TW201640124A - Inspection jig and substrate inspection device - Google Patents
Inspection jig and substrate inspection device Download PDFInfo
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- TW201640124A TW201640124A TW105104721A TW105104721A TW201640124A TW 201640124 A TW201640124 A TW 201640124A TW 105104721 A TW105104721 A TW 105104721A TW 105104721 A TW105104721 A TW 105104721A TW 201640124 A TW201640124 A TW 201640124A
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- G—PHYSICS
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Abstract
Description
本發明有關一種用以使探針接觸於設在作為檢查對象之基板的檢查點之檢查輔助具、及具備該檢查輔助具之基板檢查裝置。 The present invention relates to an inspection aid for contacting a probe to a inspection point provided on a substrate to be inspected, and a substrate inspection apparatus including the inspection aid.
檢查輔助具係經由接觸子，而對於被檢查物所具有之檢查對象部，從檢查裝置將電力(電氣信號等)供給至預定檢查位置，並且從檢查對象部檢測出電氣信號，藉此用以檢測檢查對象部的電氣特性、及實施動作試驗等。 The inspection aid supplies the electric power (electrical signal or the like) from the inspection device to the predetermined inspection position, and detects an electric signal from the inspection target portion, by using the contact object, and the inspection target portion of the inspection object. The electrical characteristics of the inspection target portion are detected, and an operation test or the like is performed.
以作為檢查對象的基板而言，例如，係相當於印刷配線基板、可撓性基板、陶瓷多層配線基板、液晶顯示器或電漿顯示器用的電極板、及半導體封裝用的封裝基板或薄膜載體(film carrier)等各種基板、半導體晶圓或半導體晶片或CSP(chip size package，晶片尺寸封裝)等半導體基板。在本說明書中，將設定於該等基板的檢查對象部稱為「檢查點」。 The substrate to be inspected is, for example, a printed wiring board, a flexible substrate, a ceramic multilayer wiring board, an electrode plate for a liquid crystal display or a plasma display, and a package substrate or a film carrier for a semiconductor package ( A semiconductor substrate such as a film carrier or a semiconductor wafer or a semiconductor wafer or a CSP (chip size package). In the present specification, the inspection target portion set on the substrates is referred to as a "checkpoint".
例如，在作為檢查對象的基板搭載有IC等 半導體電路或電阻器等電氣、電子零件時，作為檢查對象的對象部係成為配線及銲點凸塊等之電極。此時，為了保證對象部可將電氣信號正確地傳達至該等搭載零件，係測量在安裝電氣、電子零件前之印刷配線基板、液晶面板或電漿顯示器面板形成的配線上之預定檢查點間的電阻值等電氣特性，而判斷該配線之良好與否。 For example, an IC or the like is mounted on a substrate to be inspected. In the case of an electrical or electronic component such as a semiconductor circuit or a resistor, the target portion to be inspected is an electrode such as a wiring or a bump bump. In this case, in order to ensure that the target unit can accurately transmit the electrical signals to the mounted components, the predetermined checkpoints on the wiring formed by the printed wiring board, the liquid crystal panel, or the plasma display panel before the installation of the electrical and electronic components are measured. The electrical characteristics such as the resistance value are judged whether the wiring is good or not.
具體而言，該配線之良好與否的判定，係如下述方式進行：使供給電流用之探針與測量電壓用之探針的前端抵接於各檢查點，將測量用電流從該供給電流用的探針供給至檢查點，並且測量在抵接於檢查點之測量電壓用的探針之前端間的配線所產生的電壓，且從該等供給電流與所測量之電壓算出預定的檢查點間之配線的電阻值。此種測量方法被稱為四端子測量法。 Specifically, the determination of whether the wiring is good or not is performed by bringing the probe for supplying a current and the tip of the probe for measuring voltage into contact with each of the inspection points, and measuring the current from the supply current. The probe used is supplied to the inspection point, and the voltage generated by the wiring between the ends of the probe for abutting the measurement voltage of the inspection point is measured, and a predetermined checkpoint is calculated from the supplied current and the measured voltage. The resistance value of the wiring between the two. This measurement method is called a four-terminal measurement method.
有一種將上述探針保持1000支以上的多數支而形成的檢查輔助具已為人所知(例如，參照專利文獻1)。此檢查輔助具係構成為：將探針插通於形成在用以支持探針之前端側的前端側支持體的插通孔、及形成在用以支持探針之後端側的後端側支持體的插通孔，藉此保持多數支探針。 There is an inspection aid which is formed by holding a plurality of branches of the above-mentioned probes in a total of 1,000 or more (for example, refer to Patent Document 1). The inspection aid is configured to insert the probe into the insertion hole formed in the front end side support body on the front end side for supporting the probe, and the rear end side support formed on the end side after supporting the probe. The body is inserted through the hole, thereby holding the majority of the probe.
此種探針具有例如直徑為100μm以下之細纜線(wire)狀的形狀，且供該探針插通的插通孔亦為比其探針徑略大之程度的微細的孔。 Such a probe has a shape of a thin wire having a diameter of, for example, 100 μm or less, and the insertion hole through which the probe is inserted is also a fine hole which is slightly larger than the diameter of the probe.
專利文獻1：日本特開第2009-047512號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 2009-047512
順帶一提，檢查點會有如銲點凸塊般從基板表面突出成半球狀的情形。此情形時，凸塊的表面會隨著遠離凸塊的中心而使其傾斜角度變大，且相對於基板表面接近於垂直。在上述的四端子測量法中，由於必須使供給電流用的探針與測量電壓用的探針接觸於一個凸塊，因此，兩探針的前端係以隔著凸塊的中心而分離於兩側的狀態接觸於凸塊。 Incidentally, the checkpoint may protrude from the surface of the substrate into a hemispherical shape like a bump of a solder joint. In this case, the surface of the bump becomes inclined toward the center of the bump and becomes close to the vertical with respect to the substrate surface. In the above-described four-terminal measurement method, since the probe for supplying current and the probe for measuring voltage must be in contact with one bump, the front ends of the two probes are separated from each other by the center of the bump. The state of the side is in contact with the bump.
因此，當相對於基板表面垂直地將兩探針推壓至凸塊時，兩探針會相對於凸塊的表面傾斜抵接。而且，因為該表面的傾斜，而在兩探針的前端部產生朝向使兩探針彼此分離，且使兩探針在凸塊的表面滑動的方向的作用力。結果，會有探針對於凸塊的接觸穩定性降低之問題。 Therefore, when the two probes are pressed perpendicularly to the surface of the substrate to the bumps, the two probes are inclined to abut against the surface of the bump. Further, because of the inclination of the surface, a force acting in a direction in which the two probes are separated from each other and the probes are slid in the surface of the bump is generated at the front end portions of the two probes. As a result, there is a problem that the contact stability of the probe to the bump is lowered.
本發明的目的係在於提供一種可使探針對於檢查點的接觸穩定性提升的檢查輔助具及基板檢查裝置。 An object of the present invention is to provide an inspection aid and a substrate inspection apparatus which can improve the contact stability of a probe with respect to a checkpoint.
本發明之檢查輔助具，係用以使供給電流用之棒狀的電流探針與檢測電壓用之棒狀的檢測探針接觸於設在檢查對象之基板的一個檢查點者，該檢查輔助具係 具備：對向板，係具有用以與前述基板相對向配置之對向面；及支持板，係與前述對向板之前述對向面的相反側成相對向配置；在前述對向板，係使供前述電流探針插通的電流用插通孔及供前述檢測探針插通的檢測用插通孔成對，而形成有複數對該成對的電流用插通孔與檢測用插通孔；在前述支持板，係形成有與前述各電流用插通孔及前述各檢測用插通孔對應而設置，且供前述電流探針插通的電流用支持孔及供前述檢測探針插通的檢測用支持孔；在成對之前述電流用插通孔及前述檢測用插通孔之各插通孔中，彼此的內壁面中之離開另一方插通孔之側的壁面，係隨著離開前述對向面而朝離開前述另一方插通孔的方向傾斜。 The inspection aid of the present invention is for contacting a current probe for supplying a current and a rod-shaped detection probe for detecting a voltage to a checkpoint of a substrate to be inspected, the inspection aid system The opposing plate has a facing surface disposed to face the substrate; and the supporting plate is disposed opposite to the opposite side of the opposing surface of the opposing plate; and in the opposing plate The current insertion hole for inserting the current probe and the detection insertion hole through which the detection probe is inserted are paired, and a plurality of pairs of current insertion holes and detection plugs are formed. a through hole; the support plate is provided with a current support hole provided in correspondence with each of the current insertion holes and the detection insertion holes, and the current probe is inserted; and the detection probe is provided a support hole for detecting insertion; in each of the pair of the current insertion holes and the insertion holes for the detection insertion holes, a wall surface of the inner wall surface of each of the inner wall surfaces away from the other insertion hole is It is inclined in a direction away from the other insertion hole as it leaves the aforementioned opposing surface.
此外，本發明之基板檢查裝置係具備上述檢查輔助具。 Further, the substrate inspection device of the present invention includes the above-described inspection aid.
根據該等構成，由於成對之電流用插通孔及檢測用插通孔之各插通孔彼此的內壁面中之離開另一方插通孔之側的壁面，係隨著離開對向面而朝離開另一方插通孔的方向傾斜，因此，電流探針及檢測探針兩探針之內側變得容易朝成為凹入之方向撓曲。結果，即使在檢查點具有如銲點凸塊般突起的形狀時，亦可使兩探針之前端接觸於檢查點之表面的角度接近於垂直。藉此，可將探針對於檢查點的接觸穩定性提升。 According to the configuration, the wall surfaces of the inner wall surfaces of the pair of current insertion holes and the insertion holes for the detection insertion holes that are separated from the other insertion holes are separated from the opposite faces. Since it is inclined in the direction away from the other insertion hole, the inside of both the probe of the current probe and the detection probe is easily deflected in the direction of being recessed. As a result, even when the checkpoint has a shape like a bump of the solder joint, the angle at which the front end of the two probes are in contact with the surface of the checkpoint is made close to vertical. Thereby, the contact stability of the probe to the checkpoint can be improved.
此外，較佳為：前述各電流用插通孔及前述各檢測用插通孔係具有隨著離開前述對向面而擴徑之錐 形形狀，前述電流用插通孔在前述對向面形成開口之前端側電流孔開口端的半徑、及與該電流用插通孔成對之前述檢測用插通孔在前述對向面形成開口之前端側檢測孔開口端的半徑的總和，係比該成對之前述電流用插通孔及前述檢測用插通孔之中心間的距離小，並且，前述電流用插通孔在前述對向板之與前述對向面為相反側的相反面形成開口的後端側電流孔開口端的半徑、及與該電流用插通孔成對之前述檢測用插通孔在前述相反面側形成開口的後端側檢測孔開口端的半徑的總和，係比該成對之前述電流用插通孔及前述檢測用插通孔之中心間的距離大，且該成對之前述後端側電流孔開口端的端緣與前述後端側檢測孔開口端的端緣係呈連續者。 Further, it is preferable that each of the current insertion holes and the detection insertion holes have a taper that expands in diameter away from the opposing surface. a shape having a radius of an open end hole of the current hole before the opening of the current insertion hole and an opening of the detection insertion hole that is paired with the current insertion hole are formed in the opposite surface The sum of the radii of the opening ends of the distal end side detecting holes is smaller than the distance between the pair of the current insertion holes and the center of the detecting insertion hole, and the current insertion hole is in the opposite plate a radius of the opening end of the rear end side current hole that forms an opening opposite to the opposite surface, and a rear end of the detecting insertion hole that is opposite to the current insertion hole, forming an opening on the opposite side The sum of the radii of the open ends of the side detecting holes is larger than the distance between the pair of the current insertion holes and the center of the detecting insertion holes, and the edge of the open end of the pair of the rear end side current holes It is continuous with the end edge of the open end of the rear end side detecting hole.
根據該構成，各電流用插通孔及各檢測用插通孔係具有隨著離開對向面而擴徑之錐形形狀，電流用插通孔在對向面形成開口之前端側電流孔開口端的半徑、及與該電流用插通孔成對之檢測用插通孔在對向面形成開口之前端側檢測孔開口端的半徑的總和，係比該成對之電流用插通孔及檢測用插通孔之中心間的距離小，因此，前端側電流孔開口端與前端側檢測孔開口端係彼此分離。結果，藉由前端側電流孔開口端與前端側檢測孔開口端，可將電流探針與檢測探針的前端部精確度良好地導引至基板的檢查點。 According to this configuration, each of the current insertion holes and the detection insertion holes has a tapered shape that expands in diameter as it leaves the opposing surface, and the current insertion hole forms an opening on the opposite side before the opening is formed. The radius of the end and the sum of the radii of the opening end of the end detecting hole before the opening of the detecting insertion hole that is paired with the current insertion hole are compared with the pair of current insertion holes and the detection. Since the distance between the centers of the insertion holes is small, the front end side current hole opening end and the front end side detection hole opening end are separated from each other. As a result, the front end portion of the current probe and the detection probe can be accurately guided to the inspection point of the substrate by the front end side current hole opening end and the front end side detection hole opening end.
而且，電流用插通孔在對向板的與對向面為相反側之相反面形成開口的後端側電流孔開口端的半 徑、及與該電流用插通孔成對之檢測用插通孔在相反面側形成開口的後端側檢測孔開口端的半徑的總和，係比該成對之電流用插通孔及檢測用插通孔之中心間的距離大，且該成對之後端側電流孔開口端的端緣與後端側檢測孔開口端的端緣係呈連續者。結果，在相反面成對的後端側電流孔開口端與後端側檢測孔開口端係相連而成為所謂的葫蘆型。因此，由於作業者可藉由目視觀察來確認葫蘆型的孔形狀，而辨別成對之電流探針與檢測探針所應***之電流用插通孔與檢測用插通孔，故可使探針對於檢查輔助具之安裝作業性提升。 Further, the current insertion hole is half of the open end of the rear end side current hole which is formed on the opposite side of the opposite side of the opposing plate from the opposite surface The sum of the diameters and the radii of the opening ends of the rear end side detecting holes that form the opening on the opposite side of the detecting insertion hole that is paired with the current insertion hole, is the pair of current insertion holes and the detection The distance between the centers of the insertion holes is large, and the end edge of the open end of the current hole at the end side of the pair is continuous with the end edge of the open end of the rear end side detection hole. As a result, the pair of rear end side current hole opening ends and the rear end side detecting hole opening end are connected to each other to form a so-called gourd type. Therefore, since the operator can confirm the shape of the hole of the gourd type by visual observation, and distinguish the current insertion hole and the detection insertion hole through which the pair of current probes and the detection probe are to be inserted, it is possible to detect For the installation workability improvement of the inspection aid.
此外，較佳為：關於前述成對之前述電流用插通孔及前述檢測用插通孔，屬於朝與前述對向面平行的方向切斷之前述電流用插通孔的剖面之電流孔剖面的半徑、和屬於朝該方向切斷之前述檢測用插通孔的剖面之檢測孔剖面的半徑的總和係設為：在其剖面位置之距離前述對向面的距離在至少前述電流用插通孔及前述檢測用插通孔的深度之3/4以下的範圍中，係比前述電流用插通孔與前述檢測用插通孔之中心間的距離小。 Further, it is preferable that the pair of the current insertion holes and the detection insertion holes belong to a current hole profile of a cross section of the current insertion hole that is cut in a direction parallel to the opposite surface. The sum of the radius and the radius of the cross section of the detecting hole of the cross section of the detecting insertion hole cut in the direction is such that the distance from the opposing surface at the cross-sectional position is at least the current is inserted. The distance between the hole and the depth of the detection insertion hole is 3/4 or less, which is smaller than the distance between the current insertion hole and the center of the detection insertion hole.
關於成對之電流用插通孔及檢測用插通孔，屬於朝與對向面平行的方向切斷之電流用插通孔的剖面之電流孔剖面的半徑、和屬於朝該方向切斷之檢測用插通孔的剖面之檢測孔剖面的半徑的總和比電流用插通孔與檢測用插通孔之中心間的距離大時，並沒有將電流用插通孔與檢測用插通孔之間區隔開的壁部。因此，電流探針與 檢測探針接觸的可能性會升高。另一方面，若將前述總和設為當其剖面位置之對向面的距離在插通孔的深度之3/4以下的範圍中，比電流用插通孔與檢測用插通孔之中心間的距離小，則電流探針與檢測探針之間區隔開的壁部會成為設成插通孔的深度之3/4以上。藉此，減少電流探針與檢測探針接觸之虞。 The pair of current insertion holes and the detection insertion holes are the radii of the current hole cross section of the cross section of the current insertion hole that is cut in the direction parallel to the opposite surface, and are cut in the direction. When the sum of the radii of the cross section of the detection hole of the detection insertion hole is larger than the distance between the center of the current insertion hole and the detection insertion hole, the current insertion hole and the detection insertion hole are not provided. The wall separated by the interval. Therefore, the current probe and The possibility of detecting probe contact is increased. On the other hand, if the total sum is such that the distance from the opposing surface of the cross-sectional position is in the range of 3/4 or less of the depth of the insertion hole, between the center of the specific current insertion hole and the detection insertion hole When the distance is small, the wall portion partitioned between the current probe and the detecting probe becomes 3/4 or more of the depth of the insertion hole. Thereby, the contact between the current probe and the detecting probe is reduced.
此外，較佳為：前述各電流用插通孔及前述各檢測用插通孔的內壁面之相對於前述對向板之板厚方向的傾斜角度係在1至5度的範圍內。 Further, it is preferable that an angle of inclination of the inner wall surface of each of the current insertion holes and the detection insertion holes to the thickness direction of the opposing plate is in a range of 1 to 5 degrees.
為了要使一對電流用插通孔與檢測用插通孔之相反面的開口端成為葫蘆型，並且使其在對向面的開口部分離，較佳為上述傾斜角度在1至5度的範圍內。 In order to make the open end of the pair of current insertion holes and the detection insertion hole into a gourd type and to separate the opening on the opposite surface, it is preferable that the inclination angle is 1 to 5 degrees. Within the scope.
此外，較佳為：前述各電流用插通孔與前述各檢測用插通孔係具有隨著離開前述對向面而擴徑之錐形形狀；成對之前述電流用插通孔及前述檢測用插通孔之前述各插通孔彼此的內壁面中之接近另一方插通孔之側的壁面，係沿著前述對向板的板厚方向延伸。 Further, it is preferable that each of the current insertion holes and the detection insertion holes have a tapered shape that expands in diameter away from the opposing surface; the pair of the current insertion holes and the detection The wall surface of the inner wall surface of each of the insertion holes through the insertion hole that is closer to the other side of the insertion hole extends in the thickness direction of the opposing plate.
根據該構成，當電流探針、檢測探針之欲朝內側成為凸起之方向撓曲時，由彼此的內壁面中之接近於另一方插通孔之側的壁面與電流探針、檢測探針產生干擾的結果，會阻擾電流探針、檢測探針往內側成為凸起之方向撓曲。結果，可提升使電流探針、檢測探針朝內側成為凹入之方向撓曲的確實性，進而提升電流探針、檢測探針對於檢查點的接觸穩定性提升的確實性。 According to this configuration, when the current probe and the detecting probe are to be deflected in the direction in which the inner side is convex, the wall surface and the current probe, which are close to the other side of the through hole, are detected by the inner wall surface of each of the inner wall surfaces. As a result of the interference of the needle, the current probe and the detection probe are deflected in a direction in which the probe is convex toward the inside. As a result, the reliability of the deflection of the current probe and the detection probe toward the inside can be improved, and the accuracy of the contact stability of the current probe and the detection probe with respect to the inspection point can be improved.
此外，較佳為：在前述對向板，係形成有板厚比該對向板之外周部薄的薄壁區域，前述各電流用插通孔及前述各檢測用插通孔係貫通前述薄壁區域。 Further, it is preferable that the opposite plate is formed with a thin-walled region having a thickness smaller than a peripheral portion of the opposing plate, and each of the current insertion holes and the detection insertion holes penetrates the thin portion Wall area.
根據該構成，由於為了要形成電流用插通孔及檢測用插通孔所必須貫通的板厚變薄，因此，會使微細的電流用插通孔及檢測用插通孔的形成變得容易。 According to this configuration, the thickness of the insertion hole for the current insertion hole and the detection insertion hole is reduced, so that the formation of the fine current insertion hole and the detection insertion hole is facilitated. .
此外，較佳為：在前述對向板之前述相反面側係層疊有導引板，該導引板係形成有與前述各電流用插通孔及前述各檢測用插通孔分別對應，且可供前述電流探針及前述檢測探針分別插通之導引孔；與成對之前述電流用插通孔及前述檢測用插通孔分別對應的前述各導引孔之與該電流用插通孔及檢測用插通孔的位置關係係經設定為，使插通於該電流用插通孔及檢測用插通孔而成對之前述電流探針與前述檢測探針以彼此的分離距離隨著接近前述對向面而變短的方式傾斜。 Further, it is preferable that a guide plate is formed on the opposite surface side of the opposing plate, and the guide plate is formed to correspond to each of the current insertion holes and the detection insertion holes, respectively. a guiding hole through which the current probe and the detecting probe are respectively inserted; and the current guiding plug corresponding to the pair of the current insertion hole and the detecting insertion hole respectively The positional relationship between the through hole and the detecting insertion hole is set such that the current probe and the detection probe are separated from each other by a pair of the current insertion hole and the detection insertion hole. Tilting in a manner that becomes shorter as approaching the aforementioned opposing faces.
根據該構成，係藉由導引孔而使電流探針及檢測探針以彼此的分離距離隨著接近對向面而變短的方式傾斜。因此，在檢查點如銲點凸塊般突起時，電流探針及檢測探針的前端會以比電流探針及檢測探針沿著對向面的法線方向時更接近於垂直的角度對於檢查點表面的曲面抵接。結果，電流探針及檢測探針的前端變得難以在檢查點表面滑動。 According to this configuration, the current probe and the detection probe are inclined such that the separation distance between them is shorter as they approach the opposing surface by the guide hole. Therefore, when the checkpoint is bumped like a bump, the front end of the current probe and the detecting probe are closer to a vertical angle than the current probe and the detecting probe along the normal direction of the opposing surface. The surface of the checkpoint surface abuts. As a result, the front end of the current probe and the detecting probe becomes difficult to slide on the surface of the inspection point.
此外，較佳為：前述導引孔的內壁面之相對於前述對向板的板厚方向之傾斜角度，係比前述各電流 用插通孔及前述各檢測用插通孔的內壁面之相對於前述板厚方向的傾斜角度小。 Further, it is preferable that an inclination angle of an inner wall surface of the guide hole with respect to a thickness direction of the opposite plate is compared with each of the foregoing currents The insertion hole and the inner wall surface of each of the above-described detection insertion holes have a small inclination angle with respect to the thickness direction.
根據此構成，在導引孔內之電流探針及檢測探針可移動之容許的範圍比電流用插通孔及檢測用插通孔減少的結果，可提升保持電流探針及檢測探針的穩定度。 According to this configuration, the allowable range in which the current probe and the detection probe are movable in the guide hole is smaller than that of the current insertion hole and the detection insertion hole, and the current probe and the detection probe can be improved. stability.
此外，較佳為更具備：前述電流探針，係插通於前述電流用插通孔；及前述檢測探針，係插通於前述檢測用插通孔。 Further, preferably, the current probe is inserted into the current insertion hole; and the detection probe is inserted into the detection insertion hole.
根據此構成，可快速地將檢查輔助具使用於檢查中。 According to this configuration, the inspection aid can be quickly used in the inspection.
此種構成之檢查輔助具及基板檢查裝置，係可提升探針對於檢查點的接觸穩定性。 The inspection aid and the substrate inspection device of such a configuration can improve the contact stability of the probe to the inspection point.
1、1’‧‧‧基板檢查裝置 1, 1'‧‧‧ substrate inspection device
4、4U、4L、4’、4U’、4L’‧‧‧檢查輔助具 4, 4U, 4L, 4', 4U', 4L'‧‧‧ inspection aids
5、5’‧‧‧檢查側支持體 5, 5'‧‧‧ Inspection side support
6‧‧‧電極側支持體 6‧‧‧electrode side support
7‧‧‧連結構件 7‧‧‧Connected components
9‧‧‧電極板 9‧‧‧Electrode plate
20‧‧‧控制部 20‧‧‧Control Department
51、51’‧‧‧對向板 51, 51’‧‧‧ opposite board
52、53‧‧‧導引板 52, 53‧‧‧ Guide board
61、62、63‧‧‧支持板 61, 62, 63‧‧‧ support boards
81‧‧‧導體部 81‧‧‧Conductor Department
82‧‧‧絕緣部 82‧‧‧Insulation
91‧‧‧電極 91‧‧‧Electrode
100‧‧‧基板 100‧‧‧Substrate
110‧‧‧基板固定裝置 110‧‧‧Substrate fixing device
112‧‧‧框體 112‧‧‧ frame
121‧‧‧第1檢查部 121‧‧‧1st Inspection Department
122‧‧‧第2檢查部 122‧‧‧2nd Inspection Department
125‧‧‧檢查部移動機構 125‧‧‧Inspection Department Mobile Agency
511‧‧‧薄壁區域 511‧‧‧thin wall area
512‧‧‧外周部 512‧‧‧The outer part
531‧‧‧薄壁部 531‧‧‧ Thin wall
B‧‧‧凸塊(檢查點) B‧‧‧Bumps (checkpoints)
C‧‧‧相反面 C‧‧‧ opposite side
D‧‧‧深度 D‧‧‧Deep
Ef1、Ef1’‧‧‧後端側電流孔開口端 Ef1, Ef1'‧‧‧ rear end side current hole open end
Ef2、Ef2’‧‧‧前端側電流孔開口端 Ef2, Ef2'‧‧‧ front end side current hole open end
Es1、Es1’‧‧‧後端側檢測孔開口端 Es1, Es1'‧‧‧ open end detection hole open end
Es2、Es2’‧‧‧前端側檢測孔開口端 Es2, Es2'‧‧‧ front end detection hole open end
F‧‧‧對向面 F‧‧‧ opposite
F1、S1‧‧‧壁面 F1, S1‧‧‧ wall
H52、H53‧‧‧導引孔 H52, H53‧‧‧ guiding holes
H61、H62、H63‧‧‧支持孔 H61, H62, H63‧‧‧ support holes
Hf、Hf’、M‧‧‧電流用插通孔 Hf, Hf', M‧‧‧ current through holes
Hs、Hs’、N‧‧‧檢測用插通孔 Hs, Hs', N‧‧‧ detection insertion holes
L‧‧‧距離 L‧‧‧ distance
Pf‧‧‧探針(電流探針) Pf‧‧‧ probe (current probe)
Pr‧‧‧探針對 Pr‧‧‧ probe pair
Ps‧‧‧探針(檢測探針) Ps‧‧ probe (detection probe)
R‧‧‧背面 R‧‧‧Back
Rf、Rs‧‧‧傾斜角度 Rf, Rs‧‧‧ tilt angle
rf1、rf2、rf3、rs1、rs2、rs3‧‧‧半徑 Radius of rf1, rf2, rf3, rs1, rs2, rs3‧‧
rf1’、rf2’、rs1’、rs2’‧‧‧半長軸 Rf1', rf2', rs1', rs2'‧‧‧ semi-major axis
X‧‧‧角部 X‧‧‧ corner
第1圖係概略性顯示本發明一實施形態之具備檢查輔助具的基板檢查裝置之構成的前視圖。 Fig. 1 is a front view schematically showing a configuration of a substrate inspection apparatus including an inspection aid according to an embodiment of the present invention.
第2圖係顯示第1圖所示之檢查輔助具之一例的立體圖。 Fig. 2 is a perspective view showing an example of the inspection aid shown in Fig. 1.
第3圖係顯示第2圖所示之檢查輔助具的側視圖。 Fig. 3 is a side view showing the inspection aid shown in Fig. 2.
第4圖係從對向面側觀察第1、2圖所示之檢查輔助具的俯視圖。 Fig. 4 is a plan view of the inspection aid shown in Figs. 1 and 2 as seen from the facing side.
第5圖係第4圖所示之檢查側支持體及探針的V-V線剖面圖。 Fig. 5 is a cross-sectional view taken along the line V-V of the inspection side support and the probe shown in Fig. 4.
第6圖係第4圖所示之電極側支持體、電極板、及探針的V-V線剖面圖。 Fig. 6 is a cross-sectional view taken along the line V-V of the electrode side support, the electrode plate, and the probe shown in Fig. 4.
第7圖係顯示一對電流用插通孔及檢測用插通孔之詳細內容的放大圖。 Fig. 7 is an enlarged view showing details of a pair of current insertion holes and detection insertion holes.
第8圖係顯示基板壓接在第5圖所示之檢查側支持體之狀態的剖面圖。 Fig. 8 is a cross-sectional view showing a state in which the substrate is crimped to the inspection side support shown in Fig. 5.
第9圖係顯示對向板的相反面之一例的俯視圖。 Figure 9 is a plan view showing an example of the opposite side of the opposing plate.
第10圖係用以說明本發明第2實施形態之檢查輔助具的構成例的說明圖。 Fig. 10 is an explanatory view for explaining a configuration example of an inspection aid according to a second embodiment of the present invention.
第11圖係顯示用以說明由於電流用插通孔及檢測用插通孔具有隨著離開對向面而擴徑之錐形形狀所帶來的其他效果之比較例的說明圖。 Fig. 11 is an explanatory view showing a comparative example for explaining other effects due to the tapered shape in which the current insertion hole and the detection insertion hole have a diameter larger than the opposite direction.
以下，根據圖式，說明本發明之實施形態。再者，於各圖中附加有相同符號的構成，係表示相同的構成且省略其說明。 Hereinafter, embodiments of the present invention will be described based on the drawings. In addition, the same code|symbol is attached|subjected in the figure, and the same structure is ab
(第1實施形態) (First embodiment)
第1圖係概略性顯示本發明一實施形態之具備檢查輔助具的基板檢查裝置1之構成的前視圖。第1圖所示的基板檢查裝置1，係用以檢查形成於檢查對象之基板的電路圖案之裝置。 Fig. 1 is a front view schematically showing a configuration of a substrate inspection apparatus 1 including an inspection aid according to an embodiment of the present invention. The substrate inspection device 1 shown in Fig. 1 is a device for inspecting a circuit pattern formed on a substrate to be inspected.
第1圖所示之基板檢查裝置1係具有框體112。在框體112的內部空間主要設有：基板固定裝置110、第1檢查部121、及第2檢查部122。基板固定裝置110係 構成為將檢查對象之基板100固定於預定的位置。 The substrate inspection apparatus 1 shown in Fig. 1 has a housing 112. The internal space of the casing 112 is mainly provided with a substrate fixing device 110, a first inspection portion 121, and a second inspection portion 122. Substrate fixing device 110 The substrate 100 to be inspected is fixed at a predetermined position.
基板100亦可為例如玻璃環氧樹脂基板、可撓性基板、陶瓷多層配線基板、液晶顯示器或電漿顯示器用的電極板、觸控面板用等之透明導電板、及半導體封裝用的封裝基板或薄膜載體等各種基板。在基板100形成有配線圖案及銲點凸塊等之檢查點。 The substrate 100 may be, for example, a glass epoxy substrate, a flexible substrate, a ceramic multilayer wiring substrate, an electrode plate for a liquid crystal display or a plasma display, a transparent conductive plate for a touch panel, or the like, and a package substrate for a semiconductor package. Or various substrates such as a film carrier. A checkpoint such as a wiring pattern and solder bumps is formed on the substrate 100.
第1檢查部121係位在固定於基板固定裝置110之基板100的上方。第2檢查部122係位在固定於基板固定裝置110之基板100的下方。第1檢查部121及第2檢查部122係具備用以檢查形成於基板100之電路圖案的檢查輔助具4U、4L。在檢查輔助具4U、4L安裝有複數隻探針Pf、Ps。此外，為了在框體112內適當移動，第1檢查部121及第2檢查部122係具備檢查部移動機構125。 The first inspection unit 121 is positioned above the substrate 100 fixed to the substrate fixing device 110. The second inspection unit 122 is positioned below the substrate 100 fixed to the substrate fixing device 110. The first inspection unit 121 and the second inspection unit 122 are provided with inspection aids 4U and 4L for inspecting the circuit patterns formed on the substrate 100. A plurality of probes Pf and Ps are attached to the inspection aids 4U and 4L. In addition, the first inspection unit 121 and the second inspection unit 122 include an inspection unit moving mechanism 125 in order to appropriately move in the casing 112.
基板檢查裝置1係具備控制基板固定裝置110、第1檢查部121、及第2檢查部122等之動作的控制部20。控制部20例如使用微電腦構成。控制部20係構成為：使第1檢查部121及第2檢查部122適當移動，且使檢查輔助具4U、4L的探針Pf(電流探針)、及探針Ps(檢測探針)接觸於固定在基板固定裝置110的基板100，藉此利用檢查輔助具4U、4L來檢查形成於基板100的電路圖案。由於檢查輔助具4U、4L以同樣的方式構成，因此，以下將檢查輔助具4U、4L統稱而稱為檢查輔助具4。 The substrate inspection device 1 includes a control unit 20 that controls operations of the substrate fixing device 110, the first inspection unit 121, and the second inspection unit 122. The control unit 20 is configured using, for example, a microcomputer. The control unit 20 is configured to appropriately move the first inspection unit 121 and the second inspection unit 122, and to contact the probe Pf (current probe) and the probe Ps (detection probe) of the inspection aids 4U and 4L. The substrate 100 fixed to the substrate fixing device 110 is used to inspect the circuit pattern formed on the substrate 100 by the inspection aids 4U and 4L. Since the inspection aids 4U and 4L are configured in the same manner, the inspection aids 4U and 4L will be collectively referred to as the inspection aid 4 hereinafter.
第2圖係顯示第1圖所示之檢查輔助具4之一例的立體圖。第3圖係顯示第2圖所示之檢查輔助具 4的側視圖。檢查輔助具4係具備檢查側支持體5、電極側支持體6、及連結構件7，該連結構件7係將檢查側支持體5與電極側支持體6隔開預定距離而平行地保持。在檢查側支持體5及電極側支持體6，係於彼此對應的位置形成有插通孔。 Fig. 2 is a perspective view showing an example of the inspection aid 4 shown in Fig. 1. Figure 3 shows the inspection aid shown in Figure 2. Side view of 4. The inspection aid 4 includes an inspection side support 5, an electrode side support 6, and a connection member 7 that holds the inspection side support 5 and the electrode side support 6 in parallel at a predetermined distance. The inspection side support 5 and the electrode side support body 6 are formed with insertion holes at positions corresponding to each other.
檢查輔助具4係所謂四端子測量法用的檢查輔助具，且具備供給檢查電流用的探針Pf、及測量電壓用的探針Ps。於檢查側支持體5的插通孔插通探針Pf、Ps的前端側，於電極側支持體6的插通孔插通探針Pf、Ps的後端側。藉此，利用檢查側支持體5及電極側支持體6保持複數對由一對探針Pf、Ps所構成的探針對Pr。 The inspection aid 4 is an inspection aid for a four-terminal measurement method, and includes a probe Pf for supplying an inspection current and a probe Ps for measuring a voltage. The insertion holes of the inspection side support 5 are inserted into the distal end sides of the probes Pf and Ps, and the insertion holes of the electrode side support 6 are inserted into the rear end sides of the probes Pf and Ps. Thereby, the probe pair P and the pair of probes Pf and Ps are held by the pair of probes Pf and Ps by the inspection side support 5 and the electrode side support 6.
檢查側支持體5係從配置有基板100之側(前方)依序層疊對向板51、導引板52、53而構成。對向板51係具有與基板100對向配置之對向面F。對向板51係藉由螺栓等可拆裝的固定手段而與導引板52、53彼此固定。藉此，對向板51可相對於導引板52、53拆裝。 The inspection side support 5 is configured by sequentially laminating the opposite plates 51 and the guide sheets 52 and 53 from the side (front) on which the substrate 100 is placed. The opposing plate 51 has a facing surface F that is disposed opposite to the substrate 100. The opposing plate 51 is fixed to the guide plates 52 and 53 by means of a fixing means detachable by a bolt or the like. Thereby, the opposing plate 51 can be detachably attached to the guide plates 52, 53.
電極側支持體6係從對向面F的相反側依序層疊支持板61、62、63而構成。支持板61的表面係作為抵接於形成有後述之電極91之電極板9的背面R(第6圖)。電極91例如與包含電流計、電壓計、電流源等之省略圖式的掃描器電路連接。藉此，電極板9係安裝於支持板61，藉此使探針Pf、Ps的後端部經由電極91而與掃描器電路連接。 The electrode-side support body 6 is configured by sequentially laminating the support plates 61, 62, and 63 from the opposite side of the opposing surface F. The surface of the support plate 61 serves as a back surface R (Fig. 6) that abuts against the electrode plate 9 on which the electrode 91 to be described later is formed. The electrode 91 is connected, for example, to a scanner circuit including an illuminator, a voltmeter, a current source, and the like. Thereby, the electrode plate 9 is attached to the support plate 61, whereby the rear end portions of the probes Pf and Ps are connected to the scanner circuit via the electrode 91.
從對向板51的對向面F到支持板61的背面 R的距離，係比探針Pf、Ps的長度略短。藉此，當如後述之第6圖般將電極板9安裝於支持板61時，探針Pf、Ps的後端部會抵接於電極91而被阻擋，且探針Pf、Ps的前端部會從對向面F略為突出。 From the opposite surface F of the opposite plate 51 to the back of the support plate 61 The distance of R is slightly shorter than the length of the probes Pf and Ps. As a result, when the electrode plate 9 is attached to the support plate 61 as will be described later, the rear end portions of the probes Pf and Ps are blocked by the electrode 91 and blocked, and the distal ends of the probes Pf and Ps are blocked. Will be slightly prominent from the opposite side F.
在此狀態下，當檢查對象的基板100壓接於對向板51時，探針Pf、Ps的前端部會受基板100推壓而使探針Pf、Ps產生撓曲(第8圖)。結果，藉由因探針Pf、Ps的彈性復原力而產生的彈推力，探針Pf、Ps的前端部會彈性地接觸於基板100的檢查點。 In this state, when the substrate 100 to be inspected is pressed against the opposing plate 51, the distal end portions of the probes Pf and Ps are pressed by the substrate 100 to deflect the probes Pf and Ps (Fig. 8). As a result, the tip end portions of the probes Pf and Ps elastically contact the inspection points of the substrate 100 by the elastic thrust generated by the elastic restoring forces of the probes Pf and Ps.
掃描器電路係依據來自例如控制部20的控制信號，將預定的電流供給至預定的探針Pf、Pf間，測量與該探針Pf、Pf分別成對之探針Ps、Ps間的電壓，並將其測量結果往控制部20傳送。 The scanner circuit supplies a predetermined current between predetermined probes Pf and Pf based on a control signal from, for example, the control unit 20, and measures a voltage between the probes Ps and Ps paired with the probes Pf and Pf, respectively. The measurement result is transmitted to the control unit 20.
控制部20係根據從掃描器電路所得之測量結果，執行藉由例如四端子測量法所進行的基板檢查。具體而言，例如，如後述之第8圖所示般，控制部20係使檢查輔助具4的檢查側支持體5壓接於基板100，且使探針對Pr亦即探針Pf、Ps接觸於凸塊B等的各檢查點。然後，控制部20係在檢查對象的兩個檢查點間，使藉由掃描器電路而預先設定的檢查用電流流通在接觸於一方之檢查點的探針Pf與接觸於另一方之檢查點的探針Pf之間，且藉由掃描器電路來測量該接觸於一方之檢查點的探針Ps與接觸於另一方之檢查點的探針Ps之間的電壓，以作為檢測電壓。控制部20係例如將該檢測電壓或從該檢測電壓所求得 之檢查點間的電阻值等與預先設定的基準值進行比較，藉此執行基板100的良好與否判定。 The control unit 20 performs substrate inspection by, for example, a four-terminal measurement method based on the measurement result obtained from the scanner circuit. Specifically, for example, as shown in FIG. 8 to be described later, the control unit 20 presses the inspection-side support 5 of the inspection aid 4 against the substrate 100, and contacts the probe pair Pr, that is, the probes Pf and Ps. At each check point of the bump B or the like. Then, the control unit 20 causes the inspection current set in advance by the scanner circuit to flow between the probe Pf contacting one of the inspection points and the inspection point contacting the other checkpoint between the two inspection points to be inspected. The voltage between the probe Pf and the probe Ps contacting the checkpoint of one of the probes and the probe Ps contacting the other checkpoint is measured by the scanner circuit as a detection voltage. The control unit 20 determines, for example, the detected voltage or the detected voltage. The resistance value or the like between the inspection points is compared with a preset reference value, thereby performing the determination of the success or failure of the substrate 100.
第4圖係從對向面F側觀察第1、2圖所示之檢查輔助具4的俯視圖。如第4圖所示，在檢查側支持體5，係與探針對Pr對應而形成有複數對之用以供探針對Pr的探針Pf、Ps分別插通之電流用插通孔Hf與檢測用插通孔Hs。為了要將探針Pf、Ps分別導引至基板100的檢查點，電流用插通孔Hf與檢測用插通孔Hs係與檢查點的配置對應而形成。 Fig. 4 is a plan view of the inspection aid 4 shown in Figs. 1 and 2 as seen from the opposite surface F side. As shown in Fig. 4, in the inspection-side support body 5, a pair of current insertion holes Hf and detection for inserting the probes Pf and Ps for the pair of probe pairs Pr are formed corresponding to the probe pair Pr. Insert the through hole Hs. In order to guide the probes Pf and Ps to the inspection points of the substrate 100, the current insertion holes Hf and the detection insertion holes Hs are formed corresponding to the arrangement of the inspection points.
第5圖係第4圖所示之檢查側支持體5及探針Pf、Ps的V-V線剖面圖。如第5圖所示，在對向板51，係形成有板厚比對向板51之外周部512薄的薄壁區域511。電流用插通孔Hf及檢測用插通孔Hs係貫通薄壁區域511而形成。電流用插通孔Hf及檢測用插通孔Hs的中心軸係相對於對向面F大致垂直。再者，電流用插通孔Hf及檢測用插通孔Hs的中心軸亦可相對於對向面F的垂線傾斜。 Fig. 5 is a cross-sectional view taken along the line V-V of the inspection side support 5 and the probes Pf and Ps shown in Fig. 4. As shown in Fig. 5, in the opposing plate 51, a thin-walled region 511 having a thickness smaller than the outer peripheral portion 512 of the opposing plate 51 is formed. The current insertion hole Hf and the detection insertion hole Hs are formed to penetrate the thin-walled region 511. The central axis of the current insertion hole Hf and the detection insertion hole Hs is substantially perpendicular to the opposing surface F. Further, the central axes of the current insertion holes Hf and the detection insertion holes Hs may be inclined with respect to the perpendicular to the opposing surface F.
薄壁區域511係例如藉由銑刀(router)等工具來切削加工板厚均勻的板狀構件而得。電流用插通孔Hf及檢測用插通孔Hs係其內徑為比探針Pf、Ps之直徑略大之程度的微細的孔。因此，在以貫通板厚較厚的板的方式形成電流用插通孔Hf及檢測用插通孔Hs時，會在孔加工時伴隨著困難性。因此，藉由形成薄壁區域511，並在薄壁區域511形成電流用插通孔Hf及檢測用插通孔Hs，而 使電流用插通孔Hf及檢測用插通孔Hs的形成變得容易。 The thin-walled region 511 is obtained by, for example, cutting a plate-shaped member having a uniform thickness by a tool such as a router. The current insertion hole Hf and the detection insertion hole Hs are fine holes whose inner diameter is slightly larger than the diameters of the probes Pf and Ps. Therefore, when the current insertion hole Hf and the detection insertion hole Hs are formed so as to penetrate the plate having a thick plate thickness, it is difficult to perform the hole processing. Therefore, by forming the thin-walled region 511 and forming the current insertion hole Hf and the detection insertion hole Hs in the thin-walled region 511, It is easy to form the current insertion hole Hf and the detection insertion hole Hs.
電流用插通孔Hf及檢測用插通孔Hs係具有隨著離開對向面F而擴徑之錐形形狀。電流用插通孔Hf及檢測用插通孔Hs之與對向面F平行地切斷的剖面形狀係呈大致圓形。此種錐形形狀可例如藉由從對向板51之與對向面F為相反側的相反面C側朝與對向面F垂直之方向照射雷射光進行雷射加工而形成。再者，電流用插通孔Hf及檢測用插通孔Hs的加工方法不限於雷射加工，能使用可形成錐形形狀的孔之各種加工方法。 The current insertion hole Hf and the detection insertion hole Hs have a tapered shape that expands in diameter as it leaves the opposing surface F. The cross-sectional shape of the current insertion hole Hf and the detection insertion hole Hs which are cut in parallel with the opposing surface F is substantially circular. Such a tapered shape can be formed, for example, by performing laser processing by irradiating laser light from a side opposite to the opposing surface F of the opposing plate 51 opposite to the opposing surface F. Further, the method of processing the current insertion hole Hf and the detection insertion hole Hs is not limited to laser processing, and various processing methods capable of forming a tapered hole can be used.
在導引板52，係與相鄰接之對向板51的電流用插通孔Hf及檢測用插通孔Hs分別對應而形成有貫通導引板52的導引孔H52。在導引板53，係與相鄰接之導引板52的各導引孔H52分別對應而形成有貫通導引板53的導引孔H53。 The guide plate 52 is formed with a guide hole H52 penetrating the guide plate 52 corresponding to the current insertion hole Hf and the detection insertion hole Hs of the adjacent opposing plate 51, respectively. The guide plate 53 is formed with a guide hole H53 penetrating the guide plate 53 so as to correspond to each of the guide holes H52 of the adjacent guide plates 52.
第6圖係第4圖所示之電極側支持體6、電極板9、及探針Pf、Ps的V-V線剖面圖。第5圖、第6圖所示之探針Pf、Ps係具有：例如直徑100μm左右之棒狀的導體部81；及覆蓋該導體部81之外周面的絕緣部82。絕緣部82係以合成樹脂等之絕緣體形成。絕緣部82可使用藉由對導體部81之表面施加絕緣塗裝而形成之絕緣覆膜。在探針Pf、Ps的兩端未形成絕緣部82而將導體部81露出。 Fig. 6 is a cross-sectional view taken along line V-V of the electrode-side support 6, the electrode plate 9, and the probes Pf and Ps shown in Fig. 4. The probes Pf and Ps shown in Figs. 5 and 6 have, for example, a rod-shaped conductor portion 81 having a diameter of about 100 μm, and an insulating portion 82 covering the outer peripheral surface of the conductor portion 81. The insulating portion 82 is formed of an insulator such as synthetic resin. As the insulating portion 82, an insulating film formed by applying an insulating coating to the surface of the conductor portion 81 can be used. The insulating portion 82 is not formed at both ends of the probes Pf and Ps, and the conductor portion 81 is exposed.
參照第5圖，探針Pf之前端側的導體部81係從導引板53側插通於由電流用插通孔Hf及導引孔 H52、H53連通而構成的連通孔，探針Ps之前端側的導體部81係從導引板53側插通於由檢測用插通孔Hs及導引孔H52、H53連通而構成的連通孔。導引孔H53的內徑係設為比探針Pf、Ps之絕緣部82的直徑小。藉此，構成為絕緣部82的前端側端部與導引孔53卡合，且探針Pf、Ps不會從檢查側支持體5脫落。 Referring to Fig. 5, the conductor portion 81 on the front end side of the probe Pf is inserted from the side of the guide plate 53 into the current insertion hole Hf and the guide hole. A communication hole formed by the communication between H52 and H53, and the conductor portion 81 on the front end side of the probe Ps is inserted into the communication hole formed by the detection insertion hole Hs and the guide holes H52 and H53 from the side of the guide plate 53. . The inner diameter of the guide hole H53 is set to be smaller than the diameter of the insulating portion 82 of the probes Pf and Ps. Thereby, the distal end side end portion of the insulating portion 82 is engaged with the guide hole 53, and the probes Pf and Ps are not detached from the inspection side support body 5.
與一對電流用插通孔Hf及檢測用插通孔Hs分別對應而形成連通孔的導引孔H52、H53，係設定其與電流用插通孔Hf及檢測用插通孔Hs的位置關係，以使探針對Pr的探針Pf、Ps以彼此的分離距離隨著接近對向面F而變短的方式傾斜。具體而言，一對導引孔H52、H52之中心間的距離係設為比一對導引孔H53、H53之中心間的距離短，一對電流用插通孔Hf及檢測用插通孔Hs之中心間的距離係設為比一對導引孔H52、H52之中心間的距離短。 The guide holes H52 and H53 which form a communication hole corresponding to the pair of current insertion holes Hf and the detection insertion holes Hs, respectively, are set to have a positional relationship with the current insertion hole Hf and the detection insertion hole Hs. The probes Pf and Ps of the probe pair Pr are inclined such that the separation distance from each other becomes shorter as approaching the opposing surface F. Specifically, the distance between the centers of the pair of guiding holes H52 and H52 is shorter than the distance between the centers of the pair of guiding holes H53 and H53, and a pair of current insertion holes Hf and detection insertion holes. The distance between the centers of the Hs is set to be shorter than the distance between the centers of the pair of guiding holes H52 and H52.
第7圖係顯示一對電流用插通孔Hf及檢測用插通孔Hs之詳細內容的放大圖。第7圖(a)係將一對電流用插通孔Hf及檢測用插通孔Hs以相對於對向面F垂直的方向切斷的剖面圖。第7圖(b)係從相反面C觀察對向板51的俯視圖。 Fig. 7 is an enlarged view showing details of a pair of current insertion holes Hf and detection insertion holes Hs. Fig. 7(a) is a cross-sectional view showing a pair of current insertion holes Hf and detection insertion holes Hs cut in a direction perpendicular to the opposing surface F. Fig. 7(b) is a plan view of the opposing plate 51 as viewed from the opposite surface C.
電流用插通孔Hf及檢測用插通孔Hs的內壁面之相對於板厚方向的傾斜角度Rf、Rs係例如設為1至5度的範圍。導引板52、53的導引孔H52、H53的內壁面之相對於對向板51的板厚方向之傾斜角度，係比傾斜角 度Rf、Rs小。例如，導引孔H52、H53的內壁面亦可沿著板厚方向延伸，而使導引孔H52、H53成為圓筒狀。藉此，探針Pf、Ps在導引孔H52、H53內移動之容許的範圍減少的結果，可提升保持探針Pf、Ps的穩定度。 The inclination angles Rf and Rs of the inner wall surface of the current insertion hole Hf and the detection insertion hole Hs with respect to the thickness direction are, for example, in the range of 1 to 5 degrees. The inclination angle of the inner wall surface of the guide holes H52, H53 of the guide plates 52, 53 with respect to the thickness direction of the opposing plate 51 is a lean angle Degrees Rf and Rs are small. For example, the inner wall surfaces of the guide holes H52 and H53 may extend in the thickness direction, and the guide holes H52 and H53 may have a cylindrical shape. As a result, the allowable range in which the probes Pf and Ps move in the guide holes H52 and H53 is reduced, and the stability of the holding probes Pf and Ps can be improved.
再者，於第5圖中，係顯示在導引板53形成使板厚變薄的薄壁部531，且在薄壁部531形成有導引孔H53的例子。但是，導引板53亦可為板厚均勻的板狀構件。此外，雖顯示導引板為兩片層疊於對向板51的例子，但是，導引板亦可為一片，亦可為三片以上。此外，並非一定要具備導引板，亦可僅以對向板51構成檢查側支持體5。此外，導引孔H52、H53亦可為與電流用插通孔Hf及檢測用插通孔Hs同樣的錐形形狀，而導引孔H52、H53之內壁面的傾斜角度亦可比電流用插通孔Hf及檢測用插通孔Hs之內壁面的傾斜角度大。 In addition, in the fifth drawing, the thin portion 531 which is thinned in thickness is formed on the guide sheet 53, and the guide hole H53 is formed in the thin portion 531. However, the guide plate 53 may also be a plate-shaped member having a uniform thickness. Further, although the guide plate is shown as an example in which two sheets are stacked on the opposite plate 51, the guide sheets may be one piece or three or more pieces. Further, it is not always necessary to provide the guide plate, and the inspection side support 5 may be configured only by the opposite plate 51. Further, the guide holes H52 and H53 may have the same tapered shape as the current insertion hole Hf and the detection insertion hole Hs, and the inclination angles of the inner wall surfaces of the guide holes H52 and H53 may be inserted more than the current. The inclination angle of the inner wall surface of the hole Hf and the detection insertion hole Hs is large.
第8圖係顯示基板100壓接在第5圖所示之檢查側支持體5之狀態的剖面圖。在基板100形成有凸塊B作為檢查點。凸塊B例如從基板100的表面突出為半球狀。因此，凸塊B的表面係隨著遠離凸塊B的中心而使其傾斜相對於對向面F的面方向變大。由於必須使探針對Pr的兩支探針Pf、Ps接觸於一個凸塊B，因此探針Pf、Ps的前端係以隔著凸塊B的中心而分離於兩側的狀態接觸於凸塊B。 Fig. 8 is a cross-sectional view showing a state in which the substrate 100 is pressed against the inspection side support 5 shown in Fig. 5. A bump B is formed on the substrate 100 as a checkpoint. The bump B protrudes, for example, from the surface of the substrate 100 into a hemispherical shape. Therefore, the surface of the bump B becomes inclined toward the surface direction of the opposing surface F as it goes away from the center of the bump B. Since the two probes Pf and Ps of the probe pair Pr must be in contact with one bump B, the front ends of the probes Pf and Ps are in contact with the bumps B in a state separated from the sides by the center of the bumps B. .
因此，假設在探針Pf、Ps以沿著對向面F之法線方向(板厚方向)延伸的方式由檢查側支持體5所保 持時，探針Pf、Ps係對於凸塊B的表面傾斜抵接。而且，因為該表面的傾斜，而在探針Pf、Ps的前端部產生朝向使探針Pf、Ps彼此分離，且使探針Pf、Ps在凸塊B的表面滑動的方向的作用力。結果，探針Pf、Ps對於凸塊B的接觸穩定性會降低。 Therefore, it is assumed that the probes Pf and Ps are protected by the inspection side support 5 in such a manner as to extend in the normal direction (plate thickness direction) of the opposing surface F. At the time of holding, the probes Pf and Ps are inclined to abut against the surface of the bump B. Further, due to the inclination of the surface, the front end portions of the probes Pf and Ps are biased in a direction in which the probes Pf and Ps are separated from each other and the probes Pf and Ps are slid on the surface of the bump B. As a result, the contact stability of the probes Pf and Ps with respect to the bump B is lowered.
另一方面，根據第5圖所示之檢查側支持體5，係藉由導引孔H52、H53而使探針對Pr之探針Pf、Ps以彼此的分離距離隨著接近對向面F而變短的方式傾斜。因此，探針Pf、Ps的前端會以比探針Pf、Ps沿著對向面F的法線方向時更接近於垂直的角度對於凸塊B表面的曲面抵接。結果，探針Pf、Ps的前端變得難以在凸塊B表面滑動。再者，檢查輔助具4係即便是檢查點為如凸塊B之突起的形狀，只要可接觸於探針Pf、Ps即可，檢查點亦可為平坦。 On the other hand, according to the inspection side support 5 shown in Fig. 5, the probes Pf and Ps of the probe pair Pr are separated from each other by the guide holes H52 and H53 as they approach the opposite surface F. Tilt in a shorter way. Therefore, the tips of the probes Pf and Ps abut against the curved surface of the surface of the bump B at a closer angle to the vertical than the probes Pf and Ps in the normal direction of the opposing surface F. As a result, the tips of the probes Pf and Ps become difficult to slide on the surface of the bump B. Further, the inspection aid 4 has a shape in which the inspection point is a projection such as the bump B, and the inspection point may be flat as long as it can be in contact with the probes Pf and Ps.
再者，由於探針Pf、Ps係以彼此的分離距離隨著接近對向面F而變短的方式傾斜，因此，當凸塊B壓接於探針Pf、Ps前端時，係如第8圖所示，探針Pf、Ps係朝彼此相對向的內側成為凹入之方向產生撓曲。當朝彼此相對向的內側成為凹入之方向產生撓曲時，探針Pf、Ps之前端的方向會相對於凸塊B表面的曲面更加接近於垂直。結果，探針Pf、Ps之前端會變得更難以在凸塊B表面滑動，並且，探針Pf、Ps之抵接壓力不會散逸而容易施加於凸塊B，藉此，將探針Pf、Ps對於凸塊B的接觸穩定性提升。 In addition, since the probes Pf and Ps are inclined so as to be separated from each other by approaching the opposing surface F, when the bumps B are crimped to the tips of the probes Pf and Ps, the eighth is As shown in the figure, the probes Pf and Ps are deflected in a direction in which the inner side facing each other becomes concave. When the inner side facing each other becomes a concave direction, the direction of the front end of the probes Pf, Ps is closer to the vertical with respect to the curved surface of the surface of the bump B. As a result, the front ends of the probes Pf and Ps become more difficult to slide on the surface of the bump B, and the abutment pressures of the probes Pf and Ps are not dissipated and are easily applied to the bumps B, whereby the probe Pf is used. , Ps improves the contact stability of the bump B.
在此，由於電流用插通孔Hf及檢測用插通孔Hs具有隨著離開對向面F而擴徑之錐形形狀，因此，電流用插通孔Hf及檢測用插通孔Hs之彼此的內壁面中之離開另一方插通孔之側的壁面F1、S1，係隨著離開對向面F而朝離開另一方插通孔的方向傾斜。 Here, since the current insertion hole Hf and the detection insertion hole Hs have a tapered shape that expands in diameter away from the opposing surface F, the current insertion hole Hf and the detection insertion hole Hs are mutually connected. The wall surfaces F1, S1 of the inner wall surface away from the other side of the insertion hole are inclined in a direction away from the other insertion hole as leaving the opposite surface F.
結果，由於探針Pf、Ps之內側成為凹入之方向的撓曲所產生之往外側的探針的膨脹部分，係由藉由電流用插通孔Hf及檢測用插通孔Hs的擴徑所產生的空間所容納。亦即，藉由電流用插通孔Hf及檢測用插通孔Hs係具有隨著離開對向面F而擴徑的錐形形狀，使探針Pf、Ps之內側變得容易朝成為凹入之方向撓曲，進而有助於探針Pf、Ps對於凸塊B之接觸穩定性的提升。 As a result, the expanded portion of the outwardly directed probe due to the deflection of the inside of the probes Pf and Ps is caused by the deflection in the concave direction, and the diameter is expanded by the current insertion hole Hf and the detection insertion hole Hs. The space produced is contained. In other words, the current insertion hole Hf and the detection insertion hole Hs have a tapered shape that expands in diameter away from the opposing surface F, so that the insides of the probes Pf and Ps are easily recessed. The direction of deflection, which in turn contributes to the improved contact stability of the probes Pf, Ps with respect to the bump B.
第11圖係顯示用以說明由於電流用插通孔Hf及檢測用插通孔Hs具有隨著離開對向面F而擴徑之錐形形狀所帶來的其他效果之比較例的說明圖。第11圖所示之比較例係具備對向板K來取代對向板51。在對向板K係具備內徑固定之筒狀的電流用插通孔M及檢測用插通孔N，來取代電流用插通孔Hf及檢測用插通孔Hs。 Fig. 11 is an explanatory view showing a comparative example for explaining other effects due to the taper shape in which the current insertion hole Hf and the detection insertion hole Hs have a diameter increasing with respect to the opposing surface F. The comparative example shown in Fig. 11 is provided with a counter plate K instead of the counter plate 51. In the opposing plate K, a cylindrical current insertion hole M and a detection insertion hole N having a fixed inner diameter are provided instead of the current insertion hole Hf and the detection insertion hole Hs.
假設，在電流用插通孔M及檢測用插通孔N的形狀為內徑固定的筒狀形狀時，如第11圖所示，會有探針Pf、Ps碰撞到電流用插通孔M及檢測用插通孔N的角部X而招致探針Pf、Ps的損傷之虞。此外，還會有對向板K與探針Pf、Ps在角部X摩擦而產生塵埃，且該塵埃附著於探針Pf、Ps而發生接觸不良之虞。 When the shape of the current insertion hole M and the detection insertion hole N is a cylindrical shape having a fixed inner diameter, as shown in FIG. 11, the probes Pf and Ps collide with the current insertion hole M. And detecting the corner portion X of the insertion through hole N to cause damage to the probes Pf and Ps. Further, the opposing plate K and the probes Pf and Ps are rubbed at the corner portion X to generate dust, and the dust adheres to the probes Pf and Ps to cause contact failure.
另一方面，根據第5圖所示之檢查側支持體5，由於電流用插通孔Hf及檢測用插通孔Hs具有隨著離開對向面F而擴徑之錐形形狀，因此，電流用插通孔Hf及檢測用插通孔Hs的角部遠離探針Pf、Ps的結果，可減少探針Pf、Ps碰觸到插通孔的角部而損傷探針Pf、Ps、或有塵埃產生而發生接觸不良之虞。 On the other hand, according to the inspection-side support 5 shown in FIG. 5, since the current insertion hole Hf and the detection insertion hole Hs have a tapered shape which expands in diameter as it leaves the opposing surface F, the current is generated. As a result of the insertion of the insertion hole Hf and the corner of the detection insertion hole Hs away from the probes Pf and Ps, it is possible to reduce the probe Pf and Ps from hitting the corner of the insertion hole and damaging the probe Pf, Ps, or Dust is generated and the contact is poor.
參照第6圖，在電極側支持體6形成有支持孔，該支持孔與電流用插通孔Hf及檢測用插通孔Hs對應而設置，供探針Pf、Ps插通而將探針Pf、Ps的另一端導引至電極91。具體而言，在支持板61、62、63分別形成有用以供探針Pf插通的支持孔H61、H62、H63(電流用支持孔)及用以供探針Ps插通的支持孔H61、H62、H63(檢測用支持孔)。 Referring to Fig. 6, a support hole is formed in the electrode-side support body 6. The support hole is provided corresponding to the current insertion hole Hf and the detection insertion hole Hs, and the probes Pf and Ps are inserted to connect the probe Pf. The other end of Ps is guided to the electrode 91. Specifically, support holes H61, H62, and H63 (current support holes) for supporting the probe Pf and support holes H61 for inserting the probe Ps are formed in the support plates 61, 62, and 63, respectively. H62, H63 (support hole for detection).
支持孔H61、H62、H63係連通而構成為一個貫通孔。在第6圖中，雖顯示支持孔H61、H62、H63各自具有直徑大的大徑部與直徑小的小徑部之例，但支持孔H61、H62、H63的直徑亦可為固定。此外，電極側支持體6可藉由單一的導引板構成，亦可藉由兩片、或四片以上的導引板構成。 The support holes H61, H62, and H63 are connected to each other to constitute one through hole. In the sixth drawing, the support holes H61, H62, and H63 each have a large diameter portion having a large diameter and a small diameter portion having a small diameter. However, the diameters of the support holes H61, H62, and H63 may be fixed. Further, the electrode side support body 6 may be constituted by a single guide plate, or may be constituted by two or four or more guide plates.
支持孔H61、H62、H63係設定支持孔彼此間的位置關係，以使探針對Pr的探針Pf、Ps以彼此的分離距離隨著接近背面R而變短的方式傾斜。藉此，插通於檢查側支持體5與電極側支持體6的探針Pf、Ps係以其兩端附近使間隔縮窄且在其中央附近使間隔擴大的方式，以 彎曲的狀態由檢查側支持體5與電極側支持體6所保持。結果，在凸塊B被壓接於探針Pf、Ps前端時，探針Pf、Ps會容易撓曲。 The support holes H61, H62, and H63 set the positional relationship between the support holes so that the probes Pf and Ps of the probe pair Pr are inclined so as to be separated from each other as they approach the back surface R. Thereby, the probes Pf and Ps inserted through the inspection-side support 5 and the electrode-side support body 6 are narrowed in the vicinity of both ends thereof, and the intervals are enlarged in the vicinity of the center thereof. The bent state is held by the inspection side support 5 and the electrode side support 6. As a result, when the bumps B are crimped to the tips of the probes Pf and Ps, the probes Pf and Ps are easily deflected.
參照第7圖，電流用插通孔Hf在對向面F開口之前端側電流孔開口端Ef2的半徑rf2、及與該電流用插通孔Hf成對之檢測用插通孔Hs在對向面F開口之前端側檢測孔開口端Es2的半徑rs2的總和，係比該成對之電流用插通孔Hf及檢測用插通孔Hs之中心間的距離L小。藉此，前端側電流孔開口端Ef2與前端側檢測孔開口端Es2係成為彼此分離之大致圓形形狀。 Referring to Fig. 7, the radius rf2 of the current-side opening hole Ef2 of the current-side insertion hole Hf before the opening of the opposing surface F is opposite to the detection insertion hole Hs which is paired with the current insertion hole Hf. The sum of the radii rs2 of the end side detection hole opening end Es2 before the surface F opening is smaller than the distance L between the pair of current insertion holes Hf and the center of the detection insertion hole Hs. Thereby, the front end side current hole opening end Ef2 and the front end side detecting hole opening end Es2 are formed in a substantially circular shape separated from each other.
由於藉由此方式形成電流用插通孔Hf及檢測用插通孔Hs，使前端側電流孔開口端Ef2與前端側檢測孔開口端Es2成為各自分離之微細的圓形，因此，藉由前端側電流孔開口端Ef2與前端側檢測孔開口端Es2，可將探針Pf、Ps的前端部精確度良好地導引至基板100的檢查點。 By forming the current insertion hole Hf and the detection insertion hole Hs in this manner, the distal end side current hole opening end Ef2 and the distal end side detection hole opening end Es2 are separated into a fine circular shape, and therefore, the front end is separated by a front end. The side current hole opening end Ef2 and the front end side detecting hole opening end Es2 can guide the tip end portions of the probes Pf and Ps to the inspection point of the substrate 100 with high precision.
此外，電流用插通孔Hf在對向板51之相反面C開口的後端側電流孔開口端Ef1的半徑rf1、及與該電流用插通孔Hf成對之檢測用插通孔Hs在對向板51之相反面C開口的後端側檢測孔開口端Es1的半徑rs1的總和，係比該成對之電流用插通孔Hf及檢測用插通孔Hs之中心間的距離L大，且該成對之後端側電流孔開口端Ef1的端緣與後端側檢測孔開口端Es1的端緣係呈連續者。 Further, the current insertion hole Hf has a radius rf1 of the rear end side current hole opening end Ef1 opened on the opposite surface C of the opposing plate 51, and a detection insertion hole Hs which is paired with the current insertion hole Hf. The sum of the radii rs1 of the rear end side detection hole opening end Es1 of the opposite surface C of the opposite plate 51 is larger than the distance L between the pair of current insertion holes Hf and the center of the detection insertion hole Hs. And the end edge of the end side current hole opening end Ef1 and the end edge of the rear end side detecting hole opening end Es1 are continuous.
藉由此方式形成電流用插通孔Hf及檢測用 插通孔Hs，成對之後端側電流孔開口端Ef1的端緣與後端側檢測孔開口端Es1的端緣係呈連續，且如第7圖所示，一對電流用插通孔Hf及檢測用插通孔Hs的開口端係在相反面C側成為中央較細之葫蘆型。 In this way, the current insertion hole Hf and the detection are formed. The insertion hole Hs is continuous with the end edge of the end hole current hole opening end Ef1 and the end edge of the rear end side detection hole opening end Es1, and as shown in Fig. 7, a pair of current insertion holes Hf The opening end of the detecting insertion hole Hs is a gourd type having a center thinner on the opposite surface C side.
第9圖係顯示對向板51的相反面C之一例的俯視圖。如第9圖所示，當目視觀察相反面C時，可觀察到探針對Pr的探針Pf、Ps所應成對插通的電流用插通孔Hf及檢測用插通孔Hs係相連成葫蘆型。 Fig. 9 is a plan view showing an example of the opposite surface C of the opposing plate 51. As shown in Fig. 9, when the opposite surface C is visually observed, it can be observed that the probes for the Pr probes Pf and Ps are connected to each other by the plug-in holes Hf and the detection insertion holes Hs. Gourd type.
由於必須使探針Pf、Ps的前端部精確度良好地接觸於凸塊B等檢查點，因此，前端側電流孔開口端Ef2的內徑及前端側檢測孔開口端Es2的內徑係設為比導引孔H52、H53及支持孔H61、H62、H63的內徑小。因此，要以維持在使對向板51與導引板52、53層疊後的狀態下，將探針Pf、Ps插通於檢查側支持體5係伴隨著困難性。 Since the tip end portions of the probes Pf and Ps must be accurately contacted with the inspection points such as the bumps B, the inner diameter of the front end side current hole opening end Ef2 and the inner diameter of the front end side detection hole opening end Es2 are set to The inner diameters of the guide holes H52 and H53 and the support holes H61, H62, and H63 are smaller. Therefore, it is difficult to insert the probes Pf and Ps into the inspection-side support 5 in a state in which the opposing plates 51 and the guide plates 52 and 53 are stacked.
因此，例如於更換已劣化的探針Pf、Ps之際或於檢查輔助具4的組裝時等，在將探針Pf、Ps插通於檢查側支持體5之際，當從檢查側支持體5取下對向板51，且在將探針Pf、Ps插通於導引板52、53之後將探針Pf、Ps插通於對向板51而安裝對向板51時，則容易進行探針Pf、Ps的插通。 Therefore, for example, when replacing the deteriorated probes Pf and Ps or when assembling the inspection aid 4, when the probes Pf and Ps are inserted into the inspection-side support 5, when the probes are supported from the inspection side, 5, the opposing plate 51 is removed, and when the probes Pf and Ps are inserted into the guiding plates 52 and 53 and the probes Pf and Ps are inserted into the opposing plate 51 to mount the opposing plate 51, it is easy to perform. The probes Pf and Ps are inserted.
以往，於組裝檢查輔助具之際，作業者係一邊觀察放大鏡一邊以手工作業將極細的探針插通於微細的孔。於此種組裝作業之際，必須將探針插通於前端側支持體的插通孔與後端側支持體的插通孔彼此對應之正確的 插通孔。然而，由於必須將超過1000支之多數支極細探針插通於微細的孔，因此，會有不容易將探針插通於彼此對應之正確的插通孔之問題。 Conventionally, when assembling an inspection aid, an operator inserts a very thin probe into a fine hole by hand, while observing the magnifying glass. In the assembly work, it is necessary to insert the probe into the insertion hole of the front end side support body and the insertion hole of the rear end side support body to correspond to each other. Insert the through hole. However, since it is necessary to insert more than 1000 of the most fine probes into the fine holes, there is a problem that it is not easy to insert the probes into the correct insertion holes corresponding to each other.
另一方面，根據檢查輔助具4，作業者係在以此方式從導引板52、53取下對向板51之狀態下，一邊以放大鏡等觀察對向板51的相反面C，一邊將探針Pf、Ps從相反面C側插通於電流用插通孔Hf及檢測用插通孔Hs。特別是，在檢查側支持體5不具備導引板而僅以對向板51構成時，作業者即使不取下導引板也可恆常地目視觀察相反面C。 On the other hand, according to the inspection aid 4, the operator observes the opposite surface C of the opposing plate 51 with a magnifying glass or the like while removing the opposing plate 51 from the guide sheets 52 and 53 in this manner. The probes Pf and Ps are inserted into the current insertion hole Hf and the detection insertion hole Hs from the opposite surface C side. In particular, when the inspection side support 5 does not include the guide plate and is formed only by the opposing plate 51, the operator can constantly observe the opposite surface C without removing the guide plate.
此時，根據第7圖記載的對向板51，成對的後端側電流孔開口端Ef1的端緣與後端側檢測孔開口端Es1的端緣係呈連續，且一對之電流用插通孔Hf及檢測用插通孔Hs的開口端係在相反面C側成為中央較細之葫蘆型(第9圖)。 At this time, according to the opposing plate 51 shown in Fig. 7, the end edges of the pair of rear end side current hole opening ends Ef1 and the end edges of the rear end side detecting hole opening end Es1 are continuous, and a pair of currents are used. The opening end of the insertion hole Hf and the detection insertion hole Hs is a gourd type which is thinner at the center on the opposite surface C side (Fig. 9).
因此，作業者可藉由目視觀察來確認相連成葫蘆型之電流用插通孔Hf的後端側電流孔開口端Ef1與檢測用插通孔Hs的後端側檢測孔開口端Es1，且可容易地辨識該電流用插通孔Hf與檢測用插通孔Hs為一對探針對Pr的探針Pf、Ps分別應插通的孔。結果，作業者可容易地將探針Pf、Ps插通於正確的電流用插通孔Hf與檢測用插通孔Hs，而使探針Pf、Ps對於檢查側支持體5之插通作業的作業效率提升。 Therefore, the operator can confirm the rear end side current hole opening end Ef1 of the current accommodating insertion hole Hf and the rear end side detecting hole opening end Es1 of the detecting insertion hole Hs by visual observation, and can It is easy to recognize that the current insertion hole Hf and the detection insertion hole Hs are holes through which the probes Pf and Ps of the pair of probe pairs Pr should be inserted. As a result, the operator can easily insert the probes Pf and Ps into the correct current insertion hole Hf and the detection insertion hole Hs, and the probes Pf and Ps can be inserted into the inspection side support 5. Increased work efficiency.
為了要使一對電流用插通孔Hf與檢測用插 通孔Hs之相反面C的開口端成為葫蘆型，並且使其在對向面F的開口部分離，較佳為傾斜角度Rf、Rs在1至5度的範圍內。然而，傾斜角度Rf、Rs不限於1至5度的範圍內，可為未滿1度，亦可超過5度。 In order to make a pair of current insertion holes Hf and detection plugs The open end of the opposite surface C of the through hole Hs is a gourd type, and is separated from the opening of the opposing surface F, and it is preferable that the inclination angles Rf and Rs are in the range of 1 to 5 degrees. However, the inclination angles Rf and Rs are not limited to the range of 1 to 5 degrees, and may be less than 1 degree or more than 5 degrees.
此外，電流用插通孔Hf與檢測用插通孔Hs係具有隨著離開對向面F而擴徑之錐形形狀，亦即具有所謂漏斗形的形狀，因此，藉由將探針Pf、Ps從漏斗之大的入口側插通，會使探針Pf、Ps的前端部由前端側電流孔開口端Ef2及前端側檢測孔開口端Es2所導引，故可探針Pf、Ps的插通作業變得容易。 Further, the current insertion hole Hf and the detection insertion hole Hs have a tapered shape that expands in diameter away from the opposing surface F, that is, has a so-called funnel shape, and therefore, the probe Pf, Ps is inserted from the entrance side of the large funnel, and the tip end portions of the probes Pf and Ps are guided by the front end side current hole opening end Ef2 and the front end side detecting hole opening end Es2, so that the probes Pf and Ps can be inserted. It is easy to work through.
參照第7圖，關於成對之電流用插通孔Hf及檢測用插通孔Hs，屬於朝與對向面F平行的方向切斷之電流用插通孔Hf的剖面之電流孔剖面的半徑rf3、和屬於朝該方向切斷之檢測用插通孔Hs的剖面之檢測孔剖面的半徑rs3的總和係設為：當距其剖面位置之距離對向面的距離在電流用插通孔Hf及檢測用插通孔Hs的深度D之3/4以下的範圍中，係比電流用插通孔Hf與檢測用插通孔Hs之中心間的距離小。 Referring to Fig. 7, the pair of current insertion holes Hf and the detection insertion holes Hs belong to the radius of the current hole section of the cross section of the current insertion hole Hf which is cut in the direction parallel to the opposing surface F. The sum of the radius rs3 of the cross section of the detection hole which is the cross section of the detection insertion hole Hs which is cut in this direction is: the distance from the cross section of the cross section is the current insertion hole Hf In the range of 3/4 or less of the depth D of the detection insertion hole Hs, the distance between the center of the current insertion hole Hf and the detection insertion hole Hs is small.
在半徑rf3與半徑rs3的總和比電流用插通孔Hf與檢測用插通孔Hs之中心間的距離大的深度位置中，並沒有將電流用插通孔Hf與檢測用插通孔Hs之間區隔開的壁部。因此，探針Pf、Ps接觸的可能性會升高。另一方面，若將半徑rf3與半徑rs3的總和設為當其剖面位置之距離對向面F的距離在深度D之3/4以下的範圍中，比 電流用插通孔Hf與檢測用插通孔Hs之中心間的距離小，則將探針Pf、Ps之間區隔開的壁部係設於深度D之3/4以上。藉此，減少探針Pf、Ps接觸之虞。 In the depth position where the sum of the radius rf3 and the radius rs3 is larger than the distance between the center of the current insertion hole Hf and the detection insertion hole Hs, the current insertion hole Hf and the detection insertion hole Hs are not provided. The wall separated by the interval. Therefore, the possibility of contact between the probes Pf and Ps is increased. On the other hand, if the sum of the radius rf3 and the radius rs3 is set to a range in which the distance from the cross-sectional surface F of the cross-sectional position is less than 3/4 of the depth D, the ratio is When the distance between the current insertion hole Hf and the center of the detection insertion hole Hs is small, the wall portion separating the regions between the probes Pf and Ps is set to be 3/4 or more of the depth D. Thereby, the flaws of the probes Pf and Ps are reduced.
接著，針對本發明第2實施形態之基板檢查裝置1’進行說明。基板檢查裝置1’係與基板檢查裝置1同樣以第1圖表示。基板檢查裝置1’與基板檢查裝置1係在檢查輔助具4U’、4L’的構成有所不同。以下，將檢查輔助具4U’、4L’統稱而稱為檢查輔助具4’。第2圖、第3圖所示之檢查輔助具4’係與檢查輔助具4在構成檢查側支持體5’之對向板51’的構成有所不同。由於其他構成係與第1圖所示的基板檢查裝置1相同，故省略其說明，以下，針對本實施形態之特徵點進行說明。 Next, a substrate inspection apparatus 1' according to a second embodiment of the present invention will be described. The substrate inspection apparatus 1' is shown in Fig. 1 in the same manner as the substrate inspection apparatus 1. The substrate inspection device 1' and the substrate inspection device 1 differ in the configuration of the inspection aids 4U' and 4L'. Hereinafter, the inspection aids 4U' and 4L' are collectively referred to as inspection aids 4'. The inspection aid 4' shown in Figs. 2 and 3 differs from the inspection aid 4 in the configuration of the opposing plate 51' constituting the inspection side support 5'. Since the other components are the same as those of the substrate inspection device 1 shown in Fig. 1, the description thereof will be omitted. Hereinafter, the features of the present embodiment will be described.
第10圖係用以說明本發明第2實施形態之檢查輔助具4’的構成例的說明圖。檢查輔助具4’例如由對向板51’與導引板52、53層疊而構成。關於導引板52、53，由於係與檢查輔助具4同樣地構成，故省略其說明。 Fig. 10 is an explanatory view for explaining a configuration example of the inspection aid 4' according to the second embodiment of the present invention. The inspection aid 4' is configured, for example, by laminating the opposing plate 51' and the guide sheets 52, 53. Since the guide plates 52 and 53 are configured in the same manner as the inspection aid 4, the description thereof will be omitted.
第10圖所示之對向板51’係與對向板51在電流用插通孔Hf’及檢測用插通孔Hs’的構成有所不同。電流用插通孔Hf’及檢測用插通孔Hs’係錐形的貫通孔。朝與電流用插通孔Hf’及檢測用插通孔Hs’的軸方向垂直之方向切斷之剖面形狀係大致圓形。電流用插通孔Hf’及檢測用插通孔Hs’的中心軸係相對於對向板51’的板厚方向彼此朝反方向傾斜。因此，電流用插通孔Hf’在對向面F開口之前端側電流孔開口端Ef2’、電流用插通孔Hf’在相反面C 開口之後端側電流孔開口端Ef1’、檢測用插通孔Hs’在對向面F開口之前端側檢測孔開口端Es2’、及檢測用插通孔Hs’在相反面C開口之後端側檢測孔開口端Es1’係成為大致橢圓形狀。 The opposing plate 51' shown in Fig. 10 differs from the opposing plate 51 in the configuration of the current insertion hole Hf' and the detection insertion hole Hs'. The current insertion hole Hf' and the detection insertion hole Hs' are tapered through holes. The cross-sectional shape cut in a direction perpendicular to the axial direction of the current insertion hole Hf' and the detection insertion hole Hs' is substantially circular. The central axis of the current insertion hole Hf' and the detection insertion hole Hs' are inclined in opposite directions with respect to the thickness direction of the opposing plate 51'. Therefore, the current insertion hole Hf' is opened on the opposite surface F before the end side current hole opening end Ef2' and the current insertion hole Hf' are on the opposite side C After the opening, the end side current hole opening end Ef1', the detecting insertion hole Hs' before the opening surface F is opened, the end side detecting hole opening end Es2', and the detecting insertion hole Hs' are opened on the opposite side C. The detection hole opening end Es1' is formed into a substantially elliptical shape.
電流用插通孔Hf’及檢測用插通孔Hs’之彼此的內壁面中之離開另一方插通孔之側的壁面F1、S1，係隨著離開對向面F而朝離開另一方插通孔的方向傾斜。 The wall surfaces F1 and S1 of the inner wall surface of the current insertion hole Hf' and the detection insertion hole Hs' which are apart from the other insertion hole are separated from the other side by leaving the opposite surface F. The direction of the through hole is inclined.
藉此，與第8圖所示之檢查側支持體5同樣，因為探針Pf、Ps之內側成為凹入之方向的撓曲所產生之往外側的探針的膨脹部分，係由藉由壁面F1、S1的傾斜所產生的空間所容納。亦即，壁面F1、S1係隨著離開對向面F而朝離開另一方插通孔的方向傾斜，藉此，探針Pf、Ps變得容易朝內側成為凹入之方向撓曲，進而有助於探針Pf、Ps對於凸塊B之接觸穩定性的提升。 As a result, similarly to the inspection-side support 5 shown in FIG. 8, the inside of the probes Pf and Ps is the expansion portion of the outward-facing probe due to the deflection in the concave direction, and is caused by the wall surface. The space created by the inclination of F1 and S1 is accommodated. In other words, the wall surfaces F1 and S1 are inclined away from the other insertion hole in the direction away from the opposing surface F, whereby the probes Pf and Ps are easily deflected toward the inside in the concave direction, and further Helps the probes Pf, Ps improve the contact stability of the bump B.
進而，電流用插通孔Hf’及檢測用插通孔Hs’之彼此的內壁面中之接近另一方插通孔之側的壁面F2、S2，係沿著對向板51’的板厚方向(相對於對向面F的垂直方向)延伸。 Further, the wall surfaces F2 and S2 of the inner wall surfaces of the current insertion hole Hf' and the detection insertion hole Hs' which are close to the other insertion hole are in the thickness direction of the opposite plate 51'. (extending in the vertical direction of the opposing plane F).
藉此，當探針Pf、Ps欲朝內側成為凸起之方向撓曲時，由壁面F2、S2與探針Pf、Ps產生干擾的結果，會阻擾探針Pf、Ps往內側成為凸起之方向撓曲。結果，可提升使探針Pf、Ps朝內側成為凹入之方向撓曲的確實性，甚至提升探針Pf、Ps對於凸塊B的接觸穩定性提升的確實性。 Therefore, when the probes Pf and Ps are to be deflected toward the inner side, the interference between the wall surfaces F2 and S2 and the probes Pf and Ps may cause the probes Pf and Ps to become convex on the inner side. The direction is deflected. As a result, the reliability of the deflection of the probes Pf and Ps toward the inside can be improved, and the reliability of the contact stability of the probes Pf and Ps with respect to the bump B can be improved.
電流用插通孔Hf’在對向面F開口之前端側電流孔開口端Ef2’的半長軸rf2’、和與該電流用插通孔Hf’成對之檢測用插通孔Hs’在對向面F開口之前端側檢測孔開口端Es2’的半長軸rs2’的總和，係比該成對之電流用插通孔Hf’與檢測用插通孔Hs’之中心間的距離L小。藉此，前端側電流孔開口端Ef2’與前端側檢測孔開口端Es2’係彼此分離。 The half-length axis rf2' of the current-hole opening end Ef2' of the current-side insertion hole Hf' before the opening face F is open, and the detection insertion hole Hs' which is paired with the current insertion hole Hf' The sum of the semi-major axis rs2' of the front end side detection hole opening end Es2' of the opposite surface F opening is the distance L between the pair of current insertion holes Hf' and the center of the detection insertion hole Hs' small. Thereby, the front end side current hole opening end Ef2' and the front end side detecting hole opening end Es2' are separated from each other.
藉由此方式形成電流用插通孔Hf’及檢測用插通孔Hs’，前端側電流孔開口端Ef2’與前端側檢測孔開口端Es2’會彼此分離，且成為長軸方向沿著探針Pf、Ps的撓曲方向之橢圓形。結果，探針Pf、Ps的前端容易藉由撓曲而朝向凸塊B方向，且相對於撓曲方向在垂直方向精確度良好地限制探針Pf、Ps位置。 In this way, the current insertion hole Hf' and the detection insertion hole Hs' are formed, and the front end side current hole opening end Ef2' and the front end side detection hole opening end Es2' are separated from each other, and the long axis direction is along The elliptical shape of the deflection directions of the needles Pf and Ps. As a result, the tips of the probes Pf and Ps are easily deflected toward the bump B direction, and the positions of the probes Pf and Ps are favorably adjusted in the vertical direction with respect to the deflection direction.
此外，電流用插通孔Hf’在對向板51’的相反面C開口之後端側電流孔開口端Ef1’的半長軸rf1’和與該電流用插通孔Hf’成對之檢測用插通孔Hs’在對向板51’的相反面C開口之後端側電流孔開口端Es1’的半長軸rs1’的總和，係比該成對之電流用插通孔Hf’及檢測用插通孔Hs’之中心間的距離L大。 Further, the current insertion hole Hf' is opened on the opposite surface C of the opposite plate 51', and the semi-major axis rf1' of the end side current hole opening end Ef1' and the current insertion hole Hf' are paired with each other. The sum of the semi-major axis rs1' of the end side current hole opening end Es1' after the insertion hole Hs' is opened on the opposite surface C of the opposite plate 51' is compared with the pair of current insertion holes Hf' and the detection The distance L between the centers of the insertion holes Hs' is large.
藉此，可使電流用插通孔Hf’及檢測用插通孔Hs’接近，並且充分地確保使探針Pf、Ps撓曲的空間。 Thereby, the current insertion hole Hf' and the detection insertion hole Hs' can be made close to each other, and the space for deflecting the probes Pf and Ps can be sufficiently ensured.
5‧‧‧檢查側支持體 5‧‧‧Check side support
51‧‧‧對向板 51‧‧‧ opposite board
52、53‧‧‧導引板 52, 53‧‧‧ Guide board
81‧‧‧導體部 81‧‧‧Conductor Department
82‧‧‧絕緣部 82‧‧‧Insulation
511‧‧‧薄壁區域 511‧‧‧thin wall area
512‧‧‧外周部 512‧‧‧The outer part
531‧‧‧薄壁部 531‧‧‧ Thin wall
C‧‧‧相反面 C‧‧‧ opposite side
F‧‧‧對向面 F‧‧‧ opposite
F1、S1‧‧‧壁面 F1, S1‧‧‧ wall
H52、H53‧‧‧導引孔 H52, H53‧‧‧ guiding holes
Hf‧‧‧電流用插通孔 Hf‧‧‧current through hole
Hs‧‧‧檢測用插通孔 Hs‧‧‧detection through hole
Pf‧‧‧探針(電流探針) Pf‧‧‧ probe (current probe)
Pr‧‧‧探針對 Pr‧‧‧ probe pair
Ps‧‧‧探針(檢測探針) Ps‧‧ probe (detection probe)
Claims (10)
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| Application Number | Priority Date | Filing Date | Title |
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| JP2015067100A JP5822042B1 (en) | 2015-03-27 | 2015-03-27 | Inspection jig, substrate inspection apparatus, and manufacturing method of inspection jig |
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| TW201640124A true TW201640124A (en) | 2016-11-16 |
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| TW105104721A TW201640124A (en) | 2015-03-27 | 2016-02-18 | Inspection jig and substrate inspection device |
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| Country | Link |
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| JP (1) | JP5822042B1 (en) |
| TW (1) | TW201640124A (en) |
| WO (1) | WO2016157964A1 (en) |
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| CN110716072A (en) * | 2018-07-13 | 2020-01-21 | 日本电产理德股份有限公司 | Probe, inspection tool, and inspection device |
| CN112424615A (en) * | 2018-07-13 | 2021-02-26 | 日本电产理德股份有限公司 | Inspection jig and inspection device |
| CN112424614A (en) * | 2018-07-18 | 2021-02-26 | 日本电产理德股份有限公司 | Probe, inspection jig, inspection device, and method for manufacturing probe |
| TWI733239B (en) * | 2019-11-04 | 2021-07-11 | 韓商Ｓｄａ有限公司 | Probe card head block |
| TWI814491B (en) * | 2022-07-18 | 2023-09-01 | 財團法人國家實驗研究院 | Detachable protective structure of detection device |
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| JP2020101427A (en) * | 2018-12-21 | 2020-07-02 | 日本電産リード株式会社 | Inspection jig, manufacturing method of inspection jig, and inspection device including inspection jig |
| KR102475883B1 (en) * | 2022-11-09 | 2022-12-08 | 윌테크놀러지(주) | Needle block with variable spacer for adjusting the length of needle tip |
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- 2016-02-18 TW TW105104721A patent/TW201640124A/en unknown
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110716072A (en) * | 2018-07-13 | 2020-01-21 | 日本电产理德股份有限公司 | Probe, inspection tool, and inspection device |
| CN112424615A (en) * | 2018-07-13 | 2021-02-26 | 日本电产理德股份有限公司 | Inspection jig and inspection device |
| CN112424614A (en) * | 2018-07-18 | 2021-02-26 | 日本电产理德股份有限公司 | Probe, inspection jig, inspection device, and method for manufacturing probe |
| TWI733239B (en) * | 2019-11-04 | 2021-07-11 | 韓商Ｓｄａ有限公司 | Probe card head block |
| TWI814491B (en) * | 2022-07-18 | 2023-09-01 | 財團法人國家實驗研究院 | Detachable protective structure of detection device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5822042B1 (en) | 2015-11-24 |
| JP2016186471A (en) | 2016-10-27 |
| WO2016157964A1 (en) | 2016-10-06 |
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