TW202309684A - Development processing device and development processing method - Google Patents
Development processing device and development processing method Download PDFInfo
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- TW202309684A TW202309684A TW111126776A TW111126776A TW202309684A TW 202309684 A TW202309684 A TW 202309684A TW 111126776 A TW111126776 A TW 111126776A TW 111126776 A TW111126776 A TW 111126776A TW 202309684 A TW202309684 A TW 202309684A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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Abstract
Description
本發明係有關於顯影處理裝置及顯影處理方法。The present invention relates to a developing processing device and a developing processing method.
於專利文獻1揭示有一種顯影處理裝置,該顯影處理裝置具備:對塗布了光阻液之基板上供給顯影液的顯影液供給機構;及對供給有顯影液之光阻圖形顯影的基板上供給清洗液之機構。
[先前技術文獻]
[專利文獻]
[專利文獻1]日本專利公開公報2003-178942號[Patent Document 1] Japanese Patent Laid-Open Publication No. 2003-178942
[發明欲解決之課題][Problem to be solved by the invention]
本發明之技術係改善顯影處理結果之面內均勻性,且適當地回收顯影液之霧滴。 [用以解決課題之手段] The technology of the present invention is to improve the in-plane uniformity of the development process result and properly recover the mist of the developer. [Means to solve the problem]
本發明之一態樣係將基板上之光阻膜顯影的顯影處理裝置,具備:固持基板之基板固持部;使該基板固持部旋轉之旋轉機構;對固持於該基板固持部之基板供給顯影液的顯影液供給部;對固持於該基板固持部之基板供給沖洗液的沖洗液供給部;接受來自固持於該基板固持部之基板的顯影液及沖洗液之液體接受部;連接於該液體接受部,使該液體接受部內部排氣之排氣管;設置成包圍該液體接受部之外周的吸氣部。在以低於使用該沖洗液之處理時的排氣量使該液體接受部內部排氣之該顯影液供給時或靜止顯影時的至少任一者,該吸氣部會吸氣,而回收漏出至該液體接受部外側的該顯影液之霧滴。 [發明之效果] One aspect of the present invention is a developing treatment device for developing a photoresist film on a substrate, comprising: a substrate holding unit for holding a substrate; a rotation mechanism for rotating the substrate holding unit; and supplying development to the substrate held by the substrate holding unit. The developing solution supply part of the liquid; the rinse solution supply part that supplies the rinse solution to the substrate held in the substrate holding part; the liquid receiving part that receives the developing solution and the rinse solution from the substrate held in the substrate holding part; connected to the liquid The receiving part is an exhaust pipe for exhausting the inside of the liquid receiving part; an air suction part is provided to surround the outer periphery of the liquid receiving part. At least any one of when the developing solution is supplied to exhaust the inside of the liquid receiving part at an exhaust rate lower than that in the processing using the flushing solution or during stationary development, the suction part sucks air and recovers the leakage. The mist of the developer to the outside of the liquid receiving part. [Effect of Invention]
根據本發明,可改善顯影處理之面內均勻性,且可適當地回收顯影液之霧滴。According to the present invention, the in-plane uniformity of the developing process can be improved, and the mist of the developing solution can be recovered appropriately.
[用以實施發明之形態][Mode for Carrying out the Invention]
在半導體元件等之製程的光微影程序,為了於半導體晶圓(以下稱為「晶圓」)等基板上形成希望的光阻圖形,而進行各種處理。上述各種處理包含例如對基板上供給光阻液而形成光阻膜之光阻液塗布處理、將光阻膜曝光之曝光處理、對曝光之光阻膜供給顯影液而顯影之顯影處理等。In the photolithography process of the manufacturing process of semiconductor devices, various processes are performed in order to form desired resist patterns on substrates such as semiconductor wafers (hereinafter referred to as "wafers"). The various processes described above include, for example, a resist coating process for forming a resist film by supplying a resist liquid on a substrate, an exposure process for exposing the resist film to light, and a development process for supplying a developer solution to the exposed resist film to develop it.
上述顯影處理使用顯影處理裝置進行。顯影處理裝置具有:固持基板之基板固持部;及對固持於基板固持部之基板供給顯影液的顯影液供給部,而從顯影液供給部對固持於基板固持部之基板上供給顯影液,於基板表面上形成顯影液之液膜,而將基板上之光阻膜顯影。又,顯影處理裝置具有:接受從固持於基板固持部之基板飛散的顯影液等之液體接受部。The development treatment described above is performed using a development treatment device. The development treatment device has: a substrate holding part for holding the substrate; and a developer supply part for supplying a developer to the substrate held in the substrate holding part, and the developer is supplied from the developer supply part to the substrate held in the substrate holding part. A liquid film of developing solution is formed on the surface of the substrate to develop the photoresist film on the substrate. Moreover, the development processing apparatus has a liquid receiving part which receives the developer etc. scattered from the board|substrate held by the board|substrate holding part.
不過,對基板供給顯影液時,有產生顯影液之霧滴的情形。此顯影液之霧滴會漏出至液體接受部之外部,附著於容納液體接受部之殻體的內壁面,而造成微粒或附著於基板上之顯影後的光阻膜、即光阻圖形,係造成不良影響等各種問題之主要原因。 因此,需要進行使液體接受部內部排氣,於顯影中等回收顯影液之霧滴。然而,當於顯影中使液體接受部內部排氣時,於基板外周部附近會產生較強之氣流,基板外周部會局部地冷卻。使用i線光阻液等顯影中之溫度靈敏度較高的光阻液時,當如上述,基板外周部局部地冷卻時,在基板外周部與中央部的顯影處理結果會有所不同。 However, when the developer is supplied to the substrate, mist of the developer may be generated. The mist of the developer will leak to the outside of the liquid receiving part and adhere to the inner wall surface of the housing containing the liquid receiving part, resulting in particles or the developed photoresist film attached to the substrate, that is, the photoresist pattern. The main cause of various problems such as adverse effects. Therefore, it is necessary to exhaust the inside of the liquid receiving part and recover the mist of the developer during development. However, when the inside of the liquid receiving portion is exhausted during development, a strong air flow is generated near the outer peripheral portion of the substrate, and the outer peripheral portion of the substrate is locally cooled. When using a photoresist with high temperature sensitivity during development, such as an i-line photoresist, if the peripheral part of the substrate is locally cooled as described above, the result of the development process will be different between the peripheral part and the central part of the substrate.
是故,本發明之技術係改善顯影處理之面內均勻性,且適當地回收顯影液之霧滴。Therefore, the technology of the present invention is to improve the in-plane uniformity of the developing process, and properly recover the mist of the developer.
以下,參照圖式說明本實施形態之顯影處理裝置及顯影處理方法之結構。此外,在本說明書,就具有實質上相同功能結構的要件,係附上同一符號並省略重複說明。Hereinafter, the configurations of the development processing apparatus and the development processing method according to the present embodiment will be described with reference to the drawings. In addition, in this specification, the same code|symbol is attached|subjected to the element which has substantially the same functional structure, and repeated description is abbreviate|omitted.
(第1實施形態) <顯影處理裝置> 圖1及圖2分別係概略地顯示第1實施形態之顯影處理裝置的結構之一例的縱截面圖及橫截面圖。圖3係後述吸氣部之上視圖。 (first embodiment) <Development processing equipment> 1 and 2 are respectively a longitudinal sectional view and a lateral sectional view schematically showing an example of the structure of a developing processing apparatus according to a first embodiment. Fig. 3 is a top view of the suction part described later.
如圖1及圖2所示,顯影處理裝置1具有內部可密閉之殻體10。於殻體10側面形成有作為基板之晶圓W的搬入搬出口(圖中未示)。As shown in FIG. 1 and FIG. 2 , the
於殻體10內設有作為將晶圓W固持成水平之基板固持部的旋轉吸盤20。旋轉吸盤20經由例如軸22而連接於作為旋轉機構之吸盤驅動部21。吸盤驅動部21使旋轉吸盤20繞鉛直軸旋轉,藉而使固持於旋轉吸盤20之晶圓W繞鉛直軸旋轉。吸盤驅動部21具有例如馬達或氣缸等,作為使驅動旋轉吸盤20之旋轉的驅動力產生之驅動源。Inside the
在成為固持於旋轉吸盤20之晶圓W的背面側之區域,作為用以在顯影處理裝置1之外部的晶圓搬運機構與旋轉吸盤20之間傳遞晶圓W的升降構件之升降銷23設有複數根(例如三根)。升降銷23藉著具有馬達或氣缸等之銷驅動部24而可自由升降。In an area on the rear side of the wafer W held by the
又,在成為固持於旋轉吸盤20之晶圓W的背面側之區域,圓形板25設置成圍繞著軸22。於圓形板25形成有:軸22所插通之孔25a;及升降銷23所插通之孔25b。In addition, a
又,於殻體10內,設有「俯視下圍繞旋轉吸盤20之作為液體接受部的杯體100」。杯體100接受「由固持於旋轉吸盤20之晶圓W被甩掉或滴下的顯影液及沖洗液」,並且引導此等顯影液及沖洗液而排出至顯影處理裝置1外。杯體100之細節將於後述。Furthermore, in the
如圖2所示,於杯體100之X方向負側(圖2之下側)形成有沿著Y方向(圖2之左右方向)延伸之軌道30A、30B。軌道30A、30B從例如杯體100之Y方向負側(圖2之左側)的外側,形成至Y方向正側(圖2之右側)之外側。於軌道30A設有臂部31,於軌道30B設有臂部32。As shown in FIG. 2 ,
於第1臂部31支撐有「作為顯影液供給部之顯影液供給噴嘴33」。顯影液供給噴嘴33對固持於旋轉吸盤20之晶圓W供給顯影液。又,顯影液供給噴嘴33形成為底面具有顯影液噴吐口的角筒狀。顯影液供給噴嘴33之噴吐口俯視下成矩形,噴吐口之長邊方向的長度與晶圓W的直徑大約相同。The "
顯影液供給噴嘴33亦可係所謂接液噴嘴者。接液噴嘴具有:噴吐口,噴吐顯影液;及下端面,從噴吐口往橫向擴張,相對於晶圓W表面大約平行。The
第1臂部31由於噴嘴驅動部34而在軌道30A上移動自如。藉此,顯影液供給噴嘴33可從設置於杯體100之Y方向正側的外側之待機部35移動至杯體100內之晶圓W的中心部上方。又,由於噴嘴驅動部34,第1臂部31可自由升降,而可調節顯影液供給噴嘴33之高度。噴嘴驅動部34具有例如馬達或氣缸等,作為使驅動第1臂部31沿著軌道30A移動及驅動第1臂部31升降的驅動力產生之驅動源。The
於第2臂部32支撐有作為沖洗液供給部之沖洗液供給噴嘴36。沖洗液供給噴嘴36對固持於旋轉吸盤20之晶圓W供給沖洗液。又,沖洗液供給噴嘴36形成為底面具有沖洗液噴吐口的圓筒狀。
第2臂部32由於噴嘴驅動部37而在軌道30B上移動自如。藉此,沖洗液供給噴嘴36可從設置於杯體100之Y方向負側的外側之待機部38移動至杯體100內之晶圓W的中心部上方。又,由於噴嘴驅動部37,第2臂部32可自由升降,而可調節沖洗液供給噴嘴36之高度。噴嘴驅動部37具有例如馬達或氣缸等,作為使驅動第2臂部32沿著軌道30B移動及驅動第2臂部32升降的驅動力產生之驅動源。
A rinse
顯影液供給噴嘴33及沖洗液供給噴嘴36分別經由流量控制部(圖中未示)連接於顯影液及沖洗液之供給源。來自上述供給源之顯影液及沖洗液分別以流量控制部調整其流量,而供給予顯影液供給噴嘴33及沖洗液供給噴嘴36,再經由該噴嘴33、36而對旋轉吸盤20上之晶圓W噴吐。上述流量控制部具有例如各種閥及質量流量控制器。The developing
再者,如圖1所示,於殻體10之底壁形成有排氣口11。於排氣口11連接有用以使殻體10內部排氣之排氣管12。排氣管12經由主排氣管41而連接至具有排氣泵等之排氣機構40。Moreover, as shown in FIG. 1 , an
為了「在顯影處理裝置1外部的晶圓搬運機構與旋轉吸盤20之間傳遞晶圓W時,晶圓W能順利通過」,杯體100的上部係開放構造,即上部具有開口100a。開口100a設於杯體100上部的俯視下之中央部位。In order to "smoothly pass the wafer W when transferring the wafer W between the wafer transfer mechanism outside the developing
此杯體100包含:內杯101;下杯102;作為升降體之上杯103與外杯104;及環部105。The
內杯101設置成「俯視下圍繞圓形板25周圍的圓環板狀」。內杯101具有:引導壁110,將從晶圓W灑落之顯影液等引導至外側下方;及圓筒狀垂直壁111,從引導壁110之外周端往鉛直方向下方延伸。The
下杯102設於內杯101之下方。下杯102具有:位於底部之圓環板狀底壁120;從底壁120往鉛直方向上方延伸之圓筒狀垂直壁121~123。垂直壁121從底壁120之外周端往鉛直方向上方延伸;垂直壁122從底壁120之內周端往鉛直方向上方延伸;垂直壁123從底壁120的外周端與內周端之間的位置往鉛直方向上方延伸。The
於底壁120的垂直壁122與垂直壁123之間形成有排液口124。於排液口124連接有「用以排出杯體100所接受之液體的排液管125」。又,於底壁120的垂直壁121與垂直壁123之間形成有排氣口126。於排氣口126連接有「用以使杯體100內部排氣(具體而言為使晶圓W周邊的氣體排氣)之排氣管127。A
排氣管127與前述排氣管12同樣地,經由主排氣管41而連接於排氣機構40。
於主排氣管41設有風門42,以在以下兩者之間切換:經由排氣管12之殻體10內的排氣(以下稱為「殻體排氣」),與經由排氣管127之杯體100內的排氣(以下稱為「杯排氣」)。
The
從排液口124排出之液體與從排氣口126排出之氣體,可藉由垂直壁123而分離。此外,內杯101之垂直壁111形成為「位於垂直壁123外側,俾使得引導壁110所引導之液體會從排液口124排出」。The liquid discharged from the
上杯103設置成「俯視下從上方圓環板狀地覆蓋內杯101及下杯102之外周部」。上杯103具有俯視下形成為「具有稍大於晶圓W之直徑的圓形開口130a之圓環板狀的環狀板壁130」。環狀板壁130傾斜成朝外周逐漸變低。The
又,上杯103具有:圓筒狀垂直壁131,從環狀板壁130之外周端往鉛直方向下方延伸;及圓環狀肋部132,從垂直壁131之下端往外側延伸。垂直壁131及肋部132設置成「位於下杯102的垂直壁121與垂直壁123之間」。「上杯103的內周面」與「內杯101之引導壁110及垂直壁111的外周面」之間的間隙G1構成:連通於排氣口126即排氣管127之使杯體100內部排氣(具體而言為將晶圓W周邊的氣體排氣)的排氣流路。
如上述,上杯103係可升降。
Furthermore, the
外杯104設置成「從上方圓環狀地覆蓋上杯103之外周部」。外杯104具有「俯視下形成為具備大於晶圓W直徑的圓形開口140a之圓環狀的環狀壁140」。在本實施形態,開口140a***有上杯103之環狀板壁130的內周部。環狀壁140之外周部係傾斜成朝外周逐漸變高。又,外杯104具有從環狀壁140之外周端往上方延伸的圓筒狀外周壁141。再者,外杯104具有從外周壁141上端往內周下方延伸的圓環狀折返部142。The
再者,外杯104係可升降,具有從環狀壁140之內周部的底面往下方延伸之圓筒狀垂直壁143。垂直壁143設置成「位於上杯103之垂直壁131的外側」。又,垂直壁143設置成「外杯104下降時,收納於下杯102內,並且位於下杯102之垂直壁121的內側、且為環部105之內側」。Furthermore, the
環部105設置成「從上方圓環狀地覆蓋下杯102之外周部及上杯103之肋部132的外周部」。環部105固定於例如下杯102之垂直壁121的上端。The
相對於上述杯體100,吸氣部200設置成包圍該杯體100之外周。如圖2及圖3所示,吸氣部200具有吸氣口201。吸氣口201設置成例如「俯視下與杯體100排列成同心之複數個圓環狀」。又,吸氣部200具有例如「俯視下圓環狀且中空之環狀體202」,於環狀體202之頂面,沿著該環狀體202設有吸氣口201。各吸氣口201連通於環狀體202之內部的中空部分。藉由以排氣機構(圖中未示)使環狀體202內部排氣,可進行吸氣部200之經由吸氣口201的吸氣。With respect to the above-mentioned
吸氣部200之吸氣口201的高度為例如杯體100上端的高度以下,具體而言為外杯104上端的高度以下。
吸氣部200亦與外杯104等同樣地係可升降。在一實施形態,吸氣部200可與上杯103及外杯104一起升降。
The height of the
上杯103、外杯104及吸氣部200連接於共通之升降機構300。
升降機構300具有支撐外杯104及吸氣部200之支撐構件301。上杯103以螺合等方式固定於例如外杯104,藉此,經由外杯104而支撐於支撐構件301。再者,升降機構300具有「藉著使支撐構件301升降,而使上杯103、外杯104、吸氣部200升降之驅動部302」。驅動部302具有例如馬達或氣缸等,作為使驅動支撐構件301升降的驅動力產生之驅動源。
The
再者,於殻體10內之杯體100的上方設有風扇過濾組(FFU)400,朝著杯體100、具體而言為朝著固持於旋轉吸盤20之晶圓W供給潔淨空氣。對杯體100供給之潔淨空氣通過杯體100內,再經由排氣管127而排出。Furthermore, a fan filter unit (FFU) 400 is provided above the
如圖2所示,於以上之顯影處理裝置1設有控制部U。控制部U係具備例如CPU及記憶體等之電腦,具有程式儲存部(圖中未示)。於程式儲存部儲存有控制顯影處理裝置1之晶圓W的處理之程式。此外,上述程式可為記錄於電腦可讀取的記憶媒體之程式,亦可為從該記憶媒體安裝於控制部U之程式。記憶媒體可為暫時性,亦可為非暫時性。程式之一部分或全部亦可以專用硬體(電路基板)實現。As shown in FIG. 2 , a control unit U is provided in the above
<晶圓處理>
接著,就使用如以上構成之顯影處理裝置1而進行的晶圓處理之一例作說明。以下之處理在控制部U之控制下進行。使用圖4及圖5來說明。圖4及圖5係顯示上述晶圓處理中之顯影處理裝置1的狀態之圖,僅顯示主要部分。
在以下之說明中,於搬入顯影處理裝置1前之晶圓W表面形成光阻膜,令該光阻膜為曝光處理及之後的加熱處理已進行完畢。
<Wafer Processing>
Next, an example of wafer processing performed using the
(步驟S1:晶圓W之固持)
首先,晶圓W通過杯體100之開口100a,固持於旋轉吸盤20。
具體而言,首先,經由設於殻體10側面的搬入搬出口(圖中未示),從殻體10外部將固持晶圓W之晶圓搬運機構(圖中未示)***殻體10內。然後,將晶圓W搬運至旋轉吸盤20之上方。接著,藉由銷驅動部24之驅動,升降銷23會上升,從旋轉吸盤20之頂面突出預定之距離,將晶圓W傳遞至升降銷23上。
(Step S1: holding of wafer W)
First, the wafer W passes through the opening 100 a of the
將晶圓W傳遞至升降銷23前,上杯103、外杯104及吸氣部200一體地移動之集合體(以下稱為「一體移動體」)藉由升降機構300之驅動,移動至第1位置。如圖4(A)所示,第1位置係上杯103上端低於旋轉吸盤20上的晶圓W表面的位置。Before the wafer W is delivered to the lift pins 23, the aggregate of the
接著,藉由銷驅動部24之驅動,升降銷23會下降。藉此,晶圓W會下降,而通過開口100a,傳遞至旋轉吸盤20之頂面。然後,將晶圓W吸附固持於旋轉吸盤20。
在本程序,風門42調整成進行殻體排氣與杯排氣中之殻體排氣。
Next, the lift pins 23 are lowered by the drive of the
(步驟S2:使用顯影液之處理)
接著,對固持於旋轉吸盤20之晶圓W進行使用顯影液之處理,具體而言為進行例如顯影液之供給(步驟S2A)與靜止顯影(步驟S2B)。
(Step S2: Processing using developer)
Next, the wafer W held on the
(步驟S2A:顯影液之供給)
在本程序,對固持於旋轉吸盤20之晶圓W供給顯影液,於晶圓W上形成顯影液膜。
具體而言,接下來,在上述一體移動體配置於第1位置、且將風門42調整成進行殻體排氣之狀態下,進一步進行吸氣部200之吸氣。在此狀態下,由於噴嘴驅動部34之驅動,如圖4(B)所示,顯影液供給噴嘴33移動至晶圓W之上方。然後,開始從顯影液供給噴嘴33供給顯影液到晶圓W上,而形成顯影液膜。舉例而言,形成顯影液膜之際,顯影液供給噴嘴33被噴嘴驅動部34驅動,俾使得顯影液供給噴嘴33的顯影液之噴吐目的地從「在軌道30A之延伸方向的晶圓W之一端」移動到另一端。此時,晶圓係不旋轉(即靜止)。當顯影液供給噴嘴33之顯影液的噴吐目的地到達晶圓W的上述另一端,形成顯影液膜時,便停止顯影液供給噴嘴33之顯影液的供給,同時,由於噴嘴驅動部34之驅動,顯影液供給噴嘴33從晶圓W上退避。
(Step S2A: supply of developing solution)
In this step, a developing solution is supplied to the wafer W held on the
在本程序從顯影液供給噴嘴33供給之顯影液中,未殘留於晶圓W上的顯影液會通過內杯101的外周面與上杯103的外周面之間,或通過上杯103的外周面與外杯104的下部的內周面之間,而回收於下杯102。Among the developer supplied from the
從顯影液供給噴嘴33供給顯影液之際,上述一體移動體配置於第1位置。即,上杯103上端位於低於旋轉吸盤20上之晶圓W表面之位置。因此,在供給顯影液時,顯影液供給噴嘴33以靠近晶圓W表面的狀態(例如從顯影液供給噴嘴33之噴吐口至晶圓W表面之距離為3mm以下之狀態)沿著該表面移動之際,與上杯103之間不產生干擾。此外,外杯104設計成於此移動之際,在顯影液供給噴嘴33與外杯104之間不產生干擾。When the developer is supplied from the
又,由於從顯影液供給噴嘴33供給顯影液之際,風門42調整成「進行殻體排氣,不進行杯排氣」,故可抑制「供給顯影液時,於晶圓W周緣部產生氣流」。In addition, when the developer is supplied from the
再者,從顯影液供給噴嘴33供給顯影液之際,如前述,進行吸氣部200之吸氣。因此,可藉由吸氣部200回收「因從顯影液供給噴嘴33噴吐之顯影液撞擊晶圓W等而產生的顯影液霧滴M,該顯影液霧滴M通過杯體100上方(具體而言為外杯104上方)而漏出至杯體100外部」。In addition, when supplying the developing solution from the developing
(S2B:靜止顯影)
在本程序,在預定之時間,在步驟S2A形成之顯影液膜維持在晶圓W上,進行晶圓W上之光阻膜的靜止顯影。
又,在本程序,維持風門42被調整成「進行殻體排氣,不進行杯排氣」之狀態。因此,可抑制「靜止顯影中,於晶圓W周緣部產生氣流」。
再者,在本程序,亦維持吸氣部200之吸氣。因此,於靜止顯影中,可藉由吸氣部200回收漏出至杯體100外側的霧滴M。
(S2B: Still developing)
In this procedure, the developer solution film formed in step S2A is maintained on the wafer W for a predetermined time, and the photoresist film on the wafer W is still developed.
In addition, in this routine, the
在本程序,如圖5(A)所示,上述一體移動體亦可配置於第1位置以外的位置。上述第1位置以外的位置係上杯103之肋部132與環部105密合之位置,更具體而言,為上杯103之肋部132與環部105環繞大約整周密合的位置。藉此,可抑制:從回收顯影液,顯影液之蒸氣存在的下杯102內、即形成為顯影液之氣體的環境之下杯102內,起因於上述環境的顯影液霧滴等從下杯102與外杯104之間等,漏出至杯體100外。In this procedure, as shown in FIG. 5(A), the integrally movable body may be arranged at a position other than the first position. The positions other than the above-mentioned first position are the positions where the
(步驟S3:使用沖洗液之處理)
接著,對固持於旋轉吸盤20之晶圓W進行使用沖洗液之處理、即清洗處理。
(Step S3: Treatment with rinse solution)
Next, the wafer W held on the
具體而言,上述一體移動體藉由升降機構300之驅動,移動至第2位置。如圖5(B)所示,第2位置係上杯103之環狀板壁130的內周端底面高於旋轉吸盤20上之晶圓W表面之位置。只要滿足此條件,第2位置亦可為前述之上杯103的肋部132與環部105密合之其他位置。
又,停止吸氣部200之吸氣,同時,調整風門42,從殻體排氣切換成杯排氣。
再者,由於噴嘴驅動部37之驅動,沖洗液供給噴嘴36移動至晶圓W之中心的上方。
Specifically, the above-mentioned integrated moving body is moved to the second position by the driving of the elevating
然後,從沖洗液供給噴嘴36將沖洗液供給至晶圓W上,清洗晶圓W。舉例而言,此清洗之際,對於「由於吸盤驅動部21之驅動而以100~500rpm旋轉之晶圓W」,從沖洗液供給噴嘴36將沖洗液供給至該晶圓W上,而以沖洗液置換晶圓W上之顯影液膜。之後,停止沖洗液之供給,然後藉著吸盤驅動部21之驅動,使晶圓W之轉速上升,從晶圓W上甩掉沖洗液,而使晶圓W乾燥。於乾燥期間,由於噴嘴驅動部37之驅動,使沖洗液供給噴嘴36從晶圓W上退避。Then, a rinse liquid is supplied onto the wafer W from the rinse
清洗處理之際,上述一體移動體配置於第2位置。即,上杯103之環狀板壁130的內周端底面位於高於旋轉吸盤20上之晶圓W表面之位置。因此,清洗處理時,可藉由上杯103之環狀板壁130接住從旋轉吸盤20上之晶圓W甩掉的顯影液及沖洗液,藉由杯體100回收。During the cleaning process, the integrally movable body is arranged at the second position. That is, the bottom surface of the inner peripheral end of the
又,清洗處理之際,由於設有外杯104,當從沖洗液供給噴嘴對晶圓W供給之沖洗液在晶圓W被彈回,然後經由開口130a而濺出至上杯103外側時,可藉由外杯104回收該沖洗液。In addition, since the
再者,藉著於清洗處理時進行杯排氣,可經由「以前述間隙G1形成於杯體100內之排氣流路R1」,而吸引回收沖洗液及顯影液之霧滴。此外,清洗時之沖洗液及顯影液之霧滴,可能因為「從沖洗液供給噴嘴36供給之沖洗液撞擊晶圓W」或者「從晶圓W甩掉之沖洗液或顯影液撞擊上杯103之環狀板壁130」等而產生。Furthermore, by exhausting the cup during the cleaning process, it is possible to suck and recover the mist of the rinse solution and the developer through the "exhaust flow path R1 formed in the
(步驟S4:晶圓搬出)
接著,以與步驟S1相反之順序從顯影處理裝置1搬出晶圓W。
藉此,一連串之顯影處理結束。
(Step S4: Wafer unloading)
Next, the wafer W is unloaded from the
在以上之例中,在步驟S2A之供給顯影液時及步驟S2B兩者,不進行杯排氣而進行殻體排氣,藉由「設置成包圍杯體100外周的吸氣部200」進行吸氣。亦可取而代之地,在步驟S2A之供給顯影液時及步驟S2B中任一者,不進行杯排氣而進行殻體排氣,藉由「設置成包圍杯體100外周的吸氣部200」進行吸氣。In the above example, at the time of supplying the developing solution in step S2A and both in step S2B, the casing is not exhausted but the exhaust is performed, and suction is performed by "the
如以上,在本實施形態,於步驟S2之使用顯影液的處理時,不進行杯排氣,而僅於步驟S3之使用沖洗液的處理時,進行杯排氣。具體而言,在步驟S2A之供給顯影液時及步驟S2B之靜止顯影時的至少任一者,不進行杯排氣,而僅於步驟S3之使用沖洗液時,進行杯排氣。亦即,在步驟S2A之供給顯影液時及步驟S2B之靜止顯影時的至少任一者,以低於使用沖洗液時之排氣量,使杯體100內部排氣。因此,在步驟S2A之供給顯影液時及步驟S2B之靜止顯影時的至少任一者,可抑制於晶圓外周部附近產生氣流,而可防止晶圓W外周部局部地冷卻。因而,可改善使用顯影中之溫度靈敏度高的光阻液時等之顯影處理的均勻性。
又,在本實施形態,在步驟S2A之供給顯影液時及步驟S2B之靜止顯影時的至少任一者,藉由「設置成包圍杯體100外周的吸氣部200」進行吸氣。因而,從杯體100內之排氣量較低的結果,即使顯影液霧滴漏出至杯體100外側,亦可藉由吸氣部200回收該漏出之霧滴。
如此,根據本實施形態,可改善顯影處理之面內均勻性,且可適當地回收顯影液霧滴。
As described above, in the present embodiment, the cup evacuation is not performed during the processing using the developer solution in step S2, but the cup evacuation is performed only during the processing using the rinse liquid in step S3. Specifically, the cup evacuation is not performed in at least one of the supply of the developer in step S2A and the static development in step S2B, and the cup evacuation is performed only in the use of the rinse solution in step S3. That is, at least one of the supply of the developing solution in step S2A and the static development in step S2B, the inside of the
又,在本實施形態,吸氣部200之吸氣口201的高度為杯體100上端的高度以下。具體而言,在步驟S2A之供給顯影液時及步驟S2B之靜止顯影時的至少任一者,吸氣時之吸氣口201的高度為外杯104上端的高度以下。因而,有以下(1)、(2)之效果。
(1)可抑制:通過杯體100上側而漏出至杯體100外側的顯影液霧滴,因重力等未被回收於吸氣口201,卻通過吸氣部200下側而飛散的情形。
(2)於使用顯影液之處理時,可抑制:因FFU400而形成於晶圓W上方的氣流因吸氣部200之吸氣而散亂的情形。
In addition, in this embodiment, the height of the
再者,在本實施形態,構成杯體100上端的部分、即外杯104係可升降,且吸氣部200可與外杯104一起升降。因此,不論外杯104之高度,皆可使相對於外杯104上端的吸氣部200之高度(具體而言為吸氣口201之高度)為一定。結果,可使顯影液霧滴的回收性能穩定。Furthermore, in this embodiment, the part constituting the upper end of the
(第2實施形態)
圖6及圖7係用以顯示第2實施形態之顯影處理裝置的結構之一例的圖,僅顯示主要部分。又,圖6顯示升降機構300與後述排氣機構500之連接形態的一例,圖7顯示排氣機構500之排氣路徑的一例。
(Second Embodiment)
6 and 7 are diagrams showing an example of the structure of the development processing apparatus according to the second embodiment, and only main parts are shown. 6 shows an example of the connection form of the
本實施形態之顯影處理裝置亦與第1實施形態之顯影處理裝置同樣地,具有吸氣部200。惟,在本實施形態,如圖6所示,連接有吸氣部200之排氣機構500可藉由「驅動杯體100具有之升降體(具體而言為外杯104及上杯103)升降之驅動力」而排氣。排氣機構500亦可藉由「驅動杯體100之升降體上升之驅動力」或「驅動杯體100之升降體下降之驅動力」中之任一者而排氣。惟,在本實施形態中,排氣機構500可藉由「驅動杯體100之升降體上升之驅動力」或「驅動杯體100之升降體下降之驅動力」之任一驅動力而排氣。排氣機構500之具體結構將於後述。The development processing apparatus of this embodiment also has the
排氣機構500從上側依序具有頂板501、隔板502、底板503。
頂板501與隔板502藉由「於上下方向伸縮自如之波紋管等第1伸縮管504」而連接。第1泵室P1藉由頂板501、隔板502、第1伸縮管504而被劃分。
The
又,隔板502與底板503藉由「於上下方向伸縮自如之波紋管等第2伸縮管505」而連接。第2泵室P2藉由隔板502、底板503、第2伸縮管505而被劃分。In addition, the
頂板501與底板503固定不動。相對於此,隔板502由「支撐吸氣部200等之支撐構件301」所支撐,藉著驅動部302之驅動,支撐構件301會升降,因此隔板502亦會升降。由於隔板502之升降,第1泵室P1及第2泵室P2之容積會變化。若隔板502上升,第1泵室P1之容積會縮小,第2泵室P2之容積會增大。相對於此,若隔板502下降,第1泵室P1之容積會增大,第2泵室P2之容積會縮小。The
又,如圖7所示,排氣機構500具有上游側主排氣管510、第1上游側分歧管511及第2上游側分歧管512、下游側主排氣管520、第1下游側分歧管521及第2下游側分歧管522。7, the
上游側主排氣管510之上游端連通於吸氣部200,具體而言,連通於吸氣部200之環狀體202的內部之中空部分。上游側主排氣管510之下游側分歧成第1上游側分歧管511及第2上游側分歧管512,分別連接於第1泵室P1及第2泵室P2。The upstream end of the upstream side
第1下游側分歧管521與第2下游側分歧管522之上游端分別連接於第1泵室P1與第2泵室P2。第1下游側分歧管521與第2下游側分歧管522之下游側匯合而連接於下游側主排氣管520之上游端。The upstream ends of the first
對第1泵室P1設有止回閥V1、V2,對第2泵室P2設有止回閥V3、V4。止回閥V1用以防止氣體從第1泵室P1逆流至吸氣部200,止回閥V2用以防止氣體從第1下游側分歧管521逆流至第1泵室P1。又,止回閥V3用以防止氣體從第2泵室P2逆流至吸氣部200,止回閥V4用以防止氣體從第2下游側分歧管522逆流至第2泵室P2。The first pump chamber P1 is provided with check valves V1, V2, and the second pump chamber P2 is provided with check valves V3, V4. The check valve V1 is used to prevent backflow of gas from the first pump chamber P1 to the
止回閥V1設於例如位於第1泵室P1內之第1上游側分歧管511的下游端,藉著「經由第1上游側分歧管511之對於第1泵室P1的氣體流入而引起之壓力」而成為開啟狀態。另一方面,藉著作用於閥體V11之重力而成為關閉狀態。The check valve V1 is provided, for example, at the downstream end of the first upstream
止回閥V2設於例如位於第1泵室P1外之第1下游側分歧管521的上游側,藉著「經由第1下游側分歧管521之第1泵室P1的氣體排出而引起之壓力」而成為開啟狀態。另一方面,藉著作用於閥體V12之重力而成為關閉狀態。The check valve V2 is provided, for example, on the upstream side of the first downstream
止回閥V3設於例如位於第2泵室P2內之第2上游側分歧管512的下游端,藉著「經由第2上游側分歧管512之對於第2泵室P2的氣體流入而引起之壓力」而成為開啟狀態。另一方面,藉著作用於閥體V13之重力而成為關閉狀態。The check valve V3 is provided, for example, at the downstream end of the second upstream
止回閥V4設於例如位於第2泵室P2外之第2下游側分歧管522的上游側,藉著「經由第2下游側分歧管522之第2泵室P2的氣體排出而引起之壓力」而成為開啟狀態。另一方面,藉著作用於閥體V14之重力而成為關閉狀態。The check valve V4 is provided, for example, on the upstream side of the second downstream
以上各部所構成之排氣機構500被驅動部302驅動成「包含外杯104及吸氣部200之一體移動體上升」,而支撐構件301上升時,隔板502會上升。當隔板502上升時,第1泵室P1之容積變小,第1泵室P1內之氣體經由第1下游側分歧管521及下游側主排氣管520而排出。與此同時,第2泵室P2之容積變大,吸氣部200之吸氣口201的周圍排氣,該周圍之氣體經由吸氣部200、上游側主排氣管510及第2上游側分歧管512,流入至第2泵室P2內。The
另一方面,當排氣機構500被驅動部302驅動成「上述一體移動體下降」,而支撐構件301下降時,隔板502會下降。當隔板502下降時,第2泵室P2之容積變小,第2泵室P2內之氣體經由第2下游側分歧管522及下游側主排氣管520而排出。與此同時,第1泵室P1之容積變大,吸氣部200之吸氣口201的周圍排氣,該周圍之氣體經由吸氣部200、上游側主排氣管510及第1上游側分歧管511,流入至第1泵室P1內。On the other hand, when the
如此,藉著使「排氣機構500並非以驅動上述上升之驅動力或驅動上述下降之驅動力之任一驅動力排氣,而是以兩驅動力排氣」,可在上述一體移動體上升時及下降時兩者皆進行吸氣部200之吸氣。In this way, by "exhausting the
使用排氣機構500的情形,於前述步驟S2之使用顯影液的處理時,支撐構件301升降,具體而言,支撐構件301反覆升降。更具體而言,於步驟S2B之靜止顯影時,支撐構件301反覆升降,隨著此反覆升降,連續進行以排氣機構500所行之吸氣部200的環狀體202之中空部的排氣,而連續進行吸氣部200之吸氣。
又,於步驟S2A之靜止顯影時,支撐構件301亦可反覆升降,隨著此反覆升降,連續進行以排氣機構500所行之吸氣部200的環狀體202之中空部的排氣,而連續進行吸氣部200之吸氣。此時,將上述一體移動體之上升時間點、上述一體移動體之反覆升降時的最大高度等調整成不致產生顯影液供給噴嘴33與杯體100之干擾。
When the
如本實施形態般,藉著於吸氣部200之吸氣使用排氣機構500,可防止驅動部之數量增加,而可抑制高成本化。As in this embodiment, by using the
(第3實施形態) 圖8係用以顯示第3實施形態之顯影處理裝置的結構之一例的圖,僅顯示主要部分。 (third embodiment) Fig. 8 is a diagram showing an example of the structure of a development processing apparatus according to a third embodiment, and only main parts are shown.
由於風門42與主排氣管41之內周面接觸而產生微粒等原因,主排氣管41有時未能由風門42密閉。此時,即使將風門42調整成進行殻體排氣,以前述間隙G1為排氣流路R1之排氣雖然排氣量少,但還是有。The
是故,在本實施形態,如圖8所示,杯體100內之排氣流路具有脹縮環部600作為開關該排氣流路之開關構件。脹縮環部600形成為俯視下圓環狀,係脹縮自如的構成。舉例而言,藉著對脹縮環部600內部之中空部分供氣而使其膨脹,藉著使脹縮環部600內部之中空部分排氣而使其收縮。Therefore, in this embodiment, as shown in FIG. 8 , the exhaust flow path in the
順帶一提,在上杯103及外杯104下降之狀態,以下的間隙G2、G3亦可構成使杯體100內部排氣(具體而言為使晶圓W周邊的氣體排氣)之排氣流路。即,上杯103之引導壁110的下部之外周面與外杯104之下部的內周面之間的間隙G2、上杯103之垂直壁131的外周面與下杯102之垂直壁121的內周面之間的間隙G3可構成排氣流路R2。By the way, when the
排氣流路R1與排氣流路R2之下游側匯合,經由排氣口126而連通於排氣管127。又,排氣流路R1之上游端位在比排氣流路R2之上游端靠內側、亦即旋轉吸盤20側的位置。因此,經由排氣流路R1之排氣對晶圓W周緣部的氣流帶來之影響大,而經由排氣流路R2之排氣對晶圓W周緣部的氣流帶來之影響少。因此,在本實施形態,脹縮環部600僅設於排氣流路R1,未設於排氣流路R2。The exhaust flow path R1 joins the downstream side of the exhaust flow path R2 and communicates with the
在本實施形態,使用沖洗液之處理時,即,風門42調整成進行杯排氣時,包含上杯103及外杯104之一體移動體呈上升狀態,僅形成排氣流路R1,未形成排氣流路R2。又,此時,脹縮環部600呈收縮狀態,排氣流路R1呈開啟狀態。藉此,可經由排氣流路R1而回收使用沖洗液之處理時產生的顯影液及沖洗液之霧滴。In this embodiment, when using the flushing liquid, that is, when the
另一方面,使用顯影液之處理時,即,風門42調整成進行殻體排氣時,包含上杯103及外杯104之一體移動體呈下降狀態,形成排氣流路R1及排氣流路R2兩者。惟,脹縮環部600呈膨脹狀態,排氣流路R1呈關閉狀態。藉此,使用顯影液之處理時,可抑制「風門42構造上無法避免的排氣經由排氣流路R1而進行」,而可抑制於晶圓W周緣部產生強氣流。又,由於「風門42構造上無法避免的排氣經由排氣流路R2而進行」,因此不僅可藉著吸氣部200之吸氣,亦可藉著經由排氣流路R2之排氣而進行顯影液霧滴的回收。On the other hand, when using the developer solution, that is, when the
又,脹縮環部600亦可固定於內杯101或上杯103中任一者。
脹縮環部600固定於上杯103時之固定位置為例如以下之位置。即,位置係在上杯103下降之狀態下,脹縮環部600膨脹時,封閉排氣流路R1,在上杯103上升之狀態下,即使脹縮環部600膨脹,如在圖9以虛線所示,亦無法封閉排氣流路R1。
Moreover, the expansion-
此時,使用沖洗液之處理時,於上杯103上升時,如在圖9以實線所示,脹縮環部600呈收縮狀態。藉此,可抑制使用沖洗液之處理時的排氣流路R1之截面積因脹縮環部600而減少。At this time, when the
脹縮環部600亦可與內杯101或上杯103中任一者一體地形成。The expansion-
此次揭示之實施形態應視為所有點係例示,並非限制。上述實施形態亦可在不脫離附加之申請專利範圍及其主旨下,以各種形態省略、置換、變更。The embodiments disclosed this time should be regarded as illustrations in all points and not limitations. The above-mentioned embodiments can also be omitted, replaced, and changed in various forms without departing from the scope of the appended patent application and its gist.
1:顯影處理裝置 10:殼體 11:排氣口 12:排氣管 20:旋轉吸盤 21:吸盤驅動部 22:軸 23:升降銷 24:銷驅動部 25:圓形板 25a:孔 25b:孔 30A:軌道 30B:軌道 31:臂部 32:臂部 33:顯影液供給噴嘴 34:噴嘴驅動部 35:待機部 36:沖洗液供給噴嘴 37:噴嘴驅動部 38:待機部 40:排氣機構 41:主排氣管 42:風門 100:杯體 100a:開口 101:內杯 102:下杯 103:上杯 104:外杯 105:環部 110:引導壁 111:垂直壁 120:底壁 121:垂直壁 122:垂直壁 123:垂直壁 124:排液口 125:排液管 126:排液口 127:排氣管 130:環狀板壁 130a:開口 131:垂直壁 132:肋部 140:環狀壁 140a:開口 141:外周部 142:折返部 143:垂直壁 200:吸氣部 201:吸氣口 202:環狀體 300:升降機構 301:支撐構件 302:驅動部 400:風扇過濾組(FFU) 500:排氣機構 501:頂板 502:隔板 503:底板 504:第1伸縮管 505:第2伸縮管 510:上游側主排氣管 511:第1上游側分歧管 512:第2上游側分歧管 520:下游側主排氣管 521:第1下游側分歧管 522:第2下游側分歧管 600:脹縮環部 G1:間隙 G2:間隙 G3:間隙 M:霧滴 P1:第1泵室 P2:第2泵室 R1:排氣流路 R2:排氣流路 U:控制部 V1:止回閥 V2:止回閥 V3:止回閥 V4:止回閥 V11:閥體 V12:閥體 V13:閥體 V14:閥體 W:晶圓 X:方向 Y:方向 1: Development processing device 10: shell 11: Exhaust port 12: exhaust pipe 20:Rotary suction cup 21: Suction cup drive unit 22: axis 23:Lift pin 24: Pin drive unit 25: round plate 25a: hole 25b: hole 30A: track 30B: track 31: arm 32: arm 33:Developer supply nozzle 34: Nozzle drive unit 35:Standby unit 36: Flushing liquid supply nozzle 37:Nozzle drive unit 38:Standby unit 40: exhaust mechanism 41: Main exhaust pipe 42: damper 100: cup body 100a: opening 101: inner cup 102: down cup 103: cup 104: outer cup 105: ring department 110: guide wall 111: vertical wall 120: bottom wall 121: vertical wall 122: vertical wall 123: vertical wall 124: drain port 125: drain pipe 126: drain port 127: exhaust pipe 130: Annular wall 130a: opening 131: vertical wall 132: Rib 140: Annular wall 140a: opening 141: peripheral part 142: Return Department 143: vertical wall 200: suction part 201: Suction port 202: ring body 300: lifting mechanism 301: support member 302: drive department 400: Fan filter unit (FFU) 500: exhaust mechanism 501: top plate 502: Partition 503: Bottom plate 504: The first telescopic tube 505: The second telescopic tube 510: Upstream side main exhaust pipe 511: 1st upstream branch pipe 512: 2nd upstream branch pipe 520: Downstream side main exhaust pipe 521: 1st downstream branch pipe 522: 2nd downstream branch pipe 600: expansion and contraction ring G1: Gap G2: Gap G3: Gap M: mist P1: 1st pump room P2: 2nd pump room R1: Exhaust flow path R2: Exhaust flow path U: Control Department V1: check valve V2: check valve V3: check valve V4: check valve V11: valve body V12: valve body V13: valve body V14: valve body W: Wafer X: direction Y: Direction
[圖1]係概略地顯示第1實施形態之顯影處理裝置的結構之一例的橫截面圖。 [圖2]係概略地顯示第1實施形態之顯影處理裝置的結構之一例的縱截面圖及截面圖。 [圖3]係吸氣部之上視圖。 [圖4](A)、(B)係顯示晶圓處理中之顯影處理裝置的狀態之圖。 [圖5](A)、(B)係顯示晶圓處理中之顯影處理裝置的狀態之圖。 [圖6]顯示升降機構與排氣機構之連接形態的一例。 [圖7]係用以顯示第2實施形態之顯影處理裝置的結構之一例的圖。 [圖8]係用以顯示第3實施形態之顯影處理裝置的結構之一例的圖。 [圖9]係用以顯示第3實施形態之顯影處理裝置的結構之一例的圖。 [ Fig. 1] Fig. 1 is a cross-sectional view schematically showing an example of the structure of a development processing apparatus according to a first embodiment. [ Fig. 2] Fig. 2 is a longitudinal sectional view and a sectional view schematically showing an example of the structure of the development processing apparatus according to the first embodiment. [Fig. 3] The top view of the suction part. [FIG. 4] (A) and (B) are diagrams showing the state of the development processing apparatus during wafer processing. [FIG. 5] (A) and (B) are diagrams showing the state of the development processing apparatus during wafer processing. [Fig. 6] An example of the connection form of the lifting mechanism and the exhaust mechanism is shown. [ Fig. 7] Fig. 7 is a diagram showing an example of the structure of a development processing apparatus according to the second embodiment. [ Fig. 8] Fig. 8 is a diagram showing an example of the structure of a development processing apparatus according to a third embodiment. [FIG. 9] It is a figure for showing an example of the structure of the developing processing apparatus of 3rd Embodiment.
1:顯影處理裝置 1: Development processing device
10:殼體 10: Housing
11:排氣口 11: Exhaust port
12:排氣管 12: exhaust pipe
20:旋轉吸盤 20:Rotary suction cup
21:吸盤驅動部 21: Suction cup drive unit
22:軸 22: axis
23:升降銷 23:Lift pin
24:銷驅動部 24: Pin drive unit
25:圓形板 25: round plate
25a:孔 25a: hole
25b:孔 25b: hole
33:顯影液供給噴嘴 33:Developer supply nozzle
35:待機部 35:Standby unit
36:沖洗液供給噴嘴 36: Flushing liquid supply nozzle
38:待機部 38:Standby unit
40:排氣機構 40: exhaust mechanism
41:主排氣管 41: Main exhaust pipe
42:風門 42: damper
100:杯體 100: cup body
100a:開口 100a: opening
101:內杯 101: inner cup
102:下杯 102: down cup
103:上杯 103: cup
104:外杯 104: outer cup
105:環部 105: ring department
110:引導壁 110: guide wall
111:垂直壁 111: vertical wall
120:底壁 120: bottom wall
121:垂直壁 121: vertical wall
122:垂直壁 122: vertical wall
123:垂直壁 123: vertical wall
124:排液口 124: drain port
125:排液管 125: drain pipe
126:排液口 126: drain port
127:排氣管 127: exhaust pipe
130:環狀板壁 130: Annular wall
130a:開口 130a: opening
131:垂直壁 131: vertical wall
132:肋部 132: Rib
140:環狀壁 140: Annular wall
140a:開口 140a: opening
141:外周部 141: peripheral part
142:折返部 142: Return Department
143:垂直壁 143: vertical wall
200:吸氣部 200: suction part
201:吸氣口 201: Suction port
202:環狀體 202: ring body
300:升降機構 300: lifting mechanism
301:支撐構件 301: support member
302:驅動部 302: drive department
400:風扇過濾組(FFU) 400: Fan filter unit (FFU)
G1:間隙 G1: Gap
R1:排氣流路 R1: Exhaust flow path
W:晶圓 W: Wafer
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TW111126776A TW202309684A (en) | 2021-07-30 | 2022-07-18 | Development processing device and development processing method |
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JP (1) | JPWO2023008249A1 (en) |
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JP2003324064A (en) * | 2002-03-01 | 2003-11-14 | Tokyo Electron Ltd | Development method and developing equipment |
JP6203893B2 (en) * | 2012-07-26 | 2017-09-27 | 東京エレクトロン株式会社 | Liquid processing apparatus and cleaning method |
JP6769166B2 (en) * | 2016-08-10 | 2020-10-14 | 東京エレクトロン株式会社 | Liquid treatment equipment and liquid treatment method |
JP7335797B2 (en) * | 2019-11-29 | 2023-08-30 | 株式会社Screenホールディングス | developing device |
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- 2022-07-19 WO PCT/JP2022/028010 patent/WO2023008249A1/en active Application Filing
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JPWO2023008249A1 (en) | 2023-02-02 |
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