TW201634811A - Pump and coating apparatus - Google Patents

Abstract

The subject of the present invention is to provide a pump and a coating apparatus with excellent durability and capable of discharging highly viscous liquid. To solve the problem, there is provided a pump, which comprises a frame; a flexible member coaxially disposed in the frame for receiving liquid; a cylinder for receiving the working fluid; a plunger inserted into the cylinder in a reciprocating manner for supplying the working fluid toward the gap between the frame and the flexible member and discharging the liquid from the flexible member; and a first sealing member and a second sealing member disposed in an insertion portion of the cylinder into which the plunger is inserted, and connected to the plunger in a sliding manner The first sealing member is disposed at a front position near to the plunger than the second sealing member, and is a sealing member with pressure resistance function. The second sealing member is a sealing member with leak prevention function.

Description

泵浦及塗佈裝置 Pumping and coating device

本發明係關於泵浦及塗佈裝置。 This invention relates to pumping and coating devices.

將光阻劑等的藥液(液體)塗佈於基板之藥液供給裝置為眾所皆知(例如參照專利文獻1)。在此藥液供給裝置，使用柱塞方式的泵浦進行藥液供給。 A chemical liquid supply device that applies a chemical solution (liquid) such as a photoresist to a substrate is known (for example, see Patent Document 1). In the chemical supply device, the supply of the chemical is performed using a plunger pump.

[先行技術文獻] [Advanced technical literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開2008-128059號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2008-128059

但，在前述以往技術中，並未設想以泵浦吐出黏度高的藥液，在泵浦的耐久性上存在問題。因此，期望提供可吐出高黏度的液體之嶄新的泵浦。 However, in the above-described prior art, it is not assumed that the chemical solution having a high viscosity is discharged by pumping, and there is a problem in durability of the pump. Therefore, it is desirable to provide a brand new pump that can eject a highly viscous liquid.

本發明係有鑑於這樣的課題而開發完成的發明，其目的在於提供耐久性佳且可吐出高黏度的液體之泵浦及塗佈裝置。 The present invention has been developed in view of such problems, and an object of the invention is to provide a pump and a coating apparatus for a liquid which is excellent in durability and capable of discharging a high viscosity.

依據本發明的第1態樣，提供一種泵浦，該泵浦係具備有：框體；同軸地配置於前述框體內，用以收容液體之可撓性構件；收容作動流體的壓缸部；對前述壓缸部可往復移動地***，向前述框體與前述可撓性構件之間隙供給前述作動流體並從前述可撓性構件排出前述液體的柱塞；及配置於前述壓缸部中的供前述柱塞***之***部，並與前述柱塞滑接的第1密封構件及第2密封構件，前述第1密封構件為配置於較前述第2密封構件更靠近前述柱塞的前端側位置，並且為具有耐壓功能之密封構件，前述第2密封構件為具有防漏功能的密封構件。 According to a first aspect of the present invention, there is provided a pump comprising: a housing; a flexible member coaxially disposed in the housing for receiving a liquid; and a cylinder portion for housing an operating fluid; a plunger that is reciprocally inserted into the cylinder portion, supplies the operating fluid to a gap between the frame body and the flexible member, and discharges the liquid from the flexible member; and is disposed in the cylinder portion a first sealing member and a second sealing member that are inserted into the insertion portion of the plunger and that are in contact with the plunger, wherein the first sealing member is disposed closer to a distal end side of the plunger than the second sealing member Further, it is a sealing member having a pressure resistance function, and the second sealing member is a sealing member having a leakage preventing function.

若依據第1態樣之泵浦，因在柱塞前端側設有具備耐壓功能的第1密封構件，所以，能夠良好地排出高黏度的液體，且具有優良的耐久性。另外，雖第1密封構件具有優良的耐壓性，但密封性相對地變低。因此，會有作動媒體從第1密封構件的間隙漏出之虞產生，但，即使在此情況，也因具備具有防漏功能的第2密封構件，所以，能夠防止自第1密封構件的間隙漏出的作動媒體洩漏至壓缸部的外側之缺失產生。 According to the first aspect of the pump, since the first sealing member having the pressure resistance function is provided on the distal end side of the plunger, the liquid having high viscosity can be discharged satisfactorily and has excellent durability. Further, although the first sealing member has excellent pressure resistance, the sealing property is relatively low. Therefore, there is a possibility that the actuator medium leaks from the gap of the first sealing member. However, even in this case, since the second sealing member having the leakage preventing function is provided, leakage from the gap of the first sealing member can be prevented. The loss of the actuating medium leaking to the outside of the cylinder portion is generated.

例如，第2密封構件被配置於柱塞前端側的話，則會 有伴隨柱塞的往復動作而振動的第2密封構件使作動媒體產生脈動之虞產生。於是，會有因作動媒體的脈動傳達到液體造成液體的塗膜之品質降低之虞產生。在本發明，由於第1密封構件配置於柱塞前端側，故，可防止作動媒體產生脈動。 For example, if the second sealing member is disposed on the front end side of the plunger, The second sealing member that vibrates in response to the reciprocating motion of the plunger generates a pulsation of the operating medium. As a result, there is a possibility that the quality of the coating film of the liquid is lowered due to the pulsation of the moving medium. In the present invention, since the first sealing member is disposed on the distal end side of the plunger, it is possible to prevent the actuation medium from pulsating.

因此，能夠提供耐久性佳且可吐出高黏度的液體之泵浦。 Therefore, it is possible to provide a pump that is excellent in durability and can discharge a high viscosity liquid.

在前述第1態樣，亦可作成以下結構，亦即具備用來檢測從前述第1密封構件與前述柱塞之間隙朝前述第2密封構件漏出的前述作動流體之量的檢測部。 In the first aspect, the detection unit may be configured to detect the amount of the operating fluid leaking from the gap between the first sealing member and the plunger toward the second sealing member.

若依據此結構，藉由利用作動媒體的漏出量之檢測結果，容易判斷是否需要進行維修之必要性。 According to this configuration, it is easy to determine whether or not maintenance is necessary by using the detection result of the leakage amount of the actuating medium.

在前述第1態樣，亦可作成以下結構，亦即具備有依據前述檢測部的檢測結果，可判定關於泵浦本體的形狀之判定部。 In the first aspect, the determination unit may be configured to determine the shape of the pump body based on the detection result of the detection unit.

若依據此結構，可確實地判定有無需要進行泵浦本體維修之必要性。因此，藉由適當地實施泵浦的維修，能夠事先防止因維修不良造成泵浦故障之缺失產生。 According to this configuration, it is possible to surely determine whether or not it is necessary to perform maintenance of the pump body. Therefore, by appropriately performing maintenance of the pump, it is possible to prevent the occurrence of a pump failure due to poor maintenance in advance.

依據本發明的第2態樣，提供一種塗佈裝置，其具備有對被塗佈物塗佈液體之塗佈部、和對前述塗佈部供給前述液體的液體供給手段，其特徵為：作為前述液體供給手段，使用前述第1態樣之泵浦。 According to a second aspect of the present invention, there is provided a coating apparatus comprising: a coating unit that applies a liquid to an object to be coated; and a liquid supply means that supplies the liquid to the coating unit, and is characterized in that: The liquid supply means uses the pump of the first aspect described above.

若依據第2態樣之塗佈裝置，因具備第1態樣之泵浦，所以，能夠提供可長期間將高黏度的液體塗佈 至被塗佈物之可靠性高的塗佈裝置。 According to the coating apparatus of the second aspect, since the pump of the first aspect is provided, it is possible to provide a liquid having a high viscosity for a long period of time. A coating device having high reliability to the object to be coated.

若依據本發明，耐久性佳且可吐出高黏度的液體。 According to the present invention, it is excellent in durability and can discharge a highly viscous liquid.

1‧‧‧半導體基板(被塗佈物) 1‧‧‧Semiconductor substrate (coated material)

20、50‧‧‧泵浦(液體供給手段) 20, 50‧‧‧ pump (liquid supply means)

22‧‧‧壓缸部 22‧‧‧Cylinder Department

23‧‧‧外殼構件(框體) 23‧‧‧Shell components (frame)

24‧‧‧可撓性管(可撓性構件) 24‧‧‧Flexible tube (flexible member)

30a‧‧‧壓缸孔(柱塞的***部) 30a‧‧‧Cylinder hole (insertion part of plunger)

31‧‧‧活塞(柱塞) 31‧‧‧ piston (plunger)

40‧‧‧前側密封構件(第1密封構件) 40‧‧‧ Front side sealing member (first sealing member)

41‧‧‧後側密封構件(第2密封構件) 41‧‧‧Back side sealing member (2nd sealing member)

51‧‧‧檢測部 51‧‧‧Detection Department

52‧‧‧控制部(判定部) 52‧‧‧Control Department (Decision Department)

100‧‧‧塗佈裝置 100‧‧‧ Coating device

圖1係顯示第1實施形態之塗佈裝置之概略結構的圖。 Fig. 1 is a view showing a schematic configuration of a coating apparatus according to a first embodiment.

圖2係顯示第1實施形態之泵浦之概略結構的圖。 Fig. 2 is a view showing a schematic configuration of a pump according to the first embodiment.

圖3係顯示第1實施形態之泵浦之局部結構的斷面圖。 Fig. 3 is a cross-sectional view showing a partial structure of a pump according to the first embodiment.

圖4係顯示第2實施形態之泵浦之局部結構的斷面圖。 Fig. 4 is a cross-sectional view showing a partial structure of a pump according to a second embodiment.

以下，參照圖面等詳細地說明關於本發明的一實施形態。在本實施形態，以具備作為液體供給手段的泵浦之塗佈裝置為例進行說明。本實施形態的塗佈裝置係用來將黏性較高的光阻劑等的藥液(液體)供給至半導體基板(晶圓)上之裝置。 Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings and the like. In the present embodiment, a coating device including a pump as a liquid supply means will be described as an example. The coating device of the present embodiment is a device for supplying a chemical liquid (liquid) such as a highly viscous photoresist to a semiconductor substrate (wafer).

再者，在以下的說明中所使用的圖面，為了容易了解本發明的特徵，為了說明上的方便，會有將成為特徵的部 分予以放大加以顯示之情況，各構成要件的尺寸比率等不一定會與實際上相同。 In addition, in the drawings used in the following description, in order to facilitate the understanding of the features of the present invention, for the convenience of explanation, there will be a feature that will become a feature. In the case where the points are enlarged and displayed, the dimensional ratios and the like of the respective constituent elements are not necessarily the same as the actual ones.

<第1實施形態> <First embodiment>

圖1係顯示本實施形態之塗佈裝置之概略結構的圖。 Fig. 1 is a view showing a schematic configuration of a coating apparatus of the present embodiment.

如圖1所示，塗佈裝置100具備有：作為液體供給手段之泵浦20；液體供給路11；可封閉(開關)液體供給路11之閥12；對作為被塗佈物之半導體基板1塗佈液體之塗佈部13；及用來保持半導體基板1之載置台14。 As shown in Fig. 1, the coating apparatus 100 includes a pump 20 as a liquid supply means, a liquid supply path 11, a valve 12 that can close (switch) the liquid supply path 11, and a semiconductor substrate 1 as a coated object. a coating portion 13 for applying a liquid; and a mounting table 14 for holding the semiconductor substrate 1.

液體供給路11係將泵浦20與塗佈部13之間連接，從泵浦20側朝塗佈部13供給液體。閥12係設在液體供給路11的途中。液體供給路11包含：將閥12與泵浦20之間連接的上游供給路11a；及將閥12與塗佈部13之間連接的下游供給路11b。作為塗佈部13，可舉出例如墨水噴頭、狹縫噴嘴等。再者，閥12亦可不設在液體供給路11的途中。 The liquid supply path 11 connects the pump 20 and the coating unit 13, and supplies the liquid from the pump 20 side toward the coating unit 13. The valve 12 is provided in the middle of the liquid supply path 11. The liquid supply path 11 includes an upstream supply path 11a that connects the valve 12 and the pump 20, and a downstream supply path 11b that connects the valve 12 and the coating unit 13. Examples of the application portion 13 include an ink jet head, a slit nozzle, and the like. Further, the valve 12 may not be provided in the middle of the liquid supply path 11.

圖2係泵浦20的概略結構圖。圖3係顯示泵浦20的局部大致結構之斷面圖。 2 is a schematic block diagram of the pump 20. 3 is a cross-sectional view showing a partial rough structure of the pump 20.

如圖2所示，泵浦20為具有本體部21與壓缸部22之柱塞式泵浦。本體部21包含有：對壓缸部22，藉由螺栓(未圖示)加以固定之外殼構件(框體)23；及安裝於外殼構件23內的可撓性管(可撓性構件)24。 As shown in FIG. 2, the pump 20 is a plunger pump having a body portion 21 and a cylinder portion 22. The main body portion 21 includes an outer casing member (frame body) 23 that is fixed to the cylinder portion 22 by a bolt (not shown), and a flexible tube (flexible member) that is attached to the outer casing member 23; .

外殼構件23包含有連接於液體供給路11(上游供給路11a)之連接部26。在連接部26，形成有與可 撓性管24連通的流體排出口26a。流體排出口26a係利用液體供給路11，將以作動媒體35自可撓性管24排出的液體供給至塗佈部13側。 The outer casing member 23 includes a connecting portion 26 that is connected to the liquid supply path 11 (upstream supply path 11a). In the connecting portion 26, a The fluid discharge port 26a is connected to the flexible tube 24. The fluid discharge port 26a supplies the liquid discharged from the flexible tube 24 by the actuator medium 35 to the application portion 13 side by the liquid supply path 11.

可撓性管24是由可朝徑方向膨脹收縮自由的彈性構件所構成。可撓性管24以在與外殼構件23之間產生間隙的方式被收容於該外殼構件23內。此間隙是構成藉由作動媒體35流入，讓可撓性管24膨脹收縮之本體側驅動室25。可撓性管24在內部收容有光阻液等的藥液。再者，可撓性管24的結構，亦可為藉由可從未圖示的藥液槽隨時供給藥液，將藥液收容於內部。 The flexible tube 24 is composed of an elastic member that can expand and contract in the radial direction. The flexible tube 24 is housed in the outer casing member 23 so as to create a gap with the outer casing member 23. This gap constitutes a body-side drive chamber 25 that allows the flexible tube 24 to expand and contract by the flow of the actuator medium 35. The flexible tube 24 contains a chemical liquid such as a photoresist inside. Further, the structure of the flexible tube 24 may be such that the chemical liquid can be supplied from the liquid medicine tank (not shown) at any time, and the chemical liquid can be contained therein.

可撓性管24可藉由例如氟樹脂之四氟乙烯-全氟烷基乙烯基醚共聚物(PFA)形成。連接部26也同樣地以PFA所形成。藉由PFA所形成的這些構件不會與光阻劑液產生反應。但，依據藥液的種類，不限PFA，若為可彈性變形的材料，可使用其他的樹脂材料、橡膠材料等的可撓性材料作為可撓性管24的原料。連接部26也同樣地可使用其他的樹脂材料、金屬材料等作為原料加以使用。 The flexible tube 24 can be formed by, for example, a fluororesin tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA). The connecting portion 26 is also formed in the same manner as a PFA. These components formed by PFA do not react with the photoresist liquid. However, depending on the type of the chemical liquid, PFA is not limited, and if it is an elastically deformable material, a flexible material such as another resin material or rubber material may be used as a raw material of the flexible tube 24. Similarly, the connection portion 26 can be used as a raw material using another resin material, metal material or the like.

壓缸部22具備有：壓缸主體30；及對形成於壓缸主體30的壓缸孔(柱塞的***部)30a，可朝軸方向自由往復移動地組裝之活塞(柱塞)31。壓缸部22具有用來使活塞31進行往復運動的驅動裝置32。 The cylinder portion 22 includes a cylinder main body 30 and a piston (plunger) 31 that is assembled to the cylinder bore (plug insertion portion) 30a of the cylinder main body 30 so as to be reciprocally movable in the axial direction. The cylinder portion 22 has a drive unit 32 for reciprocating the piston 31.

壓缸部22在活塞31的前端面與壓缸孔30a的底面30b之間形成有活塞側驅動室33。壓缸部22藉由 形成於壓缸主體30的連通孔34，使壓缸側驅動室33連通於本體部21側的本體側驅動室25。 The cylinder portion 22 is formed with a piston side drive chamber 33 between the front end surface of the piston 31 and the bottom surface 30b of the cylinder bore 30a. Cylinder portion 22 by The communication hole 34 formed in the cylinder main body 30 communicates the cylinder side drive chamber 33 with the main body side drive chamber 25 on the main body portion 21 side.

本體側驅動室25及壓缸側驅動室33，封裝有驅動用作動媒體35。作動媒體35是由例如非壓縮性媒體所構成。驅動室25、33內的作動媒體35是經由連通孔34相連通。 The main body side drive chamber 25 and the cylinder side drive chamber 33 are packaged with a drive for use as the movable medium 35. The actuating medium 35 is composed of, for example, an incompressible medium. The actuating medium 35 in the drive chambers 25, 33 is in communication via the communication hole 34.

在本實施形態，壓缸部22是在壓缸主體30與活塞31之間具備有前側密封構件(第1密封構件)40、和後側密封構件(第2密封構件)41。 In the present embodiment, the cylinder portion 22 is provided with a front side seal member (first seal member) 40 and a rear side seal member (second seal member) 41 between the cylinder main body 30 and the piston 31.

前側密封構件40及後側密封構件41是***於壓缸主體30與活塞31之間。具體而言，前側密封構件40及後側密封構件41是藉由***於壓缸孔30a的內周面，來與活塞31的外周面滑接。 The front side seal member 40 and the rear side seal member 41 are inserted between the cylinder main body 30 and the piston 31. Specifically, the front side seal member 40 and the rear side seal member 41 are slidably coupled to the outer peripheral surface of the piston 31 by being inserted into the inner peripheral surface of the cylinder bore 30a.

前側密封構件40是配置於較後側密封構件41更靠近活塞31的前端側，並且由具有耐壓功能的環狀密封構件所構成。後側密封構件41是由具有防漏功能的環狀密封構件所構成。 The front side seal member 40 is disposed closer to the front end side of the piston 31 than the rear side seal member 41, and is constituted by an annular seal member having a pressure resistance function. The rear side sealing member 41 is constituted by an annular sealing member having a leakage preventing function.

後側密封構件41是由例如橡膠等的硬度低之材料所構成，具有例如0.5~1.0MPa左右之耐壓性。另外，前側密封構件40是由具有較後側密封構件41充分高的耐壓性例如20MPa左右之樹脂材料所構成。 The rear side sealing member 41 is made of a material having a low hardness such as rubber, and has a pressure resistance of, for example, about 0.5 to 1.0 MPa. In addition, the front side sealing member 40 is made of a resin material having a pressure resistance sufficiently higher than that of the rear side sealing member 41, for example, about 20 MPa.

依據這樣的結構，泵浦20若當使活塞31朝壓缸孔30a的底面30b前進移動時，會使壓缸側驅動室33收縮。此時，壓缸側驅動室33內的作動媒體35流入 至本體側驅動室25內。可撓性管24被作動媒體35所按壓而收縮。藉此，被收容在可撓性管24內部的液體從流體排出口26a排出至液體供給路11(上游供給路11a)。 According to such a configuration, when the pump 20 moves the piston 31 toward the bottom surface 30b of the cylinder bore 30a, the cylinder side drive chamber 33 is contracted. At this time, the actuation medium 35 in the cylinder side drive chamber 33 flows in. It is inside the body side drive chamber 25. The flexible tube 24 is pressed by the actuator 35 to contract. Thereby, the liquid accommodated in the inside of the flexible tube 24 is discharged from the fluid discharge port 26a to the liquid supply path 11 (upstream supply path 11a).

另外，當使活塞31朝後退方向移動時，藉由壓缸側驅動室33膨脹，使得該本體側驅動室25內的作動媒體35流入至壓缸側驅動室33內，解除藉由作動媒體35之對可撓性管24的按壓。 When the piston 31 is moved in the backward direction, the cylinder side drive chamber 33 is expanded, so that the actuating medium 35 in the main body side drive chamber 25 flows into the cylinder side drive chamber 33, and the actuating medium 35 is released. The pressing of the flexible tube 24 is performed.

依據這樣的結構，泵浦20係當壓缸孔30a內的活塞31往復移動時，藉由封入於驅動室25、33內的作動媒體35之移動，使得本體側驅動室25膨脹收縮，與該本體側驅動室25的膨脹收縮連動，閥12進行開關作動，藉此可經由液體供給路11將藥液供給至塗佈部13。 According to such a configuration, when the piston 31 in the cylinder bore 30a reciprocates, the pump 20 expands and contracts the body-side drive chamber 25 by the movement of the actuating medium 35 enclosed in the drive chambers 25, 33. The expansion and contraction of the main body side drive chamber 25 are interlocked, and the valve 12 is operated by switching, whereby the chemical liquid can be supplied to the coating portion 13 via the liquid supply path 11.

又，從在壓缸側驅動室33內成為高壓之作動媒體35，壓力作用到配置於活塞31的前端側之前側密封構件40。在本實施形態，由於前側密封構件40具有耐壓功能，故，能夠抑制因該前側密封構件40的磨損、劣化等所引起之密封性的劣化速度。 Further, from the actuating medium 35 which is a high pressure in the cylinder side drive chamber 33, the pressure acts on the front side sealing member 40 disposed on the distal end side of the piston 31. In the present embodiment, since the front side seal member 40 has a pressure resistance function, it is possible to suppress the deterioration rate of the sealing property due to abrasion, deterioration, and the like of the front side seal member 40.

又，一般具有耐壓功能的前側密封構件40在與活塞31滑接時，對活塞的表面形狀之追隨性較低，因此，密封功能相對地變低。因此，作動媒體35的一部分會沿著前側密封構件40與壓缸孔30a之間隙，朝壓缸孔30a的外側方向漏出。 Further, when the front side seal member 40 having a pressure resistance function is slidably attached to the piston 31, the followability to the surface shape of the piston is low, and therefore the sealing function is relatively low. Therefore, a part of the actuator medium 35 leaks toward the outside of the cylinder bore 30a along the gap between the front side seal member 40 and the cylinder bore 30a.

相對於此，本實施形態的泵浦20，因在作動媒體35漏出的方向，具有具備防漏功能的後側密封構件 41，所以，沿著前側密封構件40與壓缸孔30a之間隙而朝壓缸孔30a的外側方向漏出之作動媒體35會被後側密封構件41所密封，可防止其朝壓缸孔30a的外側漏出。 On the other hand, the pump 20 of the present embodiment has a rear side sealing member having a leakage preventing function in a direction in which the operating medium 35 leaks. Therefore, the actuating medium 35 leaking toward the outside of the cylinder bore 30a along the gap between the front side seal member 40 and the cylinder bore 30a is sealed by the rear side seal member 41, preventing it from being directed toward the cylinder bore 30a. The outside leaks out.

在此，在將前側密封構件40及後側密封構件41的配置位置相互更換之情況，亦即，將具有防漏功能的密封構件配置於活塞31的前端側，將具有耐壓功能的密封構件配置於活塞31之與前端相反側的位置之情況，當活塞31進行往復移動時，由於具有防漏功能之密封構件的耐壓性低，故會產生振動。於是，在具有防漏功能的密封構件所產生的振動會傳達到作動媒體35，會有造成使該作動媒體35發生脈動之虞產生。 Here, when the arrangement positions of the front side sealing member 40 and the rear side sealing member 41 are mutually replaced, that is, the sealing member having the leakage preventing function is disposed on the distal end side of the piston 31, and the sealing member having the pressure resistance function is provided. In the case where the piston 31 is disposed at a position opposite to the front end, when the piston 31 reciprocates, the pressure resistance of the sealing member having the leakage preventing function is low, so that vibration is generated. Therefore, the vibration generated by the sealing member having the leakage preventing function is transmitted to the actuating medium 35, which may cause the pulsation of the actuating medium 35.

當產生了脈動之作動媒體35供給至本體側驅動室25時，則脈動亦會傳達至被作動媒體35所按壓的可撓性管24內之藥液，造成塗佈部13塗佈於半導體基板1上的藥液之塗膜表面形成波浪，造成塗膜的品質大幅度地降低。 When the pulsating actuating medium 35 is supplied to the main body side driving chamber 25, the pulsation is also transmitted to the chemical liquid in the flexible tube 24 pressed by the actuating medium 35, and the coating portion 13 is applied to the semiconductor substrate. The surface of the coating film of the chemical liquid on 1 forms a wave, and the quality of the coating film is greatly lowered.

為了解決這樣的問題產生，在本實施形態的泵浦20，如上述般，採用將具有耐壓功能的密封構件配置於活塞前端側，將用來密封漏出的作動媒體35之具有防漏功能的密封構件配置於柱塞基部側的結構，因此，如上述般，能夠防止作動媒體35產生脈動。因此，不會有因作動媒體35的脈動所造成的藥液之塗膜品質降低的情況產生。 In order to solve such a problem, in the pump 20 of the present embodiment, as described above, the sealing member having the pressure resistance function is disposed on the tip end side of the piston, and the operation medium 35 for sealing the leakage is provided with a leakproof function. Since the sealing member is disposed on the base side of the plunger, the pulsation of the actuating medium 35 can be prevented as described above. Therefore, there is no possibility that the coating film quality of the chemical liquid is lowered due to the pulsation of the moving medium 35.

如以上所述，若依據本實施形態之泵浦20， 因在活塞前端側具備具有耐壓功能的前側密封構件40，所以，能夠良好地排出高黏度藥液，且能在長期間發揮優良的密封性。 As described above, according to the pump 20 of the embodiment, Since the front side sealing member 40 having a pressure resistance function is provided on the tip end side of the piston, the high-viscosity chemical liquid can be discharged favorably, and excellent sealing performance can be exhibited for a long period of time.

又，在本實施形態，藉由組合前側密封構件40及後側密封構件41，既可藉由前側密封構件40發揮耐壓功能，又可藉由後側密封構件41防止作動媒體35朝壓缸外部漏出。 Further, in the present embodiment, by combining the front side sealing member 40 and the rear side sealing member 41, the front side sealing member 40 can exhibit the withstand voltage function, and the rear side sealing member 41 can prevent the actuating medium 35 from facing the pressure cylinder. External leakage.

且，藉由將前側密封構件40及後側密封構件41依序從活塞前端側配置，能夠抑制在作動媒體35產生脈動。 By arranging the front side sealing member 40 and the rear side sealing member 41 in order from the front end side of the piston, it is possible to suppress the occurrence of pulsation in the actuating medium 35.

因此，若依據本實施形態的塗佈裝置100，因具備耐久性佳且可吐出高黏度的液體之前述泵浦20，所以，能夠提供可在長期間對半導體基板1塗佈高黏度藥液之可靠性高的裝置。 Therefore, according to the coating apparatus 100 of the present embodiment, since the pump 20 having a high durability and capable of discharging a highly viscous liquid is provided, it is possible to provide a high-viscosity liquid chemical solution for the semiconductor substrate 1 for a long period of time. A highly reliable device.

<第2實施形態> <Second embodiment>

接著，說明關於第2實施形態之泵浦的結構。圖4係顯示本實施形態之泵浦之局部大致結構的斷面圖。再者，對與第1實施形態共同的結構及構件賦予相同符號，並省略或簡單化其說明。 Next, the structure of the pump according to the second embodiment will be described. Fig. 4 is a cross-sectional view showing a partial schematic configuration of the pump of the embodiment. The same components and members as those of the first embodiment are denoted by the same reference numerals, and their description will be omitted or simplified.

如圖4所示，本實施形態的泵浦50具備有：可檢測出作動媒體35的檢測部51；及控制泵浦50的各構成構件的驅動之控制部52。檢測部51是用來檢測漏出於前側密封構件40及後側密封構件41之間的作動媒體35之量。控制部52係依據檢測部51的檢測結果，用來 判定作為泵浦本體的資訊，例如可否需要進行關於泵浦的維修之必要性。 As shown in FIG. 4, the pump 50 of the present embodiment includes a detecting unit 51 that can detect the operating medium 35, and a control unit 52 that controls driving of each component of the pump 50. The detecting portion 51 is for detecting the amount of the operating medium 35 leaking between the front side sealing member 40 and the rear side sealing member 41. The control unit 52 is used based on the detection result of the detecting unit 51. It is determined whether information on the pump body is necessary, for example, whether maintenance of the pump is necessary.

在本實施形態，檢測部51係以與活塞31的外周面滑接的方式配置在凹部43，該凹部43形成於用來保持前側密封構件40及後側密封構件41的密封保持部42之內壁面。凹部43是作為收容漏出於前側密封構件40與後側密封構件41之間的作動媒體35之緩衝室來發揮功能。 In the present embodiment, the detecting portion 51 is disposed in the concave portion 43 so as to be in contact with the outer peripheral surface of the piston 31, and the concave portion 43 is formed in the seal holding portion 42 for holding the front side sealing member 40 and the rear side sealing member 41. Wall. The recessed portion 43 functions as a buffer chamber that accommodates the operating medium 35 that leaks between the front side sealing member 40 and the rear side sealing member 41.

密封保持部42的內壁面構成壓缸孔30a的一部分。凹部43沿著密封保持構件42的內壁面之周方向形成。再者，凹部43亦可形成於密封保持構件42的內壁面之周方向全區域範圍。 The inner wall surface of the seal holding portion 42 constitutes a part of the cylinder hole 30a. The concave portion 43 is formed along the circumferential direction of the inner wall surface of the seal holding member 42. Further, the recessed portion 43 may be formed over the entire area of the inner wall surface of the seal holding member 42 in the circumferential direction.

在本實施形態的泵浦50，亦藉由後側密封構件41將沿著前側密封構件40與壓缸孔30a之間隙朝壓缸孔30a的外側方向漏出之作動媒體35予以密封，能夠防止漏出至壓缸部22的外側。 In the pump 50 of the present embodiment, the operation medium 35 that leaks along the gap between the front side seal member 40 and the cylinder bore 30a toward the outside of the cylinder bore 30a is sealed by the rear side seal member 41, thereby preventing leakage. It is to the outside of the cylinder portion 22.

又，當漏出於前側密封構件40與壓缸孔30a之間隙的作動媒體35超過預定量時，會有超過後側密封構件41的密封性能，因作動媒體35漏出至壓缸部22的外側，最壞的情況，會導致泵浦50故障之虞產生。因此，為了預先防止泵浦50發生故障，期望在預定量的作動媒體35漏出的時間點進行泵浦50的維修作業。 Further, when the actuating medium 35 leaking from the gap between the front side sealing member 40 and the cylinder hole 30a exceeds a predetermined amount, the sealing performance of the rear side sealing member 41 is exceeded, and the actuator medium 35 leaks to the outside of the cylinder portion 22, In the worst case, it will cause the pump 50 to fail. Therefore, in order to prevent the pump 50 from malfunctioning in advance, it is desirable to perform maintenance work of the pump 50 at a time point when a predetermined amount of the operating medium 35 leaks.

相對於此，在本實施形態的泵浦50，依據來自於檢測部51的檢測結果，控制部52可判定作動媒體 35漏出至前側密封構件40與壓缸孔30a之間隙的漏出量。因此，當作動媒體35的漏出量到達預定值時，控制部52可簡單且確實地判定泵浦50有無需要進行維修的必要性。例如，在控制部52判定泵浦50需要進行維修之情況，通知未圖示的警報，或對未圖示的顯示部進行需要進行維修的顯示即可。藉此，對操作員，能使其容易認識泵浦50的維修時期，藉由適當地實施維修，能夠事先防止因維修不良所造成之泵浦50產生故障的缺失產生。 On the other hand, in the pump 50 of the present embodiment, the control unit 52 can determine the actuating medium based on the detection result from the detecting unit 51. 35 leaks out to the gap between the front side seal member 40 and the cylinder bore 30a. Therefore, when the leakage amount of the motion medium 35 reaches a predetermined value, the control unit 52 can easily and surely determine whether or not the pump 50 needs to be repaired. For example, when the control unit 52 determines that the pump 50 needs to be repaired, it may notify an alarm (not shown) or perform a display requiring maintenance on a display unit (not shown). Thereby, the operator can easily recognize the maintenance period of the pump 50, and by appropriately performing the maintenance, it is possible to prevent the occurrence of the malfunction of the pump 50 due to the maintenance failure.

本發明係不限於前述實施形態，在從申請專利範圍及說明書全體可讀取之發明要旨或不超出技術思想之範圍內可適宜進行變更。例如，在前述實施形態，作為對塗佈部13供給光阻劑(液體)之供給手段，以適用本發明的泵浦之情況為例進行了說明，但，要供給的液體之種類不限於光阻劑，若為黏性較高且需要壓送之液體，則可適用各種液體。亦即，本發明的泵浦不受液體的種類所影響，若為用來壓送高黏性的液體材料即適用於各種高黏性的液體材料。 The present invention is not limited to the embodiments described above, and may be modified as appropriate within the scope of the invention and the scope of the invention. For example, in the above-described embodiment, the case where the pumping agent (liquid) is supplied to the coating unit 13 is exemplified by the case where the pump of the present invention is applied. However, the type of the liquid to be supplied is not limited to light. Resin, if it is a highly viscous liquid that needs to be pumped, it can be applied to various liquids. That is, the pump of the present invention is not affected by the type of liquid, and is suitable for various highly viscous liquid materials if it is used to press a highly viscous liquid material.

11a‧‧‧上游供給路 11a‧‧‧Upstream supply road

20‧‧‧泵浦(液體供給手段) 20‧‧‧Pump (liquid supply means)

21‧‧‧本體部 21‧‧‧ Body Department

22‧‧‧壓缸部 22‧‧‧Cylinder Department

23‧‧‧外殼構件(框體) 23‧‧‧Shell components (frame)

24‧‧‧可撓性管(可撓性構件) 24‧‧‧Flexible tube (flexible member)

25‧‧‧本體側驅動室 25‧‧‧ Body side drive room

26‧‧‧連接部 26‧‧‧Connecting Department

26a‧‧‧流體排出口 26a‧‧‧ Fluid discharge

30‧‧‧壓缸主體 30‧‧‧Cylinder body

30a‧‧‧壓缸孔(柱塞的***部) 30a‧‧‧Cylinder hole (insertion part of plunger)

30b‧‧‧底面 30b‧‧‧ bottom

31‧‧‧活塞(柱塞) 31‧‧‧ piston (plunger)

32‧‧‧驅動裝置 32‧‧‧ drive

33‧‧‧壓缸側驅動室 33‧‧‧Cylinder side drive room

35‧‧‧作動媒體 35‧‧‧Active media

40‧‧‧前側密封構件(第1密封構件) 40‧‧‧ Front side sealing member (first sealing member)

41‧‧‧後側密封構件(第2密封構件) 41‧‧‧Back side sealing member (2nd sealing member)

Claims (4)

一種泵浦，係具備：框體；同軸地配置於前述框體內，用來收容液體之可撓性構件；收容作動流體之壓缸部；對前述壓缸部可往復移動地***，對前述框體與前述可撓性構件之間隙供給前述作動流體，再從前述可撓性構件排出前述液體之柱塞；及配置於前述壓缸部之供前述柱塞***的***部，並與前述柱塞滑接之第1密封構件及第2密封構件，前述第1密封構件為配置於較前述第2密封構件更靠近前述柱塞的前端側位置，並且為具有耐壓功能之密封構件，前述第2密封構件為具有防漏功能的密封構件。 A pump includes: a casing; a flexible member coaxially disposed in the casing for accommodating a liquid; a cylinder portion for accommodating an actuating fluid; and the reciprocating insertion of the cylinder portion, the frame a plunger that supplies the fluid to the gap between the body and the flexible member, and discharges the liquid from the flexible member; and an insertion portion that is disposed in the cylinder portion and that is inserted into the plunger, and the plunger The first sealing member and the second sealing member that are slidably disposed, the first sealing member is disposed closer to the distal end side of the plunger than the second sealing member, and is a sealing member having a pressure resistance function, and the second sealing member The sealing member is a sealing member having a leakproof function. 如申請專利範圍第1項所記載之泵浦，其中，還具備用來檢測從前述第1密封構件與前述柱塞之間隙朝前述第2密封構件側漏出的前述作動流體之量的檢測部。 The pump according to the first aspect of the invention, further comprising: a detecting unit for detecting an amount of the operating fluid leaking from a gap between the first sealing member and the plunger toward the second sealing member side. 如申請專利範圍第2項所記載之泵浦，其中，還具備有依據前述檢測部的檢測結果，判定關於泵浦本體的形狀之判定部。 In the pump according to the second aspect of the invention, the determination unit for determining the shape of the pump body based on the detection result of the detecting unit is further provided. 一種塗佈裝置，係具備對被塗佈物塗佈液體的塗佈部、及對前述塗佈部供給前述液體的液體供給手段，其特徵為： 作為前述液體供給手段，使用如申請專利範圍第1至3項中任一項之泵浦。 A coating apparatus comprising: a coating unit that applies a liquid to an object to be coated; and a liquid supply means that supplies the liquid to the coating unit, and is characterized in that: As the liquid supply means, the pump of any one of the first to third aspects of the patent application is used.