TW201705655A - Rectilinear motion linear module and position control servo system provided with module - Google Patents
Rectilinear motion linear module and position control servo system provided with module Download PDFInfo
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Abstract
Description
本發明係關於一種自動化模組，尤指一種直線運動線性模組及應用該直線運動線性模組的位置控制伺服系統。The invention relates to an automation module, in particular to a linear motion linear module and a position control servo system using the linear motion linear module.
當前在自動化行業裡會採用大量的線性模組，例如圖11所示，常用的KK線性模組9，係由馬達電機91、滾珠螺杆92、導軌93和螺帽動子座94，由馬達電機91驅動該滾珠螺杆92旋轉，帶動滾珠螺杆92上的螺帽動子座94沿導軌93做往復直線運動。該KK線性模組9雖然被廣泛應用，也具備良好性能，但也存在一些較爲明顯的缺點，如高精度的滾珠螺杆加工困難、成本高，令滾珠螺杆實施長度尺寸受到較大的限制，同時也存在裝置高速運轉的困難。At present, a large number of linear modules are used in the automation industry. For example, as shown in FIG. 11, the commonly used KK linear module 9 is composed of a motor motor 91, a ball screw 92, a guide rail 93, and a nut mover seat 94. 91 drives the ball screw 92 to rotate, and drives the nut mover seat 94 on the ball screw 92 to reciprocate linearly along the guide rail 93. Although the KK linear module 9 is widely used, it also has good performance, but there are also some obvious disadvantages, such as high-precision ball screw processing and high cost, so that the length dimension of the ball screw is greatly limited. At the same time, there are difficulties in operating the device at high speed.
針對背景技術中所提及的問題，本發明提出一種直線運動線性模組，目的在於解決線性模組應用的運行精度、速度、模組尺寸、成本等方面的問題。 為達成上述目的本發明所採取的主要技術手段係令前述直線運動線性模組包括： 一槽型鋼體，其內側壁上設置有至少一直線向的導引槽或導引凸軌； 一動子座，係於該槽型鋼體上往復運動，且設置於該槽型鋼體的槽內，該動子座兩側表面設有配合該槽型鋼體的導引槽或導引凸軌的導引結構； 一動子塊，係包括多相無鐵芯線圈繞組或帶有高導磁率鐵芯的多相線圈繞組，該動子塊設置於該動子座下方，由一電機驅動器控制連接；以及 一定子塊，係與該動子塊相互配合以驅動該動子座運動，且該定子塊爲永磁體，該定子塊於該槽型鋼體的槽內底面沿導引槽或導引凸軌的延伸方向間隔貼置，並與該動子塊之間留有間隙。In view of the problems mentioned in the background art, the present invention proposes a linear motion linear module, which aims to solve the problems of running accuracy, speed, module size, cost and the like of the linear module application. The main technical means adopted by the present invention for achieving the above object is that the linear motion linear module comprises: a grooved steel body, wherein the inner side wall is provided with at least a straight guiding groove or a guiding convex rail; a mover seat, Reciprocatingly moving on the channel-shaped steel body, and disposed in the groove of the channel-shaped steel body, the guiding surfaces of the guiding groove or the guiding convex rail supporting the groove-shaped steel body are provided on both sides of the movable seat; The sub-block includes a multi-phase iron-free coil winding or a multi-phase coil winding with a high magnetic permeability core, the mover block is disposed under the mover seat, controlled by a motor driver; and a certain sub-block, And interacting with the mover block to drive the movement of the mover seat, and the stator block is a permanent magnet, and the stator block is spaced on the bottom surface of the groove of the grooved steel body along the extending direction of the guide groove or the guide rail Set and leave a gap between the mover block.
進一步的，該槽型鋼體由於純鐵或低炭鋼加工成型。Further, the channel steel body is formed by processing pure iron or low carbon steel.
進一步的，該動子座的導引結構爲凸設於動子座表面、嵌入幷沿該槽型鋼體的導引槽滑動的凸塊或凸條；或爲凹設於動子座表面、供該槽型鋼體的導引凸軌嵌入幷滑動的凹槽。Further, the guiding structure of the mover seat is a protrusion or a ridge protruding from the surface of the mover seat and embedded in the guide groove of the grooved steel body; or is recessed on the surface of the mover seat for providing The guide rail of the channel steel body is embedded in the sliding groove of the crucible.
進一步的，該槽型鋼體的導引槽或導引凸軌與該動子座的導引結構呈相互配合“U”型或“V”型或其它組合形狀。Further, the guiding groove or the guiding convex rail of the channel steel body and the guiding structure of the mover seat cooperate with each other in a U-shaped or "V" shape or other combined shape.
進一步的，該動子座包括一水平部及由水平部邊緣垂直朝下延伸的兩豎直部，且由水平部與豎直部圍設成朝下開放的槽位，該槽位內置有該動子塊。Further, the mover base includes a horizontal portion and two vertical portions extending vertically downward from the horizontal portion edge, and the horizontal portion and the vertical portion are arranged to be open downwardly, and the slot has the built-in Moving block.
進一步的，該槽型鋼體的導引槽與動子座的凸條之間、或該槽型鋼體的導引凸軌與動子座的凹槽之間設置有滾珠。Further, a ball is disposed between the guiding groove of the grooved steel body and the protruding strip of the mover seat, or between the guiding convex rail of the grooved steel body and the groove of the mover seat.
進一步的，該槽型鋼體的內側壁上設有嵌槽，該嵌槽用於配合安裝一嵌塊，該嵌塊上設置有該導引槽或導引凸軌。Further, the inner side wall of the channel steel body is provided with a recessed groove for fitting a mounting block, and the guiding block is provided with the guiding groove or the guiding convex rail.
進一步的，該槽型鋼體的內側壁上安裝有嵌裝塊，該嵌裝塊上設置有該導引槽或導引凸軌。Further, the inner side wall of the channel steel body is mounted with an embedded block, and the guiding block is provided with the guiding groove or the guiding convex rail.
進一步的，該動子座上設置有至少一安裝孔，用於與其它設備或部件相聯接。Further, the mover base is provided with at least one mounting hole for coupling with other devices or components.
本發明所採取的又一主要技術手段係令前述應用該直線運動線性模組的位置控制伺服系統，其包括： 一種如上述的直線運動線性模組； 一測量尺，該測量尺為一光柵尺或一磁性尺，且該測量尺設置於該直線運動線性模組的槽型鋼體的外壁、內壁或其它與運動方向一致的支架上； 一讀數頭，係與該直線運動線性模組的動子座相固定，並與該測量尺相對；以及 一控制器，係連接至該讀數頭之一信號輸出端。Another main technical means adopted by the present invention is the position control servo system using the linear motion linear module, which comprises: a linear motion linear module as described above; a measuring ruler, the measuring ruler is a grating ruler Or a magnetic ruler, and the measuring ruler is disposed on the outer wall, the inner wall or the other bracket of the linear shape of the linear motion linear module; the read head is connected to the linear motion linear module The sub-seat is fixed and opposite the measuring ruler; and a controller is connected to one of the signal outputs of the readhead.
本發明採用了直線電機與槽型鋼一體化設計方案，具有精度高、速度快、響應時間短、推力大、成本低等優勢，完全可以取代傳統的線性模組，引起自動化行業的大變革。The invention adopts the integrated design scheme of linear motor and channel steel, and has the advantages of high precision, high speed, short response time, large thrust and low cost, and can completely replace the traditional linear module, causing great changes in the automation industry.
如下結合附圖1-8，對本發明作進一步描述：The present invention is further described below in conjunction with Figures 1-8:
如圖1和2所示，本發明的具體實施例一：As shown in Figures 1 and 2, a specific embodiment of the present invention:
一種直線運動線性模組，包括由於純鐵或低炭鋼加工成型的槽型鋼體1、於該槽型鋼體1上往復運動的動子座3、以及相互配合以驅動該動子座3運動的動子塊4和定子塊2；A linear motion linear module comprising a channel steel body formed by pure iron or low carbon steel, a mover seat 3 reciprocating on the channel steel body 1, and a mutual cooperation to drive the movement of the mover seat 3 Moving block 4 and stator block 2;
該槽型鋼體1的內側壁上左右對稱設置有一組直線向的導引槽11；The inner side wall of the channel steel body 1 is symmetrically disposed on the left and right sides with a set of linear guiding grooves 11;
該動子座3置於該槽型鋼體1的槽內，其兩側表面設有配合該槽型鋼體1的導引槽11的導引結構，該導引結構爲凸設於動子座3表面、嵌入並沿該槽型鋼體1的導引槽11滑動的凸塊或凸條31；該導引槽11或凸塊表面採用激光淬火或其他形式表面加硬耐磨處理。The mover base 3 is disposed in the groove of the channel-shaped steel body 1 , and the guide surfaces of the guide grooves 11 of the grooved steel body 1 are disposed on both sides of the grooved body 1 , and the guide structure is protruded from the mover seat 3 a surface, a bump or a rib 31 embedded and sliding along the guiding groove 11 of the channel steel body 1; the guiding groove 11 or the surface of the bump is subjected to laser hardening or other forms of surface hardening and abrasion treatment.
該動子塊4包括多相無鐵芯線圈繞組或帶有高導磁率鐵芯的多相線圈繞組，其設置於該動子座3下方，由電機驅動器控制連接；The mover block 4 includes a multi-phase iron-free coil winding or a multi-phase coil winding with a high magnetic permeability core, which is disposed under the mover base 3 and is connected by a motor driver;
該定子塊2爲永磁體，其於該槽型鋼體1的槽內底面沿導引槽的延伸方向間隔貼置；該動子塊4與定子塊2之間留有間隙。The stator block 2 is a permanent magnet that is spaced apart from the bottom surface of the grooved steel body 1 in the extending direction of the guide groove; a gap is left between the mover block 4 and the stator block 2.
該槽型鋼體1的導引槽11與該動子座3的凸塊或凸條31呈相互配合“U”型或“V”型或其它組合形狀。The guiding groove 11 of the channel steel body 1 and the protrusion or the rib 31 of the moving block 3 are in a "U" shape or a "V" shape or other combination.
該動子座3包括一水平部301及由水平部301邊緣垂直朝下延伸的兩豎直部302，且由水平部301與豎直部302圍設成朝下開放的槽位303，該槽位303內置有該動子塊4。The mover base 3 includes a horizontal portion 301 and two vertical portions 302 extending vertically downward from the edge of the horizontal portion 301, and is surrounded by a horizontal portion 301 and a vertical portion 302 into a downwardly open slot 303. The mover block 4 is built in the bit 303.
該動子座3上設置有至少一安裝孔30，用於與其它設備或部件相聯接。The mover base 3 is provided with at least one mounting hole 30 for coupling with other devices or components.
如圖3所示，本發明的具體實施例二：As shown in FIG. 3, a specific embodiment 2 of the present invention:
其與上述具體實施例一的區別在於，該槽型鋼體1的內側壁上設置有直線向的導引凸軌12，該動子座3置於該槽型鋼體1的槽內，其兩側表面設有配合該槽型鋼體1的導引凸軌12的導引結構，該導引結構爲凹設於動子座3表面、供該槽型鋼體1的導引凸軌12嵌入並滑動的凹槽32；The difference from the first embodiment is that the inner side wall of the channel steel body 1 is provided with a linear guiding guide rail 12, and the movable seat 3 is placed in the groove of the channel steel body 1 on both sides thereof. The surface is provided with a guiding structure for guiding the guiding rail 12 of the channel steel body 1. The guiding structure is recessed on the surface of the mover seat 3, and the guiding rail 12 of the channel steel body 1 is embedded and slid. Groove 32;
該槽型鋼體1的導引凸軌12與該動子座3的凹槽32呈相互配合“U”型或“V”型或其它組合形狀。The guide rail 12 of the channel steel body 1 and the groove 32 of the mover seat 3 are in a "U" or "V" shape or other combination.
如圖4所示，本發明的具體實施例三：As shown in FIG. 4, a specific embodiment 3 of the present invention:
其與上述具體實施例一的區別在於，該槽型鋼體1的導引槽11與動子座3的凸條31之間設置有滾珠5，採用單排或多排滾珠5與導引槽11的配合方式，用滾動接觸减少凸條31與導引槽11之間的摩擦力。The difference from the first embodiment is that the ball 5 is disposed between the guiding groove 11 of the channel steel body 1 and the protruding strip 31 of the mover seat 3, and the single or multiple rows of balls 5 and the guiding groove 11 are used. The manner of cooperation reduces the friction between the rib 31 and the guide groove 11 by rolling contact.
如圖5所示，本發明的具體實施例四：As shown in FIG. 5, a specific embodiment 4 of the present invention:
其與上述具體實施例二的區別在於，該槽型鋼體1的導引凸軌12與動子座3的凹槽32之間設置有滾珠5，採用單排或多排滾珠與凹槽32的配合方式，用滾動接觸减少導引凸軌12與凹槽32之間的摩擦力。The difference from the second embodiment is that the ball 5 is disposed between the guiding rail 12 of the channel steel body 1 and the groove 32 of the mover seat 3, and the single or multiple rows of balls and grooves 32 are used. In a fitting manner, the frictional contact between the guide rail 12 and the groove 32 is reduced by rolling contact.
如圖6所示，本發明的具體實施例五：As shown in FIG. 6, a specific embodiment 5 of the present invention:
其與上述具體實施例一的區別在於，該動子座3置於該槽型鋼體1的槽內，其兩側表面設有凹槽32，由槽型鋼體1的導引槽11與動子座3的凹槽32共同圍設而成的通道中放置有滾珠5，該滾珠5起到連接支撑和减少摩擦的作用。The difference from the first embodiment is that the mover seat 3 is placed in the groove of the channel steel body 1 and the groove surfaces 32 are provided on both sides thereof. The guide groove 11 and the mover of the channel steel body 1 are provided. Balls 5 are placed in the channels surrounded by the recesses 32 of the seat 3, and the balls 5 serve to support the joints and reduce friction.
如圖7所示，本發明的具體實施例六：As shown in FIG. 7, a specific embodiment 6 of the present invention:
其與上述具體實施例一的區別在於，該槽型鋼體1的內側壁上設有嵌槽13，該嵌槽13用於配合安裝一嵌塊130，該嵌塊130上設置有該導引槽11。The difference from the first embodiment is that the inner side wall of the channel steel body 1 is provided with a recess 13 for fitting a mounting block 130. The guiding block 130 is provided with the guiding slot. 11.
如圖8所示，本發明的具體實施例七：As shown in FIG. 8, a specific embodiment 7 of the present invention:
其與上述具體實施例一的區別在於，該槽型鋼體1的內側壁上安裝有嵌裝塊14，該嵌裝塊14上設置有該導引槽11。The difference from the first embodiment is that the inner side wall of the channel steel body 1 is mounted with an insert block 14 on which the guide groove 11 is disposed.
除上述實施例一至七中所列舉的槽型鋼體1與動子座3的配合外，其它直線導向滑動配合結構均可被本發明所採用，且不偏離本發明的精神。In addition to the cooperation of the channel steel body 1 and the mover base 3 recited in the above embodiments 1 to 7, other linear guide sliding fit structures can be employed by the present invention without departing from the spirit of the present invention.
如圖9所示，本發明的位置控制伺服系統，包括上述的直線運動線性模組、一測量尺6、一讀數頭7、一電機驅動器與一控制器（圖中未示出）；As shown in FIG. 9, the position control servo system of the present invention comprises the above linear motion linear module, a measuring rule 6, a read head 7, a motor driver and a controller (not shown);
該測量尺6為一光柵尺或一磁性尺，且該測量尺6設置於該直線運動線性模組的槽型鋼體1的外壁，該讀數頭7通過一固定支架8與該直線運動線性模組的動子座3相固定，並與該測量尺6相對，該讀數頭7之一信號輸出端連接至該控制器。The measuring ruler 6 is a grating ruler or a magnetic ruler, and the measuring ruler 6 is disposed on the outer wall of the channel steel body 1 of the linear motion linear module, and the reading head 7 passes through a fixing bracket 8 and the linear motion linear module. The mover base 3 is fixed and opposite the measuring rule 6, and a signal output of the read head 7 is connected to the controller.
如圖10所示，本發明位置控制伺服系統的又一實施例，其與上述實施例的主要區別在於槽型鋼體1內壁的導引槽11設有兩組。As shown in FIG. 10, another embodiment of the position control servo system of the present invention differs from the above embodiment in that the guide grooves 11 of the inner wall of the channel steel body 1 are provided in two groups.
上述的各實施例工作原理：The working principles of the above embodiments are as follows:
當動子塊4的繞組通入三相交流電時，將在動子塊4與定子塊2的間隙中産生沿直線前進的行波磁場，行波磁場與永磁體定子塊2的勵磁磁場相互作用便會産生電磁推力，在這個電磁力的推動下動子塊便會沿與行波磁場運動相反的方向在槽型鋼體1的導引槽11導引下做直線運動，其速度等於同步速度，即與驅動電源頻率成正比，改變三相電流的相序就可以改變行波的磁場方向，從而改變動子運動的方向。而該測量尺6與讀數頭7用作行程的監測，在到達預設行程時由控制器判斷，從而控制電機驅動器執行反向行程或停機。When the winding of the mover block 4 is supplied with three-phase alternating current, a traveling wave magnetic field traveling in a straight line is generated in the gap between the mover block 4 and the stator block 2, and the traveling magnetic field and the exciting magnetic field of the permanent magnet stator block 2 are mutually The action will generate electromagnetic thrust. Under the push of the electromagnetic force, the mover block will linearly move under the guidance of the guide groove 11 of the channel steel body 1 in the opposite direction to the traveling wave magnetic field movement, and its speed is equal to the synchronous speed. That is, proportional to the frequency of the driving power supply, changing the phase sequence of the three-phase current can change the direction of the magnetic field of the traveling wave, thereby changing the direction of the movement of the mover. The measuring ruler 6 and the reading head 7 are used for monitoring the stroke, and are judged by the controller when the preset stroke is reached, thereby controlling the motor driver to perform a reverse stroke or a stop.
上述實施例應視爲本發明實施方式的舉例說明，凡與本發明雷同、近似或以此爲基礎作出的技術推演、替換、改進等，均應視爲本專利的保護範圍。The above embodiments are to be considered as illustrative of the embodiments of the present invention. Any technical derivation, substitution, improvement, etc., which are based on the same, similar or similar to the present invention, should be regarded as the protection scope of the patent.
1‧‧‧槽型鋼體
11‧‧‧導引槽
12‧‧‧導引凸塊
13‧‧‧嵌槽
130‧‧‧嵌塊
14‧‧‧嵌裝塊
2‧‧‧定子塊
3‧‧‧動子座
30‧‧‧安裝孔
301‧‧‧水平部
302‧‧‧豎直部
303‧‧‧槽位
31‧‧‧凸條
32‧‧‧凹槽
4‧‧‧動子塊
5‧‧‧滾珠
6‧‧‧測量尺
7‧‧‧讀數頭
8‧‧‧固定支架
9‧‧‧KK線性模組
91‧‧‧馬達電機
92‧‧‧滾珠螺桿
93‧‧‧導軌
94‧‧‧螺帽動子座1‧‧‧ trough steel body
11‧‧‧ guiding slot
12‧‧‧Guiding bumps
13‧‧‧Inlay
130‧‧‧Block
14‧‧‧ embedded block
2‧‧‧stator block
3‧‧‧Motion
30‧‧‧Installation holes
301‧‧‧ horizontal department
302‧‧‧ vertical
303‧‧‧ slots
31‧‧ ‧ ribs
32‧‧‧ Groove
4‧‧‧ mover block
5‧‧‧ balls
6‧‧‧Measurement ruler
7‧‧‧Reading head
8‧‧‧Fixed bracket
9‧‧‧KK Linear Module
91‧‧‧Motor motor
92‧‧‧Ball screw
93‧‧‧rails
94‧‧‧Nuts
圖1爲本發明的直線運動線性模組的整體結構示意圖。1 is a schematic view showing the overall structure of a linear motion linear module of the present invention.
圖2爲本發明的直線運動線性模組實施例一的橫剖面結構示意圖。2 is a schematic cross-sectional structural view of a first embodiment of a linear motion linear module according to the present invention.
圖3爲本發明的直線運動線性模組實施例二的橫剖面結構示意圖。3 is a schematic cross-sectional structural view of a second embodiment of a linear motion linear module according to the present invention.
圖4爲本發明的直線運動線性模組實施例三的橫剖面結構示意圖。4 is a schematic cross-sectional structural view of a third embodiment of a linear motion linear module according to the present invention.
圖5爲本發明的直線運動線性模組實施例四的橫剖面結構示意圖。FIG. 5 is a schematic cross-sectional structural view of a fourth embodiment of a linear motion linear module according to the present invention.
圖6爲本發明的直線運動線性模組實施例五的橫剖面結構示意圖。6 is a schematic cross-sectional structural view of a fifth embodiment of a linear motion linear module according to the present invention.
圖7爲本發明的直線運動線性模組實施例六的橫剖面結構示意圖。FIG. 7 is a schematic cross-sectional structural view of a sixth embodiment of a linear motion linear module according to the present invention.
圖8爲本發明的直線運動線性模組實施例七的橫剖面結構示意圖。8 is a schematic cross-sectional structural view of a seventh embodiment of a linear motion linear module according to the present invention.
圖9爲本發明的位置控制伺服系統的結構示意圖一。Fig. 9 is a first schematic structural view of the position control servo system of the present invention.
圖10爲本發明的位置控制伺服系統的結構示意圖二。Fig. 10 is a second schematic structural view of the position control servo system of the present invention.
圖11爲現有的KK線性模組結構圖。Figure 11 is a structural diagram of a conventional KK linear module.
1‧‧‧槽型鋼體 1‧‧‧ trough steel body
2‧‧‧定子塊 2‧‧‧stator block
3‧‧‧動子座 3‧‧‧Motion
4‧‧‧動子塊 4‧‧‧ mover block
6‧‧‧測量尺 6‧‧‧Measurement ruler
7‧‧‧讀數頭 7‧‧‧Reading head
8‧‧‧固定支架 8‧‧‧Fixed bracket
30‧‧‧安裝孔 30‧‧‧Installation holes
Claims (10)
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| CN201510435848.1A CN105006940A (en) | 2015-07-22 | 2015-07-22 | Rectilinear motion linear module and position control servo system provided with module |
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| TW201705655A true TW201705655A (en) | 2017-02-01 |
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| TW105122631A TW201705655A (en) | 2015-07-22 | 2016-07-18 | Rectilinear motion linear module and position control servo system provided with module |
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| TW (1) | TW201705655A (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105281535A (en) * | 2015-11-10 | 2016-01-27 | 北京顿一科技有限公司 | Rectilinear motion linear module group |
| TWI669183B (en) * | 2018-09-27 | 2019-08-21 | 東佑達自動化科技股份有限公司 | Slide apparatus |
| CN111245194A (en) * | 2018-11-29 | 2020-06-05 | 高明铁企业股份有限公司 | Linear motor assembly with rolling support structure |
| CN110034655A (en) * | 2019-03-28 | 2019-07-19 | 深圳市赫瑞科技有限公司 | Ball-type linear motor built in a kind of high-precision |
| CN111564948A (en) * | 2020-05-28 | 2020-08-21 | 歌尔股份有限公司 | Linear motor |
| CN111564949A (en) * | 2020-05-28 | 2020-08-21 | 歌尔股份有限公司 | Linear motor |
| CN111564950A (en) * | 2020-05-28 | 2020-08-21 | 歌尔股份有限公司 | Linear motor |
| CN111585417B (en) * | 2020-05-28 | 2021-07-30 | 歌尔股份有限公司 | Linear motor |
| CN115441364B (en) * | 2022-08-16 | 2024-03-05 | 国网江苏省电力有限公司无锡供电分公司 | Light-weight high-precision cutting mechanism for cable insulation stripping and cutting intelligent robot |
| CN116044967B (en) * | 2023-01-18 | 2023-08-01 | 东莞市科士威传动科技有限公司 | Accurate module and equipment convenient to equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP4993609B2 (en) * | 2005-09-30 | 2012-08-08 | Ｔｈｋ株式会社 | Linear synchronous motor and linear motor actuator |
| JP5578352B2 (en) * | 2009-09-01 | 2014-08-27 | Ｓｍｃ株式会社 | Electromagnetic actuator |
| JP5963069B2 (en) * | 2010-11-15 | 2016-08-03 | Smc株式会社 | Linear actuator |
| CN203135679U (en) * | 2013-03-12 | 2013-08-14 | 深圳德康威尔科技有限公司 | Movement module of linear motor |
| CN104617735B (en) * | 2015-02-02 | 2017-09-08 | 瑞声光电科技(常州)有限公司 | Flat linear vibrating motor |
| CN104617734B (en) * | 2015-02-02 | 2017-05-10 | 瑞声光电科技(常州)有限公司 | Flat linear vibration motor |
| CN204906153U (en) * | 2015-07-22 | 2015-12-23 | 北京顿一科技有限公司 | Position control servo of linear module of linear motion and applied this module |
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