TW201624049A - Optical device, image display device, and method of manufacturing optical device - Google Patents

Optical device, image display device, and method of manufacturing optical device Download PDF

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Publication number
TW201624049A
TW201624049A TW104143446A TW104143446A TW201624049A TW 201624049 A TW201624049 A TW 201624049A TW 104143446 A TW104143446 A TW 104143446A TW 104143446 A TW104143446 A TW 104143446A TW 201624049 A TW201624049 A TW 201624049A
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Taiwan
Prior art keywords
permanent magnet
coil
optical element
optical
light
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TW104143446A
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Chinese (zh)
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溝口安志
若林慎一
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精工愛普生股份有限公司
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Publication of TW201624049A publication Critical patent/TW201624049A/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/005Projectors using an electronic spatial light modulator but not peculiar thereto
    • G03B21/006Projectors using an electronic spatial light modulator but not peculiar thereto using LCD's
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/14Details
    • G03B21/142Adjusting of projection optics
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/14Details
    • G03B21/28Reflectors in projection beam

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Projection Apparatus (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Transforming Electric Information Into Light Information (AREA)

Abstract

An optical device includes a glass plate, a movable section adapted to support the glass plate, shaft sections adapted to support the movable section so as to be able to oscillate around an oscillation axis, a support section adapted to support the shaft sections, a permanent magnet provided to the movable section, and a coil disposed so as to be opposed to the permanent magnet, and generating a magnetic field acting on the permanent magnet, and the support section has a window section through which a gap between the permanent magnet and the coil can visually be recognized.

Description

光學元件、圖像顯示裝置及光學元件之製造方法 Optical element, image display device, and method of manufacturing optical element

本發明係關於光學元件、圖像顯示裝置及光學元件之製造方法者。 The present invention relates to an optical element, an image display device, and a method of manufacturing an optical element.

先前以來,為了較液晶面板等光調變裝置之解析度提高投射之圖像之解析度,已知有使自光調變裝置出射之影像光之軸移位之技術。又,作為使影像光之軸移位之裝置,已知有專利文獻1所記載之光路控制裝置。專利文獻1所記載之光路控制裝置包含玻璃板、保持玻璃板之可動部、支持可動部之支持部、及連接可動部與支持部之1對板簧,藉由將板簧作為轉動軸使保持構件轉動,而改變玻璃板之姿勢,從而使入射至玻璃板之光(影像光)折射,而使軸移位。又,於專利文獻1所記載之光路控制裝置中,作為使可動部轉動之驅動機構,採用使用線圈與永久磁鐵之電磁驅動。 Conventionally, in order to improve the resolution of a projected image compared with the resolution of an optical modulation device such as a liquid crystal panel, a technique of shifting the axis of image light emitted from the optical modulation device has been known. Further, an optical path control device disclosed in Patent Document 1 is known as a device for shifting the axis of image light. The optical path control device described in Patent Document 1 includes a glass plate, a movable portion that holds the glass plate, a support portion that supports the movable portion, and a pair of leaf springs that connect the movable portion and the support portion, and the leaf spring is held as a rotation axis. The member rotates to change the posture of the glass plate, thereby refracting light (image light) incident on the glass plate, and shifting the axis. Further, in the optical path control device described in Patent Document 1, electromagnetic drive using a coil and a permanent magnet is employed as a drive mechanism for rotating the movable portion.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利特開2011-158589號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2011-158589

於使用如專利文獻1之電磁驅動之驅動機構中,由於線圈與永久 磁鐵之配置(相對位置關係)對振動特性產生較大影響,故而,其等之對準變得重要。然而,於專利文獻1中,線圈與永久磁鐵之對準相關之事項不明確。 In the driving mechanism using the electromagnetic drive as in Patent Document 1, since the coil is permanent Since the arrangement of the magnets (relative positional relationship) has a large influence on the vibration characteristics, alignment of the magnets becomes important. However, in Patent Document 1, the matters relating to the alignment of the coil and the permanent magnet are not clear.

本發明之目的在於提供一種可容易地確認線圈與永久磁鐵之位置關係且具有優良振動特性之光學元件、包含上述光學元件之圖像顯示裝置、及可容易進行線圈與永久磁鐵之定位且具有優良振動特性之光學元件之製造方法。 An object of the present invention is to provide an optical element which can easily confirm the positional relationship between a coil and a permanent magnet and which has excellent vibration characteristics, an image display apparatus including the above optical element, and an optical element and a permanent magnet which can be easily positioned and which are excellent A method of manufacturing an optical component having vibration characteristics.

此種目的係藉由下述之發明而達成。 This object is achieved by the invention described below.

本發明之光學元件其特徵在於包含:光學部,其具有光入射之光入射面;可動部,其支持上述光學部;軸部,其將上述可動部可繞搖動軸搖動地支持;支持部,其支持上述軸部;永久磁鐵,其設置於上述可動部;及線圈,其係與上述永久磁鐵對向配置,且產生作用於上述永久磁鐵之磁場;且上述支持部具有可視認上述永久磁鐵與上述線圈之縫隙之窗部。 An optical element according to the present invention is characterized by comprising: an optical portion having a light incident surface on which light is incident; a movable portion supporting the optical portion; and a shaft portion supporting the movable portion so as to be rockable about a rocking axis; Supporting the shaft portion; a permanent magnet disposed on the movable portion; and a coil disposed opposite to the permanent magnet and generating a magnetic field acting on the permanent magnet; and the support portion having the visible permanent magnet and The window portion of the gap of the above coil.

藉此,由於可自窗部容易確認線圈與永久磁鐵之位置關係,故而,可容易控制線圈與永久磁鐵之位置關係。因此,可獲得具有優良振動特性之光學元件。 Thereby, since the positional relationship between the coil and the permanent magnet can be easily confirmed from the window portion, the positional relationship between the coil and the permanent magnet can be easily controlled. Therefore, an optical element having excellent vibration characteristics can be obtained.

於本發明之光學元件中,上述窗部較好為貫通孔。 In the optical element of the present invention, the window portion is preferably a through hole.

藉此,窗部之構成變得簡單。又,更容易視認線圈與永久磁鐵之位置關係。 Thereby, the structure of the window portion becomes simple. Moreover, it is easier to visually recognize the positional relationship between the coil and the permanent magnet.

於本發明之光學元件中,較好為可自上述窗部視認上述永久磁 鐵之與上述線圈對面之側之面之位置、及上述線圈之與上述永久磁鐵對面之側之面之位置。 In the optical component of the present invention, it is preferred that the permanent magnet can be visually recognized from the window portion. The position of the surface of the iron opposite to the side of the coil and the position of the surface of the coil opposite to the side of the permanent magnet.

藉此,可更明確地確認線圈與永久磁鐵之縫隙。 Thereby, the gap between the coil and the permanent magnet can be more clearly confirmed.

於本發明之光學元件中,較好為自上述窗部觀察時,構成上述窗部之側面中之1者,與上述永久磁鐵之與上述線圈對面之側之面或上述線圈之與上述永久磁鐵對面之側之面一致。 In the optical element according to the present invention, it is preferable that one of the side surfaces constituting the window portion and the surface of the permanent magnet opposite to the coil or the coil and the permanent magnet are viewed from the window portion. The faces on the opposite side are the same.

藉此,由於可利用窗部之側面作為判斷線圈與永久磁鐵之縫隙之基準面,故而,可更明確地確認上述縫隙。 Thereby, since the side surface of the window portion can be used as the reference surface for judging the gap between the coil and the permanent magnet, the slit can be more clearly confirmed.

於本發明之光學元件中,較好為上述窗部係可自相對於上述永久磁鐵與上述線圈之排列方向正交之方向視認上述縫隙。 In the optical element according to the invention, it is preferable that the window portion can visually recognize the slit from a direction orthogonal to an arrangement direction of the permanent magnet and the coil.

藉此,可更正確地確認永久磁鐵與線圈之縫隙。 Thereby, the gap between the permanent magnet and the coil can be confirmed more accurately.

於本發明之光學元件中,上述線圈較好為空芯線圈。 In the optical element of the present invention, the coil is preferably an air core coil.

藉此,可發揮更優良之振動特性。 Thereby, more excellent vibration characteristics can be exerted.

於本發明之光學元件中,上述線圈較好為由上述支持部支持。 In the optical element of the present invention, the coil is preferably supported by the support portion.

藉此,可容易將線圈固定於特定位置。 Thereby, the coil can be easily fixed to a specific position.

於本發明之光學元件中,較好為具有固定於上述支持部、且自與上述永久磁鐵相反側保持上述線圈之保持部。 In the optical element of the present invention, it is preferable to have a holding portion that is fixed to the support portion and that holds the coil from the side opposite to the permanent magnet.

藉此,可容易進行線圈之對準。 Thereby, the alignment of the coils can be easily performed.

於本發明之光學元件中,上述保持部較好為非磁性體。 In the optical element of the present invention, the holding portion is preferably a non-magnetic material.

藉此,由於可抑制形成由保持部產生之磁路,故而,可使自線圈產生之磁場有效地作用於永久磁鐵。 Thereby, since the magnetic path generated by the holding portion can be suppressed, the magnetic field generated from the coil can be effectively applied to the permanent magnet.

於本發明之光學元件中,上述可動部及軸部較好為各自包含樹脂材料。 In the optical element of the present invention, each of the movable portion and the shaft portion preferably contains a resin material.

藉此,可使軸部周邊之構造靈活,而可謀求小型化,降低共振頻率。又,可抑制可動部之搖動軌跡相對於環境溫度之變化。 Thereby, the structure around the shaft portion can be made flexible, and the size can be reduced and the resonance frequency can be reduced. Further, it is possible to suppress a change in the trajectory of the movable portion with respect to the ambient temperature.

於本發明之光學元件中,上述光學部較好為透過上述光。 In the optical element of the present invention, the optical portion preferably transmits the light.

藉此,可利用光學部之折射,而使光之光軸移位。 Thereby, the optical axis of the light can be displaced by the refraction of the optical portion.

於本發明之光學元件中,上述光學部較好為反射上述光。 In the optical element of the present invention, the optical portion preferably reflects the light.

藉此,可反射光而進行掃描。 Thereby, the light can be reflected and scanned.

本發明之圖像顯示裝置其特徵在於包含本發明之光學元件,且構成為藉由以上述光學元件使光進行空間調變,而將藉由上述光之照射而顯示之像素之位置移位。 An image display device according to the present invention includes the optical element of the present invention, and is configured to shift a position of a pixel displayed by irradiation of the light by spatially modulating light by the optical element.

藉此,成為具有優良顯示特性之圖像顯示裝置。 Thereby, it becomes an image display apparatus which has excellent display characteristics.

本發明之圖像顯示裝置其特徵在於包含本發明之光學元件,且藉由以上述光學元件反射光而進行掃描,而顯示圖像。 An image display device according to the present invention is characterized by comprising the optical element of the present invention, and scanning is performed by reflecting light by the optical element to display an image.

藉此,成為具有優良顯示特性之圖像顯示裝置。 Thereby, it becomes an image display apparatus which has excellent display characteristics.

本發明之光學元件之製造方法其特徵在於包含如下步驟:獲得構造體,該構造體具有:光學部,其具有光所入射之光入射面;可動部,其支持上述光學部;軸部,其將上述可動部可繞搖動軸搖動地支持;支持部,其支持上述軸部;及永久磁鐵,其設置於上述可動部;且於上述支持部,具有可視認上述永久磁鐵與上述線圈之縫隙之窗部;以於與上述永久磁鐵之間配置有間隙形成構件之狀態,使上述線圈與上述永久磁鐵對向配置;及經由上述窗部,自上述永久磁鐵與上述線圈之間去除上述間隙形成構件。 A method of manufacturing an optical element according to the present invention is characterized by comprising the steps of: obtaining a structure having an optical portion having a light incident surface on which light is incident; a movable portion supporting the optical portion; and a shaft portion The movable portion is slidably supported around the rocking shaft; the support portion supports the shaft portion; and the permanent magnet is disposed on the movable portion; and the support portion has a gap between the permanent magnet and the coil a window portion; the coil is disposed to face the permanent magnet in a state in which a gap forming member is disposed between the permanent magnet; and the gap forming member is removed from the permanent magnet and the coil via the window portion .

藉此,可將線圈與永久磁鐵之位置關係(間隙)容易設為特定值。因此,可容易製造具有優良振動特性之光學元件。 Thereby, the positional relationship (gap) between the coil and the permanent magnet can be easily set to a specific value. Therefore, an optical element having excellent vibration characteristics can be easily manufactured.

1‧‧‧投影儀 1‧‧‧Projector

2‧‧‧光學元件 2‧‧‧Optical components

2A‧‧‧光學元件 2A‧‧‧Optical components

3‧‧‧HMD 3‧‧‧HMD

4‧‧‧投影儀 4‧‧‧Projector

5‧‧‧HUD 5‧‧‧HUD

6‧‧‧對象物 6‧‧‧ Objects

9‧‧‧間隙形成構件 9‧‧‧Gap forming members

20‧‧‧構造體 20‧‧‧structure

21‧‧‧玻璃板 21‧‧‧ glass plate

21A‧‧‧光反射部 21A‧‧‧Light Reflecting Department

22‧‧‧可動部 22‧‧‧movable department

23‧‧‧支持部 23‧‧‧Support Department

24a‧‧‧軸部 24a‧‧‧Axis

24b‧‧‧軸部 24b‧‧‧Axis

25‧‧‧驅動機構 25‧‧‧ drive mechanism

26‧‧‧保持部 26‧‧‧ Keeping Department

102‧‧‧光源 102‧‧‧Light source

104a‧‧‧鏡面 104a‧‧‧Mirror

104b‧‧‧鏡面 104b‧‧‧Mirror

104c‧‧‧鏡面 104c‧‧ ‧ mirror

106a‧‧‧雙向色鏡 106a‧‧‧Two-way color mirror

106b‧‧‧雙向色鏡 106b‧‧‧Two-way color mirror

108B‧‧‧液晶顯示元件 108B‧‧‧Liquid display components

108G‧‧‧液晶顯示元件 108G‧‧‧Liquid display components

108R‧‧‧液晶顯示元件 108R‧‧‧Liquid display components

110‧‧‧分色稜鏡 110‧‧‧Separation

112‧‧‧投射透鏡系統 112‧‧‧Projection lens system

120‧‧‧控制電路 120‧‧‧Control circuit

122‧‧‧圖像信號處理電路 122‧‧‧Image signal processing circuit

221‧‧‧貫通孔 221‧‧‧through holes

231‧‧‧軸連接部 231‧‧‧Axis connection

232‧‧‧軸連接部 232‧‧‧Axis connection

233‧‧‧連結部 233‧‧‧Connecting Department

233a‧‧‧固定部 233a‧‧‧Fixed Department

233b‧‧‧薄壁部 233b‧‧‧ Thin wall

234‧‧‧連結部 234‧‧‧Connecting Department

235‧‧‧凹部 235‧‧‧ recess

236‧‧‧窗部 236‧‧"Window Department

236a‧‧‧面 236a‧‧‧

251‧‧‧永久磁鐵 251‧‧‧ permanent magnet

251a‧‧‧面 251a‧‧‧ face

252‧‧‧線圈 252‧‧‧ coil

252a‧‧‧面 252a‧‧‧

253‧‧‧電壓施加部 253‧‧‧Voltage application department

261‧‧‧貫通孔 261‧‧‧through holes

262‧‧‧貫通孔 262‧‧‧through holes

310‧‧‧光源 310‧‧‧Light source

320‧‧‧液晶顯示元件 320‧‧‧Liquid display components

330‧‧‧投射透鏡系統 330‧‧‧Projection lens system

340‧‧‧導光部 340‧‧‧Light Guide

341‧‧‧半鏡面 341‧‧‧Half mirror

410‧‧‧描繪用光源單元 410‧‧‧Drawing light source unit

411B‧‧‧雷射光源 411B‧‧‧Laser light source

411G‧‧‧雷射光源 411G‧‧‧Laser light source

411R‧‧‧雷射光源 411R‧‧‧Laser light source

412B‧‧‧準直儀透鏡 412B‧‧ ‧collimator lens

412G‧‧‧準直儀透鏡 412G‧‧ ‧ collimator lens

412R‧‧‧準直儀透鏡 412R‧‧‧ collimator lens

413B‧‧‧雙向色鏡 413B‧‧‧Two-way color mirror

413G‧‧‧雙向色鏡 413G‧‧‧Two-way color mirror

413R‧‧‧雙向色鏡 413R‧‧‧Two-way color mirror

510‧‧‧投影單元 510‧‧‧projection unit

511‧‧‧光源 511‧‧‧Light source

512‧‧‧液晶顯示元件 512‧‧‧Liquid display components

513‧‧‧投射透鏡系統 513‧‧‧Projection lens system

520‧‧‧反射鏡面 520‧‧‧Mirror surface

A-A‧‧‧線 A-A‧‧‧ line

Bv‧‧‧資料信號 Bv‧‧‧ information signal

E‧‧‧瞳孔 E‧‧‧ pupil

FG‧‧‧擋風玻璃 FG‧‧‧ windshield

G‧‧‧間隙 G‧‧‧ gap

Gv‧‧‧資料信號 Gv‧‧‧ information signal

J‧‧‧搖動軸 J‧‧‧Shake axis

L‧‧‧描繪用雷射光 L‧‧‧ depicting laser light

LL‧‧‧影像光 LL‧‧‧ image light

P1‧‧‧圖像顯示位置 P1‧‧‧ image display position

P2‧‧‧圖像顯示位置 P2‧‧‧ image display position

Px‧‧‧像素 Px‧‧ pixels

Rv‧‧‧資料信號 Rv‧‧‧ information signal

Vid‧‧‧圖像信號 Vid‧‧‧ image signal

Wx1‧‧‧寬度 Wx1‧‧‧Width

Wx2‧‧‧寬度 Wx2‧‧‧Width

Wx3‧‧‧寬度 Wx3‧‧‧Width

Wy1‧‧‧寬度 Wy1‧‧‧Width

Wy2‧‧‧寬度 Wy2‧‧‧Width

Wy3‧‧‧寬度 Wy3‧‧‧Width

X‧‧‧軸 X‧‧‧ axis

Y‧‧‧軸 Y‧‧‧ axis

Z‧‧‧軸 Z‧‧‧ axis

圖1係表示本發明之第1實施形態之圖像顯示裝置之光學構成之圖。 Fig. 1 is a view showing an optical configuration of an image display device according to a first embodiment of the present invention.

圖2係表示使影像光移動之情況之圖。 Fig. 2 is a view showing a state in which image light is moved.

圖3係表示圖1所示之圖像顯示裝置之電性構成之方塊圖。 Fig. 3 is a block diagram showing the electrical configuration of the image display device shown in Fig. 1.

圖4(a)、(b)係圖1所示之圖像顯示裝置具有之光學元件之俯視圖及仰視圖。 4(a) and 4(b) are a plan view and a bottom view of an optical element included in the image display device shown in Fig. 1.

圖5係圖4中之A-A線剖視圖。 Figure 5 is a cross-sectional view taken along line A-A of Figure 4.

圖6係表示永久磁鐵與線圈之配置之平面圖。 Fig. 6 is a plan view showing the arrangement of a permanent magnet and a coil.

圖7係圖4所示之光學元件之側視圖。 Figure 7 is a side elevational view of the optical component shown in Figure 4.

圖8(a)~(c)係用於說明圖4所示之光學元件之製造方法之剖視圖。 8(a) to 8(c) are cross-sectional views for explaining the method of manufacturing the optical element shown in Fig. 4.

圖9係表示本發明之第2實施形態之圖像顯示裝置之光學構成之圖。 Fig. 9 is a view showing an optical configuration of an image display device according to a second embodiment of the present invention.

圖10係表示本發明之第3實施形態之圖像顯示裝置之光學構成之圖。 Fig. 10 is a view showing the optical configuration of an image display device according to a third embodiment of the present invention.

圖11係本發明之第4實施形態之圖像顯示裝置具有之光學元件之剖視圖。 Figure 11 is a cross-sectional view showing an optical element included in an image display device according to a fourth embodiment of the present invention.

圖12係表示本發明之第5實施形態之圖像顯示裝置之光學構成之圖。 Fig. 12 is a view showing the optical configuration of an image display device according to a fifth embodiment of the present invention.

圖13(a)、(b)係圖12所示之圖像顯示裝置具有之光學元件之俯視圖及仰視圖。 13(a) and 13(b) are a plan view and a bottom view of an optical element included in the image display device shown in Fig. 12.

以下,關於本發明之光學元件、圖像顯示裝置及光學元件之製造方法,基於附加圖式所示之各實施形態進行詳細說明。 Hereinafter, the optical element, the image display device, and the optical element manufacturing method of the present invention will be described in detail based on the respective embodiments shown in the additional drawings.

<第1實施形態> <First embodiment>

圖1係表示本發明之第1實施形態之圖像顯示裝置之光學構成之圖。圖2係表示使影像光移動之情況之圖。圖3係表示圖1所示之圖像顯示裝置之電性構成之方塊圖。圖4係圖1所示之圖像顯示裝置具有之光學元件之俯視圖及仰視圖。圖5係圖4中之A-A線剖視圖。圖6係表示永久磁鐵與線圈之配置之平面圖。圖7係圖4所示之光學元件之側視 圖。圖8係用於說明圖4所示之光學元件之製造方法之剖視圖。 Fig. 1 is a view showing an optical configuration of an image display device according to a first embodiment of the present invention. Fig. 2 is a view showing a state in which image light is moved. Fig. 3 is a block diagram showing the electrical configuration of the image display device shown in Fig. 1. 4 is a plan view and a bottom view of an optical element of the image display device shown in FIG. 1. Figure 5 is a cross-sectional view taken along line A-A of Figure 4. Fig. 6 is a plan view showing the arrangement of a permanent magnet and a coil. Figure 7 is a side view of the optical component shown in Figure 4. Figure. Fig. 8 is a cross-sectional view for explaining a method of manufacturing the optical element shown in Fig. 4.

另,於圖4至圖6中,為了說明方便,作為互相正交之3軸,圖示有X軸、Y軸及Z軸,並將該圖示之箭頭符號之前端側設為「+側」,將基端側設為「-側」。又,於以下,將平行於X軸之方向亦稱作「X軸方向」,將平行於Y軸之方向亦稱作「Y軸方向」,將平行於Z軸之方向亦稱作「Z軸方向」,並將+Z側亦稱作「上」,將-Z側亦稱作「下」。 In addition, in FIGS. 4 to 6, for convenience of explanation, the X-axis, the Y-axis, and the Z-axis are shown as three axes orthogonal to each other, and the front end side of the arrow symbol in the figure is set to "+ side". The base end side is set to "-side". In the following, the direction parallel to the X-axis is also referred to as "X-axis direction", the direction parallel to the Y-axis is also referred to as "Y-axis direction", and the direction parallel to the Z-axis is also referred to as "Z-axis". Direction", and the +Z side is also referred to as "up", and the -Z side is also referred to as "down".

1.投影儀 Projector

圖1所示之投影儀(圖像顯示裝置)1係LCD方式之投影儀,如圖1所示般,包含:光源102、鏡面104a、104b、104c、雙向色鏡106a、106b、液晶顯示元件108R、108G、108B、分色稜鏡110、作為光路偏向元件之光學元件2、及投射透鏡系統112。 The projector (image display device) 1 shown in FIG. 1 is an LCD type projector, as shown in FIG. 1, comprising: a light source 102, mirror surfaces 104a, 104b, 104c, bidirectional color mirrors 106a, 106b, and liquid crystal display elements. 108R, 108G, 108B, color separation 稜鏡110, optical element 2 as an optical path deflecting element, and projection lens system 112.

作為光源102,例如可例舉鹵素燈、水銀燈、發光二極體(LED)等。又,作為該光源102,使用出射白色光者。接著,自光源102出射之光,首先藉由雙向色鏡106a分離為紅色光(R)與其他光。紅色光係經鏡面104a反射後,入射至液晶顯示元件108R,其他光藉由雙向色鏡106b進而分離為綠色光(G)與藍色光(B)。接著,綠色光入射至液晶顯示元件108G,藍色光經鏡面104b、104c反射後,入射至液晶顯示元件108B。 As the light source 102, for example, a halogen lamp, a mercury lamp, a light emitting diode (LED), or the like can be exemplified. Further, as the light source 102, a person who emits white light is used. Next, the light emitted from the light source 102 is first separated into red light (R) and other light by the bidirectional color mirror 106a. The red light is reflected by the mirror surface 104a, and then incident on the liquid crystal display element 108R, and the other light is further separated into green light (G) and blue light (B) by the two-way color mirror 106b. Then, the green light is incident on the liquid crystal display element 108G, and the blue light is reflected by the mirror surfaces 104b and 104c, and then incident on the liquid crystal display element 108B.

液晶顯示元件108R、108G、108B係分別作為空間光調變器而使用。該等液晶顯示元件108R、108G、108B係分別與R、G、B之原色對應之透過型空間光調變器,包含例如縱1080列、橫1920行之配置成矩陣狀之像素。於各像素中,調整相對於入射光之透過光之光量,而協調控制各液晶顯示元件108R、108G、108B中全部像素之光量分佈。藉由此種液晶顯示元件108R、108G、108B分別空間性調變後之光於分色稜鏡110合成,且自分色稜鏡110出射全彩之影像光LL。接著,出射之影像光LL藉由投射透鏡系統112放大且投射至對象物6。 The liquid crystal display elements 108R, 108G, and 108B are used as spatial light modulators, respectively. The liquid crystal display elements 108R, 108G, and 108B are transmissive spatial light modulators corresponding to the primary colors of R, G, and B, respectively, and include, for example, pixels arranged in a matrix of 1080 columns in length and 1920 rows in width. In each pixel, the amount of light transmitted through the incident light is adjusted, and the light amount distribution of all the pixels in each of the liquid crystal display elements 108R, 108G, and 108B is coordinated. The light which is spatially modulated by the liquid crystal display elements 108R, 108G, and 108B is synthesized by the color separation 稜鏡 110, and the full-color image light LL is emitted from the color separation 稜鏡 110. Then, the emitted image light LL is enlarged by the projection lens system 112 and projected onto the object 6.

此處,投影儀1於分色稜鏡110與投射透鏡系統112之間具有光學元件2,藉由利用光學元件2使影像光LL之光軸移動(進行所謂的「像素移位」),而可使較液晶顯示元件108R、108G、108B之解析度更高之解析度(若液晶顯示元件108R、108G、108B為全高清則為4K)之圖像投射至對象物6。關於該原理,使用圖2進行簡單說明。光學元件2具有使影像光LL透過之玻璃板21,藉由變更該玻璃板21之姿勢,可利用折射而使影像光LL之光軸移動。 Here, the projector 1 has the optical element 2 between the color separation cassette 110 and the projection lens system 112, and the optical axis of the image light LL is moved by the optical element 2 (so-called "pixel shift"). An image having a higher resolution than the liquid crystal display elements 108R, 108G, and 108B (4K if the liquid crystal display elements 108R, 108G, and 108B are full HD) can be projected onto the object 6. This principle will be briefly described using FIG. 2. The optical element 2 has a glass plate 21 through which the image light LL is transmitted, and by changing the posture of the glass plate 21, the optical axis of the image light LL can be moved by refraction.

接著,投影儀1係利用此種光軸之移動,將使影像光LL之光軸移動至一端側之情形之圖像顯示位置P1、與使影像光LL之光軸移動至另一端側之情形之圖像顯示位置P2以朝傾斜方向(圖2中之箭頭符號方向)且以半像素量(亦即,像素Px之一半)移位之方式構成,而於圖像顯示位置P1、P2交替顯示圖像,藉此,使外觀上之像素增加,而謀求投影至對象物6之圖像之高解析度化。另,作為圖像顯示位置P1、P2之移位量,並未限定於半像素量,例如,既可為像素Px之1/4,亦可為1/8。 Next, the projector 1 uses the movement of the optical axis to move the image display position P1 when the optical axis of the image light LL is moved to the one end side, and the case where the optical axis of the image light LL is moved to the other end side. The image display position P2 is formed in the oblique direction (the direction of the arrow symbol in FIG. 2) and is shifted by a half pixel amount (that is, one half of the pixel Px), and is alternately displayed at the image display positions P1, P2. As a result, the image is increased in appearance, and the image projected onto the object 6 is increased in resolution. Further, the shift amount of the image display positions P1 and P2 is not limited to a half pixel amount, and may be, for example, 1/4 of the pixel Px or 1/8.

此種構成之投影儀1係除了光學元件2與液晶顯示元件108R、108G、108B之外,如圖3所示,並具備控制電路120與圖像信號處理電路122。控制電路120控制對液晶顯示元件108R、108G、108B之資料信號之寫入動作、光學元件2中之光路偏向動作、圖像信號處理電路122中之資料信號之產生動作等。另一方面,圖像信號處理電路122係將自未圖示之外部裝置供給之圖像信號Vid分別以R、G、B之3原色分離,且轉換為適合各個液晶顯示元件108R、108G、108B之動作之資料信號Rv、Gv、Bv。接著,將經轉換之資料信號Rv、Gv、Bv分別供給至液晶顯示元件108R、108G、108B,基於此,液晶顯示元件108R、108G、108B動作。 The projector 1 having such a configuration includes a control circuit 120 and an image signal processing circuit 122, as shown in FIG. 3, in addition to the optical element 2 and the liquid crystal display elements 108R, 108G, and 108B. The control circuit 120 controls the writing operation of the data signals to the liquid crystal display elements 108R, 108G, and 108B, the optical path deflection operation in the optical element 2, and the generation operation of the data signals in the image signal processing circuit 122. On the other hand, the image signal processing circuit 122 separates the image signals Vid supplied from an external device (not shown) in three primary colors of R, G, and B, and converts them into respective liquid crystal display elements 108R, 108G, and 108B. The data signals Rv, Gv, Bv of the action. Next, the converted data signals Rv, Gv, and Bv are supplied to the liquid crystal display elements 108R, 108G, and 108B, respectively, and based on this, the liquid crystal display elements 108R, 108G, and 108B operate.

2.光學元件 2. Optical components

接著,對組入於上述之投影儀1之光學元件2進行詳細說明。 Next, the optical element 2 incorporated in the above-described projector 1 will be described in detail.

光學元件2係如圖4至圖6所示般,包含構造體20與驅動機構25,該構造體20包含:可動部22,其具有光透過性,且設置有使影像光LL偏向之玻璃板(光學部)21;框狀之支持部23,其設置於可動部22之周圍;軸部24a、24b,其等係連結可動部22與支持部23,且將可動部22可相對於支持部23搖動(轉動)地支持;該驅動機構25係使可動部22相對於支持部23搖動。此種構成之光學元件2係以例如+Z側朝向分色稜鏡110側、-Z側朝向投射透鏡系統112側之方式配置於投影儀1內。但,光學元件2之朝向亦可為相反。 As shown in FIGS. 4 to 6, the optical element 2 includes a structure 20 and a drive mechanism 25, and the structure 20 includes a movable portion 22 that is light transmissive and is provided with a glass plate that deflects the image light LL. (optical portion) 21; a frame-shaped support portion 23 provided around the movable portion 22; and shaft portions 24a, 24b that connect the movable portion 22 and the support portion 23, and the movable portion 22 is movable relative to the support portion 23 is supported by rocking (rotation); the drive mechanism 25 causes the movable portion 22 to rock relative to the support portion 23. The optical element 2 having such a configuration is disposed in the projector 1 such that the +Z side faces the color separation 稜鏡 110 side and the -Z side faces the projection lens system 112 side. However, the orientation of the optical element 2 can also be reversed.

可動部22形成為平板狀,於其中央部具有貫通孔221。且,於該貫通孔221嵌入有玻璃板21,玻璃板21係例如藉由接著劑等接著於可動部22。另,貫通孔221於其周面具有階差(爪),以該階差承接玻璃板21。藉此,對可動部22配置玻璃板21變得簡單。 The movable portion 22 is formed in a flat plate shape and has a through hole 221 at a central portion thereof. Further, a glass plate 21 is fitted into the through hole 221, and the glass plate 21 is attached to the movable portion 22 by, for example, an adhesive. Further, the through hole 221 has a step (claw) on its circumferential surface, and the glass plate 21 is received by the step. Thereby, it is easy to arrange the glass plate 21 with respect to the movable part 22.

玻璃板21具有矩形之俯視形狀。該玻璃板21係藉由使影像光LL之入射角度自0°傾斜,而可使入射之影像光LL折射並透過。因此,藉由以成為作為目的之入射角度之方式,使玻璃板21之姿勢變化,而可控制影像光LL之偏向方向或偏向量。另,此種玻璃板21之大小係以使自分色稜鏡110出射之影像光LL透過之方式適當設定。又,玻璃板21較好為實質無色透明。又,亦可於玻璃板21之影像光LL之入射面及出射面形成防反射膜。 The glass plate 21 has a rectangular top view shape. The glass plate 21 can refract and transmit the incident image light LL by inclining the incident angle of the image light LL from 0°. Therefore, by changing the posture of the glass plate 21 so as to become the intended incident angle, the deflection direction or the skew vector of the image light LL can be controlled. Further, the size of the glass plate 21 is appropriately set so as to transmit the image light LL emitted from the color separation 稜鏡110. Further, the glass plate 21 is preferably substantially colorless and transparent. Further, an antireflection film may be formed on the incident surface and the outgoing surface of the image light LL of the glass plate 21.

作為玻璃板21之構成材料,並非特別限定,例如可使用如白板玻璃、硼矽玻璃、石英玻璃等各種玻璃材料。又,於本實施形態中,雖使用玻璃板21作為光學部,但光學部只要是以具有光透過性、可使影像光LL折射之材料構成,則不特別限定,除了玻璃之外,亦可為例如以如水晶、藍寶石等各種結晶材料、或聚碳酸酯樹脂、丙烯酸樹脂等各種樹脂材料等構成者。惟,作為光學部,較好為如本實施形態 般使用玻璃板21,藉此,由於可尤其提高光學部之剛性,故而可特別抑制於光學部中偏向之影像光LL之偏向不均。 The constituent material of the glass plate 21 is not particularly limited, and for example, various glass materials such as white glass, borosilicate glass, and quartz glass can be used. In addition, in the present embodiment, the glass plate 21 is used as the optical portion. However, the optical portion is not particularly limited as long as it is light-transmitting and can refract the image light LL. For example, it is composed of various crystal materials such as crystal, sapphire, or various resin materials such as polycarbonate resin and acrylic resin. However, as the optical portion, it is preferably as in the present embodiment. Since the glass plate 21 is used in general, the rigidity of the optical portion can be particularly enhanced, so that the unevenness of the image light LL deflected in the optical portion can be particularly suppressed.

於支持有此種玻璃板21之可動部22之周圍設置有框狀之支持部23,且藉由軸部24a、24b連結可動部22與支持部23。軸部24a、24b於俯視下,於X軸方向及Y軸方向錯開而定位,而形成可動部22之搖動軸J。藉此,可動部22繞相對於X軸及Y軸之兩軸約45°傾斜之搖動軸J搖動,且隨著該搖動而玻璃板21之姿勢發生變化。尤其,於光學元件2中,於俯視下,軸部24a、24b相對於玻璃板21之中心配置為點對稱,故而,可動部22之搖動平衡變得良好。另,X軸(Y軸)相對於搖動軸J之傾斜角並非限定為45°。 A frame-shaped support portion 23 is provided around the movable portion 22 supporting the glass plate 21, and the movable portion 22 and the support portion 23 are coupled by the shaft portions 24a and 24b. The shaft portions 24a and 24b are positioned and displaced in the X-axis direction and the Y-axis direction in plan view to form the rocking axis J of the movable portion 22. Thereby, the movable portion 22 is swung around the rocking axis J which is inclined by about 45 degrees with respect to the two axes of the X-axis and the Y-axis, and the posture of the glass plate 21 changes with the shaking. In particular, in the optical element 2, the shaft portions 24a and 24b are arranged in point symmetry with respect to the center of the glass plate 21 in plan view, so that the rocking balance of the movable portion 22 is good. Further, the inclination angle of the X-axis (Y-axis) with respect to the rocking axis J is not limited to 45 degrees.

如以上之可動部22、支持部23及軸部24a、24b係構成為一體(一體形成)。藉此,可提高支持部23與軸部24a、24b之邊界部分或軸部24a、24b與可動部22之邊界部分之耐衝擊性或長期耐久性。 The movable portion 22, the support portion 23, and the shaft portions 24a and 24b are integrally formed (integrally formed) as described above. Thereby, the impact resistance or long-term durability of the boundary portion between the support portion 23 and the shaft portions 24a and 24b or the boundary portion between the shaft portions 24a and 24b and the movable portion 22 can be improved.

又,可動部22、支持部23及軸部24a、24b係以較玻璃板21之構成材料楊氏係數小之材料構成。作為其等之構成材料,較好為包含樹脂,更好為將樹脂作為主要成分。藉此,可有效抑制伴隨可動部22之搖動所產生之應力導致玻璃板21自身之不需要之振動。又,可以靈活之可動部22包圍玻璃板21之側面,於變更玻璃板21之姿勢時,可將玻璃板21所產生之應力抑制為較小,且可將伴隨應力分佈而於玻璃板21所產生之不需要之振動抑制為較小。其結果,可防止藉由玻璃板21而偏向之圖像偏向於非意圖之方向。又,可抑制可動部22之搖動軌跡相對於環境溫度之變化。又,例如,可使軸部24a、24b及其周邊充分靈活,而可設置小型且共振頻率較低之(60kHz左右之)光學元件2。 Further, the movable portion 22, the support portion 23, and the shaft portions 24a and 24b are made of a material having a smaller Young's modulus than the constituent material of the glass plate 21. As a constituent material of these, it is preferable to contain a resin, and it is more preferable to use a resin as a main component. Thereby, it is possible to effectively suppress the unnecessary vibration of the glass sheet 21 itself due to the stress generated by the shaking of the movable portion 22. Moreover, the flexible movable portion 22 surrounds the side surface of the glass plate 21, and when the posture of the glass plate 21 is changed, the stress generated by the glass plate 21 can be suppressed to be small, and the stress distribution can be applied to the glass plate 21. The unwanted vibration suppression produced is small. As a result, it is possible to prevent the image deflected by the glass plate 21 from being biased in an unintended direction. Further, it is possible to suppress a change in the trajectory of the movable portion 22 with respect to the ambient temperature. Further, for example, the shaft portions 24a and 24b and the periphery thereof can be sufficiently flexible, and the optical element 2 having a small resonance frequency (about 60 kHz) can be provided.

作為上述樹脂,並非特別限定,例如可例舉聚乙烯、聚丙烯、聚矽氧、聚縮醛、聚醯胺、聚碳酸酯、聚苯醚、聚乙烯對苯二甲酸酯、聚對苯二甲酸丁二酯、聚芳香酯、聚碸、聚醚碸、聚苯硫醚、聚 醚醚酮、聚醯亞胺、聚醚醯亞胺、氟樹脂等,使用包含其等中之至少1種者。 The resin is not particularly limited, and examples thereof include polyethylene, polypropylene, polyfluorene oxide, polyacetal, polyamine, polycarbonate, polyphenylene ether, polyethylene terephthalate, and polyparaphenylene. Butane dicarboxylate, polyaryl ester, polyfluorene, polyether oxime, polyphenylene sulfide, poly Ether ether ketone, polyimide, polyether quinone, fluororesin or the like is used, and at least one of them is used.

接著,針對使可動部22搖動之驅動機構25進行說明。驅動機構25係如圖5所示般,具有永久磁鐵251、線圈252、及藉由於線圈252施加交替電壓即驅動信號DS而自線圈252產生作用於永久磁鐵251之磁場之電壓施加部253之電磁致動器。藉由使用電磁致動器作為驅動機構25,而可產生足以使可動部22搖動之力,故而,可使可動部22順暢地搖動。 Next, the drive mechanism 25 that causes the movable portion 22 to swing will be described. As shown in FIG. 5, the drive mechanism 25 has a permanent magnet 251, a coil 252, and an electromagnetic force applied to the voltage application portion 253 which acts on the magnetic field of the permanent magnet 251 from the coil 252 by applying an alternating voltage, that is, a drive signal DS, to the coil 252. Actuator. By using the electromagnetic actuator as the drive mechanism 25, a force sufficient to cause the movable portion 22 to swing can be generated, so that the movable portion 22 can be smoothly shaken.

永久磁鐵251係設置於可動部22之緣部,且形成為沿著Y軸方向之長邊形狀。又,永久磁鐵251於Z軸方向(可動部22之厚度方向)磁化。作為此種永久磁鐵251,並非特別限定,例如,可使用釹磁鐵、鐵氧體磁鐵、釤鈷磁鐵、鋁鎳鈷磁鐵等。 The permanent magnet 251 is provided at the edge of the movable portion 22, and is formed in a long side shape along the Y-axis direction. Further, the permanent magnet 251 is magnetized in the Z-axis direction (the thickness direction of the movable portion 22). The permanent magnet 251 is not particularly limited, and for example, a neodymium magnet, a ferrite magnet, a samarium cobalt magnet, an alnico magnet, or the like can be used.

另一方面,線圈252係以與永久磁鐵251間隔特定之間隙G於Z軸方向(可動部22之厚度方向)對向之方式而配置。作為間隙G,並非特別限定,根據永久磁鐵251之大小或自線圈252產生之磁場之大小等亦不同,較好為例如0.1mm以上、1mm以下左右,更好為0.2mm以上、0.4mm以下左右。藉此,可防止可動部22之搖動時永久磁鐵251與線圈252接觸,且使自線圈252所產生之磁場更有效率地作用於永久磁鐵251。因此,可使可動部22更有效率且穩定地搖動。 On the other hand, the coil 252 is disposed so as to face the permanent magnet 251 with a specific gap G in the Z-axis direction (the thickness direction of the movable portion 22). The gap G is not particularly limited, and is different depending on the size of the permanent magnet 251 or the magnitude of the magnetic field generated from the coil 252, and is preferably, for example, 0.1 mm or more and 1 mm or less, more preferably 0.2 mm or more and 0.4 mm or less. . Thereby, the permanent magnet 251 is prevented from coming into contact with the coil 252 when the movable portion 22 is shaken, and the magnetic field generated from the coil 252 is more effectively applied to the permanent magnet 251. Therefore, the movable portion 22 can be more efficiently and stably shaken.

又,線圈252係空芯線圈。如此,藉由設為空芯線圈,可使設置有永久磁鐵251之可動部22更順暢地搖動。更具體說明,例如,作為線圈252,使用於內側配置有磁心者之情形時,根據產生之磁力之強度,永久磁鐵251被磁心吸引,藉此,有搖動軸J位移,而無法順暢且精度良好地進行可動部22之搖動之情形。為了防止產生此種不良,作為線圈252,較好為使用如本實施形態般之空芯線圈。 Further, the coil 252 is an air core coil. As described above, by providing the air-core coil, the movable portion 22 provided with the permanent magnet 251 can be more smoothly shaken. More specifically, for example, when the coil 252 is used in a case where a core is disposed inside, the permanent magnet 251 is attracted by the core according to the strength of the generated magnetic force, whereby the rocking shaft J is displaced, and the smoothness and accuracy are not smooth. The situation in which the movable portion 22 is shaken is performed. In order to prevent such a defect, it is preferable to use the air core coil as in the present embodiment as the coil 252.

又,線圈252係如圖6所示般,採用與永久磁鐵251之俯視形狀對 應之大致長方形。接著,將長軸方向(Y軸方向)之永久磁鐵251之寬度設為Wy1,將線圈252之內周之寬度設為Wy2,將線圈252之外周之寬度設為Wy3時,滿足Wy2<Wy1<Wy3之關係,將短軸方向(X軸方向)之永久磁鐵251之寬度設為Wx1,將線圈252之內周之寬度設為Wx2,將線圈252之外周之寬度設為Wx3時,滿足Wx2<Wx1<Wx3之關係。如此,藉由使線圈252之內周小於永久磁鐵251之輪廓,而可抑制於線圈252施加電流時之電力損失(發熱等),從而可更有效率且省電地自線圈252產生磁場。 Moreover, the coil 252 is formed in a plan view shape with respect to the permanent magnet 251 as shown in FIG. It should be roughly rectangular. Next, the width of the permanent magnet 251 in the long axis direction (Y-axis direction) is Wy1, the width of the inner circumference of the coil 252 is Wy2, and when the width of the outer circumference of the coil 252 is Wy3, Wy2 < Wy1 < In the relationship of Wy3, the width of the permanent magnet 251 in the short-axis direction (X-axis direction) is Wx1, the width of the inner circumference of the coil 252 is Wx2, and the width of the outer circumference of the coil 252 is Wx3, which satisfies Wx2< Wx1 <Wx3 relationship. As described above, by making the inner circumference of the coil 252 smaller than the outline of the permanent magnet 251, power loss (heat generation or the like) when the current is applied to the coil 252 can be suppressed, and the magnetic field can be generated from the coil 252 more efficiently and in a power-saving manner.

進而,於自Z軸方向觀察之俯視下,永久磁鐵251之中心(重心)與線圈252之中心(重心)大致一致,永久磁鐵251之外周與線圈252重疊。藉此,可使自線圈252產生之磁場有效率地作用於永久磁鐵251。 Further, in the plan view seen from the Z-axis direction, the center (center of gravity) of the permanent magnet 251 substantially coincides with the center (center of gravity) of the coil 252, and the outer circumference of the permanent magnet 251 overlaps with the coil 252. Thereby, the magnetic field generated from the coil 252 can be efficiently applied to the permanent magnet 251.

此種構成之驅動機構25係如以下般使可動部22搖動。於未自電壓施加部253於線圈252施加驅動信號之情形時,可動部22實質上與xy平面平行。接著,若自電壓施加部253於線圈252施加驅動信號,則可動部22相對於支持部23繞搖動軸J搖動(轉動)。接著,藉由此種可動部22之搖動,影像光LL之光軸移動,於圖像顯示位置P1、P2交替地顯示圖像。因此,外觀上之像素增加,而可謀求圖像之高解析度化。 The drive mechanism 25 having such a configuration causes the movable portion 22 to swing as follows. When the drive signal is not applied from the voltage application unit 253 to the coil 252, the movable portion 22 is substantially parallel to the xy plane. Next, when a driving signal is applied from the voltage applying unit 253 to the coil 252, the movable portion 22 is swung (rotated) around the rocking axis J with respect to the support portion 23. Then, by the shaking of the movable portion 22, the optical axis of the image light LL is moved, and the images are alternately displayed at the image display positions P1, P2. Therefore, the number of pixels in appearance increases, and the resolution of the image can be improved.

如以上之驅動機構25所具有之線圈252係經由保持部26固定於支持部23。如此,藉由將線圈252固定於支持部23,而可容易地將線圈252固定於特定位置。尤其係,如本實施形態般,藉由將線圈252經由保持部26固定於支持部23,例如,藉由調整保持部26相對於支持部23之固定位置,而可調整線圈252相對於永久磁鐵251之位置。因此,可容易進行永久磁鐵251與線圈252之對準。 The coil 252 included in the drive mechanism 25 described above is fixed to the support portion 23 via the holding portion 26. Thus, by fixing the coil 252 to the support portion 23, the coil 252 can be easily fixed to a specific position. In particular, as in the present embodiment, by fixing the coil 252 to the support portion 23 via the holding portion 26, for example, by adjusting the fixed position of the holding portion 26 with respect to the support portion 23, the coil 252 can be adjusted with respect to the permanent magnet. 251 location. Therefore, the alignment of the permanent magnet 251 and the coil 252 can be easily performed.

又,保持部係自與永久磁鐵251相反側保持線圈252。換言之,保持部26係以不位於永久磁鐵251與線圈252之間之方式設置。藉此,可更高精度地調整永久磁鐵251與線圈252之間隙G。又,可防止使可 動部22搖動時永久磁鐵251與保持部26接觸。 Further, the holding portion holds the coil 252 from the side opposite to the permanent magnet 251. In other words, the holding portion 26 is provided not to be located between the permanent magnet 251 and the coil 252. Thereby, the gap G between the permanent magnet 251 and the coil 252 can be adjusted with higher precision. Also, it can prevent When the movable portion 22 is rocked, the permanent magnet 251 comes into contact with the holding portion 26.

又,於保持部26,形成有2個貫通孔261、262,且可經由貫通孔261、262而視認線圈252之內周之一部分。換言之,以重疊於線圈252之內周之方式而形成有貫通孔261、262。藉此,於將線圈252固定於保持部26時,藉由經由貫通孔261、262視認線圈252之內周,而可容易進行其等之定位。 Further, in the holding portion 26, two through holes 261 and 262 are formed, and one of the inner circumferences of the coil 252 can be visually recognized through the through holes 261 and 262. In other words, the through holes 261 and 262 are formed so as to overlap the inner circumference of the coil 252. Thereby, when the coil 252 is fixed to the holding portion 26, the inner circumference of the coil 252 can be visually recognized through the through holes 261 and 262, whereby the positioning thereof can be easily performed.

又,保持部26係非磁性體。藉此,由於可抑制形成由保持部26產生之磁路,而可使自線圈252產生之磁場有效率地作用於永久磁鐵251。另,作為構成保持部26之非磁性材料,並非特別限定,例如,可例舉鋁、鈦、一部分不鏽鋼等金屬材料、或橡膠、塑料等樹脂材料。 Further, the holding portion 26 is a non-magnetic body. Thereby, since the magnetic path generated by the holding portion 26 can be suppressed, the magnetic field generated from the coil 252 can be efficiently applied to the permanent magnet 251. In addition, the non-magnetic material constituting the holding portion 26 is not particularly limited, and examples thereof include a metal material such as aluminum, titanium, or a part of stainless steel, or a resin material such as rubber or plastic.

固定有此種保持部26之支持部23係採用如以下之構成。亦即,支持部23係如圖4及圖7所示般,具有:軸連接部231,其形成包圍可動部22之框狀,於X軸方向延伸,且連接有軸部24a;軸連接部232,其係於X軸方向延伸,且連接有軸部24b;連結部233,其係於可動部22之+X軸側連結軸連接部231、232;及連結部234,其係於可動部22之-X側連結軸連接部231、232。 The support portion 23 to which the holding portion 26 is fixed is configured as follows. In other words, the support portion 23 has a shaft connecting portion 231 which is formed in a frame shape surrounding the movable portion 22 and extends in the X-axis direction and is connected to the shaft portion 24a. The shaft connecting portion is connected as shown in Figs. 4 and 7 232, which is connected to the X-axis direction and connected to the shaft portion 24b; the coupling portion 233 is connected to the +X-axis side connecting shaft connecting portions 231 and 232 of the movable portion 22; and the connecting portion 234 is attached to the movable portion The -X side is connected to the shaft connecting portions 231 and 232.

軸連接部231、232係分別較可動部22壁厚(參照圖5)。藉此,可提高軸連接部231、232之機械強度,而穩定地支持軸部24a、24b。因此,可使可動部22繞搖動軸J更穩定地搖動。 The shaft connecting portions 231 and 232 are respectively thicker than the movable portion 22 (see FIG. 5). Thereby, the mechanical strength of the shaft connecting portions 231, 232 can be increased, and the shaft portions 24a, 24b can be stably supported. Therefore, the movable portion 22 can be more stably shaken about the rocking axis J.

另一方面,於連結部233,設置固定有保持部26之固定部233a,與較軸連接部231、232薄壁之薄壁部233b。於固定部233a,自上表面側將保持部26藉由螺釘緊固而固定。但,保持部26對固定部233a之固定並非限定於用螺釘緊固,亦可為藉由凹凸嵌合進行之固定或使用接著劑之固定。 On the other hand, the connecting portion 233 is provided with a fixing portion 233a to which the holding portion 26 is fixed, and a thin portion 233b thinner than the relatively axial connecting portions 231 and 232. In the fixing portion 233a, the holding portion 26 is fixed by screw fastening from the upper surface side. However, the fixing of the fixing portion 26 to the fixing portion 233a is not limited to being fastened by screws, and may be fixed by concave-convex fitting or fixing by using an adhesive.

又,如圖7所示般,於薄壁部233b,形成於下表面開放之凹部 235,若自+X軸方向(亦即,與永久磁鐵251與線圈252之排列方向(Z軸方向)正交之方向)觀察,則可自光學元件2之外部,視認永久磁鐵251與線圈252之縫隙(間隙G)。藉此,可稱凹部235構成用於視認間隙G之窗部236。藉由具有此種窗部236,可簡單判斷間隙G是否為適當大小。尤其係,於本實施形態中,由於可經由窗部236而視認永久磁鐵251之線圈252側之面251a(面251a之位置)、與線圈252之永久磁鐵251側之面252a(面252a之位置),故而,可更正確地判斷該等之面251a、252a之間之間隙G。又,自+X軸方向觀察而視認間隙G時,由於視線與面251a、252a一致(由於可將面251a、252a作為線辨識),故而可更清晰地視認間隙G。 Moreover, as shown in FIG. 7, the thin part 233b is formed in the recessed part opened in the lower surface. 235, if viewed from the +X-axis direction (that is, the direction orthogonal to the arrangement direction (Z-axis direction) of the permanent magnet 251 and the coil 252), the permanent magnet 251 and the coil 252 can be visually recognized from the outside of the optical element 2. The gap (gap G). Thereby, the recessed portion 235 can constitute a window portion 236 for visually recognizing the gap G. By having such a window portion 236, it is possible to easily judge whether or not the gap G is an appropriate size. In particular, in the present embodiment, the surface 251a (the position of the surface 251a) of the permanent magnet 251 on the coil 252 side and the surface 252a of the permanent magnet 251 side of the coil 252 (the position of the surface 252a) can be visually recognized via the window portion 236. Therefore, the gap G between the faces 251a, 252a can be more accurately determined. Further, when the gap G is viewed from the +X-axis direction, the line of sight coincides with the faces 251a and 252a (since the faces 251a and 252a can be recognized as lines), so that the gap G can be clearly seen.

如此,藉由可視認間隙G,而使間隙G之調整變得容易。由於間隙G於可動部22之搖動時防止永久磁鐵251與線圈252之接觸,及使自線圈252產生之磁場有效率地作用於永久磁鐵251,故而有必要進行高精度之調整。因此,藉由設置窗部236,而能夠更高精度地調整間隙G,從而成為具有優良搖動特性之光學元件2。 Thus, the adjustment of the gap G is facilitated by visually recognizing the gap G. Since the gap G prevents the permanent magnet 251 from coming into contact with the coil 252 when the movable portion 22 is rocked, and the magnetic field generated from the coil 252 is efficiently applied to the permanent magnet 251, it is necessary to perform high-precision adjustment. Therefore, by providing the window portion 236, the gap G can be adjusted with higher precision, and the optical element 2 having excellent shaking characteristics can be obtained.

尤其係,於本實施形態中,由於窗部236採用形成於凹部235之貫通孔,故而可發揮如下之效果。第1,例如,與將凹部235以玻璃材料等透明構件填塞之情形相比,既然不存在光之反射等,而可更鮮明地視認間隙G。第2,例如,可經由窗部236拔出或***用於檢查間隙G之大小之道具(如於後述之製造方法中所使用之夾入於永久磁鐵251與線圈252之間之間隙形成構件9),從而可物理上確認間隙G之大小。 In particular, in the present embodiment, since the window portion 236 is formed in the through hole formed in the concave portion 235, the following effects can be exhibited. First, for example, compared with the case where the concave portion 235 is filled with a transparent member such as a glass material, since there is no reflection of light or the like, the gap G can be visually recognized more clearly. Second, for example, an item for checking the size of the gap G can be pulled out or inserted through the window portion 236 (such as a gap forming member 9 sandwiched between the permanent magnet 251 and the coil 252 used in the manufacturing method described later) Therefore, the size of the gap G can be physically confirmed.

以上,已對光學元件2之構成進行詳細說明。另,雖於本實施形態中,採用於可動部22配置有永久磁鐵251之所謂「動磁型」之驅動機構25,但永久磁鐵251與線圈252之配置亦可設為相反。亦即,亦可為於可動部22配置有線圈252之所謂「動圈型」之驅動機構25。惟,藉由設置如本實施形態般之「動磁型」之驅動機構25,由通電產生之 線圈252之熱量不易傳遞至可動部22或玻璃板21,而可有效抑制因熱引起之振動特性之變化(共振頻率之變化)或玻璃板21之彎曲等。 The configuration of the optical element 2 has been described in detail above. Further, in the present embodiment, the so-called "kinetic type" drive mechanism 25 in which the permanent magnet 251 is disposed in the movable portion 22 is employed, but the arrangement of the permanent magnet 251 and the coil 252 may be reversed. In other words, the so-called "moving coil type" drive mechanism 25 in which the coil 252 is disposed in the movable portion 22 may be used. However, by providing the drive mechanism 25 of the "kinetic type" as in the present embodiment, it is generated by energization. The heat of the coil 252 is not easily transmitted to the movable portion 22 or the glass plate 21, and the change in vibration characteristics due to heat (change in resonance frequency) or the bending of the glass plate 21 can be effectively suppressed.

3.光學元件之製造方法 3. Method of manufacturing an optical component

接著,對光學元件2之製造方法進行說明。 Next, a method of manufacturing the optical element 2 will be described.

光學元件2之製造方法包含:第1步驟,準備設置有永久磁鐵251之構造體20及保持著線圈252之保持部26;第2步驟,以於永久磁鐵251與線圈252之間夾入板狀之間隙形成構件9之狀態,將保持部26固定於構造體20;及第3步驟,去除間隙形成構件9。以下,對本製造方法進行具體說明。 The manufacturing method of the optical element 2 includes the first step of preparing the structure 20 in which the permanent magnet 251 is provided and the holding portion 26 holding the coil 252, and the second step of sandwiching the plate between the permanent magnet 251 and the coil 252. In the state of the gap forming member 9, the holding portion 26 is fixed to the structure 20; and in the third step, the gap forming member 9 is removed. Hereinafter, the present manufacturing method will be specifically described.

[第1步驟] [Step 1]

首先,藉由機械加工或射出成型而形成構造體20,如圖8(a)所示,於該構造體20配置玻璃板21及永久磁鐵251。再者,形成保持部26,於保持部26配置線圈252。 First, the structure 20 is formed by machining or injection molding, and as shown in FIG. 8(a), the glass plate 21 and the permanent magnet 251 are placed on the structure 20. Further, the holding portion 26 is formed, and the coil 252 is disposed in the holding portion 26.

[第2步驟] [Step 2]

接著,如圖8(b)所示,以於永久磁鐵251與線圈252之間夾入間隙形成構件9之狀態,將保持部26用螺釘緊固於構造體20。間隙形成構件9具有與所設定之間隙G相當之厚度,藉由於永久磁鐵251與線圈252之間夾入間隙形成構件9,而可簡單地使永久磁鐵251與線圈252之間隙G符合所設定之值。另,例如,於永久磁鐵251與線圈252之間嘗試移動間隙形成構件9,若間隙形成構件9不動,則有永久磁鐵251與線圈252之間隙G小於設定值之虞,相反地,若間隙形成構件9過於鬆動之情形時,則有間隙G大於設定值之虞。因此,以使間隙形成構件9於永久磁鐵251與線圈252之間適度移動之方式,調整保持部26對固定部之緊固強度。 Then, as shown in FIG. 8(b), the holding portion 26 is screwed to the structure 20 in a state in which the gap forming member 9 is interposed between the permanent magnet 251 and the coil 252. The gap forming member 9 has a thickness corresponding to the set gap G. By sandwiching the gap forming member 9 between the permanent magnet 251 and the coil 252, the gap G between the permanent magnet 251 and the coil 252 can be easily made to conform to the set value. value. Further, for example, an attempt is made to move the gap forming member 9 between the permanent magnet 251 and the coil 252. If the gap forming member 9 is not moved, the gap G between the permanent magnet 251 and the coil 252 is smaller than the set value, and conversely, if the gap is formed When the member 9 is too loose, the gap G is larger than the set value. Therefore, the fastening strength of the holding portion 26 to the fixing portion is adjusted so that the gap forming member 9 is appropriately moved between the permanent magnet 251 and the coil 252.

[第3步驟] [Step 3]

接著,如圖8(c)所示,藉由經由窗部236去除間隙形成構件9,而 可獲得光學元件2。 Next, as shown in FIG. 8(c), the gap forming member 9 is removed by the window portion 236. Optical element 2 is available.

根據此種製造方法,可獲得精度良好地調整間隙G之光學元件2。 According to such a manufacturing method, the optical element 2 in which the gap G is accurately adjusted can be obtained.

<第2實施形態> <Second embodiment>

圖9係表示本發明之第2實施形態之圖像顯示裝置之光學構成之圖。 Fig. 9 is a view showing an optical configuration of an image display device according to a second embodiment of the present invention.

以下,對本發明之第2實施形態之圖像顯示裝置進行說明,以與上述之實施形態之不同點為中心進行說明,相同之事項係省略其說明。 In the following, the image display device according to the second embodiment of the present invention will be described, and the differences from the above-described embodiments will be mainly described, and the same matters will be omitted.

第2實施形態之圖像顯示裝置係半透過型(穿透型)之頭戴式顯示器(以下,亦簡稱為「HMD」)。 The image display device of the second embodiment is a semi-transmissive (penetrating type) head mounted display (hereinafter also referred to simply as "HMD").

本實施形態之HMD(圖像顯示裝置)3係由觀察者(使用者)佩戴而使用者,如圖9所示,包含光源310、液晶顯示元件320、投射透鏡系統330、導光部340、及光學元件2。作為光源310,並非特別限定,例如,可使用LED之背光。自此種光源310產生之光被引導至液晶顯示元件320。液晶顯示元件320係透過型之液晶顯示元件,例如,可使用HTPS(高溫多晶矽)單板TFT彩色液晶面板等。此種液晶顯示元件320將來自光源310之光進行調變而產生影像光。所產生之影像光經投射透鏡系統放大後,入射至導光部340。導光部340形成為板狀,進而,於光傳播方向之下游側配置半鏡面341。引導至導光部340內之光反復進行反射而前進,且藉由半鏡面341引導至觀察者之瞳孔E。又,與此同時,外界光透過半鏡面341引導至觀察者之瞳孔E。因此,於HMD3中,於景色上重疊影像光而被視認。 The HMD (image display device) 3 of the present embodiment is worn by an observer (user) and includes a light source 310, a liquid crystal display element 320, a projection lens system 330, a light guiding unit 340, and the like, as shown in FIG. And optical element 2. The light source 310 is not particularly limited, and for example, a backlight of an LED can be used. Light generated from such a light source 310 is guided to the liquid crystal display element 320. The liquid crystal display element 320 is a transmissive liquid crystal display element, and for example, an HTPS (High Temperature Polysilicon) single-plate TFT color liquid crystal panel or the like can be used. Such a liquid crystal display element 320 modulates light from the light source 310 to generate image light. The generated image light is amplified by the projection lens system and then incident on the light guiding portion 340. The light guiding portion 340 is formed in a plate shape, and further, a half mirror surface 341 is disposed on the downstream side in the light propagation direction. The light guided into the light guiding portion 340 is repeatedly reflected and advanced, and guided to the pupil E of the observer by the half mirror 341. At the same time, external light is guided through the half mirror 341 to the pupil E of the observer. Therefore, in the HMD 3, the image light is superimposed on the scene and is visually recognized.

於此種構成之HMD3中,於液晶顯示元件320與投射透鏡系統330之間配置有光學元件2,藉此,可使影像光之光軸移動。 In the HMD 3 having such a configuration, the optical element 2 is disposed between the liquid crystal display element 320 and the projection lens system 330, whereby the optical axis of the image light can be moved.

根據如以上之第2實施形態,亦可發揮與上述第1實施形態相同 之效果。 According to the second embodiment as described above, the same as in the first embodiment described above can be exhibited. The effect.

<第3實施形態> <Third embodiment>

圖10係表示本發明之第3實施形態之圖像顯示裝置之光學構成之圖。 Fig. 10 is a view showing the optical configuration of an image display device according to a third embodiment of the present invention.

以下,對本發明之第3實施形態之圖像顯示裝置進行說明,以與上述之實施形態之不同點為中心進行說明,相同之事項係省略其說明。 In the following, the image display device according to the third embodiment of the present invention will be described, and the differences from the above-described embodiments will be mainly described, and the same matters will be omitted.

第3實施形態之圖像顯示裝置係平視顯示器(以下,亦簡稱為「HUD」)。 The image display device of the third embodiment is a head up display (hereinafter also referred to simply as "HUD").

本實施形態之HUD(圖像顯示裝置)5係例如搭載於汽車,經由擋風玻璃FG,將時速、時間、運行距離等各種資訊(影像)投影至駕駛者而使用。如圖10所示,此種HUD5具有包含光源511、液晶顯示元件512及投射透鏡系統513之投影單元510、反射鏡面520、以及光學元件2。光源511、液晶顯示元件512及投射透鏡系統513可設為例如與上述之第2實施形態之光源310、液晶顯示元件320及投射透鏡系統330相同之構成。反射鏡面520係凹面鏡面,反射來自投影單元510之投影光而投影(顯示)至擋風玻璃FG。 The HUD (image display device) 5 of the present embodiment is mounted on a vehicle, for example, and is used to project various kinds of information (images) such as speed, time, and running distance to the driver via the windshield FG. As shown in FIG. 10, the HUD 5 has a projection unit 510 including a light source 511, a liquid crystal display element 512, and a projection lens system 513, a mirror surface 520, and an optical element 2. The light source 511, the liquid crystal display element 512, and the projection lens system 513 can be configured, for example, in the same manner as the light source 310, the liquid crystal display element 320, and the projection lens system 330 of the second embodiment described above. The mirror surface 520 is a concave mirror surface that reflects the projection light from the projection unit 510 and projects (displays) it to the windshield FG.

於此種構成之HUD5中,於液晶顯示元件512與投射透鏡系統513之間配置有光學元件2,藉此,可使投影光之光軸移動。 In the HUD 5 having such a configuration, the optical element 2 is disposed between the liquid crystal display element 512 and the projection lens system 513, whereby the optical axis of the projection light can be moved.

根據如以上之第3實施形態,亦可發揮與上述之第1實施形態相同之效果。 According to the third embodiment as described above, the same effects as those of the first embodiment described above can be exhibited.

<第4實施形態> <Fourth embodiment>

圖11係本發明之第4實施形態之圖像顯示裝置具有之光學元件之剖視圖。 Figure 11 is a cross-sectional view showing an optical element included in an image display device according to a fourth embodiment of the present invention.

以下,對本發明之第4實施形態之圖像顯示裝置進行說明,以與上述之實施形態之不同點為中心進行說明,相同之事項係省略其說 明。 In the following, an image display device according to a fourth embodiment of the present invention will be described, and the differences from the above-described embodiments will be mainly described. The same matters are omitted. Bright.

第4實施形態之圖像顯示裝置係除了光學元件之構成不同以外,與上述第1實施形態相同。另,對與上述之實施形態相同之構成,標註相同符號。 The image display device according to the fourth embodiment is the same as the above-described first embodiment except that the configuration of the optical element is different. The same components as those of the above-described embodiment are denoted by the same reference numerals.

如圖11所示,於本實施形態之光學元件2中,構成窗部236之至少一部分之面236a(換言之,既稱為薄壁部233b之下表面,亦稱為凹部235之底面)與線圈252之面252a大致一致。藉此,由於面236a與永久磁鐵251之面251a之間隙與間隙G相等,故而,間隙G之確認變得更容易。又,由於於製造時,以線圈252之面252a與窗部236之面236a一致之方式,將保持部26用螺釘緊固於固定部233a即可,故而,間隙G之調整變得更為容易。 As shown in Fig. 11, in the optical element 2 of the present embodiment, at least a part of the surface 236a of the window portion 236 (in other words, referred to as the lower surface of the thin portion 233b, also referred to as the bottom surface of the concave portion 235) and the coil are formed. The face 252a of 252 is substantially identical. Thereby, since the gap between the surface 236a and the surface 251a of the permanent magnet 251 is equal to the gap G, it is easier to confirm the gap G. Further, since the holding portion 26 is screwed to the fixing portion 233a so that the surface 252a of the coil 252 coincides with the surface 236a of the window portion 236 at the time of manufacture, the adjustment of the gap G is made easier. .

根據如以上之第3實施形態,亦可發揮與上述之第1實施形態相同之效果。 According to the third embodiment as described above, the same effects as those of the first embodiment described above can be exhibited.

另,於本實施形態中,由於採用動磁型,於保持部26保持有線圈252,故而,窗部236之面236a與線圈252之面252a一致,相反地,於採用動圈型,於保持部26保持有永久磁鐵251之情形時,窗部236之面236a與永久磁鐵251之面251a一致即可。 Further, in the present embodiment, since the coil 252 is held in the holding portion 26 by the movable magnetic type, the surface 236a of the window portion 236 coincides with the surface 252a of the coil 252, and conversely, the moving coil type is used to maintain When the permanent magnet 251 is held by the portion 26, the surface 236a of the window portion 236 may coincide with the surface 251a of the permanent magnet 251.

<第5實施形態> <Fifth Embodiment>

圖12係表示本發明之第5實施形態之圖像顯示裝置之光學構成之圖。圖13係圖12所示之圖像顯示裝置具有之光學元件之俯視圖及仰視圖。 Fig. 12 is a view showing the optical configuration of an image display device according to a fifth embodiment of the present invention. Figure 13 is a plan view and a bottom view of an optical element of the image display device shown in Figure 12;

以下,對本發明之第5實施形態之圖像顯示裝置進行說明,以與上述之實施形態之不同點為中心進行說明,相同之事項係省略其說明。 In the following, the image display device according to the fifth embodiment of the present invention will be described, and the differences from the above-described embodiments will be mainly described, and the same matters will be omitted.

第5實施形態之圖像顯示裝置係掃描型之圖像顯示裝置,此方面與上述之第1實施形態不同。另,對與上述之實施形態相同之構成標 註相同符號。 The image display device according to the fifth embodiment is a scanning type image display device, and is different from the above-described first embodiment. In addition, the same components as the above embodiments are Note the same symbol.

如圖12所示,本實施形態之投影儀(圖像顯示裝置)4係藉由於屏幕、壁面等對象物6將描繪用雷射光L進行二維掃描而顯示圖像之裝置。投影儀4具有出射描繪用雷射光L之描繪用光源單元410、及作為掃描描繪用雷射光L之光掃描儀之2個光學元件2A。於此種投影儀4中,將2個光學元件2A以描繪用雷射光L之掃描方向正交之方式配置。接著,例如藉由使一者之光學元件2A於水平方向掃描描繪用雷射光L,另一者之光學元件2A於垂直方向掃描描繪用雷射光L,而可於對象物6顯示二維圖像。 As shown in FIG. 12, the projector (image display device) 4 of the present embodiment is a device that displays an image by two-dimensionally scanning the laser light L by the object 6 such as a screen or a wall surface. The projector 4 has a drawing light source unit 410 that emits the drawing laser light L and two optical elements 2A that are optical scanners that scan the drawing laser light L. In such a projector 4, the two optical elements 2A are arranged such that the scanning directions of the drawing laser light L are orthogonal to each other. Next, for example, by scanning the drawing laser light L in the horizontal direction by one optical element 2A, the other optical element 2A scans the drawing laser light L in the vertical direction, and the two-dimensional image can be displayed on the object 6. .

描繪用光源單元410係包含紅色、綠色、藍色、各色之雷射光源411R、411G、411B、以及與雷射光源411R、411G、411B對應設置之準直儀透鏡412R、412G、412B及雙向色鏡413R、413G、413B。與上述之第2實施形態相同地,根據雙向色鏡413R、413G、413B,合成紅色、綠色、藍色、各色之雷射而成為描繪用雷射光L。 The drawing light source unit 410 includes laser light sources 411R, 411G, and 411B of red, green, blue, and respective colors, and collimator lenses 412R, 412G, and 412B provided corresponding to the laser light sources 411R, 411G, and 411B, and bidirectional colors. Mirrors 413R, 413G, 413B. Similarly to the second embodiment described above, the laser beams of red, green, blue, and respective colors are combined by the two-way color mirrors 413R, 413G, and 413B to become the laser light for drawing L.

光學元件2A係如圖13所示,可動部22形成為板狀,於可動部22之表面設置有具有光反射性之光反射部(光學部)21A。藉此,若使可動部22繞搖動軸搖動,則可掃描以光反射部21A反射之描繪用雷射光L。 As shown in FIG. 13, the optical element 2A has a movable portion 22 formed in a plate shape, and a light reflecting portion (optical portion) 21A having light reflectivity is provided on the surface of the movable portion 22. Thereby, when the movable portion 22 is swung around the rocking axis, the drawing laser light L reflected by the light reflecting portion 21A can be scanned.

根據此種第5實施形態,亦可發揮與上述之第1實施形態相同之效果。 According to the fifth embodiment, the same effects as those of the first embodiment described above can be exerted.

以上,針對本發明之光學元件及圖像顯示裝置,基於圖示之實施形態進行說明,但本發明並非限定於此。例如,於本發明之光學元件及圖像顯示裝置中,各部之構成可置換成具有相同功能之任意構成者,又,亦可附加其他任意構成。 The optical element and the image display device of the present invention have been described based on the embodiments shown in the drawings, but the present invention is not limited thereto. For example, in the optical element and the image display device of the present invention, the configuration of each unit can be replaced with any configuration having the same function, and any other configuration can be added.

又,於上述之實施形態中,作為圖像顯示裝置,對液晶投影儀及光掃描型投影儀進行說明,但作為圖像顯示裝置,並非限定於投影 儀,此外,亦可應用於印表機、掃描儀等。 Further, in the above-described embodiment, the liquid crystal projector and the optical scanning projector are described as the image display device. However, the image display device is not limited to the projection. The instrument can also be applied to printers, scanners, and the like.

又,於上述之實施形態中,對使用液晶顯示元件之投影儀進行說明,作為投影儀,並非限定於此,例如,亦可為掃描型之投影儀。亦即,例如,可為如藉由將合成藍色雷射、紅色雷射、綠色雷射而產生之雷射以光掃描儀進行二維掃描而顯示影像之投影儀。 Further, in the above-described embodiment, a projector using a liquid crystal display element will be described. The projector is not limited thereto, and may be, for example, a scanning type projector. That is, for example, it may be a projector that displays an image by two-dimensional scanning with a laser generated by synthesizing a blue laser, a red laser, or a green laser.

251‧‧‧永久磁鐵 251‧‧‧ permanent magnet

252‧‧‧線圈 252‧‧‧ coil

Wx1‧‧‧寬度 Wx1‧‧‧Width

Wx2‧‧‧寬度 Wx2‧‧‧Width

Wx3‧‧‧寬度 Wx3‧‧‧Width

Wy1‧‧‧寬度 Wy1‧‧‧Width

Wy2‧‧‧寬度 Wy2‧‧‧Width

Wy3‧‧‧寬度 Wy3‧‧‧Width

X‧‧‧軸 X‧‧‧ axis

Y‧‧‧軸 Y‧‧‧ axis

Z‧‧‧軸 Z‧‧‧ axis

Claims (15)

一種光學元件,其特徵在於包含:光學部,其具有光入射之光入射面;可動部,其支持上述光學部;軸部,其將上述可動部可繞搖動軸搖動地支持;支持部,其支持上述軸部;永久磁鐵,其設置於上述可動部;及線圈,其與上述永久磁鐵對向配置,且產生作用於上述永久磁鐵之磁場;且上述支持部具有可視認上述永久磁鐵與上述線圈之縫隙之窗部。 An optical element comprising: an optical portion having a light incident surface on which light is incident; a movable portion supporting the optical portion; a shaft portion supporting the movable portion to be rockable about a rocking axis; and a support portion Supporting the shaft portion; a permanent magnet disposed on the movable portion; and a coil disposed opposite to the permanent magnet and generating a magnetic field acting on the permanent magnet; and the support portion having the permanent magnet and the coil visible The window of the gap. 如請求項1之光學元件,其中上述窗部係貫通孔。 The optical component of claim 1, wherein the window portion is a through hole. 如請求項1或2之光學元件,其可自上述窗部視認上述永久磁鐵之與上述線圈對面側之面之位置、及上述線圈之與上述永久磁鐵對面之側之面之位置。 The optical element according to claim 1 or 2, wherein the position of the surface of the permanent magnet opposite to the coil and the surface of the coil opposite to the side of the permanent magnet are visually recognized from the window portion. 如請求項1至3中任一項之光學元件,其中自上述窗部觀察時,構成上述窗部之側面中之1者,與上述永久磁鐵之與上述線圈對面之側之面或上述線圈之與上述永久磁鐵對面之側之面一致。 The optical element according to any one of claims 1 to 3, wherein, when viewed from the window portion, one of the side surfaces constituting the window portion and a side of the permanent magnet opposite to the coil or the coil It is the same as the side opposite to the above permanent magnet. 如請求項1至4中任一項之光學元件,其中上述窗部係可自相對於上述永久磁鐵與上述線圈之排列方向正交之方向視認上述縫隙。 The optical element according to any one of claims 1 to 4, wherein the window portion is visibly visible from a direction orthogonal to an arrangement direction of the permanent magnet and the coil. 如請求項1至5中任一項之光學元件,其中上述線圈係空芯線圈。 The optical component of any one of claims 1 to 5, wherein the coil is an air core coil. 如請求項1至6中任一項之光學元件,其中上述線圈係由上述支持部支持。 The optical component of any one of claims 1 to 6, wherein the coil is supported by the support portion. 如請求項7之光學元件,其具有固定於上述支持部、且自與上述永久磁鐵相反側保持上述線圈之保持部。 The optical element according to claim 7, comprising a holding portion fixed to the support portion and holding the coil from a side opposite to the permanent magnet. 如請求項8之光學元件,其中上述保持部係非磁性體。 The optical component of claim 8, wherein the holding portion is a non-magnetic body. 如請求項1至9中任一項之光學元件,其中上述可動部及軸部各自包含樹脂材料。 The optical element according to any one of claims 1 to 9, wherein the movable portion and the shaft portion each comprise a resin material. 如請求項1至10中任一項之光學元件,其中上述光學部係透過上述光。 The optical component of any one of claims 1 to 10, wherein the optical component transmits the light. 如請求項1至10中任一項之光學元件,其中上述光學部係反射上述光。 The optical element of any one of claims 1 to 10, wherein the optical portion reflects the light. 一種圖像顯示裝置,其特徵在於:包含如請求項11之光學元件,且構成為藉由以上述光學元件使光進行空間調變,從而將藉由上述光之照射而顯示之像素之位置移位。 An image display device comprising: the optical element of claim 11 configured to spatially modulate light by said optical element to shift a position of a pixel displayed by said illumination of said light Bit. 一種圖像顯示裝置,其特徵在於:包含如請求項12之光學元件,且藉由以上述光學元件反射光且進行掃描,而顯示圖像。 An image display device comprising the optical element of claim 12, and displaying an image by reflecting light and scanning the optical element. 一種光學元件之製造方法,其特徵在於包含如下步驟:獲得構造體,該構造體包含:光學部,其具有光所入射之光入射面;可動部,其支持上述光學部;軸部,其將上述可動部可繞搖動軸搖動地支持;支持部,其支持上述軸部;及永久磁鐵,其設置於上述可動部;且於上述支持部,具有可視認上述永久磁鐵與上述線圈之縫隙之窗部;以於與上述永久磁鐵之間配置有間隙形成構件之狀態,使上述線圈與上述永久磁鐵對向配置;及經由上述窗部,自上述永久磁鐵與上述線圈之間去除上述間隙形成構件。 A method of manufacturing an optical element, comprising the steps of: obtaining a structure comprising: an optical portion having a light incident surface on which light is incident; a movable portion supporting the optical portion; and a shaft portion The movable portion is rotatably supported about a rocking shaft; the support portion supports the shaft portion; and the permanent magnet is disposed on the movable portion; and the support portion has a window that visually recognizes a gap between the permanent magnet and the coil a portion in which the gap is formed between the permanent magnet and the permanent magnet, and the gap forming member is removed from the permanent magnet and the coil via the window portion.
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