TW201710664A - Defect inspection device controls the main light source module relative to irradiation angle and irradiation position on the article under inspection - Google Patents

Defect inspection device controls the main light source module relative to irradiation angle and irradiation position on the article under inspection Download PDF

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TW201710664A
TW201710664A TW104129845A TW104129845A TW201710664A TW 201710664 A TW201710664 A TW 201710664A TW 104129845 A TW104129845 A TW 104129845A TW 104129845 A TW104129845 A TW 104129845A TW 201710664 A TW201710664 A TW 201710664A
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main
light source
disposed
image capturing
module
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TW104129845A
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Chinese (zh)
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章明
陳柏丞
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中原大學
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Abstract

The invention relates to a defect inspection device comprising a main body, an image capturing module and two main light source modules. The image capturing module is disposed to the main body. The two main light source modules are disposed to the main body and respectively located at two sides of the image capturing module. The two main light source modules can be operated relative to the image capturing module, wherein when inspecting an article under inspection, the defect inspection device of the invention can utilize the control on irradiation angle and irradiation position of the main light source module relative to the article under inspection to improve utilization efficiency of the light source. The article under inspection can be completely irradiated by beam without beam irradiation dead zone so that the surface of the article under inspection can be completely inspected, and inspection images having better quality are obtained by the image capturing module.

Description

瑕疵檢測裝置瑕疵Detection device

本發明係有關於一種檢測裝置,尤指針對於一種瑕疵檢測裝置。

The invention relates to a detection device, in particular to a flaw detection device.

科技日新月異,有關於高科技產品的生產過程中,最需要花費時間的製程就是檢查瑕疵,也是製造程序中最重要的關卡之一,若沒有在各個零組件組成產品之前作好個別的把關,而於使用完整組裝的產品時,因瑕疵造成產品損壞或故障,會造成之後維修的麻煩,甚致於造成產品的毀壞,會產生更大的損失。Technology is changing with each passing day. In the production process of high-tech products, the process that takes the most time is to check the defects, and it is also one of the most important levels in the manufacturing process. If there is no individual check before the components are assembled, When using a fully assembled product, damage or malfunction of the product may cause troubles in subsequent repairs, which may result in greater damage to the product.

審視目前針對於高解析度二維尺寸與瑕疵的檢測產業方面,主要開發的檢測機台大多數是為了應用於晶片、電路板或一些較小尺寸待測物的檢測上,其解析度最高可達數微米,另外,也有少數在液晶顯示器上的應用,但是,有關於顯示、觸控面板或一些較大尺寸待測物的檢視上,尚無開發任何高解析度檢測機台,於大尺寸的檢測上並沒有較成熟的技術對應。Examining the current detection industry for high-resolution two-dimensional size and flaws, most of the main inspection machines are designed for application on wafers, boards or some smaller-sized objects to be tested. A few micrometers, in addition, there are a few applications on liquid crystal displays, but there are no high-resolution inspection machines developed for inspections of touch panels, touch panels or some larger-sized objects to be tested. There is no more mature technology corresponding to the detection.

一般而言,二維尺寸檢測較為容易,只需使用單一影像擷取系統搭配合適的光源即可有基本的檢測功能,但是,在檢測瑕疵部分,由於待測物表面容易附著灰塵及指紋,於基礎影像處理技術無法有效的將瑕疵突顯出來或是將表面附著的微小粒子消除,如果使用單一閥值進行影像切割將瑕疵與背景進行分離,仍會發現許多微小的雑點存在,於擷取表面影像時,影像擷取系統容易將灰塵、擦拭造成的髒汙、指紋及水痕等干擾誤判為瑕疵,而導致誤判率上升,但是,若使用中值濾波搭配單一閥值進行瑕疵檢測,其對比度較低之瑕疵影像會因此消失,也可能會造成誤判現象,因此有許多瑕疵檢視的演算法則被陸續提出來。In general, two-dimensional size detection is relatively easy. Just use a single image capture system with a suitable light source to have basic detection functions. However, in the detection of the flaw, the surface of the object to be tested is easy to adhere to dust and fingerprints. The basic image processing technology can not effectively display the condyles or eliminate the tiny particles attached to the surface. If a single threshold is used for image cutting, the image will be separated from the background, and many tiny defects will still be found on the surface. In the case of images, the image capture system can easily misinterpret the interference caused by dust, wiping, fingerprints, water marks, etc., and the false positive rate increases. However, if the median chopping is used with a single threshold for flaw detection, the contrast is improved. The lower image will disappear, and it may cause misjudgment. Therefore, many algorithms for reviewing are being proposed.

承上所述,如果要準確地於製程線上檢測出透明表面瑕疵,單靠演算法的改進是不夠的,必須由現場環境控制、光源技術、影像擷取技術與影像處理技術同步著手,才能真正發展出一套有效的自動化檢測瑕疵系統。As mentioned above, if the transparent surface is detected accurately on the process line, the improvement of the algorithm alone is not enough. It must be started by the on-site environmental control, light source technology, image capture technology and image processing technology. Developed an effective automated detection system.

針對於上述習知技術所缺乏的部分,本發明提供一種瑕疵檢測裝置,其於表面瑕疵及尺寸之自動化檢測需求,搭配高像素線型CCD擷取影像技術,以模組化方式設計開發檢測所使用的光源系統,可針對不同檢測項目指標選取適當模組與數量,並能與製程系統整合,達到即時檢測需求。
In view of the lack of the above-mentioned prior art, the present invention provides a flaw detection device, which is required for automatic detection of surface defects and dimensions, and is matched with a high-pixel line type CCD capture image technology, and is designed and developed in a modular manner. The light source system can select appropriate modules and quantities for different test item indicators, and can be integrated with the process system to achieve immediate detection requirements.

本發明之目的,在於提供一種瑕疵檢測裝置,其利用瑕疵檢測裝置檢測一待測物,而控制主光源模組相對於待測物之照射位置與照射角度,提升光源的使用效能,待測物能被光線完整的照射,而無光線照射死角,使待測物之表面能夠被完整的檢視,再經影像擷取模組取得品質較好的檢測影像。An object of the present invention is to provide a flaw detection device that detects a workpiece to be tested by using a flaw detection device, and controls an illumination position and an illumination angle of the main light source module relative to the object to be tested, thereby improving the use efficiency of the light source, and the object to be tested. It can be completely illuminated by the light, and no light will illuminate the dead angle, so that the surface of the object to be tested can be completely inspected, and then the image capturing module can obtain a better quality detection image.

本發明之目的,在於提供一種瑕疵檢測裝置,其將影像擷取模組與主光源模組進行模組化之設計結合,可減少影像擷取模組與主光源模組個別獨立設置所佔據之空間,也能省去檢測前需將主光源模組對應影像擷取模組之步驟。The object of the present invention is to provide a flaw detection device that combines the image capture module and the main light source module to modularize the design, thereby reducing the occupation of the image capture module and the main light source module independently. The space can also eliminate the steps of the main light source module corresponding to the image capturing module before the detection.

本發明之目的,在於提供一種瑕疵檢測裝置,其利用輔助光源模組增加光源亮度,並針對主光源模組照射待測物時,對於主光源模組不同角度之光源進行補光。An object of the present invention is to provide a flaw detection device that uses an auxiliary light source module to increase the brightness of a light source, and when the main light source module is irradiated with the object to be tested, the light source of the main light source module is filled with light at different angles.

為達上述所指稱之目的及功效,本發明為一種瑕疵檢測裝置,其包含一主體、一影像擷取模組與二主光源模組,影像擷取模組設置於主體,二主光源模組設置於主體,並分別位於影像擷取模組之兩側,該二主光源模組能相對於該影像擷取模組進行作動。In order to achieve the above-mentioned purpose and effect, the present invention is a flaw detection device comprising a main body, an image capturing module and two main light source modules, the image capturing module is disposed on the main body, and the two main light source modules are provided. The main light source modules are disposed on the two sides of the image capturing module, and the two main light source modules are operable relative to the image capturing module.

本發明更進一步設置至少一輔助光源模組,該至少一輔助光源模組設置於該影像擷取裝置之一側,並位於該二主光源模組之間。
The at least one auxiliary light source module is disposed on one side of the image capturing device and located between the two main light source modules.

1‧‧‧檢測瑕疵模組
2‧‧‧主體
21‧‧‧導孔
3‧‧‧影像擷取模組
30‧‧‧影像擷取元件
31‧‧‧鏡筒
32‧‧‧進光狹縫
4‧‧‧主光源模組
41‧‧‧主照明單元
410‧‧‧燈座
411‧‧‧發光二極體
42‧‧‧主調整單元
421‧‧‧滑件
422‧‧‧角度調整元件
5‧‧‧承載輸送帶
51‧‧‧待測物
6‧‧‧遮光罩
7‧‧‧輔助光源模組
71‧‧‧輔助照明單元
710‧‧‧燈座
711‧‧‧發光二極體
72‧‧‧輔助調整單元
1‧‧‧Detection module
2‧‧‧ Subject
21‧‧‧ Guide hole
3‧‧‧Image capture module
30‧‧‧Image capture component
31‧‧‧Mirror tube
32‧‧‧light slit
4‧‧‧Main light source module
41‧‧‧Main lighting unit
410‧‧‧ lamp holder
411‧‧‧Lighting diode
42‧‧‧Main adjustment unit
421‧‧‧Sliding parts
422‧‧‧ Angle adjustment components
5‧‧‧ Carrying conveyor belt
51‧‧‧Test object
6‧‧‧ hood
7‧‧‧Auxiliary light source module
71‧‧‧Auxiliary lighting unit
710‧‧‧ lamp holder
711‧‧‧Lighting diode
72‧‧‧Auxiliary adjustment unit


第一圖:其為本發明之第一實施例之瑕疵檢測裝置的示意圖;
第二圖:其為本發明之第一實施例之瑕疵檢測裝置的另一示意圖;
第三圖:其為本發明之第一實施例之瑕疵檢測裝置的使用示意圖;
第四圖:其為本發明之第一實施例之瑕疵檢測裝置的另一使用示意圖;
第五圖:其為本發明之第一實施例之瑕疵檢測裝置的再一使用示意圖;
第六圖:其為本發明之第二實施例之瑕疵檢測裝置的示意圖;以及
第七圖:其為本發明之第三實施例之瑕疵檢測裝置的示意圖。


First drawing: a schematic view of a flaw detecting device according to a first embodiment of the present invention;
Second drawing: another schematic view of the flaw detecting device of the first embodiment of the present invention;
Figure 3 is a schematic view showing the use of the flaw detecting device of the first embodiment of the present invention;
Fourth drawing: another schematic diagram of the use of the flaw detecting device of the first embodiment of the present invention;
Figure 5 is a schematic view showing still another use of the flaw detecting device of the first embodiment of the present invention;
Fig. 6 is a schematic view showing a flaw detecting device of a second embodiment of the present invention; and a seventh drawing showing a schematic view of the flaw detecting device of the third embodiment of the present invention.

為對本發明之特徵及所達成之功效有更進一步之瞭解與認識,謹佐以實施例及配合詳細之說明,說明如後:In order to further understand and understand the features of the present invention and the effects achieved, the following examples and the detailed descriptions are provided to illustrate the following:

請參閱第一圖與第二圖,其為本發明之第一實施例之瑕疵檢測裝置的示意圖與另一示意圖;如圖所示,本實施例係有關於一種瑕疵檢測裝置1,其包含一主體2、一影像擷取模組3與二主光源模組4,該影像擷取模組3設置於該主體2,該二主光源模組4設置於該主體2,並分別位於該影像擷取模組3之兩側,該二主光源模組4相對於該影像擷取模組3作動。Please refer to FIG. 1 and FIG. 2, which are schematic diagrams and another schematic diagram of a flaw detection device according to a first embodiment of the present invention; as shown in the figure, the present embodiment relates to a flaw detection device 1 including a The main body 2, an image capturing module 3 and two main light source modules 4, the image capturing module 3 is disposed on the main body 2, and the two main light source modules 4 are disposed on the main body 2 and are respectively located in the image The two main light source modules 4 are activated relative to the image capturing module 3 on both sides of the module 3.

承上所述,本實施例之圖示中係以XYZ坐標軸作說明,該瑕疵檢測裝置1之該影像擷取模組3係包含一電荷耦合元件(CCD)30、一鏡筒31與一進光狹縫32,該影像擷取元件30設置於該鏡筒31內,該進光狹縫32設置於該鏡筒31之一端,並靠近該二主光源模組4,且對應該影像擷取元件30。本實施例之該進光狹縫32為沿著X方向延伸之長型孔洞。位於該鏡筒31內之該影像擷取元件30可使用線型的該電荷耦合元件(CCD),也可使用複數個互補式金屬氧化物半導體(CMOS)之感光元件,該些個感光元件排列於一直線上,以適用於檢測晶片、電路板或一些較小尺寸且精密度較高之待測物。As described above, the illustration of the present embodiment is illustrated by an XYZ coordinate axis. The image capturing module 3 of the flaw detecting device 1 includes a charge coupled device (CCD) 30, a lens barrel 31 and a The light-incident slit 32 is disposed in the lens barrel 31. The light-incident slit 32 is disposed at one end of the lens barrel 31 and adjacent to the two main light source modules 4, and corresponds to the image 撷Take element 30. The light entrance slit 32 of this embodiment is an elongated hole extending in the X direction. The image capturing component 30 located in the lens barrel 31 may use a linear type of the charge coupled device (CCD) or a plurality of complementary metal oxide semiconductor (CMOS) photosensitive elements arranged in the photosensitive element. It is straightforward for testing wafers, boards or some smaller and more precise objects to be tested.

於本實施例中,每一該主光源模組4係包含一主照明單元41與一主調整單元42,該主調整單元42設置於該主體2,且該主調整單元42連接該主照明單元41。該主調整單元42能控制該主照明單元41之照射位置與照射角度,如此使用者可依據其需求透過該主調整單元42調整該主照明單元41。In this embodiment, each of the main light source modules 4 includes a main lighting unit 41 and a main adjusting unit 42 . The main adjusting unit 42 is disposed on the main body 2 , and the main adjusting unit 42 is connected to the main lighting unit. 41. The main adjustment unit 42 can control the illumination position and the illumination angle of the main illumination unit 41, so that the user can adjust the main illumination unit 41 through the main adjustment unit 42 according to the needs thereof.

請一併參閱第三圖,其為本發明之第一實施例之瑕疵檢測裝置的使用狀態圖;如圖所示,於此詳細說明該主調整單元42之結構及其如何設置於該本體2,該本體2更設有二導孔21,每一該導孔21為長條型孔洞,並沿著Y方向延伸,與該主照明單元41之該燈座410及該進光狹縫32相互垂直。每一該主調整單元42更包含一滑件421,該滑件421設置於該本體2之該導孔21,並連接該主照明單元41。該滑件421能移動於該導孔21內,並帶動該主照明單元41沿著Y方向移動,即該滑件421相對於該影像擷取模組3移動,該滑件421能帶動該主照明單元41靠近或遠離該影像擷取模組3,如此使用者依據其需求調整該主照明單元41之照射位置。Please refer to the third figure, which is a use state diagram of the flaw detection device according to the first embodiment of the present invention; as shown in the figure, the structure of the main adjustment unit 42 and how it is disposed on the body 2 are described in detail herein. The body 2 is further provided with two guiding holes 21, each of the guiding holes 21 is an elongated hole extending in the Y direction, and the lamp socket 410 and the light entrance slit 32 of the main lighting unit 41 are mutually connected. vertical. Each of the main adjustment units 42 further includes a slider 421 disposed on the guide hole 21 of the body 2 and connected to the main illumination unit 41. The slider 421 can move in the guiding hole 21 and move the main lighting unit 41 along the Y direction, that is, the slider 421 moves relative to the image capturing module 3, and the slider 421 can drive the main The illumination unit 41 is close to or away from the image capturing module 3, so that the user adjusts the illumination position of the main illumination unit 41 according to the needs thereof.

再一併參閱第四圖,其為本發明之第一實施例之瑕疵檢測裝置的另一使用狀態圖;如圖所示,每一該主調整單元42更包含一角度調整元件422,該角度調整元件422穿設該滑件421,並穿過該導孔21而連接該主照明單元41,其中操作該角度調整元件422以帶動該主照明單元41以X方向為中心旋轉,而產生一傾角或俯角,如此可依據使用者之需求而調整該主照明單元41之該些個發光二極體411陣列的照射角度,而有多種機構組合方式可達成該角度調整元件422控制該主照明單元41的照射角度,故,不再贅述。Referring to the fourth figure, another use state diagram of the flaw detection device according to the first embodiment of the present invention; as shown, each of the main adjustment units 42 further includes an angle adjustment component 422, the angle The adjusting member 422 passes through the sliding member 421 and is connected to the main lighting unit 41 through the guiding hole 21, wherein the angle adjusting member 422 is operated to drive the main lighting unit 41 to rotate around the X direction to generate an inclination angle. Or the angle of the depression, so that the illumination angle of the array of the LEDs 411 of the main illumination unit 41 can be adjusted according to the needs of the user, and the combination of the plurality of mechanisms can achieve the angle adjustment component 422 to control the main illumination unit 41. The angle of illumination, therefore, will not be repeated.

再者,復請參考第二圖,本實施例之該主照明單元41係包含一燈座410及複數個發光二極體411,該燈座410為矩形,並沿著X方向延伸,即與該進光狹縫32相互平行。該些個發光二極體411陣列設置於與XY平面平行之該燈座410的表面上,其中該些個發光二極體411可依據待測物之材質而更換不同波段長之發光二極體411,以適用於透明材質、電路板軟硬板線路、各式面板與背板等多類樣本之檢測。In addition, referring to the second figure, the main illumination unit 41 of the embodiment includes a socket 410 and a plurality of LEDs 411. The socket 410 is rectangular and extends along the X direction, that is, The light entrance slits 32 are parallel to each other. The array of the light-emitting diodes 411 is disposed on the surface of the socket 410 parallel to the XY plane, wherein the plurality of LEDs 411 can replace the LEDs of different wavelength bands according to the material of the object to be tested. 411, for the detection of a variety of samples for transparent materials, circuit board hard and soft board lines, various panels and backplanes.

同時參閱第五圖,其為本發明之第一實施例之瑕疵檢測裝置的再一使用狀態圖;如圖所示,本實施例說明利用該瑕疵檢測裝置1進行檢測,該瑕疵檢測裝置1設置於一承載平台5之上方,其中該承載平台5可設有一輸送帶或複數個滾輪,待測物51設置於該輸送帶或該些個滾輪,該輸送帶或該些個滾輪可傳送該待測物51;或者該待測物51利用人力直接搬運至該承載平台5上。當待測物51設置於該承載平台5上時,該待測物51位於該影像擷取模組3之該進光狹縫32之下方,該二主光源模組4之該二主照明單元41位於該影像擷取模組3兩側,並經由該二主調整單元42分別控制該二主照明單元41,由該二主調整單元42調整該二主照明單元41相對於該待測物51之照射位置與照射角度,使該二主照明單元41之光線能夠對該待測物51之表面能無光線照射死角,以達到照射光線範圍的照度均勻。該二主照明單元41之光線由兩側照射該待測物51之表面,若該待測物之表面有存在瑕疵,例如:裂紋、刮痕、凸點、凹面或任何缺陷結構,則入射光線於照射到這些表面瑕疵後,其反射光線路徑會受到偏移,藉此使該影像擷取模組3能夠檢測出有瑕疵之該待測物51。Referring to FIG. 5, it is a further use state diagram of the flaw detection device according to the first embodiment of the present invention; as shown in the figure, the present embodiment describes the detection by the flaw detection device 1, and the flaw detection device 1 is set. Above the carrying platform 5, the carrying platform 5 can be provided with a conveyor belt or a plurality of rollers, and the object to be tested 51 is disposed on the conveyor belt or the rollers, and the conveyor belt or the rollers can transmit the The measuring object 51; or the object to be tested 51 is directly transported to the carrying platform 5 by human power. When the object to be tested 51 is disposed on the carrying platform 5, the object to be tested 51 is located below the light entering slit 32 of the image capturing module 3, and the two main lighting units of the two main light source modules 4 The two main illumination units 41 are respectively controlled by the two main adjustment units 42 , and the two main illumination units 41 are adjusted relative to the object to be tested 51 by the two main adjustment units 42 . The illumination position and the illumination angle enable the light of the two main illumination units 41 to emit no dead rays to the surface of the object to be tested 51, so that the illumination of the illumination range is uniform. The light of the two main illumination units 41 is irradiated on both sides of the surface of the object to be tested 51. If there is flaws on the surface of the object to be tested, such as cracks, scratches, bumps, concave surfaces or any defective structure, the incident light is incident. After the surface is illuminated, the reflected light path is offset, thereby enabling the image capturing module 3 to detect the object 51 to be tested.

本實施例提供該瑕疵檢測裝置1以針對於習知技術之缺點進行改良,習知技術之瑕疵檢測裝置係將待測物對應於影像擷取元件,再於待測物之兩側架設照明元件,使光線照射於待測物之表面進行檢測,但照明元件之照明角度固定,如此容易造成照明死角,且也無法針對不同的待測物進行檢測,若要檢測不同的待測物,又要重新架設照明元件,所以用於檢測不同待測物很不方便,再者,習知技術之瑕疵檢測裝置係將影像擷取元件與照明元件分開進行架設使用,所佔據之空間較大,也需要將影像擷取元件與照明元件相對於待測物之位置進行對位架設使用,習知技術於使用有諸多不便,而本實施例係將該影像擷取模組3與該二主光源模組4設置於該主體2,而該二主光源模組4能相對於該影像擷取模組3作動,其優點在於,使用者能依據需求調整該主光源模組4對於該待測物51之照射位置與照射角度,以提升光源的使用效能,使光線能完整照射於該待測物51,而無光線照射死角,且因為可以調整光源照射位置,該瑕疵檢測裝置1能夠適應該待測物51之尺寸範圍較大,進一步本實施例將該二主光源模組4對應該影像擷取模組3而設置於該主體2,所以不需要再進行該二主光源模組4之對位架設,且該影像擷取模組3也不需要再額外架設該二主光源模組4,以減少所佔據之空間。The present embodiment provides the defect detecting device 1 to improve the shortcomings of the prior art. The conventional detecting device detects the object to be tested corresponding to the image capturing component, and then sets the lighting component on both sides of the object to be tested. , the light is irradiated on the surface of the object to be tested for detection, but the illumination angle of the illumination element is fixed, so that the illumination dead angle is easily caused, and it is impossible to detect different objects to be tested, and if different objects to be tested are to be detected, Re-arranging the lighting components, so it is inconvenient to detect different objects to be tested. Moreover, the conventional detection device of the technology separates the image capturing components from the lighting components, and the space occupied is large, and also needs The image capturing component and the lighting component are aligned with respect to the position of the object to be tested. The prior art has many inconveniences, and the image capturing module 3 and the two main light source modules are used in this embodiment. 4 is disposed on the main body 2, and the two main light source modules 4 can be operated relative to the image capturing module 3, which has the advantage that the user can adjust the main light source module 4 according to requirements. The illumination position and the illumination angle of the object to be tested 51 are used to enhance the use efficiency of the light source, so that the light can be completely irradiated to the object to be tested 51, and no light is irradiated to the dead angle, and since the light source irradiation position can be adjusted, the flaw detection device 1 can adapt to the size range of the object to be tested 51. Further, in this embodiment, the two main light source modules 4 are disposed on the main body 2 corresponding to the image capturing module 3, so the two main light sources need not be performed. The alignment of the module 4 is erected, and the image capturing module 3 does not need to additionally erect the two main light source modules 4 to reduce the occupied space.

請參閱第六圖,其為本發明之第二實施例之瑕疵檢測裝置的示意圖;如圖所示,於本實施例與第一實施例之差異在於,更進一步設置一遮光罩6,該遮光罩6設置於該主體2之周緣 ,使該瑕疵檢測裝置1於進行檢測時,該遮光罩6能夠屏蔽住檢測環境之外的光線,以降低環境光線對於檢測結果的影響,也能夠提升檢測影像之準確性。Referring to FIG. 6 , which is a schematic diagram of a flaw detection device according to a second embodiment of the present invention; as shown in the figure, the difference between the present embodiment and the first embodiment is that a light shield 6 is further disposed. The cover 6 is disposed on the periphery of the main body 2, so that the hood 6 can shield the light outside the detection environment when the detection device 1 is detected, so as to reduce the influence of the ambient light on the detection result, and can also improve the detection image. Accuracy.

請參閱第七圖,其為本發明之第三實施例之瑕疵檢測裝置的示意圖;如圖所示,本實施例與第二實施例之差異在於,進一步設置至少一輔助光源模組7,每一該輔助光源模組7設置於該影像擷取裝置3之一側,並位於該二主光源模組4之間,該輔助光源模組7能提供光源對該主光源模組4之光源進行補光,以提升光源之照射強度,提高檢測影像品質。Please refer to the seventh figure, which is a schematic diagram of a flaw detection device according to a third embodiment of the present invention. As shown in the figure, the difference between the embodiment and the second embodiment is that at least one auxiliary light source module 7 is further disposed. An auxiliary light source module 7 is disposed on one side of the image capturing device 3 and located between the two main light source modules 4, and the auxiliary light source module 7 can provide a light source to the light source of the main light source module 4. Fill light to enhance the illumination intensity of the light source and improve the quality of the detected image.

承上所述,該至少一輔助光源模組7更包含一輔助照明單元71與一輔助調整單元72,該輔助調整單元72連接該輔助照明單元71,該輔助調整單元72調整該輔助照明單元71之照射角度,可選擇利用低角度或高角度方式照射於該待測物51,以增加光源亮度,且能針對不同角度之瑕疵反射光線進行補光效果,再者,本實施例係將該至少一輔助光源模組7設置於該遮光罩6,並將該至少一輔助光源模組7對位該影像擷取裝置3,其中該輔助照明單元71係包含一燈座710與複數個發光二極體711,該燈座710為矩形,並沿著Y方向延伸,即與該進光狹縫32相互垂直。該些個發光二極體711陣列設置於與YZ平面平行之該燈座710的表面上,並將該些個發光二極體711陣列式排列,且該輔助照明單元71增加光源亮度,並對該主光源模組4照射該待測物51時,對該主光源模組3不同角度之光源進行補光。As described above, the at least one auxiliary light source module 7 further includes an auxiliary lighting unit 71 and an auxiliary adjusting unit 72. The auxiliary adjusting unit 72 is connected to the auxiliary lighting unit 71. The auxiliary adjusting unit 72 adjusts the auxiliary lighting unit 71. The illumination angle can be selected to be irradiated to the object to be tested 51 by using a low angle or a high angle to increase the brightness of the light source, and the light can be added to the reflected light of different angles. Furthermore, in this embodiment, the light is at least An auxiliary light source module 7 is disposed on the hood 6 and aligns the at least one auxiliary light source module 7 with the image capturing device 3, wherein the auxiliary lighting unit 71 includes a socket 710 and a plurality of LEDs The body 711 has a rectangular shape and extends in the Y direction, that is, perpendicular to the light entrance slit 32. The array of the LEDs 711 is disposed on the surface of the socket 710 parallel to the YZ plane, and the LEDs 711 are arranged in an array, and the auxiliary illumination unit 71 increases the brightness of the light source, and When the main light source module 4 illuminates the object to be tested 51, the light source of the main light source module 3 at different angles is filled with light.

綜上所述,本發明係有關於一種瑕疵檢測裝置,其包含該主體、該影像檢測模組與該二主光源模組,該瑕疵檢測裝置進行檢測一待測物,能利用控制該二主光源模組相對於該待測物之照射位置與照射角度,可提升光源的使用效能,再者,利用該遮光罩能夠屏蔽住環境光線,以減少環境光線影響,以提高檢測影像之準確性,另外,利用該輔助光源模組對於該主光源模組各種角度之照射光源進行補光,以提高檢測影像品質。In summary, the present invention relates to a flaw detecting device including the main body, the image detecting module and the two main light source modules, wherein the detecting device detects an object to be tested, and can control the two mains. The illumination position of the light source module relative to the object to be tested and the illumination angle can improve the performance of the light source. Furthermore, the hood can shield the ambient light to reduce the influence of ambient light to improve the accuracy of the detected image. In addition, the auxiliary light source module is used to fill light of the illumination source of the main light source module at various angles to improve the quality of the detected image.

惟以上所述者,僅為本發明一較佳實施例而已,並非用來限定本發明實施之範圍,故舉凡依本發明申請專利範圍所述之形狀、構造、特徵及精神所為之均等變化與修飾,均應包括於本發明之申請專利範圍內。However, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, so that the shapes, structures, features, and spirits described in the claims of the present invention are equally changed. Modifications are intended to be included in the scope of the patent application of the present invention.

故本發明實為一具有新穎性、進步性及可供產業上利用者,應符合我國專利法專利申請要件無疑,爰依法提出發明專利申請,祈 鈞局早日賜至准專利,至感為禱。Therefore, the present invention is a novelty, progressive and available for industrial use. It should be in accordance with the patent application requirements of the Chinese Patent Law. It is undoubtedly the invention patent application, and the Prayer Council will grant the patent as soon as possible. .

1‧‧‧檢測瑕疵模組 1‧‧‧Detection module

2‧‧‧主體 2‧‧‧ Subject

21‧‧‧導孔 21‧‧‧ Guide hole

3‧‧‧影像擷取模組 3‧‧‧Image capture module

30‧‧‧影像擷取元件 30‧‧‧Image capture component

31‧‧‧鏡筒 31‧‧‧Mirror tube

4‧‧‧主光源模組 4‧‧‧Main light source module

41‧‧‧主照明單元 41‧‧‧Main lighting unit

410‧‧‧燈座 410‧‧‧ lamp holder

42‧‧‧主調整單元 42‧‧‧Main adjustment unit

421‧‧‧滑件 421‧‧‧Sliding parts

422‧‧‧角度調整元件 422‧‧‧ Angle adjustment components

Claims (11)

一種瑕疵檢測裝置,其包含:
一主體;
一影像擷取模組,其設置於該主體;以及
二主光源模組,其設置於該主體,並分別位於該影像擷取模組之兩側,該二主光源模組相對於該影像擷取模組作動。
A flaw detection device comprising:
a subject;
An image capturing module is disposed on the main body; and two main light source modules are disposed on the main body and are respectively located on two sides of the image capturing module, and the two main light source modules are opposite to the image Take the module to act.
如申請專利範圍第1項所述之瑕疵檢測裝置,其中該主光源模組係包含一主照明單元與一主調整單元,該主調整單元位於該主體,且該主調整單元連接該主照明單元。The apparatus for detecting a flaw according to claim 1, wherein the main light source module comprises a main lighting unit and a main adjusting unit, the main adjusting unit is located in the main body, and the main adjusting unit is connected to the main lighting unit. . 如申請專利範圍第2項所述之瑕疵檢測裝置,其中該主照明單元係包含一燈座及複數個發光二極體,該些個發光二極體陣列設置於該燈座的表面上。The device of claim 2, wherein the main illumination unit comprises a lamp holder and a plurality of LEDs, and the LED arrays are disposed on a surface of the lamp holder. 如申請專利範圍第2項所述之瑕疵檢測裝置,其中該主調整單元係包含一滑件,該滑件設置於該本體之一導孔,並連接該主照明單元。The sputum detecting device according to the second aspect of the invention, wherein the main adjusting unit comprises a sliding member disposed on a guiding hole of the body and connected to the main lighting unit. 如申請專利範圍第2項所述之瑕疵檢測裝置,其中該主調整單元係包含一角度調整元件,該角度調整元件連接該主照明單元。The flaw detection device of claim 2, wherein the main adjustment unit comprises an angle adjustment component, the angle adjustment component being coupled to the main illumination unit. 如申請專利範圍第1項所述之瑕疵檢測裝置,其中該影像擷取模組係包含一影像擷取元件、一鏡筒與一進光狹縫,該影像擷取元件設置於該鏡筒之一端,該進光狹縫設置於該鏡筒之另一端,並靠近該主光源模組,且對應該電荷耦合元件。The image detecting module of the first aspect of the invention, wherein the image capturing module comprises an image capturing component, a lens barrel and a light entrance slit, wherein the image capturing component is disposed on the lens barrel At one end, the light entrance slit is disposed at the other end of the lens barrel and adjacent to the main light source module, and corresponds to the charge coupling element. 如申請專利範圍第6項所述之瑕疵檢測裝置,更進一步設置於一承載平台之上方。The flaw detection device described in claim 6 is further disposed above a load bearing platform. 如申請專利範圍第1項所述之瑕疵檢測裝置,更進一步設置一遮光罩,該遮光罩設置於該主體之周緣。The tamper detecting device according to claim 1, further comprising a hood disposed on a periphery of the body. 如申請專利範圍第1項所述之瑕疵檢測裝置,更進一步設置至少一輔助光源模組,該至少一輔助光源模組設置於該影像擷取裝置之一側,並位於該二主光源模組之間。The at least one auxiliary light source module is further disposed on one side of the image capturing device and located in the two main light source modules. between. 如申請專利範圍第9項所述之瑕疵檢測裝置,其中每一該輔助光源模組係包含一輔助照明單元與一輔助調整單元,該輔助調整單元連接該輔助照明單元。The detecting device of claim 9, wherein each of the auxiliary light source modules comprises an auxiliary lighting unit and an auxiliary adjusting unit, and the auxiliary adjusting unit is connected to the auxiliary lighting unit. 如申請專利範圍第9項所述之瑕疵檢測裝置,其中每一該輔助照明單元係包含一燈座與複數個發光二極體,該些個發光二極體陣列設置於該燈座的表面上。The detection device of claim 9 , wherein each of the auxiliary illumination units comprises a lamp holder and a plurality of LEDs, and the LED arrays are disposed on a surface of the lamp holder. .
TW104129845A 2015-09-09 2015-09-09 Defect inspection device controls the main light source module relative to irradiation angle and irradiation position on the article under inspection TW201710664A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111551555A (en) * 2019-02-12 2020-08-18 微精科技股份有限公司 Automatic identification system on cloth flaw line
TWI755213B (en) * 2020-12-22 2022-02-11 鴻海精密工業股份有限公司 Method and device for detecting defections, computer device and storage medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111551555A (en) * 2019-02-12 2020-08-18 微精科技股份有限公司 Automatic identification system on cloth flaw line
TWI755213B (en) * 2020-12-22 2022-02-11 鴻海精密工業股份有限公司 Method and device for detecting defections, computer device and storage medium

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