TW201803192A - Method of manufacturing a battery, vacuum processing apparatus and battery - Google Patents

Method of manufacturing a battery, vacuum processing apparatus and battery Download PDF

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Publication number
TW201803192A
TW201803192A TW106116734A TW106116734A TW201803192A TW 201803192 A TW201803192 A TW 201803192A TW 106116734 A TW106116734 A TW 106116734A TW 106116734 A TW106116734 A TW 106116734A TW 201803192 A TW201803192 A TW 201803192A
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Taiwan
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separation membrane
coating
material layer
vacuum processing
battery
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TW106116734A
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Chinese (zh)
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投斯登布魯諾 戴德
史德分 海恩
湯瑪士 德皮世奇
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應用材料股份有限公司
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Publication of TW201803192A publication Critical patent/TW201803192A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/04—Construction or manufacture in general
    • H01M10/0431—Cells with wound or folded electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/058—Construction or manufacture
    • H01M10/0587—Construction or manufacture of accumulators having only wound construction elements, i.e. wound positive electrodes, wound negative electrodes and wound separators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0407—Methods of deposition of the material by coating on an electrolyte layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
    • H01M50/40—Separators; Membranes; Diaphragms; Spacing elements inside cells
    • H01M50/46—Separators, membranes or diaphragms characterised by their combination with electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Abstract

The present disclosure provides a method of manufacturing a battery. The method includes providing a separator film, processing the separator film by at least two of the actions of depositing an anode material layer onto a first side of the separator film, depositing a cathode material layer onto a second side of the separator film opposite to the first side, coating the anode material layer with an anode contact, and coating the cathode material layer with an anode contact. At least two of these actions are carried out without a break in vacuum in a vacuum processing environment.

Description

製造一電池之方法、真空處理設備及電池Method for manufacturing a battery, vacuum processing equipment and battery

本揭露之數個實施例是有關於真空沈積之領域，且特別是有關於一種製造數個電池單元之方法。再者，本揭露之數個實施例係有關於一種適用於塗佈一薄的分離膜之真空處理設備。再者，本揭露之數個實施例係有關於一種電池，電池之材料層藉由一真空處理設備沈積。Several embodiments of the present disclosure are related to the field of vacuum deposition, and more particularly to a method of manufacturing a plurality of battery cells. Furthermore, several embodiments of the present disclosure relate to a vacuum processing apparatus suitable for coating a thin separation membrane. Furthermore, several embodiments of the present disclosure relate to a battery, and a material layer of the battery is deposited by a vacuum processing device.

電池或電池單元可為了高能量密度及在電池供能之電子裝置中使用少的固定空間而設計。鋰離子電池設計係用於許多具有高功率需求之可攜式裝置中，舉例為電動車中。Batteries or battery cells can be designed for high energy density and less fixed space in battery-powered electronic devices. Lithium-ion battery designs are used in many portable devices with high power requirements, such as in electric vehicles.

針對陰極及陽極，例如是鋰離子電池之電池單元係由黏貼(pasting)及/或混合不同材料在一起而製造。陽極材料係塗佈於金屬基板上，金屬基板舉例為鋁箔。同時，陰極材料係在不同的製程中塗佈於銅箔上。在兩個塗佈製程已經執行之後，陰極及陽極係乾燥且繼續進行到製程之下一個階段，陰極及陽極係在製程之下一個階段中進行壓延(calendered)。再另一處理動作係需要而用於一起捲繞陰極及陽極，使得分離膜可置於其間。For cathodes and anodes, battery cells, such as lithium-ion batteries, are manufactured by pasting and / or mixing different materials together. The anode material is coated on a metal substrate, and the metal substrate is exemplified by aluminum foil. At the same time, the cathode material is coated on the copper foil in different processes. After the two coating processes have been performed, the cathode and anode systems are dried and proceed to the next stage of the process, and the cathode and anode systems are calendered in the next stage of the process. Yet another processing action is required for winding the cathode and anode together so that the separation membrane can be placed between them.

目前用於電池之製造科技係基於多種處理動作，其中一些動作係在大氣環境中執行，且其他的動作需要真空處理。大量之不同處理動作係容易出錯且成本密集度高(cost-intensive)。The current manufacturing technology for batteries is based on a variety of processing actions, some of which are performed in the atmospheric environment, and others require vacuum processing. A large number of different processing actions are error-prone and cost-intensive.

有鑑於上述，改善係會有益處。In light of the above, there are benefits to improving the department.

有鑑於上述，本揭露係提供於下文中。In light of the above, this disclosure is provided below.

根據一方面，提出一種製造一電池的方法。此製造方法包括提供一分離膜；藉由於一真空處理環境中使用沈積一陽極材料層於分離膜之一第一側上、沈積一陰極材料層於分離膜之相反於第一側之一第二側上、塗佈陽極材料層而具有一陽極觸點、以及塗佈陰極材料層而具有一陰極觸點之至少兩個動作處理分離膜。上述之至少兩個處理動作係執行而沒有破壞真空處理環境中之真空。According to one aspect, a method of manufacturing a battery is proposed. The manufacturing method includes providing a separation membrane; by using a vacuum processing environment, depositing an anode material layer on one of the first sides of the separation membrane and depositing a cathode material layer on the first side of the separation membrane opposite the second side On the side, at least two actions process separation membranes coated with an anode material layer to have an anode contact and coated cathode materials layer to have a cathode contact. The at least two processing actions described above are performed without disrupting the vacuum in the vacuum processing environment.

根據另一方面，提出一種真空處理設備，適用於處理一分離膜。真空處理設備包括一第一塗佈鼓，具有至少一相關之第一側塗佈源，第一側塗佈源適用於處理分離膜之一第一側；以及 至少一第二塗佈鼓，具有至少一相關之第二側塗佈源，第二側塗佈源適用於處理分離膜之一第二側。第一塗佈鼓及此至少一第二塗佈鼓係配置於一共同真空處理環境中。According to another aspect, a vacuum processing apparatus is proposed, which is suitable for processing a separation membrane. The vacuum processing equipment includes a first coating drum having at least one associated first side coating source, the first side coating source is suitable for processing one first side of a separation membrane; and at least one second coating drum having At least one related second-side coating source, the second-side coating source is suitable for processing a second side of the separation membrane. The first coating drum and the at least one second coating drum are disposed in a common vacuum processing environment.

根據再另一方面，提出一種電池，此電池由一方法製造，此方法在一真空處理環境中執行。電池包括一分離膜；一陽極材料層，沈積於分離膜之第一側上；一陰極材料層，沈積於分離膜之第二側上，第二側相反於第一側；一陽極觸點，塗佈於陽極材料層上；以及一陰極觸點，塗佈於陰極材料層上。According to yet another aspect, a battery is proposed that is manufactured by a method that is performed in a vacuum processing environment. The battery includes a separation membrane; an anode material layer deposited on the first side of the separation membrane; a cathode material layer deposited on the second side of the separation membrane, the second side being opposite to the first side; an anode contact, Coated on the anode material layer; and a cathode contact, coated on the cathode material layer.

此些處理動作之至少二者係執行而不破壞真空處理環境中之真空的特徵可大體上理解為此些處理動作係同時發生。The feature that at least two of these processing actions are performed without disrupting the vacuum in the vacuum processing environment can be generally understood that these processing actions occur simultaneously.

其他實施例、方面、細節及優點係透過附屬申請專利範圍、說明、及圖式更為顯著。基於閱讀下述詳細之說明，及基於觀看所附之圖式，此技術領域中具有通常知識者將得知額外之特徵及優點。為了對本發明之上述及其他方面有更佳的瞭解，下文特舉實施例，並配合所附圖式詳細說明如下：Other embodiments, aspects, details, and advantages are more significant through the scope, description, and drawings of the attached patent application. Based on reading the following detailed description, and based on viewing the accompanying drawings, those skilled in the art will recognize additional features and advantages. In order to have a better understanding of the above and other aspects of the present invention, the following specific examples are described in detail below in conjunction with the accompanying drawings:

在下方之詳細說明中，參照係藉由所附之圖式達成，所附之圖式構成所說明之內容的一部份，且特定實施例係透過說明之方式繪示在所附之圖式中。就這方面來說，例如是「水平」、「垂直」、「前方」、「後方」等之方向術語係參照所說明之圖式的方向使用。因為實施例之元件可位於很多不同之方向中，方向術語係使用而用於說明之目的且不意味為限制。將理解的是，可利用其他實施例且結構或合乎邏輯之改變可在不脫離本發明之範疇的情況下進行。因此，下述之詳細說明不視為限制之意義，及本發明之範疇係由所附之申請專利範圍定義。所說明之實施例使用特定之語言，特定之語言不應解釋為所附之申請專利範圍之範疇的限制。In the detailed description below, the reference is achieved by the attached drawings, the attached drawings constitute a part of the content described, and specific embodiments are shown in the attached drawings by way of description in. In this regard, directional terms such as "horizontal", "vertical", "front", "rear" and the like are used with reference to the directions of the illustrated drawings. Because the elements of the embodiments may be located in many different directions, the directional terminology is used for the purpose of illustration and is not meant to be limiting. It will be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the invention. Therefore, the following detailed description is not to be regarded as limiting, and the scope of the present invention is defined by the scope of the attached patent application. The illustrated embodiments use a specific language, and the specific language should not be construed as a limitation of the scope of the appended patent application.

詳細的參照將以數種實施例達成，數種實施例之一或多個例子係繪示於圖式中。各例子係藉由說明的方式提供，且不意味為本發明之一限制。舉例來說，所說明或敘述而作為一實施例之部份之特徵可用於其他實施例或與其他實施例結合，以取得再其他實施例。此意指本發明包括此些調整及變化。說明之例子係使用特定之語言，特定之語言不應解釋為所附之申請專利範圍之範疇的限制。圖式係沒有按照比例繪製，且僅用於說明之目的。為了更加清楚，如果沒有另外說明，相同的元件或製造動作在不同圖式中係已經以相同參考編號標註。Detailed reference will be made in several embodiments, one or more examples of which are shown in the drawings. The examples are provided by way of illustration and are not meant to be a limitation of the present invention. For example, features described or described as part of one embodiment may be used in or combined with other embodiments to obtain yet other embodiments. This means that the invention includes such adjustments and changes. The illustrated examples use specific languages, and specific languages should not be construed as a limitation of the scope of the attached patent application. Schematics are not drawn to scale and are for illustration purposes only. For greater clarity, the same elements or manufacturing operations have been labeled with the same reference numbers in different drawings unless otherwise stated.

如此處所使用之名稱「真空處理環境」應理解為說明一低壓環境，薄膜在此低壓環境中可由適合之處理源進行處理。如此處所使用之名稱「真空破壞」應理解為說明一製程，於此製程中，將於真空環境中處理之元件在接續處理動作之間暴露於周圍、或不同大氣或處理環境。The name "vacuum processing environment" as used herein should be understood to mean a low-pressure environment in which the film can be processed by a suitable processing source. The name "vacuum failure" as used herein should be understood as describing a process in which components to be processed in a vacuum environment are exposed to the surroundings, or to different atmospheres or processing environments between successive processing actions.

根據數個方面，本揭露提供一種製造一電池之方法，其中此方法包括提供一分離膜，及使用(a)沈積一陽極材料層於分離膜之一第一側上，(b)沈積一陰極材料層於分離膜之一第二側上，第二側相反於第一側，(c)塗佈陽極材料層而具有一陽極觸點，及(d)塗佈陰極材料層而具有一陰極觸點之至少兩個動作處理分離膜。According to several aspects, the present disclosure provides a method of manufacturing a battery, wherein the method includes providing a separation membrane, and (a) depositing an anode material layer on a first side of the separation membrane, and (b) depositing a cathode. The material layer is on one of the second sides of the separation membrane, the second side is opposite to the first side, (c) the anode material layer is coated to have an anode contact, and (d) the cathode material layer is coated to have a cathode contact At least two actions of the points process the separation membrane.

根據此處所述之數個實施例，上述處理動作(a)至(d)之至少兩者係執行而不破壞在真空處理環境中之真空。舉例來說，動作(a)及(b)已經在共同處理環境中執行之後，動作(c)及(d)可在不同處理環境中執行。According to several embodiments described herein, at least two of the processing actions (a) to (d) described above are performed without disrupting the vacuum in a vacuum processing environment. For example, after actions (a) and (b) have been performed in a common processing environment, actions (c) and (d) can be performed in different processing environments.

再者，根據再其他方面，本揭露提供一種真空處理設備，適用於處理一分離膜。真空處理設備包括一第一塗佈鼓及至少一第二塗佈鼓，第一塗佈鼓具有至少一相關之第一側塗佈源，第一側塗佈源適用於處理分離膜之一第一側。此至少一第二塗佈鼓具有至少一相關之第二側塗佈源，第二側塗佈源適用於處理分離膜之一第二側。第一塗佈鼓及此至少一第二塗佈鼓係配置於一共同真空處理環境中。Furthermore, according to still other aspects, the present disclosure provides a vacuum processing apparatus suitable for processing a separation membrane. The vacuum processing equipment includes a first coating drum and at least one second coating drum. The first coating drum has at least one related first-side coating source, and the first-side coating source is suitable for processing one of the separation membranes. One side. The at least one second coating drum has at least one related second-side coating source, and the second-side coating source is suitable for processing a second side of the separation membrane. The first coating drum and the at least one second coating drum are disposed in a common vacuum processing environment.

再者，本揭露有關於一種電池，此電池由完全在單一、或共同真空處理環境中執行之方法製造。電池包括一分離膜、一陽極材料層、一陰極材料層、一陽極觸點、及一陰極觸點，陽極材料層沈積在分離膜之第一側上，陰極材料層沈積在分離膜之第二側上，第二側相反於第一側，陽極觸點塗佈於陽極材料層上，陰極觸點塗佈於陰極材料層上。電池係利用此處所述之方法製造。特別是，電池可藉由使用此處所述之真空處理設備製造。Furthermore, the present disclosure relates to a battery manufactured by a method performed entirely in a single, or common vacuum processing environment. The battery includes a separation membrane, an anode material layer, a cathode material layer, an anode contact, and a cathode contact. The anode material layer is deposited on the first side of the separation membrane, and the cathode material layer is deposited on the second side of the separation membrane. On the side, the second side is opposite to the first side, the anode contact is coated on the anode material layer, and the cathode contact is coated on the cathode material layer. The battery is manufactured using the method described herein. In particular, batteries can be manufactured by using the vacuum processing equipment described herein.

第1圖繪示根據一實施例之適用於處理分離膜200之真空處理設備100的示意方塊圖。如第1圖中所示，參考編號300表示共同真空處理環境，製造電池之一些或全部的處理動作可於共同真空處理環境中執行。分離膜200可提供於退捲器103上，退捲器103係於分離膜傳送時在箭頭110之方向中旋轉。再者，分離膜200可於至少一導引滾軸109之上方朝向第一塗佈鼓101導引。藉由通過第一塗佈鼓101附近，分離膜200可在分離膜200之第一側201、或前側進行處理。處理可藉由至少一第一側塗佈源105執行，舉例來說，陽極材料層可於第一側塗佈源105沈積於分離膜200之第一側201上。FIG. 1 is a schematic block diagram of a vacuum processing apparatus 100 suitable for processing a separation membrane 200 according to an embodiment. As shown in FIG. 1, the reference number 300 indicates a common vacuum processing environment, and some or all of the processing operations for manufacturing a battery can be performed in the common vacuum processing environment. The separation film 200 may be provided on the unwinder 103, which is rotated in the direction of the arrow 110 when the separation film is conveyed. Furthermore, the separation film 200 may be guided toward the first coating drum 101 above the at least one guide roller 109. The separation membrane 200 can be processed on the first side 201 or the front side of the separation membrane 200 by passing near the first coating drum 101. The processing may be performed by at least one first-side coating source 105. For example, the anode material layer may be deposited on the first side 201 of the separation membrane 200 at the first-side coating source 105.

根據可與此處所述其他實施例結合之一實施例，適用於退捲分離膜200之退捲器103及適用於捲起或再捲已處理之分離膜200的再捲器104可皆配置於共同真空處理環境300中。因此，可避免在接續處理動作之間的任何真空破壞。According to an embodiment which can be combined with other embodiments described herein, the unwinder 103 suitable for unwinding the separation membrane 200 and the rewinder 104 suitable for rolling or rewinding the processed separation film 200 may be configured In a common vacuum processing environment 300. Therefore, any vacuum damage between successive processing actions can be avoided.

於此注意的是，分離膜200可提供成一基材，此基材可作為離子阻擋層。更特別的是，分離膜可特別是穿透膜，適用於擺置穿透膜於電池的陽極及陰極之間。分離膜之功能一般係保持兩個電極分離，以避免電性短路，且同時亦提供需於電池中之電流通路期間接近電路之離子電荷載體的傳送。舉例來說，分離膜可為熱塑性聚合物，例如是聚對苯二甲酸乙二酯(Polyethylene terephthalate，PET)或聚丙烯(polypropylen，PP)。分離膜之厚度可為8μm及100 μm之間。It should be noted that the separation membrane 200 can be provided as a substrate, and the substrate can serve as an ion blocking layer. More specifically, the separation membrane can be a transmissive membrane in particular, and is suitable for placing the transmissive membrane between the anode and the cathode of a battery. The function of the separation membrane is generally to keep the two electrodes separated to avoid electrical short circuit, and at the same time to provide the transfer of ionic charge carriers that need to be close to the circuit during the current path in the battery. For example, the separation membrane may be a thermoplastic polymer, such as polyethylene terephthalate (PET) or polypropylene (polypropylen, PP). The thickness of the separation membrane can be between 8 μm and 100 μm.

根據可與此處所述其他實施例結合之數個實施例，此至少一第一側塗佈源105可選自由小舟式蒸發器(boat evaporator)、電子束(E-Beam)蒸發器、濺射陰極、物理氣相沈積(PVD)塗佈源、化學氣相沈積(CVD)塗佈源、及其任合組合所組成的群組。According to several embodiments that can be combined with other embodiments described herein, the at least one first-side coating source 105 can be selected from a free boat evaporator, an electron beam (E-Beam) evaporator, and a sputtering device. A group consisting of a cathode, a physical vapor deposition (PVD) coating source, a chemical vapor deposition (CVD) coating source, and any combination thereof.

第一側201已經處理之分離膜200可在傳送方向203中經由其他導引滾軸109朝向第二塗佈鼓102導引。作為一例子來說，分離膜200於大約是水平方向中從真空處理設備100之一部份傳送至真空處理設備100之另一部份，第一塗佈鼓101係位於真空處理設備100之此部分，第二塗佈鼓102係位於真空處理設備100之此另一部份。根據一實施例，真空處理設備100之此兩部份係位於共同真空處理環境300中。如同第一塗佈鼓101之例子中，可提供與第二塗佈鼓102相關之至少一第二側塗佈源107。藉此，第二側塗佈源107可使用於處理分離膜200之第二側202或背側。分離膜200之第二側202之處理可包括沈積陰極材料層於分離膜200上。The separation film 200 that has been processed on the first side 201 may be guided toward the second coating drum 102 in the conveying direction 203 via another guide roller 109. As an example, the separation membrane 200 is transferred from one part of the vacuum processing apparatus 100 to another part of the vacuum processing apparatus 100 in a horizontal direction, and the first coating drum 101 is located there. In part, the second coating drum 102 is located in this other part of the vacuum processing apparatus 100. According to an embodiment, these two parts of the vacuum processing apparatus 100 are located in a common vacuum processing environment 300. As in the example of the first coating drum 101, at least one second-side coating source 107 associated with the second coating drum 102 may be provided. Thereby, the second-side coating source 107 can be used for processing the second side 202 or the back side of the separation membrane 200. The processing of the second side 202 of the separation membrane 200 may include depositing a cathode material layer on the separation membrane 200.

如可見於繪示根據一實施例之真空處理設備100之第1圖的說明方塊圖中，分離膜200從第一塗佈鼓101導引至第二塗佈鼓102，使得分離膜200之不同側(第二側202)係於第二塗佈鼓102處理，第二側202也就是背側。也就是說，第一側塗佈源105可使用於處理分離膜200之第一側201或前側，及第二側塗佈源107可用以處理分離膜200之第二側202或背側。因此，分離膜200之雙側塗佈可於共同真空處理環境300中執行。用以處理分離膜200之處理動作可執行，而在接續處理動作之間沒有任何真空破壞。As can be seen in the explanatory block diagram showing the first diagram of the vacuum processing apparatus 100 according to an embodiment, the separation film 200 is guided from the first coating drum 101 to the second coating drum 102, so that the separation film 200 is different. The side (second side 202) is processed by the second coating drum 102, and the second side 202 is the back side. That is, the first side coating source 105 can be used to process the first side 201 or the front side of the separation membrane 200, and the second side coating source 107 can be used to process the second side 202 or the back side of the separation membrane 200. Therefore, the two-sided coating of the separation membrane 200 can be performed in the common vacuum processing environment 300. The processing action for processing the separation membrane 200 can be performed without any vacuum damage between subsequent processing actions.

分離膜200可接著於額外之導引滾軸109之上方朝向在箭頭111之方向中旋轉的再捲器104導引。已處理之分離膜200可在再捲器104捲起及可從共同真空處理環境300中移除，以供未來使用。The separation membrane 200 may then be guided over the additional guide roller 109 toward the re-roller 104 rotating in the direction of the arrow 111. The processed separation membrane 200 can be rolled up in the re-roller 104 and removed from the common vacuum processing environment 300 for future use.

根據可與此處所述其他實施例結合之數個實施例，與第二塗佈鼓102相關的此至少一第二側塗佈源107可選自由小舟式蒸發器、電子束蒸發器、濺射陰極、物理氣相沈積塗佈源、化學氣相沈積塗佈源、及其任合組合所組成的群組。According to several embodiments that can be combined with other embodiments described herein, the at least one second-side coating source 107 associated with the second coating drum 102 may be selected from a free boat evaporator, an electron beam evaporator, and a splash A group consisting of a cathode, a physical vapor deposition coating source, a chemical vapor deposition coating source, and any combination thereof.

於此注意的是，雖然未繪示於圖示中，可變數量之塗佈源可位於共同真空處理環境中。在此方式中，多種沈積製程可在共同真空處理環境300中執行，而不破壞真空。特別是，在單一動作中處理陽極及陰極元件以製造電池係可行的。It is noted here that although not shown in the drawings, a variable number of coating sources may be located in a common vacuum processing environment. In this manner, multiple deposition processes can be performed in a common vacuum processing environment 300 without breaking the vacuum. In particular, it is possible to process the anode and cathode elements to produce a battery system in a single operation.

第2圖繪示根據另一實施例之適用於處理分離膜200之真空處理設備100之示意方塊圖。在共同真空處理環境300中，可執行製造電池之處理動作。分離膜200係提供於退捲器103上，退捲器103在分離膜200傳送時於箭頭110之方向中旋轉。再者，分離膜200可於此至少一導引滾軸109之上方朝向第一塗佈鼓101導引。藉由通過第一塗佈鼓101附近，分離膜200之第一側201可進行處理。FIG. 2 is a schematic block diagram of a vacuum processing apparatus 100 suitable for processing a separation membrane 200 according to another embodiment. In the common vacuum processing environment 300, a processing operation for manufacturing a battery can be performed. The separation film 200 is provided on the unwinder 103, and the unwinder 103 rotates in the direction of the arrow 110 when the separation film 200 is conveyed. Furthermore, the separation film 200 may be guided toward the first coating drum 101 above the at least one guide roller 109. By passing near the first coating drum 101, the first side 201 of the separation membrane 200 can be processed.

在第2圖中所示之真空處理設備100中，第一側201之處理係藉由兩個不同之第一側塗佈源105及106執行。根據可與此處所述其他實施例結合之數個實施例，此一第一側塗佈源105、106之一或二者可選自由小舟式蒸發器、電子束蒸發器、濺射陰極、物理氣相沈積塗佈源、化學氣相沈積塗佈源、及其之任合組合所組成的群組。處理可由第一側塗佈源105執行，舉例來說，陽極材料層係於第一側塗佈源105沈積於分離膜200之第一側201上。接著，分離膜200前進且通過另一第一側塗佈源106，舉例來說，陽極材料層可在第一側塗佈源106塗佈而具有陽極觸點。In the vacuum processing apparatus 100 shown in FIG. 2, the processing of the first side 201 is performed by two different first-side coating sources 105 and 106. According to several embodiments that can be combined with other embodiments described herein, one or both of this first side coating source 105, 106 can be selected from free boat evaporators, electron beam evaporators, sputtering cathodes, A group consisting of a physical vapor deposition coating source, a chemical vapor deposition coating source, and any combination thereof. The processing may be performed by the first-side coating source 105. For example, the anode material layer is deposited on the first side 201 of the separation film 200 by the first-side coating source 105. Next, the separation membrane 200 is advanced and passed through the other first-side coating source 106. For example, the anode material layer may be coated on the first-side coating source 106 to have anode contacts.

接著，第一側201已經處理之分離膜200可在傳送方向203中經由其他導引滾軸109朝向第二塗佈鼓102導引。在第二塗佈鼓102，分離膜200之第二側202之處理可以類似於已經在此處有關於第1圖之說明的方式執行。如同在第一塗佈鼓101之例子中，第二側塗佈源107可與第二塗佈鼓102相關。分離膜200之第二側202之處理可包括沈積陰極材料層於分離膜200上。Then, the separation membrane 200 that has been processed on the first side 201 may be guided toward the second coating drum 102 via the other guide rollers 109 in the conveying direction 203. At the second coating drum 102, the processing of the second side 202 of the separation membrane 200 may be performed in a manner similar to that already described herein with respect to FIG. As in the example of the first coating drum 101, the second side coating source 107 may be related to the second coating drum 102. The processing of the second side 202 of the separation membrane 200 may include depositing a cathode material layer on the separation membrane 200.

如可見於繪示根據一實施例之真空處理設備100之第2圖的說明方塊圖中，分離膜200係從第一塗佈鼓101導引至第二塗佈鼓102，使得分離膜200之不同側(第二側202)目前可於第二塗佈鼓102處理，第二側202也就是背側。也就是說，第一側塗佈源105、106可使用於處理分離膜200之第一側201或前側，其中第二側塗佈源107可使用於處理分離膜200之第二側202或背側。因此，分離膜200之雙側塗佈可於共同真空處理環境300中執行。在此方式中，用於處理分離膜200的處理動作可執行，而不在接續處理動作之間有任何真空破壞。As can be seen in the explanatory block diagram showing the second diagram of the vacuum processing apparatus 100 according to an embodiment, the separation film 200 is guided from the first coating drum 101 to the second coating drum 102 such that The different side (second side 202) can be currently processed on the second coating drum 102, and the second side 202 is also the back side. That is, the first side coating source 105, 106 can be used to process the first side 201 or the front side of the separation membrane 200, and the second side coating source 107 can be used to process the second side 202 or the back of the separation membrane 200. side. Therefore, the two-sided coating of the separation membrane 200 can be performed in the common vacuum processing environment 300. In this manner, a processing action for processing the separation membrane 200 can be performed without any vacuum damage between subsequent processing actions.

另外，分離膜200可於額外之導引滾軸109之上方朝向於箭頭111之方向中旋轉的再捲器104導引。已處理之分離膜 200係在再捲器104捲起及可從共同真空處理環境300中移除，以供未來使用。於此注意的是，雖然未繪示於圖示中，可變數量之塗佈源可位於共同真空處理環境300中。在此方式中，數種沈積製程可在共同真空處理環境300中執行，而不破壞真空。In addition, the separation film 200 may be guided above the additional guide roller 109 toward the re-roller 104 rotating in the direction of the arrow 111. The treated separation membrane 200 is rolled up in a rewinder 104 and can be removed from the common vacuum processing environment 300 for future use. It is noted here that although not shown in the drawings, a variable number of coating sources may be located in the common vacuum processing environment 300. In this manner, several deposition processes can be performed in a common vacuum processing environment 300 without breaking the vacuum.

第3圖繪示根據數個實施例之適用於處理分離膜200之真空處理設備100之示意方塊圖。如第3圖中所繪示，可提供兩個分離之真空處理環境，也就是第一真空處理環境301和第二真空處理環境302。此兩個真空處理環境也就是第一真空處理環境301及第二真空處理環境302，此兩個真空處理環境可彼此相鄰且經由真空鎖303互相連接，分離膜200可於傳送方向203中通過真空鎖 303。於第一真空處理環境301中，可處理分離膜200之第一側201，其中分離膜200之第二側202可於第二真空處理環境302中處理。FIG. 3 illustrates a schematic block diagram of a vacuum processing apparatus 100 suitable for processing a separation membrane 200 according to several embodiments. As shown in FIG. 3, two separate vacuum processing environments can be provided, namely a first vacuum processing environment 301 and a second vacuum processing environment 302. The two vacuum processing environments are the first vacuum processing environment 301 and the second vacuum processing environment 302. The two vacuum processing environments can be adjacent to each other and connected to each other through a vacuum lock 303. The separation membrane 200 can pass in the conveying direction 203 Vacuum lock 303. In the first vacuum processing environment 301, the first side 201 of the separation membrane 200 can be processed, and the second side 202 of the separation membrane 200 can be processed in the second vacuum processing environment 302.

在各第一真空處理環境301及第二真空處理環境302中，可分別執行製造電池之不同處理動作，而不破壞真空。再者，分離膜200可提供於退捲器103上，退捲器103位於第一真空處理環境中且於分離膜200傳送時在箭頭110之方向中旋轉。再者，分離膜200係於至少一導引滾軸109之上方朝向第一塗佈鼓101導引。藉由通過第一塗佈鼓101附近，分離膜200之第一側201可進行處理。如第3圖中所繪示，第一側201之處理可藉由兩個不同之第一側塗佈源105及106執行。In each of the first vacuum processing environment 301 and the second vacuum processing environment 302, different processing actions for manufacturing a battery can be performed without breaking the vacuum. Furthermore, the separation film 200 may be provided on the unwinder 103, which is located in the first vacuum processing environment and rotates in the direction of the arrow 110 when the separation film 200 is conveyed. Moreover, the separation film 200 is guided above the at least one guide roller 109 toward the first coating drum 101. By passing near the first coating drum 101, the first side 201 of the separation membrane 200 can be processed. As shown in FIG. 3, the processing of the first side 201 can be performed by two different first-side coating sources 105 and 106.

根據可與此處所述其他實施例結合之數個實施例，此一第一側塗佈源105、106之一或二者可選自由小舟式蒸發器、電子束蒸發器、濺射陰極、物理氣相沈積塗佈源、化學氣相沈積塗佈源、及其之任合組合所組成的群組。處理可由第一側塗佈源105執行，舉例來說，陽極材料層係於第一側塗佈源105沈積於分離膜200之第一側201 上。接著，分離膜200前進且通過另一第一側塗佈源106，舉例來說，陽極材料層可在第一側塗佈源106塗佈而具有陽極觸點。According to several embodiments that can be combined with other embodiments described herein, one or both of this first side coating source 105, 106 can be selected from free boat evaporators, electron beam evaporators, sputtering cathodes, A group consisting of a physical vapor deposition coating source, a chemical vapor deposition coating source, and any combination thereof. The processing may be performed by the first-side coating source 105. For example, the anode material layer is deposited on the first side 201 of the separation membrane 200 by the first-side coating source 105. Next, the separation membrane 200 is advanced and passed through the other first-side coating source 106. For example, the anode material layer may be coated on the first-side coating source 106 to have anode contacts.

接著，第一側201已經處理之分離膜200可在傳送方向203中從第一真空處理環境301經由其他導引滾軸109導引到第二真空處理環境302。分離膜200可朝向第二塗佈鼓102通過真空鎖303。如第3圖中所繪示，第二側202之處理可藉由兩個不同之第二側塗佈源107及108執行。根據可與此處所述其他實施例結合之數個實施例，此一第二側塗佈源107、108之一或二者可選自由小舟式蒸發器、電子束蒸發器、濺射陰極、物理氣相沈積塗佈源、化學氣相沈積塗佈源、及其之任合組合所組成的群組。Then, the separation membrane 200 that has been processed on the first side 201 may be guided in the conveying direction 203 from the first vacuum processing environment 301 to the second vacuum processing environment 302 through other guide rollers 109. The separation film 200 may pass through the vacuum lock 303 toward the second coating drum 102. As shown in FIG. 3, the processing of the second side 202 may be performed by two different second-side coating sources 107 and 108. According to several embodiments that can be combined with other embodiments described herein, one or both of this second side coating source 107, 108 can be selected from free boat evaporators, electron beam evaporators, sputtering cathodes, A group consisting of a physical vapor deposition coating source, a chemical vapor deposition coating source, and any combination thereof.

處理可由第二側塗佈源107執行，舉例來說，陰極材料層係於第二側塗佈源107沈積於分離膜200之第二側202上。接著，分離膜200可更前進且通過另一第二側塗佈源108，舉例來說，陰極材料層在第二側塗佈源108塗佈而具有陰極觸點。The processing may be performed by the second-side coating source 107, for example, the cathode material layer is deposited on the second side 202 of the separation membrane 200 on the second-side coating source 107. Then, the separation membrane 200 can be further advanced and coated by another second-side coating source 108, for example, the cathode material layer is coated on the second-side coating source 108 to have a cathode contact.

如可見於繪示根據一實施例之真空處理設備100之第3圖的說明方塊圖中，分離膜200可從第一塗佈鼓101導引至第二塗佈鼓102，使得分離膜200之兩個相反側(第一側201及第二側202)可進行處理且可執行分離膜200之雙側塗佈。根據如第3圖中所示之真空處理設備100，用於處理分離膜200之第一側201之處理動作可於共同、第一真空處理環境301中執行，而不沒有真空破壞。另一方面，分離膜200之第二側202之處理可於共同、第二真空處理環境302中執行，而不沒有真空破壞。在此方法中，分別用於處理分離膜200之第一側201及第二側202之連續處理動作可執行而不沒有真空破壞。分離膜200可接著於額外之導引滾軸109之上方朝向位於第二真空處理環境302中之再捲器104導引。已處理之分離膜200可在再捲器104捲起及可從第二真空處理環境302中移除，以供未來使用。As can be seen in the explanatory block diagram of FIG. 3 showing the vacuum processing apparatus 100 according to an embodiment, the separation membrane 200 can be guided from the first coating drum 101 to the second coating drum 102 such that The two opposite sides (the first side 201 and the second side 202) can be processed and double-sided coating of the separation membrane 200 can be performed. According to the vacuum processing apparatus 100 shown in FIG. 3, the processing action for processing the first side 201 of the separation membrane 200 can be performed in a common, first vacuum processing environment 301 without vacuum destruction. On the other hand, the processing of the second side 202 of the separation membrane 200 can be performed in a common, second vacuum processing environment 302 without vacuum damage. In this method, continuous processing actions for processing the first side 201 and the second side 202 of the separation membrane 200 can be performed without vacuum damage, respectively. The separation membrane 200 may then be guided over the additional guide roller 109 toward the re-roller 104 located in the second vacuum processing environment 302. The processed separation membrane 200 can be rolled up in the rewinder 104 and removed from the second vacuum processing environment 302 for future use.

第4繪示根據再另一實施例之適用於處理分離膜200之真空處理設備100之示意方塊圖。再者，參考編號300表示共同真空處理環境，製造電池之四個處理動作可在共同真空處理環境中執行。如同前述，分離膜200可提供於退捲器103上，退捲器103在分離膜傳送時於箭頭110之方向中旋轉。再者，分離膜200可於至少一導引滾軸109之上方朝向第一塗佈鼓101導引。藉由通過第一塗佈鼓101附近，可處理分離膜200之第一側201、或前側。處理可藉由至少一第一側塗佈源105、106執行。根據可與此處所述其他實施例結合之一實施例，適用於退捲分離膜200之退捲器103及適用於捲起或再捲已處理之分離膜200之再捲器104可配置於共同真空處理環境300中。因此，可避免在接續處理動作之間的任何真空破壞。A fourth block diagram is a schematic block diagram of a vacuum processing apparatus 100 suitable for processing a separation membrane 200 according to still another embodiment. Furthermore, the reference number 300 indicates a common vacuum processing environment, and the four processing actions for manufacturing a battery can be performed in the common vacuum processing environment. As before, the separation film 200 may be provided on the unwinder 103, which rotates in the direction of the arrow 110 when the separation film is conveyed. Furthermore, the separation film 200 may be guided toward the first coating drum 101 above the at least one guide roller 109. By passing near the first coating drum 101, the first side 201 or the front side of the separation membrane 200 can be processed. The processing may be performed by at least one first-side coating source 105, 106. According to an embodiment that can be combined with other embodiments described herein, a rewinder 103 suitable for unwinding the separation membrane 200 and a rewinder 104 suitable for rolling or rewinding the processed separation membrane 200 can be configured at Common vacuum processing environment 300. Therefore, any vacuum damage between successive processing actions can be avoided.

根據可與此處所述其他實施例結合之數個實施例，繪示於第4圖中之此兩個第一側塗佈源105、106可選自由小舟式蒸發器、電子束蒸發器、濺射陰極、物理氣相沈積塗佈源、化學氣相沈積塗佈源、及其之任合組合所組成的群組。處理可由第一側塗佈源105執行，舉例來說，陽極材料層係於第一側塗佈源105沈積於分離膜200之第一側201上。接著，分離膜200可更前進且通過另一第一側塗佈源106，舉例來說，陽極材料層可在第一側塗佈源106塗佈而具有陽極觸點。According to several embodiments that can be combined with other embodiments described herein, the two first-side coating sources 105 and 106 shown in FIG. 4 are optional free boat evaporators, electron beam evaporators, A group consisting of a sputtering cathode, a physical vapor deposition coating source, a chemical vapor deposition coating source, and any combination thereof. The processing may be performed by the first-side coating source 105. For example, the anode material layer is deposited on the first side 201 of the separation film 200 by the first-side coating source 105. Then, the separation membrane 200 may be further advanced and passed through another first-side coating source 106, for example, the anode material layer may be coated on the first-side coating source 106 to have anode contacts.

接著，第一側201已經處理之分離膜200可在傳送方向203中經由其他導引滾軸109朝向第二塗佈鼓102導引。作為一例子來說，分離膜200於大約是水平方向中從真空處理設備100之一部份傳送至真空處理設備100之另一部份，第一塗佈鼓101係位於真空處理設備100之此部分，第二塗佈鼓102係位於真空處理設備100之此另一部份。根據一實施例，真空處理設備100之此兩部份係位於共同真空處理環境300中。如同在第一塗佈鼓101之例子中，第二側塗佈源107、108可與第二塗佈鼓102相關。因此，至少一第二側塗佈源107、108可使用以用於處理通過之分離膜200之第二側202。根據可與此處所述其他實施例結合之數個實施例，此一第二側塗佈源107、108之一或二者可選自由小舟式蒸發器、電子束蒸發器、濺射陰極、物理氣相沈積塗佈源、化學氣相沈積塗佈源、及其之任合組合所組成的群組。Then, the separation membrane 200 that has been processed on the first side 201 may be guided toward the second coating drum 102 via the other guide rollers 109 in the conveying direction 203. As an example, the separation membrane 200 is transferred from one part of the vacuum processing apparatus 100 to another part of the vacuum processing apparatus 100 in a horizontal direction, and the first coating drum 101 is located there. In part, the second coating drum 102 is located in this other part of the vacuum processing apparatus 100. According to an embodiment, these two parts of the vacuum processing apparatus 100 are located in a common vacuum processing environment 300. As in the example of the first coating drum 101, the second side coating sources 107, 108 may be related to the second coating drum 102. Therefore, at least one second-side coating source 107, 108 can be used for processing the second side 202 of the separation membrane 200 passing therethrough. According to several embodiments that can be combined with other embodiments described herein, one or both of this second side coating source 107, 108 can be selected from free boat evaporators, electron beam evaporators, sputtering cathodes, A group consisting of a physical vapor deposition coating source, a chemical vapor deposition coating source, and any combination thereof.

處理可由第二側塗佈源107執行，舉例來說，陰極材料層係於第二側塗佈源107沈積於分離膜200之第二側202上，第二側202相反於第一側201。接著，分離膜200可更前進且通過另一第二側塗佈源108，舉例來說，陰極材料層可在第二側塗佈源108塗佈而具有陰極觸點。The processing may be performed by the second-side coating source 107. For example, the cathode material layer is deposited on the second side 202 of the separation film 200 on the second-side coating source 107, and the second side 202 is opposite to the first side 201. Then, the separation membrane 200 can be further advanced and passed through another second-side coating source 108, for example, the cathode material layer can be coated on the second-side coating source 108 to have a cathode contact.

如可見於繪示根據一實施例之真空處理設備100之第4圖的說明方塊圖中，分離膜200從第一塗佈鼓101導引至第二塗佈鼓102，使得分離膜200之不同側(第二側202)目前係於第二塗佈鼓102處理，第二側202也就是背側。也就是說，第一側塗佈源105、106可分別使用以處理分離膜200之第一側201或前側，其中第二側塗佈源107、108可分別使用以處理分離膜200之第二側202或背側。因此，分離膜200之雙側塗佈可於共同真空處理環境300中執行。在此方式中，用以處理分離膜200的處理動作可執行，而在接續處理動作之間沒有任何真空破壞。As can be seen in the explanatory block diagram of FIG. 4 showing the vacuum processing apparatus 100 according to an embodiment, the separation film 200 is guided from the first coating drum 101 to the second coating drum 102, so that the separation film 200 is different. The side (second side 202) is currently handled by the second coating drum 102, and the second side 202 is also the back side. That is, the first side coating sources 105 and 106 can be used to process the first side 201 or the front side of the separation membrane 200 respectively, and the second side coating sources 107 and 108 can be used to process the second side of the separation membrane 200 respectively. Side 202 or dorsal side. Therefore, the two-sided coating of the separation membrane 200 can be performed in the common vacuum processing environment 300. In this manner, the processing action for processing the separation membrane 200 can be performed without any vacuum damage between subsequent processing actions.

分離膜200可接著於額外之導引滾軸109的上方朝向再捲器104導引，再捲器104於箭頭111之方向中旋轉。已處理之分離膜200可在再捲器104捲起及可從共同真空處理環境300移除，以供未來使用。The separation film 200 can then be guided toward the re-roller 104 above the additional guide roller 109, and the re-roller 104 is rotated in the direction of the arrow 111. The processed separation membrane 200 can be rolled up at the rewinder 104 and removed from the common vacuum processing environment 300 for future use.

根據可與此處所述其他實施例結合之數個實施例，有關於第二側塗佈鼓102之此至少一第二側塗佈源107、108可選自由小舟式蒸發器、電子束蒸發器、濺射陰極、物理氣相沈積塗佈源、 化學氣相沈積塗佈源、及其任何組合所組成的群組。According to several embodiments that can be combined with other embodiments described herein, the at least one second-side coating source 107, 108 of the second-side coating drum 102 can be selected from a free boat evaporator and an electron beam evaporation. A group consisting of a generator, a sputtering cathode, a physical vapor deposition coating source, a chemical vapor deposition coating source, and any combination thereof.

於此注意的是，雖然未繪示於圖示中，可變數量之塗佈源可位於共同真空處理環境300中。於此方式中，多種沈積製程可於共同真空處理環境300中執行，而不破壞真空。特別是，在單一動作中處理陽極及陰極元件以取得電池係可行的。在分離膜200之處理期間沒有真空破壞可減少已塗佈之材料氧化，使得無需額外的膜或間隔物用以覆蓋及保護已塗佈之材料。It is noted here that although not shown in the drawings, a variable number of coating sources may be located in the common vacuum processing environment 300. In this manner, multiple deposition processes can be performed in a common vacuum processing environment 300 without breaking the vacuum. In particular, it is feasible to process the anode and cathode elements to obtain a battery system in a single operation. The absence of vacuum disruption during the processing of the separation membrane 200 can reduce oxidation of the coated material, so that no additional membranes or spacers are needed to cover and protect the coated material.

在此方法中，可取得真空處理設備100，真空處理設備100包括第一塗佈鼓101及至少一第二塗佈鼓102。第一塗佈鼓101具有至少一相關之第一側塗佈源105、106，第一側塗佈源105、106適用於處理分離膜200之第一側201。此至少一第二塗佈鼓102具有至少一相關之第二側塗佈源107、108，第二側塗佈源107、108適用於處理分離膜200之第二側202。特別是，第一塗佈鼓101與其相關之第一側塗佈源105、106及此至少一第二塗佈鼓102與其相關之第二側塗佈源107、108係配置於共同真空處理環境300中，以可避免破壞真空。In this method, a vacuum processing apparatus 100 may be obtained. The vacuum processing apparatus 100 includes a first coating drum 101 and at least one second coating drum 102. The first coating drum 101 has at least one related first-side coating source 105, 106, and the first-side coating source 105, 106 is suitable for processing the first side 201 of the separation membrane 200. The at least one second coating drum 102 has at least one associated second side coating source 107, 108, and the second side coating source 107, 108 is suitable for processing the second side 202 of the separation membrane 200. In particular, the first coating drum 101 and its associated first-side coating sources 105, 106 and the at least one second coating drum 102 and its associated second-side coating sources 107, 108 are disposed in a common vacuum processing environment 300 to avoid breaking the vacuum.

第5圖繪示根據一實施例之用以說明製造具有分離膜之電池的方法之流程圖。此程序開始於方塊401。接著，於方塊402，分離膜200係提供。分離膜200係接著使用下述動作(a)至(d)之至少二者處理： a) 沈積陽極材料層於分離膜之第一側上，方塊403a； b) 沈積陰極材料層於分離膜之第二側上，第二側相反於第一側，方塊403b； c) 塗佈陽極材料層而具有陽極觸點，方塊403c；以及 d) 塗佈陰極材料層而具有陰極觸點，方塊403d。FIG. 5 is a flowchart illustrating a method of manufacturing a battery with a separation membrane according to an embodiment. The process begins at block 401. Next, at block 402, the separation membrane 200 is provided. The separation membrane 200 is then treated using at least two of the following actions (a) to (d): a) depositing an anode material layer on the first side of the separation membrane, block 403a; b) depositing a cathode material layer on the separation membrane On the second side, the second side is opposite to the first side, block 403b; c) the anode material layer is coated with anode contacts, block 403c; and d) the cathode material layer is coated with cathode contacts, block 403d.

在方塊404，程序可結束。具有陽極材料層、陰極材料層、陽極觸點及陰極觸點沈積於其上之已處理之分離膜可接著捲起，以形成電池。At block 404, the process may end. A treated separation membrane having an anode material layer, a cathode material layer, an anode contact, and a cathode contact deposited thereon can then be rolled up to form a battery.

根據此處所述之數個實施例，上述處理動作(a)至(d)之至少二者係執行不破壞真空，也就是在共同真空處理環境中。舉例來說，在動作(a)及(b)已經於共同真空處理環境中執行之後，動作(c)及(d)可在不同之處理環境中執行，或反之亦然。According to several embodiments described herein, at least two of the above processing actions (a) to (d) are performed without destroying the vacuum, that is, in a common vacuum processing environment. For example, after actions (a) and (b) have been performed in a common vacuum processing environment, actions (c) and (d) can be performed in different processing environments, or vice versa.

根據可與此處所述其他實施例結合之一實施例，分離膜200可提供於卷對卷(roll-to-roll)配置中，卷對卷配置之元件係配置在共同真空處理環境300中。特別是，分離膜200可導引於具有至少一相關之第一側塗佈源105、106之第一塗佈鼓101之上方，用以處理分離膜200之第一側201。再者，分離膜200可導引於具有至少一相關之第二側塗佈源107、108之第二塗佈鼓102之上方，用以在共同真空處理環境300中處理分離膜200之第二側202，使得分離膜200之雙側處理可執行而不破壞真空。According to an embodiment that can be combined with other embodiments described herein, the separation membrane 200 may be provided in a roll-to-roll configuration, and the elements of the roll-to-roll configuration are configured in a common vacuum processing environment 300 . In particular, the separation membrane 200 may be guided above the first coating drum 101 having at least one associated first-side coating source 105, 106 for processing the first side 201 of the separation membrane 200. Furthermore, the separation membrane 200 may be guided above the second coating drum 102 having at least one associated second-side coating source 107, 108 for processing the second of the separation membrane 200 in a common vacuum processing environment 300. The side 202 makes the two-sided processing of the separation membrane 200 executable without breaking the vacuum.

因此，沈積材料層於分離膜200之第一側201及第二側202之其中一者可藉由數種真空沈積製程執行。根據可與此處所述其他實施例結合之數個實施例，沈積材料層於分離膜200之第一側201及第二側202之其中一者上可藉由第一側塗佈源105、106及第二側塗佈源107、108之至少一者執行，第一側塗佈源105、106及第二側塗佈源107、108選自由小舟式蒸發器、電子束蒸發器、濺射陰極、物理氣相沈積塗佈源、化學氣相沈積塗佈源、及其任何組合所組成的群組。Therefore, depositing a material layer on one of the first side 201 and the second side 202 of the separation film 200 can be performed by several vacuum deposition processes. According to several embodiments that can be combined with other embodiments described herein, the deposition material layer can be deposited on the first side 201 and the second side 202 of the separation membrane 200 by the first side coating source 105, At least one of 106 and the second-side coating source 107, 108 is performed, and the first-side coating source 105, 106 and the second-side coating source 107, 108 are selected from a boat-type evaporator, an electron beam evaporator, and sputtering A group consisting of a cathode, a physical vapor deposition coating source, a chemical vapor deposition coating source, and any combination thereof.

第6圖繪示根據一實施例之由第5圖中所示之方法製造的電池208之數層的示意圖。如第6圖中所示，不同層可沈積於分離膜200之任一側上。於此注意的是，雖然未繪示於圖示中，根據此處所述實施例之形成電池208可包括一起捲起已處理之分離膜200及已沈積層。如圖示所繪示，在分離膜200之第一側201之分離膜200之處理已經藉由至少一個第一側塗佈源105執行，其中陽極材料層205已經沈積於第一側201上。FIG. 6 is a schematic diagram of several layers of the battery 208 manufactured by the method shown in FIG. 5 according to an embodiment. As shown in FIG. 6, different layers may be deposited on either side of the separation film 200. It is noted here that although not shown in the drawings, forming the battery 208 according to the embodiments described herein may include rolling up the treated separation membrane 200 and the deposited layer together. As shown in the figure, the processing of the separation membrane 200 on the first side 201 of the separation membrane 200 has been performed by at least one first-side coating source 105, wherein the anode material layer 205 has been deposited on the first side 201.

根據可與此處所述其他實施例結合之一實施例中，沈積陽極材料層於分離膜200之第一側201上可包括沈積負主動材料，負主動材料選自由碳、石墨、PVdF、矽基材料、金屬-陽極材料、及其任何組合所組成之群組，第一側201相反於第二側202。According to one embodiment that can be combined with other embodiments described herein, depositing the anode material layer on the first side 201 of the separation membrane 200 may include depositing a negative active material selected from the group consisting of carbon, graphite, PVdF, silicon In a group consisting of a base material, a metal-anode material, and any combination thereof, the first side 201 is opposite to the second side 202.

此時，分離膜200已經在傳送方向203中前進，使得分離膜200已經通過另一第一側塗佈源106，陽極材料層205在第一側塗佈源106已經塗佈而具有陽極觸點206。At this time, the separation membrane 200 has advanced in the conveying direction 203, so that the separation membrane 200 has passed through the other first-side coating source 106, and the anode material layer 205 has been coated on the first-side coating source 106 with anode contacts. 206.

再者，在分離膜200之第二側202之分離膜200之處理已經藉由至少一第二側塗佈源107執行，其中陰極材料層204已經沈積於分離膜200之第二側202上。Furthermore, the processing of the separation membrane 200 on the second side 202 of the separation membrane 200 has been performed by at least one second side coating source 107, wherein the cathode material layer 204 has been deposited on the second side 202 of the separation membrane 200.

根據可與此處所述其他實施例結合之一實施例，沈積陰極材料層於分離膜200之第二側202上可包括沈積正主動材料，選自由鋰金屬、鋰氧化物、銅、LiCoO2 、LiNx Co1-x O2 、LiMn2 O4 、PVdF、LiFePO4 、及其任何組合所組成之群組。According to an embodiment that can be combined with other embodiments described herein, depositing a cathode material layer on the second side 202 of the separation membrane 200 may include depositing a positive active material selected from the group consisting of lithium metal, lithium oxide, copper, and LiCoO 2 , LiN x Co 1-x O 2 , LiMn 2 O 4 , PVdF, LiFePO 4 , and any combination thereof.

此時，分離膜200已經於傳送方向203中前進，使得 分離膜200已經通過另一第二側塗佈源108，陰極材料層204在第二側塗佈源108已經塗佈而具有陰極觸點207。At this time, the separation membrane 200 has advanced in the conveying direction 203, so that the separation membrane 200 has passed through the other second-side coating source 108, and the cathode material layer 204 has been coated on the second-side coating source 108 and has a cathode contact. 207.

於此注意的是，於實施例中避免或減少分離膜200之收縮係有需要的。特別是，關於電池而言，分離膜200之變形或收縮可能為有損害的，因為分離膜之收縮可能導致陽極材料層及陰極材料層之間接觸或短路。藉由適合之材料選擇及/或處理動作，分離膜200之收縮可特別避免或至少減少。It should be noted that it is necessary to avoid or reduce the shrinkage of the separation membrane 200 in the embodiment. In particular, regarding the battery, the deformation or shrinkage of the separation membrane 200 may be damaging, because the shrinkage of the separation membrane may cause contact or short circuit between the anode material layer and the cathode material layer. By suitable material selection and / or processing actions, the shrinkage of the separation membrane 200 can be particularly avoided or at least reduced.

根據可與此處所述其他實施例結合之另一實施例，分離膜200之處理可更包括提供收縮減少層，收縮減少層適用於減少分離膜200之收縮。根據其之調整，收縮減少層可提供為Al2 O3 塗層。再者，用於收縮減少層之材料可選自由Al2 O3 、AlOx 、陶瓷、及其之任何組合所組成之群組。於此方式中，在共同真空處理環境300中之處理動作期間，分離膜200之收縮可避免或至少減少，且除此之外，電池表現可改善。收縮減少層例如是Al2 O3 層，可提供為具有50 nm及300 nm之間的厚度之層。According to another embodiment that can be combined with other embodiments described herein, the processing of the separation membrane 200 may further include providing a shrinkage reduction layer, which is adapted to reduce the shrinkage of the separation membrane 200. According to its adjustment, the shrinkage reduction layer can be provided as an Al 2 O 3 coating. Furthermore, the material used for the shrinkage reduction layer may be selected from the group consisting of Al 2 O 3 , AlO x , ceramics, and any combination thereof. In this manner, during the processing action in the common vacuum processing environment 300, the shrinkage of the separation membrane 200 can be avoided or at least reduced, and in addition, the battery performance can be improved. The shrinkage reduction layer is, for example, an Al 2 O 3 layer, and can be provided as a layer having a thickness between 50 nm and 300 nm.

為了保護沈積於分離膜200上之材料層及/或觸點，根據再另一調整，至少一保護層可沈積於陽極觸點及陰極觸點之至少一者上。In order to protect the material layer and / or the contacts deposited on the separation film 200, according to still another adjustment, at least one protective layer may be deposited on at least one of the anode contact and the cathode contact.

於此方式中，可製造出電池。此電池包括分離膜200、沈積於分離膜200之第一側201上之陽極材料層205、沈積於分離膜200之第二側202上之陰極材料層204，第二側202相反於第一側201、塗佈於陽極材料層205上之陽極觸點206、及塗佈於陰極材料層204上之陰極觸點207。In this way, a battery can be manufactured. The battery includes a separation membrane 200, an anode material layer 205 deposited on a first side 201 of the separation membrane 200, and a cathode material layer 204 deposited on a second side 202 of the separation membrane 200. The second side 202 is opposite to the first side 201. An anode contact 206 coated on the anode material layer 205 and a cathode contact 207 coated on the cathode material layer 204.

根據可與此處所述其他實施例結合之一實施例，根據此處所述方法製造之電池可具有陽極材料層205及/或陰極材料層204之層厚度為從1 µm至100 µm之範圍中，較佳地為從2µm 至20 µm之範圍中，且更佳地為從3 µm 至15 µm之範圍中。因此，可製造出非常薄且輕量之電池。於此方式中，可取得提供高能量密度及僅耗損電子裝置中的少量固定空間之電池或電池單元，此電子裝置係由電池或電池單元供電。According to an embodiment that can be combined with other embodiments described herein, a battery manufactured according to the method described herein may have an anode material layer 205 and / or a cathode material layer 204 with a layer thickness ranging from 1 µm to 100 µm Among them, it is preferably in a range from 2 µm to 20 µm, and more preferably in a range from 3 µm to 15 µm. Therefore, a very thin and lightweight battery can be manufactured. In this way, a battery or a battery unit that provides a high energy density and consumes only a small amount of fixed space in an electronic device can be obtained. The electronic device is powered by the battery or battery unit.

綜上所述，雖然本發明已以實施例揭露如上，然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者，在不脫離本發明之精神和範圍內，當可作各種之更動與潤飾。因此，本發明之保護範圍當視後附之申請專利範圍所界定者為準。In summary, although the present invention has been disclosed as above with the embodiments, it is not intended to limit the present invention. Those with ordinary knowledge in the technical field to which the present invention pertains can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the scope of the attached patent application.

100‧‧‧真空處理設備
101‧‧‧第一塗佈鼓
102‧‧‧第二塗佈鼓
103‧‧‧退捲器
104‧‧‧再捲器
105、106‧‧‧第一側塗佈源
107、108‧‧‧第二側塗佈源
109‧‧‧導引滾軸
110、111‧‧‧箭頭
200‧‧‧分離膜
201‧‧‧第一側
202‧‧‧第二側
203‧‧‧傳送方向
204‧‧‧陰極材料層
205‧‧‧陽極材料層
206‧‧‧陽極觸點
207‧‧‧陰極觸點
208‧‧‧電池
300‧‧‧共同真空處理環境
301‧‧‧第一真空處理環境
302‧‧‧第二真空處理環境
303‧‧‧真空鎖
401、402、403a、403b、403c、403d、404‧‧‧方塊100‧‧‧Vacuum processing equipment
101‧‧‧The first coating drum
102‧‧‧Second coating drum
103‧‧‧Unwinder
104‧‧‧ Rewinder
105, 106‧‧‧ first side coating source
107, 108‧‧‧Second side coating source
109‧‧‧Guide roller
110, 111‧‧‧ arrows
200‧‧‧ separation membrane
201‧‧‧First side
202‧‧‧Second side
203‧‧‧Transfer direction
204‧‧‧ cathode material layer
205‧‧‧Anode material layer
206‧‧‧Anode contact
207‧‧‧ cathode contact
208‧‧‧battery
300‧‧‧Common vacuum processing environment
301‧‧‧The first vacuum processing environment
302‧‧‧Second vacuum processing environment
303‧‧‧vacuum lock
401, 402, 403a, 403b, 403c, 403d, 404‧‧‧ blocks

為了使本揭露的上述特徵可詳細地瞭解，簡要摘錄於上之本揭露更特有之說明可參照數個實施例。在圖式中之元件不必然為正確的比例，取而代之的是著重於說明本發明之原則。再者，在圖式中，類似之參考編號係表示對應之部件。所附之圖式係有關於本揭露之數個實施例且說明於下方： 第1圖繪示根據一實施例之適用於處理分離膜之真空處理設備的示意方塊圖； 第2圖繪示根據另一實施例之適用於處理分離膜之真空處理設備的示意方塊圖； 第3圖繪示根據再另一實施例之適用於處理分離膜之真空處理設備的示意方塊圖； 第4圖繪示根據再另一實施例之適用於處理分離膜之真空處理設備的示意方塊圖； 第5圖繪示根據一實施例之製造具有分離膜之電池之方法的流程圖；以及 第6圖繪示根據一實施例之藉由如第5圖中所示之方法製造之電池之數層的示意圖。In order to make the above features of the disclosure more understandable in detail, a more specific description briefly extracted from the above disclosure may refer to several embodiments. Elements in the drawings are not necessarily to scale, but instead focus on illustrating the principles of the invention. Moreover, in the drawings, similar reference numerals indicate corresponding parts. The attached drawings are related to several embodiments of the present disclosure and are described below: FIG. 1 shows a schematic block diagram of a vacuum processing device suitable for processing a separation membrane according to an embodiment; FIG. 2 shows a basis A schematic block diagram of a vacuum processing apparatus suitable for processing a separation membrane according to another embodiment; FIG. 3 shows a schematic block diagram of a vacuum processing apparatus suitable for processing a separation membrane according to still another embodiment; A schematic block diagram of a vacuum processing apparatus suitable for processing a separation membrane according to yet another embodiment; FIG. 5 shows a flowchart of a method for manufacturing a battery with a separation membrane according to an embodiment; and FIG. 6 shows a flowchart according to A schematic diagram of several layers of a battery manufactured by the method shown in FIG. 5 of an embodiment.

100‧‧‧真空處理設備 100‧‧‧Vacuum processing equipment

101‧‧‧第一塗佈鼓 101‧‧‧The first coating drum

102‧‧‧第二塗佈鼓 102‧‧‧Second coating drum

103‧‧‧退捲器 103‧‧‧Unwinder

104‧‧‧再捲器 104‧‧‧ Rewinder

105、106‧‧‧第一側塗佈源 105, 106‧‧‧ first side coating source

107、108‧‧‧第二側塗佈源 107, 108‧‧‧Second side coating source

109‧‧‧導引滾軸 109‧‧‧Guide roller

110、111‧‧‧箭頭 110, 111‧‧‧ arrows

200‧‧‧分離膜 200‧‧‧ separation membrane

201‧‧‧第一側 201‧‧‧First side

202‧‧‧第二側 202‧‧‧Second side

203‧‧‧傳送方向 203‧‧‧Transfer direction

300‧‧‧共同真空處理環境 300‧‧‧Common vacuum processing environment

Claims (20)

一種製造一電池的方法，該方法包括： 提供一分離膜； 於一真空處理環境中使用下述複數個動作(a)至(d)之至少二者處理該分離膜： (a) 沈積一陽極材料層於該分離膜之一第一側上； (b) 沈積一陰極材料層於該分離膜之一第二側上，該第二側相反於該第一側； (c) 塗佈該陽極材料層而具有一陽極觸點；以及 (d) 塗佈該陰極材料層而具有一陰極觸點； 其中上述之該些動作(a)至(d)之至少二者係執行而沒有破壞該真空處理環境中之真空。A method of manufacturing a battery, the method comprising: providing a separation membrane; processing the separation membrane in a vacuum processing environment using at least two of the following actions (a) to (d): (a) depositing an anode A material layer on a first side of the separation membrane; (b) depositing a cathode material layer on a second side of the separation membrane, the second side being opposite to the first side; (c) coating the anode Material layer with an anode contact; and (d) coating the cathode material layer with a cathode contact; wherein at least two of the above actions (a) to (d) are performed without breaking the vacuum Handle vacuum in the environment. 如申請專利範圍第1項所述之方法，其中該分離膜係於一卷對卷配置中傳送，該卷對卷配置提供於該真空處理環境中。The method according to item 1 of the patent application scope, wherein the separation membrane is conveyed in a roll-to-roll configuration, and the roll-to-roll configuration is provided in the vacuum processing environment. 如申請專利範圍第1或2項所述之方法，其中已處理之該分離膜係捲起以形成該電池。The method as described in claim 1 or 2, wherein the treated separation membrane is rolled up to form the battery. 如申請專利範圍第1或2項之任一項所述之方法，其中 該分離膜係導引於一第一塗佈鼓之上方，該第一塗佈鼓具有至少一相關之第一側塗佈源，用以處理該分離膜之該第一側；以及 該分離膜係導引於一第二塗佈鼓之上方，該第二塗佈鼓具有至少一相關之第二側塗佈源，用以處理該分離膜之該第二側。The method according to any one of claims 1 or 2, wherein the separation membrane is guided above a first coating drum, and the first coating drum has at least one related first side coating. A cloth source for processing the first side of the separation membrane; and the separation membrane is guided above a second coating drum, the second coating drum having at least one related second side coating source, It is used to process the second side of the separation membrane. 如申請專利範圍第1或2項之任一項所述之方法，其中沈積該陰極材料層於該分離膜之該第二側上包括沈積一正主動材料，選自由鋰金屬、鋰氧化物、銅、LiCoO2 、LiNx Co1-x O2 、LiMn2 O4 、PVdF、LiFePO4 、及其任何組合所組成之群組。The method according to any one of claims 1 or 2, wherein depositing the cathode material layer on the second side of the separation membrane includes depositing a positive active material selected from the group consisting of lithium metal, lithium oxide, A group of copper, LiCoO 2 , LiN x Co 1-x O 2 , LiMn 2 O 4 , PVdF, LiFePO 4 , and any combination thereof. 如申請專利範圍第1或2項之任一項所述之方法，其中沈積該陽極材料層於該分離膜之該第一側上包括沈積一負主動材料，選自由碳、石墨、PVdF、矽基材料、金屬-陽極材料、及其任何組合所組成之群組。The method according to any one of claims 1 or 2, wherein depositing the anode material layer on the first side of the separation membrane includes depositing a negative active material selected from the group consisting of carbon, graphite, PVdF, silicon A group of base materials, metal-anode materials, and any combination thereof. 如申請專利範圍第1或2項之任一項所述之方法，其中沈積一材料層於該分離膜之該第一側及該第二側之其中一者上係藉由選自由一小舟式蒸發器(boat evaporator)、一電子束(E-Beam)蒸發器、一濺射陰極、一物理氣相沈積(PVD)塗佈源、一化學氣相沈積(CVD)塗佈源、及其任何組合所組成之群組之至少一塗佈源執行。The method according to any one of claims 1 or 2, wherein a material layer is deposited on one of the first side and the second side of the separation membrane by selecting from a small boat type A boat evaporator, an electron beam (E-Beam) evaporator, a sputtering cathode, a physical vapor deposition (PVD) coating source, a chemical vapor deposition (CVD) coating source, and any At least one coating source of the group formed by the combination is performed. 如申請專利範圍第1或2項之任一項所述之方法，其中處理該分離膜更包括提供一收縮減少層，該收縮減少層適用於減少該分離膜之收縮。The method according to any one of claims 1 or 2, wherein processing the separation membrane further comprises providing a shrinkage reduction layer, and the shrinkage reduction layer is adapted to reduce the shrinkage of the separation membrane. 如申請專利範圍第8項所述之方法，其中用於該收縮減少層之一材料係選自由Al2 O3 、AlOx 、陶瓷、及其任何組合所組成的群組。The method of claim 8, wherein one of the materials for the shrinkage reducing layer is selected from the group consisting of Al 2 O 3 , AlO x , ceramics, and any combination thereof. 如申請專利範圍第1或2項之任一項所述之方法，其中至少一保護層係沈積於該陽極觸點及該陰極觸點之至少一者上。The method according to any one of claims 1 or 2, wherein at least one protective layer is deposited on at least one of the anode contact and the cathode contact. 一種真空處理設備，適用於處理一分離膜，該真空處理設備包括： 一第一塗佈鼓，具有至少一相關之第一側塗佈源，該至少一相關之第一側塗佈源適用於處理該分離膜之一第一側；以及 至少一第二塗佈鼓，具有至少一相關之第二側塗佈源，該至少一相關之第二側塗佈源適用於處理該分離膜之一第二側； 其中該第一塗佈鼓及該至少一第二塗佈鼓係配置於一共同真空處理環境中。A vacuum processing equipment is suitable for processing a separation membrane. The vacuum processing equipment includes: a first coating drum having at least one related first-side coating source, the at least one related first-side coating source is suitable for Processing one first side of the separation membrane; and at least one second coating drum having at least one related second side coating source, the at least one related second side coating source is suitable for processing one of the separation membranes The second side; wherein the first coating drum and the at least one second coating drum are arranged in a common vacuum processing environment. 如申請專利範圍第11項所述之真空處理設備，其中該第一塗佈鼓具有至少二相關之第一側塗佈源，該至少二相關之第一側塗佈源適用於處理該分離膜之該第一側。The vacuum processing equipment according to item 11 of the scope of patent application, wherein the first coating drum has at least two related first-side coating sources, and the at least two related first-side coating sources are suitable for processing the separation membrane. That first side. 如申請專利範圍第12項所述之真空處理設備，其中該至少一第二塗佈鼓具有至少二相關之第二側塗佈源，該至少二相關之第二側塗佈源適用於處理該分離膜之該第二側。The vacuum processing equipment according to item 12 of the scope of patent application, wherein the at least one second coating drum has at least two related second-side coating sources, and the at least two related second-side coating sources are suitable for processing the The second side of the separation membrane. 如申請專利範圍第111、12或13項之任一項所述之真空處理設備，其中該至少一第一側塗佈源及/或該至少一第二側塗佈源係選自由一小舟式蒸發器(boat evaporator)、一電子束(E-Beam)蒸發器、一濺射陰極、一物理氣相沈積(PVD)塗佈源、一化學氣相沈積(CVD)塗佈源、及其任何組合所組成之群組。The vacuum processing equipment according to any one of the claims 111, 12, or 13, wherein the at least one first-side coating source and / or the at least one second-side coating source are selected from a small boat type A boat evaporator, an electron beam (E-Beam) evaporator, a sputtering cathode, a physical vapor deposition (PVD) coating source, a chemical vapor deposition (CVD) coating source, and any A group of groups. 如申請專利範圍第11、12或13項之任一項所述之真空處理設備，更包括一退捲器及一再捲器，該退捲器適用於退捲該分離膜，該再捲器適用於捲起已處理之該分離膜。The vacuum processing equipment as described in any one of claims 11, 12, or 13 of the scope of patent application, further comprising a unwinder and a rewinder, the unwinder is suitable for unwinding the separation membrane, and the rewinder is applicable Roll up the treated separation membrane. 如申請專利範圍第15項所述之真空處理設備，其中該該退捲器及/或該再捲器係配置於該共同真空處理環境中。The vacuum processing equipment according to item 15 of the scope of patent application, wherein the unwinder and / or the rewinder are disposed in the common vacuum processing environment. 一種電池，根據申請專利範圍第1或2項之任一項所述之方法製造，該電池包括： 一分離膜； 一陽極材料層，沈積於該分離膜之一第一側上； 一陰極材料層，沈積於該分離膜之一第二側上，該第二側相反於該第一側； 一陽極觸點，塗佈於該陽極材料層上；以及 一陰極觸點，塗佈於該陰極材料層上。A battery manufactured according to the method described in any one of items 1 or 2 of the patent application scope, the battery comprising: a separation membrane; an anode material layer deposited on a first side of the separation membrane; a cathode material Layer, deposited on a second side of the separation membrane, the second side being opposite to the first side; an anode contact, coated on the anode material layer; and a cathode contact, coated on the cathode Material layer. 如申請專利範圍第17項所述之電池，更包括一收縮減少層，適用於減少該分離膜之收縮。The battery according to item 17 of the scope of patent application further includes a shrinkage reducing layer, which is suitable for reducing the shrinkage of the separation membrane. 如申請專利範圍第17或18項所述之電池，其中該陽極材料層及/或該陰極材料層之一層厚度係在從1 µm至100 µm之範圍中、較佳地從2 µm至20 µm之範圍中、及更佳地從3 µm至15 µm之範圍中。The battery according to item 17 or 18 of the scope of patent application, wherein the thickness of one of the anode material layer and / or the cathode material layer is in a range from 1 µm to 100 µm, preferably from 2 µm to 20 µm Range, and more preferably from 3 µm to 15 µm. 如申請專利範圍第17或18項所述之電池，其中用於該收縮減少層之一材料係選自由Al2 O3 、AlOx 、陶瓷、及其任何組合所組成的群組。The battery as described in claim 17 or 18, wherein one of the materials for the shrinkage reducing layer is selected from the group consisting of Al 2 O 3 , AlO x , ceramic, and any combination thereof.
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