TW201526993A - Showerhead device - Google Patents

Showerhead device Download PDF

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Publication number
TW201526993A
TW201526993A TW103101476A TW103101476A TW201526993A TW 201526993 A TW201526993 A TW 201526993A TW 103101476 A TW103101476 A TW 103101476A TW 103101476 A TW103101476 A TW 103101476A TW 201526993 A TW201526993 A TW 201526993A
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TW
Taiwan
Prior art keywords
fluid
flow
head device
sprinkler head
flow path
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TW103101476A
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Chinese (zh)
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TWI527626B (en
Inventor
Chen-Der Tsai
Jung-Chen Chien
Chih-Yung Huang
Kuan-Chou Chen
Ching-Chiun Wang
Yi-Jiun Lin
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Ind Tech Res Inst
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Priority to TW103101476A priority Critical patent/TWI527626B/en
Priority to CN201410104272.6A priority patent/CN104775105A/en
Publication of TW201526993A publication Critical patent/TW201526993A/en
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Publication of TWI527626B publication Critical patent/TWI527626B/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45565—Shower nozzles

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Nozzles (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)

Abstract

A showerhead device including a porous plate body having a first channel and a plurality of second channels is provided. The first channel is meanderingly distributed in the porous plate body for travelling a first fluid. The second channels respectively pass through the plate structure and intersect with the first channel for travelling a second fluid. The first channel is not communicated with the second channels and the first fluid contacts with the sidewall of each second channel.

Description

噴灑頭裝置 Sprinkler head device

本發明是有關於一種噴灑設備，且特別是有關於一種噴灑頭裝置。 This invention relates to a spray apparatus, and more particularly to a sprinkler apparatus.

隨著鍍膜製程的發展，如何將氣體均勻地噴灑到鍍膜腔室中為一項重要的技術。對此，氣體分佈模組(gas distribution module)，特別是氣體噴灑頭(gas showerhead)扮演了重要的角色。不過，鍍膜腔室的高溫可能導致氣體噴灑頭的變形。舉例而言，在進行化學氣象沉積的鍍膜製程時，鍍膜腔室的溫度可能高達1050℃，這樣的溫度很容易讓金屬或是合金材質的氣體噴灑頭發生變形。在長時間使用過後，氣體噴灑頭可能發生氣孔漏水或是氣體噴灑不均勻的情形。 With the development of the coating process, how to uniformly spray the gas into the coating chamber is an important technology. In this regard, gas distribution modules, especially gas showerheads, play an important role. However, the high temperature of the coating chamber may cause deformation of the gas shower head. For example, in a coating process for chemical weather deposition, the temperature of the coating chamber may be as high as 1050 ° C, which is easy to deform the metal or alloy gas nozzle. After a long period of use, the gas spray head may leak or leak unevenly.

本發明提供一種噴灑頭裝置，具有良好的散熱性質而有助於提升使用壽命。 The invention provides a sprinkler head device which has good heat dissipation properties and helps to improve the service life.

本發明的噴灑頭裝置包括一多孔板體，其具有一第一流 道以及多個第二流道。第一流道沿著多孔板體蜿蜒分佈以供一第一流體流通。第二流道分別貫穿多孔板體並且交錯於第一流道中以供一第二流體流通，其中第一流道與第二流道互不連通，且第一流體接觸各第二流道的側壁。 The sprinkler head device of the present invention comprises a perforated plate body having a first flow The track and a plurality of second flow paths. The first flow path is distributed along the porous plate body for a first fluid to circulate. The second flow passages respectively penetrate the porous plate body and are staggered in the first flow passage for a second fluid to flow, wherein the first flow passage and the second flow passage are not in communication with each other, and the first fluid contacts the side walls of each of the second flow passages.

基於上述，本發明實施例的噴灑頭裝置將第二流道交錯於第一流道使得第一流道中的第一流體接觸第二流道的側壁。同時，本發明實施例的噴灑頭裝置不使第一流體與第二流體彼此連通。如此一來，第一流體的流動可以有效冷卻第二流道的側壁以降低溫度對噴灑頭裝置的不良影響，例如熱變形。在部分實施例中，噴灑頭裝置中定義出第一流道與第二流道的多孔板體可以為一體成形的裝置，而有助於避免因為構件連接處的連接不良導致第一流道與第二流道之間的連通。 Based on the above, the sprinkler apparatus of the embodiment of the present invention interleaves the second flow path to the first flow path such that the first fluid in the first flow path contacts the side wall of the second flow path. Meanwhile, the sprinkler head device of the embodiment of the present invention does not allow the first fluid and the second fluid to communicate with each other. As such, the flow of the first fluid can effectively cool the sidewalls of the second flow passage to reduce adverse effects of temperature on the showerhead assembly, such as thermal deformation. In some embodiments, the porous plate body defining the first flow path and the second flow path in the sprinkler head device may be an integrally formed device, thereby helping to avoid the first flow path and the second cause due to poor connection at the joint of the members. The communication between the flow channels.

為讓本發明的上述特徵能更明顯易懂，下文特舉實施例，並配合所附圖式作詳細說明如下。 In order to make the above-described features of the present invention more comprehensible, the following detailed description of the embodiments will be described in detail below.

10‧‧‧噴灑頭裝置 10‧‧‧ sprinkler head device

12‧‧‧上蓋 12‧‧‧Upper cover

12A‧‧‧流體源連接件 12A‧‧‧Fluid source connector

14‧‧‧固定框 14‧‧‧Fixed frame

16‧‧‧內管件 16‧‧‧Inner pipe fittings

100、200、300‧‧‧多孔板體 100, 200, 300‧‧‧ porous plate

102‧‧‧第一流道 102‧‧‧First runner

104‧‧‧第二流道 104‧‧‧Second runner

104A‧‧‧入口端 104A‧‧‧ entrance end

104B‧‧‧出口端 104B‧‧‧export end

106、206、306‧‧‧開口 106, 206, 306‧‧

108‧‧‧第三流道 108‧‧‧ Third Runner

110、410‧‧‧第一板面部 110, 410‧‧‧ first board face

112‧‧‧貫孔 112‧‧‧through holes

120‧‧‧環形壁 120‧‧‧Circular wall

130、530、630‧‧‧隔片結構 130, 530, 630‧‧‧ spacer structure

140‧‧‧管狀凸起 140‧‧‧Tubular bulge

150、350‧‧‧第二面板部 150, 350‧‧‧ second panel

152‧‧‧貫孔 152‧‧‧through holes

202A、202B、302A~302D‧‧‧分段 Sections 202A, 202B, 302A~302D‧‧

240‧‧‧管件 240‧‧‧ pipe fittings

420‧‧‧柵狀結構 420‧‧‧ grid structure

532‧‧‧第一隔片結構 532‧‧‧First spacer structure

534‧‧‧第二隔片結構 534‧‧‧Separate septum structure

A-A‧‧‧剖線 A-A‧‧‧ cut line

A1、A2‧‧‧封閉區域 A1, A2‧‧‧ enclosed area

D1、D2‧‧‧距離 D1, D2‧‧‧ distance

L‧‧‧排列方向 L‧‧‧Orientation

P1~P7‧‧‧流路 P1~P7‧‧‧ Flow Path

S1‧‧‧第一側 S1‧‧‧ first side

S2‧‧‧第二側 S2‧‧‧ second side

W‧‧‧寬度 W‧‧‧Width

X、Y‧‧‧節距 X, Y‧‧ ‧ pitch

θ‧‧‧角度 Θ‧‧‧ angle

圖1為本發明一實施例的噴灑頭裝置的示意圖。 1 is a schematic view of a showerhead device in accordance with an embodiment of the present invention.

圖2A為圖1的噴灑頭裝置中多孔板體100的示意圖。 2A is a schematic view of a porous plate body 100 in the sprinkler head device of FIG. 1.

圖2B為圖2A的多孔板體經橫剖後的一部份的示意圖。 Figure 2B is a schematic illustration of a portion of the porous plate of Figure 2A after cross-section.

圖3為圖2A與圖2B的多孔板體的第一種實施方式的剖面示意圖，其中圖3表示的剖面對應圖2A的剖線A-A。 3 is a schematic cross-sectional view showing a first embodiment of the perforated plate of FIGS. 2A and 2B, wherein the cross section shown in FIG. 3 corresponds to the cross-sectional line A-A of FIG. 2A.

圖4為圖2A與圖2B的多孔板體的第二種實施方式的剖面示意圖，其中圖4表示的剖面對應圖2A的剖線A-A。 4 is a cross-sectional view showing a second embodiment of the perforated plate of FIGS. 2A and 2B, wherein the cross section shown in FIG. 4 corresponds to the cross-sectional line A-A of FIG. 2A.

圖5為圖2A與圖2B的多孔板體的第三種實施方式的示意圖，其中圖5表示出多孔板體的局部部分的拆解圖。 Fig. 5 is a schematic view showing a third embodiment of the perforated plate of Figs. 2A and 2B, wherein Fig. 5 shows a disassembled view of a partial portion of the perforated plate.

圖6為圖2A與圖2B的多孔板體的第四種實施方式的示意圖，其中圖6表示出多孔板體的拆解圖。 Figure 6 is a schematic view of a fourth embodiment of the perforated plate of Figures 2A and 2B, wherein Figure 6 shows a disassembled view of the perforated plate.

圖7A為本發明另一實施例的多孔板體的示意圖。 Fig. 7A is a schematic view of a porous plate body according to another embodiment of the present invention.

圖7B為圖7A的多孔板體的拆解圖。 Fig. 7B is a disassembled view of the porous plate body of Fig. 7A.

圖8A為本發明又一實施例的多孔板體的示意圖。 Fig. 8A is a schematic view of a porous plate body according to still another embodiment of the present invention.

圖8B為圖8A的多孔板體的拆解圖。 Fig. 8B is a disassembled view of the porous plate body of Fig. 8A.

圖9為本發明一實施例的板體裝置中設置有內管件的示意圖。 Fig. 9 is a schematic view showing an inner tube member provided in a plate body device according to an embodiment of the present invention.

圖1為本發明一實施例的噴灑頭裝置的示意圖。請參照圖1，噴灑頭裝置10包括一上蓋12、一固定框14以及一多孔板體100，其中多孔板體100夾於上蓋12以及固定框14之間。上蓋12設置有多個流體源連接件12A，其中流體源連接件12A用來與流體源連接以讓流體透過多孔板體100而灑佈出去。固定框14為一環型結構物，其暴露出多孔板體100以讓流體透過多孔板體100灑佈出去。噴灑頭裝置10可以應用於鍍膜設備中以將流體均勻地提供給鍍膜腔室。由於鍍膜腔室可能需要被加熱至很高的製程溫 度，噴灑頭裝置10整體需要以耐溫材料製作。例如噴灑頭裝置10中各構件的材質可以為金屬、金屬合金或是陶瓷等耐溫材料。 1 is a schematic view of a showerhead device in accordance with an embodiment of the present invention. Referring to FIG. 1, the sprinkler head device 10 includes an upper cover 12, a fixing frame 14 and a perforated plate body 100, wherein the perforated plate body 100 is sandwiched between the upper cover 12 and the fixing frame 14. The upper cover 12 is provided with a plurality of fluid source connectors 12A for connecting the fluid source to allow fluid to pass through the perforated plate 100. The fixing frame 14 is a ring-shaped structure that exposes the porous plate body 100 to allow fluid to pass through the porous plate body 100. The sprinkler head device 10 can be applied to a coating apparatus to uniformly supply fluid to the coating chamber. Because the coating chamber may need to be heated to a very high process temperature The sprinkler head device 10 needs to be made of a temperature resistant material as a whole. For example, the material of each member in the sprinkler head device 10 may be a temperature resistant material such as a metal, a metal alloy or a ceramic.

圖2A為圖1的噴灑頭裝置中多孔板體100的示意圖，而圖2B為圖2A的多孔板體經橫剖後的一部份的示意圖。請先參照圖2A與圖2B，多孔板體100具有一第一流道102以及多個第二流道104。第一流道102設置於多孔板體100的內部而無法由外觀上直接看到第一流道102的實際輪廓，因此圖2A以虛線表示出第一流道102的輪廓，而圖2B可以看到第一流道102的部分輪廓。具體而言，第一流道102在多孔板體100內部沿著多孔板體100的板平面蜿蜒分佈以供第一流體流通，其中第一流道102可以定義出單一流路P1。第二流道104則分別貫穿多孔板體100並且交錯於第一流道102以供一第二流體流通。為了讓第一流體在第一流道102中流入與流出，多孔板體100還具有多個開口106，並且這些開口106位於多孔板體100的側面並且設置於第一流道102的入口端與出口端。 2A is a schematic view of the porous plate body 100 of the sprinkler head device of FIG. 1, and FIG. 2B is a schematic view of a portion of the perforated plate body of FIG. 2A after cross-section. Referring first to FIGS. 2A and 2B , the perforated plate body 100 has a first flow path 102 and a plurality of second flow paths 104 . The first flow path 102 is disposed inside the porous plate body 100 so that the actual contour of the first flow path 102 cannot be directly seen by the appearance, so that the outline of the first flow path 102 is shown by a broken line in FIG. 2A, and the first flow can be seen in FIG. 2B. Part of the outline of the track 102. Specifically, the first flow path 102 is distributed inside the porous plate body 100 along the plane of the plate of the porous plate body 100 for the first fluid to flow, wherein the first flow path 102 can define a single flow path P1. The second flow path 104 extends through the porous plate body 100 and is staggered to the first flow path 102 for a second fluid to circulate. In order to allow the first fluid to flow in and out of the first flow path 102, the porous plate body 100 further has a plurality of openings 106, and the openings 106 are located at the side of the porous plate body 100 and are disposed at the inlet end and the outlet end of the first flow path 102. .

在本實施例終，第一流道102中流動的第一流體可以直接接觸各第二流道104的側壁以進行熱交換。特別是，當第一流體為散熱流體時，多孔板體100可以具有理想的散熱效果。因此，多孔板體100可以應用於溫度較高的環境中，而不容易因為高環境溫度導致變形。舉例來說，具有多孔板體100的噴灑頭裝置10應用於鍍膜設備時，可以將所需的製程流體作為第二流體而由第二流道10提供給鍍膜腔室，並且將熱交換流體作為第一流體而注 入於第一流道102中以達到散熱效果。在此，第一流體與第二流體分別可以為氣態、液態或是氣液混合態。另外，製程流體可以包括一反應流體、一載體流體或其組合，而熱交換流體則例如為水、冷媒或是其他可以進行熱交換的流體。當鍍膜腔室的溫度過高而可能導致多孔板體100變形時，第一流道102中的熱交換流體可以將多孔板體100的熱量帶走而避免多孔板體100受高溫而損壞。在此，第一流道102中的熱交換流體直接接觸第二流道104的側壁，所以熱交換流體可以有效降低第二流道104或多孔板體100變形的機率。藉此，多孔板體100中第二流道104的分布密度以及流道寬度可以不需受到限制。舉例來說，第二流道104的分布密度例如可以為：在寬度W為6.8mm的第一流道102中可以設置有兩列第二流道104。同時，沿著排列方向L量測第二流道104的節距X時，節距X為5mm~6mm，其中排列方向L與第一流道102的主要延伸方向相交一角度θ，且角度θ為45度。另外，相鄰兩列第二流道104可以各自平行於排列方向L，且呈現錯位分布(staggered arrangement)，因此相鄰兩列第二流道104於排列方向L上的節距Y可以為節距X的一半，即節距Y為2.5mm~3mm。第二流道104的流道寬度例如可以為0.5mm至1.8mm。更具體來說，定義出第二流道104的管狀結構的內徑例如可以為0.5mm至1.8mm，而外徑例如可以為1mm至2.3mm。在多個第二流道104既個別的管徑窄細且又緻密排列的情形下，可藉由第一流道102中的第一流體提供有效率的熱交換作用，使得第二流道104不容 易因高溫作用而變形以達到延長使用壽命的效果。 At the end of this embodiment, the first fluid flowing in the first flow path 102 may directly contact the side walls of each of the second flow paths 104 for heat exchange. In particular, when the first fluid is a heat dissipating fluid, the perforated plate body 100 can have a desired heat dissipating effect. Therefore, the porous plate body 100 can be applied to a high temperature environment without being easily deformed due to a high ambient temperature. For example, when the sprinkler head device 10 having the perforated plate body 100 is applied to a coating apparatus, the required process fluid can be supplied as a second fluid to the coating chamber from the second flow path 10, and the heat exchange fluid is used as First fluid and note The first flow path 102 is introduced to achieve a heat dissipation effect. Here, the first fluid and the second fluid may be in a gaseous state, a liquid state, or a gas-liquid mixed state, respectively. Additionally, the process fluid can include a reactive fluid, a carrier fluid, or a combination thereof, and the heat exchange fluid can be, for example, water, a refrigerant, or other fluid that can undergo heat exchange. When the temperature of the coating chamber is too high to cause the porous plate body 100 to deform, the heat exchange fluid in the first flow path 102 can carry away the heat of the porous plate body 100 to prevent the porous plate body 100 from being damaged by high temperature. Here, the heat exchange fluid in the first flow path 102 directly contacts the side wall of the second flow path 104, so the heat exchange fluid can effectively reduce the probability of deformation of the second flow path 104 or the porous plate body 100. Thereby, the distribution density of the second flow path 104 in the porous plate body 100 and the flow path width can be not limited. For example, the distribution density of the second flow path 104 may be, for example, two rows of second flow paths 104 may be disposed in the first flow path 102 having a width W of 6.8 mm. Meanwhile, when the pitch X of the second flow path 104 is measured along the arrangement direction L, the pitch X is 5 mm to 6 mm, wherein the arrangement direction L intersects with the main extension direction of the first flow path 102 by an angle θ, and the angle θ is 45 degree. In addition, the adjacent two rows of the second flow channels 104 may be parallel to the arrangement direction L and exhibit a staggered arrangement, so the pitch Y of the adjacent two columns of the second flow channels 104 in the arrangement direction L may be a section. Half the distance from X, that is, the pitch Y is 2.5 mm to 3 mm. The flow path width of the second flow path 104 may be, for example, 0.5 mm to 1.8 mm. More specifically, the inner diameter defining the tubular structure of the second flow path 104 may be, for example, 0.5 mm to 1.8 mm, and the outer diameter may be, for example, 1 mm to 2.3 mm. In the case where the plurality of second flow passages 104 are narrow and densely arranged, the first fluid in the first flow passage 102 can provide efficient heat exchange, so that the second flow passage 104 is incompatible. It is easy to be deformed by high temperature to achieve the effect of prolonging the service life.

多孔板體100可以採用多種結構來實現，以下將提出數種實施方式來說明，但本發明不以此為限。凡是可以在多孔板體100中形成第一流道102與第二流道104的結構設計都可以作為本發明的實施方式。 The porous plate body 100 can be realized by various structures. Several embodiments will be described below, but the invention is not limited thereto. Any structural design in which the first flow path 102 and the second flow path 104 can be formed in the porous plate body 100 can be taken as an embodiment of the present invention.

圖3為圖2A與圖2B的多孔板體的第一種實施方式的剖面示意圖，其中圖3表示的剖面對應圖2A的剖線A-A。請同時參照圖2A、圖2B與圖3，多孔板體100在本實施例中可以包括第一板面部110、環形壁120、多個隔片結構130、多個管狀凸起140以及第二板面部150。第一板面部110具有相對的第一側S1與第二側S2，其中環形壁120、多個隔片結構130、多個管狀凸起140都設置於第一板面部110的第二側S2與第二板面部150之間。隔片結構130設置於環形壁120所圍的面積之內以在第一板面部110與第二板面部150之間定義出第一流道102。同時，這些管狀凸起140位於第一流道102之內。此外，第一板面部110上設置有多個貫孔112，貫孔112由第一側S1貫穿至第二側S2。同時，第二面板部150上也設置有多個貫孔152，貫孔152分別對應於貫孔112。各管狀凸起140由第一板面部110的第二側S2朝向第二板面部150凸伸並位於第一流道102中，且各管狀凸起140連通於其中一個貫孔112與其中一個貫孔152以定義出這些第二流道104。 3 is a schematic cross-sectional view showing a first embodiment of the perforated plate of FIGS. 2A and 2B, wherein the cross section shown in FIG. 3 corresponds to the cross-sectional line A-A of FIG. 2A. Referring to FIG. 2A, FIG. 2B and FIG. 3 simultaneously, the porous plate body 100 may include a first plate surface portion 110, an annular wall 120, a plurality of spacer structures 130, a plurality of tubular protrusions 140, and a second plate in this embodiment. Face 150. The first plate surface portion 110 has opposite first side S1 and second side S2, wherein the annular wall 120, the plurality of spacer structures 130, and the plurality of tubular protrusions 140 are disposed on the second side S2 of the first plate surface portion 110 and Between the second plate faces 150. The spacer structure 130 is disposed within an area enclosed by the annular wall 120 to define a first flow path 102 between the first plate surface portion 110 and the second plate surface portion 150. At the same time, the tubular projections 140 are located within the first flow passage 102. In addition, the first plate surface portion 110 is provided with a plurality of through holes 112 penetrating from the first side S1 to the second side S2. At the same time, the second panel portion 150 is also provided with a plurality of through holes 152 respectively corresponding to the through holes 112. Each of the tubular protrusions 140 protrudes from the second side S2 of the first plate surface portion 110 toward the second plate surface portion 150 and is located in the first flow path 102, and each of the tubular protrusions 140 communicates with one of the through holes 112 and one of the through holes 152 to define these second flow paths 104.

在此，第二流道104交錯於第一流道102，但第二流道104的側壁(即管狀凸起140的管壁)為密封的，因此第一流道102 與第二流道104互不連通。不過，第一流體流動於第一流道102時會接觸各第二流道104的側壁。也就是說，任兩個管狀凸起140之間都會存在有第一流體。因此，第一流體可以與管狀凸起140進行有效率的熱交換，而有助於降低多孔板體100發生高溫變形的機率。 Here, the second flow path 104 is staggered to the first flow path 102, but the side wall of the second flow path 104 (ie, the tube wall of the tubular protrusion 140) is sealed, and thus the first flow path 102 It is not connected to the second flow path 104. However, when the first fluid flows through the first flow path 102, it contacts the side walls of each of the second flow paths 104. That is, there is a first fluid between any two tubular projections 140. Therefore, the first fluid can perform efficient heat exchange with the tubular protrusions 140, contributing to reducing the probability of high temperature deformation of the porous plate body 100.

另外，以本實施例而言，第二流道104的入口端104A設置於第一板面部110，而出口端104B設置於第二板面部150。在實際應用於鍍膜腔室時，入口端104A相對遠離於鍍膜腔室以接受來自於流體供應源的流體，而出口端104B相對接近於鍍膜腔室以將製程流體導入鍍膜腔室。如此一來，出口端104B所受的高溫作用較為顯著，相對容易發生變形。所以，在本實施例中，第一流道102與第二流道104的入口端104A之間的距離D1大於第一流道102與第二流道104的出口端104B之間的距離D2，以在出口端104B提供較佳的熱交換效率。當然，距離D1在其他實施例中也可以等於距離D2，或是小於距離D2。 In addition, in the present embodiment, the inlet end 104A of the second flow path 104 is disposed on the first plate surface portion 110, and the outlet end 104B is disposed on the second plate surface portion 150. When actually applied to the coating chamber, the inlet end 104A is relatively remote from the coating chamber to receive fluid from the fluid supply source, and the outlet end 104B is relatively close to the coating chamber to direct process fluid into the coating chamber. As a result, the high temperature effect of the outlet end 104B is more significant, and it is relatively easy to deform. Therefore, in the present embodiment, the distance D1 between the first flow path 102 and the inlet end 104A of the second flow path 104 is greater than the distance D2 between the first flow path 102 and the outlet end 104B of the second flow path 104 to The outlet end 104B provides better heat exchange efficiency. Of course, the distance D1 can also be equal to the distance D2 or less than the distance D2 in other embodiments.

由圖3可知，第一板面部110、環形壁120、隔片結構130、管狀凸起140與第二板面部150所構成的多孔板體100可以為一體成形而由相同材質製作的多板狀體。在實際製造方法中，可以採用例如積層製造的方式來製作多孔板體100。不過，多孔板體100也可以是採用多個組件組合而成的方式來構成。舉例而言，圖4為圖2A與圖2B的多孔板體的第二種實施方式的剖面示意圖，其中圖4表示的剖面對應圖2A的剖線A-A。請同時參照圖2A、 圖2B與圖4，多孔板體100在本實施方式中包括有第一板面部110、環形壁120、多個隔片結構130、多個管件240以及第二板面部150，其中第一板面部110、環形壁120、隔片結構130以及第二板面部150的結構設計相同於圖3的實施方式，因此不另贅述。在本實施例中，第一板面部110、環形壁120、隔片結構130以及第二板面部150可以為一體成形的結構物，而管件240獨立於第一板面部110、環形壁120、隔片結構130以及第二板面部150。同時，各個管件240插設於其中一個貫孔112與對應的一個貫孔152中以定義出第二流道104。為了避免第一流道102中的第一流體由管件240與貫孔112之間的縫隙或是由管件240與貫孔152之間的縫隙滲出，管件240可以藉由一接合媒介接合於第一板面部110與第二板面部150，其中接合媒介可以是焊料或是其他可以提供接合作用又可以耐受高溫的材料。 As can be seen from FIG. 3, the porous plate body 100 composed of the first plate surface portion 110, the annular wall 120, the spacer structure 130, the tubular projection 140, and the second plate surface portion 150 may be integrally formed of a plurality of plates made of the same material. body. In the actual manufacturing method, the porous plate body 100 can be produced by, for example, lamination manufacturing. However, the porous plate body 100 may be constructed by combining a plurality of components. For example, FIG. 4 is a schematic cross-sectional view of a second embodiment of the perforated plate of FIGS. 2A and 2B, wherein the cross-section shown in FIG. 4 corresponds to the cross-sectional line A-A of FIG. 2A. Please also refer to Figure 2A, 2B and FIG. 4, the porous plate body 100 includes a first plate surface portion 110, an annular wall 120, a plurality of spacer structures 130, a plurality of tube members 240, and a second plate surface portion 150, wherein the first plate surface portion The structural design of the annular wall 120, the spacer structure 130, and the second plate surface portion 150 is the same as that of the embodiment of FIG. 3, and therefore will not be further described. In this embodiment, the first plate surface portion 110, the annular wall 120, the spacer structure 130, and the second plate surface portion 150 may be integrally formed structures, and the tube member 240 is independent of the first plate surface portion 110, the annular wall 120, and the partition. The sheet structure 130 and the second plate surface portion 150. At the same time, each of the tubular members 240 is inserted into one of the through holes 112 and the corresponding one of the through holes 152 to define the second flow path 104. In order to prevent the first fluid in the first flow path 102 from oozing from the gap between the tubular member 240 and the through hole 112 or from the gap between the tubular member 240 and the through hole 152, the tubular member 240 can be joined to the first plate by a bonding medium. The face 110 and the second panel face 150, wherein the bonding medium can be solder or other material that can provide bonding and can withstand high temperatures.

圖5為圖2A與圖2B的多孔板體的第三種實施方式的示意圖，其中圖5表示出多孔板體的局部部分的拆解圖。請同時參照圖2A、圖2B與圖5，多孔板體100在本實施例中可以由第一板面部110、環形壁120、多個隔片結構130、多個管件240以及第二板面部350，其中第一板面部110、環形壁120以及隔片結構130的結構設計相同於圖3的實施方式並且管件240的結構設計相同於圖4的實施方式，因此不另贅述。在本實施例中，第一板面部110、環形壁120以及隔片結構130為一體成形的結構，而第二板面部350獨立於第一板面部110、環形壁120以及隔片結構130的 整體結構。因此，環形壁120以及隔片結構130可以藉由一接合媒介連接第二板面部350，其中接合媒介可以是焊料或是其他可以提供接合作用又可以耐受高溫的材料。 Fig. 5 is a schematic view showing a third embodiment of the perforated plate of Figs. 2A and 2B, wherein Fig. 5 shows a disassembled view of a partial portion of the perforated plate. Referring to FIG. 2A, FIG. 2B and FIG. 5 simultaneously, the porous plate body 100 may be composed of a first plate surface portion 110, an annular wall 120, a plurality of spacer structures 130, a plurality of tube members 240, and a second plate portion 350 in this embodiment. The structural design of the first plate surface portion 110, the annular wall 120, and the spacer structure 130 is the same as that of the embodiment of FIG. 3 and the structural design of the tubular member 240 is the same as that of the embodiment of FIG. 4, and thus will not be further described. In the present embodiment, the first plate surface portion 110, the annular wall 120, and the spacer structure 130 are integrally formed structures, and the second plate surface portion 350 is independent of the first plate surface portion 110, the annular wall 120, and the spacer structure 130. the whole frame. Thus, the annular wall 120 and the spacer structure 130 can be joined to the second panel portion 350 by a bonding medium, wherein the bonding medium can be solder or other material that can provide bonding and withstand high temperatures.

圖6為圖2A與圖2B的多孔板體的第四種實施方式的示意圖，其中圖6表示出多孔板體的拆解圖。請同時參照圖2A、圖2B與圖6，多孔板體100在本實施例中可以由第一板面部410、環形壁120、多個隔片結構130、多個管件240以及第二板面部350，其中環形壁120、隔片結構130、管件240以及第二板面部350的結構設計與連接關係可以參照圖5的實施方式，而不另贅述。在本實施例中，環形壁120與隔片結構130彼此連接為一體以構成一柵狀結構420，而第一板面部410、第二面板部350與柵狀結構420彼此獨立。另外，第一板面部410可以透過接合媒介連接於柵狀結構420的一側而第二板面部350可以透過接合媒介連接於柵狀結構420的另一側，以形成第一流道102。當然，管件240也是透過接合媒介連接於第一板面部410與第二板面部350。 Figure 6 is a schematic view of a fourth embodiment of the perforated plate of Figures 2A and 2B, wherein Figure 6 shows a disassembled view of the perforated plate. Referring to FIG. 2A, FIG. 2B and FIG. 6 simultaneously, the porous plate body 100 may be composed of a first plate surface portion 410, an annular wall 120, a plurality of spacer structures 130, a plurality of tube members 240, and a second plate portion 350 in this embodiment. The structural design and connection relationship of the annular wall 120, the spacer structure 130, the tube member 240, and the second plate surface portion 350 can be referred to the embodiment of FIG. 5 without further elaboration. In the present embodiment, the annular wall 120 and the spacer structure 130 are integrally connected to each other to form a grid structure 420, and the first plate surface portion 410, the second panel portion 350, and the grid structure 420 are independent of each other. In addition, the first plate surface portion 410 may be coupled to one side of the grid structure 420 through a bonding medium, and the second plate surface portion 350 may be coupled to the other side of the grid structure 420 through a bonding medium to form the first flow path 102. Of course, the tube 240 is also connected to the first plate portion 410 and the second plate portion 350 through the bonding medium.

圖2A與圖2B的多孔板體100除了採用上述圖3至圖6的結構設計外，也可以將前述多種設計混合使用。舉例而言，圖5的第二板面部350可以應用於圖3或圖4的設計中以疊置於原有的第二板面部150外側。或是，圖6的第一板面部410可以應用於圖3、圖4或圖5的設計中以疊置於原有的第一板面部110外側。另外，圖3中將管狀凸起140設置為由第一板面部110第二側S2朝向第二板面部150凸伸的設計可以應用於圖5與圖6的實施例， 則圖5與圖6的實施例可以不需要使用管件240來定義出第二流道104。 The porous plate body 100 of FIGS. 2A and 2B can be used in combination with the above-described various designs in addition to the structural design of FIGS. 3 to 6 described above. For example, the second panel face 350 of FIG. 5 can be applied to the design of FIG. 3 or FIG. 4 to be stacked on the outside of the original second panel face 150. Alternatively, the first panel portion 410 of FIG. 6 can be applied to the design of FIG. 3, FIG. 4 or FIG. 5 to be stacked on the outside of the original first panel portion 110. In addition, the design in which the tubular projection 140 is disposed to protrude from the second side S2 of the first plate surface portion 110 toward the second plate surface portion 150 in FIG. 3 can be applied to the embodiment of FIGS. 5 and 6. The embodiment of Figures 5 and 6 may eliminate the need to use the tubular member 240 to define the second flow passage 104.

上述實施例的多孔板體100中以隔片結構130所並定義出來的第一流道102僅具有單一流路P，但本發明不需以此為限。舉例而言，圖7A為本發明另一實施例的多孔板體的示意圖，而圖7B為圖7A的多孔板體的拆解圖。請參照與圖7，多孔板體200具有第一流道202、多個第二流道204以及多個開口206。第一流道202具有多個分段202A與202B，且這些第二流道204分別交錯於這些分段202A與202B。分段202A與202B彼此獨立使得分段202A與202B分別定義出流路P2與流路P3。流路P2與流路P3分別具有一入口端與一出口端，而開口206則設置於這些流路P2與P3的入口端與出口端以與第一流道202連通。 The first flow path 102 defined by the spacer structure 130 in the porous plate body 100 of the above embodiment has only a single flow path P, but the invention is not limited thereto. For example, FIG. 7A is a schematic view of a porous plate body according to another embodiment of the present invention, and FIG. 7B is a disassembled view of the porous plate body of FIG. 7A. Referring to FIG. 7 , the porous plate body 200 has a first flow channel 202 , a plurality of second flow channels 204 , and a plurality of openings 206 . The first flow channel 202 has a plurality of segments 202A and 202B, and these second flow channels 204 are interleaved with the segments 202A and 202B, respectively. Segments 202A and 202B are independent of each other such that segments 202A and 202B define flow path P2 and flow path P3, respectively. The flow path P2 and the flow path P3 respectively have an inlet end and an outlet end, and the opening 206 is disposed at the inlet end and the outlet end of the flow paths P2 and P3 to communicate with the first flow path 202.

在本實施例中，第一流道202是利用隔片結構530定義出來的，其中隔片結構530不同於前述實施例的隔片結構130之處在於：隔片結構530包括一第一隔片結構532與多個第二隔片結構534。第一隔片結構532的兩端都連接於環形壁120以圍出多個封閉區域A1與A2並將第一流道202劃分為分段202A與202B，其中分段202A位於封閉區域A1而分段202B位於封閉區域A2中。另外，各個第二隔片結構534僅有一端連接於環形壁130而另一端設置為開放端以在對應的封閉區域A1或A2中而決定第一流體在對應的分段202A或202B中的流路P2或P3。本實施例的設計將第一流道202劃分為兩個分段202A與202B，則各 分段202A或202B的流路長度相較於圖2A的設計而言更短，這有助於提高第一流體的熱交換效率。此時，第二流道204的分布密度可以更密且流道寬度可以更窄，仍不容易因為環境的高溫而變形損壞。 In the present embodiment, the first flow path 202 is defined by the spacer structure 530, wherein the spacer structure 530 is different from the spacer structure 130 of the previous embodiment in that the spacer structure 530 includes a first spacer structure. 532 and a plurality of second spacer structures 534. Both ends of the first spacer structure 532 are connected to the annular wall 120 to enclose the plurality of closed areas A1 and A2 and divide the first flow path 202 into segments 202A and 202B, wherein the segment 202A is located in the closed area A1 and segmented 202B is located in the enclosed area A2. In addition, each of the second spacer structures 534 has only one end connected to the annular wall 130 and the other end being disposed as an open end to determine the flow of the first fluid in the corresponding segment 202A or 202B in the corresponding closed area A1 or A2. Road P2 or P3. The design of this embodiment divides the first flow channel 202 into two segments 202A and 202B, and each The flow path length of segment 202A or 202B is shorter than that of the design of Figure 2A, which helps to increase the heat exchange efficiency of the first fluid. At this time, the distribution density of the second flow path 204 can be denser and the flow path width can be narrower, and it is still not easily deformed and damaged due to the high temperature of the environment.

圖8A為本發明又一實施例的多孔板體的示意圖，而圖8B為圖8A的多孔板體的拆解圖。請參照與圖8，多孔板體300具有第一流道302、多個第二流道304以及多個開口306。第一流道302具有多個分段302A、302B、302C與302D，且這些第二流道304分別貫穿這些分段302A、302B、302C與302D。分段302A、302B、302C與302D彼此獨立使得分段302A、302B、302C與302D分別定義出流路P4、流路P5、流路P6與流路P7。流路P4、流路P5、流路P6與流路P7分別具有一入口端與一出口端，而開口306則分別設置於這些流路P4~P7的入口端與出口端以與第一流道302連通。 Fig. 8A is a schematic view of a porous plate body according to still another embodiment of the present invention, and Fig. 8B is a disassembled view of the porous plate body of Fig. 8A. Referring to FIG. 8 , the porous plate body 300 has a first flow path 302 , a plurality of second flow paths 304 , and a plurality of openings 306 . The first flow path 302 has a plurality of segments 302A, 302B, 302C, and 302D, and these second flow paths 304 extend through the segments 302A, 302B, 302C, and 302D, respectively. The segments 302A, 302B, 302C, and 302D are independent of each other such that the segments 302A, 302B, 302C, and 302D define a flow path P4, a flow path P5, a flow path P6, and a flow path P7, respectively. The flow path P4, the flow path P5, the flow path P6 and the flow path P7 respectively have an inlet end and an outlet end, and the openings 306 are respectively disposed at the inlet end and the outlet end of the flow paths P4 P P7 and the first flow path 302. Connected.

在本實施例中，第一流道302是利用隔片結構630定義出來的，其中隔片結構630不同於前述實施例的隔片結構130與530之處在於：隔片結構630包括多個第一隔片結構632與多個第二隔片結構634。第一隔片結構632於環形壁130內圍出多個封閉區域而將第一流道302劃分為多個分段302A、302B、302C與302D。另外，分段302A、302B、302C與302D各自位於一個封閉區域中，其中各第二隔片結構634僅有一端連接於環形壁130而另一端設置為開放端以在對應的封閉區域中決定出第一流體在 對應的分段302A、302B、302C與302D中的流路P4~P7。本實施例的設計將第一流道302劃分為四個分段302A、302B、302C與302D，則各分段302A、302B、302C與302D的流路長度相較於圖2A的設計而言更短，這有助於提高第一流體的熱交換效率。因此，多孔板體300的第二流道304可以設置的更密更窄。 In the present embodiment, the first flow path 302 is defined by a spacer structure 630, wherein the spacer structure 630 is different from the spacer structures 130 and 530 of the previous embodiment in that the spacer structure 630 includes a plurality of first The spacer structure 632 and the plurality of second spacer structures 634. The first spacer structure 632 encloses a plurality of enclosed regions within the annular wall 130 to divide the first flow channel 302 into a plurality of segments 302A, 302B, 302C, and 302D. In addition, the segments 302A, 302B, 302C, and 302D are each located in a closed region, wherein each of the second spacer structures 634 has only one end connected to the annular wall 130 and the other end being disposed as an open end to determine in the corresponding closed region. The first fluid is Flow paths P4 to P7 in the corresponding segments 302A, 302B, 302C, and 302D. The design of this embodiment divides the first flow channel 302 into four segments 302A, 302B, 302C, and 302D, and the flow path length of each segment 302A, 302B, 302C, and 302D is shorter than that of the design of FIG. 2A. This helps to increase the heat exchange efficiency of the first fluid. Therefore, the second flow path 304 of the porous plate body 300 can be set to be denser and narrower.

圖9為本發明一實施例的多孔板體中設置有內管件的示意圖。請參照圖9，本實施例是在圖2A、2B的多孔板體100中設置多個內管件16以定義出第三流道108。內管件16分別設置於第二流道104中，且各內管件16與對應的其中一個第二流道104平行以供一第三流體流通。也就是說，第三流道108是包覆於第二流道104中，例如第三流道108的管壁與第二流道104的管壁形成兩個同圓心的環狀結構。此時，第三流道108的管壁與第二流道104的管壁之間即提供第二流體流通。。如此一來，第三流道108與第二流道104可以讓不同流體流通而符合不同的應用需求。 Fig. 9 is a schematic view showing the provision of an inner tubular member in a perforated plate body according to an embodiment of the present invention. Referring to FIG. 9, in the present embodiment, a plurality of inner tubular members 16 are disposed in the perforated plate body 100 of FIGS. 2A and 2B to define a third flow path 108. The inner tubular members 16 are respectively disposed in the second flow passage 104, and each of the inner tubular members 16 is parallel with the corresponding one of the second flow passages 104 for a third fluid to circulate. That is, the third flow path 108 is wrapped in the second flow path 104. For example, the tube wall of the third flow path 108 and the tube wall of the second flow path 104 form two annular structures having the same center. At this time, a second fluid flow is provided between the tube wall of the third flow path 108 and the tube wall of the second flow path 104. . In this way, the third flow channel 108 and the second flow channel 104 can allow different fluids to circulate to meet different application requirements.

綜上所述，本發明實施例的噴灑頭裝置將第二流道交錯於第一流道使得第一流道中的第一流體接觸第二流道的側壁。同時，本發明實施例的噴灑頭裝置不使第一流體與第二流體彼此連通。如此一來，第一流體的流動可以有效冷卻第二流道的側壁以降低溫度對噴灑頭裝置的不良影響，例如熱變形。在部分實施例中，噴灑頭裝置中定義出第一流道與第二流道的多孔板體可以整體為一體成形或是有部分構件為一體成形，這有助於避免因為構件連接處的連接不良導致第一流道與第二流道之間的連通。 In summary, the sprinkler apparatus of the embodiment of the present invention interleaves the second flow path to the first flow path such that the first fluid in the first flow path contacts the side wall of the second flow path. Meanwhile, the sprinkler head device of the embodiment of the present invention does not allow the first fluid and the second fluid to communicate with each other. As such, the flow of the first fluid can effectively cool the sidewalls of the second flow passage to reduce adverse effects of temperature on the showerhead assembly, such as thermal deformation. In some embodiments, the porous plate body defining the first flow path and the second flow path in the sprinkler head device may be integrally formed integrally or partially formed integrally, which helps to avoid poor connection due to the connection of the members. Leading to the communication between the first flow path and the second flow path.

100‧‧‧多孔板體 100‧‧‧Porous plate

102‧‧‧第一流道 102‧‧‧First runner

104‧‧‧第二流道 104‧‧‧Second runner

106‧‧‧開口 106‧‧‧ openings

A-A‧‧‧剖線 A-A‧‧‧ cut line

L‧‧‧排列方向 L‧‧‧Orientation

P1‧‧‧流路 P1‧‧‧ Flow Path

W‧‧‧寬度 W‧‧‧Width

X、Y‧‧‧節距 X, Y‧‧ ‧ pitch

θ‧‧‧角度 Θ‧‧‧ angle

Claims (17)

一種噴灑頭裝置，包括：一多孔板體，具有一第一流道以及多個第二流道，該第一流道沿著該多孔板體蜿蜒分佈以供一第一流體流通，該些第二流道分別貫穿該多孔板體並且交錯於該第一流道中以供一第二流體流通，其中該第二流道垂直於該多孔板體，該第一流道與該第二流道互不連通，且該第一流體接觸各該第二流道的側壁。 A sprinkler head device comprising: a perforated plate body having a first flow channel and a plurality of second flow channels, the first flow channel being distributed along the porous plate body for a first fluid to circulate, the first Two flow passages respectively extend through the porous plate body and are staggered in the first flow passage for a second fluid to flow, wherein the second flow passage is perpendicular to the porous plate body, and the first flow passage and the second flow passage are not connected to each other And the first fluid contacts the sidewalls of each of the second flow channels. 如申請專利範圍第1項所述的噴灑頭裝置，其中該多孔板體包括：一第一板面部，具有由一第一側貫穿至一第二側的多個第一貫孔，且該第一側相對於該第二側；一環形壁，設置於該第二側；多個隔片結構，位於該環形壁所圍面積之內，該些隔片結構間隔設置於該第一板面部的該第二側以於該第二側形成該第一流道，且該些第一貫孔分別位於該些隔片結構的相鄰兩者之間；以及一第二板面部，該環形壁以及該些隔片結構位於該第一板面部與該第二板面部之間，且該第二板面部具有多個第二貫孔，該些第二貫孔分別對應於該些第一貫孔。 The sprinkler head device of claim 1, wherein the perforated plate body comprises: a first plate surface having a plurality of first through holes extending from a first side to a second side, and the first One side is opposite to the second side; an annular wall is disposed on the second side; a plurality of spacer structures are located within the area enclosed by the annular wall, and the spacer structures are spaced apart from the first plate surface The second side forms the first flow path on the second side, and the first through holes are respectively located between adjacent ones of the spacer structures; and a second plate surface, the annular wall and the The spacer structure is located between the first board surface and the second board surface, and the second board surface has a plurality of second through holes respectively corresponding to the first through holes. 如申請專利範圍第2項所述的噴灑頭裝置，其中該多孔板體更包括多個管狀凸起，由該第一板面部的該第二側朝向該第二板面部凸伸並位於該第一流道中，各該管狀凸起連通於其中一該 第一貫孔以及對應的其中一該第二貫孔以形成其中一該第二流道。 The sprinkler head device of claim 2, wherein the perforated plate body further comprises a plurality of tubular protrusions, the second side of the first plate surface portion protruding toward the second plate surface portion and located at the first In the first-class track, each of the tubular protrusions is connected to one of the The first consistent hole and the corresponding one of the second through holes form one of the second flow paths. 如申請專利範圍第2項所述的噴灑頭裝置，更包括多個管件，各該管件插設於其中一該第一貫孔以及對應的其中一該第二貫孔中以在該些管件內部形成該些第二流道。 The sprinkler head device of claim 2, further comprising a plurality of tubular members, each of the tubular members being inserted in one of the first through holes and the corresponding one of the second through holes to be inside the tubular members The second flow paths are formed. 如申請專利範圍第4項所述的噴灑頭裝置，其中各該管件透過一接合媒介接合於該第一板面部以及該第二板面部。 The sprinkler head device of claim 4, wherein each of the tubes is joined to the first panel portion and the second panel portion via a bonding medium. 如申請專利範圍第2項所述的噴灑頭裝置，其中該環形壁以及該些隔片結構透過一接合媒介接合於該第二板面部。 The sprinkler head device of claim 2, wherein the annular wall and the spacer structures are joined to the second panel face by a bonding medium. 如申請專利範圍第2項所述的噴灑頭裝置，其中該環形壁以及該些隔片結構透過一接合媒介接合於該第一板面部。 The sprinkler head device of claim 2, wherein the annular wall and the spacer structures are joined to the first panel face by a bonding medium. 如申請專利範圍第2項所述的噴灑頭裝置，其中該環形壁具有多個開口，該些開口分別連通該第一流道。 The sprinkler head device of claim 2, wherein the annular wall has a plurality of openings that communicate with the first flow passage, respectively. 如申請專利範圍第2項所述的噴灑頭裝置，其中該些隔片結構包括至少一第一隔片結構與多個第二隔片結構，該至少一第一隔片結構連接於該環形壁以圍出多個封閉區域而將該第一流道劃分為多個分段，各該分段位於其中一個封閉區域中，該些第二隔片結構分別僅有一端連接於該環形壁而另一端為開放端以在其中一該封閉區域中而決定該第一流體在對應的該分段中的流路。 The sprinkler head device of claim 2, wherein the spacer structures comprise at least a first spacer structure and a plurality of second spacer structures, the at least one first spacer structure being coupled to the annular wall The first flow channel is divided into a plurality of segments by enclosing a plurality of closed regions, each of the segments being located in one of the closed regions, and each of the second spacer structures has one end connected to the annular wall and the other end The flow path of the first fluid in the corresponding segment is determined for the open end in one of the enclosed regions. 如申請專利範圍第9項所述的噴灑頭裝置，其中該環形壁具有多個開口，該些開口分別連通該流路的入口端以及出口端。 The sprinkler head device of claim 9, wherein the annular wall has a plurality of openings that communicate with the inlet end and the outlet end of the flow path, respectively. 如申請專利範圍第1項所述的噴灑頭裝置，其中該第一 流道與各該第二流道的出口端之間的距離小於該第一流道與各該第二流道的入口端之間的距離。 The sprinkler head device of claim 1, wherein the first The distance between the flow passage and the outlet end of each of the second flow passages is smaller than the distance between the first flow passage and the inlet end of each of the second flow passages. 如申請專利範圍第1項所述的噴灑頭裝置，其中該第一流道劃分為彼此獨立的多個分段，各該分段具有一入口端與一出口端，且該第一流體在各該分段中具有單一流路。 The sprinkler head device of claim 1, wherein the first flow passage is divided into a plurality of segments independent of each other, each segment having an inlet end and an outlet end, and the first fluid is in each There is a single flow path in the segment. 如申請專利範圍第1項所述的噴灑頭裝置，其中該第一流體為一熱交換流體，而該第二流體為一製程流體。 The sprinkler head device of claim 1, wherein the first fluid is a heat exchange fluid and the second fluid is a process fluid. 如申請專利範圍第13項所述的噴灑頭裝置，其中該製程流體包括一反應流體、一載體流體或其組合。 The sprinkler head device of claim 13, wherein the process fluid comprises a reactive fluid, a carrier fluid, or a combination thereof. 如申請專利範圍第13項所述的噴灑頭裝置，其中該冷卻流體包括一冷卻劑。 The sprinkler head device of claim 13, wherein the cooling fluid comprises a coolant. 如申請專利範圍第1項所述的噴灑頭裝置，更包括多個內管件，設置於該些第二流道中，各該內管件與對應個其中一該第二流道平行以供一第三流體流通。 The sprinkler head device of claim 1, further comprising a plurality of inner tubular members disposed in the second flow passages, each inner tubular member being parallel with a corresponding one of the second flow passages for a third Fluid circulation. 如申請專利範圍第1項所述的噴灑頭裝置，更包括一上蓋以及一固定框，該多孔板體夾於該上蓋以及該固定框之間。 The sprinkler head device of claim 1, further comprising an upper cover and a fixing frame, the porous plate body being sandwiched between the upper cover and the fixing frame.
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CN103305811A (en) * 2012-03-06 2013-09-18 吉富新能源科技(上海)有限公司 Thin-film deposition device gas introduction nozzle metal plate cooling device

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