TW201937148A - Method for preparing sample for analysis - Google Patents
Method for preparing sample for analysis Download PDFInfo
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- TW201937148A TW201937148A TW108103794A TW108103794A TW201937148A TW 201937148 A TW201937148 A TW 201937148A TW 108103794 A TW108103794 A TW 108103794A TW 108103794 A TW108103794 A TW 108103794A TW 201937148 A TW201937148 A TW 201937148A
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- Taiwan
- Prior art keywords
- sample
- analysis
- ash
- exchange resin
- cation exchange
- Prior art date
Links
- 238000004458 analytical method Methods 0.000 title claims abstract description 107
- 238000000034 method Methods 0.000 title claims abstract description 57
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 claims abstract description 84
- 239000003729 cation exchange resin Substances 0.000 claims abstract description 83
- 239000002253 acid Substances 0.000 claims abstract description 55
- 239000000243 solution Substances 0.000 claims description 88
- 238000004380 ashing Methods 0.000 claims description 49
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 26
- 239000007864 aqueous solution Substances 0.000 claims description 26
- 239000002516 radical scavenger Substances 0.000 claims description 26
- 238000002360 preparation method Methods 0.000 claims description 21
- 150000001768 cations Chemical class 0.000 claims description 20
- 229910052799 carbon Inorganic materials 0.000 claims description 12
- 229910052796 boron Inorganic materials 0.000 abstract description 44
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract description 43
- 229910052698 phosphorus Inorganic materials 0.000 abstract description 31
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract description 30
- 239000011574 phosphorus Substances 0.000 abstract description 30
- 239000000523 sample Substances 0.000 description 112
- 239000002956 ash Substances 0.000 description 99
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 21
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 20
- 229910021642 ultra pure water Inorganic materials 0.000 description 20
- 239000012498 ultrapure water Substances 0.000 description 20
- 239000003795 chemical substances by application Substances 0.000 description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 238000005406 washing Methods 0.000 description 13
- 238000004090 dissolution Methods 0.000 description 12
- 238000007796 conventional method Methods 0.000 description 11
- 238000000354 decomposition reaction Methods 0.000 description 11
- 229910052697 platinum Inorganic materials 0.000 description 11
- 239000010453 quartz Substances 0.000 description 11
- 229910002804 graphite Inorganic materials 0.000 description 10
- 239000010439 graphite Substances 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 10
- 239000000126 substance Substances 0.000 description 10
- 150000001875 compounds Chemical class 0.000 description 9
- 238000009616 inductively coupled plasma Methods 0.000 description 9
- 239000003957 anion exchange resin Substances 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 229910000019 calcium carbonate Inorganic materials 0.000 description 7
- 229940043430 calcium compound Drugs 0.000 description 7
- 150000001674 calcium compounds Chemical class 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 239000000843 powder Substances 0.000 description 7
- 239000000538 analytical sample Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 5
- 239000000292 calcium oxide Substances 0.000 description 5
- 239000003575 carbonaceous material Substances 0.000 description 5
- 239000002243 precursor Substances 0.000 description 5
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 4
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 4
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910017604 nitric acid Inorganic materials 0.000 description 4
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000012494 Quartz wool Substances 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 3
- 239000011260 aqueous acid Substances 0.000 description 3
- 239000003153 chemical reaction reagent Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000011002 quantification Methods 0.000 description 3
- 238000004445 quantitative analysis Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- BHPQYMZQTOCNFJ-UHFFFAOYSA-N Calcium cation Chemical compound [Ca+2] BHPQYMZQTOCNFJ-UHFFFAOYSA-N 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- 239000012472 biological sample Substances 0.000 description 2
- 229910001424 calcium ion Inorganic materials 0.000 description 2
- ZCCIPPOKBCJFDN-UHFFFAOYSA-N calcium nitrate Chemical compound [Ca+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ZCCIPPOKBCJFDN-UHFFFAOYSA-N 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000013305 food Nutrition 0.000 description 2
- 235000012041 food component Nutrition 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 150000007522 mineralic acids Chemical class 0.000 description 2
- 239000005445 natural material Substances 0.000 description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052702 rhenium Inorganic materials 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- OGGKVJMNFFSDEV-UHFFFAOYSA-N 3-methyl-n-[4-[4-(n-(3-methylphenyl)anilino)phenyl]phenyl]-n-phenylaniline Chemical compound CC1=CC=CC(N(C=2C=CC=CC=2)C=2C=CC(=CC=2)C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=C(C)C=CC=2)=C1 OGGKVJMNFFSDEV-UHFFFAOYSA-N 0.000 description 1
- ZPHQFGUXWQWWAA-UHFFFAOYSA-N 9-(2-phenylphenyl)carbazole Chemical group C1=CC=CC=C1C1=CC=CC=C1N1C2=CC=CC=C2C2=CC=CC=C21 ZPHQFGUXWQWWAA-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 235000002918 Fraxinus excelsior Nutrition 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000001110 calcium chloride Substances 0.000 description 1
- 229910001628 calcium chloride Inorganic materials 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 239000000920 calcium hydroxide Substances 0.000 description 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 229910052800 carbon group element Inorganic materials 0.000 description 1
- 150000001724 carbon group elements Chemical class 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 238000005341 cation exchange Methods 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 238000005119 centrifugation Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 229910052798 chalcogen Inorganic materials 0.000 description 1
- 150000001787 chalcogens Chemical class 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 239000005428 food component Substances 0.000 description 1
- 239000005417 food ingredient Substances 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910021397 glassy carbon Inorganic materials 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 238000005347 high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS) Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 238000010979 pH adjustment Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 description 1
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000005464 sample preparation method Methods 0.000 description 1
- 239000012488 sample solution Substances 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/44—Sample treatment involving radiation, e.g. heat
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
Landscapes
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
- Sampling And Sample Adjustment (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
Description
本發明係關於分析用試料的調製方法。The present invention relates to a method of preparing a sample for analysis.
於半導體相關領域、醫療器具製造領域、食品成分分析領域等各種領域，會有分析試料(原料、食品等待測樣品)所含元素並進行定量的需求產生。因此，必須配合各種分析及定量方法，來適當地調製分析用試料。In various fields such as semiconductor-related fields, medical device manufacturing, and food ingredient analysis, there is a need to analyze and quantify the elements contained in samples (raw materials, food waiting samples). Therefore, it is necessary to appropriately modulate the analysis sample in accordance with various analysis and quantitative methods.
將試料中的微量無機雜質元素，特別是硼及磷進行定量時，作為分析用試料的調製方法，通常係使用微波分解法、灰化法。When a trace amount of inorganic impurity elements, particularly boron and phosphorus, are quantified, a microwave decomposition method or an ashing method is usually used as a preparation method for the sample for analysis.
微波分解法係於密閉系統中以微波來作加熱溶解試料，因此可無損失地將高溫下容易揮發的硼及磷回收以供分析及定量之用。The microwave decomposition method is a method of heating and dissolving a sample by microwave in a closed system, so that boron and phosphorus which are easily volatilized at a high temperature can be recovered without loss for analysis and quantification.
灰化法可不太需要限制（可處理1g以上者），可將幾乎所有的有機物試料分解。The ashing method can be less restricted (it can handle more than 1 g), and almost all organic samples can be decomposed.
作為包含進一步將灰化法改良方法之硼的定量方法，習知技術中，已提供有包含以下(第一步驟)～(第五步驟)步驟的定量方法(專利文獻1)：(第一步驟)於鈣化合物存在下將石墨灰化，以將石墨中的硼捕捉至灰化物中之步驟；(第二步驟)將於第一步驟所得到的灰化物溶解於酸中以得到灰化物水溶液；(第三步驟)將於第二步驟中所得到的灰化物水溶液中所含的硼捕捉至陰離子交換樹脂之步驟；(第四步驟)將於第三步驟中捕捉至陰離子交換樹脂中的硼，溶析至酸性水溶液中以獲得溶析液之步驟；(第五步驟)將第四步驟中所得到的溶析液中的硼藉由電感耦合電漿質量分析法來進行定量之步驟。As a quantitative method including boron which further improves the ashing method, a conventional method includes a quantitative method including the following (first step) to (fifth step) steps (Patent Document 1): (First Step a step of ashing graphite in the presence of a calcium compound to capture boron in the graphite into the ash; (second step) dissolving the ash obtained in the first step in an acid to obtain an aqueous ash solution; (third step) a step of capturing boron contained in the aqueous ash solution obtained in the second step to the anion exchange resin; (fourth step) capturing boron in the anion exchange resin in the third step, a step of dissolving into an acidic aqueous solution to obtain a leach solution; (fifth step) a step of quantifying boron in the eluate obtained in the fourth step by inductively coupled plasma mass spectrometry.
[先前技術文獻]
[專利文獻]
[專利文獻1] 日本特開2008-203122號公報(2008年9月4日公開)[Previous Technical Literature]
[Patent Literature]
[Patent Document 1] Japanese Laid-Open Patent Publication No. 2008-203122 (published on September 4, 2008)
[發明所欲解決問題]
然而，在一般的微波分解法及灰化法等的習知技術當中，存在著如下述的問題。[The problem that the invention wants to solve]
However, among the conventional techniques such as general microwave decomposition method and ashing method, there are problems as described below.
微波分解法當中存有著可處理的試料量受到限制(約0.1g)之問題，以及試料性質所致難以分解之問題。The microwave decomposition method has a problem that the amount of the sample that can be processed is limited (about 0.1 g), and the problem that the nature of the sample is difficult to decompose.
此外，由於習知的灰化法係於開放系統且高溫下進行處理，因此或因元素(特別是硼及磷)而有灰化時可能揮發的問題。Further, since the conventional ashing method is applied to an open system and is treated at a high temperature, there is a problem that it may volatilize when there is ashing due to elements (especially boron and phosphorus).
為了解決此等技術問題，於習知技術中，已開發了定量石墨中硼的方法，其包含如上述般基於灰化法的分析用試料的調製方法(專利文獻1)。專利文獻1當中所記載的技術在解決可處理試料量問題、以及元素揮發問題上相當有用。然而，為了獲得用於分析包含於試料中元素的分析用試料，需要開發更有用的分析用試料之調製方法。In order to solve such technical problems, a method for quantifying boron in graphite has been developed, and includes a method for preparing a sample for analysis based on the ashing method as described above (Patent Document 1). The technique described in Patent Document 1 is quite useful in solving the problem of the amount of sample that can be processed and the problem of element volatilization. However, in order to obtain an analysis sample for analyzing an element contained in a sample, it is necessary to develop a more useful preparation method of the analysis sample.
例如，於專利文獻1當中，石墨中的可定量元素為硼，專利文獻1的技術並非用於硼以外之定量的技術。For example, in Patent Document 1, the quantifiable element in graphite is boron, and the technique of Patent Document 1 is not a technique for quantification other than boron.
本發明的一實施型態係有鑑於上述問題點，將目的設定為提供一種新穎的分析用試料的調製方法，可不限定於硼及/或磷，而將包含於試料中的元素進行簡便的分析。In view of the above problems, an object of the present invention is to provide a novel method for preparing an analytical sample, which is not limited to boron and/or phosphorus, and allows easy analysis of elements contained in a sample. .
[解決問題之手段]
也就是說，本發明的一實施型態之分析用試料的調製方法，其特徵為：該調製方法係用於分析包含於試料當中的元素，且包含：灰化步驟，於捕捉劑存在下將該試料進行灰化，以獲得捕捉了該試料中元素的灰化物；酸溶解步驟，藉著將於該灰化步驟當中所獲得的該灰化物溶解於酸中，以獲得灰化物水溶液；陽離子交換樹脂接觸步驟，藉著使該酸溶解步驟中所獲得的該灰化物水溶液與陽離子交換樹脂接觸，以將來自該捕捉劑的元素的陽離子捕捉至陽離子交換樹脂，進而獲得包含該陽離子之元素以外元素的分析溶液。[Means for solving problems]
That is, a method for preparing an analysis sample according to an embodiment of the present invention is characterized in that the modulation method is for analyzing an element contained in a sample, and comprises: an ashing step in the presence of a capturing agent The sample is subjected to ashing to obtain an ash which captures an element in the sample; an acid dissolution step by which the ash obtained in the ashing step is dissolved in an acid to obtain an ash aqueous solution; cation exchange a resin contacting step of contacting the cation aqueous solution obtained in the acid dissolving step with a cation exchange resin to capture a cation of an element derived from the scavenger to a cation exchange resin, thereby obtaining an element other than the element containing the cation Analytical solution.
[發明之功效]
根據本發明一實施型態，可達到以下功效：提供一種分析用試料，可將在不限定於硼及/或磷情況下將包含於試料中的元素進行簡便的分析。[Effects of the invention]
According to an embodiment of the present invention, it is possible to provide an analysis sample in which an element contained in a sample can be easily analyzed without being limited to boron and/or phosphorus.
以下針對本發明一實施型態進行說明，惟，本發明並不限定於此。本發明並不限定於以下所說明的各構成，於申請專利範圍所示範圍內可作各種變更。此外，將本發明於不同實施型態及實施例中分別揭示的技術手段及實施例中分別揭示的技術手段進行適當組合而得出的實施型態及實施例亦包含於本發明技術範圍內。此外，本說明書當中所記載的專利文獻的所有內容均於本說明書中引用為參考文獻。此外，於本說明書中在並未特別記載情形下，用來表示數值範圍的「A～B」係指「A以上(包含A且比A大)B以下(包含B且比B小)」之意。Hereinafter, an embodiment of the present invention will be described, but the present invention is not limited thereto. The present invention is not limited to the respective configurations described below, and various modifications can be made without departing from the scope of the invention. In addition, the embodiments and the embodiments obtained by appropriately combining the technical means disclosed in the different embodiments and the embodiments and the technical means disclosed in the embodiments are also included in the technical scope of the present invention. In addition, all the contents of the patent documents described in the present specification are cited in the present specification as references. In addition, in the case where it is not specifically described in the present specification, "A to B" for indicating the numerical range means "A or more (including A and larger than A) B or less (including B and smaller than B)" meaning.
本發明一實施形態中的分析用試料的調製方法係用於分析包含於試料當中的元素，且其中包含：灰化步驟，於捕捉劑存在下將該試料進行灰化，以獲得捕捉了該試料中元素的灰化物；酸溶解步驟，藉著將於該灰化步驟當中所獲得的該灰化物溶解於酸中，以獲得灰化物水溶液；陽離子交換樹脂接觸步驟，藉著使該酸溶解步驟中所獲得的該灰化物水溶液與陽離子交換樹脂接觸，以將來自該捕捉劑的元素的陽離子捕捉至陽離子交換樹脂，進而獲得包含該陽離子之元素以外元素的分析溶液。A method for preparing an analysis sample according to an embodiment of the present invention is for analyzing an element contained in a sample, and comprising: an ashing step of ashing the sample in the presence of a capturing agent to obtain a captured sample. An ash of an intermediate element; an acid dissolving step by dissolving the ash obtained in the ashing step in an acid to obtain an aqueous ash solution; and a cation exchange resin contacting step by allowing the acid to dissolve in the step The obtained aqueous ash solution is contacted with a cation exchange resin to capture a cation of an element derived from the scavenger to a cation exchange resin, thereby obtaining an analysis solution containing an element other than the element of the cation.
於本說明書當中，將「本發明一實施型態中分析用試料的調製方法」略稱為「本調製方法」。用語「本調製方法」並非任何限定分析用試料的調製方法，僅為表示分析用試料調製方法的一實施型態。In the present specification, the "modulation method of the sample for analysis in one embodiment of the present invention" will be referred to as "the present modulation method". The term "this modulation method" is not a modulation method for limiting the sample for analysis, and is merely an embodiment of the sample preparation method for analysis.
[試料]
本調製方法之對象試料只要是可灰化的試料即可，不須特別限定，可為不含碳試料、含碳試料及此等之組合。[sample]
The sample to be subjected to the preparation method may be a sample that can be ashed, and is not particularly limited, and may be a carbon-free sample, a carbon-containing sample, or a combination thereof.
作為不含碳試料，其為僅含有不含碳之物質的試料。作為不含碳試料，可列舉例如金屬、陶瓷及水溶液等，只要是不含碳者即可，不設限於此等例。As a carbon-free sample, it is a sample containing only a substance containing no carbon. Examples of the carbon-free sample include a metal, a ceramic, an aqueous solution, and the like, and those which do not contain carbon are not limited thereto.
含碳試料係含有含碳物質的試料。作為前述「含碳物質」，可列舉如(1)由石墨、石墨烯、奈米碳管、玻璃碳、碳纖維、炭黑、活性碳等由碳構成之物質；(2)如生物試料之類含碳物質；(3)樹脂、有機化合物、氟樹脂等含碳物質。The carbonaceous sample contains a sample containing a carbonaceous substance. Examples of the "carbonaceous substance" include (1) a substance composed of carbon such as graphite, graphene, a carbon nanotube, glassy carbon, carbon fiber, carbon black, or activated carbon; and (2) a biological sample or the like. Carbonaceous material; (3) Carbonaceous materials such as resins, organic compounds, and fluororesins.
含碳試料只要是含有碳的物質即可，亦可為含有碳的物質及與其他物質所成之複合體(例如石墨複合材料)。此外，含碳試料可為僅含1種含碳物質；亦可包含2種以上。此外，含碳試料可來自天然物質；亦可來自人工物質。關於來自天然物質的含碳試料可包含於例如生物試料、米等穀物。此外，來自於人工物質的含碳試料係包含於例如樹脂等。The carbon-containing sample may be a material containing carbon or a mixture of carbon-containing material and other substances (for example, a graphite composite material). Further, the carbon-containing sample may contain only one type of carbonaceous material; or two or more types may be contained. In addition, the carbon-containing sample may be derived from a natural substance; it may also be derived from an artificial substance. The carbonaceous sample derived from a natural substance may be contained in, for example, a biological sample or a grain such as rice. Further, the carbonaceous sample derived from an artificial substance is contained, for example, in a resin or the like.
本調製方法係如後詳述般包含灰化步驟，即於捕捉劑的存在下灰化試料，以獲得捕捉了試料中元素的灰化物。從有效率地將試料完全灰化的觀點來看，試料係以含碳試料為佳。The present preparation method comprises an ashing step as detailed below, i.e., ashing the sample in the presence of a scavenger to obtain an ash that captures the elements in the sample. From the viewpoint of efficiently ashing the sample completely, the sample is preferably a carbon-containing sample.
本調製方法當中，通常來說試料係以粉末狀態來提供至本調製方法的灰化步驟中。當試料為塊狀或是成形好的物體時，可藉著切削或粉碎試料使其成為粉末狀，而供給至本調製方法的灰化步驟中。因此，於本調製方法當中，試料的型態及其尺寸並不特別受限。In the present preparation method, generally, the sample is supplied to the ashing step of the present preparation method in a powder state. When the sample is a block or a formed object, it can be supplied to the ashing step of the present preparation method by cutting or pulverizing the sample into a powder form. Therefore, in the present modulation method, the type of the sample and its size are not particularly limited.
本調製方法當中，每次的試料使用量通常為0.001g-100g，其中以0.005g-50g為佳；又以0.01g-10g為較佳。In the preparation method, the amount of the sample used per one time is usually 0.001 g to 100 g, preferably 0.005 g to 50 g; more preferably 0.01 g to 10 g.
[灰化步驟]
灰化步驟係藉著於捕捉劑之存在下將試料灰化，以獲得捕捉到試料中元素的灰化物之步驟。[ashing step]
The ashing step ashes the sample by the presence of a scavenger to obtain a step of capturing the ash of the element in the sample.
捕捉劑只要是於灰化步驟當中，可將試料中所含測量對象元素捕捉至灰化物中的化合物即可，並無特別的限制。捕捉劑在灰化步驟當中可不用捕捉灰化物中的所有元素。也就是說，捕捉劑係可將試料中所含硼、磷及硼、磷以外至少一種元素捕捉至灰化物當中的化合物。作為捕捉劑，可僅單獨使用一種類，亦可組合兩種以上化合物來使用。The trapping agent is not particularly limited as long as it is a compound which captures the element to be measured contained in the sample into the ash in the ashing step. The capture agent does not need to capture all of the elements in the ash during the ashing step. That is, the trapping agent is a compound which traps at least one element other than boron, phosphorus, boron, and phosphorus contained in the sample to the ash. As the scavenger, one type may be used alone or two or more types of compounds may be used in combination.
此外，捕捉劑係於後述陽離子交換樹脂接觸步驟當中，來自捕捉劑的元素陽離子被捕捉至陽離子交換樹脂的捕捉劑。藉此可獲得包含該陽離子元素以外元素的分析溶液。Further, the trapping agent is in the step of contacting the cation exchange resin described later, and the elemental cation from the scavenger is captured to the scavenger of the cation exchange resin. Thereby, an analysis solution containing an element other than the cationic element can be obtained.
因此，作為捕捉劑，以使用不包含作為測量對象元素的捕捉劑為佳。捕捉劑係以不包含於試料的硼、磷及硼及磷以外的至少一元素為較佳。Therefore, as the scavenger, it is preferred to use a scavenger which does not contain an element to be measured. The trapping agent is preferably at least one element other than boron, phosphorus, boron and phosphorus which are not contained in the sample.
作為捕捉劑的具體例，可舉例例如包含鹼金屬元素、鹼土類金屬元素(例如鈣)、鑭系元素(例如鑭)等的化合物。此等化合物可1種單獨使用，亦可組合使用2種以上的化合物。Specific examples of the scavenger include compounds such as an alkali metal element, an alkaline earth metal element (for example, calcium), and a lanthanoid element (for example, ruthenium). These compounds may be used alone or in combination of two or more.
此外，化合物可為氧化物。可使用例如較佳的氧化鈣、氧化鑭等。而化合物研判係於灰化步驟中氧化而成為氧化物，而試料中的元素藉著與此氧化物結合而捕捉至灰化物中。因此，化合物係可為藉著在含氧氣氛中進行加熱而氧化為氧化物的氧化物前驅物。作為氧化物前驅物，可列舉例如碳酸鹽、氟化物、氯化物、硝酸鹽、硫酸鹽及氫氧化物等。Further, the compound may be an oxide. For example, preferred calcium oxide, cerium oxide or the like can be used. The compound was judged to be oxidized in the ashing step to become an oxide, and the elements in the sample were captured into the ash by binding to the oxide. Thus, the compound can be an oxide precursor that is oxidized to an oxide by heating in an oxygen-containing atmosphere. Examples of the oxide precursor include carbonates, fluorides, chlorides, nitrates, sulfates, and hydroxides.
作為捕捉劑，就針對試料中所含硼、磷及硼及磷以外至少一元素的良好捕捉能力及取得容易性而言，以使用鈣化合物為佳。As the scavenger, it is preferred to use a calcium compound for the good capturing ability and ease of acquisition of at least one element other than boron, phosphorus, boron and phosphorus contained in the sample.
作為鈣化合物，通常可使用氧化鈣或是其前驅物。氧化鈣的前驅物係可藉由於包含氧氣氛中加熱而氧化成氧化鈣之物。作為氧化鈣的前驅物，具體來說可列舉例如碳酸鈣、氟化鈣、氯化鈣、硝酸鈣、硫酸鈣及氫氧化鈣。此等化合物可僅單獨使用1種；亦可組合使用2種以上。作為鈣化合物，通常使用特級試藥以上等級的粉末狀物。As the calcium compound, calcium oxide or a precursor thereof can usually be used. The precursor of calcium oxide can be oxidized to calcium oxide by heating in an oxygen atmosphere. Specific examples of the precursor of calcium oxide include calcium carbonate, calcium fluoride, calcium chloride, calcium nitrate, calcium sulfate, and calcium hydroxide. These compounds may be used alone or in combination of two or more. As the calcium compound, a powder of a grade higher than that of a special grade reagent is usually used.
於本調製方法當中，作為捕捉劑而包含鈣化合物的情形時，灰化步驟亦可為如下構成。也就是說，灰化步驟係藉著將試料於鈣化合物之存在下灰化，基於試料中的元素結合至氧化鈣(CaO)而獲得捕捉到試料中元素的灰化物的步驟。In the case where the calcium compound is contained as a trapping agent in the present preparation method, the ashing step may be configured as follows. That is, the ashing step is a step of obtaining ash which captures an element in the sample based on the ashing of the sample in the presence of a calcium compound, based on the element in the sample being bonded to calcium oxide (CaO).
捕捉劑的使用量上，只要是在酸溶解步驟中可溶解捕捉劑全部量即可，並不需特別限定，惟相對於試料為一般0.01質量倍-10質量倍的量。The amount of the scavenger used may be any amount that can dissolve the scavenger in the acid dissolving step, and is not particularly limited, but is generally 0.01 to 10 times by mass relative to the sample.
關於在捕捉劑的存在下將試料灰化的處理，可為例如將試料混合至捕捉劑，並將獲得的混合物加熱即可。於灰化步驟當中，較佳地，試料及捕捉劑可為例如於鉑盤、鉑坩堝等類容器當中加熱。而鉑盤、鉑坩堝等類容器係(a)對試料、試料中元素及捕捉劑呈惰性；且(b)具耐熱性。Regarding the treatment of ashing the sample in the presence of a scavenger, for example, the sample may be mixed to a scavenger, and the obtained mixture may be heated. In the ashing step, preferably, the sample and the scavenger may be heated, for example, in a vessel such as a platinum disk or a platinum crucible. The platinum disk, the platinum crucible, and the like are (a) inert to the sample, the element in the sample, and the trapping agent; and (b) have heat resistance.
此外，作為灰化步驟中所使用的容器，可使用如石英玻璃、鈉鈣玻璃、硼矽酸玻璃等的無機玻璃製容器。無機玻璃製容器當中，尤其是考慮金屬雜質少的高純度物質當中可取得者，以石英玻璃為佳。Further, as the container used in the ashing step, an inorganic glass container such as quartz glass, soda lime glass, borosilicate glass or the like can be used. Among the inorganic glass containers, especially those which are considered to be high-purity substances having few metal impurities, quartz glass is preferred.
灰化係在含氧氣氛中；具體來說係氧流通氣氛下、靜止空氣氣氛下、或是空氣流通氣氛下進行，其中，以氧氣流通氣氛下進行為佳。當灰化步驟在氧氣流通氣氛下進行時，為了有效率地使試料灰化，氧氣的流通速度以0.5L/分～3L/分為佳。The ashing is carried out in an oxygen-containing atmosphere; specifically, in an oxygen-flowing atmosphere, a still air atmosphere, or an air-flowing atmosphere, and it is preferably carried out in an oxygen-flowing atmosphere. When the ashing step is carried out in an oxygen-flowing atmosphere, in order to efficiently ash the sample, the flow rate of oxygen is preferably 0.5 L/min to 3 L/min.
為了灰化所作的加熱處理上，可使用可進行溫度控制的具熱電偶溫度計之電爐(蒙孚爐)來進行，亦可僅以燃燒器進行。The heat treatment for ashing may be carried out using an electric furnace (mons furnace) having a thermocouple thermometer which can be temperature-controlled, or may be performed only by a burner.
灰化溫度通常係500℃～1000℃。關於灰化時間，其係基於試料及捕捉量之使用量、進行灰化步驟時氣氛中的氧濃度及加熱溫度而有所差異，可依情況適當設定。於捕捉劑存在下將試料灰化，可藉此獲得將試料中元素捕捉至捕捉劑的灰化物。The ashing temperature is usually from 500 ° C to 1000 ° C. The ashing time varies depending on the amount of the sample and the amount of the captured amount, the oxygen concentration in the atmosphere during the ashing step, and the heating temperature, and may be appropriately set depending on the case. The sample is ashed in the presence of a scavenger, whereby ash which captures the elements in the sample to the scavenger can be obtained.
本備製方法中的灰化步驟中，由於是在捕捉劑存在下將試料灰化，因此，即使試料當中包含高揮發性元素(硼及磷等)的情形下，仍可將該元素捕捉至灰化物中。In the ashing step in the preparation method, since the sample is ashed in the presence of a scavenger, even if the sample contains a highly volatile element (boron, phosphorus, etc.), the element can be captured to In the ash.
本調製方法中的灰化步驟中，可在不使硼及磷揮發情形下，且同時將硼及磷以外的至少一元素捕捉至灰化物中。In the ashing step in the present preparation method, at least one element other than boron and phosphorus can be trapped in the ash without volatilizing boron and phosphorus.
[酸溶解步驟]
酸溶解步驟係藉由將於灰化步驟中所獲得的灰化物溶解於酸中，以獲得灰化物水溶液之步驟。
於溶解灰化物至酸中時，可採例如將酸加入含有灰化物的容器並加熱之方式。[acid dissolution step]
The acid dissolving step is a step of obtaining an aqueous ash solution by dissolving the ash obtained in the ashing step in an acid.
When dissolving the ash into the acid, it is possible, for example, to add the acid to the vessel containing the ash and heat it.
作為酸，只要是可溶解灰化物的酸即可，不需要特別限定。可溶解灰化物的酸當中，又以不會溶解灰化步驟中所使用容器(鉑盤、鉑坩堝、無機玻璃製容器等)的酸為佳。作為此種較佳的酸，可列舉例如鹽酸、硝酸、硫酸、過氧化氫水、過氯酸等的無機酸或是混和此等無機酸之兩種以上的混和酸。藉著使用不會溶解灰化步驟中所使用容器的酸，來將來自容器的金屬雜質混入分析溶液中，可使灰分(也就是灰化物)溶解。此外，酸在一般來說，可使用試藥以上等級之物。此外，酸亦可為酸水溶液。The acid is not particularly limited as long as it is an acid capable of dissolving ash. Among the acids which can dissolve the ash, it is preferred that the acid used in the container (platinum disk, platinum rhodium, inorganic glass container, etc.) used in the ashing step is not dissolved. The preferred acid is, for example, an inorganic acid such as hydrochloric acid, nitric acid, sulfuric acid, hydrogen peroxide or perchloric acid, or a mixed acid of two or more kinds of inorganic acids. The ash (i.e., ash) can be dissolved by mixing the metal impurities from the container into the analysis solution by using an acid which does not dissolve the container used in the ashing step. Further, in general, an acid may be used in a grade above the reagent. Further, the acid may also be an aqueous acid solution.
酸的濃度上並沒有特別限制，可直接使用如濃鹽酸、濃硝酸、濃硫酸等高濃度的酸，亦可以水稀釋來使用。將酸稀釋來使用的情形下，通常係藉由離子交換水或是超純水(比電阻值為18Ω・cm以上的水)來稀釋。The concentration of the acid is not particularly limited, and a high concentration of an acid such as concentrated hydrochloric acid, concentrated nitric acid or concentrated sulfuric acid can be used as it is, or it can be diluted with water. When the acid is diluted and used, it is usually diluted by ion-exchanged water or ultrapure water (water having a specific resistance of 18 Ω·cm or more).
此外，關於所使用的酸的種類，可根據試料中所含元素(即作為測量對象之元素)的種類而適當選擇。只要適當選擇出可溶解試料中可含元素的酸即可。In addition, the type of the acid to be used can be appropriately selected depending on the type of the element contained in the sample (that is, the element to be measured). As long as the acid which can contain the element in the soluble sample can be appropriately selected.
關於溶解灰化物時酸的使用量，只要是可溶解灰化物的全部量即可，並不需要特別限定，一般為相對於灰化物為10質量倍-500質量倍的量。The amount of the acid to be used in dissolving the ash is not particularly limited as long as it is the total amount of the dissolvable ash, and is generally 10 parts by mass to 500 times by mass relative to the ash.
關於將灰化物溶解於酸(酸水溶液)時的溶解溫度，只要是在酸水溶液的凝固點以上且沸點以下即可，不需要特別限定，惟若以可迅速溶解這點來看，以50℃以上為佳。上述溶解溫度亦可稱為當加熱包含灰化物及酸的容器時的加熱溫度。作為用於加熱的裝置可列舉例如加熱器、熱板等。The dissolution temperature in the case where the ash is dissolved in an acid (aqueous acid solution) is not particularly limited as long as it is at least the freezing point of the aqueous acid solution and not more than the boiling point, and is preferably 50 ° C or more in terms of rapid dissolution. It is better. The above dissolution temperature may also be referred to as a heating temperature when a vessel containing ash and acid is heated. Examples of the means for heating include a heater, a hot plate, and the like.
使灰化物溶解於酸時的溶解時間只要是可溶解灰化物全部量的時間即可，不需特別限定。溶解時間也可謂之加熱包含灰化物及酸的容器的加熱時間。The dissolution time when the ash is dissolved in the acid is not particularly limited as long as it is the time at which the entire amount of the ash can be dissolved. The dissolution time can also be said to heat the heating time of the container containing the ash and the acid.
可基於目視觀察來確認基於酸所進行的溶解灰化物處理已結束。具體來說，例如可藉由目視來確認沒有殘渣、沉澱等，或是藉由目視確認離心分離後並無產生沉澱，以確認基於酸的灰化物溶解處理已結束。The dissolution ash treatment based on the acid can be confirmed based on visual observation. Specifically, for example, it is confirmed by visual observation that there is no residue, precipitation, or the like, or it is confirmed by visual observation that no precipitation occurs after centrifugation, and it is confirmed that the acid-based ash dissolution treatment is completed.
所獲得的灰化物水溶液亦可用離子交換水或超純水稀釋。The obtained aqueous ash solution can also be diluted with ion-exchanged water or ultrapure water.
於本調製方法當中的酸溶解步驟中，可獲得包含硼、磷及硼磷以外的至少一元素的灰化物水溶液。In the acid dissolving step in the present preparation method, an aqueous ash solution containing at least one element other than boron, phosphorus and borophosphorus can be obtained.
[陽離子交換樹脂接觸步驟]
陽離子交換樹脂接觸步驟係藉著使酸溶解步驟中所獲得的灰化物水溶液與陽離子交換樹脂接觸，以將來自捕捉劑的陽離子捕捉至陽離子交換樹脂，進而獲得包含陽離子之元素以外元素的分析溶液之步驟。此外，「陽離子元素」亦可稱為「捕捉對象元素」，係來自捕捉劑的元素。[Cation exchange resin contact step]
The cation exchange resin contacting step is performed by contacting an aqueous ash solution obtained in the acid dissolving step with a cation exchange resin to capture a cation from the scavenger to the cation exchange resin, thereby obtaining an analysis solution containing an element other than the element of the cation. step. Further, the "cation element" may also be referred to as a "capture element" and is an element derived from a trapping agent.
於陽離子交換樹脂接觸步驟當中，可藉著使於酸溶解步驟中所獲得的灰化物水溶液與陽離子交換樹脂接觸，而使來自捕捉劑的元素之陽離子捕捉至陽離子交換樹脂。據此可於陽離子交換樹脂接觸步驟當中獲得包含捕捉對象元素以外元素的分析溶液。也就是說，可獲得分析溶液，且其中，被捕捉至捕捉劑(例如捕捉劑的氧化物)的試料中元素，從自捕捉劑的元素之陽離子分離而包含在該分析溶液當中。此外，於陽離子交換樹脂接觸步驟當中，於陽離子交換樹脂接觸步驟當中，不需要將來自捕捉劑的元素之全部的陽離子都捕捉至陽離子交換樹脂中。In the cation exchange resin contacting step, the cation of the element from the capturing agent can be captured to the cation exchange resin by contacting the aqueous ash solution obtained in the acid dissolving step with the cation exchange resin. According to this, an analysis solution containing an element other than the element to be captured can be obtained in the cation exchange resin contacting step. That is, an analysis solution can be obtained, and wherein an element in a sample captured to a capture agent (for example, an oxide of a capture agent) is separated from the cation of the element from the capture agent and contained in the analysis solution. Further, in the cation exchange resin contacting step, in the cation exchange resin contacting step, it is not necessary to capture all of the cations from the elements of the capturing agent into the cation exchange resin.
於本調製方法當中，當作為捕捉劑而包含鈣化合物的情形下，陽離子交換樹脂接觸步驟亦可為如下構成。也就是說，於陽離子交換樹脂接觸步驟可為：藉著使酸溶解步驟中所獲得灰化物水溶液與陽離子交換樹脂接觸，使得包含於灰化物水溶液中的鈣離子被捕捉至陽離子交換樹脂而獲得包含除鈣離子之外元素的分析溶液的步驟。In the case of the present preparation method, when a calcium compound is contained as a trapping agent, the cation exchange resin contacting step may be configured as follows. That is, the step of contacting the cation exchange resin may be: by contacting the aqueous ash solution obtained in the acid dissolving step with the cation exchange resin, so that calcium ions contained in the aqueous solution of the ash are captured to the cation exchange resin to obtain inclusion The step of analyzing the solution of the elements other than calcium ions.
此外，「包含對象元素以外元素的分析溶液」係：包含試料中所含捕捉對象以外元素當中的至少一種類元素的分析溶液。也就是說，並非意指包含在試料中捕捉對象外的所有元素之分析溶液。包含於分析溶液當中元素具體來說，可為灰化物水溶液當中所含元素中，並未被陽離子交換樹脂捕捉的元素。關於可作為陽離子交換樹脂接觸步驟當中，並未被陽離子交換樹脂捕捉的元素，可列舉例如：[過渡金屬元素]Sc、Ti、V、Cr、Mn、Fe、Co、Ni、Cu、Zn、Y、Zr、Nb、Mo、Ru、Rh、Pd、Ag、Cd、Hf、Ta、W、Re、Os、Ir、Pt、Au；[硼族元素]B、Al、Ga、In、Tl；[碳族元素]Si、Ge、Sn、Pb；[氮族元素]P、As、Sb、Bi；[硫族元素]S、Se、Te當中的至少一元素。因此，分析溶液亦可包含所列舉的元素當中的至少其中一元素。Further, the "analytical solution containing an element other than the target element" is an analysis solution containing at least one of the elements other than the capture target contained in the sample. That is, it does not mean an analysis solution containing all the elements other than the object captured in the sample. The element contained in the analysis solution may specifically be an element which is not captured by the cation exchange resin among the elements contained in the aqueous ash solution. Examples of the element which can be captured as a cation exchange resin and which are not captured by the cation exchange resin include, for example, [transition metal element] Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Y. , Zr, Nb, Mo, Ru, Rh, Pd, Ag, Cd, Hf, Ta, W, Re, Os, Ir, Pt, Au; [boron element] B, Al, Ga, In, Tl; [carbon Group elements] Si, Ge, Sn, Pb; [nitrogen element] P, As, Sb, Bi; [chalcogen element] at least one element of S, Se, Te. Thus, the analytical solution may also comprise at least one of the listed elements.
本調製方法中的陽離子交換樹脂接觸步驟當中，亦可包含硼、磷及硼磷以外的至少一元素的分析溶液。In the cation exchange resin contacting step in the preparation method, an analysis solution of at least one element other than boron, phosphorus, and borophosphorus may be contained.
使灰化物水溶液與陽離子交換樹脂接觸的作法上，具體來說，例如可將灰化物水溶液與陽離子交換樹脂混和；或者是也可使灰化物水溶液通過填充有陽離子交換樹脂的管柱。就有效率地將灰化物水溶液中來自捕捉劑的元素之陽離子捕捉至陽離子交換樹脂的觀點來看，作為使灰化物水溶液與陽離子交換樹脂接觸的方法，以使灰化物水溶液通過填充陽離子交換樹脂的管柱的方法為佳。In the method of bringing the aqueous ash solution into contact with the cation exchange resin, specifically, for example, the ash aqueous solution may be mixed with the cation exchange resin; or the ash aqueous solution may be passed through the column packed with the cation exchange resin. From the viewpoint of efficiently capturing the cation of the element from the scavenger in the aqueous ash solution to the cation exchange resin, as a method of contacting the ash aqueous solution with the cation exchange resin, the ash aqueous solution is passed through the cation exchange resin. The method of the column is preferred.
作為陽離子交換樹脂，可不須特別限定。一般來說可使用粒狀或是粉末狀之物。作為陽離子交換樹脂，具體來說，可列舉例如DOWEX強酸性型陽離子交換樹脂(H型)、DOWEX MARATHON(Na型)(陶氏化學公司製)、Daion(三菱化學公司製)等。The cation exchange resin is not particularly limited. Generally, granular or powdery materials can be used. Specific examples of the cation exchange resin include DOWEX strong acid type cation exchange resin (H type), DOWEX MARATHON (Na type) (manufactured by The Dow Chemical Co., Ltd.), and Daion (manufactured by Mitsubishi Chemical Corporation).
作為陽離子交換樹脂的使用量，並不需特別限定，可基於所使用的陽離子交換樹脂的總交換容量來決定。The amount of the cation exchange resin to be used is not particularly limited and can be determined based on the total exchange capacity of the cation exchange resin to be used.
於混和了灰化物水溶液與陽離子交換樹脂的情形當中，混和後(換言之，也就是使其捕捉來自試料中捕捉劑的元素之陽離子之後)的陽離子交換樹脂係以一般的固液分離法，藉以從灰化物水溶液分離。藉此可獲得與陽離子交換樹脂混合後的灰化物水溶液，也就是包含捕捉對象元素以外元素的分析溶液。固液分離法可列舉例如傾斜法、離心分離法、過濾法等。In the case where the aqueous ash solution and the cation exchange resin are mixed, the cation exchange resin after mixing (in other words, after capturing the cation of the element from the capture agent in the sample) is subjected to a general solid-liquid separation method. The aqueous ash solution is separated. Thereby, an aqueous ash solution mixed with the cation exchange resin, that is, an analysis solution containing an element other than the object to be captured, can be obtained. Examples of the solid-liquid separation method include a tilting method, a centrifugal separation method, a filtration method, and the like.
由灰化物水溶液分離後的陽離子交換樹脂可接受水洗處理，但並非必須為水洗。水洗處理上一般可使用例如離子交換水或是超純水。於水洗離子交換樹脂時，可藉著再次地執行固液分離法，來使陽離子交換樹脂從清洗水分離出。分離好的清洗水可與先前得到的分析溶液混和而成。藉著此等水洗的操作處理，可將捕捉對象外的元素作為分析溶液來進行更為確實的回收處理。The cation exchange resin separated from the aqueous ash solution can be subjected to a water washing treatment, but is not necessarily washed with water. For example, ion exchange water or ultrapure water can be generally used for the water washing treatment. When the ion exchange resin is washed with water, the cation exchange resin can be separated from the washing water by performing the solid-liquid separation method again. The separated washing water can be mixed with the previously obtained analytical solution. By the operation processing of the water washing, the elements outside the capturing target can be used as the analysis solution for more reliable recovery processing.
當使灰化物水溶液通過填充有陽離子交換樹脂的管柱(此後亦稱陽離子交換樹脂管柱)時，由耐酸性的觀點來看，以使用石英棉作為支撐體且填充有陽離子交換樹脂的管柱為佳。關於作為支撐體來使用的石英棉的使用量上並無特別的限定，以相對於陽離子交換樹脂為0.01質量倍量-0.1質量倍量為佳。此外，也可藉著使用石英棉來做為陽離子交換樹脂管柱的支撐體，以於管柱的預備清洗處理當中，清除掉包含於該管柱的雜質。When the ash aqueous solution is passed through a column packed with a cation exchange resin (hereinafter also referred to as a cation exchange resin column), from the viewpoint of acid resistance, a column using quartz wool as a support and filled with a cation exchange resin is used. It is better. The amount of use of the quartz wool to be used as the support is not particularly limited, and is preferably 0.01 mass by mass to 0.1 mass by mass based on the cation exchange resin. In addition, quartz wool can also be used as a support for the cation exchange resin column to remove impurities contained in the column during the preliminary cleaning process of the column.
當使灰化物水溶液通過填充了陽離子交換樹脂的管柱(此後亦稱陽離子交換樹脂)的情形下，可獲得陽離子交換樹脂管柱經過溶液通過之後的灰化物水溶液，也就是包含捕捉對象元素以外元素的分析溶液。經過灰化物水溶液通過的陽離子交換樹脂管柱可使用離子交換水或超純水等來進行水洗，但水洗處理並非必須。經溶液通過的陽離子交換樹脂管柱的清洗水可與先前所得到的分析溶液進行混和。可藉著此等水洗處理操作，可作為分析溶液，將捕捉對象以外元素作為分析溶液來更確實地回收。When the ash aqueous solution is passed through a column packed with a cation exchange resin (hereinafter also referred to as a cation exchange resin), an aqueous ash solution after the passage of the cation exchange resin column through the solution, that is, an element other than the capturing target element, can be obtained. Analytical solution. The cation exchange resin column through which the ash aqueous solution passes can be washed with ion-exchanged water or ultrapure water or the like, but the water washing treatment is not essential. The washing water of the cation exchange resin column through which the solution passes can be mixed with the previously obtained analysis solution. By such a water washing treatment operation, it can be used as an analysis solution, and an element other than the object to be captured can be more reliably recovered as an analysis solution.
於陽離子交換樹脂接觸步驟當中，關於灰化物水溶液與陽離子交換樹脂之間接觸時的接觸溫度及接觸時間上並不需特別限定。作為接觸溫度，可列舉例如陽離子交換樹脂的溫度、灰化物水溶液的溫度等。作為接觸時間，可列舉例如灰化物水溶液與陽離子交換樹脂間的混和時間、灰化物水溶液的陽離子交換樹脂管柱中的液體通過速度等。In the cation exchange resin contacting step, the contact temperature and the contact time at the time of contact between the ash aqueous solution and the cation exchange resin are not particularly limited. The contact temperature may, for example, be a temperature of a cation exchange resin, a temperature of an ash aqueous solution, or the like. The contact time includes, for example, a mixing time between the ash aqueous solution and the cation exchange resin, and a liquid passage speed in the cation exchange resin column of the ash aqueous solution.
本發明的另一實施型態係提供分析方法。本發明的另一實施型態中的分析方法係藉著分析裝置，針對以本調製方法所獲得的上述溶液中所含元素，來進行測量的分析步驟。Another embodiment of the invention provides an analytical method. The analysis method in another embodiment of the present invention is an analysis step of performing measurement on an element contained in the above solution obtained by the present modulation method by an analysis device.
於本發明說明書當中，「本發明的另一實施型態之分析方法」亦稱為「本分析方法」。而「本分析方法」之用語並非針對分析方法進行任何的限定，僅表示其為分析方法的一實施型態。In the specification of the present invention, "analysis method of another embodiment of the present invention" is also referred to as "this analysis method". The term "this analytical method" does not limit the analytical method to any extent, but merely indicates that it is an implementation form of the analytical method.
[分析步驟]
分析步驟係使用分析裝置，來測量以本調製方法所得分析溶液中所含的元素之步驟。此外，於此所指「以分析裝置來測量元素」係指檢測元素並特定其種類；或是對元素進行定量，或是以上兩種皆是。
本發明一實施型態的分析步驟當中，可用分析裝置同時地測量硼、磷及硼磷以外的至少一元素。[Analysis step]
The analysis step is a step of measuring an element contained in the analysis solution obtained by the present modulation method using an analysis device. In addition, the term "measuring an element by an analyzing device" as used herein means detecting an element and specifying its kind; or quantifying an element, or both.
In an analysis step of an embodiment of the present invention, at least one element other than boron, phosphorus, and borophosphorus may be simultaneously measured by an analysis device.
作為分析裝置，可使用習知的分析裝置，可列舉例如：電感耦合電漿質量分析裝置(ICP-MS)、電感耦合電漿發光分光分析裝置(ICP-AES)、原子吸光分析裝置(AAS)等。此外，ICP-MS亦可為四極型電感耦合電漿-質量分析裝置(Q-ICP-MS)、三重四極型電感耦合電漿-質量分析裝置(ICP-QQQ-MS)、或是高分辨型電感耦合電漿質量分析裝置(雙聚焦型電感耦合電漿質量分析裝置(HR-ICP-MS))。As the analysis device, a conventional analysis device can be used, and examples thereof include an inductively coupled plasma mass spectrometer (ICP-MS), an inductively coupled plasma emission spectroscopic analyzer (ICP-AES), and an atomic absorption spectrometer (AAS). Wait. In addition, ICP-MS can also be a quadrupole inductively coupled plasma-mass analyzer (Q-ICP-MS), a triple quadrupole inductively coupled plasma-mass analyzer (ICP-QQQ-MS), or a high resolution type. Inductively coupled plasma mass spectrometer (Double Focus Inductively Coupled Plasma Mass Analysis Device (HR-ICP-MS)).
於分析步驟當中，可配合所使用的分析裝置，藉由適當的習知方法來測量元素。In the analysis step, the elements can be measured by appropriate conventional methods in conjunction with the analytical device used.
分析步驟當中係指由分析溶液中所含元素當中檢測出至少一種元素並且進行定量。In the analysis step, at least one element is detected from the elements contained in the analysis solution and quantified.
分析步驟裝的分析裝置及測量方法可因應作為測量對象的元素之種類而適當地選擇。The analysis device and the measurement method installed in the analysis step can be appropriately selected in accordance with the type of the element to be measured.
[本調製方法的功效]
習知技術中，作為用於分析特定元素的分析用試料的調製方法，係使用以從捕捉了試料中元素的灰化物溶解於酸當中而獲得的灰化物水溶液，由灰化物水溶液將分析對象元素進行捕捉、濃縮並且予以單離的方法。例如於專利文獻1當中，為了要分析硼而使用了使用陰離子交換樹脂，以從灰化物水溶液中將硼捕捉、濃縮並且予以單離。[Effect of this modulation method]
In the prior art, as a method for preparing an analysis sample for analyzing a specific element, an aqueous ash solution obtained by dissolving an ash in which an element in a sample is captured in an acid is used, and an analysis target element is formed from an ash aqueous solution. A method of capturing, concentrating, and arranging. For example, in Patent Document 1, an anion exchange resin is used in order to analyze boron, and boron is captured, concentrated, and separated from an aqueous ash solution.
也就是說，習知方法當中，僅能測量捕捉至陰離子交換樹脂的元素；而於本調製方法當中，可以調製出分析用試料，且其係用於一次就測量出試料當中所包含諸多元素。That is to say, in the conventional method, only the element captured to the anion exchange resin can be measured; and in the present modulation method, the analysis sample can be prepared, and it is used to measure a plurality of elements contained in the sample at a time.
此外，本調製方法當中，可在針對於酸溶解步驟中所得到的灰化物水溶液不作額外處理(例如調整pH值)情況下，於接下來的陽離子交換樹脂接觸步驟中進行與陽離子交換樹脂間的接觸。另一方面，作為習知技術，例如專利文獻1當中，在使第二步驟中所得到灰化物水溶液接觸到第三步驟的陰離子交換樹脂接觸之前，必須將鹼加入至灰化物水溶液中，以進行調節灰化物水溶液的氫濃度之操作。Further, in the present preparation method, in the case where the aqueous ash solution obtained in the acid dissolution step is not subjected to additional treatment (for example, pH adjustment), it is carried out in the subsequent cation exchange resin contacting step with the cation exchange resin. contact. On the other hand, as a conventional technique, for example, in Patent Document 1, before the aqueous ash solution obtained in the second step is brought into contact with the anion exchange resin of the third step, it is necessary to add a base to the ash aqueous solution to carry out The operation of adjusting the hydrogen concentration of the ash aqueous solution.
此外，於本調製方法當中，不需要於陽離子交換樹脂接觸步驟中，進行清洗接觸灰化物水溶液之後的陽離子交換樹脂之操作。即使是清洗接觸灰化物水溶液之後的陽離子交換樹脂，也只要如實施例中後述般，針對陽離子交換樹脂(陽離子交換樹脂管柱)進行一次清洗即可充分洗淨。此外，作為習知技術，例如於專利文獻1當中，用於從接觸灰化物水溶液的陰離子交換樹脂去除分析對象外物質的清洗操作係相當地繁雜。Further, in the present preparation method, the operation of cleaning the cation exchange resin after contacting the aqueous ash solution is not required in the cation exchange resin contacting step. Even if the cation exchange resin after the contact with the aqueous ash solution is washed, as described later in the examples, the cation exchange resin (cation exchange resin column) can be sufficiently washed once by washing once. Further, as a conventional technique, for example, in Patent Document 1, a cleaning operation for removing an analyte outside an anion exchange resin contacting an ash aqueous solution is considerably complicated.
此外，於本調製方法當中，可在不需要針對於本調製方法之陽離子交換樹脂接觸步驟中接觸了陽離子交換樹脂後的灰化物水溶液進行特別的操作情況下，將其提供至本分析方法中。另一方面，作為習知技術，例如於專利文獻中1，分析對象的硼係於第三步驟中被捕捉至陰離子交換樹脂中。因此，需要於後續的第四步驟中，以酸性水溶液來溶析被捕捉至陰離子交換樹脂中的硼，以將所獲得的溶析液使用於定量處理。Further, in the present preparation method, it is possible to provide the ash aqueous solution after contacting the cation exchange resin in the step of contacting the cation exchange resin for the present preparation method to a specific operation, and to provide it to the analysis method. On the other hand, as a conventional technique, for example, in Patent Document 1, boron of the analysis target is captured in the anion exchange resin in the third step. Therefore, it is necessary to dissolve the boron trapped in the anion exchange resin with an acidic aqueous solution in the subsequent fourth step to use the obtained elution solution for the quantitative treatment.
如上述般，本調製方法與習知方法比較下，可針對包含於試料中的元素進行簡便的分析。As described above, the present modulation method can be easily analyzed for the elements contained in the sample in comparison with the conventional methods.
此外，由於在本調製方法當中，步驟(或是操作)少，因此可降低最後分析試料(分析溶液)的汙染。其結果為本調製方法中，儘管分析的是有捕捉到非分析對象的殘留液體，也能夠達到與以針對分析對象元素作捕捉及濃縮且經過單離的習知方法同等的靈敏度。於本配置方法當中提供一種分析用試料，其可特別針對硼及磷作高靈敏度的分析。Further, since there are few steps (or operations) in the present modulation method, contamination of the final analysis sample (analytical solution) can be reduced. As a result, in the present modulation method, although it is analyzed that the residual liquid that has not been analyzed is captured, it is possible to achieve the same sensitivity as the conventional method of capturing and concentrating the element to be analyzed and passing through. In the present configuration method, an analytical sample is provided, which can be specifically analyzed for boron and phosphorus.
本發明的一實施型態可如下般構成。
[1] 一種分析用試料的調製方法，其特徵為：該調製方法係用於分析包含於試料當中的元素，且包含：灰化步驟，於捕捉劑存在下將該試料進行灰化，以獲得捕捉了該試料中元素的灰化物；酸溶解步驟，藉著將於該灰化步驟當中所獲得的該灰化物溶解於酸中，以獲得灰化物水溶液；陽離子交換樹脂接觸步驟，藉著使該酸溶解步驟中所獲得的該灰化物水溶液與陽離子交換樹脂接觸，以將來自該捕捉劑的元素的陽離子捕捉至陽離子交換樹脂，進而獲得包含該陽離子之元素以外元素的分析溶液。
[2]如[1]所述之分析用試料的調製方法，其中，該試料係含碳試料。
[3]一種分析方法，其特徵為包含：分析步驟，以分析裝置來測量藉由請求項1或2所述之分析用試料的調製方法所獲得的該分析溶液中所含元素。An embodiment of the present invention can be configured as follows.
[1] A method for preparing an analytical sample, characterized in that the modulation method is for analyzing an element contained in a sample, and comprising: an ashing step of ashing the sample in the presence of a capturing agent to obtain Capturing the ash of the element in the sample; the acid dissolving step, by dissolving the ash obtained in the ashing step in the acid to obtain an aqueous ash solution; the cation exchange resin contacting step, by The aqueous ash solution obtained in the acid dissolving step is contacted with a cation exchange resin to capture a cation of an element derived from the scavenger to a cation exchange resin, thereby obtaining an analysis solution containing an element other than the element of the cation.
[2] The method for preparing an analysis sample according to [1], wherein the sample is a carbon-containing sample.
[3] An analysis method comprising: an analysis step of measuring an element contained in the analysis solution obtained by the preparation method of the analysis sample according to claim 1 or 2 by an analysis device.
[實施例]
以下針對本發明一實施例進行說明。
以下根據實施例來針對本發明進行更詳細的說明，惟，本發明並不受此實施例限定。[Examples]
An embodiment of the present invention will be described below.
The present invention will be described in more detail below based on the examples, but the present invention is not limited by the examples.
(實施例1)
實施例1當中係使用以下所示市售的試料：N, N’-二苯基-N, N’-二(間甲苯基)聯苯胺；稠五苯(pentacene)；5, 5’-二(4-聯苯基)-2, 2’-聯噻吩；N, N’-二辛基-3, 4, 9, 10-苝基二甲醯亞胺；4,4’-雙(N-咔唑基)-1,1’-聯苯。(Example 1)
In Example 1, the commercially available samples shown below were used: N, N'-diphenyl-N, N'-di(m-tolyl)benzidine;pentacene; 5, 5'-di (4-biphenyl)-2,2'-bithiophene; N, N'-dioctyl-3, 4, 9, 10-mercaptodimethylimine; 4,4'-double (N- Carbazolyl-1,1'-biphenyl.
使用試料以基於本發明一實施型態之調製方法，來調製分析用試料。接著，使用所獲得的分析用試料，基於本發明一實施型態之調製方法來測量試料(分析用試料)中的元素(具體來說為硼(B)及磷(P))。具體來說操作步驟如下。此外，於實施例1當中係使用碳酸鈣來做為捕捉劑。The sample for analysis was prepared using a sample according to a modulation method according to an embodiment of the present invention. Next, using the obtained analytical sample, elements (specifically, boron (B) and phosphorus (P)) in the sample (analytical sample) are measured based on the preparation method of one embodiment of the present invention. Specifically, the steps are as follows. Further, in Example 1, calcium carbonate was used as a scavenger.
(1.灰化步驟)
採集10mg粉末狀的試料至石英燒杯中。於石英燒杯中添加碳酸鈣(特級試藥、粉末狀)，並且混和試料與碳酸鈣，以獲得此等物質的混和物。其後，藉著以燃燒器來將石英燒杯加熱，以將混和物灰化，得到灰化物。(1. Ashing step)
A 10 mg sample of the powder was collected into a quartz beaker. Calcium carbonate (special grade, powder) was added to a quartz beaker, and the sample was mixed with calcium carbonate to obtain a mixture of such substances. Thereafter, the quartz beaker is heated by a burner to ash the mixture to obtain ash.
(2.酸溶解步驟)
於含有獲得的灰化物的石英燒杯內，添加超純水(比電阻值18Ω・cm以上)及20質量%的鹽酸。接著，藉著將石英燒杯設置於100℃-150℃的熱板上進行加熱，以溶解灰化物，獲得灰化物水溶液。於此，灰化物水溶液當中的氯化氫濃度為約4質量%。(2. Acid dissolution step)
Ultrafine water (specific resistance value: 18 Ω·cm or more) and 20% by mass of hydrochloric acid were added to a quartz beaker containing the obtained ash. Next, by heating a quartz beaker on a hot plate at 100 ° C - 150 ° C to dissolve the ash, an aqueous ash solution is obtained. Here, the concentration of hydrogen chloride in the aqueous solution of ash is about 4% by mass.
(3.陽離子交換樹脂接觸步驟)
依序將石英棉、陽離子交換樹脂(DOWEX強酸性型陽離子交換樹脂(H型)，陶氏化學公司)填充至管柱中，以製作陽離子交換樹脂管柱(以下或僅稱為管柱)。使5%質量%鹽酸及超純水通過管柱以作為調節。(3. Cation exchange resin contact step)
Quartz cotton, a cation exchange resin (DOWEX strong acid cation exchange resin (H type), Dow Chemical Company) was sequentially packed into a column to prepare a cation exchange resin column (hereinafter or simply referred to as a column). 5% by mass of hydrochloric acid and ultrapure water were passed through the column for adjustment.
接著，將於酸溶解步驟中所獲得的灰化物水溶液通過經過調節的管柱，並且回收通過管柱之後的灰化物水溶液以作為分析溶液。進一步地，將超純水加入含有灰化物水溶液的石英燒杯中，並且將石英燒杯清洗，使清洗處理之後的超純水通過管柱。接著將通過管柱的超純水回收，加入至分析溶液中。其後，使超純水通過管柱並且清洗管柱。回收通過管柱之後的超純水(清洗液)，進一步地再將其加入至分析溶液中。於所得到的分析溶液中添加20質量％的鹽酸，並進一步使用超純水製備氯化氫濃度為約4質量％的分析溶液。Next, the aqueous ash solution obtained in the acid dissolving step is passed through the adjusted column, and the aqueous ash solution after passing through the column is recovered as an analysis solution. Further, ultrapure water was added to a quartz beaker containing an aqueous ash solution, and the quartz beaker was washed to pass the ultrapure water after the washing treatment through the column. The ultrapure water passing through the column is then recovered and added to the analysis solution. Thereafter, ultrapure water is passed through the column and the column is cleaned. The ultrapure water (washing liquid) after passing through the column was recovered, and further added to the analysis solution. To the obtained analysis solution, 20% by mass of hydrochloric acid was added, and further, ultrapure water was used to prepare an analysis solution having a hydrogen chloride concentration of about 4% by mass.
(4.分析步驟)
將陽離子交換樹脂接觸步驟中所得到的分析溶液，導入至電感耦合電漿質量分析裝置(ICP-MS)(「ELAN DRCII」美國珀金埃爾默公司製，四極電感耦合電漿質量分析裝置)，以測量分析溶液中的元素(具體來說為硼(B)及磷(P))。(4. Analysis steps)
The analysis solution obtained in the step of contacting the cation exchange resin is introduced into an inductively coupled plasma mass spectrometer (ICP-MS) ("ELAN DRCII", manufactured by PerkinElmer, USA, four-pole inductively coupled plasma mass spectrometer) To measure the elements in the analysis solution (specifically, boron (B) and phosphorus (P)).
將測量結果示於表1中。
(比較例1：基於微波分解法所進行的元素定量)
使用與實施例1中所使用相同的試料，並且基於習知方法，即微波分解法來調製分析用試料，接著針對試料中的元素(具體來說為硼(B)及磷(P))進行定量。具體的操作順序如下所示。The measurement results are shown in Table 1.
(Comparative Example 1: Quantification of Elements by Microwave Decomposition Method)
The same sample as used in Example 1 was used, and the analysis sample was prepared by a conventional method, that is, a microwave decomposition method, and then subjected to an element (specifically, boron (B) and phosphorus (P)) in the sample. Quantitative. The specific sequence of operations is as follows.
將100mg的粉末狀試料採集至氟樹脂製的微波分解容器中。並且將硝酸(超微量分析用，和光純藥工業股份有限公司製)加入至該容器中並且密封，其後進行微波分解。接著，回收分解後的試料溶液，使用超純水製作硝酸濃度約25質量%的分析溶液。100 mg of the powdery sample was collected into a microwave decomposition vessel made of a fluororesin. Further, nitric acid (manufactured by Wako Pure Chemical Industries, Ltd.) was added to the container and sealed, followed by microwave decomposition. Next, the decomposed sample solution was recovered, and an analysis solution having a nitric acid concentration of about 25% by mass was prepared using ultrapure water.
將以微波分解法製得的分析溶液，導入至電感耦合電漿發光分光分析裝置(ICP-AES)(「iCAP6500」、賽默飛世爾科技股份有限公司)，並且測量分析溶液中的元素(具體來說為硼(B)及磷(P))。
將結果表示於表1。The analysis solution prepared by the microwave decomposition method is introduced into an inductively coupled plasma luminescence spectroscopic analyzer (ICP-AES) ("iCAP6500", Thermo Fisher Scientific Co., Ltd.), and the elements in the analysis solution are measured (specifically Said to be boron (B) and phosphorus (P)).
The results are shown in Table 1.
[表1]
*於表1當中，「 ＜ (數值)」係表示從小於數值(定量下限值)的值起無法定量。[Table 1]
* In Table 1, "<(numerical)" means that the value cannot be quantified from a value smaller than the numerical value (quantitative lower limit value).
由表1可知以下事項。即，於微波分解法中諸多的試料中，硼及磷(特別是硼)的定量值小於定量值下限值，無法正確地定量。另一方面，於本分析方法中，儘管使用的試料量係微波分解法的10分之1的量，仍然能於眾多的試料中正確地定量硼及磷(特別是磷)。由此可知，本分析方法相較於習知方法，能夠在更微量的試料量中且更高的靈敏度來測量試料中的硼及磷。The following items are known from Table 1. That is, in many samples of the microwave decomposition method, the quantitative value of boron and phosphorus (especially boron) is less than the lower limit of the quantitative value, and cannot be accurately quantified. On the other hand, in the analysis method, although the amount of the sample to be used is one-tenth of the amount of the microwave decomposition method, boron and phosphorus (especially phosphorus) can be accurately quantified in a large number of samples. From this, it can be seen that the analysis method can measure boron and phosphorus in the sample in a smaller amount of sample and higher sensitivity than the conventional method.
(實施例2)
於實施例2當中，將幾種元素添加至製成粉末狀的超高純度石墨中以調製混和物，使用該混和物以作為試料。添加進石墨中的元素係Ge、As、Te及Re，此等元素的添加量總共為200ng。(Example 2)
In Example 2, several elements were added to ultrafine-purity graphite which was powdered to prepare a mixture, and the mixture was used as a sample. The elements added to the graphite are Ge, As, Te, and Re, and the addition amount of these elements is 200 ng in total.
使用試料(石墨)，基於本發明一實施型態的調製方法來調製分析用試料。接著，使用所獲得的分析用試料，基於本發明中一實施型態之分析方法測量試料(分析用試料)當中的元素。具體的操作步驟如下所示。此外，於實施例2當中係使用碳酸鈣以作為捕捉劑。The sample for analysis was prepared by using a sample (graphite) based on a modulation method according to an embodiment of the present invention. Next, using the obtained analysis sample, the elements in the sample (analytical sample) were measured based on the analysis method of one embodiment of the present invention. The specific steps are as follows. Further, in Example 2, calcium carbonate was used as a scavenger.
(1.灰化步驟)
採集10g的粉末狀試料至鉑盤中。將碳酸鈣(特級試藥、粉末狀)加入至鉑盤中，混和試料及碳酸鈣，獲得此等物質的混和物。其後，將鉑盤置於電烘爐內以3L/分條件使氧流通，且同時以900℃、3小時條件將混和物灰化，以獲得灰化物。(1. Ashing step)
A 10 g sample of the powder was collected into a platinum pan. Calcium carbonate (special grade reagent, powder form) was added to a platinum pan, and the sample and calcium carbonate were mixed to obtain a mixture of these materials. Thereafter, the platinum disk was placed in an electric oven to circulate oxygen at a condition of 3 L/min, and at the same time, the mixture was ashed at 900 ° C for 3 hours to obtain ash.
(2.酸溶解步驟)
於含有獲得的灰化物的鉑盤內，添加超純水(比電阻180Ω・cm以上)及20質量%鹽酸。接著，將鉑盤設置於的100℃的熱板上，藉由加熱使灰化物溶解，以獲得灰化物水溶液。於此，灰化物水溶液中的氯化氫的濃度係約4質量%。(2. Acid dissolution step)
Ultrapure water (specific resistance: 180 Ω·cm or more) and 20% by mass of hydrochloric acid were added to a platinum disk containing the obtained ash. Next, a platinum disk was placed on a hot plate at 100 ° C, and the ash was dissolved by heating to obtain an ash aqueous solution. Here, the concentration of hydrogen chloride in the aqueous ash solution is about 4% by mass.
(3.陽離子交換樹脂接觸步驟)
將石英棉、陽離子交換樹脂(DOWEX強酸性型陽離子交換樹脂(H型) ；陶氏化學公司製)依序填充至管柱中，以製作陽離子交換樹脂管柱(以下或簡稱為管柱)。使5%質量%鹽酸及超純水通過管柱以作為管柱之調節。(3. Cation exchange resin contact step)
Quartz cotton and a cation exchange resin (DOWEX strong acid type cation exchange resin (H type); manufactured by Dow Chemical Co., Ltd.) were sequentially packed in a column to prepare a cation exchange resin column (hereinafter referred to simply as a column). 5% by mass of hydrochloric acid and ultrapure water were passed through the column to adjust the column.
接著，將於酸溶解步驟中所獲得的灰化物水溶液通過經過調節的管柱，並且回收通過管柱之後的灰化物水溶液以作為分析溶液。進一步地，將超純水加入含有灰化物水溶液的石英燒杯中，並且將石英燒杯清洗，使清洗處理之後的超純水通過管柱。接著將通過管柱的超純水回收，加入至分析溶液中。其後，使超純水通過管柱並且清洗管柱。回收通過管柱之後的超純水(清洗液)，進一步地再將其加入至分析溶液中。Next, the aqueous ash solution obtained in the acid dissolving step is passed through the adjusted column, and the aqueous ash solution after passing through the column is recovered as an analysis solution. Further, ultrapure water was added to a quartz beaker containing an aqueous ash solution, and the quartz beaker was washed to pass the ultrapure water after the washing treatment through the column. The ultrapure water passing through the column is then recovered and added to the analysis solution. Thereafter, ultrapure water is passed through the column and the column is cleaned. The ultrapure water (washing liquid) after passing through the column was recovered, and further added to the analysis solution.
於製得的分析溶液中添加20質量%鹽酸，並且進一步使用超純水，以製作氯化氫濃度約4質量%的分析溶液。20% by mass of hydrochloric acid was added to the obtained analysis solution, and ultrapure water was further used to prepare an analysis solution having a hydrogen chloride concentration of about 4% by mass.
(4.分析步驟)。
將陽離子交換樹脂接觸步驟中所得到的分析溶液，導入至電感耦合電漿質量分析裝置(ICP-MS)(「ELAN DRCII」美國珀金埃爾默公司製，四極電感耦合電漿質量分析裝置)，以測量分析溶液中的元素。
將結果表示於表2。(4. Analysis steps).
The analysis solution obtained in the step of contacting the cation exchange resin is introduced into an inductively coupled plasma mass spectrometer (ICP-MS) ("ELAN DRCII", manufactured by PerkinElmer, USA, four-pole inductively coupled plasma mass spectrometer) To measure the elements in the analytical solution.
The results are shown in Table 2.
[表2]
於表2當中「樣品含量」係指超高純度石墨本身當中所含各種元素的含量。
由表2可知，本發明可達到如下效果，即提供一種分析用試料，可針對硼及磷以外的元素進行定量。In Table 2, "sample content" refers to the content of various elements contained in the ultra-high purity graphite itself.
As apparent from Table 2, the present invention can provide an analysis sample capable of quantifying elements other than boron and phosphorus.
[產業利用性]
本發明可在不限定硼及/或磷情況下，針對包含在試料當中的元素進行簡便的分析。因此，本發明可在半導體相關領域、醫療器具製造領域、食品成分分析領域等各種領域中，利用於分析試料(原料、食品等)中所含的元素。[Industry Utilization]
The present invention can carry out a simple analysis of the elements contained in the sample without limiting boron and/or phosphorus. Therefore, the present invention can be utilized for analyzing elements contained in samples (raw materials, foods, etc.) in various fields such as semiconductor-related fields, medical device manufacturing fields, and food component analysis fields.
無。no.
無。no.
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