TW201507860A - Press device - Google Patents
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- TW201507860A TW201507860A TW103128573A TW103128573A TW201507860A TW 201507860 A TW201507860 A TW 201507860A TW 103128573 A TW103128573 A TW 103128573A TW 103128573 A TW103128573 A TW 103128573A TW 201507860 A TW201507860 A TW 201507860A
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- chamber
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- die holder
- press
- air supply
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B5/00—Presses characterised by the use of pressing means other than those mentioned in the preceding groups
- B30B5/02—Presses characterised by the use of pressing means other than those mentioned in the preceding groups wherein the pressing means is in the form of a flexible element, e.g. diaphragm, urged by fluid pressure
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- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
本發明涉及具有根據流體壓進行動作的隔片(diaphragm)作為衝壓機構的衝壓裝置。 The present invention relates to a press device having a diaphragm that operates in accordance with a fluid pressure as a punching mechanism.
已知通過對由具有撓性、伸縮性的片狀的隔片分隔而成的2個空間(腔室)施加氣壓差，利用隔片對被加工件進行衝壓的方式的衝壓裝置(以下稱為「隔片式衝壓裝置」。)。隔片式衝壓裝置在對疊層片狀的部材所形成的疊層材料進行熱衝壓加工而成形一體的板狀產品(例如，太陽能電池板、印刷配線基板)的層壓加工等中使用(層壓裝置)。 A press device in which a workpiece is pressed by a spacer by applying a pressure difference to two spaces (chambers) separated by a sheet-like spacer having flexibility and elasticity (hereinafter referred to as "Separator type stamping device".). The sheet-type press apparatus is used for lamination processing of a sheet-like product (for example, a solar cell panel or a printed wiring board) in which a laminated material formed of a laminated sheet-like member is subjected to hot stamping processing (layer) Pressure device).
隔片式衝壓裝置具有對由隔片分隔成的腔室進行加壓或抽真空的配管。在現有的隔片式衝壓裝置中，如日本專利公開公報日本特開2001-79865號公報(以下，記為專利文獻1)記載的那樣，工作流體(空氣)向腔室內的供氣排氣使用共用的配管進行。 The spacer type stamping apparatus has piping for pressurizing or evacuating a chamber partitioned by the separator. In the conventional separator type press apparatus, as described in Japanese Laid-Open Patent Publication No. 2001-79865 (hereinafter referred to as Patent Document 1), the working fluid (air) is supplied to the air supply and exhaust in the chamber. The shared piping is carried out.
層壓加工的被加工件(疊層材料)包含用於使疊層材料接合的粘接劑(例如，熱可塑性樹脂、熱固化性樹脂)。因此，在層壓加工中粘接劑所包含的有機溶劑等的揮發成分氣化或者由於粘接劑的固化反應而產生過氧化物、酸，從被加工件散出。在層壓加工中從被加工件散出的氣體，加速由矽橡膠或天然橡膠形成的隔片的劣化。 The laminate processed workpiece (laminate material) contains an adhesive (for example, a thermoplastic resin or a thermosetting resin) for bonding the laminate. Therefore, in the lamination process, volatile components such as an organic solvent contained in the adhesive are vaporized or peroxide or acid is generated by the curing reaction of the adhesive, and is discharged from the workpiece. The gas ejected from the workpiece during the lamination process accelerates the deterioration of the separator formed of ruthenium rubber or natural rubber.
如專利文獻1記載的那樣，使用共用的配管進行對腔室內的 吸氣和排氣的現有的隔片式衝壓裝置中，從腔室內一度排出的具有劣化加速作用的氣體的一部分從配管內再次返回腔室內，因此，存在腔室內的劣化加速性氣體的濃度變高，隔片的壽命變短的問題。 As described in Patent Document 1, the use of a common pipe is performed in the chamber. In the conventional spacer type press apparatus for inhaling and exhausting, a part of the gas having deterioration acceleration that is once discharged from the chamber is returned to the chamber again from the inside of the pipe, and therefore, the concentration of the deteriorated acceleration gas in the chamber is changed. High, the problem of short life of the spacer.
本發明是鑒於上述的情況而提出的。即，本發明的目的在於，提供一種能夠防止因劣化加速性氣體向腔室內的逆流而導致的隔片的劣化的衝壓裝置。 The present invention has been made in view of the above circumstances. That is, an object of the present invention is to provide a press device capable of preventing deterioration of a separator due to deterioration of a reverse flow of an accelerated gas into a chamber.
本發明的一個實施方式的衝壓裝置包括：具有剛性的衝壓面；撓性片，與上述衝壓面相對配置，分隔出上述衝壓面側的第一腔室和上述衝壓面的相反側的第二腔室；加熱機構，對配置在上述衝壓面與上述撓性片之間的被加工件進行加熱；和壓力控制系統，控制上述第一腔室與上述第二腔室的內壓差，所述衝壓裝置通過使上述第一腔室的內壓與上述第二腔室的內壓相比相對較低，在上述衝壓面與上述撓性片之間夾著被加工件進行衝壓成形，上述壓力控制系統包括：用於從上述第一腔室和上述第二腔室的至少一方的腔室排氣的排氣管路；和對上述至少一方的腔室進行供氣的供氣管路。 A press apparatus according to an embodiment of the present invention includes: a press surface having rigidity; a flexible sheet disposed opposite to the press surface, separating a first chamber on the side of the press surface and a second chamber on an opposite side of the press surface a heating mechanism that heats a workpiece disposed between the punching surface and the flexible sheet; and a pressure control system that controls an internal pressure difference between the first chamber and the second chamber, the stamping The apparatus performs press forming by sandwiching a workpiece between the punching surface and the flexible sheet by making the internal pressure of the first chamber relatively lower than the internal pressure of the second chamber, and the pressure control system The invention includes an exhaust line for exhausting from a chamber of at least one of the first chamber and the second chamber, and an air supply line for supplying air to at least one of the chambers.
根據上述結構，使用不同的配管進行向腔室內的吸氣和從腔室內的排氣，能夠防止從腔室內一度排出的劣化加速性的氣體向腔室內逆 流而加速隔片的劣化。 According to the above configuration, the inhalation into the chamber and the exhaust from the chamber are performed using different pipes, and it is possible to prevent the accelerated acceleration gas that is once discharged from the chamber from being reversed to the chamber. The flow accelerates the deterioration of the spacer.
上述的衝壓裝置中，可以構成為：上述排氣管路具有與上述至少一方的腔室分別連接的多個排氣分支管。 In the above press apparatus, the exhaust duct may include a plurality of exhaust branch pipes connected to at least one of the chambers.
另外，上述的衝壓裝置中，可以構成為：上述供氣管路具有與上述至少一方的腔室分別連接的多個供氣分支管。 Further, in the above-described press device, the air supply line may include a plurality of air supply branch pipes connected to at least one of the chambers.
另外，上述的衝壓裝置中，可以構成為：具有在一個面形成有上述衝壓面的模座，上述模座形成有：一端在上述一個面開口且與上述第一腔室連通、另一端與上述多個供氣分支管分別連接的多個供氣通路；和一端在上述一個面開口且與上述第一腔室連通、另一端與上述多個排氣分支管分別連接的多個排氣通路。 Further, in the above-described press apparatus, the die holder may have a die holder having a press surface formed on one surface, and the die holder may be formed such that one end thereof is open on the one surface and communicates with the first chamber, and the other end is a plurality of air supply passages respectively connected to the plurality of air supply branch pipes; and a plurality of exhaust passages each having one end open on the one surface and communicating with the first chamber, and the other end being connected to the plurality of exhaust branch pipes.
另外，上述的衝壓裝置中，可以構成為：上述多個排氣分支管的開口在上述衝壓面的周圍以規定間隔形成於上述一個面。 Further, in the above-described press device, the openings of the plurality of exhaust branch pipes may be formed on the one surface at a predetermined interval around the press surface.
另外，上述的衝壓裝置中，可以構成為：上述模座具有相對的一對側面，多對上述排氣分支管的開口沿上述一對側面相對地設置。 Further, in the above press device, the die holder may have a pair of opposite side faces, and the plurality of pairs of the outlet branch pipe openings may be provided to face each other along the pair of side faces.
另外，上述的衝壓裝置中，可以構成為：上述排氣管路包括：沿上述一對側面中的一個側面延伸，與沿該一個側面設置的上述排氣分支管的各對的一方連接的第一配管部；沿上述一對側面中的另一個側面延伸，與沿該另一個側面設置的上述排氣分支管的各對的另一方連接的第二配管部；和 中繼部，一端與上述第一配管部和上述第二配管部連接，另一端與上述真空泵連接。 Further, in the above-described press device, the exhaust duct may include a first side that extends along one of the pair of side faces and is connected to one of the pair of the exhaust branch pipes provided along the one side surface a piping portion; a second piping portion extending along the other one of the pair of side surfaces and connected to the other of the pair of the exhaust branch pipes provided along the other side surface; and The relay portion has one end connected to the first pipe portion and the second pipe portion, and the other end connected to the vacuum pump.
另外，上述的衝壓裝置中，可以構成為：上述排氣管路的一端經由閥與真空泵連接。 Further, in the above press apparatus, one end of the exhaust line may be connected to a vacuum pump via a valve.
另外，上述的衝壓裝置中，可以構成為：上述供氣管路的一端經由閥向大氣開放。 Further, in the above-described press device, one end of the air supply line may be opened to the atmosphere via a valve.
1‧‧‧層壓加工系統 1‧‧‧Laminating processing system
10‧‧‧控制裝置 10‧‧‧Control device
100‧‧‧層疊裝置 100‧‧‧Layer
200‧‧‧搬入用輸送機 200‧‧‧Transporting conveyor
300‧‧‧層壓裝置 300‧‧‧Laminating device
300A‧‧‧層壓裝置 300A‧‧‧Laminating device
310‧‧‧輸送機 310‧‧‧Conveyor
310t‧‧‧上表面 310t‧‧‧ upper surface
320‧‧‧固定模座 320‧‧‧Fixed base
320p‧‧‧衝壓面 320p‧‧ ‧ stamping surface
320sa,320sb‧‧‧側面 320sa, 320sb‧‧‧ side
320t‧‧‧上表面 320t‧‧‧ upper surface
323‧‧‧供氣通路 323‧‧‧ gas supply path
323a,323b‧‧‧開口 323a, 323b‧‧‧ openings
324‧‧‧排氣通路 324‧‧‧ exhaust passage
324a,324b‧‧‧開口 324a, 324b‧‧‧ openings
330‧‧‧可動模座 330‧‧‧ movable mold base
331‧‧‧可動模座主體 331‧‧‧ movable mold base
340‧‧‧框部 340‧‧‧ Frame Department
340A‧‧‧上部框體 340A‧‧‧ upper frame
340B‧‧‧下部框體 340B‧‧‧Lower frame
340C‧‧‧真空框 340C‧‧‧vacuum frame
340i‧‧‧上部件 340i‧‧‧Upper parts
340j‧‧‧下部件 340j‧‧‧lower parts
341‧‧‧環狀槽 341‧‧‧ring groove
341p‧‧‧迫緊件 341p‧‧‧ tightening parts
343‧‧‧遮蔽突起 343‧‧‧Shading protrusion
344‧‧‧臺階 344‧‧‧ steps
345e‧‧‧排氣通路 345e‧‧‧ exhaust passage
345s‧‧‧供氣通路 345s‧‧‧ gas supply path
345w‧‧‧分隔壁 345w‧‧‧ partition wall
346p‧‧‧迫緊件 346p‧‧‧forced parts
347e‧‧‧排氣孔 347e‧‧‧ venting holes
347s‧‧‧供氣孔 347s‧‧ ‧ air supply holes
348e,348s‧‧‧錐螺紋 348e, 348s‧‧‧ taper thread
349e‧‧‧排氣狹縫 349e‧‧‧Exhaust slit
349s‧‧‧供氣狹縫 349s‧‧‧ gas supply slit
350‧‧‧隔片 350‧‧‧ spacer
360‧‧‧供氣管路 360‧‧‧ gas supply pipeline
361‧‧‧主管 361‧‧ Director
361a,361b‧‧‧配管部 361a, 361b‧‧‧Pipe Department
361c‧‧‧中繼部 361c‧‧‧Relay Department
362a‧‧‧分支管 362a‧‧‧ branch tube
362b‧‧‧分支管 362b‧‧‧ branch tube
363‧‧‧電磁閥 363‧‧‧ solenoid valve
370‧‧‧排氣管路 370‧‧‧Exhaust line
371‧‧‧主管 371‧‧‧Supervisor
371a,371b‧‧‧配管部 371a, 371b‧‧‧Pipe Department
371c‧‧‧中繼部 371c‧‧‧Relay Department
372a‧‧‧分支管 372a‧‧‧ branch tube
372b‧‧‧分支管 372b‧‧‧ branch tube
373‧‧‧電磁閥 373‧‧‧Solenoid valve
374‧‧‧真空泵 374‧‧‧Vacuum pump
375‧‧‧壓力控制裝置 375‧‧‧pressure control device
390‧‧‧流體壓缸組件 390‧‧‧fluid cylinder assembly
400‧‧‧固化處理裝置 400‧‧‧ curing treatment device
500‧‧‧搬出用輸送機 500‧‧‧Transporting conveyor
700‧‧‧保護片 700‧‧‧protection film
710‧‧‧片部 710‧‧ ‧ Parts
712‧‧‧缺口部 712‧‧‧Gap section
714‧‧‧通氣孔 714‧‧‧vents
720‧‧‧框架部 720‧‧‧Framework
800‧‧‧載板 800‧‧‧ Carrier Board
810‧‧‧主框體 810‧‧‧Main frame
820‧‧‧支承片 820‧‧‧Support piece
824‧‧‧通氣孔 824‧‧‧Ventinel
830‧‧‧副框體 830‧‧‧Sub-frame
A‧‧‧太陽能電池組件 A‧‧‧Solar battery components
H‧‧‧中空部 H‧‧‧ Hollow
LC‧‧‧下部腔室 LC‧‧‧lower chamber
LC1‧‧‧第一部分 LC1‧‧‧Part 1
LC2‧‧‧第二部分 LC2‧‧‧ Part II
UC‧‧‧上部腔室 UC‧‧‧ upper chamber
S‧‧‧壓力控制系統 S‧‧‧ Pressure Control System
圖1是本發明的實施方式的層壓加工系統的外觀圖。 Fig. 1 is an external view of a lamination processing system according to an embodiment of the present invention.
圖2是本發明的實施方式的載板的立體圖。 Fig. 2 is a perspective view of a carrier plate according to an embodiment of the present invention.
圖3是本發明的實施方式的保護片的平面圖。 3 is a plan view of a protective sheet according to an embodiment of the present invention.
圖4是本發明的實施方式的層壓裝置的側面圖。 4 is a side view of a laminating apparatus according to an embodiment of the present invention.
圖5是本發明的第一實施方式的層壓裝置的固定模座和可動模座的截面圖。 Fig. 5 is a cross-sectional view showing a fixed die holder and a movable die holder of the laminating apparatus of the first embodiment of the present invention.
圖6是圖5的一部分放大圖。 Figure 6 is a partial enlarged view of Figure 5.
圖7是本發明的實施方式的壓力控制系統的概略結構圖。 Fig. 7 is a schematic configuration diagram of a pressure control system according to an embodiment of the present invention.
圖8是將本發明的第二實施方式的層壓裝置的固定模座和可動模座的截面的一部分放大的圖。 Fig. 8 is an enlarged view showing a part of a cross section of a fixed die holder and a movable die holder of the laminating apparatus according to the second embodiment of the present invention.
圖9是本發明的第二實施方式的真空框的截面圖。 Fig. 9 is a cross-sectional view showing a vacuum frame according to a second embodiment of the present invention.
圖10是本發明的第二實施方式的真空框的平面圖。 Fig. 10 is a plan view showing a vacuum frame according to a second embodiment of the present invention.
以下，參照附圖對本發明的實施方式進行詳細說明。 Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[第一實施方式] [First Embodiment]
圖1是本發明第一實施方式的太陽能電池用層壓加工系統1的外觀圖。層壓加工系統1包括層疊裝置100、搬入用輸送機200、層壓裝置(衝壓裝置)300、固化(cure)處理裝置400、搬出用輸送機500和控制裝置10。控制裝置10與構成層壓加工系統1的各裝置連接使得能夠進行通信，統一控制各裝置的動作。 Fig. 1 is an external view of a laminating system 1 for a solar cell according to a first embodiment of the present invention. The lamination processing system 1 includes a laminating apparatus 100, a loading conveyor 200, a laminating apparatus (pressing apparatus) 300, a cure processing apparatus 400, a carry-out conveyor 500, and a control apparatus 10. The control device 10 is connected to each device constituting the lamination processing system 1 so that communication can be performed, and the operations of the respective devices are collectively controlled.
層疊裝置100是將構成太陽能電池的多個部件(例如，玻璃板、填充材料、太陽能電池單元、填充材料和背板)重疊來組裝太陽能電池組件A的裝置。由層疊裝置100組裝後的太陽能電池組件A由搬入用輸送機200輸送至層壓裝置300。層壓裝置300進行太陽能電池組件A的層疊衝壓(熱衝壓加工成形)。即，層壓裝置300對太陽能電池組件A進行加熱衝壓，使其成形為規定的厚度的板狀體。此外，由層壓裝置300進行的熱衝壓加工，一直進行至衝壓溫度中的填充材料的流動性實際上消失為止。成形後的太陽能電池組件A被內置於層壓裝置300的輸送組件輸送至固化處理裝置400。 The lamination device 100 is a device in which a plurality of components (for example, a glass plate, a filler, a solar cell, a filler, and a backing plate) constituting a solar cell are stacked to assemble the solar cell module A. The solar cell module A assembled by the laminating apparatus 100 is transported to the laminating apparatus 300 by the carry-in conveyor 200. The laminating apparatus 300 performs lamination stamping (hot stamping forming) of the solar cell module A. That is, the lamination device 300 heat-presses the solar cell module A to form a plate-like body having a predetermined thickness. Further, the hot stamping process by the laminating apparatus 300 continues until the fluidity of the filler in the press temperature actually disappears. The formed solar cell module A is transported to the curing processing device 400 by the transport assembly built in the laminating apparatus 300.
固化處理裝置400對通過層壓裝置300成形後的太陽能電池組件A進行施加用於保持形狀的較輕的壓力同時進行加熱的固化處理，使熱固化樹脂即太陽能電池組件A的填充材料穩定化。通過以上的處理，製作太陽能電池板。結束固化處理而完成的太陽能電池板，被搬出用輸送機500從層壓加工系統1搬出。 The curing treatment device 400 applies a curing treatment in which the light-weight pressure for holding the shape is simultaneously applied to the solar cell module A molded by the laminating device 300, and stabilizes the filling material of the solar cell module A, which is a thermosetting resin. Through the above processing, a solar cell panel was produced. The solar cell panel which has been completed by the curing process is carried out from the lamination processing system 1 by the carry-out conveyor 500.
以上一系列的處理通過由控制裝置10控制層疊裝置100、搬入用輸送機200、層壓裝置300、固化處理裝置400和搬出用輸送機500來進 行。 The above series of processes are controlled by the control device 10 to control the stacking device 100, the carry-in conveyor 200, the laminating device 300, the curing device 400, and the carry-out conveyor 500. Row.
在本實施方式中，太陽能電池組件A和加工後的太陽能電池板，在載置於以下說明的載板800的狀態下被輸送，通過層壓裝置300和固化處理裝置400，與載板800一起被衝壓。 In the present embodiment, the solar cell module A and the processed solar cell panel are transported in a state of being placed on the carrier 800 described below, and are passed through the laminating apparatus 300 and the curing processing apparatus 400 together with the carrier 800. Being stamped.
圖2是在本實施方式中使用的載板800的立體圖。載板800包括：在中央部形成有中空部H的主框體810；以覆蓋中空部H的方式固定於主框體810的上表面的支承片820；和用外緣部保持支承片820並將該支承片820固定於主框體810的副框體830。 FIG. 2 is a perspective view of the carrier 800 used in the present embodiment. The carrier 800 includes a main frame body 810 having a hollow portion H formed at a central portion thereof, a support piece 820 fixed to the upper surface of the main frame body 810 so as to cover the hollow portion H, and a support piece 820 held by the outer edge portion. The support piece 820 is fixed to the sub-frame 830 of the main casing 810.
主框體810和副框體830是具有在太陽能電池板的製造工序中實際上不變形(實際上被看作剛體)程度的充分的剛性的構造部件。另外，主框體810和副框體830由金屬、耐熱性樹脂(例如，聚醯亞胺樹脂)形成，使得在熱衝壓加工時也維持足夠的剛性。在本實施方式中，使用由不銹鋼鋼板形成的主框體810和副框體830。 The main frame body 810 and the sub-frame body 830 are structural members having sufficient rigidity that are not actually deformed (actually regarded as a rigid body) in the manufacturing process of the solar cell panel. Further, the main frame body 810 and the sub-frame body 830 are formed of a metal or a heat resistant resin (for example, a polyimide resin) so as to maintain sufficient rigidity during hot stamping. In the present embodiment, the main frame body 810 and the sub-frame body 830 which are formed of a stainless steel plate are used.
另外，支承片820是柔性支承作為脆性部件的太陽能電池單元、玻璃板，保護其不受衝擊的具有可撓性的剛性低的支承部件。支承片820由即使在高溫下也具有足夠強度的氟樹脂片、纖維強化耐熱樹脂片或金屬薄板(例如，不銹鋼鋼板、銅板)等耐熱材料形成，使得即使反復熱衝壓加工也不會破損。另外，支承片820的厚度設定在耐久性和柔軟性兼得的範圍內。例如，在使用由以聚醯亞胺為母材的碳纖維強化塑料形成的支承片820的情況下，支承片820的板厚設定在0.05~1.5mm的範圍，更佳為0.5~1.0mm的範圍。 Further, the support piece 820 is a support member that flexibly supports a solar battery cell or a glass plate as a brittle member and protects it from impact and has low flexibility and flexibility. The support sheet 820 is formed of a heat-resistant material such as a fluororesin sheet, a fiber-reinforced heat-resistant resin sheet, or a metal thin plate (for example, a stainless steel plate or a copper plate) having sufficient strength even at a high temperature, so that it is not damaged even after repeated hot stamping. Further, the thickness of the support piece 820 is set within a range in which both durability and flexibility are achieved. For example, in the case of using the support sheet 820 formed of carbon fiber reinforced plastic having a polyimide material as a base material, the thickness of the support sheet 820 is set in the range of 0.05 to 1.5 mm, more preferably 0.5 to 1.0 mm. .
支承片820的周緣部捲繞於副框體830，例如通過粘接劑接 合。另外，支承片820在作用有很小的張力的狀態下與副框體830接合，使其不會撓曲。支承片820所接合的副框體830，以在其與主框體810之間夾著支承片820的方式利用螺栓等安裝於主框體810。由此，支承片820的形狀由主框體810和/或副框體830保持為大致平面狀。 The peripheral portion of the support piece 820 is wound around the sub-frame 830, for example, by an adhesive. Hehe. Further, the support piece 820 is joined to the sub-frame 830 in a state in which a small tension is applied so as not to be deflected. The sub-frame 830 to which the support piece 820 is joined is attached to the main frame body 810 by bolts or the like so as to sandwich the support piece 820 between the support piece 820 and the main frame body 810. Thereby, the shape of the support piece 820 is held in a substantially planar shape by the main frame body 810 and/or the sub-frame body 830.
在載板800中，支承片820的周緣部貼合於主框體810而失去可撓性，但面對中空部H的中央部維持可撓性。太陽能電池組件A配置在具有可撓性的支承片820的中央部之上，由支承片820彈性支承。另外，在通過搬入用輸送機200和搬出用輸送機500等輸送單元輸送載板800時，主框體810由輸送單元支承。因此，在輸送中不會對載置於載板800的太陽能電池組件A施加較強的衝擊，能夠防止輸送中的太陽能電池組件A的破損。 In the carrier 800, the peripheral edge portion of the support piece 820 is bonded to the main frame body 810 to lose flexibility, but the center portion of the hollow portion H is maintained in flexibility. The solar cell module A is disposed on the central portion of the flexible support piece 820, and is elastically supported by the support piece 820. In addition, when the carrier 800 is transported by the transport unit such as the carry-in conveyor 200 and the carry-out conveyor 500, the main casing 810 is supported by the transport unit. Therefore, a strong impact is not applied to the solar cell module A placed on the carrier 800 during transportation, and damage of the solar cell module A during transportation can be prevented.
另外，在本實施方式中，在配置於載板800上的太陽能電池組件A之上還載置保護片700(後述)，在使保護片700介於太陽能電池組件A與層壓裝置300的隔片350(後述)之間的狀態下，進行太陽能電池組件A的層疊衝壓。 Further, in the present embodiment, a protective sheet 700 (described later) is placed on the solar cell module A disposed on the carrier 800, and the protective sheet 700 is interposed between the solar cell module A and the laminating apparatus 300. In the state between the sheets 350 (described later), the laminated press of the solar cell module A is performed.
通過使用保護片700，防止在層疊加工中從太陽能電池組件A流出的樹脂粘接於隔片350，而導致層壓加工的品質下降。 By using the protective sheet 700, the resin flowing out of the solar cell module A in the lamination process is prevented from adhering to the separator 350, resulting in deterioration of the quality of the lamination process.
另外，存在隔片350在層疊衝壓中曝露於從太陽能電池組件A的樹脂產生的氣體中而劣化的問題。以下將這樣在層疊衝壓中從被加工件產生且具有加速隔片350的劣化的性質的氣體稱為「劣化加速性氣體」。保護片700對於防止劣化加速性氣體造成的隔片350的劣化同樣有效。 In addition, there is a problem that the separator 350 is exposed to the gas generated from the resin of the solar cell module A in the lamination press and deteriorates. Hereinafter, the gas which is generated from the workpiece and has the property of accelerating the deterioration of the spacer 350 in the lamination press is referred to as a "degradation accelerating gas". The protective sheet 700 is also effective for preventing deterioration of the spacer 350 caused by deterioration of the accelerating gas.
關於劣化加速性氣體，根據本發明者的研究表明，在熱衝壓加工時，從使用EVA(乙烯醋酸乙烯共聚物)樹脂作為密封材料的被加工 件產生與形成隔片350的矽橡膠發生反應使其變質(例如，進行交聯反應而導致可撓性、伸縮性喪失)的成分的氣體，這使隔片350顯著劣化。因此，特別是在使用矽橡膠製的隔片進行包含EVA樹脂的被加工件的層疊衝壓時的隔片350的劣化防止方面，保護片700是有效的。另外，在熱衝壓加工時從EVA以外的樹脂也產生例如包含於樹脂的有機溶劑等揮發成分、隨著樹脂的固化反應產生的酸等氣體，有可能加速由天然橡膠、合成橡膠或矽橡膠形成的隔片350的劣化。因此，即使在使用含有EVA以外的樹脂的被加工件、矽橡膠以外的材質的隔片350時，保護片700對於防止隔片350的劣化也同樣有效。 With regard to the deterioration accelerating gas, according to research by the inventors, it is shown that, in the hot stamping process, a process using EVA (ethylene vinyl acetate copolymer) resin as a sealing material is processed. The gas which generates a component which reacts with the ruthenium rubber forming the separator 350 to deteriorate (for example, undergoes a crosslinking reaction to cause flexibility and loss of stretchability) causes the separator 350 to be significantly deteriorated. Therefore, the protective sheet 700 is effective in preventing deterioration of the separator 350 at the time of lamination press processing of the workpiece including the EVA resin by using the separator made of ruthenium rubber. In addition, in the hot stamping process, a volatile component such as an organic solvent contained in the resin and an acid such as an acid generated by the curing reaction of the resin may be generated from the resin other than the EVA, and the alloy may be accelerated by natural rubber, synthetic rubber or ruthenium rubber. Deterioration of the spacer 350. Therefore, even when a workpiece including a resin other than EVA or a separator 350 made of a material other than ruthenium rubber is used, the protective sheet 700 is also effective for preventing deterioration of the separator 350.
圖3是保護片700的平面圖。保護片700包括大致矩形形狀的具有可撓性的片部710和矩形框狀的具有剛性的框架部720。保護片700由具有耐熱性的橡膠片等形成。框架部720安裝於片部710的周緣部，將片部710的形狀保持為大致平面狀。框架部720例如由鋼線、鎳鈦諾(nitinol)等形狀記憶合金的線材等形成。片部710的周緣部閉合為環狀，形成有沿著片部710的四邊延伸的中空部。框架部720穿過該中空部(圖6)。另外，片部710形成為比框架部720稍小。因此，通過在片部710安裝框架部，片部被擴展，使得片部710不產生鬆弛。另外，為了容易進行框架部720的插拔，在保護片700的周緣部設置有多個缺口部712。 FIG. 3 is a plan view of the protective sheet 700. The protective sheet 700 includes a flexible sheet portion 710 having a substantially rectangular shape and a rigid frame portion 720 having a rectangular frame shape. The protective sheet 700 is formed of a heat-resistant rubber sheet or the like. The frame portion 720 is attached to the peripheral portion of the sheet portion 710, and holds the shape of the sheet portion 710 in a substantially planar shape. The frame portion 720 is formed of, for example, a wire material of a shape memory alloy such as a steel wire or a nitinol. The peripheral portion of the sheet portion 710 is closed in a ring shape, and a hollow portion extending along the four sides of the sheet portion 710 is formed. The frame portion 720 passes through the hollow portion (Fig. 6). In addition, the sheet portion 710 is formed to be slightly smaller than the frame portion 720. Therefore, by mounting the frame portion on the sheet portion 710, the sheet portion is expanded, so that the sheet portion 710 does not cause slack. Moreover, in order to facilitate the insertion and removal of the frame portion 720, a plurality of notch portions 712 are provided in the peripheral portion of the protective sheet 700.
接著，對層壓裝置300的結構進行說明。圖4是層壓裝置300的側視圖。層壓裝置300具有用於輸送載置有太陽能電池組件A的載板800的一對輸送機310(圖中僅表示跟前側的一個)。一對輸送機310排列配置於層壓裝置300的寬度方向(圖4中與紙面垂直的方向)上。 Next, the structure of the laminating apparatus 300 will be described. 4 is a side view of the laminating apparatus 300. The laminating apparatus 300 has a pair of conveyors 310 (only one of the front sides is shown) for transporting the carrier 800 on which the solar cell modules A are placed. The pair of conveyors 310 are arranged side by side in the width direction of the laminating apparatus 300 (the direction perpendicular to the plane of the drawing in FIG. 4).
在一對輸送機310之間配置有固定於層壓裝置300的框架的固定模座320。在固定模座320的上方設置有可動模座330。可動模座330經由流體壓缸組件390支承於框架，通過流體壓缸組件390能夠在上下方向上驅動。在固定模座320之上配置載置有太陽能電池組件A的載板800，接著，使可動模座330下降，在可動模座330與固定模座320之間夾著太陽能電池組件A的狀態下，進行使用後述的隔片350的太陽能電池組件A的層疊衝壓。此外，以固定模座320的上表面整體收納於載板800的中空部H(圖2)內的方式設定固定模座320的水平方向的尺寸，使得固定模座320不與載板800的主框體810發生干涉。 A fixed die holder 320 fixed to the frame of the laminating apparatus 300 is disposed between the pair of conveyors 310. A movable die holder 330 is disposed above the fixed die holder 320. The movable die holder 330 is supported by the frame via the fluid cylinder assembly 390, and can be driven in the up and down direction by the fluid cylinder assembly 390. The carrier 800 on which the solar cell module A is placed is placed on the fixed die holder 320, and then the movable die holder 330 is lowered, and the solar cell module A is sandwiched between the movable die holder 330 and the fixed die holder 320. The lamination press of the solar cell module A using the separator 350 mentioned later is performed. Further, the horizontal dimension of the fixed die holder 320 is set such that the upper surface of the fixed die holder 320 is entirely housed in the hollow portion H (FIG. 2) of the carrier 800, so that the fixed die holder 320 does not overlap with the carrier 800. The frame 810 interferes.
另外，輸送機310通過未圖示的致動器能夠在上下方向上移動。在輸送機310輸送載置有太陽能電池組件A的載板800時，輸送機310的上表面310t向比固定模座320的上表面320t高的位置移動。因此，載板800和太陽能電池組件A不與固定模座320發生干涉地被輸送。另一方面，在進行太陽能電池組件A的層疊衝壓時，輸送機310的上表面310t向比固定模座320的上表面320t低的位置移動，成為在固定模座320的上表面320t直接載置有載板800的支承片820的狀態。這時，載板800的框部810成為借助支承片820從固定模座320的上表面320t垂下的狀態。 Further, the conveyor 310 can be moved in the vertical direction by an actuator (not shown). When the conveyor 310 transports the carrier 800 on which the solar cell module A is placed, the upper surface 310t of the conveyor 310 moves to a position higher than the upper surface 320t of the fixed die holder 320. Therefore, the carrier 800 and the solar cell module A are not interfered with the fixed die holder 320. On the other hand, when the laminated press of the solar cell module A is performed, the upper surface 310t of the conveyor 310 is moved to a position lower than the upper surface 320t of the fixed die holder 320, and is placed directly on the upper surface 320t of the fixed die holder 320. The state of the support piece 820 of the carrier 800 is provided. At this time, the frame portion 810 of the carrier 800 is suspended from the upper surface 320t of the fixed die holder 320 by the support piece 820.
圖5是處於設置好載置有太陽能電池組件A的載板800的狀態中的層壓裝置300的固定模座320和可動模座330的截面圖。另外，圖6是將圖5的局部(圖4中用虛線P包圍的部分)放大的局部放大圖。 FIG. 5 is a cross-sectional view of the fixed die holder 320 and the movable die rest 330 of the laminating apparatus 300 in a state in which the carrier 800 of the solar cell module A is placed. In addition, FIG. 6 is an enlarged partial view showing a part of FIG. 5 (a portion surrounded by a broken line P in FIG. 4).
如圖6所示，可動模座330包括可動模座主體331和安裝於可動模座主體331的下表面的框部340。框部340包括上部框體340A和下部框體 340B。在上部框體340A與下部框體340B之間夾入封閉框部340的開口的隔片350的周緣部。隔片350是具有伸縮性、氣密性和耐熱性的片狀部件，與上部框體340A和下部框體340B氣密地接合。由此，形成由隔片350、可動模座主體331和上部框體340A包圍的上部腔室UC。在可動模座主體331或上部框體340A設置有連接上部腔室UC和外部空間的通氣路(未圖示)，將上部腔室UC的內壓維持在大氣壓。 As shown in FIG. 6, the movable die holder 330 includes a movable die holder main body 331 and a frame portion 340 attached to a lower surface of the movable die rest main body 331. The frame portion 340 includes an upper frame 340A and a lower frame 340B. A peripheral portion of the spacer 350 that closes the opening of the frame portion 340 is interposed between the upper housing 340A and the lower housing 340B. The separator 350 is a sheet-like member having stretchability, airtightness, and heat resistance, and is hermetically joined to the upper casing 340A and the lower casing 340B. Thereby, the upper chamber UC surrounded by the spacer 350, the movable die holder main body 331 and the upper casing 340A is formed. The movable die holder main body 331 or the upper casing 340A is provided with a ventilation path (not shown) that connects the upper chamber UC and the external space, and maintains the internal pressure of the upper chamber UC at atmospheric pressure.
載板800和保護片700各自的水平方向尺寸(圖6中的左右方向和與紙面垂直的方向)比固定模座320大，在層疊衝壓時，載板800的支承片820和保護片700的片部710被氣密地夾入下部框體340B與固定模座320之間。由此，形成由可動模座330的隔片350和框部340和固定模座320包圍且密閉的下部腔室LC。 The horizontal dimension (the left-right direction in FIG. 6 and the direction perpendicular to the paper surface) of the carrier 800 and the protective sheet 700 are larger than the fixed die holder 320, and the support sheets 820 and the protective sheets 700 of the carrier 800 are laminated at the time of lamination stamping. The sheet portion 710 is hermetically sandwiched between the lower frame 340B and the fixed die holder 320. Thereby, the lower chamber LC surrounded by the spacer 350 of the movable die holder 330 and the frame portion 340 and the fixed die holder 320 is formed and sealed.
另外，在下部框體340B的下表面形成有在周向上延伸的環狀槽341，在該環狀槽341內嵌入有迫緊件(packing)341p。利用下端部從下部框體340B的下表面突出的迫緊件341p，確保下部框體340B與保護片700的抵接部的氣密。另外，在本實施方式中，載板800的支承片820使用密合性高的材料，因此不在固定模座320的上表面設置迫緊件，但是在支承片820使用密合性低的材料的情況下，也可以採用在固定模座320的上表面也設置有環狀槽和迫緊件的結構。 Further, an annular groove 341 extending in the circumferential direction is formed on the lower surface of the lower casing 340B, and a packing 341p is fitted into the annular groove 341. The airtightness of the abutting portion of the lower casing 340B and the protective sheet 700 is ensured by the pressing member 341p that protrudes from the lower surface of the lower casing 340B at the lower end portion. Further, in the present embodiment, since the support piece 820 of the carrier 800 is made of a material having high adhesion, the pressing member is not provided on the upper surface of the fixed die holder 320, but a material having low adhesion is used for the support piece 820. In this case, a structure in which an annular groove and a pressing member are also provided on the upper surface of the fixed die holder 320 may be employed.
在固定模座320安裝有未圖示的電熱加熱器，將固定模座320的衝壓面320p維持在太陽能電池組件A的成形溫度(填充材料的固化溫度)。通過在由電熱加熱器加熱的固定模座320的衝壓面320p上配置太陽能電池組件A，將太陽能電池組件A加熱至成形溫度。此外，衝壓面320p是設 置於固定模座320的上表面320t的中央部的平坦面，配置於衝壓面320p上的太陽能電池組件A由衝壓面320p和隔片350夾著，進行熱衝壓加工。 An electrothermal heater (not shown) is attached to the fixed die holder 320 to maintain the pressing surface 320p of the fixed die holder 320 at the molding temperature of the solar cell module A (the curing temperature of the filler). The solar cell module A is heated to a forming temperature by arranging the solar cell module A on the punching surface 320p of the fixed die holder 320 heated by the electric heater. In addition, the stamping surface 320p is designed The solar cell module A placed on the press surface 320p is placed on the flat surface of the central portion of the upper surface 320t of the fixed die holder 320, and is sandwiched between the press surface 320p and the spacer 350, and is subjected to hot stamping.
另外，在固定模座320設置有連接上表面320t的周緣部(衝壓面320p的周圍)和側面320sa、320sb的多個供氣通路323和排氣通路324(圖6僅表示一個)。在設置於固定模座320的側面320sa、320sb的供氣通路323和排氣通路324的開口323a和324a，連接有後述的壓力控制系統S，能夠對下部腔室LC內的氣壓進行加壓和減壓。當通過壓力控制系統S對下部腔室LC內進行抽真空時，由隔片350隔開的上部腔室UC與下部腔室LC之間產生內壓差，其結果是，隔片350向內壓低的下部腔室LC側膨脹，在隔片350與固定模座320的上表面320t之間太陽能電池組件A被熱衝壓加工，進行層壓加工。 Further, the fixed die holder 320 is provided with a plurality of air supply passages 323 and exhaust passages 324 (only one is shown in FIG. 6) that connect the peripheral portion (the periphery of the pressing surface 320p) of the upper surface 320t and the side surfaces 320sa and 320sb. The air supply passage 323 provided in the side faces 320sa and 320sb of the fixed die holder 320 and the openings 323a and 324a of the exhaust passage 324 are connected to a pressure control system S to be described later, and can pressurize the air pressure in the lower chamber LC. stress reliever. When the lower chamber LC is evacuated by the pressure control system S, an internal pressure difference is generated between the upper chamber UC and the lower chamber LC separated by the spacer 350, and as a result, the spacer 350 is depressed inwardly. The lower chamber LC side is expanded, and the solar cell module A is hot-stamped between the separator 350 and the upper surface 320t of the fixed die holder 320 to be laminated.
接著，對壓力控制系統S進行說明。圖7是與壓力控制系統S連接的固定模座320的平面圖。壓力控制系統S包括：向下部腔室LC內供給外氣的供氣管路360；從下部腔室LC內排出空氣(抽真空)的真空泵374；連接真空泵374和下部腔室LC的排氣管路370；檢測上部腔室UC和下部腔室LC的內壓的壓力計(未圖示)；和通過控制真空泵374等的動作，對上部腔室UC與下部腔室LC的內壓差進行控制的壓力控制裝置375。 Next, the pressure control system S will be described. Figure 7 is a plan view of a fixed die holder 320 coupled to a pressure control system S. The pressure control system S includes: a supply line 360 for supplying external air into the lower chamber LC; a vacuum pump 374 for discharging air (vacuum) from the lower chamber LC; and an exhaust line connecting the vacuum pump 374 and the lower chamber LC a pressure gauge (not shown) for detecting the internal pressure of the upper chamber UC and the lower chamber LC; and controlling the internal pressure difference between the upper chamber UC and the lower chamber LC by controlling the operation of the vacuum pump 374 or the like Pressure control device 375.
排氣管路370包括：一端與真空泵374連接的主管371(371a、371b、371c)；和將設置於固定模座320的多個排氣通路324和主管371連接的多個分支管372a、372b。 The exhaust line 370 includes a main pipe 371 (371a, 371b, 371c) whose one end is connected to the vacuum pump 374; and a plurality of branch pipes 372a, 372b that connect the plurality of exhaust passages 324 provided in the fixed die holder 320 and the main pipe 371. .
主管371包括：一端與真空泵374連接的中繼部371c；和沿著固定模座320的周緣部延伸的大致字狀的配管部(371a、371b)。中繼部 371c的另一端與配管部(371a、371b)的大致中央連接。換言之，主管371在固定模座320側分支為兩個配管部371a、371b。另外，在主管371的中途設置有能夠進行開閉和流量調節的電磁閥373。 The main pipe 371 includes a relay portion 371c whose one end is connected to the vacuum pump 374, and a substantially extended portion along the peripheral portion of the fixed die holder 320. Word-shaped piping parts (371a, 371b). The other end of the relay portion 371c is connected to substantially the center of the pipe portions (371a, 371b). In other words, the main pipe 371 branches into the two pipe portions 371a, 371b on the fixed die holder 320 side. Further, a solenoid valve 373 capable of opening and closing and flow rate adjustment is provided in the middle of the main pipe 371.
配管部371a經由多個(本實施方式中為4個)分支管372a，與在固定模座320的側面320sa(圖7中的上側的側面)開口的多個排氣通路324連接。同樣，配管部371b經由多個分支管372b，與在固定模座320的另一側面320sb(側面320sa的下側的側面)開口的多個排氣通路324連接。 The piping portion 371a is connected to a plurality of exhaust passages 324 that are open to the side surface 320sa (the upper side surface in FIG. 7) of the fixed die holder 320 via a plurality of (four in the present embodiment) branch pipes 372a. Similarly, the piping portion 371b is connected to the plurality of exhaust passages 324 that are open on the other side surface 320sb of the fixed die holder 320 (the side surface on the lower side of the side surface 320sa) via the plurality of branch pipes 372b.
供氣管路360包括：主管361(361a、361b、361c)；和將設置於固定模座320的多個供氣通路323和主管361連接的多個分支管362a、362b。 The gas supply line 360 includes a main pipe 361 (361a, 361b, 361c); and a plurality of branch pipes 362a, 362b that connect the plurality of gas supply passages 323 provided in the fixed die holder 320 and the main pipe 361.
主管361包括中繼部361c和沿著固定模座320的周緣部延伸的大致字狀的配管部(361a、361b)。中繼部361c的一端經由消聲器364向大氣開放，另一端與配管部(361a、361b)的大致中央連接。換言之，主管361在固定模座320側分支為兩個配管部361a、361b。另外，在中繼部361c的中途設置有能夠開閉和流量調節的電磁閥363。 The main pipe 361 includes a relay portion 361c and a rough portion extending along a peripheral portion of the fixed die holder 320. Word-shaped piping parts (361a, 361b). One end of the relay portion 361c is open to the atmosphere via the muffler 364, and the other end is connected to substantially the center of the pipe portions (361a, 361b). In other words, the main pipe 361 branches into the two pipe portions 361a, 361b on the fixed die holder 320 side. Further, a solenoid valve 363 capable of opening and closing and flow rate adjustment is provided in the middle of the relay portion 361c.
配管部361a經由多個(本實施方式中為2個)分支管362a，與在固定模座320的側面320sa開口的多個供氣通路323連接。同樣，配管部361b經由多個分支管362b，與在固定模座320的側面320sb開口的多個供氣通路323連接。 The piping portion 361a is connected to a plurality of air supply passages 323 that are open at the side surface 320sa of the fixed die holder 320 via a plurality of (two in the present embodiment) branch pipes 362a. Similarly, the piping portion 361b is connected to the plurality of air supply passages 323 that are open at the side surface 320sb of the fixed die holder 320 via the plurality of branch pipes 362b.
此外，電磁閥363和373與壓力控制裝置375可通信地連接，在壓力控制裝置375的控制下進行動作。下部腔室LC的內壓通過電磁閥363和373的開度來調整。例如，在將下部腔室LC內抽真空進行層疊衝壓時，在 關閉供氣管路360的電磁閥363成為阻斷外氣的狀態後，使真空泵374動作，逐漸打開排氣管路370的電磁閥373。另外，在使下部腔室LC內恢復為大氣壓，進行太陽能電池組件A的搬入/搬出時，在關閉排氣管路370的電磁閥373後，逐漸打開供氣管路360的電磁閥363。 Further, the solenoid valves 363 and 373 are communicably coupled to the pressure control device 375 and operate under the control of the pressure control device 375. The internal pressure of the lower chamber LC is adjusted by the opening degrees of the solenoid valves 363 and 373. For example, when vacuuming the lower chamber LC to perform lamination stamping, When the electromagnetic valve 363 of the air supply line 360 is closed and the outside air is blocked, the vacuum pump 374 is operated to gradually open the electromagnetic valve 373 of the exhaust line 370. In addition, when the inside of the lower chamber LC is returned to the atmospheric pressure and the solar battery module A is carried in and out, the electromagnetic valve 373 of the air supply line 360 is gradually opened after the electromagnetic valve 373 of the exhaust line 370 is closed.
如上所述，在本實施方式中，除了用於排出下部腔室LC內的空氣的排氣管路370之外，還設置有用於向下部腔室LC內導入外氣的供氣管路360。根據該結構，能夠防止從下部腔室LC一度排出的排出氣體向下部腔室LC內逆流。在從下部腔室LC排出的排出氣體中含有從被加熱的太陽能電池組件A的粘接材料(密封材料)等散出的有機溶劑等的揮發成分、過氧化物、酸等加速隔片350的劣化的各種成分的氣體(劣化加速性氣體)。像本實施方式的那樣，設置排氣專用的管路，使得殘留於管路內的劣化加速性氣體不向下部腔室LC逆流，由此防止下部腔室LC內的劣化加速性氣體的濃度增高、隔片350的壽命縮短，能夠減少隔片350的更換等的維修成本。 As described above, in the present embodiment, in addition to the exhaust line 370 for discharging the air in the lower chamber LC, an air supply line 360 for introducing the outside air into the lower chamber LC is provided. According to this configuration, it is possible to prevent the exhaust gas that is once discharged from the lower chamber LC from flowing back into the lower chamber LC. The exhaust gas discharged from the lower chamber LC contains a volatile component such as an organic solvent or the like, and an acceleration spacer 350 such as a peroxide or an acid, which is emitted from an adhesive material (sealing material) of the heated solar cell module A or the like. Degraded gas of various components (degradation accelerating gas). As in the present embodiment, a duct dedicated to exhaust gas is provided so that the deteriorated accelerating gas remaining in the duct does not flow back to the lower chamber LC, thereby preventing deterioration of the concentration of the accelerating gas in the lower chamber LC. The life of the spacer 350 is shortened, and the maintenance cost of the replacement of the spacer 350 can be reduced.
另外，在本實施方式中，與供氣管路360連接的供氣通路323與下部腔室LC的長度方向的一端側(圖7的右側)連接，與排氣管路370連接的排氣通路324與下部腔室LC的長度方向的另一端側(圖7的左側)連接。根據該結構，下部腔室LC內的吸氣排氣時的空氣的流動被固定於一個方向(圖7中的從右側向左側去的方向)，因此，能夠高效地排出下部腔室LC內的劣化加速性氣體。 Further, in the present embodiment, the air supply passage 323 connected to the air supply line 360 is connected to one end side (the right side in FIG. 7) of the lower chamber LC in the longitudinal direction, and the exhaust passage 324 connected to the exhaust line 370. It is connected to the other end side (the left side of FIG. 7) in the longitudinal direction of the lower chamber LC. According to this configuration, the flow of the air at the time of the intake and exhaust in the lower chamber LC is fixed in one direction (the direction from the right side to the left side in FIG. 7), and therefore, the inside of the lower chamber LC can be efficiently discharged. Degradation of the accelerating gas.
如圖6所示，保護片700的片部710和載板800的支承片820，在與設置於固定模座320的上表面320t的供氣通路323和排氣通路324的開口323b和324b相對的位置，分別設置有通氣孔714和824，使得不會阻礙經由 供氣通路323和排氣通路324的空氣的移動。 As shown in FIG. 6, the sheet portion 710 of the protective sheet 700 and the support sheet 820 of the carrier sheet 800 are opposed to the openings 323b and 324b of the air supply passage 323 and the exhaust passage 324 provided on the upper surface 320t of the fixed die holder 320. Positions are provided with vents 714 and 824, respectively, so as not to hinder via The movement of the air in the air supply passage 323 and the exhaust passage 324.
另外，在下部框體340B的內周設置有以覆蓋供氣通路323和排氣通路324的開口323b和324b的方式向內側突出的遮蔽突起343。通過設置遮蔽突起343，從供氣通路323和排氣通路324向下部腔室LC內噴出的氣流直接衝撞隔片350導致隔片350激烈振動，結果隔片350與太陽能電池組件A、可動模座主體331發生碰撞的問題不會發生。此外，在下部框體340B的下表面設置有臺階344，遮蔽突起343的下表面形成於比片部710的上表面高的位置。由此，在遮蔽突起343與片部710之間確保間隙。經由該間隙，能夠進行下部腔室LC的吸氣排氣。另外，遮蔽突起343與片部710之間的間隙遍及下部框體340B的整周地設置。因此，吸氣排氣的氣流不會集中在供氣通路323的開口323b、排氣通路324的開口324b附近，而分散在間隙整周，因此，在下部腔室LC內產生較強的氣流導致隔片350、保護片700的片部710振動，使得層壓加工的品質下降的問題不會發生。 Further, on the inner circumference of the lower casing 340B, a shielding protrusion 343 that protrudes inward so as to cover the openings 323b and 324b of the air supply passage 323 and the exhaust passage 324 is provided. By providing the shielding protrusions 343, the airflow ejected from the air supply passage 323 and the exhaust passage 324 to the lower chamber LC directly collides against the spacer 350, causing the spacer 350 to vibrate violently, and as a result, the spacer 350 and the solar battery module A and the movable mold base The problem of collision of the main body 331 does not occur. Further, a step 344 is provided on the lower surface of the lower casing 340B, and the lower surface of the shielding protrusion 343 is formed at a position higher than the upper surface of the sheet portion 710. Thereby, a gap is secured between the shielding protrusion 343 and the sheet portion 710. Through this gap, the intake and exhaust of the lower chamber LC can be performed. Further, a gap between the shielding protrusion 343 and the sheet portion 710 is provided over the entire circumference of the lower housing 340B. Therefore, the airflow of the intake air exhaust gas is not concentrated in the vicinity of the opening 323b of the air supply passage 323 and the opening 324b of the exhaust passage 324, but is dispersed throughout the gap, thereby generating a strong airflow in the lower chamber LC. The spacer 350 and the sheet portion 710 of the protective sheet 700 vibrate, so that the problem of deterioration in the quality of the lamination processing does not occur.
另外，供氣通路323的開口323b和排氣通路324的開口324b各自等間隔地設置，使得吸氣排氣時的氣流更均勻。 Further, the opening 323b of the air supply passage 323 and the opening 324b of the exhaust passage 324 are each provided at equal intervals so that the airflow at the time of intake and exhaust is more uniform.
另外，如圖7所示，與分支管362a(372a)連接的供氣通路323(排氣通路324)的開口323b(開口324b)和與分支管362b(372b)連接的供氣通路323(排氣通路324)的開口323b(324b)設置於相對的位置，因此在吸氣排氣時下部腔室LC內的氣流不紊亂，能夠高效地排出下部腔室LC內的氣體。 Further, as shown in Fig. 7, an opening 323b (opening 324b) of the air supply passage 323 (exhaust passage 324) connected to the branch pipe 362a (372a) and an air supply passage 323 (row) connected to the branch pipe 362b (372b) The opening 323b (324b) of the gas passage 324) is disposed at the opposite position, so that the airflow in the lower chamber LC is not disturbed during the intake and exhaust, and the gas in the lower chamber LC can be efficiently discharged.
另外，如圖6所示，上部框體340A的下表面的內周側和下部框體340B的上表面的內周側成為緩和的錐面或曲率小的曲面。因此，即使 隔片350沿著上部框體340A或下部框體340B的表面彎曲，在隔片350也不產生大的變形，能夠防止隔片350的應力集中導致的劣化。 Moreover, as shown in FIG. 6, the inner peripheral side of the lower surface of the upper frame 340A and the inner peripheral side of the upper surface of the lower frame 340B are a gentle curved surface or a curved surface with a small curvature. So even The spacer 350 is curved along the surface of the upper housing 340A or the lower housing 340B, and does not cause large deformation in the spacer 350, and deterioration due to stress concentration of the spacer 350 can be prevented.
另外，保護片700配置於載板800的副框體830的內側的空間(中空部)，但副框體830的內寬(內側側面的間隔)形成為比保護片700的寬度(框架部720的外寬)稍寬。因此，保護片700的水平方向的位置由載板800的副框體830限制(定位)。另外，載板800的副框體830也作為將保護片700引導至規定位置的引導件發揮功能。因此，容易將保護片700正確地配置在規定位置。 Further, the protective sheet 700 is disposed in a space (hollow portion) inside the sub-frame 830 of the carrier 800, but the inner width (interval of the inner side surface) of the sub-frame 830 is formed to be wider than the width of the protective sheet 700 (the frame portion 720) The outer width is slightly wider. Therefore, the position of the protective sheet 700 in the horizontal direction is restricted (positioned) by the sub-frame 830 of the carrier 800. Further, the sub-frame 830 of the carrier 800 also functions as a guide for guiding the protective sheet 700 to a predetermined position. Therefore, it is easy to arrange the protective sheet 700 correctly at a predetermined position.
如上所述，保護片700不安裝於層壓裝置300，另外，保護片700的框架部720容易相對於片部710容易地裝卸。因此，即使由於從被加工件流出的樹脂附著於片部710或片部710由於從被加工件產生的劣化加速性氣體而劣化，也能夠容易地更換片部710。另外，將片部710設置為一次性部件，在每次層疊衝壓時更換片部710，能夠防止片部710的劣化和污染造成的層疊衝壓的不良情況。 As described above, the protective sheet 700 is not attached to the laminating apparatus 300, and the frame portion 720 of the protective sheet 700 is easily detachably attached to the sheet portion 710. Therefore, even if the resin flowing out from the workpiece is attached to the sheet portion 710 or the sheet portion 710 is deteriorated by the deterioration accelerating gas generated from the workpiece, the sheet portion 710 can be easily replaced. Further, the sheet portion 710 is provided as a disposable member, and the sheet portion 710 is replaced every time the press-stack is laminated, and it is possible to prevent the deterioration of the sheet portion 710 and the trouble of the lamination press due to contamination.
在以上說明的本發明的第一實施方式中，因為在保護片700形成有通氣孔714，所以保護片700的兩側的空間(即，下部腔室LC整體)相互連通。因此，具有經由設置於固定模座320的供氣通路323和排氣通路324，能夠在下部腔室LC整體同時進行吸氣排氣的優點。另一方面，因為配置太陽能電池組件A的空間(即，劣化加速性氣體產生的空間)和隔片350所露出的空間經由通氣孔714連接，所以從太陽能電池組件A產生的劣化加速性氣體有可能到達隔片350，不能完全防止隔片350的劣化。以下說明的本發明第二實施方式沒有保護片700的通氣孔714，由此能夠進一步可靠地 防止隔片350的劣化。 In the first embodiment of the present invention described above, since the vent hole 714 is formed in the protective sheet 700, the spaces on both sides of the protective sheet 700 (that is, the entire lower chamber LC) communicate with each other. Therefore, there is an advantage that the intake air venting can be simultaneously performed in the entire lower chamber LC via the air supply passage 323 and the exhaust passage 324 provided in the fixed die holder 320. On the other hand, since the space in which the solar cell module A is disposed (that is, the space in which the accelerated acceleration gas is generated) and the space in which the spacer 350 is exposed are connected via the vent hole 714, the deterioration accelerating gas generated from the solar cell module A is It is possible to reach the spacer 350, and the deterioration of the spacer 350 cannot be completely prevented. The second embodiment of the present invention described below does not have the vent hole 714 of the protective sheet 700, thereby enabling further reliable Deterioration of the spacer 350 is prevented.
[第二實施方式] [Second Embodiment]
圖8是將本發明第二實施方式的層壓裝置300A的固定模座320和可動模座330的截面的局部放大的圖(相當於第一實施方式的圖6的圖)。此外，在以下的第二實施方式的說明中，以與第一實施方式的不同點為中心進行說明。另外，對與第一實施方式相同或類似的構成部件使用相同或類似的附圖標記，省略重複的說明。 FIG. 8 is a partially enlarged view showing a cross section of the fixed die holder 320 and the movable die holder 330 of the laminating apparatus 300A according to the second embodiment of the present invention (corresponding to the view of FIG. 6 of the first embodiment). In the following description of the second embodiment, the differences from the first embodiment will be mainly described. In the same or similar components as those in the first embodiment, the same or similar reference numerals are used, and the overlapping description will be omitted.
在第二實施方式中，不在保護片700的片部710設置通氣孔714(圖6)。因此，下部腔室LC由片部710氣密地分隔為第一部分LC1(可動模座330側)和第二部分LC2(固定模座320側)。即，第一部分LC1被片部710從設置於固定模座320的供氣通路323和排氣通路324阻斷，因此，不能經由供氣通路323和排氣通路324進行第一部分LC1的吸氣排氣。因此，在本實施方式的層壓裝置300A中，替代第一實施方式的下部框體340B，使用設置有用於進行下部腔室LC的第一部分LC1的吸氣排氣的供氣通路345s和排氣通路345e(圖9)的真空框340C。 In the second embodiment, the vent hole 714 (FIG. 6) is not provided in the sheet portion 710 of the protective sheet 700. Therefore, the lower chamber LC is hermetically divided by the sheet portion 710 into the first portion LC1 (the movable mold base 330 side) and the second portion LC2 (the fixed mold base 320 side). That is, the first portion LC1 is blocked by the sheet portion 710 from the air supply passage 323 and the exhaust passage 324 provided in the fixed die holder 320, and therefore, the intake portion of the first portion LC1 cannot be performed via the air supply passage 323 and the exhaust passage 324. gas. Therefore, in the laminating apparatus 300A of the present embodiment, in place of the lower casing 340B of the first embodiment, the air supply passage 345s and the exhaust gas provided with the intake air for performing the first portion LC1 of the lower chamber LC are used. Vacuum box 340C of passage 345e (Fig. 9).
圖9和圖10分別是本發明的第二實施方式的真空框340C的橫截面圖和平面圖。 9 and 10 are a cross-sectional view and a plan view, respectively, of a vacuum frame 340C of a second embodiment of the present invention.
如圖9所示，真空框340C包括矩形框狀的上部件340i、下部件340j和迫緊件346p。上部件340i和下部件340j上下重疊，其接合部由環狀的迫緊件346p密封。在真空框340C內設置有在延長方向上延伸的供氣通路345s和排氣通路345e。供氣通路345s和排氣通路345e是由上部件340i和下部件340j包圍而形成的中空部。供氣通路345s形成於真空框340C的一端側(圖 10的右端側)，在真空框340C餘下的部分形成有排氣通路345e。具體而言，供氣通路345s形成於矩形框狀的真空框340C的一邊(和與其鄰接的二邊的附近部分)，排氣通路345e形成於其它三邊(與形成有供氣通路345s的一邊相對的一邊和其它二邊的大部分)。供氣通路345s和排氣通路345e由兩個分隔壁345w(圖10)隔斷。 As shown in FIG. 9, the vacuum frame 340C includes a rectangular frame-shaped upper member 340i, a lower member 340j, and a pressing member 346p. The upper member 340i and the lower member 340j overlap one another, and the joint portion thereof is sealed by an annular pressing member 346p. An air supply passage 345s and an exhaust passage 345e extending in the extension direction are provided in the vacuum frame 340C. The air supply passage 345s and the exhaust passage 345e are hollow portions formed by the upper member 340i and the lower member 340j. The gas supply passage 345s is formed on one end side of the vacuum frame 340C (Fig. The right end side of 10) has an exhaust passage 345e formed in the remaining portion of the vacuum frame 340C. Specifically, the air supply passage 345s is formed on one side of the rectangular frame-shaped vacuum frame 340C (and the vicinity of the two adjacent sides), and the exhaust passage 345e is formed on the other three sides (the side on which the air supply passage 345s is formed) The opposite side and most of the other two sides). The air supply passage 345s and the exhaust passage 345e are partitioned by two partition walls 345w (Fig. 10).
另外，在比供氣通路345s和排氣通路345e更靠內周側的位置，上部件340i和下部件340j接近且相對，在其間形成有分別將供氣通路345s以及排氣通路345e與下部腔室LC的第一部分LC1連接的供氣隙縫349s和排氣隙縫349e。供氣隙縫349s和排氣隙縫349e分別遍及供氣通路345s和排氣通路345e的大致全長地形成。 Further, at a position closer to the inner peripheral side than the air supply passage 345s and the exhaust passage 345e, the upper member 340i and the lower member 340j are close to each other, and the air supply passage 345s and the exhaust passage 345e and the lower chamber are formed therebetween. The first portion LC1 of the chamber LC is connected to an air supply slit 349s and an exhaust slit 349e. The air supply slit 349s and the exhaust slit 349e are formed over substantially the entire length of the air supply passage 345s and the exhaust passage 345e, respectively.
另外，在矩形框狀的真空框340C的相對的二個邊分別形成有將供氣通路345s以及排氣通路345e與真空框340C的外周面分別連接的供氣孔347s和排氣孔347e。供氣孔347s和排氣孔347e分別與供氣通路345s和排氣通路345e的延長方向中央連接。供氣孔347s和排氣孔347e分別在一端部(真空框340C的外周面附近)被擴徑，形成有錐螺紋348s和348e。錐螺紋348s和348e分別與供氣管路360和排氣管路370連接。因此，與經由設置於固定模座320的供氣通路323和排氣通路324的下部腔室LC的第二部分LC2的吸氣排氣連動，進行經由設置於真空框340C的供氣通路345s和排氣通路345e的下部腔室LC的第一部分LC1的吸氣排氣。另外，根據該結構，由保護片700的片部710分隔的下部腔室LC的第一部分LC1和第二部分LC2的內壓總是為一定值，不對片部710施加內壓差。 Further, an air supply hole 347s and an exhaust hole 347e that respectively connect the air supply passage 345s and the exhaust passage 345e and the outer peripheral surface of the vacuum frame 340C are formed on the opposite sides of the rectangular frame-shaped vacuum frame 340C. The air supply hole 347s and the air discharge hole 347e are respectively connected to the center in the extension direction of the air supply passage 345s and the exhaust passage 345e. The air supply hole 347s and the air discharge hole 347e are respectively expanded in diameter at one end portion (near the outer circumferential surface of the vacuum frame 340C), and taper threads 348s and 348e are formed. The taper threads 348s and 348e are connected to the air supply line 360 and the exhaust line 370, respectively. Therefore, the gas supply passage 345s provided through the vacuum frame 340C and the intake air passing through the second portion LC2 of the lower chamber LC of the air supply passage 323 and the exhaust passage 324 provided in the fixed die holder 320 are performed. The intake exhaust of the first portion LC1 of the lower chamber LC of the exhaust passage 345e. Further, according to this configuration, the internal pressures of the first portion LC1 and the second portion LC2 of the lower chamber LC separated by the sheet portion 710 of the protective sheet 700 are always constant, and no internal pressure difference is applied to the sheet portion 710.
供氣隙縫349s和排氣隙縫349e遍及全長將截面尺寸(圖9所 示的橫截面的尺寸)形成為一定，使得壓力損失在延長方向上大致均勻。另外，經由截面積大壓力損失小的供氣通路345s和排氣通路345e以及截面積小(即比供氣通路345s和排氣通路345e薄)壓力損失大的供氣隙縫349s和排氣隙縫349e，進行下部腔室LC的第一部分LC1內的空氣的供給和排出。因此，從供氣隙縫349s和排氣隙縫349e的周方向全長大致均勻且緩慢地進行對下部腔室LC的第一部分LC1的空氣的供給和排出。 The air supply slit 349s and the exhaust slit 349e have the cross-sectional dimensions throughout the entire length (Fig. 9 The dimensions of the cross section shown are formed to be such that the pressure loss is substantially uniform in the direction of elongation. In addition, the air supply passage 345s and the exhaust passage 345e having a large pressure loss with a large cross-sectional area and the air supply slit 349s and the exhaust slit 349e having a large pressure loss (ie, thinner than the air supply passage 345s and the exhaust passage 345e) are large. The supply and discharge of air in the first portion LC1 of the lower chamber LC is performed. Therefore, supply and discharge of air to the first portion LC1 of the lower chamber LC are performed substantially uniformly and slowly from the circumferential direction of the air supply slit 349s and the exhaust slit 349e.
以上是本發明較佳的實施方式的說明。但是，本發明實施方式的具體方式不限於上述的方式，在由申請專利範圍的記載表示的技術思想的範圍內能夠進行各種變形。 The above is a description of preferred embodiments of the invention. However, the specific embodiments of the present invention are not limited to the above-described embodiments, and various modifications can be made without departing from the spirit and scope of the invention.
例如，在上述實施方式的層壓裝置中，構成為被加工件配置於下部腔室LC，但也可以構成為被加工件配置於上部腔室UC。該情況下，隔片固定於下部腔室LC，上部腔室UC構成為能夠打開和關閉。被加工件例如隔著載板800的支承片820配置於隔片上，在被加工件與可動模座主體331之間配置保護片700的片部710。另外，各腔室的內壓控制與上述實施方式的控制上下顛倒。即，在將下部腔室LC的內壓保持為大氣壓的狀態下使上部腔室UC的內壓為負壓，由此隔片向上部腔室UC側膨脹，被加工件在上部腔室UC的頂面與隔片之間被熱衝壓加工。 For example, in the laminating apparatus of the above-described embodiment, the workpiece is disposed in the lower chamber LC, but the workpiece may be disposed in the upper chamber UC. In this case, the spacer is fixed to the lower chamber LC, and the upper chamber UC is configured to be able to open and close. The workpiece is placed on the spacer, for example, via the support piece 820 of the carrier 800, and the sheet portion 710 of the protective sheet 700 is disposed between the workpiece and the movable die holder main body 331. Further, the internal pressure control of each chamber is reversed from the control of the above embodiment. That is, the internal pressure of the upper chamber UC is made to be a negative pressure while the internal pressure of the lower chamber LC is maintained at atmospheric pressure, whereby the separator is expanded toward the upper chamber UC side, and the workpiece is in the upper chamber UC. The top surface and the spacer are hot stamped.
另外，在上述實施方式的層壓裝置中，採用下部腔室LC支承於固定模座、上部腔室UC支承於可動模座的結構，但也可以設置為使下部腔室LC支承於可動模座、使上部腔室UC支承於固定模座的結構。該情況下，固定模座配置於可動模座的上方。或者，也可以設置為使兩腔室支承於上下一對可動模座的結構。 Further, in the laminating apparatus of the above-described embodiment, the lower chamber LC is supported by the fixed mold base, and the upper chamber UC is supported by the movable mold base. However, the lower chamber LC may be supported by the movable mold base. The structure that supports the upper chamber UC to the fixed mold base. In this case, the fixed die holder is disposed above the movable die holder. Alternatively, a configuration may be adopted in which the two chambers are supported by the pair of upper and lower movable mold bases.
另外，在上述各實施方式中，採用通過利用電熱加熱器加熱載置被加工件的固定模座320，由此將被加工件加熱至加工溫度(成形溫度)的結構，但也可以採用使用其它的加熱單元對熱模座進行加熱的結構。例如，也可以採用如國際公開第2006/103868號中所公開的、通過在形成於固定模座的流路流過矽油等的熱介質，對固定模座均勻加熱的結構。另外，也可以採用對收納有產品的下部腔室LC導入由電熱加熱器等加熱後的空氣的方法、利用遠紅外線或微波直接加熱被加工件的方法。另外，也可以採用利用遠紅外線輻射材料對固定模座320的載置有被加工件的面進行塗層，利用電熱加熱器等對固定模座320進行加熱的結構。根據該結構，除了進行固定模座320和被加工件接觸的加熱之外，還進行遠紅外線的遠距離加熱，因此能夠更有效且均勻地進行被加工件的加熱，縮短層疊衝壓的加工時間。 Further, in each of the above-described embodiments, the fixed mold base 320 on which the workpiece is placed is heated by the electrothermal heater, whereby the workpiece is heated to the processing temperature (forming temperature), but other processing may be employed. The heating unit heats the hot mold base. For example, a structure in which a fixed mold base is uniformly heated by flowing a heat medium such as eucalyptus oil in a flow path formed in a fixed mold base as disclosed in International Publication No. 2006/103868 may be employed. Further, a method of introducing air heated by an electric heater or the like into the lower chamber LC in which the product is housed, or a method of directly heating the workpiece by far infrared rays or microwaves may be employed. Further, a configuration in which the surface of the fixed die holder 320 on which the workpiece is placed is coated with a far-infrared radiation material, and the fixed die holder 320 is heated by an electric heater or the like may be employed. According to this configuration, in addition to the heating in which the fixed die holder 320 and the workpiece are in contact with each other, the far-infrared heating is performed at a long distance, so that the workpiece can be heated more efficiently and uniformly, and the processing time of the lamination press can be shortened.
另外，在上述的各實施方式中，使用矩形框狀的框部340，但也能夠使用其它形狀(例如圓筒狀、多角筒狀)的框部。另外，也能夠使載板800和保護片700的形狀為其它形狀(例如圓板狀)。 Further, in each of the above-described embodiments, the frame portion 340 having a rectangular frame shape is used, but a frame portion having another shape (for example, a cylindrical shape or a polygonal cylindrical shape) may be used. Further, the shape of the carrier 800 and the protective sheet 700 can be made into other shapes (for example, a disk shape).
另外，上述實施方式採用使上部腔室UC總是向大氣開放，使下部腔室LC的內壓在大氣壓與真空之間變化，由此進行熱衝壓加工的結構，但本發明不限定於這種結構。例如，在設置於可動模座主體331或上部框體340A的通氣路上連接壓縮器等供給壓縮空氣的裝置，能夠使上部腔室UC的內壓被加壓至大氣壓以上的結構也包含於本發明。 Further, in the above-described embodiment, the upper chamber UC is always opened to the atmosphere, and the internal pressure of the lower chamber LC is changed between atmospheric pressure and vacuum to perform hot stamping. However, the present invention is not limited to this. structure. For example, a device that supplies compressed air such as a compressor to a ventilation passage provided on the movable die holder main body 331 or the upper casing 340A can be configured to pressurize the internal pressure of the upper chamber UC to an atmospheric pressure or higher. .
另外，也可以採用使下部腔室LC為總是向大氣開放的狀態，將上部腔室UC的內壓加壓為正壓，由此進行衝壓的結構。該情況下， 在向設置於可動模座主體331或上部框體340A的下部腔室LC供給外氣的通氣路上，連接壓縮器等供給壓縮空氣的裝置。另外，也可以採用上部腔室UC和下部腔室LC的任一個的內壓均能夠調整(例如，從真空至正壓)的結構。 In addition, a configuration in which the lower chamber LC is always open to the atmosphere and the internal pressure of the upper chamber UC is pressurized to a positive pressure may be employed. In this case, A device for supplying compressed air such as a compressor is connected to a ventilation passage that supplies external air to the lower chamber LC provided in the movable die holder main body 331 or the upper casing 340A. Further, it is also possible to adopt a configuration in which the internal pressure of any of the upper chamber UC and the lower chamber LC can be adjusted (for example, from vacuum to positive pressure).
另外，在上述實施方式中，採用將上部腔室UC向大氣開放、對下部腔室LC進行空氣的供給和排出的結構，但也可以設置為將高純度的氮氣、二氧化碳等低活性或不活潑氣體向上部腔室UC和/或下部腔室LC供給的結構。由此，能夠進一步減輕隔片的劣化。 Further, in the above-described embodiment, the upper chamber UC is opened to the atmosphere, and the lower chamber LC is supplied and discharged from the air. However, high-purity nitrogen gas, carbon dioxide, or the like may be provided to be low-activity or inactive. The structure in which the gas is supplied to the upper chamber UC and/or the lower chamber LC. Thereby, deterioration of the separator can be further alleviated.
另外，也可以在排氣管路370的主管371或分支管372a、372b(例如，主管371的電磁閥373與分支管372a、372b之間)設置單向閥。通過在排氣管路370設置單向閥，能夠更加可靠地防止殘留於排氣管路370內的排出氣體向下部腔室LC的逆流，能夠更有效地抑制隔片350的劣化。 Alternatively, a check valve may be provided in the main pipe 371 of the exhaust line 370 or the branch pipes 372a, 372b (for example, between the solenoid valve 373 of the main pipe 371 and the branch pipes 372a, 372b). By providing the check valve in the exhaust line 370, it is possible to more reliably prevent the exhaust gas remaining in the exhaust line 370 from flowing back to the lower chamber LC, and it is possible to more effectively suppress deterioration of the separator 350.
另外，上述實施方式是在太陽能電池板的製造中應用本發明的實施方式，但本發明能夠應用於任意的層壓構造體的成形。例如，本發明能夠應用於通過對包含預浸材料的構成材料的疊層體進行熱衝壓加工而成形的印刷配線基板等板狀層壓構造體的製造。另外，也能夠適用於等離子顯示器面板、有機EL顯示器面板等各種平面板顯示器的製造。 Further, the above embodiment is an embodiment in which the present invention is applied to the production of a solar cell panel, but the present invention can be applied to the formation of an arbitrary laminated structure. For example, the present invention can be applied to the production of a plate-like laminated structure such as a printed wiring board formed by subjecting a laminate including a constituent material of a prepreg to hot stamping. Further, it can also be applied to the manufacture of various flat panel displays such as a plasma display panel and an organic EL display panel.
320‧‧‧固定模座 320‧‧‧Fixed base
320sa,320sb‧‧‧側面 320sa, 320sb‧‧‧ side
320t‧‧‧上表面 320t‧‧‧ upper surface
323a,323b‧‧‧開口 323a, 323b‧‧‧ openings
323‧‧‧供氣通路 323‧‧‧ gas supply path
323a,323b‧‧‧開口 323a, 323b‧‧‧ openings
324‧‧‧排氣通路 324‧‧‧ exhaust passage
324a,324b‧‧‧開口 324a, 324b‧‧‧ openings
330‧‧‧可動模座 330‧‧‧ movable mold base
331‧‧‧可動模座主體 331‧‧‧ movable mold base
340‧‧‧框部 340‧‧‧ Frame Department
340A‧‧‧上部框體 340A‧‧‧ upper frame
340B‧‧‧下部框體 340B‧‧‧Lower frame
341‧‧‧環狀槽 341‧‧‧ring groove
341p‧‧‧迫緊件 341p‧‧‧ tightening parts
343‧‧‧遮蔽突起 343‧‧‧Shading protrusion
344‧‧‧臺階 344‧‧‧ steps
350‧‧‧隔片 350‧‧‧ spacer
700‧‧‧保護片 700‧‧‧protection film
710‧‧‧片部 710‧‧ ‧ Parts
714‧‧‧通氣孔 714‧‧‧vents
720‧‧‧框架部 720‧‧‧Framework
800‧‧‧載板 800‧‧‧ Carrier Board
810‧‧‧主框體 810‧‧‧Main frame
820‧‧‧支承片 820‧‧‧Support piece
824‧‧‧通氣孔 824‧‧‧Ventinel
830‧‧‧副框體 830‧‧‧Sub-frame
Claims (9)
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| JP2013171393A JP6174417B2 (en) | 2013-08-21 | 2013-08-21 | Press machine |
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| TW201507860A true TW201507860A (en) | 2015-03-01 |
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| KR (1) | KR20150021881A (en) |
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| TWI716820B (en) * | 2018-03-13 | 2021-01-21 | 日商Ｔｏｗａ股份有限公司 | Resin molding device and manufacturing method of resin molded product |
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| KR101846424B1 (en) * | 2011-01-27 | 2018-05-18 | 신토고교 가부시키가이샤 | Laminate immobilizing jig, laminate assembly manufacturing system, and manufacturing method for laminate assembly |
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2013
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| TWI716820B (en) * | 2018-03-13 | 2021-01-21 | 日商Ｔｏｗａ股份有限公司 | Resin molding device and manufacturing method of resin molded product |
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| CN104417011A (en) | 2015-03-18 |
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| KR20150021881A (en) | 2015-03-03 |
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