TW202008025A - Optical measuring device and optical measuring method - Google Patents

Optical measuring device and optical measuring method Download PDF

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TW202008025A
TW202008025A TW107125212A TW107125212A TW202008025A TW 202008025 A TW202008025 A TW 202008025A TW 107125212 A TW107125212 A TW 107125212A TW 107125212 A TW107125212 A TW 107125212A TW 202008025 A TW202008025 A TW 202008025A
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light
measured
optical
light source
light spot
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TW107125212A
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TWI661222B (en
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陳怡然
黃彥融
李聿揚
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南方科技股份有限公司
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Abstract

The present invention provides an optical measuring device for operating an optical measuring method to measure and observe an object. The optical measuring device includes a light source, a scanner, and a light sensor. The light emitted from the light source is guided to the object by the scanner. The light sensor then receives the light scattered from the object. The exciting point of the sample is continuously varying during the sensing period of the light sensor. Thus, phototoxic or photobleaching of each single detecting point of the object caused by excessively irradiating can be prevented. Stability of the object and reliability of the measuring result are enhanced.

Description

光學測量器與光學測量方法 Optical measuring instrument and optical measuring method

本發明是關於一種光學測量器及光學測量方法，可用於測量待測物的光學性質並可於重複測量後組成一顯微影像。 The invention relates to an optical measuring device and an optical measuring method, which can be used to measure the optical properties of an object to be measured and can form a microscopic image after repeated measurement.

顯微鏡能夠協助研究人員或工程人員從微觀尺度觀察各種材料及其構造，對於材料科學、奈米技術與生物技術而言是極為重要的研究工具，其中，晚近發展的雷射共軛焦顯微鏡更是今日尖端技術的重要推手。 Microscopes can assist researchers or engineers to observe various materials and their structures from a microscopic scale. They are extremely important research tools for materials science, nanotechnology, and biotechnology. Among them, the recently developed laser conjugate microscope is even more An important promoter of today's cutting-edge technology.

雷射共軛焦顯微鏡是將待測物置於光學系統的焦點，並將雷射光照射於待測物，雷射光的光點於待測物反射後，會恰於光學系統的另側焦點成像，藉由設置在另側焦點處的針孔可以濾除由光點處之外的其他位置反射的反射光或漫射光，再以光譜儀收集並分析通過針孔的光線，即可測得光點處待測物的反射光，隨後，再以逐點測量、依深度逐層測量方式即可進一步將測得的數據組合成三維立體的待測物顯微影像。 The laser conjugate microscope is to place the object to be measured at the focus of the optical system, and irradiate the laser light to the object to be measured. After the laser light spot is reflected by the object to be measured, it will be imaged at the other focus of the optical system. The pinhole at the other focal point can filter out the reflected light or diffused light reflected from other positions than the light spot, and then collect and analyze the light passing through the pinhole with a spectrometer to measure the light spot The reflected light of the object to be measured can then be combined into a three-dimensional microscopic image of the object to be measured by point-by-point measurement and depth-by-layer measurement.

然而，在上述建立待測物顯微影像的過程中，待測物卻常受到雷射光影響而變質，發生光毒害(phototoxic)或光漂白(photo bleaching)的現象，一旦待測物發生光漂白，將使雷射光在待測物反射後的反射光性質改變，可能會影響該點像素或鄰近像素影像的正確性，同時還會影響同一 位置不同深度處的影像的正確性，使顯微影像的取得與使用有所侷限。 However, in the above process of establishing the microscopic image of the test object, the test object is often deteriorated by the influence of laser light, and phototoxic or photo bleaching occurs. Once the test object undergoes photobleaching , Will change the reflected light properties of the laser light after being reflected by the test object, which may affect the accuracy of the image of the pixel or adjacent pixels, and also affect the accuracy of the images at different depths in the same position, making the microscopic image Access and use are limited.

本發明的其中一項目的在於提供一種光學測量器或光學測量方法，能減少或避免在取得顯微影像過程中所發生的光毒害或光漂白的現象。 One of the objects of the present invention is to provide an optical measuring device or optical measuring method, which can reduce or avoid the phenomenon of phototoxicity or photobleaching that occurs in the process of obtaining a microscopic image.

為了達成上述及其他目的，本發明提供一種光學測量器，包括一光源、一掃描裝置與一感光裝置，該光源能發出一主動光線，該掃描裝置能接收該主動光線並使其朝向一待測面照射，該主動光線朝向該待測面照射而在該待測面形成一光點，該主動光線朝向該待測面照射時該光點發出一被動光線，該掃描裝置能改變該主動光線的光軸而使該光點於該待測面中的至少二受測位置之間移動，該感光裝置於一積分時間中接收該被動光線，該感光裝置接收該被動光線後輸出一輸出訊號，於該積分時間中該光點移動而至少經過該二受測位置。 In order to achieve the above and other objects, the present invention provides an optical measuring device including a light source, a scanning device and a photosensitive device, the light source can emit an active light, and the scanning device can receive the active light and direct it toward a test object Surface irradiation, the active light is irradiated toward the surface to be measured to form a light spot on the surface to be measured, the active light is emitted toward the surface to be measured, the light point emits a passive light, the scanning device can change the active light The optical axis moves the light spot between at least two measured positions in the surface to be measured. The photosensitive device receives the passive light during an integration time. The photosensitive device outputs an output signal after receiving the passive light. In the integration time, the light spot moves and passes at least the two measured positions.

為了達成上述及其他目的，本發明還提供一種光學測量方法，係利用一掃描裝置將一光源發出的一主動光線導引朝向一待測面照射，而在該待測面形成一光點，且一被動光線自該光點離開，操作該掃描裝置改變該主動光線的光軸而使該光點的位置在至少二受測位置之間移動，利用一感光裝置於一積分時間中接收該光點移動經過至少該二受測位置時自該光點離開的被動光線並輸出一輸出訊號。 In order to achieve the above and other objects, the present invention also provides an optical measurement method that uses a scanning device to direct an active light emitted from a light source toward a surface to be measured, and forms a light spot on the surface to be measured, and A passive light exits from the light spot, operates the scanning device to change the optical axis of the active light to move the position of the light spot between at least two measured positions, and receives the light spot in an integration time using a photosensitive device The passive light exiting from the light spot when moving past at least the two tested positions and output an output signal.

在某些情況中，該光點在該積分時間中位在該待測面中的每一受測位置的時間不大於一毫秒。 In some cases, the time when the light spot is located at each measured position in the surface to be measured in the integration time is not greater than one millisecond.

在某些情況中，該光點在該積分時間中於該待測面中的位置 不斷地持續移動。 In some cases, the position of the light spot in the surface to be measured continuously moves during the integration time.

在某些情況中，該光源為點光源，於該光源與該掃描裝置之間設置一光學系統，該光學系統能接收該主動光線並使其在該待測面聚焦。 In some cases, the light source is a point light source. An optical system is provided between the light source and the scanning device. The optical system can receive the active light and focus it on the surface to be measured.

藉此，本發明提供的光學測量器可用於測量待測物的光學性質，將待測物放置於待測面即可在待測物表面形成光點，並藉由感光裝置收集從光點離開的被動光線進行量測，其中由於在感光裝置的積分時間中，主動光線的照射位置或光點的位置能夠移動，可以避免主動光線持續長時間照射於待測物的同一位置，將待測物表面任意單點或待測點的受光時間與受光能量大幅降低，從而避免或減少待測物發生光毒害或光漂白的機會。 In this way, the optical measuring device provided by the present invention can be used to measure the optical properties of the object to be measured, place the object to be measured on the surface to form a light spot on the surface of the object to be measured, and collect the light from the light spot by the photosensitive device The passive light is measured, because during the integration time of the photosensitive device, the position of the active light irradiation or the position of the light spot can be moved, which can avoid the active light continuously irradiating the same position of the object to be measured for a long time. The light-receiving time and light-receiving energy of any single point or point to be measured on the surface are greatly reduced, thereby avoiding or reducing the chance of phototoxicity or photobleaching of the test object.

10‧‧‧光源 10‧‧‧Light source

11‧‧‧主動光線 11‧‧‧ Active light

12‧‧‧被動光線 12‧‧‧ Passive light

13‧‧‧光點 13‧‧‧spot

20‧‧‧掃描裝置 20‧‧‧ Scanning device

21‧‧‧第一掃描鏡 21‧‧‧ First scanning mirror

22‧‧‧第二掃描鏡 22‧‧‧second scanning mirror

23‧‧‧第三掃描鏡 23‧‧‧ Third scanning mirror

30‧‧‧感光裝置 30‧‧‧Photosensitive device

40‧‧‧光學系統 40‧‧‧Optical system

41‧‧‧光學模組 41‧‧‧Optical Module

411‧‧‧遮光板 411‧‧‧ Shading board

412‧‧‧反射鏡 412‧‧‧Reflecting mirror

413‧‧‧凸透鏡 413‧‧‧Convex lens

414‧‧‧分光鏡 414‧‧‧Spectroscope

42‧‧‧物鏡模組 42‧‧‧Objective module

50‧‧‧處理系統 50‧‧‧ processing system

90‧‧‧待測物 90‧‧‧ test object

91‧‧‧待測面 91‧‧‧surface to be measured

92、93‧‧‧受測位置 92, 93‧‧‧ tested position

94‧‧‧移動範圍 94‧‧‧Movement range

95‧‧‧移動路徑 95‧‧‧Moving path

第1圖為本發明光學測量器的系統示意圖。 Fig. 1 is a schematic diagram of the system of the optical measuring device of the present invention.

第2圖為本發明光學測量器之待測面的示意圖。 FIG. 2 is a schematic diagram of the surface to be measured of the optical measuring device of the present invention.

第3圖為本發明光學測量器中掃描裝置之示意圖。 Fig. 3 is a schematic diagram of the scanning device in the optical measuring device of the present invention.

第4圖為本發明光學測量器的測量狀態示意圖。 Fig. 4 is a schematic diagram of the measuring state of the optical measuring instrument of the present invention.

第5圖為本發明光學測量器的另一測量狀態示意圖。 Fig. 5 is a schematic diagram of another measurement state of the optical measuring instrument of the present invention.

請參考第1圖，本實施例提供一種光學測量器，包括一光源10、一掃描裝置20與一感光裝置30，並可進一步包括一光學系統40與一處理系統50，用以測量待測物90，以取得待測物90的光學性質或影像。本實施例之光學測量器係朝向一待測面91進行測量，於測量待測物90時，需將 待測物90放置於待測面91，待測面91具體而言可能是一假想面或一待測物載台，也可能是玻璃或類似之透明物質的表面，以放置待測物90並緊貼於其上。 Please refer to FIG. 1, this embodiment provides an optical measuring instrument, including a light source 10, a scanning device 20 and a photosensitive device 30, and may further include an optical system 40 and a processing system 50 for measuring the object to be measured 90 to obtain the optical property or image of the object to be measured 90. The optical measuring device of this embodiment measures toward a surface to be measured 91. When measuring the object to be measured 90, the object to be measured 90 needs to be placed on the surface to be measured 91. The surface to be measured 91 may specifically be an imaginary surface Or a test object carrier, which may also be a surface of glass or a similar transparent substance, to place the test object 90 and cling to it.

該光源10能發出一主動光線11，以照射待測物90，使待測物90反射光線、透射光線或激發螢光或散射光，而從待測物90發出被動光線12，在本實施例中，係利用待測物90反射的光線進行測量，被動光線12即為待測物90的反射光。較佳者，光源10為點光源，該光源10例如是雷射光源，可以依待測物90的種類及測量目的選用不同波長的雷射光源。 The light source 10 can emit an active light 11 to irradiate the object under test 90, so that the object under test 90 reflects light, transmits light, or excites fluorescent or scattered light, and emits passive light 12 from the object under test 90. In this embodiment In this case, the light reflected by the test object 90 is used for measurement, and the passive light 12 is the reflected light of the test object 90. Preferably, the light source 10 is a point light source. The light source 10 is, for example, a laser light source. Laser light sources with different wavelengths can be selected according to the type of the object to be measured 90 and the measurement purpose.

該掃描裝置20例如是TW I563288號專利中所述的光學影像掃描組件，位於主動光線11的光軸中，能接收光源10發出的主動光線11並使其朝向待測面91照射，如第2圖所示，於待測面91產生一光點13，該光點13實際上為主動光線11與待測面91的交會點或主動光線照射於待測物90時形成的光點，當未放置待測物90時，待測面91可能僅為假想面，無物質能反射主動光線11，而使光點13不能為肉眼所見。主動光線11朝向待測面91照射時，放置於待測面91的待測物90能反射主動光線11而產生被動光線12，並從光點13射出，掃描裝置20能改變主動光線11與被動光線12的光軸，使光點13於待測面91中任意兩個或數個受測位置之間移動。更詳細地說，請參考第1圖至第3圖，該掃描裝置20可包括一第一掃描鏡21與一第二掃描鏡22，該第一掃描鏡21可以是微機電元件，例如共振鏡元件或者可為旋轉式多面鏡(rotational polygon mirror)，第一掃描鏡21以一第一共振頻率繞一第一方向為軸轉動，第二掃描鏡22例如是電流鏡(galvano mirror)單元，第二掃描鏡22以一第二共振頻率繞一第二方向為軸轉動，第一方向與第二方向不 同，較佳者，第一方向與第二方向相互垂直，例如第一方向為z軸方向，第二方向為x軸方向，可藉由第一掃描鏡21控制光點在待測面91中的x軸位置，並藉由第二掃描鏡22控制光點在待測面91中的y軸位置，第一共振頻率例如是311赫茲，第二共振頻率例如是191赫茲，第一掃描鏡21將主動光線11朝向第二掃描鏡22反射，使主動光線11直接照射於第二掃描鏡22或經由另一第三掃描鏡23反射至第二掃描鏡22，第二掃描鏡22再將主動光線11朝向待測面91反射，使主動光線11朝向待測面91照射，藉由第一掃描鏡21與第二掃描鏡22的轉動，將使主動光線11受到不同角度的反射，改變主動光線11的光軸位置與角度，從而改變光點13在待測面91中的位置；當第一掃描鏡21與第二掃描鏡22持續轉動時，光點13將會在待測面91中不斷地持續移動。需一併說明的是，第3圖僅為說明示意使用而將待測面91繪示於第二掃描鏡22旁，在本實施例中如第1圖所示，第二掃描鏡22與待測面91之間仍有另一物鏡模組42，藉以將主動光線11匯聚於待測面91。 The scanning device 20 is, for example, the optical image scanning component described in TW I563288. It is located in the optical axis of the active light 11 and can receive the active light 11 emitted by the light source 10 and irradiate it toward the surface to be measured 91, as in the second As shown in the figure, a light spot 13 is generated on the surface to be measured 91. The light spot 13 is actually the intersection point of the active light 11 and the surface to be measured 91 or the light spot formed when the active light is irradiated on the object to be measured 90. When the object to be measured 90 is placed, the surface to be measured 91 may only be an imaginary surface, and no substance can reflect the active light 11, so that the light spot 13 cannot be seen by the naked eye. When the active light 11 is irradiated toward the surface-to-be-measured 91, the object 90 placed on the surface-to-be-measured 91 can reflect the active light 11 to generate the passive light 12, and emerge from the light spot 13, the scanning device 20 can change the active light 11 and the passive light 11 The optical axis of the light beam 12 causes the light spot 13 to move between any two or several measured positions in the surface 91 to be measured. In more detail, please refer to FIGS. 1 to 3, the scanning device 20 may include a first scanning mirror 21 and a second scanning mirror 22, the first scanning mirror 21 may be a micro-electromechanical device, such as a resonant mirror The element may be a rotating polygon mirror (rotational polygon mirror). The first scanning mirror 21 rotates around a first direction at a first resonance frequency. The second scanning mirror 22 is, for example, a galvano mirror unit. The two scanning mirrors 22 rotate around a second direction as an axis at a second resonance frequency. The first direction is different from the second direction. Preferably, the first direction and the second direction are perpendicular to each other, for example, the first direction is the z-axis direction , The second direction is the x-axis direction, the x-axis position of the light spot in the surface 91 to be measured can be controlled by the first scanning mirror 21, and the y of the light spot in the surface 91 to be measured can be controlled by the second scanning mirror 22 Axis position, the first resonance frequency is, for example, 311 Hz, and the second resonance frequency is, for example, 191 Hz, the first scanning mirror 21 reflects the active light 11 toward the second scanning mirror 22, so that the active light 11 directly illuminates the second scanning mirror 22 Or reflected by another third scanning mirror 23 to the second scanning mirror 22, the second scanning mirror 22 then reflects the active light 11 toward the surface to be measured 91, so that the active light 11 is irradiated toward the surface to be measured 91, by the first scan The rotation of the mirror 21 and the second scanning mirror 22 will cause the active light 11 to be reflected at different angles, changing the position and angle of the optical axis of the active light 11, thereby changing the position of the light spot 13 in the surface 91 to be measured; when the first When the scanning mirror 21 and the second scanning mirror 22 continue to rotate, the light spot 13 will continue to move in the surface to be measured 91. It should be noted that FIG. 3 is for illustrative purposes only, and the surface to be measured 91 is shown next to the second scanning mirror 22. In this embodiment, as shown in FIG. There is still another objective lens module 42 between the measurement plane 91, so as to converge the active light 11 on the measurement plane 91.

該感光裝置30例如是光譜儀，並可於感光裝置30前方設置一針孔板，能經由針孔板的針孔接收被動光線12，並能於一段積分時間中接收被動光線12，再依接收的被動光線12輸出一輸出訊號，感光裝置可受控制以調整積分時間的長短，舉例而言，積分時間的長度可以是10毫秒、1毫秒或小於1毫秒；在積分時間中，光點13會在待測面91的至少兩個相鄰位置之間移動，例如是在一個指定的10微米見方的區域內移動或是任意的指定或不指定的區域內移動，換言之，在每一積分時間中，待測面中91的任一位置受到主動光線11照射的時間可能會低於1毫秒，較佳者，光點13在兩個相互遠離的受測位置之間移動、移動經過數個受測位置，或者在一指定的 面域中移動，舉例而言，請參考第4圖，如果積分時間為1毫秒，第一共振頻率與第二共振頻率均為2K赫茲，積分時間的倒數為0.1K，第一共振頻率與第二共振頻率對積分時間的倒數的比值為2，光點13將移動經過兩受測位置92、93，並且在其間移動4次，藉由控制第一共振頻率、第二共振頻率與積分時間之間的相對關係，可以決定積分時間中光點13在待測面91所移動經過的受測位置。 The photosensitive device 30 is, for example, a spectrometer, and a pinhole plate can be provided in front of the photosensitive device 30, which can receive the passive light 12 through the pinhole of the pinhole plate, and can receive the passive light 12 during an integration time, and then depending on the received The passive light 12 outputs an output signal, and the photosensitive device can be controlled to adjust the length of the integration time. For example, the length of the integration time can be 10 milliseconds, 1 millisecond, or less than 1 millisecond; in the integration time, the light spot 13 will be The movement between at least two adjacent positions of the surface 91 to be measured is, for example, a specified area of 10 microns square or any specified or unspecified area, in other words, during each integration time, The time when any position of 91 in the surface to be measured is irradiated by the active light 11 may be less than 1 millisecond. Preferably, the light spot 13 moves between two measured positions far away from each other and passes through several measured positions , Or move in a specified area, for example, please refer to Figure 4, if the integration time is 1 millisecond, the first resonance frequency and the second resonance frequency are both 2K Hz, and the reciprocal of the integration time is 0.1K, The ratio of the first resonant frequency and the second resonant frequency to the reciprocal of the integration time is 2, the light spot 13 will move through the two measured positions 92, 93, and move between them 4 times, by controlling the first resonant frequency, the second The relative relationship between the resonance frequency and the integration time can determine the measured position of the light spot 13 moving on the surface to be measured 91 during the integration time.

請參考第1圖，光學系統40包括光學模組41與物鏡模組42，光學模組41包括遮光板411(shutter)、二反射鏡412、一凸透鏡413以及一分光鏡414，遮光板411可用以控制主動光線11是否可射入，可透過電訊號控制遮光板411的開與關，當遮光板411開啟時，主動光線11將會通過遮光板411，反射鏡412、凸透鏡413以及分光鏡414可以將主動光線11反射、導引傳遞至掃描裝置20。當遮光板411關閉時，主動光線11則會被遮光板411阻擋。光學模組41設置於光源10與掃描裝置20之間，物鏡模組42則設置於掃描裝置20與待測面91之間，光學模組41兩側的焦點分別位於待測面91與感光裝置30，藉此可將主動光線聚焦於待測面，並將光點成像於針孔板或感光裝置30。 Please refer to FIG. 1, the optical system 40 includes an optical module 41 and an objective lens module 42. The optical module 41 includes a shading plate 411 (shutter), two reflecting mirrors 412, a convex lens 413 and a dichroic mirror 414. The shading plate 411 can be used To control whether the active light 11 can enter, the opening and closing of the shading plate 411 can be controlled through an electrical signal. When the shading plate 411 is opened, the active light 11 will pass through the shading plate 411, the reflecting mirror 412, the convex lens 413, and the beam splitter 414 The active light 11 can be reflected, guided and transmitted to the scanning device 20. When the shading plate 411 is closed, the active light 11 is blocked by the shading plate 411. The optical module 41 is disposed between the light source 10 and the scanning device 20, the objective lens module 42 is disposed between the scanning device 20 and the surface to be measured 91, and the focal points on both sides of the optical module 41 are respectively located on the surface to be measured 91 and the photosensitive device 30, so that the active light can be focused on the surface to be measured, and the light spot can be imaged on the pinhole plate or the photosensitive device 30.

請參考第5圖，在本發明可能的實施例中，可以控制第一掃描鏡與第二掃描鏡在各別指定的角度之間往復式旋轉作動，從而控制光點13在待測面91中的移動範圍94與移動路徑95，藉此，在一次測量中能夠以該移動範圍94所測量獲得的數值為一組數據或一組像素，進行逐點(point by point)或逐區域測量，在本實施例中，該移動範圍的大小例如是10微米見方。 Please refer to FIG. 5, in a possible embodiment of the present invention, the first scanning mirror and the second scanning mirror can be controlled to reciprocate and rotate between respective designated angles, thereby controlling the light spot 13 in the surface 91 to be measured Moving range 94 and moving path 95, by which the value measured by the moving range 94 can be used as a set of data or a group of pixels in a measurement to perform point-by-point (point by point) or area-by-area measurement. In this embodiment, the size of the moving range is, for example, 10 microns square.

處理系統50連接於感光裝置30，可接收感光裝置30的輸出訊 號，將輸出訊號進一步處理，並以逐點測量、紀錄的方式，將輸出訊號組合成顯微影像。 The processing system 50 is connected to the photosensitive device 30, and can receive the output signal of the photosensitive device 30, further process the output signal, and combine the output signal into a microscopic image in a point-by-point measurement and recording manner.

利用上述裝置，當使用者欲進行光學測量以取得待測物的顯微影像或光學性質時，可先後啟動光源10與掃描裝置20，並將待測物90置放於待測面91，掃描裝置20即可將光源10發出的主動光線11導引朝向待測面91照射，於待測面91或待測物90顯現出一光點，並使光點在二受測位置之間或選定的受測範圍內移動，主動光線11在光點處受到待測物90反射，由光點發出反射後之被動光線12，再由感光裝置30接收被動光線12並產生輸出訊號，以處理系統50接收輸出訊號並進行訊號處理或影像處理，從而獲得使用者所需的顯微影像或欲測量的光學性質。 With the above device, when the user wants to perform optical measurement to obtain the microscopic image or optical properties of the object to be measured, the user can activate the light source 10 and the scanning device 20 successively, and place the object to be measured 90 on the surface 91 to be scanned The device 20 can direct the active light 11 emitted by the light source 10 to illuminate the surface to be measured 91, a light spot appears on the surface to be measured 91 or the object to be measured 90, and the light spot can be selected between the two measured positions Moves within the measured range of the active light 11 is reflected by the object under test 90 at the light spot, and the reflected passive light 12 is emitted from the light spot, and then the passive light 12 is received by the photosensitive device 30 and generates an output signal to process the system 50 Receive the output signal and perform signal processing or image processing to obtain the microscopic image or optical properties to be measured by the user.

在前述測量的過程中，主動光線11照射在待測物表面的位置受到掃描裝置20的作用而改變、移動，在感光裝置的積分時間中，光點的位置會在一線段或一指定面域中移動，而不會停留照射單一定點，可避免或減少待測物的單一點持續受到主動光線照射而發生光毒害或光漂白的現象，而能減少測量過程對待測物性質的影響，維持待測物性質的恆定，有助於取得穩定正確的測量結果。 During the aforementioned measurement process, the position of the active light 11 irradiated on the surface of the object to be measured is changed and moved by the action of the scanning device 20. During the integration time of the photosensitive device, the position of the light spot will be in a line segment or a specified area Move in the middle without staying at a certain point of irradiation, which can avoid or reduce the single point of the object to be continuously exposed to active light and cause phototoxicity or photobleaching, and can reduce the influence of the nature of the object to be measured during the measurement process The constant nature of the measured object helps to obtain stable and accurate measurement results.

上述實施例中，光學測量器實質上為一部共軛焦顯微裝置，主動光線受光學系統作用而聚焦於待測面，由待測面反射出的被動光線則被聚焦成像於感光裝置或感光裝置前方的針孔，然而，若改將主動光線的光軸繞過光學系統或省略光學系統，僅以掃描裝置導引主動光線的光軸，或者將感光裝置改為收集主動光線於待測物激發的螢光或散射的拉曼光，進一步將光學測量器改為其他形式之顯微裝置，例如全內角反射螢光顯微 鏡，亦屬可能。 In the above embodiment, the optical measuring device is essentially a conjugate focal microscope device, the active light is focused by the optical system on the surface to be measured, and the passive light reflected from the surface to be measured is focused and imaged on the photosensitive device or the photosensitive device The pinhole in the front, however, if the optical axis of the active light is bypassed or the optical system is omitted, only the optical axis of the active light is guided by the scanning device, or the photosensitive device is changed to collect the active light to excite the test object Fluorescence or scattered Raman light, it is also possible to further change the optical measuring device to other forms of microscopic devices, such as a total internal angle reflection fluorescence microscope.

總結以上說明，上述實施例的光學測量器能夠降低待測物發生光毒害與光漂白現象的機會，提高待測物樣品性質的穩定性，從而獲得穩定正確的測量結果，實為學界與業界人士所企盼，惟以上實施例僅在於說明並闡述本發明的技術內容，本發明的專利範圍應以本發明的申請專利範圍為準。 To sum up the above description, the optical measuring device of the above embodiment can reduce the chance of phototoxicity and photobleaching of the analyte, improve the stability of the properties of the analyte sample, and obtain stable and accurate measurement results. It is expected that the above embodiments are merely to illustrate and explain the technical content of the present invention, and the patent scope of the present invention shall be subject to the patent application scope of the present invention.

13‧‧‧光點 13‧‧‧spot

90‧‧‧待測物 90‧‧‧ test object

91‧‧‧待測面 91‧‧‧surface to be measured

94‧‧‧移動範圍 94‧‧‧Movement range

95‧‧‧移動路徑 95‧‧‧Moving path

Claims (8)

一種光學測量器，包含：一光源，能發出一主動光線；一掃描裝置，該掃描裝置能接收該主動光線並使其朝向一待測面照射，該主動光線朝向該待測面照射而使該待測面產生一光點，該主動光線朝向該待測面照射時一被動光線自該光點射出，該掃描裝置能改變該主動光線的光軸而使該光點於該待測面中的至少二受測位置之間移動；一感光裝置，能接收該被動光線，該感光裝置於一積分時間中接收該被動光線，該感光裝置接收該被動光線後輸出一輸出訊號；其中，於該積分時間中該光點移動而至少經過該二受測位置。 An optical measuring instrument includes: a light source capable of emitting an active light; a scanning device capable of receiving the active light and irradiating it toward a surface to be measured, and illuminating the active light towards the surface to be measured A light spot is generated on the surface to be measured, a passive light is emitted from the light spot when the active light is irradiated toward the surface to be measured, the scanning device can change the optical axis of the active light to make the light spot in the surface to be measured Moving between at least two measured positions; a photosensitive device capable of receiving the passive light, the photosensitive device receiving the passive light during an integration time, the photosensitive device outputting an output signal after receiving the passive light; wherein, at the integration In time, the light spot moves and passes at least the two measured positions. 如申請專利範圍第1項所述的光學測量器，其中於該積分時間中，該光點位在該待測面中的每一受測位置的時間不大於一毫秒。 The optical measuring device as described in item 1 of the patent application range, wherein in the integration time, the time at which the light spot is located at each measured position in the surface to be measured is not more than one millisecond. 如申請專利範圍第1項所述的光學測量器，其中於該積分時間中，該光點於該待測面中不斷地持續移動。 The optical measuring device as described in item 1 of the patent application scope, wherein during the integration time, the light spot continuously moves in the surface to be measured. 如申請專利範圍第1至3項中任一項所述的光學測量器，其中更包含一光學系統，該光源為點光源，該光學系統設置於該光源與該待測面之間，該光學系統能接收該主動光線並使其在該待測面聚焦。 The optical measuring device according to any one of the items 1 to 3 of the patent application scope, which further includes an optical system, the light source is a point light source, the optical system is disposed between the light source and the surface to be measured, the optical The system can receive the active light and focus it on the surface to be measured. 一種光學測量方法，係利用一掃描裝置將一光源發出的一主動光線導引朝向一待測面照射，而使該待測面顯現出一光點，該光點發出一被動光線，該掃描裝置改變該主動光線的光軸而使該光點的位置在至少二受測位置之間移動，利用一感光裝置於一積分時間中接收該光點移動經過至少該二受測位置時發出的被動光線並輸出一輸出訊號。 An optical measurement method uses a scanning device to direct an active light emitted from a light source toward a surface to be measured, so that the surface to be measured shows a light spot, and the light point emits a passive light. The scanning device Change the optical axis of the active light to move the position of the light spot between at least two measured positions, and use a photosensitive device to receive the passive light emitted when the light spot moves past the at least two measured positions in an integration time And output an output signal. 如申請專利範圍第5項所述的光學測量方法，其中於該積分時間中，該光點位在該待測面中的每一受測位置的時間不大於一毫秒。 The optical measurement method as described in item 5 of the patent application range, wherein in the integration time, the time at which the light spot is located at each measured position in the surface to be measured is not greater than one millisecond. 如申請專利範圍第5項所述的光學測量方法，其中於該積分時間中，該光點於該待測面中不斷地持續移動。 The optical measurement method as described in item 5 of the patent application scope, wherein during the integration time, the light spot continuously moves in the surface to be measured. 如申請專利範圍第5至7項中任一項所述的光學測量器，其中該光源為點光源，於該光源與該待測面之間設置一光學系統，該光學系統能接收該光源發出的光線並使其在該待測面聚焦。 The optical measuring device according to any one of items 5 to 7 of the patent application range, wherein the light source is a point light source, and an optical system is provided between the light source and the surface to be measured, and the optical system can receive the light source And focus it on the surface to be measured.
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