TW202144765A - Image recording device and inspect method thereof - Google Patents
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Abstract
Description
本發明是有關於一種影像重製裝置，且特別是有關於一種共生式複檢系統的影像重製裝置。The present invention relates to an image reproduction device, and more particularly, to an image reproduction device of a symbiotic recheck system.
自動光學檢查(Automated Optical Inspection, AOI)係運用機器視覺做為檢測標準技術，透過機器視覺取代傳統人眼辨識以達到高精密度及高效率的檢測，作為改良傳統上以人力使用光學儀器進行檢測的缺點，應用層面包括從高科技產業之研發、製造品管、國防、民生、醫療、環保、電力等領域。Automated Optical Inspection (AOI) uses machine vision as the detection standard technology, and replaces traditional human eye recognition through machine vision to achieve high-precision and high-efficiency detection. The application level includes research and development of high-tech industries, manufacturing quality control, national defense, people's livelihood, medical care, environmental protection, electric power and other fields.
一般透過機器視覺檢查，比起人眼檢測可以大幅度地增加檢測的效率，然而，機器視覺仍然經常會發生誤檢或誤判的情事。舉例而言，於面板表面上的毛髮、灰塵經常會被誤判為面板上的刮痕或是噪點，因為在形態上與面板的瑕疵相當的接近。基於上面的原因，為了降低誤檢、誤判的機率，並提升產品的良率及產能，待測物被檢出的瑕疵一般要再透過人眼進行一次複檢，透過人眼再次確認待測物的瑕疵，以減少誤宰(overkill)的可能性。Generally, through machine vision inspection, the detection efficiency can be greatly increased compared with human eye detection. However, machine vision still often causes false detection or misjudgment. For example, hair and dust on the surface of the panel are often mistaken for scratches or noise on the panel, because the shape is quite similar to the defect of the panel. Based on the above reasons, in order to reduce the probability of false detection and misjudgment, and improve the product yield and productivity, the detected defects of the object to be tested are generally re-inspected through the human eye, and the object to be tested is re-confirmed through the human eye. defects to reduce the possibility of overkill.
然而，進行人工複檢時除了會耗費大量的人力，造成生產成本增加，並且也無法提高生產效率。此外，若直接將傳統的複檢設備汰除，購置新的全自動複檢設備，對生產商而言也是一大量的成本支出。However, the manual re-inspection will consume a lot of manpower, increase the production cost, and cannot improve the production efficiency. In addition, if the traditional re-inspection equipment is directly eliminated and the purchase of new fully automatic re-inspection equipment is also a large cost expenditure for the manufacturer.
有鑑於此，本發明實施利提供一種影像重製裝置，用以配合複檢設備實現自動化的複檢程序。In view of this, the embodiments of the present invention provide an image reproducing apparatus, which is used to cooperate with the re-inspection equipment to realize an automatic re-inspection procedure.
本發明實施例提供一種影像重製裝置，用以配合一複檢設備實施，包含：一殼體、一重製模組以及一傳輸模組。重製模組容置於殼體內，自複檢設備重製一待測物的一瑕疵位置影像。傳輸模組耦合至重製模組，傳輸影像重製裝置產生的瑕疵位置影像至一影像檢測裝置，藉以產生一影像複檢結果。An embodiment of the present invention provides an image reproducing apparatus, which is implemented in cooperation with a re-inspection device, and includes a casing, a reproducing module, and a transmission module. The reproducing module is accommodated in the casing, and reproduces a defect position image of an object to be tested from the re-inspection equipment. The transmission module is coupled to the reproduction module, and transmits the image of the defect position generated by the image reproduction device to an image detection device, so as to generate an image re-inspection result.
本發明另一實施例提供一種包含上述影像重製裝置的複檢系統，包含一自動操作裝置以及上述影像重製裝置。自動操作裝置輸出一操作指令，使複檢設備的一複檢攝影機移動至待測物的瑕疵位置上方，並拍攝瑕疵位置影像。影像重製裝置用以自複檢設備重製瑕疵位置影像，並將瑕疵位置影像傳輸至影像檢測裝置，藉以產生影像複檢結果。Another embodiment of the present invention provides a rechecking system including the above-mentioned image reproduction device, including an automatic operation device and the above-mentioned image reproduction device. The automatic operation device outputs an operation command, so that a re-inspection camera of the re-inspection equipment moves to above the defect position of the object to be tested, and captures an image of the defect position. The image reproducing device is used for reproducing the image of the defect position from the re-inspection equipment, and transmitting the image of the defect position to the image detection device, so as to generate an image re-inspection result.
本發明另一實施力提供一種影像重製的檢測方法，包含以下步驟：提供一複檢設備，用以接收來自一自動化光學檢測設備所產生的一待測物的檢測結果；複檢設備根據待側物的檢測結果，產生一瑕疵位置影像；透過一影像重製裝置，自複檢設備上重製複檢設備的瑕疵位置影像；以及影像檢測自影像重製裝置上所獲得的瑕疵位置影像，以產生一影像複檢結果。Another embodiment of the present invention provides a detection method for image reproduction, comprising the following steps: providing a re-inspection device for receiving a detection result of an object to be tested generated by an automatic optical inspection device; The detection result of the side object generates a defect position image; through an image reproduction device, the defect position image of the re-inspection device is reproduced from the re-inspection device; and the image is detected from the defect position image obtained by the image reproduction device, to generate an image review result.
本發明可以改善傳統程序需要大量人工執行複檢的缺失，尤其是可以解決檢測軟體能力不足或是製程變更時所造成大量過檢、誤判時所產生人力負荷過重的問題，透過本發明可以提升複檢設備的檢測效率及精確度，並可以大幅縮減人員的工作負擔。The present invention can improve the defect that a large number of manual rechecks are required in traditional procedures, and especially can solve the problem of insufficient detection software capability or a large number of overchecks and misjudgments caused by process changes. The detection efficiency and accuracy of the inspection equipment can be greatly reduced, and the workload of personnel can be greatly reduced.
本發明可以適用於各式複檢設備，增加產品的可擴充性及實用性，透過外加軟硬體或程序，有效的將傳統複檢中最耗費人力的工作予以自動化，達到大幅降低人力的目的。The present invention can be applied to all kinds of re-inspection equipment to increase the expansibility and practicability of products. By adding software and hardware or programs, it can effectively automate the most labor-intensive work in traditional re-inspection, so as to achieve the purpose of greatly reducing manpower. .
本發明的影像重製裝置適用於各式複檢設備，其安裝方式簡單且適用於各種檢測現場。影像重製裝置可將瑕疵位置影像提供給影像檢測裝置進行影像檢測，以自動產生影像複檢結果，不僅可提升檢測效率，更可降低人員誤判的發生機率。The image reproducing device of the present invention is suitable for all kinds of re-inspection equipment, the installation method is simple, and it is suitable for various inspection sites. The image reproduction device can provide the image of the defect position to the image detection device for image detection, so as to automatically generate the image re-inspection result, which can not only improve the detection efficiency, but also reduce the probability of misjudgment by personnel.
有關本發明之詳細說明及技術內容，現就配合圖式說明如下。再者，本發明中之圖式，為說明方便，其比例未必照實際比例繪製，該等圖式及其比例並非用以限制本發明之範圍，在此先行敘明。The detailed description and technical content of the present invention are described below with reference to the drawings. Furthermore, the drawings in the present invention are not necessarily drawn according to the actual scale for the convenience of description. These drawings and their scales are not intended to limit the scope of the present invention, and are described here in advance.
以下針對本發明的其中一較佳實施例進行說明，請參閱圖1及圖2，係為本發明中影像重製裝置應用於複檢設備的方塊示意圖(一)及方塊示意圖(二) 。One preferred embodiment of the present invention will be described below. Please refer to FIG. 1 and FIG. 2 , which are schematic block diagrams (1) and (2) of the application of the image reproduction device in the present invention to a rechecking device.
於一些實施例中，本發明包括一自動光學檢測設備10、一複檢設備20、以及一配合複檢設備20設置的共生式複檢系統30。In some embodiments, the present invention includes an automatic
自動光學檢測設備10用以檢測一待測物H的瑕疵，並記錄待測物H的瑕疵座標及瑕疵種類。自動光學檢測設備10可以為現行任意的自動光學檢測設備(Automated Optical Inspection, AOI)，用以透過機器視覺的方式，對待測物H進行影像分析並評估瑕疵種類。其中，影像分析的方式，可以透過一般影像處理方式(例如高斯、傅立葉、二值化、影像相減、型態分析)獲得瑕疵的種類及位置、或是透過機器學習、深度學習等利用類神經網絡進行瑕疵種類的辨識及定位，於本發明中不予以限制。The automatic
值得注意的是，於一些實施例中，自動光學檢測設備10可應用半導體製程、半導體封裝測試、電路板製程、其他電子零組件製程或其他相關產業的製程的瑕疵檢測，於本發明中不予以限制；待測物H可為半導體裝置、印刷電路板、面板…等電子零組件，於本發明中亦不予以限制。It is worth noting that, in some embodiments, the automatic
複檢設備20設置於自動光學檢測設備10的後端，用以接收由自動光學檢測設備10輸出。被歸類為瑕疵品的待測物H，複檢設備20依據瑕疵的種類及位置進行複檢，藉以複進一步確認瑕疵是否有誤判的情事，透過複判的方式減少誤宰(Overkill)的情況，進一步提高良率。The
複檢設備20包括一移載裝置21、一檢測平台22、一複檢攝影機23、一手動操作裝置24以及一複檢顯示裝置25。The
檢測平台22用於承載待測物H，移載裝置21用以將自動光學檢測設備10檢測完成的待測物H移載至檢測平台22，藉以通過檢測平台22對待測物H進行複判。於一些實施例中，在機台位置的配置上，當複檢設備20及自動光學檢測設備10之間有一段距離時，自動光學檢測設備10及複檢設備20之間可以再設置一輸送平台(例如輸送帶、線性載台等)，透過輸送平台將待測物H由自動光學檢測設備10移動至複檢設備20；於其他實施例中，當自動光學檢測設備10與複檢設備20的距離較為接近時，複檢設備20的移載裝置21可以進行移載待測物H的工作；再於其他實施例中，亦可以無需設置該移載裝置21，直接透過人工上料的方式將待測物H放置於檢測平台22上，於本發明中不予以限制。The
複檢攝影機23用以拍攝檢測平台22上的待測物H。複檢攝影機23包括一攝影機本體231、以及一供攝影機本體231設置並連接至手動操作裝置24的複檢攝影機移動載台232。The
其中，攝影機本體231可以為線掃描攝影機(Line Scan Camera)或面掃描攝影機(Area Scan Camera)，於本發明中不予以限制。於一些實施例中，攝影機本體231可以進一步包括一光學裝置，透過光學裝置將待測物H的瑕疵影像放大，以獲取放大後更為清晰的強化瑕疵影像。於其他實施例中，攝影機本體231亦可以直接透過本身的鏡頭調整焦段藉以達到放大瑕疵影像的功能，於本發明中不予以限制。再於其他實施例中，亦可以透過光源對該瑕疵影像進行強化，藉此強化瑕疵影像中的瑕疵特徵，於本發明中不予以限制。The
複檢攝影機移動載台232用以依據手動操作裝置24所輸入的控制指令移動攝影機本體231至對應的位置，藉以拍攝待測物H的瑕疵。複檢攝影機移動載台232於一些實施例中，可以為一XY載台(或XYZ載台)，透過對應的控制指令將待測物H進行X方向上或Y方向上的移動。除了XY載台外，亦不排除可以使用多軸機械手臂或其他類似的裝置用以移動複檢攝影機23至對應的位置，於本發明中不予以限制。The re-inspection
手動操作裝置24連接至複檢攝影機23，控制複檢攝影機23的操作。手動操作裝置24例如可以為鍵盤、按鈕、或是其他類此的人機介面，手動操作裝置24包括有電控裝置，此電控裝置依據輸入的指令輸出控制訊號至複檢攝影機移動載台232，以操作攝影機本體231移動至瑕疵位置。於一些實施例中，手動操作裝置24包括至少一控制按鍵241。至少一控制按鍵241可實施為實體按鍵或虛擬按鍵。至少一控制按鍵241連接至複檢攝影機23，用以控制複檢攝影機23的操作。詳細而言，手動操作裝置24的電控裝置可反應至少一控制按鍵241被按壓的情況輸出控制訊號至複檢攝影機移動載台232，以操作攝影機本體231移動至瑕疵位置。本發明對於至少一控制按鍵241的數量並不限制，其可視實際需求而配置。The
複檢顯示裝置25用以呈現複檢攝影機23拍攝的一瑕疵位置影像，以供目視檢查。具體而言，複檢顯示裝置25例如可以為液晶顯示器(Liquid Crystal Display，LCD)、有機發光二極體顯示器(Organic Light Emitting Diode display，OLED display)、電泳顯示器(Electro-Phoretic Display，EPD)、電漿顯示器(Plasma Display Panel，PDP)等用於呈現影像資訊的顯示裝置，於本發明中不予以限制。The
共生式複檢系統30配合複檢設備20設置，用以執行全自動化影像檢測功能，包括一自動操作裝置31、一影像重製裝置32以及一影像檢測裝置33。The
自動操作裝置31連接或耦接至自動光學檢測設備10或複檢設備20的主機系統以取得待測物H的瑕疵位置資訊，輸出一操作指令至複檢設備20，使複檢設備20的複檢攝影機23，移動至待測物H的瑕疵位置上方，並拍攝瑕疵位置影像。於複檢攝影機23移動至待測物H的瑕疵位置時，複檢攝影機23將自動對待測物H進行取像，所拍攝到的影像將轉移至複檢設備20的複檢顯示裝置25顯示。The
影像重製裝置32設置於複檢設備20，自複檢設備20上的複檢顯示裝置25上，重製瑕疵位置影像。於一些實施例中，影像重製裝置32可以經由訊號連接的方式連接至複檢攝影機23重製所拍攝到的瑕疵位置影像；於其他實施例中，影像重製裝置32可以經由複檢設備20的接收端擷取顯示器的影像重製瑕疵位置影像；再於其他實施例中，影像重製裝置32則可以透過影像擷取單元拍攝複檢顯示裝置25或其他有顯示瑕疵位置影像的顯示裝置，以重製瑕疵位置影像，於本發明中不予以限制。The
具體而言，圖3為本發明中影像重製裝置的方塊示意圖。請參照圖3。於一些實施例中，影像重製裝置32包括一殼體321、一重製模組322以及一傳輸模組323。重製模組322容置於殼體321內，自複檢設備20的複檢顯示裝置25上，重製待測物H的瑕疵位置影像。藉由殼體321包覆內部構件，使人員便於持有影像重製裝置32，以將影像重製裝置32設置或安裝於適當位置。如同前述，重製模組322可透過特定的訊號連接方式或透過拍攝顯示裝置的方式來重製待測物H的瑕疵位置影像。Specifically, FIG. 3 is a block diagram of the image reproduction apparatus in the present invention. Please refer to Figure 3. In some embodiments, the
傳輸模組323耦合至重製模組322，傳輸重製模組322重製的瑕疵位置影像至影像檢測裝置33，藉以產生一影像複檢結果。傳輸模組323可包括一有線/無線傳輸單元，用以傳輸瑕疵位置影像至影像檢測裝置33。詳細而言，傳輸模組323可透過有線或無線的傳輸技術，將瑕疵位置影像傳送至影像檢測裝置33。然而，本發明對於傳輸模組323所使用的傳輸技術並不加以限制。舉例而言，傳輸模組323可使用藍芽傳輸、USB傳輸、HDMI傳輸、ZigBee傳輸、乙太網路傳輸或其他適合的傳輸技術來傳送傳輸瑕疵位置影像。The
以下針對影像重製裝置32的不同實施例進行說明，請先參閱圖4，為本發明中影像重製裝置於一些實施例的使用狀態示意圖，如圖4所示：The following describes different embodiments of the
於一些實施例中，重製模組322包括一影像擷取單元322A，朝向複檢顯示裝置25拍攝，以重製複檢顯示裝置25所呈現的瑕疵位置影像或一部份瑕疵位置影像。於一些實施例中，影像擷取單元322A可以直接在預先調校時對準至複檢顯示裝置25上，擷取瑕疵位置影像，於本發明中不予以限制。包括影像擷取單元322A的影像重製裝置32例如是網路攝影機或其他攝影設備等等，本發明對此不限制。於一些實施例中，殼體321可包覆影像擷取單元322A，使人員便於持有及裝置，於本發明中不允以限制。In some embodiments, the reproducing
於另一些實施例中，請先參閱圖5，為本發明中影像重製裝置於另一些實施例的使用狀態示意圖。In other embodiments, please refer to FIG. 5 , which is a schematic diagram of the use state of the image reproduction apparatus in other embodiments of the present invention.
影像重製裝置32可訊號耦合至複檢顯示裝置25，以重製複檢顯示裝置25所呈現的瑕疵位置影像。具體而言，影像重製裝置32可以經由訊號連接至複檢設備20的複檢顯示裝置25，由輸入複檢顯示裝置25的影像中，將瑕疵影像截圖以重製複檢攝影機23所拍攝到的瑕疵位置影像。在此所提到的連接方式，包括但不限於，可以是透過視訊分屏器直接由輸入至複檢顯示裝置25的接頭分接訊號、或是直接連接至複檢顯示裝置25的主板以重製訊號等，於本發明中不予以限制。The
值得注意的是，影像重製裝置32可以依據預設定的範圍對輸入至複檢顯示裝置25的顯示畫面進行截圖，例如直接依據預設定的像素座標決定截圖的範圍，影像重製裝置32亦可以透過影像中的顯著邊界獲取顯示畫面可能是瑕疵影像的候選影像，對候選影像中透過影像辨識選出瑕疵位置影像，並記錄像素座標以便進行持續的追蹤。It should be noted that the
以下說明影像重製裝置32透過訊號方式連接獲取瑕疵影像的實施例。The following describes an embodiment in which the
請參閱圖6，為本發明中影像重製裝置於另一些實施例的方塊示意圖。於另一些實施例中，影像重製裝置32的重製模組322包括一分屏單元322B。複檢設備20還包括一影像輸出埠26，用以將瑕疵位置影像輸出。分屏單元322B自影像輸出埠26接收並重製複檢攝影機23所拍攝的瑕疵位置影像。詳細而言，分屏單元322B具有一個訊號輸入埠與複數個訊號輸出埠。分屏單元322B的訊號輸入埠連接至複檢設備20的影像輸出埠26，接收並重製自複檢攝影機23所拍攝的瑕疵位置影像。分屏單元322B的一個訊號輸出埠耦接至複檢顯示裝置25，且分屏單元322B的另一個訊號輸出埠經由傳輸模組323耦接至影像檢測裝置33。換言之，分屏單元322B將影像輸出埠26輸出的瑕疵位置影像分為兩路，其中一路通向複檢顯示裝置25，另外一路通向影像檢測裝置33。舉例而言，分屏單元322B例如是一進多出的分屏器(亦稱為視訊切換器)。透過訊號分接的方式，分屏單元322B可將瑕疵位置影像同時提供給複檢顯示裝置25與影像檢測裝置33。於另一些實施例中，殼體321包覆分屏單元322B，使人員便於持有及裝置，於本發明中不允以限制。Please refer to FIG. 6 , which is a block diagram of the image reproducing apparatus in other embodiments of the present invention. In other embodiments, the
請參閱圖7，為本發明中影像重製裝置再於另一些實施例的方塊示意圖。再於另一些實施例中，影像重製裝置32的重製模組322包括一分屏單元322C_1、一重製顯示單元322C_2以及一影像擷取單元322C_3。Please refer to FIG. 7 , which is a block diagram of another embodiment of the image reproducing apparatus in the present invention. In other embodiments, the
分屏單元322C_1的訊號輸入埠耦接至影像輸出埠26，接收並重製自複檢攝影機23所拍攝的瑕疵位置影像。分屏單元322C_1的一個訊號輸出埠耦接至複檢顯示裝置25，且分屏單元322C_1的另一個訊號輸出埠耦接至重製顯示單元322C_2。換言之，分屏單元322C_1將影像輸出埠26輸出的瑕疵位置影像分為兩路訊號，其中一路通向複檢顯示裝置25，另外一路通向重製顯示單元322C_2。The signal input port of the split screen unit 322C_1 is coupled to the
重製顯示單元322C_2連接至分屏單元322C_1，用以接收並顯示瑕疵位置影像。詳細而言，重製顯示單元322C_2從分屏單元322C_1接收到瑕疵位置影像，並顯示瑕疵位置影像。具體而言，重製顯示單元322C_2例如可以為液晶顯示器(Liquid Crystal Display，LCD)、有機發光二極體顯示器(Organic Light Emitting Diode display，OLED display)、電泳顯示器(Electro-Phoretic Display，EPD)、電漿顯示器(Plasma Display Panel，PDP)等用於呈現影像資訊的顯示裝置，於本發明中不予以限制。The reproduction display unit 322C_2 is connected to the split screen unit 322C_1 for receiving and displaying the image of the defect position. Specifically, the reproduction display unit 322C_2 receives the defect position image from the split screen unit 322C_1, and displays the defect position image. Specifically, the reproduction display unit 322C_2 may be, for example, a liquid crystal display (Liquid Crystal Display, LCD), an organic light emitting diode display (Organic Light Emitting Diode display, OLED display), an electrophoretic display (Electro-Phoretic Display, EPD), A display device for presenting image information, such as a plasma display panel (PDP), is not limited in the present invention.
影像擷取單元322C_3可包括影像感測器與鏡頭等等元件。影像感測器可配置有電荷耦合元件（Charge Coupled Device，CCD）、互補性氧化金屬半導體（Complementary Metal-Oxide Semiconductor，CMOS）元件或其他種類的感光元件，用以產生影像，於本發明中不予以限制。影像擷取單元322C_3朝向重製顯示單元322C_2拍攝，以獲得瑕疵位置影像或一部分瑕疵位置影像。The image capturing unit 322C_3 may include elements such as an image sensor and a lens. The image sensor can be configured with a Charge Coupled Device (CCD), a Complementary Metal-Oxide Semiconductor (CMOS) element or other types of light-sensing elements to generate images, which are not included in the present invention. be restricted. The image capturing unit 322C_3 shoots toward the reproduction display unit 322C_2 to obtain a defect position image or a part of the defect position image.
影像擷取單元322C_3可以直接在預先調校時對準至重製顯示單元322C_2上的特定拍攝位置，以獲取整張瑕疵位置影像或一部分瑕疵位置影像。影像擷取單元322C_3可將拍攝到的整張瑕疵位置影像或一部分瑕疵位置影像傳送給影像檢測裝置33進行進一步檢測，以產生影像複檢結果。再於另一些實施例中，殼體321包覆分屏單元322C_1、重製顯示單元322C_2以及影像擷取單元322C_3，使人員便於持有及裝置，於本發明中不允以限制。The image capturing unit 322C_3 can be directly aligned to a specific shooting position on the reproduction display unit 322C_2 during pre-adjustment, so as to acquire the entire defect position image or a part of the defect position image. The image capturing unit 322C_3 can transmit the captured image of the entire defect position or a part of the image of the defect position to the
請參閱圖8，為本發明中影像重製裝置應用於複檢設備的外觀示意圖。於一些實施例中，呈現為箱體形狀的影像重製裝置32適於擺設於複檢設備20旁邊的承載台上。於一些實施例中，影像重製裝置32可透過複檢設備20的影像輸出埠26接收並同步重製複檢顯示裝置25所顯示的瑕疵位置影像。然而，本發明對於影像重製裝置32的實際擺放位置並不予以限制，其可視實際應用現場進行彈性化配置。於其他實施例中，當複檢設備20周遭的空間不足夠時，可將影像重製裝置32擺放至遠離複檢設備20的位置，並透過長度足夠的訊號傳輸實體線連結影像重製裝置32與複檢顯示裝置25。Please refer to FIG. 8 , which is a schematic diagram of the appearance of the image reproducing apparatus of the present invention applied to a rechecking device. In some embodiments, the
請參閱圖9，為本發明中影像重製裝置的透視示意圖。於一些實施例中，殼體321包括一上罩321_1以及一底板321_2。上罩321_1與底板321_2所形成容置空間用以容置影像重製裝置32的部分或全部元件。Please refer to FIG. 9 , which is a schematic perspective view of the image reproduction apparatus in the present invention. In some embodiments, the
需說明的是，由於影像重製裝置32是由殼體321包覆內部元件，因此這些內部元件產生熱能將累積於殼體321內而導致溫度上升。像是，重製顯示單元322C_2與影像擷取單元322C_3的持續運作，都會產生累積於殼體321的熱能。當殼體321內部溫度過高時，將不利於內部元件正常運作。基此，於一些實施例中，影像重製裝置32更包括一散熱模組324。散熱模組324設置於殼體321上，用以將殼體321內所累積的熱能傳送至殼體321外。於一些實施例中，散熱模組324可為散熱鰭片單元、風扇單元、水冷單元、散熱孔洞單元其中之一或其組合，於本發明中不予以限制。於一些實施例中，散熱模組324實施為風扇單元。It should be noted that, since the internal components of the
於一些實施例中，重製顯示單元322C_2、影像擷取單元322C_3與散熱模組324皆固定設置於底板321_2上。重製顯示單元322C_2自分屏單元322C_1接收並顯示瑕疵位置影像，影像擷取單元322C_3朝重製顯示單元322C_2的顯示面進行拍攝，以獲得瑕疵位置影像或一部分瑕疵位置影像。In some embodiments, the reproduction display unit 322C_2 , the image capturing unit 322C_3 and the
於一些實施例中，殼體321的上罩321_1的側面具有至少一風扇通風孔83以及至少一對流通風孔84，實施為風扇單元的散熱模組324可設置於至少一風扇通風孔83旁。至少一風扇通風孔83以及至少一對流通風孔84連接外部空間與殼體321的內部空間，藉由風扇單元的運作產生流通氣流，使累積於殼體321內的熱能可有效地排除。然而，本發明對於通風孔的數量、位置並不予以限制，其可視實際需求而配置。In some embodiments, the side surface of the upper cover 321_1 of the
值得一提的是，於一些實施例中，影像擷取單元322C_3是於殼體321的內部空間拍攝重製顯示單元322C_2，殼體321可遮蔽外部環境光源，因此可減少外部環境光源對於拍攝結果的影響程度，可更有利於提升影像檢測的準確度。此外，透過事前調校，影像擷取單元322C_3可拍攝重製顯示單元322C_2的完整顯示畫面或局部顯示畫面，以獲得瑕疵位置影像或一部分瑕疵位置影像，從而提供彈性化的影像重製的檢測方法。It is worth mentioning that, in some embodiments, the image capturing unit 322C_3 captures and reproduces the display unit 322C_2 in the inner space of the
上述的方式僅為影像重製裝置32具體用以獲取瑕疵影像的其中幾種實施方式，除上述的方式外，亦可以透過連接或耦接至設置於該複檢攝影機23及複檢顯示裝置25之間的任意一站點截取瑕疵影像，於本發明中不予以限制。The above-mentioned methods are only some of the specific implementations for the
以下請一併參閱圖10，為本發明中影像檢測裝置的方塊示意圖。於一些實施例中，影像檢測裝置33耦合至影像重製裝置32，根據瑕疵位置影像，產生一影像複檢結果。具體而言，影像檢測裝置33可以是電腦主機，包括一處理器331，以及一連接於處理器331的儲存單元332。於其他實施例中，處理器331以及儲存單元332可共同構成一電腦或處理器，例如是個人電腦、工作站、主機電腦或其他型式之電腦或處理器，在此並不限制其種類。Please refer to FIG. 10 , which is a block diagram of the image detection device in the present invention. In some embodiments, the
於一些實施例中，處理器331耦接於儲存單元332。處理器331例如是中央處理器(Central Processing Unit, CPU)，或是其他可程式化之一般用途或特殊用途的微處理器(Microprocessor)、數位訊號處理器(Digital Signal Processor, DSP)、可程式化控制器、特殊應用積體電路(Application Specific Integrated Circuits, ASIC)、可程式化邏輯裝置(Programmable Logic Device, PLD)或其他類似裝置或這些裝置的組合，在此並不限制其種類。In some embodiments, the
於一些實施例中，影像檢測裝置33更包括一瑕疵複檢模組33A，根據瑕疵位置影像，判斷待測物H是否為缺陷。於另一些實施例中，影像檢測裝置33更包括一類別複檢模組33B，根據瑕疵位置影像，分類待測物H的缺陷類型。具體而言，影像檢測裝置33可以透過一般影像處理方式(例如高斯、傅立葉、二值化、影像相減、型態分析)、或是透過機器學習、深度學習等利用類神經網絡對瑕疵位置影像進行判定瑕疵位置影像是否確為缺陷、或是缺陷的種類，影像處理的方式於本發明中不允以限制。於一些實施例中，瑕疵複檢模組33A以及類別複檢模組33B儲存於儲存單元332，供處理器331讀取、執行相對應的程序。於其他實施例中，瑕疵複檢模組33A以及類別複檢模組33B可儲存於外部儲存裝置中，藉以減輕影像檢測裝置33本身的運算負擔，於本發明中不允以限。In some embodiments, the
最終，影像檢測裝置33將自動光學檢測設備10的檢測結果中的瑕疵種類與影像檢測裝置33所產生的影像分析結果進行比對，以輸出一影像複檢結果，藉此經由影像複檢結果確認瑕疵判斷的正確性，以減少誤宰(Overkill)的情事。Finally, the
以下針對本發明利用影像重製裝置的自動檢測方法進行詳細的說明，請一併參閱圖11，為本發明中影像重製的檢測方法的流程示意圖。The following is a detailed description of the automatic detection method using the image reproduction device of the present invention. Please refer to FIG. 11 , which is a schematic flowchart of the detection method of the image reproduction in the present invention.
於一些實施例中，提供一種影像重製的檢測方法，用以配合一複檢設備實施，所述的方法依據以下的步驟執行，以經由全自動化控制來偵測待測物的瑕疵。In some embodiments, an image duplication detection method is provided to be implemented in conjunction with a re-inspection device. The method is performed according to the following steps to detect defects of the DUT through fully automated control.
於步驟S01，提供一複檢設備，用以接收來自一自動光學檢測設備所產生的一待測物的檢測結果。於此步驟中，自動光學檢測設備10先對待測物H進行檢測，並產生一檢測結果，複檢設備20再從自動光學檢測設備10接收待測物H的檢測結果。In step S01, a re-inspection device is provided for receiving a detection result of an object to be tested generated by an automatic optical detection device. In this step, the automatic
於步驟S02，複檢設備根據待測物的檢測結果，產生一瑕疵位置影像。於此步驟中，複檢設備20先從自動光學檢測設備10接收待測物H的瑕疵位置資訊，於一些實施例中，瑕疵位置資訊包括在自動光學檢測設備10所產生的檢測結果中，於其他實施例中，複檢設備20可透過其他方式獲得待測物H的瑕疵位置資訊，於本發明不允以限制。接著，利用自動操作裝置31輸出一操作指令至複檢設備20，使複檢攝影機23根據待測物H的瑕疵位置資訊，移動至待測物H的瑕疵位置上，並拍攝一瑕疵位置影像。於一些實施例中，複檢攝影機23可以透過複檢設備20的手動操作裝置24，操作複檢攝影機23移動至瑕疵位置上方，並拍攝瑕疵位置影像。於一些實施例中，自動操作裝置31自動按壓手動操作裝置24上的至少一控制按鍵241，使複檢攝影機23根據瑕疵位置資訊，移動至待測物H的瑕疵位置上。In step S02, the re-inspection device generates a defect position image according to the detection result of the object to be tested. In this step, the
步驟S03，透過一影像重製裝置，自複檢設備上重製複檢設備的一複檢顯示裝置所呈現的瑕疵位置影像。於此步驟中，影像重製裝置32可透過訊號分接或直接拍攝複檢設備20的複檢顯示裝置25藉以重製瑕疵位置影像。於一些實施例中，可利用影像擷取單元322A朝向複檢顯示裝置25拍攝，以重製複檢顯示裝置25所呈現的瑕疵位置影像或一部分瑕疵位置影像。或者，於另一些實施例中，可利用影像重製裝置32中的分屏單元322B重製瑕疵位置影像。又或者，再於另一些實施例中，可利用影像重製裝置32中的分屏單元322C_1將瑕疵位置影像傳送至重製顯示單元322C_2進行顯示，並利用影像擷取單元322C_3拍攝重製顯示單元322C_2獲取瑕疵位置影像或一部分瑕疵位置影像。In step S03 , an image of the defect position displayed by a re-inspection display device of the re-inspection device is reproduced from the re-inspection device through an image reproducing device. In this step, the
步驟S04，影像檢測自影像重製裝置上所獲得的瑕疵位置影像，以產生一影像複檢結果。於此步驟中，影像檢測的過程可以經由電腦裝置及影像處理軟體進行分析，根據的瑕疵位置影像，分類待測物H的缺陷類型，以產生影像複檢結果，或是根據瑕疵位置影像，判斷待測物H是否為缺陷，以產生影像複檢結果。Step S04 , the image is detected from the image of the defect position obtained from the image reproduction device, so as to generate an image re-inspection result. In this step, the process of image detection can be analyzed by a computer device and image processing software, and the defect type of the object H to be tested can be classified according to the image of the defect position, so as to generate an image re-inspection result, or determine the defect position according to the image of the defect position. Whether the object to be tested H is defective or not, to generate an image re-inspection result.
步驟S05，根據影像複檢結果，對待測物進行人工目視檢查。於此步驟中，在獲得影像複檢結果後，作業人員可以再根據影像複檢結果，於複檢顯示裝置25上，對待測物H的瑕疵位置影像進行人工目視檢查，最終再執行一次人檢，此步驟視需求可以省略，於本發明中不予以限制。Step S05, according to the image re-examination result, perform manual visual inspection of the object to be measured. In this step, after obtaining the image re-inspection result, the operator can perform manual visual inspection on the image of the defect position of the object to be tested H on the
綜上所述，本發明可以改善傳統程序需要大量人工執行複檢的缺失，尤其是可以解決檢測軟體能力不足或是製程變更時所造成大量過檢、誤判時所產生人力負荷過重的問題，透過本發明可以提升複檢設備的檢測效率及精確度，並可以大幅縮減人員的工作負擔。To sum up, the present invention can improve the lack of a large number of manual re-inspections required by traditional procedures, and can especially solve the problem of insufficient detection software capability or a large number of over-inspections and misjudgments caused by process changes. The invention can improve the detection efficiency and accuracy of the re-inspection equipment, and can greatly reduce the workload of personnel.
此外，本發明可以適用於各式複檢設備，增加產品的可擴充性及實用性，透過外加軟硬體或程序，有效的將傳統複檢中最耗費人力的工作予以自動化，達到大幅降低人力的目的。再者，本發明的影像重製裝置適用於各式複檢設備，其安裝方式簡單且適用於各種檢測現場。影像重製裝置可將瑕疵位置影像提供給影像檢測裝置進行影像檢測，以自動產生影像複檢結果，不僅可提升檢測效率，更可降低人員誤判的發生機率。In addition, the present invention can be applied to all kinds of re-inspection equipment to increase the expansibility and practicability of products. By adding software and hardware or programs, it can effectively automate the most labor-intensive work in traditional re-inspection, so as to greatly reduce manpower. the goal of. Furthermore, the image reproducing apparatus of the present invention is suitable for various re-inspection equipment, and the installation method is simple and suitable for various inspection sites. The image reproduction device can provide the image of the defect position to the image detection device for image detection, so as to automatically generate the image re-inspection result, which can not only improve the detection efficiency, but also reduce the probability of misjudgment by personnel.
10:自動光學檢測設備
20:複檢設備
21:移載裝置
22:檢測平台
23:複檢攝影機
231:攝影機本體
232:複檢攝影機移動載台
24:手動操作裝置
241:控制按鍵
25:複檢顯示裝置
26:影像輸出埠
30:共生式複檢系統
31:自動操作裝置
32:影像重製裝置
321:殼體
322:重製模組
323:傳輸模組
322A:影像擷取單元
322B、322C_1:分屏單元
322C_2:重製顯示單元
322C_3:影像擷取單元
321_1:上罩
321_2:底板
324:散熱模組
83:風扇通風口
84:對流通風口
33:影像檢測裝置
331:處理器
332:儲存單元
33A:瑕疵複檢模組
33B:類別複檢模組
H:待測物
S01~S05:步驟10: Automatic optical inspection equipment
20: Re-inspect the equipment
21: Transfer device
22: Detection platform
23: Recheck the camera
231: Camera body
232: Review camera movement stage
24: Manual operating device
241: Control keys
25: Recheck the display device
26: Video output port
30: Symbiotic Recheck System
31: Automatic operating device
32: Video reproduction device
321: Shell
322: Remake Mods
323:
圖1為本發明中影像重製裝置應用於複檢設備的方塊示意圖(一)。 圖2為本發明中影像重製裝置應用於複檢設備的方塊示意圖(二)。 圖3為本發明中影像重製裝置的方塊示意圖。 圖4為本發明中影像重製裝置於一些實施例的使用狀態示意圖。 圖5為本發明中影像重製裝置於另一些實施例的使用狀態示意圖。 圖6為本發明中影像重製裝置於另一些實施例的方塊示意圖。 圖7為本發明中影像重製裝置再於另一些實施例的方塊示意圖。 圖8為本發明中影像重製裝置應用於複檢設備的外觀示意圖。 圖9為本發明中影像重製裝置的透視示意圖。 圖10為本發明中影像檢測裝置的方塊示意圖。 圖11為本發明中影像重製的檢測方法的流程示意圖。FIG. 1 is a schematic block diagram (1) of applying the image reproduction apparatus of the present invention to a rechecking device. FIG. 2 is a schematic block diagram (2) of applying the image reproducing apparatus of the present invention to a rechecking device. FIG. 3 is a block diagram of the image reproduction apparatus in the present invention. FIG. 4 is a schematic diagram of the use state of the image reproduction apparatus in some embodiments of the present invention. FIG. 5 is a schematic diagram of the use state of the image reproducing apparatus in other embodiments of the present invention. FIG. 6 is a block diagram of the image reproduction apparatus in other embodiments of the present invention. FIG. 7 is a schematic block diagram of the image reproducing apparatus in other embodiments of the present invention. FIG. 8 is a schematic diagram of the appearance of the image reproducing apparatus of the present invention applied to a re-inspection device. FIG. 9 is a schematic perspective view of the image reproduction apparatus in the present invention. FIG. 10 is a block diagram of an image detection apparatus in the present invention. FIG. 11 is a schematic flowchart of a method for detecting image duplication in the present invention.
32:影像重製裝置32: Video reproduction device
321_1:上罩321_1: upper cover
321_2:底板321_2: Bottom plate
322C_2:重製顯示單元322C_2: Reworked display unit
322C_3:影像擷取單元322C_3: Image capture unit
324:散熱模組324: cooling module
83:風扇通風口83: Fan vents
84:對流通風口84: Convection Vents
Claims (19)
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| CN100401042C (en) * | 2003-01-24 | 2008-07-09 | 牧德科技股份有限公司 | Methos and system for detecting faceplate of liquid crystal display |
| JP2005003574A (en) * | 2003-06-13 | 2005-01-06 | Nippon Steel Corp | Method and device for inspecting surface flaw |
| JP2007033280A (en) * | 2005-07-28 | 2007-02-08 | Yokogawa Electric Corp | Image inspection device |
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