TW202144262A - Detection device, correction method and test equipment using the same - Google Patents
Detection device, correction method and test equipment using the same Download PDFInfo
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本發明提供一種提高電子元件測試良率及品質之檢知裝置及測試調校方法。The invention provides a detection device and a test adjustment method for improving the test yield and quality of electronic components.
在現今,載帶(如薄膜載帶)應用作為電子元件之載具,並分批次成型電路單元,以供固接電子元件;請參閱圖1、2,載帶10具有第一批次之第一電路單元11、第二批次之第二電路單元12…,第一電路單元11之各第一承載區111包含第一電路112及第一電子元件113,第一電子元件113之第一接點1131供電性連接第一電路112之第一傳輸點1121;第二批次之第二電路單元12之各第二承載區121包含第二電路122及第二電子元件123,第二電子元件123之第二接點1231供電性連接第二電路122之第二傳輸點1221。At present, carrier tapes (such as film carrier tapes) are used as carriers for electronic components, and circuit units are formed in batches for fixing electronic components; please refer to FIGS. 1 and 2, the
測試設備以上鏈輪21及下鏈輪22輸送載帶10作X-Z方向位移,令第一電路單元11的第一電子元件113及第二電路單元12之第二電子元件123位於貼接件23前方,再以探針卡24之第一探針241及第二探針242電性接觸第一電路單元11之第一電路112的第一傳輸點1121及第二電路單元12之第二電路122的第二傳輸點1221,而同步對第一電子元件113及第二電子元件123執行測試作業。The
惟,由於電路成型製程採分批次於載帶10上製作第一電路單元11、第二電路單元12…,雖然第一電路單元11同一批次之複數個第一傳輸點1121不易產生間距位差,但第一電路單元11及第二電路單元12易因不同批次製作時序或機構等因素,致使第一電路單元11與第二電路單元12具有Y方向之間距位差L,易言之,第一電路112的第一傳輸點1121與第二電路122的第二傳輸點1221具有間距位差L,當探針卡24之第一探針241及第二探針242欲同步測試第一電子元件113及第二電子元件123時,即會發生第一探針241雖準確接觸第一電路112之第一傳輸點1121,但第二探針242卻無法準確接觸第二電路122之第二傳輸點1221,以致誤判第二電子元件123為不良品,進而影響測試準確性。又若被誤判之第二電子元件123實際為良品,僅因誤判而被淘汰,造成電子元件之成本損失。再者,於實際作業中,測試裝置設定探針卡24之第二探針242要發生至少三次測試異常,方可判定第二電子元件123為不良品,但易使載帶10或第二電子元件123因第二探針242多次錯誤壓抵而受損,以致增加成本。However, since the
本發明之目的一,係提供一種檢知裝置,其於載帶之入料路徑配置承檢器,承檢器取像載帶之至少一批次具電子元件及調校基準之承載區,並將承載區取像資料傳輸至處理器,處理器分析承載區取像資料,並取得調校基準位差值,以供調校載帶,進而提高電子元件良率及測試品質。One of the objectives of the present invention is to provide a detection device, in which a detection device is arranged on the feeding path of the carrier tape, and the detection device captures at least one batch of the carrier tape with electronic components and a bearing area for calibration standards, and The imaging data of the bearing area is transmitted to the processor, and the processor analyzes the imaging data of the bearing area, and obtains the adjustment reference position difference value for adjustment of the carrier tape, thereby improving the yield rate and test quality of electronic components.
本發明之目的二,係提供一種檢知裝置,其於載帶之入料路徑配置整平機構,以確保載帶之平整性,使承檢器準確取像至少一批次具電子元件及調校基準之承載區,達到提升調校精確性之實用效益。The second object of the present invention is to provide a detection device, which is equipped with a leveling mechanism on the feeding path of the carrier tape to ensure the flatness of the carrier tape, so that the detector can accurately capture images of at least one batch of electronic components and adjust The bearing area of the calibration standard achieves the practical benefit of improving the accuracy of calibration.
本發明之目的三,係提供一種檢知裝置,其整平機構設置至少一第一溫控件,以於入料路徑預溫載帶上之電子元件,進而有效縮短測試作業時間,達到提高生產效能之實用效益。The third object of the present invention is to provide a detection device, wherein the leveling mechanism is provided with at least one first temperature control device to pre-heat the electronic components on the carrier tape in the feeding path, thereby effectively shortening the test operation time and improving production. Practical benefits of performance.
本發明之目的四,係提供一種檢知裝置,其於測試器之前方配置定檢取像器,於每次測試時序時,以取像載帶之承載區的至少一定位點,以供檢知承載區是否位於預設定點位置,達到提升調校精確性之實用效益。The fourth object of the present invention is to provide a detection device, which is equipped with a fixed detection imager in front of the tester, in each test sequence, at least one positioning point of the bearing area of the image carrier tape is captured for inspection. Knowing whether the bearing area is located at the preset point position can achieve the practical benefit of improving the accuracy of adjustment.
本發明之目的五,係提供一種檢知裝置,其於載帶與測試器之間配置初檢取像器,於初始測試作業時,初檢取像器取像載帶之預設測試接點及測試器之傳輸件,以供調校載帶,使預設之測試接點初始對位於傳輸件,達到提升調校精確性之實用效益。The fifth object of the present invention is to provide a detection device, wherein an initial inspection imager is arranged between the carrier tape and the tester. During the initial test operation, the initial inspection imager captures the preset test contact of the carrier tape. And the transmission part of the tester is used to adjust the carrier tape, so that the preset test contacts are initially aligned with the transmission part, so as to achieve the practical benefit of improving the adjustment accuracy.
本發明之目的六,係提供一種測試調校方法,其承檢取像手段以承檢器取像載帶之至少一批次具電子元件及調校基準之承載區,並將承載區取像資料傳輸至處理器,承檢比對手段以處理器分析承載區取像資料,而取得至少一組承載區之調校基準位差值,調校手段於具位差之一組承載區的一電子元件完測後,將調校基準位差值補償於載帶之位移值,而調校載帶,使誤判之另一電子元件搭配預設電子元件同步執行測試作業,進而提高電子元件之測試良率。The sixth object of the present invention is to provide a test and adjustment method, wherein the inspection and image capturing means use an inspection device to capture images of at least one batch of bearing areas of a carrier tape with electronic components and calibration standards, and capture images of the bearing areas The data is transmitted to the processor, and the inspection and comparison means analyzes the imaging data of the bearing area by the processor, and obtains the calibration reference position difference value of at least one set of bearing areas, and the adjustment means is used in a set of bearing areas with the position difference. After the electronic components are tested, the adjustment reference position difference is compensated for the displacement value of the carrier tape, and the carrier tape is adjusted so that another electronic component that has been misjudged is matched with the preset electronic component to perform the test operation synchronously, thereby improving the testing of electronic components. Yield.
本發明之目的七,係提供一種測試設備,包含機台、輸送裝置、供料裝置、收料裝置、測試裝置、檢知裝置及中央控制裝置;輸送裝置係配置於機台,並設有承載機構及輸送機構,輸送機構裝配於承載機構,以輸送載帶 ;供料裝置係裝配於輸送裝置,並設有至少一供料器,以提供具待測電子元件之載帶;收料裝置係裝配於輸送裝置,並設有至少一收料器,以收置具已測電子元件之載帶;測試裝置係配置於機台,並設有至少一測試器,以供對載帶上之複數個電子元件執行測試作業;檢知裝置包含承檢器及處理器,承檢器於入料路徑取像載帶,處理器接收分析承檢器之取像資料;中央控制裝置以控制及整合各裝置作動,而執行自動化作業,達到提升測試效能之實用效益。The seventh object of the present invention is to provide a testing equipment, including a machine, a conveying device, a feeding device, a receiving device, a testing device, a detection device and a central control device; the conveying device is arranged on the machine, and is provided with a bearing Mechanism and conveying mechanism, the conveying mechanism is assembled on the carrying mechanism to convey the carrier tape ; The feeding device is assembled on the conveying device and has at least one feeder to provide the carrier tape with the electronic components to be tested; the receiving device is assembled on the conveying device and has at least one receiver to receive A carrier tape on which the tested electronic components are placed; the testing device is arranged on the machine table, and is provided with at least one tester for performing testing operations on a plurality of electronic components on the carrier tape; the detection device includes a tester and a processing device The detector takes the image carrier tape in the feeding path, and the processor receives and analyzes the imaging data of the detector; the central control device controls and integrates the actions of each device, and performs automatic operations to achieve practical benefits of improving test performance.
本發明之目的八,係提供一種測試設備,更包含於輸送裝置之承載機構配置具至少一第二溫控件之溫控裝置,以供載帶之電子元件於預設溫度測試環境執行測試作業,進而提升測試品質。The eighth object of the present invention is to provide a test equipment, further comprising a temperature control device provided with at least one second temperature control device in the carrier mechanism of the conveying device, so that the electronic components of the carrier tape can perform testing operations in a preset temperature test environment , thereby improving the test quality.
為使 貴審查委員對本發明作更進一步之瞭解,茲舉一較佳實施例並配合圖式,詳述如後:In order to make your examiners further understand the present invention, hereby give a preferred embodiment and cooperate with the drawings, the details are as follows:
請參閱圖3,載帶30具有複數個批次之電路單元,各批次電路單元包含至少一具電路之承載區,以供連結且承固電子元件,例如一批次電路單元包含一具電路之承載區,例如一批次電路單元包含複數個具電路之承載區;於本實施例中,載帶30包含第一批次之第一電路單元31、第二批次之第二電路單元32…等,第一電路單元31設有複數個第一承載區311,各第一承載區311包含第一定位點312、第一電路313及第一電子元件314,第一電子元件314以第一接點3141電性連接第一電路313之第一傳輸點3131;第二電路單元32設有複數個第二承載區321,各第二承載區321包含第二定位點322、第二電路323及第二電子元件324,第二電子元件324以第二接點3241電性連接第二電路323之第二傳輸點3231。Please refer to FIG. 3 , the
由於電子元件型式不同,其接點之配置也所有差異,例如電子元件之頂面及底面分別具有接點,或電子元件之底面具接點,業者可依電子元件之型式及測試作業需求,以電路之傳輸點或電子元件之接點作為測試接點;於本實施例中,以第一電路313之第一傳輸點3131及第二電路323之第二傳輸點3231分別作為第一承載區311及第二承載區321的測試接點。Due to the different types of electronic components, the configuration of their contacts is also different. For example, electronic components have contacts on the top surface and bottom surface respectively, or contacts on the bottom surface of electronic components. According to the type of electronic components and the needs of testing operations, the industry can use The transmission point of the circuit or the contact of the electronic component is used as the test contact; in this embodiment, the
請參閱圖3、4,一種測試設備包含機台40、輸送裝置50、供料裝置60、收料裝置70、測試裝置80、檢知裝置90及中央控制裝置(圖未示出),以供測試及調校具電子元件之載帶30,測試設備更包含溫控裝置100,使電子元件於預設溫度測試環境執行測試作業,中央控制裝置以控制及整合各裝置作動,以執行自動化作業。Please refer to FIGS. 3 and 4 , a test equipment includes a
輸送裝置50裝配於機台40,包含承載機構及輸送機構,輸送機構裝配於承載機構,以輸送載帶30;承載機構包含承載驅動單元及載架單元,承載驅動單元設有至少一承載驅動器,以供驅動載架單元位移,於本實施例中,承載驅動單元包含第一承載驅動器51及第二承載驅動器52;載架單元設有至少一載架,並由承載驅動單元驅動作至少一方向位移,於本實施例中,載架單元包含第一載架53、第二載架54、第一貼接件55及第二貼接件56,第一載架53供第一承載驅動器51驅動作Y-X方向位移,並裝配第二承載驅動器52,第二載架54供第二承載驅動器52驅動作X方向位移,第一貼接件55裝配於第二載架54,並位於載帶30之測試路徑,第二貼接件56作可位移式配置於第二載架54,並由貼接驅動器57驅動相對第一貼接件55位移,以供貼接載帶30,並可顯露載帶30之第一承載區311或第二承載區321;輸送機構設有至少一輸送器,以供輸送載帶30,於本實施例中,輸送器包含第一輸送輪581及第二輸送輪582,第一輸送輪581及第二輸送輪582裝配於第二載架54,以供輸送具複數個第一、二電子元件314、324之載帶30沿入料路徑、測試路徑及出料路徑位移。The
供料裝置60係裝配於輸送裝置50,並設有至少一供料器61,以提供具待測第一、二電子元件314、324之載帶30。收料裝置70係裝配於輸送裝置50,並設有至少一收料器61,以收置具已測第一、二電子元件314、324之載帶30。測試裝置80係配置於機台40,並設有至少一測試器,以供對載帶30上之複數個電子元件執行測試作業;測試器依測試作業需求而配置複數個傳輸件;於本實施例中,測試裝置80位於輸送裝置50之前方,並於承板81裝配一為探針卡82之測試器,探針卡82設有通孔821,並於通孔821配置為第一探針83及第二探針84之複數個傳輸件,以供同步測試載帶30上之第一電子元件314、第二電子元件324或第一電子元件314及第二電子元件324。The
檢知裝置90包含承檢器91及處理器(圖未示出),承檢器91係配置於載帶30之入料路徑,以取像載帶30之至少一具電子元件及調校基準之承載區
,更進一步,承檢器91可直接取像載帶30,或搭配菱鏡使用,承檢器91可依測試作業需求而取像預設數量之承載區,例如承檢器91逐一取像載帶30之承載區
,例如承檢器91單次之取像數量相同或異於測試器之傳輸件數量;承檢器91可作固定式或移動式配置,承檢器91與載帶30作相對位移,例如載帶30沿入料路徑位移行經承檢器91,以供承檢器91取像,例如承檢器91沿入料路徑位移,以取像載帶30,前述方式均可達到承檢器91取像載帶30之目的,而不受限於本實施例;本實施例中,承檢器91為CCD,而固設於輸送裝置50之第一載架53,並搭配菱鏡,以取像入料路徑之載帶30的複數個第一承載區311、複數個第二承載區321或第一、二承載區311、321。The
處理器係接收該承檢器之承載區取像資料,並分析該承載區之調校基準位差;更進一步,處理器可將承載區取像資料與資料庫內建之承載區樣本資料作比對分析,或者將二承載區取像資料作比對分析;又檢知裝置90可獨立配置處理器,或應用中央控制裝置之處理器,不受限於本實施例;於本實施例中,檢知裝置90應用中央控制裝置之處理器,處理器設有資料庫,資料庫內建之承載區樣本資料。The processor receives the imaging data of the bearing area of the detector, and analyzes the calibration reference level difference of the bearing area; further, the processor can compare the imaging data of the bearing area with the sample data of the bearing area built in the database. The comparison analysis, or the comparison and analysis of the image data of the two bearing areas; and the
檢知裝置90於載帶30之入料路徑配置整平機構,整平機構設置至少一承靠件,並於承靠件設有至少一整平部件,以整平載帶30,使承檢器91準確取像電子元件;更進一步,整平部件可為夾具或吸孔,以供夾持或吸附載帶30平貼於承靠件;於本實施例中,整平機構於輸送裝置50之第一載架53且位於承檢器91下方設置承靠件92,承靠件92之頂面相對於載帶30之底面,承靠件92設有複數個為吸孔921之整平部件,以供吸附載帶30貼平定位於承靠件92。The
又,整平機構設置至少一第一溫控件93,以預溫載帶30上之電子元件,而縮短測試作業時間,第一溫控件93可為加熱件、致冷晶片或具預溫流體之座體,於本實施例中,第一溫控件93為致冷晶片,以預冷載帶30上之第一電子元件314及第二電子元件324。In addition, the leveling mechanism is provided with at least one
檢知裝置90更包含於測試器之前方配置定檢取像器94,於每次測試時序時,以取像載帶30之承載區的至少一定位點,而供檢知承載區是否位於預設定點位置;於本實施例中,定檢取像器94為CCD,並位於探針卡82之前方
,以取像載帶30,且將定位取像資料傳輸至處理器以供分析比對。The
檢知裝置90更包含初檢取像器95,初檢取像器95以供位移至載帶30與測試器之間,於初始測試作業時取像載帶30之預設測試接點及測試器之傳輸件,以供調校載帶30,使預設測試接點初始對位於傳輸件;於本實施例中,初檢取像器95為CCD,並由取像驅動器驅動初檢取像器95作Y方向位移,以供初檢取像器95取像載帶30之第一承載區311的二第一傳輸點3131及探針卡82之第一、二探針83、84,並將初檢取像資料傳輸至處理器以供分析比對。The
溫控裝置100係裝配於輸送裝置50,包含測試室101及至少一第二溫控件102,測試室101供移入及移出載帶30,第二溫控件102供測試室101形成一預設溫度測試環境,使載帶30之電子元件於預設溫度測試環境執行測試作業
;於本實施例中,測試室101裝配於輸送裝置50之第二載架54,第二溫控件102輸送低溫流體於測試室101,使測試室101形成一預設低溫測試環境。The
請參閱圖3~8,本發明之測試調校方法包含承檢取像手段、承檢比對手段及調校手段,承檢取像手段以承檢器91取像載帶30之至少一具電子元件及調校基準之承載區,並將承載區取像資料傳輸至處理器;更進一步,承檢取像手段以承檢器91與載帶30其中一者位移,例如載帶30沿入料路徑位移行經承檢器91,以供承檢器91取像,例如承檢器91沿入料路徑位移,以取像載帶30
,前述承檢取像手段均可達到承檢器91取像載帶30之目的,而不受限於本實施例。Please refer to FIGS. 3 to 8 , the test and adjustment method of the present invention includes inspection and image capturing means, inspection and comparison means and adjustment means. The inspection and image capturing means is at least one of the
承檢取像手段依測試作業需求,以承檢器91取像預設數量之承載區;例如可設定承檢器91逐一取像載帶30之承載區;例如可設定承檢器91單次之取像數量相同或異於測試器之傳輸件數量,以於承檢器91取像同一批次電路單元之複數個承載區後,並可取像複數個不同批次電路單元之複數個承載區,以供檢知複數個不同批次電路單元之調校基準位差。According to the test operation requirements, the inspection and image capturing means use the
然於承檢取像手段前,可執行定帶手段,定帶手段由檢知裝置90之整平機構整平定位載帶30,使承檢器91精確取像載帶30;於本實施例中,輸送裝置50之第一輸送輪581及第二輸送輪582將供料裝置60輸出之載帶30沿入料路徑輸送至承檢器91及整平機構之承靠件92間,整平機構以承靠件92之複數個吸孔921吸附載帶30,使載帶30平整定位於承靠件92。However, before the inspection and capturing means, the tape fixing means can be executed, and the tape fixing means is used to level and position the
於整平定位載帶30後,由於探針卡82具有第一探針83及第二探針84之二個傳輸件,載帶30之第一電路單元31具有七個第一承載區311及第二電路單元32具有七個第二承載區321,承檢取像手段可設定承檢器91的取像數量相同於測試器之傳輸件數量,即承檢取像手段以承檢器91單次取像載帶30上之二個承載區,承檢器91依序取像第一電路單元31及第二電路單元32…,然因同一批次電路單元之各承載區不易產生異常位差,茲以承檢器91單次取像載帶30上之第7號第一承載區311及第8號第二承載區321為例,承檢器91於取像後,將第7號第一承載區311及第8號第二承載區321的承載區取像資料傳輸至處理器。After the
承檢比對手段以處理器分析承載區取像資料,而取得承載區之調校基準位差值;然載帶30可以各承載區內之任一點位或電子元件作為調校基準
,例如以定位點、電路之傳輸點、電子元件之接點或電子元件之一面作為調校基準,只要供分析出調校基準位差值即可,不受限於本實施例;於本實施例中
,以第一電子元件314之第一側面3142及第二電子元件324之第二側面3242分別作為第一承載區311及第二承載區321的調校基準;更進一步,承檢比對手段可將承載區取像資料與處理器之資料庫內建的承載區樣本資料作比對,亦或將二個承載區取像資料作比對;於本實施例中,承檢比對手段將承檢器91傳輸之承載區取像資料與處理器之資料庫內建的承載區樣本資料作比對,若第7號之第一電子元件314的第一側面3142與第8號之第二電子元件324的第二側面3242二者並無調校基準位差,則無需補償料帶30之位移值,反之,第7號之第一電子元件314的第一側面3142與第8號之第二電子元件324的第二側面3242二者具有調校基準位差L,即顯示第一電路單元31與第二電路單元32二者具有位差,而需補償料帶30之位移值。In the inspection and comparison method, the processor analyzes the imaging data of the bearing area, and obtains the calibration reference position difference value of the bearing area; however, the
於承檢器91取像載帶30後,承靠件92之第一溫控件93已預冷載帶30上之第一電子元件314及第二電子元件324,並令吸孔921釋放載帶30,第一輸送輪581及第二輸送輪582輸送載帶30移入溫控裝置100之測試室101,使載帶30之第一電子元件314及第二電子元件324位於預設低溫測試環境,並位於輸送裝置50之第一貼接件55及第二貼接件56間。After the
調校手段於具位差之一組承載區的一電子元件完測後,將調校基準位差值補償於載帶之位移值,而調校載帶,使誤判之另一電子元件搭配預設電子元件同步執行測試作業;更進一步,調校手段以輸送裝置50之第一承載驅動器51或第一輸送輪581及第二輸送輪582帶動調整載帶30位移,於本實施例中
,若第7號之第一電子元件314與第8號之第二電子元件324具有Y方向之調校基準位差L,當第7號之第一承載區311的第一傳輸點3131位於第一測試位置A,並與探針卡82之第一探針83電性接觸時,第8號之第二承載區321的第二傳輸點3231會因調校基準位差L而無法位於第二測試位置B,即第二傳輸點3231無法電性接觸探針卡82之第二探針84,於探針卡82以第一探針83及第二探針84同步對第一電子元件314及第二電子元件324執行測試作業時,第二電子元件324將會被誤判為不良品;因此,調校手段於第一電子元件314完測後,將調校基準位差值補償於載帶30之位移值,利用輸送裝置50之第一承載驅動器51帶動第一載架53
、第二載架54及載帶30等作Y方向位移,而調校載帶30,令第8號之第二承載區321的第二傳輸點3231位於第一測試位置A,並使第9號之第二承載區321A的第二傳輸點3231A位於第二測試位置B,使探針卡82之第一探針83及第二探針84準確電性接觸第8號之第二承載區321的第二傳輸點3231及第9號之第二承載區321A的第二傳輸點3231A,而同步對第8號之第二承載區321的第二電子元件324及第9號之第二承載區321A的第二電子元件324A執行測試作業,進而防止誤判電子元件,以提高測試良率及節省成本。The adjustment method is to compensate the displacement value of the carrier tape with the adjustment reference level difference value after the measurement of an electronic component in a set of bearing areas with a position difference is completed, and then adjust the carrier tape so that another electronic component that has been misjudged is matched with the preset value. The electronic components are set to perform the test operation synchronously; further, the adjustment means uses the first carrying
測試調校方法更包含定檢取像手段及定檢比對手段,定檢取像手段以定檢取像器94於每次測試時序取像載帶30之複數承載區的至少一定位點,並將定位取像資料傳輸至處理器;於本實施例中,定檢取像器94透過探針卡82之通孔821取像第7號第一承載區311的第一定位點312與第8號第二承載區321之第二定位點322,並將定位取像資料傳輸至處理器;定檢比對手段以處理器分析定位取像資料,以供判斷至少一承載區的至少一定位點是否位於預設定位位置
;於本實施例中,定檢比對手段以處理器將定位取像資料與資料庫92內建之定位點樣本資料作比對,以判別第7號第一承載區311的第一定位點312是否位於預設定位位置,若無位於定位位置,利用調校手段調校載帶30之位置。The test and adjustment method further includes a fixed inspection and image acquisition method and a fixed inspection and comparison method. In the fixed inspection image acquisition method, the fixed inspection
測試調校方法更包含初檢取像手段及初檢比對手段,初檢取像手段以初檢取像器95於初始測試作業時取像載帶30之預設複數個承載區及測試器之複數個傳輸件,並將初檢取像資料傳輸至處理器;於本實施例中,初檢取像器95於初始測試作業時取像載帶30之二第一承載區311的第一傳輸點3131及探針卡82之第一、二探針83、84;初檢比對手段以處理器分析初檢取像資料,以判斷是否有初始位差;於本實施例中,初檢比對手段以處理器將二第一傳輸點3131及第一、二探針83、84的初檢取像資料作比對,以判斷是否具初始位差,若具初始位差,利用調校手段調校載帶30之位置。The test and adjustment method further includes a preliminary inspection and image acquisition method and a preliminary inspection and comparison method. The preliminary inspection and image acquisition method uses the
[習知] 10:載帶 11:第一電路單元 111:第一承載區 112:第一電路 1121:第一傳輸點 113:第一電子元件 1131:第一接點 12:第二電路單元 121:第二承載區 122:第二電路 1221:第二傳輸點 123:第二電子元件 1231:第二接點 21:上鏈輪 22:下鏈輪 23:貼接件 24:探針卡 241:第一探針 242:第二探針 L:間距位差 [本發明] 30:載帶 31:第一電路單元 311:第一承載區 312:第一定位點 313:第一電路 3131:第一傳輸點 314:第一電子元件 3141:第一接點 3142:第一側面 32:第二電路單元 321、321A:第二承載區 322:第二定位點 323:第二電路 3231、3231A:第二傳輸點 324、324A:第二電子元件 3241:第二接點 3242:第二側面 40:機台 50:輸送裝置 51:第一承載驅動器 52:第二承載驅動器 53:第一載架 54:第二載架 55:第一貼接件 56:第二貼接件 57:貼接驅動器 581:第一輸送輪 582:第二輸送輪 60:供料裝置 61:供料器 70:收料裝置 71:收料器 80:測試裝置 81:承板 82:探針卡 821:通孔 83:第一探針 84:第二探針 90:檢知裝置 91:承檢器 92:承靠件 921:吸孔 93:第一溫控件 94:定檢取像器 95:初檢取像器 100:溫控裝置 101:測試室 102:第二溫控件 L:調校基準位差 A:第一測試位置 B:第二測試位置[Knowledge] 10: Carrier tape 11: The first circuit unit 111: The first bearing area 112: First Circuit 1121: First transmission point 113: The first electronic component 1131: First Contact 12: The second circuit unit 121: The second carrying area 122: Second Circuit 1221: Second transmission point 123: Second Electronic Components 1231: Second Contact 21: Winding sprocket 22: Lower sprocket 23: Attachment 24: Probe card 241: First Probe 242: Second Probe L: pitch difference [this invention] 30: Carrier tape 31: The first circuit unit 311: First Bearing Area 312: First positioning point 313: First Circuit 3131: First Transmission Point 314: First Electronic Components 3141: First Contact 3142: First side 32: Second circuit unit 321, 321A: The second bearing area 322: Second anchor point 323: Second Circuit 3231, 3231A: The second transmission point 324, 324A: Second electronic component 3241: Second Contact 3242: Second side 40: Machine 50: Conveyor device 51: First carrier drive 52: Second carrier drive 53: First carrier 54: Second carrier 55: The first attachment 56: The second attachment 57: Attach the driver 581: The first conveyor wheel 582: Second Conveyor Wheel 60: Feeding device 61: Feeder 70: Receiving device 71: Receiver 80: Test device 81: Bearing plate 82: Probe card 821: Through hole 83: First Probe 84: Second probe 90: Detection device 91: Detector 92: Relying parts 921: suction hole 93: The first temperature control 94: Fixed inspection imager 95: Initial inspection imager 100: Temperature control device 101: Testing Room 102: Second temperature control L: Adjust the reference level difference A: The first test position B: Second test position
圖1:習知載帶與探針之使用示意圖。 圖2:習知測試設備之局部示意圖。 圖3:本發明載帶之示意圖。 圖4:本發明檢知裝置應用於測試設備之示意圖。 圖5:本發明測試調校方法之使用示意圖(一)。 圖6:本發明測試調校方法之使用示意圖(二)。 圖7:本發明測試調校方法之使用示意圖(三)。 圖8:本發明測試調校方法之使用示意圖(四)。Figure 1: Schematic diagram of the use of conventional carrier tapes and probes. Figure 2: A partial schematic diagram of a conventional test equipment. Figure 3: A schematic diagram of the carrier tape of the present invention. FIG. 4 is a schematic diagram of the application of the detection device of the present invention to a test equipment. Figure 5: Schematic diagram (1) of the use of the test and adjustment method of the present invention. Figure 6: Schematic diagram (2) of the use of the test and adjustment method of the present invention. Figure 7: Schematic diagram (3) of the use of the test and adjustment method of the present invention. Figure 8: Schematic diagram (4) of the use of the test and adjustment method of the present invention.
30:載帶30: Carrier tape
314:第一電子元件314: First Electronic Components
324:第二電子元件324: Second Electronic Components
50:輸送裝置50: Conveyor device
581:第一輸送輪581: The first conveyor wheel
582:第二輸送輪582: Second Conveyor Wheel
90:檢知裝置90: Detection device
91:承檢器91: Detector
92:承靠件92: Relying parts
921:吸孔921: suction hole
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