TW201544801A - Polarization-axis detector, polarimetry equipment, polarimetry method and polarization light irradiation equipment - Google Patents
Polarization-axis detector, polarimetry equipment, polarimetry method and polarization light irradiation equipment Download PDFInfo
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Abstract
Description
本發明係關於用以測定偏光光線之偏光軸的偏光軸檢測器、偏光測定裝置、偏光測定方法及偏光光線照射裝置。 The present invention relates to a polarization axis detector for measuring a polarization axis of polarized light, a polarization measuring device, a polarization measuring method, and a polarized light irradiation device.
近來,關於以液晶面板為首之液晶顯示元件的配向膜及視角補償薄膜的配向層等之配向處理,逐漸採用照射所定波長的偏光光線來進行配向,稱為光配向的技術。 Recently, the alignment treatment of the alignment film of the liquid crystal display element including the liquid crystal panel and the alignment layer of the viewing angle compensation film has been gradually carried out by irradiating the polarized light of a predetermined wavelength to perform alignment, which is called a photo-alignment technique.
光配向所用的照射裝置,係一般具備光源與偏光子,照射使光源的光線通過偏光子所得之偏光光線。於光配向技術中,從照射裝置照射之偏光光線的偏光軸(光照射部之偏光光線的軸)是否成為所希望的偏光軸非常重要。因此,將偏光子的角度設定成所定角度之後,實際進行偏光光線照射來測定偏光軸,如果未成為所希望偏光軸的話,則需要修正偏光子的角度的作業。 The illumination device used for the light alignment generally has a light source and a polarizer, and irradiates the polarized light obtained by passing the light of the light source through the polarizer. In the light alignment technique, it is important that the polarization axis of the polarized light that is irradiated by the irradiation device (the axis of the polarized light of the light irradiation portion) becomes a desired polarization axis. Therefore, after the angle of the polarizer is set to a predetermined angle, the polarized light is actually irradiated to measure the polarization axis, and if the desired polarization axis is not obtained, the operation of correcting the angle of the polarizer is required.
作為先前的偏光軸測定方法,例如有專利文 獻1所記載的技術。該技術係除了照射裝置具備之第一偏光子之外,設置用以檢測偏光軸的第二偏光子,使第二偏光子一邊旋轉,一邊檢測依序通過第一偏光子及第二偏光子的光線,並依據其檢測結果,測定偏光光線的偏光特性。具體來說,求出表示第二偏光子旋轉時的檢測光線之光量的週期性變化的變化曲線,根據其變化曲線,作為前述偏光特性,測定偏光軸及消光比。 As a method for measuring the polarization axis of the prior art, for example, there is a patent document. Dedicated to the technology described in 1. In addition to the first polarizer provided in the illumination device, the second photon is provided for detecting the polarization axis, and the second polarizer is rotated while detecting the first polarizer and the second polarizer. Light, and based on the detection results, determine the polarization characteristics of the polarized light. Specifically, a change curve indicating a periodic change in the amount of light of the detected light when the second polarizer is rotated is obtained, and the polarization axis and the extinction ratio are measured as the polarization characteristics based on the change curve.
〔專利文獻1〕日本特開2014-20890號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2014-20890
在前述專利文獻1所記載之技術中,作為光源,利用放電燈。於放電燈,存在有起因於電弧的搖動之光量的經時變化,使第二偏光子旋轉之間,光量也時時刻刻變化。然而,前述專利文獻1所記載之技術,並未考慮該放電燈之電弧的搖動,故偏光光線之偏光軸的測定精度較低。 In the technique described in the above Patent Document 1, a discharge lamp is used as a light source. In the discharge lamp, there is a temporal change in the amount of light caused by the shaking of the arc, and the amount of light changes from moment to moment between the rotation of the second polarizer. However, in the technique described in Patent Document 1, the arc of the discharge lamp is not considered to be shaken, so that the measurement accuracy of the polarization axis of the polarized light is low.
因此,本發明的課題係提供即使在來自光源的光線有每小時的照度變動之狀況中,也可高精度地檢測偏光光線的偏光軸的偏光軸檢測器、偏光測定裝置、偏光測定方法及偏光光線照射裝置。 In view of the above, an object of the present invention is to provide a polarization axis detector, a polarization measuring device, a polarization measuring method, and a polarizing light that can accurately detect a polarization axis of a polarized light even when light from a light source changes in illuminance per hour. Light illuminating device.
為了解決前述課題,關於本發明的偏光軸檢測器之一樣態,係檢測從光源照射之偏光光線的偏光軸的偏光軸檢測器,具備:第一偏光光線檢測部,係具有用以檢測前述偏光軸之可旋轉的檢測用偏光子,與檢測通過前述檢測用偏光子之來自前述光源的偏光光線之照度資訊的第一照度感測器;及第二偏光光線檢測部,係具有直接檢測來自前述光源的偏光光線之照度資訊的第二照度感測器,且並排設置於前述第一偏光光線檢測部。 In order to solve the above problems, the polarizing axis detector of the present invention is a polarization axis detector that detects a polarization axis of a polarized light that is irradiated from a light source, and includes a first polarized light detecting unit that detects the polarized light. a first illuminance sensor for detecting rotation of the axis and a illuminance sensor for detecting illuminance information of the polarized ray from the light source passing through the detecting polarizer; and a second polarized light detecting portion having direct detection from the foregoing The second illuminance sensor of the illuminance information of the polarized light of the light source is disposed side by side in the first polarized light detecting portion.
如此,將檢測未通過檢測用偏光子之來自光源的偏光光線的第二偏光光線檢測部,並排設置於第一偏光光線檢測部。因此,可利用兩個偏光光線檢測部觀察相同偏光光線的搖動,可將以第二偏光光線檢測部所檢測出之偏光光線的照度資訊,設為以第一偏光光線檢測部所檢測出之偏光光線的照度資訊的基準值。所以,即使在因光源的輸出的偏差及閃爍等,來自光源的偏光光線的照度每小時變動之狀況中,也可進行考慮到其照度變動之偏光軸的檢測。 In this manner, the second polarized light detecting portion that detects the polarized light from the light source that has not passed through the detecting polarizer is disposed side by side in the first polarized light detecting portion. Therefore, the two polarized light detecting sections can observe the shaking of the same polarized light, and the illuminance information of the polarized light detected by the second polarized light detecting unit can be set as the polarized light detected by the first polarized light detecting unit. The reference value of the illuminance information of the light. Therefore, even in the case where the illuminance of the polarized light from the light source changes every hour due to variations in the output of the light source, flicker, or the like, the detection of the polarization axis in consideration of the illuminance variation can be performed.
又於前述偏光軸檢測器中,前述光源,係線狀光源;前述第一照度感測器與前述第二照度感測器,係沿著前述線狀光源延伸存在的方向並排配設為佳。 Further, in the polarization axis detector, the light source is a linear light source; and the first illuminance sensor and the second illuminance sensor are preferably arranged in a direction in which the linear light source extends.
如此,將光源設為線狀光源時,因為將兩個照度感測器並排配置於線狀光源的照度變動較少的方向,所以,可減少各場所的依存性,可獲得有信賴性的測定結果。 In this way, when the light source is a linear light source, since the two illuminance sensors are arranged side by side in the direction in which the illuminance of the linear light source fluctuates less, the dependence of each place can be reduced, and the reliability can be measured. result.
進而,關於本發明的偏光測定裝置之一樣態,具備:前述任一之偏光軸檢測器;及偏光光線測定部,係依據利用前述偏光軸檢測器檢測出的照度資訊,來測定前述偏光光線;前述偏光光線測定部,係具備:旋轉控制部,係使前述檢測用偏光子,旋轉成複數指定角度;照度資訊修正部,係依據於前述複數指定角度中以前述第一照度感測器所檢測出之照度資訊的檢測照度值,與同步於前述第一照度感測器所致之該檢測照度值的檢測,以前述第二照度感測器所檢測出之照度資訊的參照照度值,來運算出修正包含於前述檢測照度值之從前述光源照射之偏光光線的每小時的照度變動所致之誤差的修正後照度值;及偏光特性運算部,係運算出表示前述檢測用偏光子的旋轉角度與以前述照度資訊修正部所運算出之修正後照度值的關係的偏光光線角度特性,且以該偏光光線角度特性為基準,運算出來自前述光源的偏光光線的偏光特性。 Further, the polarization measuring device according to the present invention includes: any one of the polarizing axis detectors; and the polarized light measuring unit that measures the polarized light according to the illuminance information detected by the polarizing axis detector; The polarization light measuring unit includes a rotation control unit that rotates the detection polarizer into a plurality of designated angles, and an illuminance information correction unit that detects the first illuminance sensor based on the plurality of specified angles And detecting the detected illuminance value of the illuminance information, and detecting the illuminance value caused by the illuminance sensor, and calculating the reference illuminance value of the illuminance information detected by the second illuminance sensor Correcting a corrected illuminance value including an error caused by an hourly illuminance variation of the polarized light irradiated from the light source, and a polarization characteristic calculating unit that calculates a rotation angle indicating the detection polarizer a polarization ray angle characteristic in relation to a corrected illuminance value calculated by the illuminance information correction unit, and Reference light angle characteristic of light, polarized light calculated from the polarization characteristic of the light source.
如此,使用以第二偏光光線檢測部所檢測出之參照照度值,修正以第一偏光光線檢測部所檢測出之檢測照度值所包含之來自光源的偏光光線之每小時的照度變動所致之誤差,所以,可運算出修正前述誤差的偏光光線角度特性。所以,即使在使檢測用偏光子旋轉之間來自光源的偏光光線變動之狀況中,也可高精度地運算出該偏光光線的偏光特性。 In this manner, the reference illuminance value detected by the second polarized light detecting unit is used to correct the illuminance variation per hour of the polarized light from the light source included in the detected illuminance value detected by the first polarized light detecting unit. Since the error is made, the polarization ray angle characteristic for correcting the aforementioned error can be calculated. Therefore, even in a state where the polarized light from the light source is changed between the rotation of the detecting polarizer, the polarization characteristics of the polarized light can be calculated with high precision.
又,於前述偏光測定裝置中,前述照度資訊修正部,係將以前述第一照度感測器所檢測出之前述檢測 照度值,除以同步於該檢測照度值的檢測而以前述第二照度感測器所檢測出之前述參照照度值,藉此運算出前述修正後照度值為佳。如此,僅利用除算的比較簡單的手法,即可適切修正包含於檢測照度值之來自光源的偏光光線的照度變動所致之誤差。 Further, in the polarization measuring device, the illuminance information correcting unit detects the detection detected by the first illuminance sensor The illuminance value is divided by the reference illuminance value detected by the second illuminance sensor in synchronization with the detection of the detected illuminance value, thereby calculating the corrected illuminance value. In this way, it is possible to appropriately correct the error caused by the illuminance variation of the polarized light from the light source included in the detected illuminance value by using only a relatively simple method.
又進而,於前述偏光測定裝置中,前述照度資訊修正部,係由以前述第一照度感測器所檢測出之前述檢測照度值,減去於前述複數指定角度中以前述第二照度感測器所檢測出之各參照照度值的平均值與同步於前述檢測照度值的檢測而以前述第二照度感測器所檢測出之前述參照照度值的差分,藉此運算出前述修正後照度值為佳。如此,僅利用減算與平均值計算的比較簡單的手法,即可適切修正包含於檢測照度值之來自光源的偏光光線的照度變動所致之誤差。 Further, in the polarization measuring apparatus, the illuminance information correcting unit is configured to detect the second illuminance by subtracting the detected illuminance value detected by the first illuminance sensor from the plurality of specified angles Calculating the corrected illuminance value by calculating the difference between the average value of the reference illuminance values detected by the device and the detection of the detected illuminance value and the reference illuminance value detected by the second illuminance sensor It is better. In this way, it is possible to appropriately correct the error caused by the illuminance variation of the polarized light from the light source included in the detected illuminance value by using a relatively simple method of subtraction and average calculation.
進而,於前述偏光測定裝置中,前述偏光特性運算部,係具備以前述偏光光線角度特性為基準,特定通過前述檢測用偏光子之來自前述光源的偏光光線的照度成為極值之前述檢測用偏光子的旋轉角度,並依據特定出的旋轉角度,作為前述偏光特性,運算出前述偏光光線的偏光軸角度的偏光軸角度運算部為佳。藉此,可高精度地運算出偏光軸角度。 Further, in the polarization measuring device, the polarization characteristic calculation unit includes the detection polarization in which the illuminance of the polarization ray from the light source that is passed through the detection polarizer is an extreme value based on the polarization ray angle characteristic. The rotation angle of the sub-rotation angle is preferably a polarization axis angle calculation unit that calculates the polarization axis angle of the polarized light as the polarization characteristic based on the specific rotation angle. Thereby, the polarization axis angle can be calculated with high precision.
又,於前述偏光測定裝置中,前述偏光特性運算部,係具備以前述偏光光線角度特性為基準,特定通過前述檢測用偏光子之來自前述光源的偏光光線之照度的 最大值與最小值,並依據特定出的最大值與最小值,作為前述偏光特性,運算出前述偏光光線的消光比的消光比運算部為佳。藉此,可高精度地運算出消光比。 Further, in the polarization measuring device, the polarization characteristic calculating unit includes an illuminance of a polarized ray from the light source that passes through the detecting polarizer based on the polarization ray angle characteristic. It is preferable that the maximum value and the minimum value are based on the specific maximum value and the minimum value, and the extinction ratio calculation unit that calculates the extinction ratio of the polarized light as the polarization characteristics. Thereby, the extinction ratio can be calculated with high precision.
又進而,關於本發明的偏光測定方法之一樣態,係測定從光源照射之偏光光線的偏光測定方法,具備:使用以檢測前述偏光軸的檢測用偏光子,旋轉成複數指定角度,並檢測於各指定角度中通過該檢測用偏光子之來自前述光源的偏光光線之照度資訊的檢測照度值的步驟;及與檢測通過前述檢測用偏光子之來自前述光源的偏光光線之照度資訊的時機同步,直接檢測不通過前述檢測用偏光子之來自前述光源的偏光光線之照度資訊的參照照度值的步驟。 Further, in the same manner as the polarization measuring method of the present invention, the method of measuring a polarized light that is irradiated with a polarized light from a light source includes: detecting a polarizer for detecting the polarization axis, rotating the plurality of specified angles, and detecting a step of detecting an illuminance value of the illuminance information of the polarized light from the light source of the detecting polarizer at each specified angle; and synchronizing with a timing of detecting illuminance information of the polarized ray from the light source passing through the detecting polarizer, The step of directly detecting the reference illuminance value of the illuminance information of the polarized light from the light source that does not pass the aforementioned detecting photon.
如此,可在相同時機中檢測出通過檢測用偏光子之來自光源的偏光光線,與未通過檢測用偏光子之來自光源的偏光光線。因此,即使在將參照照度值設為檢測照度值的基準值,來自光源的偏光光線的照度每小時變動之狀況中,也可進行考慮到其照度變動之偏光軸的檢測。 In this manner, the polarized light from the light source passing through the detecting polarizer and the polarized light from the light source that has not passed through the detecting polarizer can be detected at the same timing. Therefore, even when the reference illuminance value is set as the reference value of the detected illuminance value, and the illuminance of the polarized light from the light source fluctuates every hour, the detection of the polarization axis in consideration of the illuminance fluctuation can be performed.
又,於前述偏光測定方法中,更具備:依據於前述複數指定角度中檢測出之前述檢測照度值與前述參照照度值,運算出修正包含於前述檢測照度值之從前述光源照射之偏光光線的每小時的照度變動所致之誤差的修正後照度值的步驟;運算出表示前述檢測用偏光子的旋轉角度與前述修正後照度值之關係的偏光光線角度特性的步驟;及以前述偏光光線角度特性為基準,運算出來自前述 光源的偏光光線之偏光特性的步驟為佳。 Further, in the polarization measuring method, the method further includes: calculating, based on the detected illuminance value and the reference illuminance value detected by the plurality of specified angles, correcting a polarized ray that is emitted from the light source and included in the detected illuminance value a step of correcting the illuminance value of the error due to the fluctuation of the illuminance per hour; calculating a polarization ray angle characteristic indicating a relationship between the rotation angle of the detection polarizer and the corrected illuminance value; and the angle of the polarized ray The characteristics are benchmarks, calculated from the foregoing The step of polarizing light of the polarized light of the light source is preferably performed.
如此,可使用參照照度值來修正包含於檢測照度值之來自光源的偏光光線的每小時的照度變動所致之誤差。因此,可運算出修正了前述誤差的偏光光線角度特性。所以,即使在使檢測用偏光子旋轉之間來自光源的偏光光線變動之狀況中,也可高精度地運算出該偏光光線的偏光特性。 In this manner, the reference illuminance value can be used to correct the error caused by the illuminance variation per hour of the polarized light from the light source included in the detected illuminance value. Therefore, the polarization ray angle characteristic in which the aforementioned error is corrected can be calculated. Therefore, even in a state where the polarized light from the light source is changed between the rotation of the detecting polarizer, the polarization characteristics of the polarized light can be calculated with high precision.
進而,關於本發明的偏光光線照射裝置之一樣態,係對配向膜照射偏光光線來進行光配向的偏光光線照射裝置,具備:光照射部,係具有線狀光源,與沿著該線狀光源延伸存在之方向來配設的複數偏光子,照射藉由前述偏光子使前述線狀光源的光線偏光的偏光光線;及前述任一之偏光測定裝置,係測定前述光照射部所照射之偏光光線。 Further, in the same manner as the polarized light irradiation device of the present invention, the polarized light irradiation device that irradiates the alignment film with the polarized light to perform light alignment includes a light-irradiating portion having a linear light source and along the linear light source. a plurality of polarizers disposed in a direction extending in a direction to illuminate a polarized ray that polarizes light of the linear light source by the polarizer; and any of the polarized light measuring devices that measure the polarized light that is irradiated by the light illuminating portion .
藉此,偏光測定裝置可高精度地測定從光照射部照射之偏光光線的偏光特性。所以,可適切判斷從光照射部照射之偏光光線的偏光軸是否成為所希望之偏光軸。 Thereby, the polarization measuring device can accurately measure the polarization characteristics of the polarized light that is irradiated from the light-irradiating portion. Therefore, it is possible to appropriately determine whether or not the polarization axis of the polarized light irradiated from the light irradiation portion is a desired polarization axis.
在本發明的偏光軸檢測器中,於檢測通過檢測用偏光子之來自光源的偏光光線的第一偏光光線檢測部,並排設置未通過檢測用偏光子之來自光源的偏光光線的第二偏光光線檢測部。因此,即使在來自光源的偏光光線的照度每小時變動之狀況中,也可進行考慮到其照度變 動之偏光軸的檢測。 In the polarization axis detector of the present invention, the first polarized light detecting portion that detects the polarized light from the light source passing through the detecting polarizer is disposed, and the second polarized light that does not pass the polarizing light from the light source that does not pass the detecting polarizer is arranged side by side. Detection department. Therefore, even in the case where the illuminance of the polarized light from the light source changes hourly, it is possible to take into consideration that the illuminance is changed. Detection of the moving polarization axis.
又,在具備該偏光軸檢測器的偏光測定裝置中,可使用以第二偏光光線檢測部所檢測出之參照照度值,來修正以第一偏光光線檢測部所檢測出之檢測照度值,所以,即使在使檢測用偏光子旋轉之間來自光源的偏光光線變動之狀況中,也可高精度運算出該偏光光線的偏光特性。 Further, in the polarization measuring apparatus including the polarization axis detector, the reference illuminance value detected by the second polarized light detecting unit can be used to correct the detected illuminance value detected by the first polarized light detecting unit. Even in the case where the polarized light from the light source is changed between the rotation of the detecting polarizer, the polarization characteristics of the polarized light can be calculated with high precision.
10A,10B‧‧‧光照射部 10A, 10B‧‧‧Lighting Department
11‧‧‧放電燈 11‧‧‧Discharge lamp
12‧‧‧鏡片 12‧‧‧ lenses
13A‧‧‧偏光子單元 13A‧‧‧ polarized subunit
13B‧‧‧偏光子單元 13B‧‧‧ polarized subunit
13Aa‧‧‧偏光子 13Aa‧‧‧ polarizer
13Ba‧‧‧偏光子 13Ba‧‧‧ polarizer
13Ab‧‧‧框架 13Ab‧‧‧Frame
13Bb‧‧‧框架 13Bb‧‧‧Frame
14‧‧‧燈室 14‧‧‧ lamp room
14a‧‧‧光射出口 14a‧‧‧Light exit
20‧‧‧搬送部 20‧‧‧Transportation Department
21‧‧‧工件台 21‧‧‧Workpiece table
22‧‧‧導件 22‧‧‧ Guides
23‧‧‧電磁石 23‧‧‧Electrical Stone
30‧‧‧偏光測定裝置 30‧‧‧Polarization measuring device
31‧‧‧偏光軸檢測器 31‧‧‧Polar axis detector
32‧‧‧X方向搬送部 32‧‧‧X direction transport department
33‧‧‧Y方向搬送部 33‧‧‧Y direction transport department
34‧‧‧控制部 34‧‧‧Control Department
34a‧‧‧旋轉子控制部 34a‧‧‧ Rotator Control Department
34b‧‧‧輸入訊號轉換部 34b‧‧‧Input signal conversion unit
34c‧‧‧偏光特性運算部 34c‧‧‧Polarization characteristic calculation unit
34d‧‧‧畫像顯示部 34d‧‧‧Portrait Display Department
34e‧‧‧搬送控制部 34e‧‧‧Transport Control Department
35‧‧‧監視器 35‧‧‧Monitor
100‧‧‧偏光光線照射裝置 100‧‧‧Polarizing light irradiation device
311‧‧‧第一偏光光線檢測部 311‧‧‧First Polarized Light Detection Department
311a‧‧‧檢測用偏光子(檢光子) 311a‧‧ ‧Detective polarizers (photodetectors)
311b‧‧‧第一照度感測器 311b‧‧‧First illumination sensor
311c‧‧‧受光部 311c‧‧‧Receiving Department
311d‧‧‧支持構件 311d‧‧‧Support components
311e‧‧‧旋轉致動器 311e‧‧‧Rotary actuator
311f‧‧‧旋轉子 311f‧‧‧ Rotator
311g‧‧‧開口部 311g‧‧‧ openings
311h‧‧‧冷氣供給部 311h‧‧‧Air Supply Department
312‧‧‧第二偏光光線檢測部 312‧‧‧Second Polarized Light Detection Department
312a‧‧‧第二照度感測器 312a‧‧‧Second illumination sensor
312b‧‧‧受光部 312b‧‧‧Receiving Department
312c‧‧‧支持構件 312c‧‧‧Support components
312d‧‧‧開口部 312d‧‧‧ openings
312e‧‧‧冷氣供給部 312e‧‧‧Air Supply Department
W‧‧‧工件 W‧‧‧Workpiece
〔圖1〕揭示本實施形態之偏光光線照射裝置的概略構造圖。 Fig. 1 is a schematic structural view showing a polarized light irradiation device of the present embodiment.
〔圖2〕正交於光照射部的長邊方向之方向的剖面圖。 Fig. 2 is a cross-sectional view orthogonal to the longitudinal direction of the light-irradiating portion.
〔圖3〕光照射部之長邊方向的剖面圖。 Fig. 3 is a cross-sectional view showing the longitudinal direction of the light-irradiating portion.
〔圖4〕揭示偏光子之配置例的圖。 FIG. 4 is a view showing an example of arrangement of polarizers.
〔圖5〕揭示偏光軸檢測器之主要部的立體圖。 Fig. 5 is a perspective view showing a main part of a polarizing axis detector.
〔圖6〕揭示偏光軸檢測器之主要部的剖面立體圖。 Fig. 6 is a cross-sectional perspective view showing a main portion of a polarization axis detector.
〔圖7〕揭示第一偏光光線檢測部的構造的模式圖。 Fig. 7 is a schematic view showing the structure of a first polarized light detecting portion.
〔圖8〕揭示偏光測定裝置之構造的區塊圖。 Fig. 8 is a block diagram showing the configuration of a polarization measuring device.
〔圖9〕揭示以控制部執行之偏光測定處理順序的流程圖。 FIG. 9 is a flow chart showing the procedure of the polarization measurement process performed by the control unit.
〔圖10〕揭示偏光光線的角度特性之一例的圖。 Fig. 10 is a view showing an example of an angular characteristic of a polarized ray.
〔圖11〕說明本實施形態之效果的圖。 Fig. 11 is a view for explaining the effects of the embodiment.
以下,依據圖面來說明本發明的實施形態。 Hereinafter, embodiments of the present invention will be described based on the drawings.
圖1係揭示本實施形態之偏光光線照射裝置的概略構造圖。 Fig. 1 is a schematic structural view showing a polarized light irradiation device of the embodiment.
偏光光線照射裝置100係具備光照射部10A及10B,與搬送工件W的搬送部20。在此,工件W係形成光配向膜,例如被整形成液晶面板的大小之矩形狀的基板。 The polarized light irradiation device 100 includes the light irradiation units 10A and 10B and the transport unit 20 that transports the workpiece W. Here, the workpiece W is a light alignment film, for example, a rectangular substrate having a size of a liquid crystal panel.
偏光光線照射裝置100係一邊從光照射部10A及10B照射所定波長的偏光光線(偏光的光線),一邊藉由搬送部20使工件W直線移動,對工件W的光配向膜照射前述偏光光線來進行光配向處理者。 The polarized light irradiation device 100 irradiates the polarized light (polarized light) of a predetermined wavelength from the light-irradiating portions 10A and 10B, and linearly moves the workpiece W by the transport unit 20, thereby irradiating the optical alignment film of the workpiece W with the polarized light. Perform light alignment processor.
光照射部10A及10B係分別具備身為線狀之光源的放電燈11,與反射放電燈11之光線的鏡片12。又,光照射部10A係具備配置於其光射出側的偏光子單元13A,光照射部10B係具備配置於其光射出側的偏光子單元13B。進而,光照射部10A及10B係分別具備燈室14。放電燈11、鏡片12及偏光子單元13A(或13B)係被收容於燈室14。 Each of the light-irradiating portions 10A and 10B includes a discharge lamp 11 that is a linear light source and a lens 12 that reflects the light of the discharge lamp 11. Further, the light-irradiating portion 10A includes a polarizing sub-unit 13A disposed on the light-emitting side thereof, and the light-irradiating portion 10B includes a polarizing sub-unit 13B disposed on the light-emitting side. Further, the light irradiation units 10A and 10B each include a lamp chamber 14. The discharge lamp 11, the lens 12, and the polarizing subunit 13A (or 13B) are housed in the lamp chamber 14.
光照射部10A及光照射部10B係在使放電燈11的長邊方向一致於與工件W的搬送方向(X方向)正交之方向(Y方向)之狀態下,沿著工件W的搬送方向(X方向)並排設置。 The light irradiation unit 10A and the light irradiation unit 10B are arranged along the conveyance direction of the workpiece W in a state in which the longitudinal direction of the discharge lamp 11 is aligned in the direction (Y direction) orthogonal to the conveyance direction (X direction) of the workpiece W. (X direction) set side by side.
在此,針對光照射部10A的具體構造進行說明。 Here, a specific structure of the light irradiation unit 10A will be described.
圖2係正交於光照射部10A的長邊方向之方向的剖面圖,圖3係光照射部10A之長邊方向的剖面圖。因光照射部10A與光照射部10B具有相同的構造,在此針對光照射部10A的構造進行說明。 2 is a cross-sectional view orthogonal to the longitudinal direction of the light-irradiating portion 10A, and FIG. 3 is a cross-sectional view in the longitudinal direction of the light-irradiating portion 10A. The light irradiation unit 10A has the same structure as the light irradiation unit 10B, and the structure of the light irradiation unit 10A will be described here.
放電燈11係長條狀之長弧型放電燈。放電燈11係例如照射波長200nm~400nm的紫外光。 The discharge lamp 11 is a long arc-shaped discharge lamp of a long strip shape. The discharge lamp 11 is, for example, irradiated with ultraviolet light having a wavelength of 200 nm to 400 nm.
作為光配向膜的材料,公知有以波長254nm的光線進行配向者、以波長313nm的光線進行配向者、以波長365nm的光線進行配向者等,光源的種類因應需要的波長而適切選擇。 As a material of the photo-alignment film, those who are aligned with light having a wavelength of 254 nm, aligned with light having a wavelength of 313 nm, or aligned with light having a wavelength of 365 nm are known, and the type of the light source is appropriately selected depending on the wavelength required.
再者,作為光源,也可使用將放射紫外光的LED或LD並排配置成直線狀的線狀光源。此時,並排LED或LD的方向相當於燈管的長邊方向。 Further, as the light source, a linear light source in which LEDs or LDs that emit ultraviolet light are arranged side by side in a straight line may be used. At this time, the direction of the side by side LED or LD is equivalent to the longitudinal direction of the lamp.
鏡片12係將來自放電燈11的放射光反射至所定方向者,如圖2所示,是剖面為橢圓形的橢圓狀聚光鏡。鏡片12係以其長邊方向與放電燈11的長邊方向一致之方式配置。 The lens 12 reflects the emitted light from the discharge lamp 11 to a predetermined direction, and as shown in FIG. 2, is an elliptical condensing mirror having an elliptical cross section. The lens 12 is disposed such that its longitudinal direction coincides with the longitudinal direction of the discharge lamp 11.
燈室14係於其底面,具有從光照射部10A照射之光線通過的光射出口14a。於光射出口14a,安裝有具有用以使通過其之光線偏光的偏光子的偏光子單元13A。 The lamp chamber 14 is attached to the bottom surface thereof, and has a light exiting opening 14a through which the light irradiated from the light-irradiating portion 10A passes. A polarizing subunit 13A having a polarizer for polarizing light passing therethrough is attached to the light exit opening 14a.
偏光子單元13A係如圖4所示,將複數偏光子13Aa並排配置於框架13Ab內所構成者。如此,於放電燈11的正下,複數偏光子13Aa沿著該放電燈11的長邊方向並排配置。 As shown in FIG. 4, the polarizer unit 13A is configured by arranging the plurality of polarizers 13Aa side by side in the frame 13Ab. In this manner, the plurality of polarizers 13Aa are arranged side by side along the longitudinal direction of the discharge lamp 11 immediately below the discharge lamp 11.
偏光子13Aa係線柵型偏光元件,偏光子13Aa的個數係配合照射偏光光線的區域之大小來適切選擇。又,各偏光子13Aa係以分別透射軸朝向相同方向之方式配置。 The polarizer 13Aa is a wire grid type polarizing element, and the number of the polarizers 13Aa is appropriately selected in accordance with the size of a region where the polarized light is irradiated. Further, each of the polarizers 13Aa is disposed such that the transmission axes are oriented in the same direction.
偏光子單元13B也具有與偏光子單元13A相同的構造。 The polarizing subunit 13B also has the same configuration as the polarizing subunit 13A.
但是,在將光照射部並排成兩段的雙燈方式之狀況中,偏光子單元13B的偏光子13Ba係如圖4所示,偏光子13Aa的接縫與偏光子13Ba的接縫,以於工件W的搬送方向(X方向)中不重疊之方式,使位置偏離而配置於正交於搬送方向的方向(Y方向)。藉此,光照射部10A及10B係能以均勻的能量分布來照射偏光光線。 However, in the case of the two-lamp method in which the light-irradiating portions are arranged in two stages, the polarizer 13Ba of the polarizing sub-unit 13B is as shown in Fig. 4, and the joint between the polarizer 13Aa and the polarizer 13Ba is In a direction in which the conveyance direction (X direction) of the workpiece W does not overlap, the position is shifted and arranged in a direction orthogonal to the conveyance direction (Y direction). Thereby, the light-irradiating portions 10A and 10B can illuminate the polarized light with a uniform energy distribution.
回到圖1,搬送部20係具備藉由真空吸附等的方法來吸附保持工件W之平板狀的工件台21、沿著工件台21的移動方向延伸之兩個導件22、及作為一例而構成工件台21之移動機構的電磁石23。 Referring back to FIG. 1 , the conveyance unit 20 includes a flat workpiece stage 21 that sucks and holds the workpiece W by vacuum suction or the like, two guides 22 that extend in the moving direction of the workpiece stage 21 , and, for example, The electromagnet 23 constituting the moving mechanism of the workpiece stage 21.
在此,作為前述移動機構,例如採用線性電動機平台。線性電動機平台係使移動體(工件台)藉由空氣,浮上於棋盤格狀地設置有強磁性體的凸極之平面狀的台板上,對移動體施加磁力,並使移動體與台板的凸極之間的磁力變化,藉此使移動體(工件台)移動的機構。 Here, as the aforementioned moving mechanism, for example, a linear motor platform is employed. The linear motor platform is such that the moving body (workpiece table) is floated on a flat platen of a salient pole of a ferromagnetic body by a disk, and a magnetic force is applied to the moving body, and the moving body and the platen are moved. A mechanism that changes the magnetic force between the salient poles, thereby moving the moving body (workpiece table).
工件台21係以其一邊的方向朝向平台移動方向(X方向)之方式配置,並且藉由導件22來彌補真直度之狀態下可往返移動地支持。 The workpiece stage 21 is disposed such that the direction of one side thereof faces the direction of movement of the stage (X direction), and is supported by the guide 22 to compensate for the straightness.
在本說明書中,將工件台21的移動方向是X方向, 垂直於X方向的水平方向是Y方向,垂直方向是Z方向。又,工件W為矩形狀,以一邊的方向朝向X方向,另一方的邊朝向Y方向的姿勢,被保持於工件台21上。 In the present specification, the moving direction of the workpiece stage 21 is the X direction. The horizontal direction perpendicular to the X direction is the Y direction, and the vertical direction is the Z direction. Further, the workpiece W has a rectangular shape and is held on the workpiece stage 21 in a direction in which one side faces the X direction and the other side faces the Y direction.
工件台21的移動路徑係以通過光照射部10A及10B的正下方之方式設計。然後,搬送部20係以將工件W搬送至光照射部10A及10B所致之偏光光線的照射位置,且通過該照射位置之方式構成。在此通過的過程中,工件W的光配向膜被進行光配向處理。 The movement path of the workpiece stage 21 is designed to pass right below the light irradiation portions 10A and 10B. Then, the conveying unit 20 is configured to convey the irradiation position of the polarized light caused by the workpiece W to the light irradiation units 10A and 10B, and to constitute the irradiation position. In the process of passing therethrough, the photoalignment film of the workpiece W is subjected to photoalignment processing.
又,偏光光線照射裝置100係具備偏光測定裝置30。偏光測定裝置30係具備偏光軸檢測器31、用以將偏光軸檢測器31沿著導件22往X方向搬送的X方向搬送部32、及用以將偏光軸檢測器31往Y方向搬送的Y方向搬送部33。進而,該偏光測定裝置30係除了偏光軸檢測器31、X方向搬送部32、Y方向搬送部33之外,也具備後述之控制部34及監視器35。 Further, the polarized light irradiation device 100 includes a polarization measuring device 30. The polarization measuring device 30 includes a polarization axis detector 31, an X-direction conveying unit 32 for transporting the polarization axis detector 31 in the X direction along the guide 22, and a transfer mechanism for transporting the polarization axis detector 31 in the Y direction. The Y direction conveying unit 33. Further, the polarization measuring device 30 includes a control unit 34 and a monitor 35 which will be described later, in addition to the polarization axis detector 31, the X-direction transport unit 32, and the Y-direction transport unit 33.
偏光軸檢測器31係檢測出從光照射部10A及10B照射之偏光光線的偏光軸(光照射面之偏光光線的軸)。 The polarization axis detector 31 detects the polarization axis of the polarization ray (the axis of the polarization ray of the light irradiation surface) irradiated from the light irradiation sections 10A and 10B.
X方向搬送部32係使偏光軸檢測器31往X方向移動的移動機構,例如具有與上述之搬送部20相同的構造。亦即,偏光軸檢測器31的移動路徑係以通過光照射部10A及10B的正下方之方式設計。X方向搬送部32係於X方向中,將偏光軸檢測器31搬送至光照射部10A及10B所致之偏光光線的照射位置。 The X-direction conveying unit 32 is a moving mechanism that moves the polarization axis detector 31 in the X direction, and has the same structure as the above-described conveying unit 20, for example. That is, the moving path of the polarization axis detector 31 is designed to pass right below the light irradiation portions 10A and 10B. The X-direction transport unit 32 is in the X direction, and transports the polarization axis detector 31 to the irradiation position of the polarized light caused by the light-irradiating portions 10A and 10B.
Y方向搬送部33係使偏光軸檢測器31往Y方向移動的移動機構。Y方向搬送部33係在偏光軸檢測器31位於光照射部10A及10B所致之偏光光線的照射位置之狀態下,使偏光軸檢測器31往Y方向(偏光子單元13A及13B的偏光子的排列方向)移動。 The Y-direction conveying unit 33 is a moving mechanism that moves the polarization axis detector 31 in the Y direction. In the Y-direction transport unit 33, the polarization axis detector 31 is placed in the Y direction (the polarizers of the polarized sub-units 13A and 13B) in a state where the polarization axis detector 31 is located at the irradiation position of the polarized light rays by the light-irradiating portions 10A and 10B. The direction of the arrangement) moves.
在本實施形態中,將偏光子單元13A及13B的各偏光子的正下方(各偏光子的中央位置)分別設為測定偏光軸的位置(以下,也稱為「偏光測定位置」),偏光軸檢測器31係於各偏光測定位置中測定偏光軸者。 In the present embodiment, the position of the polarization axis (hereinafter also referred to as "polarization measurement position") is directly below the polarizers of the polarizing subunits 13A and 13B (the center position of each polarizer), and the polarized light is polarized. The axis detector 31 measures the polarization axis at each polarization measurement position.
以下,針對偏光軸檢測器31的具體構造,一邊參照圖5及圖6一邊進行說明。 Hereinafter, the specific structure of the polarization axis detector 31 will be described with reference to FIGS. 5 and 6 .
偏光軸檢測器31係具備第一偏光光線檢測部311與第二偏光光線檢測部312。 The polarization axis detector 31 includes a first polarization ray detecting unit 311 and a second polarization ray detecting unit 312.
第一偏光光線檢測部311係具備用以檢測偏光軸的檢測用偏光子(以下,也稱為「檢光子」)311a,與用以檢測通過檢測用偏光子311a之偏光光線的第一照度感測器311b。第一照度感測器311b係具備對通過檢測用偏光子311a之偏光光線進行受光的受光部311c(圖6)。受光部311c係藉由支持構件311d固定於偏光軸檢測器31的框體。 The first polarized light detecting unit 311 includes a detecting polarizer for detecting a polarization axis (hereinafter also referred to as "photodetector") 311a, and a first illuminance for detecting a polarized light passing through the detecting polarizer 311a. Detector 311b. The first illuminance sensor 311b includes a light receiving unit 311c (FIG. 6) that receives the polarized light that has passed through the detecting polarizer 311a. The light receiving unit 311c is fixed to the housing of the polarization axis detector 31 by the supporting member 311d.
圖7係揭示第一偏光光線檢測部311的構造的模式圖。在該圖7中,揭示第一偏光光線檢測部311檢測從光照射部10A照射之偏光光線之狀況的構造。 FIG. 7 is a schematic view showing the configuration of the first polarized light detecting portion 311. In FIG. 7, the structure in which the first polarized light detecting unit 311 detects the state of the polarized light irradiated from the light irradiating unit 10A is disclosed.
如圖7所示,來自光照射部10A之放電燈11的光線 (放射光L1),係通過偏光子單元13A而進行直線偏光,其偏光光線L2射入至檢測用偏光子311a。受光部311c係此時,將通過檢測用偏光子311a的光線,作為檢測光L3而進行受光。 As shown in Fig. 7, the light from the discharge lamp 11 of the light irradiation portion 10A (The emitted light L1) is linearly polarized by the polarizing subunit 13A, and the polarized light L2 is incident on the detecting polarizer 311a. In this case, the light receiving unit 311c receives the light passing through the detecting polarizer 311a as the detecting light L3.
檢測用偏光子311a係例如線柵型偏光元件。再者,檢測用偏光子311a係只要是直線偏光子,可使用任意的偏光子。 The detecting polarizer 311a is, for example, a wire grid type polarizing element. Further, the detecting polarizer 311a may be any polarizer as long as it is a linear polarizer.
又,檢測用偏光子311a係將其法線方向S作為旋轉軸,可涵蓋180°以上的檢測測定範圍內自由旋轉地構成。檢測用偏光子311a的旋轉係藉由自預先設定之基準位置P0的旋轉角度θ來規定。 Further, the detecting polarizer 311a has a normal direction S as a rotation axis, and can be configured to be freely rotatable within a detection measurement range of 180° or more. The rotation of the detecting polarizer 311a is defined by the rotation angle θ from the preset reference position P0.
檢測用偏光子311a的旋轉角度θ,是構成偏光子單元13A的偏光子13Aa之透射軸T1的方向與檢測用偏光子311a之透射軸T2的方向一致的角度時,以受光部311c受光之光線的照度成為最大。又,檢測用偏光子311a的旋轉角度θ,是透射軸T2正交於透射軸T1的角度時,以受光部311c受光之光線的照度成為最小。 When the rotation angle θ of the detecting polarizer 311a is an angle at which the direction of the transmission axis T1 of the polarizer 13Aa of the polarizing sub-unit 13A coincides with the direction of the transmission axis T2 of the detecting polarizer 311a, the light received by the light receiving portion 311c is received. The illuminance is the biggest. Further, when the rotation angle θ of the detecting polarizer 311a is an angle perpendicular to the transmission axis T1, the illuminance of the light received by the light receiving unit 311c is minimized.
亦即,受光部311c受光之光線的照度,係因應檢測用偏光子311a的旋轉角度而週期性變動。所以,利用一邊使檢測用偏光子311a旋轉一邊監視受光部311c受光之光線的照度,可測定從光照射部10A、10B照射之偏光光線的偏光軸角度。 In other words, the illuminance of the light received by the light receiving unit 311c periodically changes in accordance with the rotation angle of the detecting polarizer 311a. Therefore, by monitoring the illuminance of the light received by the light receiving unit 311c while rotating the detecting polarizer 311a, the polarization axis angle of the polarized light irradiated from the light irradiation units 10A and 10B can be measured.
為了以可使檢測用偏光子311a旋轉之方式構成,第一偏光光線檢測部311係具備用以使檢測用偏光子311a 旋轉的旋轉機構。該旋轉機構係例如具備圖5及圖6所示之旋轉致動器311e,與固定於旋轉致動器311e的旋轉子311f。 In order to rotate the detecting polarizer 311a, the first polarized light detecting unit 311 is provided with a detecting polarizer 311a. Rotating rotating mechanism. This rotation mechanism includes, for example, a rotary actuator 311e shown in FIGS. 5 and 6 and a rotary 311f fixed to the rotary actuator 311e.
旋轉致動器311e係藉由後述之控制部34進行驅動控制。檢測用偏光子311a係被固定於旋轉子311f,利用控制部34驅動控制旋轉致動器311e來使旋轉子311f旋轉,而讓檢測用偏光子311a旋轉。藉此,檢測用偏光子311a與第一照度感測器311b(受光部311c)相對性旋轉。 The rotary actuator 311e is driven and controlled by a control unit 34 which will be described later. The detecting polarizer 311a is fixed to the rotor 311f, and the control unit 34 drives and controls the rotation actuator 311e to rotate the rotor 311f, thereby rotating the detecting polarizer 311a. Thereby, the detecting polarizer 311a and the first illuminance sensor 311b (light receiving portion 311c) are relatively rotated.
進而,如圖6所示,第一照度感測器311b係具有限制對受光部311c之入射光的開口部311g。開口部311g係配合光照射部10A、10B的偏光子單元13A、13B也通過傾斜射入之光線來生成偏光光線,為了擷取該等傾斜射入的成分所致之偏光光線,成為將射入角為例如0°~65°的範圍的偏光光線,射入至受光部311c的形狀。 Further, as shown in FIG. 6, the first illuminance sensor 311b has an opening 311g that restricts incident light to the light receiving portion 311c. The polarizing sub-units 13A and 13B that are combined with the light-irradiating portions 10A and 10B are also configured to generate polarized light by obliquely incident light, and the polarized light due to the obliquely incident components is incident. The polarized light having an angle of, for example, a range of 0° to 65° is incident on the shape of the light receiving unit 311c.
又,第一偏光光線檢測部311係具備用以冷卻第一照度感測器311b的冷卻機構。該冷卻機構係例如空氣冷卻方式所致者,具備從外部擷取冷卻的冷氣供給部311h。 Further, the first polarized light detecting unit 311 includes a cooling mechanism for cooling the first illuminance sensor 311b. This cooling mechanism is, for example, an air cooling system, and includes a cold air supply unit 311h that draws cooling from the outside.
再者,冷卻機構也可採用水冷方式所致者。但是,有鑑於水冷閥破損時的影響等,採用空氣冷卻方式為佳。 Furthermore, the cooling mechanism can also be caused by water cooling. However, in view of the influence of damage to the water-cooled valve, air cooling is preferred.
又,第二偏光光線檢測部312係除了未具備第一偏光光線檢測部311中之檢測用偏光子311a,與用以使該檢測用偏光子311a旋轉的旋轉機構,具有與第一 偏光光線檢測部311相同的構造。 Further, the second polarized light detecting unit 312 includes the detecting polarizer 311a in the first polarized light detecting unit 311 and the rotating mechanism for rotating the detecting polarizer 311a. The polarized light detecting unit 311 has the same structure.
亦即,第二偏光光線檢測部312係如圖5及圖6所示,具備直接射入來自光照射部10A、10B的偏光光線,檢測該偏光光線之照度的第二照度感測器312a。第二照度感測器312a係具備對來自光照射部10A、10B的偏光光線進行直接受光的受光部312b(圖6)。 In other words, as shown in FIGS. 5 and 6, the second polarized light detecting unit 312 includes a second illuminance sensor 312a that directly enters the polarized light rays from the light irradiation units 10A and 10B and detects the illuminance of the polarized light. The second illuminance sensor 312a includes a light receiving unit 312b that directly receives the polarized light from the light irradiation units 10A and 10B (FIG. 6).
第二照度感測器312a係藉由支持構件312c,以受光部312b的高度位置成為與第一照度感測器311b的受光部311c的高度位置同等之方式支持。支持構件312c係固定於偏光光線檢測器31的框體。 The second illuminance sensor 312a is supported by the support member 312c such that the height position of the light receiving portion 312b is equal to the height position of the light receiving portion 311c of the first illuminance sensor 311b. The support member 312c is fixed to the frame of the polarized light detector 31.
又,如圖6所示,第二照度感測器312a係具有限制對受光部312b之入射光的開口部312d。開口部312d係與上述之開口部311f相同,成為將射入角為例如0°~65°的範圍的偏光光線,射入至受光部312b的形成。 Further, as shown in FIG. 6, the second illuminance sensor 312a has an opening 312d that restricts incident light to the light receiving portion 312b. The opening 312d is formed in the same manner as the above-described opening 311f, and is a polarized ray having an incident angle of, for example, 0° to 65°, and is incident on the light receiving unit 312b.
進而,第二偏光光線檢測部312係具備用以冷卻第二照度感測器312a的冷卻機構。該冷卻機構係例如空氣冷卻方式所致者,具備從外部擷取冷卻的冷氣供給部312e。 Further, the second polarized light detecting unit 312 includes a cooling mechanism for cooling the second illuminance sensor 312a. This cooling mechanism is, for example, an air cooling system, and includes a cold air supply unit 312e that draws cooling from the outside.
再者,冷卻機構也可採用水冷方式所致者。但是,有鑑於水冷閥破損時的影響等,採用空氣冷卻方式為佳。 Furthermore, the cooling mechanism can also be caused by water cooling. However, in view of the influence of damage to the water-cooled valve, air cooling is preferred.
第二照度感測器312a係在與第一照度感測器311b相同波長區域具有感度者為佳。但是,只要可同時檢測出放電燈11的放射光,作為於不同波長區域具有感度者亦可。 It is preferable that the second illuminance sensor 312a has a sensitivity in the same wavelength region as the first illuminance sensor 311b. However, as long as the radiation of the discharge lamp 11 can be detected at the same time, it is also possible to have sensitivity in different wavelength regions.
具體來說,第一照度感測器311b及第二照度感測器312a係在例如200nm~400nm的波長區域具有感度者為佳。更具體來說,第一照度感測器311b及第二照度感測器312a係例如254nm、313nm、365nm的照度容易測定為佳。 Specifically, it is preferable that the first illuminance sensor 311b and the second illuminance sensor 312a have sensitivity in a wavelength region of, for example, 200 nm to 400 nm. More specifically, the illuminance of the first illuminance sensor 311b and the second illuminance sensor 312a, for example, 254 nm, 313 nm, and 365 nm is easily measured.
又,第一照度感測器311b的受光部311c與第二照度感測器312a的受光部312b,係沿著放電燈11的管軸方向(長邊方向)並排設置。放電燈11的管軸方向,係與移動偏光軸檢測器31的Y方向相同之方向。 Further, the light receiving portion 311c of the first illuminance sensor 311b and the light receiving portion 312b of the second illuminance sensor 312a are arranged side by side in the tube axis direction (longitudinal direction) of the discharge lamp 11. The tube axis direction of the discharge lamp 11 is the same direction as the Y direction of the moving polarization axis detector 31.
此係因為從放電燈11放射之光線,在管徑方向中照度變化較大,在管軸方向中照度變化較小。如此,利用將受光部311c與受光部312b沿著放電燈11的管軸方向(長邊方向)併設,可減少第一照度感測器311b與第二照度感測器312a所檢測出之光線的照度的差。 This is because the illuminance that is emitted from the discharge lamp 11 changes greatly in the direction of the tube diameter, and the illuminance changes little in the tube axis direction. By arranging the light receiving unit 311c and the light receiving unit 312b along the tube axis direction (longitudinal direction) of the discharge lamp 11, the light detected by the first illuminance sensor 311b and the second illuminance sensor 312a can be reduced. The difference in illuminance.
再者,已針對第一偏光光線檢測部311及第二偏光光線檢測部312分別具有用以冷卻受光部的冷卻機構之狀況進行說明,但是,從放電燈11放射之熱也會透過Y方向搬送部32等而從偏光軸檢測部31的下側傳達。因此,於偏光軸檢測部31的框體底部設置隔熱構件,或使旋轉機構懸吊亦可。 In addition, the first polarized light detecting unit 311 and the second polarized light detecting unit 312 respectively have a cooling mechanism for cooling the light receiving unit. However, the heat radiated from the discharge lamp 11 is also transmitted through the Y direction. The portion 32 and the like are transmitted from the lower side of the polarization axis detecting unit 31. Therefore, a heat insulating member may be provided at the bottom of the frame of the polarizing axis detecting portion 31, or the rotating mechanism may be suspended.
接著,針對構成偏光測定裝置30的控制部34進行說明。 Next, the control unit 34 constituting the polarization measuring device 30 will be described.
圖8係揭示偏光測定裝置30之構造的區塊圖。 FIG. 8 is a block diagram showing the configuration of the polarization measuring device 30.
如上所述,偏光測定裝置30係具備偏光軸檢測器 31、X方向搬送部32、Y方向搬送部33、控制部34及監視器35。 As described above, the polarization measuring device 30 is provided with a polarization axis detector 31. The X-direction transport unit 32, the Y-direction transport unit 33, the control unit 34, and the monitor 35.
控制部34係具備旋轉子控制部34a、輸入訊號轉換部34b、偏光特性運算部34c、畫像顯示部34d、及搬送控制部34e。 The control unit 34 includes a rotation sub-control unit 34a, an input signal conversion unit 34b, a polarization characteristic calculation unit 34c, an image display unit 34d, and a conveyance control unit 34e.
旋轉子控制部34a係對於第一偏光光線檢測部311,輸出用以驅動控制旋轉致動器311d的驅動指令。在本實施形態中,於各偏光測定位置中,使檢光子311a在預先設定之旋轉角度範圍θ 1≦θ≦θ 2內,旋轉成複數指定角度,在各指定角度中第一照度感測器311b測定偏光光線。旋轉角度範圍係跨越第一照度感測器311b所檢測出之偏光光線的照度應成為最小的檢光子311a的角度(設定基準值θ a),例如設定於±20°的範圍。 The rotation sub-control unit 34a outputs a drive command for driving the control rotary actuator 311d to the first polarization ray detecting unit 311. In the present embodiment, in each of the polarization measurement positions, the photodetector 311a is rotated into a predetermined number of angles within a predetermined rotation angle range θ 1 ≦ θ ≦ θ 2 , and the first illuminance sensor is used in each specified angle. 311b measures the polarized light. The rotation angle range is an angle (setting reference value θ a ) of the photodetector 311 a which is the minimum illuminance of the polarized light detected by the first illuminance sensor 311 b , and is set, for example, within a range of ±20°.
例如,在設定基準值θ a設定為120°時,旋轉角度範圍成為100°≦θ≦140°。 For example, when the set reference value θ a is set to 120°, the range of the rotation angle is 100° ≦ θ ≦ 140°.
又,在本實施形態中,於前述旋轉角度範圍中,例如,除了θ=θ a,設定每10°間隔來測定偏光光線的角度位置。亦即,在旋轉角度範圍為100°≦θ≦140°時,以θ=θ 1=100°、θ=110°、θ=130°、θ=θ 2=140°來測定偏光光線。旋轉子控制部34a係為了將檢光子311a設為前述4個角度位置之任一,對於旋轉致動器311d輸出驅動指令。 Further, in the present embodiment, in the range of the rotation angle, for example, in addition to θ = θ a , the angular position of the polarized ray is measured every 10° intervals. That is, when the rotation angle range is 100 ° ≦ θ ≦ 140 °, the polarized light is measured at θ = θ 1 = 100 °, θ = 1010 °, θ = 130 °, and θ = θ 2 = 140 °. The rotation sub-control unit 34a outputs a drive command to the rotary actuator 311d in order to set the photodetector 311a to any of the four angular positions.
輸入訊號轉換部34b係輸入第一照度感測器 311b所檢測出之照度資訊的檢測照度值(照度計數值)Cd,及第二照度感測器312a所檢測之照度資訊的參照照度值(照度計數值)Cr,放大該等檢測訊號並輸出至偏光特性運算部34c。 The input signal conversion unit 34b inputs the first illuminance sensor The detected illuminance value (illuminance count value) Cd of the illuminance information detected by 311b and the reference illuminance value (illuminance count value) Cr of the illuminance information detected by the second illuminance sensor 312a are amplified, and the detection signals are amplified and output to The polarization characteristic calculation unit 34c.
在此,第一照度感測器311b與第二照度感測器312a係在相同時機檢測受光光線的照度者,輸入訊號轉換部34b係以輸入兩個感測器同時檢測出之兩個檢測訊號之方式構成。 Here, the first illuminance sensor 311b and the second illuminance sensor 312a detect the illuminant of the received light at the same timing, and the input signal conversion unit 34b receives the two detection signals simultaneously input by the two sensors. The way it is structured.
偏光特性運算部34c係依據從輸入訊號轉換部34b輸入的照度資訊,運算出從光照射部10A、10B照射之偏光光線的偏光特性。在本實施形態中,偏光特性運算部34c係作為前述偏光特性,測定偏光軸角度與消光比。 The polarization characteristic calculation unit 34c calculates the polarization characteristics of the polarization ray irradiated from the light irradiation units 10A and 10B based on the illuminance information input from the input signal conversion unit 34b. In the present embodiment, the polarization characteristic calculation unit 34c measures the polarization axis angle and the extinction ratio as the polarization characteristics.
畫像顯示部34d係將以偏光特性運算部34c運算出的偏光特性,輸出至監視器35。 The image display unit 34d outputs the polarization characteristics calculated by the polarization characteristic calculation unit 34c to the monitor 35.
搬送控制部34e係驅動控制X方向搬送部32及Y方向搬送部33,將偏光軸檢測器31往XY方向移動,移動至所定偏光測定位置。 The conveyance control unit 34e drives and controls the X-direction conveyance unit 32 and the Y-direction conveyance unit 33, moves the polarization axis detector 31 in the XY direction, and moves to the predetermined polarization measurement position.
控制部34及監視器35係以不受到從放電燈11放射之紫外光的影響(主要是熱的影響)之方式,設置在離開偏光軸檢測器31、X方向搬送部32及方向搬送部33的位置。控制部34係將對偏光軸檢測器31之驅動指令的輸出及來自偏光軸檢測器31之檢測訊號的取得等,透過未圖示的纜線進行。 The control unit 34 and the monitor 35 are provided away from the polarization axis detector 31, the X-direction transport unit 32, and the direction transport unit 33 so as not to be affected by the ultraviolet light emitted from the discharge lamp 11 (mainly due to heat). s position. The control unit 34 transmits the output of the drive command to the polarization axis detector 31 and the acquisition of the detection signal from the polarization axis detector 31 through a cable (not shown).
圖9係揭示以控制部34執行之偏光測定處理順序的流程圖。此偏光測定處理係揭示所定偏光測定位置之偏光光線的測定順序者。 FIG. 9 is a flowchart showing the procedure of the polarization measurement process performed by the control unit 34. This polarization measurement process reveals the order of measurement of the polarized light at the predetermined polarization measurement position.
首先,在步驟S1中,控制部34係從旋轉子控制部34a對於旋轉致動器311d,輸出驅動指令,使檢光子311a旋轉至指定角度為止。在此,指定角度的初始值設為θ=θ 1。 First, in step S1, the control unit 34 outputs a drive command to the rotary actuator 311d from the rotation sub-control unit 34a to rotate the photodetector 311a to a predetermined angle. Here, the initial value of the specified angle is set to θ=θ 1 .
接著,在步驟S2中,控制部34係從第一照度感測器311b取得檢測照度值Cd,從第二照度感測器312a取得參照照度值Cr,轉移至步驟S3。 Next, in step S2, the control unit 34 acquires the detected illuminance value Cd from the first illuminance sensor 311b, and acquires the reference illuminance value Cr from the second illuminance sensor 312a, and the process proceeds to step S3.
在步驟S3中,以前述步驟S2中取得之檢測照度值Cd來除參照照度值Cr,計算出修正後照度值Cc(Cc=Cr/Cd)。該修正後照度值Cc係以參照照度值Cr來修正包含於檢測照度值Cd之來自放電燈11的光線之每小時的照度變動所致之誤差者。 In step S3, the corrected illuminance value Cr is calculated by dividing the reference illuminance value Cr by the detected illuminance value Cd obtained in the above step S2 (Cc = Cr / Cd). The corrected illuminance value Cc is used to correct the error caused by the illuminance variation per hour of the light from the discharge lamp 11 included in the detected illuminance value Cd with reference to the illuminance value Cr.
接著,在步驟S4中,控制部34係判定預先設定之所有角度位置中照度測定是否完成。然後,在判斷照測定並未完成時,重新設定指定角度而轉移至前述步驟S1,在判斷照度測定已完成時,轉移至步驟S5。 Next, in step S4, the control unit 34 determines whether or not the illuminance measurement is completed in all of the angular positions set in advance. Then, when it is determined that the measurement is not completed, the designated angle is reset and the process proceeds to the above-described step S1. When it is determined that the illuminance measurement has been completed, the process proceeds to step S5.
在步驟S5中,控制部34係依據前述步驟S3中計算出之各角度位置之修正後照度值Cc,計算出偏光光線的偏光軸。 In step S5, the control unit 34 calculates the polarization axis of the polarization ray based on the corrected illuminance value Cc of each angular position calculated in the above-described step S3.
在本實施形態中,以各修正後照度值Cc為基準來進行曲線擬合,求出表示檢光子311a之旋轉角度與 修正後照度值Cc的關係的偏光光線角度特性(以下,單稱為「角度特性」)。該偏光光線角度特性係表示通過使檢光子311a旋轉時的檢光子311a之偏光光線的照度之週期性變化者,上述之照度變動所致之誤差被修正過的適切之特性。然後,根據求出的角度特性來計算出偏光軸角度。 In the present embodiment, curve fitting is performed based on each corrected illuminance value Cc, and the rotation angle indicating the photodetector 311a is obtained. The polarization ray angle characteristic (hereinafter, simply referred to as "angle characteristic") of the relationship of the corrected illuminance value Cc. The polarization ray angle characteristic indicates a characteristic in which the illuminance of the polarized ray of the photodetector 311a when the photodetector 311a is rotated is periodically changed, and the error due to the illuminance variation described above is corrected. Then, the polarization axis angle is calculated from the obtained angle characteristics.
在此,作為擬合函數,例如使用Acos2(θ+B)+C的函數。再者,作為擬合函數,也可使用其他函數。 Here, as a fitting function, for example, a function of Acos 2 (θ+B)+C is used. Furthermore, other functions can be used as a fitting function.
圖10係揭示前述角度特性之一例的圖。在此,測定偏光光線的角度位置,係設為θ=120°±10°、θ=120°±20°的4處。 Fig. 10 is a view showing an example of the aforementioned angular characteristics. Here, the angular position of the polarized light is measured, and is set to four places of θ=120°±10° and θ=120°±20°.
於該圖10中,縱軸是監視器照度計數值[%],橫軸是檢光子311a的旋轉角度θ[度]。圖中虛線是參照照度值Cr,點a~d係各角度位置中計算出之修正後照度值Cc進行作圖者。又,曲線F係以該等4個測定點a~d為基準,藉由最小平方法及牛頓法來進行擬合,利用求出常數A、B、C所得之曲線,相當於前述偏光光線角度特性。 In FIG. 10, the vertical axis is the monitor illuminance count value [%], and the horizontal axis is the rotation angle θ [degrees] of the photodetector 311a. The dotted line in the figure is the reference illuminance value Cr, and the points a to d are plotted against the corrected illuminance value Cc calculated in each angular position. Further, the curve F is based on the four measurement points a to d, and is fitted by the least square method and the Newton method, and the curve obtained by obtaining the constants A, B, and C is equivalent to the aforementioned polarized ray angle. characteristic.
於該角度特性F中,監視器照度計數值成為最小的角度,是檢光子311a的透射軸與偏光子13Aa(或13Ba)的透射軸實際正交之檢光子311a的旋轉角度。又,從監視器照度計數值成為最小的角度減去90°的角度,是監視器照度計數值成為最大的角度,也就是檢光子311a的透射軸與偏光子13Aa(或13Ba)的透射軸實際一 致之檢光子311a的旋轉角度。 In the angle characteristic F, the angle at which the monitor illuminance count value becomes the smallest is the rotation angle of the photodetector 311a whose transmission axis of the photodetector 311a is substantially orthogonal to the transmission axis of the polarizer 13Aa (or 13Ba). Further, the angle at which the monitor illuminance count value becomes the smallest minus 90° is the angle at which the monitor illuminance count value becomes maximum, that is, the transmission axis of the photodetector 311a and the transmission axis of the polarizer 13Aa (or 13Ba) are actually One The angle of rotation of the photodetector 311a is obtained.
在此,監視器照度計數值成為最小的角度,係藉由上述之曲線擬合所求出的參數B,對於設定基準值θ a包含所定偏移θ b角者(B=θ a+θ b)。因此,控制部34係以角度(θ a+θ b)為基準,輸出實際的偏光軸角度(偏光子13Aa、13Ba之透射軸的方向)。 Here, the angle at which the monitor illuminance count value becomes the smallest is the parameter B obtained by the above-described curve fitting, and the set reference value θ a includes the predetermined offset θ b angle (B=θ a+θ b ). Therefore, the control unit 34 outputs the actual polarization axis angle (the direction of the transmission axes of the polarizers 13Aa and 13Ba) based on the angle (θ a + θ b ).
檢光子311a的旋轉角度係如上所述,藉由對於基準位置P0的角度θ來規定。因此,偏光軸角度是與檢光子311a相同藉由對於基準位置P0的角度來規定時,控制部34係作為實際的偏光軸角度,輸出從角度(θ a+θ b)減去90°的角度。又,偏光軸角度是藉由對於從基準位置P0偏移90°的位置的角度來規定時,控制部34係作為實際的偏光軸角度,直接輸出角度(θ a+θ b)。 The rotation angle of the photodetector 311a is defined by the angle θ with respect to the reference position P0 as described above. Therefore, when the polarization axis angle is defined by the angle with respect to the reference position P0 in the same manner as the photodetector 311a, the control unit 34 outputs the angle from the angle (θ a + θ b) by 90° as the actual polarization axis angle. . Further, when the polarization axis angle is defined by the angle of the position shifted by 90 from the reference position P0, the control unit 34 directly outputs the angle (θ a + θ b) as the actual polarization axis angle.
接著,在步驟S6中,控制部34係到前述步驟S5中計算出之監視器照度計數值成為最小的角度(θ a+θ b)為止使檢光子311a旋轉,轉移至步驟S7。 Next, in step S6, the control unit 34 rotates the photodetector 311a until the angle (θ a + θ b) at which the monitor illuminance count value calculated in the above-described step S5 is the smallest, and the process proceeds to step S7.
在步驟S7中,控制部34係從第一照度感測器311b取得檢測照度值Cd(圖10的測定點e),並將此設為偏光光線的最小照度,轉移至步驟S8。 In step S7, the control unit 34 acquires the detected illuminance value Cd (measurement point e in Fig. 10) from the first illuminance sensor 311b, and sets this as the minimum illuminance of the polarized ray, and the process proceeds to step S8.
在步驟S8中,控制部34係到前述步驟S5中計算出之監視器照度計數值成為最小的角度(θ a+θ b-90°)為止使檢光子311a旋轉,轉移至步驟S9。 In step S8, the control unit 34 rotates the photodetector 311a until the angle at which the monitor illuminance count value calculated in the above-described step S5 is the smallest (θ a + θ b - 90°), and the process proceeds to step S9.
在步驟S9中,控制部34係從第一照度感測器311b取得檢測照度值Cd(圖10的測定點f),並將此 設為偏光光線的最大照度,轉移至步驟S10。 In step S9, the control unit 34 acquires the detected illuminance value Cd (measurement point f of Fig. 10) from the first illuminance sensor 311b, and this The maximum illuminance of the polarized light is set, and the process proceeds to step S10.
在步驟S10中,控制部34係依據前述步驟S7中取得之最小照度,與前述步驟S9中取得之最大照度的比(最大照度/最小照度),計算出消光比。 In step S10, the control unit 34 calculates the extinction ratio based on the ratio of the minimum illuminance obtained in the above-described step S7 to the maximum illuminance obtained in the above step S9 (maximum illuminance/minimum illuminance).
在步驟S11中,控制部34係從畫像顯示部34d對於監視器35,輸出前述步驟S5中運算出之偏光軸角度與前述步驟S10中運算出之消光比。藉此,於監視器35顯示偏光特性的測定結果。 In step S11, the control unit 34 outputs the polarization axis angle calculated in the above-described step S5 and the extinction ratio calculated in the above-described step S10 to the monitor 35 from the image display unit 34d. Thereby, the measurement result of the polarization characteristic is displayed on the monitor 35.
再者,圖9的步驟S1~S4對應旋轉控制部,步驟S5~S10對應偏光特性運算部。又,步驟S5對應偏光軸角度運算部,步驟S6~S10對應消光比運算部。 Further, steps S1 to S4 of FIG. 9 correspond to the rotation control unit, and steps S5 to S10 correspond to the polarization characteristic calculation unit. Further, step S5 corresponds to the polarization axis angle calculation unit, and steps S6 to S10 correspond to the extinction ratio calculation unit.
接著,針對本實施形態的動作及效果進行說明。 Next, the operation and effects of the present embodiment will be described.
首先,控制部34係驅動控制X方向搬送部32及Y方向搬送部33,將偏光光線檢測器31配置於偏光子單元13A的複數偏光子13Aa中位於Y方向的最遠端的偏光子13Aa的正下方。如此,控制部34係將偏光光線檢測器31配置於通過偏光特性的測定對象之偏光子31Aa的偏光光線的照射區域。 First, the control unit 34 drives and controls the X-direction transport unit 32 and the Y-direction transport unit 33, and arranges the polarization ray detector 31 on the far-end polarizer 13Aa located in the Y direction among the plurality of polarizers 13Aa of the polarization subunit 13A. Directly below. In this way, the control unit 34 arranges the polarized light detector 31 in the irradiation region of the polarized light of the polarizer 31Aa that is subjected to the measurement of the polarization characteristics.
在設定基準值θ a=120°之狀況中,檢光子311a是θ=120°時,第一照度感測器311b所檢測出之偏光光線的照度應該會成為最小。因此,首先,控制部34係驅動控制旋轉致動器311d,使檢光子311a以成為θ=θ a-20°=100°之方式旋轉。 In the case where the reference value θ a = 120° is set, when the photodetector 311a is θ = 120°, the illuminance of the polarized light detected by the first illuminance sensor 311b should be minimized. Therefore, first, the control unit 34 drives and controls the rotary actuator 311d to rotate the photodetector 311a so that θ = θ a - 20 ° = 100°.
然後,在此狀態下,利用第一照度感測器311b與第二照度感測器312a,同時測定偏光光線的照度,控制部34係取得以該等兩個感測器所測定之照度資訊。亦即,控制部34係從第一照度感測器311b,取得通過檢光子311a的偏光光線之照度資訊的檢測照度值Cd,從第二照度感測器312a,取得未通過檢光子311a的偏光光線之照度資訊的參照照度值Cr。 Then, in this state, the illuminance of the polarized light is simultaneously measured by the first illuminance sensor 311b and the second illuminance sensor 312a, and the control unit 34 acquires the illuminance information measured by the two sensors. In other words, the control unit 34 acquires the detected illuminance value Cd of the illuminance information of the polarized light passing through the photodetector 311a from the first illuminance sensor 311b, and acquires the polarized light that has not passed through the photodetector 311a from the second illuminance sensor 312a. The reference illuminance value Cr of the illuminance information of the light.
接著,控制部34係驅動控制旋轉致動器311d,使檢光子311a以成為θ=100°的位置到θ=110°之方式旋轉。然後,在其位置中,控制部34係取得以第一照度感測器311b與第二照度感測器312a所測定之檢測照度值Cd與參照照度值Cr。 Next, the control unit 34 drives and controls the rotary actuator 311d to rotate the photodetector 311a so that the position becomes θ=100° to θ=110°. Then, in its position, the control unit 34 acquires the detected illuminance value Cd and the reference illuminance value Cr measured by the first illuminance sensor 311b and the second illuminance sensor 312a.
之後,控制部34係使檢光子311a分別旋轉成θ=130°與θ=140°,同樣地取得以第一照度感測器311b與第二照度感測器312a所測定之檢測照度值Cd與參照照度值Cr。 Thereafter, the control unit 34 rotates the photodetectors 311a to θ=130° and θ=140°, respectively, and acquires the detected illuminance values Cd measured by the first illuminance sensor 311b and the second illuminance sensor 312a in the same manner. Refer to the illuminance value Cr.
然後,控制部34係依據在各角度位置中所得之檢測照度值Cd與參照照度值Cr,計算出圖10所示之角度特性。 Then, the control unit 34 calculates the angle characteristic shown in FIG. 10 based on the detected illuminance value Cd and the reference illuminance value Cr obtained at the respective angular positions.
檢測照度值Cd是通過檢光子311a之偏光光線的照度值,所以,值會因應偏光子13Aa之透射軸與檢光子311a之透射軸所成的角而變動。所以,利用一邊使檢光子311a的旋轉角度θ變化,一邊監視檢測照度值Cd的變動,可計算出表示檢光子311a之旋轉角度與通過檢光子 311a的偏光光線之照度資訊的關係的角度特性。 Since the detected illuminance value Cd is the illuminance value of the polarized light passing through the photodetector 311a, the value fluctuates depending on the angle formed by the transmission axis of the polarizer 13Aa and the transmission axis of the photodetector 311a. Therefore, by monitoring the fluctuation of the detected illuminance value Cd while changing the rotation angle θ of the photodetector 311a, the rotation angle indicating the photodetector 311a and the photodetection can be calculated. The angular characteristic of the relationship of the illuminance information of the polarized light of 311a.
然而,光源的放電燈11係因為電弧的搖動而光量時時刻刻在變化,在使檢光子311a的旋轉角度θ變化之間發生來自放電燈11之放射光的光量變化的現象。 However, the discharge lamp 11 of the light source changes the amount of light momentarily due to the shaking of the arc, and the amount of light emitted from the discharge lamp 11 changes between the rotation angle θ of the photodetector 311a.
因此,不考慮該放電燈之電弧的搖動,直接使用檢測照度值Cd來計算角度特性的話,會計算出包含從放電燈11照射之光線的每小時的照度變動所致之誤差的角度特性,偏光測定精度會明顯降低。 Therefore, when the angle characteristic is calculated by directly using the detected illuminance value Cd regardless of the shaking of the arc of the discharge lamp, the angular characteristic including the error caused by the variation of the illuminance per hour of the light irradiated from the discharge lamp 11 is calculated, and the polarization measurement is performed. The accuracy will be significantly reduced.
因此,在本實施形態中,以第一照度感測器311b測定通過檢光子311a之來自光照射部的偏光光線的照度,與此同步,以第二照度感測器312a測定不通過檢光子311a之來自光照射部的偏光光線的照度。亦即,藉由以兩者觀察相同電弧的搖動,將以第二照度感測器312a所得之參照照度值Cr,使用來作為以第一照度感測器311b所得之檢測照度值Cd的基準值。 Therefore, in the present embodiment, the first illuminance sensor 311b measures the illuminance of the polarized light from the light-irradiating portion of the photodetector 311a, and in synchronization with this, the second illuminance sensor 312a determines that the photodetector 311a does not pass. The illuminance of the polarized light from the light-irradiating portion. That is, by observing the shaking of the same arc with both, the reference illuminance value Cr obtained by the second illuminance sensor 312a is used as the reference value of the detected illuminance value Cd obtained by the first illuminance sensor 311b. .
控制部34係利用將從第一照度感測器311b所得之檢測照度值Cd,除以從第二照度感測器312a所得之參照照度值Cr,修正起因於檢測照度值Cd所包含之電弧的搖動的照度變動所致之誤差。然後,以修正後的照度值(修正後照度值Cc)為基準,使用曲線擬合的手法來計算出如圖10所示之角度特性F。 The control unit 34 corrects the arc included in the detected illuminance value Cd by dividing the detected illuminance value Cd obtained from the first illuminance sensor 311b by the reference illuminance value Cr obtained from the second illuminance sensor 312a. The error caused by the fluctuation of the illuminance. Then, using the corrected illuminance value (corrected illuminance value Cc) as a reference, the angle characteristic F as shown in FIG. 10 is calculated using the curve fitting method.
如上所述,同時測定之檢測照度值Cd及參照照度值Cr係電弧的搖動條件相同。所以,利用使用修正後照度值Cc,即使在使檢光子311a旋轉中電弧變化,也 可高精度地計算出角度特性。 As described above, the detected illuminance value Cd and the reference illuminance value of the Cr-based arc are the same. Therefore, by using the corrected illuminance value Cc, even if the arc changes during the rotation of the photodetector 311a, The angle characteristics can be calculated with high precision.
控制部34係計算出如圖10所示之角度特性F時,依據該角度特性F來計算出偏光軸角度。具體來說,以角度特性F為基準,特定通過檢光子311a之偏光光線的照度成為最小之檢光子311a的旋轉角度(θ a+θ b),並以此為基準,輸出實際的偏光軸角度。 When the control unit 34 calculates the angle characteristic F as shown in FIG. 10, the angle of the polarization axis is calculated based on the angle characteristic F. Specifically, based on the angle characteristic F, the illuminance of the polarized ray passing through the photodetector 311a is specified as the rotation angle (θ a + θ b) of the photodetector 311a which is the smallest, and based on this, the actual polarization axis angle is output. .
接著,控制部34係使用角度特性F,計算出偏光光線的消光比。首先,控制部34係為了檢測出偏光光線的最小照度,驅動控制旋轉致動器311d,將檢光子311a旋轉成θ=(θ a+θ b)。在此狀態下,控制部34係從第一照度感測器311b取得最小照度值的檢測照度值Cd(圖10的測定點e)。 Next, the control unit 34 calculates the extinction ratio of the polarized light using the angle characteristic F. First, the control unit 34 drives and controls the rotary actuator 311d to detect the minimum illuminance of the polarized ray, and rotates the photodetector 311a to θ = (θ a + θ b). In this state, the control unit 34 acquires the detected illuminance value Cd (measurement point e of FIG. 10) of the minimum illuminance value from the first illuminance sensor 311b.
接下來,控制部34係為了檢測出偏光光線的最大照度,驅動控制旋轉致動器311d,將檢光子311a旋轉成θ=(θ a+θ b-90°)。在此狀態下,控制部34係從第一照度感測器311b取得最大照度值的檢測照度值Cd(圖10的測定點f)。 Next, the control unit 34 drives and controls the rotary actuator 311d to detect the maximum illuminance of the polarized ray, and rotates the photodetector 311a to θ = (θ a + θ b - 90 °). In this state, the control unit 34 acquires the detected illuminance value Cd of the maximum illuminance value from the first illuminance sensor 311b (measurement point f in Fig. 10).
然後,控制部34係依據最小照度值與最大照度值的比(最大照度值/最小照度值)來計算出消光比。 Then, the control unit 34 calculates the extinction ratio based on the ratio of the minimum illuminance value to the maximum illuminance value (maximum illuminance value/minimum illuminance value).
藉由以上內容,可獲得通過偏光子單元13A的複數偏光子13Aa中位於Y方向最遠端之偏光子13Aa之偏光光線的偏光特性。接著,控制部34係驅動控制Y方向搬送部33,將偏光光線檢測器31配置於與之前測定出偏光特性之偏光子13Aa鄰接的偏光子13Aa的正下 方。如此,依序切換偏光特性的測定對象,測定偏光特性。 From the above, the polarization characteristics of the polarized light rays passing through the polarizer 13Aa located at the farthest end in the Y direction among the plurality of polarizers 13Aa of the polarizing subunit 13A can be obtained. Next, the control unit 34 drives and controls the Y-direction transport unit 33, and arranges the polarized light detector 31 directly below the polarizer 13Aa adjacent to the polarizer 13Aa that has previously measured the polarization characteristics. square. In this manner, the measurement target of the polarization characteristic is sequentially switched, and the polarization characteristics are measured.
對於偏光子單元13A之所有偏光子13Aa的偏光特性測定完成時,控制部34係驅動控制X方向搬送部33及Y方向搬送部33,將偏光光線檢測器31配置於偏光子單元13B的複數偏光子13Ba中位於Y方向的最遠端之偏光子13Ba的正下方。然後,與偏光子單元13A的狀況相同,對於各偏光子13Ba分別測定偏光特性。 When the measurement of the polarization characteristics of all the polarizers 13Aa of the polarizer unit 13A is completed, the control unit 34 drives and controls the X-direction transport unit 33 and the Y-direction transport unit 33, and the polarized light detector 31 is disposed in the polarization sub-unit 13B. The sub- 13Ba is located directly below the most distal polarizer 13Ba in the Y direction. Then, similarly to the state of the polarizing subunit 13A, the polarization characteristics are measured for each of the polarizers 13Ba.
於定點中,如上所述,檢測出檢測照度值Cd與參照照度值Cr,以將參照照度值Cr以檢測照度值Cd修正之資料為基準,測定偏光軸角度的結果,揭示於圖11的α。在此,圖11的縱軸是偏光軸角度,橫軸是偏光軸角度的測定次數。如實驗結果α所示,在本實施形態中,被測定的偏光軸角度幾乎沒有偏離,標準差3 σ為0.004。亦即,被測定的偏光軸角度係在±0.004°之偏差極小的範圍中包含99.7%。 In the fixed point, as described above, the detected illuminance value Cd and the reference illuminance value Cr are detected, and the result of measuring the polarization axis angle based on the reference illuminance value Cr corrected based on the detected illuminance value Cd is disclosed in FIG. . Here, the vertical axis of FIG. 11 is the polarization axis angle, and the horizontal axis is the number of times of measurement of the polarization axis angle. As shown by the experimental result α, in the present embodiment, the measured polarization axis angle hardly deviated, and the standard deviation 3 σ was 0.004. That is, the measured polarization axis angle is 99.7% in a range in which the deviation of ±0.004° is extremely small.
作為比較例,如本實施形態,不進行參照照度值Cr所致之修正,僅使用檢測照度值Cd來測定偏光軸角度。於圖11的β揭示其結果。 As a comparative example, as in the present embodiment, the correction by the reference illuminance value Cr is not performed, and the polarization axis angle is measured using only the detected illuminance value Cd. The result of β in Fig. 11 reveals the result.
如實驗結果β所示,在比較例中測定結果會變動,有時也分散可見較強的突出值。此係因為使檢光子311a旋轉,在角度不同之4處中測定偏光光線之間發生電弧的搖動,無法穩定測定偏光軸角度。如此,可視覺上理解到因為電弧的搖動而測定結果不均。 As shown by the experimental result β, the measurement results may vary in the comparative example, and a strong protrusion value may be scattered in some cases. In this case, since the photodetector 311a is rotated, the arcing of the arc between the polarized rays is measured at four different angles, and the polarization axis angle cannot be stably measured. Thus, it can be visually understood that the measurement results are uneven due to the shaking of the arc.
又,統計比較例的測定結果,結果,被測定之偏光軸角度的標準差3 σ為0.035。亦即,被測定的偏光軸角度具有±0.035°的偏差。 Further, the measurement results of the comparative examples were measured, and as a result, the standard deviation 3 σ of the measured polarization axis angle was 0.035. That is, the measured polarization axis angle has a deviation of ±0.035°.
於偏光光線照射裝置100中,根據光配向處理的要求精度的觀點,將偏光軸角度對於設定值調整為±0.05°以內為佳。亦即,偏光測定的要求精度為±0.01°程度為佳。然而,在前述比較例中,無法滿足偏光測定的要求精度。 In the polarized light irradiation device 100, it is preferable to adjust the polarization axis angle to within ±0.05° from the viewpoint of the required accuracy of the optical alignment process. That is, the accuracy of the polarization measurement is preferably ±0.01°. However, in the foregoing comparative example, the required accuracy of the polarization measurement cannot be satisfied.
在本實施形態中,除了具有檢光子之第一偏光光線檢測部311之外,具備不透過檢光子直接檢測偏光光線的第二偏光檢測部312,以第一偏光光線檢測部311與第二偏光光線檢測部312,同時檢測相同偏光光線。 In the present embodiment, in addition to the first polarized light detecting unit 311 having the photodetector, the second polarized light detecting unit 312 that directly detects the polarized light without transmitting the photodetector includes the first polarized light detecting unit 311 and the second polarized light. The light detecting unit 312 simultaneously detects the same polarized light.
所以,可將以第二偏光光線檢測部312所檢測出之照度資訊,設為偏光光線的基準照度資訊,來修正以第一偏光光線檢測部311所檢測出之照度資訊所包含之起因於放電燈11的電弧之搖動的每小時的照度變動所致之誤差。因此,可高精度地計算出表示使第一偏光光線檢測部311的檢光子311a旋轉時之檢測光線的照度之週期性變化的角度特性,且可高精度地計算出偏光軸角度及消光比。 Therefore, the illuminance information detected by the second polarized light detecting unit 312 can be used as the reference illuminance information of the polarized light to correct the illuminance information detected by the first polarized light detecting unit 311 due to the discharge. The error caused by the variation of the illuminance per hour of the arc of the lamp 11 is shaken. Therefore, the angular characteristic indicating the periodic change of the illuminance of the detected ray when the photodetector 311a of the first polarized light detecting unit 311 is rotated can be accurately calculated, and the polarization axis angle and the extinction ratio can be accurately calculated.
又,第一偏光光線檢測部311與第二偏光光線檢測部312係並排配置於放電燈11的長邊方向。如此,因為並排配置於放電燈11的照度變動較少的方向,所以,可減少各場所的依存性,可獲得有信賴性的測定結果。 Further, the first polarized light detecting unit 311 and the second polarized light detecting unit 312 are arranged side by side in the longitudinal direction of the discharge lamp 11. In this way, since the illuminance of the discharge lamp 11 is arranged in a direction in which the fluctuation of the illuminance is small, the dependence of each place can be reduced, and the measurement result with reliability can be obtained.
尤其,在作為光源而適用雙燈方式以上的燈管時,第 一偏光光線檢測部311與第二偏光光線檢測部312並排配置於燈管的管徑方向的話,會容易受到從與測定對象的燈管鄰接的燈管放射之光線的影響,無法獲得有信賴性的測定結果。在本實施形態中,將第一偏光光線檢測部311與第二偏光光線檢測部312並排配置於放電燈11的長邊方向,所以,即使在作為光源而適用雙燈方式以上的燈管之狀況中,也可獲得有信賴性的測定結果。 In particular, when a lamp of a double lamp type or more is applied as a light source, When the polarized light detecting unit 311 and the second polarized light detecting unit 312 are arranged in parallel with each other in the direction of the diameter of the tube, the light emitted from the tube adjacent to the measuring tube is easily affected, and reliability cannot be obtained. The result of the measurement. In the present embodiment, the first polarized light detecting unit 311 and the second polarized light detecting unit 312 are arranged side by side in the longitudinal direction of the discharge lamp 11, and therefore, even in the case of using a lamp of a double lamp type or more as a light source, In the meantime, reliable measurement results can also be obtained.
進而,第一偏光光線檢測部311與第二偏光光線檢測部312係在並排配置於放電燈11的正下方之狀態下使用,關於熱的條件較為嚴格。例如,以鋁等來形成保持檢光子311a的保持構件時,因為從放電燈11放射之紫外光(熱)的影響而該保持構件會熱膨脹,檢光子311a與受光部311c的相對位置會偏離,有以受光部311c所檢測出之光線的照度變化之虞。 Further, the first polarized light detecting unit 311 and the second polarized light detecting unit 312 are used in a state in which they are arranged side by side directly below the discharge lamp 11, and the conditions regarding heat are strict. For example, when the holding member holding the photodetector 311a is formed of aluminum or the like, the holding member thermally expands due to the influence of ultraviolet light (heat) radiated from the discharge lamp 11, and the relative position of the photodetector 311a and the light receiving portion 311c deviates. There is a change in the illuminance of the light detected by the light receiving unit 311c.
在本實施形態中,於第一偏光光線檢測部311與第二偏光光線檢測部312,分別設置用以冷卻第一照度感測器311b、第二照度感測器312a的冷卻機構,可穩定檢測出偏光光線。 In the present embodiment, the first polarized light detecting unit 311 and the second polarized light detecting unit 312 are respectively provided with cooling means for cooling the first illuminance sensor 311b and the second illuminance sensor 312a, which can stably detect Polarized light.
又,以第二偏光光線檢測部312所檢測出之照度資訊(參照照度值Cr)為基準,來修正以第一偏光光線檢測部311所檢測出之照度資訊(檢測照度值Cd)時,利用將檢測照度值Cd除以參照照度值Cr,計算出修正過起因於放電燈11的電弧之搖動的每小時的照度變動所致之誤差的修正後照度值Cc。如此,可利用比較簡單 的手法,來修正前述誤差。 Further, when the illuminance information (detected illuminance value Cd) detected by the first polarized light detecting unit 311 is corrected based on the illuminance information (refer to the illuminance value Cr) detected by the second polarized light detecting unit 312, the illuminance information (detected illuminance value Cd) detected by the first polarized light detecting unit 311 is used. The detected illuminance value Cd is divided by the reference illuminance value Cr, and the corrected illuminance value Cc for correcting the error due to the fluctuation of the illuminance per hour caused by the arcing of the arc of the discharge lamp 11 is calculated. So, the use is relatively simple The method to correct the aforementioned error.
進而,偏光光線的測定點係設為將跨越以使第一偏光光線檢測部311的檢光子311a旋轉時之檢測光線的照度成為最小之方式設定的設定基準值θ a之所定旋轉角度範圍內的4處。然後,依據該等4處之測定點的照度資訊,計算出表示使第一偏光光線檢測部311的檢光子311a旋轉時之檢測光線的照度之週期性變化的角度特性。 Further, the measurement point of the polarized light is set within a predetermined rotation angle range of the set reference value θ a set so as to minimize the illuminance of the detected ray when the photodetector 311 a of the first polarized light detecting unit 311 is rotated. 4 places. Then, based on the illuminance information of the four measurement points, the angular characteristic indicating the periodic change of the illuminance of the detection ray when the photodetector 311a of the first polarization ray detecting unit 311 is rotated is calculated.
如此,將在檢測光線的照度成為最小的角度的附近測定出之照度資訊,用於角度特性的計算,所以,可計算出抑制雜訊成分之影響的角度特性。 In this way, the illuminance information measured in the vicinity of the angle at which the illuminance of the detected light is minimized is used for the calculation of the angle characteristic, so that the angle characteristic for suppressing the influence of the noise component can be calculated.
又,因為設置直接檢測來自光照射部10A、10B之偏光光線的第二偏光光線檢測部,也可一邊測定偏光光線的偏光軸角度及消光比,一邊測定偏光光線的照度。如此,可同時進行偏光光線之偏光特性的測定與偏光光線之照度的測定,可獲得高效率。 Further, since the second polarized light detecting unit that directly detects the polarized light from the light irradiation units 10A and 10B is provided, the illuminance of the polarized light can be measured while measuring the polarization axis angle and the extinction ratio of the polarized light. In this way, the measurement of the polarization characteristics of the polarized light and the measurement of the illuminance of the polarized light can be simultaneously performed, and high efficiency can be obtained.
如上所述,在本實施形態中,即使在使用具有每小時的照度變動的光源之狀況中,也不受到該照度變動的影響,可簡便且高精度地測定偏光光線的偏光軸角度及消光比。 As described above, in the present embodiment, even in the case of using a light source having an illuminance variation per hour, the polarization axis angle and the extinction ratio of the polarized light can be easily and accurately measured without being affected by the illuminance fluctuation. .
所以,可適切判斷從光照射部照射之偏光光線的偏光軸是否成為所希望之偏光軸等。然後,在未成為所希望之偏光軸時,為了成為所希望之偏光軸,可進行調整光照射部之偏光子的配置角度等的處理,可進行適切的光配向處 理。 Therefore, it is possible to appropriately determine whether or not the polarization axis of the polarized light irradiated from the light irradiation portion is a desired polarization axis or the like. Then, when the desired polarization axis is not obtained, in order to obtain a desired polarization axis, it is possible to perform a process of adjusting the arrangement angle of the polarizers of the light irradiation portion, etc., and to perform an appropriate light alignment. Reason.
於前述實施形態中,已針對利用將檢測照度值Cd除以參照照度值Cr,來計算出修正後照度值Cc之狀況進行說明,但是,例如也可適用其他方式。 In the above-described embodiment, the case where the corrected illuminance value Cc is calculated by dividing the detected illuminance value Cd by the reference illuminance value Cr is described. However, for example, other methods may be applied.
以下,作為其他方式,針對使用減算與平均值來修正的方式進行說明。 Hereinafter, as another method, a method of correcting using the subtraction and the average value will be described.
首先,在θ=θ a±20°、θ=θ a±10°的合計4處中,第一偏光光線檢測部311及第二偏光光線檢測部312係分別測定檢測照度值Cd及參照照度值Cr。在此,將各指定角度中測定之檢測照度值Cd設為Cd1、Cd2、Cd3、Cd4,將在各指定角度中測定之參照照度值Cr設為Cr1、Cr2、Cr3、Cr4。 First, in the total of four places of θ=θ a±20° and θ=θ a±10°, the first polarized light detecting unit 311 and the second polarized light detecting unit 312 measure the detected illuminance value Cd and the reference illuminance value, respectively. Cr. Here, the detected illuminance values Cd measured at the respective designated angles are Cd1, Cd2, Cd3, and Cd4, and the reference illuminance values Cr measured at the respective designated angles are set to Cr1, Cr2, Cr3, and Cr4.
然後,控制部34係計算出各指定角度中測定之參照照度值Cr1~Cr4的平均值Cra,作為修正後照度值Cc,計算出從檢測照度值Cdn減去平均值Cra與參照照度值Crn的差分之值。亦即,修正後照度值Cc係Cc1=Cd1-(Cra-Cr1)、Cc2=Cd2-(Cra-Cr2)、Cc3=Cd3-(Cra-Cr3)、Cc4=Cd4-(Cra-Cr4)。 Then, the control unit 34 calculates the average value Cra of the reference illuminance values Cr1 to Cr4 measured at the respective designated angles, and calculates the corrected illuminance value Cc from the detected illuminance value Cdn by subtracting the average value Cra from the reference illuminance value Crn. The value of the difference. That is, the corrected illuminance value Cc is Cc1=Cd1-(Cra-Cr1), Cc2=Cd2-(Cra-Cr2), Cc3=Cd3-(Cra-Cr3), Cc4=Cd4-(Cra-Cr4).
之後的處理係與圖9的步驟S5之後的處理相同。亦即,控制部34係已修正後照度值Cc1~Cc4為基準,藉由最小平方法及牛頓法來進行曲線擬合,求出擬合函數Acos2(θ+B)+C的常數A、B、C。控制部34係如 此計算出偏光光線角度特性。 The subsequent processing is the same as the processing after step S5 of Fig. 9 . That is, the control unit 34 uses the corrected illuminance values Cc1 to Cc4 as a reference, and performs curve fitting by the least squares method and the Newton method to obtain a constant A of the fitting function Acos 2 (θ+B)+C, B, C. The control unit 34 calculates the polarization ray angle characteristics in this way.
此時,也可以修正過檢測照度值Cd所包含之起因於放電燈11的電弧之搖動的每小時的照度變動所致之誤差的照度值為基準,求出偏光光線角度特性,可高精度地測定偏光軸角度及消光比。 In this case, the illuminance value of the error due to the fluctuation of the illuminance per hour caused by the arc of the discharge lamp 11 included in the detected illuminance value Cd can be corrected, and the polarization ray angle characteristic can be obtained, and the polarization ray angle characteristic can be accurately obtained. The polarization axis angle and the extinction ratio were measured.
進而,於前述實施形態中,已針對在θ=θ a±20°與θ=θ a±10°中分別各1次合計4次,以第一偏光光線檢測部311測定照度之狀況進行說明,但是,測定次數係可因應允許測定時間來適當設定。最小平方法所致之計算即使測定點為3處也可進行,所以,測定次數設為3次亦可。在4處進行測定時,藉由使用4個3處的組合,針對個別來計算出角度特性等,提升測定結果的精度亦可。又,當然,測定次數設為5次以上亦可。 Furthermore, in the above-described embodiment, the illuminance is measured by the first polarized light detecting unit 311 in the case where θ = θ a ± 20° and θ = θ a ± 10° are respectively used four times in total, and the illuminance is measured. However, the number of measurements can be appropriately set in accordance with the allowable measurement time. The calculation by the least square method can be performed even if the measurement point is three, so the number of measurements can be set to three times. When the measurement is performed at four places, the angle characteristics and the like are calculated for individual use by using four combinations of three places, and the accuracy of the measurement result may be improved. Further, of course, the number of measurements may be five or more.
又,上述實施形態中,已針對在照度測定時,以每10°間隔使檢光子311a旋轉之狀況進行說明,但是,間隔角度也可適當設定。 Further, in the above-described embodiment, the case where the photodetector 311a is rotated every 10° during the illuminance measurement has been described. However, the interval angle may be appropriately set.
進而,於前述實施形態中,已針對將偏光測定位置僅設定於各偏光子13Aa、13Ba的中央1處之狀況進行說明,但是,考慮在1個偏光子內有偏光軸角度的偏差之狀況,也可對於各偏光子設定複數個偏光測定位置。此時,藉由加權平均各偏光測定位置之測定結果等,計算出最後的偏光特性即可。 Furthermore, in the above-described embodiment, the state in which the polarization measurement position is set only at the center 1 of each of the polarizers 13Aa and 13Ba has been described. However, in consideration of the deviation of the polarization axis angle in one of the polarizers, It is also possible to set a plurality of polarization measurement positions for each polarizer. In this case, the final polarization characteristic may be calculated by weighting and averaging the measurement results of the respective polarization measurement positions.
又,於前述實施形態中,設置以偏光測定裝置30所測定之偏光軸角度為基準,並以偏光子13Aa及偏 光子13Ba的偏光軸角度成為所希望之偏光軸角度之方式,自動調整偏光子13Aa及偏光子13Ba的角度的機構亦可。再者,偏光子13Aa及偏光子13Ba的角度調整,係作業者以手動進行亦可。 Further, in the above embodiment, the polarization axis angle measured by the polarization measuring device 30 is used as a reference, and the polarizer 13Aa and the bias are provided. The mechanism in which the polarization axis angle of the photon 13Ba is the desired polarization axis angle, and the angle of the polarizer 13Aa and the polarizer 13Ba is automatically adjusted. Further, the angle adjustment of the polarizer 13Aa and the polarizer 13Ba may be performed manually by the operator.
進而,於前述實施形態中,已針對將第一照度感測器311b的受光部311c,藉由支持構件311d固定於偏光軸檢測器31的框體之狀況進行說明,但是,受光部311c係作為可與檢光子311a一起旋轉的構造亦可。但是,對於為了穩定測定照度來說,如前述實施形態,固定受光部311c,使檢光子311a與受光部311c相對性旋轉的構造為佳。 Further, in the above-described embodiment, the case where the light receiving portion 311c of the first illuminance sensor 311b is fixed to the housing of the polarization axis detector 31 by the support member 311d will be described. However, the light receiving portion 311c is used as the light receiving portion 311c. A structure that can rotate together with the photodetector 311a is also possible. However, in order to stably measure the illuminance, as in the above-described embodiment, the light receiving portion 311c is fixed, and the photodetector 311a and the light receiving portion 311c are relatively rotated.
又,於前述實施形態中,已針對作為光源而適用雙燈方式的放電燈11之狀況進行說明,但是,作為單燈方式亦可,3燈方式已上亦可。 Further, in the above-described embodiment, the case where the discharge lamp 11 of the two-lamp type is applied as the light source has been described. However, as the single lamp method, the three-lamp method may be used.
又進而,於前述實施形態中,已針對作為工件W而使用形成光配向膜之液晶面板之狀況進行說明,但是,例如如視角補償薄膜般,作為捲繞於滾筒之長條帶狀的工件亦可。 Further, in the above-described embodiment, the state in which the liquid crystal panel forming the photoalignment film is used as the workpiece W will be described. However, for example, as the viewing angle compensation film, the long strip-shaped workpiece wound around the roller is also used. can.
311‧‧‧第一偏光光線檢測部 311‧‧‧First Polarized Light Detection Department
311a‧‧‧檢測用偏光子 311a‧‧‧Detecting polarizers
311b‧‧‧第一照度感測器 311b‧‧‧First illumination sensor
311e‧‧‧旋轉致動器 311e‧‧‧Rotary actuator
311f‧‧‧旋轉子 311f‧‧‧ Rotator
311h‧‧‧冷氣供給部 311h‧‧‧Air Supply Department
312‧‧‧第二偏光光線檢測部 312‧‧‧Second Polarized Light Detection Department
312a‧‧‧第二照度感測器 312a‧‧‧Second illumination sensor
312c‧‧‧支持構件 312c‧‧‧Support components
312e‧‧‧冷氣供給部 312e‧‧‧Air Supply Department
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