TW201643322A

TW201643322A - Turbo-molecular pump

Info

Publication number: TW201643322A
Application number: TW105100720A
Authority: TW
Inventors: Shingo Tsutsui
Original assignee: Shimadzu Corp
Priority date: 2015-06-12
Filing date: 2016-01-12
Publication date: 2016-12-16
Also published as: TWI586894B; CN106246563A; CN106246563B; JP6641734B2; JP2017002856A

Abstract

The present invention provides a turbo-molecular pump capable of reducing the maintenance cost. The turbo-molecular pump (1) includes a turbine wing pump unit (TP) comprising a fixing wing (21) and a rotating wing (12); a dragging pump unit (DP) arranged closer to an exhaust downstream side than the turbine wing pump unit (TP); and protective members (40, 41, 42) detachably disposed in a manner of covering an air contact surface that is arranged closer to an exhaust downstream side than the turbine wing pump unit (TP), so as to prevent attachment of accumulation to the air contact surface.

Description

渦輪分子泵Turbomolecular pump

本發明是有關於一種在從半導體製造裝置或分析裝置等的中真空到超高真空的壓力範圍內使用的渦輪分子泵。The present invention relates to a turbo molecular pump for use in a pressure range from a vacuum to an ultra-high vacuum in a semiconductor manufacturing apparatus or an analysis apparatus or the like.

以前，在如半導體製造工程或液晶面板製造工程中的乾式蝕刻（dry etching）或化學氣相沉積（Chemical vapor deposition，CVD）等製程（process）那樣，在高真空的製程室內進行處理的工程中，使用如渦輪分子泵之類的真空泵作為形成高真空的機構。此種製程中，為了高速地進行製程而供給大量的氣體進行處理。In the past, in processes such as dry etching or chemical vapor deposition (CVD) in semiconductor manufacturing engineering or liquid crystal panel manufacturing engineering, in the process of processing in a high vacuum process chamber. A vacuum pump such as a turbo molecular pump is used as a mechanism for forming a high vacuum. In such a process, a large amount of gas is supplied for processing in order to perform the process at a high speed.

在用於蝕刻或CVD等處理的情況下，泵內容易產生反應生成物。因此，在渦輪分子泵內的接觸氣體部容易堆積反應生成物。堆積於渦輪分子泵內部的反應生成物在定期維護時利用清洗而去除堆積物。在進行維護時，將渦輪分子泵分解，利用清洗將堆積於各個零件的反應生成物加以去除。因此，專利文獻1或專利文獻2中記載的渦輪分子泵中，提出如下構成，即，無須將泵整體分解而僅將容易堆積反應生成物的零件分解並可進行清洗。【先行技術文獻】【專利文獻】In the case of processing such as etching or CVD, a reaction product is likely to be generated in the pump. Therefore, the reaction product is likely to accumulate in the contact gas portion in the turbomolecular pump. The reaction product deposited inside the turbomolecular pump is cleaned to remove deposits during regular maintenance. At the time of maintenance, the turbo molecular pump is decomposed, and the reaction product deposited in each part is removed by washing. Therefore, in the turbomolecular pump described in Patent Document 1 or Patent Document 2, it is proposed that only the components which are likely to accumulate the reaction product are decomposed and can be cleaned without disassembling the entire pump. [Progress Technical Literature] [Patent Literature]

[專利文獻1]日本專利特開2003-278691號公報 [專利文獻2]日本專利特開平4-301197號公報[Patent Document 1] Japanese Laid-Open Patent Publication No. 2003-278691 [Patent Document 2] Japanese Patent Laid-Open No. Hei-4-301197

[發明要解決的問題][Problems to be solved by the invention]

然而，在反應生成物牢固地附著於零件的接觸氣體部的情況下，需要利用刷子等進行擦拭等而加以去除。且說，所述處理中使用的真空泵，一般而言為了防止腐蝕等而實施鍍鎳等耐腐蝕處理。因此，在將反應生成物擦掉時，會產生甚至鍍敷層與反應生成物一起剝離的問題。因此，在通常的清洗處理中未脫落的反應生成物堆積的情況下或反應生成物去除時甚至鍍敷層被去除的情況下，一般而言需要更換零件。因此，存在維護成本上升的問題。 [解決問題的技術方案]However, when the reaction product is firmly adhered to the contact gas portion of the component, it is necessary to remove it by wiping or the like with a brush or the like. In other words, the vacuum pump used in the above-described treatment is generally subjected to corrosion-resistant treatment such as nickel plating in order to prevent corrosion or the like. Therefore, when the reaction product is rubbed off, there is a problem that even the plating layer is peeled off together with the reaction product. Therefore, in the case where the reaction product which has not fallen off in the usual cleaning treatment is deposited or even when the plating layer is removed, the component is generally required to be replaced. Therefore, there is a problem that the maintenance cost rises. [Technical solution to solve the problem]

本發明的較佳的實施方式的渦輪分子泵包括：渦輪翼泵部，包含固定翼及旋轉翼；牽引泵部，比所述渦輪翼泵部設置得靠排氣下游側；保護構件，以覆蓋比所述渦輪翼泵部靠排氣下游側的接觸氣體面的方式能夠裝卸地設置，防止堆積物對所述接觸氣體面的附著。更佳的實施方式中，所述牽引泵部包含圓筒轉子、及相對於該圓筒轉子以規定間隙配置的定子，所述保護構件以覆蓋所述渦輪翼泵部與所述定子之間的接觸氣體面中的至少所述定子的接觸氣體面的一部分的方式設置。更佳的實施方式中，所述保護構件與所述定子熱接觸。更佳的實施方式中，所述保護構件隔著隔熱材料而能夠裝卸地固定於所述牽引泵部的排氣下游側的接觸氣體面。更佳的實施方式中，所述保護構件的表面形成著包含氟樹脂的黑色鍍鎳層。 [發明的效果]A turbomolecular pump according to a preferred embodiment of the present invention includes: a turbine wing pump portion including a fixed wing and a rotary wing; a traction pump portion disposed on a downstream side of the exhaust gas than the turbine wing pump portion; and a protective member to cover The turbine wing pump portion is detachably provided to be in contact with the contact gas surface on the downstream side of the exhaust gas to prevent adhesion of the deposit to the contact gas surface. In a further preferred embodiment, the traction pump unit includes a cylindrical rotor and a stator disposed with a predetermined gap with respect to the cylindrical rotor, the protective member covering the between the turbine wing pump portion and the stator Provided in contact with at least a portion of the gas surface of the stator that contacts the gas surface. In a more preferred embodiment, the protective member is in thermal contact with the stator. In a further preferred embodiment, the protective member is detachably fixed to a contact gas surface on the exhaust downstream side of the traction pump unit via a heat insulating material. In a more preferred embodiment, the surface of the protective member is formed with a black nickel plating layer containing a fluororesin. [Effects of the Invention]

根據本發明，可實現渦輪分子泵的維護成本的降低。According to the present invention, a reduction in maintenance cost of the turbo molecular pump can be achieved.

以下，參照圖對用以實施本發明的形態進行說明。圖1是表示本發明的渦輪分子泵的一實施方式的剖面圖。渦輪分子泵1包括形成著多級旋轉翼12及轉子圓筒部13的轉子10。轉子10上固定著轉子軸11。轉子軸11由徑向磁軸承32及軸向磁軸承33支撐，且由馬達34旋轉驅動。Hereinafter, embodiments for carrying out the invention will be described with reference to the drawings. Fig. 1 is a cross-sectional view showing an embodiment of a turbomolecular pump of the present invention. The turbomolecular pump 1 includes a rotor 10 that forms a multi-stage rotary wing 12 and a rotor cylindrical portion 13. A rotor shaft 11 is fixed to the rotor 10. The rotor shaft 11 is supported by a radial magnetic bearing 32 and an axial magnetic bearing 33, and is rotationally driven by a motor 34.

在磁軸承32、磁軸承33未動作時，轉子軸11由機械軸承35a、機械軸承35b支撐。徑向磁軸承32、軸向磁軸承33、馬達34及機械軸承35b收納於固定在殼體20的基底30。When the magnetic bearing 32 and the magnetic bearing 33 are not operated, the rotor shaft 11 is supported by the mechanical bearing 35a and the mechanical bearing 35b. The radial magnetic bearing 32, the axial magnetic bearing 33, the motor 34, and the mechanical bearing 35b are housed in the base 30 fixed to the casing 20.

在泵殼23的內側，與多級旋轉翼12對應地在泵軸方向上配置著多級固定翼21。在各級旋轉翼12及固定翼21，設置著配置於周向上的多個渦輪翼。多級固定翼21隔著環狀間隔件29而分別積層。該積層體配置於殼體20上。渦輪分子泵1中，多級旋轉翼12及固定翼21構成渦輪翼泵部TP。On the inner side of the pump casing 23, a plurality of stages of fixed wings 21 are arranged in the pump shaft direction corresponding to the multi-stage rotary blades 12. A plurality of turbine blades arranged in the circumferential direction are provided in each of the rotor blades 12 and the fixed blades 21 . The multistage fixed wings 21 are laminated via the annular spacers 29, respectively. The laminated body is disposed on the casing 20. In the turbomolecular pump 1, the multi-stage rotary vane 12 and the fixed vane 21 constitute a turbine wing pump portion TP.

圓筒形狀的定子22隔著微小間隙配置於轉子圓筒部13的外周側。定子22利用螺栓222固定於殼體20。在轉子圓筒部13的外周面或定子22的內周面的任一者形成著螺紋槽，轉子圓筒部13與定子22構成牽引泵部DP。另外，圖1所示的例中，牽引泵部DP構成在定子22形成著泵軸方向的螺紋槽而成的霍爾維克泵（Holweck pump）。The cylindrical stator 22 is disposed on the outer peripheral side of the rotor cylindrical portion 13 with a small gap therebetween. The stator 22 is fixed to the casing 20 by bolts 222. A thread groove is formed in either the outer circumferential surface of the rotor cylindrical portion 13 or the inner circumferential surface of the stator 22, and the rotor cylindrical portion 13 and the stator 22 constitute the traction pump portion DP. Further, in the example shown in FIG. 1, the traction pump unit DP constitutes a Holweck pump in which the stator 22 has a screw groove in the pump axis direction.

當轉子10高速旋轉時，從泵殼23的吸氣口230流入的氣體利用渦輪翼泵部TP（旋轉翼12及固定翼21）排出後，利用牽引泵部DP（轉子圓筒部13及定子22）進一步壓縮。而且，最終，從設置於殼體20的排氣管26排出。排氣管26上連接著後泵（未圖示）。一般而言，轉子10、定子22、殼體20等中使用鋁材，且為了防止腐蝕而實施鍍鎳等表面處理。When the rotor 10 rotates at a high speed, the gas that has flowed in from the intake port 230 of the pump casing 23 is discharged by the turbine wing pump unit TP (the rotor blade 12 and the fixed blade 21), and the traction pump portion DP (the rotor cylinder portion 13 and the stator) is used. 22) Further compression. Further, finally, it is discharged from the exhaust pipe 26 provided in the casing 20. A rear pump (not shown) is connected to the exhaust pipe 26. Generally, an aluminum material is used for the rotor 10, the stator 22, the casing 20, and the like, and surface treatment such as nickel plating is performed to prevent corrosion.

在進行使用容易堆積反應生成物的氣體的製程的排氣的情況下，泵內容易堆積反應生成物（例如氯化鋁等）。泵內的壓力越高，溫度越低，這些堆積物越容易堆積，因而越是泵的排氣下游側越容易附著堆積物。在圖1所示的渦輪分子泵1的情況下，因渦輪翼泵部TP壓力低，所以堆積物的附著相對少。然而，在比渦輪翼泵部TP的最下級附近靠下游側處，壓力上升而容易附著堆積物。In the case of exhausting a process using a gas in which a reaction product is easily deposited, a reaction product (for example, aluminum chloride or the like) tends to accumulate in the pump. The higher the pressure in the pump, the lower the temperature, the more easily these deposits accumulate, and the more the downstream side of the pump is, the easier it is to deposit deposits. In the case of the turbomolecular pump 1 shown in Fig. 1, since the turbine vane pump portion TP has a low pressure, the deposit of the deposit is relatively small. However, at the downstream side of the vicinity of the lowermost stage of the turbine wing pump portion TP, the pressure rises and the deposit tends to adhere.

因此，在殼體20設置著加熱用的加熱器200及冷卻液管223，對加熱器的接通斷開與冷卻液的接通斷開進行控制，而將定子22維持為所需溫度。由此，防止反應生成物對定子22的堆積，從而防止堆積物引起的牽引泵部的性能下降或定子22與轉子圓筒部13的接觸等。Therefore, the heating heater 200 and the cooling liquid pipe 223 are provided in the casing 20, and the heater is turned on and off and the coolant is turned on and off to maintain the stator 22 at a desired temperature. Thereby, the accumulation of the reaction product to the stator 22 is prevented, and the performance of the traction pump unit due to the deposit or the contact of the stator 22 with the rotor cylindrical portion 13 or the like is prevented.

在泵動作時，因伴隨氣體排出的熱產生，而轉子溫度上升。定子22也因來自轉子圓筒部13的輻射熱而溫度上升。因此，定子22的溫度變得比殼體20或基底30高。其結果，溫度更低的殼體20或基底30的接觸氣體面容易堆積反應生成物。尤其在比牽引泵部DP靠下游側處，壓力相對增高，因而殼體20、基底30、排氣管26的接觸氣體面容易堆積反應生成物。When the pump is operated, the temperature of the rotor rises due to heat generated by the gas discharge. The stator 22 also rises in temperature due to radiant heat from the rotor cylindrical portion 13. Therefore, the temperature of the stator 22 becomes higher than the case 20 or the substrate 30. As a result, the contact gas surface of the casing 20 or the substrate 30 having a lower temperature tends to accumulate the reaction product. In particular, the pressure is relatively increased on the downstream side of the traction pump unit DP, and thus the reaction product is likely to accumulate on the contact gas surfaces of the casing 20, the base 30, and the exhaust pipe 26.

本實施方式中，在比渦輪翼泵部TP靠下游側處，在容易附著堆積物的接觸氣體面（壁面），配置了防止反應生成物的堆積且能夠容易廉價地更換的保護構件40、保護構件41、保護構件42。In the present embodiment, a protective member 40 that protects against the deposition of the reaction product and can be easily and inexpensively replaced is disposed on the contact gas surface (wall surface) on which the deposit is likely to adhere to the downstream side of the turbine blade pump portion TP. Member 41, protective member 42.

圖2是將比圖1的渦輪翼泵部TP靠下游側的部分放大表示的圖。圖2的箭頭G示意性地表示氣體的流動。由渦輪翼泵部TP排出的氣體利用後級的牽引泵部DP進一步排出，且從排氣管26排出。定子22的螺紋槽22a形成於與轉子圓筒部13相向的面，其徑方向位置靠近最下級的旋轉翼12的翼根部附近。因此，如圖2所示，從渦輪翼泵部TP排出的氣體沿著定子22的上端面以捲起漩渦的方式流動而流入到螺紋槽22a內。Fig. 2 is an enlarged view of a portion on the downstream side of the turbine wing pump portion TP of Fig. 1 . Arrow G of Fig. 2 schematically shows the flow of gas. The gas discharged from the turbine wing pump portion TP is further discharged by the traction pump portion DP of the subsequent stage, and is discharged from the exhaust pipe 26. The screw groove 22a of the stator 22 is formed on a surface facing the rotor cylindrical portion 13, and its radial direction position is near the vicinity of the wing root portion of the lowermost rotary blade 12. Therefore, as shown in FIG. 2, the gas discharged from the turbine wing pump portion TP flows along the upper end surface of the stator 22 so as to wind up and flow into the screw groove 22a.

其結果，最下級的旋轉翼12與定子22的上端之間的空間中，氣體的滯留時間延長。因此，與滯留空間面向的接觸氣體面、即定子22的上端面或殼體20的內周面容易產生堆積物。本實施方式中，以覆蓋旋轉翼12與定子22之間的接觸氣體面中的殼體20的接觸氣體面、定子22的接觸氣體面的一部分的方式配置了保護構件40，以防止反應生成物對接觸氣體面的堆積。As a result, the residence time of the gas is prolonged in the space between the lowermost rotating blade 12 and the upper end of the stator 22. Therefore, deposits are likely to occur on the contact gas surface facing the retention space, that is, the upper end surface of the stator 22 or the inner circumferential surface of the casing 20. In the present embodiment, the protective member 40 is disposed so as to cover the reaction gas surface of the casing 20 and the contact gas surface of the stator 22 in the contact gas surface between the rotor blade 12 and the stator 22 to prevent reaction products. The accumulation of contact gas surfaces.

圖3（a）、圖3（b）是表示保護構件40的形狀的圖。圖3（a）是保護構件40的平面圖，圖3（b）是保護構件40的A1-A1剖面圖。保護構件40包括：覆蓋定子22的接觸氣體面（上端面）的底板部400，及豎立設置在底板部400的外周側的緣的圓筒狀的側壁部401。在底板部400形成著多個貫通孔402，該貫通孔402供將底板部400固定於定子22的上端面的螺栓222（參照圖2）貫通。如圖2所示，當利用螺栓222將保護構件40固定於定子22時，側壁部401與殼體20的內周面接近而配置。當然，側壁部401也可與殼體20的內周面接觸。側壁部401與殼體內周面的間隙越小，越能夠抑制反應生成物對殼體內周面的堆積。3(a) and 3(b) are views showing the shape of the protective member 40. 3(a) is a plan view of the protective member 40, and FIG. 3(b) is a cross-sectional view taken along line A1-A1 of the protective member 40. The protective member 40 includes a bottom plate portion 400 that covers the contact gas surface (upper end surface) of the stator 22, and a cylindrical side wall portion 401 that is erected on the outer peripheral side edge of the bottom plate portion 400. A plurality of through holes 402 are formed in the bottom plate portion 400, and the through holes 402 penetrate the bolts 222 (see FIG. 2) that fix the bottom plate portion 400 to the upper end surface of the stator 22. As shown in FIG. 2, when the protective member 40 is fixed to the stator 22 by the bolt 222, the side wall portion 401 is disposed close to the inner circumferential surface of the casing 20. Of course, the side wall portion 401 may also be in contact with the inner circumferential surface of the casing 20. The smaller the gap between the side wall portion 401 and the inner circumferential surface of the casing, the more the deposition of the reaction product on the inner circumferential surface of the casing can be suppressed.

在設置了此種保護構件40的情況下，反應生成物堆積於保護構件40的底板部400及側壁部401，能夠減少對殼體內周面及定子22的上端面的堆積物的生成。在泵維護中的反應生成物去除作業中，在即便利用清洗也無法將附著於保護構件40的表面的堆積物去除的情況下，只要更換保護構件40本身即可。保護構件40如圖3（a）、圖3（b）所示，是對金屬（鋁合金或不銹鋼等）板材進行加工製作而成，與在未設置保護構件40的情況下而反應生成物堆積的定子22或殼體20相比能夠廉價地製作。When such a protective member 40 is provided, the reaction product is deposited on the bottom plate portion 400 and the side wall portion 401 of the protective member 40, and the formation of deposits on the inner circumferential surface of the casing and the upper end surface of the stator 22 can be reduced. In the reaction product removal operation during pump maintenance, even if the deposit adhering to the surface of the protective member 40 cannot be removed by washing, the protective member 40 itself may be replaced. As shown in Fig. 3 (a) and Fig. 3 (b), the protective member 40 is formed by processing a metal (aluminum alloy or stainless steel) sheet material, and is formed by reacting a product when the protective member 40 is not provided. The stator 22 or the housing 20 can be manufactured at a lower cost.

對設置保護構件40的優點進行敘述。在未設置保護構件40的情況下，反應生成物堆積於定子22的上端面或殼體20的內周面，即定子22或殼體20的接觸氣體面。在反應生成物堅硬而無法利用清洗去除的情況下或去除堆積物時將形成於定子22或殼體20的表面的鍍敷層剝離的情況下，需要更換定子22或殼體20。另一方面，通過如本實施方式那樣設置能夠更換的保護構件40，而能夠防止反應生成物對定子22或殼體20的接觸氣體面的堆積，進行維護時，只要對保護構件40進行清洗或更換即可。如所述那樣只將鋁合金或不銹鋼的板材彎曲加工而成的保護構件40，比起殼體20或定子22非常廉價。因此，能夠實現維護成本的降低。The advantages of providing the protective member 40 will be described. When the protective member 40 is not provided, the reaction product is deposited on the upper end surface of the stator 22 or the inner circumferential surface of the casing 20, that is, the contact gas surface of the stator 22 or the casing 20. In the case where the reaction product is hard to be removed by washing or the deposit is formed, the plating layer formed on the surface of the stator 22 or the casing 20 is peeled off, and the stator 22 or the casing 20 needs to be replaced. On the other hand, by providing the replaceable protective member 40 as in the present embodiment, it is possible to prevent the reaction product from accumulating on the contact gas surface of the stator 22 or the casing 20, and it is only necessary to clean the protective member 40 during maintenance. Replace it. As described above, the protective member 40 obtained by bending only the aluminum alloy or stainless steel sheet material is very inexpensive compared to the casing 20 or the stator 22. Therefore, the maintenance cost can be reduced.

圖3（a）、圖3（b）所示的保護構件40中，利用壓制加工等使底板部400的外周側的緣彎曲而形成側壁部401。然而，在側壁部401的高度相對高的情況下，難以利用壓制加工等形成壁部，加工成本也上升。該情況下，如圖4（a）、圖4（b）所示，也可使底板部400與側壁部401由不同構件形成。該情況下，底板部400設為與圖3（a）、圖3（b）所示的底板部400相同形狀的環狀板材。In the protective member 40 shown in FIG. 3 (a) and FIG. 3 (b), the edge of the outer peripheral side of the bottom plate portion 400 is bent by press working or the like to form the side wall portion 401. However, when the height of the side wall portion 401 is relatively high, it is difficult to form the wall portion by press working or the like, and the processing cost also increases. In this case, as shown in FIGS. 4(a) and 4(b), the bottom plate portion 400 and the side wall portion 401 may be formed of different members. In this case, the bottom plate portion 400 is an annular plate material having the same shape as the bottom plate portion 400 shown in FIGS. 3( a ) and 3 ( b ).

圖4（a）、圖4（b）是表示側壁部401的形成方法的一例的圖。圖4（a）是表示用以形成側壁部401的帶狀構件403的圖。帶狀構件403的下邊形成著四個突耳（tab）404。各突耳404中，形成著用以將側壁部401螺固在定子22的上端面的貫通孔404a。將該帶狀構件403如圖4（b）所示那樣彎曲加工成環狀而形成側壁部401，將各突耳404向環狀的側壁部401的內側彎曲。環狀彎曲的帶狀構件403的兩端部403a、端部403b利用焊接等而接合。4(a) and 4(b) are views showing an example of a method of forming the side wall portion 401. FIG. 4(a) is a view showing a band member 403 for forming the side wall portion 401. The lower side of the band member 403 is formed with four tabs 404. Each of the lugs 404 is formed with a through hole 404a for screwing the side wall portion 401 to the upper end surface of the stator 22. The belt-shaped member 403 is bent into a ring shape as shown in FIG. 4(b) to form the side wall portion 401, and the respective lugs 404 are bent toward the inner side of the annular side wall portion 401. Both end portions 403a and 403b of the annularly curved band member 403 are joined by welding or the like.

另外，圖2所示的例中，是將保護構件40固定於定子22的上端面，但也可固定於殼體20側。然而，在對定子22與殼體20的溫度進行比較的情況下，受到來自轉子10（轉子圓筒部13）的輻射熱的定子22的溫度比殼體20高。因此，為了將保護構件40的溫度保持得更高，保護構件40較佳的是固定於定子22。接觸氣體面（壁面）溫度越低則反應生成物越容易堆積，因而，通過將保護構件40固定於溫度更高的定子22，而能夠進一步抑制反應生成物對保護構件40的堆積。Further, in the example shown in FIG. 2, the protective member 40 is fixed to the upper end surface of the stator 22, but may be fixed to the casing 20 side. However, in the case where the temperature of the stator 22 and the casing 20 is compared, the temperature of the stator 22 that receives the radiant heat from the rotor 10 (the rotor cylindrical portion 13) is higher than that of the casing 20. Therefore, in order to keep the temperature of the protective member 40 higher, the protective member 40 is preferably fixed to the stator 22. The lower the temperature of the contact gas surface (wall surface), the more easily the reaction product accumulates. Therefore, by fixing the protective member 40 to the stator 22 having a higher temperature, it is possible to further suppress the deposition of the reaction product on the protective member 40.

而且，比牽引泵部DP靠下游側的壓力，相比於牽引泵部DP的吸氣側的壓力進一步上升，因而堆積物的附著也進一步顯著。本實施方式的渦輪分子泵1中，在比牽引泵部DP靠下游側處，在固定著定子22的殼體20及排氣管26的內部設置著保護構件41、保護構件42。Further, the pressure on the downstream side of the traction pump unit DP is further increased than the pressure on the intake side of the traction pump unit DP, so that the deposit of the deposit is further remarkable. In the turbomolecular pump 1 of the present embodiment, the protective member 41 and the protective member 42 are provided inside the casing 20 and the exhaust pipe 26 to which the stator 22 is fixed, on the downstream side of the traction pump unit DP.

圖5（a）、圖5（b）是表示保護構件41的形狀的圖，（a）是平面圖，（b）是A2-A2剖面圖。保護構件41包括：固定於殼體20的底板部410，豎立設置於底板部410的內周側的緣的側壁部411，豎立設置於底板部410的外周側的緣的側壁部412。底板部410形成著多個螺固用的貫通孔410a。內周側的側壁部411為環狀的壁部，以與基底30的筒狀部的外周面相向的方式配置。5(a) and 5(b) are views showing the shape of the protective member 41, (a) is a plan view, and (b) is a cross-sectional view taken along line A2-A2. The protective member 41 includes a bottom plate portion 410 fixed to the bottom plate portion 410 of the casing 20, a side wall portion 411 that is erected on the inner circumferential side of the bottom plate portion 410, and a side wall portion 412 that is erected on the outer peripheral side edge of the bottom plate portion 410. The bottom plate portion 410 is formed with a plurality of through holes 410a for screwing. The side wall portion 411 on the inner circumferential side is an annular wall portion, and is disposed to face the outer circumferential surface of the cylindrical portion of the base 30.

在外周側的側壁部412，在圖示左側形成著切口部412a。如圖1所示，側壁部412為與殼體20的內周面相向的壁部。側壁部412的切口部412a與安裝著排氣管26的排氣口20a（參照圖2）相向。向牽引泵部DP的排氣側排出的氣體通過保護構件41的切口部412a而流入到排氣管26內（參照圖2）。保護構件41的側壁部411、側壁部412與由他們覆蓋的壁面（基底筒狀部的外周面及殼體20的內周面）之間的間隙盡可能設置得小。由此，能夠極力地抑制反應生成物堆積在由側壁部411、側壁部412覆蓋的壁面。A notch portion 412a is formed on the left side wall portion 412 on the left side of the drawing. As shown in FIG. 1, the side wall portion 412 is a wall portion that faces the inner circumferential surface of the casing 20. The notch portion 412a of the side wall portion 412 faces the exhaust port 20a (see FIG. 2) to which the exhaust pipe 26 is attached. The gas discharged to the exhaust side of the traction pump unit DP flows into the exhaust pipe 26 through the notch portion 412a of the protective member 41 (see FIG. 2). The gap between the side wall portion 411 and the side wall portion 412 of the protective member 41 and the wall surface covered by them (the outer circumferential surface of the base cylindrical portion and the inner circumferential surface of the casing 20) is set as small as possible. Thereby, it is possible to suppress the deposition of the reaction product on the wall surface covered by the side wall portion 411 and the side wall portion 412 as much as possible.

與所述保護構件40的情況同樣地，保護構件41的溫度越高，也越能夠抑制反應生成物的堆積。保護構件41與比殼體20或基底30高溫的轉子圓筒部13及定子22的下端面相向。因此，為了使因輻射而從轉子圓筒部13及定子22入射到保護構件41的熱不會向固定著保護構件41的基底30散放，而使隔熱材料43介隔存在於保護構件41與基底30之間。與使保護構件41與基底30接觸而固定的情況相比，能夠將保護構件41的溫度保持得高。由此，能夠抑制反應生成物對保護構件41的堆積。As in the case of the protective member 40, the higher the temperature of the protective member 41, the more the deposition of the reaction product can be suppressed. The protective member 41 faces the lower end faces of the rotor cylindrical portion 13 and the stator 22 which are higher than the casing 20 or the base 30. Therefore, in order to prevent heat incident from the rotor cylindrical portion 13 and the stator 22 to the protective member 41 due to radiation from being scattered to the base 30 to which the protective member 41 is fixed, the heat insulating material 43 is interposed in the protective member 41. Between the substrate 30 and the substrate 30. The temperature of the protective member 41 can be kept high as compared with a case where the protective member 41 is brought into contact with and fixed to the substrate 30. Thereby, accumulation of the reaction product with respect to the protective member 41 can be suppressed.

圖6（a）、圖6（b）是表示配置於排氣管26內的保護構件42的形狀的圖。圖6（a）、圖6（b）中，（a）是從排氣管26的出口側觀察保護構件42的圖，（b）是保護構件42的剖面圖。保護構件42為筒狀體，一端形成著向外側彎曲的凸緣狀部421。如圖2所示，保護構件42以***到排氣管26內的方式安裝於殼體20。6(a) and 6(b) are views showing the shape of the protective member 42 disposed in the exhaust pipe 26. In FIGS. 6(a) and 6(b), (a) is a view of the protective member 42 viewed from the outlet side of the exhaust pipe 26, and (b) is a cross-sectional view of the protective member 42. The protective member 42 is a cylindrical body, and one end thereof is formed with a flange-like portion 421 that is bent outward. As shown in FIG. 2, the protective member 42 is attached to the casing 20 so as to be inserted into the exhaust pipe 26.

在要將保護構件42安裝於排氣管26時，首先，在將排氣管26安裝於排氣口20a前，將保護構件42從排氣管26的殼體排氣口側（圖2的右側）***。此時，***保護構件42直到凸緣狀部421與排氣管26的端部抵接為止。接下來，將排氣管26螺固於殼體20。如圖2所示，保護構件42的凸緣狀部421配置於排氣管26的右端與保護構件41的切口部412a之間的空間。因此，保護構件42的圖示左右方向的移動由排氣管26的右端與切口部412a限制。另外，在將保護構件42配置於排氣管26內的情況下，為了盡可能增大保護構件42的傳導性（conductance），較佳的是使保護構件42的外周面與排氣管26的內周面密接。When the protective member 42 is to be attached to the exhaust pipe 26, first, before the exhaust pipe 26 is attached to the exhaust port 20a, the protective member 42 is taken out from the casing exhaust port side of the exhaust pipe 26 (Fig. 2 Insert on the right side). At this time, the protective member 42 is inserted until the flange-like portion 421 abuts against the end portion of the exhaust pipe 26. Next, the exhaust pipe 26 is screwed to the casing 20. As shown in FIG. 2, the flange-like portion 421 of the protective member 42 is disposed in a space between the right end of the exhaust pipe 26 and the cutout portion 412a of the protective member 41. Therefore, the movement of the protective member 42 in the left-right direction is restricted by the right end of the exhaust pipe 26 and the cutout portion 412a. Further, in the case where the protective member 42 is disposed in the exhaust pipe 26, in order to increase the conductance of the protective member 42 as much as possible, it is preferable to make the outer peripheral surface of the protective member 42 and the exhaust pipe 26 The inner peripheral surface is in close contact.

作為排氣管26的接觸氣體面的內周面，除排氣管26的出口區域外幾乎均由保護構件42所覆蓋。因此，能夠大致防止反應生成物對排氣管26的堆積。在進行維護時，對保護構件42進行清洗或更換。另外，在將其他排氣管連接於排氣管26的左端時，設置著具有中心環（center ring）的O型密封環。因此，為了確保具有中心環的O型密封環的配置區域，而使保護構件42不會延伸到排氣管26的左端。The inner peripheral surface of the exhaust gas pipe 26 that is in contact with the gas surface is almost covered by the protective member 42 except for the outlet region of the exhaust pipe 26. Therefore, it is possible to substantially prevent the deposition of the reaction product to the exhaust pipe 26. The protective member 42 is cleaned or replaced during maintenance. Further, when the other exhaust pipe is connected to the left end of the exhaust pipe 26, an O-ring having a center ring is provided. Therefore, in order to secure the arrangement area of the O-ring having the center ring, the protective member 42 does not extend to the left end of the exhaust pipe 26.

在保護構件41、保護構件42的情況下，也與所述保護構件40的情況同樣地僅對板材或筒材進行彎曲加工，因而能夠相對廉價地製作。因此，通過設置保護構件41、保護構件42，可降低與維護時的反應生成物去除相關的成本。另外，在保護構件41的情況下，也能夠使側壁部411、側壁部412由如圖4（a）、圖4（b）那樣另外設置的帶狀構件形成。In the case of the protective member 41 and the protective member 42, as in the case of the protective member 40, only the plate material or the cylindrical material is subjected to bending processing, and thus it can be produced relatively inexpensively. Therefore, by providing the protective member 41 and the protective member 42, the cost associated with the removal of the reaction product during maintenance can be reduced. Further, in the case of the protective member 41, the side wall portion 411 and the side wall portion 412 can be formed of a band member separately provided as shown in Figs. 4(a) and 4(b).

且說，所述保護構件40～保護構件42由鋁合金或不銹鋼等板材形成，為了實現耐腐蝕性的提高而實施鍍鎳（例如非電解鍍鎳）的表面處理。進而，為了容易吸收來自轉子10的輻射，也可形成輻射率高的黑色鍍鎳。黑色鍍鎳為Ni-P層與黑色氧化膜的兩層結構，輻射率非常高。In addition, the protective member 40 to the protective member 42 are formed of a plate material such as aluminum alloy or stainless steel, and a surface treatment of nickel plating (for example, electroless nickel plating) is performed in order to improve corrosion resistance. Further, in order to easily absorb the radiation from the rotor 10, black nickel plating having a high emissivity can be formed. Black nickel plating is a two-layer structure of a Ni-P layer and a black oxide film, and the emissivity is very high.

進而，也可使用包含氟樹脂的鍍鎳或黑色鍍鎳來代替鍍鎳或黑色鍍鎳。包含氟樹脂的鍍鎳，是使聚四氟乙烯（polytetrafluorethylene，PTFE）的微粒子均勻地分散於非電解鍍鎳中而成。因此，可獲得與氟樹脂塗布大致同等的低摩擦覆膜。其結果，容易去除附著堆積於保護構件40～保護構件42的反應生成物。Further, instead of nickel plating or black nickel plating, nickel plating or black nickel plating containing a fluororesin may be used. Nickel plating containing a fluororesin is performed by uniformly dispersing fine particles of polytetrafluoroethylene (PTFE) in electroless nickel plating. Therefore, a low friction film which is substantially equivalent to the fluororesin coating can be obtained. As a result, it is easy to remove the reaction product deposited and deposited on the protective member 40 to the protective member 42.

如以上說明那樣，本實施方式的渦輪分子泵1如圖2所示，包括：渦輪翼泵部TP，包含固定翼21及旋轉翼12；牽引泵部DP，比渦輪翼泵部TP設置得靠排氣下游側；保護構件40、保護構件41、保護構件42，以覆蓋比渦輪翼泵部TP靠排氣下游側的接觸氣體面的方式能夠裝卸地設置，防止堆積物對接觸氣體面的附著。As described above, the turbomolecular pump 1 of the present embodiment includes the turbine blade pump unit TP including the fixed blade 21 and the rotary blade 12, and the traction pump unit DP is disposed closer to the turbine blade pump unit TP. The exhaust gas downstream side; the protective member 40, the protective member 41, and the protective member 42 are detachably provided so as to cover the contact gas surface on the exhaust downstream side of the turbine wing pump portion TP, and prevent adhesion of the deposit to the contact gas surface. .

通過設置能夠裝卸的保護構件40～保護構件42，而能夠抑制堆積物對容易附著堆積物的接觸氣體面的附著。進而，即便在不易去除堆積物的情況下，維護時只要更換保護構件40～保護構件42即可，因而能夠實現維護成本的降低。By providing the detachable protective member 40 to the protective member 42, it is possible to suppress the adhesion of the deposit to the contact gas surface where the deposit is likely to adhere. Further, even in the case where deposits are hard to be removed, it is only necessary to replace the protective member 40 to the protective member 42 during maintenance, so that maintenance cost can be reduced.

例如，在牽引泵部DP為包含轉子圓筒部13與定子22的霍爾維克型牽引泵部的情況下，較佳的是以覆蓋堆積物的附著量多的定子22的上端面的方式設置保護構件40。進而，通過使保護構件40與溫度相對高的定子22熱接觸，而能夠將保護構件40的溫度保持得高，且降低堆積物對保護構件40的附著，從而可使維護期間更長。For example, when the traction pump unit DP is a Holvik type traction pump unit including the rotor cylindrical portion 13 and the stator 22, it is preferable to cover the upper end surface of the stator 22 having a large amount of deposition of deposits. The protective member 40 is provided. Further, by bringing the protective member 40 into thermal contact with the stator 22 having a relatively high temperature, the temperature of the protective member 40 can be kept high, and the adhesion of the deposit to the protective member 40 can be reduced, so that the maintenance period can be made longer.

而且，如圖2所示，也可以覆蓋牽引泵部DP的排氣下游側的接觸氣體面、即基底30的壁面或殼體20的壁面的方式，將保護構件41隔著隔熱材料43能夠裝卸地加以固定。保護構件41從溫度高的轉子圓筒部13或定子22受到輻射而溫度上升。因此，通過將保護構件41隔著隔熱材料43固定於溫度相對低的基底30，而能夠防止保護構件41的溫度下降，從而能夠抑制堆積物對保護構件41的附著。另外，隔熱材料43中使用導熱率低於基底30的材料。例如，在基底30為鋁合金的情況下，也可為不銹鋼材。Further, as shown in FIG. 2, the contact gas surface on the exhaust downstream side of the traction pump portion DP, that is, the wall surface of the base 30 or the wall surface of the casing 20 may be covered, and the protective member 41 can be insulated by the heat insulating material 43. It is fixed by loading and unloading. The protective member 41 is radiated from the rotor cylindrical portion 13 or the stator 22 having a high temperature, and the temperature rises. Therefore, by fixing the protective member 41 to the base 30 having a relatively low temperature via the heat insulating material 43, the temperature of the protective member 41 can be prevented from being lowered, and the adhesion of the deposit to the protective member 41 can be suppressed. In addition, a material having a lower thermal conductivity than the substrate 30 is used in the heat insulating material 43. For example, in the case where the substrate 30 is an aluminum alloy, it may be a stainless steel material.

進而，通過在保護構件40～保護構件42的表面形成包含氟樹脂的黑色鍍鎳層，而實現以下的作用效果。通過形成黑色鍍鎳，而容易吸收來自作為高溫構件的轉子10或定子22的輻射，能夠將保護構件40～保護構件42的溫度保持得更高。其結果，能夠抑制堆積物對保護構件40～保護構件42的附著。進而，通過使黑色鍍鎳包含氟樹脂，而容易去除附著於保護構件40～保護構件42的堆積物，能夠實現堆積物去除作業的作業成本的降低。Further, by forming a black nickel plating layer containing a fluororesin on the surfaces of the protective member 40 to the protective member 42, the following operational effects are achieved. By forming black nickel plating, it is easy to absorb radiation from the rotor 10 or the stator 22 as a high-temperature member, and the temperature of the protective member 40 to the protective member 42 can be kept higher. As a result, adhesion of the deposit to the protective member 40 to the protective member 42 can be suppressed. Further, by including the fluororesin in the black nickel plating, the deposit adhering to the protective member 40 to the protective member 42 can be easily removed, and the work cost of the deposit removing operation can be reduced.

以上已對各種實施方式及變形例進行了說明，但本發明並不限定於這些內容。在本發明的技術思想的範圍內所能考慮到的其他形態也包含在本發明的範圍內。例如，圖1所示的渦輪分子泵1中，是將設置著定子22的殼體20與收納著馬達定子或磁軸承用電磁鐵等的基底30分開，但也可將殼體20與基底30一體構成。而且，以磁軸承式渦輪分子泵為例進行了說明，但也可同樣地應用於非磁軸承式渦輪分子泵。進而，將牽引泵部DP設為霍爾維克泵型的牽引泵，但不限定於此，例如也可為西格班（Siegbahn）泵型牽引泵。Various embodiments and modifications have been described above, but the present invention is not limited to these contents. Other aspects that can be considered within the scope of the technical idea of the present invention are also included in the scope of the present invention. For example, in the turbomolecular pump 1 shown in FIG. 1, the casing 20 provided with the stator 22 is separated from the base 30 in which the motor stator or the magnetic bearing electromagnet or the like is housed, but the casing 20 and the base 30 may be used. One body. Further, the magnetic bearing type turbomolecular pump has been described as an example, but the same can be applied to a non-magnetic bearing type turbomolecular pump. Further, the traction pump unit DP is a Holvik pump type traction pump. However, the present invention is not limited thereto, and may be, for example, a Siegbahn pump type traction pump.

1‧‧‧渦輪分子泵
10‧‧‧轉子
11‧‧‧轉子軸
12‧‧‧旋轉翼
13‧‧‧轉子圓筒部
20‧‧‧殼體
20a‧‧‧排氣口
21‧‧‧固定翼
22‧‧‧定子
22a‧‧‧螺紋槽
23‧‧‧泵殼
26‧‧‧排氣管
29‧‧‧環狀間隔件
30‧‧‧基底
32‧‧‧徑向磁軸承
33‧‧‧軸向磁軸承
34‧‧‧馬達
35a、35b‧‧‧機械軸承
40～42‧‧‧保護構件
43‧‧‧隔熱材料
200‧‧‧加熱器
222‧‧‧螺栓
223‧‧‧冷卻液管
230‧‧‧吸氣口
400‧‧‧底板部
401‧‧‧側壁部
402、404a、410a‧‧‧貫通孔
403‧‧‧帶狀構件
403a、403b‧‧‧端部
404‧‧‧突耳
410‧‧‧底板部
411、412‧‧‧側壁部
412a‧‧‧切口部
421‧‧‧凸緣狀部
DP‧‧‧牽引泵部
G‧‧‧氣體的流動
TP‧‧‧渦輪翼泵部1‧‧‧ turbomolecular pump
10‧‧‧Rotor
11‧‧‧Rotor shaft
12‧‧‧Rotating Wings
13‧‧‧Rotor cylinder
20‧‧‧shell
20a‧‧‧Exhaust port
21‧‧‧Fixed Wing
22‧‧‧ Stator
22a‧‧ thread groove
23‧‧‧ pump casing
26‧‧‧Exhaust pipe
29‧‧‧Circular spacers
30‧‧‧Base
32‧‧‧radial magnetic bearings
33‧‧‧Axial magnetic bearings
34‧‧‧Motor
35a, 35b‧‧‧ mechanical bearings
40～42‧‧‧protective components
43‧‧‧Insulation materials
200‧‧‧heater
222‧‧‧ bolt
223‧‧‧Coolant tube
230‧‧‧ suction port
400‧‧‧Bottom plate
401‧‧‧ Sidewall
402, 404a, 410a‧‧‧through holes
403‧‧‧Band members
403a, 403b‧‧‧ end
404‧‧‧ 耳耳
410‧‧‧Bottom plate
411, 412‧‧‧ side wall
412a‧‧‧cutting section
421‧‧‧Flange
DP‧‧‧ traction pump
G‧‧‧The flow of gas
TP‧‧‧Turbo wing pump

圖1是表示本發明的渦輪分子泵的一實施方式的剖面圖。圖2是比渦輪翼泵部靠下游側的部分的放大圖。圖3（a）、圖3（b）是表示保護構件40的形狀的圖。圖4（a）、圖4（b）是表示側壁部401的形成方法的一例的圖。圖5（a）、圖5（b）是表示保護構件41的形狀的圖。圖6（a）、圖6（b）是表示保護構件42的形狀的圖。Fig. 1 is a cross-sectional view showing an embodiment of a turbomolecular pump of the present invention. Fig. 2 is an enlarged view of a portion on the downstream side of the turbine wing pump portion. 3(a) and 3(b) are views showing the shape of the protective member 40. 4(a) and 4(b) are views showing an example of a method of forming the side wall portion 401. 5(a) and 5(b) are views showing the shape of the protective member 41. 6(a) and 6(b) are views showing the shape of the protective member 42.

12‧‧‧旋轉翼 12‧‧‧Rotating Wings

13‧‧‧轉子圓筒部 13‧‧‧Rotor cylinder

20‧‧‧殼體 20‧‧‧shell

20a‧‧‧排氣口 20a‧‧‧Exhaust port

21‧‧‧固定翼 21‧‧‧Fixed Wing

22‧‧‧定子 22‧‧‧ Stator

22a‧‧‧螺紋槽 22a‧‧ thread groove

26‧‧‧排氣管 26‧‧‧Exhaust pipe

30‧‧‧基底 30‧‧‧Base

40~42‧‧‧保護構件 40~42‧‧‧protective components

43‧‧‧隔熱材料 43‧‧‧Insulation materials

421‧‧‧凸緣狀部 421‧‧‧Flange

DP‧‧‧牽引泵部 DP‧‧‧ traction pump

G‧‧‧氣體的流動 G‧‧‧The flow of gas

TP‧‧‧渦輪翼泵部 TP‧‧‧Turbo wing pump

Claims

一種渦輪分子泵，其特徵在於包括：渦輪翼泵部，包含固定翼及旋轉翼；牽引泵部，比所述渦輪翼泵部設置得靠排氣下游側；以及保護構件，以覆蓋比所述渦輪翼泵部靠排氣下游側的接觸氣體面的方式能夠裝卸地設置，且防止堆積物對所述接觸氣體面的附著。A turbo molecular pump, comprising: a turbine wing pump portion including a fixed wing and a rotary wing; a traction pump portion disposed on a downstream side of the exhaust gas than the turbine wing pump portion; and a protective member covering the ratio The turbine wing pump portion is detachably provided to be in contact with the gas surface on the downstream side of the exhaust gas, and prevents adhesion of the deposit to the contact gas surface.

如申請專利範圍第1項所述的渦輪分子泵，其中所述牽引泵部包含圓筒轉子、及相對於所述圓筒轉子以規定間隙配置的定子，所述保護構件以覆蓋所述渦輪翼泵部與所述定子之間的接觸氣體面中的至少所述定子的接觸氣體面的一部分的方式設置。The turbomolecular pump of claim 1, wherein the traction pump portion includes a cylindrical rotor and a stator disposed with a predetermined gap with respect to the cylindrical rotor, the protective member covering the turbine wing A portion of the contact gas surface of the stator between the pump portion and the stator is disposed at least a portion of the contact gas surface of the stator.

如申請專利範圍第2項所述的渦輪分子泵，其中所述保護構件與所述定子熱接觸。The turbomolecular pump of claim 2, wherein the protective member is in thermal contact with the stator.

如申請專利範圍第1項所述的渦輪分子泵，其中所述保護構件隔著隔熱材料而能夠裝卸地固定於所述牽引泵部的排氣下游側的接觸氣體面。The turbomolecular pump according to claim 1, wherein the protective member is detachably fixed to a contact gas surface on a downstream side of the exhaust gas of the traction pump unit via a heat insulating material.

如申請專利範圍第1項至第4項中任一項所述的渦輪分子泵，其中所述保護構件的表面形成著包含氟樹脂的黑色鍍鎳層。The turbomolecular pump according to any one of claims 1 to 4, wherein the surface of the protective member is formed with a black nickel plating layer containing a fluororesin.