TW202146187A

TW202146187A - Coordinate calibration method of manipulator

Info

Publication number: TW202146187A
Application number: TW109119659A
Authority: TW
Inventors: 邵啓煥; 張啓舜
Original assignee: 台達電子工業股份有限公司
Priority date: 2020-06-11
Filing date: 2020-06-11
Publication date: 2021-12-16
Also published as: TWI710441B

Abstract

The present disclosure provides a coordinate calibration method of a manipulator, comprising steps of: (a) controlling the manipulator to move according to a movement command when the manipulator operating in a work space, and utilizing a 3D (3-dimensional) measuring device to acquire the 3D coordinates of reference anchor points reached by the manipulator; (b) acquiring a reference coordinate system according to the reference anchor points; (c) the manipulator leaving the work space, controlling the manipulator to move according to a movement command when the manipulator going back to operate in the work space, and utilizing the 3D measuring device to acquire the 3D coordinates of actual anchor points reached by the manipulator; (d) acquiring an actual coordinate system according to the actual anchor points, and calculating a coordinate compensating information according to the reference and actual coordinate systems; and (e) adjusting the manipulator according to the coordinate compensating information so as to maintain the manipulator operating with the reference coordinate system.

Description

機器手臂的座標校正方法Coordinate Correction Method of Robot Arm

本案係關於一種座標校正方法，尤指一種機器手臂的座標校正方法。This case is about a coordinate correction method, especially a coordinate correction method for a robotic arm.

如今，機器人在各個產業上的應用愈加廣泛。機器人在運作過程中可能受載台移動而往返於不同的場域或工作站，而非固定運作於特定之工作站。於此情況下，若機器人移動至任一工作站時，均需重新建立座標系並進行教點，以確保工作精度。然而，重複建立座標系及教點將耗費大量時間，導致工作效率降低，且難以確保每次確立之座標系均完全相同，可能使得機器手臂之工作精度下降。Today, robots are used more and more widely in various industries. During the operation, the robot may travel to and from different fields or workstations due to the movement of the carrier, rather than fixedly operating at a specific workstation. In this case, if the robot moves to any workstation, it needs to re-establish the coordinate system and teach points to ensure the work accuracy. However, it will take a lot of time to repeatedly establish the coordinate system and teach points, which will reduce the work efficiency, and it is difficult to ensure that the coordinate system established each time is exactly the same, which may reduce the working accuracy of the robot arm.

因此，如何發展一種可改善上述習知技術之機器手臂的座標校正方法，實為目前迫切之需求。Therefore, it is an urgent need to develop a coordinate calibration method that can improve the above-mentioned conventional robot arm.

本案之目的在於提供一種機器手臂的座標校正方法，其係通過三維測量裝置建立工作空間之參考座標系，在機器手臂暫離後回到該工作空間時，通過三維測量裝置獲取實際座標系，並依據參考座標系與實際座標系間之差異對機器手臂進行調整，使機器手臂仍維持運作於參考座標系中。藉此，無需重複建立座標系及進行教點，可提升工作效率，且由於機器手臂始終運作於參考座標系中，故可有效確保機器手臂的高精度。The purpose of this case is to provide a coordinate correction method for a robot arm, which establishes a reference coordinate system of the workspace through a three-dimensional measuring device, and obtains the actual coordinate system through the three-dimensional measuring device when the robot arm returns to the workspace after temporarily leaving. Adjust the robot arm according to the difference between the reference coordinate system and the actual coordinate system, so that the robot arm still operates in the reference coordinate system. In this way, there is no need to repeatedly establish a coordinate system and teach points, which can improve work efficiency, and because the robot arm always operates in the reference coordinate system, the high precision of the robot arm can be effectively ensured.

為達上述目的，本案提供一種機器手臂的座標校正方法，其中機器手臂設置於可動載台上及運作於至少一工作空間中，工作空間中設置有三維測量裝置，三維測量裝置係架構於測量機器手臂的位置。座標校正方法包含步驟：(a) 在機器手臂受可動載台移動而至工作空間中運作時，依據移動命令控制機器手臂進行移動，並利用三維測量裝置取得機器手臂所到達的至少三個參考定位點；(b) 依據至少三個參考定位點計算取得旋轉矩陣及平移向量，並依據旋轉矩陣及平移向量計算取得相應之參考座標系；(c) 機器手臂受可動載台移動而離開工作空間，而在機器手臂回到工作空間中運作時，依據移動命令控制機器手臂進行移動，並利用三維測量裝置取得機器手臂所到達的至少三個實際定位點；(d) 依據至少三個實際定位點計算取得旋轉矩陣及平移向量，進而計算取得相應之實際座標系，再通過比較參考座標系及實際座標系的旋轉矩陣及平移向量，計算取得座標補正資訊；以及 (e) 依據座標補正資訊調整機器手臂，使機器手臂維持運作於參考座標系。In order to achieve the above purpose, the present application provides a coordinate calibration method for a robotic arm, wherein the robotic arm is arranged on a movable stage and operates in at least one workspace, and a three-dimensional measurement device is arranged in the workspace, and the three-dimensional measurement device is constructed on the measuring machine. position of the arm. The coordinate correction method includes the steps: (a) when the robot arm is moved by the movable stage to operate in the working space, control the robot arm to move according to the movement command, and use a three-dimensional measuring device to obtain at least three reference positions reached by the robot arm (b) Calculate the rotation matrix and translation vector according to at least three reference positioning points, and obtain the corresponding reference coordinate system according to the rotation matrix and translation vector; (c) The robot arm is moved by the movable stage to leave the workspace, When the robot arm returns to the working space, the robot arm is controlled to move according to the movement command, and the three-dimensional measuring device is used to obtain at least three actual positioning points reached by the robot arm; (d) Calculated according to the at least three actual positioning points Obtain the rotation matrix and translation vector, and then calculate and obtain the corresponding actual coordinate system, and then calculate and obtain the coordinate correction information by comparing the rotation matrix and translation vector of the reference coordinate system and the actual coordinate system; and (e) Adjust the robot arm according to the coordinate correction information , to keep the robot arm operating in the reference coordinate system.

體現本案特徵與優點的一些典型實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化，其皆不脫離本案之範圍，且其中的說明及圖示在本質上係當作說明之用，而非架構於限制本案。Some typical embodiments embodying the features and advantages of the present case will be described in detail in the description of the latter paragraph. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are essentially for illustration purposes rather than limiting the present case.

為了更易於了解本案技術，以下將以第1圖及第2圖示例說明機器手臂、可動載台及三維測量裝置與其所在的工作空間的具體態樣，然而須注意的是，工作空間及三維測量裝置的可能實施態樣並不以此為限，僅需確保三維測量裝置之設置位置維持固定，且可在工作空間中量測機器手臂之位置/座標即可In order to make it easier to understand the technology of this case, the following will use Figures 1 and 2 to illustrate the specific aspects of the robot arm, the movable stage, the three-dimensional measurement device and the workspace where they are located. However, it should be noted that the workspace and the three-dimensional The possible implementation of the measuring device is not limited to this, it only needs to ensure that the setting position of the three-dimensional measuring device remains fixed, and the position/coordinates of the robot arm can be measured in the working space.

第1圖為本案較佳實施例之機器手臂、工作空間及三維測量裝置的立體結構示意圖，第2圖為第1圖之三維測量裝置的立體結構示意圖。如第1圖及第2圖所示，其中係以工作平台2代表三維測量裝置3所在的工作空間，三維測量裝置3固設於工作平台2上，機器手臂1設置於可動載台5上，且機器手臂1受可動載台5帶動而與之同步移動。當然，於實際應用中，工作平台2上亦將設置機器手臂1在運作過程中相互動的元件或裝置，此處為便於說明建立座標過程而僅於圖中示出工作平台2上之三維測量裝置3。機器手臂1可為例如但不限於六軸型機器手臂或SCARA機器手臂。三維測量裝置3係架構於測量機器手臂1的位置/座標，且包含球形體31、基座32及三個測量模組33。球形體31可拆卸地組接於機器手臂1，且受機器手臂1帶動而同步移動或轉動。三個測量模組33均設置於基座32上，其中每一測量模組33包含測量結構34及位置感測器。三個測量模組33的三個測量結構34分別於X軸、Y軸及Z軸方向上移動，且均與球形體31接觸。位置感測器係架構於在對應之測量結構34被球形體31推動時感測測量結構34的移動距離，其中位置感測器可為例如但不限於由光學尺所構成。FIG. 1 is a schematic three-dimensional structure diagram of a robot arm, a work space and a three-dimensional measuring device according to a preferred embodiment of the present invention, and FIG. 2 is a three-dimensional structure schematic diagram of the three-dimensional measuring device of FIG. 1 . As shown in Figures 1 and 2, the work platform 2 is used to represent the work space where the three-dimensional measurement device 3 is located, the three-dimensional measurement device 3 is fixed on the work platform 2, and the robot arm 1 is set on the movable stage 5. And the robot arm 1 is driven by the movable stage 5 to move synchronously therewith. Of course, in practical applications, the work platform 2 will also be provided with components or devices that the robot arm 1 moves with each other during the operation. Here, for the convenience of explaining the coordinate establishment process, only the three-dimensional measurement on the work platform 2 is shown in the figure. device 3. The robotic arm 1 may be, for example, but not limited to, a six-axis type robotic arm or a SCARA robotic arm. The three-dimensional measuring device 3 is constructed to measure the position/coordinate of the robot arm 1 , and includes a spherical body 31 , a base 32 and three measuring modules 33 . The spherical body 31 is detachably assembled with the robot arm 1 , and is driven by the robot arm 1 to move or rotate synchronously. The three measurement modules 33 are disposed on the base 32 , wherein each measurement module 33 includes a measurement structure 34 and a position sensor. The three measurement structures 34 of the three measurement modules 33 move in the directions of the X-axis, the Y-axis and the Z-axis respectively, and all are in contact with the spherical body 31 . The position sensor is configured to sense the moving distance of the measurement structure 34 when the corresponding measurement structure 34 is pushed by the spherical body 31 , wherein the position sensor may be constituted by, for example, but not limited to, an optical ruler.

請參閱第3圖，第3圖係為本案較佳實施例之機器手臂的座標校正方法的流程示意圖。首先，在機器手臂1受可動載台5移動至工作空間(例如：工作平台2)中運作時，依據移動命令控制機器手臂1進行移動，並利用三維測量裝置3取得機器手臂1所到達的至少三個參考定位點 (步驟S1)。移動命令可例如但不限於包含控制機器手臂1以不同的操作動作進行至少三次移動。接著，依據該至少三個參考定位點建立參考座標系(步驟S2)。接著，機器手臂1受可動載台5移動而離開工作空間，而在機器手臂1回到工作空間中運作時，依據移動命令控制機器手臂1進行移動，並利用三維測量裝置3取得機器手臂1所到達的至少三個實際定位點 (步驟S3)，其中實際定位點的數量與參考定位點的數量相同。而後，依據至少三個實際定位點取得實際座標系，並依據參考座標系及實際座標系計算取得座標補正資訊 (步驟S4)。最後，依據座標補正資訊調整機器手臂1，使機器手臂1維持運作於參考座標系 (步驟S5)。Please refer to FIG. 3 . FIG. 3 is a schematic flowchart of the coordinate calibration method of the robot arm according to the preferred embodiment of the present invention. First, when the robot arm 1 is moved by the movable stage 5 to the working space (for example, the working platform 2 ), the robot arm 1 is controlled to move according to the movement command, and the three-dimensional measuring device 3 is used to obtain at least the position reached by the robot arm 1 . Three reference anchor points (step S1). The movement command may, for example but not be limited to, include controlling the robot arm 1 to move at least three times with different operating actions. Next, a reference coordinate system is established according to the at least three reference positioning points (step S2). Next, the robot arm 1 is moved from the working space by the movable stage 5 , and when the robot arm 1 returns to the working space to operate, the robot arm 1 is controlled to move according to the movement command, and the three-dimensional measuring device 3 is used to obtain the position of the robot arm 1 . At least three actual anchor points are reached (step S3), wherein the number of actual anchor points is the same as the number of reference anchor points. Then, the actual coordinate system is obtained according to at least three actual positioning points, and the coordinate correction information is obtained through calculation according to the reference coordinate system and the actual coordinate system (step S4). Finally, the robot arm 1 is adjusted according to the coordinate correction information to keep the robot arm 1 operating in the reference coordinate system (step S5 ).

由此可知，在機器手臂1初次移動至工作空間時，係建立參考座標系。在建立參考座標系後，即便機器手臂1移動至其他工作空間或場域，在機器手臂1回到已建立參考座標系之工作空間時，可通過比較參考座標系及實際座標系迅速調整機器手臂1，而使機器手臂1仍可運作於原先建立之參考座標系中，無需重新建立座標系及進行教點，藉此，可大幅機器手臂1之工作效率及精度。It can be seen from this that when the robot arm 1 moves to the workspace for the first time, a reference coordinate system is established. After the reference coordinate system is established, even if the robot arm 1 moves to another workspace or field, when the robot arm 1 returns to the workspace where the reference coordinate system has been established, the robot arm can be quickly adjusted by comparing the reference coordinate system and the actual coordinate system. 1, so that the robot arm 1 can still operate in the previously established reference coordinate system, and there is no need to re-establish the coordinate system and teach points, thereby improving the work efficiency and accuracy of the robot arm 1.

請再參閱第1至3圖所示，上述三個測量結構34係分別沿對應各個軸向(X軸、Y軸及Z軸)的可移動距離共同定義測量空間，於座標校正方法之步驟S1及步驟S3中，球形體31受機器手臂1帶動而於測量空間中移動，三個位置感測器的感測結果反映球形體31的三維座標。於一些實施例中，座標校正方法之步驟S1至步驟S3中的參考定位點及實際定位點為三維測量裝置3所測量的球形體31之球心的三維座標。Please refer to FIGS. 1 to 3 again, the above-mentioned three measuring structures 34 respectively define the measuring space along the movable distances corresponding to the respective axes (X-axis, Y-axis and Z-axis). In step S1 of the coordinate correction method And in step S3 , the spherical body 31 is driven by the robot arm 1 to move in the measurement space, and the sensing results of the three position sensors reflect the three-dimensional coordinates of the spherical body 31 . In some embodiments, the reference positioning point and the actual positioning point in steps S1 to S3 of the coordinate correction method are the three-dimensional coordinates of the center of the spherical body 31 measured by the three-dimensional measuring device 3 .

上述球形體31可拆卸地組接於機器手臂1，因此機器手臂1可僅在有建立或校正座標系之需求時組接於球形體31，以便於執行第3圖所示之座標校正方法。更甚者，機器手臂1可僅在需量測定位點時組接於球形體31，具體而言，機器手臂1可僅於座標校正方法之步驟S1至步驟S3中組接於球形體31。The spherical body 31 is detachably assembled with the robot arm 1 , so the robot arm 1 can be assembled with the spherical body 31 only when there is a need to establish or calibrate a coordinate system, so as to implement the coordinate calibration method shown in FIG. 3 . What's more, the robot arm 1 can be assembled to the spherical body 31 only at the demand measurement point. Specifically, the robot arm 1 can be assembled to the spherical body 31 only in steps S1 to S3 of the coordinate calibration method.

於一些實施例中，機器手臂1組接於工具4，工具4係受機器手臂1帶動而運作於工作平台2上，其中，當機器手臂1組接於工具4的情況下，機器手臂1亦可同時組接於三維測量裝置3的球形體31。藉此，當機器手臂1進行座標系校正時，無需在校正前拆除工具4，故在校正完成後，無需重新安裝工具4並進行相應調校，從而可節省校正工序及耗費時間，間接提升機器手臂1的工作效率In some embodiments, the robotic arm 1 is assembled with the tool 4, and the tool 4 is driven by the robotic arm 1 to operate on the work platform 2. When the robotic arm 1 is assembled with the tool 4, the robotic arm 1 is also It can be assembled to the spherical body 31 of the three-dimensional measuring device 3 at the same time. In this way, when the robot arm 1 performs coordinate system calibration, it is not necessary to remove the tool 4 before calibration. Therefore, after the calibration is completed, there is no need to reinstall the tool 4 and perform corresponding adjustment, thereby saving the calibration process and time-consuming, and indirectly improving the machine. Work efficiency of arm 1

以下將示例說明如何取得座標系及座標補正資訊。The following example shows how to obtain the coordinate system and coordinate correction information.

當機器手臂1依據移動命令進行移動時，可利用三維測量裝置3測量取得三個參考定位點的三維座標，通過等式 (1)、(2) 及 (3)，可依據三個參考定位點P₀ 、P_x 及P_y 取得X軸、Y軸及Z軸之單位向量

、

及

，據此，機器手臂1之旋轉矩陣R如等式 (4) 所示。

(1)

(2)

(3)

(4) 而後可根據旋轉矩陣R計算取得平移向量

，如等式 (5) 所示，

(5) 其中P_x0 、P_y0 及P_z0 為機器手臂1之檔點位置。藉此，可依據旋轉矩陣及平移向量建立參考座標系。於一些實施例中，機器手臂1自參考定位點P₀ 沿X軸移動以獲取參考定位點P_x ，機器手臂1自參考定位點P₀ 沿Y軸移動以獲取參考定位點P_y 。When the robot arm 1 moves according to the movement command, the three-dimensional measuring device 3 can be used to measure and obtain the three-dimensional coordinates of the three reference positioning points. Through equations (1), (2) and (3), the three reference positioning points can be P ₀ , P _x and P _y obtain the unit vectors of the X-axis, Y-axis and Z-axis

,

and

, and accordingly, the rotation matrix R of the robot arm 1 is shown in equation (4).

(1)

(2)

(3)

(4) Then the translation vector can be obtained by calculating the rotation matrix R

, as shown in equation (5),

(5) Among them, P _x0 , P _y0 and P _z0 are the gear positions of the robot arm 1 . In this way, a reference coordinate system can be established according to the rotation matrix and the translation vector. In some embodiments, the robot arm 1 _{moves from the reference position point P 0} along the X axis to obtain the reference position point P _x , and the robot arm 1 _{moves from the reference position point P 0} along the Y axis to obtain the reference position point P _y .

而若機器手臂1移動至其他工作空間或場域，在機器手臂1回到已建立參考座標系之工作空間時，係控制機器手臂1依據移動命令移動，並利用三維測量裝置3測量取得三個實際定位點的三維座標。參照前述之等式(1)至(5)，可計算取得當下機器手臂1之旋轉矩陣

及平移向量

。通過等式 (6) 及 (7)，可計算取得旋轉矩陣變化量

及平移向量變化量

。

(6)

(7)If the robot arm 1 moves to another workspace or field, when the robot arm 1 returns to the workspace where the reference coordinate system has been established, the robot arm 1 is controlled to move according to the movement command, and the three-dimensional measurement device 3 is used to measure and obtain three The 3D coordinates of the actual anchor point. Referring to the aforementioned equations (1) to (5), the rotation matrix of the current robot arm 1 can be calculated and obtained

and translation vector

. Through equations (6) and (7), the change amount of the rotation matrix can be calculated and obtained

and the translation vector change

.

(6)

(7)

將旋轉矩陣變化量及平移向量變化量作為座標補正資訊，並據此對機器手臂1進行調整，即可使機器手臂1運作於原先建立之參考座標系中，而無需令機器手臂1運作於實際座標系中並重新進行教點。Use the rotation matrix change and translation vector change as the coordinate correction information, and adjust the robot arm 1 accordingly, so that the robot arm 1 can operate in the originally established reference coordinate system, without requiring the robot arm 1 to operate in the actual in the coordinate system and re-teach the point.

綜上所述，本案提供一種機器手臂的座標校正方法，其係通過三維測量裝置建立工作空間之參考座標系，在機器手臂暫離後回到該工作空間時，通過三維測量裝置獲取實際座標系，並依據參考座標系與實際座標系間之差異對機器手臂進行調整，使機器手臂仍維持運作於參考座標系中。藉此，無需重複建立座標系及進行教點，可提升工作效率，且由於機器手臂始終運作於參考座標系中，故可有效確保機器手臂的高精度。另外，在機器手臂組接於工具的情況下，機器手臂亦可同時組接於三維測量裝置的球形體。藉此，當機器手臂進行校正時，無需在校正前拆除工具，故在校正完成後，無需重新安裝工具對進行相應調校，從而可節省校正工序及耗費時間，間接提升機器手臂的工作效率。To sum up, this case provides a coordinate correction method for a robotic arm, which establishes a reference coordinate system of a workspace through a three-dimensional measuring device, and obtains the actual coordinate system through a three-dimensional measuring device when the robotic arm returns to the working space after temporarily leaving. , and adjust the robot arm according to the difference between the reference coordinate system and the actual coordinate system, so that the robot arm still operates in the reference coordinate system. In this way, there is no need to repeatedly establish a coordinate system and teach points, which can improve work efficiency, and because the robot arm always operates in the reference coordinate system, the high precision of the robot arm can be effectively ensured. In addition, when the robot arm is connected to the tool, the robot arm can also be connected to the spherical body of the three-dimensional measuring device at the same time. In this way, when the robot arm is calibrated, it is not necessary to remove the tool before calibration. Therefore, after the calibration is completed, there is no need to reinstall the tool to adjust accordingly, which can save the calibration process and time-consuming, and indirectly improve the work efficiency of the robot arm.

須注意，上述僅是為說明本案而提出之較佳實施例，本案不限於所述之實施例，本案之範圍由如附專利申請範圍決定。且本案得由熟習此技術之人士任施匠思而為諸般修飾，然皆不脫如附專利申請範圍所欲保護者。It should be noted that the above-mentioned preferred embodiments are only proposed to illustrate the present case, and the present case is not limited to the described embodiments, and the scope of the present case is determined by the scope of the appended patent application. And this case can be modified by Shi Jiangsi, a person who is familiar with this technology, but none of them can be protected as attached to the scope of the patent application.

1:機器手臂 2:工作平台 3:三維測量裝置 31:球形體 32:基座 33:測量模組 34:測量結構 4:工具 5:可動載台 S1、S2、S3、S4、S5:座標校正方法的步驟1: Robot arm 2: Work Platform 3: 3D measuring device 31: Sphere 32: Pedestal 33: Measurement module 34: Measuring Structure 4: Tools 5: Movable stage S1, S2, S3, S4, S5: steps of the coordinate correction method

第1圖為本案較佳實施例之機器手臂、工作空間及三維測量裝置的立體結構示意圖。FIG. 1 is a schematic three-dimensional structure diagram of a robot arm, a work space and a three-dimensional measurement device according to a preferred embodiment of the present invention.

第2圖為第1圖之三維測量裝置的立體結構示意圖。FIG. 2 is a schematic three-dimensional structure diagram of the three-dimensional measuring device of FIG. 1 .

第3圖係為本案較佳實施例之機器手臂的座標校正方法的流程示意圖。FIG. 3 is a schematic flowchart of the coordinate calibration method of the robot arm according to the preferred embodiment of the present invention.

S1、S2、S3、S4、S5:座標校正方法的步驟S1, S2, S3, S4, S5: steps of the coordinate correction method

Claims

一種機器手臂的座標校正方法，其中該機器手臂設置於一可動載台上及運作於至少一工作空間中，該工作空間中設置有一三維測量裝置，該三維測量裝置係架構於測量該機器手臂的位置，該座標校正方法包含步驟： (a) 在該機器手臂受該可動載台移動而至該工作空間中運作時，依據一移動命令控制該機器手臂進行移動，並利用該三維測量裝置取得該機器手臂所到達的至少三個參考定位點； (b) 依據該至少三個參考定位點計算取得一旋轉矩陣及一平移向量，並依據該旋轉矩陣及該平移向量計算取得相應之一參考座標系； (c) 該機器手臂受該可動載台移動而離開該工作空間，而在該機器手臂回到該工作空間中運作時，依據該移動命令控制該機器手臂進行移動，並利用該三維測量裝置取得該機器手臂所到達的至少三個實際定位點； (d) 依據該至少三個實際定位點計算取得一旋轉矩陣及一平移向量，進而計算取得相應之一實際座標系，再通過比較該參考座標系及該實際座標系的該旋轉矩陣及該平移向量，計算取得一座標補正資訊；以及 (e) 依據該座標補正資訊調整該機器手臂，使該機器手臂維持運作於該參考座標系。A coordinate calibration method of a robotic arm, wherein the robotic arm is arranged on a movable stage and operates in at least one workspace, and a three-dimensional measuring device is arranged in the working space, and the three-dimensional measuring device is configured to measure the position of the robotic arm. position, the coordinate correction method includes steps: (a) When the robotic arm is moved by the movable stage to operate in the workspace, control the robotic arm to move according to a movement command, and use the three-dimensional measuring device to obtain at least three reference points reached by the robotic arm location point; (b) calculating and obtaining a rotation matrix and a translation vector according to the at least three reference anchor points, and calculating and obtaining a corresponding reference coordinate system according to the rotation matrix and the translation vector; (c) The robotic arm is moved from the working space by the movable stage, and when the robotic arm returns to the working space to operate, the robotic arm is controlled to move according to the movement command, and the three-dimensional measurement device is used to obtain At least three actual positioning points reached by the robotic arm; (d) Calculate and obtain a rotation matrix and a translation vector according to the at least three actual positioning points, and then calculate and obtain a corresponding actual coordinate system, and then compare the rotation matrix and the translation of the reference coordinate system and the actual coordinate system. vector, calculate to obtain a coordinate correction information; and (e) adjusting the robotic arm according to the coordinate correction information, so that the robotic arm maintains operation in the reference coordinate system.

如請求項1所述之座標校正方法，其中該移動命令包含控制該機器手臂以不同的操作動作進行至少三次移動。The coordinate correction method according to claim 1, wherein the movement command includes controlling the robot arm to move at least three times with different operation actions.

如請求項1所述之座標校正方法，其中該機器手臂之該旋轉矩陣的等式如下：

；

；

；

；其中，P₀ 、P_x 及P_y 代表三個該定位點，

、

及

分別代表X軸、Y軸及Z軸之單位向量，R 代表該機器手臂之該旋轉矩陣。The coordinate correction method as claimed in claim 1, wherein the equation of the rotation matrix of the robotic arm is as follows:

;

; wherein, P ₀ , P _x and P _y represent the three positioning points,

,

and

respectively represent the unit vector of the X-axis, Y-axis and Z-axis, and R represents the rotation matrix of the robot arm.

如請求項3所述之座標校正方法，其中該機器手臂之該平移向量的等式如下：

；其中P_x0 、P_y0 及P_z0 代表該機器手臂之檔點位置，

代表該機器手臂之該平移向量。The coordinate correction method as claimed in claim 3, wherein the equation of the translation vector of the robotic arm is as follows:

; Wherein P _x0 , P _y0 and P _z0 represent the position of the stop point of the robot arm,

represents the translation vector of the robotic arm.

如請求項4所述之座標校正方法，其中係通過比較該參考座標系及該實際座標系的該旋轉矩陣及該平移向量而計算取得一旋轉矩陣變化量及一平移向量變化量，該座標補正資訊包含該旋轉矩陣變化量及該平移向量變化量，該旋轉矩陣變化量及該平移向量變化量的等式分別如下：

；

；其中R 及

分別代表該參考座標系的該旋轉矩陣及該平移向量，

及

分別代表該實際座標系的該旋轉矩陣及該平移向量，

代表該旋轉矩陣變化量，

代表該平移向量變化量。The coordinate correction method according to claim 4, wherein a rotation matrix change amount and a translation vector change amount are calculated and obtained by comparing the rotation matrix and the translation vector of the reference coordinate system and the actual coordinate system, and the coordinate correction The information includes the variation of the rotation matrix and the variation of the translation vector. The equations of the variation of the rotation matrix and the variation of the translation vector are as follows:

;

; where R and

respectively represent the rotation matrix and the translation vector of the reference coordinate system,

and

respectively represent the rotation matrix and the translation vector of the actual coordinate system,

represents the amount of change in the rotation matrix,

Represents the amount of change in the translation vector.

如請求項1所述之座標校正方法，其中該三維測量裝置包含：一球形體，可拆卸地組接於該機器手臂，且受該機器手臂帶動而同步移動或轉動；一基座；以及三個測量模組，設置於該基座上，其中每一該測量裝置包含一測量結構及一位置感測器，該三個測量模組的三個該測量結構分別於X軸、Y軸及Z軸方向上移動，且均與該球形體接觸，該位置感測器係架構於在對應之該測量結構被該球形體推動時，測量該測量結構的移動距離，其中三個該測量結構分別沿對應各個軸向的可移動距離共同定義一測量空間，於該步驟 (a) 及該步驟 (c) 中，該球形體受該機器手臂帶動而於該測量空間中移動，三個該位置感測器的感測結果反映該球形體的三維座標。The coordinate correction method as claimed in claim 1, wherein the three-dimensional measurement device comprises: a spherical body, detachably assembled with the robotic arm, and driven by the robotic arm to move or rotate synchronously; a pedestal; and Three measurement modules are arranged on the base, wherein each of the measurement devices includes a measurement structure and a position sensor, and the three measurement structures of the three measurement modules are respectively on the X axis, the Y axis and the The position sensor moves in the Z-axis direction and is in contact with the spherical body. The position sensor is configured to measure the moving distance of the measuring structure when the corresponding measuring structure is pushed by the spherical body. Three of the measurement structures respectively define a measurement space along the movable distances corresponding to the respective axes. In the step (a) and the step (c), the spherical body is driven by the robot arm to move in the measurement space. Moving, the sensing results of the three position sensors reflect the three-dimensional coordinates of the spherical body.

如請求項6所述之座標校正方法，其中該機器手臂組接於一工具，該工具受該機器手臂帶動而進行運作，且該機器手臂在組接於該工具時可拆卸地組接於該三維測量裝置的該球形體。The coordinate calibration method according to claim 6, wherein the robot arm is assembled to a tool, the tool is driven by the robot arm to operate, and the robot arm is detachably assembled to the tool when assembled to the tool The spherical body of the three-dimensional measuring device.

如請求項6所述之座標校正方法，其中該機器手臂僅於該步驟 (a) 至該步驟 (c) 中組接於該三維測量裝置的該球形體。The coordinate correction method as claimed in claim 6, wherein the robotic arm is only assembled with the spherical body of the three-dimensional measuring device in the steps (a) to (c).

如請求項6所述之座標校正方法，其中於該步驟 (a) 至該步驟 (c) 中，該至少三個參考定位點及該至少三個實際定位點為該三維測量裝置所測量的該球形體之球心的三維座標。The coordinate correction method according to claim 6, wherein in the step (a) to the step (c), the at least three reference positioning points and the at least three actual positioning points are the The three-dimensional coordinates of the center of the sphere.

如請求項1所述之座標校正方法，其中該機器手臂為六軸型機器手臂或SCARA型機器手臂。The coordinate correction method according to claim 1, wherein the robotic arm is a six-axis robotic arm or a SCARA robotic arm.