TW202133924A - Apparatus for producing ozonated water capable of quickly converging the ozone concentration to a target concentration - Google Patents
Apparatus for producing ozonated water capable of quickly converging the ozone concentration to a target concentration Download PDFInfo
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
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- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
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- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
- B01F23/2376—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
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- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
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- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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Abstract
Description
本發明係關於一種臭氧水製造裝置。The invention relates to an ozone water production device.
生成臭氧水且將已生成之臭氧水向預定的對象供給之臭氧水製造裝置已為人所知。An ozone water production device that produces ozone water and supplies the produced ozone water to a predetermined object is already known.
專利文獻1所揭露之臭氧水製造裝置係具有臭氧產生裝置、射出器(ejector)以及槽(tank)。用臭氧產生裝置生成的臭氧氣體係在射出器中與在液體流路流動的水混合。在射出器中，臭氧氣體溶解於水且生成臭氧水。臭氧水係貯留於槽。槽內的臭氧水係經由供給路而向預定的對象供給。 [先前技術文獻] [專利文獻]The ozone water production device disclosed in Patent Document 1 has an ozone generator, an ejector, and a tank. The ozone gas system generated by the ozone generator is mixed with water flowing in the liquid flow path in the ejector. In the ejector, ozone gas is dissolved in water and produces ozone water. The ozone water system is stored in the tank. The ozone water system in the tank is supplied to a predetermined object via the supply path. [Prior Technical Literature] [Patent Literature]
[專利文獻1]日本特開2018-153727號公報。[Patent Document 1] Japanese Patent Application Laid-Open No. 2018-153727.
[發明所欲解決之課題][The problem to be solved by the invention]
如專利文獻1所記載般的臭氧水製造裝置係將朝對象供給之臭氧水的臭氧濃度予以調節。具體來說，於臭氧產生裝置的氣體流路係設置有開閉閥。於供給路係設置有臭氧濃度感測器。控制部係以臭氧濃度感測器所檢測到的臭氧濃度收斂於預定的目標濃度之方式控制開閉閥。 然而，在此種控制中，有著臭氧濃度不太容易收斂於目標濃度的問題。針對此點，一邊參照圖9一邊詳細說明。在圖9中，橫軸為時間，縱軸為臭氧濃度感測器所檢測到的臭氧濃度C。圖9的白圓標係代表供給控制之開始，×標係代表停止控制之開始。The ozone water production device as described in Patent Document 1 adjusts the ozone concentration of ozone water supplied to the object. Specifically, an on-off valve is provided in the gas flow path of the ozone generator. An ozone concentration sensor is installed in the supply path. The control unit controls the on-off valve so that the ozone concentration detected by the ozone concentration sensor converges to a predetermined target concentration. However, in this control, there is a problem that the ozone concentration is not easy to converge to the target concentration. Regarding this point, a detailed description will be given with reference to FIG. 9. In FIG. 9, the horizontal axis is time, and the vertical axis is the ozone concentration C detected by the ozone concentration sensor. The white circle mark in Fig. 9 represents the start of supply control, and the x mark represents the start of stop control.
當臭氧產生裝置之運轉開始時，在點p1上執行供給控制。在供給控制中，開閉閥成為開狀態，向供給路供給臭氧氣體。當供給控制開始時，臭氧濃度C緩緩變高。當在點p2上臭氧濃度C達到目標濃度Cset時，執行停止控制。在停止控制中，開閉閥成為閉狀態，停止向供給路供給臭氧氣體。但是，在從停止控制開始的時間點到臭氧濃度C降低為止之期間裡，時間遲延會發生。因此，臭氧濃度C係大大超過目標濃度Cset，臭氧濃度C之過衝(overshoot)的幅度變大。When the operation of the ozone generator starts, the supply control is executed at point p1. In the supply control, the on-off valve is in an open state, and ozone gas is supplied to the supply path. When the supply control starts, the ozone concentration C gradually increases. When the ozone concentration C reaches the target concentration Cset at the point p2, the stop control is executed. In the stop control, the on-off valve is in a closed state, and the supply of ozone gas to the supply path is stopped. However, in the period from the time when the control is stopped to when the ozone concentration C decreases, a time delay may occur. Therefore, the ozone concentration C greatly exceeds the target concentration Cset, and the overshoot of the ozone concentration C becomes larger.
之後，臭氧濃度C降低，當在點p3上臭氧濃度C達到目標濃度Cset時，供給控制再度被執行。但是，從供給控制開始起到臭氧濃度上升為止之期間裡，時間遲延會發生。此外，臭氧水中的臭氧係藉由所謂的自分解反應而消耗。自分解反應是臭氧與例如氫氧自由基(OH radical)、超氧化物(superoxide)自由基進行反應且連鎖地分解的反應。因此，在點p3上，即使停止控制被執行，臭氧濃度C也大大低於目標濃度Cset，臭氧濃度C之下衝(undershoot)的幅度變大。After that, the ozone concentration C decreases, and when the ozone concentration C reaches the target concentration Cset at the point p3, the supply control is executed again. However, during the period from the start of the supply control until the ozone concentration rises, a time delay may occur. In addition, the ozone in the ozone water is consumed by the so-called self-decomposition reaction. The self-decomposition reaction is a reaction in which ozone reacts with, for example, OH radicals and superoxide radicals and decomposes in a chain. Therefore, at the point p3, even if the stop control is executed, the ozone concentration C is significantly lower than the target concentration Cset, and the amplitude of the undershoot of the ozone concentration C becomes larger.
如以上般，在圖9所示之比較例的控制中，臭氧濃度C之下衝以及過衝的幅度相對地變大。因此，有著臭氧濃度C不太容易收斂於目標濃度Cset，相對於所期望之臭氧濃度的起伏大之問題。As described above, in the control of the comparative example shown in FIG. 9, the amplitude of the undershoot and overshoot of the ozone concentration C becomes relatively large. Therefore, there is a problem that the ozone concentration C is not easy to converge to the target concentration Cset, and the fluctuations relative to the expected ozone concentration are large.
本發明係有鑑於此種問題點而完成，目的為提供一種能夠迅速地使臭氧濃度收斂於目標濃度之臭氧水製造裝置。 [用以解決課題之手段]The present invention has been completed in view of such problems, and its object is to provide an ozone water production device capable of quickly converging the ozone concentration to the target concentration. [Means to solve the problem]
為了解決上述課題，本發明的控制部(80)係在從停止控制切換至供給控制後，當臭氧濃度C變得比最小值Cmin與目標濃度Cset之間的預定之第一臨限值(first threshold value)C1還高時，進行停止控制。在本發明中，當臭氧濃度C超過比目標濃度Cset還低的第一臨限值C1時，進行停止控制。因此，能夠在比上述的比較例還早的時機(timing)執行停止控制，故能夠減小臭氧濃度C之過衝的幅度。In order to solve the above-mentioned problems, the control unit (80) of the present invention switches from the stop control to the supply control, when the ozone concentration C becomes higher than the predetermined first threshold between the minimum value Cmin and the target concentration Cset (first threshold value) When C1 is still high, stop control is performed. In the present invention, when the ozone concentration C exceeds the first threshold value C1 lower than the target concentration Cset, the stop control is performed. Therefore, the stop control can be executed at an earlier timing than the above-mentioned comparative example, so the width of the overshoot of the ozone concentration C can be reduced.
為了解決上述課題，本發明的控制部(80)係在從供給控制切換至停止控制後，當臭氧濃度C變得比最大值Cmax與目標濃度Cset之間的預定之第二臨限值C2還低時，進行供給控制。在本發明中，當臭氧濃度C低於比目標濃度Cset還高的第二臨限值C2時，進行供給控制。因此，能夠在比上述的比較例還早的時機執行供給控制，故能夠減小臭氧濃度C之下衝的幅度。In order to solve the above-mentioned problems, the control unit (80) of the present invention switches from supply control to stop control when the ozone concentration C becomes lower than the predetermined second threshold value C2 between the maximum value Cmax and the target concentration Cset. When it is low, supply control is performed. In the present invention, when the ozone concentration C is lower than the second threshold value C2 higher than the target concentration Cset, the supply control is performed. Therefore, the supply control can be executed at an earlier timing than the above-mentioned comparative example, so the amplitude of the undershoot of the ozone concentration C can be reduced.
第一臨限值C1較佳為以C1=Cset-(Cset-Cmin)×α (0＜α＜1)之關係式所表示。根據該關係式，能夠將第一臨限值C1設成比目標濃度Cset還低的值。The first threshold value C1 is preferably expressed by the relational formula of C1=Cset-(Cset-Cmin)×α (0<α<1). According to this relational expression, the first threshold value C1 can be set to a value lower than the target concentration Cset.
第二臨限值C2較佳為以C2=Cset+(Cmax-Cset)×β (0＜β＜1)之關係式所表示。根據該關係式，能夠將第二臨限值C2設成比目標濃度Cset還高的值。The second threshold value C2 is preferably expressed by the relational formula of C2=Cset+(Cmax-Cset)×β (0<β<1). According to this relational expression, the second threshold value C2 can be set to a value higher than the target concentration Cset.
可以將前述β設成比前述α還小。臭氧氣體的自分解反應之速度係傾向於比從臭氧產生裝置向供給路供給臭氧氣體之速度還慢。因此，當β過大時，在供給控制開始後臭氧濃度C有可能會達不到目標濃度Cset。相對於此，藉由將β設成比α還低，第二臨限值會相對地變低。因此，能夠抑制臭氧濃度C達不到目標濃度Cset的情形。 [發明功效]The aforementioned β may be set to be smaller than the aforementioned α. The speed of the self-decomposition reaction of ozone gas tends to be slower than the speed of supplying ozone gas from the ozone generator to the supply path. Therefore, when β is too large, the ozone concentration C may not reach the target concentration Cset after the start of the supply control. In contrast, by setting β to be lower than α, the second threshold value will be relatively lower. Therefore, it is possible to prevent the ozone concentration C from reaching the target concentration Cset. [Efficacy of invention]
根據本發明，用以執行停止控制之第一臨限值C1比目標濃度Cset還低，所以能夠在相對早的時機執行停止控制。因此，能夠減低臭氧濃度之過衝的幅度，能夠將臭氧濃度C迅速地收斂於目標濃度Cset。第一臨限值C1係基於最小值Cmin與目標濃度Cset來決定，前述最小值Cmin係與臭氧濃度C的下降反曲點(inflection point)對應。因此，能夠抑制第一臨限值C1變得過低、變得過高之情形。According to the present invention, the first threshold value C1 for executing the stop control is lower than the target concentration Cset, so the stop control can be executed at a relatively early timing. Therefore, the width of the overshoot of the ozone concentration can be reduced, and the ozone concentration C can be quickly converged to the target concentration Cset. The first threshold value C1 is determined based on the minimum value Cmin and the target concentration Cset, and the aforementioned minimum value Cmin corresponds to the inflection point of the ozone concentration C. Therefore, it is possible to prevent the first threshold value C1 from becoming too low or becoming too high.
根據本發明，用以執行供給控制之第二臨限值C2比目標濃度Cset還高，所以能夠在相對早的時機執行供給控制。因此，能夠減低臭氧濃度之下衝的幅度，能夠將臭氧濃度C迅速地收斂於目標濃度Cset。第二臨限值C2係基於最大值Cmax與目標濃度Cset來決定，前述最大值Cmax係與臭氧濃度C的上升反曲點對應。因此，能夠抑制第二臨限值C2變得過低、變得過高之情形。According to the present invention, the second threshold value C2 for performing the supply control is higher than the target concentration Cset, so the supply control can be performed at a relatively early timing. Therefore, the width of the undershoot of the ozone concentration can be reduced, and the ozone concentration C can be quickly converged to the target concentration Cset. The second threshold value C2 is determined based on the maximum value Cmax and the target concentration Cset, and the aforementioned maximum value Cmax corresponds to the rising inflection point of the ozone concentration C. Therefore, it is possible to prevent the second threshold value C2 from becoming too low or becoming too high.
以下，基於圖式來詳細地說明本發明的實施形態。另外，以下的實施形態是本質上較佳的例示，並非用以限制本發明、本發明之適用物或者是本發明之用途的範圍。Hereinafter, embodiments of the present invention will be described in detail based on the drawings. In addition, the following embodiments are essentially preferable examples, and are not intended to limit the scope of the present invention, the application of the present invention, or the scope of the application of the present invention.
[實施形態] 實施形態之臭氧水製造裝置(1)係生成臭氧水且將已生成之臭氧水向預定的對象供給。預定的對象例如為半導體製造工廠。如圖1所示，臭氧水製造裝置(1)係具備：氣體流路(10)，係具有臭氧產生裝置(20)；以及液體流路(30)，係具有槽(44)、射出器(35)以及泵(45)。[Implementation form] The ozone water producing device (1) of the embodiment produces ozone water and supplies the produced ozone water to a predetermined object. The predetermined target is, for example, a semiconductor manufacturing plant. As shown in Figure 1, the ozone water production device (1) is provided with: a gas flow path (10) with an ozone generating device (20); and a liquid flow path (30) with a tank (44) and an ejector ( 35) and pump (45).
[氣體流路] 於氣體流路(10)係設置有臭氧產生裝置(20)。臭氧產生裝置(20)是放電方式的臭氧產生器(ozonizer)。臭氧產生裝置(20)係將氧作為原料，在該氧中引起放電，藉此生成臭氧氣體。[Gas flow path] An ozone generator (20) is installed in the gas flow path (10). The ozone generator (20) is an ozone generator (ozonizer) of a discharge method. The ozone generator (20) uses oxygen as a raw material, and generates electric discharge in the oxygen, thereby generating ozone gas.
氣體流路(10)係包含氣體供給路(11)與氣體排出路(12)。氣體供給路(11)的流入端係與臭氧產生裝置(20)連接。氣體供給路(11)的流出端係與射出器(35)之氣體抽吸部(35c)連接。氣體排出路(12)係從氣體供給路(11)分支。The gas flow path (10) includes a gas supply path (11) and a gas discharge path (12). The inflow end of the gas supply path (11) is connected to the ozone generator (20). The outflow end of the gas supply path (11) is connected to the gas suction part (35c) of the ejector (35). The gas discharge path (12) is branched from the gas supply path (11).
於氣體供給路(11)係設置有第一氣體開閉閥(13)。第一氣體開閉閥(13)係被設置於氣體供給路(11)中的氣體排出路(12)之分支部的下游側。第一氣體開閉閥(13)係將氣體供給路(11)開閉。A first gas on-off valve (13) is provided in the gas supply path (11). The first gas on-off valve (13) is provided on the downstream side of the branch of the gas discharge path (12) in the gas supply path (11). The first gas on-off valve (13) opens and closes the gas supply path (11).
於氣體排出路(12)係設置有第二氣體開閉閥(14)。第二氣體開閉閥(14)係將氣體排出路(12)開閉。從氣體排出路(12)所排出的臭氧氣體係由例如臭氧分解裝置(省略圖示)所處理。A second gas on-off valve (14) is provided in the gas discharge path (12). The second gas on-off valve (14) opens and closes the gas discharge path (12). The ozone gas system discharged from the gas discharge path (12) is processed by, for example, an ozone decomposition device (not shown).
[液體流路之整體構成] 液體流路(30)係具有給水路(31)、供給路(40)、第一返送流路(60)以及第二返送流路(70)。給水路(31)是用以向液體流路(30)補給原水的流路。另外，原水係以水作為主成分即可，也可以是含有其它的成分之液體(例如碳酸水)。供給路(40)是用以向對象供給臭氧水的流路。第一返送流路(60)是使供給路(40)的臭氧水返回射出器(35)之上游側的流路。第二返送流路(70)是使臭氧水返回槽(44)的流路。[The overall composition of the liquid flow path] The liquid flow path (30) has a water supply path (31), a supply path (40), a first return flow path (60), and a second return flow path (70). The water supply path (31) is a flow path for supplying raw water to the liquid flow path (30). In addition, the raw water system may have water as the main component, and may be a liquid containing other components (for example, carbonated water). The supply path (40) is a flow path for supplying ozone water to the object. The first return flow path (60) is a flow path that returns the ozone water in the supply path (40) to the upstream side of the ejector (35). The second return flow path (70) is a flow path for returning ozone water to the tank (44).
[給水路] 給水路(31)的流入端係與原水的供給源連接。給水路(31)的流出端係與射出器(35)的液體流入部(35a)連接。於給水路(31)係從上游側朝向下游側依序設置有給水側開閉閥(32)以及第一流量感測器(33)。給水側開閉閥(32)係將給水路(31)開閉。給水側開閉閥(32)係由例如氣動閥(air-operated valve)所構成。第一流量感測器(33)係測量在給水路(31)流動的水之流量。另外，在以下的說明中所述的「水」也有意指含有臭氧的水之情形。[Waterway] The inflow end of the water supply channel (31) is connected to a supply source of raw water. The outflow end of the water supply channel (31) is connected to the liquid inflow portion (35a) of the ejector (35). A water supply side on-off valve (32) and a first flow sensor (33) are sequentially provided in the water supply path (31) from the upstream side to the downstream side. The water supply side on-off valve (32) opens and closes the water supply path (31). The feed water side on-off valve (32) is constituted by, for example, an air-operated valve. The first flow sensor (33) measures the flow of water flowing in the water supply channel (31). In addition, the "water" mentioned in the following description may also mean water containing ozone.
[射出器] 射出器(35)係具有液體流入部(35a)、液體流出部(35b)以及氣體抽吸部(35c)。液體流入部(35a)係與給水路(31)的流出端連接。液體流入部(35a)係與供給路(40)的流入端連接。於氣體抽吸部(35c)係連接有氣體供給路(11)的流出端。於射出器(35)的內部係設置有省略了圖示的噴嘴部、混合部以及擴散器(diffuser)部。在射出器(35)中，當已從液體流入部(35a)流入的水在噴嘴部流動時，那水的流速會加速。在噴嘴部中，因噴嘴部的前端之擠壓部分，水會被減壓。在噴嘴部中，因噴嘴部之前後的水之差壓，臭氧氣體被從氣體抽吸部往混合部抽吸。被抽吸之臭氧氣體係在混合部中與水混合。在混合部中，臭氧氣體會溶解於水中，生成有預定濃度的臭氧水。臭氧水係流動在流路剖面緩緩地擴大的擴散器部而升壓後，從液體流出部(35b)向供給路(40)流出。[Injector] The ejector (35) has a liquid inflow portion (35a), a liquid outflow portion (35b), and a gas suction portion (35c). The liquid inflow portion (35a) is connected to the outflow end of the water supply channel (31). The liquid inflow portion (35a) is connected to the inflow end of the supply path (40). The outflow end of the gas supply path (11) is connected to the gas suction part (35c). A nozzle part, a mixing part, and a diffuser part (not shown) are provided inside the ejector (35). In the ejector (35), when the water that has flowed in from the liquid inflow portion (35a) flows through the nozzle portion, the flow rate of the water is accelerated. In the nozzle part, the water is decompressed due to the squeezing part at the tip of the nozzle part. In the nozzle part, the ozone gas is sucked from the gas suction part to the mixing part due to the differential pressure of the water before and after the nozzle part. The sucked ozone gas system is mixed with water in the mixing section. In the mixing section, ozone gas is dissolved in water to generate ozone water with a predetermined concentration. The ozone water system flows through the diffuser part in which the cross section of the flow path is gradually enlarged, and is pressurized, and then flows out from the liquid outflow part (35b) to the supply path (40).
[供給路] 供給路(40)係包含第一管(41)、第二管(42)以及第三管(43)。第一管(41)之流入端係與射出器(35)的液體流出部(35b)連接。第一管(41)之流出端係與槽(44)連接。第二管(42)之流入端係與槽(44)連接。第二管(42)之流出端係與第一返送流路(60)的流入端、第二返送流路(70)的流入端以及第三管(43)的流入端連接。第三管(43)之流出端係連到預定的對象。於第二管(42)係從上游端朝向下游側而依序設置有泵(45)、臭氧濃度感測器(46)以及壓力感測器(47)。於第三管(43)係從上游側朝向下游側而依序設置有第二流量感測器(48)以及供給側開閉閥(49)。[Supply Road] The supply path (40) includes a first pipe (41), a second pipe (42), and a third pipe (43). The inflow end of the first tube (41) is connected with the liquid outflow portion (35b) of the ejector (35). The outflow end of the first pipe (41) is connected with the groove (44). The inflow end of the second pipe (42) is connected with the groove (44). The outflow end of the second pipe (42) is connected to the inflow end of the first return flow path (60), the inflow end of the second return flow path (70), and the inflow end of the third pipe (43). The outflow end of the third tube (43) is connected to a predetermined object. The second pipe (42) is provided with a pump (45), an ozone concentration sensor (46), and a pressure sensor (47) in order from the upstream end to the downstream side. The third pipe (43) is provided with a second flow sensor (48) and a supply side on-off valve (49) in this order from the upstream side to the downstream side.
槽(44)是中空狀的容器。槽(44)係將水暫時地貯留。殘留於槽(44)內的臭氧氣體係作為廢臭氧而被向槽(44)之外部排出。被排出的廢臭氧係由例如臭氧分解裝置(省略圖示)所處理。The tank (44) is a hollow container. The tank (44) temporarily stores water. The ozone gas system remaining in the tank (44) is discharged to the outside of the tank (44) as waste ozone. The discharged waste ozone is processed by, for example, an ozone decomposition device (not shown).
於槽(44)係設置有：位準感測器(level sensor)(50)，係檢測槽(44)內的水位。位準感測器(50)係構成為能夠檢測至少L(低)以及H(高)之2階段的水位。位準感測器(50)係與水位檢測部對應。The tank (44) is provided with a level sensor (50), which detects the water level in the tank (44). The level sensor (50) is configured to be able to detect the water level in at least two stages of L (low) and H (high). The level sensor (50) corresponds to the water level detection part.
泵(45)係搬送供給路(40)的水。The pump (45) transports the water in the supply path (40).
臭氧濃度感測器(46)係檢測供給路(40)的水(臭氧水)之臭氧濃度。臭氧濃度感測器(46)係與檢測部對應。將由臭氧濃度感測器(46)所檢測到的臭氧濃度予以表示之訊號係被輸出至控制部(80)。The ozone concentration sensor (46) detects the ozone concentration of the water (ozone water) in the supply path (40). The ozone concentration sensor (46) corresponds to the detection unit. A signal indicating the concentration of ozone detected by the ozone concentration sensor (46) is output to the control unit (80).
壓力感測器(47)係檢測供給路(40)(嚴格來說是第二管(42))的水之壓力。The pressure sensor (47) detects the pressure of the water in the supply path (40) (strictly speaking, the second pipe (42)).
第二流量感測器(48)係檢測供給路(40)(嚴格來說是第三管(43))的水之流量。The second flow sensor (48) detects the flow of water in the supply path (40) (strictly speaking, the third pipe (43)).
供給側開閉閥(49)係將供給路(40)(嚴格來說是第三管(43))開閉。供給側開閉閥(49)係由例如氣動閥所構成。The supply side on-off valve (49) opens and closes the supply path (40) (strictly speaking, the third pipe (43)). The supply side on-off valve (49) is constituted by, for example, a pneumatic valve.
[第一返送流路] 第一返送流路(60)的流入端係與第二管(42)的流出端連接。第一返送流路(60)的流出端係與給水路(31)連接。於第一返送流路(60)係設置有流量調節閥(61)。流量調節閥(61)係調節在第一返送流路(60)流動的水之流量。在此，藉由流量調節閥(61)所調節的水之流量也包含0。在此情形下，流量調節閥(61)係成為全閉狀態。[First return flow path] The inflow end of the first return flow path (60) is connected to the outflow end of the second pipe (42). The outflow end of the first return flow path (60) is connected to the water supply path (31). A flow regulating valve (61) is provided in the first return flow path (60). The flow regulating valve (61) regulates the flow of water flowing in the first return flow path (60). Here, the flow rate of water adjusted by the flow rate adjustment valve (61) also includes zero. In this case, the flow control valve (61) is in a fully closed state.
[第二返送流路] 第二返送流路(70)的流入端係與第二管(42)的流出端連接。第二返送流路(70)的流出端係與槽(44)連接。於第二返送流路(70)係設置有第一背壓閥(71)。第一背壓閥(71)是將第二返送流路(70)或供給路(40)的水壓調節成固定的壓力調節閥。[Second return flow path] The inflow end of the second return flow path (70) is connected to the outflow end of the second pipe (42). The outflow end of the second return flow path (70) is connected to the tank (44). A first back pressure valve (71) is provided in the second return flow path (70). The first back pressure valve (71) is a pressure regulating valve that regulates the water pressure of the second return flow path (70) or the supply path (40) to be fixed.
[控制部] 如圖1示意性地所示，臭氧水製造裝置(1)係具備控制部(80)。控制部(80)係具有：微電腦(microcomputer)；以及記憶體裝置(具體來說是半導體記憶體)，係保存用以使該微電腦運作的軟體。控制部(80)係具有：輸入部，係輸入有檢測訊號等；以及輸出部，係輸出控制訊號等。[Control Department] As schematically shown in Fig. 1, the ozone water production device (1) is provided with a control unit (80). The control unit (80) has: a microcomputer; and a memory device (specifically, a semiconductor memory), which stores software for operating the microcomputer. The control unit (80) has: an input unit, which inputs detection signals, etc.; and an output unit, which outputs control signals, etc.
在圖1中雖省略圖示，不過於控制部(80)之輸入部係輸入有由位準感測器(50)所檢測到的水位(L以及H)。控制部(80)係因應位準感測器(50)之檢測水位來控制給水側開閉閥(32)。具體來說，當位準感測器(50)之檢測水位達到L時，控制部(80)係開啟給水側開閉閥(32)。當給水側開閉閥(32)成為開狀態時，原水被補充到槽(44)。之後，當位準感測器(50)之檢測水位達到H時，控制部(80)係關閉給水側開閉閥(32)。當給水側開閉閥(32)成為閉狀態時，停止向槽(44)供給原水。Although illustration is omitted in FIG. 1, the input unit of the control unit (80) inputs the water level (L and H) detected by the level sensor (50). The control unit (80) controls the water supply side on-off valve (32) in response to the water level detected by the level sensor (50). Specifically, when the detected water level of the level sensor (50) reaches L, the control unit (80) opens the water supply side on-off valve (32). When the water supply side on-off valve (32) is in an open state, raw water is replenished to the tank (44). After that, when the detected water level of the level sensor (50) reaches H, the control unit (80) closes the water supply side on-off valve (32). When the water supply side on-off valve (32) is in a closed state, the supply of raw water to the tank (44) is stopped.
在圖1中雖省略圖示，不過控制部(80)係切換臭氧產生裝置(20)之運轉以及停止。此外，控制部(80)係切換供給側開閉閥(49)的開閉狀態。Although illustration is omitted in FIG. 1, the control unit (80) switches the operation and stop of the ozone generator (20). In addition, the control unit (80) switches the open and closed state of the supply side on-off valve (49).
於控制部(80)之輸入部係輸入有由臭氧濃度感測器(46)所檢測到的臭氧濃度C。以控制部(80)來說，控制部(80)係控制至少第一氣體開閉閥(13)，以使由臭氧濃度感測器(46)所檢測的臭氧濃度C收斂於目標濃度Cset。控制部(80)係交互地切換供給控制與停止控制。供給控制是用以從臭氧產生裝置(20)向供給路(40)供給臭氧氣體的控制。停止控制是用以停止從臭氧產生裝置(20)向供給路(40)供給臭氧氣體的控制。The input part of the control part (80) is input with the ozone concentration C detected by the ozone concentration sensor (46). Taking the control unit (80) as an example, the control unit (80) controls at least the first gas on-off valve (13) so that the ozone concentration C detected by the ozone concentration sensor (46) converges to the target concentration Cset. The control unit (80) alternately switches between supply control and stop control. The supply control is control for supplying ozone gas from the ozone generator (20) to the supply path (40). The stop control is control for stopping the supply of ozone gas from the ozone generator (20) to the supply path (40).
控制部(80)係具有儲存部。儲存部係儲存目標濃度Cset、下部(Lower)臨限值C1、上部(Upper)臨限值C2、最小值Cmin以及最大值Cmax。在儲存部中，這些參數會適當更新。目標濃度Cset是向對象供給的臭氧濃度C之目標值。下部臨限值C1是用以進行從供給控制向停止控制之切換的判定之判定值。下部臨限值C1係與第一臨限值對應。上部臨限值C2是用以進行從停止控制向供給控制之切換的判定之判定值。上部臨限值C2係與第二臨限值對應。最小值Cmin是在供給控制中比目標濃度Cset還低的範圍下與下降反曲點對應之臭氧濃度C。最大值Cmax是在停止控制中比目標濃度Cset還高的範圍下與上升反曲點對應之臭氧濃度C。The control unit (80) has a storage unit. The storage unit stores the target concentration Cset, the lower threshold value C1, the upper threshold value C2, the minimum value Cmin, and the maximum value Cmax. In the storage section, these parameters will be updated appropriately. The target concentration Cset is the target value of the ozone concentration C supplied to the object. The lower threshold value C1 is a determination value for determining the switching from the supply control to the stop control. The lower threshold C1 corresponds to the first threshold. The upper threshold value C2 is a determination value for determining the switching from the stop control to the supply control. The upper threshold C2 corresponds to the second threshold. The minimum value Cmin is the ozone concentration C corresponding to the falling inflection point in a range lower than the target concentration Cset in the supply control. The maximum value Cmax is the ozone concentration C corresponding to the rising inflection point in a range higher than the target concentration Cset in the stop control.
在從停止控制切換至供給控制後，當臭氧濃度C變得比第一臨限值C1還高時，控制部(80)係執行停止控制。第一臨限值C1是最小值Cmin與目標濃度Cset之間的值。控制部(80)的運算部係藉由以下的算式(1)來求得第一臨限值C1。After switching from the stop control to the supply control, when the ozone concentration C becomes higher than the first threshold value C1, the control unit (80) executes the stop control. The first threshold value C1 is a value between the minimum value Cmin and the target concentration Cset. The calculation unit of the control unit (80) obtains the first threshold value C1 by the following formula (1).
[算式(1)] C1=Cset-(Cset-Cmin)×α (0＜α＜1) α係大於0小於1即可。較佳為α係大於0.2小於0.8。更佳為α係大於0.3小於0.7。更佳為α係大於0.4小於0.8。最佳為α為0.5。控制部(80)係具有將α適當變更的設定部。α的初始設定值為0.5。[Equation (1)] C1=Cset-(Cset-Cmin)×α (0＜α＜1) The α system should be greater than 0 and less than 1. Preferably, the α system is greater than 0.2 and less than 0.8. More preferably, the α system is greater than 0.3 and less than 0.7. More preferably, the α system is greater than 0.4 and less than 0.8. The best α is 0.5. The control unit (80) has a setting unit that appropriately changes α. The initial setting value of α is 0.5.
在從供給控制切換至停止控制後，當臭氧濃度C變得比第二臨限值C2還低時，控制部(80)係執行供給控制。第二臨限值C2是最大值Cmax與目標濃度Cset之間的值。控制部(80)的運算部係藉由以下的算式(2)來求得第二臨限值C2。After switching from the supply control to the stop control, when the ozone concentration C becomes lower than the second threshold value C2, the control unit (80) executes the supply control. The second threshold value C2 is a value between the maximum value Cmax and the target concentration Cset. The arithmetic unit of the control unit (80) obtains the second threshold value C2 by the following formula (2).
[算式(2)] C2=Cset+(Cmax-Cset)×β (0＜β＜1) β係大於0小於1即可。較佳為β係大於0.2小於0.8。更佳為β係大於0.3小於0.7。更佳為β係大於0.4小於0.8。最佳為β為0.5。控制部(80)係具有將β適當變更的設定部。β的初始設定值為0.5。[Equation (2)] C2=Cset+(Cmax-Cset)×β (0＜β＜1) The β system should be greater than 0 and less than 1. Preferably, the β series is greater than 0.2 and less than 0.8. More preferably, the β series is greater than 0.3 and less than 0.7. More preferably, the β series is greater than 0.4 and less than 0.8. The best β is 0.5. The control unit (80) has a setting unit that appropriately changes β. The initial setting value of β is 0.5.
[運轉動作] 一邊參照圖1一邊說明臭氧水製造裝置(1)的運轉動作。[Running action] The operation of the ozone water production device (1) will be described with reference to Fig. 1.
在臭氧水製造裝置(1)運轉時，控制部(80)係使臭氧產生裝置(20)運轉。在臭氧產生裝置(20)中，於電極對之間進行有無聲放電。控制部(80)係將供給側開閉閥(49)開放。泵(45)為運轉狀態。When the ozone water producing device (1) is operating, the control unit (80) operates the ozone producing device (20). In the ozone generator (20), there is a silent discharge between the electrode pairs. The control unit (80) opens the supply side on-off valve (49). The pump (45) is running.
當在臭氧產生裝置(20)進行有無聲放電時，生成有預定濃度的臭氧氣體。在臭氧產生裝置(20)所生成的臭氧氣體係在氣體供給路(11)流動，且被送往射出器(35)的氣體抽吸部(35c)。當泵(45)運轉時，第一返送流路(60)的水係經由給水路(31)而被送往射出器(35)的液體流入部(35a)。在射出器(35)中，被氣體抽吸部(35c)所抽吸的臭氧氣體與已流入液體流入部(35a)的水混合，臭氧氣體係溶解於水中。射出器(35)內的臭氧水係經由第一管(41)而被送往槽(44)，暫時地貯留於槽(44)內。When there is a silent discharge in the ozone generating device (20), a predetermined concentration of ozone gas is generated. The ozone gas system generated by the ozone generator (20) flows through the gas supply path (11) and is sent to the gas suction part (35c) of the ejector (35). When the pump (45) is operating, the water system of the first return flow path (60) is sent to the liquid inflow portion (35a) of the ejector (35) via the water supply path (31). In the ejector (35), the ozone gas sucked by the gas suction part (35c) is mixed with the water that has flowed into the liquid inflow part (35a), and the ozone gas system is dissolved in the water. The ozone water system in the ejector (35) is sent to the tank (44) via the first pipe (41), and temporarily stored in the tank (44).
槽(44)內的臭氧水係依序在第二管(42)、第三管(43)流動且被送往對象。第二管(42)的臭氧水之一部分係經由第一返送流路(60)而被送回給水路(31)。比起在第二管(42)流動的水量，有著向對象供給的水量與在第一返送流路(60)流動的水量之合計較多的情形。在此情形下，第二管(42)之剩餘的臭氧水係經由第二返送流路(70)而被送回槽(44)。The ozone water system in the tank (44) flows through the second pipe (42) and the third pipe (43) in sequence and is sent to the object. A part of the ozone water in the second pipe (42) is sent back to the water supply path (31) via the first return flow path (60). Compared with the amount of water flowing in the second pipe (42), there are cases where the total of the amount of water supplied to the object and the amount of water flowing in the first return flow path (60) is larger. In this case, the remaining ozone water system of the second pipe (42) is sent back to the tank (44) via the second return flow path (70).
[臭氧濃度的控制] 在上述之臭氧產生裝置(20)的運轉時，控制部(80)係進行使臭氧濃度C收斂於目標濃度Cset的控制(以下稱臭氧濃度控制)。一邊參照圖2至圖7一邊說明臭氧濃度控制。[Control of Ozone Concentration] During the operation of the above-mentioned ozone generator (20), the control unit (80) performs control to bring the ozone concentration C to the target concentration Cset (hereinafter referred to as ozone concentration control). The ozone concentration control will be described with reference to FIGS. 2 to 7.
[臭氧濃度控制之基本的流程] 如圖2所示，當臭氧水製造裝置(1)的運轉開始時，執行臭氧濃度控制。在步驟ST1中，控制部(80)係將下部臨限值C1、上部臨限值C2、最小值Cmin以及最大值Cmax設定成目標濃度Cset(例如20ppm)。[Basic process of ozone concentration control] As shown in FIG. 2, when the operation of the ozone water producing device (1) starts, ozone concentration control is executed. In step ST1, the control unit (80) sets the lower threshold value C1, the upper threshold value C2, the minimum value Cmin, and the maximum value Cmax to the target concentration Cset (for example, 20 ppm).
在步驟ST2中，控制部(80)係判定有沒有臭氧水製造裝置(1)之運轉結束的指令。當於控制部(80)的輸入部輸入有運轉結束的指令時，控制部(80)係使臭氧濃度控制結束。在於控制部(80)的輸入部未輸入有運轉結束的指令的情形下，執行步驟ST3。In step ST2, the control unit (80) determines whether there is an instruction to end the operation of the ozone water producing device (1). When a command to end the operation is input to the input unit of the control unit (80), the control unit (80) terminates the ozone concentration control. In the case where the command to end the operation is not input from the input unit of the control unit (80), step ST3 is executed.
在步驟ST3中，控制部(80)係執行供給控制。在供給控制中，控制部(80)係開啟第一氣體開閉閥(13)。此外，控制部(80)係關閉第二氣體開閉閥(14)。在此狀態下，從臭氧產生裝置(20)所生成之臭氧氣體係被向供給路(40)供給。In step ST3, the control unit (80) executes supply control. In the supply control, the control unit (80) opens the first gas on-off valve (13). In addition, the control unit (80) closes the second gas on-off valve (14). In this state, the ozone gas system generated from the ozone generator (20) is supplied to the supply path (40).
在步驟ST4中，控制部(80)係執行停止控制。在停止控制中，控制部(80)係關閉第一氣體開閉閥(13)。此外，控制部(80)係開啟第二氣體開閉閥(14)。在此狀態下，停止從臭氧產生裝置(20)向供給路(40)供給臭氧氣體。從臭氧產生裝置(20)所生成之剩餘的臭氧氣體係在氣體排出路(12)流動，且由例如臭氧分解裝置所分解。In step ST4, the control unit (80) executes stop control. In the stop control, the control unit (80) closes the first gas on-off valve (13). In addition, the control unit (80) opens the second gas on-off valve (14). In this state, the supply of ozone gas from the ozone generator (20) to the supply path (40) is stopped. The remaining ozone gas system generated from the ozone generator (20) flows through the gas discharge path (12), and is decomposed by, for example, the ozone decomposition device.
當步驟ST4結束，再度執行步驟ST2。如以上般，控制部(80)係交互地重複進行供給控制(步驟ST3)與停止控制(步驟ST4)，直到輸入有運轉結束的指令。When step ST4 ends, step ST2 is executed again. As described above, the control unit (80) alternately repeats the supply control (step ST3) and the stop control (step ST4) until a command to end the operation is input.
[初次的供給控制] 緊接在臭氧水製造裝置(1)的運轉開始之後，執行初次的供給控制。如圖4所示，當供給控制開始時，在步驟ST31中，控制部(80)係開啟第一氣體開閉閥(13)。在步驟ST31中，控制部(80)係關閉第二氣體開閉閥(14)。結果，從臭氧產生裝置(20)所生成之臭氧氣體係被向供給路(40)供給。[First supply control] Immediately after the start of the operation of the ozone water producing device (1), the first supply control is executed. As shown in Fig. 4, when the supply control starts, in step ST31, the control unit (80) opens the first gas on-off valve (13). In step ST31, the control unit (80) closes the second gas on-off valve (14). As a result, the ozone gas system generated from the ozone generator (20) is supplied to the supply path (40).
如圖3所示，在初次的供給控制中，臭氧濃度C係從點a1(臭氧濃度C=0)的狀態緩緩地上升。在臭氧濃度C到達點a2(目標濃度Cset)為止，臭氧濃度C係比目標濃度Cset還低。因此，在步驟ST32中，控制部(80)係判斷臭氧濃度C比目標濃度Cset還低。在此情形下，執行步驟ST34。在步驟ST34中，控制部(80)係將最大值Cmax、下部臨限值C1設定成目標濃度Cset(例如20ppm)。As shown in FIG. 3, in the initial supply control, the ozone concentration C gradually rises from the state of the point a1 (ozone concentration C=0). Until the ozone concentration C reaches the point a2 (target concentration Cset), the ozone concentration C is lower than the target concentration Cset. Therefore, in step ST32, the control unit (80) determines that the ozone concentration C is lower than the target concentration Cset. In this case, step ST34 is executed. In step ST34, the control unit (80) sets the maximum value Cmax and the lower threshold value C1 to the target concentration Cset (for example, 20 ppm).
在步驟ST35中，控制部(80)係判定臭氧濃度C是否比下部臨限值C1還高。下部臨限值C1係在步驟ST1中被設定成目標濃度Cset(例如20ppm)。因此，當臭氧濃度變得比點a2還高時，步驟ST35的條件成立，供給控制結束。In step ST35, the control unit (80) determines whether the ozone concentration C is higher than the lower threshold value C1. The lower threshold value C1 is set to the target concentration Cset (for example, 20 ppm) in step ST1. Therefore, when the ozone concentration becomes higher than the point a2, the condition of step ST35 is satisfied, and the supply control ends.
[在初次的供給控制後之停止控制] 當初次的供給控制結束時，執行停止控制。如圖5所示，當停止控制開始時，在步驟ST41中，控制部(80)係關閉第一氣體開閉閥(13)。在步驟ST41中，控制部(80)係開啟第二氣體開閉閥(14)。結果，從臭氧產生裝置(20)所生成之臭氧氣體係不向供給路(40)供給。[Stop control after initial supply control] When the first supply control ends, the stop control is executed. As shown in FIG. 5, when the stop control is started, in step ST41, the control unit (80) closes the first gas on-off valve (13). In step ST41, the control unit (80) opens the second gas on-off valve (14). As a result, the ozone gas system generated from the ozone generator (20) is not supplied to the supply path (40).
在步驟ST42中，控制部(80)係判定臭氧濃度C是否比目標濃度Cset還高。當第一氣體開閉閥(13)關閉時，停止向供給路(40)供給臭氧氣體。但是，從停止供給臭氧氣體起到臭氧濃度C降低為止之期間裡，時間遲延會發生。因為該時間遲延，緊接在點a2上停止供給臭氧氣體之後，臭氧濃度C進一步上升。結果，步驟ST42的條件成立，執行步驟ST44。In step ST42, the control unit (80) determines whether the ozone concentration C is higher than the target concentration Cset. When the first gas on-off valve (13) is closed, the supply of ozone gas to the supply path (40) is stopped. However, in the period from when the supply of ozone gas is stopped to when the ozone concentration C decreases, a time delay may occur. Because of this time delay, immediately after the ozone gas supply is stopped at the point a2, the ozone concentration C further rises. As a result, the condition of step ST42 is satisfied, and step ST44 is executed.
在步驟ST44中，控制部(80)係將最小值Cmin以及上部臨限值C1設定成目標濃度Cset(例如20ppm)。In step ST44, the control unit (80) sets the minimum value Cmin and the upper threshold value C1 to the target concentration Cset (for example, 20 ppm).
在步驟ST45中，控制部(80)係判定臭氧濃度C是否比上部臨限值C2還低。在前次的供給控制之步驟ST34中，上部臨限值C2係被設定成目標濃度(例如20ppm)。因此，在臭氧濃度C比點a2的目標濃度Cset還高之狀況下，步驟ST45的條件不成立，執行步驟ST46。In step ST45, the control unit (80) determines whether the ozone concentration C is lower than the upper threshold value C2. In step ST34 of the previous supply control, the upper threshold value C2 is set to the target concentration (for example, 20 ppm). Therefore, when the ozone concentration C is higher than the target concentration Cset at the point a2, the condition of step ST45 is not established, and step ST46 is executed.
在步驟ST46中，控制部(80)係判定臭氧濃度C是否比最大值Cmax還高。於緊接在之前的供給控制之步驟ST34中，最大值Cmax係被設定成目標濃度Cset(例如20ppm)。因此，在臭氧濃度C比點a2的目標濃度Cset還高之狀況下，步驟ST46的條件成立，執行步驟ST47。In step ST46, the control unit (80) determines whether the ozone concentration C is higher than the maximum value Cmax. In step ST34 of the immediately preceding supply control, the maximum value Cmax is set to the target concentration Cset (for example, 20 ppm). Therefore, when the ozone concentration C is higher than the target concentration Cset at the point a2, the condition of step ST46 is satisfied, and step ST47 is executed.
在步驟ST47中，控制部(80)係將最大值Cmax更新成現在的臭氧濃度C。然後，在步驟ST48中，控制部(80)係基於上述算式(2)算出上部臨限值C2。然後，返回步驟ST45。In step ST47, the control unit (80) updates the maximum value Cmax to the current ozone concentration C. Then, in step ST48, the control unit (80) calculates the upper threshold value C2 based on the above-mentioned formula (2). Then, it returns to step ST45.
在臭氧濃度C到達上升反曲點為止，重複執行步驟ST46以及步驟ST47。Until the ozone concentration C reaches the rising inflection point, step ST46 and step ST47 are repeatedly executed.
當從第一氣體開閉閥(13)關閉起經過一段時間時，臭氧濃度C會到達點a3的上升反曲點，之後，臭氧濃度C會降低。針對臭氧濃度C落在點a2與點a3之間的期間，步驟ST45的條件不成立。When a period of time has elapsed since the first gas on-off valve (13) is closed, the ozone concentration C will reach the rising inflection point of the point a3, after which the ozone concentration C will decrease. Regarding the period when the ozone concentration C falls between the point a2 and the point a3, the condition of step ST45 is not established.
當臭氧濃度C變得比點a3的上升反曲點(最大值Cmax)還低時，步驟ST46的條件不成立。因此，步驟ST47以及ST48被跳過，執行步驟ST45。換言之，在臭氧濃度C過了上升反曲點(點a3)之後，最大值Cmax以及上部臨限值C2不會被更新或算出。When the ozone concentration C becomes lower than the rising inflection point (maximum value Cmax) of the point a3, the condition of step ST46 is not established. Therefore, steps ST47 and ST48 are skipped, and step ST45 is executed. In other words, after the ozone concentration C has passed the rising inflection point (point a3), the maximum value Cmax and the upper threshold value C2 will not be updated or calculated.
之後，當臭氧濃度C變得比作為上部臨限值C2之點a4還低時，步驟ST45的條件成立。結果，停止控制結束，再度執行供給控制。After that, when the ozone concentration C becomes lower than the point a4 which is the upper threshold value C2, the condition of step ST45 is established. As a result, the stop control ends, and the supply control is executed again.
[第二次以後的供給控制] 當初次的停止控制結束時，執行第二次的供給控制，在步驟ST31中臭氧氣體被再度向供給路(40)供給。但是，從臭氧氣體的供給開始起到臭氧濃度C上升為止之期間裡，時間遲延會發生。此外，被向供給路(40)供給之臭氧水的臭氧濃度C係藉由所謂的自分解反應而迅速地降低。因此，緊接在點a4上開始供給臭氧氣體之後，臭氧濃度C係進一步減少。[Supply control after the second time] When the first stop control ends, the second supply control is executed, and the ozone gas is again supplied to the supply path (40) in step ST31. However, in the period from the start of the supply of ozone gas until the ozone concentration C rises, a time delay may occur. In addition, the ozone concentration C of the ozone water supplied to the supply path (40) is rapidly reduced by a so-called self-decomposition reaction. Therefore, immediately after the ozone gas supply is started at the point a4, the ozone concentration C system further decreases.
針對臭氧濃度C落在點a4與點a5(目標濃度Cset)之間的期間，步驟ST32的條件不成立，執行步驟ST33。在步驟ST33中，控制部(80)係進行臭氧濃度C是否比最大值Cmax還高之判定。從點a4到點a5為止之期間的臭氧濃度C係比最大值Cmax還低。另外，此處的最大值Cmax係與在前次的停止控制中所求得之最大值(點a3)對應。因此，步驟ST33的條件不成立，再度執行步驟ST32。When the ozone concentration C falls between the point a4 and the point a5 (target concentration Cset), the condition of step ST32 is not satisfied, and step ST33 is executed. In step ST33, the control unit (80) determines whether the ozone concentration C is higher than the maximum value Cmax. The ozone concentration C during the period from the point a4 to the point a5 is lower than the maximum value Cmax. In addition, the maximum value Cmax here corresponds to the maximum value (point a3) obtained in the previous stop control. Therefore, the condition of step ST33 is not satisfied, and step ST32 is executed again.
之後，當臭氧濃度C變得比點a5的目標濃度Cset還低時，步驟ST32的條件成立，執行步驟ST34。在步驟ST34中，控制部(80)係將最大值Cmax以及上部臨限值C2設定成目標濃度Cset(例如20ppm)。After that, when the ozone concentration C becomes lower than the target concentration Cset at the point a5, the condition of step ST32 is satisfied, and step ST34 is executed. In step ST34, the control unit (80) sets the maximum value Cmax and the upper threshold value C2 to the target concentration Cset (for example, 20 ppm).
在步驟ST35中，控制部(80)係判定臭氧濃度C是否比下部臨限值C1還高。在前次的停止控制之步驟ST44中，下部臨限值C1係被設定成目標濃度(例如20ppm)。因此，在臭氧濃度C比點a5的目標濃度Cset還低之狀況下，步驟ST35的條件不成立，執行步驟ST36。In step ST35, the control unit (80) determines whether the ozone concentration C is higher than the lower threshold value C1. In step ST44 of the previous stop control, the lower threshold value C1 is set to the target concentration (for example, 20 ppm). Therefore, when the ozone concentration C is lower than the target concentration Cset at the point a5, the condition of step ST35 is not established, and step ST36 is executed.
在步驟ST36中，控制部(80)係判定臭氧濃度C是否比最小值Cmin還低。緊接在之前的停止控制之步驟ST44中，最小值Cmin係被設定成目標濃度Cset(例如20ppm)。因此，在臭氧濃度比點a5的目標濃度Cset還低之狀況下，步驟ST36的條件成立，執行步驟ST37。In step ST36, the control unit (80) determines whether the ozone concentration C is lower than the minimum value Cmin. In step ST44 of the immediately preceding stop control, the minimum value Cmin is set to the target concentration Cset (for example, 20 ppm). Therefore, when the ozone concentration is lower than the target concentration Cset at the point a5, the condition of step ST36 is satisfied, and step ST37 is executed.
在步驟ST37中，控制部(80)係將最小值Cmin更新成現在的臭氧濃度C。然後，在步驟ST38中，控制部(80)係基於上述算式(1)算出下部臨限值C1。然後，返回步驟ST35。In step ST37, the control unit (80) updates the minimum value Cmin to the current ozone concentration C. Then, in step ST38, the control unit (80) calculates the lower threshold value C1 based on the above-mentioned formula (1). Then, it returns to step ST35.
在臭氧濃度C到達下降反曲點為止，重複執行步驟ST36以及步驟ST37。Until the ozone concentration C reaches the descending inflection point, step ST36 and step ST37 are repeatedly executed.
當從第一氣體開閉閥(13)開啟起經過一段時間時，臭氧濃度C會到達點a6的下降反曲點，之後，臭氧濃度C會上升。針對臭氧濃度C落在點a5與點a6之間的期間，步驟ST35的條件不成立。When a period of time has elapsed since the opening of the first gas on-off valve (13), the ozone concentration C will reach the descending inflection point of point a6, and then the ozone concentration C will rise. Regarding the period when the ozone concentration C falls between the point a5 and the point a6, the condition of step ST35 is not established.
當臭氧濃度C變得比點a6的下降反曲點(最小值Cmin)還低時，步驟ST36的條件不成立。因此，步驟ST37以及步驟ST38被跳過，執行步驟ST35。換言之，在臭氧濃度C過了下降反曲點(點a6)之後，最小值Cmin以及下部臨限值C1不會被更新或算出。When the ozone concentration C becomes lower than the descending inflection point (minimum value Cmin) of the point a6, the condition of step ST36 is not established. Therefore, step ST37 and step ST38 are skipped, and step ST35 is executed. In other words, after the ozone concentration C has passed the descending inflection point (point a6), the minimum value Cmin and the lower threshold value C1 will not be updated or calculated.
之後，當臭氧濃度C變得比作為下部臨限值C1之點a7還高時，步驟ST35的條件成立。結果，供給控制結束，再度執行停止控制。之後的停止控制以及供給控制係如同上述。控制部(80)係交互地重複進行停止控制以及供給控制，直到輸入有圖2的步驟ST2之運轉結束的指令。結果，如圖3所示，臭氧濃度C迅速地收斂於目標濃度Cset。After that, when the ozone concentration C becomes higher than the point a7 which is the lower threshold value C1, the condition of step ST35 is established. As a result, the supply control ends, and the stop control is executed again. The subsequent stop control and supply control system are as described above. The control unit (80) alternately repeats the stop control and the supply control until a command to end the operation of step ST2 in FIG. 2 is input. As a result, as shown in FIG. 3, the ozone concentration C quickly converges to the target concentration Cset.
[在供給控制中臭氧濃度不收斂於目標濃度之情形下的控制例] 如上述般，在從供給控制切換至停止控制後，當臭氧濃度C經過上升反曲點而變得比上部臨限值C2還低時，控制部(80)係執行供給控制。但是，取決於運轉條件或β的設定值，在供給控制中臭氧濃度C有可能變得不夠低，可能達不到目標濃度Cset。因此，在此種情形下，控制部(80)係結束供給控制且執行停止控制。針對該控制，一邊參照圖4以及圖6一邊說明。[Example of control when the ozone concentration does not converge to the target concentration in the supply control] As described above, after switching from the supply control to the stop control, when the ozone concentration C passes the rising inflection point and becomes lower than the upper threshold value C2, the control unit (80) executes the supply control. However, depending on the operating conditions or the set value of β, the ozone concentration C may become insufficiently low during the supply control, and the target concentration Cset may not be reached. Therefore, in this case, the control unit (80) ends the supply control and executes the stop control. This control will be described with reference to FIGS. 4 and 6.
當臭氧濃度C變得比圖6的點b1之上部臨限值C2還低時，執行供給控制。因時間遲延的影響，臭氧濃度C係進一步降低。在此情形下，步驟ST32的條件不成立，執行步驟ST33。如圖6所示，當臭氧濃度C的下降反曲點(點b2)變得比目標濃度Cset還高時，步驟ST32的條件不成立，不進行步驟ST34以後的處理。When the ozone concentration C becomes lower than the upper threshold value C2 of the point b1 in FIG. 6, the supply control is executed. Due to the influence of time delay, the ozone concentration C system further decreases. In this case, the condition of step ST32 is not satisfied, and step ST33 is executed. As shown in FIG. 6, when the fall inflection point (point b2) of the ozone concentration C becomes higher than the target concentration Cset, the condition of step ST32 is not established, and the processing after step ST34 is not performed.
在此情形下，臭氧濃度C係進一步上升且變得比最大值Cmax還高。在此，最大值Cmax是在前次的停止控制中所求得的值。在此情形下，步驟ST33的條件成立，結束供給控制。然後，執行停止控制。In this case, the ozone concentration C system further rises and becomes higher than the maximum value Cmax. Here, the maximum value Cmax is the value obtained in the previous stop control. In this case, the condition of step ST33 is satisfied, and the supply control ends. Then, stop control is executed.
如以上般，在從停止控制切換至供給控制後，當臭氧濃度C變得比前次的停止控制之最大值Cmax還高時，控制部(80)係結束供給控制，執行停止控制。藉由該控制，能夠確實地抑制臭氧濃度C不收斂於目標濃度Cset地持續上升的情形。As described above, after switching from the stop control to the supply control, when the ozone concentration C becomes higher than the maximum value Cmax of the previous stop control, the control unit (80) ends the supply control and executes the stop control. With this control, it is possible to reliably suppress the situation in which the ozone concentration C does not converge to the target concentration Cset and continues to rise.
[在停止控制中臭氧濃度不收斂於目標濃度之情形下的控制例] 如上述般，在從停止控制切換至供給控制後，當臭氧濃度C經過下降反曲點而變得比下部臨限值C1還高時，控制部(80)係執行停止控制。但是，取決於運轉條件或α的設定值，在停止控制中臭氧濃度C有可能變得不夠高，可能達不到目標濃度Cset。因此，在此種情形下，控制部(80)係結束停止控制且執行供給控制。針對該控制，一邊參照圖5以及圖7一邊說明。[Example of control when the ozone concentration does not converge to the target concentration during stop control] As described above, after switching from the stop control to the supply control, when the ozone concentration C passes the descending inflection point and becomes higher than the lower threshold value C1, the control unit (80) executes the stop control. However, depending on the operating conditions or the setting value of α, the ozone concentration C may become insufficiently high during the stop control, and the target concentration Cset may not be reached. Therefore, in this case, the control unit (80) ends the stop control and executes the supply control. This control will be described with reference to FIGS. 5 and 7.
當臭氧濃度C變得比圖7的點d1之下部臨限值C1還高時，執行停止控制。因時間遲延的影響，臭氧濃度C係進一步上升。在此情形下，步驟ST42的條件不成立，執行步驟ST43。如圖7所示，當臭氧濃度C的上升反曲點(點d2)變得比目標濃度Cset還低時，步驟ST43的條件不成立，不進行步驟ST44以後的處理。When the ozone concentration C becomes higher than the threshold value C1 at the lower part of the point d1 in FIG. 7, the stop control is executed. Due to the time delay, the ozone concentration C series further increased. In this case, the condition of step ST42 is not satisfied, and step ST43 is executed. As shown in FIG. 7, when the rising inflection point (point d2) of the ozone concentration C becomes lower than the target concentration Cset, the condition of step ST43 is not established, and the processing after step ST44 is not performed.
在此情形下，臭氧濃度C係進一步降低且變得比最小值Cmin還低。在此，最小值Cmin是在前次的供給控制中所求得的值。在此情形下，步驟ST43的條件成立，結束停止控制。然後，執行供給控制。In this case, the ozone concentration C system further decreases and becomes lower than the minimum value Cmin. Here, the minimum value Cmin is the value obtained in the previous supply control. In this case, the condition of step ST43 is satisfied, and the stop control is ended. Then, supply control is executed.
如以上般，在從供給控制切換至停止控制後，當臭氧濃度C變得比前次的停止控制之最小值Cmin還低時，控制部(80)係結束停止控制，執行供給控制。藉由該控制，能夠確實地抑制臭氧濃度C不收斂於目標濃度Cset地持續降低的情形。As described above, after switching from the supply control to the stop control, when the ozone concentration C becomes lower than the minimum value Cmin of the previous stop control, the control unit (80) ends the stop control and executes the supply control. With this control, it is possible to reliably suppress the situation where the ozone concentration C does not converge to the target concentration Cset and continues to decrease.
[實施形態之功效] 在停止控制中，判定供給控制之執行的上部臨限值C2係基於最大值Cmax與目標濃度Cset所求得。上部臨限值C2是最大值Cmax與目標濃度Cset之間的值。由於上部臨限值C2係比目標濃度Cset還高，故能迅速地執行供給控制。由於上部臨限值C2係比最大值Cmax還低，故能避開臭氧濃度C達不到目標濃度Cset之不良狀況。結果，比起圖9所示之比較例，能夠降低臭氧濃度C之下衝的幅度，能夠使臭氧濃度C迅速地收斂於目標濃度Cset。[Effects of Implementation Mode] In the stop control, the upper threshold value C2 for determining the execution of the supply control is obtained based on the maximum value Cmax and the target concentration Cset. The upper threshold value C2 is a value between the maximum value Cmax and the target concentration Cset. Since the upper threshold C2 is higher than the target concentration Cset, the supply control can be executed quickly. Since the upper threshold C2 is lower than the maximum value Cmax, it can avoid the bad situation that the ozone concentration C does not reach the target concentration Cset. As a result, compared to the comparative example shown in FIG. 9, the width of the undershoot of the ozone concentration C can be reduced, and the ozone concentration C can be quickly converged to the target concentration Cset.
特別是藉由將β設成0.5，上部臨限值C2係成為最大值Cmax與目標濃度Cset之間的中間的值。因此，能夠抑制因上部臨限值C2變得過低而無法將下衝的幅度充分減低之情形。能夠確實地避開臭氧濃度C因上部臨限值C2變得過高而達不到目標濃度Cset之不良狀況。In particular, by setting β to 0.5, the upper threshold value C2 becomes an intermediate value between the maximum value Cmax and the target concentration Cset. Therefore, it is possible to suppress the situation in which the magnitude of the undershoot cannot be sufficiently reduced because the upper threshold value C2 becomes too low. It is possible to reliably avoid the problem that the upper threshold C2 of the ozone concentration C becomes too high and the target concentration Cset is not reached.
在供給控制中，判定停止控制之執行的下部臨限值C1係基於最小值Cmin與目標濃度Cset所求得。下部臨限值C1是最小值Cmin與目標濃度Cset之間的值。由於下部臨限值C1係比目標濃度Cset還低，故能迅速地執行停止控制。由於下部臨限值C1係比最小值Cmin還高，故能避開臭氧濃度C達不到目標濃度Cset之不良狀況。結果，比起圖9所示之比較例，能夠降低臭氧濃度C之下衝的幅度，能夠使臭氧濃度C迅速地收斂於目標濃度Cset。In the supply control, the lower threshold value C1 for determining the execution of the stop control is obtained based on the minimum value Cmin and the target concentration Cset. The lower threshold value C1 is a value between the minimum value Cmin and the target concentration Cset. Since the lower threshold C1 is lower than the target concentration Cset, the stop control can be executed quickly. Since the lower threshold value C1 is higher than the minimum value Cmin, it can avoid the disadvantage that the ozone concentration C does not reach the target concentration Cset. As a result, compared to the comparative example shown in FIG. 9, the width of the undershoot of the ozone concentration C can be reduced, and the ozone concentration C can be quickly converged to the target concentration Cset.
特別是藉由將β設成0.5，下部臨限值C1係成為最小值Cmin與目標濃度Cset之間的中間的值。因此，能夠抑制因下部臨限值C1變得過高而無法將過衝的幅度充分減低之情形。能夠確實地避開臭氧濃度C因下部臨限值C1變得過低而達不到目標濃度Cset之不良狀況。In particular, by setting β to 0.5, the lower threshold value C1 becomes an intermediate value between the minimum value Cmin and the target concentration Cset. Therefore, it is possible to suppress the situation in which the width of the overshoot cannot be sufficiently reduced due to the lower threshold value C1 becoming too high. It is possible to reliably avoid the problem of the ozone concentration C being too low due to the lower threshold value C1 and failing to reach the target concentration Cset.
[實施形態的變形例] 在上述的實施形態中，可以設成以下般的變形例之構成。[Modifications of the embodiment] In the above-mentioned embodiment, the following modifications can be made.
[變形例1] 可以將上述算式(2)的β設成比上述算式(1)的α還小。臭氧氣體的自分解反應之速度係傾向於比從臭氧產生裝置(20)向供給路(40)供給臭氧氣體之速度還慢。因此，當β過大時，在供給控制開始後，臭氧濃度C有可能會達不到目標濃度Cset。相對於此，藉由將β設成比α還小，作為第二臨限值之上部臨限值C2係相對地變低。因此，能夠抑制臭氧濃度C達不到目標濃度Cset的情形。[Modification 1] The β in the above formula (2) can be set to be smaller than the α in the above formula (1). The speed of the self-decomposition reaction of ozone gas tends to be slower than the speed of supplying ozone gas from the ozone generator (20) to the supply path (40). Therefore, when β is too large, after the start of the supply control, the ozone concentration C may not reach the target concentration Cset. In contrast, by setting β to be smaller than α, the upper threshold value C2, which is the second threshold value, becomes relatively lower. Therefore, it is possible to prevent the ozone concentration C from reaching the target concentration Cset.
[變形例2] 以圖8所示之變形例2的臭氧水製造裝置(1)來說，槽(44)以及射出器(35)的關係與上述實施形態不同。在變形例2的液體流路(30)中，槽(44)被配置於射出器(35)的上游側。給水路(31)的流出端係與槽(44)連接。在槽(44)與射出器(35)的液體流入部(35a)之間係連接有中繼路(75)。於中繼路(75)係設置有泵(45)以及第一流量感測器(33)。在射出器(35)之液體流出部(35b)到對象之間係設置有供給路(40)。[Modification 2] Taking the ozone water production device (1) of Modification 2 shown in Fig. 8, the relationship between the tank (44) and the ejector (35) is different from the above-mentioned embodiment. In the liquid flow path (30) of Modification 2, the groove (44) is arranged on the upstream side of the ejector (35). The outflow end of the water supply path (31) is connected with the tank (44). A relay path (75) is connected between the tank (44) and the liquid inflow portion (35a) of the ejector (35). A pump (45) and a first flow sensor (33) are provided on the relay path (75). A supply path (40) is provided between the liquid outflow portion (35b) of the ejector (35) and the object.
與實施形態同樣，變形例2的液體流路(30)係具有第一返送流路(60)，不過不具有第二返送流路(70)。於第一返送流路(60)係設置有第二背壓閥(72)來取代實施形態的流量調節閥(61)。另外，在變形例2的供給路(40)中，可以在射出器(35)的下游側設置氣液分離器。氣液分離器係分離臭氧水中的臭氧氣體。Like the embodiment, the liquid flow path (30) of Modification 2 has the first return flow path (60), but does not have the second return flow path (70). A second back pressure valve (72) is provided in the first return flow path (60) instead of the flow control valve (61) of the embodiment. In addition, in the supply path (40) of Modification 2, a gas-liquid separator may be provided on the downstream side of the ejector (35). The gas-liquid separator separates ozone gas from ozone water.
在變形例2中也是以臭氧濃度C收斂於目標濃度Cset之方式，進行有與上述實施形態同樣的臭氧濃度控制。在變形例2中，由於在供給路(40)未設有槽(44)，因此臭氧濃度C容易隨著供給控制以及停止控制變動。相對於此，藉由進行與上述實施形態同樣的臭氧濃度控制，能夠減低臭氧濃度C之過衝的幅度。同樣地，能夠減低臭氧濃度C之下衝的幅度。In Modification 2, the same ozone concentration control as in the above-mentioned embodiment is also performed so that the ozone concentration C converges to the target concentration Cset. In Modification 2, since the groove (44) is not provided in the supply path (40), the ozone concentration C easily fluctuates with the supply control and the stop control. In contrast, by performing the same ozone concentration control as in the above-mentioned embodiment, the width of the overshoot of the ozone concentration C can be reduced. Similarly, the amplitude of the undershoot of the ozone concentration C can be reduced.
[其它的實施形態] 在上述實施形態中，於供給控制中，藉由開啟第一氣體開閉閥(13)，向供給路(40)供給臭氧產生裝置(20)所生成的臭氧氣體。但是，也可以在供給控制中使停止中的臭氧產生裝置(20)運轉，藉此向供給路(40)供給臭氧氣體。[Other embodiments] In the above-mentioned embodiment, in the supply control, the ozone gas generated by the ozone generator (20) is supplied to the supply path (40) by opening the first gas on-off valve (13). However, it is also possible to operate the ozone generator (20) that is stopped during the supply control to supply ozone gas to the supply path (40).
在上述實施形態中，於停止控制中，藉由關閉第一氣體開閉閥(13)，停止向供給路(40)供給臭氧氣體。但是，也可以在停止控制中使運轉中的臭氧產生裝置(20)停止，藉此停止向供給路(40)供給臭氧氣體。In the above embodiment, in the stop control, the supply of ozone gas to the supply path (40) is stopped by closing the first gas on-off valve (13). However, it is also possible to stop the ozone generator (20) in operation during the stop control, thereby stopping the supply of ozone gas to the supply path (40).
在上述實施形態的臭氧濃度控制中，控制部(80)係進行本發明之下面的A、B雙方之判定。A：控制部(80)係在供給控制中基於第一臨限值C1來判定停止控制之執行。B：控制部(80)係在停止控制中基於第二臨限值C2來判定供給控制之執行。但是，控制部(80)也可以只進行A以及B中之一方的判定。In the ozone concentration control of the above embodiment, the control unit (80) performs the following determinations of both A and B in the present invention. A: The control unit (80) determines the execution of the stop control based on the first threshold value C1 in the supply control. B: The control unit (80) determines the execution of the supply control based on the second threshold value C2 during the stop control. However, the control unit (80) may only determine one of A and B.
第一臨限值C1也可以不必基於上述算式(1)。第一臨限值C1只要是基於目標濃度Cset與最小值Cmin所求得，且為最小值Cmin與目標濃度Cset之間的值即可。The first threshold value C1 does not need to be based on the above equation (1). The first threshold value C1 may be obtained based on the target concentration Cset and the minimum value Cmin, and may be a value between the minimum value Cmin and the target concentration Cset.
第二臨限值C2也可以不必基於上述算式(2)。第二臨限值C2只要是基於目標濃度Cset與最大值Cmax所求得，且為最大值Cmax與目標濃度Cset之間的值即可。The second threshold value C2 does not need to be based on the above equation (2). The second threshold value C2 may be obtained based on the target concentration Cset and the maximum value Cmax, and may be a value between the maximum value Cmax and the target concentration Cset.
實施形態的控制部(80)係在從供給控制切換至停止控制後，當臭氧濃度C變得比前次的停止控制之最小值Cmin還低時，結束停止控制且執行供給控制。但是，控制部(80)也可以在從供給控制切換至停止控制後，當臭氧濃度C變得比預定的第三臨限值還低時，結束停止控制且執行供給控制。在此，第三臨限值只要是比目標濃度Cset還低的值即可。又，控制部(80)也可以在從供給控制切換至停止控制後，當經過預定時間時結束停止控制且執行供給控制。The control unit (80) of the embodiment ends the stop control and executes the supply control when the ozone concentration C becomes lower than the minimum value Cmin of the previous stop control after switching from the supply control to the stop control. However, the control unit (80) may end the stop control and execute the supply control when the ozone concentration C becomes lower than the predetermined third threshold value after switching from the supply control to the stop control. Here, the third threshold value may be a value lower than the target concentration Cset. In addition, the control unit (80) may end the stop control and execute the supply control when a predetermined time has passed after switching from the supply control to the stop control.
實施形態的控制部(80)係在從停止控制切換至供給控制後，當臭氧濃度C變得比前次的供給控制之最大值Cmax還高時，結束供給控制且執行停止控制。但是，控制部(80)也可以在從停止控制切換至供給控制後，當臭氧濃度C變得比預定的第四臨限值還高時，結束供給控制且執行停止控制。在此，第四臨限值只要是比目標濃度Cset還高的值即可。又，控制部(80)也可以在從停止控制切換至供給控制後，當經過預定時間時結束供給控制且執行停止控制。The control unit (80) of the embodiment ends the supply control and executes the stop control when the ozone concentration C becomes higher than the maximum value Cmax of the previous supply control after switching from the stop control to the supply control. However, the control unit (80) may end the supply control and execute the stop control when the ozone concentration C becomes higher than the predetermined fourth threshold after switching from the stop control to the supply control. Here, the fourth threshold value may be a value higher than the target concentration Cset. In addition, the control unit (80) may end the supply control and execute the stop control when a predetermined time has passed after switching from the stop control to the supply control.
實施形態的臭氧產生裝置(20)是放電方式的臭氧產生器。但是，臭氧產生裝置(20)也可以是電氣分解式或紫外線式等其它的方式。The ozone generator (20) of the embodiment is an ozone generator of a discharge method. However, the ozone generator (20) may be of other methods such as electrolysis type or ultraviolet type.
另外，上述的實施形態、變形例、其它之例等的各構成要素可以在能夠組合的範圍內置換或變更。 [產業可利用性]In addition, the respective constituent elements of the above-mentioned embodiments, modifications, and other examples can be replaced or changed within the range that can be combined. [Industry Availability]
如以上所說明，本發明對於臭氧水製造裝置是有用的。As explained above, the present invention is useful for ozone water production equipment.
1:臭氧水製造裝置
10:氣體流路
11:氣體供給路
12:氣體排出路
13:第一氣體開閉閥
14:第二氣體開閉閥
20:臭氧產生裝置
30:液體流路
31:給水路
32:給水側開閉閥
33:第一流量感測器
35:射出器
35a:液體流入部
35b:液體流出部
35c:氣體抽吸部
40:供給路
41:第一管
42:第二管
43:第三管
44:槽
45:泵
46:臭氧濃度感測器(檢測部)
47:壓力感測器
48:第二流量感測器
49:供給側開閉閥
50:位準感測器
60:第一返送流路
61:流量調節閥
70:第二返送流路
71:第一背壓閥
72:第二背壓閥
75:中繼路
80:控制部
a1~a7,b1~b3,d1~d2,p1~p3:點
C1:第一臨限值(下部臨限值)
C2:第二臨限值(上部臨限值)
Cmax:最大值
Cmin:最小值
Cset:目標濃度
ST1~ ST4,ST31~ST38,ST41~ST48:步驟1: Ozone water production device
10: Gas flow path
11: Gas supply path
12: Gas discharge path
13: The first gas on-off valve
14: The second gas on-off valve
20: Ozone generator
30: Liquid flow path
31: Waterway
32: Feedwater side on-off valve
33: The first flow sensor
35:
[圖1]是表示實施形態之臭氧水製造裝置的概略之構成的配管系統圖。 [圖2]是實施形態之臭氧濃度控制的整體之流程圖。 [圖3]是表示實施形態之臭氧濃度控制中的臭氧濃度與時間之關係的圖表(graph)。 [圖4]是實施形態之供給控制的流程圖。 [圖5]是實施形態之停止控制的流程圖。 [圖6]係對應於圖3，是用以說明在臭氧濃度持續上升之情形下的控制之圖表。 [圖7]係對應於圖3，是用以說明在臭氧濃度持續降低之情形下的控制之圖表。 [圖8]是表示變形例2之臭氧水製造裝置的概略之構成的配管系統圖。 [圖9]是表示比較例之臭氧濃度控制中的臭氧濃度與時間之關係的圖表。[Fig. 1] is a piping system diagram showing the schematic configuration of the ozone water production device of the embodiment. [Figure 2] is a flow chart of the overall ozone concentration control of the embodiment. Fig. 3 is a graph showing the relationship between ozone concentration and time in the ozone concentration control of the embodiment. [Fig. 4] is a flowchart of the supply control of the embodiment. [Fig. 5] is a flowchart of the stop control of the embodiment. [Fig. 6] corresponds to Fig. 3 and is a graph used to illustrate the control in the case where the ozone concentration continues to rise. [Fig. 7] corresponds to Fig. 3 and is a graph used to illustrate the control in the case where the ozone concentration continues to decrease. Fig. 8 is a piping system diagram showing the schematic configuration of an ozone water production device of Modification 2. Fig. 9 is a graph showing the relationship between ozone concentration and time in the ozone concentration control of the comparative example.
a1~a7:點 a1~a7: point
C1:第一臨限值(下部臨限值) C1: The first threshold (lower threshold)
C2:第二臨限值(上部臨限值) C2: The second threshold (upper threshold)
Cmax:最大值 Cmax: Maximum
Cmin:最小值 Cmin: minimum
Cset:目標濃度 Cset: target concentration
Claims (6)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020011175A JP7457512B2 (en) | 2020-01-27 | 2020-01-27 | Ozone water production equipment |
| JP2020-011175 | 2020-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202133924A true TW202133924A (en) | 2021-09-16 |
Family
ID=77173515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW110102033A TW202133924A (en) | 2020-01-27 | 2021-01-20 | Apparatus for producing ozonated water capable of quickly converging the ozone concentration to a target concentration |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7457512B2 (en) |
| KR (1) | KR20210096013A (en) |
| CN (1) | CN113244836A (en) |
| TW (1) | TW202133924A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2023286415A1 (en) | 2021-07-13 | 2023-01-19 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005021798A (en) | 2003-07-01 | 2005-01-27 | Teeiku Wan Sogo Jimusho:Kk | Method and apparatus for manufacturing ozone water |
| JP5032810B2 (en) | 2006-08-31 | 2012-09-26 | 三井造船株式会社 | Ballast water treatment system |
| JP4950915B2 (en) | 2008-02-20 | 2012-06-13 | パナソニック株式会社 | Ozone water production equipment |
| JP2015054996A (en) | 2013-09-12 | 2015-03-23 | パナソニック株式会社 | Ozone water generator |
| JP7041466B2 (en) | 2017-03-15 | 2022-03-24 | 住友精密工業株式会社 | Ozone water supply system |
-
2020
- 2020-01-27 JP JP2020011175A patent/JP7457512B2/en active Active
-
2021
- 2021-01-20 TW TW110102033A patent/TW202133924A/en unknown
- 2021-01-25 CN CN202110095785.5A patent/CN113244836A/en active Pending
- 2021-01-26 KR KR1020210010688A patent/KR20210096013A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP7457512B2 (en) | 2024-03-28 |
| KR20210096013A (en) | 2021-08-04 |
| CN113244836A (en) | 2021-08-13 |
| JP2021115536A (en) | 2021-08-10 |
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