TW201623929A - Micro-force sensing device - Google Patents

Micro-force sensing device Download PDF

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TW201623929A
TW201623929A TW103144208A TW103144208A TW201623929A TW 201623929 A TW201623929 A TW 201623929A TW 103144208 A TW103144208 A TW 103144208A TW 103144208 A TW103144208 A TW 103144208A TW 201623929 A TW201623929 A TW 201623929A
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magnetic
force
micro
sensing device
hall
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TW103144208A
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TWI553301B (en
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ri-hua Wu
Ting-Hong Su
Chong-Ceng Zhang
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Nat Inst Chung Shan Science & Technology
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Abstract

The present invention provides a micro-force sensing device, which comprises: a strip-shaped body, having one end fixed and the other end having a force point; a magnetic member, provided between the fixed location and the force point of the strip-shaped body; a Hall sensor, provided on one side of the strip-shaped body and aligned with the magnetic member to have a space apart thereto; a microcontroller, connected to said Hall sensor; wherein, the force point of the strip-shaped body is subject to a force and is deformed, so that the magnetic member would move, and the distance between the magnetic member and Hall sensor is changed, the Hall sensor detects the variation of magnetism generated from the movement of the magnetic member, and transmits the signal of magnetism change to the microcontroller, therefore, the microcontroller can calculate the size of the force applied to it.

Description

微力量感測裝置 Micro force sensing device

本發明係與精密量測技術有關，特別係指一種用於感測微小施力或重量之微力量感測裝置。 The present invention relates to precision measurement techniques, and in particular to a micro-force sensing device for sensing small force or weight.

常見的微力量感測器大致上有兩種，其一是以電阻式的方式測量，市面上現有產品的量測範圍最小約10gf~1kgf(FSR 400 series)，而另一種則為應變規的應用，以一組應變規配上一組電路處理器，進而量測出所測量之力量量值多寡。應變規是利用金屬物質受應力伸縮時，電阻值會發生變化的特性作成，經過電路測量其電阻變化即可換算出待測值為多少，應變規由電阻之材質可分為金屬線式、金屬箔膜式以及單晶半導體式；其使用時是貼附於某一接受應力之物件表面，當該物件產生應變時應變規也跟著發生應變，通常此應變甚小，很難以機械式的尺寸計測器測定之，但因應變規可將此應變轉成電阻變化，並藉著電橋電路及電壓放大器轉成較大的電子訊號，使用前須進行零位調整，並進行測距度調整。常見之應變規電阻值R最小為120Ω，金屬之應變係數K為2，則計算應變電阻變化：dR=R×K×E=120×2×2×10-6=4.8×10-4若應變計訊號放大器為NI系列的SCXI-1520，其輸出電壓0~10V，放大器增益0~1000，則電橋電路輸出： 放大器放大1000倍，則輸出：Vo=0.0124(volt)此電壓值經過放大電路處理後其值仍然非常小，不容易量測更小之力量值，例如要計算滾珠螺桿效率時，是指計算滾珠螺桿把扭矩轉換成推力的指標 (或反向計算亦可)。有兩種方式可以來評估這個指標。第一種為當馬達產生扭矩帶動螺桿旋轉時，有多少扭矩可以轉換成有效推力；第二種為當外界有推力作用在螺帽上時，會在螺桿上產生多少扭矩。此兩種方式均可反推計算出滾珠螺桿之效率，假設選用第二種方式，以外加推力的方式測量在滾珠螺桿上產生的有效扭矩，一般使用此種量測方式之推力約在10克(10gf)以下，從前述之應變規計算方式可知，若要10克對應10V，需將應變規之訊號放大106，除了放大器難以找到如此高倍率，訊號亦容易失真，因此10gf以下之力量量測並不適合用應變規，且應變規所製成之力量感測器除了應變規本身，尚須一組訊號處理電路，造價不斐，有鑑於上述種種原因，對於微小力量之量測，應變規並不適用。 There are two general types of micro-power sensors, one of which is measured in a resistive manner. The measurement range of existing products on the market is about 10gf~1kgf (FSR 400 series), and the other is strain gauge. The application uses a set of strain gauges to match a set of circuit processors to measure the amount of force measured. The strain gauge is made by utilizing the characteristics that the resistance value changes when the metal material is stressed and stretched. The resistance change can be converted by the circuit to measure the value to be measured. The material of the strain gauge can be divided into metal wire type and metal. Foil film type and single crystal semiconductor type; it is attached to the surface of a certain stress-receiving object, and the strain gauge is also strained when the object is strained. Usually, the strain is very small, and it is difficult to measure by mechanical size. The device measures this, but the strain gauge can convert this strain into a resistance change, and convert it into a larger electronic signal by the bridge circuit and the voltage amplifier. Before use, the zero position adjustment and the range adjustment should be performed. The common strain gauge resistance value R is 120Ω minimum, and the strain coefficient K of the metal is 2, then the strain resistance change is calculated: dR=R×K×E=120×2×2×10 -6 =4.8×10 -4 The signal amplifier is the SCXI-1520 of the NI series. Its output voltage is 0~10V, and the amplifier gain is 0~1000. The bridge circuit output is: When the amplifier is amplified 1000 times, the output is: V o =0.0124 (volt). After the voltage value is processed by the amplifier circuit, the value is still very small, and it is not easy to measure the smaller force value. For example, when calculating the efficiency of the ball screw, it means calculation. The ball screw converts torque into an indicator of thrust (or reverse calculation). There are two ways to evaluate this indicator. The first is how much torque can be converted into effective thrust when the motor produces torque to drive the screw. The second is how much torque is generated on the screw when there is thrust on the nut. Both methods can inversely calculate the efficiency of the ball screw. It is assumed that the second method is adopted, and the effective torque generated on the ball screw is measured by means of thrust. Generally, the thrust of the measuring method is about 10 g ( 10gf) Below, from the above-mentioned calculation method of the strain gauge, if 10 grams corresponds to 10V, the signal of the strain gauge needs to be amplified by 10 6 . Except that the amplifier is difficult to find such a high magnification, the signal is easily distorted, so the force below 10gf is measured and It is not suitable for strain gauges, and the force sensor made of strain gauges requires a set of signal processing circuits in addition to the strain gauge itself. The cost is not high. For the above reasons, the gauges are not measured for small forces. Be applicable.

霍爾元件是一半導體元件，該半導體元件之上下兩端供應VCC電壓，有微弱電流IBIAS流過霍爾元件。當外界無磁力線垂直穿透霍爾元件時，霍爾元件左右兩側並無電位差。當外界有磁力線穿透時，因運動的電子在磁場內會受力(稱為勞倫斯力，Lorentz force，可依照電動機原理，以安培左手定則判斷電子受力方向，注意電子運動方向與電流方向相反)，霍爾元件內的電子會往左邊或右邊移動(視磁場及電流方向而定)，造成元件兩側有如電容一般，出現電位差。這種因為靜態磁場產生電壓的效應，稱為霍爾效應。S.E.Hall於1879年發現這個效應。霍爾效應一直到1980年代左右，在半導體技術發展之後才廣受應用。由於霍爾效應所生的電壓非常小，一般只有數μV，因此需要一個穩定且高效能的放大電路放大霍爾元件的輸出電壓，一般都把穩壓與放大器跟霍爾元件一起做在積體電路內，成為霍爾裝置(Hall device)，如圖1所示，這種裝置的輸出電壓與穿過霍爾元件表面的磁通密度成正比，也稱為線性霍爾效應裝置(Linear Hall-effect device,LHE device)。 The Hall element is a semiconductor element, and the V CC voltage is supplied to the upper and lower ends of the semiconductor element, and the weak current I BIAS flows through the Hall element. When there is no magnetic flux perpendicularly penetrating the Hall element, there is no potential difference between the left and right sides of the Hall element. When the external magnetic field penetrates, the moving electrons will be stressed in the magnetic field (called Lawrence force, Lorentz force, according to the principle of the motor, the direction of the electron force is judged by the left hand rule of Ampere, and the direction of the electron movement is opposite to the current direction. ), the electrons in the Hall element will move to the left or right (depending on the direction of the magnetic field and current), causing a potential difference between the two sides of the device. This effect of generating a voltage due to a static magnetic field is called a Hall effect. SEHall discovered this effect in 1879. The Hall effect was not used until the 1980s and was widely used after the development of semiconductor technology. Since the voltage generated by the Hall effect is very small, generally only a few μV, a stable and high-efficiency amplifier circuit is required to amplify the output voltage of the Hall element. Generally, the voltage regulator and the amplifier are combined with the Hall element. Inside the circuit, it becomes a Hall device. As shown in Figure 1, the output voltage of this device is proportional to the magnetic flux density passing through the surface of the Hall element. It is also called Linear Hall-effect device (Linear Hall- Effect device, LHE device).

鑒於傳統技術之缺點，本發明係提供一種微力量感測裝置，係利用霍爾效應感測施加於長條體一端之施力大小，以做為微小施力之精確感測裝置。 In view of the shortcomings of the conventional technology, the present invention provides a micro-force sensing device that utilizes a Hall effect to sense the amount of force applied to one end of a strip body as an accurate sensing device for a small force application.

本發明係提供一種微力量感測裝置，係包括：一長條體，其 一端固定不動，另一端具有一受力點；一磁性元件，係設置於該長條體固定處與受力點之間；一霍爾元件，係設置於該長條體一側，對齊該磁性元件並與該磁性元件具有一間隔距離；一微控制器，係連接該霍爾元件；其中該長條體之受力點承受一施加力量而使該長條體產生形變時，該磁性元件隨之移動，使該磁性元件與該霍爾元件之間隔距離改變，該霍爾元件偵測該磁性元件移動產生之磁場變化，將該磁場變化之信號傳輸至該微控制器，由該微控制器計算出該施加力量之大小。 The present invention provides a micro-force sensing device, comprising: a long strip body, One end is fixed and the other end has a force point; a magnetic element is disposed between the fixed body and the force receiving point; a Hall element is disposed on one side of the elongated body to align the magnetic The component is spaced apart from the magnetic component; a microcontroller is coupled to the Hall component; wherein the magnetic element is subjected to a force applied to deform the elongated body, the magnetic component Moving, the distance between the magnetic element and the Hall element is changed, the Hall element detecting a change in a magnetic field generated by the movement of the magnetic element, and transmitting a signal of the magnetic field change to the microcontroller, by the microcontroller Calculate the magnitude of this applied force.

以上之概述與接下來的詳細說明及附圖，皆是為了能進一步說明本發明達到預定目的所採取的方式、手段及功效。而有關本發明的其他目的及優點，將在後續的說明及圖示中加以闡述。 The above summary, the following detailed description and the accompanying drawings are intended to further illustrate the manner, the Other objects and advantages of the present invention will be described in the following description and drawings.

11、21‧‧‧長條體 11, 21‧‧‧ long strips

111‧‧‧夾具 111‧‧‧Clamp

112‧‧‧受力點 112‧‧‧ points of force

12‧‧‧磁性元件 12‧‧‧Magnetic components

22‧‧‧磁塊 22‧‧‧Magnetic blocks

13、23‧‧‧霍爾元件 13, 23‧‧‧ Hall element

14‧‧‧微控制器 14‧‧‧Microcontroller

圖1係為現有技術之線性霍爾效應裝置(Linear Hall-effect device,LHE device)結構圖。 FIG. 1 is a structural diagram of a linear Hall-effect device (LHE device) of the prior art.

圖2係為本發明之微力量感測裝置架構圖。 2 is a structural diagram of the micro force sensing device of the present invention.

圖3係為本發明實施例之近接式感測器第一測試之電壓輸出圖。 3 is a voltage output diagram of a first test of a proximity sensor according to an embodiment of the present invention.

圖4係為本發明實施例之近接式感測器第一測試之電壓輸出圖。 4 is a voltage output diagram of a first test of the proximity sensor of the embodiment of the present invention.

圖5係為本發明實施例之霍爾感測器以不同重量重複量測驗證之結果示意圖。 FIG. 5 is a schematic diagram showing the results of repeated verification of Hall sensor with different weights according to an embodiment of the present invention.

圖6係為本發明實施例之霍爾感測器量測驗證誤差量示意圖。 FIG. 6 is a schematic diagram of a Hall sensor measurement verification error amount according to an embodiment of the present invention.

圖7係為本發明使用二磁塊夾設於該長條體兩側之實施例示意圖。 FIG. 7 is a schematic view showing an embodiment of the present invention in which two magnetic blocks are sandwiched on both sides of the elongated body.

圖8係為本發明應用於天候偵測之實施例示意圖。 FIG. 8 is a schematic diagram of an embodiment of the present invention applied to weather detection.

圖9係為本發明應用於風力檢測之實施例示意圖 9 is a schematic view of an embodiment of the present invention applied to wind detection

表1係為本發明實施例之重現性實驗表。 Table 1 is a reproducibility experiment table of an embodiment of the present invention.

表2係為本發明實施例之近接式感測器第一測試輸出表。 Table 2 is a first test output table of the proximity sensor of the embodiment of the present invention.

表3係為本發明實施例之近接式感測器第二測試輸出表。 Table 3 is a second test output table of the proximity sensor of the embodiment of the present invention.

以下係藉由特定的具體實例說明本發明之實施方式，熟悉此技藝之人士可由本說明書所揭示之內容輕易地瞭解本發明之其他優點與功 效。 The embodiments of the present invention are described below by way of specific specific examples, and those skilled in the art can readily understand other advantages and advantages of the present invention from the disclosure herein. effect.

本發明之微力量感測裝置架構圖如圖2所示，係包括：一長條體11，係為一薄鋼片，其一端係以夾具111固定形成一懸臂樑結構，另一端具有一受力點112；一磁性元件12，係設置於該長條體11固定處與受力點112之間；一霍爾元件13，該霍爾元件係為線性霍爾效應裝置(Linear Hall-effect device,LHE device)，該霍爾元件係設置於該長條體11一側，對齊該磁性元件12並與該磁性元件12具有一間隔距離；一微控制器14，係連接該霍爾元件13；其中該長條體11之受力點112承受一施加力量而使該長條體產生形變時，該磁性元件12隨之移動，使該磁性元件12與該霍爾元件13之間隔距離改變，該霍爾元件13偵測該磁性元件12移動產生之磁場變化或磁通量變化，將該磁場變化或磁通量變化之信號傳輸至該微控制器14，由該微控制器14計算出該施加力量之大小。該磁性元件可為方形橫向充磁雙極磁塊、方形縱向充磁雙極磁塊、圓形軸向充磁雙極磁塊或圓形徑向充磁雙極磁塊；該霍爾元件亦可為數位霍爾裝置(Digital Hall-effect device)或霍爾開關(Hall-effect digital switch,Hall switch)；該微控制器(Micro Control Unit)係具有一信號放大電路，以將該霍爾元件感測之磁場變化信號或磁通量變化信號放大，便於計算該施加力量之大小；該微控制器係可為單晶片控制器；該微控制器係可附加一轉換輸出單元，可將計算出該施加力量信號藉由不同轉換介面輸出，該轉換介面係可為並列數位輸出介面、串列UART(RS232/422/485)、CAN、SPI、LIN、I2C或以PWM方式輸出。 The structure of the micro-force sensing device of the present invention is as shown in FIG. 2, which includes: an elongated body 11 which is a thin steel piece, one end of which is fixed by a clamp 111 to form a cantilever beam structure, and the other end has a a magnetic element 12 is disposed between the fixed portion of the elongated body 11 and the force receiving point 112; a Hall element 13 is a linear Hall-effect device (Linear Hall-effect device) , LHE device), the Hall element is disposed on the side of the elongated body 11, aligned with the magnetic element 12 and has a separation distance from the magnetic element 12; a microcontroller 14, is connected to the Hall element 13; When the force point 112 of the elongated body 11 is subjected to a force to deform the elongated body, the magnetic element 12 moves with the distance between the magnetic element 12 and the Hall element 13 to change. The Hall element 13 detects a change in the magnetic field or a change in the magnetic flux generated by the movement of the magnetic element 12, and transmits a signal of the change in the magnetic field or a change in the magnetic flux to the microcontroller 14, and the microcontroller 14 calculates the magnitude of the applied force. The magnetic component may be a square lateral magnetization bipolar magnet block, a square longitudinal magnetization bipolar magnet block, a circular axial magnetization bipolar magnet block or a circular radial magnetization bipolar magnet block; It can be a Digital Hall-effect device or a Hall-effect digital switch (Hall switch); the microcontroller (Micro Control Unit) has a signal amplifying circuit to the Hall element The sensed magnetic field change signal or the magnetic flux change signal is amplified to facilitate calculation of the magnitude of the applied force; the microcontroller can be a single-wafer controller; the microcontroller can be attached with a conversion output unit, and the application can be calculated The power signal is output through different conversion interfaces. The conversion interface can be a parallel digital output interface, serial UART (RS232/422/485), CAN, SPI, LIN, I 2 C or PWM output.

本發明之微力量感測裝置係利用懸臂樑原理作為量測微小施力或重量之依據，懸臂樑單點施力之公式為： 其中F為施力(N)，L為施力力臂長(m)，E為楊氏係數(pa)，I為轉動慣量(m4)，在受力未超過一定範圍內，在懸臂樑上不同位置所施力可進行疊加。由上述懸臂樑單點施力公式可知理論形變量應與所施力量成正比關係，在厚度夠薄的情況下，微小力量亦能使之產生應變，故本發明係利用霍爾元件感測懸臂樑(長條體)上之磁性元件位置，再藉由該微控制器(MCU)輸出對應該 位置的電壓，此【位置-電壓】的對應曲線係以預先寫好的資料表構成，可視使用需求調整，將相關的關係曲線寫入MCU記憶體中，再將該磁性元件【位置-力量】關係完成比對，最終即可推出【力量-電壓】關係，以本發明之微力量感測裝置完成所感測力量之判讀。 The micro-force sensing device of the present invention utilizes the cantilever beam principle as a basis for measuring a small force or weight, and the formula for the single-point force of the cantilever beam is: Where F is force (N), L is the urging arm length (m), E is Young's modulus (pa), I is the moment of inertia (m 4), the force does not exceed a certain range, different on the cantilever The force applied by the position can be superimposed. According to the single-point force-applying formula of the cantilever beam, the theoretical shape variable should be proportional to the applied force. When the thickness is thin enough, the small force can also cause strain. Therefore, the present invention utilizes the Hall element to sense the cantilever. The position of the magnetic component on the beam (long strip), and the voltage corresponding to the position is output by the microcontroller (MCU). The corresponding curve of the [position-voltage] is formed by a pre-written data table, which can be used visually. Demand adjustment, the relevant relationship curve is written into the MCU memory, and then the magnetic component [position-force] relationship is compared, and finally the [power-voltage] relationship can be introduced to the micro-force sensing device of the present invention. Complete the interpretation of the sensed power.

為驗證本發明之概念，以2顆雙極磁塊、1顆LHE(霍爾元件)製作一組本發明之微力量感測裝置實施例，分別進行重現性以及線性度測試。本實施例測試最重要的一點即為重現性，以鋼片作為懸臂樑，若施力相同每次形變皆不一，或是無施力時其零點位置不一樣，代表鋼片已受到超過降伏強度的應力作用，則以5g重物反覆進行實驗，結果如表1。 To verify the concept of the present invention, a set of micro-force sensing device embodiments of the present invention were fabricated with two bipolar magnetic blocks and one LHE (Hall Element) for reproducibility and linearity testing, respectively. The most important point of the test in this embodiment is reproducibility. The steel sheet is used as the cantilever beam. If the force is the same, the deformation will be different each time, or the zero position will be different when there is no force applied. The stress effect of the lodging strength was repeated with 5 g of the weight. The results are shown in Table 1.

根據懸臂樑原理，相同位置變形量應與施力成正比，進行以下實驗進行驗證：將近接式感測器放置於13mm處，重物懸掛約50mm處，磁塊位置35mm，測試結果如表2所示： 近接式感測器第一測試之電壓輸出圖如圖3所示，可看出曲線雖有微小抖動，但基本走向是線性的。更改變因，將重物懸掛於70mm處，近接式感測器置於20mm處，則測試結果如表3所示： 近接式感測器第二測試之電壓輸出圖如圖4所示，此結果亦近乎線性，由以上結果，可推測力量與形變量應為線性關係。接著以霍爾感測器量測訊號，驗證各力量重現性以及其誤差，圖5為以不同重量重複進行量測驗證 三次之結果示意圖，於懸掛重量為零時，由於懸臂樑於正放、直立或倒放時，本身會受到磁塊重量不同的影響，因此會有三個不同的值，而其誤差量示意圖如圖6所示，縱軸為電壓，誤差量大多介於正負20mV之間，僅有單項誤差量達到30mV，證明其重現性高且誤差小之特性。 According to the cantilever beam principle, the deformation of the same position should be proportional to the applied force. The following experiment is carried out to verify: the proximity sensor is placed at 13mm, the weight is suspended about 50mm, and the magnetic block position is 35mm. The test results are shown in Table 2. : The voltage output of the first test of the proximity sensor is shown in Figure 3. It can be seen that although the curve has slight jitter, the basic trend is linear. To change the cause, the weight is suspended at 70mm, and the proximity sensor is placed at 20mm. The test results are shown in Table 3: The voltage output of the second test of the proximity sensor is shown in Figure 4. The result is also nearly linear. From the above results, it can be inferred that the force and the deformation should be linear. Then, the Hall sensor is used to measure the signal to verify the reproducibility of each force and its error. Figure 5 is a schematic diagram of the results of repeating the measurement and verification three times with different weights. When the suspension weight is zero, the cantilever beam is placed in the positive position. When standing upright or upside down, it will be affected by the difference of the weight of the magnetic block, so there will be three different values, and the error amount is shown in Figure 6. The vertical axis is voltage, and the error is mostly between plus and minus 20mV. Only a single error amount of 30mV is proved, which proves its high reproducibility and small error.

本發明係提供一種微力量感測裝置，其中該長條體係可使用薄鋼片或其他金屬、非金屬材料，唯於實際應用中，當該長條體使用薄鋼片或其他導磁性材質製成、且該磁性元件設置於該長條體之一側時，由於導磁原理、該磁性元件之磁力線分佈將被該長條體分散，造成該霍爾元件實際能感測到之磁力線強度不足，導致輸出信號不穩、過於微弱或精度不佳；如圖7所示，本發明之微力量感測裝置之磁性元件係可使用二磁塊22分別夾設於該長條體21之兩側，該二磁塊22係異極相對，使該二磁塊之磁力線分布集中於該霍爾元件23量測處，以增強信號強度與精度；本發明之磁性元件亦可採用貫穿式設置，該磁性元件係穿透該長條體(薄鋼片)，以確保該磁性元件之磁力線分布集中於該霍爾元件量測處。 The invention provides a micro-force sensing device, wherein the strip system can use a thin steel sheet or other metal or non-metal material, and in practical applications, when the strip body is made of thin steel sheet or other magnetic conductive material, When the magnetic element is disposed on one side of the elongated body, the magnetic field line distribution of the magnetic element will be dispersed by the elongated body due to the principle of magnetic conduction, resulting in insufficient magnetic field strength actually sensed by the Hall element. The output signal is unstable, too weak or has poor precision; as shown in FIG. 7, the magnetic component of the micro-force sensing device of the present invention can be respectively sandwiched on both sides of the elongated body 21 by using two magnetic blocks 22 respectively. The two magnetic blocks 22 are oppositely polarized, so that the magnetic lines of the two magnetic blocks are concentrated on the measurement of the Hall element 23 to enhance the signal strength and precision; the magnetic component of the present invention may also adopt a through-type arrangement. The magnetic element penetrates the elongated body (thin steel sheet) to ensure that the magnetic line distribution of the magnetic element is concentrated at the measurement of the Hall element.

本發明可用於檢測滾珠螺桿之效率外，其餘可應用之領域相當廣泛，各種微震動、微力量之場合皆可應用。當本發明用於感測微小施力時，本發明之微控制器會將該長條體受到瞬間施力、造成該長條體來回震動擺盪之信號濾除，以避免量測錯誤；本發明亦可利用該長條體受到瞬間施力而來回震動擺盪之現象，作為震動偵測或動作偵測使用，如降雨量偵測、風力檢測等用途。 The invention can be used to detect the efficiency of the ball screw, and the other applicable fields are quite extensive, and various micro-vibration and micro-force applications can be applied. When the present invention is used for sensing a slight force application, the microcontroller of the present invention will be subjected to an instantaneous application of force to cause a signal of the long body to vibrate back and forth to avoid measurement errors; The strip body can also be used for vibration detection or motion detection, such as rainfall detection and wind detection, by being subjected to an instantaneous force to vibrate back and forth.

本發明可應用於天候偵測，一般而言，在同一區域內每單位面積內的降雨機率應是相同的，因此在此區域的任一位置擺放此裝置，可量測當下雨勢之大小，通常雨勢皆連綿不斷，可擷取其瞬間最大力量，將資料存於內建之記憶體或及時傳送資料至電腦回報當下之雨勢，本發明應用於天候偵測之實施例示意圖如圖8所示，雨滴落下之平均重量將造成裝置產生應變，進而由訊號處理電路判斷出此時雨勢之大小，唯整體機構須經由防水之處理。 The invention can be applied to weather detection. In general, the probability of rainfall per unit area in the same area should be the same, so the device can be placed at any position in the area to measure the magnitude of the rain. Usually, the rain is continuous, and the maximum strength of the moment can be taken. The data is stored in the built-in memory or the data is transmitted to the computer in time to report the current rain. The schematic diagram of the embodiment of the present invention applied to the weather detection is as shown in the figure. As shown in Fig. 8, the average weight of the raindrops will cause strain on the device, and the signal processing circuit will judge the magnitude of the rain force at this time. Only the whole mechanism must be treated by waterproofing.

本發明可應用於風力檢測，本發明應用於風力檢測之實施例示意圖如圖9所示，在X,Y,Z三軸向各一組裝置，檢測風力之方向與各軸 向之大小，然而如何將風力與雨滴的力量分開檢測亦是值得考慮的問題，當此裝置可同時偵測雨勢大小及風的強度時，可適用於檢測一個地方土石流發生率，當風力與雨勢大小超過一定值，此裝置可連結電腦，適時的提出警告，以即早疏散人群，降低天災所造成之傷害。 The invention can be applied to wind detection, and the schematic diagram of the embodiment of the invention applied to the wind detection is shown in FIG. 9 , in a set of devices in the X, Y and Z directions, detecting the direction of the wind and the axes. Towards the size, however, how to separate the wind and the force of the raindrop is also a problem worth considering. When the device can simultaneously detect the magnitude of the rain and the intensity of the wind, it can be applied to detect the incidence of earth and stone flow in a place, when the wind and If the size of the rain exceeds a certain value, the device can be connected to a computer and timely warned to evacuate the crowd and reduce the damage caused by natural disasters.

本發明之微力量感測裝置對於微小力量或震動相當敏感，可應用於各種會有震動的場合作為震動檢測裝置，而微力量之感測可應用於魚卵穿刺、細胞穿刺等力量相當微小之感測器，其力量應都小於1gf，此時感測器之應變裝置可更換為更容易產生形變之材質。本發明可使用容易產生形變卻不容易超過其降伏應力之材質，例如鈦合金等，力量作用於鈦合金上，容易產生形變，但卻不容易對其造成永久形變，因此本發明之應用領域相當廣泛，熟知該領域技術者只要使用正確材質以及厚度，訂定合理的力量承受範圍，即可利用本發明精確量測物體所受之力量或震動量多寡。 The micro-force sensing device of the invention is quite sensitive to small forces or vibrations, and can be applied to various vibration-detecting occasions as vibration detecting devices, and the sensing of micro-forces can be applied to fish eggs puncture, cell puncture and the like. The sensor should have a force of less than 1gf, and the strain gauge of the sensor can be replaced with a material that is more susceptible to deformation. The present invention can use a material which is easily deformed but does not easily exceed its falling stress, such as a titanium alloy, and the force acts on the titanium alloy to easily cause deformation, but it is not easy to cause permanent deformation, so the application field of the present invention is equivalent. A wide range of those skilled in the art can accurately measure the amount of force or vibration of an object by using the correct material and thickness to determine a reasonable range of force tolerance.

本發明係為一種微力量感測裝置，其架構與功能為目前市面上所未見，使用市面上相當普遍且價格低廉之霍爾元件、磁性元件以及單晶片控制器，本發明設置方式簡單可靠，且能將量測之霍爾磁場訊號作進一步類比或數位轉換，可應用於更廣泛之技術領域。目前檢測滾珠螺桿效率之機構使用之應變計、應變規及其附加之放大電路，滿刻度訊號為500克重，對於數克以下之微小力量量測誤差很大，本發明之微力量感測裝置可精確量測5g重以下之力量，大幅提升訊號解析度與準確性。本發明具有成本低廉、附加功能高、應用範圍廣之優點，可應用在如雨滴、防盜、風力偵測等多方面，且可輸出多組類比或數位形式之控制訊號，具備多方應用之實用性。 The invention is a micro-force sensing device, and its structure and function are not currently available on the market, and the Hall element, the magnetic element and the single-chip controller which are relatively common and inexpensive in the market are used, and the setting method of the invention is simple and reliable. Moreover, the measured Hall magnetic field signal can be further analogized or digitally converted, and can be applied to a wider range of technical fields. At present, the strain gauge, the strain gauge and the additional amplifying circuit used for the mechanism for detecting the efficiency of the ball screw have a full scale signal of 500 gram weight, and the micro force measuring device of the present invention has a large measurement error for a small force of several gram or less. Accurately measure the power below 5g, greatly improving signal resolution and accuracy. The invention has the advantages of low cost, high additional function and wide application range, and can be applied to various aspects such as raindrop, anti-theft, wind detection, etc., and can output multiple sets of analog or digital control signals, and has the utility of multi-party applications. .

上述之實施例僅為例示性說明本發明之特點及其功效，而非用於限制本發明之實質技術內容的範圍。任何熟習此技藝之人士均可在不違背本發明之精神及範疇下，對上述實施例進行修飾與變化。因此，本發明之權利保護範圍，應如後述之申請專利範圍所列。 The above-described embodiments are merely illustrative of the features and functions of the present invention, and are not intended to limit the scope of the technical scope of the present invention. Modifications and variations of the above-described embodiments can be made by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should be as set forth in the scope of the claims described below.

11‧‧‧長條體 11‧‧‧Lat body

111‧‧‧夾具 111‧‧‧Clamp

112‧‧‧受力點 112‧‧‧ points of force

12‧‧‧磁性元件 12‧‧‧Magnetic components

13‧‧‧霍爾元件 13‧‧‧ Hall element

14‧‧‧微控制器 14‧‧‧Microcontroller

Claims (10)

一種微力量感測裝置，係包括：一長條體，其一端固定不動，另一端具有一受力點；一磁性元件，係設置於該長條體固定處與受力點之間；一霍爾元件，係設置於該長條體一側，對齊該磁性元件並與該磁性元件具有一間隔距離；一微控制器，係連接該霍爾元件；其中該長條體之受力點承受一施加力量而使該長條體產生形變時，該磁性元件隨之移動，該霍爾元件偵測該磁性元件移動產生之磁場變化，將該磁場變化之信號傳輸至該微控制器，由該微控制器計算出該施加力量之大小。 A micro-force sensing device comprises: a long strip body, one end of which is fixed and the other end has a force point; a magnetic element is disposed between the fixed body and the force point; The element is disposed on one side of the elongated body, and is aligned with the magnetic element and has a separation distance from the magnetic element; a microcontroller is connected to the Hall element; wherein the tensile point of the elongated body is subjected to a When a force is applied to deform the elongated body, the magnetic element moves, and the Hall element detects a change in a magnetic field generated by the movement of the magnetic element, and transmits a signal of the magnetic field change to the microcontroller. The controller calculates the magnitude of the applied force. 如申請專利範圍第1項所述之微力量感測裝置，其中該長條體係為薄鋼片。 The micro-force sensing device of claim 1, wherein the strip system is a thin steel sheet. 如申請專利範圍第1項所述之微力量感測裝置，其中該長條體之一端係以夾具固定形成一懸臂樑結構。 The micro-force sensing device of claim 1, wherein one end of the elongated body is fixed by a clamp to form a cantilever beam structure. 如申請專利範圍第1項所述之微力量感測裝置，其中該磁性元件係可具有二磁塊，該二磁塊分別夾設於該長條體之兩側，該二磁塊係異極相對，使該二磁塊之磁力線分布集中於該霍爾元件量測處。 The micro-force sensing device of claim 1, wherein the magnetic component has two magnetic blocks, and the two magnetic blocks are respectively disposed on two sides of the elongated body, and the two magnetic blocks are different In contrast, the magnetic field lines of the two magnetic blocks are concentrated at the measurement of the Hall element. 如申請專利範圍第1項所述之微力量感測裝置，其中該磁性元件係穿透該長條體，使該磁性元件之磁力線分布集中於該霍爾元件量測處。 The micro-force sensing device of claim 1, wherein the magnetic element penetrates the elongated body such that a magnetic field line distribution of the magnetic element is concentrated at the Hall element measurement. 如申請專利範圍第1項所述之微力量感測裝置，其中該磁性元件係為方形橫向充磁雙極磁塊或方形縱向充磁雙極磁塊。 The micro-force sensing device of claim 1, wherein the magnetic component is a square laterally magnetized bipolar magnetic block or a square longitudinally magnetized bipolar magnetic block. 如申請專利範圍第1項所述之微力量感測裝置，其中該磁性元件係為圓形軸向充磁雙極磁塊或圓形徑向充磁雙極磁塊。 The micro-force sensing device of claim 1, wherein the magnetic component is a circular axially magnetized bipolar magnetic block or a circular radial magnetized bipolar magnetic block. 如申請專利範圍第1項所述之微力量感測裝置，其中該霍爾元件係為線性霍爾效應裝置(Linear Hall-effect device,LHE device)。 The micro-force sensing device of claim 1, wherein the Hall element is a Linear Hall-effect device (LHE device). 如申請專利範圍第1項所述之微力量感測裝置，其中該霍爾元件係為數位霍爾裝置(Digital Hall-effect device)。 The micro-force sensing device of claim 1, wherein the Hall element is a Digital Hall-effect device. 如申請專利範圍第1項所述之微力量感測裝置，其中該霍爾元件係為霍 爾開關(Hall-effect digital switch,Hall switch)。 The micro-force sensing device of claim 1, wherein the Hall element is Hall-effect digital switch (Hall switch).
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108936942A (en) * 2018-06-11 2018-12-07 广州博鳌健康产业研究院（有限合伙） A kind of pressure sensing method and device for intelligent shoe
CN115157871A (en) * 2022-08-12 2022-10-11 厦门汉印电子技术有限公司 Distance determination method between print head and print substrate, printing apparatus, and storage medium
CN117490812A (en) * 2023-12-29 2024-02-02 常州宏大智慧科技有限公司 Fabric width-direction gram weight deviation online detection method

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DE10229020A1 (en) * 2002-06-28 2004-01-22 Robert Bosch Gmbh force sensor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108936942A (en) * 2018-06-11 2018-12-07 广州博鳌健康产业研究院（有限合伙） A kind of pressure sensing method and device for intelligent shoe
CN108936942B (en) * 2018-06-11 2020-09-11 广州博鳌健康产业研究院（有限合伙） Pressure sensing method and device for intelligent shoe
CN115157871A (en) * 2022-08-12 2022-10-11 厦门汉印电子技术有限公司 Distance determination method between print head and print substrate, printing apparatus, and storage medium
CN115157871B (en) * 2022-08-12 2023-11-21 厦门汉印电子技术有限公司 Method for determining distance between printing head and printing substrate, printing apparatus and storage medium
CN117490812A (en) * 2023-12-29 2024-02-02 常州宏大智慧科技有限公司 Fabric width-direction gram weight deviation online detection method
CN117490812B (en) * 2023-12-29 2024-04-02 常州宏大智慧科技有限公司 Fabric width-direction gram weight deviation online detection method

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