，在所述標準引線框架100的源圖像200中獲取1個標準單元區230；為所述1個標準單元區230配置第二預設單元偏差範圍。 The method for establishing the second detection template in this embodiment includes: dividing the source image 200 of the standard lead frame 100 into a fifth area, and obtaining one standard cell area 230 in the source image 200 of the standard lead frame 100; A second preset unit deviation range is configured for the one standard unit area 230 .

圖16至圖17是本發明一實施例中建立第二檢測範本的各步驟的示意圖。以下結合圖16至圖17對本實施例中建立第二檢測範本的各步驟作詳細說明。 16 to 17 are schematic diagrams of the steps of establishing the second detection template in an embodiment of the present invention. The steps of establishing the second detection template in this embodiment will be described in detail below with reference to FIG. 16 to FIG. 17 .

請參考圖16，在所述標準引線框架100的源圖像200中獲取1個初始標準單元區220，所述初始標準單元區220內具有1個標準圖像201。 Referring to FIG. 16 , an initial standard cell area 220 is acquired in the source image 200 of the standard lead frame 100 , and there is a standard image 201 in the initial standard cell area 220 .

請參考圖17，對所述初始標準單元區220進行功能區劃分，在所述初始標準單元區220中獲取若干相互獨立的標準功能區221。 Referring to FIG. 17 , the initial standard unit area 220 is divided into functional areas, and several mutually independent standard functional areas 221 are obtained in the initial standard unit area 220 .

由此，完成第五區域劃分，形成第二範本圖像600，所述第二範本圖像600包括1個標準單元區230。對所述1個標準單元區230的具體說 明請參考對前述第一檢測範本中的標準單元區230的解釋說明，在此不再贅述。 Thus, the fifth area division is completed, and the second sample image 600 is formed, and the second sample image 600 includes one standard cell area 230 . Concretely speaking to the 1 standard unit area 230 For details, please refer to the explanation of the standard cell area 230 in the aforementioned first detection example, and details will not be repeated here.

請繼續參考圖17，為所述1個標準單元區230配置第二預設單元偏差範圍。 Please continue to refer to FIG. 17 , a second preset unit deviation range is configured for the one standard unit area 230 .

在本實施例中，所述第二預設單元偏差範圍，是以所述1個標準單元區230中的標準圖像201的基準資料為基準的偏差範圍。 In this embodiment, the second preset unit deviation range is a deviation range based on the reference data of the standard image 201 in the one standard unit area 230 .

相應的，所述第二預設單元偏差範圍包括：面積參數的偏差範圍、對角線長度參數的偏差範圍和對比度參數的偏差範圍中的至少一者。 Correspondingly, the second preset unit deviation range includes: at least one of a deviation range of an area parameter, a deviation range of a diagonal length parameter, and a deviation range of a contrast parameter.

在本實施例中，所述第二預設單元偏差範圍包括：與若干種功能區類型一一對應的若干第二預設功能區偏差範圍。 In this embodiment, the second preset unit deviation range includes: several second preset functional area deviation ranges corresponding to several functional area types one-to-one.

相應的，每種功能區類型對應的第二預設功能區偏差範圍包括：面積參數的偏差範圍、對角線長度參數的偏差範圍和對比度參數的偏差範圍中的至少一者。 Correspondingly, the deviation range of the second preset functional area corresponding to each type of functional area includes: at least one of the deviation range of the area parameter, the deviation range of the diagonal length parameter and the deviation range of the contrast parameter.

在本實施例中，為所述1個標準單元區230配置第二預設單元偏差範圍的方法包括：根據所述1個標準單元區230的每個標準功能區221的功能區類型，為每個標準功能區221配置對應的第二預設功能區偏差範圍。 In this embodiment, the method for configuring the second preset unit deviation range for the one standard unit area 230 includes: according to the functional area type of each standard functional area 221 of the one standard unit area 230, for each Each standard functional area 221 is configured with a corresponding deviation range of the second preset functional area.

請繼續參考圖3，接著，根據所述第二檢測範本和所述標準引線框架100的源圖像200，對每個待測單元301進行瑕疵檢測。 Please continue to refer to FIG. 3 , and then, according to the second inspection template and the source image 200 of the standard lead frame 100 , each unit under test 301 is inspected for defects.

在本實施例中，根據所述第二檢測範本和待測引線框架的源圖像，對所述多個待測單元進行瑕疵檢測的方法包括：將每個待測單元301的源圖像401與所述1個標準單元區230中的標準圖像201進行對比，獲取每個待測單元301的源圖像401的單元偏差特徵資料；當任一待測單元301的源圖像401的單元偏差特徵資料超出所述第二預設單元偏差範圍時，檢測到所述任一待測單元301具有若干瑕疵。 In this embodiment, according to the second detection template and the source image of the lead frame to be tested, the method for performing defect detection on the plurality of units under test includes: the source image 401 of each unit to be tested 301 Compared with the standard image 201 in the standard unit area 230, the unit deviation feature data of the source image 401 of each unit to be tested 301 is obtained; when the unit of the source image 401 of any unit to be tested 301 When the deviation characteristic data exceeds the second preset unit deviation range, it is detected that any unit under test 301 has some defects.

由於所述基準資料包括：面積參數、對角線長度參數和對比度 參數中的至少一者，所述第二預設單元偏差範圍包括：面積參數的偏差範圍、對角線長度參數的偏差範圍和對比度參數的偏差範圍中的至少一者，因此，相應的，所述單元偏差特徵資料包括：面積偏差資料、對角線長度偏差資料和對比度偏差資料中的至少一種。 Since the reference data include: area parameters, diagonal length parameters and contrast At least one of the parameters, the second preset unit deviation range includes: at least one of the deviation range of the area parameter, the deviation range of the diagonal length parameter, and the deviation range of the contrast parameter. Therefore, correspondingly, the The unit deviation characteristic data includes: at least one of area deviation data, diagonal length deviation data and contrast deviation data.

需要說明的是，本實施例中的引線框架的瑕疵檢測方法可以獨立應用於對待測引線框架300在正面上的結構的瑕疵檢測，也可以獨立應用於對待測引線框架300在反面上的結構的瑕疵檢測。 It should be noted that the defect detection method of the lead frame in this embodiment can be independently applied to the defect detection of the structure on the front side of the lead frame 300 to be tested, and can also be independently applied to the structure on the back side of the lead frame 300 to be tested. Defect detection.

相應的，本發明一實施例還提供一種基於上述方法所形成的基於標準引線框架的檢測範本，請繼續參考圖13，包括：第一範本圖像500和第一預設單元偏差範圍，所述第一範本圖像500至少包括1行標準圖像201，所述標準圖像201是無瑕疵的標準單元101的源圖像200，所述第一預設單元偏差範圍同時對應每個標準圖像201。 Correspondingly, an embodiment of the present invention also provides a detection template based on the standard lead frame formed based on the above method, please continue to refer to FIG. 13 , including: a first template image 500 and a first preset unit deviation range, the The first sample image 500 includes at least one row of standard images 201, the standard image 201 is the source image 200 of a flawless standard unit 101, and the first preset unit deviation range corresponds to each standard image at the same time 201.

在本實施例中，所述第一範本圖像500包括：若干標準行區240，每個標準行區240內具有1行標準圖像201。 In this embodiment, the first sample image 500 includes: several standard row areas 240 , and each standard row area 240 has one row of the standard image 201 .

具體而言，第一範本圖像500包括：與所述全部的標準單元101一一對應的標準圖像201。 Specifically, the first sample image 500 includes: standard images 201 corresponding to all the standard units 101 one-to-one.

在本實施例中，每個標準行區240包括1行標準單元區230，每個所述標準單元區230內具有1個標準圖像201，並且，每個所述標準單元區230內的1個標準圖像配置所述第一預設單元偏差範圍。 In this embodiment, each standard row area 240 includes one row of standard cell areas 230, and each standard cell area 230 has one standard image 201, and each standard cell area 230 has one standard image 201. A standard image configures the first preset unit deviation range.

具體的，所述標準單元區230包括若干相互獨立的標準功能區221，每個標準功能區221具有一種功能區類型。 Specifically, the standard unit area 230 includes several standard functional areas 221 that are independent of each other, and each standard functional area 221 has a type of functional area.

在本實施例中，所述功能區類型的種類包括：電鍍及關鍵區、半蝕刻區、功能區、非功能區和低閾值區中的一種或多種。 In this embodiment, the types of functional areas include: one or more of electroplating and key areas, half-etched areas, functional areas, non-functional areas, and low threshold areas.

在本實施例中，所述第一預設單元偏差範圍包括：與若干種功能區類型一一對應的若干第一預設功能區偏差範圍。 In this embodiment, the first preset unit deviation range includes: several first preset functional area deviation ranges corresponding to several functional area types one-to-one.

在本實施例中，每個標準功能區221配置有與每個標準功能區221的功能區類型對應的第一預設功能區偏差範圍。 In this embodiment, each standard functional area 221 is configured with a first preset functional area deviation range corresponding to the functional area type of each standard functional area 221 .

需要理解的是，本實施例中關於第一範本圖像500和第一預設單元偏差範圍的詳細說明，可參考前述引線框架的瑕疵檢測方法的實施例中對於第一範本圖像500和第一預設單元偏差範圍的解釋說明，在此不再贅述。 It should be understood that, for the detailed description of the deviation range between the first sample image 500 and the first preset unit in this embodiment, reference may be made to the first sample image 500 and the first sample image 500 and the second An explanation of the deviation range of a preset unit will not be repeated here.

在另一實施例中，第一範本圖像包括：1個標準行區240。即：第一範本圖像包括1行標準圖像201。 In another embodiment, the first sample image includes: one standard row area 240 . That is: the first template image includes one row of standard images 201 .

雖然本發明披露如上，但本發明並非限定於此。任何本領域技術人員，在不脫離本發明的精神和範圍內，均可作各種更動與修改，因此本發明的保護範圍應當以請求項所限定的範圍為準。 Although the present invention is disclosed above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be based on the scope defined by the claims.

S100,S200,S300,S400,S500,S600,S700,S800:步驟 S100,S200,S300,S400,S500,S600,S700,S800: steps

Claims (13)

一種引線框架的瑕疵檢測方法，其特徵在於，包括： A defect detection method for a lead frame, comprising: 提供標準引線框架，所述標準引線框架包括重複且呈陣列排布的多個標準單元，所述陣列排布的行方向為所述標準引線框架的寬度方向，所述陣列排布的列方向為所述標準引線框架的長度方向； A standard lead frame is provided, the standard lead frame includes a plurality of standard units repeated and arranged in an array, the row direction of the array arrangement is the width direction of the standard lead frame, and the column direction of the array arrangement is the length direction of the standard lead frame; 獲取所述標準引線框架的源圖像； obtaining a source image of said standard lead frame; 當所述標準引線框架具有預設屬性時，根據所述標準引線框架的源圖像建立第一檢測範本，所述第一檢測範本包括：第一範本圖像和第一預設單元偏差範圍，所述第一範本圖像至少包括1行標準圖像，所述標準圖像是無瑕疵的標準單元的源圖像，所述第一預設單元偏差範圍同時對應每個標準圖像； When the standard lead frame has a preset attribute, a first detection template is established according to the source image of the standard lead frame, and the first detection template includes: a first template image and a first preset unit deviation range, The first template image includes at least one row of standard images, the standard image is the source image of a flawless standard unit, and the deviation range of the first preset unit corresponds to each standard image at the same time; 提供待測引線框架，所述待測引線框架包括分別與所述標準引線框架的多個標準單元對應的多個待測單元； providing a lead frame to be tested, the lead frame to be tested comprising a plurality of units to be tested respectively corresponding to a plurality of standard units of the standard lead frame; 獲取所述待測引線框架的源圖像； obtaining the source image of the lead frame to be tested; 根據所述第一檢測範本和待測引線框架的源圖像，對所述多個待測單元進行瑕疵檢測，所述瑕疵檢測的方法包括：根據所述待測引線框架的源圖像中任一待測單元的源圖像在行方向上的位置，在所述第一範本圖像中，獲取在行方向上位於相同位置的標準圖像作為指定標準圖像；根據所述任一待測單元的源圖像、所述指定標準圖像和所述第一預設單元偏差範圍，檢測所述任一待測單元的瑕疵。 According to the first detection template and the source image of the lead frame to be tested, perform defect detection on the plurality of units to be tested, the defect detection method includes: according to any of the source images of the lead frame to be tested The position of the source image of a unit under test in the row direction, in the first sample image, obtain the standard image located at the same position in the row direction as the designated standard image; according to the position of any unit under test The source image, the specified standard image and the first preset unit deviation range are used to detect the defect of any unit under test. 如請求項1所述的引線框架的瑕疵檢測方法，其中，所述預設屬性包括：所述標準引線框架的厚度在預設最小厚度以下、所述標準引線框架的寬度在預設最大寬度以上、所述標準引線框架的單元數量在預設最大單元數量以上、以及所述標準引線框架在行方向上的剛性在預設最小剛性以下中的一者或多者。 The defect detection method of a lead frame according to claim 1, wherein the preset attributes include: the thickness of the standard lead frame is below a preset minimum thickness, and the width of the standard lead frame is above a preset maximum width , one or more of the number of units of the standard lead frame is greater than a preset maximum number of units, and the rigidity of the standard lead frame in the row direction is lower than a preset minimum rigidity. 如請求項1所述的引線框架的瑕疵檢測方法，其中，根據所述標準引線框架的源圖像建立第一檢測範本的方法包括： The defect detection method of a lead frame according to claim 1, wherein the method of establishing a first detection template according to the source image of the standard lead frame includes: 對所述標準引線框架的源圖像進行第一區域劃分，在所述標準引線框架的源圖像中獲取初始標準行區，所述初始標準行區內具有1行標準圖像； Carrying out first area division on the source image of the standard lead frame, obtaining an initial standard line area in the source image of the standard lead frame, and having one line of standard image in the initial standard line area; 對所述初始標準行區進行第二區域劃分，在所述初始標準行區中獲取1個標準單元區，所述標準單元區內具有1個標準圖像； Carrying out second area division on the initial standard row area, obtaining one standard unit area in the initial standard row area, and one standard image in the standard unit area; 根據所述1個標準單元區對所述初始標準行區進行第三區域劃分，獲取1行標準單元區，以形成1個標準行區； performing a third area division on the initial standard row area according to the one standard cell area, and obtaining one row of standard cell areas to form one standard row area; 在形成所述1個標準行區之後，為每個標準單元區配置所述第一預設單元偏差範圍。 After the one standard row area is formed, the first preset cell deviation range is configured for each standard cell area. 如請求項3所述的引線框架的瑕疵檢測方法，其中，對所述初始標準行區進行第二區域劃分的方法包括： The defect detection method of a lead frame according to claim 3, wherein the method for dividing the initial standard row area into a second area includes: 對所述初始標準行區進行初始第二區域劃分，在所述初始標準行區中獲取1個初始標準單元區，所述初始標準單元區內具有1個標準圖像； performing initial second area division on the initial standard row area, obtaining one initial standard unit area in the initial standard row area, and one standard image in the initial standard unit area; 對所述初始標準單元區進行功能區劃分，在所述初始標準單元區中獲取若干相互獨立的標準功能區，每個標準功能區具有一種功能區類型。 The initial standard unit area is divided into functional areas, and a number of mutually independent standard functional areas are obtained in the initial standard unit area, and each standard functional area has a type of functional area. 如請求項4所述的引線框架的瑕疵檢測方法，其中，所述功能區類型的種類包括：電鍍及關鍵區、半蝕刻區、功能區、非功能區和低閾值區中的一種或多種。 The defect detection method of a lead frame according to claim 4, wherein the types of functional areas include: one or more of electroplating and critical areas, half-etched areas, functional areas, non-functional areas, and low threshold areas. 如請求項4所述的引線框架的瑕疵檢測方法，其中，所述第一預設單元偏差範圍包括：與若干種功能區類型一一對應的若干第一預設功能區偏差範圍； The defect detection method of a lead frame according to claim 4, wherein the first preset unit deviation range includes: several first preset functional area deviation ranges corresponding to several functional area types one-to-one; 為每個標準單元區配置所述第一預設單元偏差範圍的方法包括：根據每個標準功能區的功能區類型，為每個標準功能區配置對應的第一預設功能區偏差範圍。 The method for configuring the first preset unit deviation range for each standard unit area includes: according to the function area type of each standard function area, configuring a corresponding first preset function area deviation range for each standard function area. 如請求項6所述的引線框架的瑕疵檢測方法，其中，在為每個標準單元區配置所述第一預設單元偏差範圍之前，根據所述標準引線框架的源圖像建立第一檢測範本的方法還包括：根據所述1個標準行區，對所述標準行區以外的全部標準引線框架的源圖像進行第四區域劃分，形成若干個標準行區； The defect detection method of a lead frame according to claim 6, wherein, before configuring the first preset cell deviation range for each standard cell area, a first detection template is established according to the source image of the standard lead frame The method further includes: according to the one standard line area, performing fourth area division on the source images of all standard lead frames other than the standard line area to form several standard line areas; 根據所述待測引線框架的源圖像中任一待測單元的源圖像在行方向上的位置，在所述第一範本圖像中，獲取在行方向上位於相同位置的標準圖像作為指定標準圖像的方法進一步包括：根據所述待測引線框架的源圖像中任一待測單元的源圖像在行方向以及列方向上的位置，在所述第一範本圖像中，獲取在行方向以及列方向上位於相同位置的標準圖像作為指定標準圖像。 According to the position of the source image of any unit under test in the source image of the lead frame to be tested in the row direction, in the first sample image, obtain the standard image at the same position in the row direction as the specified The method of the standard image further includes: according to the position of the source image of any unit under test in the source image of the lead frame to be tested in the row direction and the column direction, in the first sample image, obtain The standard images located at the same position in the row direction and the column direction are designated standard images. 如請求項1至7中任一所述的引線框架的瑕疵檢測方法，其中，根據所述任一待測單元的源圖像、所述指定標準圖像和所述第一預設單元偏差範圍，檢測所述任一待測單元的瑕疵的方法包括： The defect detection method of a lead frame according to any one of claims 1 to 7, wherein, according to the source image of any unit to be tested, the specified standard image and the first preset unit deviation range , the method for detecting the defect of any unit under test comprises: 將所述任一待測單元的源圖像與所述指定標準圖像進行對比，獲取對應的單元偏差特徵資料； Comparing the source image of any of the units to be tested with the specified standard image to obtain corresponding unit deviation characteristic data; 當所述對應的單元偏差特徵資料超出所述第一預設單元偏差範圍時，檢測到所述任一待測單元具有若干瑕疵。 When the corresponding unit deviation characteristic data exceeds the first predetermined unit deviation range, it is detected that any unit under test has a plurality of defects. 如請求項1或2所述的引線框架的瑕疵檢測方法，其中，還包括： The defect detection method for a lead frame as described in Claim 1 or 2, further comprising: 當所述標準引線框架不具有所述預設屬性時，根據所述標準引線框架的源圖像建立第二檢測範本，所述第二檢測範本包括：1個標準圖像、以及與所述1個標準圖像對應的第二預設單元偏差範圍； When the standard lead frame does not have the preset attribute, a second detection template is established according to the source image of the standard lead frame, and the second detection template includes: 1 standard image, and the 1 The second preset unit deviation range corresponding to a standard image; 根據所述第二檢測範本和所述待測引線框架的源圖像，對每個待測單元進行瑕疵檢測。 Perform flaw detection on each unit under test according to the second test template and the source image of the lead frame under test. 一種基於標準引線框架的檢測範本，其特徵在於，所述標準引線框架包括：重複且呈陣列排布的多個標準單元，所述陣列排布的行方向為標準引線框架的寬度方向，所述陣列排布的列方向為標準引線框架的長度方向； A detection template based on a standard lead frame, characterized in that the standard lead frame includes: a plurality of standard units repeated and arranged in an array, the row direction of the array arrangement is the width direction of the standard lead frame, the The column direction of the array arrangement is the length direction of the standard lead frame; 所述檢測範本包括：第一範本圖像和第一預設單元偏差範圍，所述第一範本圖像至少包括1行標準圖像，所述標準圖像是無瑕疵的標準單元的源圖像，所述第一預設單元偏差範圍同時對應每個標準圖像。 The detection template includes: a first template image and a first preset unit deviation range, the first template image includes at least one row of standard images, and the standard image is a source image of a flawless standard unit , the first preset unit deviation range corresponds to each standard image at the same time. 如請求項10所述的基於標準引線框架的檢測範本，其中，所述第一範本圖像包括：至少1個標準行區，每個標準行區內具有1行標準圖像，每個標準行區包括1行標準單元區，每個所述標準單元區內具有1個標準圖像，且每個所述標準單元區內的1個標準圖像配置所述第一預設單元偏差範圍。 The detection template based on standard lead frame according to claim 10, wherein the first template image includes: at least 1 standard row area, each standard row area has 1 row of standard images, each standard row The area includes one row of standard unit areas, each of the standard unit areas has one standard image, and each of the standard unit areas has one standard image configured with the first preset unit deviation range. 如請求項11所述的基於標準引線框架的檢測範本，其中，所述標準單元區包括若干相互獨立的標準功能區，每個標準功能區具有一種功能區類型，所述第一預設單元偏差範圍包括與若干種功能區類型一一對應的若干第一預設功能區偏差範圍，並且，每個標準功能區配置有與每個標準功能區的功能區類型對應的第一預設功能區偏差範圍。 The detection model based on standard lead frame as described in claim item 11, wherein, the standard unit area includes several mutually independent standard functional areas, each standard functional area has a type of functional area, and the first preset unit deviation The range includes a number of first preset functional zone deviation ranges corresponding to several functional zone types one-to-one, and each standard functional zone is configured with a first preset functional zone deviation corresponding to the functional zone type of each standard functional zone scope. 如請求項12所述的基於標準引線框架的檢測範本，其中，所述功能區類型的種類包括：電鍍及關鍵區、半蝕刻區、功能區、非功能區和低閾值區中的一種或多種。 The detection model based on standard lead frame as described in claim item 12, wherein, the type of the functional area includes: one or more of electroplating and critical area, half-etched area, functional area, non-functional area and low threshold area .
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