TW201738031A - Mobile body feeding mechanism and processing apparatus comprising guide rails, a ball screw, a slide movable along the guide rails, and a protective cover means covering the guide rails and ball screw and allowing the slide to move without contacting a gutter member of the protective cover means - Google Patents
Mobile body feeding mechanism and processing apparatus comprising guide rails, a ball screw, a slide movable along the guide rails, and a protective cover means covering the guide rails and ball screw and allowing the slide to move without contacting a gutter member of the protective cover means Download PDFInfo
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- TW201738031A TW201738031A TW106105329A TW106105329A TW201738031A TW 201738031 A TW201738031 A TW 201738031A TW 106105329 A TW106105329 A TW 106105329A TW 106105329 A TW106105329 A TW 106105329A TW 201738031 A TW201738031 A TW 201738031A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
- B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
- B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D33/00—Accessories for shearing machines or shearing devices
- B23D33/02—Arrangements for holding, guiding, and/or feeding work during the operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Transmission Devices (AREA)
Abstract
Description
本發明係關於使用滾珠螺桿之直接傳動機構的移動體進給機構及加工裝置。 The present invention relates to a moving body feeding mechanism and a processing apparatus using a direct transmission mechanism of a ball screw.
先前，於各種工作機械等的裝置中，使對被加工物進行加工之加工單元移動的手段及搬送被加工物的搬送手段等，大多採用作為使用滾珠螺桿之直接傳動機構的移動體進給機構。例如，於專利文獻1，揭示有具備具有設置於靜止基台上，保持被加工物之吸盤台的支持基板可移動地嵌合之導引軌道，與和支持基板螺合之滾珠螺桿的切削進給機構的切削裝置。 Conventionally, in a device such as a work machine, a means for moving a processing unit that processes a workpiece, a conveying means for conveying a workpiece, and the like are often used as a moving body feeding mechanism that uses a direct transmission mechanism of a ball screw. . For example, Patent Document 1 discloses a guide rail having a support substrate having a support substrate provided on a stationary base and holding a suction cup of a workpiece, and a ball screw that is screwed into the support substrate. A cutting device for the mechanism.
[專利文獻1]日本專利第5801077號公報 [Patent Document 1] Japanese Patent No. 5801077
使用滾珠螺桿的移動體進給機構，係透過複數滾珠而與螺絲螺合的螺帽被一體化成作為移動體的滑件，為了潤滑複數滾珠與螺帽之間，於螺絲塗布油脂等的潤滑油。然而，該潤滑油的塗布量過多的話，伴隨滑件的移動，螺絲與螺帽咬合時，有潤滑油飛濺至周邊之狀況。結果，被加工物的表面附著潤滑油，有妨礙被加工物的品質提升之虞。作為該對策，考量將覆蓋滾珠螺桿之蛇腹狀的護蓋安裝於滑件的兩側的手法，但在該手法中，滑件的可動區域會減少蛇腹狀之護蓋的最小厚度(被折起來之狀態下的寬度)。又，有因為長期的使用，蛇腹狀的護蓋容易產生損傷的問題。 A moving body feeding mechanism using a ball screw is a sliding member that is screwed into a screw through a plurality of balls, and is integrated into a sliding member as a moving body. In order to lubricate the lubricating ball between the plurality of balls and the nut, a grease such as grease is applied to the screw. . However, when the amount of the lubricating oil applied is too large, the lubricating oil splashes to the periphery when the screw and the nut are engaged with the movement of the slider. As a result, the lubricating oil adheres to the surface of the workpiece, which hinders the improvement of the quality of the workpiece. As a countermeasure against this, a method of attaching the bellows-like cover of the ball screw to both sides of the slider is considered, but in this method, the movable area of the slider reduces the minimum thickness of the bellows-like cover (folded up) Width in the state). Moreover, there is a problem that the bellows-like cover is likely to be damaged due to long-term use.
本發明係有鑑於前述問題所發明者，目的為於使用滾珠螺桿的移動體進給機構中，一邊抑制構件的損傷，一邊可確保移動體的可動區域，且抑制潤滑油從滾珠螺桿飛濺到周邊之狀況。 The present invention has been made in view of the above problems, and it is an object of the present invention to prevent a movable region of a moving body while suppressing damage of a member in a moving body feeding mechanism using a ball screw, and to suppress splashing of lubricating oil from the ball screw to the periphery. The situation.
為了解決上述之課題，達成目的，本發明的移動體進給機構，係具備設置於基台的一對導引軌道、設置於該一對導引軌道之間，且利用馬達旋轉的滾珠螺桿、具有螺合於該滾珠螺桿的母螺絲，且沿著該導引軌道移動的滑件、沿著該導引軌道及滾珠螺桿延伸，覆蓋該導引軌道及滾珠螺桿，防止塗布於該滾珠螺桿之潤滑油的飛濺的護蓋手段，其中，該護蓋手段係具備：溝狀構件，係具有 延伸於滾珠螺桿伸展方向的蓋體，與配設於該蓋體的兩側且延伸於滾珠螺桿伸展方向的側板，剖面為大略ㄈ字型；及固定部，係以將該溝狀構件一邊以滾珠螺桿伸展方向的兩端部固定於該基台，一邊在該ㄈ字型的內側覆蓋該導引軌道及滾珠螺桿，且該ㄈ字型的前端與該基台隔開間隙之方式，對該溝狀構件定位；該滑件，係由螺合於該滾珠螺桿，且與該導引軌道滑動的本體部、從該本體部往該導引軌道的兩外側延伸，鑽過該基台與該溝狀構件的該間隙，沿著該側板立起的支架部、及涵蓋立起之該支架部的兩端部，跨過該溝狀構件而被固定的移動體所構成；該滑件不接觸承受飛濺之該潤滑油的ㄈ字型的該溝狀構件而進行移動。 In order to achieve the above object, the moving body feeding mechanism of the present invention includes a pair of guiding rails provided on the base, a ball screw provided between the pair of guiding rails, and rotated by a motor, a sliding screw that is screwed to the ball screw and extends along the guiding rail, extends along the guiding rail and the ball screw, covers the guiding rail and the ball screw, and is prevented from being applied to the ball screw a covering means for splashing of lubricating oil, wherein the covering means comprises: a groove-shaped member having a cover extending in a direction in which the ball screw extends, a side plate disposed on both sides of the cover and extending in a direction in which the ball screw extends, and having a substantially U-shaped cross section; and a fixing portion for aligning the groove member Both ends of the ball screw extending direction are fixed to the base, and the guide rail and the ball screw are covered on the inner side of the U-shaped type, and the front end of the U-shaped type is spaced apart from the base by the gap. Positioning the groove member; the sliding member is screwed to the ball screw, and the body portion sliding with the guiding rail extends from the body portion to both outer sides of the guiding rail, and the base is drilled The gap of the groove-shaped member is formed by a bracket portion that rises along the side plate and a movable body that is fixed to the both ends of the bracket portion that rises and rises over the groove-shaped member; the slider does not contact The groove-shaped member of the U-shaped splash of the lubricating oil is subjected to movement.
為了解決上述之課題，達成目的，本發明的加工裝置，係具備保持被加工物的吸盤台、對被該吸盤台保持的被加工物進行加工的加工手段、使該吸盤台與該加工手段相對移動的移動手段，其中，該移動手段，係具有前述本發明的移動體進給機構。 In order to achieve the above object, the processing apparatus of the present invention includes a chuck table that holds a workpiece, and a processing means for processing a workpiece held by the chuck table, and the chuck table is opposed to the processing means. The moving means for moving, wherein the moving means has the moving body feeding mechanism of the present invention.
又，本發明的加工裝置，係具備：晶匣載置部，係載置收容該複數被加工物的晶匣；洗淨手段，係洗淨以該加工手段加工過的被加工物；及搬送手段，係在被載置於該晶匣載置部的該晶匣、該吸盤台、該洗淨手段之間搬送該被加工物；該搬送手段，係利用前述本發明之移動體進給機構移動為佳。 Further, the processing apparatus according to the present invention includes: a wafer mounting portion that mounts a wafer that accommodates the plurality of workpieces; and a cleaning means that cleans the workpiece processed by the processing means; and conveys In the meantime, the workpiece is conveyed between the wafer, the chuck table, and the cleaning means placed on the wafer placing portion; and the conveying means is the moving body feeding mechanism of the present invention. Mobile is better.
本發明的移動體進給機構及加工裝置，係可發揮於使用滾珠螺桿的移動體進給機構中，一邊抑制構件的損傷，一邊可確保移動體的可動區域，且抑制潤滑油從滾珠螺桿飛濺到周邊之狀況的效果。 In the moving body feeding mechanism using the ball screw, the movable body feeding mechanism and the processing device of the present invention can secure the movable region of the moving body while suppressing the damage of the member, and suppress the splash of the lubricating oil from the ball screw. The effect to the surrounding situation.
1‧‧‧加工裝置 1‧‧‧Processing device
2‧‧‧框體 2‧‧‧ frame
3‧‧‧柱部 3‧‧‧ Column Department
4‧‧‧定位條 4‧‧‧Positioning bar
5‧‧‧基台 5‧‧‧Abutment
10‧‧‧晶匣載置部 10‧‧‧Crystal Mounting Department
20‧‧‧保持手段 20‧‧‧Retention means
21‧‧‧吸盤台 21‧‧‧Sucker table
21a‧‧‧保持面 21a‧‧‧ Keep face
22‧‧‧旋轉手段 22‧‧‧Rotating means
23‧‧‧吸盤台支持基板 23‧‧‧Sucker table support substrate
24‧‧‧加工進給手段 24‧‧‧Processing means of feeding
24a‧‧‧導引軌道 24a‧‧‧Guided track
24b‧‧‧滾珠螺絲 24b‧‧‧Ball screws
24c‧‧‧脈衝馬達 24c‧‧‧pulse motor
25‧‧‧護蓋板 25‧‧‧ Cover
26‧‧‧蛇腹狀護蓋 26‧‧‧The bellows cover
30‧‧‧洗淨手段 30‧‧‧ Washing means
31‧‧‧旋轉台 31‧‧‧Rotating table
40‧‧‧切削手段 40‧‧‧ cutting means
41‧‧‧切削刀 41‧‧‧Cutter
42‧‧‧主軸 42‧‧‧ Spindle
43‧‧‧殼體 43‧‧‧Shell
44‧‧‧指數標定手段 44‧‧‧ Index calibration means
44a‧‧‧Y軸移動手段 44a‧‧‧Y-axis moving means
44b，45b‧‧‧移動體 44b, 45b‧‧‧Mobile
45‧‧‧進刀手段 45‧‧‧Into the knife
45a‧‧‧Z軸移動手段 45a‧‧‧Z-axis moving means
50‧‧‧搬送手段 50‧‧‧Transfer means
51‧‧‧第1搬送手段 51‧‧‧1st means of transport
51a，52a，53a‧‧‧Y軸移動手段 51a, 52a, 53a‧‧‧Y-axis moving means
51b，52b，53b‧‧‧機械臂 51b, 52b, 53b‧‧ mechanical arm
51c‧‧‧箝夾 51c‧‧‧ clamp
52‧‧‧第2搬送手段 52‧‧‧2nd means of transport
52c，53c‧‧‧吸盤 52c, 53c‧‧‧ sucker
53‧‧‧第3搬送手段 53‧‧‧3rd means of transport
60，60B，60C‧‧‧移動體進給機構 60,60B,60C‧‧‧mobile body feeding mechanism
61‧‧‧導引軌道 61‧‧‧Guided track
62‧‧‧脈衝馬達 62‧‧‧ pulse motor
63‧‧‧滾珠螺桿 63‧‧‧Ball screw
64，64B‧‧‧護蓋手段 64,64B‧‧‧ Covering means
641‧‧‧溝狀構件 641‧‧‧ditch members
641a‧‧‧蓋體 641a‧‧‧ cover
641b‧‧‧側板 641b‧‧‧ side panel
641t‧‧‧前端 641t‧‧‧ front end
642‧‧‧固定部 642‧‧‧Fixed Department
65‧‧‧滑件 65‧‧‧Sliding parts
65a‧‧‧本體部 65a‧‧‧ Body Department
65b‧‧‧支架部 65b‧‧‧ bracket
65c‧‧‧移動體 65c‧‧‧Mobile
650‧‧‧凹部 650‧‧‧ recess
66‧‧‧板體 66‧‧‧ board
70，80‧‧‧間隙 70, 80 ‧ ‧ gap
[圖1]圖1係揭示實施形態之加工裝置的概略的立體圖。 Fig. 1 is a perspective view showing the outline of a processing apparatus according to an embodiment.
[圖2]圖2係揭示圖1的加工裝置所包含之切削手段的概略的立體圖。 Fig. 2 is a perspective view showing the outline of a cutting means included in the processing apparatus of Fig. 1.
[圖3]圖3係揭示實施形態之移動體進給機構的立體圖。 Fig. 3 is a perspective view showing a moving body feeding mechanism of the embodiment.
[圖4]圖4係揭示實施形態之移動體進給機構的分解立體圖。 Fig. 4 is an exploded perspective view showing the moving body feeding mechanism of the embodiment.
[圖5]圖5係揭示實施形態之移動體進給機構的剖面圖。 Fig. 5 is a cross-sectional view showing a moving body feeding mechanism of the embodiment.
[圖6]圖6係揭示作為比較例之移動體進給機構的立體圖。 Fig. 6 is a perspective view showing a moving body feeding mechanism as a comparative example.
[圖7]圖7係揭示作為比較例之移動體進給機構的剖面圖。 Fig. 7 is a cross-sectional view showing a moving body feeding mechanism as a comparative example.
[圖8]圖8係揭示變形例之移動體進給機構的剖面圖。 Fig. 8 is a cross-sectional view showing a moving body feeding mechanism of a modification.
以下，依據圖面，詳細說明本發明之移動體進給機構及加工裝置的實施形態。再者，本發明並不因該實施形態而被限定。 Hereinafter, embodiments of the moving body feeding mechanism and the processing apparatus according to the present invention will be described in detail based on the drawings. Furthermore, the invention is not limited by the embodiment.
圖1係揭示實施形態之加工裝置1的概略的立體圖，圖2係揭示加工裝置1所包含之切削手段40的立體圖。加工裝置1是對於被加工物實施切削加工的裝置。加工裝置1係具備框體2、載置收容被加工物之未圖示的晶匣的晶匣載置部10、保持被加工物的保持手段20、洗淨被加工物的洗淨手段30、配置於框體2的內部，並且對被加工物進行切削的切削手段40(參照圖2)、在晶匣載置部10、保持手段20及洗淨手段30之間搬送被加工物的搬送手段50。再者，於圖1中，為了揭示晶匣載置部10、保持手段20、洗淨手段30及搬送手段50，省略框體2之一部分的記載。 1 is a perspective view showing a schematic view of a processing apparatus 1 according to an embodiment, and FIG. 2 is a perspective view showing a cutting means 40 included in the processing apparatus 1. The processing device 1 is a device that performs a cutting process on a workpiece. The processing apparatus 1 includes a housing 2, a wafer mounting unit 10 on which a wafer (not shown) for storing a workpiece is placed, a holding means 20 for holding a workpiece, and a cleaning means 30 for washing the workpiece, The cutting means 40 (see FIG. 2) which is disposed inside the casing 2 and cuts the workpiece, and the conveying means for conveying the workpiece between the wafer placing unit 10, the holding means 20, and the cleaning means 30 50. In addition, in FIG. 1, in order to disclose the wafer mounting part 10, the holding means 20, the washing means 30, and the conveyance means 50, description of one part of the frame 2 is abbreviate|omitted.
在此，被加工物並未被特別限定，例如，將矽、藍寶石、鎵等作為母材的半導體晶圓或光裝置晶圓、陶瓷、玻璃、藍寶石系之板狀的無機材料基板、金屬或樹脂等的板狀的延展性材料等，各種的板狀的加工材料。 Here, the workpiece is not particularly limited, and for example, a semiconductor wafer or an optical device wafer having ruthenium, sapphire, gallium or the like as a base material, a ceramic, glass, sapphire-based plate-shaped inorganic material substrate, metal or A plate-like ductile material such as a resin, and various plate-shaped processed materials.
晶匣載置部10可載置具有將複數被加工物一個個區分於Z軸方向並予以收納的收納部之未圖示的晶匣。晶匣載置部10係可於Z軸方向中自由升降之所謂卡式升降機，將未圖示的晶匣定位於Z軸方向之所定位置。 In the wafer mounting portion 10, a wafer (not shown) having a housing portion in which a plurality of workpieces are individually divided into the Z-axis direction and accommodated therein can be placed. The wafer mounting portion 10 is a so-called card elevator that can freely move up and down in the Z-axis direction, and a wafer (not shown) is positioned at a predetermined position in the Z-axis direction.
保持手段20係構成為可於X軸方向移動於搬出入被加工物之圖1所示的搬出入位置，與對被加工物進行切削加工之圖2所示的加工位置之間。保持手段20係如圖2所示，具有可保持被加工物的吸盤台21、使吸盤台21旋轉的旋轉手段22、透過旋轉手段22支持吸盤台21的吸盤台支持基板23、使吸盤台21移動於X軸方向(加工進給方向)的加工進給手段24。進而，保持手段20係如圖1所示，具有包圍吸盤台21之矩形狀的護蓋板25，與安裝於護蓋板25之X軸方向兩側的蛇腹狀護蓋26。再者，於圖2中，省略護蓋板25及蛇腹狀護蓋26的記載。 The holding means 20 is configured to be movable between the loading/unloading position shown in FIG. 1 in which the workpiece is carried in and out of the workpiece in the X-axis direction, and the machining position shown in FIG. 2 in which the workpiece is cut. As shown in FIG. 2, the holding means 20 has a suction table 21 capable of holding a workpiece, a rotation means 22 for rotating the suction table 21, a suction table support substrate 23 for supporting the suction table 21 by the rotation means 22, and a suction table 21. The machining feed means 24 is moved in the X-axis direction (machining feed direction). Further, as shown in FIG. 1, the holding means 20 has a rectangular protective cover 25 that surrounds the suction cup table 21, and a bellows-like cover 26 attached to both sides of the cover plate 25 in the X-axis direction. In addition, in FIG. 2, the description of the cover 25 and the bellows cover 26 is abbreviate|omitted.
吸盤台21係具有例如以多孔陶瓷構成，吸附並保持被加工物之圓盤狀的保持面21a。保持面21a係與水平方向平行，且平坦地形成。旋轉手段22係具有馬達等之未圖示的驅動源，使吸盤台21繞Z軸在水平面內旋轉。吸盤台支持基板23係被沿著X軸方向形成於框體2之一對導引軌道24a可自由滑動地支持。加工進給手段24係具有前述一對導引軌道24a、在一對導引軌道24a之間延伸於X軸方向的滾珠螺桿24b、作為驅動源的脈衝馬達24c，可使吸盤台支持基板23對於框體2相對移動於X軸方向(加工進給方向)。護蓋板25係被固定於吸盤台21，與吸盤台21一起移動於X軸方向。蛇腹狀護蓋26係以布等之可自由折疊的適當材料構成，覆蓋吸盤台21及護蓋板25的移動區域，伴隨吸盤台支持基板23的移動， 沿著X軸方向伸縮。切削加工時所產生的切削屑或切削水，藉由護蓋板25及蛇腹狀護蓋26，防止落下至加工進給手段24側的狀況。 The chuck table 21 has, for example, a disk-shaped holding surface 21a which is made of porous ceramic and which sucks and holds the workpiece. The holding surface 21a is parallel to the horizontal direction and is formed flat. The rotation means 22 is provided with a drive source (not shown) such as a motor, and rotates the suction table 21 in the horizontal plane about the Z axis. The chuck table support substrate 23 is slidably supported by the pair of guide rails 24a formed in the frame body 2 along the X-axis direction. The machining feed means 24 includes the pair of guide rails 24a, a ball screw 24b extending in the X-axis direction between the pair of guide rails 24a, and a pulse motor 24c as a drive source, so that the chuck table support substrate 23 can be The frame 2 is relatively moved in the X-axis direction (machining feed direction). The cover 25 is fixed to the suction table 21 and moves together with the suction table 21 in the X-axis direction. The bellows cover 26 is made of a suitable material such as a cloth that can be freely folded, and covers the moving area of the chuck table 21 and the cover plate 25, with the movement of the chuck table support substrate 23, Telescopic along the X-axis direction. The cutting chips or the cutting water generated during the cutting process are prevented from falling to the processing feed means 24 side by the cover plate 25 and the bellows-like cover 26.
洗淨手段30係具有保持加工後之被加工物的旋轉台31、未圖示的洗淨液噴射裝置、未圖示的氣體噴射裝置。洗淨手段30係利用一邊藉由未圖示的旋轉驅動源來使旋轉台31旋轉，一邊從洗淨液噴射裝置對加工後的被加工物噴射洗淨液，來洗淨該被加工物。又，洗淨手段30係利用對洗淨後的被加工物從氣體噴射裝置噴射氣體，來使該被加工物乾燥。 The cleaning means 30 is a rotary table 31 that holds a workpiece after processing, a cleaning liquid injection device (not shown), and a gas injection device (not shown). In the cleaning means 30, the workpiece is washed by ejecting the cleaning liquid from the cleaning liquid ejecting apparatus to the workpiece after the rotating table 31 is rotated by the rotation driving source (not shown). Further, the cleaning means 30 uses the gas to be ejected from the gas ejecting apparatus to clean the workpiece to dry the workpiece.
切削手段40係可移動於Y軸方向及Z軸方向地安裝於設置在框體2之門型的柱部3上。切削手段40係如圖2所示，具有作為對被吸盤台21保持之被加工物進行加工的加工手段的兩個切削刀41、安裝各切削刀41的兩個主軸42、支持各主軸42的兩個殼體43、作為使吸盤台21與各切削刀41相對移動的移動手段的指數標定(indexing)手段44及進刀(Infeed)手段45。 The cutting means 40 is attached to the column portion 3 provided on the door type of the casing 2 so as to be movable in the Y-axis direction and the Z-axis direction. As shown in FIG. 2, the cutting means 40 includes two cutting blades 41 as processing means for machining a workpiece held by the chuck table 21, two main spindles 42 for attaching the respective cutters 41, and supporting the main shafts 42. The two casings 43 are an indexing means 44 and an infeed means 45 as moving means for moving the chuck table 21 and the respective cutters 41 relative to each other.
切削刀41係極薄的圓板狀，且形成為環狀的切削砥石。主軸42可裝卸地安裝切削刀41。殼體43具有馬達等的驅動源，可繞Y軸自由旋轉地支持主軸42。 The cutter 41 is formed into an extremely thin disk shape and formed into a ring-shaped cutting vermiculite. The spindle 42 detachably mounts the cutter 41. The casing 43 has a drive source of a motor or the like, and supports the main shaft 42 so as to be rotatable around the Y-axis.
指數標定手段44及進刀手段45具有實施形態的移動體進給機構60。指數標定手段44係具有作為移動體進給機構60的Y軸移動手段44a，與安裝於Y軸移動手段44a的移動體44b。Y軸移動手段44a係具有固定 於柱部3的固定子，與安裝於該固定子，並且可沿著Y軸方向移動的移動子。移動體44b係安裝於Y軸移動手段44a的移動子，可與移動子一起移動於Y軸方向。於移動體44b，固定有進刀手段45。 The index calibration means 44 and the feeding means 45 have the moving body feeding mechanism 60 of the embodiment. The index indexing means 44 has a Y-axis moving means 44a as the moving body feeding mechanism 60 and a moving body 44b attached to the Y-axis moving means 44a. Y-axis moving means 44a has a fixed The stator of the column portion 3 and a mover attached to the stator and movable in the Y-axis direction. The moving body 44b is attached to the mover of the Y-axis moving means 44a, and is movable together with the mover in the Y-axis direction. The feeding means 45 is fixed to the moving body 44b.
進刀手段45係具有作為移動體進給機構60的Z軸移動手段45a，與安裝於Z軸移動手段45a的移動體45b。Z軸移動手段45a係具有固定於指數標定手段44之移動體44b的固定子，與安裝於該固定子，並且可沿著Z軸方向移動的移動子。移動體45b係安裝於Z軸移動手段45a的移動子，可與該移動子一起移動於Z軸方向。於移動體45b，固定有殼體43。 The feed means 45 has a Z-axis moving means 45a as the moving body feeding mechanism 60 and a moving body 45b attached to the Z-axis moving means 45a. The Z-axis moving means 45a has a stator fixed to the moving body 44b of the indexing means 44, and a mover attached to the stator and movable in the Z-axis direction. The moving body 45b is a mover attached to the Z-axis moving means 45a, and is movable together with the mover in the Z-axis direction. A housing 43 is fixed to the movable body 45b.
藉由上述之構造，指數標定手段44係可透過進刀手段45、殼體43及主軸42，使各切削刀41對於柱部3(框體2)相對移動於Y軸方向(指數標定方向)。又，進刀手段45係可透過殼體43及主軸42，使各切削刀41對於柱部3(框體2)相對移動於Z軸方向(進刀方向)。亦即，指數標定手段44及進刀手段45，可藉由加工進給手段24，使切削刀41對於定位於框體2的吸盤台21相對移動。藉此，可藉由切削刀41，對被保持於吸盤台21的保持面21a上的被加工物進行切削加工。 According to the above configuration, the index indexing means 44 can transmit the respective cutters 41 to the column portion 3 (frame 2) in the Y-axis direction (exponential calibration direction) by the feed means 45, the casing 43, and the main shaft 42. . Further, the feeding means 45 is configured to transmit the respective cutting blades 41 to the column portion 3 (frame 2) in the Z-axis direction (feeding direction) by transmitting the casing 43 and the main shaft 42. That is, the index indexing means 44 and the feed means 45 can relatively move the cutter 41 to the chuck table 21 positioned on the casing 2 by the machining feed means 24. Thereby, the workpiece to be held by the holding surface 21a of the chuck table 21 can be cut by the cutter 41.
搬送手段50係具有第1搬送手段51、第2搬送手段52、及第3搬送手段53。第1搬送手段51、第2搬送手段52、及第3搬送手段53，具有實施形態的移動體進給機構60。 The transport means 50 includes a first transport means 51, a second transport means 52, and a third transport means 53. The first conveying means 51, the second conveying means 52, and the third conveying means 53 have the moving body feeding mechanism 60 of the embodiment.
第1搬送手段51係具有作為移動體進給機構60的Y軸移動手段51a，與安裝於Y軸移動手段51a的機械臂51b。Y軸移動手段51a係具有固定於框體2的固定子，與安裝於該固定子，並且可沿著Y軸方向移動的移動子。機械臂51b設為安裝於Y軸移動手段51a的移動子，可與該移動子一起沿著Y軸方向移動。機械臂51b具有形成於前端部的箝夾51c。箝夾51c形成為可握持被載置於晶匣載置部10之未圖示的晶匣內的被加工物之一。第1搬送手段51，係將藉由機械臂51b的箝夾51c所握持的被加工物，搬送至形成於吸盤台21的兩側部之一對定位條4上。在此，一對定位條4可藉由於X軸方向中可移動地安裝於框體2，在載置被加工物之狀態下彼此接近，將被加工物於吸盤台21的上方中配置與保持面21a成同心圓狀。 The first conveying means 51 includes a Y-axis moving means 51a as the moving body feeding mechanism 60 and a robot arm 51b attached to the Y-axis moving means 51a. The Y-axis moving means 51a has a stator fixed to the casing 2, and a mover attached to the stator and movable in the Y-axis direction. The robot arm 51b is a mover attached to the Y-axis moving means 51a, and is movable in the Y-axis direction together with the mover. The robot arm 51b has a jaw 51c formed at the front end portion. The jaw 51c is formed so as to be able to hold one of the workpieces placed in the wafer (not shown) of the wafer mounting portion 10. The first conveying means 51 conveys the workpiece held by the jaw 51c of the robot arm 51b to one of the side portions of the pair of suction cups 21 formed on the positioning bar 4. Here, the pair of positioning bars 4 are movably attached to the frame 2 in the X-axis direction, and are placed close to each other in a state in which the workpiece is placed, and the workpiece is placed and held above the chuck table 21. The face 21a is concentric.
第2搬送手段52係具有作為移動體進給機構60的Y軸移動手段52a，與安裝於Y軸移動手段52a之可伸縮於Z軸方向的機械臂52b。Y軸移動手段52a係具有固定於框體2的固定子，與安裝於該固定子，並且可沿著Y軸方向移動的移動子。機械臂52b設為安裝於Y軸移動手段52a的移動子，可與該移動子一起沿著Y軸方向移動。機械臂52b，係於形成於前端部之H型的支架的前端，具有真空吸附式的吸盤52c。吸盤52c可吸附並保持被加工物。第2搬送手段52係藉由吸盤52c吸附藉由第1搬送手段51被載置於定位條4上的被加工物，並使其 移動至吸盤台21的保持面21a上。又，第2搬送手段52，係藉由吸盤52c吸附藉由洗淨手段30洗淨之旋轉台31上的被加工物，並搬送至一對定位條4上。再者，藉由第2搬送手段52被搬送至一對定位條4上之洗淨後的被加工物，係藉由第1搬送手段51再次被搬送至未圖示的晶匣內。 The second transporting means 52 includes a Y-axis moving means 52a as the moving body feeding means 60, and a mechanical arm 52b which is attached to the Y-axis moving means 52a and which is extendable and contractable in the Z-axis direction. The Y-axis moving means 52a has a stator fixed to the casing 2, and a mover attached to the stator and movable in the Y-axis direction. The robot arm 52b is a mover attached to the Y-axis moving means 52a, and is movable along the Y-axis direction together with the mover. The robot arm 52b is attached to the front end of the H-shaped bracket formed at the front end portion, and has a vacuum suction type suction cup 52c. The suction cup 52c can adsorb and hold the workpiece. The second conveyance means 52 sucks the workpiece placed on the positioning bar 4 by the first conveyance means 51 by the suction cup 52c, and causes the workpiece to be processed. It is moved to the holding surface 21a of the suction table 21. Further, the second conveying means 52 sucks the workpiece on the rotary table 31 washed by the cleaning means 30 by the suction cup 52c, and conveys it to the pair of positioning strips 4. In addition, the workpiece to be processed which has been transported to the pair of positioning bars 4 by the second conveying means 52 is again conveyed to the wafer (not shown) by the first conveying means 51.
第3搬送手段53係具有作為移動體進給機構60的Y軸移動手段53a，與安裝於Y軸移動手段53a之可伸縮於Z軸方向的機械臂53b。Y軸移動手段53a係具有固定於框體2的固定子，與安裝於該固定子，並且可沿著Y軸方向移動的移動子。機械臂53b設為安裝於Y軸移動手段53a的移動子，可與該移動子一起沿著Y軸方向移動。機械臂53b，係於形成於前端部之H型的支架的前端，具有真空吸附式的吸盤53c。吸盤53c可吸附並保持被加工物。第3搬送手段53係藉由吸盤53c吸附吸盤台21之保持面21a上的被加工物，並搬送至洗淨手段30的旋轉台31上。 The third conveyance means 53 includes a Y-axis moving means 53a as the moving body feeding means 60, and a robot arm 53b which is attached to the Y-axis moving means 53a and which is extendable and contractable in the Z-axis direction. The Y-axis moving means 53a has a stator fixed to the casing 2, and a mover attached to the stator and movable in the Y-axis direction. The robot arm 53b is a mover attached to the Y-axis moving means 53a, and is movable in the Y-axis direction together with the mover. The robot arm 53b is attached to the front end of the H-shaped bracket formed at the front end portion, and has a vacuum suction type suction cup 53c. The suction cup 53c can adsorb and hold the workpiece. The third transport means 53 sucks the workpiece on the holding surface 21a of the chuck table 21 by the suction cup 53c, and conveys it to the rotary table 31 of the washing means 30.
接著，針對實施形態的移動體進給機構60詳細進行說明。如上所述，於本實施形態的加工裝置1中，移動體進給機構60是指數標定手段44的Y軸移動手段44a、進刀手段45的Z軸移動手段45a、第1搬送手段51的Y軸移動手段51a、第2搬送手段52的Y軸移動手段52a、及第3搬送手段53的Y軸移動手段53a。圖3係揭示移動體進給機構60的立體圖，圖4係揭示移動體進給 機構60的分解立體圖，圖5係揭示移動體進給機構60的剖面圖。再者，於圖3及圖4中，省略移動體進給機構60的兩端部的記載。 Next, the moving body feeding mechanism 60 of the embodiment will be described in detail. As described above, in the processing apparatus 1 of the present embodiment, the moving body feeding mechanism 60 is the Y-axis moving means 44a of the indexing means 44, the Z-axis moving means 45a of the feeding means 45, and the Y of the first conveying means 51. The shaft moving means 51a, the Y-axis moving means 52a of the second conveying means 52, and the Y-axis moving means 53a of the third conveying means 53. 3 is a perspective view showing the moving body feeding mechanism 60, and FIG. 4 is a view showing the moving body feeding. An exploded perspective view of the mechanism 60, and Fig. 5 is a cross-sectional view showing the moving body feeding mechanism 60. In addition, in FIGS. 3 and 4, the description of both ends of the moving body feeding mechanism 60 is omitted.
移動體進給機構60係具備設置於基台5(參照圖5)的一對導引軌道61、作為驅動源的脈衝馬達62、設置於該一對導引軌道61之間，且利用脈衝馬達62旋轉的滾珠螺桿63、沿著導引軌道61及滾珠螺桿63延伸，覆蓋導引軌道61及滾珠螺桿63，防止塗布於滾珠螺桿63之潤滑油的飛濺的護蓋手段64、具有螺合於滾珠螺桿63的母螺絲，沿著導引軌道61移動的滑件65。移動體進給機構60的構成要件中，一對導引軌道61、脈衝馬達62、滾珠螺桿63及護蓋手段64是前述固定子，滑件65是前述移動子。又，基台5係指數標定手段44的話是柱部3，進刀手段45的話是指數標定手段44的移動體44b，第1搬送手段51、第2搬送手段52、第3搬送手段53的話是框體2。 The moving body feeding mechanism 60 includes a pair of guide rails 61 provided on the base 5 (see FIG. 5), a pulse motor 62 as a drive source, and is disposed between the pair of guide rails 61, and is provided with a pulse motor. 62 rotating ball screw 63, extending along guide rail 61 and ball screw 63, covering guide rail 61 and ball screw 63, preventing the splashing means 64 of the lubricating oil applied to the ball screw 63, having screwing The female screw of the ball screw 63 is a slider 65 that moves along the guide rail 61. Among the components of the moving body feeding mechanism 60, the pair of guiding rails 61, the pulse motor 62, the ball screw 63, and the cover means 64 are the aforementioned stators, and the slider 65 is the aforementioned mover. In addition, when the base 5 is the indexing means 44, the column 3 is the moving means 44b of the indexing means 44, and the first conveying means 51, the second conveying means 52, and the third conveying means 53 are Frame 2.
一對導引軌道61係沿著滑件65的移動方向A(參照圖3所示的實線箭頭)延伸於基台5上。滾珠螺桿63係沿著滑件65的移動方向延伸於一對導引軌道61之間，一端以未圖示的固定部被固定於基台5。 A pair of guide rails 61 extend on the base 5 along the moving direction A of the slider 65 (see the solid arrow shown in FIG. 3). The ball screw 63 extends between the pair of guide rails 61 in the moving direction of the slider 65, and one end is fixed to the base 5 by a fixing portion (not shown).
護蓋手段64係如圖3及圖5所示，具備具有沿著滑件65的移動方向A，亦即滾珠螺桿伸展方向A延伸的蓋體641a和配設於蓋體641a的兩側，沿著滾珠螺桿伸展方向A延伸的側板641b，且剖面為ㄈ字型(矩形的框 沒有一邊的形狀)的溝狀構件641，與以將溝狀構件641一邊以滾珠螺桿伸展方向A的兩端部固定於基台5，一邊在ㄈ字型的內側覆蓋導引軌道61及滾珠螺桿63，ㄈ字型的前端即側板641b的前端641t與基台5隔開間隙70之方式對溝狀構件641進行定位的固定部642(參照圖1)。 As shown in FIGS. 3 and 5, the cover means 64 is provided with a cover body 641a extending along the movement direction A of the slider 65, that is, the ball screw extending direction A, and both sides of the cover body 641a. a side plate 641b extending in the direction in which the ball screw extends, and has a U-shaped cross section (rectangular frame) The groove-shaped member 641 having no one side shape and the both ends of the groove-shaped member 641 in the ball screw extending direction A are fixed to the base 5, and the guide rail 61 and the ball screw are covered on the inner side of the U-shape. 63. The front end 641t of the side plate 641b, which is the front end of the U-shaped type, is fixed to the groove member 641 so as to be spaced apart from the base 5 by a gap 70 (see Fig. 1).
溝狀構件641的蓋體641a係如圖3所示，沿著一對導引軌道61形成。蓋體641a係如圖5所示，從基台5之相反側覆蓋導引軌道61及滾珠螺桿63。溝狀構件641的側板641b係從沿著蓋體641a的滾珠螺桿伸展方向A延伸的兩緣部朝向基台5側往與滾珠螺桿伸展方向A正交延伸出。再者，側板641b係從蓋體641a的兩端部朝向基台5側，往與滾珠螺桿伸展方向A交叉的方向延伸出的話，不作為往與滾珠螺桿伸展方向A正交的方向延伸出者亦可。亦即，側板641b係從蓋體641a的兩端部朝向基台5側，對於滾珠螺桿伸展方向A成銳角或鈍角而延伸出亦可。 The lid body 641a of the groove-shaped member 641 is formed along a pair of guide rails 61 as shown in FIG. As shown in FIG. 5, the lid body 641a covers the guide rail 61 and the ball screw 63 from the opposite side of the base 5. The side plate 641b of the groove-shaped member 641 extends from the both edge portions extending in the ball screw extending direction A along the lid body 641a toward the base 5 side so as to extend orthogonally to the ball screw extending direction A. In addition, when the side plate 641b extends from the both end portions of the lid body 641a toward the base 5 side in the direction intersecting the ball screw extending direction A, the side plate 641b does not extend in a direction orthogonal to the ball screw extending direction A. can. In other words, the side plate 641b may extend from the both end portions of the lid body 641a toward the base 5 side, and may extend at an acute angle or an obtuse angle with respect to the ball screw extending direction A.
護蓋手段64係如圖1所示，於固定部642中固定於基台5。固定部642只要是在溝狀構件641的側板641b與基台5之間形成前述間隙70者的話，作為具有任何構造者亦可。例如，可考量於溝狀構件641的兩端部設置朝向基台5延伸之未圖示的突出部，藉由連結具等將該突出部固定於基台5的方法，或於基台5設置朝向溝狀構件641的側板641b延伸之未圖示的突出部，藉由連結具等將該突出部固定於溝狀構件641的側板641b的方法 等。 The cover means 64 is fixed to the base 5 in the fixing portion 642 as shown in FIG. The fixing portion 642 may have any structure as long as the gap 70 is formed between the side plate 641b of the groove-shaped member 641 and the base 5. For example, it is possible to provide a protruding portion (not shown) that extends toward the base 5 at both end portions of the groove-shaped member 641, a method of fixing the protruding portion to the base 5 by a connecting device or the like, or a setting on the base 5 A method of fixing the protruding portion to the side plate 641b of the groove member 641 by a connecting member or the like, which is not shown, extending toward the side plate 641b of the groove-shaped member 641 Wait.
滑件65係由螺合於滾珠螺桿63，與導引軌道61滑動的本體部65a、從本體部65a往導引軌道61的兩外側延伸，鑽過基台5與前述溝狀構件641的該間隙70，沿著側板641b立起的支架部65b、涵蓋立起之支架部65b的兩端部，跨過前述溝狀構件641而被固定的移動體65c所構成。 The slider 65 is screwed to the ball screw 63, and the main body portion 65a sliding with the guide rail 61 extends from both the main body portion 65a toward both outer sides of the guide rail 61, and the same is drilled through the base 5 and the groove member 641. The gap 70 is formed by a bracket portion 65b that rises up along the side plate 641b and a movable body 65c that is fixed to both ends of the bracket portion 65b that rises and straddles the groove member 641.
本體部65a具有可自由滑動地嵌入於一對導引軌道61的一對凹部650。本體部65a係以具有與滾珠螺桿63螺合的母螺絲之未圖示的螺帽形成於內部，在該未圖示的螺帽與滾珠螺桿63之間，未圖示的複數滾珠轉動之方式構成。因此，於滾珠螺桿63，為了潤滑未圖示的螺帽與複數滾珠之間，例如塗布油脂等的潤滑油。於本體部65a與被固定於基台5之護蓋手段64的溝狀構件641的蓋體641a之間，形成間隙。 The main body portion 65a has a pair of concave portions 650 that are slidably fitted in the pair of guide rails 61. The main body portion 65a is formed inside a nut (not shown) having a female screw that is screwed to the ball screw 63, and a plurality of balls (not shown) are rotated between the nut (not shown) and the ball screw 63. Composition. Therefore, in the ball screw 63, for lubricating a nut (not shown) and a plurality of balls, for example, a lubricating oil such as grease is applied. A gap is formed between the main body portion 65a and the lid member 641a of the groove member 641 fixed to the cover means 64 of the base 5.
各支架部65b係從本體部65a的基台5側的端部，朝向該基台5之相反側延伸出。各支架部65b係如圖5所示，從滾珠螺桿63的伸展方向A觀看呈剖面L字形。各支架部65b係一邊在與固定於基台5之護蓋手段64的溝狀構件641的側板641b之間形成間隙，一邊包圍該側板641b的一部分而延伸。如此，各支架部65b與溝狀構件641的側板641b，係一邊隔開間隙一邊相互交織而延伸。 Each of the bracket portions 65b extends from the end portion of the main body portion 65a on the base 5 side toward the opposite side of the base 5. Each of the bracket portions 65b has an L-shaped cross section as viewed in the extending direction A of the ball screw 63 as shown in FIG. Each of the bracket portions 65b extends while forming a gap between the side plates 641b of the groove-shaped members 641 fixed to the cover means 64 of the base 5, and surrounds a part of the side plates 641b. In this manner, each of the bracket portions 65b and the side plates 641b of the groove-shaped member 641 are interlaced and extended while being spaced apart from each other.
移動體65c係藉螺絲連結於各支架部65的與 本體部65a之相反側的端部。再者，支架部65b與移動體65c的固定方法，係例如於兩構件形成卡合部等，作為任何方法亦可。於移動體65c，指數標定手段44的話安裝移動體44b，進刀手段45的話安裝移動體45b，第1搬送手段51的話安裝機械臂51b，第2搬送手段52的話安裝機械臂52b，第3搬送手段53的話則安裝機械臂53b。如圖5所示，於移動體65c與被固定於基台5之護蓋手段64的溝狀構件641的蓋體641a之間，形成間隙。 The moving body 65c is coupled to each of the bracket portions 65 by screws. The end on the opposite side of the body portion 65a. Further, the method of fixing the bracket portion 65b and the movable body 65c may be, for example, forming an engaging portion between the two members, and may be any method. In the moving body 65c, the moving body 44b is attached to the indexing means 44, the moving body 45b is attached to the feeding means 45, the robot arm 51b is attached to the first conveying means 51, and the robot arm 52b is attached to the second conveying means 52. In the case of means 53, the robot arm 53b is attached. As shown in FIG. 5, a gap is formed between the movable body 65c and the lid body 641a of the groove-shaped member 641 fixed to the cover means 64 of the base 5.
藉由上述之構造，在移動體進給機構60中，可藉由護蓋手段64的溝狀構件641所具有之蓋體641a及側板641b，覆蓋一對導引軌道61及滾珠螺桿63的與基台5相反側的區域。又，在移動體進給機構60中，在滑件65與固定於基台5之護蓋手段64的溝狀構件641之間形成有間隙，滑件65可伴隨滾珠螺桿63的旋轉而不接觸溝狀構件641，沿著一對導引軌道61移動。 According to the above configuration, in the moving body feeding mechanism 60, the cover 641a and the side plate 641b of the groove member 641 of the cover means 64 can cover the pair of the guide rail 61 and the ball screw 63. The area on the opposite side of the abutment 5. Further, in the moving body feeding mechanism 60, a gap is formed between the slider 65 and the groove member 641 fixed to the cover means 64 of the base 5, and the slider 65 can be contacted without the rotation of the ball screw 63. The groove member 641 moves along the pair of guide rails 61.
圖6係作為比較例，揭示具備護蓋手段64B之移動體進給機構60B的立體圖，圖7係揭示移動體進給機構60B的剖面圖。如圖示般，移動體進給機構60B的護蓋手段64B係從護蓋手段64的溝狀構件641省略側板641b者。如此，在從溝狀構件641省略側板641b的護蓋手段64B中，如圖6及圖7所示，在一對導引軌道61與溝狀構件641之間形成間隙80。因此，使滑件65沿著一對導引軌道61移動時，藉由本體部65a之未圖示的螺帽與滾珠螺桿63的咬合，如圖7以實線箭頭所示般，有塗 布於滾珠螺桿63的潤滑油透過該間隙80而飛濺到移動體進給機構60B的周邊之虞。結果，被加工物的表面附著潤滑油的話，會有妨礙被加工物的品質提升之虞。 Fig. 6 is a perspective view showing a moving body feeding mechanism 60B including a cover means 64B as a comparative example, and Fig. 7 is a cross-sectional view showing the moving body feeding mechanism 60B. As shown in the figure, the cover means 64B of the moving body feeding mechanism 60B omits the side plate 641b from the groove-shaped member 641 of the cover means 64. As described above, in the cover means 64B in which the side plate 641b is omitted from the groove-shaped member 641, as shown in FIGS. 6 and 7, a gap 80 is formed between the pair of guide rails 61 and the groove-shaped member 641. Therefore, when the slider 65 is moved along the pair of guide rails 61, the nut (not shown) of the main body portion 65a is engaged with the ball screw 63, as shown by the solid arrow in Fig. 7, The lubricating oil disposed on the ball screw 63 passes through the gap 80 and splashes to the periphery of the moving body feeding mechanism 60B. As a result, when the lubricating oil adheres to the surface of the workpiece, there is a problem that the quality of the workpiece is prevented from being improved.
在本實施形態的移動體進給機構60中，可藉由護蓋手段64之溝狀構件641的蓋體641a及側板641b，覆蓋一對導引軌道61及滾珠螺桿63的與基台5相反側的區域，不會形成圖7所示之間隙80。藉此，藉由溝狀構件641，特別是側板641b，利用滑件65之本體部65a的未圖示的螺帽與滾珠螺桿63的咬合，良好地抑制塗布於滾珠螺桿63的潤滑油飛散至移動體進給機構60的周邊之狀況。又，藉由滑件65的支架部65b沿著溝狀構件641的側板641b立起，支架部65b與側板641b以一邊隔開間隙一邊相互交織之方式延伸，故可更良好地抑制潤滑油從支架部65b與側板641b之間漏出之狀況。結果，讓被加工物的表面不會附著潤滑油，可謀求被加工物的品質提升。 In the moving body feeding mechanism 60 of the present embodiment, the cover body 641a and the side plate 641b of the groove member 641 of the cover means 64 can cover the pair of guide rails 61 and the ball screw 63 opposite to the base 5. The side area does not form the gap 80 shown in FIG. Thereby, the groove member 641, in particular, the side plate 641b, by the engagement of the nut (not shown) of the main body portion 65a of the slider 65 with the ball screw 63, satisfactorily suppresses the scattering of the lubricating oil applied to the ball screw 63 to The condition of the periphery of the moving body feeding mechanism 60. Further, since the holder portion 65b of the slider 65 rises along the side plate 641b of the groove-shaped member 641, the holder portion 65b and the side plate 641b extend so as to be interlaced with each other with a gap therebetween, so that the lubricating oil can be more satisfactorily suppressed. A situation in which the bracket portion 65b and the side plate 641b leak. As a result, the lubricant is not adhered to the surface of the workpiece, and the quality of the workpiece can be improved.
進而，在本實施形態的移動體進給機構60中，可不讓滑件65與溝狀構件641接觸，並使滑件65沿著一對導引軌道61移動。藉此，相較於例如於滑件65的兩端部設置覆蓋滾珠螺桿63之蛇腹狀的護蓋之狀況，可確保滑件65的可動區域。又，利用不接觸滑件65及溝狀構件641，可良好地抑制滑件65及溝狀構件641損傷之狀況。 Further, in the moving body feeding mechanism 60 of the present embodiment, the slider 65 is prevented from coming into contact with the groove-shaped member 641, and the slider 65 is moved along the pair of guiding rails 61. Thereby, the movable area of the slider 65 can be secured as compared with, for example, the fact that the bellows-like cover covering the ball screw 63 is provided at both end portions of the slider 65. Moreover, the state in which the slider 65 and the groove-shaped member 641 are damaged can be satisfactorily suppressed by the non-contact slider 65 and the groove-shaped member 641.
如以上所說明般，在實施形態的移動體進給 機構60及加工裝置1中，藉由具有覆蓋導引軌道61及滾珠螺桿63之護蓋手段64的蓋體641a及側板641b的溝狀構件641，可良好地抑制被塗布於滾珠螺桿63的潤滑油飛濺到周邊之狀況。又，可讓滑件65不與溝狀構件641接觸而移動，故可一邊抑制滑件65及溝狀構件641發生損傷，一邊確保滑件65的可動區域。 As described above, the moving body feed of the embodiment In the mechanism 60 and the processing apparatus 1, the groove member 641 having the cover member 641a and the side plate 641b covering the guide rail 61 and the ball screw 63 can be satisfactorily suppressed from being applied to the lubrication of the ball screw 63. The oil splashed to the surrounding conditions. Further, since the slider 65 can be moved without coming into contact with the groove-shaped member 641, the movable region of the slider 65 can be secured while suppressing damage of the slider 65 and the groove-shaped member 641.
再者，在本實施形態中，作為將移動體進給機構60適用於指數標定手段44、進刀手段45、第1搬送手段51、第2搬送手段52、及第3搬送手段53者，但僅將移動體進給機構60適用於該等任一亦可。 In the present embodiment, the moving body feeding mechanism 60 is applied to the indexing means 44, the feeding means 45, the first conveying means 51, the second conveying means 52, and the third conveying means 53, but Only the moving body feeding mechanism 60 may be applied to any of these.
圖8係揭示變形例之移動體進給機構60C的剖面圖。如圖示般，移動體進給機構60C係除了前述移動體進給機構60的構造之外，具有從基台5延伸出的兩個板體66。兩個板體66係位於比滑件65的支架部65b更靠外側(對於支架部65b之本體部65a的相反側)，並且沿著該支架部65b延伸。藉此，藉由滑件65之本體部65a的未圖示的螺帽與滾珠螺桿63的咬合，可讓板體66更良好地抑制塗布於滾珠螺桿63的潤滑油飛散至移動體進給機構60的周邊之狀況。尤其，在圖8之下側成為垂直方向的下側時，藉由配置於下側的板體66，可良好地抑制以護蓋手段64之溝狀構件641的側板641b擋止的潤滑油垂落至下方之狀況。 Fig. 8 is a cross-sectional view showing a moving body feeding mechanism 60C according to a modification. As shown in the figure, the moving body feeding mechanism 60C has two plate bodies 66 extending from the base 5 in addition to the configuration of the moving body feeding mechanism 60 described above. The two plates 66 are located outside the bracket portion 65b of the slider 65 (on the opposite side of the body portion 65a of the bracket portion 65b) and extend along the bracket portion 65b. Thereby, the nut 66 (not shown) of the main body portion 65a of the slider 65 engages with the ball screw 63, so that the plate 66 can more effectively suppress the scattering of the lubricating oil applied to the ball screw 63 to the moving body feeding mechanism. The situation around the 60. In particular, when the lower side of the lower side of FIG. 8 is the lower side in the vertical direction, the lubricating oil falling by the side plate 641b of the groove-shaped member 641 of the cover means 64 can be satisfactorily suppressed by the plate member 66 disposed on the lower side. To the bottom of the situation.
60‧‧‧移動體進給機構 60‧‧‧Mobile body feeding mechanism
61‧‧‧導引軌道 61‧‧‧Guided track
62‧‧‧脈衝馬達 62‧‧‧ pulse motor
63‧‧‧滾珠螺桿 63‧‧‧Ball screw
64‧‧‧護蓋手段 64‧‧‧ Covering means
641‧‧‧溝狀構件 641‧‧‧ditch members
641a‧‧‧蓋體 641a‧‧‧ cover
641b‧‧‧側板 641b‧‧‧ side panel
65‧‧‧滑件 65‧‧‧Sliding parts
65a‧‧‧本體部 65a‧‧‧ Body Department
65b‧‧‧支架部 65b‧‧‧ bracket
65c‧‧‧移動體 65c‧‧‧Mobile
Claims (3)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016066337A JP2017180602A (en) | 2016-03-29 | 2016-03-29 | Movable body feeding mechanism and processing device |
| JP2016-066337 | 2016-03-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201738031A true TW201738031A (en) | 2017-11-01 |
| TWI715728B TWI715728B (en) | 2021-01-11 |
Family
ID=59983399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW106105329A TWI715728B (en) | 2016-03-29 | 2017-02-17 | Moving body feeding mechanism and processing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2017180602A (en) |
| KR (1) | KR20170113169A (en) |
| CN (1) | CN107234477A (en) |
| TW (1) | TWI715728B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109621776B (en) * | 2018-12-27 | 2021-08-06 | 贵阳金汉诚广告器材有限公司 | Color printing ink feeding device |
| KR102188835B1 (en) * | 2019-03-29 | 2020-12-09 | 공상식 | 4-axis drilling machine |
| JP2021133451A (en) * | 2020-02-26 | 2021-09-13 | 株式会社ディスコ | Processing device |
| CN113634814B (en) * | 2021-08-06 | 2022-11-25 | 临沂利信铝业有限公司 | Equipment for cutting aluminum and using method |
| CN113719538A (en) * | 2021-09-27 | 2021-11-30 | 大连船用柴油机有限公司 | Linear guide rail sliding block support |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5726991U (en) * | 1980-07-22 | 1982-02-12 | ||
| JPS6229240U (en) * | 1985-08-07 | 1987-02-21 | ||
| JPH0890385A (en) * | 1994-09-26 | 1996-04-09 | Toray Ind Inc | Dust-proof stage |
| JPH08141876A (en) * | 1994-11-15 | 1996-06-04 | T S Ii:Kk | Slide device |
| JP3367911B2 (en) * | 1999-02-26 | 2003-01-20 | Ｔｈｋ株式会社 | Lubricating oil supply device and rolling element screw device using the same |
| JP3602804B2 (en) * | 2001-02-07 | 2004-12-15 | 西研グラフィックス株式会社 | Straight running device |
| JP2004253741A (en) * | 2003-02-21 | 2004-09-09 | Sumitomo Eaton Noba Kk | Transfer device and semiconductor manufacturing device |
| TWI372213B (en) * | 2009-12-11 | 2012-09-11 | Hiwin Tech Corp | Linear module having supporting assemblies for supporting an upper cover |
| JP2013237230A (en) * | 2012-05-16 | 2013-11-28 | Meiki Co Ltd | Vacuum laminating apparatus |
| JP5928185B2 (en) * | 2012-06-19 | 2016-06-01 | 東京エレクトロン株式会社 | Board transfer equipment |
| CN202780658U (en) * | 2012-09-04 | 2013-03-13 | 浙江杰克机床有限公司 | Special connecting device for ball screw on numerical control machine tool |
| CN203409583U (en) * | 2013-07-01 | 2014-01-29 | 安徽力成机械装备有限公司 | Protective device of numerical control sliding table |
| JP6420609B2 (en) * | 2013-11-21 | 2018-11-07 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate transport method and substrate processing apparatus |
| JP6218600B2 (en) * | 2013-12-26 | 2017-10-25 | 株式会社ディスコ | Processing equipment |
| JP5776812B1 (en) * | 2014-04-01 | 2015-09-09 | 日本精工株式会社 | Table device and transfer device |
| JP2015207579A (en) * | 2014-04-17 | 2015-11-19 | 株式会社ディスコ | Cleavage device |
| JP6305272B2 (en) * | 2014-08-14 | 2018-04-04 | 株式会社ディスコ | Transport device |
| CN104526453B (en) * | 2015-01-02 | 2016-09-14 | 巨轮智能装备股份有限公司 | Platen dust guard |
| CN204700664U (en) * | 2015-06-12 | 2015-10-14 | 大族激光科技产业集团股份有限公司 | Fine-limit work platform and sealing device thereof |
-
2016
- 2016-03-29 JP JP2016066337A patent/JP2017180602A/en active Pending
-
2017
- 2017-02-17 TW TW106105329A patent/TWI715728B/en active
- 2017-03-22 KR KR1020170035896A patent/KR20170113169A/en not_active Application Discontinuation
- 2017-03-24 CN CN201710181242.9A patent/CN107234477A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017180602A (en) | 2017-10-05 |
| KR20170113169A (en) | 2017-10-12 |
| TWI715728B (en) | 2021-01-11 |
| CN107234477A (en) | 2017-10-10 |
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