TW202106979A - Molecular drag stage - Google Patents

Molecular drag stage Download PDF

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TW202106979A
TW202106979A TW108141279A TW108141279A TW202106979A TW 202106979 A TW202106979 A TW 202106979A TW 108141279 A TW108141279 A TW 108141279A TW 108141279 A TW108141279 A TW 108141279A TW 202106979 A TW202106979 A TW 202106979A
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Taiwan
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molecular drag
outlet
gap
pump
stage
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TW108141279A
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Chinese (zh)
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亞力山德 詹姆士 派蒂
理查 葛林 賀勒
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英商愛德華有限公司
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

A molecular drag stage (14), preferably for a turbomolecular pump (10), with a housing (16) comprising an inlet (28) and an outlet (30), a rotor shaft (18) rotatably supported within the housing (16), a electric motor (22) wherein the motor (22) is built by a motor stator (58) surrounding the rotor shaft (18) in order to rotate the rotor shaft (18). Thereby, a small gap (60) is defined between the outer side (62) of the rotor shaft (18) and the inner side (64) of the motor stator (58). The outer side (62) of the rotor shaft (18) or the inner side (64) of the motor stator (58) comprises a thread (66) or a threaded groove in order to convey a gaseous medium from the inlet (28) to the outlet (30).

Description

分子拖曳階段Molecular drag phase

本發明係關於一種較佳用於一渦輪分子幫浦之分子拖曳階段。本發明進一步係關於一種具有此一分子拖曳階段之渦輪分子幫浦。The present invention relates to a molecular drag phase that is preferably used in a turbomolecular pump. The present invention further relates to a turbomolecular pump with such a molecular drag stage.

已知之渦輪分子真空幫浦包括形成一入口及一出口之一外殼。在外殼中配置有一馬達以使一轉子軸件旋轉。渦輪分子真空幫浦包括一渦輪分子階段，其中脈管與一定子相互作用，以使一氣態介質自入口朝向出口輸送。渦輪分子階段之後係一分子拖曳階段，諸如一Holweck階段。已知之分子拖曳階段包括靠近其間具有一狹窄間隙之一定子之一旋轉圓柱體，其中定子或圓柱體具有一螺紋槽或一螺紋。The known turbomolecular vacuum pump includes a casing forming an inlet and an outlet. A motor is arranged in the housing to rotate a rotor shaft. The turbomolecular vacuum pump includes a turbomolecular stage in which the vessel interacts with the stator so that a gaseous medium is transported from the inlet to the outlet. The turbomolecular phase is followed by a molecular drag phase, such as a Holweck phase. The known molecular drag phase includes a rotating cylinder near a stator with a narrow gap therebetween, where the stator or cylinder has a threaded groove or a thread.

為了提高分子拖曳階段之效率，亦將若干階段巢套在一起以保持殼體之尺寸較小。藉此，在隨後分子拖曳階段中，在相反方向上幫浦氣態介質。一偶數階段藉由使氣體留於幫浦機構內而使設計複雜化，需要額外通道或鑽孔以促進氣體至排氣口之移動。因此，通常僅一奇數分子拖曳階段係可行的，使得最後一個分子拖曳階段朝向真空幫浦之出口結束，藉此限制真空幫浦之設計之自由度。In order to improve the efficiency of the molecular drag stage, several stages are nested together to keep the size of the shell small. Thereby, in the subsequent molecular drag phase, the gaseous medium is pumped in the opposite direction. An even-numbered stage complicates the design by leaving the gas in the pump mechanism, requiring additional channels or drilling to facilitate the movement of the gas to the exhaust port. Therefore, usually only an odd number of molecular drag phases are feasible, so that the last molecular drag phase ends toward the outlet of the vacuum pump, thereby limiting the freedom of design of the vacuum pump.

然而，已知概念包括一偶數分子拖曳階段，其中氣態介質流動通過一馬達定子與轉子軸件之間的間隙朝向出口。然而，此配置致使馬達內之一熱量積聚且導致摩擦損失，使此配置效率低下。However, the known concept includes an even-numbered molecular drag phase in which a gaseous medium flows through a gap between a motor stator and a rotor shaft toward the outlet. However, this configuration causes heat accumulation in one of the motors and causes friction loss, making this configuration inefficient.

本發明之一目的係提供一種分子拖曳階段以及一渦輪分子幫浦，其更有效且在設計上提供一高度自由。One object of the present invention is to provide a molecular drag stage and a turbomolecular pump, which are more efficient and provide a high degree of freedom in design.

本技術問題由根據技術方案1之一分子拖曳階段以及根據技術方案11之一渦輪分子幫浦解決。This technical problem is solved by a molecular drag phase according to technical solution 1 and a turbomolecular pump according to technical solution 11.

一種根據本發明之分子拖曳階段包括具有一入口及一出口之一外殼。一轉子軸件可旋轉地支撐於該外殼內。該分子拖曳階段進一步包括在該外殼內之一電馬達，其中該馬達由圍繞該轉子軸件之一馬達定子建構以使該轉子軸件旋轉。藉此，在該轉子軸件之該外側與該馬達定子之該內側之間界定一小間隙，使得該轉子軸件及該馬達定子係無接觸且該轉子軸件可在該馬達定子內旋轉。藉此，該轉子軸件之該外側或該馬達定子之該內側包括一螺紋或一螺紋槽，以將一氣態介質自該入口輸送至該出口。因此，該轉子軸件之該外側或該馬達定子之該內側之一者包括一螺紋或一螺紋槽，而該相對表面係平滑的。因此，該分子拖曳階段之該馬達本身經調適以將該氣態介質朝向該出口有效輸送。可藉由利用該馬達本身作為用於輸送該氣態介質之有效元件來防止該馬達中之一熱量積聚且提高該分子拖曳階段之效率。因此，該馬達定子之最內側及該轉子軸件之該外側一起建構一額外分子拖曳階段。藉此，藉由一分子拖曳程序來輸送該氣體介質之分子。A molecular drag stage according to the present invention includes a shell having an inlet and an outlet. A rotor shaft is rotatably supported in the housing. The molecular drag stage further includes an electric motor within the housing, wherein the motor is constructed by a motor stator surrounding the rotor shaft to rotate the rotor shaft. Thereby, a small gap is defined between the outer side of the rotor shaft and the inner side of the motor stator, so that the rotor shaft and the motor stator have no contact and the rotor shaft can rotate in the motor stator. Thereby, the outer side of the rotor shaft or the inner side of the motor stator includes a screw thread or a screw groove to convey a gaseous medium from the inlet to the outlet. Therefore, one of the outer side of the rotor shaft or the inner side of the motor stator includes a thread or a thread groove, and the opposite surface is smooth. Therefore, the motor itself in the molecular drag phase is adapted to effectively transport the gaseous medium toward the outlet. The motor itself can be used as an effective element for conveying the gaseous medium to prevent heat accumulation in one of the motors and improve the efficiency of the molecular drag phase. Therefore, the innermost side of the motor stator and the outer side of the rotor shaft together construct an additional molecular drag stage. In this way, molecules of the gaseous medium are transported by a molecular drag process.

較佳地，實施經建構為分子拖曳階段之至少一個進一步幫浦階段，其中該幫浦階段包括一轉子元件，該轉子元件連接至該轉子軸件以與一非旋轉幫浦定子元件相互作用，以將該氣態介質自該入口輸送至該出口。藉此，該轉子元件可經建構為由該幫浦定子元件圍繞或圍繞該幫浦定子元件之圓柱形元件。藉此，該轉子元件或該幫浦定子元件包括一螺紋或螺紋槽以建構一分子拖曳階段。為了該轉子元件之一無接觸旋轉，在該轉子元件與該幫浦定子之間界定一小間隙，以將一氣體介質自該入口朝向該出口輸送。Preferably, at least one further pumping stage constructed as a molecular drag stage is implemented, wherein the pumping stage includes a rotor element connected to the rotor shaft to interact with a non-rotating pump stator element, In order to transport the gaseous medium from the inlet to the outlet. Thereby, the rotor element can be constructed as a cylindrical element surrounded by the pump stator element or surrounding the pump stator element. Thereby, the rotor element or the pump stator element includes a thread or thread groove to construct a molecular drag stage. In order for one of the rotor elements to rotate without contact, a small gap is defined between the rotor element and the pump stator to transport a gaseous medium from the inlet to the outlet.

較佳地，實施至少兩個且較佳地四個進一步幫浦階段，其中更較佳地，相鄰幫浦階段共用一共同轉子元件且在相反方向上輸送該氣態介質。因此，該轉子元件之該外表面可屬於一第一幫浦階段，其中相同轉子元件之該內表面可屬於該相鄰幫浦階段，以達成該分子拖曳階段之一緊湊設計。Preferably, at least two and preferably four further pumping stages are implemented, wherein more preferably, adjacent pumping stages share a common rotor element and transport the gaseous medium in opposite directions. Therefore, the outer surface of the rotor element can belong to a first pumping stage, and the inner surface of the same rotor element can belong to the adjacent pumping stage to achieve a compact design of the molecular drag stage.

較佳地，該轉子軸件之該外側與該馬達定子之該內側之間的該間隙界定該氣態介質通過其進入該間隙之一入口及該氣態介質通過其離開該間隙之一出口，其中該入口與該最後幫浦階段之一出口流體連通且該間隙之該出口較佳與該出口直接流體連通。因此，在該分子拖曳階段中，該氣態介質首先流動至由各自轉子元件及幫浦定子元件建構之一或多個幫浦階段，且在此之後，該氣態介質通過由該電馬達形成之該間隙朝向該出口輸送。因此，由於該電馬達之有效間隙用於通過該出口輸送該氣態介質，因此可實施一偶數幫浦階段而無缺點。Preferably, the gap between the outer side of the rotor shaft and the inner side of the motor stator defines an inlet through which the gaseous medium enters the gap and an outlet through which the gaseous medium leaves the gap, wherein the The inlet is in fluid communication with an outlet of the last pumping stage and the outlet of the gap is preferably in direct fluid communication with the outlet. Therefore, in the molecular drag phase, the gaseous medium first flows to one or more pumping phases constructed by the respective rotor elements and pump stator elements, and after that, the gaseous medium passes through the electric motor formed by the The gap is conveyed toward the outlet. Therefore, since the effective gap of the electric motor is used to transport the gaseous medium through the outlet, an even number of pumping stages can be implemented without disadvantages.

較佳地，在該間隙之該入口處，一壓力低於30 mbar且更較佳地低於10-2 mbar。在該間隙之該出口處，較佳地，一壓力等於或低於該環境壓力。更較佳地，該出口處之該壓力介於100 mbar與0.02 mbar之間。Preferably, at the entrance of the gap, a pressure is lower than 30 mbar and more preferably lower than 10 -2 mbar. At the outlet of the gap, preferably, a pressure is equal to or lower than the ambient pressure. More preferably, the pressure at the outlet is between 100 mbar and 0.02 mbar.

較佳地，該氣態介質之該主流經引導通過該間隙。因此，該電馬達之該間隙不用作旁路或其類似者。Preferably, the main flow of the gaseous medium is guided through the gap. Therefore, the gap of the electric motor is not used as a bypass or the like.

較佳地，沒有吹掃氣體通過該間隙輸送。Preferably, no purge gas is delivered through the gap.

較佳地，該最後幫浦階段之該出口僅經由該間隙而與出口連接。因此，離開該最後幫浦階段之氣體僅可在流動通過該電馬達之該有效間隙時才到達該出口。Preferably, the outlet of the last pumping stage is connected with the outlet only through the gap. Therefore, the gas leaving the last pumping stage can only reach the outlet when flowing through the effective gap of the electric motor.

較佳地，該等幫浦階段經建構為Holweck階段。Preferably, the pump stages are constructed as Holweck stages.

較佳地，該馬達定子經建構為包括複數個片狀元件之一疊層定子鐵心。藉此，該複數個片狀元件經配置於該馬達定子內，或換言之，該馬達定子圍繞連接至該轉子軸件之該複數個片狀元件。特定言之，該馬達定子之該等片狀元件由鋼製成。Preferably, the motor stator is constructed as a laminated stator core including a plurality of chip elements. Thereby, the plurality of chip elements are arranged in the motor stator, or in other words, the motor stator surrounds the plurality of chip elements connected to the rotor shaft. In particular, the chip elements of the motor stator are made of steel.

較佳地，該馬達定子之直接相鄰片狀元件在其等內側處彼此在至少一個結構特徵(諸如自一個片狀元件移位至下一個片狀元件之一突起或凹痕)上不同，其中沿該間隙之長度，該螺紋或螺紋槽由該等個別移位結構特徵之總和形成。因此，藉由直接相鄰片狀元件之該結構特徵之角移位，依一逐步方式建構該間隙之該螺紋或螺紋槽。藉此，容易製造該電馬達之有效間隙。由於該電馬達之該馬達定子通常依任何方式包括片狀元件，因此此等片狀元件可用於建構該螺紋或螺紋槽，以形成該電馬達之該有效間隙。Preferably, the directly adjacent chip elements of the motor stator differ from each other in at least one structural feature (such as a protrusion or indentation from one chip element shifted from one chip element to the next one) at their inner sides, Wherein along the length of the gap, the thread or thread groove is formed by the sum of the individual displacement features. Therefore, the thread or thread groove of the gap is constructed in a stepwise manner by the angular displacement of the structural feature of the directly adjacent sheet-like element. Thereby, it is easy to manufacture the effective gap of the electric motor. Since the motor stator of the electric motor usually includes chip elements in any manner, these chip elements can be used to construct the thread or thread groove to form the effective gap of the electric motor.

進一步言之，本發明係關於一種包括如上文所描述之一分子拖曳階段的真空幫浦。較佳地，該分子幫浦係包括一渦輪分子幫浦階段之一渦輪分子幫浦。該渦輪分子幫浦階段包括連接至該轉子軸件之脈管，該等脈管與定子脈管相互作用，以將一氣體介質自該入口朝向該出口輸送。藉此，較佳地，根據該真空幫浦內之該氣態介質之大體流動而將該渦輪分子幫浦階段配置在該分子拖曳階段之上游。較佳地，該真空幫浦能夠產生10-2 mbar至10-12 mbar之一真空。Furthermore, the present invention relates to a vacuum pump including a molecular drag stage as described above. Preferably, the molecular pump system includes a turbomolecular pump in a turbomolecular pump stage. The turbomolecular pumping stage includes pulse tubes connected to the rotor shaft, and the pulse tubes interact with the stator pulse tubes to transport a gaseous medium from the inlet to the outlet. Thereby, preferably, the turbo molecular pumping stage is arranged upstream of the molecular dragging stage according to the general flow of the gaseous medium in the vacuum pump. Preferably, the vacuum pump can generate a vacuum ranging from 10 -2 mbar to 10 -12 mbar.

圖1之真空幫浦10經建構為包括一渦輪分子幫浦階段12及一分子拖曳階段14之渦輪分子真空幫浦。真空幫浦10包括一外殼16，其中在外殼16中，一轉子軸件18由(例如)滾珠軸承20可旋轉地支撐。轉子軸件18由一電馬達22旋轉。The vacuum pump 10 of FIG. 1 is constructed as a turbomolecular vacuum pump including a turbomolecular pump stage 12 and a molecular drag stage 14. The vacuum pump 10 includes a housing 16 in which a rotor shaft 18 is rotatably supported by, for example, a ball bearing 20. The rotor shaft 18 is rotated by an electric motor 22.

在渦輪分子幫浦階段12中，轉子軸件18與經建構為脈管24之轉子元件連接、與定子脈管26相互作用，以使一氣態介質自一入口28輸送朝向一出口30。氣態介質經輸送通過渦輪分子幫浦階段12且進入分子拖曳階段14。在分子拖曳階段14中，使用一第一圓柱體34及一第二圓柱體36連接轉子軸件18至一轉子元件32。進一步言之，實施一螺紋第一定子38，其中第一定子38之螺紋面向第一圓柱體34之外表面，使得氣態介質自分子拖曳階段14之一入口42通過第一幫浦階段40幫浦至一第一轉向點44。第一圓柱體34之內表面面向一第二螺紋幫浦定子46，形成一第二幫浦階段48，將氣態介質自第一轉向點44幫浦至一第二轉向點50。自第二轉向點50，氣態介質經幫浦通過一第三幫浦階段52及一第四幫浦階段54，其等與第一幫浦階段40或第二幫浦階段48相同或相似建構。因此，氣體到達位於真空幫浦10內之一最後轉向點56。In the turbomolecular pumping stage 12, the rotor shaft 18 is connected to the rotor element constructed as a vessel 24 and interacts with the stator vessel 26 so that a gaseous medium is transported from an inlet 28 to an outlet 30. The gaseous medium is transported through the turbo molecular pump stage 12 and enters the molecular drag stage 14. In the molecular drag phase 14, a first cylinder 34 and a second cylinder 36 are used to connect the rotor shaft 18 to a rotor element 32. Furthermore, a threaded first stator 38 is implemented, wherein the thread of the first stator 38 faces the outer surface of the first cylinder 34, so that the gaseous medium passes through the first pump stage 40 from one of the inlets 42 of the molecular drag stage 14 The pump reaches a first turning point 44. The inner surface of the first cylinder 34 faces a second threaded pump stator 46 to form a second pumping stage 48 that pumps the gaseous medium from the first turning point 44 to a second turning point 50. From the second turning point 50, the gaseous medium passes through a third pump stage 52 and a fourth pump stage 54 via the pump, which have the same or similar construction as the first pump stage 40 or the second pump stage 48. Therefore, the gas reaches one of the final turning points 56 located in the vacuum pump 10.

電馬達22包括一馬達定子58，其中在馬達定子58與轉子軸件18之外表面62之間界定一間隙60。藉此，馬達定子58之內表面64包括一螺紋66，藉此使氣態介質自形成間隙60之入口之最後轉向點56有效幫浦朝向出口30。因此，通過入口42進入分子拖曳階段14之氣態介質僅可通過間隙60到達出口30。藉此，由螺紋66將氣態介質有效幫浦於間隙60中，以提高分子拖曳階段14之效率，且避免摩擦損失以及電馬達22內之發熱。替代地，轉子軸件18之外表面62可包括一螺紋或螺紋槽。在此情況下，馬達定子58之內表面64可經建構為平坦表面。The electric motor 22 includes a motor stator 58 in which a gap 60 is defined between the motor stator 58 and the outer surface 62 of the rotor shaft 18. Thereby, the inner surface 64 of the motor stator 58 includes a thread 66, thereby effectively pumping the gaseous medium from the last turning point 56 of the entrance forming the gap 60 toward the exit 30. Therefore, the gaseous medium entering the molecular drag stage 14 through the inlet 42 can only reach the outlet 30 through the gap 60. Thereby, the gaseous medium is effectively pumped in the gap 60 by the thread 66 to improve the efficiency of the molecular drag stage 14 and avoid friction loss and heat generation in the electric motor 22. Alternatively, the outer surface 62 of the rotor shaft 18 may include a thread or a thread groove. In this case, the inner surface 64 of the motor stator 58 may be constructed as a flat surface.

馬達定子58由較佳由鋼製成之複數個片狀元件68建構。藉此，片狀元件68可包括一結構特徵70，其可經建構為突起或凹痕。圖2展示作為突起之結構特徵70。藉此，結構特徵70自一個片狀元件68移位至下一者或相鄰者一較小角度量，藉此由結構特徵70依一逐步方式形成螺紋66。當然，一個片狀元件68可包括多於一個的結構特徵70。因此，電馬達22之活動間隙60中之螺紋或螺紋槽易於製造，使得可降低電馬達22之馬達定子58之製造成本。The motor stator 58 is constructed of a plurality of chip elements 68 preferably made of steel. Thereby, the sheet element 68 may include a structural feature 70, which may be constructed as a protrusion or indentation. Figure 2 shows the structural feature 70 as a protrusion. Thereby, the structural feature 70 is displaced from one sheet element 68 to the next or adjacent one by a smaller angle, thereby forming the thread 66 from the structural feature 70 in a stepwise manner. Of course, one sheet element 68 may include more than one structural feature 70. Therefore, the thread or the thread groove in the movable gap 60 of the electric motor 22 is easy to manufacture, so that the manufacturing cost of the motor stator 58 of the electric motor 22 can be reduced.

10:真空幫浦 12:渦輪分子幫浦階段 14:分子拖曳階段 16:外殼 18:轉子軸件 20:滾珠軸承 22:電馬達 24:脈管 26:定子脈管 28:入口 30:出口 32:轉子元件 34:第一圓柱體 36:第二圓柱體 38:第一定子 40:第一幫浦階段 42:入口 44:第一轉向點 46:第二螺紋幫浦定子 48:第二幫浦階段 50:第二轉向點 52:第三幫浦階段 54:第四幫浦階段 56:最後轉向點 58:馬達定子 60:間隙 62:外表面 64:內表面 66:螺紋 68:片狀元件 70:結構特徵10: Vacuum pump 12: Turbomolecular pumping stage 14: molecular drag phase 16: shell 18: Rotor shaft 20: Ball bearing 22: electric motor 24: Vessel 26: stator vessel 28: entrance 30: Exit 32: Rotor element 34: The first cylinder 36: second cylinder 38: first stator 40: The first pump stage 42: entrance 44: The first turning point 46: The second thread pump stator 48: The second pump stage 50: second turning point 52: The third pump stage 54: The fourth pump stage 56: Last turning point 58: Motor stator 60: Clearance 62: outer surface 64: inner surface 66: Thread 68: chip components 70: Structural Features

在下文中，參考附圖關於一特定實施例描述本發明。In the following, the present invention will be described in relation to a specific embodiment with reference to the drawings.

圖1展示根據本發明之一真空幫浦之一示意圖，及Figure 1 shows a schematic diagram of a vacuum pump according to the present invention, and

圖2展示根據本發明之馬達定子之一詳細視圖。Figure 2 shows a detailed view of the motor stator according to the present invention.

10:真空幫浦 10: Vacuum pump

12:渦輪分子幫浦階段 12: Turbomolecular pumping stage

14:分子拖曳階段 14: molecular drag phase

16:外殼 16: shell

18:轉子軸件 18: Rotor shaft

20:滾珠軸承 20: Ball bearing

22:電馬達 22: electric motor

24:脈管 24: Vessel

26:定子脈管 26: stator vessel

28:入口 28: entrance

30:出口 30: Exit

32:轉子元件 32: Rotor element

34:第一圓柱體 34: The first cylinder

36:第二圓柱體 36: second cylinder

38:第一定子 38: first stator

40:第一幫浦階段 40: The first pump stage

42:入口 42: entrance

44:第一轉向點 44: The first turning point

46:第二螺紋幫浦定子 46: The second thread pump stator

48:第二幫浦階段 48: The second pump stage

50:第二轉向點 50: second turning point

52:第三幫浦階段 52: The third pump stage

54:第四幫浦階段 54: The fourth pump stage

56:最後轉向點 56: Last turning point

58:馬達定子 58: Motor stator

60:間隙 60: Clearance

62:外表面 62: outer surface

64:內表面 64: inner surface

66:螺紋 66: Thread

Claims (11)

一種較佳用於一渦輪分子幫浦(10)之分子拖曳階段(14)，其具有： 一外殼(16)，其包括一入口(28)及一出口(30)， 一轉子軸件(18)，其可旋轉地支撐於該外殼(16)內， 一電馬達(22)，其中該馬達(22)由圍繞該轉子軸件(18)之一馬達定子(58)建構以使該轉子軸件(18)旋轉， 其中在該轉子軸件(18)之該外側(62)與該馬達定子(58)之該內側(64)之間界定一小間隙(60)， 其中該轉子軸件(18)之該外側(62)或該馬達定子(58)之該內側(64)包括一螺紋(66)或一螺紋槽，以將一氣態介質自該入口(28)輸送至該出口(30)。A molecular drag stage (14) preferably used in a turbomolecular pump (10), which has: A housing (16), which includes an inlet (28) and an outlet (30), A rotor shaft (18), which is rotatably supported in the housing (16), An electric motor (22), wherein the motor (22) is constructed by a motor stator (58) surrounding the rotor shaft (18) to rotate the rotor shaft (18), A small gap (60) is defined between the outer side (62) of the rotor shaft (18) and the inner side (64) of the motor stator (58), Wherein the outer side (62) of the rotor shaft (18) or the inner side (64) of the motor stator (58) includes a thread (66) or a thread groove to convey a gaseous medium from the inlet (28) To this exit (30). 如請求項1之分子拖曳階段，其具有至少一個進一步幫浦階段(40)，其中該幫浦階段(40)包括一轉子元件(34)，該轉子元件(34)連接至該轉子軸件(18)以與一非旋轉幫浦定子元件(38)相互作用以將該氣態介質自該入口(28)輸送至該出口(30)。For example, the molecular drag stage of claim 1, which has at least one further pumping stage (40), wherein the pumping stage (40) includes a rotor element (34), the rotor element (34) is connected to the rotor shaft ( 18) to interact with a non-rotating pump stator element (38) to transport the gaseous medium from the inlet (28) to the outlet (30). 如請求項2之分子拖曳階段，其具有至少兩個且較佳四個進一步幫浦階段(40、48、52、54)，其中更較佳地，相鄰幫浦階段共用一共同轉子元件(34、36)且在相反方向上輸送該氣態介質。For example, the molecular drag stage of claim 2, which has at least two and preferably four further pump stages (40, 48, 52, 54), wherein more preferably, adjacent pump stages share a common rotor element ( 34, 36) and convey the gaseous medium in the opposite direction. 如請求項2或3之分子拖曳階段，其中該間隙(60)界定該氣態介質通過其進入該間隙(60)之一入口及該氣態介質通過其離開該間隙(60)之一出口，其中該入口與該最後幫浦階段(54)之一出口(56)流體連通且該出口較佳與該出口(30)直接流體連通。Such as the molecular drag phase of claim 2 or 3, wherein the gap (60) defines an inlet through which the gaseous medium enters the gap (60) and an outlet through which the gaseous medium leaves the gap (60), wherein the The inlet is in fluid communication with an outlet (56) of the last pumping stage (54) and the outlet is preferably in direct fluid communication with the outlet (30). 如請求項1至3中任一項之分子拖曳階段，其中該氣態介質之該主流經引導通過該間隙(60)。Such as the molecular drag phase of any one of claims 1 to 3, wherein the main flow of the gaseous medium is guided through the gap (60). 如請求項1至3中任一項之分子拖曳階段，其中沒有吹掃氣體經輸送通過該間隙(60)。Such as the molecular drag phase of any one of claims 1 to 3, wherein no purge gas is transported through the gap (60). 如請求項2或3之分子拖曳階段，其中該最後幫浦階段(54)之該出口(56)僅經由該間隙(60)而與該出口(30)連接。Such as the molecular drag phase of claim 2 or 3, wherein the outlet (56) of the last pump phase (54) is connected with the outlet (30) only through the gap (60). 如請求項2或3之分子拖曳階段，其中該等幫浦階段(40、48、52、54)經建構為Holweck階段。Such as the molecular drag phase of claim 2 or 3, wherein the pump phases (40, 48, 52, 54) are constructed as Holweck phases. 如請求項1至3中任一項之分子拖曳階段，其中該馬達定子(58)經建構為包括複數個片狀元件(68)之疊層定子鐵心，其中該等片狀元件(68)較佳由鋼製成。Such as the molecular drag phase of any one of claims 1 to 3, wherein the motor stator (58) is constructed as a laminated stator core including a plurality of sheet elements (68), wherein the sheet elements (68) are more Jia is made of steel. 如請求項9之分子拖曳階段，其中直接相鄰片狀元件(68)在其等內側處彼此不同，使得至少一個特徵(70)自一個片狀元件(68)移位至下一個片狀元件，其中沿該間隙(60)之長度，該螺紋(66)由該等個別移位特徵(70)之總和形成。Such as the molecular drag phase of claim 9, in which the directly adjacent sheet-like elements (68) are different from each other at their inner sides, so that at least one feature (70) is shifted from one sheet-like element (68) to the next sheet-like element , Wherein along the length of the gap (60), the thread (66) is formed by the sum of the individual displacement features (70). 一種真空幫浦(10)，特定言之一渦輪分子真空幫浦，其包括如請求項1至10中任一項之一分子拖曳階段(14)。A vacuum pump (10), specifically a turbomolecular vacuum pump, includes a molecular drag stage (14) as in any one of claims 1 to 10.
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