TW201843457A - Probe head with vertical probe comprising an upper guide plate unit and a lower guide plate unit as well as a vertical probe - Google Patents
Probe head with vertical probe comprising an upper guide plate unit and a lower guide plate unit as well as a vertical probe Download PDFInfo
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- TW201843457A TW201843457A TW106115008A TW106115008A TW201843457A TW 201843457 A TW201843457 A TW 201843457A TW 106115008 A TW106115008 A TW 106115008A TW 106115008 A TW106115008 A TW 106115008A TW 201843457 A TW201843457 A TW 201843457A
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本發明係與探針卡之探針頭（probe head）有關，特別是關於一種具有垂直式探針（vertical probe）之探針頭。The present invention relates to a probe head of a probe card, and more particularly to a probe head having a vertical probe.
請參閱第1圖，第1圖為一種習用之具有垂直式探針11之探針頭10的剖視示意圖，探針頭10實際上設置有相當多根位置對應待測物之電性接點的探針11，為了方便說明，在第1圖以及本案其他顯示探針頭之圖式中，僅繪示出探針頭10的一小部分並且僅顯示出其中兩根探針。Referring to FIG. 1 , FIG. 1 is a schematic cross-sectional view of a conventional probe head 10 having a vertical probe 11 . The probe head 10 is actually provided with a plurality of electrical contacts corresponding to the object to be tested. For convenience of explanation, in the drawings of Fig. 1 and other display probe heads of the present invention, only a small portion of the probe head 10 is shown and only two of the probes are shown.
該探針頭10主要包含有一或多個上導板15、一或多個下導板17，以及多數個具有特定撓性的金屬探針11。各該上導板15具有多個上穿孔16，各該下導板17具有多個下穿孔18，各該探針11具有一穿設於至少一上穿孔16之針尾12、一穿設於至少一下穿孔18之針頭13，以及一連接針尾12與針頭13且位於上、下導板15、17之間的針身14。該針尾12頂部係凸露於上導板15上方，用以電性導通地頂抵一空間轉換器（space transformer）或者電路母板之電性接點。該針頭13之針尖部係凸露於下導板17下方，用以電性導通地點觸待測物之電性接點。The probe head 10 mainly comprises one or more upper guide plates 15, one or more lower guide plates 17, and a plurality of metal probes 11 having a specific flexibility. Each of the upper guide plates 15 has a plurality of upper through holes 16 , and each of the lower guide plates 17 has a plurality of lower through holes 18 , and each of the probes 11 has a needle tail 12 that is disposed at least one of the upper through holes 16 and is disposed at least The needle 13 of the perforation 18 is seen, and a needle body 14 connecting the needle tail 12 and the needle 13 between the upper and lower guide plates 15, 17. The top of the tail 12 is exposed above the upper guide 15 for electrically conducting against a space transformer or an electrical contact of the circuit board. The tip end of the needle 13 is exposed below the lower guide 17 for electrically contacting the electrical contact of the object to be tested.
各該探針11在尚未安裝於上、下導板15、17時係呈直線狀，在探針頭10之組裝過程中，係先使上、下導板15、17的上、下穿孔16、18位置相互對應，再將各直線狀探針11穿過位置相互對應之上、下穿孔16、18，然後使上導板15與下導板17水平地相對位移，使得同一探針11穿過之上穿孔16與下穿孔18水平錯位，如此一來，各該探針11之針尾12與針頭13即從原本位在同一垂直軸線之狀態錯開而呈第1圖所示之非位在同一垂直軸線之狀態，且各該探針11之針身14彈性彎曲變形而呈第1圖所示之挫曲狀。藉此，各該探針11可藉由其針尾12與針頭13分別抵靠於上穿孔16與下穿孔18的孔壁而保持定位在上、下導板15、17之中而不掉落，而且，當針頭13之針尖部點觸待測物時，探針11之針身14可彈性彎曲變形以緩衝來自待測物的反作用力。Each of the probes 11 is linear when not attached to the upper and lower guide plates 15, 17. In the assembly process of the probe head 10, the upper and lower perforations 16 of the upper and lower guide plates 15 and 17 are first made. The 18 positions correspond to each other, and then the linear probes 11 pass through the positions corresponding to each other, the lower through holes 16, 18, and then the upper guide plate 15 and the lower guide plate 17 are horizontally displaced relative to each other, so that the same probe 11 is worn. The upper through hole 16 and the lower through hole 18 are horizontally displaced, so that the needle tail 12 of each of the probes 11 and the needle 13 are offset from the original position on the same vertical axis, and the non-position shown in FIG. 1 is in the same position. In the state of the vertical axis, the needle body 14 of each of the probes 11 is elastically bent and deformed to have a buckling shape as shown in Fig. 1. Thereby, each of the probes 11 can be positioned in the upper and lower guide plates 15 and 17 without falling by the needle tail 12 and the needle head 13 respectively abutting against the hole walls of the upper through hole 16 and the lower through hole 18, Moreover, when the tip end of the needle 13 touches the object to be tested, the needle body 14 of the probe 11 can be elastically bent and deformed to buffer the reaction force from the object to be tested.
然而，當需進行換針或維修而將上、下導板15、17復歸到讓探針11呈現直線狀態的相對位置時，容易發生探針11從上、下導板15、17掉落的情形。或者，將探針頭10自其上方之空間轉換器或電路母板拆離時，有些探針11之針尾12頂部會黏在空間轉換器或電路母板，造成探針11隨著空間轉換器或電路母板脫離上、下導板15、17。此外，在針頭13之針尖部反覆點觸待測物的檢測過程中，或者清潔元件與針頭13之針尖部摩擦接觸的清針過程中，因為探針11的彈性變形運動，有時會發生針頭13脫離下導板17之問題。However, when the upper and lower guide plates 15, 17 are to be returned to the relative position where the probe 11 is in a straight state when needle changing or maintenance is required, the probe 11 is likely to fall from the upper and lower guide plates 15, 17. situation. Alternatively, when the probe head 10 is detached from the space converter or the circuit board above it, some of the tips 11 of the probes 11 will stick to the space converter or the circuit board, causing the probe 11 to follow the space converter. Or the circuit board is separated from the upper and lower guide plates 15, 17. Further, during the detection of the needle tip portion of the needle 13 repeatedly touching the object to be tested, or during the needle cleaning process in which the cleaning member is in frictional contact with the needle tip portion of the needle 13, the needle sometimes occurs due to the elastic deformation movement of the probe 11. 13 The problem of leaving the lower guide 17 is removed.
為了解決上述探針脫出或掉落的問題，已有業者利用微機電技術製造探針，並在針尾製造出一呈凸出狀之擋止結構，使得探針藉由其擋止結構來達到防止掉落、脫出之效果。然而，以微機電技術製造探針不但有製程耗時且成本昂貴之問題，而且，呈凸出狀之擋止結構亦不利於達成微小針距（fine pitch）。In order to solve the problem of the above-mentioned probe falling out or falling, the prior art has used the microelectromechanical technology to manufacture the probe, and a protruding structure is formed at the end of the needle, so that the probe can be realized by the stop structure thereof. Prevent the effects of falling and falling out. However, the manufacture of probes by MEMS is not only time consuming and costly, but also a protruding stop structure is not conducive to achieving a fine pitch.
請參閱我國專利公開編號TW201636622A之專利案，其所提供之探針的針尾亦具有擋止設計，該探針之針尾在對應上導板下方位置設有一凸出元件，可防止探針之針尾及針頭向上脫出上導板及下導板，該探針之針尾頂部亦可設有一直徑大於導孔直徑之接觸頭，以避免探針之針尾及針頭向下脫出上導板及下導板。然而，如此之探針不論是利用微機電技術或機械加工來形成出該凸出元件及該接觸頭，都仍有製程耗時以及不利於達成微小針距之缺點，而且，要移除探針時，不但只能往上抽出探針而無法往下抽出探針，該探針更因為其凸出元件容易卡抵於上導板而難以順利地往上抽出，通常需要旋轉或晃動探針，才能將探針往上抽出。Please refer to the patent of the Chinese Patent Publication No. TW201636622A. The needle tail of the probe provided also has a stop design. The needle end of the probe is provided with a protruding component at a position below the corresponding upper guide plate to prevent the needle end of the probe and The needle is upwardly pulled out of the upper guide plate and the lower guide plate, and the tip end of the probe can also be provided with a contact head having a diameter larger than the diameter of the guide hole to prevent the probe tail and the needle from coming off the upper guide plate and the lower guide plate. . However, such a probe, whether using microelectromechanical technology or machining to form the protruding element and the contact head, has a process time consuming and is disadvantageous for achieving a small stitch length, and the probe is removed. When the probe is pulled out, the probe cannot be pulled out, and the probe is difficult to smoothly pull up because the protruding member is easily caught on the upper guide plate, and it is usually necessary to rotate or shake the probe. The probe can be pulled up.
有鑑於上述缺失，本發明之主要目的在於提供一種具有垂直式探針之探針頭，其探針可避免自導板脫離或掉落，且容易製造，並利於達成微小針距，此外，要移除探針時，探針係便於往上抽出及往下抽出。In view of the above-mentioned deficiencies, the main object of the present invention is to provide a probe head having a vertical probe, which can prevent the detachment or falling of the self-guide plate, is easy to manufacture, and facilitates the achievement of a small stitch length. When the probe is removed, the probe is easily pulled up and pulled out.
為達成上述目的，本發明所提供之具有垂直式探針之探針頭包含有一上導板單元、一下導板單元，以及一垂直式探針。該上導板單元包含有至少一上導板，以及設於該至少一上導板之至少一上穿孔。該下導板單元包含有至少一下導板，以及設於該至少一下導板之至少一下穿孔。該垂直式探針係呈圓柱狀並具有一穿設於該上導板單元之上穿孔的針尾、一穿設於該下導板單元之下穿孔的針頭，以及一連接該針尾與該針頭之針身，該針尾具有一上擋止部、一下擋止部，以及一位於該上擋止部與該下擋止部之間的頸部，該上擋止部之外徑及該下擋止部之外徑等於該針身之外徑、大於該頸部之外徑，且小於該上穿孔之孔徑及該下穿孔之孔徑，該上導板單元係部分位於該上擋止部與該下擋止部之間而限制該頸部穿設於該上導板單元之上穿孔。To achieve the above object, a probe head having a vertical probe provided by the present invention includes an upper guide unit, a lower guide unit, and a vertical probe. The upper guide unit includes at least one upper guide plate and at least one upper perforation provided on the at least one upper guide plate. The lower guide plate unit includes at least a lower guide plate, and at least a lower through hole provided on the at least one lower guide plate. The vertical probe has a cylindrical shape and has a needle tail penetrating through the upper surface of the upper guide unit, a needle penetrating through the lower surface of the lower guide unit, and a needle connecting the needle tail and the needle. a needle body having an upper stop portion, a lower stop portion, and a neck portion between the upper stop portion and the lower stop portion, an outer diameter of the upper stop portion and the lower stop portion The outer diameter of the portion is equal to the outer diameter of the needle body, larger than the outer diameter of the neck portion, and smaller than the aperture of the upper perforation and the aperture of the lower perforation, the upper guide unit is partially located at the upper stop portion and the lower portion Between the stoppers, the neck is restricted from being pierced through the upper guide unit.
藉此，本發明之垂直式探針相當容易製造，僅需利用一般的圓柱狀直線針加工（例如蝕刻）出內縮之該頸部即可。由於該垂直式探針各部位之外徑小於上、下穿孔之孔徑，且該上導板單元可在供該探針穿設後才藉由水平位移而部分位於該探針之上、下擋止部之間，因此，本發明之探針頭不但在組裝時便於植針，要移除探針時，只要稍微移動針尾，即可使上擋止部或下擋止部不受上導板單元阻擋，進而可將探針自上導板單元上方往上抽出或者自下導板單元下方往下抽出。在維修探針頭或更換探針時，該上導板單元仍可維持部分位於上、下擋止部之間的狀態，使得探針之頸部被限制在上穿孔內，因此該探針可避免自上、下導板單元脫離或掉落。此外，由於本發明之垂直式探針達到前述防止脫離或掉落之功效，係因為具有內縮的頸部，而不需具有凸出的擋止部位，因此可適用於現有之上、下導板，並利於達成微小針距之需求。Thereby, the vertical probe of the present invention is relatively easy to manufacture, and it is only necessary to process (for example, etch) the neck portion which is indented by a general cylindrical straight needle. Since the outer diameter of each portion of the vertical probe is smaller than the aperture of the upper and lower perforations, and the upper guide unit can be partially positioned above and below the probe by horizontal displacement after the probe is worn. Between the stops, therefore, the probe head of the present invention not only facilitates the implantation of the needle during assembly, but also removes the probe, and the upper or lower stop is not affected by the upper guide as long as the needle tail is slightly moved. The unit is blocked, and the probe can be pulled upward from above the upper guide unit or pulled downward from below the lower guide unit. When the probe head is repaired or the probe is replaced, the upper guide unit can still maintain a state between the upper and lower stops, so that the neck of the probe is confined in the upper perforation, so the probe can Avoid detachment or falling from the upper and lower guide units. In addition, since the vertical probe of the present invention achieves the aforementioned effect of preventing detachment or falling, because it has a neck portion which is retracted, and does not need to have a convex stopper portion, it can be applied to the existing upper and lower guides. Board, and help to meet the needs of tiny stitches.
較佳地，本發明之具有垂直式探針之探針頭可更包含有一軟性薄膜，該軟性薄膜具有一穿孔，該垂直式探針之針尾的頸部係穿設於該穿孔，該軟性薄膜係位於該上擋止部與該上導板單元之間，該軟性薄膜之穿孔的一內緣係抵靠於該頸部。藉此，該垂直式探針不但受到上導板單元擋止，亦受到該軟性薄膜提供之側向拉力限制，因此其避免自上、下導板單元脫離或掉落的效果更好。此外，該軟性薄膜因具有彈性而可補償該探針頭設置之不同探針的頸部加工誤差，使得該等探針皆可受到良好的限制效果。Preferably, the probe head having the vertical probe of the present invention further comprises a flexible film having a through hole through which the neck of the needle end of the vertical probe is passed, the flexible film It is located between the upper stop portion and the upper guide plate unit, and an inner edge of the perforation of the flexible film abuts against the neck portion. Thereby, the vertical probe is not only blocked by the upper guide unit but also by the lateral pulling force provided by the soft film, so that the effect of avoiding detachment or falling from the upper and lower guide units is better. In addition, the flexible film can compensate for neck processing errors of different probes disposed on the probe head due to the elasticity, so that the probes can be well limited.
或者，本發明之具有垂直式探針之探針頭中，該垂直式探針亦可不受上導板單元擋止，而直接卡抵於軟性薄膜之穿孔並受軟性薄膜提供之側向拉力限制來避免自上、下導板單元脫離或掉落。在此狀況下，該探針頭包含有一上導板單元、一下導板單元、一垂直式探針，以及一軟性薄膜。該上導板單元包含有至少一上導板，以及設於該至少一上導板之至少一上穿孔。該下導板單元包含有至少一下導板，以及設於該至少一下導板之至少一下穿孔。該垂直式探針係呈圓柱狀並具有一穿設於該上導板單元之上穿孔的針尾、一穿設於該下導板單元之下穿孔的針頭，以及一連接該針尾與該針頭之針身，該針尾具有一上擋止部、一下擋止部，以及一位於該上擋止部與該下擋止部之間的頸部，該上擋止部之外徑及該下擋止部之外徑等於該針身之外徑、大於該頸部之外徑，且小於該上穿孔之孔徑及該下穿孔之孔徑，該下擋止部至少部分位於該上導板單元之上穿孔內，該頸部至少部分位於該上導板單元之上穿孔外。該軟性薄膜具有一穿孔，該垂直式探針之針尾的頸部係穿設於該穿孔，該軟性薄膜係位於該上擋止部與該上導板單元之間，該軟性薄膜之穿孔的一內緣係抵靠於該頸部。藉此，該垂直式探針不但可避免自導板脫離或掉落，且容易製造，並利於達成微小針距，此外，要移除探針時，探針係便於往上抽出及往下抽出。Alternatively, in the probe head of the present invention having a vertical probe, the vertical probe may not be blocked by the upper guide unit, but directly abuts against the perforation of the flexible film and is limited by the lateral tension provided by the flexible film. To avoid detachment or falling of the upper and lower guide units. In this case, the probe head includes an upper guide unit, a lower guide unit, a vertical probe, and a flexible film. The upper guide unit includes at least one upper guide plate and at least one upper perforation provided on the at least one upper guide plate. The lower guide plate unit includes at least a lower guide plate, and at least a lower through hole provided on the at least one lower guide plate. The vertical probe has a cylindrical shape and has a needle tail penetrating through the upper surface of the upper guide unit, a needle penetrating through the lower surface of the lower guide unit, and a needle connecting the needle tail and the needle. a needle body having an upper stop portion, a lower stop portion, and a neck portion between the upper stop portion and the lower stop portion, an outer diameter of the upper stop portion and the lower stop portion The outer diameter of the portion is equal to the outer diameter of the needle body, larger than the outer diameter of the neck portion, and smaller than the aperture of the upper perforation and the aperture of the lower perforation, the lower stop portion is at least partially perforated above the upper guide plate unit The neck is at least partially located outside the perforation above the upper guide unit. The flexible film has a through hole, and the neck of the needle end of the vertical probe is disposed in the through hole, and the flexible film is located between the upper stop portion and the upper guide unit, and the perforated one of the soft film The inner edge is against the neck. Thereby, the vertical probe can not only avoid the detachment or falling of the self-guide plate, but also is easy to manufacture, and facilitates the formation of a small stitch length. In addition, when the probe is removed, the probe system is easy to pull up and pull out. .
較佳地，在前述兩種態樣之探針頭中可包含有複數該軟性薄膜，該等軟性薄膜之穿孔的內緣係可朝向相同或不同方向地抵靠於該頸部，藉以對該垂直式探針達到更良好的限制效果。該軟性薄膜之穿孔可呈圓形、橢圓形，或者其他各種形狀，只要該穿孔之內緣可抵靠於該垂直式探針之頸部即可。該軟性薄膜之穿孔亦可呈孔徑等於或略小於該針身外徑之圓形，且該軟性薄膜更具有至少一與該穿孔連接之貫穿切痕，藉此，該貫穿切痕可對該穿孔產生彈性擴孔效果，使得該垂直式探針之針頭、針身及針尾的下擋止部可順利穿過該穿孔，且孔徑較小之該穿孔可對針尾之頸部產生更加良好之限制效果。Preferably, in the probe heads of the foregoing two aspects, the flexible film may be included, and the inner edges of the perforations of the soft films may abut the neck in the same or different directions, thereby The vertical probe achieves a better limiting effect. The perforation of the flexible film may be circular, elliptical, or other various shapes as long as the inner edge of the perforation can abut against the neck of the vertical probe. The perforation of the flexible film may also have a circular shape with a hole diameter equal to or slightly smaller than the outer diameter of the needle body, and the soft film further has at least one through-cutting line connected to the perforation, whereby the through-cutting hole can be the perforation The elastic reaming effect is generated, so that the needle, the needle body and the lower stop of the needle tail of the vertical probe can smoothly pass through the perforation, and the perforation with a small aperture can have a better limiting effect on the neck of the needle tail. .
較佳地，在前述第一種態樣之探針頭中，至少一該上穿孔之孔壁可抵靠於該頸部；在前述第二種態樣之探針頭中，至少一該上穿孔之孔壁可抵靠於該下擋止部；如此可對該垂直式探針產生較佳之限制效果。Preferably, in the probe head of the first aspect, at least one of the upper perforated hole walls can abut against the neck; in the second aspect of the probe head, at least one of the upper The perforated hole wall can abut against the lower stop; this can provide a better limiting effect on the vertical probe.
較佳地，在前述兩種態樣之探針頭中，該上導板單元可僅有一具相當厚度之上導板，或者可由複數較薄之上導板構成而達到相當之整體厚度，藉以使該垂直式探針保持直立而避免歪斜。亦即，該上導板單元可包含有一第一上導板及一第二上導板，該至少一上穿孔中包含有一位於該第一上導板之第一上穿孔，以及一位於該第二上導板之第二上穿孔，該垂直式探針之針尾係穿設於該第一上穿孔及該第二上穿孔，該第一上穿孔之孔壁及該第二上穿孔之孔壁可朝向相同方向地抵靠於該針尾，亦可朝向不同方向地抵靠於該針尾而使上導板單元對探針達到更好的擋止效果。Preferably, in the probe heads of the foregoing two aspects, the upper guide unit may have only one upper plate of a considerable thickness, or may be composed of a plurality of thinner upper guide plates to achieve a corresponding overall thickness. Keep the vertical probe upright to avoid skewing. That is, the upper guide unit may include a first upper guide plate and a second upper guide plate, the at least one upper through hole includes a first upper perforation on the first upper guide plate, and one is located at the first a second upper perforation of the upper guide plate, the needle end of the vertical probe is disposed on the first upper perforation and the second upper perforation, the first upper perforated hole wall and the second upper perforated hole wall The needle tail can be abutted against the needle tail in the same direction, and the upper guide plate unit can achieve a better blocking effect on the probe by abutting the needle tail in different directions.
更佳地，該第一上導板與該第二上導板之間有一間隙，該間隙可大於該上擋止部之長度。藉此，即使該上擋止部不慎掉落至第一上穿孔內，仍有相當可能性會卡在第一、二上導板之間，而可避免該針尾完全脫離該上導板單元。More preferably, there is a gap between the first upper guide plate and the second upper guide plate, and the gap may be greater than the length of the upper stop portion. Thereby, even if the upper stop portion is accidentally dropped into the first upper perforation, there is a considerable possibility that it will be caught between the first and second upper guide plates, and the needle tail can be prevented from completely disengaging from the upper guide plate unit. .
有關本發明所提供之具有垂直式探針之探針頭的詳細構造、特點、組裝或使用方式，將於後續的實施方式詳細說明中予以描述。然而，在本發明領域中具有通常知識者應能瞭解，該等詳細說明以及實施本發明所列舉的特定實施例，僅係用於說明本發明，並非用以限制本發明之專利申請範圍。Detailed construction, features, assembly or use of the probe head with a vertical probe provided by the present invention will be described in the detailed description of the subsequent embodiments. However, it should be understood by those of ordinary skill in the art that the present invention is not limited by the scope of the invention.
申請人首先在此說明，在以下將要介紹之實施例以及圖式中，相同之參考號碼，表示相同或類似之元件或其結構特徵。其次，為了便於顯示以及說明本案的技術特徵，圖式中各個元件的尺寸及比例並未按照實際態樣繪製。The Applicant first describes the same or similar elements or structural features thereof in the embodiments and the drawings which will be described below. Secondly, in order to facilitate the display and the technical features of the present invention, the dimensions and proportions of the various elements in the drawings are not drawn according to the actual situation.
請參閱第2圖，本發明一第一較佳實施例所提供之探針頭21包含有一上導板單元30、一下導板單元40，以及複數垂直式探針50。Referring to FIG. 2, a probe head 21 according to a first preferred embodiment of the present invention includes an upper guide unit 30, a lower guide unit 40, and a plurality of vertical probes 50.
在本實施例中，該上導板單元30包含有一上導板31，以及複數設於該上導板31之上穿孔32，該下導板單元40包含有一下導板41，以及複數設於該下導板41之下穿孔42。該上導板31之邊緣及該下導板41之邊緣可直接連接，或者藉由設置於其之間的一中導板或一連接結構而間接連接。本發明之技術特徵與上、下導板單元30、40之連接方式較無關聯，因此圖式中未顯示出上、下導板單元30、40之連接方式，以簡化圖式。In this embodiment, the upper guide plate unit 30 includes an upper guide plate 31, and a plurality of through holes 32 disposed on the upper guide plate 31. The lower guide plate unit 40 includes a lower guide plate 41, and a plurality of The lower guide plate 41 has a perforation 42 below. The edge of the upper guiding plate 31 and the edge of the lower guiding plate 41 may be directly connected or indirectly connected by a middle guiding plate or a connecting structure disposed therebetween. The technical features of the present invention are relatively unrelated to the manner in which the upper and lower guide plates 30, 40 are connected. Therefore, the manner in which the upper and lower guide plates 30, 40 are connected is not shown in the drawings to simplify the drawing.
各該垂直式探針50具有一穿設於上穿孔32的針尾51、一穿設於下穿孔42的針頭52，以及一連接針尾51與針頭52之針身53，該針尾51具有一上擋止部512、一下擋止部514，以及一位於該上擋止部512與該下擋止部514之間的頸部516。Each of the vertical probes 50 has a needle tail 51 that is disposed on the upper through hole 32, a needle 52 that is disposed through the lower through hole 42 , and a needle body 53 that connects the needle tail 51 and the needle 52 . The needle tail 51 has an upper block The stop portion 512, the lower stop portion 514, and a neck portion 516 between the upper stop portion 512 and the lower stop portion 514.
在本發明中，所謂針尾51，係包含探針50位於上導板單元30內的區段（在本實施例中為大部分之頸部516），以及凸露於上導板單元30之頂面33上方的區段（在本實施例中包含上擋止部512及其連接之一小部分之頸部516），且通常亦可（但不限於）包含探針50位於上導板單元30之底面34下方保持直線狀的一預定長度區段（在本實施例中包含下擋止部514及其連接之一小部分之頸部516）。所謂針頭52，係包含探針50位於下導板單元40內的區段，以及凸露於下導板單元40之底面43下方的區段，且通常亦可（但不限於）包含探針50位於下導板單元40之頂面44上方保持直線狀的一預定長度區段。而所謂針身53，則指探針50位於上、下導板單元30、40之間且連接針尾51與針頭52之區段。In the present invention, the needle tail 51 includes a section in which the probe 50 is located in the upper guide unit 30 (in the present embodiment, most of the neck 516), and is projected on the top of the upper guide unit 30. A section above the face 33 (in the present embodiment, the upper stop 512 and a neck 516 of a small portion thereof), and typically, but not limited to, including the probe 50 in the upper guide unit 30 A predetermined length section (in the present embodiment, a lower stop portion 514 and a neck portion 516 which is a small portion of the connection) is held below the bottom surface 34. The needle 52 includes a section in which the probe 50 is located in the lower guide unit 40, and a section that is exposed below the bottom surface 43 of the lower guide unit 40, and may also generally include, but not limited to, a probe 50. A predetermined length section that remains linear above the top surface 44 of the lower guide unit 40. The so-called needle body 53 means that the probe 50 is located between the upper and lower guide plates 30 and 40 and is connected to the section of the needle tail 51 and the needle 52.
本發明之垂直式探針50在尚未安裝於上、下導板單元30、40時，係呈如第3圖所示之直線狀。該垂直式探針50原先為一利用機械加工製造而成之直徑均一的圓柱狀直線針，其材質可（但不限於）為鎢、鈀、鈷、鎳、鉑、銅、銀之合金，直徑可（但不限於）為20至80µm（微米），長度可（但不限於）為300至800µm。該探針50之針頭52具有一呈圓錐狀之點觸端部522，用以點觸待測物，該點觸端部522可在該圓柱狀直線針的製造過程中形成，或者在該圓柱狀直線針製造完成後再藉由加工形成，但該點觸端部522之形狀不限制為圓錐狀。針尾51之自由端部則形成圓柱狀並具有導角(圖中未示)的點觸端部，用以點觸空間轉換器或者電路母板之電性接點，然而，針尾51的點觸端部形狀並不以此為限。此外，該圓柱狀直線針更藉由蝕刻、機械研磨或其他加工方式形成出呈內縮狀之該頸部516，如此即製成該垂直式探針50，該探針50之針尾51的上、下擋止部512、514、該針身53，以及該針頭52除了點觸端部522以外和該針尾51除了其點觸端部以外的部分，係具有相等之外徑D1，而該頸部516之外徑D2係小於該外徑D1(約小於4至12µm)。The vertical probe 50 of the present invention has a linear shape as shown in Fig. 3 when it is not attached to the upper and lower guide plates 30 and 40. The vertical probe 50 is originally a cylindrical needle having a uniform diameter and manufactured by machining, and the material thereof can be, but is not limited to, an alloy of tungsten, palladium, cobalt, nickel, platinum, copper, silver, and a diameter. It may be, but is not limited to, 20 to 80 μm (micrometers) and may be, but is not limited to, 300 to 800 μm in length. The needle 52 of the probe 50 has a conical tip end portion 522 for touching the object to be tested, and the contact end portion 522 can be formed during the manufacture of the cylindrical straight needle or in the cylinder. After the linear needle is manufactured, it is formed by machining, but the shape of the contact end portion 522 is not limited to a conical shape. The free end of the needle tail 51 is formed in a cylindrical shape and has a point end portion of a lead angle (not shown) for contacting the electrical contact of the space converter or the circuit board, however, the touch of the needle tail 51 The shape of the end is not limited to this. In addition, the cylindrical straight needle further forms the neck portion 516 which is constricted by etching, mechanical grinding or other processing, so that the vertical probe 50 is formed, and the probe 50 is on the needle end 51. The lower stoppers 512, 514, the needle body 53, and the needle 52 except for the contact end portion 522 and the portion of the needle tail 51 except the point end portion thereof have an equal outer diameter D1, and the neck The outer diameter D2 of the portion 516 is smaller than the outer diameter D1 (about less than 4 to 12 μm).
在組裝探針頭21之過程中，係先使上、下導板單元30、40之上、下穿孔32、42位置相互對應，再將呈直線狀之探針50穿過位置相互對應之上、下穿孔32、42，該探針50各部位之外徑都小於上、下穿孔32、42之孔徑，因此相當容易穿設於上、下導板單元30、40。然後，使上導板單元30與下導板單元40朝相反方向地水平位移至第2圖所示之位置，使得同一探針50穿過之上穿孔32與下穿孔42水平錯位、各該探針50之針尾51與針頭52從第3圖所示之位在同一垂直軸線之狀態錯開而呈第2圖所示之非位在同一垂直軸線之狀態，且各該探針50之針身53彈性彎曲變形而呈第2圖所示之挫曲狀。此時，該等上穿孔32之孔壁係抵靠於該等探針50之針尾51的頸部516，該等下穿孔42之孔壁係抵靠於該等探針50之針頭52，且上、下穿孔32、42之孔壁的抵靠方向係相反（在第2圖中，上穿孔32之孔壁係向左抵靠，下穿孔42之孔壁係向右抵靠），而且，該上導板單元30抵靠於探針頸部516的部分係位於探針之上、下擋止部512、514之間，使得上、下擋止部512、514可分別受到上導板單元30之頂、底面33、34擋止而無法進入上穿孔32內，因而限制該頸部516穿設於上穿孔32而無法脫出，如此一來，各該探針50即可避免自上、下導板單元30、40脫離或掉落。In the process of assembling the probe head 21, the upper and lower guide plate units 30, 40 and the lower through holes 32, 42 are respectively positioned corresponding to each other, and the linear probes 50 are passed through the positions corresponding to each other. The lower perforations 32, 42 have smaller outer diameters of the respective portions of the probe 50 than the upper and lower perforations 32, 42 and are therefore relatively easy to pass through the upper and lower guide units 30, 40. Then, the upper guide unit 30 and the lower guide unit 40 are horizontally displaced in the opposite direction to the position shown in FIG. 2, so that the same probe 50 is horizontally displaced through the upper perforation 32 and the lower perforation 42. The needle end 51 of the needle 50 and the needle 52 are offset from the position shown in FIG. 3 on the same vertical axis to be in the state of the same vertical axis as shown in FIG. 2, and the needle body 53 of each of the probes 50 is 53. It is elastically bent and deformed to have a buckling shape as shown in Fig. 2. At this time, the walls of the holes of the upper perforations 32 are abutted against the neck 516 of the tail 51 of the probes 50, and the walls of the holes of the lower perforations 42 abut against the needles 52 of the probes 50, and The abutting directions of the holes of the upper and lower perforations 32, 42 are opposite (in the second figure, the wall of the upper perforation 32 is abutted to the left, and the wall of the lower perforation 42 is abutted to the right), and The portion of the upper guide unit 30 that abuts against the probe neck 516 is located above the probe and between the lower stops 512, 514 such that the upper and lower stops 512, 514 can be respectively received by the upper guide unit The top 30 and the bottom surface 33, 34 are blocked from entering the upper through hole 32, so that the neck portion 516 is restricted from being passed through the upper through hole 32 and cannot be removed. Thus, the probe 50 can be avoided from the top. The lower guide unit 30, 40 is detached or dropped.
值得一提的是，本發明之垂直式探針50不限為挫曲式探針，而亦可為直線式探針。亦即，本發明之探針頭不限制要藉由上、下導板單元30、40水平錯位而使得探針50之針身53彈性彎曲成挫曲狀，探針50穿設於上、下導板單元30、40後亦可維持如第3圖所示之直線狀，在此狀況下，上導板單元30僅需位移至可阻擋探針50之上、下擋止部512、514的位置，而不一定要抵靠於探針50之頸部516，惟使上穿孔32之孔壁抵靠於探針50之頸部516可達到較佳之擋止效果。It is worth mentioning that the vertical probe 50 of the present invention is not limited to a buckling probe, but may also be a linear probe. That is, the probe head of the present invention is not limited to elastically bend the needle body 53 of the probe 50 into a buckling shape by horizontal misalignment of the upper and lower guide plate units 30, 40, and the probe 50 is disposed above and below. The guide plate units 30, 40 can also maintain a linear shape as shown in FIG. 3, in which case the upper guide plate unit 30 only needs to be displaced to the upper and lower stop portions 512, 514 of the blockable probe 50. The position does not necessarily have to abut the neck 516 of the probe 50, but the wall of the hole of the upper perforation 32 abuts against the neck 516 of the probe 50 to achieve a better stopping effect.
在前述之第一較佳實施例中，上、下導板單元30、40分別有一具相當厚度之導板31、41，可分別對針尾51及針頭52產生相當支撐作用而避免探針50之針尾51及針頭52發生歪斜。然而，上、下導板單元30、40亦可分別由複數較薄之導板構成而達到相當之整體厚度，藉以使探針50之針尾51及針頭52保持直立而避免歪斜。例如，第4圖所示之本發明一第二較佳實施例所提供之探針頭22中，該上導板單元30包含有第一、二上導板31A、31B，以及分別設於第一、二上導板31A、31B之複數第一上穿孔32A及複數第二上穿孔32B，該下導板單元40包含有第一、二下導板41A、41B，以及分別設於第一、二下導板41A、41B之複數第一下穿孔42A及複數第二下穿孔42B，各該探針50之針尾51係穿設於一組對應的第一上穿孔32A及第二上穿孔32B，各該探針50之針頭52係穿設於一組對應的第一下穿孔42A及第二下穿孔42B。如前所述，第一、二上穿孔32A、32B之孔壁可抵靠於探針50之針尾51的頸部516，但並不以此為限，只要該上導板單元30部分位於上、下擋止部512、514之間而限制探針50之頸部516穿設於上穿孔32A、32B即可，惟使第一、二上穿孔32A、32B之孔壁皆抵靠於探針50之頸部516可達到較佳之擋止效果。第一、二上穿孔32A、32B之孔壁可朝向相同方向地抵靠於針尾51之頸部516（如第4圖所示），亦可朝向不同方向地抵靠於針尾51之頸部516（如第5圖所示）而使上導板單元30對探針50達到更好的擋止效果。In the first preferred embodiment, the upper and lower guide plates 30 and 40 respectively have guide plates 31 and 41 of considerable thickness, which can respectively support the needle tail 51 and the needle 52 to avoid the probe 50. The needle tail 51 and the needle 52 are skewed. However, the upper and lower guide plates 30, 40 can also be formed of a plurality of thinner guide plates to achieve a corresponding overall thickness, so that the needle 51 and the needle 52 of the probe 50 remain upright to avoid skew. For example, in the probe head 22 according to a second preferred embodiment of the present invention shown in FIG. 4, the upper guide unit 30 includes first and second upper guide plates 31A and 31B, and is respectively disposed at the first a plurality of first upper perforations 32A and a plurality of second upper perforations 32B of the upper and lower upper guide plates 31A, 31B, the lower guide plate unit 40 includes first and second lower guide plates 41A, 41B, and are respectively disposed at the first, The plurality of first lower perforations 42A and the plurality of second lower perforations 42B of the two lower guide plates 41A and 41B are respectively disposed on a set of corresponding first upper perforations 32A and second upper perforations 32B. The needles 52 of each of the probes 50 are threaded through a corresponding set of first lower perforations 42A and second lower perforations 42B. As described above, the wall of the first and second upper perforations 32A, 32B can abut against the neck 516 of the needle 51 of the probe 50, but not limited thereto, as long as the upper guide unit 30 is partially located. Between the lower stop portions 512 and 514, the neck portion 516 of the restriction probe 50 is disposed through the upper through holes 32A, 32B, but the hole walls of the first and second upper perforations 32A, 32B are all abutted against the probe. The neck 516 of 50 can achieve better stopping effect. The walls of the first and second upper perforations 32A, 32B may abut the neck 516 of the needle tail 51 in the same direction (as shown in FIG. 4), or may abut the neck 516 of the needle tail 51 in different directions. (As shown in Fig. 5), the upper guide unit 30 achieves a better blocking effect on the probe 50.
在上導板單元30具有第一、二上導板31A、31B的情況下，第一、二上導板31A、31B可僅有其邊緣相互連接，其餘部分則有一間隙d（如第4圖所示），而該間隙d係以大於該上擋止部512之長度L為較佳之設計，藉此，即使探針50之上擋止部512不慎掉落至第一上穿孔32A內，仍有相當可能性會卡在第一、二上導板31A、31B之間，而可避免針尾51完全脫離上導板單元30。In the case where the upper guide unit 30 has the first and second upper guide plates 31A, 31B, the first and second upper guide plates 31A, 31B may have only their edges connected to each other, and the remaining portion has a gap d (as shown in FIG. 4). The gap d is preferably designed to be greater than the length L of the upper stop portion 512, whereby even if the stopper portion 512 on the probe 50 is accidentally dropped into the first upper through hole 32A, There is still a considerable possibility that it will be caught between the first and second upper guide plates 31A, 31B, and the needle tail 51 can be prevented from completely coming off the upper guide plate unit 30.
請參閱第6圖，本發明一第三較佳實施例所提供之探針頭23係類同於第2圖所示之探針頭21，惟該探針頭23更包含有一軟性薄膜60，該軟性薄膜60可以為(但不限於)塑膠、環氧樹脂之類的材質所製成。請參閱第7圖，第7圖概為第6圖之局部頂視示意圖，惟未顯示出探針50之針尾51的上擋止部512，以便說明。在本實施例中，該軟性薄膜60具有複數呈圓形之穿孔62（第7圖僅繪示出其中之一），且各該穿孔62連接二貫穿切痕64（亦即切痕64係貫穿軟性薄膜60），該穿孔62之孔徑係略小於或等於探針50之外徑D1，但該等貫穿切痕64可對該穿孔62產生彈性擴孔效果，因此探針50之針頭52、針身53及針尾51的下擋止部514可順利穿過該穿孔62，使得針尾51之頸部516穿設於該穿孔62，該軟性薄膜60係位於針尾51之上擋止部512與上導板單元30之間，該軟性薄膜60供探針50穿設完成後，整個軟性薄膜60可被水平拉扯而稍微位移，使得該穿孔62之內緣抵靠於該頸部516，然後，該軟性薄膜60即在此位置藉由諸如螺絲、夾具之類的固定元件而被固定於該上導板單元30。Referring to FIG. 6, a probe head 23 according to a third preferred embodiment of the present invention is similar to the probe head 21 shown in FIG. 2, but the probe head 23 further includes a flexible film 60. The flexible film 60 can be made of, but not limited to, a material such as plastic or epoxy. Please refer to FIG. 7. FIG. 7 is a partial top plan view of FIG. 6, but the upper stop portion 512 of the probe 51 of the probe 50 is not shown for illustration. In the present embodiment, the flexible film 60 has a plurality of circular perforations 62 (only one of which is shown in FIG. 7), and each of the perforations 62 connects two through-cuts 64 (ie, the incision 64 is continuous throughout). The flexible film 60) has a hole diameter slightly smaller than or equal to the outer diameter D1 of the probe 50, but the through-cuts 64 can produce an elastic reaming effect on the hole 62, so the needle 52 of the probe 50 and the needle The body 53 and the lower stop portion 514 of the needle tail 51 can smoothly pass through the through hole 62 such that the neck portion 516 of the needle tail 51 passes through the through hole 62. The flexible film 60 is located above the needle tail 51 and the upper portion 512 and the upper guide Between the plate units 30, after the soft film 60 is completed, the entire flexible film 60 can be horizontally pulled and slightly displaced, so that the inner edge of the through hole 62 abuts against the neck 516, and then the softness The film 60 is fixed to the upper guide unit 30 at this position by a fixing member such as a screw or a jig.
藉此，探針50不但受到上導板單元30擋止，亦被軟性薄膜60之穿孔62的內緣抵持，更受到該軟性薄膜60提供之側向拉力限制，因此其避免自上、下導板單元30、40脫離或掉落的效果更好。此外，上、下導板單元30、40通常由諸如陶瓷、氮化矽之類的硬質材料所製成，而該探針頭23之不同探針50可能因為加工誤差而使其頸部516尺寸有些許差異，造成該等探針50之頸部516無法都受到上穿孔32之孔壁抵靠，甚至有些探針50之上、下擋止部512、514無法受到上導板單元30擋止，而該軟性薄膜60因具有彈性而可補償該等探針50之頸部加工誤差，使得每一探針50之頸部516都可受到軟性薄膜60之穿孔62內緣抵靠而受到良好的限制效果。Thereby, the probe 50 is not only blocked by the upper guide unit 30, but also resisted by the inner edge of the perforation 62 of the flexible film 60, and is further limited by the lateral pulling force provided by the flexible film 60, so that it is avoided from the top and bottom. The effect of the guide unit 30, 40 being detached or dropped is better. In addition, the upper and lower guide units 30, 40 are typically made of a hard material such as ceramic, tantalum nitride, and the different probes 50 of the probe head 23 may have a neck 516 size due to machining errors. There is a slight difference that the neck 516 of the probe 50 cannot be abutted against the hole wall of the upper perforation 32, and even the upper and lower stops 512, 514 of the probe 50 cannot be blocked by the upper guide unit 30. The soft film 60 can compensate for the neck processing error of the probes 50 due to the elasticity, so that the neck portion 516 of each probe 50 can be well received by the inner edge of the perforation 62 of the flexible film 60. Limit the effect.
該軟性薄膜60之穿孔62形狀並無限制，其尺寸不限於要略小於或等於探針50之外徑D1，因此該軟性薄膜60不一定要設有貫穿切痕64來對穿孔62產生彈性擴孔效果。例如，該軟性薄膜60之穿孔62可為尺寸較大而不需彈性擴孔即可供探針50穿設之圓形（如第8圖所示）、橢圓形（如第9圖所示），或者其他各種形狀。The shape of the perforation 62 of the flexible film 60 is not limited, and the size thereof is not limited to be slightly smaller than or equal to the outer diameter D1 of the probe 50. Therefore, the flexible film 60 does not have to have a through-cut 64 to elastically ream the perforation 62. effect. For example, the perforation 62 of the flexible film 60 can be a large size without elastic reaming, that is, a circular shape (as shown in FIG. 8) for the probe 50 to be worn, and an elliptical shape (as shown in FIG. 9). , or other various shapes.
如第10圖所示之本發明一第四較佳實施例所提供之探針頭24，在設有彈性薄膜60之情況下，該上導板單元30亦可包含有複數上導板31A、31B，藉以達成如同第二較佳實施例之功效。同樣地，該等上導板31A、31B之上穿孔32A、32B的孔壁可朝向相同方向地抵靠於探針50之頸部516（如第10圖所示），亦可朝向不同方向地抵靠於探針50之頸部516（如第11圖所示）而使上導板單元30對探針50達到更好的擋止效果。The probe head 24 of the fourth preferred embodiment of the present invention, as shown in FIG. 10, may be provided with a plurality of upper guide plates 31A in the case where the elastic film 60 is provided. 31B, whereby the effect as the second preferred embodiment is achieved. Similarly, the wall of the perforations 32A, 32B above the upper guide plates 31A, 31B can abut the neck 516 of the probe 50 in the same direction (as shown in FIG. 10), or can be oriented in different directions. Abutting the neck 516 of the probe 50 (as shown in FIG. 11), the upper guide unit 30 achieves a better blocking effect on the probe 50.
請參閱第12圖，本發明一第五較佳實施例所提供之探針頭25係類同於第6圖所示之探針頭23，惟該探針頭25之探針50的頸部516較短而下擋止部514較長，該下擋止部514係穿設於上穿孔32，該頸部516係完全（或至少部分）位於上穿孔32外、穿設於軟性薄膜60之穿孔62，並受到穿孔62之內緣抵靠。藉此，縱使探針50未受到上導板單元30擋止，但基於穿孔62之內緣抵靠於探針50的頸部516，探針50之上、下擋止部512、514仍可擋止於軟性薄膜60，更且探針50將同時受到軟性薄膜60提供之側向拉力限制，而可避免自上、下導板單元30、40脫離或掉落。Referring to Fig. 12, a probe head 25 according to a fifth preferred embodiment of the present invention is similar to the probe head 23 shown in Fig. 6, but the neck of the probe 50 of the probe head 25 516 is shorter and the lower stop portion 514 is longer. The lower stop portion 514 is disposed through the upper through hole 32. The neck portion 516 is completely (or at least partially) located outside the upper through hole 32 and is disposed through the flexible film 60. The perforations 62 are received by the inner edges of the perforations 62. Thereby, even if the probe 50 is not blocked by the upper guide unit 30, the upper and lower stop portions 512, 514 of the probe 50 can still be used based on the inner edge of the through hole 62 abutting against the neck 516 of the probe 50. Blocking the flexible film 60, and the probe 50 will be simultaneously limited by the lateral pulling force provided by the flexible film 60, and the detachment or falling of the upper and lower guide plates 30, 40 can be avoided.
請參閱第13圖，本發明一第六較佳實施例所提供之探針頭26係類同於第12圖所示之探針頭25，惟該探針頭26之上導板單元30包含有複數上導板31A、31B，藉以達成如同第二較佳實施例之功效。該等上導板31A、31B之上穿孔32A、32B的孔壁可朝向相同方向地抵靠於探針50之下擋止部514（如第13圖所示），亦可朝向不同方向地抵靠於探針50之下擋止部514（如第14圖所示）。Referring to FIG. 13, a probe head 26 according to a sixth preferred embodiment of the present invention is similar to the probe head 25 shown in FIG. 12 except that the guide head unit 30 of the probe head 26 includes There are a plurality of upper guide plates 31A, 31B to achieve the same effect as the second preferred embodiment. The hole walls of the upper perforations 32A, 32B of the upper guide plates 31A, 31B can abut against the lower stop portion 514 of the probe 50 in the same direction (as shown in Fig. 13), or can be oriented in different directions. The stop portion 514 is lowered under the probe 50 (as shown in Fig. 14).
在前述第三至第六較佳實施例之探針頭設有軟性薄膜的態樣中，該探針頭可包含有複數該軟性薄膜60，該等軟性薄膜60之穿孔62的內緣可朝向相同亦可朝向不同方向地抵靠於探針50之針尾51的頸部516，藉以對探針50達到更好的限制效果。In the aspect in which the probe heads of the third to sixth preferred embodiments are provided with a flexible film, the probe head may include a plurality of the flexible films 60, and the inner edges of the through holes 62 of the flexible films 60 may be oriented. The same can also be directed against the neck 516 of the needle 51 of the probe 50 in different directions, thereby achieving a better limiting effect on the probe 50.
最後，必須再次說明，本發明於前揭實施例中所揭露的構成元件，僅為舉例說明，並非用來限制本案之範圍，其他等效元件的替代或變化，亦應為本案之申請專利範圍所涵蓋。Finally, it is to be noted that the constituent elements disclosed in the foregoing embodiments are merely illustrative and are not intended to limit the scope of the present invention, and alternative or variations of other equivalent elements should also be the scope of the patent application of the present application. Covered.
[先前技術] [Prior technology]
10‧‧‧探針頭 10‧‧‧Probe head
11‧‧‧垂直式探針 11‧‧‧Vertical probe
12‧‧‧針尾 12‧‧‧needle tail
13‧‧‧針頭 13‧‧‧ needle
14‧‧‧針身 14‧‧‧ needle body
15‧‧‧上導板 15‧‧‧Upper guide
16‧‧‧上穿孔 16‧‧‧Upper perforation
17‧‧‧下導板 17‧‧‧ lower guide
18‧‧‧下穿孔 18‧‧‧ underperture
[實施例] [Examples]
21〜26‧‧‧探針頭 21~26‧‧‧ probe head
30‧‧‧上導板單元 30‧‧‧Upper guide unit
31‧‧‧上導板 31‧‧‧Upper guide
31A‧‧‧（第一）上導板 31A‧‧‧(first) upper guide
31B‧‧‧（第二）上導板 31B‧‧‧(second) upper guide
32‧‧‧上穿孔 32‧‧‧Upper perforation
32A‧‧‧（第一）上穿孔 32A‧‧‧(first) perforation
32B‧‧‧（第二）上穿孔 32B‧‧ (second) perforation
33‧‧‧頂面 33‧‧‧ top surface
34‧‧‧底面 34‧‧‧ bottom
40‧‧‧下導板單元 40‧‧‧ lower guide unit
41‧‧‧下導板 41‧‧‧ lower guide
41A‧‧‧（第一）下導板 41A‧‧‧(first) lower guide
41B‧‧‧（第二）下導板 41B‧‧‧(second) lower guide
42‧‧‧下穿孔 42‧‧‧Under perforation
42A‧‧‧（第一）下穿孔 42A‧‧‧(first) perforation
42B‧‧‧（第二）下穿孔 42B‧‧‧(second) perforation
43‧‧‧底面 43‧‧‧ bottom
44‧‧‧頂面 44‧‧‧ top surface
50‧‧‧垂直式探針 50‧‧‧Vertical probe
51‧‧‧針尾 51‧‧‧needle tail
512‧‧‧上擋止部 512‧‧‧Upper stop
514‧‧‧下擋止部 514‧‧‧Bottom stop
516‧‧‧頸部 516‧‧‧ neck
52‧‧‧針頭 52‧‧‧ needle
522‧‧‧點觸端部 522‧‧‧Tap end
53‧‧‧針身 53‧‧‧ needle body
60‧‧‧軟性薄膜 60‧‧‧Soft film
62‧‧‧穿孔 62‧‧‧Perforation
64‧‧‧貫穿切痕 64‧‧‧through cut marks
D1、D2‧‧‧外徑 D1, D2‧‧‧ OD
d‧‧‧間隙 D‧‧‧ gap
L‧‧‧長度 L‧‧‧ length
第1圖為習用之具有垂直式探針之探針頭的剖視示意圖。 第2圖為本發明一第一較佳實施例所提供之具有垂直式探針之探針頭的剖視示意圖。 第3圖為本發明該第一較佳實施例所提供之垂直式探針的立體示意圖，係顯示其尚未安裝於上、下導板之態樣。 第4圖為本發明一第二較佳實施例所提供之具有垂直式探針之探針頭的剖視示意圖。 第5圖係類同於第4圖，惟該探針頭之二上導板係朝向不同方向地抵靠於垂直式探針。 第6圖為本發明一第三較佳實施例所提供之具有垂直式探針之探針頭的剖視示意圖。 第7圖概為第6圖之局部頂視示意圖，惟未顯示出該垂直式探針之針尾的上擋止部。 第8圖及第9圖係類同於第7圖，惟該探針頭之一軟性薄膜的穿孔形狀不同。 第10圖為本發明一第四較佳實施例所提供之具有垂直式探針之探針頭的剖視示意圖。 第11圖係類同於第10圖，惟該探針頭之二上導板係朝向不同方向地抵靠於垂直式探針。 第12圖為本發明一第五較佳實施例所提供之具有垂直式探針之探針頭的剖視示意圖。 第13圖為本發明一第六較佳實施例所提供之具有垂直式探針之探針頭的剖視示意圖。 第14圖係類同於第13圖，惟該探針頭之二上導板係朝向不同方向地抵靠於垂直式探針。Figure 1 is a schematic cross-sectional view of a conventional probe head having a vertical probe. 2 is a cross-sectional view of a probe head having a vertical probe according to a first preferred embodiment of the present invention. FIG. 3 is a perspective view of the vertical probe provided by the first preferred embodiment of the present invention, showing a state in which it has not been mounted on the upper and lower guide plates. Figure 4 is a cross-sectional view showing a probe head having a vertical probe according to a second preferred embodiment of the present invention. Figure 5 is similar to Figure 4 except that the two upper guides of the probe head abut against the vertical probes in different directions. Figure 6 is a cross-sectional view showing a probe head having a vertical probe according to a third preferred embodiment of the present invention. Fig. 7 is a partial top plan view of Fig. 6, but the upper stop of the needle end of the vertical probe is not shown. Fig. 8 and Fig. 9 are similar to Fig. 7, except that the perforated shape of one of the soft films of the probe head is different. Figure 10 is a cross-sectional view showing a probe head having a vertical probe according to a fourth preferred embodiment of the present invention. Figure 11 is similar to Figure 10 except that the two upper guides of the probe head abut the vertical probes in different directions. Figure 12 is a cross-sectional view showing a probe head having a vertical probe according to a fifth preferred embodiment of the present invention. Figure 13 is a cross-sectional view showing a probe head having a vertical probe according to a sixth preferred embodiment of the present invention. Figure 14 is similar to Figure 13, except that the two upper guides of the probe head abut the vertical probes in different directions.
Claims (12)
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| TW106115008A TW201843457A (en) | 2017-05-05 | 2017-05-05 | Probe head with vertical probe comprising an upper guide plate unit and a lower guide plate unit as well as a vertical probe |
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| TW106115008A TW201843457A (en) | 2017-05-05 | 2017-05-05 | Probe head with vertical probe comprising an upper guide plate unit and a lower guide plate unit as well as a vertical probe |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI704350B (en) * | 2019-01-31 | 2020-09-11 | 旺矽科技股份有限公司 | Probe head and probe |
| CN111751583A (en) * | 2019-03-27 | 2020-10-09 | 旺矽科技股份有限公司 | Probe head and probe card |
| TWI712802B (en) * | 2020-01-21 | 2020-12-11 | 中華精測科技股份有限公司 | Probe card device and neck-like probe thereof |
| TWI737208B (en) * | 2019-03-06 | 2021-08-21 | 日商日本麥克隆尼股份有限公司 | Electrical connection device |
| CN113721051A (en) * | 2020-05-26 | 2021-11-30 | 旺矽科技股份有限公司 | Probe head with linear probe |
| TWI831293B (en) * | 2022-07-14 | 2024-02-01 | 中華精測科技股份有限公司 | Chip testing socket |
| TWI832220B (en) * | 2021-04-30 | 2024-02-11 | 南韓商Ｐｔ＆Ｋ有限公司 | Probe pin and method of manufacturing probe pin |
| TWI833229B (en) * | 2022-02-25 | 2024-02-21 | 南韓商Ｔｓｅ有限公司 | Low friction type probe head |
| TWI839742B (en) * | 2022-02-11 | 2024-04-21 | 南韓商Ｔｓｅ有限公司 | Preload type probe head |
-
2017
- 2017-05-05 TW TW106115008A patent/TW201843457A/en unknown
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI704350B (en) * | 2019-01-31 | 2020-09-11 | 旺矽科技股份有限公司 | Probe head and probe |
| TWI737208B (en) * | 2019-03-06 | 2021-08-21 | 日商日本麥克隆尼股份有限公司 | Electrical connection device |
| CN111751583A (en) * | 2019-03-27 | 2020-10-09 | 旺矽科技股份有限公司 | Probe head and probe card |
| TWI712802B (en) * | 2020-01-21 | 2020-12-11 | 中華精測科技股份有限公司 | Probe card device and neck-like probe thereof |
| CN113721051A (en) * | 2020-05-26 | 2021-11-30 | 旺矽科技股份有限公司 | Probe head with linear probe |
| CN113721051B (en) * | 2020-05-26 | 2023-12-01 | 旺矽科技股份有限公司 | Probe head with linear probe |
| TWI832220B (en) * | 2021-04-30 | 2024-02-11 | 南韓商Ｐｔ＆Ｋ有限公司 | Probe pin and method of manufacturing probe pin |
| TWI839742B (en) * | 2022-02-11 | 2024-04-21 | 南韓商Ｔｓｅ有限公司 | Preload type probe head |
| TWI833229B (en) * | 2022-02-25 | 2024-02-21 | 南韓商Ｔｓｅ有限公司 | Low friction type probe head |
| TWI831293B (en) * | 2022-07-14 | 2024-02-01 | 中華精測科技股份有限公司 | Chip testing socket |
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