TW201905603A - Projection optical device, scanning exposure device, and component manufacturing method - Google Patents

Projection optical device, scanning exposure device, and component manufacturing method

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Publication number
TW201905603A
TW201905603A TW107133825A TW107133825A TW201905603A TW 201905603 A TW201905603 A TW 201905603A TW 107133825 A TW107133825 A TW 107133825A TW 107133825 A TW107133825 A TW 107133825A TW 201905603 A TW201905603 A TW 201905603A
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TW
Taiwan
Prior art keywords
projection
substrate
beam splitter
illumination
polarizing beam
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Application number
TW107133825A
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Chinese (zh)
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TWI687779B (en
Inventor
加藤正紀
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日商尼康股份有限公司
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Publication of TW201905603A publication Critical patent/TW201905603A/en
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Publication of TWI687779B publication Critical patent/TWI687779B/en

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/24—Curved surfaces
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70308—Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

The invention provides a substrate processing device, which comprises: a projection optical system (PL) which forms an intermediate image by imaging a first projection beam (EL2a) from a mask (M) and forms a projection image by reimaging onto a substrate (P) a second projection beam (EL2b) from an intermediate image surface (P7) on which the intermediate image is formed; and a light intensity reduction unit for reducing the light intensity of leak light generated from the first projection beam (EL2a) and projected onto the substrate (P). The projection optical system (PL) includes a partial optical system (61) for imaging the first projection beam (EL2a) from the mask (M) to project the image onto the intermediate image surface (P7); and a reflection optical system (62) for introducing the first projection beam (EL2a) projected from the partial optical system (61) to the intermediate image surface (P7) while introducing the second projection beam (EL2b) from the intermediate image surface (P7) into the partial optical system (61). The partial optical system (61) reimages the second projection beam (EL2b) from the intermediate image surface (P7) to form the projection image onto the substrate (P).

Description

投影光學裝置、掃描曝光裝置、及元件製造方法    Projection optical device, scanning exposure device, and element manufacturing method   

本發明係關於基板處理裝置、元件製造系統及元件製造方法。 The present invention relates to a substrate processing apparatus, a component manufacturing system, and a component manufacturing method.

先前，作為基板處理裝置，有一種在光罩與板件(基板)之間配置投影光學系之曝光裝置(例如，參照專利文獻1)。此投影光學系，包含透鏡群、平面反射鏡、2個偏光分束器、2個反射鏡、λ/4波長板及視野光闌而構成。此曝光裝置中，透過光罩照明於投影光學系之S偏光之投影光，被其中一方偏光分束器反射。被反射之S偏光之投影光因通過λ/4波長板而轉換為圓偏光。圓偏光之投影光通過透鏡群後被平面反射鏡反射。被反射之圓偏光之投影光因通過λ/4波長板而轉換為P偏光。P偏光之投影光穿透另一方之偏光分束器，被一方之反射鏡反射。被一方之反射鏡反射之P偏光之投影光，於視野光闌形成中間像。通過視野光闌之P偏光之投影光被另一方反射鏡反射，再次射入一方之偏光分束器。P偏光之投影光穿透一方之偏光分束器。穿透之P偏光之投影光因通過λ/4波長板而轉換為圓偏光。圓偏光之投影光通過透鏡群而被平面反射鏡反射。被反射之圓偏光之投影光因通過λ/4波長板而轉換為S偏光。S偏光之投影光被另一方偏光分束器反射而到達板件上。 Conventionally, as a substrate processing apparatus, there is an exposure apparatus in which a projection optical system is arranged between a mask and a plate (substrate) (for example, refer to Patent Document 1). This projection optical system is composed of a lens group, a plane mirror, two polarizing beam splitters, two mirrors, a λ / 4 wavelength plate, and a field diaphragm. In this exposure device, the projected light of the S-polarized light illuminating the projection optical system through the mask is reflected by one of the polarizing beam splitters. The reflected S-polarized projection light is converted into circularly polarized light by passing through a λ / 4 wavelength plate. The circularly polarized light is reflected by a plane mirror after passing through the lens group. The reflected circularly polarized light is converted into P polarized light by passing through a λ / 4 wavelength plate. The P-polarized projection light penetrates the other polarizing beam splitter and is reflected by one mirror. The projected light of the P polarized light reflected by one of the mirrors forms an intermediate image on the field diaphragm. The projected light of the P-polarized light passing through the field diaphragm is reflected by the other mirror and enters one of the polarized beam splitters again. The projected light of the P polarized light passes through one of the polarized beam splitters. The projected light of the transmitted P polarized light is converted into circularly polarized light by passing through a λ / 4 wavelength plate. The circularly polarized projection light passes through the lens group and is reflected by the plane mirror. The reflected circularly polarized light is converted into S-polarized light by passing through a λ / 4 wavelength plate. The projected light of the S-polarized light is reflected by the other polarizing beam splitter and reaches the plate.

【先行技術文獻】 [Advanced technical literature]

[專利文獻1]日本特開平8-64501號公報 [Patent Document 1] Japanese Unexamined Patent Publication No. 8-64501

此時，於偏光分束器反射及穿透之投影光，其一部分會成為洩漏光。也就是說，於偏光分束器反射之投影光之一部分會分離，而分離之投影光之一部分成為洩漏光而穿透偏光分束器、或於偏光分束器穿透之投影光之一部分離，而分離之投影光之一部分成為洩漏光而於偏光分束器反射。此場合，即有可能因洩漏光成像在基板上而於基板上形成不良像。此時，由於在基板上形成投影光之投影像、以及因洩漏光而形成之不良像，因此有可能造成雙重曝光。 At this time, a part of the projection light reflected and transmitted by the polarizing beam splitter becomes leakage light. That is, a part of the projection light reflected by the polarizing beam splitter is separated, and a part of the separated projection light becomes leakage light and penetrates the polarizing beam splitter or a part of the projection light transmitted by the polarizing beam splitter And a part of the separated projection light becomes leakage light and is reflected by the polarizing beam splitter. In this case, a defective image may be formed on the substrate due to the leakage light imaging on the substrate. At this time, since a projection image of the projection light and a defective image formed by the leakage light are formed on the substrate, a double exposure may be caused.

本發明有鑑於上述課題而生，其目的在提供一種能降低洩漏光對基板上形成之投影像之影響，適合於基板上投影出投影像之基板處理裝置、元件製造系統及元件製造方法。 The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide a substrate processing apparatus, a component manufacturing system, and a component manufacturing method capable of reducing the influence of leakage light on a projection image formed on a substrate and suitable for projecting the projection image on a substrate.

本發明第1態樣，提供一種一種基板處理裝置：具備投影光學系，係以來自光罩構件之圖案之第1投影光，於既定中間像面形成該圖案之中間像，藉由使從該中間像面往既定基板行進之第2投影光折返以再次通過該投影光學系，據以在該基板上形成該中間像再成像之投影像；以及光量降低部，降低該第1投影光之一部分作為洩漏光投射至該基板上之光量；該投影光學系，具有部分光學系，射入來自該圖案之該第1投影光以形成該中間像；以及導光光學系，係將從該部分光學系射出之該第1投影光導向該中間像面，並將來自該中間像面之該第2投影光再次導向該部分光學系；該部分光學系，係使來自該中間像面之該第2投影光再成像後將該投影像形成於該基板上。 According to a first aspect of the present invention, there is provided a substrate processing apparatus including a projection optical system that forms a first intermediate projection image of a pattern from a mask member on a predetermined intermediate image plane to form an intermediate image of the pattern. The second projection light traveling from the intermediate image plane toward the predetermined substrate is returned to pass through the projection optical system again, so as to form a projection image of the intermediate image for re-imaging on the substrate; and a light amount reducing section that reduces a portion of the first projection light The amount of light projected onto the substrate as leaked light; the projection optical system has a part of the optical system that injects the first projection light from the pattern to form the intermediate image; and the light-guiding optical system is optical from the part The first projection light emitted from the system is directed to the intermediate image plane, and the second projection light from the intermediate image plane is directed to the partial optical system again; the partial optical system is the second optical system from the intermediate image plane After the projection light is re-imaged, the projection image is formed on the substrate.

本發明第2態樣，提供一種元件製造系統，其具備本發明第1態樣之基板處理裝置、以及將該基板供應至該基板處理裝置之基板供應裝置。 According to a second aspect of the present invention, there is provided a component manufacturing system including the substrate processing apparatus according to the first aspect of the present invention, and a substrate supply apparatus that supplies the substrate to the substrate processing apparatus.

本發明第3態樣，提供一種元件製造方法，其包含使用本發明第1態樣之基板處理裝置於該基板進行投影曝光的動作、以及藉由對經投影曝光之該基板進行處理以形成該光罩構件之圖案的動作。 According to a third aspect of the present invention, there is provided a component manufacturing method including an operation of performing a projection exposure on the substrate using the substrate processing apparatus of the first aspect of the present invention, and forming the substrate by processing the substrate subjected to the projection exposure. The movement of the pattern of the mask member.

根據本發明之態樣，可提供能降低投射至基板上之洩漏光之光量，適於在基板上投影出投影像之基板處理裝置、元件製造系統及元件製造方法。 According to aspects of the present invention, a substrate processing apparatus, a component manufacturing system, and a component manufacturing method capable of reducing the amount of light leaked onto a substrate and suitable for projecting a projection image on the substrate can be provided.

1‧‧‧元件製造系統 1‧‧‧component manufacturing system

2‧‧‧基板供應裝置 2‧‧‧ substrate supply device

4‧‧‧基板回收裝置 4‧‧‧ substrate recovery device

5‧‧‧上位控制裝置 5‧‧‧ host control device

11‧‧‧光罩保持機構 11‧‧‧Mask holding mechanism

12‧‧‧基板支承機構 12‧‧‧ substrate support mechanism

13‧‧‧光源裝置 13‧‧‧light source device

16‧‧‧下位控制裝置 16‧‧‧ Lower control device

21‧‧‧光罩保持圓筒 21‧‧‧Photomask holding cylinder

25‧‧‧基板支承圓筒 25‧‧‧ substrate support cylinder

31‧‧‧光源部 31‧‧‧Light source department

32‧‧‧導光構件 32‧‧‧light guide

41‧‧‧1/4波長板 41‧‧‧1 / 4 wave plate

51‧‧‧準直透鏡 51‧‧‧ collimating lens

52‧‧‧複眼透鏡 52‧‧‧Flying Eye Lens

53‧‧‧聚光透鏡 53‧‧‧ condenser lens

54‧‧‧柱面透鏡 54‧‧‧ cylindrical lens

55‧‧‧照明視野光闌 55‧‧‧illumination field diaphragm

56‧‧‧中繼透鏡 56‧‧‧ relay lens

61‧‧‧部分光學系 61‧‧‧Part of the Department of Optics

62‧‧‧反射光學系 62‧‧‧Reflective Optics

63‧‧‧投影視野光闌 63‧‧‧ projection field diaphragm

64‧‧‧聚焦修正光學構件 64‧‧‧ Focus Correction Optics

65‧‧‧像偏移用光學構件 65‧‧‧Image shifting optical member

66‧‧‧倍率修正用光學構件 66‧‧‧Optical member for magnification correction

67‧‧‧旋轉修正機構 67‧‧‧rotation correction mechanism

68‧‧‧偏光調整機構 68‧‧‧ Polarization adjustment mechanism

71‧‧‧第1透鏡群 71‧‧‧1st lens group

71a‧‧‧折射透鏡 71a‧‧‧refractive lens

72‧‧‧第1凹面鏡 72‧‧‧ 1st concave mirror

76‧‧‧第1偏向構件 76‧‧‧The first deflection member

77‧‧‧第2偏向構件 77‧‧‧The second deflection member

78‧‧‧第3偏向構件 78‧‧‧3rd deflection member

79‧‧‧第4偏向構件 79‧‧‧ 4th deflection member

91‧‧‧第1稜鏡 91‧‧‧ first 1

92‧‧‧第2稜鏡 92‧‧‧ 2nd

93‧‧‧偏光分離面 93‧‧‧polarized light separation surface

100‧‧‧反射光學系(第2實施形態) 100‧‧‧Reflective optics (second embodiment)

104‧‧‧1/2波長板(第2實施形態) 104‧‧‧1 / 2 wavelength plate (second embodiment)

105‧‧‧第1偏向構件(第2實施形態) 105‧‧‧ the first deflection member (second embodiment)

106‧‧‧第2偏向構件(第2實施形態) 106‧‧‧Second deflection member (second embodiment)

107‧‧‧1/2波長板(第2實施形態) 107‧‧‧1 / 2 wavelength plate (second embodiment)

111‧‧‧第1遮光板(第2實施形態) 111‧‧‧1st light shielding plate (second embodiment)

112‧‧‧第2遮光板(第2實施形態) 112‧‧‧Second shading plate (second embodiment)

130‧‧‧反射光學系(第3實施形態) 130‧‧‧Reflective optics (third embodiment)

131‧‧‧部分光學系(第3實施形態) 131‧‧‧ part of optical system (third embodiment)

150‧‧‧基板支承機構(第4實施形態) 150‧‧‧ substrate support mechanism (fourth embodiment)

151‧‧‧驅動輥(第4實施形態) 151‧‧‧drive roller (4th embodiment)

AX1‧‧‧第1軸 AX1‧‧‧1st axis

AX2‧‧‧第2軸 AX2‧‧‧ 2nd axis

BX1‧‧‧第1光軸 BX1‧‧‧1st optical axis

BX2‧‧‧第2光軸 BX2‧‧‧ 2nd optical axis

CL‧‧‧中心面 CL‧‧‧ center plane

EL1‧‧‧照明光束 EL1‧‧‧illuminating beam

EL2a‧‧‧第1投影光束 EL2a‧‧‧The first projection beam

EL2b‧‧‧第2投影光束 EL2b‧‧‧ 2nd projection beam

EL3‧‧‧假想的第1投影光束(第3實施形態) EL3 ‧ ‧ imaginary first projection beam (third embodiment)

EL4‧‧‧假想的第1投影光束(第3實施形態) EL4 ‧ ‧ imaginary first projection beam (third embodiment)

FR1‧‧‧供應用輥 FR1‧‧‧Supply roller

FR2‧‧‧回收用輥 FR2‧‧‧Recycling roller

IL1~IL6‧‧‧照明光學系 IL1 ~ IL6‧‧‧ Department of Lighting Optics

ILM‧‧‧照明光學模組 ILM‧‧‧Lighting Optical Module

IR1~IR6‧‧‧照明區域 IR1 ~ IR6‧‧‧Lighting area

M‧‧‧光罩 M‧‧‧Photomask

P‧‧‧基板 P‧‧‧ substrate

P1‧‧‧光罩面 P1‧‧‧Mask surface

P2‧‧‧支承面 P2‧‧‧bearing surface

P3‧‧‧第1反射面 P3‧‧‧1st reflective surface

P4‧‧‧第2反射面 P4‧‧‧Second reflective surface

P5‧‧‧第3反射面 P5‧‧‧3rd reflective surface

P6‧‧‧第4反射面 P6‧‧‧4th reflecting surface

P7‧‧‧中間像面 P7‧‧‧Middle image plane

P10‧‧‧第1偏光分離面(第2實施形態) P10‧‧‧The first polarized light separation surface (second embodiment)

P11‧‧‧第2偏光分離面(第2實施形態) P11‧‧‧Second polarized light separation surface (second embodiment)

P12‧‧‧第1反射面(第2實施形態) P12‧‧‧1st reflective surface (second embodiment)

P13‧‧‧第2反射面(第2實施形態) P13‧‧‧Second reflective surface (second embodiment)

P15‧‧‧假想的光罩面(第3實施形態) P15‧‧‧imaginary photomask surface (third embodiment)

P16‧‧‧假想的中間像面(第3實施形態) P16‧‧‧imaginary intermediate image plane (third embodiment)

PA1~PA6‧‧‧投影區域 PA1 ~ PA6‧‧‧‧ projection area

PBS‧‧‧偏光分束器 PBS‧‧‧polarized beam splitter

PBS1‧‧‧第1偏光分束器(第2實施形態) PBS1‧‧‧first polarizing beam splitter (second embodiment)

PBS2‧‧‧第2偏光分束器(第2實施形態) PBS2‧‧‧Second polarizing beam splitter (second embodiment)

PL1~PL6‧‧‧投影光學系 PL1 ~ PL6‧‧‧‧Projection Optics

PLM‧‧‧投影光學模組 PLM‧‧‧Projection Optical Module

Rfa‧‧‧曲率半徑 Rfa‧‧‧curvature radius

Rm‧‧‧曲率半徑 Rm‧‧‧Curvature radius

U1~Un‧‧‧處理裝置 U1 ~ Un‧‧‧Processing device

U3‧‧‧曝光裝置(基板處理裝置) U3‧‧‧ exposure device (substrate processing device)

圖1係顯示第1實施形態之元件製造系統之構成的圖。 FIG. 1 is a diagram showing the configuration of a component manufacturing system according to the first embodiment.

圖2係顯示第1實施形態之曝光裝置(基板處理裝置)之整體構成的圖。 FIG. 2 is a diagram showing the overall configuration of an exposure apparatus (substrate processing apparatus) according to the first embodiment.

圖3係顯示圖2所示之曝光裝置之照明區域及投影區域之配置的圖。 FIG. 3 is a diagram showing the arrangement of an illumination area and a projection area of the exposure apparatus shown in FIG. 2.

圖4係顯示圖2所示之曝光裝置之照明光學系及投影光學系之構成的圖。 FIG. 4 is a diagram showing a configuration of an illumination optical system and a projection optical system of the exposure apparatus shown in FIG. 2.

圖5係將以投影光學模組形成之圓形之全成像視野展開於YZ面的圖。 FIG. 5 is a view in which a full imaging field of a circle formed by a projection optical module is developed on a YZ plane.

圖6係顯示第1實施形態之元件製造方法的流程圖。 Fig. 6 is a flowchart showing a device manufacturing method according to the first embodiment.

圖7係顯示第2實施形態之曝光裝置之照明光學系及投影光學系之構成的圖。 FIG. 7 is a diagram showing the configuration of the illumination optical system and the projection optical system of the exposure apparatus according to the second embodiment.

圖8係顯示第3實施形態之曝光裝置之投影光學系之構成的圖。 FIG. 8 is a diagram showing a configuration of a projection optical system of an exposure apparatus according to a third embodiment.

圖9係顯示第4實施形態之曝光裝置(基板處理裝置)之整體構成的圖。 FIG. 9 is a diagram showing the overall configuration of an exposure apparatus (substrate processing apparatus) according to a fourth embodiment.

針對用以實施本發明之形態(實施形態)，參照圖面詳細的說明如下。本發明當然不受限於以下實施形態所記載之內容。又，以下記載之構成要素中，包含當業者容易想到者、亦包含實質上相同之物。此外，以下記載之構成要素可適當的加以組合。再者，在不脫離本發明要旨之範圍內可進行構成要素之各種省略、置換或變更。 The aspect (embodiment) for implementing the present invention will be described in detail with reference to the drawings. The invention is not limited to the contents described in the following embodiments. In addition, the constituent elements described below include those which are easily conceivable by the practitioner, and also include substantially the same thing. The constituent elements described below can be appropriately combined. In addition, various omissions, substitutions, or changes of constituent elements can be made without departing from the gist of the present invention.

〔第1實施形態〕 [First Embodiment]

第1實施形態之基板處理裝置係對基板施以曝光處理之曝光裝置，曝光裝置 係組裝在對曝光後之基板施以各種處理以製造元件之元件製造系統。首先，說明元件製造系統。 The substrate processing apparatus of the first embodiment is an exposure apparatus that applies an exposure process to a substrate, and the exposure apparatus is an element manufacturing system that is assembled by applying various processes to the exposed substrate to manufacture elements. First, a component manufacturing system will be described.

<元件製造系統> <Component manufacturing system>

圖1係顯示第1實施形態之元件製造系統之構成的圖。圖1所示之元件製造系統1，係製造作為元件之可撓性顯示器之生產線(可撓性顯示器生產線)。作為可撓性顯示器，例如有有機EL顯示器等。此元件製造系統1，係從將可撓性基板P捲繞成捲筒狀之供應用捲筒FR1送出該基板P，並對送出之基板P連續的施以各種處理後，將處理後之基板P作為可撓性元件捲繞於回收用捲筒FR2、所謂之捲對捲(Roll to Roll)方式。第1實施形態之元件製造系統1，係顯示將成薄膜狀片材之基板P從供應用捲筒FR1送出，從供應用捲筒FR1送出之基板P，依序經n台之處理裝置U1、U2、U3、U4、U5、...Un，捲繞至回收用捲筒FR2為止之例。首先，針對作為元件製造系統1之處理對象的基板P加以說明。 FIG. 1 is a diagram showing the configuration of a component manufacturing system according to the first embodiment. The component manufacturing system 1 shown in FIG. 1 is a production line (flexible display production line) that manufactures flexible displays as components. Examples of the flexible display include an organic EL display. This component manufacturing system 1 is configured to feed the flexible substrate P from a supply roll FR1 that has been wound into a roll, and then the substrate P is continuously subjected to various processes. The processed substrate is then processed. P is wound as a flexible element on a reel FR2 for recycling, a so-called roll-to-roll method. The component manufacturing system 1 of the first embodiment shows that the substrate P formed into a thin film is fed out from the supply roll FR1, and the substrate P sent out from the supply roll FR1 is sequentially passed through the n processing units U1 and U1. U2, U3, U4, U5, ... Un are examples of winding up to the reel FR2 for recycling. First, a substrate P that is a processing target of the element manufacturing system 1 will be described.

基板P，例如係使用由樹脂薄膜、不鏽鋼等之金屬或合金構成之箔(foil)等。作為樹脂薄膜之材質，例如包含聚乙烯樹脂、聚丙烯樹脂、聚酯樹脂、乙烯乙烯共聚物樹脂、聚氯乙烯樹脂、纖維素樹酯、聚醯胺樹脂、聚醯亞胺樹脂、聚碳酸酯樹脂、聚苯乙烯樹脂、乙酸乙烯酯樹脂中之1或2種以上。 The substrate P is, for example, a foil made of a metal or alloy such as a resin film and stainless steel. The material of the resin film includes, for example, polyethylene resin, polypropylene resin, polyester resin, ethylene-ethylene copolymer resin, polyvinyl chloride resin, cellulose resin, polyamide resin, polyimide resin, and polycarbonate resin. 1 or more of polystyrene resin and vinyl acetate resin.

基板P，以選擇例如熱膨脹係數顯著較大、而能在對基板P實施之各種處理中因受熱而產生之變形量可實質忽視者較佳。熱膨脹係數，例如，可藉由將無機填充物混入樹脂薄膜中，據以設定為較對應製程溫度等之閾值小。無機填充物，可以是例如，氧化鈦、氧化鋅、氧化鋁、氧化矽等。又，基板P可以是以浮製法等製造之厚度100μm程度之極薄玻璃之單層體、或於此極薄玻璃貼合上述樹脂薄膜、箔等之積層體。 For the substrate P, it is preferable to select, for example, a thermal expansion coefficient that is significantly larger and can substantially ignore the amount of deformation caused by heat in various processes performed on the substrate P. The thermal expansion coefficient can be set to be smaller than a threshold value corresponding to a process temperature or the like, for example, by mixing an inorganic filler into a resin film. Examples of the inorganic filler include titanium oxide, zinc oxide, aluminum oxide, and silicon oxide. In addition, the substrate P may be a single-layered body of ultra-thin glass having a thickness of about 100 μm produced by a floating method or the like, or a laminated body in which the above-mentioned thin resin film, foil, or the like is bonded to the ultra-thin glass.

以此方式構成之基板P，被捲繞成捲筒狀而成為供應用捲筒FR1，此供應用捲筒FR1被裝著於元件製造系統1。裝有供應用捲筒FR1之元件製 造系統1，對從供應用捲筒FR1送出之基板P反覆實施用以製造1個元件之各種處理。因此，處理後之基板P成為複數個元件連結之狀態。也就是說，從供應用捲筒FR1送出之基板P，為多面用之基板。此外，基板P亦可以是藉由預先之既定前處理，將其表面予以改質而活性化者、或於表面形成用以精密圖案化之微細間隔壁構造(凹凸構造)者。 The substrate P configured in this manner is wound into a roll shape to become a supply roll FR1, and this supply roll FR1 is mounted on the component manufacturing system 1. The component manufacturing system 1 equipped with the supply roll FR1 repeatedly performs various processes for manufacturing one component on the substrate P sent out from the supply roll FR1. Therefore, the processed substrate P is in a state where a plurality of elements are connected. That is, the substrate P sent out from the supply roll FR1 is a multi-sided substrate. In addition, the substrate P may be one whose surface is modified and activated by a predetermined pretreatment in advance, or a fine partition wall structure (concave-convex structure) formed on the surface for precise patterning.

處理後之基板P，被捲繞成捲筒狀作為回收用捲筒FR2加以回收。回收用捲筒FR2，被安裝於未圖示之切割裝置。裝有回收用捲筒FR2之切割裝置，將處理後之基板P分割(切割)成各個元件，據以成複數個元件。基板P之尺寸，例如，寬度方向(短邊之方向)之尺寸為10cm~2m程度、而長度方向(長條之方向)尺寸則為10m以上。當然，基板P之尺寸不限於上述尺寸。 The processed substrate P is wound into a roll shape and recovered as a recovery roll FR2. The reel FR2 is mounted on a cutting device (not shown). A cutting device equipped with a recycling roll FR2 divides (cuts) the processed substrate P into individual components, thereby forming a plurality of components. The size of the substrate P is, for example, about 10 cm to 2 m in the width direction (direction of the short side), and more than 10 m in the length direction (length direction). Of course, the size of the substrate P is not limited to the above-mentioned size.

接著，參照圖1，說明元件製造系統1。圖1中，X方向、Y方向及Z方向成一正交之正交座標系。X方向係在水平面內，連結供應用捲筒FR1及回收用捲筒FR2之方向，為圖1中之左右方向。Y方向係在水平面內與X方向正交之方向，為圖1中之前後方向。Y方向係供應用捲筒FR1及回收用捲筒FR2之軸方向。Z方向係與X方向、Y方向正交之方向(鉛直方向)。 Next, a component manufacturing system 1 will be described with reference to FIG. 1. In FIG. 1, the X direction, the Y direction, and the Z direction form an orthogonal coordinate system orthogonal to each other. The X direction is in a horizontal plane, and the direction connecting the supply roll FR1 and the recovery roll FR2 is the left-right direction in FIG. 1. The Y direction is a direction orthogonal to the X direction in the horizontal plane, and is the front-back direction in FIG. 1. The Y direction is the axial direction of the supply roll FR1 and the recovery roll FR2. The Z direction is a direction (vertical direction) orthogonal to the X direction and the Y direction.

元件製造系統1，具備供應基板P之基板供應裝置2、對由基板供應裝置2供應之基板P施以各種處理之處理裝置U1~Un、回收經處理裝置U1~Un施以處理之基板P之基板回收裝置4、以及控制元件製造系統1之各裝置之上位控制裝置5。 Element manufacturing system 1 includes a substrate supply device 2 for supplying a substrate P, a processing device U1 to Un that performs various processes on the substrate P supplied from the substrate supply device 2, and The substrate recovery device 4 and each device of the control element manufacturing system 1 have a higher-level control device 5.

於基板供應裝置2，以可旋轉之方式安裝供應用捲筒FR1。基板供應裝置2，具有從所安裝之供應用捲筒FR1送出基板P的驅動輥R1、與調整基板P在寬度方向(Y方向)之位置的邊緣位置控制器EPC1。驅動輥D1，一邊夾持基板P之表背兩面一邊旋轉，將基板P從供應用捲筒FR1往朝向回收用捲筒FR2之搬送方向送出，據以將基板P供應至處理裝置U1~Un。此時，邊緣位置控制器 EPC1係以基板P在寬度方向端部(邊緣)之位置，相對目標位置在±十數μm程度範圍至±數十μm程度之範圍內之方式，使基板P移動於寬度方向，以修正基板P在寬度方向之位置。 A supply roll FR1 is rotatably mounted on the substrate supply device 2. The substrate supply device 2 includes a drive roller R1 that sends out a substrate P from a mounted supply roll FR1, and an edge position controller EPC1 that adjusts the position of the substrate P in the width direction (Y direction). The driving roller D1 rotates while holding the front and back surfaces of the substrate P, and sends out the substrate P from the supply roll FR1 toward the transporting direction of the recovery roll FR2, thereby supplying the substrate P to the processing devices U1 to Un. At this time, the edge position controller EPC1 moves the substrate P to the position of the substrate P in the width direction end (edge) relative to the target position within a range of ± tens of μm to ± tens of μm. The width direction is to correct the position of the substrate P in the width direction.

於基板回收裝置4，以可旋轉之方式裝有回收用捲筒FR2。基板回收裝置4，具有將處理後之基板P拉向回收用捲筒FR2側的驅動輥R2、與調整基板P在寬度方向(Y方向)之位置的邊緣位置控制器EPC2。基板回收裝置4，一邊以驅動輥R2夾持基板P之表背兩面一邊旋轉，將基板P拉向搬送方向，並藉由使回收用捲筒FR2旋轉，據以捲繞基板P。此時，邊緣位置控制器EPC2與邊緣位置控制器EPC1同樣構成，修正基板P在寬度方向之位置，以避免基板P之寬度方向端部(邊緣)在寬度方向產生不均。 A reel roll FR2 is rotatably mounted on the substrate recovery device 4. The substrate recovery device 4 includes a driving roller R2 that pulls the processed substrate P toward the recovery roll FR2 side, and an edge position controller EPC2 that adjusts the position of the substrate P in the width direction (Y direction). The substrate recovery device 4 rotates while holding the front and back surfaces of the substrate P with the driving roller R2, pulls the substrate P in the conveying direction, and rotates the recovery roll FR2 to wind the substrate P accordingly. At this time, the edge position controller EPC2 is configured in the same manner as the edge position controller EPC1, and the position of the substrate P in the width direction is corrected to prevent the width direction end (edge) of the substrate P from being uneven in the width direction.

處理裝置U1，係在從基板供應裝置2供應之基板P表面塗布感光性機能液之塗布裝置。作為感光性機能液，例如係使用光阻劑、感光性矽烷耦合劑、UV硬化樹脂液、其他感光性鍍敷觸媒用溶液等。處理裝置U1，從基板P之搬送方向上游側起，依序設有塗布機構Gp1與乾燥機構Gp2。塗布機構Gp1，具有捲繞基板P之壓輥DR1、與和壓輥DR1對向之塗布輥DR2。塗布機構Gp1在將所供應之基板P捲繞於壓輥DR1之狀態下，以壓輥DR1及塗布輥DR2夾持基板P。接著，塗布機構Gp1藉由使壓輥DR1及塗布輥DR2旋轉，一邊使基板P移動於搬送方向、一邊以塗布輥DR2塗布感光性機能液。乾燥機構Gp2吹出熱風或乾燥空氣等之乾燥用空氣以除去感光性機能液中所含之溶質(溶劑或水)，使塗有感光性機能液之基板P乾燥，以在基板P上形成感光性機能層。 The processing device U1 is a coating device that applies a photosensitive functional liquid to the surface of the substrate P supplied from the substrate supply device 2. As the photosensitive functional liquid, for example, a photoresist, a photosensitive silane coupling agent, a UV-curable resin solution, and other solutions for a photosensitive plating catalyst are used. The processing device U1 is sequentially provided with a coating mechanism Gp1 and a drying mechanism Gp2 from the upstream side in the conveying direction of the substrate P. The coating mechanism Gp1 includes a pressure roller DR1 that winds the substrate P, and a coating roller DR2 that faces the pressure roller DR1. The coating mechanism Gp1 holds the substrate P with the pressure roller DR1 and the coating roller DR2 in a state where the supplied substrate P is wound on the pressure roller DR1. Next, the coating mechanism Gp1 rotates the pressure roller DR1 and the coating roller DR2 to apply the photosensitive functional liquid with the coating roller DR2 while moving the substrate P in the conveying direction. The drying mechanism Gp2 blows dry air such as hot air or dry air to remove the solute (solvent or water) contained in the photosensitive functional liquid, and dries the substrate P coated with the photosensitive functional liquid to form a photosensitivity on the substrate P. Functional layer.

處理裝置U2，係為了使形成在基板P表面之感光性機能層安定，而將從處理裝置U1搬送之基板P加熱至既定温度(例如，數10~120℃程度)之加熱裝置。處理裝置U2，從基板P之搬送方向上游側起依序設有加熱室HA1與冷卻室HA2。加熱室HA1，於其內部設有複數個輥及複數個空氣翻轉桿(air turn bar)，複數個輥及複數個空氣翻轉桿構成基板P之搬送路徑。複數個輥以接觸基板P背面之方式設置，複數個空氣翻轉桿以非接觸狀態設於基板P之表面側。複數個輥及複數個空氣翻轉桿為加長基板P之搬送路徑，而呈蛇行狀之搬送路徑。通過加熱室HA1內之基板P，一邊沿蛇行狀之搬送路徑被搬送、一邊被加熱至既定温度。冷卻室HA2，為使在加熱室HA1加熱之基板P之温度與後製程(處理裝置U3)之環境温度一致，而將基板P冷卻至環境温度。冷卻室HA2，其內部設有複數個輥，複數個輥，與加熱室HA1同樣的，為加長基板P之搬送路徑而呈蛇行狀搬送路徑之配置。通過冷卻室HA2內之基板P，一邊沿蛇行狀之搬送路徑被搬送一邊被冷卻。於冷卻室HA2之搬送方向下游側，設有驅動輥R3，驅動輥R3一邊夾持通過冷卻室HA2之基板P一邊旋轉，據以將基板P供應向處理裝置U3。 The processing device U2 is a heating device that heats the substrate P transferred from the processing device U1 to a predetermined temperature (for example, about several 10 to 120 ° C.) in order to stabilize the photosensitive functional layer formed on the surface of the substrate P. The processing device U2 is provided with a heating chamber HA1 and a cooling chamber HA2 in this order from the upstream side in the transport direction of the substrate P. The heating chamber HA1 is provided with a plurality of rollers and a plurality of air turn bars inside, and the plurality of rollers and a plurality of air turn bars constitute a conveying path of the substrate P. A plurality of rollers are provided so as to contact the back surface of the substrate P, and a plurality of air reversing levers are provided on the surface side of the substrate P in a non-contact state. The plurality of rollers and the plurality of air reversing levers are elongated conveying paths of the substrate P, and meandering conveying paths. The substrate P in the heating chamber HA1 is heated to a predetermined temperature while being conveyed along a meandering conveyance path. The cooling chamber HA2 cools the substrate P to the ambient temperature so that the temperature of the substrate P heated in the heating chamber HA1 is consistent with the ambient temperature of the post-processing (processing device U3). The cooling chamber HA2 is provided with a plurality of rollers and a plurality of rollers in the same manner as the heating chamber HA1, and is arranged in a meandering transport path to extend the transport path of the substrate P. The substrate P in the cooling chamber HA2 is cooled while being transported along a meandering transport path. A driving roller R3 is provided on the downstream side in the conveying direction of the cooling chamber HA2. The driving roller R3 rotates while holding the substrate P passing through the cooling chamber HA2, and supplies the substrate P to the processing device U3.

處理裝置(基板處理裝置)U3，係對從處理裝置U2供應、表面形成有感光性機能層之基板(感光基板)P，投影曝光(轉印)顯示器用電路或配線等圖案之曝光裝置。詳細將留待後敘，處理裝置U3以照明光束照明反射型之光罩M，將藉由照明光束被光罩M反射所得之投影光束投影曝光於基板P。處理裝置U3，具有將從處理裝置U2供應之基板P送往搬送方向下游側的驅動輥R4、與調整基板P在寬度方向(Y方向)之位置的邊緣位置控制器EPC。驅動輥R4藉由在夾持基板P之表背兩面之同時進行旋轉，將基板P送向搬送方向下游側，據以朝曝光位置供應基板P。邊緣位置控制器EPC與邊緣位置控制器EPC1同樣構成，修正基板P在寬度方向之位置，以使在曝光位置之基板P之寬度方向成為目標位置。又，處理裝置U3具有在對曝光後基板P賦予鬆弛之狀態下，將基板P送往搬送方向下流側之2組驅動輥R5、R6。2組驅動輥R5、R6在基板P之搬送方向隔著既定間隔配置。驅動輥R5夾持搬送之基板P之上流側旋轉、驅動輥R6夾持搬送之基板P之下流側旋轉，據以將基板P供應向處理裝置U4。此時，由於基板P以被賦予鬆弛，因此能吸收在較驅動輥R6位於搬送方向下流側所產生之搬 送速度之變動，能切斷搬送速度之變動對基板P之曝光處理之影響。此外，於處理裝置U3內設有為進行光罩M之光罩圖案之一部分之像與基板P之相對位置對準(alignment)而檢測預先形成在基板P之對準標記等之對準顯微鏡AM1、AM2。 The processing device (substrate processing device) U3 is an exposure device for projecting an exposure (transfer) display circuit or wiring pattern on a substrate (photosensitive substrate) P supplied from the processing device U2 and having a photosensitive functional layer formed on the surface. The details will be described later. The processing device U3 illuminates the reflective mask M with an illumination beam, and projects and exposes the projection beam obtained by reflecting the illumination beam by the mask M on the substrate P. The processing device U3 includes a driving roller R4 that transports the substrate P supplied from the processing device U2 to the downstream side in the conveying direction, and an edge position controller EPC that adjusts the position of the substrate P in the width direction (Y direction). The driving roller R4 rotates while holding both the front and back surfaces of the substrate P to feed the substrate P to the downstream side in the conveying direction, thereby supplying the substrate P to the exposure position. The edge position controller EPC has the same configuration as the edge position controller EPC1, and corrects the position of the substrate P in the width direction so that the width direction of the substrate P at the exposure position becomes the target position. In addition, the processing device U3 has two sets of driving rollers R5 and R6 that transport the substrate P to the downstream side in the conveying direction in a state where the exposed substrate P is loosened. The two sets of driving rollers R5 and R6 are separated in the conveying direction of the substrate P. At a predetermined interval. The driving roller R5 rotates on the upstream side of the substrate P that is conveyed by the nip, and the driving roller R6 rotates on the downstream side of the substrate P that is conveyed by the nip, and supplies the substrate P to the processing device U4. At this time, since the substrate P is given slack, it is possible to absorb the variation in the conveying speed generated on the downstream side of the driving roller R6 in the conveying direction, and to cut off the influence of the variation in the conveying speed on the exposure processing of the substrate P. In addition, an alignment microscope AM1 is provided in the processing device U3 to perform alignment of the image of a part of the mask pattern of the mask M and the relative position of the substrate P and detect an alignment mark or the like formed on the substrate P in advance. , AM2.

處理裝置U4，係對從處理裝置U3搬送而來之曝光後之基板P，進行濕式之顯影處理、無電電鍍處理等之濕式處理裝置。處理裝置U4，於其內部具有於鉛直方向(Z方向)階段化之3個處理槽BT1、BT2、BT3、與搬送基板P之複數個輥。複數個輥係以基板P依序通過3個處理槽BT1、BT2、BT3內部之搬送路徑的方式配置。於處理槽BT3之搬送方向下游側設有驅動輥R7，驅動輥R7藉由一邊夾持通過處理槽BT3後之基板P一邊旋轉，據以將基板P供應向處理裝置U5。 The processing device U4 is a wet processing device that performs wet development processing, electroless plating processing, and the like on the exposed substrate P transferred from the processing device U3. The processing device U4 includes three processing tanks BT1, BT2, and BT3 and a plurality of rollers for transporting the substrate P in the vertical direction (Z direction). The plurality of rollers are arranged such that the substrate P sequentially passes through the conveying paths inside the three processing tanks BT1, BT2, and BT3. A driving roller R7 is provided downstream of the processing tank BT3 in the conveying direction. The driving roller R7 rotates while holding the substrate P passing through the processing tank BT3 to supply the substrate P to the processing apparatus U5.

雖省略圖示，但處理裝置U5係使從處理裝置U4搬送而來之基板P乾燥的乾燥裝置。處理裝置U5，將在處理裝置U4將濕式處理而附著於基板P之水分含有量，調整為既定水分含有量。由處理裝置U5加以乾燥之基板P，經由若干個處理裝置後被搬送至處理裝置Un。在以處理裝置Un加以處理後，基板P即被捲繞於基板回收裝置4之回收用捲筒FR2。 Although not shown, the processing device U5 is a drying device for drying the substrate P transferred from the processing device U4. The processing device U5 adjusts the moisture content of the processing device U4 to be wet-processed and adheres to the substrate P to a predetermined moisture content. The substrate P dried by the processing device U5 is transported to the processing device Un after passing through several processing devices. After being processed by the processing apparatus Un, the substrate P is wound on the reel FR2 for recycling of the substrate recovery apparatus 4.

上位控制裝置5，統籌控制基板供應裝置2、基板回收裝置4及複數個處理裝置U1~Un。上位控制裝置5控制基板供應裝置2及基板回收裝置4，將基板P從基板供應裝置2搬送向基板回收裝置4。又，上位控制裝置5，與基板P之搬送同步，控制複數個處理裝置U1~Un，以實施對基板P之各種處理。 The higher-level control device 5 controls the substrate supply device 2, the substrate recovery device 4, and a plurality of processing devices U1 to Un. The higher-level control device 5 controls the substrate supply device 2 and the substrate recovery device 4, and transfers the substrate P from the substrate supply device 2 to the substrate recovery device 4. In addition, the higher-level control device 5 controls a plurality of processing devices U1 to Un in synchronization with the conveyance of the substrate P to perform various processes on the substrate P.

<曝光裝置(基板處理裝置)> <Exposure device (substrate processing device)>

其次，針對作為第1實施形態之處理裝置U3之曝光裝置(基板處理裝置)之構成，參照圖2至圖4加以說明。圖2係顯示第1實施形態之曝光裝置(基板處理裝置)之整體構成的圖。圖3係顯示圖2所示曝光裝置之照明區域及投影區域之配置的圖。圖4係顯示圖2所示之曝光裝置之照明光學系及投影光學系之構成的 圖。 Next, the configuration of the exposure apparatus (substrate processing apparatus) as the processing apparatus U3 of the first embodiment will be described with reference to FIGS. 2 to 4. FIG. 2 is a diagram showing the overall configuration of an exposure apparatus (substrate processing apparatus) according to the first embodiment. FIG. 3 is a diagram showing the arrangement of an illumination area and a projection area of the exposure apparatus shown in FIG. 2. Fig. 4 is a diagram showing the constitutions of an illumination optical system and a projection optical system of the exposure apparatus shown in Fig. 2.

圖2所示之曝光裝置U3所謂的掃描曝光裝置，一邊將基板P往搬送方向(掃描方向)搬送、一邊將形成在圓筒狀光罩M之外周面之光罩圖案之像，投影曝光至基板P表面。又，圖2及圖3中，X方向、Y方向及Z方向正交之正交座標系，與圖1為同樣之正交座標系。 The so-called scanning exposure device of the exposure device U3 shown in FIG. 2 projects the substrate P in the conveying direction (scanning direction) while projecting an image of a mask pattern formed on the outer peripheral surface of the cylindrical mask M to The surface of the substrate P. In FIGS. 2 and 3, the orthogonal coordinate system orthogonal to the X direction, the Y direction, and the Z direction is the same orthogonal coordinate system as that of FIG. 1.

首先，說明用於曝光裝置U3之光罩(光罩構件)M。光罩M係例如使用金屬製圓筒體之反射型光罩。光罩M係形成具有以延伸於Y方向之第1軸AX1為中心之曲率半徑Rm之外周面(圓周面)的圓筒體，於徑方向具有一定厚度。光罩M之圓周面係形成有既定光罩圖案(圖案)之光罩面(圖案面)P1。光罩面P1，包含將光束以高效率反射於既定方向之高反射部、與於既定方向不反射光束或以低效率反射之反射抑制部，光罩圖案以高反射部及反射抑制部形成。此種光罩M，由於係金屬製之圓筒體，因此能以低價作成，可藉由高精度雷射光束描繪裝置之使用，將光罩圖案(除面板用之各種圖案外，亦有包含位置對準用基準標記、編碼器測量用標尺等之情形)精密地形成在圓筒狀外周面。 First, the mask (mask member) M used for the exposure apparatus U3 is demonstrated. The photomask M is, for example, a reflective photomask using a metal cylindrical body. The photomask M is formed into a cylindrical body having a peripheral surface (peripheral surface) having a radius of curvature Rm centered on the first axis AX1 extending in the Y direction, and has a certain thickness in the radial direction. The circumferential surface of the mask M is a mask surface (pattern surface) P1 on which a predetermined mask pattern (pattern) is formed. The mask surface P1 includes a highly reflective portion that reflects the light beam in a predetermined direction with high efficiency, and a reflection suppression portion that does not reflect the light beam in the predetermined direction or reflects with low efficiency. The mask pattern is formed of the high reflection portion and the reflection suppression portion. This photomask M is a metal cylindrical body, so it can be made at a low price. It can be used in high-precision laser beam drawing devices to pattern photomasks (in addition to various patterns for panels, there are also (Including cases such as alignment reference marks and encoder measurement scales) are precisely formed on the cylindrical outer peripheral surface.

又，光罩M可以是形成有對應1個顯示元件之面板用圖案之全體或一部分、亦可以是形成有對應複數個顯示元件之面板用圖案。此外，於光罩M可以是在繞第1軸AX1之周方向反覆形成複數個面板用圖案、亦可以是小型的面板用圖案在與第1軸AX1平行之方向反覆形成複數個。再者，於光罩M，亦可以是形成有第1顯示元件之面板用圖案與和第1顯示元件尺寸等不同之第2顯示元件之面板用圖案。又，光罩M只要是具有以第1軸AX1為中心之曲率半徑為Rm之圓周面即可，並不限定於圓筒體之形狀。例如，光罩M可以是具有圓周面之圓弧狀板材。此外，光罩M可以是薄板狀、亦可以是使薄板狀光罩M彎曲而具有圓周面。 In addition, the mask M may be the whole or a part of a panel pattern corresponding to one display element, or may be a panel pattern including a plurality of display elements. In addition, a plurality of panel patterns may be repeatedly formed on the photomask M in a circumferential direction around the first axis AX1, or a small number of panel patterns may be repeatedly formed in a direction parallel to the first axis AX1. In addition, in the mask M, a pattern for a panel in which a first display element is formed and a pattern for a panel in a second display element that is different from the size of the first display element may be used. The photomask M is not limited to the shape of a cylindrical body as long as it has a circumferential surface with a radius of curvature Rm centered on the first axis AX1. For example, the mask M may be an arc-shaped plate material having a circumferential surface. In addition, the mask M may have a thin plate shape, or the thin plate shape M may be curved to have a circumferential surface.

其次，說明圖2所示之曝光裝置U3。曝光裝置U3，除上述驅動輥 R4~R6、邊緣位置控制器EPC3及對準顯微鏡AM1、AM2之外，亦具有光罩保持機構11、基板支承機構12、照明光學系IL、投影光學系PL、以及下位控制裝置16。曝光裝置U3，藉由將從光源裝置13射出之照明光束EL1以照明光學系IL及投影光學系PL加以導引，據以將光罩保持機構11所保持之光罩M之光罩圖案之像，投射至以基板支承機構12支承之基板P。 Next, the exposure apparatus U3 shown in FIG. 2 will be described. The exposure device U3, in addition to the driving rollers R4 to R6, the edge position controller EPC3, and the alignment microscopes AM1 and AM2, also includes a mask holding mechanism 11, a substrate supporting mechanism 12, an illumination optical system IL, a projection optical system PL, And lower control device 16. The exposure device U3 guides the illumination light beam EL1 emitted from the light source device 13 with the illumination optical system IL and the projection optical system PL, and thereby the image of the mask pattern of the mask M held by the mask holding mechanism 11 , Projected onto the substrate P supported by the substrate supporting mechanism 12.

下位控制裝置16控制曝光裝置U3之各部，使各部實施處理。下位控制裝置16可以是元件製造系統1之上位控制裝置5之一部分或全部。又，下位控制裝置16亦可以是受上位控制裝置5控制、與上位控制裝置5不同之另一裝置。下位控制裝置16，例如包含電腦。 The lower-level control device 16 controls each part of the exposure device U3 and causes each part to perform processing. The lower-level control device 16 may be a part or all of the upper-level control device 5 of the component manufacturing system 1. The lower control device 16 may be another device controlled by the upper control device 5 and different from the upper control device 5. The lower control device 16 includes, for example, a computer.

光罩保持機構11，具有保持光罩M之光罩保持圓筒(光罩保持構件)21、與使光罩保持圓筒21旋轉之第1驅動部22。光罩保持圓筒21將光罩M保持成以光罩M之第1軸AX1為旋轉中心。第1驅動部22連接於下位控制裝置16，以第1軸AX1為旋轉中心使光罩保持圓筒21旋轉。 The mask holding mechanism 11 includes a mask holding cylinder (mask holding member) 21 that holds the mask M, and a first driving unit 22 that rotates the mask holding cylinder 21. The mask holding cylinder 21 holds the mask M so that the first axis AX1 of the mask M is the center of rotation. The first driving unit 22 is connected to the lower control device 16 and rotates the photomask holding cylinder 21 with the first axis AX1 as a rotation center.

又，光罩保持機構11雖係以光罩保持圓筒21保持圓筒體之光罩M，但不限於此構成。光罩保持機構11，亦可順著光罩保持圓筒21之外周面將薄板狀之光罩M捲繞保持。此外，光罩保持機構11，亦可將在彎曲成圓弧狀之板材表面形成有圖案之光罩M在光罩保持圓筒21之外周面加以保持。 The mask holding mechanism 11 is not limited to this configuration, although the mask M holds the cylindrical body by the mask holding cylinder 21. The mask holding mechanism 11 may hold and hold a thin plate-shaped mask M along the outer peripheral surface of the mask holding cylinder 21. In addition, the mask holding mechanism 11 may hold a mask M having a pattern formed on a surface of a plate curved in an arc shape on the outer peripheral surface of the mask holding cylinder 21.

基板支承機構12，具有支承基板P之基板支承圓筒25、使基板支承圓筒25旋轉之第2驅動部26、一對空氣翻轉桿(air turn bar)ATB1、ATB2、以及一對導輥27、28。基板支承圓筒25係形成為具有以延伸於Y方向之第2軸AX2為中心之曲率半徑為Rfa之外周面(圓周面)的圓筒形狀。此處，第1軸AX1與第2軸AX2彼此平行，並以通過第1軸AX1及第2軸AX2之面為中心面CL。基板支承圓筒25之圓周面之一部分為支承基板P之支承面P2。也就是說，基板支承圓筒25係藉由將基板P捲繞於其支承面P2，據以支承基板P。第2驅動部26連接於下位控 制裝置16，以第2軸AX2為旋轉中心使基板支承圓筒25旋轉。一對空氣翻轉桿ATB1、ATB2隔著基板支承圓筒25，分別設在基板P之搬送方向上流側及下流側。一對空氣翻轉桿ATB1、ATB2係設在基板P之表面側，於鉛直方向(Z方向)較基板支承圓筒25之支承面P2設置在下方側。一對導輥27、28隔著一對空氣翻轉桿ATB1、ATB2，分別設在基板P之搬送方向上流側及下流側。一對導輥27、28，其中一方之導輥27將從驅動輥R4搬送而來之基板P引導至空氣翻轉桿ATB1，另一方之導輥28則將從空氣翻轉桿ATB2搬送而來之基板P引導至驅動輥R5。 The substrate support mechanism 12 includes a substrate support cylinder 25 that supports the substrate P, a second drive unit 26 that rotates the substrate support cylinder 25, a pair of air turn bars ATB1, ATB2, and a pair of guide rollers 27 , 28. The substrate supporting cylinder 25 is formed in a cylindrical shape having a radius of curvature around the second axis AX2 extending in the Y direction and having a peripheral surface (peripheral surface) Rfa. Here, the first axis AX1 and the second axis AX2 are parallel to each other, and a plane passing through the first axis AX1 and the second axis AX2 is a center plane CL. A part of the circumferential surface of the substrate supporting cylinder 25 is a supporting surface P2 that supports the substrate P. In other words, the substrate support cylinder 25 supports the substrate P by winding the substrate P on its support surface P2. The second driving unit 26 is connected to the lower control device 16 and rotates the substrate support cylinder 25 with the second axis AX2 as a rotation center. A pair of air reversing levers ATB1 and ATB2 are provided on the upstream side and the downstream side of the substrate P in the conveying direction via the substrate support cylinder 25, respectively. A pair of air reversing levers ATB1 and ATB2 are provided on the surface side of the substrate P, and are provided on the lower side than the support surface P2 of the substrate support cylinder 25 in the vertical direction (Z direction). The pair of guide rollers 27 and 28 are respectively provided on the upstream side and the downstream side of the substrate P in the conveying direction of the substrate P via a pair of air reversing levers ATB1 and ATB2. A pair of guide rollers 27 and 28. One of the guide rollers 27 guides the substrate P transferred from the driving roller R4 to the air reversing lever ATB1, and the other of the guide rollers 28 transfers the substrate from the air reversing lever ATB2. P is guided to the driving roller R5.

承上所述，基板支承機構12將從驅動輥R4搬送而來之基板P，以導輥27引導至空氣翻轉桿ATB1，將通過空氣翻轉桿ATB1之基板P導入基板支承圓筒25。基板支承機構12，以第2驅動部26使基板支承圓筒25旋轉，據以將導入基板支承圓筒25之基板P一邊以基板支承圓筒25之支承面P2加以支承、一邊搬送向空氣翻轉桿ATB2。基板支承機構12，將被搬送至空氣翻轉桿ATB2之基板P以空氣翻轉桿ATB2引導至導輥28，將通過導輥28之基板P引導至驅動輥R5。 As described above, the substrate supporting mechanism 12 guides the substrate P transferred from the driving roller R4 to the air reversing lever ATB1 with the guide roller 27, and introduces the substrate P passing through the air reversing lever ATB1 into the substrate supporting cylinder 25. The substrate supporting mechanism 12 rotates the substrate supporting cylinder 25 by the second driving unit 26, and thereby supports the substrate P introduced into the substrate supporting cylinder 25 with the supporting surface P2 of the substrate supporting cylinder 25, and conveys it to the air while turning over Rod ATB2. The substrate supporting mechanism 12 guides the substrate P transferred to the air reversing lever ATB2 to the guide roller 28 with the air reversing lever ATB2, and guides the substrate P passing through the guide roller 28 to the driving roller R5.

此時，連接於第1驅動部22及第2驅動部26之下位控制裝置16，使光罩保持圓筒21與基板支承圓筒25以既定旋轉速度比同步旋轉，將形成在光罩M之光罩面P1之光罩圖案之像，連續的反覆投影曝光於捲繞在基板支承圓筒25之支承面P2之基板P表面(順著圓周面彎曲之面)。 At this time, the lower control device 16 is connected to the first driving unit 22 and the second driving unit 26, and the mask holding cylinder 21 and the substrate supporting cylinder 25 are rotated synchronously at a predetermined rotation speed ratio, and will be formed on the mask M. The image of the mask pattern of the mask surface P1 is continuously and repeatedly projected onto the surface of the substrate P (the surface curved along the circumferential surface) wound around the support surface P2 of the substrate support cylinder 25.

光源裝置13，射出照明於光罩M之照明光束EL1。光源裝置13具有光源部31與導光構件32。光源部31係射出適合基板P上感光性機能層之曝光之既定波長帶、光活性作用強之紫外線帶之光的光源。作為光源部31，可利用例如具有紫外線帶之輝線(g線、h線、i線等)之水銀燈等之燈光源、於波長450nm以下之紫外線帶具有震盪峰值之雷射二極體、發光二極體(LED)等之固體光源、或發出遠紫外光(DUV光)之KrF準分子雷射光(波長248nm)、ArF準分子雷射光(波長193nm)、XeCl準分子雷射(波長308nm)等之氣體雷射光源。 The light source device 13 emits an illumination light beam EL1 which is illuminated by the mask M. The light source device 13 includes a light source section 31 and a light guide member 32. The light source section 31 is a light source that emits light of a predetermined wavelength band and a UV band with a strong photoactivity function suitable for the exposure of the photosensitive functional layer on the substrate P. As the light source section 31, for example, a lamp light source such as a mercury lamp having a glow line (g-line, h-line, i-line, etc.) having an ultraviolet band, a laser diode having a oscillating peak in the ultraviolet band having a wavelength of 450 nm or less, Solid light source such as polar body (LED), or KrF excimer laser (wavelength 248nm), ArF excimer laser (wavelength 193nm), XeCl excimer laser (wavelength 308nm), etc. Gas laser light source.

此處，從光源裝置13射出之照明光束EL1，射入後述偏光分束器PBS。照明光束EL1，為了抑制偏光分束器PBS對照明光束EL1之分離而產生之能量損失，以入射之照明光束EL1在偏光分束器PBS能大致全部反射之光束較佳。偏光分束器PBS可使係S偏光之直線偏光的光束反射、而使係P偏光之直線偏光的光束穿透。因此，光源裝置13之光源部31，以射出射入偏光分束器PBS之照明光束EL1為直線偏光(S偏光)之光束的雷射光較佳。此外，由於雷射光之能量密度高，因此能適當的確保投射於基板P之光束之照度。 Here, the illumination light beam EL1 emitted from the light source device 13 is incident on a polarizing beam splitter PBS described later. For the illumination beam EL1, in order to suppress the energy loss caused by the polarization beam splitter PBS separating the illumination beam EL1, it is preferable that the incident illumination beam EL1 can reflect substantially all of the beam in the polarization beam splitter PBS. The polarizing beam splitter PBS can reflect the linearly polarized light beams of the S polarized light, and allow the linearly polarized light beams of the P polarized light to penetrate. Therefore, it is preferable that the light source unit 31 of the light source device 13 uses a laser beam that emits the illumination beam EL1 that enters the polarizing beam splitter PBS as a linearly polarized beam (S-polarized light). In addition, since the laser light has a high energy density, the illuminance of the light beam projected onto the substrate P can be appropriately ensured.

導光構件32將從光源部31射出之照明光束EL1導至照明光學系IL。導光構件32係以使用光纖、或反射鏡之中繼模組等構成。又，導光構件32，在照明光學系IL設有複數個之情形時，係將來自光源部31之照明光束EL1分離為複數條後，將複數條照明光束EL1導向複數個照明光學系IL。此外，導光構件32，例如在從光源部31射出之光束係雷射光之情形時，作為光纖可使用偏光保持光纖(Polarization Maintaining Fiber)，以偏光保持光纖在維持雷射光之偏光狀態下進行導光。 The light guide member 32 guides the illumination light beam EL1 emitted from the light source section 31 to the illumination optical system IL. The light guide member 32 is configured by a relay module using an optical fiber or a mirror. When a plurality of light guide members 32 are provided in the illumination optical system IL, the light guide member 32 separates the illumination light beams EL1 from the light source unit 31 into a plurality of light guides and guides the plurality of illumination light beams EL1 to the plurality of illumination optical systems IL. In addition, when the light guide member 32 is, for example, a laser beam emitted from the light source section 31, a polarization maintaining fiber (Polarization Maintaining Fiber) can be used as the optical fiber, and the polarization maintaining fiber is guided while maintaining the polarization of the laser light. Light.

此處，如圖3所示，第1實施形態之曝光裝置U3，係想定所謂之多透鏡(multi lens)方式之曝光裝置。又，圖3中，顯示了從-Z側觀察光罩保持圓筒21所保持之光罩M上之照明區域IR的俯視圖(圖3中左側之圖)、與從+Z側觀察基板支承圓筒25所支承之基板P上之投影區域PA的俯視圖(圖3中右側之圖)。圖3之符號Xs，代表光罩保持圓筒21及基板支承圓筒25之移動方向(旋轉方向)。多透鏡方式之曝光裝置U3，係於光罩M上之複數個(第1實施形態中，例如係6個)照明區域IR1~IR6分別照明照明光束EL1，將各照明光束EL1在各照明區域IR1~IR6反射所得之複數個投影光束EL2，投影曝光至基板P上複數個(第1實施形態中，例如係6個)投影區域PA1~PA6。 Here, as shown in FIG. 3, the exposure apparatus U3 of the first embodiment is an exposure apparatus of a so-called multi-lens method. In addition, FIG. 3 shows a plan view of the illumination region IR on the mask M held by the mask holding cylinder 21 viewed from the −Z side (the left view in FIG. 3), and the substrate support circle viewed from the + Z side. A plan view of the projection area PA on the substrate P supported by the barrel 25 (the figure on the right in FIG. 3). Symbol Xs in FIG. 3 represents the moving direction (rotation direction) of the mask holding cylinder 21 and the substrate supporting cylinder 25. The multi-lens type exposure device U3 is provided on the mask M (for example, six in the first embodiment). The illumination areas IR1 to IR6 respectively illuminate the illumination beam EL1, and each illumination beam EL1 is in each illumination area IR1. The plurality of projection light beams EL2 obtained by the reflection of ~ IR6 are projected and exposed to a plurality of projection areas PA1 to PA6 (for example, six in the first embodiment) on the substrate P.

首先，說明以照明光學系IL照明之複數個照明區域IR1~IR6。如 圖3之左圖所示，複數個照明區域IR1~IR6係隔著中心面CL於旋轉方向配置成2行，於旋轉方向上流側之光罩M上配置奇數號之第1照明區域IR1、第3照明區域IR3及第5照明區域IR5，於旋轉方向下流側之光罩M上配置偶數號之第2照明區域IR2、第4照明區域IR4及第6照明區域IR6。 First, a plurality of illumination areas IR1 to IR6 illuminated by the illumination optical system IL will be described. As shown in the left diagram of FIG. 3, the plurality of illumination areas IR1 to IR6 are arranged in two rows in the rotation direction via the center plane CL, and the odd-numbered first illumination areas IR1 and IR1 are arranged on the mask M on the upstream side in the rotation direction. The third illumination region IR3 and the fifth illumination region IR5 are arranged on the mask M on the downstream side in the rotation direction with an even-numbered second illumination region IR2, a fourth illumination region IR4, and a sixth illumination region IR6.

各照明區域IR1~IR6係具有延伸於光罩M之軸方向(Y方向)之平行的短邊及長邊之細長梯形(矩形)之區域。此時，梯形之各照明區域IR1~IR6係成一其短邊位於中心面CL側、其長邊位於外側之區域。奇數號之第1照明區域IR1、第3照明區域IR3及第5照明區域IR5，於軸方向相隔既定間隔配置。此外，偶數號之第2照明區域IR2、第4照明區域IR4及第6照明區域IR6亦於軸方向相隔既定間隔配置。此時，第2照明區域IR2，於軸方向係配置在第1照明區域IR1與第3照明區域IR3之間。同樣的，第3照明區域IR3，於軸方向係配置在第2照明區域IR2與第4照明區域IR4之間。第4照明區域IR4，於軸方向配置在第3照明區域IR3與第5照明區域IR5之間。第5照明區域IR5，於軸方向配置在第4照明區域IR4與第6照明區域IR6之間。各照明區域IR1~IR6，從光罩M之周方向看，係以相鄰梯形照明區域之斜邊部之三角部重疊(overlap)之方式配置。又，第1實施形態中，各照明區域IR1~IR6雖係作成梯形區域，但亦可以是作成長方形區域。 Each of the illumination areas IR1 to IR6 is an area having an elongated trapezoid (rectangular) shape with parallel short sides and long sides extending in the axial direction (Y direction) of the mask M. At this time, each of the illumination areas IR1 to IR6 of the trapezoid is an area whose short side is located on the side of the central plane CL and whose long side is located outside. The odd-numbered first illumination area IR1, the third illumination area IR3, and the fifth illumination area IR5 are arranged at predetermined intervals in the axial direction. In addition, the even-numbered second illumination area IR2, the fourth illumination area IR4, and the sixth illumination area IR6 are also arranged at predetermined intervals in the axial direction. At this time, the second illumination area IR2 is arranged between the first illumination area IR1 and the third illumination area IR3 in the axial direction. Similarly, the third illumination region IR3 is arranged between the second illumination region IR2 and the fourth illumination region IR4 in the axial direction. The fourth illumination area IR4 is arranged between the third illumination area IR3 and the fifth illumination area IR5 in the axial direction. The fifth illumination area IR5 is arranged between the fourth illumination area IR4 and the sixth illumination area IR6 in the axial direction. Each of the illumination areas IR1 to IR6 is arranged so that the triangular portions of the hypotenuses of the adjacent trapezoidal illumination areas overlap each other as viewed from the circumferential direction of the mask M. In the first embodiment, each of the illumination areas IR1 to IR6 is formed as a trapezoidal area, but it may be formed as a rectangular area.

又，光罩M，具有形成有光罩圖案之圖案形成區域A3、與沒有形成光罩圖案之圖案非形成區域A4。圖案非形成區域A4係吸收照明光束EL1之不易反射區域，配置成以框狀圍繞圖案形成區域A3。第1~第6照明區域IR1~IR6係配置成能涵蓋圖案形成區域A3之Y方向全寬。 The photomask M includes a pattern forming area A3 in which a photomask pattern is formed, and a pattern non-forming area A4 in which a photomask pattern is not formed. The pattern non-formation area A4 is a non-reflective area that absorbs the illumination light beam EL1 and is arranged to surround the pattern formation area A3 in a frame shape. The first to sixth illumination areas IR1 to IR6 are arranged so as to cover the full width in the Y direction of the pattern forming area A3.

照明光學系IL係對應複數個照明區域IR1~IR6設有複數個(第1實施形態中，例如係6個)。於複數個照明光學系IL1~IL6，分別射入來自光源裝置13之照明光束EL1。各照明光學系IL1~IL6，將從光源裝置13射入之各照明光束EL1分別導至各照明區域IR1~IR6。也就是說，第1照明光學系IL1將照明光束 EL1導至第1照明區域IR1，同樣的，第2~第6照明光學系IL2~IL6將照明光束EL1導至第2~第6照明區域IR2~IR6。複數個照明光學系IL1~IL6隔(夾)著中心面CL於光罩M之周方向配置成2行。複數個照明光學系IL1~IL6，隔著中心面CL在配置第1、第3、第5照明區域IR1、IR3、IR5之側(圖2之左側)，配置第1照明光學系IL1、第3照明光學系IL3及第5照明光學系IL5。第1照明光學系IL1、第3照明光學系IL3及第5照明光學系IL5於Y方向相隔既定間隔配置。又，複數個照明光學系IL1~IL6，隔著中心面CL在配置第2、第4、第6照明區域IR2、IR4、IR6之側(圖2之右側)，配置第2照明光學系IL2、第4照明光學系IL4及第6照明光學系IL6。第2照明光學系IL2、第4照明光學系IL4及第6照明光學系IL6於Y方向相隔既定間隔配置。此時，第2照明光學系IL2，係於軸方向配置在第1照明光學系IL1與第3照明光學系IL3之間。同樣的，第3照明光學系IL3，於軸方向配置在第2照明光學系IL2與第4照明光學系IL4之間。第4照明光學系IL4，於軸方向配置在第3照明光學系IL3與第5照明光學系IL5之間。第5照明光學系IL5，於軸方向配置在第4照明光學系IL4與第6照明光學系IL6之間。此外，第1照明光學系IL1、第3照明光學系IL3及第5照明光學系IL5與第2照明光學系IL2、第4照明光學系IL4及第6照明光學系IL6，從Y方向看，係以中心面CL為中心對稱配置。 The illumination optical system IL is provided with a plurality of illumination areas IR1 to IR6 (for example, six in the first embodiment). A plurality of illumination optical systems IL1 to IL6 respectively emit an illumination light beam EL1 from the light source device 13. Each illumination optical system IL1 to IL6 guides each illumination beam EL1 incident from the light source device 13 to each illumination region IR1 to IR6. That is, the first illumination optical system IL1 guides the illumination light beam EL1 to the first illumination area IR1. Similarly, the second to sixth illumination optical systems IL2 to IL6 guide the illumination light beam EL1 to the second to sixth illumination area IR2. ~ IR6. The plurality of illumination optical systems IL1 to IL6 are arranged in two rows in the circumferential direction of the mask M with the center plane CL interposed therebetween. A plurality of illumination optical systems IL1 to IL6 are arranged on the side (the left side in FIG. 2) of the first, third, and fifth illumination areas IR1, IR3, and IR5 across the center plane CL (the left side of FIG. 2). The illumination optical system IL3 and the fifth illumination optical system IL5. The first illumination optical system IL1, the third illumination optical system IL3, and the fifth illumination optical system IL5 are arranged at predetermined intervals in the Y direction. In addition, a plurality of illumination optical systems IL1 to IL6 are disposed on the side (right side of FIG. 2) of the second, fourth, and sixth illumination areas IR2, IR4, and IR6 (the right side in FIG. 2) across the center plane CL. The fourth illumination optical system IL4 and the sixth illumination optical system IL6. The second illumination optical system IL2, the fourth illumination optical system IL4, and the sixth illumination optical system IL6 are arranged at predetermined intervals in the Y direction. At this time, the second illumination optical system IL2 is disposed between the first illumination optical system IL1 and the third illumination optical system IL3 in the axial direction. Similarly, the third illumination optical system IL3 is disposed between the second illumination optical system IL2 and the fourth illumination optical system IL4 in the axial direction. The fourth illumination optical system IL4 is arranged between the third illumination optical system IL3 and the fifth illumination optical system IL5 in the axial direction. The fifth illumination optical system IL5 is disposed between the fourth illumination optical system IL4 and the sixth illumination optical system IL6 in the axial direction. In addition, the first illumination optical system IL1, the third illumination optical system IL3, and the fifth illumination optical system IL5, the second illumination optical system IL2, the fourth illumination optical system IL4, and the sixth illumination optical system IL6 are viewed from the Y direction. It is symmetrically arranged with the center plane CL as the center.

其次，參照圖4說明各照明光學系IL1~IL6。又，由於各照明光學系IL1~IL6皆係同樣構成，因此以第1照明光學系IL1(以下，僅稱為照明光學系IL)例進行說明。 Next, each of the illumination optical systems IL1 to IL6 will be described with reference to FIG. 4. Since each of the illumination optical systems IL1 to IL6 has the same configuration, the first illumination optical system IL1 (hereinafter, simply referred to as the illumination optical system IL) will be described as an example.

照明光學系IL，為了以均一照度照明照明區域IR(第1照明區域IR1)，係適用將光源裝置13形成之光源像(實像或虚像)形成於照明光學系IL之光瞳位置(相當於傅立葉轉換面)之柯勒照明法。又，照明光學系IL係使用偏光分束器PBS之直斜照明系。照明光學系IL，從來自光源裝置13之照明光束EL1之射入側起，依序具有照明光學模組ILM、偏光分束器PBS、及1/4波長板 41。 In order to illuminate the illumination area IR (the first illumination area IR1) with uniform illumination, the illumination optical system IL is suitable for forming a light source image (real image or virtual image) formed by the light source device 13 on a pupil position of the illumination optical system IL (equivalent to Fourier Conversion surface) of the Kohler illumination method. The illumination optical system IL is an oblique illumination system using a polarizing beam splitter PBS. The illumination optical system IL includes an illumination optical module ILM, a polarizing beam splitter PBS, and a quarter-wave plate 41 in this order from the incident side of the illumination light beam EL1 from the light source device 13.

如圖4所示，照明光學模組ILM，從照明光束EL1之射入側起，依序包含準直透鏡51、複眼透鏡52、複數個聚光透鏡53、柱面透鏡54、照明視野光闌55、及複數個中繼透鏡56，係設在第1光軸BX1上。準直透鏡51設在光源裝置13之導光構件32之射出側。準直透鏡51之光軸配置在第1光軸BX上。準直透鏡51照射複眼透鏡52之射入側之全面。複眼透鏡52設在準直透鏡51之射出側。複眼透鏡52之射出側之面之中心配置在第1光軸BX1上。以多數隻棒狀透鏡等構成隻複眼透鏡52，將來自準直透鏡51之照明光束EL1以各個棒狀透鏡加以細分化後之多數個點光源像(集光點)生成於複眼透鏡52之射出側之面，而成為被棒狀透鏡細分化之照明光束EL1射入聚光透鏡53。此時，生成點光源像之複眼透鏡52之射出側之面，藉由從複眼透鏡52透過照明視野光闌55至後述投影光學系PL之第1凹面鏡72的各種透鏡，配置成與第1凹面鏡72之反射面所在之投影光學系PL(PLM)之光瞳面光學上共軛。聚光透鏡53設在複眼透鏡52之射出側。聚光透鏡53之光軸配置在第1光軸BX1上。聚光透鏡53將來自複眼透鏡52之照明光束EL1聚光於柱面透鏡54。柱面透鏡54係射入側為平面、射出側為凸面之平凸柱面透鏡。柱面透鏡54設在聚光透鏡53之射出測。柱面透鏡54之光軸配置在第1光軸BX1上。柱面透鏡54，使照明光束EL1發散於XZ面內與第1光軸BX1正交之方向。照明視野光闌55與柱面透鏡54之射出測相鄰設置。照明視野光闌55之開口部形成為與照明區域IR相同形狀之梯形或長方形，照明視野光闌55之開口部中心配置在第1光軸BX1上。此時，照明視野光闌55，藉由從照明視野光闌55至光罩M之各種透鏡而被配置在與光罩M上之照明區域IR光學上共軛之面。中繼透鏡56設在照明視野光闌55之射出測。中繼透鏡56之光軸配置在第1光軸BX1上。中繼透鏡56使來自照明視野光闌55之照明光束EL1射入偏光分束器PBS。 As shown in FIG. 4, the illumination optical module ILM includes a collimating lens 51, a fly-eye lens 52, a plurality of condenser lenses 53, a cylindrical lens 54, and an illumination field diaphragm in order from the incident side of the illumination beam EL1. 55 and a plurality of relay lenses 56 are disposed on the first optical axis BX1. A collimator lens 51 is provided on the emission side of the light guide member 32 of the light source device 13. The optical axis of the collimator lens 51 is arranged on the first optical axis BX. The collimator lens 51 irradiates the entire surface of the entrance side of the fly-eye lens 52. The fly-eye lens 52 is provided on the exit side of the collimator lens 51. The center of the surface on the exit side of the fly-eye lens 52 is arranged on the first optical axis BX1. The fly-eye lens 52 is constituted by a plurality of rod lenses, etc., and a plurality of point light source images (collecting points) after the illumination beam EL1 from the collimator lens 51 is subdivided by each rod lens are generated by the fly-eye lens 52 and emitted The side surface, and the illumination light beam EL1 which is subdivided by the rod lens enters the condenser lens 53. At this time, the surface of the exit side of the fly-eye lens 52 that generates the point light source image passes through the fly-eye lens 52 through the illumination field diaphragm 55 to various lenses of the first concave mirror 72 of the projection optical system PL described later, and is arranged to be the same as the first concave mirror The pupil plane of the projection optical system PL (PLM) where the reflecting surface of 72 is optically conjugated. The condenser lens 53 is provided on the exit side of the fly-eye lens 52. The optical axis of the condenser lens 53 is arranged on the first optical axis BX1. The condenser lens 53 condenses the illumination light beam EL1 from the fly-eye lens 52 onto the cylindrical lens 54. The cylindrical lens 54 is a plano-convex cylindrical lens having a flat entrance side and a convex exit side. The cylindrical lens 54 is provided at the emission lens of the condenser lens 53. The optical axis of the cylindrical lens 54 is arranged on the first optical axis BX1. The cylindrical lens 54 diffuses the illumination light beam EL1 in a direction orthogonal to the first optical axis BX1 in the XZ plane. The illumination field diaphragm 55 is disposed adjacent to the emission measurement of the cylindrical lens 54. The opening of the illumination field diaphragm 55 is formed in a trapezoidal shape or a rectangular shape having the same shape as the illumination area IR, and the center of the opening portion of the illumination field diaphragm 55 is arranged on the first optical axis BX1. At this time, the illumination field diaphragm 55 is arranged on a surface optically conjugate to the illumination region IR on the mask M through various lenses from the illumination field diaphragm 55 to the mask M. The relay lens 56 is provided at the emission measurement of the illumination field diaphragm 55. The optical axis of the relay lens 56 is arranged on the first optical axis BX1. The relay lens 56 causes the illumination beam EL1 from the illumination field diaphragm 55 to enter the polarizing beam splitter PBS.

當照明光束EL1射入照明光學模組ILM時，照明光束EL1即因準 直透鏡51而成為照射於複眼透鏡52射入側之全面的光束。射入複眼透鏡52之照明光束EL1成為從多數點光源像之各個而來之照明光束EL1，透過聚光透鏡53射入柱面透鏡54。射入柱面透鏡54之照明光束EL1，於XZ面內發散於與第1光軸BX1正交之方向。藉由柱面透鏡54發散之照明光束EL1射入照明視野光闌55。射入照明視野光闌55之照明光束EL1，因通過照明視野光闌55之開口部而成為與照明區域IR具有相同形狀之強度分布的光束。通過照明視野光闌55之照明光束EL1，透過中繼透鏡56射入偏光分束器PBS。 When the illumination light beam EL1 enters the illumination optical module ILM, the illumination light beam EL1 becomes a comprehensive light beam irradiated on the incidence side of the fly-eye lens 52 due to the collimator lens 51. The illumination light beam EL1 incident on the fly-eye lens 52 becomes an illumination light beam EL1 from each of a plurality of point light source images, and enters the cylindrical lens 54 through the condenser lens 53. The illuminating light beam EL1 incident on the cylindrical lens 54 is diverged in the XZ plane in a direction orthogonal to the first optical axis BX1. The illumination beam EL1 emitted by the cylindrical lens 54 is incident on the illumination field diaphragm 55. The illumination light beam EL1 incident on the illumination field diaphragm 55 passes through the opening of the illumination field diaphragm 55 and becomes a light beam having the same intensity distribution as that of the illumination region IR. The illumination light beam EL1 passing through the illumination field diaphragm 55 passes through the relay lens 56 and enters the polarizing beam splitter PBS.

偏光分束器PBS，於X軸方向配置在照明光學模組ILM與中心面CL之間。偏光分束器PBS與1/4波長板41協同動作，將來自照明光學模組ILM之照明光束EL1加以反射，另一方面，使被光罩M反射之投影光束EL2穿透。換言之，來自照明光學模組ILM之照明光束EL1作為反射光束射入偏光分束器PBS，來自光罩M之投影光束(反射光)EL2則作為穿透光束射入偏光分束器PBS。也就是說，射入偏光分束器PBS之照明光束EL1係成為S偏光之直線偏光的反射光束，而射入偏光分束器PBS之投影光束EL2則係成為P偏光之直線偏光的穿透光束。 The polarizing beam splitter PBS is disposed between the illumination optical module ILM and the center plane CL in the X-axis direction. The polarizing beam splitter PBS cooperates with the 1/4 wavelength plate 41 to reflect the illumination light beam EL1 from the illumination optical module ILM, and on the other hand, transmits the projection light beam EL2 reflected by the mask M. In other words, the illumination beam EL1 from the illumination optical module ILM enters the polarizing beam splitter PBS as a reflected beam, and the projection beam (reflected light) EL2 from the mask M enters the polarizing beam splitter PBS as a penetrating beam. In other words, the illumination beam EL1 entering the polarizing beam splitter PBS becomes a linearly polarized reflected beam of S polarization, and the projection beam EL2 entering the polarizing beam splitter PBS becomes a linearly polarized transmitted beam of P polarization. .

如圖4所示，偏光分束器PBS具有第1稜鏡91、第2稜鏡92、及設在第1稜鏡91及第2稜鏡92之間之偏光分離面93。第1稜鏡91及第2稜鏡92以石英玻璃構成，於XZ面內為三角形之三角稜鏡。偏光分束器PBS，由三角形之第1稜鏡91與第2稜鏡92夾著偏光分離面93接合，而在XZ面內成為四角形。 As shown in FIG. 4, the polarizing beam splitter PBS includes first 稜鏡 91, second 稜鏡 92, and a polarization separation surface 93 provided between the first 稜鏡 91 and the second 稜鏡 92. The first 稜鏡 91 and the second 稜鏡 92 are made of quartz glass, and are triangular triangles in the XZ plane. The polarizing beam splitter PBS is joined by the first 稜鏡 91 and the second 稜鏡 92 of the triangle with the polarization separating surface 93 interposed therebetween, and becomes a quadrangle in the XZ plane.

第1稜鏡91係照明光束EL1及投影光束EL2射入側之稜鏡。第2稜鏡92則係穿透偏光分離面93之投影光束EL2射出側之稜鏡。於偏光分離面93，從第1稜鏡91朝向第2稜鏡92之照明光束EL1及投影光束EL2射入。偏光分離面93反射S偏光(直線偏光)之照明光束EL1、使P偏光(直線偏光)之投影光束EL2穿透。 The first 稜鏡 91 series is the entrance side of the illumination light beam EL1 and the projection light beam EL2. The second 稜鏡 92 is the 稜鏡 of the exit side of the projection light beam EL2 that penetrates the polarization separation surface 93. On the polarization separation surface 93, an illumination light beam EL1 and a projection light beam EL2 from the first 稜鏡 91 to the second 稜鏡 92 are incident. The polarized light separation surface 93 reflects the S-polarized (linearly polarized) illumination light beam EL1 and transmits the P-polarized (linearly polarized) projection light beam EL2.

1/4波長板41配置在偏光分束器PBS與光罩M之間。1/4波長板41將被偏光分束器PBS反射之照明光束EL1從直線偏光(S偏光)轉換為圓偏光。圓偏光之照明光束EL1照射於光罩M。1/4波長板41將被光罩M反射之圓偏光之投影光束EL2轉換為直線偏光(P偏光)。 The 1/4 wavelength plate 41 is disposed between the polarizing beam splitter PBS and the mask M. The quarter-wave plate 41 converts the illumination light beam EL1 reflected by the polarizing beam splitter PBS from linearly polarized light (S-polarized light) to circularly polarized light. The circularly polarized illumination light beam EL1 irradiates the mask M. The 1/4 wavelength plate 41 converts the circularly polarized projection light beam EL2 reflected by the mask M into linearly polarized light (P-polarized light).

其次，說明以投影光學系PL投影曝光之複數個投影區域PA1~PA6。如圖3之右圖所示，基板P上之複數個投影區域PA1~PA6係與光罩M上之複數個照明區域IR1~IR6對應配置。也就是說，基板P上之複數個投影區域PA1~PA6係隔著中心面CL於搬送方向配置2行，於搬送方向上流側之基板P上配置奇數號之第1投影區域PA1、第3投影區域PA3及第5投影區域PA5，於搬送方向下流側之基板P上配置偶數號之第2投影區域PA2、第4投影區域PA4及第6投影區域PA6。 Next, a plurality of projection areas PA1 to PA6 exposed by projection optical system PL projection will be described. As shown in the right diagram of FIG. 3, the plurality of projection areas PA1 to PA6 on the substrate P are arranged corresponding to the plurality of illumination areas IR1 to IR6 on the mask M. That is, the plurality of projection areas PA1 to PA6 on the substrate P are arranged in two rows in the conveying direction across the center plane CL, and the odd-numbered first projection areas PA1 and third projections are arranged on the substrate P on the upstream side in the conveying direction. In the area PA3 and the fifth projection area PA5, an even-numbered second projection area PA2, a fourth projection area PA4, and a sixth projection area PA6 are arranged on the substrate P on the downstream side in the conveying direction.

各投影區域PA1~PA6係具有延伸於基板P之寬度方向(Y方向)之短邊及長邊的細長梯形區域。此處，梯形之各投影區域PA1~PA6係其短邊位於中心面CL側、其長邊位於外側之區域。奇數號之第1投影區域PA1、第3投影區域PA3及第5投影區域PA5於寬度方向相隔既定間隔配置。又，偶數號之第2投影區域PA2、第4投影區域PA4及第6投影區域PA6亦於寬度方向相隔既定間隔配置。此時，第2投影區域PA2，於軸方向係配置在第1投影區域PA1與第3投影區域PA3之間。同樣的，第3投影區域PA3，於軸方向配置在第2投影區域PA2與第4投影區域PA4之間。第4投影區域PA4配置在第3投影區域PA3與第5投影區域PA5之間。第5投影區域PA5配置在第4投影區域PA4與第6投影區域PA6之間。各投影區域PA1~PA6，與各照明區域IR1~IR6同樣的，從基板P之搬送方向看，係以相鄰梯形投影區域PA之斜邊部之三角部重疊(overlap)之方式配置。此時，投影區域PA，係在相鄰投影區域PA之重複區域之曝光量與在不重複區域之曝光量成為實質相同的形狀。而第1~第6投影區域PA1~PA6係被配置成能涵蓋曝光至基 板P上之曝光區域A7之Y方向全寬。 Each of the projection areas PA1 to PA6 is an elongated trapezoidal area having short sides and long sides extending in the width direction (Y direction) of the substrate P. Here, each of the projection areas PA1 to PA6 of the trapezoid is an area whose short side is located on the center plane CL side and whose long side is located outside. The odd-numbered first projection area PA1, the third projection area PA3, and the fifth projection area PA5 are arranged at predetermined intervals in the width direction. In addition, the even-numbered second projection area PA2, the fourth projection area PA4, and the sixth projection area PA6 are also arranged at predetermined intervals in the width direction. At this time, the second projection area PA2 is arranged between the first projection area PA1 and the third projection area PA3 in the axial direction. Similarly, the third projection area PA3 is arranged between the second projection area PA2 and the fourth projection area PA4 in the axial direction. The fourth projection area PA4 is arranged between the third projection area PA3 and the fifth projection area PA5. The fifth projection area PA5 is disposed between the fourth projection area PA4 and the sixth projection area PA6. Each of the projection areas PA1 to PA6 is the same as each of the illumination areas IR1 to IR6. When viewed from the conveying direction of the substrate P, the triangular portions of the hypotenuse of the adjacent trapezoidal projection area PA are arranged to overlap. At this time, the projection area PA has substantially the same shape as the exposure amount in the overlapping area of the adjacent projection area PA and the exposure amount in the non-repeating area. The first to sixth projection areas PA1 to PA6 are arranged so as to cover the full width in the Y direction of the exposure area A7 exposed on the substrate P.

此處，圖2中，於XZ面內觀察時，從光罩M上之照明區域IR1(及IR3、IR5)中心點至照明區域IR2(及IR4、IR6)中心點之周長，係設定成從順著支承面P2之基板P上之投影區域PA1(及PA3、PA5)之中心點至第2投影區域PA2(及PA4、PA6)中心點之周長實質相等。 Here, in Figure 2, when viewed in the XZ plane, the perimeter from the center point of the illumination area IR1 (and IR3, IR5) on the mask M to the center point of the illumination area IR2 (and IR4, IR6) is set to The perimeter from the center point of the projection area PA1 (and PA3, PA5) on the substrate P running along the support surface P2 to the center point of the second projection area PA2 (and PA4, PA6) is substantially the same.

以上之第1實施形態中之投影光學系PL，係對應6個投影區域PA1~PA6設有6個。於投影光學系PL1~PL6，在位於對應之照明區域IR1~IR6各個之光罩圖案反射之複數個投影光束EL2分別射入。各投影光學系PL1~PL6將被光罩M反射之各投影光束EL2分別導至各投影區域PA1~PA6。也就是說，第1投影光學系PL1將來自第1照明區域IR1之投影光束EL2導至第1投影區域PA1，同樣的，第2~第6投影光學系PL2~PL6將來自第2~第6照明區域IR2~IR6之各投影光束EL2導至第2~第6投影區域PA2~PA6。 The projection optical system PL in the first embodiment described above is provided with six projection areas PA1 to PA6. In the projection optical systems PL1 to PL6, a plurality of projection light beams EL2 reflected by each of the mask patterns located in the corresponding illumination areas IR1 to IR6 are incident respectively. Each projection optical system PL1 to PL6 guides each projection light beam EL2 reflected by the mask M to each projection area PA1 to PA6. That is, the first projection optical system PL1 guides the projection light beam EL2 from the first illumination area IR1 to the first projection area PA1. Similarly, the second to sixth projection optical systems PL2 to PL6 will come from the second to sixth. Each of the projection light beams EL2 in the illumination areas IR2 to IR6 is guided to the second to sixth projection areas PA2 to PA6.

複數個投影光學系PL1~PL6係夾著中心面CL於光罩M之周方向配置2行。複數個投影光學系PL1~PL6夾著中心面CL，於配置第1、第3、第5投影區域PA1、PA3、PA5之側(圖2之左側)配置第1投影光學系PL1、第3投影光學系PL3及第5投影光學系PL5。第1投影光學系PL1、第3投影光學系PL3及第5投影光學系PL5於Y方向相隔既定間隔配置。又，複數個照明光學系IL1~IL6夾著中心面CL，於配置第2、第4、第6投影區域PA2、PA4、PA6之側(圖2之右側)配置第2投影光學系PL2、第4投影光學系PL4及第6投影光學系PL6。第2投影光學系PL2、第4投影光學系PL4及第6投影光學系PL6於Y方向相隔既定間隔配置。此處，第2投影光學系PL2，於軸方向配置在第1投影光學系PL1與第3投影光學系PL3之間。同樣的，第3投影光學系PL3，於軸方向配置在第2投影光學系PL2與第4投影光學系PL4之間。第4投影光學系PL4配置在第3投影光學系PL3與第5投影光學系PL5之間。第5投影光學系PL5配置在第4投影光學系PL4與第6投影光學 系PL6之間。又，第1投影光學系PL1、第3投影光學系PL3及第5投影光學系PL5與第2投影光學系PL2、第4投影光學系PL4及第6投影光學系PL6，從Y方向看，係以中心面CL為中心對稱配置。 The plurality of projection optical systems PL1 to PL6 are arranged in two rows in the circumferential direction of the mask M with the center plane CL interposed therebetween. The plurality of projection optical systems PL1 to PL6 sandwich the center plane CL, and the first projection optical system PL1 and the third projection are arranged on the side where the first, third, and fifth projection areas PA1, PA3, and PA5 are arranged (the left side of FIG. 2). Optical system PL3 and fifth projection optical system PL5. The first projection optical system PL1, the third projection optical system PL3, and the fifth projection optical system PL5 are arranged at predetermined intervals in the Y direction. In addition, a plurality of illumination optical systems IL1 to IL6 sandwich the center plane CL, and the second projection optical system PL2, the second projection optical system PL2, and 4 projection optical system PL4 and 6th projection optical system PL6. The second projection optical system PL2, the fourth projection optical system PL4, and the sixth projection optical system PL6 are arranged at predetermined intervals in the Y direction. Here, the second projection optical system PL2 is disposed between the first projection optical system PL1 and the third projection optical system PL3 in the axial direction. Similarly, the third projection optical system PL3 is disposed between the second projection optical system PL2 and the fourth projection optical system PL4 in the axial direction. The fourth projection optical system PL4 is disposed between the third projection optical system PL3 and the fifth projection optical system PL5. The fifth projection optical system PL5 is disposed between the fourth projection optical system PL4 and the sixth projection optical system PL6. The first projection optical system PL1, the third projection optical system PL3, and the fifth projection optical system PL5, the second projection optical system PL2, the fourth projection optical system PL4, and the sixth projection optical system PL6 are viewed from the Y direction. It is symmetrically arranged with the center plane CL as the center.

進一步的，參照圖4說明各投影光學系PL1~PL6。又，由於各投影光學系PL1~PL6係同樣構成，因此以第1投影光學系PL1(以下，僅稱為投影光學系PL)為例進行說明。 Further, each of the projection optical systems PL1 to PL6 will be described with reference to FIG. 4. Since each of the projection optical systems PL1 to PL6 has the same configuration, the first projection optical system PL1 (hereinafter, simply referred to as the projection optical system PL) will be described as an example.

於投影光學系PL，射入從光罩M之光罩面P1之照明區域IR(第1照明區域IR1)反射之投影光束EL2，於中間像面P7形成出現於光罩面P1之圖案之中間像。又，將從光罩面P1至中間像面P7之投影光束EL2，設為第1投影光束EL2a。形成於中間像面P7之中間像，係相對照明區域IR之光罩圖案之像成180°點對稱之倒立像。 In the projection optical system PL, the projection light beam EL2 reflected from the illumination area IR (the first illumination area IR1) of the mask surface P1 of the mask M is incident on the middle image plane P7 to form the middle of the pattern appearing on the mask surface P1. image. The projection light beam EL2 from the mask surface P1 to the intermediate image plane P7 is set as the first projection light beam EL2a. The intermediate image formed on the intermediate image plane P7 is an inverted image that is 180 ° point symmetrical with respect to the image of the mask pattern in the illumination area IR.

投影光學系PL，使從中間像面P7射出之投影光束EL2於基板P之投影像面之投影區域PA再成像以形成投影像。又，將從中間像面P7至基板P之投影像面之投影光束EL2，設為第2投影光束EL2b。投影像係相對中間像面P7之中間像，成180°點對稱之倒立像，換言之，相對照明區域IR之光罩圖案之像，成為相同像之正立像。此投影光學系PL，從來自光罩M之投影光束EL2之射入側起，依序具有上述1/4波長板41、上述偏光分束器PBS、及投影光學模組PLM。 The projection optical system PL re-images the projection light beam EL2 emitted from the intermediate image plane P7 on the projection area PA of the projection image plane of the substrate P to form a projection image. In addition, the projection light beam EL2 from the intermediate image plane P7 to the projection image plane of the substrate P is referred to as a second projection light beam EL2b. The projected image is an inverted image that is 180 ° point symmetrical with respect to the intermediate image of the intermediate image plane P7. In other words, the image of the mask pattern relative to the illuminated area IR becomes an upright image of the same image. This projection optical system PL has the above-mentioned 1/4 wavelength plate 41, the above-mentioned polarizing beam splitter PBS, and a projection optical module PLM in this order from the incident side of the projection light beam EL2 from the mask M.

1/4波長板41及偏光分束器PBS係與照明光學系IL兼用。換言之，照明光學系IL及投影光學系PL共有1/4波長板41及偏光分束器PBS。 The 1/4 wavelength plate 41 and the polarizing beam splitter PBS are used in combination with the illumination optics IL. In other words, the illumination optical system IL and the projection optical system PL share a quarter-wavelength plate 41 and a polarizing beam splitter PBS.

於照明區域IR反射之第1投影光束EL2a，成為朝向光罩保持圓筒21之第1軸AX1之徑方向外側之遠心的光束，射入投影光學系PL。於照明區域IR反射之圓偏光之第1投影光束EL2a，當射入投影光學系PL、被1/4波長板41從圓偏光轉換為直線偏光(P偏光)後，射入偏光分束器PBS。射入偏光分束器PBS之第1投影光束EL2a在穿透偏光分束器PBS後，射入投影光學模組PLM。 The first projection light beam EL2a reflected in the illumination area IR becomes a telecentric light beam that is directed outward in the radial direction of the first axis AX1 of the mask holding cylinder 21, and enters the projection optical system PL. The first projected light beam EL2a of the circularly polarized light reflected by the IR in the illumination area is incident on the projection optical system PL and converted from circularly polarized light to linearly polarized light (P polarized light) by the quarter-wave plate 41, and then enters the polarizing beam splitter PBS. . The first projection light beam EL2a that has entered the polarizing beam splitter PBS passes through the polarizing beam splitter PBS and then enters the projection optical module PLM.

如圖4所示，投影光學模組PLM，具備於中間像面P7成像出中間像並於基板P上成像出投影像的部分光學系61、使第1投影光束EL2a及第2投影光束EL2b射入部分光學系61的反射光學系(導光光學系)62、以及配置在形成中間像之中間像面P7的投影視野光闌63。此外，投影光學模組PLM，具備聚焦修正光學構件64、像偏移用光學構件65、倍率修正用光學構件66、旋轉(rotation)修正機構67、及偏光調整機構68。 As shown in FIG. 4, the projection optical module PLM includes a partial optical system 61 that forms an intermediate image on the intermediate image plane P7 and forms a projection image on the substrate P, and emits a first projection beam EL2a and a second projection beam EL2b. A reflection optical system (light-guiding optical system) 62 of the input optical system 61 and a projection field diaphragm 63 disposed on an intermediate image plane P7 forming an intermediate image. The projection optical module PLM includes a focus correction optical member 64, an image shift optical member 65, a magnification correction optical member 66, a rotation correction mechanism 67, and a polarization adjustment mechanism 68.

部分光學系61及反射光學系62係例如將戴森(Dyson)系加以變形之遠心的反射折射光學系。部分光學系61，其光軸(以下，稱第2光軸BX2)相對中心面CL實質正交。部分光學系61具備第1透鏡群71與第1凹面鏡(反射光學構件)72。第1透鏡群71具有包含設在中心面CL側之折射透鏡(透鏡構件)71a的複數個透鏡構件，複數個透鏡構件之光軸配置在第2光軸BX2上。第1凹面鏡72，係配置在以複眼透鏡52生成之多數個點光源從複眼透鏡52經由照明視野光闌55至第1凹面鏡72之各種透鏡所成像之光瞳面。 The partial optical system 61 and the reflective optical system 62 are, for example, telecentric refracting and refracting optical systems in which a Dyson system is deformed. In the optical system 61, the optical axis (hereinafter, referred to as the second optical axis BX2) is substantially orthogonal to the center plane CL. The partial optical system 61 includes a first lens group 71 and a first concave mirror (reflective optical member) 72. The first lens group 71 includes a plurality of lens members including a refractive lens (lens member) 71a provided on the center plane CL side, and the optical axes of the plurality of lens members are arranged on the second optical axis BX2. The first concave mirror 72 is a pupil surface imaged by a plurality of point light sources generated by the fly-eye lens 52 from the fly-eye lens 52 through various lenses of the illumination field diaphragm 55 to the first concave mirror 72.

反射光學系62具備第1偏向構件(第1光學構件及第1反射構件)76、第2偏向構件(第2光學構件及第3反射部)77、第3偏向構件(第3光學構件及第4反射部)78、及第4偏向構件(第4光學構件及第2反射構件)79。第1偏向構件76係具有第1反射面P3之反射鏡(mirror)。第1反射面P3使來自偏光分束器PBS之第1投影光束EL2a反射，使反射之第1投影光束EL2a射入第1透鏡群71之折射透鏡71a。第2偏向構件77係具有第2反射面P4之反射鏡。第2反射面P4使從折射透鏡71a射出之第1投影光束EL2a反射，使反射之第1投影光束EL2a射入設在中間像面P7之投影視野光闌63。第3偏向構件78係具有第3反射面P5之反射鏡。第3反射面P5使來自投影視野光闌63之第2投影光束EL2b反射，使反射之第2投影光束EL2b射入第1透鏡群71之折射透鏡71a。第4偏向構件79係具有第4反射面P6之反射鏡。第4反射面P6使從折射透鏡71a射出之第2投影光束EL2b反射，使反射之 第2投影光束EL2b射入基板P上。如以上所述，第2偏向構件77與第3偏向構件78，具有將來自部分光學系61之第1投影光束EL2a，再次折返而反射向部分光學系61之折返反射鏡的功能。第1~第4偏向構件76、77、78、79之各反射面P3~P6，皆係與圖4中Y軸平行之平面，於XZ面內以既定角度傾斜配置。 The reflection optical system 62 includes a first deflection member (a first optical member and a first reflection member) 76, a second deflection member (a second optical member and a third reflection portion) 77, and a third deflection member (a third optical member and a first reflection member). 4 reflecting portions) 78, and a fourth deflection member (a fourth optical member and a second reflecting member) 79. The first deflecting member 76 is a mirror having a first reflecting surface P3. The first reflection surface P3 reflects the first projection light beam EL2a from the polarizing beam splitter PBS, and causes the reflected first projection light beam EL2a to enter the refractive lens 71a of the first lens group 71. The second deflecting member 77 is a mirror having a second reflecting surface P4. The second reflection surface P4 reflects the first projection light beam EL2a emitted from the refractive lens 71a, and causes the reflected first projection light beam EL2a to enter the projection field diaphragm 63 provided on the intermediate image plane P7. The third deflection member 78 is a mirror having a third reflection surface P5. The third reflecting surface P5 reflects the second projection light beam EL2b from the projection field diaphragm 63, and causes the reflected second projection light beam EL2b to enter the refractive lens 71a of the first lens group 71. The fourth deflection member 79 is a mirror having a fourth reflection surface P6. The fourth reflecting surface P6 reflects the second projection light beam EL2b emitted from the refractive lens 71a, and makes the reflected second projection light beam EL2b incident on the substrate P. As described above, the second deflecting member 77 and the third deflecting member 78 have a function of re-reflecting the first projection light beam EL2a from the partial optical system 61 and reflecting the reflected light toward the fold-back mirror of the partial optical system 61. Each of the reflection surfaces P3 to P6 of the first to fourth deflection members 76, 77, 78, and 79 are all planes parallel to the Y axis in FIG. 4 and are arranged obliquely at a predetermined angle in the XZ plane.

投影視野光闌63具有規定投影區域PA之形狀的開口。亦即，投影視野光闌63之開口形狀規定投影區域PA之形狀。 The projection field diaphragm 63 has an opening that defines the shape of the projection area PA. That is, the shape of the opening of the projection field diaphragm 63 defines the shape of the projection area PA.

來自偏光分束器PBS之第1投影光束EL2a，通過像偏移用光學構件65後於第1偏向構件76之第1反射面P3反射。於第1反射面P3反射之第1投影光束EL2a，射入第1透鏡群71並通過包含折射透鏡71a之複數個透鏡構件後，射入第1凹面鏡72。此時，第1投影光束EL2a，於第1透鏡群71從折射透鏡71a之第2光軸BX2通過+Z方向上方側之視野區域。射入第1凹面鏡72之第1投影光束EL2a於第1凹面鏡72反射。於第1凹面鏡72反射之第1投影光束EL2a，射入第1透鏡群71並通過包含折射透鏡71a之複數個透鏡構件後，從第1透鏡群71射出。此時，第1投影光束EL2a，於第1透鏡群71從折射透鏡71a之第2光軸BX2通過-Z方向下方側之視野區域。從第1透鏡群71射出之第1投影光束EL2a，於第2偏向構件77之第2反射面P4反射。於第2反射面P4反射之第1投影光束EL2a射入投影視野光闌63。射入投影視野光闌63之第1投影光束EL2a，形成在照明區域IR之光罩圖案之倒立像的中間像。 The first projection light beam EL2a from the polarizing beam splitter PBS passes through the image shifting optical member 65 and is reflected by the first reflecting surface P3 of the first deflection member 76. The first projection light beam EL2a reflected on the first reflection surface P3 enters the first lens group 71 and passes through a plurality of lens members including the refractive lens 71a, and then enters the first concave mirror 72. At this time, the first projection light beam EL2a passes through the field of view on the upper side of the + Z direction from the second optical axis BX2 of the refractive lens 71a in the first lens group 71. The first projection light beam EL2 a incident on the first concave mirror 72 is reflected by the first concave mirror 72. The first projection light beam EL2a reflected by the first concave mirror 72 enters the first lens group 71, passes through a plurality of lens members including the refractive lens 71a, and exits from the first lens group 71. At this time, the first projection light beam EL2a passes through the field of view on the lower side of the -Z direction from the second optical axis BX2 of the refractive lens 71a in the first lens group 71. The first projection light beam EL2a emitted from the first lens group 71 is reflected on the second reflection surface P4 of the second deflection member 77. The first projection light beam EL2a reflected on the second reflection surface P4 is incident on the projection field diaphragm 63. The first projection light beam EL2a incident on the projection field diaphragm 63 forms an intermediate image of an inverted image of the mask pattern in the illumination area IR.

來自投影視野光闌63之第2投影光束EL2b，於第3偏向構件78之第3反射面P5反射。於第3反射面P5反射之第2投影光束EL2b再次射入第1透鏡群71，通過包含折射透鏡71a之複數個透鏡構件後，射入第1凹面鏡72。此時，第2投影光束EL2b，於第1透鏡群71從折射透鏡71a之第2光軸BX2通過+Z方向上方側、且第1投影光束EL2a之射入側與射出測之間之視野區域。射入第1凹面鏡72之第2投影光束EL2b於第1凹面鏡72反射。於第1凹面鏡72反射之第2投影光束 EL2b，射入第1透鏡群71並通過包含折射透鏡71a之複數個透鏡構件後，從第1透鏡群71射出。此時，第2投影光束EL2b，於第1透鏡群71從折射透鏡71a之第2光軸BX2通過-Z方向下方側、且第1投影光束EL2a之射入側與射出測之間之視野區域。從第1透鏡群71射出之第2投影光束EL2b，於第4偏向構件79之第4反射面P6反射。於第4反射面P6反射之第2投影光束EL2b，通過聚焦修正光學構件64及倍率修正用光學構件66，投射於基板P上之投影區域PA。投射於投影區域PA之第2投影光束EL2b，形成在照明區域IR之光罩圖案之正立像的投影像。此時，在照明區域IR之光罩圖案之像係以等倍(×1)投影於投影區域PA。 The second projection light beam EL2b from the projection field diaphragm 63 is reflected on the third reflection surface P5 of the third deflection member 78. The second projection light beam EL2b reflected on the third reflection surface P5 enters the first lens group 71 again, passes through a plurality of lens members including the refractive lens 71a, and enters the first concave mirror 72. At this time, the second projection light beam EL2b passes from the second optical axis BX2 of the refractive lens 71a to the upper side of the + Z direction in the first lens group 71, and the field of view between the incident side of the first projection light beam EL2a and the emission measurement. . The second projection light beam EL2 b incident on the first concave mirror 72 is reflected by the first concave mirror 72. The second projection light beam EL2b reflected by the first concave mirror 72 enters the first lens group 71 and passes through a plurality of lens members including the refractive lens 71a, and then exits from the first lens group 71. At this time, the second projection light beam EL2b passes through the first lens group 71 from the second optical axis BX2 of the refractive lens 71a to the lower side of the -Z direction, and the field of view between the incident side of the first projection light beam EL2a and the emission measurement. . The second projection light beam EL2b emitted from the first lens group 71 is reflected on the fourth reflection surface P6 of the fourth deflection member 79. The second projection light beam EL2b reflected on the fourth reflection surface P6 is projected onto the projection area PA on the substrate P by the focus correction optical member 64 and the magnification correction optical member 66. The second projection light beam EL2b projected on the projection area PA forms a projection image of an orthographic image of a mask pattern in the illumination area IR. At this time, the image of the mask pattern in the illumination area IR is projected on the projection area PA at equal magnification (× 1).

此處，針對由包含折射透鏡71a之第1透鏡群71與第1凹面鏡72所構成之投影光學模組PLM之視野區域，參照圖5簡單的加以說明。圖5係顯示將以投影光學模組PLM形成之圓形的全成像視野(基準面)CIF展開於圖5中之YZ面的狀態，光罩M上之矩形照明區域IR、成像在中間像面P7之投影視野光闌63上之中間像Img1、以中間像面P7之投影視野光闌63整形成梯形之中間像Img2、及基板P上之梯形投影區域PA之各個，被設定為於Y軸方向細長、於Z軸方向分離排列。 Here, the field of view of the projection optical module PLM including the first lens group 71 and the first concave mirror 72 including the refractive lens 71 a will be briefly described with reference to FIG. 5. FIG. 5 shows a state where the circular full imaging field of view (reference plane) CIF formed by the projection optical module PLM is unfolded on the YZ plane in FIG. 5, and the rectangular illumination area IR on the mask M is imaged on the intermediate image plane. The intermediate image Img on the projection field diaphragm 63 of P7, and the trapezoidal intermediate image Img2 formed by the projection field diaphragm 63 of the intermediate image plane P7, and each of the trapezoidal projection areas PA on the substrate P are set to the Y axis It is slender and arranged separately in the Z-axis direction.

首先，光罩M上之矩形照明區域IR之中心，係設定在從全成像視野CIF之中心點(光軸BX2通過)往+Z方向、偏心像高值k1之位置(第1位置)。因此，以通過投影光學模組PLM內之最初的成像光路(第1投影光束EL2a)形成在投影視野光闌63(中間像面P7)上之中間像Img1，於YZ面內觀察，係以照明區域IR在上下(Z方向)與左右(Y方向)反轉之狀態，成像在從全成像視野CIF之中心點往-Z方向偏心之像高值k1的位置(第2位置)。 First, the center of the rectangular illumination area IR on the mask M is set at a position (first position) from the center point of the full imaging field CIF (the optical axis BX2 passes) to the + Z direction and the height of the eccentric image k1. Therefore, the intermediate image Img1 formed on the projection field diaphragm 63 (intermediate image plane P7) through the first imaging light path (the first projection beam EL2a) in the projection optical module PLM is observed in the YZ plane and illuminated. The area IR is in a state where the up and down (Z direction) and the left and right (Y direction) are reversed, and the image is formed at the position (second position) of the image height value eccentric to the -Z direction from the center point of the full imaging field CIF.

中間像Img2係將中間像Img1以投影視野光闌63之梯形開口加以限制者。中間像Img2，由於係被配置在投影視野光闌63前後之2個偏向構件77、78將光路加以彎折，因此於YZ面內觀察時，係成像在從全成像視野CIF之中心點 往+Z方向之像高值k2(k2<k1)的位置(第3位置)。再者，被投影視野光闌63限制之中間像Img2，藉由通過投影光學模組PLM內之第2次的成像光路(第2投影光束EL2b)，再成像在形成於基板P上之投影區域PA內。 The intermediate image Img2 restricts the intermediate image Img1 by the trapezoidal opening of the projection field diaphragm 63. The intermediate image Img2 is configured by the two deflection members 77 and 78 arranged before and after the projection field diaphragm 63 to bend the optical path. Therefore, when viewed in the YZ plane, the imaging is from the center point of the full imaging field CIF to + The position (third position) of the image height value k2 (k2 <k1) in the Z direction. In addition, the intermediate image Img2 restricted by the projection field diaphragm 63 passes through the second imaging light path (second projection light beam EL2b) in the projection optical module PLM, and is imaged again on a projection area formed on the substrate P Within PA.

再成像在投影區域PA內之像之中心點，於YZ面內觀察時，位於從全成像視野CIF之中心點往-Z方向之像高值k2(k2<k1)的位置。而再成像在投影區域PA內之像，相對照明區域IR內之光罩圖案其左右方向(Y方向)不反轉、以等倍(×1)形成。 The center point of the image re-imaged in the projection area PA, when viewed in the YZ plane, is located at an image height value k2 (k2 <k1) from the center point of the full imaging field CIF toward the -Z direction. The image re-imaged in the projection area PA is formed at equal magnifications (× 1) without reversing the left-right direction (Y direction) of the mask pattern in the illumination area IR.

如以上所述，本實施形態中，係為了使來自光罩圖案之成像光束在圓形之成像視野CIF內空間上易於分離，而在將照明區域IR限制於細長矩形或梯形之區域之同時，藉由通常之全反射鏡形成之4個偏向構件76、77、78、79在投影光學模組PLM內形成雙程(double pass)之成像光路。因此，能將光罩M上之圖案，於基板P上至少在Y軸方向(投影光學模組PL1~PL6之各投影像連接方向)以等倍之正立像加以投影。 As described above, in this embodiment, in order to make the imaging beam from the mask pattern easy to separate in the circular imaging field CIF space, while limiting the illumination area IR to a slender rectangular or trapezoidal area, The four deflection members 76, 77, 78, and 79 formed by a general total reflection mirror form a double pass imaging optical path in the projection optical module PLM. Therefore, the pattern on the mask M can be projected on the substrate P at least in the Y-axis direction (the connection direction of each projection image of the projection optical modules PL1 to PL6) with an equal magnification.

如前所述，第1偏向構件76、第2偏向構件77、第3偏向構件78及第4偏向構件79，將第1投影光束EL2a之射入側視野(第1射入視野)、第1投影光束EL2a之射出測視野(第1射出視野)、第2投影光束EL2b之射入側視野(第2射入視野)、及第2投影光束EL2b之射出測視野(第2射出視野)，於反射光學系62加以分離。因此，由於反射光學系62成為在第1投影光束EL2a之導光時不易產生洩漏光之構成，因此反射光學系62具有降低投射於基板P上之洩漏光光量之光量降低部的功能的功能。又，洩漏光係例如因第1投影光束EL2a散射而產生之散射光、或係因第1投影光束EL2a分離而產生之分離光、或係因第1投影光束EL2a之一部分反射而產生之反射光。 As described above, the first deflection member 76, the second deflection member 77, the third deflection member 78, and the fourth deflection member 79 project the incident side field of view (the first incident field of view) of the first projection light beam EL2a, the first The emission measurement field of view of the projection light beam EL2a (first emission field of view), the incidence side field of view of the second projection light beam EL2b (second incidence field of view), and the emission field of view (second emission field of view) of the second projection beam EL2b, in The reflection optical system 62 is separated. Therefore, since the reflection optical system 62 has a configuration in which leakage light is unlikely to occur when the light is guided by the first projection light beam EL2a, the reflection optical system 62 has a function of a light amount reducing section that reduces the amount of leaked light light projected onto the substrate P. The leakage light is, for example, scattered light generated by scattering of the first projection light beam EL2a, or separated light generated by separation of the first projection light beam EL2a, or reflected light generated by reflection of a part of the first projection light beam EL2a. .

此處，反射光學系62係於Z方向，從上方側起依第1偏向構件76、第3偏向構件78、第4偏向構件79、第2偏向構件77之順序設置。因此，射入第1 透鏡群71之折射透鏡71a之第1投影光束EL2a，射入接近照明區域IR之側(折射透鏡71a之上方側)。此外，從第1透鏡群71之折射透鏡71a射出之第2投影光束EL2b，從接近投影區域PA之側(折射透鏡71a之下方側)射出。因此，能縮短照明區域IR與第1偏向構件76間之距離、此外，由於能縮短投影區域PA與第4偏向構件79間之距離，因此能謀求投影光學系PL之精巧化。又，如圖4所示，第3偏向構件78於沿著全成像視野CIF之方向(Z方向)，係配置在第1偏向構件76與第4偏向構件79之間。再者，第1偏向構件76及第4偏向構件79之位置與第2偏向構件77及第3偏向構件78之位置，在第2光軸BX2之方向係不同之位置。 Here, the reflection optical system 62 is located in the Z direction, and is provided in the order of the first deflection member 76, the third deflection member 78, the fourth deflection member 79, and the second deflection member 77 from the upper side. Therefore, the first projection light beam EL2a incident on the refractive lens 71a of the first lens group 71 is incident on the side close to the illumination region IR (the upper side of the refractive lens 71a). The second projection light beam EL2b emitted from the refractive lens 71a of the first lens group 71 is emitted from the side close to the projection area PA (the lower side of the refractive lens 71a). Therefore, the distance between the illumination area IR and the first deflecting member 76 can be shortened, and the distance between the projection area PA and the fourth deflecting member 79 can be shortened, so that the projection optical system PL can be made more compact. As shown in FIG. 4, the third deflection member 78 is disposed between the first deflection member 76 and the fourth deflection member 79 in a direction (Z direction) along the full imaging field CIF. In addition, the positions of the first deflection member 76 and the fourth deflection member 79 and the positions of the second deflection member 77 and the third deflection member 78 are different from each other in the direction of the second optical axis BX2.

又，由於反射光學系62具有第1射入視野、第1射出視野、第2射入視野、第2射出視野之4個視野(相當於圖5中所示之IR、Img1、Img2、PA)，因此為了避免投影光束EL2在4個視野重複，投影區域PA之之大小最好是作成既定大小。也就是說，投影區域PA在基板P之掃描方向之長度、與在和掃描方向正交之基板P之寬度方向之長度，為掃描方向之長度/寬度方向之長度≦1/4。因此，反射光學系62於4個視野，不會使投影光束EL2重複，而能分離投影光束EL2引導至部分光學系61。 In addition, the reflective optical system 62 has four fields of view, namely, the first field of view, the first field of view, the second field of view, and the second field of view (equivalent to IR, Img1, Img2, and PA shown in FIG. 5). Therefore, in order to prevent the projection light beam EL2 from repeating in 4 fields of view, the size of the projection area PA is preferably made to a predetermined size. That is, the length of the projection area PA in the scanning direction of the substrate P and the width direction of the substrate P orthogonal to the scanning direction are equal to the length in the scanning direction / the length in the width direction ≦ 1/4. Therefore, the reflective optical system 62 can guide the partial projection optical beam EL2 to the partial optical system 61 without causing the projection optical beam EL2 to overlap in four fields of view.

再者，第1偏向構件76、第2偏向構件77、第3偏向構件78、及第4偏向構件79係形成為與狹縫狀第1射入視野、第1射出視野、第2射入視野、及第2射出視野之4個視野(相當於圖5中所示之IR、Img1、Img2、PA)之任一者皆對應之長方形，且在沿全成像視野CIF之狹縫之寬度方向(Z方向)彼此分離配置。 In addition, the first deflection member 76, the second deflection member 77, the third deflection member 78, and the fourth deflection member 79 are formed in a slit-like first shot field, first shot field, and second shot field. And the 4th field of view of the second emission field (equivalent to IR, Img1, Img2, PA shown in Figure 5) are corresponding rectangles, and are in the width direction of the slit of the full imaging field CIF ( (Z direction).

聚焦修正光學構件64配置在第4偏向構件79與基板P之間。聚焦修正光學構件64係調整投影於基板P上之光罩圖案像之聚焦狀態。聚焦修正光學構件64，例如係將2片楔形稜鏡顛倒(圖4中於X方向顛倒)重疊成整體為透明之平行平板。將此1對稜鏡在不改變彼此對向之面間之間隔的情形下滑向斜面方向，即能改變作為平行平板之厚度。據此，即能微調部分光學系61之實效光路長， 對形成於中間像面P7及投影區域PA之光罩圖案像之對焦狀態進行微調。 The focus correction optical member 64 is disposed between the fourth deflection member 79 and the substrate P. The focus correction optical member 64 adjusts the focus state of the mask pattern image projected on the substrate P. The focus correcting optical member 64 is, for example, a pair of two wedge-shaped ridges inverted (inverted in the X direction in FIG. 4) superimposed into a parallel flat plate that is transparent as a whole. The thickness of the parallel flat plate can be changed by sliding the pair of slugs toward the slope without changing the interval between the faces facing each other. According to this, the effective optical path length of some optical systems 61 can be fine-tuned, and the focusing state of the mask pattern image formed on the intermediate image plane P7 and the projection area PA can be fine-tuned.

像偏移用光學構件65配置在偏光分束器PBS與第1偏向構件76之間。像偏移用光學構件65，可調整投影於基板P上之光罩圖案之像在像面內移動。像偏移用光學構件65由圖4之在XZ面內可傾斜之透明的平行平板玻璃、與圖4之在YZ面內可傾斜之透明的平行平板玻璃構成。藉由調整該2片平行平板玻璃之各傾斜量，即能使形成於中間像面P7及投影區域PA之光罩圖案之像於X方向及Y方向微幅偏移。 The image shift optical member 65 is disposed between the polarizing beam splitter PBS and the first polarizing member 76. The image shift optical member 65 can adjust the image of the mask pattern projected on the substrate P to move within the image plane. The image shift optical member 65 is composed of a transparent parallel plate glass that can be tilted in the XZ plane in FIG. 4 and a transparent parallel plate glass that can be tilted in the YZ plane in FIG. 4. By adjusting the inclination amounts of the two parallel flat glass plates, the images of the mask pattern formed on the intermediate image plane P7 and the projection area PA can be slightly shifted in the X direction and the Y direction.

倍率修正用光學構件66配置在第4偏向構件79與基板P之間。倍率修正用光學構件66，係以例如將凹透鏡、凸透鏡、凹透鏡之3片以既定間隔同軸配置，前後之凹透鏡固定、而之間之凸透鏡可於光軸(主光線)方向移動之方式構成。據此，形成於投影區域PA之光罩圖案之像，即能在維持遠心之成像狀態之同時，等向的微幅放大或縮小。又，構成倍率修正用光學構件66之3片透鏡群之光軸，在XZ面內係傾斜而與投影光束EL2(第2投影光束EL2b)之主光線平行。 The magnification correction optical member 66 is disposed between the fourth deflection member 79 and the substrate P. The magnification correction optical member 66 is constituted by, for example, arranging three concave lenses, convex lenses, and concave lenses coaxially at a predetermined interval, and fixing the front and rear concave lenses, and the convex lenses in between can be moved in the direction of the optical axis (principal light). According to this, the image of the mask pattern formed in the projection area PA can be enlarged or reduced isotropically while maintaining the telecentric imaging state. In addition, the optical axes of the three lens groups constituting the magnification correction optical member 66 are inclined in the XZ plane and are parallel to the main ray of the projection light beam EL2 (second projection light beam EL2b).

旋轉修正機構67，例如係藉由致動器(圖示省略)使第2偏向構件77繞與第2光軸BX2平行(或垂直)之軸微幅旋轉者。此旋轉修正機構67藉由使第2偏向構件77旋轉，可使形成於中間像面P7之光罩圖案之像在該面P7內微幅旋轉。 The rotation correction mechanism 67 is, for example, an actuator (not shown) that rotates the second deflection member 77 slightly around an axis that is parallel (or perpendicular) to the second optical axis BX2. The rotation correction mechanism 67 rotates the second deflection member 77 to rotate the image of the mask pattern formed on the intermediate image plane P7 slightly within the plane P7.

偏光調整機構68，係例如藉由致動器(圖示省略)使1/4波長板41繞與板面正交之軸旋轉，以調整偏光方向者。偏光調整機構68藉由使1/4波長板41旋轉，可調整投射於投影區域PA之投影光束EL2(第2投影光束EL2b)之照度。 The polarization adjustment mechanism 68 is, for example, an actuator (not shown) that rotates the 1/4 wavelength plate 41 about an axis orthogonal to the plate surface to adjust the polarization direction. The polarization adjustment mechanism 68 can adjust the illuminance of the projection light beam EL2 (the second projection light beam EL2b) projected on the projection area PA by rotating the 1/4 wavelength plate 41.

在以此方式構成之投影光學系PL中，來自光罩M之第1投影光束EL2a從照明區域IR往光罩面P1之法線方向(以第1軸AX1為中心之徑方向)射 出，通過1/4波長板41、偏光分束器PBS及像偏移用光學構件65射入反射光學系62。射入反射光學系62之第1投影光束EL2a，於反射光學系62之第1偏向構件76之第1反射面P3反射，射入部分光學系61。射入部分光學系61之第1投影光束EL2a，通過部分光學系61之第1透鏡群71於第1凹面鏡72反射。於第1凹面鏡72反射之第1投影光束EL2a再次通過第1透鏡群71從部分光學系61射出。從部分光學系61射出之第1投影光束EL2a，於反射光學系62之第2偏向構件77之第2反射面P4反射，射入投影視野光闌63。通過投影視野光闌63之第2投影光束EL2b，於反射光學系62之第3偏向構件78之第3反射面P5反射，再次射入部分光學系61。射入部分光學系61之第2投影光束EL2b，通過部分光學系61之第1透鏡群71於第1凹面鏡72反射。於第1凹面鏡72反射之第2投影光束EL2b，再次通過第1透鏡群71從部分光學系61射出。從部分光學系61射出之第2投影光束EL2b，於反射光學系62之第4偏向構件79之第4反射面P6反射，射入聚焦修正光學構件64及倍率修正用光學構件66。從倍率修正用光學構件66射出之第2投影光束EL2b，射入基板P上之投影區域PA，出現在照明區域IR內之光罩圖案之像以等倍(×1)被投影於投影區域PA。 In the projection optical system PL configured in this manner, the first projection light beam EL2a from the mask M is emitted from the illumination area IR toward the normal direction of the mask surface P1 (the radial direction centered on the first axis AX1) and passes through The 1/4 wavelength plate 41, the polarizing beam splitter PBS, and the image shifting optical member 65 are incident on the reflection optical system 62. The first projection light beam EL2a incident on the reflection optical system 62 is reflected by the first reflection surface P3 of the first deflection member 76 of the reflection optical system 62 and enters a part of the optical system 61. The first projection light beam EL2 a incident on the partial optical system 61 is reflected by the first concave mirror 72 through the first lens group 71 of the partial optical system 61. The first projection light beam EL2 a reflected by the first concave mirror 72 is again emitted from the partial optical system 61 through the first lens group 71. The first projection light beam EL2a emitted from the partial optical system 61 is reflected by the second reflection surface P4 of the second deflection member 77 of the reflective optical system 62 and enters the projection field diaphragm 63. The second projection light beam EL2b passing through the projection field diaphragm 63 is reflected by the third reflection surface P5 of the third deflection member 78 of the reflection optical system 62 and enters a part of the optical system 61 again. The second projection light beam EL2 b that has entered the partial optical system 61 is reflected by the first concave mirror 72 through the first lens group 71 of the partial optical system 61. The second projection light beam EL2 b reflected by the first concave mirror 72 is again emitted from the partial optical system 61 through the first lens group 71. The second projection light beam EL2b emitted from the partial optical system 61 is reflected by the fourth reflecting surface P6 of the fourth deflection member 79 of the reflective optical system 62, and enters the focus correction optical member 64 and the magnification correction optical member 66. The second projection light beam EL2b emitted from the magnification correction optical member 66 is incident on the projection area PA on the substrate P, and the image of the mask pattern appearing in the illumination area IR is projected on the projection area PA at equal magnification (× 1). .

<元件製造方法> <Element Manufacturing Method>

其次，參照圖6，說明元件製造方法。圖6係顯示第1實施形態之元件製造方法的流程圖。 Next, a device manufacturing method will be described with reference to FIG. 6. Fig. 6 is a flowchart showing a device manufacturing method according to the first embodiment.

圖6所示之元件製造方法，首先，係進行例如使用有機EL等自發光元件形成之顯示面板之功能、性能設計，以CAD等設計所需之電路圖案及配線圖案(步驟S201)。接著，根據以CAD等設計之各種的每一層圖案，製作所需層量之光罩M(步驟S202)。並準備捲繞有作為顯示面板之基材之可撓性基板P(樹脂薄膜、金屬箔膜、塑膠等)的供應用捲筒FR1(步驟S203)。又，於此步驟S203中準備之捲筒狀基板P，可以是視需要將其表面改質者、或事前已形成底 層(例如透過印記(imprint)方式之微小凹凸)者、或預先積層有光感應性之功能膜或透明膜(絶緣材料)者。 The device manufacturing method shown in FIG. 6 firstly performs a function and performance design of a display panel formed using, for example, an organic EL or the like, and designs a circuit pattern and a wiring pattern required by CAD or the like (step S201). Next, a mask M of a desired layer amount is produced based on various patterns of each layer designed by CAD or the like (step S202). A supply roll FR1 on which a flexible substrate P (resin film, metal foil film, plastic, etc.) as a base material of the display panel is wound is prepared (step S203). In addition, the roll-shaped substrate P prepared in this step S203 may be one whose surface has been modified as necessary, or which has been previously formed with a bottom layer (for example, through minute irregularities of an imprint method), or laminated with light in advance. Inductive functional film or transparent film (insulating material).

接著，於基板P上形成構成顯示面板元件之電極或以配線、絶緣膜、TFT(薄膜半導體)等構成之底板層，並以積層於該底板之方式形成以有機EL等自發光元件構成之發光層(顯示像素部)(步驟S204)。於此步驟S204中，雖包含使用先前各實施形態所說明之曝光裝置U3使光阻層曝光之習知微影製程，但亦包含使取代光阻而塗有感光性矽烷耦合劑之基板P圖案曝光來於表面形成親撥水性之圖案的曝光製程、使光感應性觸媒層圖案曝光並以無電解鍍敷法形成金屬膜圖案(配線、電極等)的濕式製程、或以含有銀奈米粒子之導電性墨水等描繪圖案的印刷製程等之處理。 Next, an electrode constituting a display panel element or a substrate layer composed of wiring, an insulating film, a TFT (thin film semiconductor), and the like is formed on the substrate P, and a light emission composed of a self-emitting element such as an organic EL is laminated on the substrate. Layer (display pixel portion) (step S204). In this step S204, although the conventional lithography process is used to expose the photoresist layer using the exposure device U3 described in the previous embodiments, it also includes a substrate P pattern coated with a photosensitive silane coupling agent instead of the photoresist. Exposure comes from an exposure process that forms a water-repellent pattern on the surface, a wet process that exposes a photo-sensitive catalyst layer pattern, and forms a metal film pattern (wiring, electrodes, etc.) by electroless plating, or a process that contains silver Processing such as printing process for drawing patterns such as conductive ink of rice particles.

接著，針對以捲筒方式於長條基板P上連續製造之每一顯示面板元件切割基板P、或於各顯示面板元件表面貼合保護膜(耐環境障壁層)或彩色濾光片膜等，組裝元件(步驟S205)。接著，進行顯示面板元件是否可正常作動、或是否滿足所欲性能及特性之檢查步驟(步驟S206)。經由以上方式，即能製造顯示面板(可撓性顯示器)。 Next, for each display panel element that is continuously manufactured on the long substrate P by a roll method, the substrate P is cut, or a protective film (environmental barrier layer) or a color filter film is laminated on the surface of each display panel element. The components are assembled (step S205). Next, a step of checking whether the display panel element can operate normally or whether it satisfies the desired performance and characteristics is performed (step S206). Through the above method, a display panel (flexible display) can be manufactured.

如前所述，由於第1實施形態可藉由與投影光學系PL(投影光學模組PLM)協同動作之反射光學系62使第1射入視野、第1射出視野、第2射入視野及第2射出視野彼此分離，因此能抑制來自第1投影光束EL2a之洩漏光之發生。由於反射光學系62可做成洩漏光不易投射於基板P上之構成，因此能防止投影曝光於基板P上之像之品質劣化。 As described above, the first embodiment can make the first incident field of view, the first incident field of view, the second incident field of view, and the reflective optical system 62 in cooperation with the projection optical system PL (projection optical module PLM). Since the second emission fields of view are separated from each other, leakage of light from the first projection light beam EL2a can be suppressed. Since the reflective optical system 62 can be configured so that leaked light is not easily projected on the substrate P, it is possible to prevent the quality of the image projected and exposed on the substrate P from being deteriorated.

此外，由於第1實施形態中，可將投影區域PA作成掃描方向之長度/寬度方向之長度≦1/4，因此在反射光學系62之第1投影光束EL2a及第2投影束EL2b之視野、亦即可使第1射入視野、第1射出視野、第2射入視野及第2射出視野不重複而加以分離。 In addition, in the first embodiment, the projection area PA can be set to have a length in the scanning direction / length in the width direction ≦ 1/4. Therefore, in the field of view of the first projection beam EL2a and the second projection beam EL2b of the reflection optical system 62, That is, the first injection field of view, the first injection field of view, the second injection field of view, and the second injection field of view can be separated without overlapping.

又，由於第1實施形態中，可以雷射光做為照明光束EL1，因此非常適合於確保投射於投影區域PA之第2投影光束EL2b之照度。 In addition, since the laser light can be used as the illumination light beam EL1 in the first embodiment, it is very suitable for securing the illuminance of the second projection light beam EL2b projected on the projection area PA.

又，第1實施形態中，係將射入折射透鏡71a之第1投影光束EL2a及第2投影光束EL2b之位置設為折射透鏡71a之上方側、將從折射透鏡71a射出之第1投影光束EL2a及第2投影光束EL2b之位置設為折射透鏡71a之下方側。然而，只要是能使第1射入視野、第1射出視野、第2射入視野及第2射出視野彼此分離的話，第1投影光束EL2a及第2投影光束EL2b相對折射透鏡71a之射入位置及射出位置並無特別限定。 In the first embodiment, the positions of the first projection light beam EL2a and the second projection light beam EL2b entering the refractive lens 71a are set above the refractive lens 71a, and the first projection light beam EL2a emitted from the refractive lens 71a is used. The position of the second projection light beam EL2b is the lower side of the refractive lens 71a. However, as long as the first incident field of view, the first incident field of view, the second incident field of view, and the second incident field of view can be separated from each other, the incident positions of the first projection beam EL2a and the second projection beam EL2b with respect to the refractive lens 71a And the injection position is not particularly limited.

〔第2實施形態〕 [Second Embodiment]

其次，參照圖7，說明第2實施形態之曝光裝置U3。又，第2實施形態中，為避免與第1實施形態重複之記載，係針對與與第1實施形態相異之部分加以說明，對與第1實施形態相同之構成要素係賦予與第1實施形態相同符號加以說明。圖7係顯示第2實施形態之曝光裝置之照明光學系及投影光學系之構成的圖。第1實施形態之曝光裝置U3，係藉由在投影光學系PL之反射光學系62中進行視野分離，使其不易產生洩漏光。第2實施形態之曝光裝置U3，則係使投影光學系PL之反射光學系100中，使以投影光束EL2形成之投影像之成像位置、與以洩漏光形成之不良像之成像位置，在基板P之掃描方向相異。 Next, an exposure apparatus U3 of the second embodiment will be described with reference to Fig. 7. In addition, in the second embodiment, in order to avoid overlapping descriptions with the first embodiment, the description is different from the first embodiment, and the same constituent elements as those in the first embodiment are given the same as those in the first embodiment. The same symbols are used for explanation. FIG. 7 is a diagram showing the configuration of the illumination optical system and the projection optical system of the exposure apparatus according to the second embodiment. In the exposure apparatus U3 of the first embodiment, the field of view is separated in the reflection optical system 62 of the projection optical system PL, so that leakage light is hardly generated. In the exposure apparatus U3 of the second embodiment, in the reflection optical system 100 of the projection optical system PL, the imaging position of the projection image formed by the projection light beam EL2 and the imaging position of the defective image formed by the leaked light are on the substrate. The scanning directions of P are different.

第2實施形態之曝光裝置U3中，投影光學系PL從來自光罩M之投影光束EL2之射入側起依序具有1/4波長板41、偏光分束器PBS及投影光學模組PLM，投影光學模組PLM包含部分光學系61、反射光學系(導光光學系)100及投影視野光闌63。此外，投影光學模組PLM，與第1實施形態同樣的，包含聚焦修正光學構件64、像偏移用光學構件65、倍率修正用光學構件66、旋轉修正機構67及偏光調整機構68。又，1/4波長板41、偏光分束器PBS、部分光學系61、投影視野光闌63、聚焦修正光學構件64、像偏移用光學構件65、倍率修正用光 學構件66、旋轉修正機構67及偏光調整機構68，由於構成相同，因此省略其說明。 In the exposure apparatus U3 of the second embodiment, the projection optical system PL has a 1/4 wavelength plate 41, a polarizing beam splitter PBS, and a projection optical module PLM in order from the incident side of the projection light beam EL2 from the mask M. The projection optical module PLM includes a partial optical system 61, a reflective optical system (light guide optical system) 100, and a projection field diaphragm 63. The projection optical module PLM includes a focus correction optical member 64, an image shift optical member 65, a magnification correction optical member 66, a rotation correction mechanism 67, and a polarization adjustment mechanism 68, as in the first embodiment. The 1/4 wavelength plate 41, the polarizing beam splitter PBS, the partial optical system 61, the projection field diaphragm 63, the focus correction optical member 64, the image shift optical member 65, the magnification correction optical member 66, and the rotation correction mechanism 67 and the polarization adjustment mechanism 68 have the same configuration, and therefore descriptions thereof are omitted.

反射光學系100，具備第1偏光分束器(第1反射構件)PBS1、第2偏光分束器(第2反射構件)PBS2、1/2波長板104、第1偏向構件(第1光學構件及第3反射部)105、第2偏向構件(第2光學構件及第4反射部)106、第1遮光板111、與第2遮光板112。第1偏光分束器PBS1具有第1偏光分離面P10。第1偏光分離面P10使來自偏光分束器PBS1之第1投影光束EL2a反射，使反射之第1投影光束EL2a射入第1透鏡群71之折射透鏡71a。又，第1偏光分離面P10使來自中間像面P7之第2投影光束EL2b穿透，使穿透之第2投影光束EL2b射入第1透鏡群71之折射透鏡71a。第2偏光分束器PBS2具有第2偏光分離面P11。第2偏光分離面P11使來自第1透鏡群71之折射透鏡71a之第1投影光束EL2a穿透，使穿透之第1投影光束EL2a射入第1偏向構件105。又，第2偏光分離面P11使來自第1透鏡群71之折射透鏡71a之第2投影光束EL2b反射，使反射之第2投影光束EL2b射入基板P上。1/2波長板104將被第1偏光分束器PBS1反射之S偏光之第1投影光束EL2a轉換成P偏光之第1投影光束EL2a。又，1/2波長板104將穿透第1偏光分束器PBS1之P偏光之第2投影光束EL2b轉換成S偏光之第2投影光束EL2b。第1偏向構件105係具有第1反射面P12之反射鏡。第1反射面P12使穿透過第2偏光分束器PBS2之第1投影光束EL2a反射，使反射之第1投影光束EL2a射入設在中間像面P7之投影視野光闌63。第2偏向構件106係具有第2反射面P13之反射鏡。第2反射面P13使來自投影視野光闌63之第2投影光束EL2b反射，使反射之第2投影光束EL2b射入第1偏光分束器PBS1。如以上所述，第1偏向構件105與第2偏向構件106之功能，係作為使來自部分光學系61之第1投影光束EL2a反射而再次折返向部分光學系61之折返反射鏡。 The reflection optical system 100 includes a first polarizing beam splitter (first reflecting member) PBS1, a second polarizing beam splitter (second reflecting member) PBS2, a 1/2 wavelength plate 104, and a first polarizing member (first optical member And third reflecting portion) 105, a second deflecting member (second optical member and fourth reflecting portion) 106, a first light shielding plate 111, and a second light shielding plate 112. The first polarization beam splitter PBS1 includes a first polarization separation surface P10. The first polarized light separation surface P10 reflects the first projection light beam EL2a from the polarizing beam splitter PBS1, and causes the reflected first projection light beam EL2a to enter the refractive lens 71a of the first lens group 71. In addition, the first polarized light separation plane P10 penetrates the second projection light beam EL2b from the intermediate image plane P7, and makes the transmitted second projection light beam EL2b enter the refractive lens 71a of the first lens group 71. The second polarization beam splitter PBS2 includes a second polarization separation surface P11. The second polarized light separation surface P11 transmits the first projection light beam EL2a from the refractive lens 71a of the first lens group 71, and makes the transmitted first projection light beam EL2a enter the first deflection member 105. The second polarized light separation surface P11 reflects the second projection light beam EL2b from the refractive lens 71a of the first lens group 71, and makes the reflected second projection light beam EL2b incident on the substrate P. The 1/2 wavelength plate 104 converts the first projection light beam EL2a of the S-polarized light reflected by the first polarization beam splitter PBS1 into the first projection light beam EL2a of the P-polarized light. In addition, the 1/2 wavelength plate 104 converts the second projection light beam EL2b of the P-polarized light that has passed through the first polarization beam splitter PBS1 into the second projection light beam EL2b of the S-polarized light. The first deflecting member 105 is a mirror having a first reflecting surface P12. The first reflection surface P12 reflects the first projection light beam EL2a transmitted through the second polarizing beam splitter PBS2, and causes the reflected first projection light beam EL2a to enter the projection field diaphragm 63 provided on the intermediate image plane P7. The second deflecting member 106 is a mirror having a second reflecting surface P13. The second reflecting surface P13 reflects the second projection light beam EL2b from the projection field diaphragm 63, and causes the reflected second projection light beam EL2b to enter the first polarizing beam splitter PBS1. As described above, the functions of the first deflecting member 105 and the second deflecting member 106 are reflected mirrors that reflect the first projection light beam EL2a from the partial optical system 61 and return to the partial optical system 61 again.

此外，由於在反射光學系100設置了第1偏光分束器PBS1，因此 為了使穿透過偏光分束器PBS之P偏光之投影光束在第1偏光分束器PBS1反射，在偏光分束器PBS與第1偏光分束器PBS1之間設置了1/2波長板107。 In addition, since the first polarizing beam splitter PBS1 is provided in the reflection optical system 100, in order to reflect the P-polarized projection beam transmitted through the polarizing beam splitter PBS at the first polarizing beam splitter PBS1, the polarizing beam splitter PBS A half-wavelength plate 107 is provided to the first polarizing beam splitter PBS1.

第1遮光板111設在第2偏光分束器PBS2與基板P之間。第1遮光板111係設在可遮蔽射入第2偏光分束器PBS2之第1投影光束EL2a之一部分不穿透第2偏光分束器PBS2之第2偏光分離面P11而反射之反射光(洩漏光)的位置。 The first light shielding plate 111 is provided between the second polarizing beam splitter PBS2 and the substrate P. The first light-shielding plate 111 is a reflected light that is provided on a portion of the first projection light beam EL2a that can be incident on the second polarized beam splitter PBS2 and does not penetrate the second polarized light separation plane P11 of the second polarized beam splitter PBS2 ( Leaking light).

第2遮光板112射在第1偏光分束器PBS1與第2偏光分束器PBS2之間。第2遮光板112係遮蔽從第1偏光分束器PBS1洩漏至第2偏光分束器PBS2之洩漏光。 The second light shielding plate 112 is radiated between the first polarizing beam splitter PBS1 and the second polarizing beam splitter PBS2. The second light shielding plate 112 shields light leaking from the first polarizing beam splitter PBS1 to the second polarizing beam splitter PBS2.

來自偏光分束器PBS之P偏光之第1投影光束EL2a，通過像偏移用光學構件65後穿透1/2波長板107。穿透過1/2波長板107之第1投影光束EL2a在被轉換成S偏光後，射入第1偏光分束器PBS1。射入第1偏光分束器PBS1之S偏光之第1投影光束EL2a，於第1偏光分束器PBS1之第1偏光分離面P10反射。於第1偏光分離面P10反射之S偏光之第1投影光束EL2a穿過1/2波長板104。穿透過1/2波長板104之第1投影光束EL2a，在被轉換成P偏光後射入第1透鏡群71。射入第1透鏡群71之第1投影光束EL2a在通過包含折射透鏡71a之複數個透鏡構件後，射入第1凹面鏡72。此時，第1投影光束EL2a，於第1透鏡群71中通過折射透鏡71a上方側之視野區域(第1射入視野)。射入第1凹面鏡72之第1投影光束EL2a於第1凹面鏡72反射。於第1凹面鏡72反射之第1投影光束EL2a射入第1透鏡群71並通過包含折射透鏡71a之複數個透鏡構件後，從第1透鏡群71射出。此時，第1投影光束EL2a，於第1透鏡群71中通過折射透鏡71a下方側之視野區域(第1射出視野)。從第1透鏡群71射出之第1投影光束EL2a射入第2偏光分束器PBS2。射入第2偏光分束器PBS2之P偏光之第1投影光束EL2a穿過第2偏光分離面P11。穿透過第2偏光分離面P11之第1投影光束EL2a射入第1偏向構件105，於第1偏向構件105之第1反射面P12反射。於第1反射面P12反射之第1投影光束EL2a射入投影視 野光闌63。射入投影視野光闌63之第1投影光束EL2a，形成在照明區域IR之光罩圖案之倒立像的中間像。 The first projection light beam EL2a of P-polarized light from the polarizing beam splitter PBS passes through the half-wavelength plate 107 after passing through the image shifting optical member 65. The first projection light beam EL2a transmitted through the 1/2 wavelength plate 107 is converted into S-polarized light, and then enters the first polarized beam splitter PBS1. The first projection light beam EL2a that has entered the S-polarized light of the first polarized beam splitter PBS1 is reflected by the first polarized light separation plane P10 of the first polarized beam splitter PBS1. The first projection light beam EL2a of the S-polarized light reflected on the first polarized light separation plane P10 passes through the half-wavelength plate 104. The first projection light beam EL2a transmitted through the 1/2 wavelength plate 104 is converted into P-polarized light and is incident on the first lens group 71. The first projection light beam EL2a incident on the first lens group 71 passes through a plurality of lens members including the refractive lens 71a, and then enters the first concave mirror 72. At this time, the first projection light beam EL2a passes through the field of view (first incident field of view) above the refractive lens 71a in the first lens group 71. The first projection light beam EL2 a incident on the first concave mirror 72 is reflected by the first concave mirror 72. The first projection light beam EL2a reflected by the first concave mirror 72 enters the first lens group 71, passes through a plurality of lens members including the refractive lens 71a, and exits from the first lens group 71. At this time, the first projection light beam EL2a passes through the field of view (first emission field of view) below the refractive lens 71a in the first lens group 71. The first projection light beam EL2a emitted from the first lens group 71 enters the second polarizing beam splitter PBS2. The first projection light beam EL2a of the P-polarized light that has entered the second polarized beam splitter PBS2 passes through the second polarized light separation surface P11. The first projection light beam EL2a passing through the second polarization separation surface P11 enters the first polarization member 105 and is reflected by the first reflection surface P12 of the first polarization member 105. The first projection light beam EL2a reflected on the first reflection surface P12 is incident on the projection field diaphragm 63. The first projection light beam EL2a incident on the projection field diaphragm 63 forms an intermediate image of an inverted image of the mask pattern in the illumination area IR.

來自投影視野光闌63之第2投影光束EL2b，於第2偏向構件106之第2反射面P13反射。於第2反射面P13反射之第2投影光束EL2b射入第1偏光分束器PBS1。射入第1偏光分束器PBS1之P偏光之第2投影光束EL2b穿透第1偏光分離面P10。穿透過第1偏光分離面P10之P偏光之第2投影光束EL2b穿透1/2波長板104。穿透過1/2波長板104之第2投影光束EL2b在被轉換成S偏光後，射入第1透鏡群71。射入第1透鏡群71之第2投影光束EL2b在通過包含折射透鏡71a之複數個透鏡構件後，射入第1凹面鏡72。此時，第2投影光束EL2b，於第1透鏡群71係通過折射透鏡71a上方側之視野區域(第2射入視野)。射入第1凹面鏡72之第2投影光束EL2b於第1凹面鏡72反射。於第1凹面鏡72反射之第2投影光束EL2b射入第1透鏡群71，在通過包含折射透鏡71a之複數個透鏡構件後，從第1透鏡群71射出。此時，第2投影光束EL2b，於第1透鏡群71通過折射透鏡71a下方側之視野區域(第2射出視野)。從第1透鏡群71射出之第2投影光束EL2b，射入第2偏光分束器PBS2。射入第2偏光分束器PBS2之S偏光之第2投影光束EL2b於第2偏光分離面P11反射。於第2偏光分離面P11反射之第2投影光束EL2b通過聚焦修正光學構件64及倍率修正用光學構件66，投射於基板P上之投影區域PA。投射於投影區域PA之第2投影光束EL2b，形成在照明區域IR之光罩圖案之正立像的投影像。此時，光罩圖案在照明區域IR之像係以等倍(×1)投影於投影區域PA。 The second projection light beam EL2b from the projection field diaphragm 63 is reflected on the second reflection surface P13 of the second deflection member 106. The second projection light beam EL2b reflected on the second reflection surface P13 is incident on the first polarizing beam splitter PBS1. The second projection light beam EL2b of the P polarized light that has entered the first polarized beam splitter PBS1 passes through the first polarized light separation surface P10. The second projection light beam EL2b that has passed through the P-polarized light passing through the first polarized light separation plane P10 passes through the half-wavelength plate 104. The second projection light beam EL2b transmitted through the 1/2 wavelength plate 104 is converted into S-polarized light, and then enters the first lens group 71. The second projection light beam EL2b that has entered the first lens group 71 passes through a plurality of lens members including the refractive lens 71a, and then enters the first concave mirror 72. At this time, the second projection light beam EL2b passes through the field of view (second incident field of view) above the refractive lens 71a in the first lens group 71. The second projection light beam EL2 b incident on the first concave mirror 72 is reflected by the first concave mirror 72. The second projection light beam EL2b reflected by the first concave mirror 72 enters the first lens group 71, passes through a plurality of lens members including the refractive lens 71a, and exits from the first lens group 71. At this time, the second projection light beam EL2b passes through the field of view (second emission field of view) below the refractive lens 71a in the first lens group 71. The second projection light beam EL2b emitted from the first lens group 71 is incident on the second polarizing beam splitter PBS2. The second projection light beam EL2b of the S-polarized light that has entered the second polarized beam splitter PBS2 is reflected on the second polarized light separation plane P11. The second projection light beam EL2b reflected on the second polarization separation surface P11 passes through the focus correction optical member 64 and the magnification correction optical member 66, and is projected onto the projection area PA on the substrate P. The second projection light beam EL2b projected on the projection area PA forms a projection image of an orthographic image of a mask pattern in the illumination area IR. At this time, the image of the mask pattern in the illumination area IR is projected on the projection area PA at equal magnification (× 1).

此處，第1偏光分束器PBS1、第2偏光分束器PBS2、第1偏向構件105及第2偏向構件106係配置成以被第2偏光分束器PBS2反射之第2投影光束EL2b形成之投影像的成像位置、與以被第2偏光分束器PBS2反射之第1投影光束EL2a之部分洩漏光形成之不良像的成像位置，在基板P之掃描方向相異。具體而言，係以相對第1偏光分束器PBS1之第1偏光分離面P10，第1投影光束EL2a之射 入位置與第2投影光束EL2b之射入位置相異之方式，配置第1偏光分束器PBS1、第2偏光分束器PBS2、第1偏向構件105及第2偏向構件106。藉由作成此種配置，可相對第2偏光分束器PBS2之第2偏光分離面P11，使第2投影光束EL2b之射入位置與第1投影光束EL2a之射入位置相異。如此，即能使於第2偏光分離面P11反射之第2投影光束EL2b之投影像的成像位置、與於第2偏光分離面P11反射之第1投影光束EL2a之部分洩漏光之不良像的成像位置，在基板P之掃描方向相異。 Here, the first polarizing beam splitter PBS1, the second polarizing beam splitter PBS2, the first polarizing member 105, and the second polarizing member 106 are arranged so as to be formed by the second projection light beam EL2b reflected by the second polarizing beam splitter PBS2. The imaging position of the projected image is different from the imaging position of the defective image formed by the partial leakage light of the first projection light beam EL2a reflected by the second polarizing beam splitter PBS2 in the scanning direction of the substrate P. Specifically, the first polarized light is arranged so that the incident position of the first projection beam EL2a and the incident position of the second projection beam EL2b are different from the first polarized light separation plane P10 of the first polarized beam splitter PBS1. The beam splitter PBS1, the second polarizing beam splitter PBS2, the first polarizing member 105, and the second polarizing member 106. With this arrangement, the incident position of the second projection beam EL2b and the incident position of the first projection beam EL2a can be made different from the incident position of the second projection beam EL2a with respect to the second polarization separation surface P11 of the second polarization beam splitter PBS2. In this way, the imaging position of the projected image of the second projection light beam EL2b reflected on the second polarized light separation surface P11 and the defective image of a part of the leaked light of the first projection light beam EL2a reflected on the second polarized light separation surface P11 can be formed. The positions differ in the scanning direction of the substrate P.

此場合，第1遮光板111係設在遮蔽從第2偏光分束器PBS2朝向基板P之洩漏光的位置。因此，第1遮光板111在容許從第2偏光分束器PBS2往基板P之第2投影光束EL2b對基板P之投影之同時、亦遮蔽從第2偏光分束器PBS2朝向基板P之洩漏光。 In this case, the first light shielding plate 111 is provided at a position that shields the leaked light from the second polarizing beam splitter PBS2 toward the substrate P. Therefore, the first light-shielding plate 111 allows the second projection beam EL2b from the second polarizing beam splitter PBS2 to the substrate P to be projected onto the substrate P, and also shields the leakage light from the second polarizing beam splitter PBS2 toward the substrate P. .

如以上所述，第1偏光分束器PBS1、第2偏光分束器PBS2、第1偏向構件105、第2偏向構件106及第1遮光板111，於基板P之掃描方向使投影像隻成像位置與不良像之成像位置相異，以第1遮光板111遮蔽洩漏光。因此，反射光學系100之功能在於作為降低投射至基板P上之洩漏光之光量的光量降低部。 As described above, the first polarizing beam splitter PBS1, the second polarizing beam splitter PBS2, the first polarizing member 105, the second polarizing member 106, and the first light shielding plate 111 only image the projection image in the scanning direction of the substrate P The position is different from the imaging position of the defective image, and the first light shielding plate 111 blocks the leaked light. Therefore, the function of the reflection optical system 100 is to serve as a light amount reduction unit that reduces the amount of light of the leak light projected onto the substrate P.

又，第1投影光束EL2a在第1偏光分束器PBS1之第1偏光分離面P10的射入位置與第1投影光束EL2a在第2偏光分束器PBS2之第2偏光分離面P11的射入位置，係夾著第2光軸BX2成對稱之位置。此外，第2投影光束EL2b在第1偏光分束器PBS1之第1偏光分離面P10的射入位置與第2投影光束EL2b在第2偏光分束器PBS2之第2偏光分離面P11的射入位置，係夾著第2光軸BX2成對稱之位置。換言之，第1投影光束EL2a在第1偏光分束器PBS1之第1偏光分離面P10的射入位置與第2投影光束EL2b在第2偏光分束器PBS2之第2偏光分離面P11的射入位置，係夾著第2光軸BX2成非對稱之位置。 The incident position of the first projection beam EL2a on the first polarization separation plane P10 of the first polarization beam splitter PBS1 and the incidence of the first projection beam EL2a on the second polarization separation plane P11 of the second polarization beam splitter PBS2. The position is a position symmetrical to the second optical axis BX2. The incident position of the second projection beam EL2b on the first polarization separation plane P10 of the first polarization beam splitter PBS1 and the incidence of the second projection beam EL2b on the second polarization separation plane P11 of the second polarization beam splitter PBS2. The position is a position symmetrical to the second optical axis BX2. In other words, the incident position of the first projection beam EL2a on the first polarization separation plane P10 of the first polarization beam splitter PBS1 and the incidence of the second projection beam EL2b on the second polarization separation plane P11 of the second polarization beam splitter PBS2. The position is an asymmetric position sandwiching the second optical axis BX2.

第1投影光束EL2a在第1偏光分離面P10之射入位置與第2投影光 束EL2b在第2偏光分離面P11之射入位置，係夾著第2光軸BX2成非對稱位置之情形時，投影區域PA係相對照明區域IR偏移於X方向(第2光軸方向)之位置。此場合，為了使從光罩M上之照明區域IR1(及IR3、IR5)之中心點至照明區域IR2(及IR4、IR6)之中心點的周長、與從基板P上之投影區域PA1(及PA3、PA5)之中心點至第2投影區域PA2(及PA4、PA6)之中心點的周長為同長度，係使第1投影光學系PL1(及PL3、PL5)與第2投影光學系PL2(及PL4、PL6)之部分構成不同。 When the incident position of the first projection beam EL2a on the first polarization separation plane P10 and the incident position of the second projection beam EL2b on the second polarization separation plane P11 are in an asymmetric position with the second optical axis BX2 interposed, The projection area PA is a position shifted from the illumination area IR in the X direction (the second optical axis direction). In this case, in order to make the perimeter from the center point of the illumination area IR1 (and IR3, IR5) on the mask M to the center point of the illumination area IR2 (and IR4, IR6), and the projection area PA1 ( The perimeter of the center point of the second projection area PA2 (and PA4, PA6) to the center point of the second projection area PA2 (and PA4, PA6) is the same length, so that the first projection optical system PL1 (and PL3, PL5) and the second projection optical system The structure of PL2 (and PL4, PL6) is different.

奇數號(圖7之左側)之第1投影光學系PL1(及PL3、PL5)，係以在第1偏光分束器PBS1之第1偏光分離面P10，第1投影光束EL2a之射入位置與第2投影光束EL2b之射入位置相較，偏於Z方向之上方側、位於X方向中心側之方式，配置第1偏光分束器PBS1、第2偏光分束器PBS2、第1偏向構件105及第2偏向構件106。因此，在第2偏光分束器PBS2之第2偏光分離面P11，第2投影光束EL2b之射入位置與第1投影光束EL2a之射入位置相較，係位在Z方向之上方側且X方向之外側。 The first projection optical system PL1 (and PL3, PL5) with an odd number (on the left side of FIG. 7) is formed on the first polarization splitting surface P10 of the first polarization beam splitter PBS1, and the incident position of the first projection beam EL2a and Compared with the incident position of the second projection light beam EL2b, the first polarizing beam splitter PBS1, the second polarizing beam splitter PBS2, and the first polarizing member 105 are arranged so as to be located on the upper side in the Z direction and on the central side in the X direction. And the second deflection member 106. Therefore, on the second polarized light separation plane P11 of the second polarized beam splitter PBS2, the incident position of the second projection beam EL2b and the incident position of the first projection beam EL2a are positioned above the Z direction and X Direction outside.

也就是說，第1投影光學系PL1，於Z方向，係成第1偏光分束器PBS1之反射部分、第2偏向構件106之反射部分、第2偏光分束器PBS2之反射部分、第1偏向構件105之反射部分的順序。因此，如圖7所示，第2偏向構件106，係在沿全成像視野CIF之方向(Z方向)，配置在第1偏光分束器PBS1之反射部分與第2偏光分束器PBS2之反射部分之間。此外，第1投影光學系PL1中，第1偏光分束器PBS1及第2偏光分束器PBS2之反射部分之位置、與第1偏向構件105及第2偏向構件106之位置，於第2光軸BX2之方向，係不同之位置。 That is, the first projection optical system PL1 is, in the Z direction, the reflection portion of the first polarizing beam splitter PBS1, the reflection portion of the second polarizing member 106, the reflection portion of the second polarizing beam splitter PBS2, and the first The order of the reflecting portions of the deflecting member 105. Therefore, as shown in FIG. 7, the second deflecting member 106 is arranged along the direction of the full imaging field CIF (Z direction), and is disposed on the reflection portion of the first polarizing beam splitter PBS1 and the reflection of the second polarizing beam splitter PBS2. Between sections. In addition, in the first projection optical system PL1, the positions of the reflective portions of the first polarizing beam splitter PBS1 and the second polarizing beam splitter PBS2, and the positions of the first polarizing member 105 and the second polarizing member 106 are in the second light. The direction of the axis BX2 is different.

偶數號(圖7之右側)之第2投影光學系PL2(及PL4、PL6)，係以在第1偏光分束器PBS1之第1偏光分離面P10，第1投影光束EL2a之射入位置與第2投影光束EL2b之射入位置相較，係位在Z方向之下方側且X方向之外側之方 式，配置第1偏光分束器PBS1、第2偏光分束器PBS2、第1偏向構件105及第2偏向構件106。因此，於第2偏光分束器PBS2之第2偏光分離面P11，第2投影光束EL2b之射入位置與第1投影光束EL2a之射入位置相較，係位在Z方向之下方側且X方向之中心側。 The second projection optical system PL2 (and PL4, PL6) of the even number (on the right side of FIG. 7) is formed on the first polarization splitting surface P10 of the first polarization beam splitter PBS1, and the incident position of the first projection beam EL2a and Compared with the incident position of the second projection light beam EL2b, the first polarizing beam splitter PBS1, the second polarizing beam splitter PBS2, and the first polarizing member 105 are arranged so that they are positioned below the Z direction and outside the X direction. And the second deflection member 106. Therefore, at the second polarized light separation plane P11 of the second polarized beam splitter PBS2, the incident position of the second projection beam EL2b and the incident position of the first projection beam EL2a are located on the lower side of the Z direction and X The center side of the direction.

也就是說，第2投影光學系PL2，於Z方向，係成第2偏向構件106之反射部分、第1偏光分束器PBS1之反射部分、第1偏向構件105之反射部分、第2偏光分束器PBS2之反射部分的順序。因此，如圖7所示，第1偏向構件105在沿全成像視野CIF之方向(Z方向)，係配置在第1偏光分束器PBS1之反射部分與第2偏光分束器PBS2之反射部分之間。此外，第2投影光學系PL2中，與第1投影光學系PL1同樣的，第1偏光分束器PBS1及第2偏光分束器PBS2之反射部分之位置與第1偏向構件105及第2偏向構件106之位置，於第2光軸BX2之方向係不同位置。 In other words, the second projection optical system PL2 is, in the Z direction, a reflection portion of the second polarization member 106, a reflection portion of the first polarization beam splitter PBS1, a reflection portion of the first polarization member 105, and a second polarization light component. Sequence of the reflecting part of the beamer PBS2. Therefore, as shown in FIG. 7, the first deflection member 105 is arranged in the reflection direction (Z direction) of the full imaging field CIF in the reflection portion of the first polarization beam splitter PBS1 and the reflection portion of the second polarization beam splitter PBS2. between. In addition, in the second projection optical system PL2, similarly to the first projection optical system PL1, the positions of the reflective portions of the first polarizing beam splitter PBS1 and the second polarizing beam splitter PBS2, and the first polarizing member 105 and the second polarizing The position of the member 106 is different in the direction of the second optical axis BX2.

進一步的，不僅形成為與第1偏光分束器PBS1之反射部分、第2偏光分束器PBS2之反射部分、第1偏向構件105及第2偏向構件106，狹縫狀之第1射入視野、第1射出視野、第2射入視野及第2射出視野之4個視野(相當於圖5中所示之IR、Img1、Img2、PA)之任一者皆對應之長方形，並於沿全成像視野CIF之狹縫的寬度方向(Z方向)彼此分離配置。又，圖5中，奇數號之第1投影光學系PL1(及PL3、PL5)之場合，係從Z方向之上方起依序為照明區域IR、中間像Img2、投影區域PA、中間像Img1。另一方面，偶數番號之第2投影光學系PL2(及PL4、PL6)之場合，則係從Z方向之上方起依序為中間像Img2、照明區域IR、中間像Img1、投影區域PA。 Further, it is formed not only with the reflecting portion of the first polarizing beam splitter PBS1, the reflecting portion of the second polarizing beam splitter PBS2, the first polarizing member 105 and the second polarizing member 106, but also the slit-shaped first incident field of view Each of the four fields of vision (the first field of view, the second field of view, and the second field of view) (equivalent to IR, Img1, Img2, and PA shown in Figure 5) correspond to a rectangle, and The width directions (Z directions) of the slits of the imaging field CIF are separated from each other. In the case of the odd-numbered first projection optical system PL1 (and PL3 and PL5) in FIG. 5, the illumination region IR, the intermediate image Img2, the projection region PA, and the intermediate image Img1 are sequentially arranged from the top in the Z direction. On the other hand, in the case of the even-numbered second projection optical system PL2 (and PL4 and PL6), the intermediate image Img2, the illumination area IR, the intermediate image Img1, and the projection area PA are sequentially formed from above the Z direction.

如上所述，藉由使第1投影光學系PL1(及PL3、PL5)與第2投影光學系PL2(及PL4、PL6)之一部分為不同構成，可使從光罩M上之照明區域IR1(及IR3、IR5)之中心點至照明區域IR2(及IR4、IR6)之中心點的周長△Dm、與從基板P上之投影區域PA1(及PA3、PA5)之中心點至第2投影區域PA2(及 PA4、PA6)之中心點的周長△Ds為相同長度。此時，由於投影區域PA成為相對照明區域IR偏移於X方向(第2光軸BX2方向)之位置，因此光罩保持圓筒21之第1軸AX1與基板支承圓筒25之第2軸AX2即相應於投影區域PA相對照明區域IR於之偏移量，偏移於第2光軸BX2方向。 As described above, the first projection optical system PL1 (and PL3 and PL5) and the second projection optical system PL2 (and PL4 and PL6) have different structures, so that the illumination region IR1 ( Perimeter ΔDm from the center point of the illumination area IR2 (and IR4, IR6) to the center point of the illumination area IR2 (and IR4, IR6), and the center point from the projection area PA1 (and PA3, PA5) on the substrate P to the second projection area The perimeter ΔDs of the center point of PA2 (and PA4, PA6) is the same length. At this time, since the projection area PA is shifted from the illumination area IR in the X direction (second optical axis BX2 direction), the first axis AX1 of the mask holding cylinder 21 and the second axis of the substrate supporting cylinder 25 AX2 corresponds to the offset of the projection area PA from the illumination area IR, and is offset in the direction of the second optical axis BX2.

如以上所述，第2實施形態，可於反射光學系100，使藉由第2投影光束EL2b形成之投影像的成像位置與因來自第1投影光束EL2a之洩漏光所形成之不良像的成像位置，於基板P之掃描方向相異，以第1遮光板111遮蔽洩漏光。承上所述，由於反射光學系100可遮蔽投射於基板P上之洩漏光，因此能能良好的於基板P上投影出投影像。 As described above, in the second embodiment, in the reflection optical system 100, the imaging position of the projection image formed by the second projection beam EL2b and the defective image formed by the leakage light from the first projection beam EL2a can be formed. The positions are different in the scanning direction of the substrate P, and the first light shielding plate 111 shields the leaked light. As mentioned above, since the reflective optical system 100 can shield the leaked light projected on the substrate P, the projection image can be well projected on the substrate P.

又，第2實施形態，於反射光學系100，可分割第1投影光束EL2a及第2投影束EL2b之視野、亦即可分割第1射入視野、第1射出視野、第2射入視野及第2射出視野，亦可以是部分重複。換言之，第2實施形態由於無須將第1投影光束EL2a及第2投影束EL2b之視野如第1實施形態般加以分離，因此能提高反射光學系100之各種光學構件之配置自由度。 In the second embodiment, in the reflective optical system 100, the fields of view of the first projection beam EL2a and the second projection beam EL2b can be divided, that is, the first incident field of view, the first incident field of view, the second incident field of vision, and The second shot field of view may be partially repeated. In other words, in the second embodiment, since it is not necessary to separate the fields of view of the first projection beam EL2a and the second projection beam EL2b as in the first embodiment, it is possible to increase the degree of freedom in the arrangement of various optical components of the reflection optical system 100.

又，第2實施形態中，雖係在第1偏光分束器PBS1與折射透鏡71a之間設置1/2波長板104，但不限定於此構成。例如，亦可於第1偏光分束器PBS1與折射透鏡71a之間設置第11/4波長板，並在第2偏光分束器PBS2與折射透鏡71a之間設置第21/4波長板。此場合，亦可將第11/4波長板與第21/4波長板做成一體。 In the second embodiment, the 1/2 wavelength plate 104 is provided between the first polarizing beam splitter PBS1 and the refractive lens 71a, but the configuration is not limited to this. For example, a 11/4 wavelength plate may be provided between the first polarizing beam splitter PBS1 and the refractive lens 71a, and a 21/4 wavelength plate may be provided between the second polarizing beam splitter PBS2 and the refractive lens 71a. In this case, the 11/4 wavelength plate and the 21/4 wavelength plate may be integrated.

〔第3實施形態〕 [Third Embodiment]

其次，參照圖8說明第3實施形態之曝光裝置U3。又，第3實施形態之說明中，為避免與第2實施形態重複之記載，僅針對與第2實施形態相異之部分加以說明，對與第2實施形態相同之構成要素，係賦予與第2實施形態相同符號加以說明。圖8係顯示第3實施形態之曝光裝置之投影光學系之構成的圖。第2實施形態 之曝光裝置U3，於投影光學系PL之反射光學系100中，係使藉由第2投影光束EL2b形成之投影像的成像位置與以洩漏光形成之不良像的成像位置，於基板P之掃描方向相異。第3實施形態之曝光裝置U3，則於投影光學系PL之反射光學系130中，使藉由投影光束EL2形成之投影像的成像位置與以洩漏光形成之不良像的成像位置，於深度方向(焦點方向)相異。此外，圖8中，為簡化第3實施形態中之說明，僅顯示部分光學系131及反射光學系130。又，圖8中，係將光罩面P1與基板P配置成與XY面平行，使來自光罩面P1之第1投影光束EL2a之主光線與XY面垂直，使往基板P之第2投影光束EL2b之主光線與XY面垂直。 Next, an exposure apparatus U3 according to the third embodiment will be described with reference to FIG. 8. In addition, in the description of the third embodiment, in order to avoid duplication of description with the second embodiment, only the parts different from the second embodiment will be described, and the same constituent elements as those in the second embodiment are given to the first embodiment. In the second embodiment, the same symbols are used for explanation. FIG. 8 is a diagram showing a configuration of a projection optical system of an exposure apparatus according to a third embodiment. The exposure apparatus U3 of the second embodiment uses the reflection optical system 100 of the projection optical system PL to set the imaging position of the projection image formed by the second projection light beam EL2b and the imaging position of the defective image formed by the leaked light. The scanning directions of the substrates P are different. In the exposure apparatus U3 of the third embodiment, in the reflection optical system 130 of the projection optical system PL, the imaging position of the projection image formed by the projection light beam EL2 and the imaging position of the defective image formed by the leaked light are in the depth direction. (Focus direction) are different. In addition, in FIG. 8, to simplify the description in the third embodiment, only a part of the optical system 131 and the reflective optical system 130 are shown. In FIG. 8, the mask surface P1 and the substrate P are arranged parallel to the XY plane, so that the main ray of the first projection light beam EL2a from the mask surface P1 is perpendicular to the XY plane, and the second projection onto the substrate P is performed. The main ray of the light beam EL2b is perpendicular to the XY plane.

第3實施形態之投影光學系PL中，部分光學系131具備折射透鏡71a與第1凹面鏡72。又，由於折射透鏡71a及第1凹面鏡72之構成與第1實施形態、第2實施形態相同，因此省略說明。此外，部分光學系131中，可與第2實施形態同樣的，在折射透鏡71a與第1凹面鏡72之間配置複數個透鏡構件。 In the projection optical system PL of the third embodiment, a part of the optical system 131 includes a refractive lens 71 a and a first concave mirror 72. Since the configurations of the refractive lens 71a and the first concave mirror 72 are the same as those of the first embodiment and the second embodiment, description thereof will be omitted. In addition, in some optical systems 131, as in the second embodiment, a plurality of lens members may be arranged between the refractive lens 71a and the first concave mirror 72.

反射光學系130，具備第1偏光分束器(第1反射構件)PBS1、第2偏光分束器(第2反射構件)PBS2、1/2波長板104、第1偏向構件(第1光學構件及第3反射部)105、以及第2偏向構件(第2光學構件及第4反射部)106。又，第1偏光分束器PBS1、第2偏光分束器PBS2、1/2波長板104、第1偏向構件105及第2偏向構件106，與第2實施形態僅部分角度等相異而構成大致相同，因此省略其說明。 The reflection optical system 130 includes a first polarizing beam splitter (first reflecting member) PBS1, a second polarizing beam splitter (second reflecting member) PBS2, a 1/2 wavelength plate 104, and a first polarizing member (first optical member And third reflecting portion) 105 and a second deflecting member (second optical member and fourth reflecting portion) 106. In addition, the first polarizing beam splitter PBS1, the second polarizing beam splitter PBS2, the 1/2 wavelength plate 104, the first polarizing member 105, and the second polarizing member 106 are configured to differ from the second embodiment only by a partial angle or the like. Since they are almost the same, the description is omitted.

此處，圖8中，顯示了與從光罩面P1射入第1偏光分束器PBS1之第1投影光束EL2a，以第1偏光分束器PBS1之第1偏光分離面P10為中心成面對稱之假想的第1投影光束EL3。此時，成像出假想的第1投影光束EL3之面即為假想的光罩面P15。又，圖8中，顯示了與從第2偏光分束器PBS2射入第1偏向構件105之第1投影光束EL2a，以第1偏向構件105之第1反射面P12為中心成面對稱之假想的第1投影光束EL4。此時，成像出假想的第1投影光束EL4之面即為假想的中間 像面P16。 Here, FIG. 8 shows the first projection light beam EL2a incident on the first polarizing beam splitter PBS1 from the mask surface P1, with the first polarizing beam splitting surface P10 of the first polarizing beam splitter PBS1 as the center. The symmetrical first projection light beam EL3. At this time, the surface on which the imaginary first projection light beam EL3 is formed is the imaginary mask surface P15. In addition, FIG. 8 shows an imaginary plane symmetry with the first projection light beam EL2a incident from the second polarizing beam splitter PBS2 into the first deflection member 105 and centered on the first reflection surface P12 of the first deflection member 105. The first projection beam EL4. At this time, the surface on which the imaginary first projection light beam EL4 is formed is the imaginary intermediate image plane P16.

第1偏光分束器PBS1、第2偏光分束器PBS2、第1偏向構件105及第2偏向構件106係配置成藉由在第2偏光分束器PBS2反射之第2投影光束EL2b形成之投影像的成像位置、與在第2偏光分束器PBS2反射之第1投影光束EL2a之部分洩漏光所形成之不良像的成像位置，於焦點之深度方向(亦即，沿成像光束之主光線之方向)相異。具體而言，係以假想的第1投影光束EL3在假想的光罩面P15之投影像之成像位置於深度方向做得較深，而假想的第1投影光束EL4在假想的中間像面P16之不良像之成像位置於深度方向做得較淺之方式，配置第1偏光分束器PBS1、第2偏光分束器PBS2、第1偏向構件105及第2偏向構件106。 The first polarizing beam splitter PBS1, the second polarizing beam splitter PBS2, the first polarizing member 105, and the second polarizing member 106 are arranged so as to be a projection formed by the second projection light beam EL2b reflected by the second polarizing beam splitter PBS2. The imaging position of the image and the defective image formed by a part of the leakage light of the first projection beam EL2a reflected by the second polarizing beam splitter PBS2 is in the depth direction of the focus (that is, along the main ray of the imaging beam). Direction). Specifically, the imaging position of the imaginary first projection beam EL3 on the imaginary mask surface P15 is made deeper in the depth direction, and the imaginary first projection beam EL4 is on the imaginary intermediate image plane P16. A first polarizing beam splitter PBS1, a second polarizing beam splitter PBS2, a first polarizing member 105, and a second polarizing member 106 are arranged so that the imaging position of the defective image is shallow in the depth direction.

藉由作成此種配置，即能藉由在第2偏光分束器PBS2之第2偏光分離面P11反射之第2投影光束EL2b，於基板P上形成良好之投影像。此外，在第2偏光分束器PBS2之第2偏光分離面P11反射之第1投影光束EL2a之部分洩漏光，於基板P之前側形成光罩圖案之不良像。也就是說，藉由第2投影光束EL2b形成之投影像之成像位置為基板P上之投影區域PA，而以洩漏光形成之不良像之成像位置則在第2偏光分束器PBS2與基板P之間之位置。如此，由於不良像之成像位置位在第2偏光分束器PBS2與基板P之間，以投射至基板P上之洩漏光所形成之不良像成為極模糊，之狀態。 By making such an arrangement, a good projection image can be formed on the substrate P by the second projection light beam EL2b reflected on the second polarization splitting surface P11 of the second polarization beam splitter PBS2. In addition, a part of the first projection light beam EL2a reflected on the second polarization splitting surface P11 of the second polarization beam splitter PBS2 leaks light, and a defective image of a mask pattern is formed on the front side of the substrate P. That is, the imaging position of the projection image formed by the second projection beam EL2b is the projection area PA on the substrate P, and the imaging position of the defective image formed by the leaked light is between the second polarizing beam splitter PBS2 and the substrate P Between locations. In this way, since the imaging position of the defective image is located between the second polarizing beam splitter PBS2 and the substrate P, the defective image formed by the leaked light projected on the substrate P becomes extremely blurred.

如以上所述，第1偏光分束器PBS1、第2偏光分束器PBS2、第1偏向構件105、第2偏向構件106，於深度方向使投影像之成像位置與不良像之成像位置相異，因此反射光學系130之功能即係作為降低投射於基板P上之洩漏光之光量的光量降低部。 As described above, the first polarizing beam splitter PBS1, the second polarizing beam splitter PBS2, the first polarizing member 105, and the second polarizing member 106 make the imaging position of the projection image different from the imaging position of the defective image in the depth direction. Therefore, the function of the reflection optical system 130 is to serve as a light amount reducing unit that reduces the light amount of the leaked light projected on the substrate P.

又，將假想的第1投影光束EL3在假想的光罩面P15之投影像之成像位置於深度方向做得較深，而將假想的第1投影光束EL4在假想的中間像面P16之不良像之成像位置於深度方向做得較淺，以加長從光罩面P1至第1偏光分束器 PBS1之光路，縮短從第2偏光分束器PBS2至中間像面P7之光路。因此，能縮短從第2偏光分束器PBS2透過中間像面P7折返至第1偏光分束器PBS1之光路。 In addition, the imaging position of the virtual first projection beam EL3 on the virtual mask surface P15 is made deeper in the depth direction, and the virtual first projection beam EL4 is a defective image on the virtual intermediate image plane P16. The imaging position is made shallower in the depth direction to lengthen the optical path from the mask surface P1 to the first polarizing beam splitter PBS1 and shorten the optical path from the second polarizing beam splitter PBS2 to the intermediate image plane P7. Therefore, it is possible to shorten the optical path from the second polarizing beam splitter PBS2 to the first polarizing beam splitter PBS1 through the intermediate image plane P7.

以上，第3實施形態，於反射光學系130，可使藉由第2投影光束EL2b形成之投影像的成像位置、與以從第1投影光束EL2a之洩漏光所形成之不良像的成像位置，在焦深方向(沿成像光束之主光線之方向)相異。因此，由於反射光學系130可使投射至基板P上之洩漏光成為極模糊之狀態，因此能降低投射至基板P上之洩漏光之光量，進而降低對投射於基板P上之投影像造成之影響。 As described above, in the third embodiment, in the reflection optical system 130, the imaging position of the projection image formed by the second projection light beam EL2b and the imaging position of the defective image formed by the leakage light from the first projection light beam EL2a, They differ in the depth of focus (in the direction of the main ray of the imaging beam). Therefore, since the reflection optical system 130 can make the leaked light projected onto the substrate P extremely blurry, the amount of light leaked onto the substrate P can be reduced, thereby reducing the impact on the projected image projected on the substrate P. influences.

又，第3實施形態，由於無須如第1實施形態般使視野分離、或如第2實施形態般使對第2偏光分離面P11之射入位置相異，因此能提升在反射光學系130之設計自由度。 In addition, in the third embodiment, since it is not necessary to separate the field of view as in the first embodiment, or to make the incident position on the second polarized light separation plane P11 different as in the second embodiment, it can be improved in the reflection optical system 130. Design freedom.

〔第4實施形態〕 [Fourth Embodiment]

其次，參照圖9，說明第4實施形態之曝光裝置U3。又，第4實施形態之說明中，為避免重複之記載，僅針對與第1實施形態相異之部分加以說明，對與第1實施形態相同之構成要素，係賦予與第1實施形態相同符號加以說明。圖9係顯示第4實施形態之曝光裝置(基板處理裝置)之整體構成的圖。第1實施形態之曝光裝置U3，係將基板P以具有呈圓周面之支承面P2的基板支承圓筒25加以支承之構成，而第4實施形態之曝光裝置U3，則係將基板P支承為平面狀之構成。 Next, an exposure apparatus U3 of the fourth embodiment will be described with reference to FIG. 9. In addition, in the description of the fourth embodiment, in order to avoid repetitive descriptions, only the parts that are different from the first embodiment will be described. The same components as those in the first embodiment will be given the same symbols as in the first embodiment. Explain. FIG. 9 is a diagram showing the overall configuration of an exposure apparatus (substrate processing apparatus) according to a fourth embodiment. The exposure apparatus U3 of the first embodiment is configured to support the substrate P by a substrate support cylinder 25 having a support surface P2 having a circumferential surface, and the exposure apparatus U3 of the fourth embodiment is configured to support the substrate P as Flat structure.

第4實施形態之曝光裝置U3中，基板支承機構150具有懸掛基板P之一對驅動輥151。一對驅動輥151藉由第2驅動部26旋轉，使基板P往掃描方向移動。 In the exposure apparatus U3 of the fourth embodiment, the substrate supporting mechanism 150 includes a pair of driving rollers 151 that suspend the substrate P. The pair of driving rollers 151 are rotated by the second driving portion 26 to move the substrate P in the scanning direction.

因此，基板支承機構150將從驅動輥R4搬送而來之基板P，從一方之驅動輥151導引至另一方之驅動輥151，據以將基板P懸掛於一對驅動輥151。基板支承機構150，藉由第2驅動部26使一對驅動輥151旋轉，據以將懸掛在一對驅動輥151之基板P引導至驅動輥R5。 Therefore, the substrate supporting mechanism 150 guides the substrate P transferred from the driving roller R4 from one driving roller 151 to the other driving roller 151, and suspends the substrate P from the pair of driving rollers 151. The substrate supporting mechanism 150 rotates the pair of driving rollers 151 by the second driving unit 26, thereby guiding the substrate P suspended from the pair of driving rollers 151 to the driving roller R5.

此時，圖9之基板P成為實質上與XY面平行之平面，因此投射於基板P之第2投影光束EL2b之主光線，即與XY面垂直。在投射於基板P之第2投影光束EL2b之主光線與XY面垂直之場合，依據第2投影光束EL2b之主光線，投影光學系PL在第2偏光分束器PBS2之第2偏光分離面P11的角度亦適宜加以變更。 At this time, the substrate P in FIG. 9 becomes a plane substantially parallel to the XY plane. Therefore, the main ray of the second projection light beam EL2b projected on the substrate P is perpendicular to the XY plane. When the main ray of the second projection beam EL2b projected on the substrate P is perpendicular to the XY plane, the projection optical system PL is on the second polarization separation plane P11 of the second polarization beam splitter PBS2 based on the main ray of the second projection beam EL2b. It is also appropriate to change the angle.

又，第4實施形態中亦與先前之圖2同樣的，在XZ面內觀察時，從光罩M上之照明區域IR1(及IR3、IR5)之中心點至照明區域IR2(及IR4、IR6)之中心點的周長與順著支承面P2之基板P上之投影區域PA1(及PA3、PA5)之中心點至第2投影區域PA2(及PA4、PA6)之中心點的周長，係設定成實質相等。 In the fourth embodiment, similar to the previous FIG. 2, when viewed in the XZ plane, from the center point of the illumination area IR1 (and IR3 and IR5) on the mask M to the illumination area IR2 (and IR4 and IR6). ) And the perimeter of the center point of the projection area PA1 (and PA3, PA5) on the substrate P along the support surface P2 to the center point of the second projection area PA2 (and PA4, PA6), are Set to be substantially equal.

圖9之曝光裝置U3中，亦係由下位控制裝置16以既定旋轉速度比使光罩保持圓筒21與一對驅動輥151同步旋轉，據以將形成在光罩M之光罩面P1之光罩圖案之像，連續反覆的投影曝光至懸掛在一對驅動輥151之基板P表面。 In the exposure device U3 of FIG. 9, the lower control device 16 also rotates the photomask holding cylinder 21 and a pair of driving rollers 151 in a predetermined rotation speed ratio, thereby forming the photomask surface P1 on the photomask M. The image of the mask pattern is continuously and repeatedly projected onto the surface of the substrate P suspended from the pair of driving rollers 151.

如以上所述，第4實施形態，即使在基板P被支承為平面狀之場合，由於能降低洩漏光對形成在基板P上之投影像的影響，因此能良好的將投影像投影於基板P上。 As described above, in the fourth embodiment, even when the substrate P is supported in a flat shape, the influence of the leakage light on the projection image formed on the substrate P can be reduced, so the projection image can be well projected on the substrate P. on.

又，以上各實施形態中，作為圓筒狀之光罩M雖係使用反射型，但亦可以是穿透型之圓筒光罩。此場合，在具有一定厚度之穿透圓筒體(石英管等)之外周面形成由遮光膜構成之圖案，將從穿透圓筒體之內部朝外周面，對圖3左側所示之複數個照明區域IR1~IR6之各個投射照明光之照明光學系及光源部，設在穿透圓筒體之內部即可。在進行此種穿透照明之情形時，可省略圖2、圖4、圖7所示之偏向分束器PBS及1/4波長板41等。 In addition, in the above embodiments, although the cylindrical photomask M is a reflection type, it may be a transmissive cylindrical photomask. In this case, a pattern made of a light-shielding film is formed on the outer peripheral surface of the penetrating cylindrical body (quartz tube, etc.) having a certain thickness, and the inner surface of the penetrating cylindrical body faces the outer peripheral surface. Each of the illumination optical system and the light source part of each illumination region IR1 to IR6 that project illumination light may be provided inside the cylindrical body. In the case of such penetrating illumination, the deflection beam splitter PBS and the 1/4 wavelength plate 41 shown in Figs. 2, 4, and 7 can be omitted.

再者，各實施形態中雖係使用圓筒狀之光罩M，但亦可以是典型的平面光罩。此場合，將於圖2說明之圓筒狀光罩M之半徑Rm視為無限大，以來自光罩圖案之成像光束之主光線與光罩面垂直之方式，例如，設定圖2中之第1偏向構件76之反射面P3之角度即可。 In addition, although a cylindrical mask M is used in each embodiment, it may be a typical planar mask. In this case, the radius Rm of the cylindrical mask M illustrated in FIG. 2 is considered to be infinite, and the main ray of the imaging beam from the mask pattern is perpendicular to the mask surface. For example, the first The angle of the deflection surface P3 of the deflection member 76 may be sufficient.

又，以上各實施形態中，雖係使用形成有與待投影至基板P上之圖案對應之靜態圖案的光罩(硬光罩)，但亦可以是在複數個投影光學模組PL1~PL6之各照明區域IR1~IR6之位置(各投影光學模組之物面位置)，配置以多數之可動微反射鏡構成之DMD(微反射鏡元件Micro Mirror Device)及SLM(空間光變調元件)等，與基板P之搬送移動同步由DMD及SLM生成動態圖案光、一邊將圖案傳印至基板P之無光罩曝光方式。此場合，生成動態圖案之DMD及SLM即相當於光罩構件。 Furthermore, in the above embodiments, although a photomask (hard mask) having a static pattern corresponding to a pattern to be projected on the substrate P is used, it may also be used in a plurality of projection optical modules PL1 to PL6. The positions of each of the illumination areas IR1 to IR6 (the position of the object surface of each projection optical module) are arranged with DMD (Micro Mirror Device) and SLM (Spatial Light Modulation Element) composed of a plurality of movable micromirrors. A maskless exposure method in which dynamic pattern light is generated by DMD and SLM in synchronization with the conveyance and movement of the substrate P, and the pattern is transmitted to the substrate P. In this case, the DMD and SLM that generate the dynamic pattern are equivalent to the mask member.

Claims (15)

一種投影光學裝置，其用於一面使於第1方向細長延伸之設定在光罩上之照明區域中之光罩圖案之像成像於設定在基板上之投影區域，一面藉由往與上述光罩及上述基板之第1方向交叉之第2方向之掃描，將上述光罩圖案之像曝光於上述基板，其具備：折射透鏡群，其設於上述光罩與上述基板之間，具有以延伸於上述第2方向之光軸為中心點之圓形之成像視野；反射光學構件，其配置於該折射透鏡群形成之光瞳面；第1偏光分束器，其配置於對應自上述折射透鏡群之上述成像視野中之上述中心點往上述第2方向偏心之第1像高部分之位置，將來自上述照明區域之成像光束反射向上述折射透鏡群；第2偏光分束器，其配置於對應隔著上述折射透鏡群之上述成像視野中之上述中心點而於上述第1像高部分之相反側之第2像高部分之位置，將從上述折射透鏡群射出之成像光束反射向上述投影區域；波長板，其改變成像光束之偏光狀態，該成像光束係自上述第1偏光分束器射出且依序通過上述折射透鏡群、上述反射光學構件、及上述折射透鏡群後射入上述第2偏光分束器；及偏向構件，其使穿透上述第2偏光分束器之成像光束反射導向上述第1偏光分束器，並以在上述第2偏光分束器與上述第1偏光分束器之間形成與上述照明區域及上述投影區域之各個共軛之中間像面之方式使光路偏向；將自上述第2偏光分束器至上述投影區域之光路設定成較自上述第2偏光分束器至上述中間像面之光路長，並將自上述照明區域至上述第1偏光分束器之光路設定成較自上述中間像面至上述第1偏光分束器之光路長。     A projection optical device is used to form an image of a mask pattern in an illumination area set on a mask elongated in the first direction while imaging an image of a mask pattern set on a substrate, while contacting the above mask Scanning in the second direction crossing the first direction of the substrate and exposing the image of the photomask pattern to the substrate, which includes a refractive lens group provided between the photomask and the substrate, and A circular imaging field of view in which the optical axis in the second direction is a center point; a reflective optical member is disposed on a pupil surface formed by the refractive lens group; a first polarizing beam splitter is disposed corresponding to the refractive lens group The position of the first image height part of the center point in the imaging field of view that is eccentric to the second direction reflects the imaging beam from the illumination area toward the refractive lens group; the second polarizing beam splitter is arranged correspondingly The position of the second image height portion on the side opposite to the first image height portion through the center point in the imaging field of view of the refractive lens group, is formed from the refractive lens group. The image beam is reflected toward the above-mentioned projection area; the wavelength plate changes the polarization state of the imaging beam, and the imaging beam is emitted from the first polarizing beam splitter and sequentially passes through the refractive lens group, the reflective optical member, and the refractive lens After the group enters the second polarizing beam splitter; and a deflecting member that reflects the imaging beam that has passed through the second polarizing beam splitter and guides the first polarizing beam splitter to the second polarizing beam splitter; The light path is deflected by forming an intermediate image plane with each of the illuminating area and the projection area with the first polarizing beam splitter; the light path from the second polarizing beam splitter to the projection area is set to It is longer than the optical path from the second polarized beam splitter to the intermediate image plane, and the optical path from the illuminated area to the first polarized beam splitter is set to be longer than that from the intermediate image plane to the first polarized beam splitter. Light is long.     如請求項1所述之投影光學裝置，其中， 自上述照明區域射入上述第1偏光分束器之成像光束被設定成第1偏光狀態；上述第1偏光分束器具有偏光分離面，該偏光分離面使來自上述照明區域之上述第1偏光狀態之成像光束反射向上述折射透鏡群，並使藉由上述波長板而變化成與上述第1偏光狀態相異之第2偏光狀態之成像光束穿透；上述第2偏光分束器具有偏光分離面，該偏光分離面使從上述折射透鏡群射出之上述第1偏光狀態之成像光束反射向上述投影區域，並使藉由上述波長板而變化成上述第2偏光狀態之成像光束穿透。     The projection optical device according to claim 1, wherein the imaging beam incident from the illumination area into the first polarizing beam splitter is set to a first polarized state; the first polarizing beam splitter has a polarized light separating surface, and The polarization separation surface reflects the imaging beam in the first polarization state from the illumination area toward the refractive lens group, and changes the imaging beam in the second polarization state different from the first polarization state by the wavelength plate. Penetrating; the second polarizing beam splitter has a polarized light separating surface that reflects the imaging light beam in the first polarized state emitted from the refractive lens group toward the projection area and changes by the wavelength plate The imaging beam in the second polarization state is transmitted through.     如請求項2所述之投影光學裝置，其中，上述偏向構件具備：第1反射面，其將穿透上述第2偏光分束器且與上述光軸平行行進之上述第2偏光狀態之成像光束以朝向上述光軸之方式反射；及第2反射面，其將被該第1反射面反射之上述第2偏光狀態之成像光束以與上述光軸平行且朝向上述第1偏光分束器之方式反射。     The projection optical device according to claim 2, wherein the polarizing member includes a first reflecting surface that passes through the second polarizing beam splitter and travels in parallel with the optical axis of the imaging beam in the second polarized state. Reflected toward the optical axis; and a second reflecting surface that causes the imaging beam in the second polarized state reflected by the first reflecting surface to be parallel to the optical axis and toward the first polarizing beam splitter reflection.     如請求項3所述之投影光學裝置，其中，上述中間像面係形成在自上述第1反射面朝向上述第2反射面之上述第2偏光狀態之成像光束之光路中。     The projection optical device according to claim 3, wherein the intermediate image plane is formed in an optical path of the imaging beam in the second polarized state from the first reflection surface toward the second reflection surface.     如請求項2至4中任一項所述之投影光學裝置，其中，於上述第1偏光狀態與上述第2偏光狀態互相正交之直線偏光時，上述波長板係配置於上述第1偏光分束器與上述折射透鏡群之間之光路中之1/2波長板。     The projection optical device according to any one of claims 2 to 4, wherein, when the first polarized state and the second polarized state are linearly polarized with each other orthogonal to each other, the wavelength plate is disposed in the first polarized light component. A 1/2 wavelength plate in the optical path between the beam splitter and the above-mentioned refractive lens group.     一種掃描曝光裝置，其一面對於第1方向細長延伸之設定在光罩上之照明區域照射照明光，且將上述照明區域中之光罩圖案之一部分之像成像於透過投影光學系設定在基板上之投影區域，一面於與上述第1方向交叉之第2方向上掃描上述光罩及上述基板，且將上述光罩圖案之像曝光至上述基板，其 中，上述投影光學系由於上述光罩及上述基板之間具有以延伸於上述第2方向之光軸為中心點之圓形之成像視野之折射透鏡群、及配置於光瞳面之反射光學構件構成；具備：第1偏光分束器，其配置於對應自上述折射透鏡群之上述成像視野中之上述中心點往上述第2方向偏心之第1像高部分之位置，將來自上述照明區域之成像光束反射向上述折射透鏡群；第2偏光分束器，其配置於對應隔著上述折射透鏡群之上述成像視野中之上述中心點而於上述第1像高部分之相反側之第2像高部分之位置，將從上述折射透鏡群射出之成像光束反射向上述投影區域；波長板，其改變成像光束之偏光狀態，該成像光束係自上述第1偏光分束器射出且依序通過上述折射透鏡群、上述反射光學構件、及上述折射透鏡群後射入上述第2偏光分束器；及偏向構件，其使穿透上述第2偏光分束器之成像光束反射導向上述第1偏光分束器，並以在上述第2偏光分束器與上述第1偏光分束器之間形成與上述照明區域及上述投影區域之各個共軛之中間像面之方式使光路偏向；將自上述第2偏光分束器至上述投影區域之光路設定成較自上述第2偏光分束器至上述中間像面之光路長。     A scanning exposure device in which one side irradiates illumination light to an illumination area set on a mask elongated in the first direction, and an image of a part of the mask pattern in the illumination area is formed on a substrate through a projection optical system. The projection area scans the photomask and the substrate in a second direction that intersects the first direction, and exposes an image of the photomask pattern to the substrate, wherein the projection optics is based on the photomask and the A refractive lens group having a circular imaging field of vision with the optical axis extending in the second direction as a center point between the substrates, and a reflective optical member disposed on the pupil surface; and includes: a first polarizing beam splitter, Arranged at a position corresponding to the first image height portion decentered from the center point in the imaging field of view of the refractive lens group toward the second direction, and reflecting the imaging beam from the illumination area toward the refractive lens group; second polarized light A beam splitter arranged on the opposite side of the first image height portion corresponding to the center point in the imaging field of view through the refractive lens group The position of the second image height part reflects the imaging beam emitted from the refractive lens group to the projection area; the wavelength plate changes the polarization state of the imaging beam, and the imaging beam is emitted from the first polarizing beam splitter and Passes through the refractive lens group, the reflective optical member, and the refractive lens group in order and enters the second polarizing beam splitter; and a deflecting member that reflects and guides an imaging beam that has passed through the second polarizing beam splitter to the above A first polarizing beam splitter, and deflecting the optical path in such a manner that an intermediate image plane is formed between each of the second polarizing beam splitter and the first polarizing beam splitter and each conjugate of the illumination area and the projection area; The optical path from the second polarizing beam splitter to the projection area is set to be longer than the optical path from the second polarizing beam splitter to the intermediate image plane.     如請求項6所述之掃描曝光裝置，其中，自上述照明區域射入上述第1偏光分束器之成像光束被設定成第1偏光狀態；上述第1偏光分束器具有偏光分離面，該偏光分離面使來自上述照明區域之上述第1偏光狀態之成像光束反射向上述折射透鏡群，並使藉由上述波長板而變 化成與上述第1偏光狀態相異之第2偏光狀態之成像光束穿透；上述第2偏光分束器具有偏光分離面，該偏光分離面使從上述折射透鏡群射出之上述第1偏光狀態之成像光束反射向上述投影區域，並使藉由上述波長板而變化成上述第2偏光狀態之成像光束穿透。     The scanning exposure apparatus according to claim 6, wherein the imaging beam that is incident from the illumination region into the first polarizing beam splitter is set to a first polarized state; the first polarizing beam splitter has a polarized light separating surface, and The polarization separation surface reflects the imaging beam in the first polarization state from the illumination area toward the refractive lens group, and changes the imaging beam in the second polarization state different from the first polarization state by the wavelength plate. Penetrating; the second polarizing beam splitter has a polarized light separating surface that reflects the imaging light beam in the first polarized state emitted from the refractive lens group toward the projection area and changes by the wavelength plate The imaging beam in the second polarization state is transmitted through.     如請求項7所述之掃描曝光裝置，其進一步將自上述光罩上之上述照明區域至上述第1偏光分束器之光路設定成較自上述中間像面至上述第1偏光分束器之光路長。     The scanning exposure device according to claim 7, further setting the light path from the illumination area on the reticle to the first polarizing beam splitter to be larger than that from the intermediate image plane to the first polarizing beam splitter. The light path is long.     如請求項8所述之掃描曝光裝置，其中，上述偏向構件具備：第1反射面，其將穿透上述第2偏光分束器且與上述光軸平行行進之上述第2偏光狀態之成像光束以朝向上述光軸之方式反射；及第2反射面，其將被該第1反射面反射之上述第2偏光狀態之成像光束以與上述光軸平行且朝向上述第1偏光分束器之方式反射。     The scanning exposure apparatus according to claim 8, wherein the polarizing member includes a first reflecting surface that passes through the second polarizing beam splitter and travels in parallel with the optical axis of the imaging beam in the second polarized state. Reflected toward the optical axis; and a second reflecting surface that causes the imaging beam in the second polarized state reflected by the first reflecting surface to be parallel to the optical axis and toward the first polarizing beam splitter reflection.     如請求項9所述之掃描曝光裝置，其中，上述中間像面係形成在自上述第1反射面朝向上述第2反射面之上述第2偏光狀態之成像光束之光路中。     The scanning exposure apparatus according to claim 9, wherein the intermediate image plane is formed in an optical path of the imaging beam in the second polarized state from the first reflection surface toward the second reflection surface.     如請求項7至10中任一項所述之掃描曝光裝置，其中，於上述第1偏光狀態與上述第2偏光狀態互相正交之直線偏光時，上述波長板係配置於上述第1偏光分束器與上述折射透鏡群之間之光路中之1/2波長板。     The scanning exposure device according to any one of claims 7 to 10, wherein, in the case where the first polarization state and the second polarization state are linearly polarized with each other orthogonal to each other, the wavelength plate is disposed in the first polarization beam splitter. A 1/2 wavelength plate in the optical path between the beam splitter and the above-mentioned refractive lens group.     如請求項6至10中任一項所述之掃描曝光裝置，其中，上述投影區域係設定成上述基板之掃描方向亦即上述第2方向之長度與上述基板之寬度方向亦即上述第1方向之長度之比，亦即掃描方向之長度/寬度方向之長度為1/4以下之矩形區域。     The scanning exposure device according to any one of claims 6 to 10, wherein the projection area is set to a length in the scanning direction of the substrate, that is, the second direction, and a width direction of the substrate, that is, the first direction The ratio of the lengths is a rectangular area whose length in the scanning direction / length in the width direction is 1/4 or less.     如請求項6至10中任一項所述之掃描曝光裝置，其中， 上述光罩係設成可繞延伸於上述第1方向之第1軸旋轉，並沿著距上述第1軸一定半徑之圓筒狀外周面保持上述圖案之圓筒狀光罩。     The scanning exposure device according to any one of claims 6 to 10, wherein the photomask is provided to be rotatable about a first axis extending in the first direction and along a radius of a certain distance from the first axis. A cylindrical mask having a cylindrical outer peripheral surface holding the above pattern.     如請求項13所述之掃描曝光裝置，其中，上述基板係於上述第2方向具有長條可撓性之長條基板；並進一步具備基板支承圓筒，該基板支承圓筒設為可繞與上述第1軸平行之第2軸旋轉，且一面以距上述第2軸一定半徑之圓筒狀支承面之一部分支承上述長條基板，一面使上述長條基板在上述投影區域之位置於長條方向亦即上述第2方向移動。     The scanning exposure apparatus according to claim 13, wherein the substrate is a long substrate having a long flexibility in the second direction, and further includes a substrate support cylinder configured to be wound around the substrate. The first axis is parallel to the second axis, and the long substrate is supported by a part of a cylindrical support surface with a certain radius from the second axis, while the long substrate is positioned at a long position in the projection area. The direction is the second direction.     一種元件製造方法，其於基板上形成元件，包含：於上述基板之表面形成感光性機能層之動作；使用請求項6至14中任一項所述之掃描曝光裝置，於上述基板之上述感光性機能層掃描曝光與上述元件對應之上述光罩圖案之像之動作；藉由對曝光後之上述基板進行濕式處理，於上述基板之表面形成對應上述光罩圖案之元件之動作。     An element manufacturing method comprising forming an element on a substrate, comprising: forming a photosensitive functional layer on a surface of the substrate; and using the scanning exposure device according to any one of claims 6 to 14 to perform the photosensitive on the substrate. The action of the functional layer scans and exposes the image of the mask pattern corresponding to the element; by performing wet processing on the substrate after exposure, the action of forming the element corresponding to the mask pattern on the surface of the substrate.    
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