TW201625930A - A vacuum absorbing device, a material sheet detecting apparatus, and a material sheet transfer apparatus comprising the same - Google Patents
A vacuum absorbing device, a material sheet detecting apparatus, and a material sheet transfer apparatus comprising the same Download PDFInfo
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- TW201625930A TW201625930A TW104100048A TW104100048A TW201625930A TW 201625930 A TW201625930 A TW 201625930A TW 104100048 A TW104100048 A TW 104100048A TW 104100048 A TW104100048 A TW 104100048A TW 201625930 A TW201625930 A TW 201625930A
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Abstract
Description
本發明係有關於一種真空吸平裝置、含其的料片檢測設備及料片移載設備。 The present invention relates to a vacuum suction device, a tablet inspection device including the same, and a material transfer device.
自動光學檢查(Automated Optical Inspection,AOI)泛指運用機器視覺做為檢測標準的技術，比起習知的人眼檢測具有高速高精密度的優點。應用層面可涵蓋至高科技產業之研發、製造品管，以至國防、民生、醫療、環保、電力...或其他的相關領域。 Automated Optical Inspection (AOI) refers to the use of machine vision as the detection standard technology, which has the advantages of high speed and high precision compared with the conventional human eye detection. The application level can cover the research and development, manufacturing quality management of high-tech industries, as well as national defense, people's livelihood, medical care, environmental protection, electric power... or other related fields.
在自動光學檢測的領域中，欲對料片進行檢測，常見的方式係藉由將料片裝設於載台上，藉由抽真空的手段對該載台提供負壓，藉由載台上之氣孔將料片吸附於載台上。然而，部分特殊材質的料片經由氣孔吸持後，於料片之邊緣常會產生翹曲之問題，導致影像偵測時所拍攝之料片影像常有失真的情形。 In the field of automatic optical inspection, in order to detect the web, a common method is to mount the material on the stage by vacuuming the negative pressure on the stage by means of vacuuming. The air holes adsorb the web on the stage. However, after the material of some special materials is sucked through the air hole, the problem of warpage often occurs at the edge of the material, which causes the image of the film taken during image detection to be often distorted.
是以，為解決上述問題，中華民國第M449343號專利係揭示一種用於平整料片的真空吸平裝置，該真空吸平裝置主要具有氣室、載台、及遮蔽治具。所述的氣室包含氣體導流面及 真空吸引單元，所述的載台具有複數第一吸孔。其中載台設置於氣室上而相鄰於氣體導流面，且第一吸孔連通於氣體導流面。所述的遮蔽治具具有承載區。其中遮蔽治具設置於載台上，承載區係對應料片之面積設置，而用以承載料片。遮蔽治具遮蔽一部分之第一吸孔，承載區具有複數第二吸孔，第二吸孔係對應於另一部份之第一吸孔而連通於氣體導流面，真空吸引單元對氣體導流面抽氣，而吸持承載區上之料片。藉由上述的配置，可增進真空吸附設備整平料片的效果，解決習知容易發生料片邊緣翹曲之問題。 Therefore, in order to solve the above problem, the Patent No. M449343 of the Republic of China discloses a vacuum suction device for flattening a web, which mainly has a gas chamber, a stage, and a shielding jig. The gas chamber includes a gas guiding surface and A vacuum suction unit having a plurality of first suction holes. The carrier is disposed on the air chamber adjacent to the gas guiding surface, and the first suction hole is connected to the gas guiding surface. The shielding fixture has a bearing area. The shielding fixture is disposed on the stage, and the carrying area is disposed corresponding to the area of the web to support the web. The shielding fixture shields a portion of the first suction hole, the bearing area has a plurality of second suction holes, and the second suction hole corresponds to the first suction hole of the other portion and communicates with the gas guiding surface, and the vacuum suction unit controls the gas guide The flow surface is evacuated while holding the web on the load bearing area. With the above configuration, the effect of the flattening web of the vacuum adsorption device can be enhanced, and the problem that the edge of the web is warped is easily solved.
惟，上述的真空吸平裝置雖可有效的解決料片邊緣翹曲的問題，然而，所述的遮蔽治具常需要針對不同尺寸的料片個別進行客製化的設計，於實務上操作時常有不便之處。 However, although the above-mentioned vacuum suction device can effectively solve the problem of warping of the edge of the web, the masking fixture often needs to be customized for different sizes of materials, and is often operated in practice. There is inconvenience.
本發明的目的，在於解決習知技術中對應不同料片需客製化不同遮蔽治具而導致於實務操作上常有不便的問題。 The object of the present invention is to solve the problem that in the prior art, different masks need to be customized for different masking fixtures, which often causes inconvenience in practical operation.
本發明係提供一種真空吸平裝置，係用以吸附並整平料片，該真空吸平裝置具有一吸附載台，一真空氣室，以及一可調整治具。該吸附載台具有一真空吸附平面，以及複數個設置於該真空吸附平面上的吸孔。該真空氣室係設置於該吸附載台相對該真空吸附平面的另一側，該真空氣室具有一相鄰於該吸附載台的吸孔一側的氣體導流面，以及一或複數個對該氣體導流面提供負壓的真空吸引單元。該可調整治具具有對應設置於該真空吸 附平面或設置於該氣體導流面一側的第一遮板及第二遮板，該第一遮板可藉由第一調整機構調整並沿第一方向移動，該第二遮板可藉由第二調整機構調整並沿第二方向移動，遮蔽該真空吸附平面上的吸孔，以界定一料片吸附區域。 The invention provides a vacuum suction device for adsorbing and leveling a web, the vacuum suction device having an adsorption stage, a vacuum chamber, and an adjustable fixture. The adsorption stage has a vacuum adsorption plane and a plurality of suction holes disposed on the vacuum adsorption plane. The vacuum chamber is disposed on the other side of the adsorption stage opposite to the vacuum adsorption plane, the vacuum chamber has a gas guiding surface adjacent to the suction hole side of the adsorption stage, and one or more A vacuum suction unit that provides a negative pressure to the gas guiding surface. The adjustable jig has a corresponding setting on the vacuum suction a first plane and a second shutter disposed on a side of the gas guiding surface, the first shutter can be adjusted by the first adjusting mechanism and moved in the first direction, and the second shutter can be borrowed Adjusted by the second adjustment mechanism and moved in the second direction to shield the suction holes on the vacuum adsorption plane to define a web adsorption region.
進一步地，該第一遮板及該第二遮板係分別相對地設置於該吸附載台的該真空吸附平面及該氣體導流面的一側。 Further, the first shutter and the second shutter are respectively disposed opposite to the vacuum adsorption plane of the adsorption stage and one side of the gas guiding surface.
進一步地，該第一調整機構係具有一或複數個固定該第一遮板的定位機構，一設置於該定位機構一側以限制該定位機構沿一路徑移動的軌道部，以及一設置於該軌道部一側以帶動該定位機構沿該路徑移動的驅動裝置。 Further, the first adjusting mechanism has one or a plurality of positioning mechanisms for fixing the first shielding plate, a rail portion disposed on one side of the positioning mechanism to restrict the positioning mechanism to move along a path, and a One side of the rail portion drives a driving device along which the positioning mechanism moves.
進一步地，該軌道部係成對設置於該第一遮板的兩側，該定位機構係具有設於二該軌道上的定位塊，以及一設置於成對的該定位塊間並鎖固該第一遮板的固定板。 Further, the rail portions are disposed in pairs on both sides of the first shutter, the positioning mechanism has a positioning block disposed on the two rails, and a pair is disposed between the pair of positioning blocks and locked The fixing plate of the first shutter.
進一步地，該第二調整機構係具有一或複數個固定該第二遮板的定位機構，一設置於該定位機構一側以限制該定位機構沿一路徑移動的軌道部，以及一設置於該軌道部一側以帶動該定位機構沿該路徑移動的驅動裝置。 Further, the second adjusting mechanism has one or a plurality of positioning mechanisms for fixing the second shielding plate, a rail portion disposed on one side of the positioning mechanism to restrict the positioning mechanism to move along a path, and a One side of the rail portion drives a driving device along which the positioning mechanism moves.
進一步地，該軌道部係成對設置於該第二遮板的兩側，該定位機構係具有設於二該軌道上的定位塊，以及一設置於成對的該定位塊間並鎖固該第二遮板的固定板。 Further, the track portions are disposed in pairs on both sides of the second shutter, the positioning mechanism has a positioning block disposed on the two tracks, and a pair is disposed between the pair of positioning blocks and locked The fixing plate of the second shutter.
進一步地，該驅動裝置具有至少二個以上的皮帶輪，一繞設於該皮帶輪上並供該定位機構一端固定的皮帶，以及 一帶動該皮帶輪樞轉的馬達。 Further, the driving device has at least two pulleys, a belt wound around the pulley and fixed at one end of the positioning mechanism, and A motor that drives the pulley to pivot.
本發明之另一目的，在於提供一種料片檢測設備，係配置有如上所述的真空吸平裝置，該料片檢測設備包含有一輸料履帶，一影像擷取裝置，以及該真空吸平裝置。該輸料履帶供該料片沿一傳送路徑移動。該輸料履帶具有一設置於該輸料履帶一或二側，帶動該輸料履帶前進的轉動輥，以及複數個佈設於該輸料履帶表面上的導風孔。該影像擷取裝置係設置於該輸料履帶的一側，用以拍攝一取像區域上的該料片。其中，所述的真空吸平裝置係設置於該輸料履帶相對該影像擷取裝置的另一側，於該料片透過該輸料履帶移動至該取像區域時，該真空吸平裝置係吸平該料片以供另一側的該影像擷取裝置拍攝。 Another object of the present invention is to provide a tablet detecting device which is provided with a vacuum suction device as described above, the tablet detecting device comprising a feeding crawler, an image capturing device, and the vacuum suction device . The feed track moves the web along a transport path. The delivery track has a rotating roller disposed on one or both sides of the conveying track to drive the feeding track, and a plurality of air guiding holes disposed on the surface of the conveying track. The image capturing device is disposed on one side of the conveying track for capturing the web on an image capturing area. Wherein the vacuum squeezing device is disposed on the other side of the feeding crawler relative to the image capturing device, and the vacuum absorbing device is configured when the web moves through the feeding crawler to the image capturing region The web is sucked for photographing by the image capturing device on the other side.
進一步地，該轉動輥係具有一供該輸料履帶繞設的滾輪，一設置於該滾輪中以帶動該滾輪旋轉的樞軸，以及一設置於該樞軸一側以帶動該樞軸旋轉的驅動裝置。 Further, the rotating roller has a roller for winding the feeding track, a pivot disposed in the roller to drive the roller to rotate, and a pivoting side disposed on the pivot to drive the pivoting Drive unit.
進一步地，該吸孔的面積係大於該導風孔的面積。 Further, the area of the suction hole is larger than the area of the air guiding hole.
本發明之另一目的，在於提供一種料片移載設備，係配置有如上所述的真空吸平裝置，該料片移載設備具有一機座，一或複數個連接臂，一驅動裝置，以及該真空吸平裝置。該連接臂係藉由一樞轉手段、一多軸移動手段或一水平移動手段結合於該機座上。該驅動裝置連接於該樞轉手段、該多軸移動手段或該水平移動手段以操作該連接臂沿至少一傳送路徑移動。其中，所述的真空吸平裝置係設置於該連接臂上，用以吸附該料片， 該驅動裝置係帶動該連接臂將該料片沿該傳送路徑移載至目標位置。 Another object of the present invention is to provide a material transfer device, which is provided with a vacuum suction device as described above, the material transfer device having a base, one or a plurality of connecting arms, a driving device, And the vacuum suction device. The connecting arm is coupled to the base by a pivoting means, a multi-axis moving means or a horizontal moving means. The driving device is coupled to the pivoting means, the multi-axis moving means or the horizontal moving means to operate the connecting arm to move along at least one of the conveying paths. Wherein the vacuum suction device is disposed on the connecting arm for adsorbing the material piece, The driving device drives the connecting arm to transfer the web along the conveying path to a target position.
是以，本發明係比起習知技術具有以下之優勢效果： Therefore, the present invention has the following advantageous effects over the prior art:
1.本發明藉由可調整治具，可彈性控制料片吸附區域的面積，可對應不同尺寸的料片進行調整，省去客製化遮蔽治具產生的不便。 1. The invention can flexibly control the area of the adsorption area of the material by the adjustable jig, and can be adjusted corresponding to the different size pieces, thereby eliminating the inconvenience caused by the customized shielding fixture.
2.本發明的吸附載台上的吸孔係大於該輸料履帶上導風孔，使吸孔得以與該導風孔相互重合。 2. The suction hole on the adsorption stage of the present invention is larger than the air guiding hole on the conveying track, so that the suction hole and the air guiding hole overlap each other.
100‧‧‧真空吸平裝置 100‧‧‧Vacuum suction device
10‧‧‧吸附載台 10‧‧‧Adsorption platform
20‧‧‧真空氣室 20‧‧‧vacuum chamber
21‧‧‧真空吸引單元 21‧‧‧vacuum suction unit
30‧‧‧可調整治具 30‧‧‧Adjustable fixture
31‧‧‧第一調整機構 31‧‧‧First adjustment agency
311‧‧‧第一遮板 311‧‧‧First shutter
312‧‧‧定位機構 312‧‧ ‧ Positioning agency
3121‧‧‧定位塊 3121‧‧‧ Positioning block
3122‧‧‧固定板 3122‧‧‧ fixed plate
313‧‧‧軌道部 313‧‧‧ Track Department
314‧‧‧驅動裝置 314‧‧‧ drive
3141‧‧‧皮帶輪 3141‧‧‧ Pulley
3142‧‧‧皮帶 3142‧‧‧Land
3143‧‧‧馬達 3143‧‧‧Motor
32‧‧‧第二調整機構 32‧‧‧Second adjustment body
321‧‧‧第二遮板 321‧‧‧second shutter
322‧‧‧定位機構 322‧‧‧ Positioning agency
3221‧‧‧定位塊 3221‧‧‧ Positioning block
3222‧‧‧固定板 3222‧‧‧ fixed plate
323‧‧‧軌道部 323‧‧‧ Track Department
324‧‧‧驅動裝置 324‧‧‧ drive
3241‧‧‧皮帶輪 3241‧‧‧ Pulley
3242‧‧‧皮帶 3242‧‧‧Land
3243‧‧‧馬達 3243‧‧‧Motor
R1‧‧‧料片吸附區域 R1‧‧‧Material adsorption area
R2‧‧‧料片吸附區域 R2‧‧‧Material adsorption zone
P‧‧‧料片 P‧‧‧ piece
H‧‧‧吸孔 H‧‧‧ suction hole
T1‧‧‧真空吸附平面 T1‧‧‧ vacuum adsorption plane
T2‧‧‧氣體導流面 T2‧‧‧ gas guiding surface
D1‧‧‧第一方向 D1‧‧‧ first direction
D2‧‧‧第二方向 D2‧‧‧ second direction
L1‧‧‧間隔 L1‧‧‧ interval
O1‧‧‧起始位置座標 O1‧‧‧ starting position coordinates
Lo1‧‧‧長度 Lo1‧‧‧ length
Wi1‧‧‧寬度 Wi1‧‧‧Width
Lo2‧‧‧長度 Lo2‧‧‧ length
Wi2‧‧‧寬度 Wi2‧‧‧Width
200‧‧‧料片檢測設備 200‧‧‧Material testing equipment
40‧‧‧輸料履帶 40‧‧‧Feed track
41‧‧‧轉動輥 41‧‧‧Rotating roller
411‧‧‧滾輪 411‧‧‧Roller
412‧‧‧樞軸 412‧‧‧ pivot
413‧‧‧驅動裝置 413‧‧‧ drive
42‧‧‧導風孔 42‧‧‧wind guide hole
50‧‧‧影像擷取裝置 50‧‧‧Image capture device
A1‧‧‧傳送路徑 A1‧‧‧ transmission path
B‧‧‧取像區域 B‧‧‧Image capture area
300‧‧‧料片移載設備 300‧‧‧Material transfer equipment
60‧‧‧機座 60‧‧‧ machine base
61‧‧‧連接臂 61‧‧‧Connecting arm
62‧‧‧驅動裝置 62‧‧‧ drive
63‧‧‧抽真空裝置 63‧‧‧ Vacuuming device
64‧‧‧氣流通道 64‧‧‧Air passage
65‧‧‧樞軸 65‧‧‧ pivot
A2‧‧‧傳送路徑 A2‧‧‧ transmission path
圖1，本發明真空吸平裝置的上側示意圖。 Figure 1. Schematic view of the upper side of the vacuum suction device of the present invention.
圖2，本發明真空吸平裝置的側面示意圖。 Figure 2 is a side elevational view of the vacuum applicator of the present invention.
圖3，本發明真空吸平裝置的剖面示意圖。 Figure 3 is a schematic cross-sectional view of a vacuum applicator of the present invention.
圖4，本發明真空吸平裝置的局部放大示意圖。 Fig. 4 is a partially enlarged schematic view showing the vacuum suction device of the present invention.
圖5-1至圖5-2，係表示料片吸附區域的調節方式。 Figure 5-1 to Figure 5-2 show the adjustment of the suction area of the web.
圖6-1至圖6-2，係表示料片吸附區域的調節方式。 Figure 6-1 to Figure 6-2 show the adjustment of the suction area of the web.
圖7，本發明第一實施態樣的上側示意圖。 Fig. 7 is a top plan view showing a first embodiment of the present invention.
圖8，本發明第一實施態樣的側面示意圖。 Figure 8 is a side elevational view of a first embodiment of the present invention.
圖9，係表示輸料履帶的局部放大示意圖。 Figure 9 is a partially enlarged schematic view showing the feed track.
圖10，本發明第二實施態樣的上側示意圖。 Figure 10 is a top plan view showing a second embodiment of the present invention.
圖11，本發明第二實施態樣的側面示意圖。 Figure 11 is a side elevational view of a second embodiment of the present invention.
茲就本案之結構特徵暨操作方式係舉一較佳實施態 樣，並配合圖示說明，謹述於后，俾提供審查參閱。 I will give a better implementation of the structural features and operation methods of this case. For the sake of illustration, please refer to the description below.
為了說明方便，在此使用的用語，例如「上方」、「下方」、「左側」、「右側」係指相對圖式中的該水平面來定義。 For convenience of explanation, terms used herein, such as "above", "below", "left", and "right", are defined relative to the horizontal plane in the drawing.
本發明係提供一種真空吸平裝置100，用以吸附並整平料片P。所述的真空吸平裝置100可應用於自動光學檢測(Automated Optical Inspection,AOI)領域，配合傳送履帶及影像擷取裝置設置，亦或是可應用於料片P的移載裝置上，用於吸附料片P並將料片P移載至不同的平台上，於本發明中並不欲限制所述真空吸平裝置100應用的方式。所述的真空吸平裝置100較佳可用以吸附一般工業上的軟性料件，例如：軟性印刷電路板(Flexible Print Circuit,FPC)、軟性顯示器(Flexible Displays)、偏光片(polarizer)或其他軟性工業料片，於本發明中並不欲限制。以下係針對本發明真空吸平裝置的結構進行說明：請參閱「圖1」至「圖3」，係本發明真空吸平裝置的上側示意圖、側面示意圖及剖面示意圖，如圖所示：本發明的真空吸平裝置100係可彈性地對應料片P的尺寸調整吸附面積，藉此對吸附載台10提供適當的負壓以吸附並整平該料片P。所述的真空吸平裝置100包含有一吸附載台10，一對應設置於該吸附載台10相對該真空吸附平面T1的另一側的真空氣室20，以及一對應設置於該真空吸附平面T1或對應設置於該氣體導流面T2的一側的可調整治具30。 The present invention provides a vacuum suction device 100 for adsorbing and leveling the web P. The vacuum squeezing device 100 can be applied to the field of Automatic Optical Inspection (AOI), with the transmission track and the image capturing device, or can be applied to the transfer device of the material P, for The sheet P is adsorbed and the web P is transferred to a different platform, and the manner in which the vacuum applicator 100 is applied is not intended to be limited in the present invention. The vacuum applanation device 100 is preferably used to adsorb soft materials in general industry, such as: Flexible Print Circuit (FPC), Flexible Displays, Polarizers or other softness. Industrial webs are not intended to be limiting in the present invention. The following is a description of the structure of the vacuum suction device of the present invention: please refer to "FIG. 1" to "FIG. 3", which is a schematic diagram of the upper side, a side view and a cross-sectional view of the vacuum suction device of the present invention, as shown in the drawing: The vacuum suction device 100 elastically adjusts the adsorption area corresponding to the size of the web P, thereby providing an appropriate negative pressure to the adsorption stage 10 to adsorb and level the web P. The vacuum suction device 100 includes an adsorption stage 10, a vacuum chamber 20 corresponding to the other side of the adsorption stage 10 opposite to the vacuum adsorption plane T1, and a correspondingly disposed on the vacuum adsorption plane T1. Or corresponding to the adjustable jig 30 disposed on one side of the gas guiding surface T2.
請一併參閱「圖3」，該吸附載台10包含有一真空吸 附平面T1，以及複數個設置於該真空吸附平面T1上的吸孔H。該真空氣室20包含有一相鄰於該吸附載台10的吸孔H一側的氣體導流面T2，以及一或複數個對該氣體導流面T2提供負壓的真空吸引單元21。所述的真空吸附平面T1，係指該吸附載台10相應於該料片P位置的該側，用以吸附該料片P並供該料片P靠置。所述的氣體導流面T2，係指該吸附載台10相對該料片P位置的另一側，係對應至該真空氣室20的內側，藉由該真空吸引單元21對該氣體導流面T2提供負壓，藉此，透過該吸附載台10上的複數個吸孔H，使該料片P得以被吸附於該真空吸附平面T1上。請一併參閱「圖4」，於一較佳實施例中，所述的吸孔H相互間係呈等間隔排列，使該吸孔H得以均勻的分布於該真空吸附平面T1上。 Please refer to "Figure 3" together. The adsorption stage 10 includes a vacuum suction. A plane T1 is attached, and a plurality of suction holes H disposed on the vacuum adsorption plane T1. The vacuum chamber 20 includes a gas guiding surface T2 adjacent to the suction hole H side of the adsorption stage 10, and one or a plurality of vacuum suction units 21 for supplying a negative pressure to the gas guiding surface T2. The vacuum adsorption plane T1 refers to the side of the adsorption stage 10 corresponding to the position of the web P for adsorbing the web P and for the web P to abut. The gas guiding surface T2 refers to the other side of the adsorption stage 10 relative to the position of the web P, corresponding to the inner side of the vacuum chamber 20, and the gas is guided by the vacuum suction unit 21. The surface T2 provides a negative pressure, whereby the web P is adsorbed on the vacuum adsorption plane T1 through a plurality of suction holes H on the adsorption stage 10. Referring to FIG. 4 together, in a preferred embodiment, the suction holes H are arranged at equal intervals with each other so that the suction holes H are evenly distributed on the vacuum adsorption plane T1.
該可調整治具30包含有一可藉由第一調整機構31調整並沿第一方向D1移動的第一遮板311，以及一可藉由第二調整機構32調整並沿第二方向D2移動的第二遮板321。該第一遮板311及該第二遮板321係分別於該第一方向D1的位置及該第二方向D2的位置遮蔽部分吸孔H，以界定一料片吸附區域。於本實施態樣中，為使該第一遮板311、該第二遮板321與該吸孔H的表面緊密結合，所述的第一遮板311、該第二遮板321可分別相對設置於該真空吸附平面T1及該氣體導流面T2的一側。 The adjustable jig 30 includes a first shutter 311 that is adjustable by the first adjustment mechanism 31 and moves in the first direction D1, and a second adjustment mechanism 32 that is adjustable and movable in the second direction D2. The second shutter 321 is provided. The first shutter 311 and the second shutter 321 respectively shield a portion of the suction holes H at a position in the first direction D1 and a position in the second direction D2 to define a web adsorption region. In this embodiment, in order to make the first shutter 311 and the second shutter 321 and the surface of the suction hole H are tightly coupled, the first shutter 311 and the second shutter 321 may respectively be opposite. It is disposed on one side of the vacuum adsorption plane T1 and the gas guiding surface T2.
所述的第一調整機構31係包含有一或複數個固定該第一遮板311的定位機構312，一或複數個設置於該定位機構312 一側以限制該定位機構312沿該第一方向D1移動的軌道部313，以及一設置於該軌道部313一側以帶動該定位機構312沿該第一方向D1移動的驅動裝置314。該軌道部313係成對設置於該第一遮板311的二側，該定位機構312係具有二分設於二該軌道部313上的定位塊3121，以及一設置於成對的該定位塊3121間並鎖固該第一遮板311的固定板3122。該驅動裝置314具有至少二皮帶輪3141，一繞設於該皮帶輪3141上並供該定位機構312一端固定的皮帶3142，以及一帶動該皮帶輪3141樞轉的馬達3143。於該馬達3143接收到指令時，該馬達3143係帶動該皮帶輪3141樞轉，藉由該皮帶輪3141帶動該皮帶3142移動，使固定於該皮帶3142上的該定位機構312沿著該軌道部313所界定的路徑(第一方向D1)上移動，藉此帶動該第一遮板311。 The first adjusting mechanism 31 includes one or more positioning mechanisms 312 for fixing the first shutter 311, and one or more of the positioning mechanisms 312 are disposed on the positioning mechanism 312. A rail portion 313 for restricting movement of the positioning mechanism 312 along the first direction D1 and a driving device 314 for moving the positioning mechanism 312 along the first direction D1 are provided on one side of the rail portion 313. The rail portion 313 is disposed on two sides of the first shutter 311. The positioning mechanism 312 has a positioning block 3121 disposed on the rail portion 313, and a positioning block 3121 disposed in the pair. The fixing plate 3122 of the first shutter 311 is locked and locked. The driving device 314 has at least two pulleys 3141, a belt 3142 disposed on the pulley 3141 and fixed to one end of the positioning mechanism 312, and a motor 3143 for driving the pulley 3141 to pivot. When the motor 3143 receives the command, the motor 3143 drives the pulley 3141 to pivot, and the pulley 3141 drives the belt 3142 to move, so that the positioning mechanism 312 fixed on the belt 3142 is along the track portion 313. The defined path (first direction D1) moves, thereby driving the first shutter 311.
所述的第二調整機構32與第一調整機構31的結構大致相同，主要係具有一或複數個固定該第二遮板321的定位機構322，一設置於該定位機構322一側以限制該定位機構322沿一路徑(第二方向D2)移動的軌道部323，以及一設置於該軌道部323一側以帶動該定位機構322沿該路徑移動的驅動裝置324。該軌道部323係成對設置於該第二遮板321的二側，該定位機構322係具有二分設於二該軌道部323上的定位塊3221，以及一設置於成對的該定位塊3221間並鎖固該第二遮板321的固定板3222。該驅動裝置324包含有至少二皮帶輪3241，一繞設於該皮帶輪3241上並供該定位機構322一端固定的皮帶3242，以及一帶動該皮帶 輪3241樞轉的馬達3243。於該馬達3243接收到指令時，該馬達3243係帶動該皮帶輪3241樞轉，藉由該皮帶輪3241帶動該皮帶3242移動，使固定於該皮帶3242上的該定位機構322沿著該軌道部323所界定的路徑(第二方向D2)上移動，藉此帶動該第二遮板321。 The second adjusting mechanism 32 is substantially the same as the first adjusting mechanism 31, and has a plurality of positioning mechanisms 322 for fixing the second shielding plate 321 , and is disposed on one side of the positioning mechanism 322 to limit the The rail portion 323 of the positioning mechanism 322 moving along a path (the second direction D2) and a driving device 324 disposed on the side of the rail portion 323 to drive the positioning mechanism 322 to move along the path. The rail portion 323 is disposed on the two sides of the second shutter 321 . The positioning mechanism 322 has two positioning blocks 3221 disposed on the rail portion 323 , and a positioning block 3221 disposed in the pair. The fixing plate 3222 of the second shutter 321 is locked and locked. The driving device 324 includes at least two pulleys 3241, a belt 3242 disposed on the pulley 3241 and fixed at one end of the positioning mechanism 322, and a belt The motor 3243 is pivoted by the wheel 3241. When the motor 3243 receives the command, the motor 3243 drives the pulley 3241 to pivot, and the pulley 3241 drives the belt 3242 to move, so that the positioning mechanism 322 fixed on the belt 3242 is along the track portion 323. The defined path (second direction D2) moves, thereby driving the second shutter 321 .
所述的可調整治具30可連接至可程式邏輯控制器(programmable logic controller,PLC)，藉由人機介面(Man-Machine Interface)輸入料片P的尺寸，控制該第一遮板311及第二遮板321的行程以決定該料片吸附區域的面積。於另一較佳實施例中，所述的料片吸附區域的面積亦可藉由手動方式對應不同尺寸的料片P進行調整。 The adjustable fixture 30 can be connected to a programmable logic controller (PLC), and the first shutter 311 is controlled by inputting the size of the material P by a Man-Machine Interface. The stroke of the second shutter 321 determines the area of the web adsorption region. In another preferred embodiment, the area of the web adsorption area can also be adjusted by manually corresponding to different sizes of the web P.
具體而言，有關於基於料片P尺寸自動調整料片吸附區域面積的技術，以下係舉一具體情況進行說明，請參閱「圖5-1」至「圖5-2」、「圖6-1」至「圖6-2」所示。於本實施態樣中，所述的第一遮板311係可藉由第一調整機構31控制，沿X軸方向移動。所述的第二遮板321係可藉由第二調整機構32控制，沿Y軸方向移動。其移動的方向及距離可藉由驅動裝置314、324控制，所述的移動方向及距離可藉由以下演算式進行計算。請先參閱「圖5-1」至「圖5-2」，設定吸附載台10右下角的位置為原點Q(0,0)，所述的原點Q(0,0)係為相對於機械原點的相對原點。以該相對原點Q(0,0)取得第一遮板311於X軸方向的位置X1，並取得第二遮板321於Y軸方向的位置Y1，藉此取得起始位置座標O1(X1, Y1)。接續，藉由人機介面輸入所欲設置的料片P尺寸，例如長度為Lo1、寬度為Wi1，藉由可程式邏輯控制器計算，將起始位置座標O1減去料片P尺寸參數(長度Lo1，寬度Wi1)，得到調整向量參數M(X1-Lo1,Y1-Wi1)。如「圖5-1」所示，所取得的調整向量數值X1-Lo1<0時，控制該第一遮板311朝圖式中的右側方向移動|X1-Lo1|的距離，所取得的調整向量參數Y1-Wi1>0時，控制該第二遮板321朝圖式中的下方方向移動|Y1-Wi1|的距離。於調整至定位時，於圖式中所表示，未被第一遮板311及第二遮板321所遮蔽的平面區域即為所述的料片吸附區域R1(如「圖5-2」所示)。 Specifically, there is a technique for automatically adjusting the area of the adsorption area of the web based on the size of the material P. The following is a detailed description. Please refer to "Figure 5-1" to "Figure 5-2", "Figure 6- 1" to "Figure 6-2". In this embodiment, the first shutter 311 is controllable by the first adjustment mechanism 31 and moves in the X-axis direction. The second shutter 321 is controllable by the second adjustment mechanism 32 and moves in the Y-axis direction. The direction and distance of movement can be controlled by the driving devices 314, 324, and the moving direction and distance can be calculated by the following calculation formula. Please refer to "Fig. 5-1" to "Fig. 5-2" first, and set the position of the lower right corner of the adsorption stage 10 to the origin Q (0, 0). The origin Q (0, 0) is relative. The relative origin of the machine origin. The position X1 of the first shutter 311 in the X-axis direction is obtained with the relative origin Q (0, 0), and the position Y1 of the second shutter 331 in the Y-axis direction is obtained, thereby obtaining the starting position coordinate O1 (X1). , Y1). After the connection, the size of the material piece P to be set is input by the human machine interface, for example, the length is Lo1 and the width is Wi1, and the starting position coordinate O1 is subtracted from the starting piece coordinate O1 by the programmable logic controller. Lo1, width Wi1), the adjustment vector parameter M (X1-Lo1, Y1-Wi1) is obtained. As shown in FIG. 5-1, when the obtained adjustment vector value X1-Lo1<0, the distance of the first shutter 311 to the right direction in the drawing is controlled by |X1-Lo1|, and the obtained adjustment is performed. When the vector parameter Y1-Wi1>0, the second shutter 321 is controlled to move the distance of |Y1-Wi1| in the downward direction in the drawing. When adjusting to the positioning, as shown in the figure, the plane area not covered by the first shutter 311 and the second shutter 321 is the above-mentioned web adsorption region R1 (as shown in FIG. 5-2). Show).
以下再舉另一具體情況進行說明，請參閱「圖6-1」至「圖6-2」。藉由人機介面輸入所欲設置的料片P尺寸，例如長度為Lo2、寬度為Wi2，藉由可程式邏輯控制器計算，將起始位置座標O2(X2,Y2)減去料片P尺寸參數(長度Lo2，寬度Wi2)，得到調整向量參數N(X2-Lo2,Y2-Wi2)。所取得的調整向量數值X2-Lo2>0時，控制該第一遮板311朝圖式中的左側方向移動|X2-Lo2|的距離。所取得的調整向量參數Y2-Wi2<0時控制該第二遮板321朝圖式中的上方方向移動|Y2-Wi2|的距離。於調整至定位時，於圖式中所表示，未被第一遮板311及第二遮板321所遮蔽的平面區域即為所述的料片吸附區域R2。 Please refer to the following for another specific situation. Please refer to Figure 6-1 to Figure 6-2. Input the size of the material piece P to be set by the human-machine interface, for example, the length is Lo2 and the width is Wi2. By calculating by the programmable logic controller, the starting position coordinate O2 (X2, Y2) is subtracted from the size of the material P. The parameter (length Lo2, width Wi2) gives the adjustment vector parameter N (X2-Lo2, Y2-Wi2). When the obtained adjustment vector value X2-Lo2>0, the distance of the first shutter 311 to move the |X2-Lo2| in the left direction in the drawing is controlled. When the obtained adjustment vector parameter Y2-Wi2<0, the distance of the second shutter 321 to move the |Y2-Wi2| in the upward direction in the drawing is controlled. When adjusting to the positioning, as shown in the drawing, the planar area not covered by the first shutter 311 and the second shutter 321 is the above-mentioned web adsorption region R2.
請參閱「圖7」及「圖8」，係本發明第一實施態樣的上側示意圖及側面示意圖，如圖所示： 於本實施態樣中，所述的真空吸平裝置100係可配置於一料片檢測設備200上，用以吸附並整平料片P，以供影像擷取裝置50對該料片P取像藉以對該料片P的表面進行檢測。所述的料片檢測設備200主要係包含有一輸料履帶40，一影像擷取裝置50，以及前述的真空吸平裝置100。 Please refer to FIG. 7 and FIG. 8 , which are schematic diagrams of the upper side and the side of the first embodiment of the present invention, as shown in the figure: In the embodiment, the vacuuming device 100 can be disposed on a tablet detecting device 200 for adsorbing and leveling the tablet P for the image capturing device 50 to take the tablet P. For example, the surface of the web P is detected. The web detecting device 200 mainly comprises a conveying crawler 40, an image capturing device 50, and the aforementioned vacuum suction device 100.
所述的輸料履帶40係供該料片P擺設並將該料片P沿一傳送路徑A1移動。該真空吸平裝置100係設置於該輸料履帶40的下側，該影像擷取裝置50則設置於該輸料履帶40的上側(該輸料履帶40相對該真空吸平裝置100的另一側)，藉由該真空吸平裝置100決定一對應於該輸料履帶40表面的取像區域B，所述的影像擷取裝置50係對設置於該取像區域B的上方或一側，藉以拍攝該取像區域B上經整平後的料片P的表面影像。 The conveying track 40 is for the material P to be placed and the material P to be moved along a conveying path A1. The vacuum suction device 100 is disposed on the lower side of the delivery crawler 40, and the image capturing device 50 is disposed on the upper side of the delivery crawler 40 (the other of the delivery crawler 40 is opposite to the vacuum suction device 100) The image capturing area B corresponding to the surface of the feeding track 40 is determined by the vacuum suction device 100. The image capturing device 50 is disposed above or on one side of the image capturing area B. Thereby, a surface image of the flattened web P on the image capturing area B is taken.
該輸料履帶40係具有一設置於該輸料履帶40一或兩側帶動該輸料履帶40前進的轉動輥41，並於該輸料履帶40的表面上係佈設有複數個導風孔42。該轉動輥41係具有一供該輸料履帶40繞設的滾輪411，一設置於該滾輪411中以帶動該滾輪411旋轉的樞軸412，以及一設置於該樞軸412一側以帶動該樞軸412旋轉的驅動裝置413。在此所述的驅動裝置413係可為同步馬達(synchronous motor)、感應馬達(induction motor)、可逆馬達(reversible motor)、步進馬達(stepping motor)、伺服馬達(servo motor)、線性馬達(linear motor)等，於本發明中並不欲予以限制所述驅動裝置的種類。 The conveying track 40 has a rotating roller 41 disposed on one or both sides of the conveying track 40 to drive the feeding track 40, and a plurality of air guiding holes 42 are arranged on the surface of the conveying track 40. . The rotating roller 41 has a roller 411 for the feeding track 40, a pivot 412 disposed in the roller 411 to drive the roller 411 to rotate, and a side disposed on the pivot 412 to drive the roller 411. A drive 413 that pivots 412. The driving device 413 described herein may be a synchronous motor, an induction motor, a reversible motor, a stepping motor, a servo motor, a linear motor ( Linear motor) or the like is not intended to limit the type of the driving device in the present invention.
所述的真空吸平裝置100係設置於該輸料履帶40相對該取像區域B的另一側。於前側加工設備所取得的料片P將透過移載設備或作業員送至該輸料履帶40上，並藉由該輸料履帶40沿該傳送路徑A1輸送，藉以將該料片P移動至該取像區域B。當該料片P移動至該取像區域B時，所述的真空吸平裝置100將啟動並藉由複數個吸孔H將該料片P整平於該取像區域B上，使該料片P的表面趨於平整，以利另一側的該影像擷取裝置50拍攝取像。 The vacuum suction device 100 is disposed on the other side of the delivery crawler 40 relative to the image capturing area B. The web P obtained by the front side processing equipment will be sent to the delivery crawler 40 through the transfer equipment or the operator, and transported along the transport path A1 by the transport crawler 40, thereby moving the web P to The image capturing area B. When the tablet P is moved to the image capturing area B, the vacuuming device 100 is activated and the tablet P is leveled on the image capturing area B by a plurality of suction holes H to make the material. The surface of the sheet P tends to be flat to facilitate the image capturing device 50 on the other side to take an image.
於檢測完成後，於輸料履帶40的另一端可設有一移載裝置(圖未示)，將經檢測過後的料片P進行分類。例如將料片P移載至OK類別、可修補類別、NG類別等。 After the detection is completed, a transfer device (not shown) may be disposed at the other end of the delivery crawler 40 to classify the detected web P. For example, the material P is transferred to an OK category, a repairable category, an NG category, and the like.
請一併參閱「圖9」，係表示輸料履帶的局部放大示意圖，如圖所示：為避免輸料履帶40於移動時，因組裝、製程、或長期使用產生公差的問題，導致導風孔42與吸孔H未能重合，本實施態樣中所述吸孔H的面積係大於該導風孔42的面積。於另一較佳實施例中，為避免導風孔42與導風孔42間的間隙與該吸孔H重疊，導致吸孔H堵塞，所述的吸孔H二側係沿該傳送路徑A1的方向延伸而略呈狹長型，藉此縮短吸孔H至吸孔H間的間隙。所述的吸孔H相互間中心位置的間距係等於該導風孔42相互間中心位置的間距，使同一面積範圍內的每一導風孔42均能對應至一吸孔H。 Please refer to "Figure 9" for a partial enlarged view of the conveyor track. As shown in the figure, in order to avoid the problem of tolerance caused by assembly, process or long-term use when the conveyor track 40 is moved, the wind guide is caused. The hole 42 and the suction hole H fail to overlap. In the embodiment, the area of the suction hole H is larger than the area of the air guiding hole 42. In another preferred embodiment, in order to prevent the gap between the air guiding hole 42 and the air guiding hole 42 from overlapping with the suction hole H, the suction hole H is blocked, and the two sides of the suction hole H are along the conveying path A1. The direction is extended to be slightly elongated, thereby shortening the gap between the suction hole H and the suction hole H. The spacing between the center positions of the suction holes H is equal to the distance between the center positions of the air guiding holes 42 so that each of the air guiding holes 42 in the same area can correspond to a suction hole H.
請一併參閱「圖10」及「圖11」，係本發明第二實施態樣的上側及側面示意圖，如圖所示：於本實施態樣中，所述的真空吸平裝置100係可配置於一料片移載設備300上。所述的料片移載設備300包含有一機座60、一或複數個連接臂61、一設置於該機座60上的驅動裝置62、以及前述的真空吸平裝置100。該連接臂61係藉由一樞轉手段、一多軸移動手段或一水平移動手段結合於該機座60上。所述的真空吸平裝置100係設置於該連接臂61上，用以吸附該料片P，於吸附該料片P時，經由該樞轉手段、多軸移動手段或水平移動手段，該驅動裝置62係可帶動該連接臂61將該料片P沿該傳送路徑A2移載至目標位置。 Please refer to FIG. 10 and FIG. 11 together, which are schematic diagrams of the upper side and the side of the second embodiment of the present invention. As shown in the figure, in the embodiment, the vacuum suction device 100 can be It is disposed on a tablet transfer device 300. The web transfer device 300 includes a base 60, one or a plurality of connecting arms 61, a driving device 62 disposed on the housing 60, and the aforementioned vacuum drying device 100. The connecting arm 61 is coupled to the base 60 by a pivoting means, a multi-axis moving means or a horizontal moving means. The vacuuming device 100 is disposed on the connecting arm 61 for adsorbing the material P. When the material P is adsorbed, the driving is performed by the pivoting means, the multi-axis moving means or the horizontal moving means. The device 62 can drive the connecting arm 61 to transfer the web P along the transport path A2 to the target position.
上述的樞轉手段可為但不限定為例如用以固定連接臂並藉由驅動裝置帶動樞轉的樞軸。上述的多軸移動手段可為但不限定為例如多軸機械臂。上述的水平移動手段可為但不限定為例如具有軌道的皮帶輪、或傳送帶等。 The pivoting means described above may be, but is not limited to, a pivot for fixing the connecting arm and pivoting by the driving means. The above multi-axis moving means may be, but not limited to, a multi-axis robot arm, for example. The horizontal moving means described above may be, but not limited to, a pulley having a rail, a conveyor belt, or the like.
於本實施態樣中，所述的連接臂61上係設置有氣流通道64。於機座60上係設置有一連接至該氣流通道64的抽真空裝置63，用以連接至該真空吸平裝置100上的真空吸引單元21，藉以透過該氣流通道64對該真空吸平裝置100的吸附載台10提供負壓。於另一較佳實施態樣中，可透過外接的管線連接該真空吸引單元21及機座60上的抽真空裝置63。藉此，可將料片P由第一位置移動至第二位置。 In the embodiment, the connecting arm 61 is provided with an air flow passage 64. An evacuation device 63 connected to the air flow passage 64 is disposed on the base 60 for connecting to the vacuum suction unit 21 on the vacuum suction device 100, and the vacuum suction device 100 is transmitted through the air flow passage 64. The adsorption stage 10 provides a negative pressure. In another preferred embodiment, the vacuum suction unit 21 and the vacuuming device 63 on the base 60 can be connected through an external line. Thereby, the web P can be moved from the first position to the second position.
於本實施態樣中，係藉由樞軸65連接連接臂61及機座60。所述的驅動裝置62係設置於該樞軸65的一側。當驅動裝置62啟動時，該驅動裝置62係透過該樞軸65帶動該連接臂61以該樞軸65為中心翻轉，以控制該連接臂61沿傳送路徑A2移動，其中，所述的真空吸平裝置100係設置於該連接臂61上，用以吸附該料片P使該料片P固定於該真空吸平裝置100上。於該料片P經由該傳送路徑A2移載至目標位置時，該抽真空裝置63係可關閉氣閥以解除該料片P的吸附狀態。 In the present embodiment, the connecting arm 61 and the base 60 are connected by a pivot 65. The driving device 62 is disposed on one side of the pivot 65. When the driving device 62 is activated, the driving device 62 drives the connecting arm 61 to rotate around the pivot 65 through the pivot 65 to control the connecting arm 61 to move along the conveying path A2, wherein the vacuum suction The flat device 100 is disposed on the connecting arm 61 for adsorbing the web P to fix the web P to the vacuum flat device 100. When the web P is transferred to the target position via the transport path A2, the vacuuming device 63 can close the air valve to release the adsorption state of the web P.
綜上所述，本發明藉由可調整治具，可彈性控制料片吸附區域的面積，可對應不同尺寸的料片進行調整，省去客製化遮蔽治具產生的不便。本發明的吸附載台上的吸孔係大於該輸料履帶上導風孔，且該吸孔呈狹長型的設計，使吸孔得以與該導風孔相互重合。 In summary, the present invention can flexibly control the area of the adsorption area of the material by the adjustable jig, and can be adjusted corresponding to the different sizes of the material, thereby eliminating the inconvenience caused by the customized shielding fixture. The suction hole on the adsorption stage of the present invention is larger than the air guiding hole on the conveying track, and the suction hole has an elongated design so that the suction hole and the air guiding hole overlap each other.
本發明已藉上述較佳具體例進行更詳細說明，惟本發明並不限定於上述所舉例之實施態樣，凡在本發明所揭示之技術思想範圍內，對該等結構作各種變化及修飾，該等變化及修飾仍屬本發明之範圍。 The present invention has been described in more detail with reference to the preferred embodiments described above, but the present invention is not limited to the embodiments described above, and various changes and modifications may be made to the structures within the scope of the technical idea disclosed herein. Such changes and modifications are still within the scope of the invention.
100‧‧‧真空吸平裝置 100‧‧‧Vacuum suction device
10‧‧‧吸附載台 10‧‧‧Adsorption platform
30‧‧‧可調整治具 30‧‧‧Adjustable fixture
31‧‧‧第一調整機構 31‧‧‧First adjustment agency
311‧‧‧第一遮板 311‧‧‧First shutter
312‧‧‧定位機構 312‧‧ ‧ Positioning agency
3121‧‧‧定位塊 3121‧‧‧ Positioning block
3122‧‧‧固定板 3122‧‧‧ fixed plate
313‧‧‧軌道部 313‧‧‧ Track Department
314‧‧‧驅動裝置 314‧‧‧ drive
3141‧‧‧皮帶輪 3141‧‧‧ Pulley
3142‧‧‧皮帶 3142‧‧‧Land
3143‧‧‧馬達 3143‧‧‧Motor
32‧‧‧第二調整機構 32‧‧‧Second adjustment body
321‧‧‧第二遮板 321‧‧‧second shutter
322‧‧‧定位機構 322‧‧‧ Positioning agency
3221‧‧‧定位塊 3221‧‧‧ Positioning block
3222‧‧‧固定板 3222‧‧‧ fixed plate
323‧‧‧軌道部 323‧‧‧ Track Department
324‧‧‧驅動裝置 324‧‧‧ drive
3241‧‧‧皮帶輪 3241‧‧‧ Pulley
3242‧‧‧皮帶 3242‧‧‧Land
3243‧‧‧馬達 3243‧‧‧Motor
H‧‧‧吸孔 H‧‧‧ suction hole
T1‧‧‧真空吸附平面 T1‧‧‧ vacuum adsorption plane
D1‧‧‧第一方向 D1‧‧‧ first direction
D2‧‧‧第二方向 D2‧‧‧ second direction
Claims (13)
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| Application Number | Priority Date | Filing Date | Title |
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| TW104100048A TWI623738B (en) | 2015-01-05 | 2015-01-05 | A vacuum absorbing device, a material sheet detecting apparatus, and a material sheet transfer apparatus comprising the same |
| CN201510237823.0A CN106198387B (en) | 2015-01-05 | 2015-05-12 | Vacuum suction leveling device and material sheet detection/transfer equipment comprising same |
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| TW104100048A TWI623738B (en) | 2015-01-05 | 2015-01-05 | A vacuum absorbing device, a material sheet detecting apparatus, and a material sheet transfer apparatus comprising the same |
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| TW201625930A true TW201625930A (en) | 2016-07-16 |
| TWI623738B TWI623738B (en) | 2018-05-11 |
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| TWI645192B (en) * | 2017-10-23 | 2018-12-21 | 由田新技股份有限公司 | A semiconductor wafer leveling device and method thereof |
| TWI705743B (en) * | 2019-03-27 | 2020-09-21 | 捷惠自動機械有限公司 | Positioning method in X-RAY direction for circuit board after pressing |
| CN114235813B (en) * | 2021-11-26 | 2022-10-21 | 江苏凡润电子有限公司 | Quality control system of display backboard based on visual detection |
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| TWM303392U (en) * | 2006-07-10 | 2006-12-21 | Kenmos Technology Co Ltd | Measure and fixing device of microstructure of electroformed steel for light guide board |
| CN101799431B (en) * | 2010-04-08 | 2012-01-04 | 湖南大学 | Machine visual on-line detection method and equipment for tank cover quality in high-speed production line |
| TWM419767U (en) * | 2011-07-29 | 2012-01-01 | Utechzone Co Ltd | Holding mechanism |
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| CN202885848U (en) * | 2012-10-12 | 2013-04-17 | 由田新技股份有限公司 | Vacuum flat-absorbing device |
| TWM449343U (en) * | 2012-10-12 | 2013-03-21 | Utechzone Co Ltd | Vacuum suction device |
| TWM468508U (en) * | 2013-05-17 | 2013-12-21 | Utechzone Co Ltd | Suction device and vacuum equipment to suck the soft articles |
| TWI540089B (en) * | 2013-05-17 | 2016-07-01 | 由田新技股份有限公司 | Working machine and a vacuum adsorption carrier means thereof |
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| CN106198387B (en) | 2019-09-20 |
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