TW202014540A - Hard coating and member coated with hard coating - Google Patents

Hard coating and member coated with hard coating Download PDF

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TW202014540A
TW202014540A TW108126772A TW108126772A TW202014540A TW 202014540 A TW202014540 A TW 202014540A TW 108126772 A TW108126772 A TW 108126772A TW 108126772 A TW108126772 A TW 108126772A TW 202014540 A TW202014540 A TW 202014540A
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layer
composition
film
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hard
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TWI720563B (en
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王媺
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日商Ｏｓｇ股份有限公司
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148—Composition of the cutting inserts
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/44—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23C2228/08—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner applied by physical vapour deposition [PVD]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23C2228/10—Coating

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Drilling Tools (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

In the present invention, two types of nanolayer alternating layers 38, 40, in which an A-layer 32 as a single-composition layer of one of an A-composition (AlCrSi [alpha] nitride), a B-composition (AlTiSi [beta] nitride), and a C-composition (AlCr(SiC) [gamma] nitride), and two of an A-composition, a B-composition, and a C-composition nanolayer layer (nanolayer A layer 32n, nanolayer B-layer 34n, nanolayer C-layer 36n) are alternately layered, are alternately layered in a predetermined film thickness, whereby such characteristics as excellent durability even in cutting of a titanium alloy, for example, are obtained, and excellent wear resistance, toughness, lubricity, and welding resistance are obtained. Cracking or separation of the hard coating is thereby suppressed by high toughness in cutting of titanium alloy, as well as carbon steel, stainless steel, cast iron, and alloy steel, for example, and various other materials to be cut, or in high-speed machining, dry machining, and other harsh machining conditions, and an increase in service life of a tool can be realized.

Description

硬質被膜及硬質被膜被覆構件Hard coating and hard coating member

本發明係有關於硬質被膜及硬質被膜被覆構件，特別是有關於具優異耐磨耗性、耐熔接性之硬質被膜。The present invention relates to a hard film and a hard film-coated member, and particularly to a hard film having excellent wear resistance and fusion resistance.

端銑刀、銑具、鑽頭、刨刀、斷屑器等切削工具、成形螺絲攻、軋製工具等非切削工具等之各種加工工具、或要求耐磨耗性之摩擦零件等各種構件，係進行了於超硬合金或高速鋼等母材表面塗布硬質被膜。例如，專利文獻1中已提出有一種AlCrN系/AlTiSiN系多層結構之硬質被膜，專利文獻2中已提出有一種AlCrN系/CrN系多層結構之硬質被膜，專利文獻3中已提出有一種AlCr系/TiSi系多層結構之硬質被膜。該等硬質被膜一般具有優異之耐磨耗性、耐熔接性。 先前技術文獻 專利文獻Various processing tools such as end mills, milling tools, drills, planers, chip breakers and other cutting tools, forming screw taps, rolling tools and other non-cutting tools, or friction parts that require wear resistance are carried out It is used to apply hard coating on the surface of base metal such as super hard alloy or high speed steel. For example, Patent Document 1 has proposed an AlCrN-based/AlTiSiN-based multi-layered hard film, Patent Document 2 has proposed an AlCrN-based/CrN-based multi-layer hard film, and Patent Document 3 has proposed an AlCr-based /TiSi is a hard film with a multilayer structure. Such hard coatings generally have excellent wear resistance and fusion resistance. Prior technical literature Patent Literature

專利文獻1：日本專利特開2012-35378號公報 專利文獻2：日本專利特開2014-79834號公報 專利文獻3：日本專利特表2008-534297號公報Patent Literature 1: Japanese Patent Laid-Open No. 2012-35378 Patent Document 2: Japanese Patent Laid-Open No. 2014-79834 Patent Document 3: Japanese Patent Special Publication No. 2008-534297

發明概要 發明欲解決之課題 然而，如此之硬質被膜中，仍有因被削材之種類或切削速度等加工條件、使用條件等而未必能獲得充分滿足之性能的情況，尚有改良的餘地。例如，已施行習知硬質被膜之切削工具若使用於鈦合金之切削加工中，因鈦合金之黏滯性較高，故有硬質被膜提早剝落或破裂而未能得到充分之工具壽命的情形。Summary of the invention Problems to be solved by invention However, in such a hard coating, there are still cases where sufficient performance may not be obtained due to processing conditions, usage conditions, etc. of the type of material to be cut, cutting speed, etc., and there is room for improvement. For example, if a conventional hard film cutting tool is used in the machining of a titanium alloy, the titanium alloy has a high viscosity, so the hard film may be peeled off or cracked early to obtain a sufficient tool life.

本發明係以以上情事為背景而做成，目的在於提供在對鈦合金之切削加工中仍可得預定之工具壽命等具優異耐磨耗性、耐熔接性之新穎構成的硬質被膜及硬質被膜被覆構件。The present invention is made against the background of the above circumstances, and its purpose is to provide a novel hard film and hard film with excellent wear resistance and fusion resistance that can obtain a predetermined tool life even when cutting a titanium alloy. Covered member.

用以解決課題之手段 本發明人等以以上情事為背景反覆進行各種實驗、研究後，發現藉由使用由AlCrSiα之氮化物[惟，α為任意添加成分，係選自B、C、Ti、V、Y、Zr、Nb、Mo、Hf、Ta、及W之1種以上元素]所構成的A組成、由AlTiSiβ之氮化物[惟，β為任意添加成分，係選自B、C、Cr、V、Y、Zr、Nb、Mo、Hf、Ta、及W之1種以上元素]所構成的B組成、及由AlCr(SiC)γ之氮化物[惟，γ為任意添加成分，係選自B、Ti、V、Y、Zr、Nb、Mo、Hf、Ta、及W之1種以上元素]所構成的C組成，並將該等以預定膜厚積層，可得具高韌性之耐久性優異的硬質被膜。本發明即基於如此見解而做成。Means to solve the problem After carrying out various experiments and studies repeatedly in the background of the above, the present inventors found that by using a nitride made of AlCrSiα [however, α is an optional additive component selected from B, C, Ti, V, Y, Zr, A composed of Nb, Mo, Hf, Ta, and one or more elements of A], composed of nitride of AlTiSiβ [however, β is an optional additive component and is selected from B, C, Cr, V, Y, Zr , Nb, Mo, Hf, Ta, and one or more elements of B], and a nitride of AlCr (SiC) γ [however, γ is an optional additive component and is selected from B, Ti, V , Y, Zr, Nb, Mo, Hf, Ta, and W are one or more elements], and by stacking these at a predetermined film thickness, a hard coating with high toughness and excellent durability can be obtained. The present invention is based on such knowledge.

第1發明係一種以被覆母材表面之方式附著於母材表面之硬質被膜，其特徵在於：(a)前述硬質被膜係(a-1)單一組成層與(a-2)2種奈米薄膜交互層之(a-3)共3種層交互積層而構成為總膜厚於0.5~20μm範圍內者；前述(a-1)單一組成層係由A組成、B組成、及C組成中之任1個組成所構成；前述(a-2)2種奈米薄膜交互層係以前述A組成及前述B組成、前述A組成及前述C組成、前述B組成及前述C組成之3種組合中任2種組合使各組成的奈米薄膜層交互積層而成；(b)前述A組成係組成式為Ala Crb Sic αd 之氮化物[惟，a、b、c、d各自以原子比計為0.30≦a≦0.85、0.10≦b≦0.65、0.01≦c≦0.45、0≦d≦0.10，且a+b+c+d=1；任意添加成分α係選自B、C、Ti、V、Y、Zr、Nb、Mo、Hf、Ta、及W之1種以上元素]；(c)前述B組成係組成式為Ale Tif Sig βh 之氮化物[惟，e、f、g、h各自以原子比計為0.01≦e≦0.85、0.05≦f≦0.90、0.05≦g≦0.45、0≦h≦0.10，且e+f+g+h=1；任意添加成分β係選自B、C、Cr、V、Y、Zr、Nb、Mo、Hf、Ta、及W之1種以上元素]；(d)前述C組成係組成式為Ali Crj (SiC)k γl 之氮化物[惟，i、j、k、l各自以原子比計為0.20≦i≦0.85、0.10≦j≦0.50、0.03≦k≦0.45、0≦l≦0.10，且i+j+k+l=1；任意添加成分γ係選自B、Ti、V、Y、Zr、Nb、Mo、Hf、Ta、及W之1種以上元素]；(e)前述單一組成層之膜厚於0.5~1000nm範圍內；(f)構成前述2種奈米薄膜交互層之前述奈米薄膜層的各膜厚均於0.5~500nm範圍內，且前述2種奈米薄膜交互層之各膜厚均於1~1000nm範圍內。The first invention is a hard coating that adheres to the surface of the base material by covering the surface of the base material, and is characterized in that: (a) the aforementioned hard coating system (a-1) a single composition layer and (a-2) two kinds of nanometers The thin film alternating layer (a-3) consists of three layers alternately laminated to form a total film thickness in the range of 0.5~20μm; the aforementioned (a-1) single composition layer is composed of A, B, and C Any one composition; the (a-2) two kinds of nano-film alternating layers are the three combinations of the A composition and the B composition, the A composition and the C composition, the B composition and the C composition Any of the two combinations can be formed by alternately stacking nano-film layers of each composition; (b) The composition of the aforementioned A system is a nitride of Al a Cr b Si c α d [however, each of a, b, c, and d Atomic ratio is 0.30≦a≦0.85, 0.10≦b≦0.65, 0.01≦c≦0.45, 0≦d≦0.10, and a+b+c+d=1; any added component α is selected from B, C , Ti, V, Y, Zr, Nb, Mo, Hf, Ta, and W at least one element]; (c) the aforementioned B composition system is a nitride of Al e Ti f Si g β h e, f, g, h are 0.01≦e≦0.85, 0.05≦f≦0.90, 0.05≦g≦0.45, 0≦h≦0.10 in atomic ratio, and e+f+g+h=1; any addition The component β is one or more elements selected from the group consisting of B, C, Cr, V, Y, Zr, Nb, Mo, Hf, Ta, and W]; (d) The composition formula of the aforementioned C composition system is Al i Cr j (SiC ) k γ l nitride [however, i, j, k, l are each in atomic ratio of 0.20≦i≦0.85, 0.10≦j≦0.50, 0.03≦k≦0.45, 0≦l≦0.10, and i+ j+k+l=1; any additional component γ is one or more elements selected from B, Ti, V, Y, Zr, Nb, Mo, Hf, Ta, and W]; (e) the aforementioned single component layer The film thickness is in the range of 0.5-1000nm; (f) The thickness of each of the nano-film layers constituting the aforementioned two types of nano-film interlayers is within the range of 0.5-500nm, and each of the aforementioned two types of nano-film inter-layers The film thickness is in the range of 1~1000nm.

再者，前述C組成之(SiC)意味以稱作碳化矽之化合物形態存在。又，要整體正確地控制各層之膜厚實為不易，故本說明書中之膜厚係平均值，只要平均膜厚滿足前述數值範圍即可，有部分超出數值範圍之區域亦可。In addition, the aforementioned C composition (SiC) means that it exists in the form of a compound called silicon carbide. In addition, it is difficult to accurately control the film thickness of each layer as a whole. Therefore, the film thickness in this specification is an average value, as long as the average film thickness satisfies the aforementioned numerical value range, and some regions may be outside the numerical value range.

第2發明係基於第1發明之硬質被膜，其中前述單一組成層之膜厚T1與前述2種奈米薄膜交互層之各膜厚T2、T3的比T1/T2、T1/T3均於0.2~10範圍內。The second invention is a hard film based on the first invention, wherein the ratio T1/T2, T1/T3 of the film thickness T1 of the single component layer and the film thickness T2, T3 of the two types of nanometer thin film interactive layers are all within 0.2~ 10 range.

第3發明係基於第1發明或第2發明之硬質被膜，其中交互積層的前述單一組成層及前述2種奈米薄膜交互層之最下部的層直接設於前述母材表面。The third invention is a hard film based on the first invention or the second invention, wherein the single component layer of the alternating layer and the lowermost layer of the alternating layer of the two types of nanometer thin films are directly provided on the surface of the base material.

第4發明係基於第1發明或第2發明之硬質被膜，其中，(a)前述硬質被膜與前述母材之邊界具有界面層；(b)前述界面層由以下共3種層中之任1層構成：(b-1)單一組成層，其由前述A組成、前述B組成、及前述C組成中之任1個組成所構成；(b-2)奈米薄膜交互層，其係使由前述A組成、前述B組成、及前述C組成中之任2個組成所構成且個別膜厚於0.5~500nm範圍內之2種奈米薄膜層交互積層而成；及(b-3)金屬之氮化物、碳氮化物、或碳化物的層，其由B、Al、Ti、Y、Zr、Hf、V、Nb、Ta、Cr、及W中之1種以上元素所構成；並且，(c)前述界面層之膜厚於5~1000nm範圍內。The fourth invention is a hard film based on the first invention or the second invention, wherein (a) the boundary between the hard film and the base material has an interface layer; (b) the interface layer is composed of any of the following three types of layers 1 Layer composition: (b-1) A single composition layer, which is composed of any one of the aforementioned composition A, the aforementioned B composition, and the aforementioned C composition; (b-2) Nano-film interactive layer, which consists of Two kinds of nano-thin film layers composed of any one of the foregoing composition A, the foregoing B composition, and the foregoing C composition, each with an individual film thickness in the range of 0.5 to 500 nm; and (b-3) metal A layer of nitride, carbonitride, or carbide, which is composed of one or more elements of B, Al, Ti, Y, Zr, Hf, V, Nb, Ta, Cr, and W; and, (c ) The film thickness of the aforementioned interface layer is in the range of 5 to 1000 nm.

第5發明係基於第1發明至第4發明中之任一硬質被膜，(a)前述硬質被膜之最表面具有表面層；(b)前述表面層由單一組成層或奈米薄膜交互層構成，前述單一組成層係由前述A組成、前述B組成、及前述C組成中之任1個組成所構成，前述奈米薄膜交互層係使由前述A組成、前述B組成、及前述C組成中之任2個組成所構成且個別膜厚於0.5~500nm範圍內之2種奈米薄膜層交互積層而成；並且，(c)前述表面層之膜厚於0.5~1000nm範圍內。The fifth invention is based on any one of the hard coatings of the first to fourth inventions, (a) the outermost surface of the hard coating has a surface layer; (b) the surface layer is composed of a single composition layer or a nano film interactive layer, The single composition layer is composed of any one of the composition A, the composition B, and the composition C, and the nano-film interactive layer is composed of the composition A, the composition B, and the composition C Two kinds of nano film layers composed of any two components and having individual film thicknesses in the range of 0.5 to 500 nm are alternately laminated; and (c) the film thickness of the surface layer is in the range of 0.5 to 1000 nm.

第6發明係基於第1發明至第5發明中之任一硬質被膜，其中被膜硬度(HV0.025)於2700~3300(HV)範圍內。 被膜硬度(HV0.025)為依據維克氏硬度試驗法(JIS G0202、Z2244)於硬度符號HV0.025所示條件下測定硬質被膜之HV值(維克氏硬度)所得到的值。The sixth invention is based on any one of the first to fifth inventions, wherein the hardness of the coating (HV0.025) is in the range of 2700 to 3300 (HV). The coating hardness (HV0.025) is a value obtained by measuring the HV value (Vickers hardness) of the hard coating under the conditions indicated by the hardness symbol HV0.025 according to the Vickers hardness test method (JIS G0202, Z2244).

第7發明係一種母材表面之一部分或全部被硬質被膜被覆的硬質被膜被覆構件，前述硬質被膜係第1發明至第6發明中之任一硬質被膜。The seventh invention is a hard film-coated member in which a part or all of the surface of the base material is covered with a hard film. The hard film is any one of the first to sixth inventions.

第8發明係基於第7發明之硬質被膜被覆構件，前述硬質被膜被覆構件係斷續切削工具，可使其繞著軸心旋轉，且刀刃會隨著旋轉而斷續地進行切削加工。An eighth invention is a hard film-coated member based on the seventh invention. The hard film-coated member is an intermittent cutting tool that can be rotated around an axis, and the cutting edge can be intermittently cut along with the rotation.

再者，前述各發明之數值範圍只要各自四捨五入後之值於數值範圍內即可。In addition, the numerical range of each of the aforementioned inventions may be as long as the rounded value is within the numerical range.

發明效果 如此之本發明硬質被膜中，由A組成所構成之單一組成層藉由Al與Cr之比率可得高硬度、抗氧化性、高韌性，由B組成所構成之單一組成層藉由Al與Ti之比率可得高韌性、耐熱性、抗氧化性。由C組成所構成之單一組成層因Si以SiC(碳化矽)之化合物的形態存在，故與氧之結合性低，且SiC為共價鍵，故為高硬度且於1000℃以上之溫度下機械強度也少有下降，並且耐熱性、耐磨耗性、抗氧化性優異。奈米薄膜交互層隨著各奈米薄膜層之組成可得上述特性，且膜厚較單一組成層薄、結晶粒子更小，故為高硬度且耐磨耗性提升，同時因多層結構而使得韌性提高。又，A組成~C組成中任意添加之成分α、β、γ藉由以10at%(原子%)以下之比率添加，可使被膜之結晶粒子微細化，並可利用添加量來控制被膜之粒徑，而可調整各被膜之硬度及抗氧化性、韌性、潤滑性等。並且，藉由具有如此特性之任意1種單一組成層及2種奈米薄膜交互層分別以預定膜厚交互積層，可得耐磨耗性、潤滑性、耐熔接性、及韌性優異之硬質被膜。藉此，例如於切削工具的情況下，對碳鋼或不鏽鋼、鑄鐵、合金鋼、鈦合金等各種被削材進行切削加工時，或於高速加工、乾式加工等嚴苛之加工條件下，藉由高韌性可抑制硬質被膜之破裂或剝離，從而可實現工具之長壽化。Invention effect In such a hard coating of the present invention, the single composition layer composed of A can have high hardness, oxidation resistance and high toughness by the ratio of Al to Cr, and the single composition layer composed of B can be composed of Al and Ti The ratio can get high toughness, heat resistance, oxidation resistance. The single composition layer composed of C consists of Si in the form of SiC (Silicon Carbide) compound, so the bonding with oxygen is low, and SiC is a covalent bond, so it is of high hardness and at a temperature above 1000°C Mechanical strength also rarely decreases, and it is excellent in heat resistance, wear resistance, and oxidation resistance. The nano-film interaction layer can obtain the above-mentioned characteristics with the composition of each nano-film layer, and the film thickness is thinner than the single-component layer and the crystal particles are smaller, so it is high in hardness and wear resistance is improved, and at the same time due to the multilayer structure Increased toughness. In addition, the components α, β, and γ, which are arbitrarily added in the composition A to the composition C, can be added to the film at a ratio of 10 at% (atomic %) or less, so that the crystal particles of the coating can be made finer, and the amount of the coating can be used to control the particle size of the coating Diameter, and the hardness, oxidation resistance, toughness, lubricity, etc. of each coating can be adjusted. In addition, by randomly laminating any one type of single-component layer and two types of nano-film interlayers having such characteristics at predetermined film thicknesses, a hard coating excellent in wear resistance, lubricity, fusion resistance, and toughness can be obtained . In this way, for example, in the case of cutting tools, when cutting various materials to be cut such as carbon steel, stainless steel, cast iron, alloy steel, and titanium alloy, or under severe processing conditions such as high-speed machining and dry machining, etc. The high toughness can suppress the cracking or peeling of the hard coating, which can realize the longevity of the tool.

第2發明中，因單一組成層之膜厚T1與2種奈米薄膜交互層之各膜厚T2、T3的比T1/T2、T1/T3均於0.2~10範圍內，故1種單一組成層及2種奈米薄膜交互層分別以具有預定特性之適當膜厚設置，可適當地得到耐磨耗性、耐熔接性等性能。In the second invention, the ratio T1/T2 and T1/T3 of the film thickness T1 of the single-composition layer and the film thickness T2 and T3 of the two types of nanometer thin film interaction layers are in the range of 0.2 to 10, so one single composition The layers and the two types of nano-film interaction layers are respectively set with appropriate film thicknesses having predetermined characteristics, and properties such as wear resistance and fusion resistance can be appropriately obtained.

第3發明為交互積層的1種單一組成層及2種奈米薄膜交互層共3種層之最下部的層直接設於母材表面的情況，相較於在與母材之邊界設置界面層等的情況，更為減少成膜成本。The third invention is the case where the lowermost layer of a total of 3 layers of 1 single component layer and 2 nanometer thin film alternating layers of the alternating layer is directly provided on the surface of the base material, as compared with providing an interface layer at the boundary with the base material In other cases, the cost of film formation is further reduced.

第4發明為於與母材之邊界設有預定組成、膜厚之界面層的情況，可提高硬質被膜對母材之附著強度。The fourth invention is the case where an interface layer with a predetermined composition and film thickness is provided at the boundary with the base material, and the adhesion strength of the hard coating to the base material can be improved.

第5發明為於硬質被膜之最表面設有預定組成、膜厚之表面層的情況，藉由適當地設定該表面層之組成及膜厚，可更加提升耐磨耗性及耐熔接性等預定之被膜性能。The fifth invention is a case where a surface layer with a predetermined composition and a film thickness is provided on the outermost surface of the hard coating. By appropriately setting the composition and film thickness of the surface layer, the abrasion resistance and fusion resistance can be further improved. The coating performance.

第6發明中，因硬質被膜之被膜硬度(HV0.025)於2700~3300(HV)範圍內，故可均衡地得到耐磨耗性及高韌性，並可抑制破裂及剝離而獲得優異之耐久性。In the sixth invention, since the coating hardness (HV0.025) of the hard coating is in the range of 2700 to 3300 (HV), wear resistance and high toughness can be obtained in balance, and cracks and peeling can be suppressed to obtain excellent durability. Sex.

第7發明係有關於一種硬質被膜被覆構件，藉由設置第1發明至第6發明之硬質被膜，可得到實質上與該等發明相同之作用效果。The seventh invention relates to a hard coating member. By providing the hard coatings of the first to sixth inventions, substantially the same effects as those of the inventions can be obtained.

第8發明係硬質被膜被覆構件為端銑刀或銑具等斷續切削工具的情況，因刀刃斷續地進行切削加工，在經受重複衝撃負載的同時會容易發熱。因此，適合使用獲得高耐磨耗性及韌性、潤滑性、耐熔接性之本發明硬質被膜。In the eighth invention, when the hard film-coated member is an intermittent cutting tool such as an end mill or a milling tool, the cutting edge is intermittently cut, and it is easy to generate heat while being subjected to repeated impact loads. Therefore, it is suitable to use the hard coating of the present invention that achieves high wear resistance, toughness, lubricity, and welding resistance.

用以實施發明之形態 本發明適合運用於端銑刀、銑具、螺絲攻、鑽頭等旋轉切削工具以及刨刀等非旋轉式之切削工具、或成形螺絲攻、軋製工具、壓模等非切削工具等各種加工工具表面所設之硬質被膜，亦可運用於軸承構件或半導體裝置等之表面保護膜等要求耐磨耗性及潤滑性、抗氧化性等之加工工具以外的構件表面所設之硬質被膜。亦適用於裝設在各種加工工具上使用之刀刃斷屑器等。硬質被膜被覆工具之工具母材適合使用超硬合金或高速鋼、金屬陶瓷、陶瓷、多結晶鑽石(PCD)、單結晶鑽石、多結晶CBN、單結晶CBN，亦可採用其他工具材料。硬質被膜之形成方法，適合使用電弧離子鍍法或濺鍍法、PLD(Pulse LASER Deposition：脈衝雷射沉積)法等PVD法(物理蒸鍍法)。Forms for carrying out the invention The invention is suitable for the surface of various machining tools such as end mills, milling tools, screw taps, drills and other rotating cutting tools, planing tools and other non-rotating cutting tools, or forming screw taps, rolling tools, stamping tools and other non-cutting tools The hard coating provided can also be applied to the hard coating provided on the surface of components other than processing tools that require wear resistance, lubricity, oxidation resistance, etc., such as surface protection films for bearing members and semiconductor devices. It is also suitable for blade chip breakers installed on various processing tools. The tool base material of the hard film-coated tools is suitable for the use of cemented carbide or high-speed steel, cermets, ceramics, polycrystalline diamond (PCD), single crystal diamond, polycrystalline CBN, single crystal CBN, or other tool materials. The method of forming the hard coating is suitable for the PVD method (physical vapor deposition method) such as arc ion plating method, sputtering method, PLD (Pulse LASER Deposition: pulse laser deposition) method.

本發明硬質被膜適用於例如對鈦合金進行切削加工之切削工具，但因耐磨耗性、潤滑性、耐熔接性、及韌性優異，故亦適用於對碳鋼或不鏽鋼、鑄鐵、合金鋼等其他被削材進行切削加工之切削工具。又，亦可用於在高速加工、乾式加工等嚴苛之加工條件下進行切削加工之切削工具等。The hard coating of the present invention is suitable for cutting tools such as titanium alloy cutting, but because of its excellent wear resistance, lubricity, fusion resistance, and toughness, it is also suitable for carbon steel or stainless steel, cast iron, alloy steel, etc. Cutting tools for cutting other materials. In addition, it can also be used for cutting tools that perform cutting under severe processing conditions such as high-speed machining and dry machining.

硬質被膜係1種單一組成層與2種奈米薄膜交互層共3種層交互積層而成者；前述1種單一組成層係由A組成、B組成、及C組成中之任1個組成所構成；前述2種奈米薄膜交互層係以A組成及B組成、A組成及C組成、B組成及C組成之3種組合中任2種組合使各組成的奈米薄膜層交互積層而成，該等層之積層順序可適當地設定。1種單一組成層及2種奈米薄膜交互層之共3種層，係以預定之順序積層1周期以上，宜以1周期(3種層)作為單位進行積層，但例如最下部之層與最上部之層相同等情形時，最上部亦可結束在1周期之中途。交互積層有2個組成之奈米薄膜層的奈米薄膜交互層亦相同，宜以1周期(2種奈米薄膜層)作為單位進行積層，但奈米薄膜層之積層數目亦可為奇數。關於硬質被膜之總膜厚，於具有界面層或表面層時，係包含該等界面層或表面層的膜厚。The hard coating is composed of a single composition layer and two kinds of nano-film interaction layers, and a total of three layers are alternately laminated; the aforementioned single composition layer is composed of any one of A, B, and C Composition; the two kinds of nano-film alternating layers mentioned above are made of any combination of A composition and B composition, A composition and C composition, B composition and C composition, and the nano film layers of each composition are alternately laminated The stacking order of these layers can be set appropriately. A total of 3 types of layers, including a single composition layer and two types of nano-film interaction layers, are stacked in a predetermined order for more than 1 cycle. It is advisable to use 1 cycle (3 layers) as the unit. However, for example, the lowest layer and When the uppermost layer is the same, the uppermost layer can also end in the middle of a cycle. Alternating layering The same nano-film alternating layer with two nano-film layers is also the same. It is advisable to use one cycle (two kinds of nano-film layers) as the unit for lamination. However, the number of nano-film layers can be odd. The total film thickness of the hard coating includes the film thickness of the interface layer or the surface layer when the interface layer or the surface layer is provided.

1種單一組成層之膜厚T1與2種奈米薄膜交互層之膜厚T2、T3的比T1/T2、T1/T3均於0.2~10範圍內為佳，但亦可按超出該數值範圍之比來設定各膜厚T1、T2、T3。硬質被膜視需要可於與母材之間設置界面層。界面層宜為例如由A組成、B組成、及C組成中之任1組成所構成的單一組成層、或使由A組成、B組成、及C組成中之任2個組成所構成之2種奈米薄膜層交互積層而成的奈米薄膜交互層，亦可設置由B、Al、Ti、Y、Zr、Hf、V、Nb、Ta、Cr、及W中之1種以上元素構成之金屬之氮化物、碳氮化物、或碳化物之層作為界面層，亦可設置其他組成之界面層。界面層之膜厚宜於5~1000nm範圍內，亦可設為該數值範圍外之膜厚。The ratio T1/T2 and T1/T3 of the thickness T1 of a single component layer and the thickness T2 and T3 of two types of nanometer thin film interactive layers are preferably in the range of 0.2~10, but it can also exceed the value range The film thickness T1, T2, and T3 are set based on the ratio. The hard coating may be provided with an interface layer between the base material and the base material if necessary. The interface layer should preferably be, for example, a single composition layer composed of any one of composition A, composition B, and composition C, or two types composed of any two compositions composed of composition A, composition B, and composition C Nano thin film alternating layers formed by alternately stacking nano thin film layers can also be provided with metals composed of one or more elements of B, Al, Ti, Y, Zr, Hf, V, Nb, Ta, Cr, and W A layer of nitride, carbonitride, or carbide is used as the interface layer, and an interface layer of other composition may also be provided. The film thickness of the interface layer is preferably in the range of 5 to 1000 nm, and can also be set to a film thickness outside this numerical range.

硬質被膜視需要可設置表面層。表面層宜為由A組成、B組成、及C組成中之任1個組成所構成之單一組成層、或使由A組成、B組成、及C組成中之任2個組成所構成之2種奈米薄膜層交互積層而成的奈米薄膜交互層，但亦可設置其他組成之表面層。表面層之膜厚宜於0.5~1000nm範圍內，亦可設為該數值範圍外之膜厚。The hard coating can be provided with a surface layer as needed. The surface layer should preferably be a single composition layer consisting of any one of composition A, composition B, and composition C, or two types consisting of two compositions consisting of composition A, composition B, and composition C The nano-film alternating layer is formed by alternately stacking the nano-film layers, but other composition surface layers can also be provided. The film thickness of the surface layer is preferably in the range of 0.5 to 1000 nm, and can also be set to a film thickness outside this range.

若如此之硬質被膜的被膜硬度(HV0.025)低，就不能得到充分之耐磨耗性，反之若過高則容易剝離或破裂，故與有無界面層或表面層無關，例如宜於2700~3300(HV)左右之範圍內。惟因被削材之種類或加工條件、使用條件等，硬質被膜之被膜硬度(HV0.025)亦可小於2700(HV)或超過3300(HV)。If the coating hardness (HV0.025) of such a hard coating is low, sufficient abrasion resistance cannot be obtained; otherwise, if it is too high, it is easy to peel or crack, so it is not related to the presence or absence of an interface layer or surface layer, for example, it is preferably 2700~ Within the range of about 3300 (HV). However, due to the type of material being cut, processing conditions, use conditions, etc., the hardness of the hard coating (HV0.025) can also be less than 2700 (HV) or more than 3300 (HV).

依據本發明人等之見解，本發明硬質被膜藉由1種單一組成層與2種奈米薄膜交互層共3種層交互積層，可較AlCrN基底或AlCrTiN基底之多層被膜更加改善機械特性(硬度)、耐磨耗性、抗氧化性、及剪切強度。又，因具不同彈性特性(彈性模數及硬度)之各層界面所致的晶格錯位阻礙，可達成高硬度。該界面因阻礙能量耗散及龜裂增加之作用，不僅有助於提升被膜硬度，亦有助於提升韌性。另一方面，界面大幅地影響多層被膜之特性，因設有奈米薄膜層之周期為奈米範圍的奈米薄膜交互層，故藉由利用各奈米薄膜層之厚度適當地調整結晶粒子之尺寸及膜密度，可得被膜之機械特性及摩潤學提升效果。According to the findings of the present inventors, the hard coating of the present invention can improve the mechanical properties (hardness) more than the multilayer coating of AlCrN substrate or AlCrTiN substrate by a single composition layer and two kinds of nanometer thin film interactive layers, a total of three kinds of interlayer lamination ), wear resistance, oxidation resistance, and shear strength. Furthermore, high hardness can be achieved due to the lattice dislocations caused by the interface between layers with different elastic properties (elastic modulus and hardness). This interface not only helps to increase the hardness of the coating, but also improves the toughness due to the effect of hindering energy dissipation and increased cracking. On the other hand, the interface greatly affects the characteristics of the multi-layer coating. Since a nano-film interaction layer with a nano-film period of the nano-range is provided, the thickness of each nano-film layer is appropriately adjusted by using the thickness of each nano-film layer The size and film density can obtain the mechanical properties of the film and the effect of moisturizing.

又，奈米尺度之單層、界面、及各奈米薄膜交互層藉由非晶質合金相及結晶相之擴散混合，耐磨耗性及韌性較習知粗粒之多層被膜更為良好。奈米薄膜交互層透過形成粒界錯位及向錯(disclination)緩和內部應力，抑制被膜於斷續切削加工等加工中產生破裂(裂痕)或龜裂。In addition, the single-layer, interface, and nano-film interaction layers of the nanometer scale are mixed and mixed by the amorphous alloy phase and the crystalline phase, and the wear resistance and toughness are better than the conventional coarse-grained multilayer coatings. The nano-film interaction layer relaxes internal stress by forming grain boundary dislocations and disclinations, and suppresses the film from cracking (cracking) or cracking during processing such as intermittent cutting.

本發明之硬質被膜藉由生成微細之粒子，被膜表面變得平滑，且表面組織變細密，故耐磨耗性提升。又，因界面之邊界多，透過形成界面之粒界錯位及向錯緩和內部應力，故韌性及硬度提升，可抑制被膜於斷續切削加工等切削加工中之破裂或龜裂的傳播。 實施例The hard coating of the present invention generates fine particles, so that the surface of the coating becomes smooth and the surface structure becomes finer, so the wear resistance is improved. In addition, since there are many boundaries at the interface, the internal stress is relieved by the grain boundary dislocation and direction dislocation that form the interface, so the toughness and hardness are improved, and the propagation of cracks or cracks in the cutting process such as intermittent cutting can be suppressed. Examples

以下，參照圖式詳細地說明本發明之實施例。 圖1係說明端銑刀10的正面圖，該端銑刀10為運用本發明之硬質被膜被覆構件之一例；圖2係自前端側所見之放大底面圖。該端銑刀10係以超硬合金之工具母材12(參照圖3~圖8)作為主體所構成，工具母材12上一體設有柄14及刀部16。刀部16繞著軸心等間隔地設有5片由外周刀18及底刀20所構成之刀刃，藉繞著軸心旋轉驅動，利用該等外周刀18及底刀20斷續地進行切削加工。本實施例之端銑刀10為在外周刀18與底刀20相接之邊角部分設有圓弧的半徑端銑刀。端銑刀10為硬質被膜被覆工具，相當於斷續切削工具。Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a front view illustrating an end mill 10, which is an example of a hard film-coated member using the present invention; FIG. 2 is an enlarged bottom view seen from the front end side. The end mill 10 is composed of a cemented carbide tool base material 12 (refer to FIGS. 3 to 8) as a main body, and the tool base material 12 is integrally provided with a shank 14 and a knife portion 16. The blade portion 16 is provided with five blades composed of the outer peripheral blade 18 and the bottom blade 20 at equal intervals around the axis. The outer peripheral blade 18 and the bottom blade 20 are intermittently cut by rotating around the axis. Processing. The end mill 10 of this embodiment is a radius end mill with a circular arc at the corner portion where the outer peripheral knife 18 and the bottom knife 20 meet. The end mill 10 is a hard-coated tool, which is equivalent to an intermittent cutting tool.

於刀部16之工具母材12表面，如圖3所示，塗布有硬質被膜30。圖3係放大顯示塗布有硬質被膜30之刀部16表面附近之截面的示意圖，圖1之斜線部表示塗布有硬質被膜30的區域。亦可包含柄14在內地以硬質被膜30被覆端銑刀10全體。On the surface of the tool base material 12 of the blade portion 16, as shown in FIG. 3, a hard coating 30 is applied. FIG. 3 is an enlarged schematic view showing a cross section near the surface of the blade portion 16 coated with the hard coating film 30, and the hatched portion in FIG. 1 indicates the area where the hard coating film 30 is coated. The entire end mill 10 may be covered with a hard film 30 including the shank 14 in the interior.

硬質被膜30形成為自表面側積層有A層32、奈米薄膜交互層38、及奈米薄膜交互層40至少1周期以上的多層結構，並於與工具母材12之邊界部分設有界面層44。即，於工具母材12表面上首先設有界面層44，再於該界面層44上依序重複積層奈米薄膜交互層40、奈米薄膜交互層38、及A層32，並於最上部設有A層32。包含界面層44之硬質被膜30的總膜厚Ttotal係於0.5~20μm範圍內適當地設定，A層32之膜厚T1係於0.5~1000nm範圍內適當地設定，奈米薄膜交互層38、40之膜厚T2、T3係分別於1~1000nm範圍內適當地設定。又，各膜厚T1~T3設定成膜厚T1與膜厚T2、T3之比T1/T2、T1/T3均於0.2~10範圍內。The hard coating 30 is formed into a multilayer structure in which an A layer 32, a nano film interaction layer 38, and a nano film interaction layer 40 are stacked from the surface side for at least one cycle, and an interface layer is provided at the boundary with the tool base material 12 44. That is, the interface layer 44 is firstly provided on the surface of the tool base material 12, and then the nano-film interaction layer 40, the nano-film interaction layer 38, and the A layer 32 are repeatedly laminated in this order on the uppermost layer With A layer 32. The total film thickness Ttotal of the hard film 30 including the interface layer 44 is appropriately set in the range of 0.5-20 μm, the film thickness T1 of the layer A 32 is appropriately set in the range of 0.5-1000 nm, and the nano-film interactive layers 38, 40 The film thicknesses T2 and T3 are appropriately set within the range of 1 to 1000 nm, respectively. In addition, each of the film thicknesses T1 to T3 is set such that the ratios T1/T2 and T1/T3 of the film thickness T1 to the film thicknesses T2 and T3 are within the range of 0.2 to 10.

A層32為僅以A組成構成之單一組成層。A組成係組成式為Ala Crb Sic αd 之氮化物[惟，a、b、c、d各自以原子比計為0.30≦a≦0.85、0.10≦b≦0.65、0.01≦c≦0.45、0≦d≦0.10，且a+b+c+d=1；任意添加成分α係選自B、C、Ti、V、Y、Zr、Nb、Mo、Hf、Ta、及W之1種以上元素]。圖10所示者係A組成各元素之含量(at%)之具體例，空欄為含量(at%)=0，標有散點之欄位(灰色部分)係對應含量之原子比超出前述組成式之數值範圍。亦即，試驗品7~試驗品50滿足A組成之要件。如此組成之A層32以結晶系統而言具有立方晶岩鹽型結構，具有高硬度且耐磨耗性優異之特徵，且藉由Al與Cr之比率可得高硬度、抗氧化性、高韌性。又，藉由以預定比率添加Si，可提升耐熱性。藉由任意添加成分α以10at%以下之比率添加，可使被膜之結晶粒子微細化，並可利用添加量控制粒徑。又，藉由包含該等元素，潤滑性及抗氧化性提升，且對切削加工時之發熱的高溫強度及高溫韌性提升。藉此，於承受大衝擊性機械負載的切削條件下，可抑制崩碎或缺損等產生。又，高速加工時等之發熱所致的氧化磨耗減少，可均衡地得到耐磨耗性及耐熔接性，即使於高速加工或乾式加工中亦可得到高耐久性。The A layer 32 is a single composition layer composed of only the A composition. The composition of A is a nitride compound whose composition formula is Al a Cr b Si c α d [However, the atomic ratio of a, b, c, and d is 0.30≦a≦0.85, 0.10≦b≦0.65, 0.01≦c≦0.45 , 0≦d≦0.10, and a+b+c+d=1; any added component α is one kind selected from B, C, Ti, V, Y, Zr, Nb, Mo, Hf, Ta, and W Above elements]. Figure 10 is a specific example of the content (at%) of each element of A. The blank column is the content (at%) = 0. The column marked with scattered points (grey part) is the atomic ratio of the corresponding content exceeding the aforementioned composition The numerical range of the formula. That is, the test products 7 to 50 satisfy the requirements of the composition A. The A layer 32 composed in this way has a cubic rock salt structure in terms of a crystallization system, has characteristics of high hardness and excellent wear resistance, and can obtain high hardness, oxidation resistance, and high toughness by the ratio of Al to Cr. In addition, by adding Si at a predetermined ratio, heat resistance can be improved. By adding the optional component α at a rate of 10 at% or less, the crystal particles of the coating can be made finer, and the particle size can be controlled by the amount of addition. In addition, by including these elements, lubricity and oxidation resistance are improved, and high-temperature strength and high-temperature toughness against heat generated during cutting are improved. Thereby, under cutting conditions that are subjected to a large impact mechanical load, the occurrence of chipping, chipping, etc. can be suppressed. In addition, oxidative wear due to heat generation during high-speed processing is reduced, wear resistance and fusion resistance can be obtained in a balanced manner, and high durability can be obtained even in high-speed processing or dry processing.

奈米薄膜交互層38形成為奈米薄膜A層32n與奈米薄膜B層34n交互積層有1周期以上的多層結構，前述奈米薄膜A層32n由與A層32相同之A組成所構成，前述奈米薄膜B層34n由B組成所構成。該實施例中，最下部為奈米薄膜A層32n，最上部為奈米薄膜B層34n，但亦可為最下部為奈米薄膜B層34n而最上部為奈米薄膜A層32n。奈米薄膜A層32n及奈米薄膜B層34n之各膜厚均於0.5~500nm範圍內適當地設定。B組成係組成式為Ale Tif Sig βh 之氮化物[惟，e、f、g、h各自以原子比計為0.01≦e≦0.85、0.05≦f≦0.90、0.05≦g≦0.45、0≦h≦0.10，且e+f+g+h=1；任意添加成分β係選自B、C、Cr、V、Y、Zr、Nb、Mo、Hf、Ta、及W之1種以上元素]。圖11所示者係B組成各元素之含量(at%)之具體例，空欄為含量(at%)=0，標有散點之欄位(灰色部分)係對應含量之原子比超出前述組成式之數值範圍。亦即，試驗品7~試驗品50滿足B組成之要件。如此之B組成藉由Al與Ti之比率可得高韌性、耐熱性、抗氧化性。又，藉由以預定比率添加Si，可提升高溫強度、耐熱性。藉由任意添加成分β以10at%以下之比率添加，將成為高硬度且抗氧化性優異之被膜，且耐磨耗性提升。B組成為立方晶結構，藉由加入任意添加成分β可使結晶粒子微細化，且硬度及耐磨耗性提升。結晶結構較(111)面優先定向於(200)面，(200)面之繞射線積分強度為(111)面之繞射線積分強度的1.5倍以上。The nano film interactive layer 38 is formed as a multilayer structure in which the nano film A layer 32n and the nano film B layer 34n are alternately stacked with one cycle or more. The foregoing nano film A layer 32n is composed of the same A composition as the A layer 32. The aforementioned nanofilm B layer 34n is composed of B. In this embodiment, the lowermost part is the nano film A layer 32n, the uppermost part is the nano film B layer 34n, but the lowermost part is the nano film B layer 34n and the uppermost part is the nano film A layer 32n. The thickness of each of the nano-film A layer 32n and the nano-film B layer 34n is appropriately set within the range of 0.5 to 500 nm. The composition of B is a nitride with the composition formula of Al e Ti f Si g β h [however, e, f, g, h are each in atomic ratio of 0.01≦e≦0.85, 0.05≦f≦0.90, 0.05≦g≦0.45 , 0≦h≦0.10, and e+f+g+h=1; any additional component β is selected from B, C, Cr, V, Y, Zr, Nb, Mo, Hf, Ta, and W Above elements]. Figure 11 is a specific example of the content (at%) of each element of the B component. The blank column is the content (at%) = 0. The column marked with scattered points (grey part) means that the atomic ratio of the corresponding content exceeds the aforementioned composition The numerical range of the formula. That is, the test products 7 to 50 satisfy the requirements of the composition B. Such B composition can obtain high toughness, heat resistance, and oxidation resistance by the ratio of Al to Ti. In addition, by adding Si at a predetermined ratio, high-temperature strength and heat resistance can be improved. By adding the optional component β at a rate of 10 at% or less, it will become a coating with high hardness and excellent oxidation resistance, and the wear resistance will be improved. The composition B has a cubic crystal structure. By adding any additional component β, the crystal particles can be made finer, and the hardness and wear resistance can be improved. The crystal structure is preferentially oriented in the (200) plane over the (111) plane, and the integrated intensity of the ray around the (200) plane is more than 1.5 times the integrated intensity of the ray around the (111) plane.

奈米薄膜交互層40係形成為奈米薄膜A層32n與奈米薄膜C層36n交互積層有1周期以上的多層結構，前述奈米薄膜A層32n由與A層32相同之A組成所構成，前述奈米薄膜C層36n由C組成所構成。該實施例中，最下部為奈米薄膜A層32n，最上部為奈米薄膜C層36n，但亦可為最下部為奈米薄膜C層36n而最上部為奈米薄膜A層32n。奈米薄膜A層32n及奈米薄膜C層36n之各膜厚均於0.5~500nm範圍內適當地設定。C組成係組成式為Ali Crj (SiC)k γl 之氮化物[惟，i、j、k、l各自以原子比計為0.20≦i≦0.85、0.10≦j≦0.50、0.03≦k≦0.45、0≦l≦0.10，且i+j+k+l=1；任意添加成分γ係選自B、Ti、V、Y、Zr、Nb、Mo、Hf、Ta、及W之1種以上元素]。圖12所示者係C組成各元素之含量(at%)之具體例，空欄為含量(at%)=0，標有散點之欄位(灰色部分)係對應含量之原子比超出前述組成式之數值範圍。亦即，試驗品7~試驗品50滿足C組成之要件。如此之C組成因Si以SiC(碳化矽)之化合物的形態存在，故與氧之結合性低，且SiC為共價鍵，故為高硬度且於1000℃以上之溫度下機械強度也少有下降，滑動性亦佳，因此具有高硬度且耐熱性、抗氧化性、耐磨耗性優異之特徵。又，任意添加成分γ以10at%以下之比率添加，藉此可使結晶粒子微細化，並可利用添加量控制粒徑，而可調整被膜之硬度及韌性、潤滑性。因耐磨耗性及抗氧化性優異，故可減少因高速加工時等之發熱所致的氧化磨耗，可良好地獲得耐磨耗性及耐熔接性，於高速加工或乾式加工下亦可得到高耐久性。The nano film interactive layer 40 is formed as a multilayer structure in which the nano film A layer 32n and the nano film C layer 36n are alternately stacked with one cycle or more. The foregoing nano film A layer 32n is composed of the same A composition as the A layer 32 In this case, the aforementioned nano-film C layer 36n is composed of C. In this embodiment, the lowermost part is the nano-film A layer 32n, the uppermost part is the nano-film C layer 36n, but the lowermost part is the nano-film C layer 36n and the uppermost part is the nano-film A layer 32n. The film thicknesses of the nano-film A layer 32n and the nano-film C layer 36n are appropriately set within the range of 0.5 to 500 nm. The composition of C is a nitride with the composition formula of Al i Cr j (SiC) k γ l [However, each of i, j, k, and l in atomic ratio is 0.20≦i≦0.85, 0.10≦j≦0.50, 0.03≦k ≦0.45, 0≦l≦0.10, and i+j+k+l=1; any added component γ is one selected from B, Ti, V, Y, Zr, Nb, Mo, Hf, Ta, and W Above elements]. Figure 12 is a specific example of the content (at%) of each element of the C component. The blank column is the content (at%) = 0. The column marked with scattered points (grey part) means that the atomic ratio of the corresponding content exceeds the aforementioned composition. The numerical range of the formula. That is, the test products 7 to 50 satisfy the requirements of the composition C. Such a C composition is that Si exists in the form of a compound of SiC (silicon carbide), so the bonding with oxygen is low, and SiC is a covalent bond, so it has high hardness and little mechanical strength at a temperature above 1000°C Decreased, the sliding property is also good, so it has the characteristics of high hardness and excellent heat resistance, oxidation resistance and wear resistance. In addition, the optional addition component γ is added at a ratio of 10 at% or less, whereby the crystal particles can be made fine, the particle size can be controlled by the amount of addition, and the hardness, toughness, and lubricity of the coating can be adjusted. Because of its excellent wear resistance and oxidation resistance, it can reduce oxidative wear due to heat generated during high-speed processing, etc., and can obtain good wear resistance and fusion resistance, and can also be obtained under high-speed processing or dry processing High durability.

上述奈米薄膜交互層38及40除了對應各奈米薄膜層32n、34n、36n之組成而獲得前述各特性之外，還具有高硬度且耐磨耗性、韌性、及抗氧化性優異之特徵。亦即，奈米薄膜層32n、34n、36n之界面因晶格錯位之阻礙可達成高硬度，且因阻礙能量耗散及龜裂增加之作用而有助於提升韌性。又，由於奈米薄膜層32n、34n、36n之周期於奈米範圍內，故藉由利用各奈米薄膜層32n、34n、36n之厚度適當地調整結晶粒子之尺寸及膜密度，可得被膜之機械特性及摩潤學提升效果。奈米薄膜交互層38、40藉由非晶質合金相及結晶相之擴散混合，耐磨耗性及韌性較習知粗粒之多層被膜更為良好。奈米薄膜交互層38、40透過形成粒界錯位及向錯緩和內部應力，可抑制被膜於斷續切削加工中產生、傳播破裂或龜裂。奈米薄膜交互層38之抗氧化性及潤滑性優異，且硬度(奈米壓痕法硬度)為38~40GPa左右。又，奈米薄膜交互層40為高硬度且抗氧化性優異，並且硬度(奈米壓痕法硬度)為43~45GPa左右。The above-mentioned nano-film interactive layers 38 and 40 have the characteristics of high hardness and excellent abrasion resistance, toughness, and oxidation resistance in addition to obtaining the aforementioned characteristics corresponding to the composition of each nano-film layer 32n, 34n, 36n . That is, the interface of the nano-film layers 32n, 34n, and 36n can achieve high hardness due to the hindrance of lattice dislocation, and contribute to the improvement of toughness by hindering the effects of energy dissipation and increased cracking. In addition, since the cycle of the nano film layers 32n, 34n, and 36n is within the nanometer range, the film can be obtained by appropriately adjusting the size and film density of the crystal particles by using the thickness of the nano film layers 32n, 34n, and 36n. The mechanical characteristics and the moisturizing effect. The nano-film alternating layers 38 and 40 are mixed by the diffusion of the amorphous alloy phase and the crystalline phase, and the wear resistance and toughness are better than conventional coarse-grained multilayer coatings. The nano-film interaction layers 38 and 40 relax the internal stress by forming grain boundary dislocations and direction dislocations, which can suppress the film from generating, propagating, cracking or cracking during intermittent cutting. The nano film interactive layer 38 has excellent oxidation resistance and lubricity, and the hardness (nano indentation hardness) is about 38 to 40 GPa. In addition, the nano-film interactive layer 40 is high in hardness and excellent in oxidation resistance, and the hardness (nano-indentation hardness) is about 43 to 45 GPa.

又，因A層32與2種奈米薄膜交互層38、40交互積層，故藉由適當地設定該等各層32、38、40之硬度，可使內部應力平均。藉此，各層32、38、40之附著強度變高，即使於高硬度材或難削材等之高速加工中，仍可抑制剝離，得到優異之耐崩碎性、耐磨耗性。In addition, since the A layer 32 and the two types of nanometer thin film alternating layers 38 and 40 are alternately laminated, the internal stress can be averaged by appropriately setting the hardness of the respective layers 32, 38 and 40. As a result, the adhesion strength of each layer 32, 38, 40 becomes higher, and even in high-speed processing of high-hardness materials or difficult-to-cut materials, peeling can be suppressed, and excellent chipping resistance and wear resistance can be obtained.

前述界面層44於本實施例為僅由與A層32相同之A組成所構成的單一組成層。界面層44之膜厚係於5~1000nm範圍內適當地設定。藉由將如此之界面層44設於與工具母材12之邊界，可提高硬質被膜30對工具母材12之附著強度。In this embodiment, the aforementioned interface layer 44 is a single composition layer composed only of the same A composition as the A layer 32. The film thickness of the interface layer 44 is appropriately set in the range of 5 to 1000 nm. By providing such an interface layer 44 at the boundary with the tool base material 12, the adhesion strength of the hard coating 30 to the tool base material 12 can be improved.

若如此之硬質被膜30的被膜硬度(HV0.025)低，就不能得到充分之耐磨耗性，反之若過高則容易剝離或破裂，本實施例中係設於2700~3300(HV)範圍內。If the coating hardness (HV0.025) of such a hard coating 30 is low, sufficient abrasion resistance cannot be obtained, otherwise, if it is too high, it is easy to peel or crack. In this embodiment, it is set in the range of 2700 to 3300 (HV) Inside.

圖4~圖8係說明設於端銑刀10之刀部16表面之硬質被膜之其他例的圖，均為與圖3對應之截面示意圖，各硬質被膜之總膜厚Ttotal均於0.5~20μm範圍內。圖4之硬質被膜50相較於前述硬質被膜30而言，設有B層34取代A層32，且設有奈米薄膜交互層42取代奈米薄膜交互層40，設有界面層52取代界面層44。B層34之膜厚T1係於0.5~1000nm範圍內適當地設定，奈米薄膜交互層38、42之膜厚T2、T3分別於1~1000nm範圍內適當地設定。又，各膜厚T1~T3設定成膜厚T1與膜厚T2、T3之比T1/T2、T1/T3均於0.2~10範圍內。又，雖B層34之膜厚T1有別於前述A層32之膜厚T1另行設定，但因均為單一組成層且膜厚T1之數值範圍相同，故使用共通之符號T1說明。奈米薄膜交互層38、42之膜厚T2、T3亦相同。4 to 8 are diagrams illustrating other examples of hard coatings provided on the surface of the blade portion 16 of the end mill 10, all of which are schematic cross-sectional views corresponding to FIG. 3, and the total film thickness Ttotal of each hard coating is 0.5 to 20 μm. Within range. Compared with the hard film 30 described above, the hard film 50 of FIG. 4 is provided with a B layer 34 instead of the A layer 32, a nano film interaction layer 42 to replace the nano film interaction layer 40, and an interface layer 52 to replace the interface Layer 44. The film thickness T1 of the B layer 34 is appropriately set in the range of 0.5 to 1000 nm, and the film thicknesses T2 and T3 of the nano-film interactive layers 38 and 42 are appropriately set in the range of 1 to 1000 nm, respectively. In addition, each of the film thicknesses T1 to T3 is set such that the ratios T1/T2 and T1/T3 of the film thickness T1 to the film thicknesses T2 and T3 are within the range of 0.2 to 10. In addition, although the film thickness T1 of the B layer 34 is different from the film thickness T1 of the A layer 32 described above, it is a single component layer and the value range of the film thickness T1 is the same, so the common symbol T1 is used for description. The film thicknesses T2 and T3 of the nano-film interactive layers 38 and 42 are also the same.

上述B層34為僅由前述B組成所構成之單一組成層，且奈米薄膜交互層42形成為奈米薄膜B層34n及奈米薄膜C層36n交互積層有1周期以上的多層結構。該實施例中，最下部為奈米薄膜B層34n，最上部為奈米薄膜C層36n，但亦可為最下部為奈米薄膜C層36n而最上部為奈米薄膜B層34n。奈米薄膜B層34n及奈米薄膜C層36n之各膜厚均於0.5~500nm範圍內適當地設定。界面層52為僅由前述B組成所構成之單一組成層，界面層52之膜厚係於5~1000nm範圍內適當地設定。上述奈米薄膜交互層42之抗氧化性及潤滑性優異，且硬度(奈米壓痕法硬度)為38~40GPa左右。The above-mentioned B layer 34 is a single composition layer composed only of the aforementioned B composition, and the nano film interactive layer 42 is formed as a multilayer structure in which the nano film B layer 34n and the nano film C layer 36n are alternately stacked with one cycle or more. In this embodiment, the lowermost part is the nano-film B layer 34n, the uppermost part is the nano-film C layer 36n, but the lowermost part is the nano-film C layer 36n and the uppermost part is the nano-film B layer 34n. The thickness of each of the nano-film B layer 34n and the nano-film C layer 36n is appropriately set within the range of 0.5 to 500 nm. The interface layer 52 is a single composition layer composed only of the aforementioned B composition, and the film thickness of the interface layer 52 is appropriately set in the range of 5 to 1000 nm. The nano film interactive layer 42 is excellent in oxidation resistance and lubricity, and its hardness (nano indentation hardness) is about 38 to 40 GPa.

圖5之硬質被膜60相較於前述硬質被膜30而言，設有C層36取代A層32，且設有奈米薄膜交互層42取代奈米薄膜交互層38，設有界面層62取代界面層44。C層36之膜厚T1係於0.5~1000nm範圍內適當地設定，奈米薄膜交互層40、42之膜厚T2、T3則分別於1~1000nm範圍內適當地設定。又，各膜厚T1~T3設定成膜厚T1與膜厚T2、T3之比T1/T2、T1/T3均於0.2~10範圍內。上述C層36為僅由前述C組成構成之單一組成層，界面層62為奈米薄膜A層32n、奈米薄膜B層34n、及奈米薄膜C層36n中之任2種交互積層而成的奈米薄膜交互層。界面層62之膜厚係於5~1000nm範圍內適當地設定，構成界面層62之奈米薄膜A層32n、奈米薄膜B層34n、及奈米薄膜C層36n中之2種奈米薄膜層之膜厚均於0.5~500nm範圍內適當地設定。Compared with the hard film 30 described above, the hard film 60 of FIG. 5 is provided with a C layer 36 instead of the A layer 32, a nano film interaction layer 42 instead of the nano film interaction layer 38, and an interface layer 62 instead of the interface Layer 44. The film thickness T1 of the C layer 36 is appropriately set in the range of 0.5 to 1000 nm, and the film thicknesses T2 and T3 of the nano-film interactive layers 40 and 42 are appropriately set in the range of 1 to 1000 nm, respectively. In addition, each of the film thicknesses T1 to T3 is set such that the ratios T1/T2 and T1/T3 of the film thickness T1 to the film thicknesses T2 and T3 are within the range of 0.2 to 10. The above-mentioned C layer 36 is a single composition layer composed only of the above-mentioned C composition, and the interface layer 62 is formed by any two kinds of alternating lamination of the nano film A layer 32n, the nano film B layer 34n, and the nano film C layer 36n Nano-film interaction layer. The film thickness of the interface layer 62 is appropriately set in the range of 5 to 1000 nm, and two types of nano films of the nano film A layer 32n, the nano film B layer 34n, and the nano film C layer 36n constituting the interface layer 62 are formed. The film thickness of the layer is appropriately set within the range of 0.5 to 500 nm.

圖6之硬質被膜70相較於前述硬質被膜30而言，A層32、奈米薄膜交互層38、40的積層順序相異，係於奈米薄膜交互層40與奈米薄膜交互層38之間設有A層32，且奈米薄膜交互層40設於最表面。又，設有由奈米薄膜交互層所構成之前述界面層62取代A組成之界面層44。另，亦可為於奈米薄膜交互層38與奈米薄膜交互層40之間設有A層32，且奈米薄膜交互層38設於最表面等，交互積層之3種層32、38、40的積層順序可適當地設定。其他硬質被膜50、60亦同。又，亦可適當地設定A層32、B層34、C層36中之1種與奈米薄膜交互層38、40、42中之2種的組合，例如，亦可組合A層32與奈米薄膜交互層38及42進行積層，或組合A層32與奈米薄膜交互層40及42進行積層。The hard coating 70 of FIG. 6 is different from the hard coating 30 described above in that the stacking order of the A layer 32 and the nano film interaction layers 38 and 40 is different, which is due to the difference between the nano film interaction layer 40 and the nano film interaction layer 38. A layer 32 is provided in between, and the nano film interaction layer 40 is provided on the outermost surface. In addition, an interface layer 44 composed of the foregoing interface layer 62 composed of a nano-film interactive layer instead of A is provided. In addition, an A layer 32 may be provided between the nano film interaction layer 38 and the nano film interaction layer 40, and the nano film interaction layer 38 may be provided on the outermost surface. The stacking order of 40 can be set appropriately. The same is true for other hard coatings 50 and 60. Also, the combination of one of the A layer 32, the B layer 34, and the C layer 36 and the two of the nano film interaction layers 38, 40, and 42 can be appropriately set, for example, the A layer 32 and the nano layer can also be combined The rice thin film interactive layers 38 and 42 are laminated, or the A layer 32 is combined with the nano thin film interactive layers 40 and 42 for lamination.

圖7之硬質被膜80相較於前述硬質被膜30而言為省略界面層44的情況。The hard coating 80 of FIG. 7 is the case where the interface layer 44 is omitted compared to the hard coating 30 described above.

圖8之硬質被膜90相較於前述硬質被膜30而言，係於最表面設置表面層92，且設有與A組成、B組成、C組成互異的界面層94。作為表面層92，係設置例如A層32、B層34、C層36這類由A組成、B組成、或C組成所構成的單一組成層，抑或設置與前述界面層62同樣是奈米薄膜A層32n、奈米薄膜B層34n、及奈米薄膜C層36n中之任2種分別以0.5~500nm之膜厚交互積層而成的奈米薄膜交互層。表面層92之膜厚係於0.5~1000nm範圍內適當地設定。界面層94以由B、Al、Ti、Y、Zr、Hf、V、Nb、Ta、Cr、及W中之1種以上元素構成的金屬之氮化物、碳氮化物、或碳化物所構成，界面層94之膜厚係於5~1000nm範圍內適當地設定。Compared to the hard film 30 described above, the hard film 90 of FIG. 8 is provided with a surface layer 92 on the outermost surface, and an interface layer 94 different from the A composition, the B composition, and the C composition. As the surface layer 92, a single layer composed of A, B, or C such as A layer 32, B layer 34, and C layer 36 is provided, or a nano film similar to the aforementioned interface layer 62 is provided Any two of the A layer 32n, the nano film B layer 34n, and the nano film C layer 36n are alternately laminated with a film thickness of 0.5 to 500 nm, respectively. The film thickness of the surface layer 92 is appropriately set in the range of 0.5 to 1000 nm. The interface layer 94 is made of a metal nitride, carbonitride, or carbide composed of one or more elements of B, Al, Ti, Y, Zr, Hf, V, Nb, Ta, Cr, and W. The film thickness of the interface layer 94 is appropriately set in the range of 5 to 1000 nm.

又，雖省略圖示，但更可以其他態樣構成硬質被膜。例如，前述硬質被膜30、50、60、70、80、90均為1種單一組成層(A層32、B層34、C層36之任1層)與奈米薄膜交互層38、40、42中之任2種共3種層按預定順序以1周期為單位積層而成，但例如將硬質被膜30中最上部之A層32省略等，最上部於1周期之中途結束也是可以。換言之，無表面層之硬質被膜30、50、60、70、80中，亦可將其最上部之最表面層視為有別於交互積層之3種層的表面層。交互積層2種奈米薄膜層(奈米薄膜A層32n、奈米薄膜B層34n、奈米薄膜C層36n之任2層)而成之奈米薄膜交互層38、40、42，亦可例如為奈米薄膜交互層38由奈米薄膜A層32n開始並以奈米薄膜A層32n結束等，合計之層數為奇數。又，亦可採用僅以C組成構成之單一組成層的界面層取代界面層44、52、62、94。In addition, although not shown in the figure, the hard coating may be configured in other aspects. For example, the aforementioned hard coatings 30, 50, 60, 70, 80, and 90 are each a single composition layer (any one of the A layer 32, the B layer 34, and the C layer 36) and the nano film interaction layers 38, 40, A total of 3 layers of any two types of 42 are stacked in a predetermined order in units of one cycle. However, for example, the A layer 32 at the uppermost part of the hard film 30 may be omitted, and the uppermost part may end at the middle of one cycle. In other words, in the hard coatings 30, 50, 60, 70, and 80 without a surface layer, the uppermost surface layer can also be regarded as a surface layer different from the three types of alternating layers. Alternately laminating two kinds of nano film layers (any two layers of nano film A layer 32n, nano film B layer 34n, nano film C layer 36n), alternating nano film layers 38, 40, 42 can also be used For example, the nano-film interactive layer 38 starts from the nano-film A layer 32n and ends with the nano-film A layer 32n, and the total number of layers is an odd number. Furthermore, instead of the interface layers 44, 52, 62, 94, an interface layer composed of a single composition layer composed of only C may be used.

圖13及圖14係具體地說明試驗品1~試驗品50之硬質被膜之被膜結構的圖，單一組成層欄位之A層、B層、C層相當於前述A層32、B層34、C層36。又，奈米薄膜交互層欄位之A層、B層、C層相當於前述奈米薄膜A層32n、奈米薄膜B層34n、奈米薄膜C層36n；交互層(AB)、交互層(AC)、交互層(BC)相當於前述奈米薄膜交互層38、40、42。又，界面層為前述界面層44、52、62、94中之任一者。單一組成層之A層~C層、奈米薄膜交互層之交互層(AB)、交互層(AC)、交互層(BC)之積層對數及膜厚的欄位之各橫槓「-」表示不具該等層之意。又，圖13及圖14之各試驗品1~試驗品50均不具表面層。圖13中標有散點之欄位(灰色部分)係未滿足本實施例(本發明之請求項1)之膜厚要件之意，試驗品1~試驗品6為比較品，試驗品7~試驗品50為本發明品。13 and 14 are diagrams specifically illustrating the coating structure of the hard coatings of Test Articles 1 to 50. The single-layer layer field A layer, B layer, and C layer are equivalent to the aforementioned A layer 32, B layer 34, C layer 36. In addition, the A layer, B layer, and C layer of the nano film interaction layer field correspond to the aforementioned nano film A layer 32n, nano film B layer 34n, and nano film C layer 36n; the interaction layer (AB), the interaction layer (AC) and the interactive layer (BC) correspond to the aforementioned nano-film interactive layers 38, 40, and 42. In addition, the interface layer is any of the aforementioned interface layers 44, 52, 62, and 94. The horizontal bar "-" in the fields of the layer A to C of the single component layer, the interaction layer (AB), the interaction layer (AC), and the interaction layer (BC) of the nano-film interaction layer (AC) and the interaction layer (BC) Not intended for these layers. In addition, each of the test products 1 to 50 in FIGS. 13 and 14 does not have a surface layer. The field (grey part) marked with scattered points in FIG. 13 means that the film thickness requirements of this embodiment (claim 1 of the present invention) are not satisfied. Test product 1 to test product 6 are comparative products, and test product 7 to test Product 50 is the product of the invention.

圖9係說明電弧離子鍍裝置100的概略構成圖(示意圖)，該裝置係於對工具母材12塗布前述硬質被膜30、50、60、70、80、90或圖13、圖14記載之試驗品1~50之硬質被膜(以下，未特別區分的情況僅稱作硬質被膜30等)之際使用。電弧離子鍍裝置100係藉由屬PVD法之一種之電弧離子鍍法於工具母材12表面塗布前述硬質被膜30等者，其可藉由切換蒸發源(靶材)或反應氣體來以預定膜厚連續形成組成互異之複數種層。以硬質被膜30為例，於工具母材12表面設置界面層44後，交互地重複積層奈米薄膜交互層40、38、及A層32即可。圖9相當於自上方觀看電弧離子鍍裝置100的俯視圖。9 is a schematic configuration diagram (schematic diagram) illustrating an arc ion plating apparatus 100 which is applied to the tool base material 12 by applying the aforementioned hard coating 30, 50, 60, 70, 80, 90 or the test described in FIGS. 13 and 14 Products 1 to 50 are used for hard coatings (hereinafter referred to as hard coatings 30 unless otherwise specified). The arc ion plating apparatus 100 is one in which the hard coating 30 or the like is coated on the surface of the tool base material 12 by an arc ion plating method which is a PVD method, which can be a predetermined film by switching the evaporation source (target material) or reaction gas Thickness continuously forms a plurality of layers with different compositions. Taking the hard film 30 as an example, after the interface layer 44 is provided on the surface of the tool base material 12, the nano-film interaction layers 40, 38 and the A layer 32 may be alternately and repeatedly stacked. FIG. 9 corresponds to a plan view of the arc ion plating apparatus 100 viewed from above.

電弧離子鍍裝置100具有：轉盤154，其保持複數工作件、即應塗布硬質被膜30等之工具母材12，且可繞著略垂直之旋轉中心S旋轉驅動；偏壓電源156，其對工具母材12施加負偏壓；腔室158，其作為將工具母材12等收納於內部之處理容器；反應氣體供應裝置160，其將預定之反應氣體供應至腔室158內；排氣裝置162，其藉由真空泵等排出腔室158內之氣體以進行減壓；第1電弧電源164；第2電弧電源166；第3電弧電源168；第4電弧電源170等。轉盤154形成為以前述旋轉中心S作為中心之圓盤狀，工具母材12以與旋轉中心S略平行之姿勢於該轉盤154之外周部分配置複數個。使工具母材12繞著軸心自轉，同時還可藉由轉盤154使其繞著旋轉中心S公轉。反應氣體供應裝置160於塗布A層32、B層34、C層36等之氮化物之際，供應氮氣至腔室158內。腔室158內藉由排氣裝置162做成例如2~10Pa左右之真空狀態，並藉由未圖示之加熱器等加熱至例如300~600℃左右之蒸鍍處理溫度。The arc ion plating apparatus 100 has a turntable 154 that holds a plurality of work pieces, that is, a tool base material 12 that should be coated with a hard coating 30, etc., and can be driven to rotate about a slightly vertical rotation center S; The base material 12 applies a negative bias; the chamber 158, which serves as a processing container that houses the tool base material 12 and the like inside; the reaction gas supply device 160, which supplies a predetermined reaction gas into the chamber 158; the exhaust device 162 , Which discharges the gas in the chamber 158 by vacuum pump or the like for decompression; the first arc power supply 164; the second arc power supply 166; the third arc power supply 168; the fourth arc power supply 170 and so on. The turntable 154 is formed in a disk shape with the rotation center S as the center, and a plurality of tool base materials 12 are arranged on the outer peripheral portion of the turntable 154 in a posture slightly parallel to the rotation center S. The tool base material 12 rotates around the axis, and at the same time, it can revolve around the rotation center S by the turntable 154. The reactive gas supply device 160 supplies nitrogen gas into the chamber 158 when the nitrides of the A layer 32, the B layer 34, the C layer 36, and the like are coated. The chamber 158 is made into a vacuum state of, for example, about 2 to 10 Pa by the exhaust device 162, and is heated to a vapor deposition processing temperature of, for example, about 300 to 600°C by a heater or the like not shown.

第1電弧電源164、第2電弧電源166、第3電弧電源168、第4電弧電源170均以由蒸鍍材料所構成之第1蒸發源172、第2蒸發源176、第3蒸發源180、第4蒸發源184作為陰極，並於與陽極174、178、182、186之間選擇性地通過預定之電弧電流，使其電弧放電，藉此選擇性地使蒸發材料自該等第1蒸發源172、第2蒸發源176、第3蒸發源180、第4蒸發源184蒸發，已蒸發之蒸發材料會成為正離子，蒸鍍於施加有負(-)之偏電壓的工具母材12。亦即，蒸發源172、176、180、184分別由前述A組成、B組成、C組成之任一合金所構成，剩下一個蒸發源做成例如膜厚較厚之組成的合金，可有效率地塗布。亦可配合A組成、B組成、及C組成之組成數量令蒸發源為3個。The first arc power source 164, the second arc power source 166, the third arc power source 168, and the fourth arc power source 170 are all composed of a first evaporation source 172, a second evaporation source 176, and a third evaporation source 180, which are composed of vapor deposition materials. The fourth evaporation source 184 serves as a cathode, and selectively passes a predetermined arc current between the anodes 174, 178, 182, and 186 to discharge the arc, thereby selectively causing the evaporation material from the first evaporation sources 172. The second evaporation source 176, the third evaporation source 180, and the fourth evaporation source 184 evaporate. The evaporated evaporation material becomes positive ions and is deposited on the tool base material 12 to which a negative (-) bias voltage is applied. That is, the evaporation sources 172, 176, 180, and 184 are composed of any of the foregoing alloys of A, B, and C, respectively, and the remaining one is made of an alloy with a thick film composition, which can be efficient.地涂。 Ground coating. It can also be combined with the number of A, B, and C to make the evaporation source three.

並且，藉由適當地切換前述電弧電源164、166、168、170來依序塗布預定組成之層，可得預定被膜結構之前述硬質被膜30等。各層之膜厚可藉由轉盤154之旋轉速度及電弧電源164、166、168、170之通電時間等調整。於組成互異之複數層的邊界部分亦可形成混有2種組成之混合層。In addition, by appropriately switching the arc power sources 164, 166, 168, and 170 to sequentially coat a predetermined composition layer, the hard coating 30 and the like with a predetermined coating structure can be obtained. The film thickness of each layer can be adjusted by the rotation speed of the turntable 154 and the energization time of the arc power sources 164, 166, 168, and 170. A mixed layer in which two kinds of compositions are mixed can also be formed at the boundary part of plural layers with different compositions.

接著，針對工具母材12為超硬合金且直徑為16mm、5片刀之與前述端銑刀10相同的半徑端銑刀，準備設有圖10~圖14所示被膜結構之硬質被膜的試驗品1~試驗品50，說明進行該硬質被膜之性能試驗後的結果。圖15係顯示試驗結果之圖，被膜硬度係依據維克氏硬度試驗法(JIS G0202、Z2244)於硬度記號HV0.025所示條件下測定硬質被膜之HV值(維克氏硬度)所得到的值。又，依據以下切削試驗條件使用試驗品1~試驗品50分別進行切削加工的情況下，測定外周刀18之刀腹面摩耗寬度及切削距離，判定被膜性能(耐久性)。具體而言，在隨時中斷切削加工下測定刀腹面摩耗寬度，測定刀腹面摩耗寬度達0.2mm以上時之切削距離。並且，將切削距離為20m以上標為合格「○」，小於20m標為不合格「×」。刀腹面摩耗寬度使用股份有限公司Nikon製之測定顯微鏡(MM-400/LM)利用目視觀察測定。 《切削試驗條件》 ．被削材：鈦合金 ．切削速度V：70m/min ．旋轉速度n：1400min-1 ．進給速度：f=0.09mm/t、F=630mm/min ．加工型態：側面切削 ．軸向吃刀量ap：28.8mm ．徑向吃刀量ae：3.2mmNext, for a tool base material 12 made of cemented carbide and having a diameter of 16 mm and a 5-piece cutter, the same radius end mill as the aforementioned end mill 10 is prepared, and a hard coating test with the coating structure shown in FIGS. 10 to 14 is prepared Product 1 to Test Product 50 illustrate the results of the performance test of the hard coating. 15 is a graph showing the test results. The coating hardness is obtained by measuring the HV value (Vickers hardness) of the hard coating under the conditions indicated by the hardness symbol HV0.025 according to the Vickers hardness test method (JIS G0202, Z2244). value. In addition, when each of the cutting products 1 to 50 was used for cutting according to the following cutting test conditions, the wear width and cutting distance of the flank surface of the outer peripheral blade 18 were measured to determine the coating performance (durability). Specifically, the abrasion width of the flank surface is measured while cutting is interrupted at any time, and the cutting distance when the abrasion width of the flank surface is 0.2 mm or more is measured. In addition, a cutting distance of 20 m or more is marked as a passing "○", and a cutting distance of less than 20 m is marked as a failing "×". The wear width of the flank surface was measured by visual observation using a measuring microscope (MM-400/LM) manufactured by Nikon Corporation. "Cutting Test Conditions". Material being cut: titanium alloy. Cutting speed V: 70m/min. Rotation speed n: 1400min -1 . Feeding speed: f=0.09mm/t, F=630mm/min. Processing type: side cutting. Axial knife eating ap: 28.8mm. Radial knife consumption ae: 3.2mm

由圖15可知，關於被膜硬度(HV0.025)，本發明品之試驗品7~試驗品50均為2700~3300(HV)範圍內，可期待優異之耐磨耗性及耐衝擊性(對斷續切削所致之破裂或剝離的強度)，相對於此，比較品之試驗品1~試驗品6為1900~2300(HV)左右。關於切削距離，本發明品之試驗品7~試驗品50均可進行20m以上切削加工，可得優異之耐久性。相對於此，比較品之試驗品1~試驗品6之切削距離均小於20m。As can be seen from FIG. 15, regarding the coating hardness (HV0.025), the test articles 7 to 50 of the present invention are all in the range of 2700 to 3300 (HV), and excellent wear resistance and impact resistance can be expected (for (The strength of cracking or peeling due to intermittent cutting), compared to this, the test products 1 to 6 of the comparative products are about 1900 to 2300 (HV). Regarding the cutting distance, the test products 7 to 50 of the product of the present invention can be cut at a length of 20 m or more, and excellent durability can be obtained. In contrast, the cutting distances of the test products 1 to 6 of the comparative products are all less than 20m.

如此，依據本實施例之端銑刀10之硬質被膜30等，藉由A層32、B層34、及C層36中之任1種單一組成層與奈米薄膜交互層38、40及42中之任2種奈米薄膜交互層共3種層分別以預定膜厚交互積層，將可獲得即使於例如對鈦合金之切削加工下仍顯優異之耐久性等，可得優異之耐磨耗性、韌性、潤滑性、及耐熔接性。藉此，除了鈦合金以外，例如於對碳鋼、不鏽鋼、鑄鐵、合金鋼等各種被削材進行切削加工時，或於高速加工、乾式加工等嚴苛之加工條件下，藉由高韌性可抑制硬質被膜30等之破裂或剝離，從而可實現工具之長壽化。In this way, according to the hard coating 30 of the end mill 10 according to the present embodiment, the single layer of any one of the A layer 32, the B layer 34, and the C layer 36 interacts with the nano film interaction layers 38, 40, and 42 Among the two kinds of nano-film thin film alternating layers, a total of three kinds of layers are alternately stacked with a predetermined film thickness, which will achieve excellent durability even under the cutting process of titanium alloy, etc., and excellent wear resistance Property, toughness, lubricity, and fusion resistance. In this way, in addition to titanium alloys, for example, when cutting various materials such as carbon steel, stainless steel, cast iron, alloy steel, etc., or under severe processing conditions such as high-speed machining and dry machining, high toughness can be used The cracking or peeling of the hard coating 30 and the like is suppressed, so that the tool can be prolonged in life.

又，上述1種單一組成層之膜厚T1與2種奈米薄膜交互層之各膜厚T2、T3的比T1/T2、T1/T3均於0.2~10範圍內，故1種單一組成層及2種奈米薄膜交互層可各自以具有預定特性之適當膜厚設置，可適當地得到耐磨耗性、耐熔接性等性能。In addition, the ratio T1/T2 and T1/T3 of the film thickness T1 of the above-mentioned single-component layer and the film thickness of the two types of nano-film interaction layers are in the range of 0.2~10, so the single-component layer The two types of nano-film interaction layers can each be set with an appropriate film thickness with predetermined characteristics, and properties such as wear resistance and fusion resistance can be appropriately obtained.

又，因硬質被膜30等之被膜硬度(HV0.025)於2700~3300(HV)範圍內，故可均衡地得到耐磨耗性及高韌性，並可抑制破裂或剝離而得到優異之耐久性。In addition, since the hardness (HV0.025) of the hard coating 30 and the like is in the range of 2700 to 3300 (HV), wear resistance and high toughness can be obtained in balance, and cracks or peeling can be suppressed to obtain excellent durability. .

又，因圖7之硬質被膜80不具界面層，故可降低成膜成本，可便宜地製造具硬質被膜80之端銑刀10。另一方面，硬質被膜30、50、60、70、90及試驗品7~試驗品50因具有預定組成、膜厚之界面層，故可提高硬質被膜30等對工具母材12的附著強度。In addition, since the hard coating 80 of FIG. 7 does not have an interface layer, the film forming cost can be reduced, and the end mill 10 with the hard coating 80 can be manufactured inexpensively. On the other hand, since the hard coatings 30, 50, 60, 70, 90 and the test samples 7 to 50 have an interface layer with a predetermined composition and film thickness, the adhesion strength of the hard coating 30 and the like to the tool base material 12 can be improved.

又，因圖8之硬質被膜90具有預定組成、膜厚之表面層92，藉由適當地設定該表面層92之組成及膜厚，可更加提升耐磨耗性及耐熔接性等預定之被膜性能。In addition, since the hard film 90 of FIG. 8 has a surface layer 92 having a predetermined composition and film thickness, by appropriately setting the composition and film thickness of the surface layer 92, the predetermined film such as wear resistance and fusion resistance can be further improved performance.

又，端銑刀10為外周刀18及底刀20可斷續地進行切削加工之斷續切削工具，該等外周刀18及底刀20在被施加重複衝撃負載的同時會容易發熱，但藉由設置具高耐磨耗性及韌性、潤滑性、耐熔接性之硬質被膜30等，可圖工具之長壽化。In addition, the end mill 10 is an intermittent cutting tool in which the peripheral cutter 18 and the bottom cutter 20 can intermittently cut. The peripheral cutter 18 and the bottom cutter 20 may easily generate heat while being subjected to repeated impact loads, but By setting a hard coating 30 with high abrasion resistance, toughness, lubricity, and welding resistance, etc., the life of the tool can be extended.

以上，依據圖式詳細地說明本發明之實施例，但該等均僅為一實施形態，本發明可以基於習於此藝者之知識施加各種變更、改良後之態樣實施。In the above, the embodiments of the present invention have been described in detail based on the drawings, but these are only one embodiment, and the present invention can be implemented with various changes and improvements based on the knowledge of the artist.

10:端銑刀(硬質被膜被覆構件、斷續切削工具) 12:工具母材(母材) 14:柄 16:刀部 18:外周刀(刀刃) 20:底刀(刀刃) 30,50,60,70,80,90:硬質被膜 32:A層(單一組成層) 32n:奈米薄膜A層(奈米薄膜層) 34:B層(單一組成層) 34n:奈米薄膜B層(奈米薄膜層) 36:C層(單一組成層) 36n:奈米薄膜C層(奈米薄膜層) 38,40,42:奈米薄膜交互層 44,52,62,94:界面層 92:表面層 100:電弧離子鍍裝置 154:轉盤 156:偏壓電源 158:腔室 160:反應氣體供應裝置 162:排氣裝置 164:第1電弧電源 166:第2電弧電源 168:第3電弧電源 170:第4電弧電源 172:第1蒸發源 174,178,182,186:陽極 176:第2蒸發源 180:第3蒸發源 184:第4蒸發源 S:旋轉中心 Ttotal:總膜厚 T1:單一組成層之膜厚 T2,T3:奈米薄膜交互層之膜厚10: End mill (hard-coated member, intermittent cutting tool) 12: Tool base material (base material) 14: handle 16: Knife Department 18: Peripheral knife (blade) 20: bottom knife (blade) 30,50,60,70,80,90: hard coating 32: A layer (single component layer) 32n: Nano film A layer (nano film layer) 34: B layer (single component layer) 34n: Nano film B layer (nano film layer) 36: C layer (single component layer) 36n: Nano film C layer (nano film layer) 38,40,42: Nano-film interaction layer 44,52,62,94: interface layer 92: surface layer 100: arc ion plating device 154: Turntable 156: Bias power supply 158: Chamber 160: reaction gas supply device 162: Exhaust 164: 1st arc power supply 166: 2nd arc power supply 168: 3rd arc power supply 170: 4th arc power supply 172: The first evaporation source 174,178,182,186: anode 176: Second evaporation source 180: third evaporation source 184: 4th evaporation source S: center of rotation Ttotal: total film thickness T1: Thickness of single layer T2, T3: the thickness of the nano-film interlayer

圖1係顯示運用本發明之端銑刀之一例的正面圖。 圖2係自前端側觀看圖1端銑刀的放大底面圖。 圖3係說明設於圖1端銑刀之硬質被膜之被膜結構的示意圖。 圖4係說明設於圖1端銑刀之硬質被膜之被膜結構其他例的示意圖。 圖5係說明設於圖1端銑刀之硬質被膜之被膜結構又一其他例的示意圖。 圖6係說明設於圖1端銑刀之硬質被膜之被膜結構又一其他例的示意圖。 圖7係說明設於圖1端銑刀之硬質被膜之被膜結構又一其他例的示意圖。 圖8係說明設於圖1端銑刀之硬質被膜之被膜結構又一其他例的示意圖。 圖9係說明電弧離子鍍裝置的概略圖，該電弧離子鍍裝置係用以將圖3~圖8之硬質被膜成膜於工具母材上之物理蒸鍍裝置之一例。 圖10所示者係構成用於切削加工試驗之試驗品1~試驗品50之硬質被膜的A組成之構成元素種類及含有比率。 圖11所示者係構成試驗品1~試驗品50之硬質被膜的B組成之構成元素種類及含有比率。 圖12所示者係構成試驗品1~試驗品50之硬質被膜的C組成之構成元素種類及含有比率。 圖13係說明試驗品1~試驗品25之硬質被膜之被膜結構的圖。 圖14係說明試驗品26~試驗品50之硬質被膜之被膜結構的圖。 圖15所示者係試驗品1~試驗品50之硬質被膜之被膜硬度、進行切削加工試驗後測定之切削距離、及判定結果。FIG. 1 is a front view showing an example of using the end mill of the present invention. Fig. 2 is an enlarged bottom view of the end mill of Fig. 1 viewed from the front end side. 3 is a schematic diagram illustrating the coating structure of the hard coating provided on the end mill of FIG. 1. 4 is a schematic diagram illustrating another example of the coating structure of the hard coating provided on the end mill of FIG. 1. 5 is a schematic diagram illustrating yet another example of the coating structure of the hard coating provided on the end mill of FIG. 1. 6 is a schematic diagram illustrating yet another example of the coating structure of the hard coating provided on the end mill of FIG. 1. 7 is a schematic diagram illustrating yet another example of the coating structure of the hard coating provided on the end mill of FIG. 1. 8 is a schematic diagram illustrating yet another example of the coating structure of the hard coating provided on the end mill of FIG. 1. 9 is a schematic diagram illustrating an arc ion plating apparatus, which is an example of a physical vapor deposition apparatus for forming the hard coating of FIGS. 3 to 8 on a tool base material. The types shown in FIG. 10 are the types and content ratios of the constituent elements of the A composition constituting the hard coatings of the test products 1 to 50 used in the cutting test. The types shown in FIG. 11 are the types and content ratios of the constituent elements constituting the B composition of the hard coatings of Test Products 1 to 50. The types shown in FIG. 12 are the types and content ratios of the constituent elements constituting the C composition of the hard coatings of Test Products 1 to 50. FIG. 13 is a diagram illustrating the coating structure of the hard coatings of Test Products 1 to 25. FIG. FIG. 14 is a diagram illustrating the coating structure of the hard coating of test products 26 to 50. FIG. Fig. 15 shows the hardness of the hard coatings of Test Articles 1 to 50, the cutting distance measured after the cutting processing test, and the judgment results.

12:工具母材(母材) 12: Tool base material (base material)

30:硬質被膜 30: Hard coating

32:A層(單一組成層) 32: A layer (single component layer)

32n:奈米薄膜A層(奈米薄膜層) 32n: Nano film A layer (nano film layer)

34n:奈米薄膜B層(奈米薄膜層) 34n: Nano film B layer (nano film layer)

36n:奈米薄膜C層(奈米薄膜層) 36n: Nano film C layer (nano film layer)

38,40:奈米薄膜交互層 38,40: Nano film interactive layer

44:界面層 44: Interface layer

Ttotal:總膜厚 Ttotal: total film thickness

T1:單一組成層之膜厚 T1: Thickness of single layer

T2,T3:奈米薄膜交互層之膜厚 T2, T3: the thickness of the nano-film interlayer

Claims (8)

一種硬質被膜，係以被覆母材表面之方式附著於母材表面，該硬質被膜之特徵在於： 前述硬質被膜係單一組成層與2種奈米薄膜交互層共3種層交互積層而構成為總膜厚於0.5~20μm範圍內者； 前述單一組成層係由A組成、B組成、及C組成中之任1個組成所構成； 前述2種奈米薄膜交互層係以前述A組成及前述B組成、前述A組成及前述C組成、前述B組成及前述C組成之3種組合中任2種組合使各組成之奈米薄膜層交互積層而成； 前述A組成係組成式為Ala Crb Sic αd 之氮化物[惟，a、b、c、d各自以原子比計為0.30≦a≦0.85、0.10≦b≦0.65、0.01≦c≦0.45、0≦d≦0.10，且a+b+c+d=1；任意添加成分α係選自B、C、Ti、V、Y、Zr、Nb、Mo、Hf、Ta、及W之1種以上元素]； 前述B組成係組成式為Ale Tif Sig βh 之氮化物[惟，e、f、g、h各自以原子比計為0.01≦e≦0.85、0.05≦f≦0.90、0.05≦g≦0.45、0≦h≦0.10，且e+f+g+h=1；任意添加成分β係選自B、C、Cr、V、Y、Zr、Nb、Mo、Hf、Ta、及W之1種以上元素]； 前述C組成係組成式為Ali Crj (SiC)k γl 之氮化物[惟，i、j、k、l各自以原子比計為0.20≦i≦0.85、0.10≦j≦0.50、0.03≦k≦0.45、0≦l≦0.10，且i+j+k+l=1；任意添加成分γ係選自B、Ti、V、Y、Zr、Nb、Mo、Hf、Ta、及W之1種以上元素]； 前述單一組成層之膜厚於0.5~1000nm範圍內； 構成前述2種奈米薄膜交互層之前述奈米薄膜層的各膜厚均於0.5~500nm範圍內，且前述2種奈米薄膜交互層之各膜厚均於1~1000nm範圍內。A hard film is attached to the surface of the base material by covering the surface of the base material. The hard film is characterized in that the hard film is composed of a single composition layer and two types of nano-film interaction layers, and three layers are alternately laminated to form a total The film thickness is in the range of 0.5-20 μm; the single composition layer is composed of any one of composition A, composition B, and composition C; the two kinds of nano-film interactive layers are composed of composition A and composition B The composition, the A composition, the C composition, the B composition, and the C composition are any two of the three combinations in which nano thin film layers of each composition are alternately laminated; the composition formula of the A composition is Al a Cr b Nitride of Si c α d [However, the atomic ratio of a, b, c, d is 0.30≦a≦0.85, 0.10≦b≦0.65, 0.01≦c≦0.45, 0≦d≦0.10, and a+ b+c+d=1; any additional component α is one or more elements selected from B, C, Ti, V, Y, Zr, Nb, Mo, Hf, Ta, and W]; Is a nitride of Al e Ti f Si g β h [however, e, f, g, h are each in atomic ratio of 0.01≦e≦0.85, 0.05≦f≦0.90, 0.05≦g≦0.45, 0≦h≦ 0.10, and e+f+g+h=1; any additional component β is one or more elements selected from B, C, Cr, V, Y, Zr, Nb, Mo, Hf, Ta, and W]; The composition of C is a nitride with the composition formula of Al i Cr j (SiC) k γ l [However, each of i, j, k, and l in atomic ratio is 0.20≦i≦0.85, 0.10≦j≦0.50, 0.03≦k ≦0.45, 0≦l≦0.10, and i+j+k+l=1; any added component γ is one selected from B, Ti, V, Y, Zr, Nb, Mo, Hf, Ta, and W The above elements]; the film thickness of the single component layer is in the range of 0.5-1000nm; each film thickness of the nano-film layer constituting the aforementioned two kinds of nano-film interactive layers is in the range of 0.5-500nm, and the two kinds of nano-films Each film thickness of the meter thin film interactive layer is in the range of 1~1000nm. 如請求項1之硬質被膜，其中前述單一組成層之膜厚T1與前述2種奈米薄膜交互層之各膜厚T2、T3的比T1/T2、T1/T3均於0.2~10範圍內。As in the hard coating of claim 1, the ratios T1/T2 and T1/T3 of the film thickness T1 of the single component layer and the film thickness T2 and T3 of the two types of nanometer thin film interactive layers are all in the range of 0.2 to 10. 如請求項1或2之硬質被膜，其中交互積層的前述單一組成層及前述2種奈米薄膜交互層之最下部的層直接設於前述母材表面。The hard coating according to claim 1 or 2, wherein the single component layer of the alternating layer and the lowermost layer of the alternating layer of the two types of nanometer thin films are directly provided on the surface of the base material. 如請求項1或2之硬質被膜，其中前述硬質被膜與前述母材之邊界具有界面層； 前述界面層由以下共3種層中之任1層構成：單一組成層，其由前述A組成、前述B組成、及前述C組成中之任1個組成所構成；奈米薄膜交互層，其係使由前述A組成、前述B組成、及前述C組成中之任2個組成所構成且個別膜厚於0.5~500nm範圍內之2種奈米薄膜層交互積層而成；及金屬之氮化物、碳氮化物、或碳化物的層，其由B、Al、Ti、Y、Zr、Hf、V、Nb、Ta、Cr、及W中之1種以上元素所構成； 並且，前述界面層之膜厚於5~1000nm範圍內。The hard coating according to claim 1 or 2, wherein the boundary between the hard coating and the base material has an interface layer; The aforementioned interface layer is composed of any one of the following three layers: a single composition layer, which is composed of any one of the aforementioned composition A, the aforementioned B composition, and the aforementioned C composition; the nano-film interactive layer, which It is formed by alternately laminating two kinds of nanometer thin film layers consisting of any one of the foregoing composition A, the foregoing B composition, and the foregoing C composition, each with a film thickness in the range of 0.5 to 500 nm; and a metal nitride , Carbonitride, or carbide layer, which is composed of one or more elements of B, Al, Ti, Y, Zr, Hf, V, Nb, Ta, Cr, and W; In addition, the film thickness of the interface layer is in the range of 5 to 1000 nm. 如請求項1至4中任1項之硬質被膜，前述硬質被膜之最表面具有表面層； 前述表面層由單一組成層或奈米薄膜交互層構成，前述單一組成層係由前述A組成、前述B組成、及前述C組成中之任1個組成所構成，前述奈米薄膜交互層係使由前述A組成、前述B組成、及前述C組成中之任2個組成所構成且個別膜厚於0.5~500nm範圍內之2種奈米薄膜層交互積層而成； 並且，前述表面層之膜厚於0.5~1000nm範圍內。If the hard coating according to any one of claims 1 to 4, the outermost surface of the hard coating has a surface layer; The surface layer is composed of a single composition layer or a nano-film interaction layer. The single composition layer is composed of any one of the A composition, the B composition, and the C composition. The nano-film interaction layer is It is made up of two kinds of nano thin film layers composed of any one of the foregoing composition A, the foregoing composition B, and the foregoing composition C, and each having an individual film thickness in the range of 0.5 to 500 nm; In addition, the film thickness of the surface layer is in the range of 0.5 to 1000 nm. 如請求項1至5中任1項之硬質被膜，其中被膜硬度(HV0.025)於2700~3300(HV)範圍內。The hard coating according to any one of claims 1 to 5, wherein the coating hardness (HV0.025) is in the range of 2700~3300 (HV). 一種硬質被膜被覆構件，係母材表面之一部分或全部被硬質被膜被覆者，前述硬質被膜係如請求項1至6中任1項之硬質被膜。A hard film-coated member in which a part or all of a surface of a base material is covered with a hard film, and the hard film is a hard film according to any one of claims 1 to 6. 如請求項7之硬質被膜被覆構件，前述硬質被膜被覆構件係斷續切削工具，可使其繞著軸心旋轉，且刀刃會隨著旋轉而斷續地進行切削加工。According to the hard film-coated member of claim 7, the hard film-coated member is an intermittent cutting tool, which can be rotated around the axis, and the cutting edge can be cut intermittently with the rotation.
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