TW201934983A - Polarization measuring device, polarization measuring method and optical alignment method including a light source, a polarizing polarizer, a polarization detecting polarizer, a rotating module, an image sensing device and an analysis module - Google Patents
Polarization measuring device, polarization measuring method and optical alignment method including a light source, a polarizing polarizer, a polarization detecting polarizer, a rotating module, an image sensing device and an analysis module Download PDFInfo
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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Abstract
Description
本發明涉及偏振測量技術領域，尤其是涉及一種偏振測量裝置、偏振測量方法及光配向方法。The invention relates to the technical field of polarization measurement, in particular to a polarization measurement device, a polarization measurement method and a light alignment method.
目前，偏振片得到越來越廣泛的應用，在一些使用場景下，需要對偏振片在不同入射角度情况下的消光比及偏光角度進行測量研究，由於偏振片的各向異性，光線沿不同角度入射時偏振片的消光比及偏光角度會發生改變，當偏振片的應用場景爲非準直光源時，測量不同入射角度下偏振片的消光比及偏光角度對分析偏振片在該光源下的綜合消光比及偏光角度有著十分重要的意義。At present, polarizers are more and more widely used. Under some use scenarios, it is necessary to measure and study the extinction ratio and polarizing angle of polarizers at different incident angles. Due to the anisotropy of polarizers, light rays travel along different angles. Extinction ratio and polarization angle of polarizers will change at the time of incidence. When the application scene of polarizers is a non-collimated light source, measure the extinction ratio and polarization angle of polarizers at different incident angles to analyze the synthesis of polarizers under this light source. Extinction ratio and polarization angle are of great significance.
如第1圖所示，爲線栅偏振片的多角度入射示意圖，其中，線栅偏振片由平行等間距設置的不透光材質的阻擋線條a和透光基板b構成，透光基板b中形成平行於a的透光狹縫，可對入射光進行偏振，透光狹縫的透振方向固定，線栅偏振片對如第1圖中從Z方向（偏振片的法線方向）入射與從Z'方向入射的光的偏振特性不一樣。在一些使用場景下，需要對不同入射角度情况下偏振片的消光比、偏光角度進行測量研究。As shown in FIG. 1, it is a schematic diagram of a multi-angle incidence of a wire grid polarizer, where the wire grid polarizer is composed of barrier lines a and a light-transmitting substrate b of an opaque material arranged in parallel at equal intervals. A light-transmitting slit parallel to a can be used to polarize incident light. The transmission direction of the light-transmitting slit is fixed. The wire grid polarizer is incident on the incident light from the Z direction (the normal direction of the polarizer) as shown in Figure 1. The polarization characteristics of light incident from the Z ′ direction are different. In some usage scenarios, it is necessary to measure and study the extinction ratio and polarization angle of polarizers under different incident angles.
如第2圖所示爲現有的測量偏振片消光比及偏光角度的測量裝置，主要包括光源11、第一準直透鏡411、小孔光欄31、第二準直透鏡412、起偏偏振器21、檢偏偏振器51及能量探測器6。其中，光的入射角度完全垂直於起偏偏振器21的基板。As shown in FIG. 2, a conventional measuring device for measuring the extinction ratio and polarization angle of a polarizing plate mainly includes a light source 11, a first collimating lens 411, a small aperture light column 31, a second collimating lens 412, and a polarizing polarizer. 21. An analyzer polarizer 51 and an energy detector 6. The incident angle of the light is completely perpendicular to the substrate of the polarizing polarizer 21.
如第2圖所示，經準直的光垂直進入起偏偏振器21及檢偏偏振器51，測量過程中檢偏偏振器51以步進方式按照一定的角度進行旋轉，在檢偏偏振器51旋轉的過程中，利用能量探測器6記錄光斑能量，測量完成後，對檢偏偏振器51每旋轉一個角度對應的光斑能量值進行擬合計算，得到起偏偏振器21在光垂直入射情况下的消光比與偏光角度。As shown in Figure 2, the collimated light enters the polarizing polarizer 21 and the analyzer polarizer 51 vertically. During the measurement, the analyzer polarizer 51 rotates in a stepwise manner at a certain angle, and the polarizer During the rotation of 51, the energy of the spot is recorded by the energy detector 6. After the measurement is completed, the energy value of the spot corresponding to each angle of the polarization analyzer 51 is fitted to calculate the situation of the polarizing polarizer 21 in the normal incidence of light. Extinction ratio and polarization angle.
進一步的，當需要測量起偏偏振器21的大角度入射（即入射光與起偏偏振器21的法線方向有一定夾角）偏振特性時，如第3圖所示，先旋轉起偏偏振器21以改變其法線與入射光的夾角，進而調整入射光的入射角度，再重複以上步驟進行測量。其中，當研究起偏偏振器21在不同大角度入射情况下的偏振特性時，需要多次頻繁地調整起偏偏振器21的設置方向以調節入射光的入射角度，再重複以上步驟，測量過程極爲繁瑣，測試效率低下。因此，找到一種簡單高效的測量起偏器在不同入射角度情况下的消光比及偏光角度的方法是目前極待解决的技術問題。Further, when it is necessary to measure the polarization characteristics of the large-angle incidence of the polarizing polarizer 21 (that is, the incident light has a certain angle with the normal direction of the polarizing polarizer 21), as shown in FIG. 3, the polarizing polarizer is rotated first. 21 to change the angle between the normal and the incident light, and then adjust the incident angle of the incident light, and then repeat the above steps to measure. Among them, when studying the polarization characteristics of the polarizing polarizer 21 under different large-angle incident conditions, it is necessary to adjust the setting direction of the polarizing polarizer 21 multiple times to adjust the incident angle of the incident light, and then repeat the above steps, the measurement process Extremely tedious and inefficient testing. Therefore, finding a simple and efficient method for measuring the extinction ratio and polarization angle of a polarizer under different incident angles is a technical problem to be solved at present.
本發明的目的在於提供一種偏振測量裝置或方法，以提高偏振器在不同入射角度情况下的消光比及偏光角度的測試效率，簡化其測試過程。The purpose of the present invention is to provide a polarization measuring device or method to improve the test efficiency of the extinction ratio and polarization angle of a polarizer under different incident angles and simplify the test process.
爲了達到上述目的，本發明提供了一種偏振測量裝置，包括光源、第一偏振器、第二偏振器、旋轉模組、圖像感測器及分析模組，所述光源發出的多個具有不同入射角度的光線經過所述第一偏振器起偏，並經過所述第二偏振器後被所述圖像感測器探測，所述旋轉模組驅動所述第二偏振器以所述第二偏振器的法線方向爲轉動軸以步進方式按照一定的角度進行旋轉，所述圖像感測器獲取所述第二偏振器每旋轉一個角度後經過所述第二偏振器後產生的與所述多個具有不同入射角度的光線對應的多個偏振光的成像訊息，所述分析模組根據所述成像訊息以及所述第二偏振器的旋轉角度計算所述第一偏振器在不同入射角度下的偏振特性。In order to achieve the above object, the present invention provides a polarization measurement device including a light source, a first polarizer, a second polarizer, a rotation module, an image sensor, and an analysis module. Light at an incident angle is polarized by the first polarizer, and is detected by the image sensor after passing through the second polarizer, and the rotation module drives the second polarizer to use the second polarizer to The normal direction of the polarizer is a rotation axis that rotates in a stepwise manner at a certain angle. The image sensor obtains the sum of the second polarizer generated after each rotation of the second polarizer after passing through the second polarizer. The plurality of polarized light imaging information corresponding to the plurality of rays having different incident angles, and the analysis module calculates the first polarizer at different incidences according to the imaging information and a rotation angle of the second polarizer. Polarization characteristics at different angles.
可選的，所述光源、所述第一偏振器、所述第二偏振器及所述圖像感測器的中心軸相互對準。Optionally, the central axes of the light source, the first polarizer, the second polarizer, and the image sensor are aligned with each other.
可選的，所述光線爲自然光。Optionally, the light is natural light.
可選的，所述偏振測量裝置還包括光欄及準直透鏡，所述光源發出的光線依次經過所述第一偏振器起偏、經過所述光欄進行角度約束以及經過所述準直透鏡準直後入射到所述第二偏振器。Optionally, the polarization measuring device further includes a light bar and a collimating lens, and the light emitted by the light source is sequentially polarized by the first polarizer, is subjected to an angle constraint by the light bar, and passes through the collimating lens. It is incident on the second polarizer after collimating.
可選的，所述旋轉模組包括旋轉電機和安裝盒，所述第二偏振器安裝在所述安裝盒上，所述旋轉電機驅動所述安裝盒旋轉。Optionally, the rotation module includes a rotation motor and a mounting box, the second polarizer is mounted on the mounting box, and the rotation motor drives the mounting box to rotate.
可選的，所述圖像感測器爲CCD圖像感測器。Optionally, the image sensor is a CCD image sensor.
可選的，所述圖像感測器包括多個像素點形成的像素陣列，每個所述像素點用於採集與相應的一入射角度對應的偏振光的成像訊息。Optionally, the image sensor includes a pixel array formed by a plurality of pixels, and each of the pixels is used to collect imaging information of polarized light corresponding to a corresponding incident angle.
可選的，所述圖像感測器採集的成像訊息包括各所述像素點採集的偏振光的光强訊息以及各所述像素點相對於所述光源的相位訊息。Optionally, the imaging information collected by the image sensor includes light intensity information of polarized light collected by each of the pixels and phase information of each of the pixels relative to the light source.
可選的，所述偏振測量裝置還包括框架，所述第一偏振器、所述光欄、所述準直透鏡、所述第二偏振器、所述安裝盒及所述旋轉電機均設置在所述框架上。Optionally, the polarization measuring device further includes a frame, and the first polarizer, the light barrier, the collimator lens, the second polarizer, the mounting box, and the rotating motor are all disposed at On the frame.
可選的，所述第一偏振器和第二偏振器均爲透射式偏振器。Optionally, the first polarizer and the second polarizer are both transmissive polarizers.
爲了達到上述目的，本發明還提供了一種採用上述任意一項所述偏振測量裝置的偏振測量方法，包括：In order to achieve the above object, the present invention further provides a polarization measurement method using any of the polarization measurement devices described above, including:
光源發出的多個具有不同入射角度的光線經過第一偏振器以及第二偏振器後得到與所述多個具有不同入射角度的光線對應的多個偏振光；A plurality of light rays with different incident angles from the light source pass through the first polarizer and the second polarizer to obtain a plurality of polarized lights corresponding to the plurality of light rays with different incident angles;
驅動所述第二偏振器按照預設的速度以步進方式按照一定的角度並以所述第二偏振器的法線爲轉動軸旋轉；Driving the second polarizer to rotate in a stepwise manner according to a preset speed at a certain angle and using the normal of the second polarizer as a rotation axis;
利用圖像感測器獲取所述第二偏振器每旋轉一個角度後經過所述第二偏振器的所述偏振光的成像訊息；以及Using an image sensor to obtain imaging information of the polarized light passing through the second polarizer after each rotation of the second polarizer by an angle; and
分析模組根據所述成像訊息以及所述第二偏振器的旋轉角度計算所述第一偏振器在不同入射角度下的偏振特性。The analysis module calculates the polarization characteristics of the first polarizer at different incident angles based on the imaging information and the rotation angle of the second polarizer.
可選的，還包括：Optional, also includes:
藉由光欄對經過所述第一偏振器的所述光線進行角度約束；以及Angularly constrain the light passing through the first polarizer by a light bar; and
藉由準直透鏡對經過所述光欄的所述光線進行準直。The light passing through the light barrier is collimated by a collimating lens.
可選的，所述圖像感測器採集的成像訊息包括所述圖像感測器中的每個像素點採集的與具有對應的入射角度的光線相關的光强訊息以及所述圖像感測器中各個像素點相對於所述光源的相位訊息。Optionally, the imaging information collected by the image sensor includes light intensity information related to light having a corresponding incident angle collected by each pixel point in the image sensor, and the image sensor Phase information of each pixel in the detector relative to the light source.
可選的，所述第二偏振器的累計旋轉角度至少爲180度。Optionally, the cumulative rotation angle of the second polarizer is at least 180 degrees.
可選的，所述分析模組根據所述成像訊息以及所述第二偏振器的旋轉角度計算所述第一偏振器在不同入射角度下的偏振特性的步驟包括：Optionally, the step of calculating, by the analysis module, the polarization characteristics of the first polarizer at different incident angles according to the imaging information and the rotation angle of the second polarizer includes:
藉由所述圖像感測器上各個像素點相對於所述光源的相位訊息確定各個像素點對應的光線的入射角度；Determining an incident angle of light corresponding to each pixel point by using phase information of each pixel point on the image sensor with respect to the light source;
提取所述圖像感測器上每個像素點在所述第二偏振器的不同旋轉角度下採集到的光强訊息以得到圖像灰度值，根據馬呂斯定律進行三角函數擬合得到擬合曲線；Extract the light intensity information collected by each pixel on the image sensor at different rotation angles of the second polarizer to obtain the image gray value, and obtain a trigonometric function fitting according to Marius's law Curve fitting;
根據所述擬合曲線得到各個像素點對應的偏振光的偏振特性，進而得到所述第一偏振器在不同入射角度下的偏振特性。The polarization characteristics of the polarized light corresponding to each pixel point are obtained according to the fitting curve, and then the polarization characteristics of the first polarizer at different incident angles are obtained.
可選的，根據所述擬合曲線得到各個像素點對應的偏振光的偏振特性的步驟包括：Optionally, the step of obtaining the polarization characteristic of the polarized light corresponding to each pixel according to the fitting curve includes:
根據所述圖像灰度值的最大值與所述圖像灰度值的最小值的比值確定各個像素點對應的偏振光的消光比，進而得到所述第一偏振器在各個像素點對應的不同入射角度下的光線的消光比；Determine the extinction ratio of the polarized light corresponding to each pixel according to the ratio of the maximum value of the image gray value to the minimum value of the image gray value, and further obtain the corresponding value of the first polarizer at each pixel Extinction ratio of light at different incident angles;
根據所述圖像灰度值的最大值對應的所述第二偏振器的旋轉角度確定各個像素點對應的偏振光的偏光角度，進而得到所述第一偏振器在各個像素點對應的不同入射角度下的光線的偏光角度。Determine the polarization angle of the polarized light corresponding to each pixel point according to the rotation angle of the second polarizer corresponding to the maximum value of the image gray value, and further obtain different incidents corresponding to each pixel point of the first polarizer The polarization angle of the light under the angle.
此外，本發明還提供了一種光配向方法，採用上述任意一項所述的偏振測量方法對用於光配向的偏振片的偏振特性進行測量。In addition, the present invention also provides a light alignment method. The polarization measurement method according to any one of the above is used to measure the polarization characteristics of a polarizer for light alignment.
與現有技術相比，本發明以圖像感測器進行偏振訊息的採集，利用圖像感測器中像素陣列的不同像素點對不同入射角度的光進行偏振測量，只需要對起偏偏振器在某一個入射角度範圍內的與多個不同入射角度的光線對應的多個偏振進行一個周期內的測量採集，就可以根據不同像素點上的入射光强度訊息和入射光相位訊息（像素點相對於光源的位置訊息）計算得出起偏偏振器在不同入射角度下的偏振特性，精簡了偏振測試過程，有效地提高了測試效率。Compared with the prior art, the present invention uses an image sensor to collect polarization information, and uses different pixel points of a pixel array in the image sensor to perform polarization measurement of light at different angles of incidence, and only requires a polarizing polarizer By measuring and collecting a plurality of polarizations corresponding to a plurality of light rays with different incident angles within a certain range of incident angles in one cycle, the incident light intensity information and incident light phase information at different pixels (pixel relative Based on the position information of the light source), the polarization characteristics of the polarizing polarizer at different incident angles are calculated, the polarization test process is simplified, and the test efficiency is effectively improved.
下面將結合示意圖對本發明的具體實施方式進行更詳細的描述。根據下列描述和申請專利範圍書，本發明的優點和特徵將更清楚。需說明的是，附圖均採用非常簡化的形式且均使用非精準的比例，僅用以方便、明晰地輔助說明本發明實施例的目的。The specific embodiments of the present invention will be described in more detail below with reference to the schematic diagrams. The advantages and features of the present invention will become clearer from the following description and patent application. It should be noted that the drawings are in a very simplified form and all use inaccurate proportions, which are only used to facilitate and clearly assist the description of the embodiments of the present invention.
發明人曾經嘗試採用如第3圖所示的偏振片消光比、偏光角度測量方式對偏振片進行測量，當研究檢偏偏振器21在不同大角度入射情况下的偏振特性時，需要多次頻繁地旋轉檢偏偏振器21以調節入射光的入射角度，再重複以上步驟，測量過程極爲繁瑣，測試效率低下。The inventor has tried to measure the polarizing plate by using the polarizing plate extinction ratio and polarizing angle measurement methods shown in Fig. 3. When researching the polarization characteristics of the polarizer 21 under different large-angle incident conditions, it needs to be repeated many times. Rotate the analyzer polarizer 21 to adjust the incident angle of the incident light, and then repeat the above steps. The measurement process is extremely tedious and the test efficiency is low.
如第7圖所示，採用圖像感測器來採集經過檢偏偏振器檢偏的光斑訊息時，不僅能採集到光斑的能量訊息，還可以利用圖像感測器中像素陣列上的不同像素點相對於光源的位置確定光斑的相位訊息。As shown in Figure 7, when an image sensor is used to collect light spot information that has been detected by an analyzer polarizer, not only the energy information of the light spot can be collected, but also the difference on the pixel array in the image sensor can be used. The position of the pixel relative to the light source determines the phase information of the light spot.
本發明提出一種偏振測量裝置及測量方法，使用圖像感測器代替能量探測器對檢偏後的偏振光進行採集測量，在採集光斑能量訊息的同時，利用像素陣列上的不同像素點採集入射到該像素點上的光線的相位訊息，只需要對起偏偏振器在具有一定入射角度範圍（即包含多個不同入射角度）的自然光下的偏振進行測量採集，再結合圖像感測器拍攝到的圖像光强訊息及每個像素點對應的相位訊息進行數據處理，就能夠有效地計算得到起偏偏振器在該不同入射角度（如第7圖中的方位角θ、極化角ψ）下的消光比及偏光角度。The invention provides a polarization measurement device and a measurement method. An image sensor is used instead of an energy detector to collect and measure polarized light after analysis. While collecting light spot energy information, using different pixel points on a pixel array to collect incident light. The phase information of the light at the pixel point only needs to measure and collect the polarization of the polarizing polarizer in natural light with a certain range of incident angles (that is, contains multiple different incident angles), and then take a picture with the image sensor The processed image light intensity information and phase information corresponding to each pixel are processed by data to effectively calculate the polarizing polarizer at the different incident angles (such as the azimuth angle θ and the polarization angle ψ in Figure 7). ) Extinction ratio and polarization angle.
下面將結合第4圖-第10圖詳細介紹本發明實施例的內容。The content of the embodiment of the present invention will be described in detail below with reference to FIGS. 4 to 10.
如第4圖所示，本發明實施例提出一種偏振測量裝置，該偏振測量裝置包括光源12、起偏偏振器22、檢偏偏振器52、圖像感測器7、旋轉模組以及分析模組（圖中未畫出），光源12發出的包含多個不同入射角度的光經過起偏偏振器22起偏，經過檢偏偏振器52檢偏後入射圖像感測器7，所述旋轉模組驅動檢偏偏振器52以檢偏偏振器52的法線方向爲轉動軸旋轉，圖像感測器7實時獲取檢偏後的與多個不同入射角度的光線對應的多個偏振光的成像訊息，所述分析模組接收獲取的成像訊息以及檢偏偏振器52的轉動角度計算確定所述起偏偏振器22在不同入射角度下的偏振特性。As shown in FIG. 4, an embodiment of the present invention provides a polarization measurement device. The polarization measurement device includes a light source 12, a polarizing polarizer 22, an analyzer polarizer 52, an image sensor 7, a rotation module, and an analysis module. In the group (not shown in the figure), the light emitted by the light source 12 and including a plurality of different incident angles is polarized by the polarizing polarizer 22, and is incident on the image sensor 7 after being polarized by the analyzer polarizer 52. The module-driven polarization analyzer 52 rotates with the normal direction of the polarization analyzer 52 as a rotation axis, and the image sensor 7 acquires the polarization of a plurality of polarized light corresponding to a plurality of light at different angles of incidence after the analysis in real time. For imaging information, the analysis module receives the acquired imaging information and calculates the rotation angle of the analyzer polarizer 52 to determine the polarization characteristics of the polarizing polarizer 22 at different incident angles.
其中，所述偏振測量裝置還包括小孔光欄32及準直透鏡42，所述旋轉模組包括旋轉電機8和檢偏器安裝盒9，檢偏偏振器52安裝於檢偏器安裝盒9上，檢偏器安裝盒9安裝在高精度的旋轉電機8上，旋轉電機8驅動檢偏器安裝盒9以檢偏偏振器52的法線方向爲轉動軸進行旋轉，從而驅動檢偏偏振器52以其法線方向爲轉動軸進行旋轉。在此，檢偏偏振器52水平安裝在檢偏器安裝盒9上，旋轉電機8驅動檢偏器安裝盒9以檢偏偏振器52的法線方向爲轉動軸進行旋轉，也即驅動檢偏器安裝盒9以其自身的法線方向爲轉動軸進行旋轉。The polarization measuring device further includes a small-hole light barrier 32 and a collimating lens 42. The rotation module includes a rotating motor 8 and an analyzer mounting box 9. The polarization analyzer 52 is mounted on the analyzer mounting box 9. In the above, the analyzer mounting box 9 is mounted on a high-precision rotating electric machine 8. The rotary motor 8 drives the analyzer mounting box 9 to rotate with the normal direction of the analyzer polarizer 52 as a rotation axis, thereby driving the analyzer polarizer. 52 rotates with its normal direction as the rotation axis. Here, the analyzer polarizer 52 is horizontally mounted on the analyzer mounting box 9, and the rotary motor 8 drives the analyzer mounting box 9 to rotate with the normal direction of the analyzer polarizer 52 as a rotation axis, that is, to drive the analyzer The device mounting box 9 rotates with its own normal direction as the rotation axis.
可選的，如第4圖所示，該偏振測量裝置還包括框架10，起偏偏振器22、小孔光欄32、準直透鏡42、檢偏偏振器52、檢偏器安裝盒9及旋轉電機8均設置在框架10上。Optionally, as shown in FIG. 4, the polarization measuring device further includes a frame 10, a polarizing polarizer 22, a small-hole light bar 32, a collimating lens 42, an analyzer polarizer 52, an analyzer mounting box 9, and The rotating electric machines 8 are all disposed on the frame 10.
如第4圖和第5圖所示，光源12、起偏偏振器22、小孔光欄32、準直透鏡42、檢偏偏振器52及圖像感測器7的中心相互對準，且起偏偏振器22、準直透鏡42、檢偏偏振器52及圖像感測器7四者沿著起偏偏振器22法線的方向平行設置，即上述一系列器件的中心軸相互對準。As shown in FIGS. 4 and 5, the centers of the light source 12, the polarizing polarizer 22, the small aperture light barrier 32, the collimating lens 42, the polarization analyzer 52 and the image sensor 7 are aligned with each other, and The polarizing polarizer 22, the collimating lens 42, the analyzer polarizer 52, and the image sensor 7 are arranged in parallel along the direction of the normal of the polarizing polarizer 22, that is, the central axes of the series of devices are aligned with each other. .
可選的，光源12爲非準直光源，發出的光爲自然光。Optionally, the light source 12 is a non-collimated light source, and the light emitted is natural light.
可選的，準直透鏡42的數值孔徑可根據測試需求靈活選擇，當準直透鏡42的數值孔徑（NA）大於0.7，其能夠接收的入射光的角度（與透鏡的主光軸的夾角）大於45°。Optionally, the numerical aperture of the collimator lens 42 can be flexibly selected according to test requirements. When the numerical aperture (NA) of the collimator lens 42 is greater than 0.7, the angle of the incident light (angle between the collimator lens 42 and the main optical axis of the lens) can be received. More than 45 °.
可選的，起偏偏振器22及檢偏偏振器52可選用如第1圖所示的線栅偏振片；起偏偏振器22和檢偏偏振器52均爲透射式偏振器，二者對光進行透射偏振。Optionally, the polarizing polarizer 22 and the analyzer polarizer 52 may use a wire grid polarizer as shown in FIG. 1; the polarizing polarizer 22 and the analyzer polarizer 52 are both transmissive polarizers. The light is transmitted polarized.
可選的，圖像感測器6爲CCD圖像感測器。當然，圖像感測器6也能選取CMOS圖像感測器，可根據測試的精度需求和成本做靈活選擇。所述圖像感測器6包括多個像素點形成的像素陣列，各所述像素點用於採集不同入射角度的光的光强訊息。Optionally, the image sensor 6 is a CCD image sensor. Of course, the image sensor 6 can also select a CMOS image sensor, which can be flexibly selected according to the accuracy requirements and cost of the test. The image sensor 6 includes a pixel array formed by a plurality of pixels, and each of the pixels is used to collect light intensity information of light at different incident angles.
如第5圖所示，光源12發射出的自然光，經起偏偏振器22進行起偏，再藉由小孔光欄32進行角度約束，透過小孔光欄32 的光經過準直透鏡42進行準直後入射到檢偏偏振器52，經準直後的偏振光透過檢偏偏振器52進行檢偏，檢偏後的偏振光射入圖像感測器7，在圖像感測器7上成像，形成光斑。As shown in FIG. 5, the natural light emitted by the light source 12 is polarized by the polarizing polarizer 22, and then angle-constrained by the small-hole light barrier 32, and the light transmitted through the small-hole light barrier 32 is performed by the collimating lens 42. After collimating, it enters the analyzer polarizer 52. The collimated polarized light passes through the analyzer polarizer 52 for analysis. The polarized light after the collimation enters the image sensor 7 and forms an image on the image sensor 7. To form a light spot.
如第6圖所示，檢偏後的偏振光在圖像感測器7的像素陣列71上形成光斑S，圖像感測器7上的像素陣列71記錄下光斑S的形貌與灰度。As shown in FIG. 6, the polarized light after the analysis forms a light spot S on the pixel array 71 of the image sensor 7, and the pixel array 71 on the image sensor 7 records the shape and grayscale of the light spot S. .
此外，藉由圖像感測器7的像素陣列71中各個像素點711不僅能採集記錄入射光線的光强訊息，還能確定光線的相位訊息，即像素點711相對於光源12的位置訊息，如第7圖所示，可藉由當前像素點相對於光源12的位置訊息確定入射到當前像素點上的光線的入射角度（θ，ψ），其中，θ表示方位角，取值0-90°，ψ表示極化角，取值0-360°。In addition, each pixel point 711 in the pixel array 71 of the image sensor 7 can not only collect and record the light intensity information of the incident light, but also determine the phase information of the light, that is, the position information of the pixel point 711 relative to the light source 12, As shown in Figure 7, the incident angle (θ, ψ) of the light incident on the current pixel can be determined by the position information of the current pixel with respect to the light source 12, where θ represents the azimuth angle, and the value is 0-90 °, ψ represents the polarization angle, and the value is 0-360 °.
在使用該測量裝置測試的時候，利用高精度的旋轉電機8控制檢偏偏振器52按照預設的速度及以步進方式按照一定的角度進行旋轉；同時，檢偏偏振器5每旋轉一個角度，利用圖像感測器7採集記錄下此時光斑S的形貌與灰度，並記錄下對應的檢偏偏振器52的旋轉角度值。When testing with this measuring device, the high-precision rotating motor 8 is used to control the analyzer polarizer 52 to rotate at a predetermined speed and in a stepwise manner at a certain angle; at the same time, each time the analyzer polarizer 5 is rotated by an angle The image sensor 7 is used to collect and record the shape and gray level of the light spot S at this time, and record the corresponding rotation angle value of the analyzer polarizer 52.
所述分析模組接收獲取圖像感測器7的像素陣列71中各個像素點711採集到的入射光線的光强訊息及相位訊息，並據此計算確定起偏偏振器22的偏振特性。The analysis module receives light intensity information and phase information of the incident light collected by each pixel point 711 in the pixel array 71 of the image sensor 7, and calculates and determines the polarization characteristics of the polarizing polarizer 22 based on the information.
同時，本發明實施例還提供一種利用上述測量裝置測量檢偏偏振器的偏振特性的方法，如第8圖所示，該測量方法包括步驟：At the same time, an embodiment of the present invention also provides a method for measuring the polarization characteristics of an analyzer polarizer by using the measurement device. As shown in FIG. 8, the measurement method includes steps:
S1、採用起偏偏振器22對光源12發出的包含多個不同入射角度的自然光進行起偏，得到偏振光；S1. A polarizing polarizer 22 is used to polarize the natural light emitted by the light source 12 including a plurality of different incident angles to obtain polarized light;
S2、藉由檢偏偏振器52對所述偏振光進行檢偏；S2. Analyze the polarized light by using an analyzer polarizer 52.
S3、驅動檢偏偏振器52按照預設的速度及以步進方式按照一定的角度並以檢偏偏振器52的法線方向爲轉動軸旋轉，利用圖像感測器7實時獲取檢偏偏振器52每旋轉一個角度後檢偏的偏振光的成像訊息；以及S3. The polarization analyzer 52 is driven to rotate at a preset speed and in a stepwise manner at a certain angle and with the normal direction of the polarization analyzer 52 as the rotation axis. The image sensor 7 is used to obtain the polarization in real time. The imaging information of the polarized light that is detected after each rotation of the angler 52; and
S4、利用分析模組根據所述成像訊息以及所述檢偏偏振器52的旋轉角度計算起偏偏振器22在不同入射角度下的偏振特性。S4. Use the analysis module to calculate the polarization characteristics of the polarizing polarizer 22 at different incident angles based on the imaging information and the rotation angle of the analyzer polarizer 52.
可選的，在起偏偏振器22進行起偏之後，在檢偏偏振器52進行檢偏之前，即在步驟S1與S2之間，該測量方法還包括步驟：Optionally, after the polarizing polarizer 22 performs the polarization and before the polarizing analyzer 52 performs the analysis, that is, between steps S1 and S2, the measurement method further includes the following steps:
（1）、藉由小孔光欄32對所述偏振光進行角度約束；(1) Angularly constrain the polarized light through the small-hole light bar 32;
（2）、藉由準直透鏡42對經過所述小孔光欄32進行角度約束後的所述偏振光進行準直。(2) The collimated lens 42 is used to collimate the polarized light that has undergone the angle constraint by the small-hole light barrier 32.
其中，檢偏偏振器52的旋轉速度與步進的角度參數由測試所需的數據採樣率與圖像感測器7的採集速率等參數决定，可根據不同的參數與需求做靈活調整。The rotation speed and step angle parameters of the analyzer polarizer 52 are determined by parameters such as the data sampling rate required for testing and the acquisition rate of the image sensor 7, and can be flexibly adjusted according to different parameters and requirements.
在步驟S3中，採集得到的成像訊息包括採集到的光强訊息（及根據所述光强訊息能夠得到圖像灰度值H）以及各個像素點對應的相位訊息。In step S3, the acquired imaging information includes the collected light intensity information (and the image gray value H can be obtained according to the light intensity information) and the phase information corresponding to each pixel point.
對檢偏後的成像訊息而言，由透振光强度公式馬呂斯定律：可知，圖像感測器7得到的圖像灰度值H與檢偏偏振器52的旋轉角度同樣呈三角函數關係，其中，I表示透射光的光强，I0 表示透射光的最大光强，是起偏偏振器22的偏振方向與檢偏偏振器52的偏振方向間的夾角，H表示採集的圖像灰度值，H0 表示圖像灰度值的最大值，是檢偏偏振器的旋轉角度，常數C爲檢偏偏振器52的初始偏振方向與起偏偏振器22的偏振方向之間的夾角。 For the imaging information after analysis, according to the transmitted light intensity formula, Marius's law: It can be seen that the image gray value H obtained by the image sensor 7 and the rotation angle of the analyzer polarizer 52 Trigonometric function , Where I represents the intensity of transmitted light, and I 0 represents the maximum intensity of transmitted light, Is the angle between the polarization direction of the polarizing polarizer 22 and the polarization direction of the analyzer polarizer 52, H represents the gray value of the collected image, and H 0 represents the maximum value of the gray value of the image, Is the rotation angle of the analyzer polarizer, and the constant C is the angle between the initial polarization direction of the analyzer polarizer 52 and the polarization direction of the polarizer polarizer 22.
如第10圖所示，由於圖像感測器7得到的圖像灰度值H與檢偏偏振器52的旋轉角度呈三角函數關係，所以，在測試過程中，檢偏偏振器52需要至少旋轉半周（即，旋轉180°）以保證數據採樣完整性，即至少採集得到一個周期內的數據。任意的，檢偏偏振器52每次旋轉10度，每次旋轉後停頓5秒鐘，以便圖像感測器7進行成像訊息的採集，再繼續旋轉，總共旋轉18-36次。As shown in FIG. 10, the gray value H of the image obtained by the image sensor 7 and the rotation angle of the analyzer polarizer 52 Trigonometric relationship Therefore, during the test, the analyzer polarizer 52 needs to be rotated at least half a circle (that is, rotated by 180 °) to ensure the integrity of the data sampling, that is, to collect at least one period of data. Optionally, the analyzer polarizer 52 rotates 10 degrees each time, and pauses for 5 seconds after each rotation, so that the image sensor 7 collects imaging information, and then continues to rotate, rotating a total of 18-36 times.
在步驟S4中，藉由所述分析模組接收獲取一系列的成像訊息（光强訊息（及相應的圖像灰度值H）、像素點的相位訊息）以及檢偏偏振器52的旋轉角度，並據此計算起偏偏振器22在不同入射角度（θ，ψ）下的偏振特性，包括消光比與偏光角度。In step S4, a series of imaging information (light intensity information (and corresponding image gray value H), pixel phase information) and the rotation angle of the analyzer polarizer 52 are obtained by the analysis module. Based on this, the polarization characteristics of the polarizing polarizer 22 at different incident angles (θ, ψ) are calculated, including the extinction ratio and the polarization angle.
具體的，結合第9圖，利用分析模組根據所述成像訊息計算起偏偏振器22在不同入射角度下的偏振特性的步驟S4包括：Specifically, in combination with FIG. 9, using the analysis module to calculate the polarization characteristics of the polarizing polarizer 22 at different incident angles according to the imaging information, step S4 includes:
S41、藉由圖像感測器7上各個像素點711與光源12的相對位置確定當前像素點上自然光的入射角度（θ，ψ），得到圖像感測器7的入射角度雲圖；S41. Determine the incident angle (θ, ψ) of natural light on the current pixel by the relative positions of each pixel point 711 and the light source 12 on the image sensor 7 to obtain an incident angle cloud image of the image sensor 7;
S42、提取圖像感測器7上每個像素點711在檢偏偏振器52的不同旋轉角度下採集到的光强訊息並得到的相應圖像灰度值H，根據馬呂斯定律進行三角函數擬合得到擬合曲線；S42. Extracting different rotation angles of each pixel point 711 on the image sensor 7 in the analyzer polarizer 52 The light intensity information is collected and the corresponding image gray value H is obtained, and a triangular function is fitted according to Marius's law to obtain a fitting curve;
S43、根據擬合得到的擬合曲線計算確定各個像素點對應的偏振光的偏振特性，得到圖像感測器7對應的偏振特性雲圖，再結合入射角度雲圖與偏振特性雲圖得到起偏偏振器22在不同入射角度（θ，ψ）下的偏振特性。S43. Calculate and determine the polarization characteristics of the polarized light corresponding to each pixel according to the fitted curve obtained by the fitting, obtain the polarization characteristic cloud image corresponding to the image sensor 7, and then combine the incident angle cloud image and the polarization characteristic cloud image to obtain a polarizing polarizer. 22 Polarization characteristics at different angles of incidence (θ, ψ).
可選的，在步驟S41中，參見第7圖，在所述分析模組中，根據測量裝置的結構計算光的入射角度，針對像素陣列71中的各個像素點711，根據當前像素點711與光源12的相對位置確定入射到該像素點711上的入射光線的入射角度（θ，ψ），從而可以得到不同像素點711上入射光線的入射角度雲圖。Optionally, in step S41, referring to FIG. 7, in the analysis module, the incident angle of light is calculated according to the structure of the measurement device, and for each pixel point 711 in the pixel array 71, according to the current pixel point 711 and The relative position of the light source 12 determines the incident angles (θ, ψ) of the incident light rays incident on the pixel point 711, so that the incident angle clouds of the incident light rays on different pixel points 711 can be obtained.
在步驟S42中，參見第9圖，針對像素陣列71中的各個像素點711，旋轉檢偏偏振器52至少半周並採集每次旋轉過一個角度後的光强訊息並得到相應的圖像灰度值H，提取得到的所有圖像灰度值H與對應的檢偏偏振器52的旋轉角度，根據馬呂斯定律進行三角函數擬合，得到如第10圖所示的擬合三角函數曲線。In step S42, referring to FIG. 9, for each pixel point 711 in the pixel array 71, the polarization analyzer 52 is rotated at least half a circle and the light intensity information after each rotation is collected to obtain the corresponding image gray level. Value H, the gray value H of all the images extracted and the rotation angle of the corresponding analyzer polarizer 52 According to the trigonometric function fitting according to Marius's law, the fitted trigonometric function curve shown in Fig. 10 is obtained.
在步驟S43中，由當前像素點的成像訊息的數據擬合得到的三角函數曲線後，再由所述擬合三角函數曲線求出當前像素點的消光比與偏光角度，進而求出像素陣列71的消光比雲圖與偏光角度雲圖，得到圖像感測器7對應的偏振特性雲圖，進而得到起偏偏振器22在不同入射角度（θ，ψ）下的偏振特性。可選的，根據擬合得到的三角函數計算確定各個像素點對應的偏振光的偏振特性的步驟S43包括：In step S43, after the trigonometric function curve obtained by fitting the data of the imaging information of the current pixel point, the extinction ratio and polarization angle of the current pixel point are obtained from the fitted trigonometric function curve, and then the pixel array 71 is obtained. The extinction ratio cloud image and polarized light angle cloud image are used to obtain the polarization characteristic cloud image corresponding to the image sensor 7, and then the polarization characteristics of the polarizing polarizer 22 at different incident angles (θ, ψ) are obtained. Optionally, the step S43 of calculating and determining the polarization characteristic of the polarized light corresponding to each pixel point according to the fitted trigonometric function includes:
S431、根據圖像灰度值H的最大值H0 與圖像灰度值H的最小值H1 的比值確定各個像素點對應的偏振光的消光比，進而得到起偏偏振器22在各個像素點對應的不同入射角度下的入射光的消光比；S431. Determine the extinction ratio of the polarized light corresponding to each pixel according to the ratio of the maximum value H 0 of the image gray value H and the minimum value H 1 of the image gray value H, and further obtain the polarizing polarizer 22 at each pixel. Extinction ratio of incident light at different incident angles corresponding to points;
S432、根據圖像灰度值H的最大值H0 對應的檢偏偏振器52的旋轉角度確定各個像素點對應的偏振光的偏光角度，進而得到起偏偏振器22在各個像素點對應的不同入射角度下的入射光的偏光角度。S432. The rotation angle of the analyzer polarizer 52 corresponding to the maximum value H 0 of the image gray value H The polarization angle of the polarized light corresponding to each pixel point is determined, and the polarization angle of the incident light at different incident angles corresponding to each pixel point of the polarizing polarizer 22 is obtained.
其中，如第10圖所示，針對每個像素點，根據擬合三角函數曲線能求出當前像素點的圖像灰度值的最大值H0 與圖像灰度值的最小值H1 。根據圖像灰度值的最大值H0 與圖像灰度值的最小值H1 計算消光比，圖像灰度值的最大值H0 與圖像灰度值的最小值H1 的比值即爲起偏偏振器22在入射角度（θ，ψ）下的消光比；根據圖像灰度值的最大值H0 確定偏光角度，圖像灰度值的最大值H0 對應的旋轉角度值爲起偏偏振器22在入射角度（θ，ψ）下的偏光角度。Among them, as shown in FIG. 10, for each pixel point, the maximum value of the image gray value H 0 and the minimum value of the image gray value H 1 of the current pixel point can be obtained according to the fitted trigonometric function curve. The ratio of the minimum value Min H H H 0 and the maximum value of the image intensity maximum gray scale value image and the image gradation value H 0 calculated extinction ratio, the image intensity, i.e., 11 since the extinction ratio for the polarizer of 22 degrees at the incident angle (θ, ψ); the maximum value of the rotation angle of the image intensity H 0 polarization angle is determined, the image intensity value corresponding to the maximum value of H 0 Is the polarization angle of the polarizing polarizer 22 at the angle of incidence (θ, ψ).
最終，藉由像素陣列71上各個像素711的一一對應，將步驟S41中得到的入射角度雲圖與步驟S43中的消光比雲圖或偏光角度雲圖結合在一起，得到起偏偏振器22在不同入射角度（θ，ψ）下的消光比與偏光角度。Finally, with the one-to-one correspondence of each pixel 711 on the pixel array 71, the incident angle cloud image obtained in step S41 and the extinction ratio cloud image or polarized angle cloud image in step S43 are combined to obtain the polarizing polarizer 22 at different incidences. Extinction ratio and polarization angle at angles (θ, ψ).
如第10圖所示，在擬合的三角函數曲線上，在某一個周期（180°）內，圖像灰度值的最大值H0 在A點，圖像灰度值的最小值H1 在B點，採集擬合曲線上A、B點對應的圖像灰度值H0 與H1 ，二者的比值即爲當前像素點的消光比；採集擬合曲線上A點對應的旋轉角度值，旋轉角度值即爲當前像素點上起偏偏振器22的偏光角度；再結合當前像素點與光源12的相對位置計算得出光線的入射角度（θ，ψ），最終可以藉由像素陣列71上不同的像素711得出起偏偏振器22在不同入射角度（θ，ψ）下的消光比與偏光角度，進而得到起偏偏振器22在不同入射角度（θ，ψ）下的偏振特性。As shown in Figure 10, on the fitted trigonometric function curve, in a certain period (180 °), the maximum value of the gray value of the image H 0 is at point A, and the minimum value of the gray value of the image H 1 At point B, the image gray values H 0 and H 1 corresponding to points A and B on the fitting curve are collected, and the ratio between the two is the extinction ratio of the current pixel point; the rotation angle corresponding to point A on the fitting curve is collected. value , Rotation angle value That is the polarization angle of the polarizing polarizer 22 at the current pixel point; combined with the relative position of the current pixel point and the light source 12 to calculate the incident angle (θ, ψ) of the light, finally different pixels on the pixel array 71 711 obtains the extinction ratio and polarization angle of the polarizing polarizer 22 at different incident angles (θ, ψ), and further obtains the polarization characteristics of the polarizing polarizer 22 at different incident angles (θ, ψ).
此外，本發明實施例還提供了一種光配向方法，採用上述任意一項所述的偏振測量方法對用於光配向的偏振片的偏振特性進行測量。藉由圖像感測器只需要對某一個入射角度範圍內（即具有多個不同角度的光線）的偏振成像訊息進行一次的周期採集，不需要多次旋轉起偏偏振器以調節入射角度並對偏振成像訊息進行多次重複的周期採集，就能計算得出起偏偏振器在不同入射角度下的偏振特性。In addition, an embodiment of the present invention also provides a light alignment method. The polarization measurement method according to any one of the foregoing is used to measure the polarization characteristics of a polarizer for light alignment. The image sensor only needs to collect the polarization imaging information within a certain incident angle range (that is, light with multiple different angles) once. It does not need to rotate the polarizer to adjust the incident angle and Collecting the polarization imaging information repeatedly and periodically, the polarization characteristics of the polarizing polarizer at different incident angles can be calculated.
綜上所述，相比於傳統的測量方法中需要多次旋轉起偏偏振器調節入射角度並重複採集測量以計算得到不同入射角度下的消光比與偏光角度，在本發明實施例的偏振測量裝置與測量方法中，以圖像感測器代替能量探測器進行偏振測量，利用圖像感測器上像素陣列中不同位置處的像素點對不同入射角度的光進行偏振測量，只需要對起偏偏振器在一定入射角度範圍內（即具有多個不同角度）的自然光下的偏振成像訊息進行一個周期的採集測量，就可以結合圖像感測器像素陣列中不同位置處的像素點上的入射光的相位訊息計算得出起偏偏振器在該入射角度範圍內的不同入射角度下的偏振特性，精簡了測試過程，提高了測試效率。In summary, compared with the traditional measurement method, it is necessary to rotate the polarizing polarizer multiple times to adjust the incident angle and repeat the acquisition measurement to calculate the extinction ratio and polarization angle at different incident angles. The polarization measurement in the embodiment of the present invention In the device and the measuring method, an image sensor is used instead of an energy detector for polarization measurement, and pixels at different positions in a pixel array on the image sensor are used for polarization measurement of light at different incident angles. The polarized polarizer polarized imaging information under natural light within a certain range of incident angles (that is, with multiple different angles) is collected and measured in a cycle, which can be combined with the pixel points at different positions in the pixel array of the image sensor. The phase information of the incident light is calculated to obtain the polarization characteristics of the polarizing polarizer at different incident angles within the incident angle range, which simplifies the test process and improves test efficiency.
上述僅爲本發明的較佳實施例而已，並不對本發明起到任何限制作用。任何所屬技術領域的技術人員，在不脫離本發明的技術方案的範圍內，對本發明揭露的技術方案和技術內容做任何形式的等同替換或修改等變動，均屬未脫離本發明的技術方案的內容，仍屬本發明的保護範圍之內。The above are merely preferred embodiments of the present invention, and do not play any limiting role on the present invention. Any person skilled in the art, within the scope not departing from the technical solution of the present invention, make any equivalent replacement or modification to the technical solution and technical content disclosed in the present invention without departing from the technical solution of the present invention. The content still falls within the protection scope of the present invention.
6‧‧‧能量探測器6‧‧‧ Energy Detector
7‧‧‧圖像感測器 7‧‧‧Image sensor
8‧‧‧旋轉電機 8‧‧‧ rotating motor
9‧‧‧檢偏器安裝盒 9‧‧‧ analyzer mounting box
10‧‧‧框架 10‧‧‧Frame
11、12‧‧‧光源 11, 12‧‧‧ light source
21、22‧‧‧起偏偏振器 21, 22‧‧‧ polarizing polarizers
31、32‧‧‧小孔光欄 31, 32‧‧‧ Small Hole Light Bar
42‧‧‧準直透鏡 42‧‧‧ Collimating lens
51、52‧‧‧檢偏偏振器 51, 52‧‧‧analytical polarizer
71‧‧‧像素陣列 71‧‧‧ pixel array
411‧‧‧第一準直透鏡 411‧‧‧The first collimating lens
412‧‧‧第二準直透鏡 412‧‧‧Second collimating lens
711‧‧‧像素點 711‧‧‧pixels
A、B‧‧‧點 A, B‧‧‧ points
a‧‧‧阻擋線條 a‧‧‧ blocking line
b‧‧‧透光基板 b‧‧‧Transparent substrate
H‧‧‧圖像灰度值 H‧‧‧Image gray value
H0‧‧‧最大值H 0 ‧‧‧ maximum
H1‧‧‧最小值H 1 ‧‧‧ minimum
S‧‧‧光斑 S‧‧‧light spot
S1、S2、S3、S4、S41、S42、S43‧‧‧步驟 S1, S2, S3, S4, S41, S42, S43‧‧‧ steps
Z‧‧‧法線方向 Z‧‧‧ normal direction
Z'‧‧‧入射方向 Z'‧‧‧ direction of incidence
θ、ψ‧‧‧角度 θ, ψ‧‧‧ angle
α'‧‧‧旋轉角度 α'‧‧‧ rotation angle
第1圖爲線栅多角度入射示意圖；Figure 1 is a schematic diagram of multi-angle incidence of a wire grid;
第2圖爲現有偏振片偏振特性測試方法的示意圖；FIG. 2 is a schematic diagram of a conventional polarization characteristic test method of a polarizer;
第3圖爲現有偏振片大角度入射偏振特性測試方法的示意圖；FIG. 3 is a schematic diagram of a conventional method for measuring polarization characteristics of a large-angle incident polarizer;
第4圖爲本發明實施例中偏振測量裝置結構示意圖；FIG. 4 is a schematic structural diagram of a polarization measurement device according to an embodiment of the present invention; FIG.
第5圖爲本發明實施例中測量光路示意圖；FIG. 5 is a schematic diagram of a measurement optical path in an embodiment of the present invention; FIG.
第6圖爲本發明實施例中圖像感測器拍攝到的光斑示意圖；FIG. 6 is a schematic diagram of a light spot captured by an image sensor according to an embodiment of the present invention; FIG.
第7圖爲本發明實施例中圖像感測器拍攝光斑的三維示意圖；7 is a three-dimensional schematic diagram of a light spot captured by an image sensor according to an embodiment of the present invention;
第8圖爲本發明實施例中測量方法的步驟示意圖；FIG. 8 is a schematic diagram of steps of a measurement method in an embodiment of the present invention; FIG.
第9圖爲本發明實施例中測量方法中數據處理的流程圖；FIG. 9 is a flowchart of data processing in a measurement method according to an embodiment of the present invention;
第10圖爲本發明實施例中光斑灰度值與檢偏偏振器旋轉角度的三角函數關係示意圖。FIG. 10 is a schematic diagram of a trigonometric function relationship between a spot gray value and a rotation angle of an analyzer polarizer in an embodiment of the present invention.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI731658B (en) * | 2020-04-23 | 2021-06-21 | 友達光電股份有限公司 | Image determination device for metal wire grid polarizer |
| TWI839979B (en) * | 2022-11-30 | 2024-04-21 | 安可光電股份有限公司 | Measuring system and measuring method for measuring die level polarizer |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112577716B (en) * | 2019-09-30 | 2022-06-28 | 上海微电子装备（集团）股份有限公司 | Polarization measuring device and method |
| CN110687586B (en) * | 2019-11-05 | 2021-02-09 | 中国计量科学研究院 | Method and device for measuring polarization degree based on CZT detector |
| CN111562091A (en) * | 2020-06-23 | 2020-08-21 | 昆山鸿仕达智能科技有限公司 | Method and device for measuring azimuth angle of polarizing axis |
| CN111964605B (en) * | 2020-07-22 | 2024-07-02 | 深圳市联赢激光股份有限公司 | Workpiece three-dimensional surface type detection method |
| CN112184668B (en) * | 2020-09-29 | 2022-11-08 | 河海大学 | Method for measuring deflection angle of PVC-gel material |
| CN112379391B (en) * | 2020-09-30 | 2022-11-08 | 西安电子科技大学 | Underwater polarization imaging method and device |
| CN113933024B (en) * | 2021-08-31 | 2023-05-02 | 中国科学院合肥物质科学研究院 | Method for measuring absolute polarization azimuth angle of analyzer in optical remote sensor |
| CN114047190A (en) * | 2021-11-08 | 2022-02-15 | 上海御微半导体技术有限公司 | Detection device and detection method for surface defects |
| CN114324185A (en) * | 2022-01-04 | 2022-04-12 | 浙江大学 | Underwater polarization detection device based on Stokes vector |
| CN114500771B (en) * | 2022-01-25 | 2024-01-30 | 北京经纬恒润科技股份有限公司 | Vehicle-mounted imaging system |
| CN115201117B (en) * | 2022-07-11 | 2024-07-02 | 北京环境特性研究所 | Ultra-high temperature material infrared polarization characteristic measuring device and method |
| CN115060292B (en) * | 2022-08-05 | 2022-11-11 | 中国人民解放军国防科技大学 | Bionic navigation visual sensor extinction ratio evaluation method based on sine fitting |
| CN115508058B (en) * | 2022-11-22 | 2023-03-31 | 杭州微纳智感光电科技有限公司 | Device and method for detecting optical axis angle of polarizing film for display screen |
| CN117498136B (en) * | 2024-01-02 | 2024-03-15 | 北京镭宝光电技术有限公司 | Optical parametric oscillator |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0752153B2 (en) * | 1987-11-09 | 1995-06-05 | 株式会社日立製作所 | Ellipsometry |
| US5257092A (en) * | 1990-06-27 | 1993-10-26 | Asahi Kogaku Kogyo Kabushiki Kaisha | Apparatus for measuring polarization and birefringence |
| KR100203345B1 (en) * | 1991-01-11 | 1999-06-15 | 루돌프리서치코퍼레이션 | Simultaneous multiple angle/multiple wavelength ellipsometer and method |
| JPH06221993A (en) * | 1993-01-27 | 1994-08-12 | Sumitomo Electric Ind Ltd | Method and apparatus for measuring extinction ratio of polarizer |
| JPH0694515A (en) * | 1992-09-11 | 1994-04-05 | Olympus Optical Co Ltd | Light divergence characteristic measuring apparatus |
| CN1246664C (en) | 1999-08-06 | 2006-03-22 | 热生物之星公司 | Instruments for analyzing binding assays based on attenuation of light by thin films |
| JP2003185569A (en) | 2001-12-14 | 2003-07-03 | Mitsubishi Chemicals Corp | Analyzer for sample using surface plasmon resonance and sensor chip for surface plasmon resonance analysis |
| JP4568064B2 (en) | 2004-09-28 | 2010-10-27 | 株式会社 日立ディスプレイズ | Optical anisotropic axis measuring device |
| CN2798070Y (en) * | 2005-06-22 | 2006-07-19 | 中国科学院上海光学精密机械研究所 | Accurate measurement device for extinction ratio of polarization splitting film |
| WO2009139133A1 (en) | 2008-05-10 | 2009-11-19 | 株式会社フォトニックラティス | Optical distortion measurement apparatus |
| CN101915661A (en) * | 2010-09-03 | 2010-12-15 | 无锡市奥达光电子有限责任公司 | Method and device for detecting optical axis angle of polarization property component |
| CN201795784U (en) * | 2010-09-03 | 2011-04-13 | 无锡市奥达光电子有限责任公司 | Device for measuring optical axis angle of polarization characteristic component |
| JP2012104586A (en) * | 2010-11-09 | 2012-05-31 | Elpida Memory Inc | Semiconductor measurement device |
| CN102466560A (en) * | 2010-11-11 | 2012-05-23 | 北京国科世纪激光技术有限公司 | Device for measuring optical parameters |
| CN102073324B (en) * | 2010-12-29 | 2013-05-15 | 哈尔滨工业大学 | Linearly polarized light-based polarization tracking method |
| TWI585387B (en) * | 2012-07-18 | 2017-06-01 | 岩崎電氣股份有限公司 | Polarization measuring process, polarization measuring apparatus, polarization measuring system and photo-alignment irradiation apparatus |
| US9464938B2 (en) * | 2014-02-06 | 2016-10-11 | The Boeing Company | Systems and methods for measuring polarization of light in images |
| JP5920402B2 (en) * | 2014-05-27 | 2016-05-18 | ウシオ電機株式会社 | Polarization measuring device, polarization measuring method, and polarized light irradiation device |
| CN105758625B (en) * | 2016-04-15 | 2018-10-19 | 中国科学院上海技术物理研究所 | A kind of device and method for the linear polarization sensitivity measuring remote sensing instrument |
| CN106124415A (en) * | 2016-06-03 | 2016-11-16 | 中国科学技术大学 | Optical rotation method for real-time measurement based on pixel polarisation camera and measurement apparatus |
-
2018
- 2018-02-09 CN CN201810135372.3A patent/CN110132420B/en active Active
-
2019
- 2019-01-23 TW TW108102598A patent/TWI681180B/en active
- 2019-02-01 JP JP2019017317A patent/JP7033093B2/en active Active
- 2019-02-08 KR KR1020190015074A patent/KR102132762B1/en active IP Right Grant
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI731658B (en) * | 2020-04-23 | 2021-06-21 | 友達光電股份有限公司 | Image determination device for metal wire grid polarizer |
| TWI839979B (en) * | 2022-11-30 | 2024-04-21 | 安可光電股份有限公司 | Measuring system and measuring method for measuring die level polarizer |
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| KR102132762B1 (en) | 2020-07-10 |
| KR20190096831A (en) | 2019-08-20 |
| TWI681180B (en) | 2020-01-01 |
| CN110132420A (en) | 2019-08-16 |
| CN110132420B (en) | 2020-11-27 |
| JP2019144237A (en) | 2019-08-29 |
| JP7033093B2 (en) | 2022-03-09 |
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