TW201524089A - Linear-rotary actuator and control method thereof - Google Patents
Linear-rotary actuator and control method thereof Download PDFInfo
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- TW201524089A TW201524089A TW103132033A TW103132033A TW201524089A TW 201524089 A TW201524089 A TW 201524089A TW 103132033 A TW103132033 A TW 103132033A TW 103132033 A TW103132033 A TW 103132033A TW 201524089 A TW201524089 A TW 201524089A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
- H02K11/215—Magnetic effect devices, e.g. Hall-effect or magneto-resistive elements
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K21/00—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets
- H02K21/12—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets with stationary armatures and rotating magnets
- H02K21/14—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets with stationary armatures and rotating magnets with magnets rotating within the armatures
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P31/00—Arrangements for regulating or controlling electric motors not provided for in groups H02P1/00 - H02P5/00, H02P7/00 or H02P21/00 - H02P29/00
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Abstract
Description
本發明係關於一種可自如地線性運動與旋轉之線性-旋轉致動器及其控制方法。 The present invention relates to a linear-rotary actuator and a control method thereof that are freely linearly movable and rotatable.
專利文獻1(日本專利特開2004-364348)揭示有可自如地線性運動與旋轉之致動器。於專利文獻1中,於旋轉馬達之軸內設置線性馬達,利用旋轉馬達之旋轉而使線性馬達整體旋轉,並藉由線性馬達而使輸出軸進退。該致動器可用於必須線性運動及旋轉之用途、例如機器手臂之驅動等。 Patent Document 1 (Japanese Patent Laid-Open No. 2004-364348) discloses an actuator that is freely linearly movable and rotatable. In Patent Document 1, a linear motor is provided in a shaft of a rotary motor, and the linear motor is rotated as a whole by rotation of the rotary motor, and the output shaft is advanced and retracted by a linear motor. The actuator can be used for applications that must be linearly moved and rotated, such as the drive of a robotic arm.
專利文獻2(日本專利3862033)揭示有使用磁性體與線圈之相互作用之感測器。於專利文獻2中,例如,使將激磁線圈與檢測線圈相互交錯配置之感測器相對於永久磁鐵列對向。若對激磁線圈施加頻率ω之交流電,則於檢測線圈中亦會產生頻率ω之感應電壓。此處,由於感應電壓之強弱係根據來自磁鐵之磁場而調變,因此可檢測出以磁鐵列為基準之位置。再者,關於此種位置感測器,已知有各種樣式,例如,可兼用激磁線圈與檢測線圈。又,已知有為了準確地提取調變之強弱,而將以磁鐵列為基準之相位設為,提取sin cosωt之信號及cos sinωt之信號,並藉由加法定理設為sin(+ωt)等巧妙之電路。 Patent Document 2 (Japanese Patent No. 3,862,033) discloses a sensor using an interaction of a magnetic body and a coil. In Patent Document 2, for example, a sensor in which an exciting coil and a detecting coil are alternately arranged is opposed to a permanent magnet array. When an alternating current of frequency ω is applied to the exciting coil, an induced voltage of the frequency ω is also generated in the detecting coil. Here, since the intensity of the induced voltage is modulated by the magnetic field from the magnet, the position based on the magnet array can be detected. Further, various types of such position sensors are known, and for example, an exciting coil and a detecting coil can be used in combination. Further, it is known that in order to accurately extract the strength of the modulation, the phase based on the magnet column is set to , extract sin Cosωt signal and cos The signal of sinωt and set to sin by the addition theorem +ωt) and other clever circuits.
[專利文獻1]日本專利特開2004-364348 [Patent Document 1] Japanese Patent Laid-Open No. 2004-364348
[專利文獻2]日本專利3862033 [Patent Document 2] Japanese Patent 3,862,033
於專利文獻1之線性-旋轉致動器中,旋轉馬達及線性運動馬達(linear motor)中分別必須有編碼器或線性運動位置及旋轉角之感測器,而難以小型化地設計。因此,本發明之課題在於提供一種搭載可測定線性運動及旋轉雙方之感測器的線性-旋轉致動器。 In the linear-rotary actuator of Patent Document 1, the encoder and the linear motion position and the rotation angle sensor are required in the rotary motor and the linear motor, respectively, and it is difficult to design in a compact manner. Accordingly, an object of the present invention is to provide a linear-rotary actuator equipped with a sensor capable of measuring both linear motion and rotation.
本發明係一種可自如地線性運動與旋轉之線性-旋轉致動器,其特徵在於,具備有:軸桿;線性運動用磁鐵列,其包含複數個磁鐵,該複數個磁鐵係由端面自與上述軸桿之軸成直角之面呈傾斜且沿著上述軸桿所排列;線性運動用驅動線圈,其係配置在上述線性運動用磁鐵列之外周側;旋轉馬達,其使上述軸桿旋轉;感測器,其係沿著上述線性運動用磁鐵列所配置;及控制電路,其根據上述感測器之信號而求出軸桿之線性運動位置或軸桿之旋轉角,而控制上述驅動線圈及上述旋轉馬達;且上述感測器係包含沿著軸桿之軸向排列之複數個磁性元件。 The present invention is a linear-rotary actuator that is freely linearly movable and rotatable, and is characterized by comprising: a shaft; a linear motion magnet array including a plurality of magnets, the plurality of magnets being self-contained by end faces The axis of the shaft is inclined at a right angle and arranged along the shaft; the linear motion drive coil is disposed on the outer circumference side of the linear motion magnet array; and the rotary motor rotates the shaft; a sensor disposed along the linear motion magnet array; and a control circuit that determines a linear motion position of the shaft or a rotation angle of the shaft according to the signal of the sensor, and controls the driving coil And the above-mentioned rotating motor; and the sensor comprises a plurality of magnetic elements arranged along the axial direction of the shaft.
又,本發明係一種可自如地線性運動與旋轉之線性-旋轉致動器之控制方法,上述線性-旋轉致動器係具備有:軸桿;線性運動用磁鐵列,其包含複數個磁鐵,該複數個磁鐵係由端 面自與上述軸桿之軸成直角之面呈傾斜且沿著上述軸桿所排列;線性運動用驅動線圈,其係配置在上述線性運動用磁鐵列之外周側;旋轉馬達,其使上述軸桿之軸旋轉;及感測器,其係沿著上述線性運動用磁鐵列所配置,且包含沿著軸桿之軸向排列之複數個磁性元件,並藉由線性運動用磁鐵列與磁性元件之相互作用,而使信號產生變化;且無論對軸桿之線性運動及旋轉之任一者,均使感測器自線性運動用磁鐵列所接受之磁場產生變化,並自感測器將信號加以取出,藉由控制電路,從上述信號求出軸桿之線性運動位置或軸桿之旋轉角,而加以控制上述驅動線圈及上述旋轉馬達。 Furthermore, the present invention is a control method of a linear-rotary actuator that is freely linearly movable and rotatable, the linear-rotary actuator comprising: a shaft; a linear motion magnet array including a plurality of magnets, The plurality of magnets are terminated by a surface that is inclined at a right angle to the axis of the shaft and arranged along the shaft; a linear motion drive coil disposed on an outer peripheral side of the linear motion magnet array; and a rotary motor that causes the shaft a shaft rotation of the rod; and a sensor disposed along the linear motion magnet array and including a plurality of magnetic elements arranged along the axial direction of the shaft, and the magnetic column and the magnetic element by linear motion The interaction causes the signal to change; and regardless of the linear motion and rotation of the shaft, the magnetic field received by the sensor from the column of linear motion changes, and the signal from the sensor The drive coil and the rotary motor are controlled by the control circuit to determine the linear movement position of the shaft or the rotation angle of the shaft from the signal.
於本發明中,使用如下之感測器:沿著線性運動用磁鐵列所配置,且包含沿著軸桿之軸向排列之複數個磁性元件,並藉由線性運動用磁鐵列與磁性元件之相互作用,而使信號產生變化。而且,藉由該感測器,可檢測致動器之線性運動位置及旋轉角。該感測器之信號係根據線性運動及旋轉雙方而變化,可錯開時間而個別地進行線性運動及旋轉,或者可設置複數個感測器等,藉此將信號分離為線性運動及旋轉。而且,由於可藉由一種感測器檢測線性運動及旋轉,因此可獲得小型化之線性-旋轉致動器。再者,可將軸桿設為可動側,亦可將驅動線圈設為可動側。於本說明書中,與線性-旋轉致動器相關之記載,亦可直接適用於其控制方法。 In the present invention, a sensor is used which is arranged along a linear motion magnet array and includes a plurality of magnetic elements arranged along the axial direction of the shaft, and is arranged by a linear motion magnet array and a magnetic element. Interaction, and the signal changes. Moreover, with the sensor, the linear motion position and the rotation angle of the actuator can be detected. The signal of the sensor changes according to both linear motion and rotation, and linear motion and rotation can be performed individually by shifting the time, or a plurality of sensors or the like can be provided, thereby separating the signal into linear motion and rotation. Moreover, since linear motion and rotation can be detected by one type of sensor, a miniaturized linear-rotary actuator can be obtained. Further, the shaft can be set to the movable side, and the drive coil can be set to the movable side. In the present specification, the description relating to the linear-rotary actuator can also be directly applied to the control method thereof.
較佳為,上述旋轉馬達係包含有:旋轉用磁鐵列,其包含沿著上述軸桿配置之複數個磁鐵;及旋轉用驅動線圈,其係配置在上述旋轉用磁鐵列之外周側。如此一來,能夠以軸桿為軸而構 成線性運動馬達及旋轉馬達,軸桿係成為該等共用之軸。因此,可獲得小型化之線性-旋轉致動器。 Preferably, the rotary motor includes a rotation magnet array including a plurality of magnets disposed along the shaft, and a rotation drive coil disposed on an outer circumferential side of the rotation magnet array. In this way, the shaft can be used as the axis It is a linear motion motor and a rotary motor, and the shaft is the shared shaft. Therefore, a miniaturized linear-rotary actuator can be obtained.
較佳為以如下方式構成控制電路:當驅動上述線性運動用驅動線圈時,將上述感測器之信號加以轉換為線性運動位置,當驅動上述旋轉馬達時,將上述感測器之信號加以轉換為旋轉角。如此一來,藉由個別地進行線性運動及旋轉,則即便為輸出混合有線性運動與旋轉之信號之感測器,亦可控制致動器之線性運動及旋轉。 Preferably, the control circuit is configured to convert the signal of the sensor into a linear motion position when the linear motion drive coil is driven, and convert the signal of the sensor when the rotation motor is driven. Is the angle of rotation. In this way, by linearly moving and rotating individually, the linear motion and rotation of the actuator can be controlled even if the sensor that outputs the signal of linear motion and rotation is output.
較佳為,上述感測器係沿著軸桿之外周方向設置有複數個,且上述控制電路係包含如下:根據複數個感測器信號之和而求出線性運動位置,並根據複數個感測器信號之差而求出旋轉角。如此一來,可同時進行線性-旋轉致動器之線性運動及旋轉。不限定於相加值,亦可利用平均值等控制線性運動,且並不限定於差,亦可利用差之常數倍等控制旋轉。 Preferably, the sensor is disposed in a plurality of directions along the outer circumference of the shaft, and the control circuit includes the following: determining a linear motion position according to a sum of the plurality of sensor signals, and according to the plurality of senses The rotation angle is obtained by the difference between the detector signals. In this way, linear motion and rotation of the linear-rotary actuator can be performed simultaneously. It is not limited to the added value, and the linear motion can be controlled by the average value or the like, and is not limited to the difference, and the rotation can be controlled by using a constant multiple of the difference or the like.
較佳為,感測器係經由包含非磁性導電體之磁屏(magnetic shield),而配置在線性運動用驅動線圈之外周側。藉由利用磁屏遮斷來自線性運動用驅動線圈之交流磁場,可提高感測器之精準度,而藉由將感測器配置於線性運動用驅動線圈之外周側,可縮短線性運動用磁鐵列。 Preferably, the sensor is disposed on the outer peripheral side of the linear motion drive coil via a magnetic shield including a non-magnetic conductor. By using a magnetic screen to block the alternating magnetic field from the linear motion drive coil, the accuracy of the sensor can be improved, and by arranging the sensor on the outer circumference side of the linear motion drive coil, the linear motion magnet can be shortened. Column.
線性-旋轉致動器之用途為任意,若作為晶片安裝機之致動器,則可發揮如下之特徵:可藉由輸出轉矩較小且小型化之致動器,正確地控制晶片之旋轉及線性運動。 The linear-rotary actuator is used arbitrarily. If it is an actuator of a wafer mounting machine, it can be characterized in that the rotation of the wafer can be accurately controlled by an actuator having a small output torque and miniaturization. And linear motion.
2、40‧‧‧線性-旋轉致動器 2, 40‧‧‧ linear-rotary actuator
4‧‧‧軸桿 4‧‧‧ shaft
6、8‧‧‧永久磁鐵 6, 8‧‧‧ permanent magnets
6a、6b‧‧‧磁鐵 6a, 6b‧‧‧ magnet
7、9‧‧‧磁鐵列 7, 9‧‧‧ magnet column
10、12‧‧‧驅動線圈 10,12‧‧‧ drive coil
14、42、44‧‧‧感測器 14, 42, 44‧‧‧ sensors
16‧‧‧磁屏 16‧‧‧ Magnetic screen
18‧‧‧控制電路 18‧‧‧Control circuit
20‧‧‧手 20‧‧‧ hands
22‧‧‧開關 22‧‧‧ switch
23、24‧‧‧查詢表(LUT) 23, 24‧‧ Query Form (LUT)
25、26‧‧‧記憶體 25, 26‧‧‧ memory
27、28‧‧‧驅動電路 27, 28‧‧‧ drive circuit
50‧‧‧控制電路 50‧‧‧Control circuit
51‧‧‧相加部 51‧‧‧Addition Department
52‧‧‧差分部 52‧‧‧Differentiation Department
53、54‧‧‧查詢表(LUT) 53, 54‧‧‧ lookup table (LUT)
L1‧‧‧軸桿之x方向之行程 L1‧‧‧X-axis travel of the shaft
L2‧‧‧長度 L2‧‧‧ length
x‧‧‧線性運動位置 X‧‧‧linear motion position
θ‧‧‧旋轉角 Θ‧‧‧rotation angle
Px、Pθ、S1、S2‧‧‧信號 Px, Pθ, S1, S2‧‧‧ signals
圖1係表示實施例之線性-旋轉致動器之主要部分之 圖。 Figure 1 is a diagram showing the main part of the linear-rotary actuator of the embodiment. Figure.
圖2係圖1之II-II方向剖面圖。 Figure 2 is a cross-sectional view taken along line II-II of Figure 1.
圖3係圖1之III-III方向剖面圖。 Figure 3 is a cross-sectional view taken along the line III-III of Figure 1.
圖4係將圖1之主要部分放大表示之圖。 Fig. 4 is an enlarged view of a main portion of Fig. 1.
圖5係感測器信號之處理電路之方塊圖。 Figure 5 is a block diagram of a processing circuit for a sensor signal.
圖6係表示變形例之線性-旋轉致動器之主要部分之圖。 Fig. 6 is a view showing a main part of a linear-rotary actuator of a modification.
圖7係變形例之感測器信號之處理電路之方塊圖。 Fig. 7 is a block diagram showing a processing circuit of a sensor signal of a modification.
以下表示用以實施本發明之最佳實施例。本發明之範圍應根據申請專利範圍之記載,參考說明書及該領域眾所周知之技術,並根據該發明所屬技術領域中具有通常知識者之理解而決定。 The preferred embodiments for carrying out the invention are shown below. The scope of the present invention should be determined in accordance with the description of the scope of the claims, the description of the invention and the <RTIgt;
圖1至圖7係表示實施例及其變形。於各圖中,相同元件符號係表示相同元件,各用語之意思係參照公知技術而廣泛地解釋。圖1係表示線性-旋轉致動器2之實施例,元件符號4係圓柱狀或圓筒狀等之軸桿,沿著其軸向排列永久磁鐵6,而構成線性運動用磁鐵列7。 1 to 7 show an embodiment and a modification thereof. In the respective drawings, the same reference numerals are given to the same elements, and the meaning of each term is broadly explained with reference to the known art. Fig. 1 shows an embodiment of a linear-rotary actuator 2, in which the element symbol 4 is a shaft such as a cylindrical shape or a cylindrical shape, and the permanent magnets 6 are arranged along the axial direction thereof to constitute a linear motion magnet array 7.
磁鐵6係例如將磁性金屬粉成型所得之黏合磁鐵,呈筒狀,於中心貫通有軸桿4而固定於軸桿4,且兩端面係自與軸桿4之軸成直角之面傾斜。永久磁鐵6係沿著軸桿4之軸向被磁化,例如,以S極彼此相向或N極彼此相向之方式排列,而成為磁鐵列7。再者,磁化之方向(磁鐵內之磁通之方向)及磁鐵列7之構成方法為任意。 The magnet 6 is, for example, a bonded magnet obtained by molding a magnetic metal powder, has a tubular shape, is fixed to the shaft 4 through a shaft 4 penetrating the center thereof, and both end faces are inclined from a plane at right angles to the axis of the shaft 4. The permanent magnet 6 is magnetized along the axial direction of the shaft 4, and is, for example, arranged such that the S poles face each other or the N poles face each other, and become the magnet array 7. Further, the direction of magnetization (the direction of the magnetic flux in the magnet) and the method of constructing the magnet array 7 are arbitrary.
於軸桿4之一端呈環狀地固定有複數個永久磁鐵8, 而構成旋轉用磁鐵列9。磁鐵8其磁化之方向係軸桿4之周向,例如包含黏合磁鐵所成,例如以S極彼此相向或N極彼此相向之方式排列。較佳為,永久磁鐵8係沿著軸桿4之軸向,具有軸桿4之x方向之行程L1以上之長度L2,即便軸桿4進行線性運動,亦可作為旋轉用磁鐵列而發揮功能。 A plurality of permanent magnets 8 are fixed in an annular shape at one end of the shaft 4, The magnet row 9 for rotation is formed. The magnet 8 is magnetized in the circumferential direction of the shaft 4, and includes, for example, a bonded magnet, and is arranged, for example, such that the S poles face each other or the N poles face each other. Preferably, the permanent magnet 8 has a length L2 equal to or longer than the stroke L1 of the shaft 4 in the axial direction of the shaft 4, and functions as a rotating magnet array even if the shaft 4 moves linearly. .
元件符號10係線性運動用驅動線圈,呈圓筒狀,且以圍繞線性運動用磁鐵列7之方式配置。元件符號12係旋轉用驅動線圈,呈圓筒狀,且以圍繞旋轉用磁鐵列9之方式配置。該等驅動線圈10、12雖然例如以U相、V相、W相3相之驅動電流動作,但驅動電流之種類、波形等為任意。又,流向驅動線圈10、12之電流係根據利用感測器14所求得之軸桿之線性運動位置x及旋轉角θ,進行反饋控制。此處,線性運動用磁鐵列7係藉由與線性運動用驅動線圈10之相互作用,而產生圖1之±x方向之力。又,旋轉用磁鐵列9係藉由與旋轉用驅動線圈12之相互作用,而產生圖1之±θ方向之力。將圖1之x方向之位置設為線性運動位置,將θ方向之位置設為旋轉角。於實施例中,雖然軸桿4及磁鐵列7、9為可動側,其他構件為固定側,但亦可將軸桿4及磁鐵列7、9固定,而使驅動線圈10、12等其他構件進行線性運動及旋轉。 The component symbol 10 is a linear motion drive coil which is cylindrical and arranged so as to surround the linear motion magnet array 7. The component symbol 12 is a rotation drive coil and has a cylindrical shape and is disposed to surround the rotation magnet array 9. The drive coils 10 and 12 operate, for example, in a U-phase, a V-phase, and a W-phase three-phase drive current, but the types, waveforms, and the like of the drive current are arbitrary. Further, the current flowing to the drive coils 10 and 12 is feedback-controlled based on the linear motion position x and the rotation angle θ of the shaft obtained by the sensor 14. Here, the linear motion magnet array 7 generates a force in the ±x direction of FIG. 1 by interaction with the linear motion drive coil 10. Further, the rotating magnet array 9 is caused to interact with the rotation drive coil 12 to generate a force in the ±θ direction of Fig. 1 . The position in the x direction of FIG. 1 is set as the linear motion position, and the position in the θ direction is set as the rotation angle. In the embodiment, although the shaft 4 and the magnet arrays 7 and 9 are movable sides and the other members are fixed sides, the shaft 4 and the magnet arrays 7 and 9 may be fixed to drive the coils 10 and 12 and other members. Perform linear motion and rotation.
元件符號14係感測器,複數個磁性元件沿著軸桿4之軸向排列,且設置於與磁鐵列7對向之位置。感測器14雖然例如為專利文獻2(日本專利3862033)中所記載之激磁線圈及檢測線圈,但亦可兼用激磁線圈與檢測線圈,又,亦可使用霍耳元件、磁阻元件等其他磁性元件。再者,磁性元件係指特性會根據來自外部之磁場而變化之元件。元件符號16係磁屏,包含非磁性之金屬所 成,遮斷來自驅動線圈之交流磁場。雖然由於將感測器14配置於驅動線圈10之外周側,因此設置磁屏16,但亦可不設置磁屏16,又,亦可將感測器14設置於圖1之鏈線之位置。 The component symbol 14 is a sensor, and a plurality of magnetic components are arranged along the axial direction of the shaft 4 and are disposed at positions opposed to the magnet array 7. The sensor 14 is, for example, an excitation coil and a detection coil described in Patent Document 2 (Japanese Patent No. 3862033). However, an excitation coil and a detection coil may be used in combination, and other magnetic properties such as a Hall element and a magnetoresistive element may be used. element. Furthermore, a magnetic element refers to an element whose characteristics vary depending on a magnetic field from the outside. Component symbol 16 is a magnetic screen containing non-magnetic metal The interception of the alternating magnetic field from the drive coil. Although the magnetic shield 16 is provided because the sensor 14 is disposed on the outer peripheral side of the drive coil 10, the magnetic shield 16 may not be provided, and the sensor 14 may be disposed at the position of the chain line of FIG.
元件符號18係控制電路,根據感測器14之信號設置軸桿之線性運動位置x及旋轉角θ,而控制驅動線圈10、12。線性-旋轉致動器2例如作為晶片安裝機使用,例如於軸桿4之前端設置手20,吸取未圖示之晶片,並藉由旋轉運動而調整晶片之朝向,藉由x方向之運動使晶片例如下降,而安裝於未圖示之基板上。除此以外,線性-旋轉致動器2亦可用於機器手臂、檢查裝置、塗佈裝置等任意之用途。 The component symbol 18 is a control circuit that controls the drive coils 10, 12 by setting the linear motion position x and the rotation angle θ of the shaft according to the signal of the sensor 14. The linear-rotary actuator 2 is used, for example, as a wafer mounting machine. For example, a hand 20 is provided at the front end of the shaft 4, a wafer (not shown) is sucked, and the orientation of the wafer is adjusted by a rotational motion, and the movement in the x direction is used. The wafer is lowered, for example, and mounted on a substrate (not shown). In addition to this, the linear-rotary actuator 2 can also be used for any purpose such as a robot arm, an inspection device, a coating device, and the like.
將磁鐵列7沿著與軸桿4之軸成直角之剖面表示於圖2。由於磁鐵6之端面與軸不成直角,因此可看得到2個磁鐵6a、6b之邊界。驅動線圈10係呈環狀,於其外周存在有由磁屏16所包圍之感測器14。 A cross section of the magnet array 7 at right angles to the axis of the shaft 4 is shown in Fig. 2. Since the end face of the magnet 6 is not at right angles to the shaft, the boundary between the two magnets 6a and 6b can be seen. The drive coil 10 is annular, and a sensor 14 surrounded by the magnetic shield 16 is present on the outer circumference thereof.
將磁鐵列9沿著與軸桿4之軸成直角之剖面表示於圖3。例如,U相、V相、W相3相之驅動線圈12係呈環狀地圍繞磁鐵列9之外周,作為旋轉馬達而使軸桿4旋轉。 A cross section of the magnet array 9 at right angles to the axis of the shaft 4 is shown in Fig. 3. For example, the U-phase, V-phase, and W-phase three-phase drive coils 12 surround the outer circumference of the magnet array 9 in a ring shape, and the shaft 4 is rotated as a rotary motor.
圖4係將軸桿4與驅動用線圈10放大表示,軸桿4貫通永久磁鐵6之中心軸,永久磁鐵6之端面係相對於與軸桿4之軸成直角之面傾斜。又,永久磁鐵6係固定於軸桿4。 4 shows an enlarged view of the shaft 4 and the drive coil 10, and the shaft 4 penetrates the central axis of the permanent magnet 6, and the end faces of the permanent magnets 6 are inclined with respect to a plane at right angles to the axis of the shaft 4. Further, the permanent magnet 6 is fixed to the shaft 4.
圖5係表示控制電路18,感測器14之信號係依存於線性運動位置x與旋轉角θ雙方,而將該信號輸入至開關22。於致動器2進行線性運動中,信號Px被輸入至開關22,感測器信號係利用查詢表(LUT;Look up table)23轉換為線性運動位置,並作為 線性運動位置x而儲存於記憶體25。線性運動驅動電路27係根據該位置x控制驅動線圈10。又,於致動器旋轉中,信號Pθ被輸入至開關22,感測器信號係利用查詢表24轉換為旋轉角,並作為旋轉角θ而儲存於記憶體26。旋轉驅動電路28係根據該旋轉角θ控制驅動線圈12。再者,雖然於線性運動中例如使旋轉角θ固定而進行處理,於旋轉中例如使線性運動位置x固定而進行處理,但並不限定於此。 FIG. 5 shows the control circuit 18. The signal of the sensor 14 depends on both the linear motion position x and the rotation angle θ, and the signal is input to the switch 22. In the linear motion of the actuator 2, the signal Px is input to the switch 22, and the sensor signal is converted into a linear motion position by using a look up table (LUT) 23, and The linear motion position x is stored in the memory 25. The linear motion drive circuit 27 controls the drive coil 10 based on the position x. Further, during the rotation of the actuator, the signal Pθ is input to the switch 22, and the sensor signal is converted into a rotation angle by the look-up table 24, and stored in the memory 26 as the rotation angle θ. The rotation drive circuit 28 controls the drive coil 12 based on the rotation angle θ. In the linear motion, for example, the rotation angle θ is fixed and processed, and the linear motion position x is fixed and processed during the rotation, for example, but the processing is not limited thereto.
圖6、圖7係表示變形例之線性-旋轉致動器40,與圖1至圖5之實施例相同之元件符號表示相同元件。沿著磁鐵列7配置複數個例如2個感測器42、44,感測器42、44係於軸桿4之軸向排列有複數個磁性元件,將一感測器之信號設為S1,將另一感測器之信號設為S2。利用圖7之控制電路50將2個感測器42、44之信號S1、S2轉換為線性運動位置x及旋轉角θ。為了求出線性運動位置x,利用相加部51將感測器信號S1與S2相加,並利用查詢表27轉換為線性運動位置x。為了求出旋轉位置θ,利用差分部52求出感測器信號S1與S2之差分,並利用查詢表28轉換為旋轉角θ。於設置3個以上感測器之情形時,根據該等信號之平均求出線性運動位置x,並根據該等信號之相對值求出旋轉角θ。 6 and 7 show a linear-rotary actuator 40 according to a modification, and the same reference numerals as in the embodiment of Figs. 1 to 5 denote the same elements. A plurality of, for example, two sensors 42 and 44 are disposed along the magnet array 7. The sensors 42 and 44 are arranged with a plurality of magnetic elements in the axial direction of the shaft 4, and the signal of one sensor is set to S1. Set the signal of the other sensor to S2. The signals S1, S2 of the two sensors 42, 44 are converted into a linear motion position x and a rotation angle θ by the control circuit 50 of FIG. In order to find the linear motion position x, the sensor signals S1 and S2 are added by the addition unit 51, and converted into a linear motion position x by the look-up table 27. In order to obtain the rotational position θ, the difference between the sensor signals S1 and S2 is obtained by the difference unit 52, and is converted into the rotational angle θ by the look-up table 28. When three or more sensors are provided, the linear motion position x is obtained from the average of the signals, and the rotation angle θ is obtained from the relative values of the signals.
於實施例中,雖然使用查詢表進行自感測器信號向座標(位置及旋轉角)之轉換,但亦可藉由乘法或其他運算求出座標。此外,亦可於線性運動用磁鐵列7之周圍配置旋轉用驅動線圈12,而使軸桿4旋轉。於該情形時,將由線性運動用磁鐵列兼作為旋轉用磁鐵列使用。再者,亦可與線性致動器2之其他構件分離地安裝感測器14,藉由未圖示之旋轉馬達使線性致動器2旋轉,而藉由感 測器14檢測其旋轉角。然而,若為此種設計,則不會成為小型化之線性致動器。又,若藉由未圖示之空氣軸承進行軸桿4之支持,則能夠以非接觸之形式支持軸桿4,而減少磨耗、故障等問題。 In the embodiment, although the conversion of the sensor signal to the coordinates (position and rotation angle) is performed using the look-up table, the coordinates may be obtained by multiplication or other operations. Further, the rotation drive coil 12 may be disposed around the linear motion magnet array 7, and the shaft 4 may be rotated. In this case, the linear motion magnet array is also used as a rotating magnet array. Further, the sensor 14 may be attached separately from the other members of the linear actuator 2, and the linear actuator 2 may be rotated by a rotating motor (not shown). The detector 14 detects its rotation angle. However, if it is such a design, it will not become a miniaturized linear actuator. Further, when the shaft 4 is supported by an air bearing (not shown), the shaft 4 can be supported in a non-contact manner, and problems such as wear and failure can be reduced.
實施例具有以下特徵。 The embodiment has the following features.
1)可藉由感測器14求出線性致動器2之線性運動位置及旋轉角。再者,若假設於線性致動器2設置旋轉用編碼器等,則由於軸桿4會線性運動,因此必須有具備軸桿之行程之長度之編碼器等。 1) The linear motion position and the rotation angle of the linear actuator 2 can be obtained by the sensor 14. In addition, if the rotary actuator or the like is provided in the linear actuator 2, since the shaft 4 moves linearly, an encoder having a length of the stroke of the shaft or the like is required.
2)可藉由軸桿4、磁鐵列7、9及驅動線圈10、12,而進行線性運動及旋轉,較為小型化。 2) Linear movement and rotation can be performed by the shaft 4, the magnet arrays 7, 9 and the drive coils 10 and 12, and the size is reduced.
2‧‧‧線性-旋轉致動器 2‧‧‧Linear-rotary actuator
4‧‧‧軸桿 4‧‧‧ shaft
6‧‧‧永久磁鐵 6‧‧‧ permanent magnet
7‧‧‧磁鐵列 7‧‧‧ Magnet column
8‧‧‧永久磁鐵 8‧‧‧ permanent magnet
9‧‧‧磁鐵列 9‧‧‧ Magnet column
10‧‧‧驅動線圈 10‧‧‧ drive coil
12‧‧‧驅動線圈 12‧‧‧ drive coil
14‧‧‧感測器 14‧‧‧Sensor
16‧‧‧磁屏 16‧‧‧ Magnetic screen
18‧‧‧控制電路 18‧‧‧Control circuit
20‧‧‧手 20‧‧‧ hands
L1‧‧‧軸桿之x方向之行程 L1‧‧‧X-axis travel of the shaft
L2‧‧‧長度 L2‧‧‧ length
x‧‧‧線性運動位置 X‧‧‧linear motion position
θ‧‧‧旋轉角 Θ‧‧‧rotation angle
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JP2013193777A JP2015061411A (en) | 2013-09-19 | 2013-09-19 | Linear/rotary actuator and method for controlling the same |
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TW201524089A true TW201524089A (en) | 2015-06-16 |
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DE102016214947A1 (en) * | 2016-08-11 | 2018-02-15 | Schaeffler Technologies AG & Co. KG | A method of mutually adjusting a magnetic sensor device and an actuator and actuator device comprising an actuator and a magnetic sensor device |
JP2020171162A (en) * | 2019-04-04 | 2020-10-15 | 日本電産株式会社 | motor |
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