TW201932424A - Method for manufacturing glass substrate and glass substrate manufacturing device capable of suppressing occurrence of damages to two side regions in the width direction of a glass plate - Google Patents

Method for manufacturing glass substrate and glass substrate manufacturing device capable of suppressing occurrence of damages to two side regions in the width direction of a glass plate Download PDF

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TW201932424A
TW201932424A TW107146373A TW107146373A TW201932424A TW 201932424 A TW201932424 A TW 201932424A TW 107146373 A TW107146373 A TW 107146373A TW 107146373 A TW107146373 A TW 107146373A TW 201932424 A TW201932424 A TW 201932424A
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glass
thickness
width direction
sheet glass
glass sheet
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TW107146373A
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TWI711590B (en
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中嶋公彦
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日商安瀚視特控股股份有限公司
安瀚視特股份有限公司
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Abstract

An object of the present invention is to suppress occurrence of damages to two side regions in the width direction of a glass plate while the glass plate is being conveyed. A method for manufacturing a glass substrate according to the present invention includes: a molding step for molding a molten glass by using an overflow down-draw method to form a glass plate; and a conveying step for clamping the two side regions in the width direction of the glass plate by using at least one pair of conveying rolls while conveying the glass plate in a downward direction. In the molding step, an inclined region is formed in the two side regions, and the thickness of the glass plate in the inclined region is inclined in the width direction in such a manner that the thickness of the glass plate becomes thicker toward the width direction. In the conveying step, the position at which the conveying rolls clamp the glass plate is adjusted, so that the inclination of the thickness of the portion in the inclined region opposite to the glass plate is smaller than an allowable value.

Description

玻璃基板之製造方法、及玻璃基板製造裝置Method for producing glass substrate and glass substrate manufacturing device

本發明係關於一種玻璃基板之製造方法、及玻璃基板製造裝置。The present invention relates to a method for producing a glass substrate and a glass substrate manufacturing device.

已知一種使用下拉法製造片材玻璃(玻璃板)之方法。藉由下拉法成形之片材玻璃具有板厚大致固定之寬度方向之中央區域、及位於中央區域之寬度方向外側且板厚較中央區域更厚之端部(邊緣部)。中央區域具有成為玻璃基板之製品的製品區域。於下拉法中，為了將所成形之片材玻璃向下方向穩定地搬送，而利用搬送輥夾持片材玻璃之中央區域與端部之間之邊界區域，向下方向搬送(專利文獻1)。
[先前技術文獻]
[專利文獻]A method of manufacturing a sheet glass (glass plate) using a down-draw method is known. The sheet glass formed by the down-draw method has a central portion in the width direction in which the thickness is substantially fixed, and an end portion (edge portion) which is located on the outer side in the width direction of the central portion and thicker than the central portion. The central region has a product region that is a product of a glass substrate. In the pull-down method, in order to stably convey the formed sheet glass in the downward direction, the boundary region between the central portion and the end portion of the sheet glass is held by the conveyance roller, and conveyed in the downward direction (Patent Document 1) .
[Previous Technical Literature]
[Patent Literature]

[專利文獻1]日本專利特開2013-212987號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2013-212987

[發明所欲解決之問題][The problem that the invention wants to solve]

由於片材玻璃之端部之厚度厚於中央區域之厚度，故而於邊界區域中，自中央區域側朝向端部側板厚逐漸變大，片材玻璃之板厚根據寬度方向之位置而不同。因此，利用搬送輥夾持邊界區域時，片材玻璃與搬送輥之接觸面積變小，片材玻璃自搬送輥受到之壓力容易變得不均勻。若被搬送輥局部以較高之壓力夾持，則有片材玻璃產生損傷，於後續步驟中切斷時，以損傷為起點而片材玻璃破裂之虞。Since the thickness of the end portion of the sheet glass is thicker than the thickness of the central portion, the thickness of the sheet from the central portion side toward the end portion gradually increases in the boundary region, and the sheet thickness of the sheet glass differs depending on the position in the width direction. Therefore, when the boundary region is sandwiched by the conveyance roller, the contact area between the sheet glass and the conveyance roller becomes small, and the pressure of the sheet glass from the conveyance roller is likely to be uneven. When the conveyance roller is partially held at a high pressure, the sheet glass is damaged, and when it is cut in the subsequent step, the sheet glass is broken due to the damage.

因此，本發明之目的在於提供一種於搬送玻璃板時可抑制玻璃板之寬度方向之兩側區域產生損傷之玻璃基板之製造方法及玻璃基板製造裝置。
[解決問題之技術手段]Therefore, an object of the present invention is to provide a method for producing a glass substrate and a glass substrate manufacturing apparatus which can suppress damage to both sides in the width direction of the glass sheet when the glass sheet is conveyed.
[Technical means to solve the problem]

本發明之一態樣係一種玻璃基板之製造方法，其特徵在於具有：
成形步驟，其使用溢流下拉法將熔融玻璃成形而形成玻璃板；及
搬送步驟，其一面利用至少一對搬送輥夾持上述玻璃板之寬度方向之兩側區域，一面將上述玻璃板向下方向搬送；
於上述成形步驟中，於上述兩側區域形成傾斜區域，該傾斜區域以上述玻璃板之厚度朝向寬度方向外側變厚之方式傾斜，且
上述搬送步驟中上述搬送輥夾持上述玻璃板之位置被調整為上述傾斜區域中與上述搬送輥對向之上述玻璃板之厚度之傾斜小於容許值之區域內。One aspect of the present invention is a method of manufacturing a glass substrate, characterized by having:
a forming step of forming a molten glass by using an overflow down-draw method to form a glass sheet; and a transporting step of holding the glass sheet downward while sandwiching both side regions in the width direction of the glass sheet by at least one pair of transfer rollers Direction transfer
In the forming step, an inclined region is formed in the both side regions, the inclined region is inclined such that the thickness of the glass sheet becomes thicker toward the outer side in the width direction, and the position of the conveying roller sandwiching the glass sheet in the conveying step is It is adjusted to be in a region where the inclination of the thickness of the glass sheet opposed to the conveyance roller in the inclined region is smaller than an allowable value.

較佳為，於上述成形步驟中，於利用上述搬送輥夾持上述玻璃板之前，利用配置於較上述搬送輥更靠搬送方向之上游側之冷卻輥夾持上述玻璃板之上述兩側區域，且
上述搬送輥夾持上述玻璃板之位置被調整為自上述冷卻輥所夾持之上述玻璃板之位置向寬度方向內側隔開特定以上之間隔之位置。Preferably, in the forming step, before the glass sheet is sandwiched by the transport roller, the two side regions of the glass sheet are sandwiched by a cooling roller disposed on the upstream side of the transport roller in the transport direction. Further, the position at which the conveyance roller sandwiches the glass sheet is adjusted so as to be spaced apart from the inner side in the width direction by a position of a predetermined or more interval from the position of the glass sheet held by the cooling roller.

較佳為，進而具有調整上述搬送輥夾持上述玻璃板之位置之控制步驟，且
於上述控制步驟中，將上述搬送輥夾持上述玻璃板之位置調整為上述傾斜區域中與上述搬送輥對向之上述玻璃板之厚度之傾斜小於容許值之區域內。Preferably, the method further includes a control step of adjusting a position at which the transfer roller holds the glass sheet, and in the controlling step, adjusting a position at which the transfer roller sandwiches the glass sheet is adjusted to be opposite to the transport roller pair in the inclined region The inclination of the thickness of the above glass plate is less than the allowable value.

較佳為，進而具有測定上述傾斜區域中之上述玻璃板之厚度之傾斜之測定步驟，且
於上述控制步驟中，基於上述玻璃板之寬度方向之中央區域之厚度及上述厚度之傾斜之測定結果而調整上述搬送輥夾持上述玻璃板之位置。Preferably, the method further comprises the step of measuring the inclination of the thickness of the glass sheet in the inclined region, and in the controlling step, the thickness of the central portion in the width direction of the glass sheet and the measurement result of the inclination of the thickness Further, the position at which the conveying roller holds the glass sheet is adjusted.

較佳為，於上述控制步驟中，將上述搬送輥夾持上述玻璃板之位置調整為上述厚度之傾斜變得更小之區域內。Preferably, in the control step, the position at which the transport roller is sandwiched between the glass sheets is adjusted so as to be smaller in the inclination of the thickness.

較佳為，上述搬送輥夾持上述玻璃板之位置被調整為自上述玻璃板之寬度方向之兩端向寬度方向內側隔開特定以上之間隔之位置。Preferably, the position at which the conveying roller holds the glass sheet is adjusted so as to be spaced apart from the both ends in the width direction of the glass sheet by a specific interval or more.

較佳為，上述搬送輥夾持上述玻璃板之位置被調整為與上述搬送輥對向之上述玻璃板之部分之厚度成為容許厚度以下之區域內。Preferably, the position at which the conveyance roller sandwiches the glass sheet is adjusted so that the thickness of the portion of the glass sheet facing the conveyance roller is equal to or less than the allowable thickness.

較佳為，於上述搬送步驟中，一面利用於搬送方向上隔開間隔地配置之複數個搬送輥夾持上述兩側區域，一面將上述玻璃板向下方向搬送，且
越位於搬送方向之下游側之搬送輥，上述容許值設定為越小之值。Preferably, in the transporting step, the plurality of transport rollers arranged at intervals in the transport direction sandwich the two side regions, and the glass plate is transported downward and further downstream of the transport direction. On the side of the conveying roller, the above tolerance value is set to a smaller value.

本發明之另一態樣係一種玻璃基板製造裝置，其特徵在於具有：
成形裝置，其使用溢流下拉法將熔融玻璃成形而形成玻璃板；及
搬送裝置，其一面利用至少一對搬送輥夾持上述玻璃板之寬度方向之兩側區域，一面將上述玻璃板向下方向搬送；
上述成形裝置於上述兩側區域形成傾斜區域，該傾斜區域以上述玻璃板之厚度朝向寬度方向外側變厚之方式傾斜，且
上述搬送輥夾持上述玻璃板之位置被調整為上述傾斜區域中與上述搬送輥對向之上述玻璃板之厚度之傾斜小於容許值之區域內。
[發明之效果]Another aspect of the invention is a glass substrate manufacturing apparatus characterized by having:
a molding apparatus that molds molten glass by an overflow down-draw method to form a glass sheet; and a conveying device that holds the glass sheets downward while sandwiching both side regions in the width direction of the glass sheet by at least one pair of conveying rollers Direction transfer
The molding apparatus forms an inclined region on the both side regions, the inclined region is inclined such that the thickness of the glass sheet becomes thicker toward the outer side in the width direction, and the position at which the conveying roller holds the glass sheet is adjusted to be in the inclined region. The inclination of the thickness of the glass sheet opposite to the conveying roller is smaller than the allowable value.
[Effects of the Invention]

根據本發明，於搬送玻璃板時，可一面抑制玻璃板之寬度方向之兩側區域產生損傷，一面搬送玻璃板。According to the present invention, when the glass sheet is conveyed, the glass sheet can be conveyed while suppressing damage to both side regions in the width direction of the glass sheet.

利用本實施形態之玻璃基板之製造方法，例如製造TFT(thin-film transistor，薄膜電晶體)顯示器用玻璃基板。玻璃板使用溢流下拉法製造。以下，一面參照圖式，一面對本實施形態之玻璃基板之製造方法進行說明。In the method for producing a glass substrate of the present embodiment, for example, a glass substrate for a TFT (thin-film transistor) display is produced. The glass plate is manufactured using an overflow down-draw method. Hereinafter, a method of manufacturing a glass substrate of the present embodiment will be described with reference to the drawings.

(1)玻璃基板之製造方法之概要
首先，參照圖1及圖2，對玻璃基板之製造方法中包含之複數個步驟及複數個步驟中使用之玻璃基板製造裝置100進行說明。如圖1所示，玻璃基板之製造方法主要包含熔融步驟S1、澄清步驟S2、成形步驟S3、冷卻步驟S4、及切斷步驟S5。除此以外，玻璃基板之製造方法具有研削步驟、研磨步驟、洗淨步驟、檢查步驟、捆包步驟等，捆包步驟中積層之複數個玻璃基板被搬送至訂貨方之業者處。(1) Outline of Manufacturing Method of Glass Substrate First, a glass substrate manufacturing apparatus 100 used in a plurality of steps and a plurality of steps included in a method of manufacturing a glass substrate will be described with reference to FIGS. 1 and 2 . As shown in FIG. 1, the manufacturing method of a glass substrate mainly includes the melting step S1, the clarification step S2, the molding step S3, the cooling step S4, and the cutting step S5. In addition, the glass substrate manufacturing method has a grinding step, a polishing step, a washing step, an inspection step, a packing step, and the like, and a plurality of laminated glass substrates stacked in the packaging step are transported to the ordering party.

熔融步驟S1係使玻璃原料熔融之步驟。玻璃原料以成為所期望之組成之方式調製之後，如圖2所示，被投入至配置於上游之熔融裝置11中。玻璃原料例如包含SiO2 、Al2 O3 、B2 O3 、CaO、SrO、BaO等組成。具體而言，使用應變點為660℃以上之玻璃原料。玻璃原料於熔融裝置11中熔融，成為熔融玻璃FG(參照圖3及圖4)。熔融溫度根據玻璃之種類進行調整。於本實施形態中，玻璃原料以1500℃～1650℃熔融。熔融玻璃FG通過上游管道23被送往澄清裝置12。The melting step S1 is a step of melting the glass raw material. After the glass raw material is prepared so as to have a desired composition, as shown in FIG. 2, it is introduced into the melting device 11 disposed upstream. The glass raw material contains, for example, SiO 2 , Al 2 O 3 , B 2 O 3 , CaO, SrO, BaO, or the like. Specifically, a glass raw material having a strain point of 660 ° C or higher is used. The glass raw material is melted in the melting device 11 to become molten glass FG (see FIGS. 3 and 4). The melting temperature is adjusted according to the type of glass. In the present embodiment, the glass raw material is melted at 1500 ° C to 1650 ° C. The molten glass FG is sent to the clarification device 12 through the upstream conduit 23.

澄清步驟S2係將熔融玻璃FG中之氣泡去除之步驟。於澄清裝置12內去除氣泡後之熔融玻璃FG之後通過下游管道24被送往成形裝置40。The clarification step S2 is a step of removing bubbles in the molten glass FG. The molten glass FG after the bubbles are removed in the clarification device 12 is sent to the forming device 40 through the downstream pipe 24.

成形步驟S3係將熔融玻璃FG成形為片狀玻璃(片材玻璃)SG之步驟。具體而言，熔融玻璃FG被連續地供給至成形裝置40中包含之成形體41(參照圖3及圖4)之後，自成形體41溢流。溢流之熔融玻璃FG沿成形體41之表面流下。然後，熔融玻璃FG於成形體41之下端部41a(參照圖3及圖4)合流而成形為片材玻璃SG。片材玻璃SG具有位於寬度方向之端之側部(亦稱為邊緣部或端部)SP(參照圖6)、及夾於側部之間之寬度方向之中央區域CA(參照圖6)。片材玻璃SG之側部之板厚成形為較中央區域之板厚更厚。於成形步驟S3中，於片材玻璃SG之寬度方向之兩側區域R、L(參照圖4)形成傾斜區域(邊界區域)SA(參照圖6)，該傾斜區域(邊界區域)SA以片材玻璃SG之厚度朝向寬度方向外側變厚之方式傾斜。即，片材玻璃SG於中央區域與側部之間(成為邊界之區域)進而具有傾斜區域。所謂傾斜係指片材玻璃SG之板厚於片材玻璃SG之寬度方向上變化，即具有梯度，所謂傾斜區域係指片材玻璃SG之板厚於寬度方向上傾斜之區域。片材玻璃SG之中央區域係具有固定板厚之成為玻璃基板之製品之區域。片材玻璃SG之中央區域之板厚例如成形為0.7 mm以下、較佳為0.4 mm以下之薄板。再者，片材玻璃SG之寬度方向係與片材玻璃SG流下之方向(亦稱為流動方向或搬送方向)及片材玻璃SG之厚度方向正交之方向。The forming step S3 is a step of forming the molten glass FG into a sheet glass (sheet glass) SG. Specifically, the molten glass FG is continuously supplied to the molded body 41 (see FIGS. 3 and 4 ) included in the molding apparatus 40 , and then overflows from the molded body 41 . The overflow molten glass FG flows down the surface of the formed body 41. Then, the molten glass FG is joined to the lower end portion 41a (see FIGS. 3 and 4) of the molded body 41 to be formed into a sheet glass SG. The sheet glass SG has a side portion (also referred to as an edge portion or an end portion) SP (see FIG. 6) at the end in the width direction, and a central portion CA (see FIG. 6) sandwiched between the side portions in the width direction. The thickness of the side portion of the sheet glass SG is formed to be thicker than the thickness of the central portion. In the forming step S3, an inclined area (boundary area) SA (see FIG. 6) is formed in the both side regions R, L (see FIG. 4) in the width direction of the sheet glass SG, and the inclined area (boundary area) SA is sliced. The thickness of the material glass SG is inclined so as to become thicker toward the outer side in the width direction. That is, the sheet glass SG has an inclined region between the central portion and the side portion (the region which becomes the boundary). The slanting means that the sheet thickness of the sheet glass SG varies in the width direction of the sheet glass SG, that is, has a gradient, and the slanted area refers to a region in which the sheet thickness of the sheet glass SG is inclined in the width direction. The central region of the sheet glass SG has a region in which a product having a thickness of a glass substrate is fixed. The thickness of the central portion of the sheet glass SG is, for example, a sheet of 0.7 mm or less, preferably 0.4 mm or less. Further, the width direction of the sheet glass SG is a direction orthogonal to the direction in which the sheet glass SG flows down (also referred to as a flow direction or a conveyance direction) and the thickness direction of the sheet glass SG.

冷卻步驟S4係一面利用沿片材玻璃SG搬送方向設置之下述下拉輥(搬送輥)夾持片材玻璃SG之寬度方向之兩側區域，一面將片材玻璃SG向下方向搬送並進行冷卻(緩冷)之步驟。即，於冷卻步驟S4中，進行一面夾持片材玻璃SG一面向下方向搬送之搬送步驟。關於搬送步驟，將於下文詳細地進行說明。片材玻璃SG經過冷卻步驟S4被冷卻至接近室溫之溫度。再者，玻璃基板之厚度(板厚)、玻璃基板之翹曲量及玻璃基板之應變量根據冷卻步驟S4中之冷卻狀態而確定。In the cooling step S4, the sheet glass SG is conveyed downward and cooled by sandwiching both side regions in the width direction of the sheet glass SG by the following pull-down rolls (transport rollers) provided in the sheet glass SG transport direction. (slow cooling) steps. In other words, in the cooling step S4, a transport step of transporting the sheet glass SG while moving in the downward direction is performed. The transfer procedure will be described in detail below. The sheet glass SG is cooled to a temperature close to room temperature by a cooling step S4. Further, the thickness (plate thickness) of the glass substrate, the amount of warpage of the glass substrate, and the strain amount of the glass substrate are determined in accordance with the cooling state in the cooling step S4.

切斷步驟S5係將成為接近室溫之溫度之片材玻璃SG切斷為特定大小之步驟。於切斷步驟S5中，具體而言，將緩冷後之片材玻璃SG切斷而將端部及邊界區域自中央區域分離，並將片材玻璃SG之中央區域切斷為特定長度，藉此獲得玻璃基板。切斷後之玻璃基板進一步被切斷為特定尺寸，而製作目標尺寸之玻璃基板。The cutting step S5 is a step of cutting the sheet glass SG which is a temperature close to room temperature into a specific size. Specifically, in the cutting step S5, the sheet glass SG after the slow cooling is cut, the end portion and the boundary region are separated from the central portion, and the central portion of the sheet glass SG is cut into a specific length. This obtains a glass substrate. The cut glass substrate is further cut into a specific size to produce a glass substrate of a target size.

其次，參照圖3～圖5，對玻璃基板製造裝置100中包含之成形裝置40之構成進行說明。Next, the configuration of the molding apparatus 40 included in the glass substrate manufacturing apparatus 100 will be described with reference to FIGS. 3 to 5 .

(2)成形裝置之構成
圖3及圖4表示成形裝置40之概略構成。圖3係成形裝置40之剖視圖。圖4係成形裝置40之側視圖。(2) Configuration of Molding Apparatus FIG. 3 and FIG. 4 show a schematic configuration of the molding apparatus 40. 3 is a cross-sectional view of the forming device 40. 4 is a side view of the forming device 40.

成形裝置40具有供片材玻璃SG通過之通路及包圍通路之空間。包圍通路之空間包括溢流室20、形成室30及冷卻室80。The forming device 40 has a passage through which the sheet glass SG passes and a space that surrounds the passage. The space surrounding the passage includes the overflow chamber 20, the forming chamber 30, and the cooling chamber 80.

溢流室20係將自澄清裝置12送出之熔融玻璃FG成形為片材玻璃SG之空間。熔融玻璃FG沿成形體41之表面流下，並於成形體41之下端部41a合流而成形為片材玻璃SG。The overflow chamber 20 forms the molten glass FG sent from the clarification device 12 into a space of the sheet glass SG. The molten glass FG flows down the surface of the molded body 41, and merges at the lower end portion 41a of the molded body 41 to form a sheet glass SG.

形成室30係配置於溢流室20之下方，用以調整片材玻璃SG之厚度及翹曲量之空間。於形成室30中，執行冷卻步驟ST4之一部分。片材玻璃SG之溫度於較成形體41之下端部41a更靠下游處逐漸降低。The forming chamber 30 is disposed below the overflow chamber 20 to adjust the thickness of the sheet glass SG and the space for the amount of warpage. In the forming chamber 30, a part of the cooling step ST4 is performed. The temperature of the sheet glass SG gradually decreases downstream of the lower end portion 41a of the formed body 41.

冷卻室80係配置於溢流室20之下方，用以調整片材玻璃SG之應變量之空間。具體而言，於冷卻室80中，通過形成室30內之片材玻璃SG經過緩冷點、應變點被冷卻至室溫附近之溫度。再者，冷卻室80之內部被沿片材玻璃SG之搬送方向隔開間隔地配置之複數個隔熱構件80b劃分為複數個空間。The cooling chamber 80 is disposed below the overflow chamber 20 for adjusting the space of the strain amount of the sheet glass SG. Specifically, in the cooling chamber 80, the sheet glass SG in the forming chamber 30 is cooled to a temperature near room temperature by a slow cooling point and a strain point. Further, the inside of the cooling chamber 80 is divided into a plurality of spaces by a plurality of heat insulating members 80b which are arranged at intervals in the conveying direction of the sheet glass SG.

又，成形裝置40主要包括成形體41、分隔構件50、冷卻輥51、冷卻單元60、下拉輥81a～81g、加熱器82a～82g、及切斷裝置90。成形裝置40進而具備控制裝置500(參照圖5)。控制裝置500控制成形裝置40中包含之各構成之驅動部。Further, the molding apparatus 40 mainly includes a molded body 41, a partition member 50, a cooling roll 51, a cooling unit 60, pull-down rolls 81a to 81g, heaters 82a to 82g, and a cutting device 90. The molding apparatus 40 further includes a control device 500 (see FIG. 5). The control device 500 controls the drive units of the respective configurations included in the molding device 40.

以下，對成形裝置40中包含之各構成詳細地進行說明。Hereinafter, each configuration included in the molding apparatus 40 will be described in detail.

(2-1)成形體
成形體41設置於溢流室20內。成形體41藉由使熔融玻璃FG溢流而將熔融玻璃FG成形為片材玻璃SG。(2-1) The molded body molded body 41 is provided in the overflow chamber 20. The molded body 41 forms the molten glass FG into the sheet glass SG by overflowing the molten glass FG.

如圖3所示，成形體41具有剖面形狀為大致五邊形之形狀(類似於楔形之形狀)。大致五邊形之前端相當於成形體41之下端部41a。As shown in Fig. 3, the formed body 41 has a shape in which the cross-sectional shape is a substantially pentagon (similar to the shape of a wedge). The front end of the substantially pentagon corresponds to the lower end portion 41a of the formed body 41.

又，成形體41於長度方向(圖4之左右方向)之第1端部具有流入口42(參照圖4)。流入口42與上述下游管道24連接，自澄清裝置12流出之熔融玻璃FG自流入口42流入至成形體41。於成形體41形成有槽43。槽43於成形體41之長度方向上延伸。具體而言，槽43自第1端部延伸至片材玻璃SG之寬度方向中與第1端部為相反側之第2端部。槽43形成為於流入口42附近最深，且隨著靠近第2端部而逐漸變淺。流入至成形體41之熔融玻璃FG自成形體41之一對頂部41b、41b溢流，並沿成形體41之一對側面(表面)41c、41c流下。然後，熔融玻璃FG於成形體41之下端部41a合流而成為片材玻璃SG。Further, the molded body 41 has an inflow port 42 at the first end portion in the longitudinal direction (the horizontal direction in FIG. 4) (see FIG. 4). The inflow port 42 is connected to the downstream duct 24, and the molten glass FG flowing out of the clarification device 12 flows into the molded body 41 from the inflow port 42. A groove 43 is formed in the molded body 41. The groove 43 extends in the longitudinal direction of the formed body 41. Specifically, the groove 43 extends from the first end portion to the second end portion on the opposite side to the first end portion in the width direction of the sheet glass SG. The groove 43 is formed to be the deepest in the vicinity of the inflow port 42 and gradually becomes shallow as it approaches the second end portion. The molten glass FG that has flowed into the molded body 41 overflows from the one of the molded bodies 41 to the top portions 41b and 41b, and flows down along one of the side faces (surfaces) 41c and 41c of the molded body 41. Then, the molten glass FG merges at the lower end portion 41a of the molded body 41 to become the sheet glass SG.

此時，成形體41之下端部41a處之片材玻璃SG之液相溫度為1100℃以上，且液相黏度為2.5×105 泊以上，更佳為，液相溫度為1160℃以上，且液相黏度為1.2×105 泊以上。又，成形體41之下端部41a處之片材玻璃SG之側部(邊緣部、端部)之黏度未達105.7 泊。At this time, the liquidus temperature of the sheet glass SG at the lower end portion 41a of the molded body 41 is 1100 ° C or more, and the liquidus viscosity is 2.5 × 10 5 poise or more, and more preferably, the liquidus temperature is 1160 ° C or more, and The liquid viscosity is 1.2 × 10 5 poise or more. Further, the side portion (edge portion, end portion) of the sheet glass SG at the lower end portion 41a of the molded body 41 has a viscosity of less than 10 5.7 poise.

(2-2)分隔構件
分隔構件50係將自溢流室20向形成室30之熱移動阻斷之構件。分隔構件50配置於熔融玻璃FG之合流點附近。又，如圖3所示，分隔構件50配置在於合流點合流之熔融玻璃FG(片材玻璃SG)之厚度方向兩側。分隔構件50係隔熱材料。分隔構件50藉由將熔融玻璃FG之合流點之上側環境及下側環境隔開而將自分隔構件50之上側向下側之熱移動阻斷。(2-2) Separator Member The partition member 50 is a member that blocks heat transfer from the overflow chamber 20 to the forming chamber 30. The partition member 50 is disposed in the vicinity of the junction point of the molten glass FG. Moreover, as shown in FIG. 3, the partition member 50 is arrange|positioned at the both sides of the thickness direction of the molten glass FG (sheet glass SG) which joins the junction point. The partition member 50 is a heat insulating material. The partition member 50 blocks the heat movement from the upper side to the lower side of the partition member 50 by separating the upper side environment and the lower side environment of the joining point of the molten glass FG.

(2-3)冷卻輥
冷卻輥51設置於形成室30內。更具體而言，冷卻輥51配置於分隔構件50之正下方。又，冷卻輥51配置於片材玻璃SG之厚度方向兩側、及片材玻璃SG之寬度方向兩側。配置於片材玻璃SG之厚度方向兩側之冷卻輥51成對地動作。即，片材玻璃SG之寬度方向兩側區域R、L被兩對冷卻輥51、51、…夾住。(2-3) The cooling roll cooling roll 51 is disposed in the forming chamber 30. More specifically, the cooling roller 51 is disposed directly under the partition member 50. Further, the cooling rolls 51 are disposed on both sides in the thickness direction of the sheet glass SG and on both sides in the width direction of the sheet glass SG. The cooling rolls 51 disposed on both sides in the thickness direction of the sheet glass SG operate in pairs. That is, the both side regions R and L in the width direction of the sheet glass SG are sandwiched by the pair of cooling rolls 51, 51, .

冷卻輥51利用通過穿通於內部之空冷管內之空氣等氣體進行空冷。冷卻輥51與片材玻璃SG之側部(邊緣部、端部)接觸，藉由熱傳導將片材玻璃SG之包含側部(邊緣部、端部)之兩側區域急冷(急冷步驟)。與冷卻輥51接觸之片材玻璃SG之側部之黏度為特定值(具體而言，為109.0 泊)以上。The cooling roll 51 is air-cooled by a gas such as air that is passed through an air-cooling pipe that is passed through the inside. The cooling roller 51 is in contact with the side portion (edge portion, end portion) of the sheet glass SG, and the both side regions including the side portions (edge portion, end portion) of the sheet glass SG are quenched by heat conduction (quenching step). The viscosity of the side portion of the sheet glass SG that is in contact with the cooling roll 51 is a specific value (specifically, 10 9.0 poise) or more.

冷卻輥51由冷卻輥驅動馬達390(參照圖5)旋轉驅動。冷卻輥51將片材玻璃SG之兩側區域R、L冷卻，並且亦具有將片材玻璃SG向下方下拉之功能。The cooling roller 51 is rotationally driven by a cooling roller drive motor 390 (refer to FIG. 5). The cooling roller 51 cools the both side regions R and L of the sheet glass SG, and also has a function of pulling down the sheet glass SG downward.

(2-4)冷卻單元
冷卻單元60係設置於溢流室20內及形成室30內，將片材玻璃SG冷卻至緩冷點附近之單元。冷卻單元60具有複數個冷卻元件61～65。於圖4中，冷卻單元60僅於形成室30內示出。複數個冷卻元件61～65沿片材玻璃SG之寬度方向及片材玻璃SG之流動方向配置。具體而言，複數個冷卻元件61～65中包含中央區域冷卻元件61～63、及側部冷卻元件64、65。
中央區域冷卻元件61～63進行空冷，將片材玻璃SG之中央區域CA冷卻。此處，所謂片材玻璃SG之中央區域係指片材玻璃SG之寬度方向中央部分，係包含片材玻璃SG之有效寬度及其附近之區域。換言之，片材玻璃SG之中央區域係位於片材玻璃SG之兩側區域R、L之間之區域。中央區域冷卻元件61～63沿流動方向配置於與片材玻璃SG之中央區域CA之表面對向之位置。中央區域冷卻元件61～63中包含之各單元可獨立地進行控制。
又，側部冷卻元件64、65進行水冷，將片材玻璃SG之兩側區域R、L冷卻。側部冷卻元件64、65沿流動方向配置於與片材玻璃SG之兩側區域R、L之表面對向之位置。側部冷卻元件64、65中包含之各單元可獨立地進行控制。(2-4) Cooling Unit Cooling Unit 60 is provided in the overflow chamber 20 and in the forming chamber 30, and cools the sheet glass SG to a unit near the slow cooling point. The cooling unit 60 has a plurality of cooling elements 61-65. In FIG. 4, the cooling unit 60 is shown only within the forming chamber 30. The plurality of cooling elements 61 to 65 are arranged along the width direction of the sheet glass SG and the flow direction of the sheet glass SG. Specifically, the plurality of cooling elements 61 to 65 include the central region cooling elements 61 to 63 and the side cooling elements 64 and 65.
The central zone cooling elements 61 to 63 are air-cooled to cool the central region CA of the sheet glass SG. Here, the central region of the sheet glass SG refers to the central portion in the width direction of the sheet glass SG, and includes the effective width of the sheet glass SG and the region in the vicinity thereof. In other words, the central region of the sheet glass SG is located in the region between the side regions R, L of the sheet glass SG. The central region cooling elements 61 to 63 are disposed at positions facing the surface of the central region CA of the sheet glass SG in the flow direction. The units included in the central area cooling elements 61 to 63 can be independently controlled.
Further, the side cooling elements 64 and 65 are water-cooled to cool the both side regions R and L of the sheet glass SG. The side cooling elements 64 and 65 are disposed at positions facing the surfaces of the both side regions R and L of the sheet glass SG in the flow direction. The units included in the side cooling elements 64, 65 can be independently controlled.

(2-5)下拉輥(搬送輥)
下拉輥81a～81g設置於冷卻室80內，將通過形成室30內之片材玻璃SG沿片材玻璃SG之流動方向下拉，進行片材玻璃SG之搬送。下拉輥81a～81g構成將片材玻璃SG向下方向搬送之搬送裝置。下拉輥81a～81g於冷卻室80之內部沿流動方向隔開間隔地配置。於圖3及圖4所示之例中，下拉輥81a～81g配置於由隔熱構件80b分隔出之每一個空間內。再者，下拉輥81a～81g配置於片材玻璃SG之溫度成為緩冷點以下之冷卻室80內之區域。片材玻璃SG之溫度成為緩冷點以下之區域係指片材玻璃SG之中央區域之溫度成為緩冷點以下之區域，指片材玻璃SG經過緩冷點、應變點被冷卻至室溫附近之溫度之沿著流動方向之冷卻室80內之區域。緩冷點係黏度成為1013 泊時之溫度，此處為715.0℃。於圖3及圖4所示之例中，片材玻璃SG之溫度成為緩冷點之位置處於位於搬送方向最上游側之隔熱構件80b與下拉輥81a之搬送方向之間。
下拉輥81a～81g分別配置於片材玻璃SG之厚度方向兩側(參照圖3)、及片材玻璃SG之寬度方向兩側(參照圖4)。藉此，下拉輥81a～81g一面接觸於片材玻璃SG之寬度方向之兩側區域之片材玻璃SG之厚度方向之兩側表面，一面將片材玻璃SG向下方下拉。配置於片材玻璃SG之厚度方向兩側之下拉輥81a～81g成對地動作，成對之下拉輥81a、81a、…將片材玻璃SG向下方向下拉。(2-5) Pull-down roller (transfer roller)
The pull-down rolls 81a to 81g are provided in the cooling chamber 80, and the sheet glass SG in the forming chamber 30 is pulled down in the flow direction of the sheet glass SG, and the sheet glass SG is conveyed. The pull-down rolls 81a to 81g constitute a conveying device that conveys the sheet glass SG in the downward direction. The pull-down rolls 81a to 81g are disposed at intervals in the flow direction inside the cooling chamber 80. In the example shown in Figs. 3 and 4, the pull-down rolls 81a to 81g are disposed in each of the spaces partitioned by the heat insulating member 80b. Further, the pull-down rolls 81a to 81g are disposed in a region in which the temperature of the sheet glass SG is within the cooling chamber 80 below the slow cooling point. The area in which the temperature of the sheet glass SG is below the slow cooling point means that the temperature in the central portion of the sheet glass SG is equal to or lower than the slow cooling point, and the sheet glass SG is cooled to room temperature by the slow cooling point and the strain point. The temperature is in the region of the cooling chamber 80 along the flow direction. The slow cooling point viscosity is 10 13 poise temperature, here 715.0 ° C. In the example shown in FIG. 3 and FIG. 4, the temperature at which the temperature of the sheet glass SG becomes the slow cooling point is between the heat insulating member 80b located on the most upstream side in the conveyance direction and the conveyance direction of the pull-down roller 81a.
The pull-down rolls 81a to 81g are disposed on both sides in the thickness direction of the sheet glass SG (see FIG. 3) and on both sides in the width direction of the sheet glass SG (see FIG. 4). As a result, the pull-down rolls 81a to 81g are pulled down on the both sides of the sheet glass SG in the thickness direction of the both sides of the sheet glass SG in the thickness direction. The pulling rolls 81a to 81g disposed in the thickness direction of both sides of the sheet glass SG are operated in pairs, and the pair of lower pulling rolls 81a, 81a, ... pull the sheet glass SG downward in the downward direction.

下拉輥81a～81g由下拉輥驅動馬達391(參照圖5)驅動。又，下拉輥81a～81g分別朝上游側之部分相對於片材玻璃SG靠近之方向旋轉。下拉輥81a～81g之圓周速度係越位於下游側之下拉輥越大。即，複數個下拉輥81a～81g中，下拉輥81a之圓周速度最小，下拉輥81g之圓周速度最大。The pull-down rollers 81a to 81g are driven by a pull-down roller drive motor 391 (see FIG. 5). Further, the respective lower rollers 81a to 81g are rotated toward the upstream side in the direction in which the sheet glass SG approaches. The circumferential speed of the pull-down rolls 81a to 81g is larger as the lower side of the downstream side. That is, among the plurality of pull-down rolls 81a to 81g, the peripheral speed of the pull-down roller 81a is the smallest, and the peripheral speed of the pull-down roller 81g is the largest.

再者，下拉輥81a～81g之各對於搬送步驟中，藉由控制裝置500基於計測輥間之壓接力之壓力感測器(未圖示)之計測結果進行控制，而於板厚方向上進行位置控制。具體而言，以構成下拉輥81a～81g之各對之一個輥相對於另一個輥夾住片材玻璃SG以固定之力按壓之方式，控制上述一個輥相對於上述另一個輥之相對位置。In the transfer step, each of the pull-down rollers 81a to 81g is controlled by the control device 500 based on the measurement result of the pressure sensor (not shown) for measuring the pressure contact between the rolls, and is performed in the thickness direction. Position control. Specifically, the relative position of the one roller with respect to the other roller is controlled such that one of the rollers constituting each of the pull-down rollers 81a to 81g is pressed against the sheet glass SG by a fixed force with respect to the other roller.

下拉輥81a～81g由於夾持高溫之片材玻璃SG，故而為了防止由熱導致之變形，例如，利用穿通於下拉輥81a～81g內部之空冷管進行空冷。於下拉輥81a～81g夾持片材玻璃SG之上述傾斜區域中，片材玻璃SG之溫度降低(黏度上升)。尤其於欲將片材玻璃SG之中央區域之板厚成形為0.7 mm以下、較佳為0.4 mm以下之薄板之情形時，片材玻璃SG之保有熱較小，片材玻璃SG容易受到下拉輥81a～81g之影響。若下拉輥81a～81g所夾持之傾斜區域之黏度上升，則會同與傾斜區域相鄰之其他區域產生黏度差，而導致產生應變等。因此，藉由實現片材玻璃SG之溫度於寬度方向上變得均勻之溫度分佈，而抑制下拉輥81a～81g所夾持之傾斜區域、及與傾斜區域相鄰之區域中產生應變。
為了調整下拉輥81a～81g夾持片材玻璃SG之位置(夾持位置)，而下拉輥81a～81g構成為可於寬度方向上移動。下拉輥81a～81g之夾持位置於進行玻璃基板之製造方法之前預先調整，但亦可如下所述，於玻璃基板之製造方法中調整。Since the pull-down rolls 81a to 81g sandwich the high-temperature sheet glass SG, in order to prevent deformation due to heat, for example, air cooling is performed by an air-cooling pipe that passes through the inside of the pull-down rolls 81a to 81g. In the inclined region in which the sheet glass SG is sandwiched by the pull-down rolls 81a to 81g, the temperature of the sheet glass SG is lowered (viscosity is increased). In particular, when the thickness of the central portion of the sheet glass SG is to be formed into a sheet having a thickness of 0.7 mm or less, preferably 0.4 mm or less, the heat retention of the sheet glass SG is small, and the sheet glass SG is easily subjected to the pull-down roller. The influence of 81a～81g. When the viscosity of the inclined region sandwiched by the pull-down rolls 81a to 81g rises, a difference in viscosity occurs in the other region adjacent to the inclined region, and strain or the like is generated. Therefore, by realizing a temperature distribution in which the temperature of the sheet glass SG becomes uniform in the width direction, it is suppressed that the inclined region sandwiched by the pull-down rolls 81a to 81g and the region adjacent to the inclined region are strained.
In order to adjust the position (clamping position) at which the pull-down rolls 81a to 81g sandwich the sheet glass SG, the pull-down rolls 81a to 81g are configured to be movable in the width direction. The nip positions of the pull-down rolls 81a to 81g are adjusted in advance before the method of manufacturing the glass substrate, but may be adjusted in the method of manufacturing the glass substrate as described below.

(2-6)加熱器
加熱器82(82a～82g)設置於冷卻室80之內部，調整冷卻室80之內部空間之溫度。具體而言，加熱器82a～82g於片材玻璃SG之流動方向及片材玻璃SG之寬度方向上配置有複數個。於圖3及圖4所示之例中，7個加熱器82a～82g隔開間隔地配置於片材玻璃SG之流動方向上，且配置於由隔熱構件80b分隔出之每一個空間內。配置於各空間之加熱器例如將7個加熱器元件(未圖示)以沿片材玻璃之寬度方向排列之方式配置而構成。7個加熱器元件分別對包含下拉輥81a～81g所夾持之傾斜區域之片材玻璃SG之中央區域CA、及片材玻璃SG之兩側區域R、L進行熱處理。加熱器82a～82g由下述控制裝置500控制輸出。藉此，控制通過冷卻室80內部之片材玻璃SG附近之環境溫度，進行片材玻璃SG之溫度控制。藉此，以片材玻璃SG之溫度沿搬送方向依序下降之方式，將片材玻璃SG冷卻。藉由該溫度控制，片材玻璃SG自黏性區域經過黏彈性區域向彈性區域推移。於冷卻室80中，藉由加熱器82a～82g之控制，將片材玻璃SG之溫度自緩冷點附近之溫度冷卻至室溫附近之溫度。(2-6) The heater heaters 82 (82a to 82g) are provided inside the cooling chamber 80, and the temperature of the internal space of the cooling chamber 80 is adjusted. Specifically, the heaters 82a to 82g are disposed in plural in the flow direction of the sheet glass SG and the width direction of the sheet glass SG. In the example shown in FIGS. 3 and 4, the seven heaters 82a to 82g are disposed at intervals in the flow direction of the sheet glass SG, and are disposed in each of the spaces partitioned by the heat insulating member 80b. The heaters disposed in the respective spaces are configured such that seven heater elements (not shown) are arranged in the width direction of the sheet glass. Each of the seven heater elements heat-treats the central region CA of the sheet glass SG including the inclined regions sandwiched by the pull-down rollers 81a to 81g, and the both side regions R and L of the sheet glass SG. The heaters 82a to 82g are controlled to be output by the control device 500 described below. Thereby, the temperature control of the sheet glass SG is controlled by controlling the ambient temperature in the vicinity of the sheet glass SG inside the cooling chamber 80. Thereby, the sheet glass SG is cooled so that the temperature of the sheet glass SG descends sequentially in the conveyance direction. By this temperature control, the sheet glass SG is moved from the viscous region to the elastic region through the viscoelastic region. In the cooling chamber 80, the temperature of the sheet glass SG is cooled from the temperature near the slow cooling point to a temperature near the room temperature by the control of the heaters 82a to 82g.

加熱器元件由控制裝置500獨立地控制輸出，以於片材玻璃SG中實現預先設計之溫度分佈之方式，調整片材玻璃SG附近之環境溫度。The heater element is independently controlled by the control device 500 to adjust the ambient temperature in the vicinity of the sheet glass SG in a manner that achieves a pre-designed temperature profile in the sheet glass SG.

於各加熱器82a～82g之附近例如設置有熱電偶380作為檢測環境溫度之機構。具體而言，於片材玻璃SG之流動方向及片材玻璃SG之寬度方向上隔開間隔地配置有複數個熱電偶380。熱電偶380分別檢測片材玻璃SG之中心部C之溫度、及片材玻璃SG之兩側區域R、L之溫度。加熱器82a～82g之輸出基於熱電偶380所檢測出之環境溫度進行控制。A thermocouple 380 is provided in the vicinity of each of the heaters 82a to 82g as a mechanism for detecting the ambient temperature. Specifically, a plurality of thermocouples 380 are disposed at intervals in the flow direction of the sheet glass SG and the width direction of the sheet glass SG. The thermocouple 380 detects the temperature of the center portion C of the sheet glass SG and the temperatures of the side regions R and L of the sheet glass SG, respectively. The outputs of the heaters 82a to 82g are controlled based on the ambient temperature detected by the thermocouple 380.

(2-7)切斷裝置
切斷裝置90將於冷卻室80內冷卻至室溫附近之溫度之片材玻璃SG切斷。具體而言，切斷裝置90沿形成於片材玻璃SG之劃線切斷而將端部及邊界區域分離，將片材玻璃SG之中央區域切斷為特定長度，並進一步切斷為特定尺寸。切斷裝置90以特定時間間隔將片材玻璃SG切斷。藉此，片材玻璃SG成為複數個玻璃板。切斷裝置90由切斷裝置驅動馬達392(參照圖5)驅動。(2-7) The cutting device cutting device 90 cuts off the sheet glass SG which is cooled to a temperature near the room temperature in the cooling chamber 80. Specifically, the cutting device 90 is cut along the scribe line formed on the sheet glass SG to separate the end portion and the boundary region, and the central portion of the sheet glass SG is cut into a specific length and further cut into a specific size. . The cutting device 90 cuts the sheet glass SG at specific time intervals. Thereby, the sheet glass SG becomes a plurality of glass plates. The cutting device 90 is driven by a cutting device drive motor 392 (see Fig. 5).

(2-8)控制裝置
控制裝置500包括CPU(Central Processing Unit，中央處理單元)、RAM(Random Access Memory，隨機存取記憶體)、ROM(Read Only Memory，唯讀記憶體)及硬碟等，進行玻璃基板製造裝置100之各部之控制。圖5係表示一實施形態中之控制裝置500構成之一例之方塊圖。(2-8) The control device control device 500 includes a CPU (Central Processing Unit), a RAM (Random Access Memory), a ROM (Read Only Memory), a hard disk, and the like. Control of each part of the glass substrate manufacturing apparatus 100 is performed. Fig. 5 is a block diagram showing an example of the configuration of the control device 500 in the embodiment.

具體而言，如圖5所示，控制裝置500接收玻璃基板製造裝置100中包含之各種感測器(例如，熱電偶380)或開關(例如，主電源開關381)等之信號，進行冷卻單元60、加熱器82a～82g、冷卻輥驅動馬達390、下拉輥驅動馬達391、切斷裝置驅動馬達392等之控制。Specifically, as shown in FIG. 5, the control device 500 receives signals of various sensors (for example, thermocouple 380) or switches (for example, main power switch 381) included in the glass substrate manufacturing apparatus 100, and performs cooling unit. 60. Control of heaters 82a to 82g, cooling roller drive motor 390, pull-down roller drive motor 391, cutting device drive motor 392, and the like.

(搬送步驟)
圖6係說明搬送步驟中之下拉輥之夾持位置之圖。圖6表示片材玻璃SG之寬度方向之一側之區域R之剖面。於以下之說明中，下拉輥81a～81g中，代表性地著眼於下拉輥81a而進行說明，但下拉輥81b～81g亦與下拉輥81a同樣地調整夾持位置。再者，於圖6中，亦一併示出冷卻輥51之夾持位置。(transfer step)
Fig. 6 is a view for explaining the holding position of the lower pulling roller in the conveying step. Fig. 6 shows a cross section of a region R on one side in the width direction of the sheet glass SG. In the following description, the pull-down rollers 81a to 81g are typically described with a view of the pull-down roller 81a. However, the pull-down rollers 81b to 81g also adjust the nip position similarly to the pull-down roller 81a. Further, in Fig. 6, the holding position of the cooling roller 51 is also shown.

如上所述，於成形步驟中，形成位於中央區域CA與端部SP之邊界之傾斜區域SA。包含傾斜區域SA及端部SP之區域如圖所示，剖面觀察時之形狀為球根狀，厚度之傾斜(梯度)程度於寬度方向上變化。具體而言，隨著自中央區域CA側向寬度方向外側行進，厚度之傾斜變大，然後變小。較傾斜區域SA之傾斜變為0之位置更靠寬度方向外側之區域為端部SP。As described above, in the forming step, the inclined area SA located at the boundary between the central area CA and the end portion SP is formed. As shown in the figure, the region including the inclined region SA and the end portion SP has a bulbous shape when viewed in cross section, and the inclination (gradient) of the thickness changes in the width direction. Specifically, as the side of the central area CA travels outward in the width direction, the inclination of the thickness becomes larger and then becomes smaller. The region where the inclination of the inclined region SA becomes 0 and the outer side in the width direction is the end portion SP.

傾斜區域SA係厚度以片材玻璃SG之厚度朝向寬度方向外側變厚之方式傾斜之區域，具有沿寬度方向之厚度之梯度。於此種傾斜區域SA中，於與下拉輥81a對向之片材玻璃SG之位置(寬度方向區域)上產生厚度差(偏差)，與下拉輥81a之寬度方向兩端對向之片材玻璃SG之位置A、B之間存在厚度差。因此，於傾斜區域SA中，下拉輥81a與片材玻璃SG之接觸面積較小，片材玻璃SG自下拉輥81a受到之壓接力容易變得不均勻。其結果為，片材玻璃SG被下拉輥81a局部以較大之壓接力夾持。片材玻璃SG由於在冷卻室80內被冷卻至緩冷點附近以下之溫度而變硬，故而根據下拉輥81a之夾持位置，有產生損傷之虞。若此種損傷位於片材玻璃SG，則有於下游側之步驟中被切斷時，損傷伸展而片材玻璃SG破裂之虞。
於本實施形態中，於調整為傾斜區域SA中與下拉輥81a對向之片材玻璃SG之部分之厚度之傾斜小於容許值之區域內之夾持位置上，下拉輥81a夾持片材玻璃SG。於上述與下拉輥81a對向之片材玻璃SG之部分之厚度之傾斜小於容許值之區域中，片材玻璃SG之厚度之傾斜較小，因此下拉輥81a與片材玻璃SG之接觸面積與夾持位置位於成為容許值以上之區域之情況相比更大，片材玻璃SG自下拉輥81a受到之壓接力之不均勻度得以緩和。因此，可抑制片材玻璃SG被下拉輥81a局部以較大之壓接力夾持之情況，從而可抑制片材玻璃SG產生損傷。再者，厚度之傾斜如下所述，例如以與下拉輥對向之片材玻璃SG之部分之厚度差表示。又，下拉輥之夾持位置只要其至少一部分位於傾斜區域內即可。此種態樣中亦包含下拉輥之寬度方向外側之端位於傾斜區域之寬度方向內側之端之態樣。The inclined region SA has a thickness which is inclined so that the thickness of the sheet glass SG becomes thicker toward the outer side in the width direction, and has a gradient in thickness in the width direction. In the inclined region SA, a thickness difference (deviation) is generated at a position (width direction region) of the sheet glass SG opposed to the pull-down roller 81a, and the sheet glass facing the both ends in the width direction of the pull-down roller 81a There is a difference in thickness between positions A and B of the SG. Therefore, in the inclined region SA, the contact area between the pull-down roller 81a and the sheet glass SG is small, and the pressure contact force of the sheet glass SG from the pull-down roller 81a is likely to become uneven. As a result, the sheet glass SG is partially sandwiched by the large pressure contact force by the pull-down roller 81a. Since the sheet glass SG is hardened by being cooled to a temperature lower than the vicinity of the slow cooling point in the cooling chamber 80, there is a risk of damage due to the nip position of the pull-down roller 81a. If the damage is located in the sheet glass SG, the sheet is broken when the sheet is cut in the downstream step, and the sheet glass SG is broken.
In the present embodiment, the pull-down roller 81a holds the sheet glass in the nip position adjusted in the region where the inclination of the thickness of the portion of the sheet glass SG opposite to the pull-down roller 81a in the inclined region SA is smaller than the allowable value. SG. In the region where the inclination of the thickness of the portion of the sheet glass SG opposed to the pull-down roller 81a is smaller than the allowable value, the inclination of the thickness of the sheet glass SG is small, so the contact area between the pull-down roller 81a and the sheet glass SG is When the nip position is larger than the case where the nip position is larger than the allowable value, the unevenness of the pressure contact force of the sheet glass SG from the pull-down roller 81a is alleviated. Therefore, it is possible to suppress the sheet glass SG from being partially pinched by the large pressure contact force by the pull-down roller 81a, and it is possible to suppress the damage of the sheet glass SG. Further, the inclination of the thickness is as follows, for example, expressed by the difference in thickness of the portion of the sheet glass SG opposed to the pull-down roller. Further, the nip position of the pull-down roller may be at least a part of the nip position. This aspect also includes a state in which the outer end of the pull-down roller in the width direction is located at the inner side in the width direction of the inclined region.

如上所述，通常，傾斜區域SA隨著自中央區域CA側向寬度方向外側行進，而厚度之傾斜之程度變大。換言之，於傾斜區域SA中，隨著靠近中央區域CA，片材玻璃SG之厚度之傾斜之程度變小。因此，夾持位置位於傾斜區域SA中越靠寬度方向內側之位置，越大程度地緩和片材玻璃SG自下拉輥81a受到之壓接力之不均勻度，抑制損傷產生之效果越高。以於此種區域內下拉輥81a夾持片材玻璃SG之方式設定容許值。
再者，傾斜區域SA中不僅包含與下拉輥81a之寬度方向內側端對向之位置A處之片材玻璃SG之厚度大於中央區域CA之厚度之區域，而且亦包含與中央區域CA之厚度相等且與下拉輥81a之寬度方向外側端對向之位置B處之片材玻璃SG之厚度大於中央區域CA之厚度之區域。As described above, generally, the inclined region SA travels outward from the central portion CA side in the width direction, and the degree of inclination of the thickness becomes large. In other words, in the inclined area SA, the degree of inclination of the thickness of the sheet glass SG becomes smaller as it approaches the central area CA. Therefore, the gripping position is located at the inner side in the width direction of the inclined region SA, and the unevenness of the pressure contact force of the sheet glass SG from the pull-down roller 81a is moderated to a greater extent, and the effect of suppressing the damage is higher. The allowable value is set such that the sheet glass SG is held by the pull-down roller 81a in such a region.
Further, the inclined region SA includes not only the region where the thickness of the sheet glass SG at the position A opposed to the widthwise inner end of the pull-down roller 81a is larger than the thickness of the central region CA but also the thickness of the central region CA. The thickness of the sheet glass SG at the position B opposite to the outer end in the width direction of the pull-down roller 81a is larger than the thickness of the central portion CA.

具體而言，容許值係以片材玻璃SG之位置A與位置B之厚度差(偏差)成為特定值以下之方式根據中央區域CA之厚度決定之值，例如以下拉輥81a之寬度方向長度之範圍內之上述厚度差之值表示。之所以為與中央區域CA之厚度對應之值，原因在於，傾斜區域SA中之厚度差之大小很大程度上取決於中央區域CA之厚度，即便為互不相同之片材玻璃SG之相同之寬度方向位置，亦會根據中央區域CA之厚度而大幅變化。再者，由於容許之位置A、B之厚度差之大小取決於下拉輥81a之寬度(沿寬度方向之長度)，故而容許值亦可為以厚度差除以下拉輥81a之寬度所得之值成為特定值以下之方式決定之值，而代替上述厚度差之值。Specifically, the allowable value is determined based on the thickness of the central region CA such that the thickness difference (deviation) between the position A and the position B of the sheet glass SG is equal to or less than a specific value, for example, the width direction of the following pull roller 81a. The value of the above difference in thickness within the range is expressed. The reason why it is a value corresponding to the thickness of the central area CA is that the thickness difference in the inclined area SA largely depends on the thickness of the central area CA, even if it is the same as the sheet glass SG which is different from each other. The position in the width direction also varies greatly depending on the thickness of the central area CA. Further, since the thickness difference between the allowable positions A and B depends on the width (length in the width direction) of the pull-down roller 81a, the allowable value may be a value obtained by dividing the width of the lower pull roller 81a by the thickness difference. The value determined by the specific value is determined in place of the above difference in thickness.

此處，作為一例，圖7中示出了分別表示中央區域CA之厚度與位置A、B上之片材玻璃SG之厚度之關係之曲線圖。於圖7中，通過圓形標繪點之曲線圖表示位置A處較理想之片材玻璃SG之厚度之上限值，方形標繪點之曲線圖表示位置B處較理想之片材玻璃SG之厚度之上限值。上限值係指以中央區域CA之主表面為基準之位置A、B之板厚方向之高度。
利用此種關係，例如，於製造中央區域CA之厚度為0.7 mm之片材玻璃SG之情形時，位置A處較理想厚度之上限值30 μm與位置B處較理想厚度之上限值100 μm之差70 μm設定為厚度差之容許值。即，下拉輥81a之夾持位置以位於傾斜區域SA中厚度差變為70 μm以下之位置，於圖6所示之例中，位於較表示容許值之線PL更靠寬度方向內側之方式調整。藉由以此方式調整夾持位置，與於較線PL更靠寬度方向外側夾持片材玻璃SG之情況相比，片材玻璃SG自下拉輥81a受到之壓接力之不均勻度得以緩和，可抑制片材玻璃SG產生損傷。下拉輥81a之夾持位置只要調整為至少與下拉輥81a對向之片材玻璃SG之部分之厚度之傾斜小於容許值之區域內，則無須調整為該部分之厚度成為上述位置A及位置B之較理想厚度之上限值(下述容許厚度)以下之區域內，但如下所述，下拉輥81a之夾持位置進而較佳為調整為該部分之厚度成為位置A及位置B之較理想厚度之上限值以下之區域內。
再者，位置A及位置B之較理想厚度之上限值於例如中央區域CA之厚度為0.6 mm之情形時，分別為15 μm、80 μm，於中央區域CA之厚度為0.5 mm之情形時，分別為5 μm、60 μm，於中央區域CA之厚度為0.4 mm之情形時，分別為1 μm、40 μm，於中央區域CA之厚度為0.3 mm之情形時，分別為未達1 μm、30 μm，於中央區域CA之厚度為0.2 mm之情形時，分別為未達1 μm、20 μm，於中央區域CA之厚度為0.1 mm之情形時，分別為未達1 μm、15 μm。
如圖7所示之中央區域CA之厚度與位置A、B上之片材玻璃SG之厚度之關係基於觀察實際利用下拉輥夾持而製作之片材玻璃SG之傾斜區域SA時之損傷之狀況，找出傾斜區域SA不產生損傷之厚度而製作。位置A、B根據下拉輥81a之寬度方向長度而決定。例示下拉輥81a之寬度方向長度時，例如為30～150 mm。Here, as an example, FIG. 7 is a graph showing the relationship between the thickness of the central region CA and the thickness of the sheet glass SG at the positions A and B, respectively. In FIG. 7, the upper limit of the thickness of the sheet glass SG at the position A is represented by a graph of a circular plot point, and the graph of the square plot point indicates the ideal sheet glass SG at the position B. The upper limit of the thickness. The upper limit value refers to the height in the thickness direction of the positions A and B based on the main surface of the central area CA.
With this relationship, for example, in the case of manufacturing a sheet glass SG having a thickness of 0.7 mm in the central region CA, the upper limit of the desired thickness at the position A is 30 μm and the upper limit of the desired thickness at the position B is 100. The difference of μm of 70 μm is set as the allowable value of the thickness difference. In other words, the nip position of the pull-down roller 81a is set to a position where the thickness difference in the slanted area SA is 70 μm or less, and in the example shown in FIG. 6, the line PL which is more than the allowable value is adjusted to the inner side in the width direction. . By adjusting the nip position in this manner, the unevenness of the pressure contact force of the sheet glass SG from the pull-down roller 81a is alleviated as compared with the case where the sheet glass SG is sandwiched in the width direction outside the line PL. Damage to the sheet glass SG can be suppressed. When the nip position of the pull-down roller 81a is adjusted so that the inclination of the thickness of the portion of the sheet glass SG opposed to the pull-down roller 81a is less than the allowable value, it is not necessary to adjust the thickness of the portion to the position A and the position B. In the region below the upper limit of the desired thickness (the allowable thickness below), as described below, the nip position of the pull-down roller 81a is preferably adjusted so that the thickness of the portion becomes the position A and the position B. Within the area below the thickness limit.
Further, the upper limit of the desired thickness of the position A and the position B is, for example, 15 μm and 80 μm when the thickness of the central portion CA is 0.6 mm, and 0.5 mm when the thickness of the central portion CA is 0.5 mm. 5 μm, 60 μm, respectively, when the thickness of the central region CA is 0.4 mm, respectively, 1 μm, 40 μm, and when the thickness of the central region CA is 0.3 mm, respectively, it is less than 1 μm. 30 μm, when the thickness of the central region CA is 0.2 mm, which is less than 1 μm and 20 μm, respectively, when the thickness of the central region CA is 0.1 mm, it is less than 1 μm and 15 μm, respectively.
The relationship between the thickness of the central region CA and the thickness of the sheet glass SG at the positions A and B as shown in Fig. 7 is based on the state of damage when the inclined region SA of the sheet glass SG which is actually formed by the pull-down roller is observed. It is found that the inclined area SA is produced without causing damage. The positions A and B are determined according to the length of the pull-down roller 81a in the width direction. When the length of the pull-down roller 81a in the width direction is exemplified, it is, for example, 30 to 150 mm.

下拉輥81a之夾持位置之調整例如可藉由如下方式進行：於檢查步驟等中，藉由測定求出傾斜區域SA中之厚度分佈，並且於所求出之厚度分佈中，於滿足按上述要領設定之容許值之區域內決定夾持位置，即，決定片材玻璃SG之厚度之傾斜小於容許值之區域內之位置，將下拉輥81a移動至所決定之位置。關於厚度分佈之測定，將於下文進行敍述。The adjustment of the nip position of the pull-down roller 81a can be performed, for example, by determining the thickness distribution in the inclined region SA by the measurement in the inspection step or the like, and satisfying the above-described thickness distribution The nip position is determined in the region where the allowable value is set, that is, the position in the region where the inclination of the thickness of the sheet glass SG is smaller than the allowable value is determined, and the pull-down roller 81a is moved to the determined position. The measurement of the thickness distribution will be described below.

下拉輥81a之夾持位置較佳為與下拉輥81a對向之片材玻璃SG之部分之厚度之傾斜小於容許值之區域內厚度之傾斜偏小之位置，較佳為厚度之傾斜最小之位置。於圖6所示之例中，厚度之傾斜偏小之位置位於自線PL遠離寬度方向內側之側，於位置B位於傾斜區域SA之寬度方向內側端之情形時，厚度之傾斜最小。The nip position of the pull-down roller 81a is preferably a position where the inclination of the thickness of the portion of the sheet glass SG opposite to the pull-down roller 81a is smaller than the allowable value, and preferably the position where the inclination of the thickness is the smallest. . In the example shown in Fig. 6, the position where the inclination of the thickness is small is located on the side farther from the inner side in the width direction of the line PL, and the inclination of the thickness is the smallest when the position B is located at the inner side in the width direction of the inclined area SA.

又，較佳為，下拉輥81a之夾持位置係上述與下拉輥81a對向之片材玻璃SG之部分之厚度之傾斜小於容許值之區域內之位置，此外，位置A及位置B中至少一者係成為容許厚度(上述較理想厚度之上限值)以下之位置。其原因在於，於厚度大之區域中，存在因例如片材玻璃SG被冷卻輥51夾持而變形，從而導致傾斜之程度變動之情況下，存在片材玻璃SG自下拉輥81a受到之壓接力發生變動之情況。例如，於上述製造中央區域CA之厚度為0.7 mm之片材玻璃SG之例中，較佳為，下拉輥81a之夾持位置調整為滿足位置A處之厚度成為30 μm以下之下拉輥81a之寬度方向內側端之位置、及位置B處之厚度成為100 μm以下之下拉輥81a之寬度方向外側端之位置中至少一者之位置。又，下拉輥81a之夾持位置較佳為位於較冷卻輥51之夾持位置更靠寬度方向內側，以避免上述壓接力之變動。Moreover, it is preferable that the nip position of the pull-down roller 81a is a position in which the inclination of the thickness of the portion of the sheet glass SG opposed to the pull-down roller 81a is smaller than the allowable value, and at least the position A and the position B are at least One is a position below the allowable thickness (the upper limit of the above-mentioned preferable thickness). The reason for this is that, in the region where the thickness of the sheet glass SG is deformed by the cooling roller 51, and the degree of inclination is changed, there is a pressure contact force of the sheet glass SG from the pull-down roller 81a. The situation has changed. For example, in the above-described example of manufacturing the sheet glass SG having a thickness of 0.7 mm in the central portion CA, it is preferable that the nip position of the pull-down roller 81a is adjusted so that the thickness at the position A becomes 30 μm or less. The position at the inner end in the width direction and the thickness at the position B are at least one of the positions of the outer end in the width direction of the pulling roller 81a below 100 μm. Further, it is preferable that the nip position of the pull-down roller 81a is located on the inner side in the width direction from the nip position of the cooling roll 51 to avoid the variation of the pressure contact force.

另一方面，下拉輥81a之夾持位置以位置B位於傾斜區域SA之寬度方向內側端、或較該端更靠寬度方向外側之方式設定。若位置B超過傾斜區域SA之寬度方向內側端而位於寬度方向內側，則無法對片材玻璃SG施加向寬度方向外側之力，因此有片材玻璃SG於與下拉輥81a之間滑動而片材玻璃SG彎曲之可能性，片材玻璃SG產生形狀不良。又，若位置B過度地超過上述端而位於寬度方向內側，則需要將切斷步驟中之切斷位置(形成劃線S之位置)設定為較位置A更靠寬度方向內側，因此，製品區域會變小。再者，如圖6所示之例般，劃線S通常設定於較中央區域CA與傾斜區域SA之邊界略靠寬度方向內側。On the other hand, the nip position of the pull-down roller 81a is set such that the position B is located at the inner end in the width direction of the inclined region SA or outside the width direction. When the position B exceeds the inner side in the width direction of the inclined region SA and is located on the inner side in the width direction, the sheet glass SG cannot be applied to the outer side in the width direction. Therefore, the sheet glass SG slides between the pull-down roller 81a and the sheet. The possibility that the glass SG is bent, the sheet glass SG is poor in shape. In addition, when the position B excessively exceeds the end and is located inside the width direction, it is necessary to set the cutting position (the position at which the scribe line S is formed) in the cutting step to the inner side in the width direction from the position A. Therefore, the product region It will become smaller. Further, as in the example shown in FIG. 6, the scribe line S is usually set to be slightly inward in the width direction from the boundary between the center area CA and the inclined area SA.

較佳為，下拉輥81a之夾持位置調整為自冷卻輥51所夾持之片材玻璃SG之位置中寬度方向內側端之位置Q向寬度方向內側隔開特定以上之間隔L1之位置。
存在於被冷卻輥51夾持之片材玻璃SG之表面，藉由壓接於冷卻輥51而形成有凹凸之情況，因此若夾持位置靠近位置Q，則有片材玻璃SG之厚度之傾斜之程度大幅度變化，因此導致片材玻璃SG自下拉輥81a受到之壓接力不穩定之虞。
又，如上所述，通常，傾斜區域SA具有隨著自中央區域CA向寬度方向外側行進而厚度之傾斜變大，然後變小之區域，故而若夾持位置靠近位置Q，則有無法使向寬度方向外側之力充分地作用於片材玻璃SG，而於搬送中，片材玻璃SG相對於下拉輥81a滑動之虞。
基於此種理由，間隔L1較佳為冷卻輥51同傾斜區域SA與中央區域CA之邊界之距離之50%以上之長度，例如為20 mm以上。
基於同樣之理由，較佳為，下拉輥81a之夾持位置調整為自片材玻璃SG之寬度方向之端向寬度方向內側隔開特定以上之間隔L2之位置。間隔L2較佳為傾斜區域SA及端部SP長度之80%以上之長度，例如為30 mm以上。
再者，於圖3及圖4中，冷卻輥51、下拉輥81a～81g表示得較圖6所示之大小更大。又，於圖3中，冷卻輥51與下拉輥81a～81g之片材玻璃SG之夾持位置與圖6不同地示出。Preferably, the nip position of the pull-down roller 81a is adjusted to a position at which the position Q of the inner side in the width direction from the position of the sheet glass SG held by the cooling roll 51 is spaced apart from the inner side in the width direction by a predetermined interval L1.
The surface of the sheet glass SG held by the cooling roller 51 is formed by the pressure roller 51 being pressed against the cooling roller 51. Therefore, if the clamping position is close to the position Q, the thickness of the sheet glass SG is inclined. The degree of the change is largely changed, and thus the sheet glass SG is unstable from the pressure contact force of the pull-down roller 81a.
Further, as described above, generally, the inclined region SA has a region in which the inclination of the thickness increases as it travels outward from the central region CA in the width direction, and then becomes smaller. Therefore, if the clamping position is closer to the position Q, the inclination is not possible. The force on the outer side in the width direction sufficiently acts on the sheet glass SG, and the sheet glass SG slides with respect to the pull-down roller 81a during conveyance.
For this reason, the interval L1 is preferably a length of 50% or more of the distance between the cooling roller 51 and the boundary between the inclined region SA and the central region CA, and is, for example, 20 mm or more.
For the same reason, it is preferable that the nip position of the pull-down roller 81a is adjusted so that the end of the sheet glass SG in the width direction is spaced apart from the inner side in the width direction by a predetermined interval L2. The interval L2 is preferably a length of 80% or more of the length of the inclined region SA and the end portion SP, and is, for example, 30 mm or more.
Further, in Figs. 3 and 4, the cooling roller 51 and the pull-down rollers 81a to 81g are larger in size than those shown in Fig. 6. Moreover, in FIG. 3, the clamping position of the cooling roll 51 and the sheet glass SG of the pull-down rolls 81a-81g is shown in FIG.

較佳為，玻璃基板之製造方法進而具有調整下拉輥81a之夾持位置之控制步驟。於控制步驟中，將下拉輥81a之夾持位置調整為傾斜區域SA中上述與下拉輥81a對向之片材玻璃SG之部分之厚度之傾斜小於容許值之區域內。於控制步驟中，具體而言，控制裝置500控制驅動裝置(未圖示)，該驅動裝置以調整下拉輥81a之夾持位置之方式使下拉輥81a於寬度方向上移動。
於控制步驟中，例如，以固定之時間間隔判定下拉輥81a之夾持位置是否位於上述厚度之傾斜小於容許值之區域內，於判定夾持位置位於上述厚度之傾斜小於容許值之區域內之情形時，不變更下拉輥81a之夾持位置而繼續操作，並且於判定不在上述厚度之傾斜小於容許值之區域內之情形時，控制裝置500控制驅動裝置，以夾持位置位於上述厚度之傾斜小於容許值之區域內之方式調整下拉輥81a之寬度方向位置。
根據該玻璃基板之製造方法，於操作中片材玻璃SG之厚度之傾斜發生變化而下拉輥81a之夾持位置位於厚度之傾斜小於容許值之區域外之情形時，藉由反饋調整夾持位置，將下拉輥81a之夾持位置調整為厚度之傾斜小於容許值之區域內，可緩和片材玻璃SG自下拉輥81a受到之壓接力之不均勻度，從而抑制片材玻璃SG產生損傷。Preferably, the method of manufacturing the glass substrate further has a control step of adjusting the nip position of the pull-down roller 81a. In the control step, the nip position of the pull-down roller 81a is adjusted so that the inclination of the thickness of the portion of the inclined glass SA which is opposite to the sheet glass SG of the pull-down roller 81a is smaller than the allowable value. In the control step, specifically, the control device 500 controls a driving device (not shown) that moves the pull-down roller 81a in the width direction so as to adjust the nip position of the pull-down roller 81a.
In the control step, for example, it is determined at a fixed time interval whether the clamping position of the pull-down roller 81a is in the region where the inclination of the thickness is less than the allowable value, and it is determined that the clamping position is within the region where the inclination of the thickness is less than the allowable value. In the case where the operation is continued without changing the nip position of the pull-down roller 81a, and when it is determined that the inclination of the thickness is not within the allowable value, the control device 500 controls the driving device so that the nip position is at the inclination of the thickness The position in the width direction of the pull-down roller 81a is adjusted so as to be smaller than the allowable value.
According to the method for producing a glass substrate, when the inclination of the thickness of the sheet glass SG is changed during operation and the nip position of the pull-down roller 81a is outside the region where the inclination of the thickness is smaller than the allowable value, the nip position is adjusted by feedback. When the nip position of the pull-down roller 81a is adjusted so that the inclination of the thickness is less than the allowable value, the unevenness of the pressure contact force of the sheet glass SG from the pull-down roller 81a can be alleviated, thereby suppressing damage of the sheet glass SG.

玻璃基板之製造方法較佳為於具有上述控制步驟之情形時，進而具有測定傾斜區域SA中之片材玻璃SG之厚度傾斜之測定步驟。具體而言，片材玻璃SG之厚度傾斜可藉由將於傾斜區域SA內之沿寬度方向之複數個部位測定出之片材玻璃SG之厚度與各厚度及寬度方向位置建立對應關係而獲得。各寬度方向位置上之片材玻璃SG之厚度例如使用雷射位移計等測定裝置(未圖示)測定。測定裝置連接於控制裝置500，且構成為將以固定之時間間隔測定出之厚度及寬度方向位置之資訊向控制裝置500輸出。控制裝置500從自測定裝置送出之資訊之中厚度及寬度方向位置之資訊中獲取厚度之傾斜，並使用所獲取之厚度之傾斜、及片材玻璃SG之中央區域CA之厚度進行上述判定。作為中央區域CA之厚度，控制裝置500可使用操作前預先設定之厚度，亦可使用操作中利用與上述測定裝置同樣之測定機構測定出之中央區域CA之厚度。再者，控制裝置500保持與中央區域CA之厚度對應之容許值相關之資訊。
於該玻璃基板之製造方法中，藉由基於中央區域CA之厚度進行夾持位置之反饋調整，尤其於因中央區域CA之厚度而導致厚度之傾斜發生變化之情形時，可精度良好地緩和片材玻璃SG自下拉輥81a受到之壓接力之不均勻度。The method for producing a glass substrate preferably has a measurement step of measuring the thickness of the sheet glass SG in the inclined region SA when the control step is provided. Specifically, the thickness of the sheet glass SG can be obtained by establishing the relationship between the thickness of the sheet glass SG measured in a plurality of portions in the width direction in the inclined region SA and the positions in the respective thicknesses and width directions. The thickness of the sheet glass SG at each position in the width direction is measured by, for example, a measuring device (not shown) such as a laser displacement meter. The measuring device is connected to the control device 500, and is configured to output information on the position in the thickness and the width direction measured at fixed time intervals to the control device 500. The control device 500 obtains the inclination of the thickness from the information on the position in the thickness direction and the width direction among the information sent from the measurement device, and performs the above determination using the obtained inclination of the thickness and the thickness of the central region CA of the sheet glass SG. As the thickness of the central area CA, the control device 500 can use a thickness set in advance before the operation, or can use the thickness of the central area CA measured by the measuring means similar to the above-described measuring device during the operation. Furthermore, the control device 500 maintains information relating to the allowable value corresponding to the thickness of the central area CA.
In the method for producing a glass substrate, the feedback adjustment of the nip position is performed based on the thickness of the central region CA, and in particular, when the inclination of the thickness changes due to the thickness of the central region CA, the sheet can be gently alleviated. The unevenness of the crimping force of the material glass SG from the pull-down roller 81a.

厚度之傾斜之容許值較佳為針對下拉輥81a～81g中之每一個設定。於此情形時，進而較佳為越位於下游側之下拉輥，容許值設定為越小之值。片材玻璃SG中，越位於下游側之部分，溫度越低而越硬，因此與位於上游側之部分相比，容易出現損傷，而容易產生裂紋。然而，如上所述，若以越位於下游側之下拉輥，厚度之傾斜之容許值越小之方式設定，則越位於下游側之下拉輥，將夾持位置調整為板厚之傾斜越小之片材玻璃SG之部分，因此，施加至片材玻璃SG之壓接力之不均勻度得到較大緩和。藉由以此方式對下拉輥81a～81g中之每一個設定容許值而規定其大小，可遍及搬送方向之整體抑制於片材玻璃SG之兩側區域產生損傷。再者，越位於上游側之片材玻璃SG之部分，溫度越高而越軟，因此，即便下拉輥之夾持位置位於板厚之傾斜較大之片材玻璃SG之部分，與位於下游側之片材玻璃SG之部分相比，亦不易出現損傷。The allowable value of the inclination of the thickness is preferably set for each of the pull-down rolls 81a to 81g. In this case, it is further preferred that the lower the downstream side of the pulling roller, the allowable value is set to a smaller value. In the sheet glass SG, the portion which is located on the downstream side has a lower temperature and is harder. Therefore, damage is likely to occur as compared with the portion located on the upstream side, and cracks are likely to occur. However, as described above, if the lower the downstream side is to pull the roller, the allowable value of the inclination of the thickness is set to be smaller, and the lower the downstream side is, the smaller the inclination is to adjust the clamping position to the plate thickness. Part of the sheet glass SG, therefore, the unevenness of the crimping force applied to the sheet glass SG is greatly alleviated. By setting the allowable value for each of the pull-down rolls 81a to 81g in this manner and specifying the size thereof, it is possible to suppress damage to both side regions of the sheet glass SG throughout the conveyance direction. Further, the portion of the sheet glass SG located on the upstream side has a higher temperature and is softer. Therefore, even if the gripping position of the pull-down roller is located at a portion of the sheet glass SG having a large inclination of the sheet thickness, and on the downstream side The damage of the sheet glass SG is also less likely to occur.

根據本實施形態，於調整為與下拉輥81a對向之片材玻璃SG之部分之厚度之傾斜小於容許值之區域內之夾持位置上，下拉輥81a夾持片材玻璃SG，藉此與夾持位置位於小於容許值之區域外之情況相比，片材玻璃SG自下拉輥81a受到之壓接力之不均勻度得以緩和。因此，可抑制片材玻璃SG被下拉輥81a局部以較大之壓接力夾持之情況，從而可抑制片材玻璃SG產生損傷。According to the present embodiment, the pull-down roller 81a holds the sheet glass SG at the nip position in the region where the inclination of the thickness of the portion of the sheet glass SG opposed to the pull-down roller 81a is smaller than the allowable value. The unevenness of the crimping force of the sheet glass SG from the pull-down roller 81a is alleviated as compared with the case where the gripping position is outside the region of the allowable value. Therefore, it is possible to suppress the sheet glass SG from being partially pinched by the large pressure contact force by the pull-down roller 81a, and it is possible to suppress the damage of the sheet glass SG.

以上，對本發明之玻璃基板之製造方法及玻璃基板製造裝置詳細地進行了說明，但本發明之具體構成不限於上述實施形態，可於不脫離發明主旨之範圍內進行變更。In the above, the glass substrate manufacturing method and the glass substrate manufacturing apparatus of the present invention have been described in detail. However, the specific configuration of the present invention is not limited to the above-described embodiments, and modifications may be made without departing from the scope of the invention.

11‧‧‧熔融裝置11‧‧‧Melter

12‧‧‧澄清裝置 12‧‧‧Clarification device

20‧‧‧溢流室 20‧‧‧ overflow chamber

23‧‧‧上游管道 23‧‧‧Upstream pipeline

24‧‧‧下游管道 24‧‧‧ Downstream pipeline

30‧‧‧形成室 30‧‧‧Forming room

40‧‧‧成形裝置 40‧‧‧Forming device

41‧‧‧成形體 41‧‧‧Formed body

41a‧‧‧下端部 41a‧‧‧Bottom

41b‧‧‧頂部 41b‧‧‧ top

41c‧‧‧側面 41c‧‧‧ side

42‧‧‧流入口 42‧‧‧Inlet

43‧‧‧槽 43‧‧‧ slots

50‧‧‧分隔構件 50‧‧‧Parts

51‧‧‧冷卻輥 51‧‧‧Cooling roller

60‧‧‧冷卻單元 60‧‧‧Cooling unit

61～65‧‧‧冷卻元件 61～65‧‧‧ cooling element

80‧‧‧冷卻室 80‧‧‧Cooling room

80b‧‧‧隔熱構件 80b‧‧‧Insulation member

81a～81g‧‧‧下拉輥 81a～81g‧‧‧ Pull-down roller

82a～82g‧‧‧加熱器 82a～82g‧‧‧heater

90‧‧‧切斷裝置 90‧‧‧cutting device

100‧‧‧玻璃基板製造裝置 100‧‧‧Glass substrate manufacturing equipment

380‧‧‧熱電偶 380‧‧‧ thermocouple

381‧‧‧主電源開關 381‧‧‧Main power switch

390‧‧‧冷卻輥驅動馬達 390‧‧‧Cooling roller drive motor

391‧‧‧下拉輥驅動馬達 391‧‧‧ Pull-down roller drive motor

392‧‧‧切斷裝置驅動馬達 392‧‧‧cutting device drive motor

500‧‧‧控制裝置 500‧‧‧Control device

A‧‧‧位置 A‧‧‧ position

B‧‧‧位置 B‧‧‧ position

CA‧‧‧中央區域 CA‧‧‧Central Area

FG‧‧‧熔融玻璃 FG‧‧‧ molten glass

L1‧‧‧間隔 L1‧‧‧ interval

L2‧‧‧間隔 L2‧‧‧ interval

PL‧‧‧線 PL‧‧‧ line

Q‧‧‧位置 Q‧‧‧ position

R、L‧‧‧兩側區域 R, L‧‧‧ both sides

S‧‧‧劃線 S‧‧‧

SA‧‧‧傾斜區域(邊界區域) SA‧‧‧ Sloped area (boundary area)

SG‧‧‧片材玻璃 SG‧‧‧Sheet glass

SP‧‧‧端部 SP‧‧‧ end

圖1係本實施形態之玻璃板之製造方法之流程圖。Fig. 1 is a flow chart showing a method of manufacturing a glass sheet of the embodiment.

圖2係表示玻璃板之製造方法中使用之玻璃板之製造裝置之模式圖。 Fig. 2 is a schematic view showing a manufacturing apparatus of a glass sheet used in a method of producing a glass sheet.

圖3係表示成形裝置之概略之概略圖(剖視圖)。 Fig. 3 is a schematic view (cross-sectional view) showing a schematic view of a molding apparatus.

圖4係表示成形裝置之概略之概略圖(側視圖)。 Fig. 4 is a schematic (side view) showing a schematic view of a molding apparatus.

圖5係控制裝置之控制方塊圖。 Figure 5 is a control block diagram of the control device.

圖6係說明搬送輥之夾持位置之圖。 Fig. 6 is a view for explaining a holding position of a conveying roller.

圖7係表示中央區域之厚度與夾持位置上之玻璃板之厚度之關係的圖。 Fig. 7 is a view showing the relationship between the thickness of the central portion and the thickness of the glass plate at the nip position.

Claims (9)

一種玻璃基板之製造方法，其特徵在於具有： 成形步驟，其使用溢流下拉法將熔融玻璃成形而形成玻璃板；及 搬送步驟，其一面利用至少一對搬送輥夾持上述玻璃板之寬度方向之兩側區域，一面將上述玻璃板向下方向搬送； 於上述成形步驟中，於上述兩側區域形成傾斜區域，上述傾斜區域中，上述玻璃板之厚度以上述玻璃板之厚度朝向寬度方向外側變厚之方式於寬度方向上傾斜，且 上述搬送步驟中上述搬送輥夾持上述玻璃板之位置被調整為上述傾斜區域中與上述搬送輥對向之上述玻璃板之部分之厚度之傾斜小於容許值之區域內。A method of manufacturing a glass substrate, characterized by having: a forming step of forming a molten glass using an overflow down-draw method to form a glass sheet; a conveying step of conveying the glass plate in a downward direction while sandwiching both side regions in the width direction of the glass sheet by at least one pair of conveying rollers; In the forming step, an inclined region is formed in the both side regions, and in the inclined region, the thickness of the glass sheet is inclined in the width direction so that the thickness of the glass sheet becomes thicker outward in the width direction, and In the conveyance step, the position at which the conveyance roller sandwiches the glass sheet is adjusted so that the inclination of the thickness of the portion of the inclined portion facing the glass sheet is smaller than the allowable value. 如請求項1之玻璃基板之製造方法，其中於上述成形步驟中，於利用上述搬送輥夾持上述玻璃板之前，利用配置於較上述搬送輥更靠搬送方向之上游側之冷卻輥夾持上述玻璃板之上述兩側區域，且 上述搬送輥夾持上述玻璃板之位置被調整為自上述冷卻輥所夾持之上述玻璃板之位置向寬度方向內側隔開特定以上之間隔之位置。The method of producing a glass substrate according to claim 1, wherein in the forming step, the glass sheet is sandwiched by a cooling roller disposed on an upstream side of the conveying roller in the conveying direction before the glass sheet is sandwiched by the conveying roller The above two sides of the glass plate, and The position where the conveyance roller is sandwiched between the glass sheets is adjusted so as to be spaced apart from the inner side in the width direction by a position of a predetermined or more interval from the position of the glass sheet held by the cooling rolls. 如請求項1或2之玻璃基板之製造方法，其進而具有調整上述搬送輥夾持上述玻璃板之位置之控制步驟，且 於上述控制步驟中，將上述搬送輥夾持上述玻璃板之位置調整為上述傾斜區域中與上述搬送輥對向之上述玻璃板之部分之厚度之傾斜小於容許值之區域內。The method for producing a glass substrate according to claim 1 or 2, further comprising a control step of adjusting a position at which the transfer roller sandwiches the glass sheet, and In the above control step, the position at which the transfer roller is sandwiched between the glass sheets is adjusted so that the inclination of the thickness of the portion of the inclined portion facing the glass sheet in the inclined region is less than an allowable value. 如請求項3之玻璃基板之製造方法，其進而具有測定上述傾斜區域中之上述玻璃板之上述部分之厚度之傾斜之測定步驟，且 於上述控制步驟中，基於上述玻璃板之寬度方向之中央區域之厚度及上述厚度之傾斜之測定結果而調整上述搬送輥夾持上述玻璃板之位置。The method for producing a glass substrate according to claim 3, further comprising the step of measuring the inclination of the thickness of the portion of the glass sheet in the inclined region, and In the above control step, the position of the conveyance roller sandwiching the glass sheet is adjusted based on the measurement result of the thickness of the central portion in the width direction of the glass sheet and the inclination of the thickness. 如請求項3或4之玻璃基板之製造方法，其中於上述控制步驟中，將上述搬送輥夾持上述玻璃板之位置調整為上述厚度之傾斜變得更小之區域內。The method for producing a glass substrate according to claim 3 or 4, wherein in the controlling step, the position at which the conveying roller sandwiches the glass sheet is adjusted to a region where the inclination of the thickness becomes smaller. 如請求項1至5中任一項之玻璃基板之製造方法，其中上述搬送輥夾持上述玻璃板之位置被調整為自上述玻璃板之寬度方向之兩端向寬度方向內側隔開特定以上之間隔之位置。The method for producing a glass substrate according to any one of claims 1 to 5, wherein a position at which the transfer roller is sandwiched between the glass sheets is adjusted so as to be spaced apart from the both ends in the width direction of the glass sheet by a specific width or more. The location of the interval. 如請求項1至3中任一項之玻璃基板之製造方法，其中上述搬送輥夾持上述玻璃板之位置被調整為與上述搬送輥對向之上述玻璃板之部分之厚度成為容許厚度以下之區域內。The method for producing a glass substrate according to any one of claims 1 to 3, wherein a position at which the conveyance roller sandwiches the glass sheet is adjusted so that a thickness of a portion of the glass sheet facing the conveyance roller is equal to or less than a allowable thickness within the area. 如請求項1至7中任一項之玻璃基板之製造方法，其中於上述搬送步驟中，一面利用於搬送方向上隔開間隔地配置之複數個搬送輥夾持上述兩側區域，一面將上述玻璃板向下方向搬送，且 越位於搬送方向之下游側之搬送輥，上述容許值設定為越小之值。The method for producing a glass substrate according to any one of claims 1 to 7, wherein, in the transporting step, the plurality of transport rollers arranged at intervals in the transport direction are sandwiched between the two side regions The glass plate is transported downwards, and The allowable value is set to a smaller value as the conveying roller on the downstream side in the conveying direction. 一種玻璃基板製造裝置，其特徵在於具有： 成形裝置，其使用溢流下拉法將熔融玻璃成形而形成玻璃板；及 搬送裝置，其一面利用至少一對搬送輥夾持上述玻璃板之寬度方向之兩側區域，一面將上述玻璃板向下方向搬送； 上述成形裝置於上述兩側區域形成傾斜區域，上述傾斜區域中，上述玻璃板之厚度以上述玻璃板之厚度朝向寬度方向外側變厚之方式於寬度方向上傾斜，且 上述搬送輥夾持上述玻璃板之位置被調整為上述傾斜區域中與上述搬送輥對向之上述玻璃板之部分之厚度之傾斜小於容許值之區域內。A glass substrate manufacturing apparatus characterized by having: a forming apparatus for forming a glass plate by using an overflow down-draw method to form a glass plate; a conveying device that conveys the glass plate in a downward direction while sandwiching both side regions in the width direction of the glass sheet by at least one pair of conveying rollers; The molding apparatus forms an inclined region in the both side regions, and in the inclined region, the thickness of the glass sheet is inclined in the width direction so that the thickness of the glass sheet becomes thicker outward in the width direction, and The position at which the conveyance roller sandwiches the glass sheet is adjusted so that the inclination of the thickness of the portion of the inclined portion opposite to the conveyance roller is smaller than the allowable value.
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