TW202245982A - Auxiliary device capable of automatically replacing cutting blades - Google Patents

Auxiliary device capable of automatically replacing cutting blades Download PDF

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Publication number
TW202245982A
TW202245982A TW111117661A TW111117661A TW202245982A TW 202245982 A TW202245982 A TW 202245982A TW 111117661 A TW111117661 A TW 111117661A TW 111117661 A TW111117661 A TW 111117661A TW 202245982 A TW202245982 A TW 202245982A
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cutting
axis direction
axis
cutting blade
carrying
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TW111117661A
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Chinese (zh)
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女屋拓土
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日商迪思科股份有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/06—Dust extraction equipment on grinding or polishing machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/023—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a cutting blade mounted on a carriage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064—Devices for the automatic drive or the program control of the machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/024—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with the stock carried by a movable support for feeding stock into engagement with the cutting blade, e.g. stock carried by a pivoted arm or a carriage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a plurality of cutting blades
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Machine Tool Units (AREA)
  • Details Of Cutting Devices (AREA)
  • Accessories And Tools For Shearing Machines (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Dicing (AREA)

Abstract

To provide an auxiliary device capable of automatically replacing cutting blades, and an auxiliary device that can be mounted to a cutting device that has been already delivered to the user. An auxiliary device connected to a cutting device includes a cutting blade storage mechanism for storing a plurality of cutting blades; a loading and unloading mechanism for maintaining a front side of the cutting blade from the cutting blade storage mechanism and carrying out the unloading and loading; a Y-axis direction positioning mechanism for positioning the loading and unloading mechanism to an acting position and a retreating position in the Y-axis direction relative to the cutting blade storage mechanism; a Z-axis moving mechanism for moving the loading and unloading mechanism in the Z-axis direction; and an X-axis moving mechanism for moving the loading and unloading mechanism in the X-axis direction to active the cutting blade mounted on a spindle of the cutting mechanism of the cutting device.

Description

輔助裝置assisting equipments

本發明是有關於一種連結於切削裝置之輔助裝置。The invention relates to an auxiliary device connected with a cutting device.

將IC、LSI等的複數個器件藉由交叉之複數條分割預定線來區劃且形成在正面之晶圓，可藉由切削裝置來分割成一個個的器件晶片，並且可將經分割之各器件晶片應用在行動電話、個人電腦等的電氣機器上。A plurality of devices such as IC, LSI, etc. are divided by a plurality of crossing dividing lines and formed on the front side of the wafer, which can be divided into individual device wafers by a cutting device, and each divided device can be divided into Chips are used in electrical equipment such as mobile phones and personal computers.

切削裝置具備：工作夾台，具備有保持晶圓之保持面；切削機構，以固定螺帽裝設有切削刀片，前述切削刀片對已保持在工作夾台之晶圓進行切削；X軸進給機構，使工作夾台在X軸方向上加工進給；Y軸進給機構，使切削機構在和X軸方向正交之Y軸方向上分度進給；及Z軸進給機構，使切削機構在和X軸方向以及Y軸方向正交之Z軸方向上切入進給，保持面是以X軸方向以及Y軸方向來規定，且可以高精度地將晶圓分割成一個個的器件晶片。The cutting device is equipped with: a work clamp table with a holding surface for holding the wafer; a cutting mechanism with a cutting blade mounted on a fixed nut, and the aforementioned cutting blade cuts the wafer held on the work clamp table; X-axis feed Mechanism to make the work clamp table feed in the X-axis direction; Y-axis feed mechanism to make the cutting mechanism index-feed in the Y-axis direction orthogonal to the X-axis direction; and Z-axis feed mechanism to make the cutting The mechanism cuts and feeds in the Z-axis direction perpendicular to the X-axis direction and the Y-axis direction. The holding surface is defined by the X-axis direction and the Y-axis direction, and the wafer can be divided into individual device wafers with high precision. .

本發明之申請人已提出一種可以自動地更換已裝設於切削機構之切削刀片的自動更換裝置(參照例如專利文獻1)。 先前技術文獻 專利文獻 The applicant of the present invention has proposed an automatic exchange device that can automatically exchange cutting inserts installed in a cutting mechanism (see, for example, Patent Document 1). prior art literature patent documents

專利文獻1：日本特開2007-98536號公報Patent Document 1: Japanese Patent Laid-Open No. 2007-98536

發明欲解決之課題The problem to be solved by the invention

但是，有以下問題：要在之後將自動更換裝置裝設到已經交貨給使用者之切削裝置是困難的。However, there is a problem that it is difficult to later attach the automatic changer to the cutting device that has been delivered to the user.

據此，本發明之目的在於提供一種可以在之後裝設到已經交貨給使用者之切削裝置之輔助裝置。 用以解決課題之手段 Accordingly, it is an object of the present invention to provide an auxiliary device that can be subsequently fitted to a cutting device that has been delivered to the user. means to solve problems

根據本發明，可提供一種輔助裝置，可連結於切削裝置，前述切削裝置具備：工作夾台，具備有保持被加工物之保持面；切削機構，以固定螺帽裝設有切削刀片，前述切削刀片對已保持在該工作夾台之被加工物進行切削；X軸進給機構，使該工作夾台在X軸方向上加工進給；Y軸進給機構，使該切削機構在和該X軸方向正交之Y軸方向上分度進給；及Z軸進給機構，使該切削機構在和該X軸方向以及該Y軸方向正交之Z軸方向上切入進給，且該保持面是以該X軸方向以及該Y軸方向來規定，前述輔助裝置具備有： 切削刀片保管機構，保管複數個切削刀片； 搬出入機構，從該切削刀片保管機構保持切削刀片的正面並進行搬出以及搬入； Y軸方向定位機構，讓該搬出入機構相對於該切削刀片保管機構定位到Y軸方向的作用位置與退避位置； Z軸移動機構，讓該搬出入機構在Z軸方向上移動； X軸移動機構，讓該搬出入機構在X軸方向上移動，來作用於已裝設在該切削機構的主軸之切削刀片；及 洗淨機構，對已被該搬出入機構保持之切削刀片的背面進行洗淨。 According to the present invention, an auxiliary device can be provided, which can be connected to the cutting device. The cutting device includes: a work clamp table with a holding surface for holding the workpiece; a cutting mechanism with a cutting blade mounted on a fixed nut. The blade cuts the workpiece held on the work clamp; the X-axis feed mechanism makes the work clamp work in the direction of the X-axis; the Y-axis feed mechanism makes the cutting mechanism and the X-axis Indexing feed in the Y-axis direction orthogonal to the axis direction; and Z-axis feed mechanism, so that the cutting mechanism cuts in and feeds in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction, and the holding The surface is defined by the X-axis direction and the Y-axis direction, and the aforementioned auxiliary device has: The cutting blade storage mechanism stores a plurality of cutting blades; A carrying-in/out mechanism for carrying out and carrying-in the cutting insert while holding the front side of the cutting insert; A positioning mechanism in the Y-axis direction, allowing the carrying-in and out-in mechanism to be positioned at the active position and the retracted position in the Y-axis direction relative to the cutting blade storage mechanism; The Z-axis moving mechanism allows the moving in and out mechanism to move in the Z-axis direction; An X-axis moving mechanism for moving the carry-in/out mechanism in the X-axis direction to act on the cutting blade installed on the main shaft of the cutting mechanism; and The cleaning mechanism cleans the back surface of the cutting blade held by the carrying-in/out mechanism.

較佳的是，該切削刀片保管機構包含：驅動齒輪，具有在Y軸方向上延伸之旋轉軸；從動齒輪，和該驅動齒輪在Z軸方向上分開且具有在Y軸方向上延伸之旋轉軸；無端軌道，捲繞於該驅動齒輪與該該從動齒輪；及支撐軸，在Y軸方向上延伸並以預定的間隔配設在該無端軌道，且可***切削刀片的中央開口部來支撐切削刀片， 該洗淨機構具備空氣噴嘴，前述空氣噴嘴相鄰於該切削刀片保管機構而配設，且對已被該搬出入機構所保持之切削刀片的背面噴附空氣來進行洗淨。 較佳的是，該空氣噴嘴配設在該切削刀片保管機構的該支撐軸的背部，且對已支撐於該支撐軸之切削刀片的背部噴附空氣來使切削刀片朝該支撐軸的前端移動，而相對於該搬出入機構來定位切削刀片的正面。 較佳的是，該搬出入機構包含：Z旋轉軸，在Z軸方向上延伸；刀片保持部，呈放射狀地連結於該Z旋轉軸且吸引保持切削刀片；及固定螺帽保持部，對已形成於該主軸的前端之公螺絲來螺接以及螺鬆該固定螺帽，相對於1個該固定螺帽保持部具備有2個該刀片保持部。 較佳的是，該搬出入機構配設於框體，且該框體呈可滑動地被已配設在升降工作台之在Y軸方向上延伸之導軌支撐，並藉由該Y軸方向定位機構來相對於該切削刀片保管機構定位到Y軸方向的該作用位置與該退避位置。 較佳的是，該搬出入機構配設在已配設於該框體的內部之第一移動體，該第一移動體以被懸吊之狀態可滑動地支撐在已配設在第二移動體的下部之在X軸方向上延伸之第一導軌，該第二移動體以被懸吊之狀態可滑動地支撐在已配設在該框體的頂板部之在X軸方向上延伸之第二導軌，該搬出入機構是藉由該第一移動體以及該第二移動體而構成為在X軸方向上進出自如。 發明效果 Preferably, the cutting blade storage mechanism includes: a driving gear having a rotation shaft extending in the Y-axis direction; a driven gear separated from the driving gear in the Z-axis direction and having a rotation shaft extending in the Y-axis direction; shaft; an endless rail wound around the drive gear and the driven gear; and a support shaft extending in the Y-axis direction and arranged on the endless rail at predetermined intervals, and insertable into the central opening of the cutting blade to support cutting inserts, The cleaning mechanism includes an air nozzle disposed adjacent to the cutting blade storage mechanism, and sprays air to the back surface of the cutting blade held by the carrying-in/out mechanism for cleaning. Preferably, the air nozzle is arranged at the back of the support shaft of the cutting blade storage mechanism, and sprays air on the back of the cutting blade supported by the support shaft to move the cutting blade toward the front end of the support shaft , and the front side of the cutting insert is positioned relative to the carry-in mechanism. Preferably, the carrying-in mechanism includes: a Z rotation shaft extending in the Z-axis direction; a blade holder radially connected to the Z rotation shaft and attracting and holding the cutting blade; and a fixed nut holder for holding the cutting blade. The male screw formed on the front end of the main shaft is used to screw and unscrew the fixing nut, and there are two blade holding parts for one fixing nut holding part. Preferably, the carrying-in/out mechanism is arranged on a frame body, and the frame body is slidably supported by a guide rail extending in the Y-axis direction that has been arranged on the lifting table, and is positioned by the Y-axis direction. The mechanism is used to locate the active position and the retracted position in the Y-axis direction relative to the cutting blade storage mechanism. Preferably, the carrying-in/out mechanism is arranged on the first moving body arranged inside the frame body, and the first moving body is slidably supported on the second moving body arranged in a suspended state. The first guide rail extending in the X-axis direction at the lower part of the body, and the second moving body is slidably supported on the first guide rail extending in the X-axis direction arranged on the top plate of the frame in a suspended state. Two guide rails, the carrying in and out mechanism is configured by the first moving body and the second moving body so that it can move in and out freely in the X-axis direction. Invention effect

本發明之輔助裝置可以在之後裝設到已經交貨給使用者之切削裝置。The auxiliary device according to the invention can then be fitted to the cutting device already delivered to the user.

用以實施發明之形態form for carrying out the invention

以下，針對本發明實施形態之輔助裝置，一面參照圖式一面說明。Hereinafter, an auxiliary device according to an embodiment of the present invention will be described with reference to the drawings.

參照圖1來說明，整體以符號2表示之輔助裝置至少具備：切削刀片保管機構4，保管複數個切削刀片；搬出入機構6，從切削刀片保管機構4保持切削刀片的正面並進行搬出以及搬入；Y軸方向定位機構8，讓搬出入機構6相對於切削刀片保管機構4定位到Y軸方向的作用位置與退避位置；Z軸移動機構10，讓搬出入機構6在Z軸方向上移動；X軸移動機構12，讓搬出入機構6在X軸方向上移動，來作用於已裝設在切削裝置的切削機構的主軸之切削刀片；及洗淨機構13，對已被搬出入機構6保持之切削刀片的背面進行洗淨。Referring to FIG. 1 for illustration, the auxiliary device represented by the symbol 2 as a whole includes at least: a cutting blade storage mechanism 4 for storing a plurality of cutting blades; The positioning mechanism 8 in the Y-axis direction allows the moving-in mechanism 6 to be positioned at the active position and the retreat position in the Y-axis direction relative to the cutting blade storage mechanism 4; the Z-axis moving mechanism 10 allows the moving-in mechanism 6 to move in the Z-axis direction; The X-axis moving mechanism 12 allows the moving mechanism 6 to move in the X-axis direction to act on the cutting blade installed on the main shaft of the cutting mechanism of the cutting device; and the cleaning mechanism 13 keeps the moving mechanism 6 Clean the back of the cutting blade.

再者，X軸方向是在圖1以箭頭X表示之方向，Y軸方向是在圖1以箭頭Y表示之方向且為正交於X軸方向之方向，Z軸方向是在圖1以箭頭Z表示之方向且為正交於X軸方向以及Y軸方向之上下方向。又，X軸方向以及Y軸方向所規定之平面實質上是水平的。Furthermore, the X-axis direction is the direction indicated by the arrow X in FIG. 1, the Y-axis direction is the direction indicated by the arrow Y in FIG. The direction indicated by Z is an up-down direction perpendicular to the X-axis direction and the Y-axis direction. Moreover, the plane defined by the X-axis direction and the Y-axis direction is substantially horizontal.

如圖2所示，切削刀片保管機構4包含：驅動齒輪16，具有在Y軸方向上延伸之旋轉軸14；從動齒輪20，和驅動齒輪16在Z軸方向上分開且具有在Y軸方向上延伸之旋轉軸18；無端軌道22，捲繞於驅動齒輪16與從動齒輪20；及支撐軸24，在Y軸方向上延伸並以預定的間隔配設在無端軌道22，且可***切削刀片的中央開口部來支撐切削刀片。As shown in Figure 2, the cutting blade storage mechanism 4 includes: a driving gear 16 having a rotating shaft 14 extending in the Y-axis direction; a driven gear 20 separated from the driving gear 16 in the Z-axis direction and having a rotating shaft 14 extending in the Y-axis direction; The rotating shaft 18 extending upward; the endless rail 22 wound around the driving gear 16 and the driven gear 20; and the support shaft 24 extending in the Y-axis direction and arranged on the endless rail 22 at predetermined intervals, and can be inserted and cut The central opening of the blade supports the cutting blade.

參照圖1以及圖2來說明，本實施形態之切削刀片保管機構4包含基座板26(參照圖1)、從基座板26的上表面朝上方延伸之支撐壁28、與固定在支撐壁28的單面之馬達30。如圖2所示，在馬達30連結有驅動齒輪16的旋轉軸14，且馬達30形成為以Y軸方向為軸心來使驅動齒輪16旋轉。1 and 2, the cutting blade storage mechanism 4 of the present embodiment includes a base plate 26 (refer to FIG. 1 ), a support wall 28 extending upward from the upper surface of the base plate 26, and a support wall fixed on the support wall. 28 single-sided motors 30. As shown in FIG. 2 , the rotating shaft 14 of the drive gear 16 is connected to the motor 30 , and the motor 30 is formed to rotate the drive gear 16 around the Y-axis direction.

如圖2所示地，從動齒輪20配置於驅動齒輪16的上方，且從動齒輪20的旋轉軸18是以Y軸方向為軸心而旋轉自如且在Z軸方向上升降自如地支撐於支撐壁28。於支撐壁28設置有使從動齒輪20在Z軸方向上升降之升降機構(未圖示)。升降機構亦可為例如以下之構成：具有連結於從動齒輪20的旋轉軸18且在Z軸方向上延伸之滾珠螺桿、及使此滾珠螺桿旋轉之馬達。As shown in FIG. 2 , the driven gear 20 is arranged above the driving gear 16, and the rotating shaft 18 of the driven gear 20 is supported on the Y-axis direction as the axis, and is freely rotatable and can be lifted and lowered in the Z-axis direction. Support wall 28 . The supporting wall 28 is provided with an elevating mechanism (not shown) for elevating the driven gear 20 in the Z-axis direction. The lifting mechanism may have, for example, a ball screw connected to the rotating shaft 18 of the driven gear 20 and extending in the Z-axis direction, and a motor that rotates the ball screw.

無端軌道22是由相互連結的多數個連結片(省略符號)所構成，且捲繞於驅動齒輪16與從動齒輪20。無端軌道22形成為因應於藉由馬達30使驅動齒輪16旋轉而旋轉。再者，圖示之無端軌道22雖然描繪成連結片呈無間隙地配置，但在連結片之間有間隙，而形成為可以讓從後述之空氣噴嘴142所噴附之空氣在連結片之間通過。The endless rail 22 is composed of a plurality of connecting pieces (symbols omitted) connected to each other, and is wound around the driving gear 16 and the driven gear 20 . The endless track 22 is formed to rotate in response to the rotation of the drive gear 16 by the motor 30 . Furthermore, although the endless rail 22 shown in the figure is depicted as connecting pieces arranged without gaps, there is a gap between the connecting pieces, and it is formed so that the air sprayed from the air nozzle 142 described later can flow between the connecting pieces. pass.

在本實施形態之切削刀片保管機構4中是形成為可以藉由以升降機構改變從動齒輪20的Z軸方向的位置，來調整驅動齒輪16與從動齒輪20的Z軸方向之間隔。又，在切削刀片保管機構4中是形成為可以藉由合宜增減無端軌道22的連結片之數量，來調整無端軌道22的長度。In the cutting blade storage mechanism 4 of the present embodiment, the distance between the driving gear 16 and the driven gear 20 in the Z-axis direction can be adjusted by changing the position of the driven gear 20 in the Z-axis direction with the elevating mechanism. Also, the cutting blade storage mechanism 4 is formed so that the length of the endless rail 22 can be adjusted by appropriately increasing or decreasing the number of connecting pieces of the endless rail 22 .

如圖2所示，支撐軸24是隔著預定的間隔而在無端軌道22配設有複數個。又，如藉由將圖3和圖2一起參照所可理解地，支撐軸24具有連結於無端軌道22的圓柱狀的基部32、與從基部32的端面朝Y軸方向延伸之圓柱狀的軸部34。軸部34的直徑比基部32的直徑更小。As shown in FIG. 2 , a plurality of support shafts 24 are arranged on the endless rail 22 at predetermined intervals. Also, as can be understood by referring to FIG. 3 and FIG. 2 together, the support shaft 24 has a cylindrical base 32 connected to the endless rail 22, and a cylindrical base 32 extending from the end surface of the base 32 toward the Y-axis direction. shaft portion 34 . The shaft portion 34 has a smaller diameter than the base portion 32 .

在圖3中也顯示有被支撐軸24所支撐之切削刀片36。圖3所示之切削刀片36是從切削刀片36的正面側所觀看到之切削刀片。切削刀片36具有環狀的基台38、與固定在基台38的外周部之環狀的切刃40。基台38可由鋁合金等合宜的金屬材料來形成。基台38的中央部設置有圓形的中央開口部38a。切刃40由鑽石等之磨粒、與金屬或樹脂等之結合材來形成為預定的厚度(例如10~30μm左右)，且從基台38的外周緣朝徑方向外側突出。Also shown in FIG. 3 is the cutting insert 36 supported by the support shaft 24 . The cutting insert 36 shown in FIG. 3 is a cutting insert viewed from the front side of the cutting insert 36 . The cutting insert 36 has an annular base 38 and an annular cutting edge 40 fixed to the outer peripheral portion of the base 38 . The base 38 can be formed of suitable metal materials such as aluminum alloy. A circular central opening 38 a is provided in the central portion of the base 38 . The cutting edge 40 is formed with a predetermined thickness (for example, about 10 to 30 μm) of abrasive grains such as diamond, and a bonding material such as metal or resin, and protrudes radially outward from the outer peripheral edge of the base 38 .

於支撐軸24中，形成為軸部34可***切削刀片36的中央開口部38a，而以軸部34支撐複數個(例如5個)切削刀片36。在本實施形態中，如藉由參照圖2所可理解地，是在複數個支撐軸24當中一半數量的支撐軸24上支撐有切削刀片36。又，如圖3所示，在軸部34的前端側，在圓周方向上隔著間隔而裝設有複數個定位珠(ball plunger)42，前述複數個定位珠42用於防止以軸部34所支撐之切削刀片36的跑出。In the support shaft 24 , the shaft portion 34 is formed so that it can be inserted into the central opening portion 38 a of the cutting insert 36 , and the plurality of (for example, five) cutting inserts 36 are supported by the shaft portion 34 . In the present embodiment, as can be understood by referring to FIG. 2 , cutting inserts 36 are supported on half the support shafts 24 among the plurality of support shafts 24 . Also, as shown in FIG. 3 , on the front end side of the shaft portion 34, a plurality of positioning beads (ball plunger) 42 are installed at intervals in the circumferential direction, and the aforementioned plurality of positioning beads 42 are used to prevent the shaft portion 34 from The running out of the supported cutting blade 36.

如圖4所示，支撐軸24的各基部32的內部形成有流路32a，且在無端軌道22形成有連通於各流路32a的一端部之複數條流路22a。如圖3所示，各流路32a的另一端部在比軸部34更靠近徑方向外側之基部32的端面形成有開口。As shown in FIG. 4 , a flow path 32 a is formed inside each base portion 32 of the support shaft 24 , and a plurality of flow paths 22 a communicating with one end of each flow path 32 a are formed in the endless rail 22 . As shown in FIG. 3 , the other end portion of each flow path 32 a has an opening formed on the end surface of the base portion 32 that is radially outer than the shaft portion 34 .

參照圖5來說明搬出入機構6。搬出入機構6至少具備在Z軸方向上延伸之Z旋轉軸46、呈放射狀地連結於Z旋轉軸46且吸引保持切削刀片36之刀片保持部48、及對已形成於切削裝置的主軸的前端之公螺絲來螺接以及螺鬆固定螺帽之固定螺帽保持部50。The carry-in/out mechanism 6 will be described with reference to FIG. 5 . The carry-in mechanism 6 includes at least a Z rotation shaft 46 extending in the Z-axis direction, a blade holding portion 48 radially connected to the Z rotation shaft 46 for attracting and holding the cutting blade 36 , and a shaft formed on the main shaft of the cutting device. The male screw at the front end is used for screwing and loosening the fixing nut holding part 50 of the fixing nut.

如圖5所示，本實施形態的搬出入機構6更具備罩殼52，罩殼52具有正六角形狀之頂板54、與從頂板54的周緣垂下之矩形板狀的6個側壁56。從頂板54的上表面突出有上述Z旋轉軸46。在罩殼52的內部容置有連結於Z旋轉軸46之馬達(未圖示)。As shown in FIG. 5 , the loading/unloading mechanism 6 of this embodiment further includes a case 52 having a regular hexagonal top plate 54 and six rectangular plate-shaped side walls 56 hanging from the periphery of the top plate 54 . The aforementioned Z rotation shaft 46 protrudes from the upper surface of the top plate 54 . A motor (not shown) connected to the Z rotation shaft 46 is accommodated inside the housing 52 .

在本實施形態中，在罩殼52的6個側壁56當中，於4個側壁56裝設有刀片保持部48，於2個側壁56裝設有固定螺帽保持部50，且2個固定螺帽保持部50是設置在相向之一對側壁56。像這樣，搬出入機構6相對於1個固定螺帽保持部50具備有2個刀片保持部48。In the present embodiment, among the six side walls 56 of the casing 52, blade holders 48 are installed on four side walls 56, fixing nut holders 50 are installed on two side walls 56, and two fixing nuts are installed. The cap holder 50 is provided on a pair of opposite side walls 56 . In this way, the carrying-in/out mechanism 6 includes two blade holding portions 48 for one fixed nut holding portion 50 .

刀片保持部48形成為圓筒狀，且在刀片保持部48的端面58設有可承接上述支撐軸24的軸部34以及切削裝置的主軸的前端部之圓形的中央開口部60、與在中央開口部60的周圍沿著圓周方向隔著等間隔而配置之複數個吸引孔62。又，各吸引孔62已連接到吸引機構(未圖示)。The blade holder 48 is formed in a cylindrical shape, and the end surface 58 of the blade holder 48 is provided with a circular central opening 60 capable of receiving the shaft portion 34 of the support shaft 24 and the front end of the main shaft of the cutting device. A plurality of suction holes 62 are arranged at equal intervals along the circumferential direction around the central opening 60 . In addition, each suction hole 62 is connected to a suction mechanism (not shown).

在刀片保持部48中形成為：在已定位在刀片保持部48的端面58會接觸於被切削刀片保管機構4所保管之切削刀片36的基台38的位置之狀態下，藉由吸引機構在各吸引孔62生成吸引力來吸引保持切削刀片36。In the insert holding part 48, it is formed so that in the state where the end surface 58 of the insert holding part 48 will contact the base 38 of the cutting insert 36 stored by the cutting insert storing mechanism 4, the suction mechanism Each suction hole 62 generates a suction force to attract and hold the cutting tip 36 .

參照圖5來繼續說明，固定螺帽保持部50包含：圓筒狀的殼體64，固定於罩殼52的側壁56；環狀的旋轉體66，旋轉自如地容置在殼體64的內部；及馬達(未圖示)，使旋轉體66旋轉。Continuing description with reference to FIG. 5 , the fixed nut holder 50 includes: a cylindrical housing 64 fixed to the side wall 56 of the casing 52 ; an annular rotating body 66 rotatably accommodated inside the housing 64 ; and a motor (not shown) to rotate the rotating body 66 .

於旋轉體66形成有可承接切削裝置的主軸的前端部之中央開口部68。於旋轉體66的端面66a，在圓周方向上隔著間隔交互地設置有複數個吸引孔70與複數個銷72。又，各吸引孔70已連接到吸引機構(未圖示)。銷72是藉由內置於旋轉體66的彈簧(未圖示)而定位在從旋轉體66的端面66a突出之位置(圖5所示之位置)，並且若朝向旋轉體66的內部被按壓時，會讓彈簧收縮而容置於旋轉體66的內部。又，銷72和已形成於固定螺帽之銷孔的位置對應而配置。A central opening 68 capable of receiving the front end of the main shaft of the cutting device is formed in the rotating body 66 . A plurality of suction holes 70 and a plurality of pins 72 are alternately provided at intervals in the circumferential direction on the end surface 66 a of the rotating body 66 . In addition, each suction hole 70 is connected to a suction mechanism (not shown). The pin 72 is positioned at a position protruding from the end surface 66a of the rotating body 66 (the position shown in FIG. 5 ) by a spring (not shown) built in the rotating body 66, and when pressed toward the inside of the rotating body 66 , the spring will contract and be accommodated inside the rotating body 66 . In addition, the pin 72 is arranged corresponding to the position of the pin hole formed in the fixing nut.

在固定螺帽保持部50中，形成為以吸引機構在各吸引孔70生成吸引力來吸引保持固定螺帽，並且在已將銷72***形成於固定螺帽之銷孔的狀態下，藉由馬達使旋轉體66旋轉，藉此可以對已形成於主軸的前端之公螺絲來螺接以及螺鬆用於將切削刀片36固定於切削裝置的主軸之固定螺帽。In the fixing nut holding part 50, the suction mechanism is formed to generate suction force in each suction hole 70 to attract and hold the fixing nut, and in the state where the pin 72 is inserted into the pin hole formed in the fixing nut, by The motor rotates the rotator 66, whereby the male screw formed on the front end of the main shaft can be screwed and the fixing nut for fixing the cutting blade 36 to the main shaft of the cutting device can be screwed and unscrewed.

再者，在將固定螺帽從主軸螺鬆(取下)時，即使在固定螺帽保持部50的銷72的位置與固定螺帽的銷孔的位置已偏離的情況下，仍可將旋轉體66的端面66a定位在已裝設於主軸之固定螺帽的端面，並且若在將銷72容置於旋轉體66的內部之後，藉由馬達使旋轉體66旋轉，銷72會在銷72的位置對齊於銷孔的位置時被彈簧推出，而可對銷孔***銷72。Furthermore, when the fixing nut is screwed (removed) from the main shaft, even if the position of the pin 72 of the fixing nut holding part 50 deviates from the position of the pin hole of the fixing nut, the rotating shaft can still be rotated. The end surface 66a of the body 66 is positioned on the end surface of the fixed nut installed on the main shaft, and if the rotation body 66 is rotated by the motor after the pin 72 is accommodated inside the rotation body 66, the pin 72 will be on the pin 72. When the position of the pin hole is aligned with the position of the pin hole, it is pushed out by the spring, and the pin 72 can be inserted into the pin hole.

可如上述地構成之搬出入機構6，在本實施形態中是如圖1所示地配設在框體74的內部。框體74是在Y軸方向上移動自如地支撐於升降工作台76，且升降工作台76是在Z軸方向上升降自如地支撐於基座架台78。The carry-in/out mechanism 6 that can be configured as described above is arranged inside the frame body 74 as shown in FIG. 1 in this embodiment. The housing 74 is movably supported in the Y-axis direction by an elevating table 76 , and the elevating table 76 is supported by a base frame 78 in a Z-axis direction so as to be able to move up and down.

若將圖6和圖1一起參照來說明，框體74包含矩形板狀的底部80、從底部80的上表面四個角落朝上方延伸之4個支柱82、及固定於各支柱82的上端之板狀的頂板部84(參照圖1)。在底部80的下表面，在X軸方向上隔著間隔而設置有一對被導引構件86，前述被導引構件86形成有在Y軸方向上延伸之溝86a。If Fig. 6 and Fig. 1 are referred to illustrate together, frame body 74 comprises the bottom 80 of rectangular plate shape, four pillars 82 extending upwards from the four corners of the upper surface of bottom 80, and is fixed on the upper end of each pillar 82. Plate-shaped top plate portion 84 (see FIG. 1 ). On the lower surface of the bottom portion 80, a pair of guided members 86 are provided at intervals in the X-axis direction. The guided members 86 are formed with grooves 86a extending in the Y-axis direction.

升降工作台76包含矩形狀的頂板88、與從頂板88的下表面四個角落朝下方延伸之4個圓柱狀的腳部90。在頂板88的上表面設置有在X軸方向上隔著間隔且在Y軸方向上延伸之一對導軌92，且一對導軌92滑動自如地嵌合於框體74的一對被導引構件86的溝86a。The elevating table 76 includes a rectangular top plate 88 and four cylindrical legs 90 extending downward from four corners of the lower surface of the top plate 88 . A pair of guide rails 92 extending in the Y-axis direction at intervals in the X-axis direction is provided on the upper surface of the top plate 88 , and the pair of guide rails 92 are slidably fitted into a pair of guided members of the frame body 74 . 86 groove 86a.

又，在升降工作台76的頂板88的上表面設置有Y軸方向定位機構8。Y軸方向定位機構8具有在一對導軌92間在Y軸方向上延伸之滾珠螺桿94、與使滾珠螺桿94旋轉之馬達96。滾珠螺桿94的螺帽部(未圖示)已固定在框體74的底部80的下表面。In addition, the Y-axis direction positioning mechanism 8 is provided on the upper surface of the top plate 88 of the elevating table 76 . The Y-axis direction positioning mechanism 8 includes a ball screw 94 extending in the Y-axis direction between a pair of guide rails 92 , and a motor 96 that rotates the ball screw 94 . A nut portion (not shown) of the ball screw 94 is fixed to the lower surface of the bottom portion 80 of the housing 74 .

在Y軸方向定位機構8中，藉由滾珠螺桿94將馬達96的旋轉運動轉換成直線運動並傳達至框體74，而使框體74沿著一對導軌92在Y軸方向上移動。如此，配設有搬出入機構6之框體74形成為可滑動地支撐在已配設於升降工作台76之在Y軸方向上延伸之導軌92，且可藉由Y軸方向定位機構8來相對於切削刀片保管機構4定位到Y軸方向的作用位置與退避位置。In the Y-axis direction positioning mechanism 8 , the ball screw 94 converts the rotational motion of the motor 96 into linear motion and transmits it to the frame body 74 , so that the frame body 74 moves in the Y-axis direction along a pair of guide rails 92 . In this way, the frame body 74 equipped with the carrying-in/out mechanism 6 is formed to be slidably supported on the guide rail 92 extending in the Y-axis direction provided on the elevating table 76, and can be positioned by the Y-axis direction positioning mechanism 8. The active position and retracted position in the Y-axis direction are positioned relative to the cutting insert storage mechanism 4 .

上述作用位置是搬出入機構6的刀片保持部48接近於切削刀片保管機構4的位置，且為可藉由刀片保持部48吸引保持已支撐於切削刀片保管機構4之切削刀片36的位置。又，上述退避位置是搬出入機構6的刀片保持部48比上述作用位置更遠離切削刀片保管機構4之位置。The above-mentioned active position is the position where the blade holder 48 of the carry-in mechanism 6 is close to the cutting blade storage mechanism 4 , and is a position where the cutting blade 36 supported by the cutting blade storage mechanism 4 can be sucked and held by the blade holder 48 . In addition, the retracted position is a position where the insert holding portion 48 of the carry-in/unload mechanism 6 is farther from the cutting insert storage mechanism 4 than the active position.

如圖6所示，基座架台78包含框架98、與固定於框架98的上部之矩形狀的基座板100。在基座板100的四個角落形成有供升降工作台76的腳部90滑動自如地***之4個圓形孔102。又，基座板100的中央部形成有母螺絲104。As shown in FIG. 6 , the base stand 78 includes a frame 98 and a rectangular base plate 100 fixed to the upper portion of the frame 98 . Four circular holes 102 into which the legs 90 of the elevating table 76 are slidably inserted are formed at four corners of the base plate 100 . In addition, a female screw 104 is formed at the central portion of the base plate 100 .

參照圖6繼續說明，在升降工作台76以及基座架台78連結有Z軸移動機構10。Z軸移動機構10包含在Z軸方向上延伸之滾珠螺桿106、使滾珠螺桿106旋轉之馬達108、與固定於馬達108的上端之連結板110。滾珠螺桿106已螺合於基座板100的母螺絲104。連結板110可藉由螺栓(未圖示)等之合宜的連結機構而固定到升降工作台76的頂板88的下表面。Continuing the description with reference to FIG. 6 , the Z-axis moving mechanism 10 is connected to the elevating table 76 and the base frame 78 . The Z-axis moving mechanism 10 includes a ball screw 106 extending in the Z-axis direction, a motor 108 for rotating the ball screw 106 , and a connecting plate 110 fixed to the upper end of the motor 108 . The ball screw 106 has been screwed to the female screw 104 of the base plate 100 . The connecting plate 110 can be fixed to the lower surface of the top plate 88 of the elevating table 76 by a suitable connecting mechanism such as bolts (not shown).

在Z軸移動機構10中，是藉由滾珠螺桿106將馬達108的旋轉運動轉換成直線運動，而使升降工作台76相對於基座架台78升降，藉此使配設有搬出入機構6之框體74在Z軸方向上移動。In the Z-axis moving mechanism 10, the ball screw 106 converts the rotational motion of the motor 108 into a linear motion, so that the elevating table 76 is raised and lowered relative to the base frame 78, thereby making the machine equipped with the carrying-in and out-in mechanism 6 The housing 74 moves in the Z-axis direction.

參照圖7來說明，搬出入機構6配設在已配設於框體74的內部之第一移動體112，且第一移動體112以被懸吊之狀態可滑動地支撐在已配設在第二移動體114的下部之在X軸方向上延伸之第一導軌116，第二移動體114以被懸吊之狀態可滑動地支撐在已配設在框體74的頂板部84之在X軸方向上延伸之第二導軌118。Referring to Fig. 7, the carrying-in/out mechanism 6 is disposed on the first moving body 112 disposed inside the frame body 74, and the first moving body 112 is slidably supported on the state of being suspended. The first guide rail 116 extending in the X-axis direction at the lower part of the second moving body 114, the second moving body 114 is slidably supported on the top plate portion 84 of the frame body 74 in the X-axis in a suspended state. The second guide rail 118 extending in the axial direction.

第一移動體112具有矩形板狀的本體120。本體120的中央部形成有圓形孔122。可在圓形孔122***搬出入機構6的Z旋轉軸46，且Z旋轉軸46呈無法旋轉地固定於本體120。若驅動已連結於Z旋轉軸46之搬出入機構6的馬達時，搬出入機構6的罩殼52即相對於第一移動體112旋轉，且可將刀片保持部48以及固定螺帽保持部50定位到任意的方向。The first moving body 112 has a rectangular plate-shaped body 120 . A circular hole 122 is formed in a central portion of the body 120 . The Z rotation shaft 46 of the carry-in/out mechanism 6 can be inserted into the circular hole 122 , and the Z rotation shaft 46 is fixed to the main body 120 in a non-rotatable manner. When the motor of the carry-in mechanism 6 that has been connected to the Z rotation shaft 46 is driven, the cover 52 of the carry-in mechanism 6 rotates relative to the first moving body 112, and the blade holder 48 and the fixed nut holder 50 can be rotated. Orientate in any direction.

在第一移動體112的本體120的上表面，在Y軸方向上隔著間隔而設置有一對被導引構件124，並且固定有塊體126，前述一對被導引構件124形成有在X軸方向上延伸之溝124a，前述塊體126形成有在X軸方向上延伸之貫通孔126a。On the upper surface of the main body 120 of the first mobile body 112, a pair of guided members 124 are provided at intervals in the Y-axis direction, and a block 126 is fixed. The groove 124a extending in the axial direction, and the block body 126 is formed with a through hole 126a extending in the X-axis direction.

第二移動體114具有矩形板狀的本體128，且在本體128的下表面在Y軸方向上隔著間隔而設置有一對第一導軌116。第一導軌116滑動自如地嵌合於第一移動體112的一對被導引構件124的溝124a，且第一移動體112以被懸吊之狀態可滑動地支撐在已配設在第二移動體114之第一導軌116。The second moving body 114 has a rectangular plate-shaped main body 128 , and a pair of first guide rails 116 are provided on the lower surface of the main body 128 at intervals in the Y-axis direction. The first guide rail 116 is slidably fitted in the grooves 124a of the pair of guided members 124 of the first moving body 112, and the first moving body 112 is slidably supported on the second rail which has been arranged in a suspended state. The first guide rail 116 of the moving body 114 .

在第二移動體114的本體128的下方設置有使第一移動體112相對於第二移動體114在X軸方向上移動之第一X軸移動機構。本實施形態的第一X軸移動機構是由氣缸130所構成。氣缸130的壓缸管130a固定在本體128的下表面，且在一對第一導軌116之間朝X軸方向延伸。氣缸130的活塞桿130b的前端已嵌合並連結於第一移動體112的塊體126的貫通孔126a。A first X-axis moving mechanism for moving the first moving body 112 relative to the second moving body 114 in the X-axis direction is disposed below the main body 128 of the second moving body 114 . The first X-axis moving mechanism of this embodiment is constituted by the air cylinder 130 . The cylinder tube 130 a of the air cylinder 130 is fixed on the lower surface of the main body 128 and extends between the pair of first guide rails 116 toward the X-axis direction. The front end of the piston rod 130 b of the air cylinder 130 is fitted and connected to the through hole 126 a of the block body 126 of the first moving body 112 .

作為第一X軸移動機構的氣缸130是藉由使活塞桿130b進退，而使第一移動體112相對於第二移動體114沿著第一導軌116在X軸方向上移動。The air cylinder 130 as the first X-axis moving mechanism moves the first moving body 112 in the X-axis direction along the first guide rail 116 relative to the second moving body 114 by advancing and retreating the piston rod 130 b.

在第二移動體114的本體128的上表面，在Y軸方向上隔著間隔而設置有一對被導引構件132，並且固定有塊體134，前述一對被導引構件132形成有在X軸方向上延伸之溝132a，前述塊體134形成有在X軸方向上延伸之母螺絲134a。On the upper surface of the main body 128 of the second moving body 114, a pair of guided members 132 are provided at intervals in the Y-axis direction, and a block 134 is fixed. A groove 132a extending in the axial direction, and the block 134 is formed with a female screw 134a extending in the X-axis direction.

在框體74的頂板部84的下表面在Y軸方向上隔著間隔而設置有一對第二導軌118。第二導軌118滑動自如地嵌合於第二移動體114的一對被導引構件132的溝132a，且第二移動體114以被懸吊之狀態可滑動地支撐在已配設在頂板部84之第二導軌118。A pair of second guide rails 118 are provided at intervals in the Y-axis direction on the lower surface of the top plate portion 84 of the housing 74 . The second guide rail 118 is slidably fitted in the grooves 132a of the pair of guided members 132 of the second moving body 114, and the second moving body 114 is slidably supported on the top plate portion in a suspended state. 84 of the second guide rail 118.

在框體74的頂板部84的下方設置有使第二移動體114相對於頂板部84在X軸方向上移動之第二X軸移動機構136。本實施形態的第二X軸移動機構136具有在一對第二導軌118間在X軸方向上延伸之滾珠螺桿138、與使滾珠螺桿138旋轉之馬達140。滾珠螺桿138是螺合於第二移動體114的塊體134的母螺絲134a，且馬達140是固定在頂板部84的下表面。A second X-axis moving mechanism 136 for moving the second moving body 114 in the X-axis direction relative to the top plate 84 is provided below the top plate 84 of the frame body 74 . The second X-axis moving mechanism 136 of the present embodiment includes a ball screw 138 extending in the X-axis direction between a pair of second guide rails 118 and a motor 140 that rotates the ball screw 138 . The ball screw 138 is a female screw 134 a screwed to the block body 134 of the second moving body 114 , and the motor 140 is fixed on the lower surface of the top plate portion 84 .

第二X軸移動機構136是藉由滾珠螺桿138而將馬達140的旋轉運動轉換成直線運動並傳達至第二移動體114，而使第二移動體114相對於頂板部84沿著第二導軌118在X軸方向上移動。The second X-axis moving mechanism 136 converts the rotational motion of the motor 140 into a linear motion through the ball screw 138 and transmits it to the second moving body 114, so that the second moving body 114 moves along the second guide rail relative to the top plate portion 84 118 moves in the X-axis direction.

本實施形態之X軸移動機構12包含作為第一X軸移動機構之氣缸130、與具有滾珠螺桿138以及馬達140之第二X軸移動機構136。在本實施形態中，藉由以作為第一X軸移動機構之氣缸130使第一移動體112移動，而形成為可以使搬出入機構6快速地在X軸方向上前進，並且可以藉由以第二X軸移動機構136使第二移動體114移動，而容易地對搬出入機構6的X軸方向位置進行微調整。像這樣，搬出入機構6構成為藉由第一移動體112以及第二移動體114而在X軸方向上進出自如。The X-axis moving mechanism 12 of this embodiment includes an air cylinder 130 as a first X-axis moving mechanism, and a second X-axis moving mechanism 136 having a ball screw 138 and a motor 140 . In the present embodiment, by moving the first moving body 112 with the air cylinder 130 as the first X-axis moving mechanism, it is formed so that the carrying-in/out mechanism 6 can advance rapidly in the X-axis direction, and can be moved by using The second X-axis moving mechanism 136 moves the second moving body 114 to easily finely adjust the position in the X-axis direction of the carry-in/out mechanism 6 . In this way, the carry-in/out mechanism 6 is configured to be able to move in and out in the X-axis direction by the first moving body 112 and the second moving body 114 .

參照圖1、圖2以及圖8來說明，洗淨機構13具備空氣噴嘴142，前述空氣噴嘴142相鄰於切削刀片保管機構4而配設，且對已被搬出入機構6保持之切削刀片36的背面噴附空氣來進行洗淨。空氣噴嘴142已連接於高壓空氣供給機構(未圖示)。Referring to Fig. 1, Fig. 2 and Fig. 8, the cleaning mechanism 13 is equipped with an air nozzle 142, and the aforementioned air nozzle 142 is arranged adjacent to the cutting blade storage mechanism 4, and the cutting blade 36 that has been carried in and out by the mechanism 6 is retained. Air is sprayed on the back side for cleaning. The air nozzle 142 is connected to a high-pressure air supply mechanism (not shown).

本實施形態之空氣噴嘴142是配設在切削刀片保管機構4的支撐軸24的背部。具體而言，如圖1以及圖2所示，空氣噴嘴142是在切削刀片保管機構4的驅動齒輪16的下方，從支撐壁28朝Y軸方向突出。又，空氣噴嘴142的前端是定位成和以下的支撐軸24相面對：伴隨於無端軌道22旋轉之支撐軸24之在軌道中位於最下端之支撐軸24。The air nozzle 142 of this embodiment is arranged on the back of the support shaft 24 of the cutting blade storage mechanism 4 . Specifically, as shown in FIGS. 1 and 2 , the air nozzle 142 protrudes from the support wall 28 in the Y-axis direction below the drive gear 16 of the cutting blade storage mechanism 4 . Also, the front end of the air nozzle 142 is positioned to face the following support shafts 24 : the support shaft 24 that is located at the lowest end in the track along with the support shaft 24 that rotates with the endless track 22 .

並且，如圖8所示，在洗淨機構13中是形成為藉由從空氣噴嘴142朝向已被搬出入機構6的刀片保持部48所吸引保持之切削刀片36的背面噴附空氣，來洗淨切削刀片36的背面。And, as shown in FIG. 8 , in the cleaning mechanism 13, air is sprayed from the air nozzle 142 toward the back surface of the cutting blade 36 sucked and held by the blade holding portion 48 of the carrying-in/out mechanism 6 to clean the blade. The back of the blade 36 is cleanly cut.

從空氣噴嘴142對切削刀片36噴附空氣時，是將無端軌道22作動成支撐軸24不會位於空氣噴嘴142的前端。藉此，不會有從空氣噴嘴142所噴附之空氣受到支撐軸24阻擋之情形。又，如上述，雖然圖示的無端軌道22描繪成連結片呈無間隙地配置，但由於連結片之間有間隙，且從空氣噴嘴142所噴附之空氣可以在連結片之間通過，因此不會有利用空氣所進行之切削刀片36的洗淨被無端軌道22的連結片阻礙之情形。When spraying air from the air nozzle 142 to the cutting blade 36 , the endless rail 22 is operated so that the support shaft 24 is not positioned at the front end of the air nozzle 142 . Thereby, the air sprayed from the air nozzle 142 is not blocked by the support shaft 24 . Also, as mentioned above, although the illustrated endless rail 22 is depicted as connecting pieces arranged without gaps, since there are gaps between the connecting pieces, and the air sprayed from the air nozzle 142 can pass between the connecting pieces, so The cleaning of the cutting blade 36 by air will not be hindered by the connecting piece of the endless rail 22 .

此外，在洗淨機構13的空氣噴嘴142中，也可以將空氣噴附到被支撐軸24支撐之切削刀片36的背部，來使切削刀片36朝支撐軸24的前端移動，而相對於搬出入機構6來定位切削刀片36的正面。In addition, in the air nozzle 142 of the cleaning mechanism 13, air may also be sprayed onto the back of the cutting blade 36 supported by the support shaft 24, so that the cutting blade 36 moves toward the front end of the support shaft 24, and relative to the carrying in and out mechanism 6 to position the front face of the cutting blade 36 .

參照圖4來說明，在藉由搬出入機構6將位於支撐軸24的軸部34的前端側之切削刀片36搬出的情況下，形成為可以藉由從空氣噴嘴142透過無端軌道22之流路22a來對支撐軸24的基部32的流路32a供給空氣，而將留在軸部34的切削刀片36朝軸部34的前端側推出。不過，因為定位珠42的作用而不會有切削刀片36從軸部34掉落之情形。再者，在該情況下，會將無端軌道22的流路22a定位在和空氣噴嘴142面對之位置。Referring to FIG. 4 , when the cutting blade 36 located at the front end side of the shaft portion 34 of the support shaft 24 is carried out by the carry-out mechanism 6 , it is formed so that the air nozzle 142 can pass through the flow path of the endless rail 22 . 22a to supply air to the flow path 32a of the base portion 32 of the support shaft 24, and push the cutting blade 36 remaining on the shaft portion 34 toward the front end side of the shaft portion 34. However, the cutting blade 36 does not fall off the shaft portion 34 because of the positioning bead 42 . Furthermore, in this case, the flow path 22 a of the endless rail 22 is positioned to face the air nozzle 142 .

其次，參照圖9至圖14來說明連結有上述之輔助裝置2之切削裝置170。Next, the cutting device 170 to which the above-mentioned auxiliary device 2 is connected will be described with reference to FIGS. 9 to 14 .

如圖9所示，切削裝置170具備：工作夾台172，具備有保持被加工物之保持面；切削機構174，以固定螺帽裝設有切削刀片，前述切削刀片對已保持在工作夾台172之被加工物進行切削；X軸進給機構176，使工作夾台172在X軸方向上加工進給；Y軸進給機構178，使切削機構174在和X軸方向正交之Y軸方向上分度進給；及Z軸進給機構180，使切削機構174在和X軸方向以及Y軸方向正交之Z軸方向上切入進給。As shown in Figure 9, the cutting device 170 is provided with: a work clamp table 172, which is provided with a holding surface for holding the workpiece; 172, the workpiece is cut; the X-axis feed mechanism 176 makes the work clamp table 172 process and feed in the X-axis direction; the Y-axis feed mechanism 178 makes the cutting mechanism 174 in the Y-axis orthogonal to the X-axis direction and the Z-axis feed mechanism 180, so that the cutting mechanism 174 cuts and feeds in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction.

參照圖9以及圖10來說明，切削裝置170具備在基台182(參照圖9)的上表面以在X軸方向上移動自如的方式設置之X軸可動板184、固定於X軸可動板184的上表面之支柱186、與固定於支柱186的上端之罩板188。在罩板188形成有圓形開口188a。工作夾台172是旋轉自如地搭載在支柱186的上端，且通過罩板188的圓形開口188a而朝上方延伸。工作夾台172是藉由內置於支柱186之馬達(未圖示)而以Z軸方向作為軸心來旋轉。9 and 10, the cutting device 170 is provided with an X-axis movable plate 184 provided on the upper surface of the base 182 (refer to FIG. 9 ) to be movable in the X-axis direction, and fixed to the X-axis movable plate 184 The pillar 186 on the upper surface of the pillar 186 and the cover plate 188 fixed on the upper end of the pillar 186. A circular opening 188 a is formed in the cover plate 188 . The work chuck 172 is rotatably mounted on the upper end of the pillar 186 and extends upward through the circular opening 188 a of the cover plate 188 . The work chuck 172 is rotated around the Z-axis direction by a motor (not shown) built in the support 186 .

如圖10所示，在工作夾台172的上端部分配置有已連接到吸引機構(未圖示)之多孔質的圓形狀的吸附夾頭190。並且，在工作夾台172中形成為藉由以吸引機構在吸附夾頭190的上表面生成吸引力，而吸引保持已載置在吸附夾頭190的上表面之被加工物。如此，在工作夾台172中，吸附夾頭190的上表面會成為保持被加工物之保持面，且保持面是定位在以X軸方向以及Y軸方向所規定之XY平面上。又，在工作夾台172的周緣，於圓周方向上隔著間隔而配置有複數個夾具192。As shown in FIG. 10 , a porous circular suction chuck 190 connected to a suction mechanism (not shown) is disposed on the upper end portion of the chuck table 172 . In addition, the workpiece placed on the upper surface of the suction chuck 190 is sucked and held in the chuck table 172 by generating suction force on the upper surface of the suction chuck 190 by the suction mechanism. In this way, in the work chuck 172, the upper surface of the suction chuck 190 becomes a holding surface for holding the workpiece, and the holding surface is positioned on the XY plane defined by the X-axis direction and the Y-axis direction. In addition, a plurality of jigs 192 are arranged at intervals in the circumferential direction on the peripheral edge of the work jig table 172 .

如圖10所示，X軸進給機構176具有連結於X軸可動板184並在X軸方向上延伸之滾珠螺桿198、與使滾珠螺桿198旋轉之馬達200。X軸進給機構176藉由滾珠螺桿198將馬達200的旋轉運動轉換成直線運動並傳達至X軸可動板184，使X軸可動板184沿著基台182的引導軌道182a移動，並且使工作夾台172在X軸方向上加工進給。As shown in FIG. 10 , the X-axis feed mechanism 176 includes a ball screw 198 that is connected to the X-axis movable plate 184 and extends in the X-axis direction, and a motor 200 that rotates the ball screw 198 . The X-axis feed mechanism 176 converts the rotational motion of the motor 200 into a linear motion through the ball screw 198 and transmits it to the X-axis movable plate 184, so that the X-axis movable plate 184 moves along the guide rail 182a of the base 182, and makes the work The clamp table 172 is processed and fed in the X-axis direction.

如圖9所示，切削裝置170包含橫跨工作夾台172而配置之門型的框架202。框架202具有在Y軸方向上隔著間隔而從基台182的上表面朝上方延伸之一對支柱204、與橫跨架設在一對支柱204的上端間而在Y軸方向上延伸之樑206。As shown in FIG. 9 , the cutting device 170 includes a door-shaped frame 202 arranged across the work chuck 172 . The frame 202 has a pair of pillars 204 extending upward from the upper surface of the base 182 at intervals in the Y-axis direction, and a beam 206 extending in the Y-axis direction across the upper ends of the pair of pillars 204 . .

切削機構174是在樑206的單側的側面(在圖9中為背面側的側面)於Y軸方向上隔著間隔而設置有一對。在本實施形態之切削裝置170中，是以讓切削刀片36相面對的方式而設置有一對切削機構174，且形成為可以藉由一對切削刀片36同時地對已保持在工作夾台172之被加工物施行切削加工。再者，切削機構174亦可為1個。A pair of cutting mechanisms 174 are provided on one side of the beam 206 (the back side in FIG. 9 ) at intervals in the Y-axis direction. In the cutting device 170 of this embodiment, a pair of cutting mechanisms 174 is provided so that the cutting blades 36 face each other, and it is formed so that the pair of cutting blades 36 can be simultaneously held on the work chuck 172 The workpiece is subjected to cutting processing. Furthermore, the cutting mechanism 174 may be one.

如圖11所示，各切削機構174具備在Y軸方向上移動自如地支撐於樑206的單側的側面之矩形狀的Y軸可動構件208、在Z軸方向上升降自如地支撐於Y軸可動構件208之截面L字形的Z軸可動構件210、與固定在Z軸可動構件210的下端之主軸殼體212。As shown in FIG. 11 , each cutting mechanism 174 includes a rectangular Y-axis movable member 208 movably supported on one side surface of the beam 206 in the Y-axis direction, and a rectangular Y-axis movable member 208 supported in the Z-axis direction on the Y-axis so that it can move up and down in the Z-axis direction. The movable member 208 is a Z-axis movable member 210 with an L-shaped cross section, and a main shaft housing 212 fixed to the lower end of the Z-axis movable member 210 .

在Y軸可動構件208的單側的側面(在圖11中為近前側的側面)，形成有在Z軸方向上隔著間隔而在Y軸方向上延伸之一對被引導溝208a，被引導溝208a以滑動自如的方式連結於一對引導軌道(未圖示)，前述一對引導軌道在樑206的單側的側面且在上下方向上隔著間隔而在Y軸方向上延伸。A pair of guided grooves 208a extending in the Y-axis direction at intervals in the Z-axis direction are formed on one side of the Y-axis movable member 208 (the front side in FIG. 11 ). The groove 208a is slidably connected to a pair of guide rails (not shown) extending in the Y-axis direction on one side surface of the beam 206 with an interval in the vertical direction.

Y軸進給機構178具有在樑206的單側的側面且在Y軸方向上延伸之滾珠螺桿214、與使滾珠螺桿214旋轉之馬達216。滾珠螺桿214已連結於Y軸可動構件208。Y軸進給機構178是藉由滾珠螺桿214將馬達216的旋轉運動轉換成直線運動並傳達至Y軸可動構件208，而將Y軸可動構件208沿著附設於樑206的單側的側面之引導軌道在Y軸方向上分度進給。The Y-axis feed mechanism 178 includes a ball screw 214 extending in the Y-axis direction on one side of the beam 206 , and a motor 216 that rotates the ball screw 214 . The ball screw 214 is connected to the Y-axis movable member 208 . The Y-axis feed mechanism 178 converts the rotational motion of the motor 216 into a linear motion through the ball screw 214 and transmits it to the Y-axis movable member 208, so that the Y-axis movable member 208 is attached to one side of the beam 206 along the The guide rail is indexed and fed in the Y-axis direction.

在Y軸可動構件208的另一側的側面(在圖11中為背面側的側面)形成有在Y軸方向上隔著間隔而在Z軸方向上延伸之一對引導軌道(未圖示)，Z軸可動構件210具有滑動自如地連結於Y軸可動構件208的一對引導軌道之一對被引導溝(未圖示)。A pair of guide rails (not shown) extending in the Z-axis direction at intervals in the Y-axis direction is formed on the other side of the Y-axis movable member 208 (the rear side in FIG. 11 ). The Z-axis movable member 210 has a pair of guided grooves (not shown) of a pair of guide rails slidably connected to the Y-axis movable member 208 .

Z軸進給機構180具有連結於Z軸可動構件210且在Z軸方向上延伸之滾珠螺桿(未圖示)、與使此滾珠螺桿旋轉之馬達218。Z軸進給機構180是藉由滾珠螺桿將馬達218的旋轉運動轉換成直線運動並傳達至Z軸可動構件210，而將Z軸可動構件210沿著Y軸可動構件208的引導軌道朝Z軸方向切入進給。The Z-axis feed mechanism 180 has a ball screw (not shown) that is connected to the Z-axis movable member 210 and extends in the Z-axis direction, and a motor 218 that rotates the ball screw. The Z-axis feed mechanism 180 converts the rotational motion of the motor 218 into a linear motion through a ball screw and transmits it to the Z-axis movable member 210, and moves the Z-axis movable member 210 toward the Z-axis along the guide track of the Y-axis movable member 208. Direction plunge feed.

參照圖12來說明，在主軸殼體212中以Y軸方向作為軸心而旋轉自如地支撐有圓柱狀的主軸220，並且容置有使主軸220旋轉之馬達(未圖示)。在主軸220的前端，藉由固定螺帽222而裝卸自如地固定有切削被加工物之切削刀片36。Referring to FIG. 12 , a cylindrical main shaft 220 is rotatably supported in the main shaft case 212 with the Y-axis direction as an axis, and a motor (not shown) for rotating the main shaft 220 is accommodated. A cutting tip 36 for cutting a workpiece is detachably fixed to the front end of the spindle 220 by a fixing nut 222 .

主軸殼體212的前端裝設有覆蓋切削刀片36之刀片蓋224。刀片蓋224具有固定於主軸殼體212的前端之第一罩蓋構件224a、與移動自如地裝設在第一罩蓋構件224a的前端之第二罩蓋構件224b。第二罩蓋構件224b形成為可藉由氣缸等之合宜的致動器(未圖示)而在X軸方向上移動，且在切削刀片36的更換時是定位在圖12所示之開放位置，在切削加工時則是定位在圖11所示之封閉位置。The front end of the spindle housing 212 is provided with a blade cover 224 covering the cutting blade 36 . The blade cover 224 has a first cover member 224a fixed on the front end of the spindle housing 212, and a second cover member 224b movably installed on the front end of the first cover member 224a. The second cover member 224b is formed to be movable in the X-axis direction by a suitable actuator (not shown) such as an air cylinder, and is positioned at the open position shown in FIG. 12 when the cutting blade 36 is replaced. , then be positioned at the closed position shown in Figure 11 during cutting.

如圖13所示，在主軸220的前端側外周面設置有朝徑方向外側突出之環狀的安裝座凸緣226。在安裝座凸緣226的前端面的徑方向內側部分形成有環狀的凹處226a，安裝座凸緣226的前端面的外周側部分是成為朝軸方向突出之環狀的承受部226b。又，在主軸220之比安裝座凸緣226更前端側的外周面形成有公螺絲228。As shown in FIG. 13 , an annular mounting seat flange 226 protruding radially outward is provided on the front end side outer peripheral surface of the main shaft 220 . An annular recess 226a is formed at the radially inner portion of the front end surface of the mounting seat flange 226, and an annular receiving portion 226b protruding in the axial direction is formed at the outer peripheral portion of the front end surface of the mounting seat flange 226. In addition, a male screw 228 is formed on the outer peripheral surface of the main shaft 220 on the front end side of the attachment flange 226 .

並且，藉由將切削刀片36的中央開口部38a嵌合於主軸220的前端部，且螺接(緊固)主軸220的公螺絲228與固定螺帽222，切削刀片36會被安裝座凸緣226的承受部226b與固定螺帽222夾入而呈裝卸自如地固定在主軸220的前端。又，在固定螺帽222的側面，在圓周方向上隔著等間隔而形成有複數個銷孔222a，前述銷孔222a可供搬出入機構6的固定螺帽保持部50的銷72***。And, by fitting the central opening portion 38a of the cutting insert 36 into the front end portion of the main shaft 220, and screwing (fastening) the male screw 228 and the fixing nut 222 of the main shaft 220, the cutting insert 36 will be mounted on the flange of the seat. The receiving portion 226 b of the shaft 226 is sandwiched by the fixing nut 222 to be detachably fixed to the front end of the main shaft 220 . Also, a plurality of pin holes 222a are formed at equal intervals in the circumferential direction on the side surface of the fixed nut 222, and the pin holes 222a are inserted into the pins 72 of the fixed nut holding part 50 of the carry-in mechanism 6.

如圖9所示，在框架202的樑206的另一側的側面(在圖9中為近前側的側面)以在Y軸方向上移動自如的方式裝設有對已保持在工作夾台172之被加工物進行拍攝之一對拍攝機構230，並且裝設有使拍攝機構230在Y軸方向上移動一對移動機構232。移動機構232具有在樑206的另一側的側面且在Y軸方向上延伸之滾珠螺桿234、與使滾珠螺桿234旋轉之馬達236。滾珠螺桿234已連結於拍攝機構230。並且，移動機構232是將馬達236的旋轉運動轉換成直線運動並傳達至拍攝機構230，使拍攝機構230沿著附設於樑206的另一側的側面之引導軌道206a在Y軸方向上移動。再者，拍攝機構230亦可為1個。As shown in FIG. 9 , on the side surface on the other side of the beam 206 of the frame 202 (in FIG. 9 , the side surface on the near side), a pair of clamping tables 172 held on the work clamp table 172 is installed in a movable manner in the Y-axis direction. A pair of photographing mechanisms 230 for photographing the workpiece, and a pair of moving mechanisms 232 for moving the photographing mechanism 230 in the Y-axis direction. The moving mechanism 232 has a ball screw 234 extending in the Y-axis direction on the other side of the beam 206 , and a motor 236 that rotates the ball screw 234 . The ball screw 234 is connected to the camera mechanism 230 . Moreover, the moving mechanism 232 converts the rotational motion of the motor 236 into a linear motion and transmits it to the camera mechanism 230, so that the camera mechanism 230 moves in the Y-axis direction along the guide rail 206a attached to the other side of the beam 206. Furthermore, there may be one camera unit 230 .

在使用切削裝置170來對晶圓等之被加工物施行切削加工時，首先是使工作夾台172吸附被加工物。接著，以X軸進給機構176使工作夾台172移動至拍攝機構230的下方，並且以移動機構232調整拍攝機構230的Y軸方向位置。接著，以拍攝機構230從上方拍攝被加工物來檢測被加工物的切削區域。When cutting a workpiece such as a wafer using the cutting device 170 , the workpiece is first adsorbed by the chuck table 172 . Next, the X-axis feed mechanism 176 is used to move the work chuck 172 to the lower side of the imaging mechanism 230 , and the Y-axis direction position of the imaging mechanism 230 is adjusted by the moving mechanism 232 . Next, the workpiece is photographed from above by the imaging mechanism 230 to detect the cutting area of the workpiece.

接著，依據以拍攝機構230所檢測出之被加工物的切削區域，使工作夾台172旋轉，來調整被加工物的切削區域相對於切削機構174的切削刀片36之方向。接著，以X軸進給機構176使工作夾台172在X軸方向上移動，並且以Y軸進給機構178使主軸殼體212在Y軸方向上移動，而將一對切削刀片36定位到被加工物的切削區域的上方。Then, according to the cutting area of the workpiece detected by the imaging mechanism 230 , the chuck table 172 is rotated to adjust the direction of the cutting area of the workpiece relative to the cutting blade 36 of the cutting mechanism 174 . Next, the work chuck 172 is moved in the X-axis direction by the X-axis feed mechanism 176, and the spindle housing 212 is moved in the Y-axis direction by the Y-axis feed mechanism 178, thereby positioning the pair of cutting blades 36 in the X-axis direction. Above the cutting area of the workpiece.

接著，以Z軸進給機構180使主軸殼體212下降，使已高速旋轉之切削刀片36的切刃40切入被加工物的切削區域，並且一邊對已切入切削刀片36的切刃40之部分供給切削水一邊將工作夾台172在X軸方向上加工進給，藉此對被加工物的切削區域施行預定的切削加工。又，一邊以Y軸進給機構178將主軸殼體212在Y軸方向上分度進給，一邊合宜地重複上述切削加工，而對被加工物的整個切削區域施行切削加工。已結束切削步驟之切削加工完畢之被加工物會被搬送至下一個步驟。Then, the main shaft housing 212 is lowered by the Z-axis feed mechanism 180, the cutting edge 40 of the cutting blade 36 rotating at high speed is cut into the cutting area of the workpiece, and the part of the cutting edge 40 that has been cut into the cutting blade 36 is While supplying the cutting water, the work chuck 172 is machine-feeded in the X-axis direction, whereby a predetermined cutting process is performed on the cutting area of the workpiece. Furthermore, the above-mentioned cutting process is conveniently repeated while index-feeding the spindle housing 212 in the Y-axis direction by the Y-axis feed mechanism 178, and the cutting process is performed on the entire cutting area of the workpiece. The processed workpiece that has completed the cutting process will be transferred to the next step.

因為若重複實施切削步驟，切削刀片36會磨耗，且若切削刀片36的磨耗到達預定量時會變得無法維持切削精度，所以必須將已裝設於主軸220之切削刀片36更換為新的切削刀片36。又，即便在已裝設於主軸220之切削刀片36的磨耗尚未到達預定量的情況下，在對與之前施行切削加工之被加工物的素材不同的素材之被加工物施行切削加工時，也必須更換為和被加工物的素材相應之切削刀片36。Because if the cutting step is repeatedly implemented, the cutting blade 36 will be worn, and if the wear of the cutting blade 36 reaches a predetermined amount, it will become impossible to maintain the cutting accuracy, so the cutting blade 36 installed on the main shaft 220 must be replaced with a new cutting blade. blade36. Also, even if the wear of the cutting blade 36 mounted on the main shaft 220 has not reached a predetermined amount, when cutting a material different from the material of the workpiece previously cut, the It is necessary to replace with the cutting insert 36 corresponding to the material of the workpiece.

在本實施形態中，是如圖14所示，已將可以自動地更換切削裝置170的切削刀片36之輔助裝置2連結於切削裝置170，以下針對使用輔助裝置2來更換切削刀片36之方法進行說明。In this embodiment, as shown in FIG. 14, the auxiliary device 2 that can automatically replace the cutting blade 36 of the cutting device 170 has been connected to the cutting device 170. The method for replacing the cutting blade 36 using the auxiliary device 2 is as follows. illustrate.

如圖14所示，輔助裝置2是配置在切削裝置170的X軸方向後側，且形成為可以在之後裝設到已經交貨給使用者之切削裝置170。使用輔助裝置2來更換已裝設在切削裝置170之切削刀片36時，首先是使切削刀片保管機構4的無端軌道22旋轉，並將支撐有用來搬入切削裝置170之新的切削刀片36之支撐軸24定位在預定位置(例如支撐軸24的軌道中的最下端的位置)。As shown in FIG. 14 , the auxiliary device 2 is disposed on the rear side of the cutting device 170 in the X-axis direction, and is formed to be attached to the cutting device 170 delivered to the user later. When using the auxiliary device 2 to replace the cutting blade 36 installed in the cutting device 170, at first the endless track 22 of the cutting blade storage mechanism 4 is rotated to support the new cutting blade 36 that is used to carry the cutting device 170. The shaft 24 is positioned at a predetermined position (for example, a lowermost position in a track supporting the shaft 24 ).

接著，如圖15所示，藉由已連結於搬出入機構6的Z旋轉軸46之馬達使罩殼52旋轉，藉此使裝設有刀片保持部48之罩殼52的側壁56沿著X軸方向，而使刀片保持部48面對切削刀片保管機構4。又，作動X軸移動機構12以及Z軸移動機構10，以將刀片保持部48的X軸方向位置以及Z軸方向位置調整成可以將上述預定位置的支撐軸24的軸部34***刀片保持部48的中央開口部60(參照圖5)。Next, as shown in FIG. 15 , the housing 52 is rotated by the motor connected to the Z rotation shaft 46 of the carrying-in/out mechanism 6, whereby the side wall 56 of the housing 52 on which the blade holder 48 is installed is moved along the X axis. In the axial direction, the blade holder 48 faces the cutting blade storage mechanism 4 . Also, the X-axis moving mechanism 12 and the Z-axis moving mechanism 10 are operated to adjust the position in the X-axis direction and the Z-axis direction of the blade holder 48 so that the shaft portion 34 of the support shaft 24 at the predetermined position can be inserted into the blade holder. 48 central opening 60 (refer to FIG. 5 ).

接著，如圖16所示，藉由Y軸方向定位機構8使框體74在Y軸方向上移動，並將搬出入機構6定位到可藉由刀片保持部48來保持已支撐於支撐軸24之切削刀片36的作用位置。藉此，將上述預定位置的支撐軸24的軸部34***刀片保持部48的中央開口部60，並且使刀片保持部48的端面58接觸位於軸部34的前端側之切削刀片36的端面。接著，在刀片保持部48的各吸引孔62生成吸引力，而以刀片保持部48吸引保持位於軸部34的前端側之切削刀片36。Next, as shown in FIG. 16 , the frame body 74 is moved in the Y-axis direction by the Y-axis direction positioning mechanism 8, and the carrying-in/out mechanism 6 is positioned so that it can be held by the blade holder 48 on the support shaft 24. The action position of the cutting blade 36. Thereby, the shaft portion 34 of the support shaft 24 at the predetermined position is inserted into the central opening 60 of the insert holding portion 48, and the end face 58 of the insert holding portion 48 is brought into contact with the end face of the cutting insert 36 on the front end side of the shaft portion 34. Next, a suction force is generated in each suction hole 62 of the insert holding portion 48 , and the cutting insert 36 positioned at the front end side of the shaft portion 34 is sucked and held by the insert holding portion 48 .

以刀片保持部48吸引保持切削刀片36後，藉由使Y軸方向定位機構8作動，使搬出入機構6從切削刀片保管機構4朝Y軸方向遠離，並將切削刀片36從軸部34拔出。接著，從空氣噴嘴142透過無端軌道22的流路22a來對支撐軸24的基部32的流路32a供給空氣。藉此，可以將空氣噴附於已支撐於支撐軸24之其餘的切削刀片36的背部，讓留在支撐軸24之切削刀片36朝支撐軸24的前端移動。After the cutting blade 36 is sucked and held by the blade holding part 48, by actuating the positioning mechanism 8 in the Y-axis direction, the carry-out mechanism 6 is moved away from the cutting blade storage mechanism 4 in the Y-axis direction, and the cutting blade 36 is pulled out from the shaft part 34. out. Next, air is supplied from the air nozzle 142 through the flow path 22 a of the endless rail 22 to the flow path 32 a of the base portion 32 of the support shaft 24 . Thereby, air can be sprayed on the back of the remaining cutting blades 36 supported on the supporting shaft 24 , so that the cutting blades 36 remaining on the supporting shaft 24 move toward the front end of the supporting shaft 24 .

使留在軸部34之切削刀片36朝支撐軸24的前端移動後，使切削刀片保管機構4的無端軌道22旋轉，而從以刀片保持部48所吸引保持之切削刀片36與空氣噴嘴142的前端之間移動支撐軸24。接著，從空氣噴嘴142朝向已被刀片保持部48吸引保持之切削刀片36的背面噴附空氣(參照圖8)。藉此，可以洗淨切削刀片36的背面。又，在對切削刀片36噴附空氣時，是藉由使X軸移動機構12以及Z軸移動機構10作動，而對切削刀片36的背面整體噴附空氣。After the cutting blade 36 remaining on the shaft portion 34 is moved toward the front end of the support shaft 24, the endless track 22 of the cutting blade storage mechanism 4 is rotated, and the air nozzle 142 and the cutting blade 36 attracted and held by the blade holding portion 48 The support shaft 24 is moved between the front ends. Next, air is sprayed from the air nozzle 142 toward the back surface of the cutting insert 36 sucked and held by the insert holding portion 48 (see FIG. 8 ). Thereby, the back surface of the cutting insert 36 can be cleaned. Also, when blowing air to the cutting blade 36 , the air is blown to the entire back surface of the cutting blade 36 by operating the X-axis moving mechanism 12 and the Z-axis moving mechanism 10 .

在洗淨切削刀片36後，使Y軸方向定位機構8作動，而使搬出入機構6在Y軸方向上從切削刀片保管機構4遠離。接著，使搬出入機構6的罩殼52旋轉180°，並使吸引保持有切削刀片36之刀片保持部48的相反側的刀片保持部48面對切削刀片保管機構4。又，使切削刀片保管機構4的無端軌道22旋轉，將支撐有用來搬入切削裝置170之新的切削刀片36的支撐軸24定位到刀片保持部48的正面。After the cutting blade 36 is cleaned, the Y-axis direction positioning mechanism 8 is actuated to move the carry-in/out mechanism 6 away from the cutting blade storage mechanism 4 in the Y-axis direction. Next, the cover 52 of the carry-in mechanism 6 is rotated by 180°, and the blade holding portion 48 opposite to the blade holding portion 48 holding the cutting blade 36 faces the cutting blade storage mechanism 4 . Further, the endless rail 22 of the cutting blade storage mechanism 4 is rotated to position the support shaft 24 supporting the new cutting blade 36 for loading into the cutting device 170 on the front of the blade holder 48 .

接著，使Y軸方向定位機構8作動，而將搬出入機構6定位到可藉由相反側的刀片保持部48保持支撐軸24的切削刀片36之作用位置。接著，在相反側的刀片保持部48的各吸引孔62生成吸引力，而藉由刀片保持部48來吸引保持位於軸部34的前端側之切削刀片36。藉此，成為以4個刀片保持部48當中相向的一對刀片保持部48吸引保持有新的切削刀片36之狀態。並且，與上述同樣地，對留在支撐軸24之切削刀片36的背部噴附空氣，使切削刀片36朝支撐軸24的前端移動，並且從空氣噴嘴142對以相反側的刀片保持部48所吸引保持之切削刀片36噴附空氣，來洗淨切削刀片36的背面。Next, the Y-axis direction positioning mechanism 8 is actuated to position the carry-in mechanism 6 to the action position where the cutting blade 36 of the support shaft 24 can be held by the blade holding portion 48 on the opposite side. Then, suction holes 62 of the opposite blade holding portion 48 generate suction, and the cutting blade 36 located at the front end side of the shaft portion 34 is sucked and held by the blade holding portion 48 . Thereby, a new cutting insert 36 is sucked and held by a pair of facing insert holding portions 48 among the four insert holding portions 48 . And, in the same manner as above, the air is sprayed on the back of the cutting blade 36 remaining on the support shaft 24, the cutting blade 36 is moved toward the front end of the support shaft 24, and the air nozzle 142 is directed toward the blade holder 48 on the opposite side. The back surface of the cutting blade 36 is cleaned by sucking and holding the cutting blade 36 and spraying air.

接著，如圖17所示，藉由Y軸方向定位機構8使框體74在Y軸方向上移動，並且以Z軸移動機構10使升降工作台76在Z軸方向上移動。藉此，使搬出入機構6從切削刀片保管機構4遠離而定位到退避位置，並且調整搬出入機構6相對於切削裝置170之Y軸方向位置以及Z軸方向位置。位置調整後之搬出入機構6的Y軸方向位置是在切削裝置170的一對切削機構174之間，且位置調整後之搬出入機構6的Z軸方向位置在比工作夾台172的保持面更上方。Next, as shown in FIG. 17 , the housing 74 is moved in the Y-axis direction by the Y-axis direction positioning mechanism 8 , and the elevating table 76 is moved in the Z-axis direction by the Z-axis moving mechanism 10 . Thereby, the carry-in mechanism 6 is positioned away from the cutting blade storage mechanism 4 to the retracted position, and the Y-axis direction position and the Z-axis direction position of the carry-out mechanism 6 relative to the cutting device 170 are adjusted. The position in the Y-axis direction of the carrying-out mechanism 6 after the position adjustment is between a pair of cutting mechanisms 174 of the cutting device 170, and the position in the Z-axis direction of the carrying-out mechanism 6 after the position adjustment is on the holding surface of the work clamp table 172. more up.

接著，如圖18所示，藉由作為第一X軸移動機構之氣缸130使第一移動體112在X軸方向上移動，並使搬出入機構6朝向切削裝置170的一對切削機構174之間前進。接著，如圖19所示，藉由第二X軸移動機構136使第二移動體114在X軸方向上移動，並調整搬出入機構6相對於一對切削機構174之X軸方向位置。Next, as shown in FIG. 18, the first moving body 112 is moved in the X-axis direction by the air cylinder 130 as the first X-axis moving mechanism, and the carrying-in/out mechanism 6 is directed toward one of the pair of cutting mechanisms 174 of the cutting device 170. time to move forward. Next, as shown in FIG. 19 , the second moving body 114 is moved in the X-axis direction by the second X-axis moving mechanism 136 , and the X-axis direction position of the carrying-in/out mechanism 6 relative to the pair of cutting mechanisms 174 is adjusted.

具體而言，是使以搬出入機構6的一對刀片保持部48所吸引保持之新的一對切削刀片36的中心的X軸方向位置、與裝設於一對切削機構174之一對切削刀片36的中心的X軸方向位置對齊。又，使輔助裝置2的Z軸移動機構10或切削裝置170的Z軸進給機構180作動，來讓刀片保持部48的切削刀片36的中心的Z軸方向位置、與切削機構174的切削刀片36的中心的Z軸方向位置對齊。Specifically, the X-axis direction position of the center of the new pair of cutting blades 36 sucked and held by the pair of blade holding parts 48 of the carrying-in/out mechanism 6 and the pair of cutting blades installed in the pair of cutting mechanisms 174 are set. The X-axis direction positions of the centers of the blades 36 are aligned. Also, the Z-axis moving mechanism 10 of the auxiliary device 2 or the Z-axis feed mechanism 180 of the cutting device 170 is actuated to align the Z-axis direction position of the center of the cutting blade 36 of the blade holding part 48 with the cutting blade of the cutting mechanism 174. The Z-axis direction positions of the center of 36 are aligned.

接著，使搬出入機構6的罩殼52旋轉60°，使一對固定螺帽保持部50面對一對切削機構174的切削刀片36。再者，亦可在使第一、第二移動體112、114前進之前，使罩殼52旋轉60°。Next, the case 52 of the carrying-in/out mechanism 6 is rotated by 60° so that the pair of fixed nut holders 50 face the cutting blades 36 of the pair of cutting mechanisms 174 . Furthermore, before moving the first and second moving bodies 112 and 114 forward, the housing 52 may be rotated by 60°.

接著，將一對切削機構174的每一個刀片蓋224的第二罩蓋構件224b定位到開放位置(參照圖12)。接著，藉由切削裝置170的Y軸進給機構178使切削機構174在Y軸方向上移動，使已將切削刀片36固定於主軸220之固定螺帽222接觸於固定螺帽保持部50的旋轉體66的端面66a。如此一來，固定螺帽保持部50的銷72會被固定螺帽222按壓而容置到旋轉體66的內部，且主軸220的前端會容置於旋轉體66的中央開口部68。Next, the second cover member 224b of each blade cover 224 of the pair of cutting mechanisms 174 is positioned to the open position (see FIG. 12 ). Then, the cutting mechanism 174 is moved in the Y-axis direction by the Y-axis feed mechanism 178 of the cutting device 170, so that the fixed nut 222, which has fixed the cutting blade 36 to the main shaft 220, is brought into contact with the rotation of the fixed nut holder 50. The end face 66a of the body 66. In this way, the pin 72 of the fixing nut holder 50 is pressed by the fixing nut 222 and accommodated inside the rotating body 66 , and the front end of the main shaft 220 is accommodated in the central opening 68 of the rotating body 66 .

接著，當以固定螺帽保持部50的馬達使旋轉體66旋轉後，在各銷72和固定螺帽222的銷孔222a一致時，各銷72會嵌合於銷孔222a，且旋轉體66的旋轉運動會透過各銷72傳達至固定螺帽222，使固定螺帽222鬆開。藉此，可以從切削機構174的主軸220的公螺絲228將固定螺帽222螺鬆(取下)。又，在固定螺帽保持部50的各吸引孔70生成吸引力，而以固定螺帽保持部50吸引保持已取下之固定螺帽222。Next, when the rotating body 66 is rotated by the motor of the fixing nut holding part 50, when each pin 72 coincides with the pin hole 222a of the fixing nut 222, each pin 72 is fitted into the pin hole 222a, and the rotating body 66 The rotational movement of will be transmitted to the fixing nut 222 through each pin 72, so that the fixing nut 222 is loosened. Thereby, the fixing nut 222 can be unscrewed (removed) from the male screw 228 of the main shaft 220 of the cutting mechanism 174 . In addition, suction is generated in each suction hole 70 of the fixing nut holding portion 50 , and the removed fixing nut 222 is sucked and held by the fixing nut holding portion 50 .

接著，藉由Y軸進給機構178使切削機構174從搬出入機構6遠離，並且使搬出入機構6的罩殼52旋轉60°，使未吸引保持有切削刀片36之空的刀片保持部48面對切削機構174的切削刀片36。Then, the cutting mechanism 174 is moved away from the carrying-in mechanism 6 by the Y-axis feeding mechanism 178, and the cover 52 of the carrying-in mechanism 6 is rotated by 60°, so that the empty blade holder 48 that does not hold the cutting blade 36 is sucked. The cutting blade 36 faces the cutting mechanism 174 .

接著，藉由Y軸進給機構178使切削機構174接近於搬出入機構6，來將切削機構174的主軸220***刀片保持部48的中央開口部60，並且使空的刀片保持部48的端面58接觸於切削機構174的切削刀片36的端面。接著，在刀片保持部48的各吸引孔62生成吸引力，而以刀片保持部48吸引保持切削機構174的切削刀片36。Then, the cutting mechanism 174 is brought close to the carry-in mechanism 6 by the Y-axis feed mechanism 178, the main shaft 220 of the cutting mechanism 174 is inserted into the central opening 60 of the blade holding part 48, and the end surface of the empty blade holding part 48 is 58 contacts the end surface of the cutting blade 36 of the cutting mechanism 174 . Next, a suction force is generated in each suction hole 62 of the blade holding portion 48 , and the cutting blade 36 of the cutting mechanism 174 is sucked and held by the blade holding portion 48 .

接著，藉由Y軸進給機構178使切削機構174從搬出入機構6遠離，並且使搬出入機構6的罩殼52旋轉60°，而使吸引保持有新的切削刀片36之刀片保持部48面對切削機構174的主軸220。Next, the cutting mechanism 174 is moved away from the carry-in mechanism 6 by the Y-axis feed mechanism 178, and the cover 52 of the carry-in mechanism 6 is rotated by 60°, so that the blade holder 48 holding a new cutting blade 36 is sucked. Facing the spindle 220 of the cutting mechanism 174 .

接著，藉由Y軸進給機構178使切削機構174接近於搬出入機構6，來將主軸220***到新的切削刀片36的中央開口部38a，且使切削刀片36的端面接觸於主軸220的安裝座凸緣226的承受部226b。接著，解除刀片保持部48的吸引力，將新的切削刀片36從刀片保持部48交接至主軸220。Next, the cutting mechanism 174 is brought close to the carry-in mechanism 6 by the Y-axis feed mechanism 178, the main shaft 220 is inserted into the central opening 38a of the new cutting blade 36, and the end surface of the cutting blade 36 is brought into contact with the side of the main shaft 220. The receiving portion 226b of the flange 226 of the seat is installed. Next, the suction force of the insert holding portion 48 is released, and a new cutting insert 36 is transferred from the insert holding portion 48 to the spindle 220 .

接著，藉由Y軸進給機構178使切削機構174從搬出入機構6遠離，並且使搬出入機構6的罩殼52旋轉60°，使吸引保持有已取下之固定螺帽222的固定螺帽保持部50面對切削機構174的主軸220。Then, the cutting mechanism 174 is kept away from the carry-in mechanism 6 by the Y-axis feed mechanism 178, and the casing 52 of the carry-in mechanism 6 is rotated by 60° to attract and hold the fixed nut 222 that has been removed. The cap holder 50 faces the main shaft 220 of the cutting mechanism 174 .

接著，藉由Y軸進給機構178使切削機構174接近於搬出入機構6，來使以固定螺帽保持部50所吸引保持之固定螺帽222嵌合於主軸220的前端部。接著，使固定螺帽保持部50的馬達朝和取下固定螺帽222時為相反之方向作動來讓固定螺帽222旋轉，而將固定螺帽222螺接(緊固)於主軸220的公螺絲228。藉此，可以將用來裝設於切削機構174之新的切削刀片36以主軸220的安裝座凸緣226的承受部226b與固定螺帽222來夾入而固定於主軸220。Next, the cutting mechanism 174 is brought close to the carry-in mechanism 6 by the Y-axis feed mechanism 178 , and the fixed nut 222 attracted and held by the fixed nut holding portion 50 is fitted to the front end portion of the main shaft 220 . Then, the motor of the fixed nut holding part 50 is operated in the direction opposite to that when the fixed nut 222 is removed, so that the fixed nut 222 is rotated, and the fixed nut 222 is screwed (fastened) to the male shaft 220. screw 228. Thereby, the new cutting insert 36 to be mounted on the cutting mechanism 174 can be clamped and fixed on the main shaft 220 by the receiving portion 226 b of the flange 226 of the mounting seat 226 of the main shaft 220 and the fixing nut 222 .

接著，在解除固定螺帽保持部50的吸引力後，將切削機構174的刀片蓋224的第二罩蓋構件224b定位到封閉位置。再者，關於如上述之固定螺帽222以及切削刀片36的取下、安裝，可對一對切削機構174同時進行，亦可個別地進行。Next, the second cover member 224b of the blade cover 224 of the cutting mechanism 174 is positioned to the closed position after the suction force for fixing the nut holding portion 50 is released. Furthermore, the removal and installation of the fixing nut 222 and the cutting blade 36 as described above may be performed simultaneously for the pair of cutting mechanisms 174, or may be performed individually.

接著，使第一、第二移動體112、114後退，並且使搬出入機構6的罩殼52旋轉60°，來讓已取下之一對切削刀片36的其中一個與洗淨機構13的空氣噴嘴142面對。此時，使切削刀片保管機構4的無端軌道22預先旋轉，以免支撐軸24位於已取下的切削刀片36的其中一個與空氣噴嘴142的前端之間。然後，一邊使X軸移動機構12以及Z軸移動機構10作動，一邊從空氣噴嘴142朝向已取下之切削刀片36的其中一個的背面整體噴附空氣，來洗淨其中一個切削刀片36的背面。Then, the first and second mobile bodies 112, 114 are retreated, and the cover 52 of the mechanism 6 is rotated by 60° to allow one of the pair of cutting blades 36 and the air of the cleaning mechanism 13 to be removed. Nozzle 142 faces. At this time, the endless rail 22 of the cutting blade storage mechanism 4 is rotated in advance so that the support shaft 24 is not located between one of the removed cutting blades 36 and the front end of the air nozzle 142 . Then, while the X-axis moving mechanism 12 and the Z-axis moving mechanism 10 are actuated, air is sprayed from the air nozzle 142 toward the entire back surface of one of the removed cutting blades 36 to clean the back surface of one of the cutting blades 36. .

接著，使切削刀片保管機構4的無端軌道22旋轉，而將未支撐有切削刀片36之空的支撐軸24定位到預定位置(例如支撐軸24在軌道中的最下端的位置)。接著，作動X軸移動機構12以及Z軸移動機構10，將刀片保持部48的X軸方向位置以及Z軸方向位置調整成可以將上述預定位置的支撐軸24的軸部34***以刀片保持部48所吸引保持之其中一個切削刀片36的中央開口部38a。Next, the endless rail 22 of the cutting blade storage mechanism 4 is rotated to position the empty supporting shaft 24 not supporting the cutting blade 36 to a predetermined position (for example, the lowest position of the supporting shaft 24 in the rail). Next, actuate the X-axis moving mechanism 12 and the Z-axis moving mechanism 10 to adjust the position in the X-axis direction and the Z-axis direction of the blade holder 48 so that the shaft portion 34 of the support shaft 24 at the predetermined position can be inserted into the blade holder. 48 to attract and hold the central opening 38a of one of the cutting blades 36.

接著，藉由Y軸方向定位機構8使框體74在Y軸方向上移動，而將上述預定位置的支撐軸24的軸部34***以刀片保持部48所吸引保持之其中一個切削刀片36的中央開口部38a，並且使其中一個切削刀片36的端面接觸於支撐軸24的基部32的端面。接著，解除刀片保持部48的吸引力，將所取下之一對切削刀片36的其中一個交接到支撐軸24。Next, the frame body 74 is moved in the Y-axis direction by the Y-axis direction positioning mechanism 8, and the shaft portion 34 of the support shaft 24 at the predetermined position is inserted into one of the cutting blades 36 attracted and held by the blade holding portion 48. The central opening 38 a is formed, and the end surface of one of the cutting inserts 36 is brought into contact with the end surface of the base 32 of the support shaft 24 . Next, the suction force of the blade holding portion 48 is released, and one of the removed pair of cutting blades 36 is handed over to the support shaft 24 .

又，藉由Y軸方向定位機構8使搬出入機構6從切削刀片保管機構4遠離，並且使搬出入機構6的罩殼52旋轉180°，使吸引保持已取下之一對切削刀片36的另一個之相反側的刀片保持部48面對切削刀片保管機構4。Also, the carrying-in/out mechanism 6 is kept away from the cutting blade storage mechanism 4 by the Y-axis direction positioning mechanism 8, and the cover 52 of the carrying-in/out mechanism 6 is rotated by 180° to attract and hold a pair of cutting blades 36 that have been removed. The other insert holding portion 48 on the opposite side faces the cutting insert storage mechanism 4 .

接著，使切削刀片保管機構4的無端軌道22旋轉，以免支撐軸24位於已取下之切削刀片36的另一個與空氣噴嘴142的前端之間。然後，一邊使X軸移動機構12以及Z軸移動機構10作動，一邊從空氣噴嘴142朝向已取下之切削刀片36的另一個的背面整體噴附空氣，來洗淨另一個切削刀片36的背面。Then, the endless rail 22 of the cutting blade storage mechanism 4 is rotated so that the support shaft 24 is not located between the other of the removed cutting blade 36 and the front end of the air nozzle 142 . Then, while the X-axis moving mechanism 12 and the Z-axis moving mechanism 10 are actuated, air is sprayed from the air nozzle 142 toward the entire back surface of the removed cutting blade 36 to clean the back surface of the other cutting blade 36. .

接著，使切削刀片保管機構4的無端軌道22旋轉，而將可支撐切削刀片36(有支撐之餘地)的支撐軸24定位到預定位置。接著，藉由Y軸方向定位機構8使框體74在Y軸方向上移動，且將上述預定位置之支撐軸24的軸部34***以相反側的刀片保持部48所吸引保持之另一個切削刀片36的中央開口部38a，並且使另一個切削刀片36的端面接觸於被支撐軸24所支撐之切削刀片36的端面。接著，解除刀片保持部48的吸引力，將所取下之一對切削刀片36的另一個交接到支撐軸24。Next, the endless rail 22 of the cutting blade storage mechanism 4 is rotated to position the support shaft 24 capable of supporting the cutting blade 36 (there is room for support) to a predetermined position. Then, the frame body 74 is moved in the Y-axis direction by the Y-axis direction positioning mechanism 8, and the shaft portion 34 of the support shaft 24 at the above-mentioned predetermined position is inserted into another cutting tool that is attracted and held by the blade holding portion 48 on the opposite side. The central opening portion 38 a of the blade 36 , and the end surface of the other cutting blade 36 is brought into contact with the end surface of the cutting blade 36 supported by the support shaft 24 . Next, the suction force of the insert holding portion 48 is released, and the other of the removed pair of cutting inserts 36 is handed over to the support shaft 24 .

如以上所述，在本實施形態的輔助裝置2中形成為可以在之後裝設到已經交貨給使用者之切削裝置170，而對已裝設在切削裝置170的切削機構174之切削刀片36進行更換。As mentioned above, in the auxiliary device 2 of the present embodiment, it is formed to be installed to the cutting device 170 that has been delivered to the user later, and the cutting blade 36 installed in the cutting mechanism 174 of the cutting device 170 Make a replacement.

此外，在本實施形態的輔助裝置2中，可以藉由從洗淨機構13的空氣噴嘴142對已保管在切削刀片保管機構4之更換用的新的切削刀片36、或從切削裝置170取下之切削刀片36噴附空氣，來洗淨切削刀片36的背面，並將切削屑等異物從切削刀片36去除。從而，在已將切削刀片36裝設於切削裝置170時，不會有在切削刀片36與安裝座凸緣226之間夾入異物之情形，而可將切削刀片36定位在適當的位置，並且防止切削刀片36以及安裝座凸緣226的偏磨耗。In addition, in the auxiliary device 2 of this embodiment, the new cutting blade 36 stored in the cutting blade storage mechanism 4 for replacement can be removed from the cutting device 170 by the air nozzle 142 of the cleaning mechanism 13. The cutting blade 36 is sprayed with air to clean the back surface of the cutting blade 36 and remove foreign matter such as chips from the cutting blade 36. Thereby, when the cutting blade 36 has been mounted on the cutting device 170, there will be no foreign matter caught between the cutting blade 36 and the mount flange 226, and the cutting blade 36 can be positioned at an appropriate position, and Uneven wear of the cutting insert 36 and the mount flange 226 is prevented.

2:輔助裝置 4:切削刀片保管機構 6:搬出入機構 8:Y軸方向定位機構 10:Z軸移動機構 12:X軸移動機構 13:洗淨機構 14,18:旋轉軸 16:驅動齒輪 20:從動齒輪 22:無端軌道 22a,32a:流路 24:支撐軸 26,100:基座板 28:支撐壁 30,96,108,140,200,216,218,236:馬達 32:基部 34:軸部 36:切削刀片 38,182:基台 38a,60,68:中央開口部 40:切刃 42:定位珠 46:Z旋轉軸 48:刀片保持部 50:固定螺帽保持部 52:罩殼 54,88:頂板 56:側壁 58,66a:端面 60:中央開口部 62,70:吸引孔 64:殼體 66:旋轉體 72:銷 74:框體 76:升降工作台 78:基座架台 80:底部(框體) 82,186,204:支柱 84:頂板部(框體) 86,124,132:被導引構件 86a,124a,132a:溝 90:腳部 92:導軌(升降工作台) 94,106,138,198,214,234:滾珠螺桿 98,202:框架 102,122:圓形孔 104,134a:母螺絲 110:連結板 112:第一移動體 114:第二移動體 116:第一導軌 118:第二導軌 120,128:本體 126,134:塊體 126a:貫通孔 130:氣缸 130a:壓缸管 130b:活塞桿 136:第二X軸移動機構 142:空氣噴嘴 170:切削裝置 172:工作夾台 174:切削機構 176:X軸進給機構 178:Y軸進給機構 180:Z軸進給機構 182a,206a:引導軌道 184:X軸可動板 188:罩板 188a:圓形開口 190:吸附夾頭 192:夾具 206:樑 208:Y軸可動構件 208a:被引導溝 210:Z軸可動構件 212:主軸殼體 220:主軸 222:固定螺帽 222a:銷孔 224:刀片蓋 224a:第一罩蓋構件 224b:第二罩蓋構件 226:安裝座凸緣 226a:凹處 226b:承受部 228:公螺絲 230:拍攝機構 232:移動機構 X,Y,Z:箭頭(方向) 2: Auxiliary device 4: Cutting blade storage mechanism 6: Moving in and out of institutions 8: Y-axis direction positioning mechanism 10: Z-axis moving mechanism 12: X-axis moving mechanism 13: Cleaning mechanism 14,18: axis of rotation 16: Drive gear 20: driven gear 22: Endless track 22a, 32a: flow path 24: Support shaft 26,100: base plate 28: support wall 30,96,108,140,200,216,218,236: Motor 32: base 34: Shaft 36: Cutting blade 38,182: abutments 38a, 60, 68: central opening 40: cutting edge 42: positioning beads 46:Z rotation axis 48:Blade holder 50: fixed nut holding part 52: Shell 54,88: top plate 56: side wall 58,66a: end face 60: central opening 62,70: suction holes 64: Shell 66: rotating body 72: pin 74: frame 76: Lifting workbench 78: Base stand 80: Bottom (frame) 82, 186, 204: pillars 84: Top plate (frame) 86,124,132: Guided components 86a, 124a, 132a: ditch 90: feet 92: guide rail (elevating table) 94, 106, 138, 198, 214, 234: ball screw 98,202: frame 102,122: circular hole 104, 134a: female screw 110: connecting plate 112: The first moving body 114: Second mobile body 116: The first guide rail 118: Second guide rail 120,128: Ontology 126,134: blocks 126a: through hole 130: Cylinder 130a: Cylinder tube 130b: piston rod 136: Second X-axis moving mechanism 142: Air nozzle 170: cutting device 172: Work clamp table 174: cutting mechanism 176: X-axis feed mechanism 178: Y-axis feed mechanism 180: Z-axis feed mechanism 182a, 206a: guide track 184: X-axis movable plate 188: cover plate 188a: round opening 190: adsorption chuck 192: Fixture 206: Beam 208: Y-axis movable member 208a: Guided ditch 210: Z-axis movable member 212: Spindle housing 220: spindle 222: fixed nut 222a: pin hole 224: blade cover 224a: first cover member 224b: second cover member 226: Mounting flange 226a: Recess 226b: receiving part 228: male screw 230: Shooting Agency 232: Mobile Mechanism X,Y,Z: Arrow (direction)

圖1是本發明實施形態之輔助裝置的立體圖。 圖2是圖1所示之切削刀片保管機構的分解立體圖。 圖3是圖2所示之支撐軸以及從正面側所觀看到之切削刀片的立體圖。 圖4是圖2所示之支撐軸的剖面圖。 圖5是圖1所示之搬出入機構的立體圖。 圖6是圖1所示之框體、升降工作台以及基座架台的分解立體圖。 圖7是圖1所示之框體的分解立體圖。 圖8是顯示正在藉由圖1所示之洗淨機構洗淨切削刀片之狀態的立體圖。 圖9是可連結圖1所示之輔助裝置的切削裝置的立體圖。 圖10是圖9所示之工作夾台的立體圖。 圖11是圖9所示之切削機構的立體圖。 圖12是圖11所示之刀片蓋已開放之狀態下的切削機構的立體圖。 圖13是圖9所示之切削機構的分解立體圖。 圖14是顯示圖1所示之輔助裝置已連結於圖9所示之切削裝置之狀態的立體圖。 圖15是顯示圖1所示之輔助裝置的切削刀片保管機構與搬出入機構已相面對之狀態的立體圖。 圖16是顯示框體從圖15所示之狀態朝向切削刀片保管機構前進後之狀態的立體圖。 圖17是顯示框體從圖16所示之狀態後退，並且升降工作台上升後之狀態的立體圖。 圖18是顯示第一移動體從圖17所示之狀態朝向切削裝置前進後之狀態的立體圖。 圖19是顯示第二移動體從圖18所示之狀態朝向切削裝置前進後之狀態的立體圖。 Fig. 1 is a perspective view of an auxiliary device according to an embodiment of the present invention. Fig. 2 is an exploded perspective view of the cutting blade storage mechanism shown in Fig. 1 . Fig. 3 is a perspective view of the support shaft shown in Fig. 2 and the cutting insert viewed from the front side. Fig. 4 is a sectional view of the supporting shaft shown in Fig. 2 . Fig. 5 is a perspective view of the carry-in mechanism shown in Fig. 1 . Fig. 6 is an exploded perspective view of the frame, the lifting table and the base stand shown in Fig. 1 . Fig. 7 is an exploded perspective view of the frame shown in Fig. 1 . Fig. 8 is a perspective view showing a state in which the cutting insert is being cleaned by the cleaning mechanism shown in Fig. 1 . Fig. 9 is a perspective view of a cutting device that can be connected with the auxiliary device shown in Fig. 1 . Fig. 10 is a perspective view of the work clamp shown in Fig. 9 . Fig. 11 is a perspective view of the cutting mechanism shown in Fig. 9 . Fig. 12 is a perspective view of the cutting mechanism in the state where the blade cover shown in Fig. 11 is opened. Fig. 13 is an exploded perspective view of the cutting mechanism shown in Fig. 9 . Fig. 14 is a perspective view showing a state where the auxiliary device shown in Fig. 1 is connected to the cutting device shown in Fig. 9 . Fig. 15 is a perspective view showing a state in which the cutting blade storage mechanism and the carrying-in/out mechanism of the auxiliary device shown in Fig. 1 face each other. Fig. 16 is a perspective view showing a state in which the housing has advanced from the state shown in Fig. 15 toward the cutting blade storage mechanism. Fig. 17 is a perspective view showing a state in which the frame body retreats from the state shown in Fig. 16 and the elevating table rises. Fig. 18 is a perspective view showing a state in which the first moving body advances toward the cutting device from the state shown in Fig. 17 . Fig. 19 is a perspective view showing a state in which the second moving body advances toward the cutting device from the state shown in Fig. 18 .

2:輔助裝置 2: Auxiliary device

4:切削刀片保管機構 4: Cutting blade storage mechanism

6:搬出入機構 6: Moving in and out of institutions

8:Y軸方向定位機構 8: Y-axis direction positioning mechanism

10:Z軸移動機構 10: Z-axis moving mechanism

12:X軸移動機構 12: X-axis moving mechanism

13:洗淨機構 13: Cleaning mechanism

16:驅動齒輪 16: Drive gear

18:旋轉軸 18: Rotation axis

20:從動齒輪 20: driven gear

22:無端軌道 22: Endless track

24:支撐軸 24: Support shaft

26,100:基座板 26,100: base plate

28:支撐壁 28: support wall

30,96:馬達 30,96: motor

36:切削刀片 36: Cutting blade

74:框體 74: frame

76:升降工作台 76: Lifting workbench

78:基座架台 78: Base stand

80:底部(框體) 80: Bottom (frame)

82:支柱 82: Pillar

84:頂板部(框體) 84: Top plate (frame)

86:被導引構件 86: Guided component

88:頂板 88: top plate

90:腳部 90: feet

92:導軌(升降工作台) 92: guide rail (lifting table)

98:框架 98: frame

102:圓形孔 102: round hole

112:第一移動體 112: The first moving body

114:第二移動體 114: Second moving body

142:空氣噴嘴 142: Air nozzle

X,Y,Z:方向 X, Y, Z: direction

Claims (6)

一種輔助裝置，可連結於切削裝置，前述切削裝置具備：工作夾台，具備有保持被加工物之保持面；切削機構，以固定螺帽裝設有切削刀片，前述切削刀片對已保持在該工作夾台之被加工物進行切削；X軸進給機構，使該工作夾台在X軸方向上加工進給；Y軸進給機構，使該切削機構在和該X軸方向正交之Y軸方向上分度進給；及Z軸進給機構，使該切削機構在和該X軸方向以及該Y軸方向正交之Z軸方向上切入進給，且該保持面是以該X軸方向以及該Y軸方向來規定，前述輔助裝置具備有： 切削刀片保管機構，保管複數個切削刀片； 搬出入機構，從該切削刀片保管機構保持切削刀片的正面並進行搬出以及搬入； Y軸方向定位機構，讓該搬出入機構相對於該切削刀片保管機構定位到Y軸方向的作用位置與退避位置； Z軸移動機構，讓該搬出入機構在Z軸方向上移動； X軸移動機構，讓該搬出入機構在X軸方向上移動，來作用於已裝設在該切削機構的主軸之切削刀片；及 洗淨機構，對已被該搬出入機構保持之切削刀片的背面進行洗淨。 An auxiliary device that can be connected to a cutting device. The cutting device includes: a work clamp table with a holding surface for holding a workpiece; a cutting mechanism that is equipped with a cutting blade with a fixed nut. The workpiece of the work clamp is cut; the X-axis feed mechanism makes the work clamp work in the direction of the X-axis; the Y-axis feed mechanism makes the cutting mechanism in the Y direction orthogonal to the X-axis direction. The indexing feed in the direction of the axis; and the Z-axis feed mechanism, so that the cutting mechanism cuts and feeds in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction, and the holding surface is based on the X-axis direction and the direction of the Y axis, the aforementioned auxiliary device has: The cutting blade storage mechanism stores a plurality of cutting blades; A carrying-in/out mechanism for carrying out and carrying-in the cutting insert while holding the front side of the cutting insert; A positioning mechanism in the Y-axis direction, allowing the carrying-in and out-in mechanism to be positioned at the active position and the retracted position in the Y-axis direction relative to the cutting blade storage mechanism; The Z-axis moving mechanism allows the moving in and out mechanism to move in the Z-axis direction; An X-axis moving mechanism for moving the carry-in/out mechanism in the X-axis direction to act on the cutting blade installed on the main shaft of the cutting mechanism; and The cleaning mechanism cleans the back surface of the cutting blade held by the carrying-in/out mechanism. 如請求項1之輔助裝置，其中該切削刀片保管機構包含：驅動齒輪，具有在Y軸方向上延伸之旋轉軸；從動齒輪，和該驅動齒輪在Z軸方向上分開且具有在Y軸方向上延伸之旋轉軸；無端軌道，捲繞於該驅動齒輪與該從動齒輪；及支撐軸，在Y軸方向上延伸並以預定的間隔配設在該無端軌道，且可***切削刀片的中央開口部來支撐切削刀片， 該洗淨機構具備空氣噴嘴，前述空氣噴嘴相鄰於該切削刀片保管機構而配設，且對已被該搬出入機構所保持之切削刀片的背面噴附空氣來進行洗淨。 The auxiliary device according to claim 1, wherein the cutting blade storage mechanism comprises: a driving gear having a rotation shaft extending in the Y-axis direction; a driven gear separated from the driving gear in the Z-axis direction and having a rotation shaft extending in the Y-axis direction a rotating shaft extending upward; an endless rail wound around the driving gear and the driven gear; and a support shaft extending in the Y-axis direction and arranged on the endless rail at predetermined intervals, and insertable into the center of the cutting blade openings to support the cutting inserts, The cleaning mechanism includes an air nozzle disposed adjacent to the cutting blade storage mechanism, and sprays air to the back surface of the cutting blade held by the carrying-in/out mechanism for cleaning. 如請求項2之輔助裝置，其中該空氣噴嘴配設在該切削刀片保管機構的該支撐軸的背部，且對已支撐於該支撐軸之切削刀片的背部噴附空氣來使切削刀片朝該支撐軸的前端移動，而相對於該搬出入機構來定位切削刀片的正面。The auxiliary device according to claim 2, wherein the air nozzle is arranged at the back of the support shaft of the cutting blade storage mechanism, and sprays air to the back of the cutting blade supported on the support shaft so that the cutting blade moves toward the support The front end of the shaft moves to position the front side of the cutting insert with respect to the carrying-in/out mechanism. 如請求項1之輔助裝置，其中該搬出入機構包含：Z旋轉軸，在Z軸方向上延伸；刀片保持部，呈放射狀地連結於該Z旋轉軸且吸引保持切削刀片；及固定螺帽保持部，對已形成於該主軸的前端之公螺絲來螺接以及螺鬆該固定螺帽， 相對於1個該固定螺帽保持部具備有2個該刀片保持部。 The auxiliary device according to claim 1, wherein the carrying in and out mechanism includes: a Z rotation shaft extending in the direction of the Z axis; a blade holder radially connected to the Z rotation shaft and attracting and holding the cutting blade; and a fixed nut The holding part is used to screw the male screw formed on the front end of the main shaft and loosen the fixing nut, Two of the blade holding portions are provided for one of the fixing nut holding portions. 如請求項4之輔助裝置，其中該搬出入機構配設於框體，且該框體呈可滑動地被已配設在升降工作台之在Y軸方向上延伸之導軌支撐，並藉由該Y軸方向定位機構來相對於該切削刀片保管機構定位到Y軸方向的該作用位置與該退避位置。Auxiliary device as in claim 4, wherein the carrying-in/out mechanism is arranged on the frame body, and the frame body is slidably supported by a guide rail extending in the Y-axis direction that has been arranged on the lifting table, and by the The Y-axis direction positioning mechanism is used to position the working position and the retracted position in the Y-axis direction relative to the cutting insert storage mechanism. 如請求項5之輔助裝置，其中該搬出入機構配設在已配設於該框體的內部之第一移動體，該第一移動體以被懸吊之狀態可滑動地支撐在已配設在第二移動體的下部之在X軸方向上延伸之第一導軌，該第二移動體以被懸吊之狀態可滑動地支撐在已配設在該框體的頂板部之在X軸方向上延伸之第二導軌，該搬出入機構是藉由該第一移動體以及該第二移動體而構成為在X軸方向上進出自如。The auxiliary device according to claim 5, wherein the carrying in and out mechanism is arranged on the first moving body already arranged inside the frame, and the first moving body is slidably supported on the already arranged in a suspended state. The first guide rail extending in the X-axis direction on the lower part of the second moving body, the second moving body is slidably supported in the X-axis direction on the top plate part of the frame in a suspended state The second guide rail extending upward, the carrying-in mechanism is configured by the first moving body and the second moving body so that it can move in and out freely in the X-axis direction.
TW111117661A 2021-05-21 2022-05-11 Auxiliary device capable of automatically replacing cutting blades TW202245982A (en)

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