TW201447051A - Blackened surface-treated copper foil, method for manufacturing blackened surface-treated copper foil, copper-clad laminate and flexible printed circuit board - Google Patents

Blackened surface-treated copper foil, method for manufacturing blackened surface-treated copper foil, copper-clad laminate and flexible printed circuit board Download PDF

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TW201447051A
TW201447051A TW103106970A TW103106970A TW201447051A TW 201447051 A TW201447051 A TW 201447051A TW 103106970 A TW103106970 A TW 103106970A TW 103106970 A TW103106970 A TW 103106970A TW 201447051 A TW201447051 A TW 201447051A
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copper foil
printed circuit
flexible printed
circuit board
treated copper
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TWI690625B (en
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Misato Mizoguchi
Shinichi Obata
Ayumu Tateoka
Shinya Hiraoka
Takashi Hashiguchi
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Mitsui Mining & Smelting Co
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02Electroplating of selected surface areas
    • C25D5/028Electroplating of selected surface areas one side electroplating, e.g. substrate conveyed in a bath with inhibited background plating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/627Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils
    • C25D7/0692Regulating the thickness of the coating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/384Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0137Materials
    • H05K2201/0154Polyimide
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Laminated Bodies (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Structure Of Printed Boards (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

The purpose of the present invention is to provide a copper foil for a printed circuit board, the copper foil having: a blackened surface capable of improving CCD visibility during terminal connection processing and precision of flexible printed circuit board AOI detection; an appropriate roughness suitable for manufacturing flexible printed circuit boards; and favorable etching properties. To achieve said purpose, a blackened surface-treated copper foil, etc. for manufacturing flexible printed circuit boards is used, the foil being characterized in that the roughened surface of the surface-treated copper foil with a roughened surface is a black roughened surface for which the maximum high-low difference of the undulations (Wmax) is 1.2 [mu]m or less and which is provided with a color tone having a L*a*b* color system lightness (L*) of 30 or less.

Description

黑色化表面處理銅箔、黑色化表面處理銅箔的製造方法、使用黑色化表面處理銅箔得到的銅包覆積層板及可撓式印刷電路板 Method for producing blackened surface treated copper foil, blackened surface treated copper foil, copper coated laminated board obtained by using blackened surface treated copper foil, and flexible printed circuit board

本發明係關於黑色化表面處理銅箔、黑色化表面處理銅箔的製造方法、使用黑色化表面處理銅箔得到的銅包覆積層板及可撓式印刷電路板。特別係關於對銅箔表面施行黑色化微細粗化處理的表面處理銅箔。 The present invention relates to a blackened surface-treated copper foil, a method for producing a blackened surface-treated copper foil, a copper-clad laminate obtained by using a blackened surface-treated copper foil, and a flexible printed circuit board. In particular, the surface-treated copper foil which is subjected to blackening and fine roughening treatment on the surface of the copper foil.

自習知起就印刷電路板的自動外觀檢查機便有將AOI(Automatic Optical Inspecter,自動光學檢測)廣泛使用於自動檢查。AOI係從印刷電路板的背面投光,捕捉穿透該印刷電路板的光,藉由讀取電路圖案,而發現脫逸規格的圖案缺損、圖案變細、針孔、刮傷、短路、圖案變粗、銅殘留、突起、髒污等電路缺陷之裝置。 Self-study knows that the automatic visual inspection machine for printed circuit boards has been widely used for automatic inspection of AOI (Automatic Optical Inspecter). The AOI casts light from the back side of the printed circuit board to capture light passing through the printed circuit board. By reading the circuit pattern, it is found that the pattern of the escape specification is defective, the pattern is thinned, pinholes, scratches, short circuits, patterns A device that becomes thick, copper residue, protrusion, dirt, and other circuit defects.

再者,近年將液晶顯示器模組與可撓式印刷電路板利用非等向性導電膜(ACF)連接之時,係採行使液晶顯示器模組的連接端子與可撓式印刷電路板的連接端子,從可撓式印刷電路板的電路背面使用CCD照相機進行對位。所以,在所形成電路背面與樹脂薄膜之間最好能存在有色調清晰對比。所以,一般對電路形成時所使用銅箔在與樹脂薄膜間之接著面要 求良好黑色。另一方面,對可撓式印刷電路板經蝕刻除去銅箔而露出的樹脂薄膜,則要求良好檢視性。該檢視性(以下簡稱「CCD檢視性」)係依存於可撓式印刷電路板經蝕刻除去銅箔後的樹脂薄膜霧度(Haze)。 Furthermore, in recent years, when the liquid crystal display module and the flexible printed circuit board are connected by an anisotropic conductive film (ACF), the connection terminal of the liquid crystal display module and the flexible printed circuit board are used. Align the back of the circuit from the flexible printed circuit board using a CCD camera. Therefore, it is preferable to have a clear contrast of the color tone between the back surface of the formed circuit and the resin film. Therefore, generally, the copper foil used in the formation of the circuit is to be on the back surface of the film. Seeking good black. On the other hand, a resin film which is exposed by etching a copper foil by etching a flexible printed circuit board requires good visibility. This visibility (hereinafter referred to as "CCD visibility") depends on the haze of the resin film after the copper foil is removed by etching on the flexible printed circuit board.

所以,在上述用途中,為能提升可撓式印刷電路 板的CCD檢視性及AOI的檢查精度,便要求:「可撓式印刷電路板經蝕刻除去銅箔後的樹脂薄膜具優異透光性」、「電路背面的色調與樹脂薄膜間之色調差清晰」等特性。即,前者係要求銅包覆積層板經蝕刻除去銅層後的樹脂薄膜霧度(Haze)值較低之特性,屬於受銅箔接著面殘留於樹脂薄膜表面上的凹凸形狀所左右之特性。而後者係屬於受銅箔在與樹脂薄膜間之接著面所具有色調左右的特性。滿足該等要求特性的銅箔可例如以下專利文獻1、專利文獻2所揭示的表面處理銅箔。 Therefore, in the above applications, in order to enhance the flexible printed circuit The CCD visibility of the board and the inspection accuracy of the AOI require: "The resin film after the etching of the flexible printed circuit board is etched to remove the copper foil has excellent light transmittance", "The color tone between the back surface of the circuit and the resin film is clear. And other characteristics. In other words, the former is required to have a low Haze value of the resin film after the copper-clad laminate is removed by etching, and is characterized by the uneven shape of the copper foil on the surface of the resin film. The latter is characteristic of the hue of the copper foil on the adhesive surface between the resin film and the resin film. A copper foil which satisfies the above-mentioned required characteristics can be, for example, a surface-treated copper foil disclosed in Patent Document 1 and Patent Document 2 below.

專利文獻1(日本專利申請案:特開2008-132757 號公報)有揭示:目的在於提供可撓性銅包覆積層板之銅層形成時所使用的銅箔,能進行精細間距電路形成、且經加熱後的接著強度良好之表面處理銅箔,「所採用的可撓性銅包覆積層板製造用之表面處理銅箔,係供在聚醯亞胺樹脂層表面上形成銅層用的銅箔,其特徵在於:該銅箔係在與聚醯亞胺樹脂層間之接著面上,包括有由鈷層或鈷層、與鎳-鋅合金層呈積層狀態的任一表面處理層」,並以無粗化的表面處理銅箔為對象。 在該專利文獻1的說明書之段落0034中,有提及「又,該表面處理銅箔在與聚醯亞胺樹脂基材間之接著面的光澤度[GS(60°)]較佳係達70以上。理由係為能確保良好精細間距電 路形成能力、及光學式自動檢查(AOI檢查)時所要求的良好透光性。例如,‧‧‧(中段省略轉載)‧‧‧。本件發明係光澤度[GS(60°)]達70以上,當光澤度未滿70時,無法獲得良好的精細間距電路形成能力,亦較難確保利用光學式自動檢查裝置(AOI裝置)進行檢查時所要求的良好透光性」。 Patent Document 1 (Japanese Patent Application: JP-A-2008-132757 The purpose of the present invention is to provide a copper foil used for forming a copper layer of a flexible copper-clad laminate, which is capable of performing fine pitch circuit formation and surface-treated copper foil having good adhesion strength after heating, " The surface-treated copper foil for manufacturing a flexible copper-clad laminate is a copper foil for forming a copper layer on the surface of the polyimide layer, characterized in that the copper foil is bonded to the polyimide. The surface of the imide resin layer includes any surface treatment layer in which a cobalt layer or a cobalt layer and a nickel-zinc alloy layer are laminated, and the surface-treated copper foil is not roughened. In paragraph 0034 of the specification of Patent Document 1, there is a mention that "further, the gloss of the surface-treated copper foil on the adhesive surface with the polyimide film substrate [GS (60 °)] is preferably 70 or more. The reason is to ensure good fine pitch Good light transmission required for road forming capability and optical automatic inspection (AOI inspection). For example, ‧ ‧ (disappeared in the middle section) ‧ ‧ The invention has a gloss [GS (60°)] of 70 or more, and when the gloss is less than 70, a good fine pitch circuit forming ability cannot be obtained, and it is difficult to ensure inspection by an optical automatic inspection device (AOI device). Good light transmission required."

再者,亦可考慮使用專利文獻2(國際申請案: WO2007/007870號公報)所揭示的電漿顯示面板之黑色遮罩形成時所使用的銅箔。理由係此種用途的銅箔係使用銅箔接著面的色調儘可能接近黑色者。此專利文獻2有揭示當電漿顯示面板的電磁波屏蔽所使用導電性篩網製造時採用的銅箔,專利文獻2所揭示的黑色化表面處理銅箔之表面,係因應黑色遮罩形成要求的鎳系黑色化處理面或鈷系黑色化處理面。若使用該專利文獻2所揭示銅箔製造可撓式印刷電路板,則經除去可撓式印刷電路板之銅箔後的樹脂薄膜霧度(Haze)會降低,透光性優異,判斷能充分滿足就可撓式印刷電路板的AOI所要求色調差。 Furthermore, patent document 2 (International Application: The copper foil used in the formation of the black mask of the plasma display panel disclosed in WO2007/007870. The reason is that the copper foil used for such a use is such that the color tone of the copper foil is as close as possible to the black color. Patent Document 2 discloses a copper foil used in the production of a conductive screen for electromagnetic wave shielding of a plasma display panel, and the surface of the blackened surface-treated copper foil disclosed in Patent Document 2 is required for the formation of a black mask. Nickel blackened surface or cobalt blackened surface. When a flexible printed circuit board is produced by using the copper foil disclosed in Patent Document 2, the haze of the resin film after removing the copper foil of the flexible printed circuit board is lowered, and the light transmittance is excellent, and the judgment is sufficient. Satisfy the difference in hue required for AOI on flexible printed circuit boards.

然而、專利文獻1所揭示可撓性銅包覆積層板製 造用的表面處理銅箔,因為係屬於無粗化的表面處理銅箔,因而雖可撓式印刷電路板的樹脂薄膜表面包括沒有粗糙度之平坦性,但若該表面處理銅箔的接著面過度平坦,則當進行表面處理銅箔與樹脂薄膜間之接著時,在該接著界面處容易發生起皺與氣泡。所以,對可撓性銅包覆積層板所使用表面處理銅箔,要求包括有不易發生該起皺與氣泡的適度粗糙度,且包括有平坦接著面。 However, the flexible copper-clad laminate system disclosed in Patent Document 1 The surface-treated copper foil used is a surface-treated copper foil which is not roughened, and although the surface of the resin film of the flexible printed circuit board includes flatness without roughness, if the surface of the surface-treated copper foil is When it is excessively flat, when the surface-treated copper foil and the resin film are bonded to each other, wrinkles and bubbles are likely to occur at the subsequent interface. Therefore, the surface-treated copper foil used for the flexible copper-clad laminate is required to include moderate roughness which is less likely to occur in the wrinkles and bubbles, and includes a flat joint surface.

再者,即便將專利文獻2所揭示黑色化表面處理 銅箔的黑色化表面,使用於可撓性銅包覆積層板的製造,則與上述同樣,當進行表面處理銅箔與樹脂薄膜間之接著時,在該接著界面處容易發生起皺與氣泡。又,專利文獻2所揭示黑色化表面處理銅箔的黑色化表面,係屬於鎳系黑色化處理面或鈷系黑色化處理面,會有較難利用銅蝕刻液施行蝕刻的傾向。所以,當施行電路形成之際,因為利用銅蝕刻液施行的過蝕刻時間會拉長,因而銅部分的蝕刻會變過度,導致蝕刻因子優異的精細間距電路形成趨於困難。又,即便預設計充分的過蝕刻時間,但仍會在電路間殘留鎳或鈷,導致遷移發生機率提高,造成製品可靠度降低,故非屬較佳。 Furthermore, even the blackened surface treatment disclosed in Patent Document 2 When the blackened surface of the copper foil is used for the production of a flexible copper-clad laminate, when the surface-treated copper foil and the resin film are bonded to each other, wrinkles and bubbles are likely to occur at the subsequent interface. . Further, the blackened surface of the blackened surface-treated copper foil disclosed in Patent Document 2 is a nickel-based blackened surface or a cobalt-based blackened surface, and it is difficult to perform etching using a copper etching solution. Therefore, when the circuit is formed, since the over-etching time by the copper etching solution is elongated, the etching of the copper portion becomes excessive, and the fine pitch circuit formation excellent in the etching factor tends to be difficult. Further, even if a sufficient over-etching time is pre-designed, nickel or cobalt remains between the circuits, resulting in an increase in the probability of migration and a decrease in reliability of the product, which is not preferable.

有鑑於該等,本申請案目的在於提供:包括有與 專利文獻2所揭示銅箔同等能提升CCD檢視性及AOI檢測精度的黑色化表面,且包括有能適用於可撓式印刷電路板製造的適度粗糙度,且包括有良好蝕刻特性的印刷電路板用銅箔。 In view of the above, the purpose of this application is to provide: The copper foil disclosed in Patent Document 2 is equivalent to a blackened surface capable of improving CCD visibility and AOI detection accuracy, and includes a printed circuit board having suitable roughness suitable for flexible printed circuit board manufacturing and including good etching characteristics. Use copper foil.

緣是,本案發明者等構思到藉由將以下的黑色化表面處理銅箔使用於可撓式印刷電路板製造,便可解決上述問題。 The reason is that the inventors of the present invention have conceived that the above problem can be solved by using the following blackened surface-treated copper foil for the manufacture of a flexible printed circuit board.

黑色化表面處理銅箔:本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔,係包括有黑色粗化面的表面處理銅箔,其特徵在於:該黑色粗化面係波浪的最大高低差(Wmax)在1.2μm以下,且包括有L*a*b*色度系統的明度L*在 30以下的色調。 Blackened surface-treated copper foil: The blackened surface-treated copper foil for manufacturing a flexible printed circuit board of the present application is a surface-treated copper foil having a black roughened surface, characterized in that the black roughened surface is The maximum height difference (Wmax) of the waves is 1.2 μm or less, and includes a hue of a lightness L * of 30 or less in the L * a * b * chromaticity system.

本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔,其中,上述黑色粗化面較佳係經使附著粒徑10nm~250nm銅粒子而粗化者。 The blackened surface-treated copper foil for producing a flexible printed circuit board according to the present application, wherein the black roughened surface is preferably roughened by attaching copper particles having a particle diameter of 10 nm to 250 nm.

本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔,其中,上述黑色粗化面較佳係在3μm×3μm區域中附著400個~2500個銅粒子。 The blackened surface-treated copper foil for producing a flexible printed circuit board according to the present application, wherein the black roughened surface is preferably attached to 400 to 2500 copper particles in a region of 3 μm × 3 μm.

本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔,其中,上述黑色粗化面較佳係平均粗糙度Ra在0.5μm以下。 The blackened surface-treated copper foil for producing a flexible printed circuit board according to the present application, wherein the black roughened surface preferably has an average roughness Ra of 0.5 μm or less.

本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔,其中,上述黑色粗化面較佳係動摩擦係數達0.50以上。 The blackened surface-treated copper foil for manufacturing a flexible printed circuit board according to the present application, wherein the black roughened surface preferably has a coefficient of friction of 0.50 or more.

黑色化表面處理銅箔的製造方法:本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔的製造方法,係製造上述可撓式印刷電路板製造用之黑色化表面處理銅箔,其特徵在於:於銅箔的波浪最大高低差(Wmax)在1.2μm以下的表面上,使用銅濃度10g/L~20g/L、自由硫酸濃度15g/L~100g/L、9-苯基吖啶濃度100mg/L~200mg/L、氯濃度20mg/L~100mg/L的黑色粗化用銅電解溶液,使附著微細銅粒子而施行黑色粗化。 Method for producing blackened surface-treated copper foil: A method for producing a blackened surface-treated copper foil for producing a flexible printed circuit board according to the present application, which is a blackened surface-treated copper for manufacturing the above-mentioned flexible printed circuit board The foil is characterized in that a copper concentration of 10 g/L to 20 g/L, a free sulfuric acid concentration of 15 g/L to 100 g/L, and 9-benzene are used on a surface of a copper foil having a maximum wave height difference (Wmax) of 1.2 μm or less. The copper electrolytic solution for black roughening having a concentration of 100 mg/L to 200 mg/L and a chlorine concentration of 20 mg/L to 100 mg/L is used to adhere the fine copper particles to perform blackening.

可撓式印刷電路板製造用之黑色化表面處理銅箔的製造方法,其中,較佳係在溶液溫度20℃~40℃的黑色粗化用銅電解溶液中,將銅箔極化為陰極,並利用電流密度 30A/dm2~100A/dm2施行電解,便對銅箔表面施行微細銅粒子的附著形成。 A method for producing a blackened surface-treated copper foil for manufacturing a flexible printed circuit board, wherein the copper foil is polarized to a cathode in a copper electrolytic solution for black roughening at a solution temperature of 20 to 40 ° C. Electrolysis was carried out using a current density of 30 A/dm 2 to 100 A/dm 2 to form an adhesion of fine copper particles to the surface of the copper foil.

銅包覆積層板:本申請案的可撓式印刷電路板製 造用之銅包覆積層板,其特徵在於:使用上述可撓式印刷電路板製造用之黑色化表面處理銅箔而獲得。 Copper coated laminate: flexible printed circuit board system of the present application A copper-clad laminate for use is obtained by using the blackened surface-treated copper foil for the manufacture of the flexible printed circuit board.

可撓式印刷電路板:本申請案的可撓式印刷電路 板,其特徵在於:使用上述可撓式印刷電路板製造用之銅包覆積層板而獲得。 Flexible printed circuit board: flexible printed circuit of the present application A board obtained by using the above-described copper-clad laminate for manufacturing a flexible printed circuit board.

本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔,係包括有CCD檢視性及AOI檢查精度優異的黑色化表面。又,本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔,因為微細的粗化粒子係由銅形成,因而包括有良好的蝕刻特性。所以,當電路形成時可使蝕刻的過蝕刻時間縮短化,俾可形成包括有極良好蝕刻因子的精細間距電路。 The blackened surface-treated copper foil for manufacturing a flexible printed circuit board of the present application includes a blackened surface having excellent CCD visibility and AOI inspection accuracy. Further, in the blackened surface-treated copper foil for producing a flexible printed circuit board of the present application, since the fine roughened particles are formed of copper, they include good etching characteristics. Therefore, when the circuit is formed, the etching over-etching time can be shortened, and a fine pitch circuit including a very good etching factor can be formed.

圖1係針對本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔,觀察其粗化形態的掃描式電子顯微鏡觀察影像(實施例1)。 Fig. 1 is a scanning electron microscope observation image (Example 1) of a blackened surface-treated copper foil for manufacturing a flexible printed circuit board of the present application.

圖2係觀察習知表面處理銅箔之粗化處理面的掃描式電子顯微鏡觀察影像(比較例1)。 Fig. 2 is a scanning electron microscope observation image (Comparative Example 1) for observing the roughened surface of a conventional surface-treated copper foil.

圖3係觀察習知表面處理銅箔之粗化處理面的掃描式電子顯微鏡觀察影像(比較例2)。 Fig. 3 is a scanning electron microscope observation image (Comparative Example 2) for observing the roughened surface of a conventional surface-treated copper foil.

圖4係觀察習知表面處理銅箔之粗化處理面的掃描式電子顯微鏡觀察影像(比較例3)。 Fig. 4 is a scanning electron microscope observation image (Comparative Example 3) for observing the roughened surface of a conventional surface-treated copper foil.

以下,相關本申請案的「黑色化表面處理銅箔」、「黑色化表面處理銅箔的製造方法」、「銅包覆積層板」、「可撓式印刷電路板」各形態進行說明。 Hereinafter, each aspect of the "blackened surface-treated copper foil", "manufactured method of blackened surface-treated copper foil", "copper-coated laminated board", and "flexible printed circuit board" of the present application will be described.

黑色化表面處理銅箔:本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔,其特徵在於包括有:波浪的最大高低差(Wmax)在1.2μm以下,且L*a*b*色度系統的明度L*在30以下之色調的黑色粗化面。 Blackened surface-treated copper foil: The blackened surface-treated copper foil for manufacturing a flexible printed circuit board of the present application, characterized in that the maximum height difference (Wmax) of waves is less than 1.2 μm, and L * a * b * The brightness of the chromaticity system L * The black roughening surface of the shade of 30 or less.

本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔,其中一項特徵在於:黑色粗化面係波浪的最大高低差(Wmax)在1.2μm以下。該「波浪的最大高低差(Wmax)」係指從使用三次元表面構造解析顯微鏡所獲得相關試料表面之凹凸的資訊,過濾擷取相關波浪的波形數據,且設定為波形數據的高低差最大值(波形的最大尖峰高度與最大谷底深度之合計)。當使用包括有該波浪最大高低差(Wmax)超過1.2μm之黑色粗化面的表面處理銅箔,製造可撓式印刷電路板時,可撓式印刷電路板經蝕刻除去銅箔而露出的樹脂薄膜霧度(Haze)會提高,CCD檢視性及AOI檢查精度會降低。所以,為能使該霧度(Haze)呈現穩定地較低值,波浪的最大高低差(Wmax)更佳係1.0μm以下。 A blackened surface-treated copper foil for manufacturing a flexible printed circuit board of the present application is characterized in that the maximum height difference (Wmax) of the black roughened surface wave is 1.2 μm or less. The "maximum height difference (Wmax) of the wave" refers to the information of the unevenness of the surface of the relevant sample obtained by using the three-dimensional surface structure analysis microscope, and the waveform data of the relevant wave is filtered and set to the maximum value of the waveform data. (Total of the maximum peak height of the waveform and the maximum valley depth). When a flexible printed circuit board is manufactured using a surface-treated copper foil including a black roughened surface having a maximum wave height difference (Wmax) of more than 1.2 μm, the flexible printed circuit board is etched to remove the copper foil to expose the resin The haze of the film is improved, and the CCD visibility and AOI inspection accuracy are lowered. Therefore, in order to make the haze exhibit a stable low value, the maximum height difference (Wmax) of the waves is preferably 1.0 μm or less.

再者,本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔,另一特徵在於:該黑色粗化面係包括有由 JIS Z8729所規定L*a*b*色度系統的明度L*在30以下之色調。 若L*a*b*色度系統的明度L*超過30,則粗化粒子的粒徑會變大,可撓式印刷電路板經蝕刻除去銅箔而露出的樹脂薄膜霧度(Haze)會提高。又,若L*a*b*色度系統的明度L*超過30,則使用該黑色化表面處理銅箔所形成的電路背面色調、與樹脂薄膜間之色調對比會降低,因而CCD檢視性降低,AOI檢查精度亦有降低的傾向。又,若L*a*b*色度系統的明度L*在20以下,則該樹脂薄膜的霧度(Haze)穩定地降低。又,若L*a*b*色度系統的明度L*在15以下,該樹脂薄膜的霧度(Haze)、以及電路背面色調與樹脂薄膜間之色調對比亦清晰化,能更加提升CCD檢視性。 Furthermore, the blackened surface-treated copper foil for manufacturing a flexible printed circuit board of the present application is characterized in that the black roughened surface includes a L * a * b * chromaticity system defined by JIS Z8729. The brightness L * is below 30 shades. When the lightness L * of the L * a * b * chromaticity system exceeds 30, the particle size of the roughened particles becomes large, and the haze of the resin film exposed by etching the copper foil by etching removes the copper foil. improve. Further, when the brightness L * of the L * a * b * chromaticity system exceeds 30, the color tone of the back surface of the circuit formed by the blackened surface-treated copper foil and the color tone of the resin film are lowered, so that the CCD visibility is lowered. The AOI inspection accuracy also tends to decrease. Further, when the lightness L * of the L * a * b * chromaticity system is 20 or less, the haze of the resin film is stably lowered. Further, if the lightness L * of the L * a * b * chromaticity system is 15 or less, the haze of the resin film and the color tone between the back surface of the circuit and the resin film are also sharpened, and the CCD inspection can be further improved. Sex.

本申請案的可撓式印刷電路板製造用之黑色化表 面處理銅箔,其黑色粗化面較佳係附著有粒徑10nm~250nm的銅粒子。此處將該銅粒子的粒徑下限值設定為10nm。但是,並非指積極排除未滿10nm粒徑的粗化粒子,但若粗化粒子過度變為微細,則對樹脂薄膜的錨釘效應會有降低的可能性。另一方面,若該粗化粒子的粒徑超過250nm,則使用表面處理銅箔製造的銅包覆積層板經蝕刻除去銅箔,而露出的樹脂薄膜部之霧度(Haze)會提高,導致CCD檢視性及AOI檢查精度降低,故非屬較佳。另外,銅粒子的形狀並無特別限定,但銅粒子較佳係略球狀。理由係若銅粒子呈略球狀便可防止掉粉。 Blackening table for manufacturing flexible printed circuit board of the present application In the surface-treated copper foil, the black roughened surface preferably has copper particles having a particle diameter of 10 nm to 250 nm. Here, the lower limit of the particle diameter of the copper particles was set to 10 nm. However, it does not mean that the roughened particles having a particle diameter of less than 10 nm are actively excluded. However, if the roughened particles are excessively fine, the anchoring effect on the resin film may be lowered. On the other hand, when the particle size of the roughened particles exceeds 250 nm, the copper-clad laminate produced by using the surface-treated copper foil is etched to remove the copper foil, and the haze of the exposed resin film portion is increased, resulting in an increase in haze. CCD visibility and AOI inspection accuracy are reduced, so it is not preferred. Further, the shape of the copper particles is not particularly limited, but the copper particles are preferably substantially spherical. The reason is that if the copper particles are slightly spherical, the powder can be prevented from falling off.

再者,本申請案的可撓式印刷電路板製造用之黑 色化表面處理銅箔,其黑色粗化面較佳係在3μm×3μm區域中附著有400個~2500個銅粒子。當該既定區域內的銅粒子附著 個數未滿400個時,便較難將上述L*a*b*色度系統的明度L*設定在30以下,故非屬較佳。另一方面,當既定區域內的銅粒子附著個數超過2500個時,所附著的銅粒子容易引發脫落,且會有上述霧度(Haze)值變高的傾向,導致CCD檢視性及AOI檢查精度降低,故非屬較佳。 Further, in the blackened surface-treated copper foil for manufacturing a flexible printed circuit board of the present application, the black roughened surface preferably has 400 to 2500 copper particles attached to the region of 3 μm × 3 μm. When the number of copper particles attached to the predetermined region is less than 400, it is difficult to set the brightness L * of the L * a * b * chromaticity system to 30 or less, which is not preferable. On the other hand, when the number of copper particles attached in a predetermined region exceeds 2,500, the adhered copper particles are liable to fall off, and the haze value tends to be high, resulting in CCD visibility and AOI inspection. The accuracy is reduced, so it is not preferred.

如上述本申請案的可撓式印刷電路板製造用之黑 色化表面處理銅箔,構成其黑色粗化面的銅粒子係由銅與不可避免的雜質構成,最好不要含有會阻礙蝕刻的合金成分等。若銅粒子係與構成銅箔的銅成分為同等組成,則銅蝕刻液的蝕刻速度便成為銅箔與銅粒子同等,因而利用蝕刻進行的電路形成條件之步驟設計較為容易。 Black for manufacturing a flexible printed circuit board as described above in the present application The surface of the copper foil is colored, and the copper particles constituting the black roughened surface are made of copper and unavoidable impurities, and it is preferable not to contain an alloy component which hinders etching. When the copper particles are formed in the same composition as the copper component constituting the copper foil, the etching rate of the copper etching solution becomes the same as that of the copper particles. Therefore, the step of circuit formation conditions by etching is easy.

再者,本申請案的可撓式印刷電路板製造用之黑 色化表面處理銅箔,其黑色粗化面使用觸針式表面粗糙度計進行測定時,平均粗糙度Ra較佳係0.5μm以下。本申請案的黑色化表面處理銅箔係相關平均粗糙度亦是包括有極低值。若該平均粗糙度Ra超過0.5μm,則在電路形成的蝕刻步驟中,因為依進入配線間的樹脂薄膜內之粗化粒子,不會成為蝕刻殘餘而殘留方式設計的過蝕刻時間會變長,導致配線的側壁會溶解必要以上,造成較難形成包括良好蝕刻因子的精細間距電路形成,故非屬較佳。又,該平均粗糙度Ra更佳係在0.3μm以下。 理由係防止在包括良好蝕刻因子的精細間距電路形成之同時,溶液亦對表面處理銅箔的黑色粗化面與樹脂薄膜間之積層界面造成侵蝕,俾可提升耐藥性能。 Furthermore, the black for the manufacture of flexible printed circuit boards of the present application When the black roughened surface is measured by a stylus type surface roughness meter, the average roughness Ra is preferably 0.5 μm or less. The associated average roughness of the blackened surface treated copper foil of this application also includes extremely low values. When the average roughness Ra exceeds 0.5 μm, in the etching step of forming a circuit, the rough etching particles in the resin film entering the wiring do not become an etching residue, and the over-etching time designed to remain is long. It is not preferable that the side walls of the wiring are dissolved more than necessary, making it difficult to form a fine pitch circuit including a good etching factor. Further, the average roughness Ra is more preferably 0.3 μm or less. The reason is to prevent the formation of a fine pitch circuit including a good etching factor, and the solution also erodes the laminated interface between the black roughened surface of the surface-treated copper foil and the resin film, and the resistance property can be improved.

再者,本申請案的可撓式印刷電路板製造用之黑 色化表面處理銅箔,其黑色粗化面較佳係動摩擦係數達0.50以上。若該動摩擦係數未滿0.50時,當利用輥層壓法進行樹脂薄膜與黑色化表面處理銅箔的積層時,黑色化表面處理銅箔的黑色粗化面會過度平滑,導致黑色化表面處理銅箔與樹脂薄膜間之接著界面出現滑動,而容易發生起皺,因而不易進行良好的積層。又,當該動摩擦係數未滿0.50時,亦會有黑色化表面處理銅箔與樹脂薄膜間之接著界面容易發生氣泡的傾向。 Furthermore, the black for the manufacture of flexible printed circuit boards of the present application The color-treated surface-treated copper foil preferably has a blackening surface with a coefficient of friction of 0.50 or more. When the dynamic friction coefficient is less than 0.50, when the resin film and the blackened surface-treated copper foil are laminated by the roll lamination method, the black roughened surface of the blackened surface-treated copper foil is excessively smooth, resulting in blackened surface-treated copper. The subsequent interface between the foil and the resin film is slid, and wrinkles are likely to occur, so that it is difficult to perform good lamination. Further, when the dynamic friction coefficient is less than 0.50, there is a tendency that bubbles are likely to occur at the interface between the blackened surface-treated copper foil and the resin film.

另外,以上所述黑色化表面處理銅箔,相關厚度 並無特別限定。又,明確記載並不僅侷限於在通常銅箔表面上施行黑色粗化,亦涵蓋對具載箔的銅箔之銅箔表面施行黑色粗化的概念。 In addition, the above-mentioned blackened surface treated copper foil, related thickness There is no particular limitation. Further, it is clearly described that the black roughening is not limited to the surface of a normal copper foil, and the concept of blackening the surface of the copper foil of the copper foil with a foil is also included.

黑色化表面處理銅箔的製造方法:本申請案的可 撓式印刷電路板製造用之黑色化表面處理銅箔的製造方法,係製造上述可撓式印刷電路板製造用之黑色化表面處理銅箔,對銅箔的波浪最大高低差(Wmax)在1.2μm以下之表面,使附著微細銅粒子而施行黑色粗化。若對該樹脂薄膜的接著面之波浪最大高低差(Wmax)超過1.2μm,則經黑色粗化後,波浪的最大高低差(Wmax)不易在1.2μm以下。又,考慮該黑色化表面處理銅箔的製造方法中的步驟變動等,為能將經黑色粗化後的波浪最大高低差(Wmax)能穩定地設定在1.2μm以下,波浪的最大高低差(Wmax)更佳係在0.8μm以下。 Method for manufacturing blackened surface treated copper foil: A method for producing a blackened surface-treated copper foil for manufacturing a flexible printed circuit board, wherein the blackened surface-treated copper foil for manufacturing the flexible printed circuit board is used, and the maximum wave height difference (Wmax) of the copper foil is 1.2. The surface of μm or less is subjected to blackening by attaching fine copper particles. When the maximum wave height difference (Wmax) of the adhesion surface of the resin film exceeds 1.2 μm, the maximum height difference (Wmax) of the wave after blackening is not easily 1.2 μm or less. In addition, in consideration of the step variation or the like in the method for producing the blackened surface-treated copper foil, the maximum height difference (Wmax) of the wave which is roughened by black can be stably set to 1.2 μm or less, and the maximum height difference of the waves ( Wmax) is more preferably 0.8 μm or less.

使用如上述黑色化表面處理銅箔的製造方法進行 黑色粗化前的銅箔,係可使用電解銅箔與軋延銅箔二者。又,即便波浪最大高低差(Wmax)超過1.2μm的銅箔,藉由對此種 銅箔表面施行蝕刻處理、鍍銅處理等,亦可將波浪的最大高低差(Wmax)形成在1.2μm以下。又。此處所謂「銅箔」係在滿足對樹脂薄膜的接著面之波浪最大高低差(Wmax)在1.2μm以下的條件前提下,可為無粗化銅箔,亦可為經施行預粗化者。又,相關銅箔的厚度亦無特別限定。 Using a method of manufacturing a blackened surface-treated copper foil as described above For the copper foil before blackening, both electrolytic copper foil and rolled copper foil can be used. Moreover, even if the maximum wave height difference (Wmax) exceeds 1.2 μm of copper foil, by this kind The surface of the copper foil may be subjected to etching treatment, copper plating treatment, or the like, and the maximum height difference (Wmax) of the waves may be formed to 1.2 μm or less. also. Here, the "copper foil" may be a roughened copper foil or a pre-roughened one, provided that the maximum wave height difference (Wmax) of the adhesive film on the adhesive film is 1.2 μm or less. . Further, the thickness of the relevant copper foil is also not particularly limited.

當對該銅箔的波浪最大高低差(Wmax)在1.2μm以下之表面,使附著微細銅粒子而施行黑色粗化時,最好使用以下的黑色粗化用銅電解溶液。即,使用銅濃度10g/L~20g/L、自由硫酸濃度15g/L~100g/L、9-苯基吖啶濃度100mg/L~200mg/L、及氯濃度20mg/L~100mg/L的黑色粗化用銅電解溶液。該黑色粗化用銅電解溶液係將銅濃度10g/L~20g/L、及自由硫酸濃度15g/L~100g/L的硫酸酸性銅電解液使用為基本溶液。此處,當該銅濃度未滿10g/L時,銅粒子的電沉積速度會變慢,導致無法滿足工業性要求的生產性,故非屬較佳。另一方面,若該銅濃度超過20g/L,則因與後述電流密度間之關係,接***滑電鍍條件,導致黑色粗化趨於困難,故非屬較佳。又,自由硫酸濃度因與該銅濃度間之關係,若脫逸該濃度範圍,則電解時的通電特性會產生變化,導致良好的黑色粗化趨於困難,故非屬較佳。 When the surface of the copper foil having a maximum wave height difference (Wmax) of 1.2 μm or less is applied to the fine copper particles to be blackened, it is preferable to use the following copper electrolytic solution for black roughening. That is, a copper concentration of 10 g/L to 20 g/L, a free sulfuric acid concentration of 15 g/L to 100 g/L, a 9-phenyl acridine concentration of 100 mg/L to 200 mg/L, and a chlorine concentration of 20 mg/L to 100 mg/L. Black roughening uses copper electrolytic solution. The copper electrolytic solution for black roughening uses a sulfuric acid copper electrolytic solution having a copper concentration of 10 g/L to 20 g/L and a free sulfuric acid concentration of 15 g/L to 100 g/L as a basic solution. Here, when the copper concentration is less than 10 g/L, the electrodeposition speed of the copper particles becomes slow, resulting in failure to satisfy the industrially demanding productivity, which is not preferable. On the other hand, when the copper concentration exceeds 20 g/L, it is not preferable because the relationship between the current density and the current density described later is close to the smooth plating condition, and the black roughening tends to be difficult. Further, when the concentration of free sulfuric acid is in contact with the concentration of copper, if the concentration range is removed, the electric conduction characteristics during electrolysis change, and good black roughening tends to be difficult, which is not preferable.

再者,本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔的製造方法,係使用黑色粗化用銅電解溶液的情況,最好依100mg/L~200mg/L範圍含有9-苯基吖啶濃度。該9-苯基吖啶係具有將銅箔表面上所附著形成的銅粒子粒徑予以微細化,俾促進粒子形狀呈球狀化的添加劑機能。若黑色 粗化用銅電解溶液中的9-苯基吖啶濃度未滿100mg/L的情況,不易獲得銅粒子粒徑微細化的效果,且促進粒子形狀呈球狀化的效果亦會降低,故非屬較佳。另一方面,即便黑色粗化用銅電解溶液中的9-苯基吖啶濃度超過200mg/L,銅粒子粒徑的微細化效果、及促進粒子形狀呈球狀化的效果同時均達飽和,無法獲得與添加量成比例的效果,僅徒浪費資源而已,故非屬較佳。 Further, in the method for producing a blackened surface-treated copper foil for producing a flexible printed circuit board according to the present application, a copper electrolytic solution for black roughening is used, and it is preferably contained in a range of from 100 mg/L to 200 mg/L. 9-phenyl acridine concentration. The 9-phenyl acridine system has an additive function of refining the particle diameter of the copper particles adhered on the surface of the copper foil and promoting the spheroidal shape of the particles. If black When the concentration of 9-phenyl acridine in the copper electrolytic solution for roughening is less than 100 mg/L, the effect of refining the particle diameter of the copper particles is not easily obtained, and the effect of promoting the spheroidal shape of the particles is also lowered, so It is preferred. On the other hand, even if the concentration of 9-phenyl acridine in the copper electrolytic solution for black roughening exceeds 200 mg/L, the effect of refining the particle diameter of the copper particles and the effect of promoting the spheroidization of the particle shape are saturated. It is not preferable to obtain an effect proportional to the amount of addition, which is a waste of resources.

再者,本申請案的可撓式印刷電路板製造用之黑 色化表面處理銅箔的製造方法,所使用黑色粗化用銅電解溶液的氯濃度,最好依20mg/L~100mg/L範圍含有。若該黑色粗化用銅電解溶液的氯濃度未滿20mg/L的情況,較難出現為形成銅粒子的燒焦鍍狀態,導致不易獲得良好形狀的粗化粒子,故非屬較佳。另一方面,若該黑色粗化用銅電解溶液的氯濃度超過100mg/L的情況,則黑色化表面處理銅箔的黑色粗化面色調容易發生變動,同時無法良好施行粒子形狀呈球狀化,故非屬較佳。 Furthermore, the black for the manufacture of flexible printed circuit boards of the present application In the method for producing a colored surface-treated copper foil, the chlorine concentration of the copper electrolytic solution for black roughening is preferably contained in the range of 20 mg/L to 100 mg/L. When the chlorine concentration of the copper electrolytic solution for black roughening is less than 20 mg/L, it is difficult to form a burnt-plated state in which copper particles are formed, and it is not preferable to obtain a roughened particle having a good shape. On the other hand, when the chlorine concentration of the copper electrolytic solution for black roughening exceeds 100 mg/L, the blackened surface of the blackened surface-treated copper foil tends to fluctuate, and the particle shape is not spheroidized. Therefore, it is not preferred.

當使用如上述黑色粗化用銅電解溶液,對銅箔表 面施行黑色粗化時,最好在溶液溫度20℃~40℃的銅電解液中,將銅箔極化為陰極,並依電流密度30A/dm2~100A/dm2施行電解。此處,溶液溫度較佳係20℃~40℃範圍。若該溶液溫度未滿20℃,則所形成粗化粒子的形狀容易發生變動,故非屬較佳。另一方面,若該溶液溫度超過40℃,則黑色粗化用銅電解溶液的溶液性狀容易發生變化,會有無法施行穩定燒焦鍍(burnt plating)的傾向,故非屬較佳。 When the copper electrolytic solution is black roughened by using the copper electrolytic solution for black roughening as described above, it is preferable to polarize the copper foil into a cathode in a copper electrolytic solution having a solution temperature of 20 ° C to 40 ° C depending on the current density. Electrolysis was carried out at 30 A/dm 2 to 100 A/dm 2 . Here, the solution temperature is preferably in the range of 20 ° C to 40 ° C. If the temperature of the solution is less than 20 ° C, the shape of the roughened particles is likely to fluctuate, which is not preferable. On the other hand, when the temperature of the solution exceeds 40 ° C, the solution properties of the copper electrolytic solution for black roughening tend to change, and there is a tendency that stable burnt plating cannot be performed, which is not preferable.

再者,當在銅電解液中,將銅箔極化為陰極並施 行黑色粗化時,電流密度最好在30A/dm2~100A/dm2範圍內。 當該電流密度未滿、30A/dm2的情況,無法充分黑色粗化,較難將黑色粗化面的明度L*設定在30以下,故非屬較佳。另一方面,若電流密度超過100A/dm2,則微細銅粒子的析出速度變為過快,導致所形成銅粒子形狀無法成為良好球狀體,故非屬較佳。 Further, when the copper foil is polarized to the cathode in the copper electrolytic solution and black roughening is performed, the current density is preferably in the range of 30 A/dm 2 to 100 A/dm 2 . When the current density is less than 30 A/dm 2 , the black is not sufficiently coarsened, and it is difficult to set the brightness L * of the black roughened surface to 30 or less, which is not preferable. On the other hand, when the current density exceeds 100 A/dm 2 , the deposition rate of the fine copper particles becomes too fast, and the shape of the formed copper particles cannot be a good spherical shape, which is not preferable.

銅包覆積層板:本申請案的銅包覆積層板,其特 徵在於:由上述可撓式印刷電路板製造用之黑色化表面處理銅箔、與樹脂薄膜積層而獲得的可撓性銅包覆積層板。此時的樹脂薄膜係可使用聚醯亞胺樹脂薄膜、PET薄膜、芳醯胺樹脂薄膜等,在能使用為可撓式印刷電路板之樹脂薄膜的前提下,其餘並無特別限定。又,可撓性銅包覆積層板的製造係可使用通常的積層方式、連續積層方式、澆注方式等,便可在黑色化表面處理銅箔的表面上形成樹脂層。此處所謂「澆注方式」係指在本件發明的黑色化表面處理銅箔表面上,由聚醯胺酸等利用加熱而形成聚醯亞胺樹脂化的樹脂組成膜,經加熱而引發縮合反應,直接在黑色化表面處理銅箔的表面上形成聚醯亞胺樹脂薄膜層的方法。 Copper-clad laminate: the copper-clad laminate of this application, It is a flexible copper-clad laminate obtained by laminating a blackened surface-treated copper foil for manufacturing a flexible printed circuit board and a resin film. In the resin film at this time, a polyimide film, a PET film, an linoleamide resin film, or the like can be used, and the resin film which is a flexible printed circuit board can be used, and the rest is not particularly limited. Further, in the production of the flexible copper-clad laminate, a resin layer can be formed on the surface of the blackened surface-treated copper foil by a usual lamination method, a continuous lamination method, a casting method, or the like. Here, the "casting method" refers to a resin composition film formed by polyacrylamide or the like which is formed by polyacrylamide resin on the surface of the blackened surface-treated copper foil of the present invention, and is heated to cause a condensation reaction. A method of forming a polyimide film layer of a polyimide film directly on the surface of a blackened surface-treated copper foil.

可撓式印刷電路板:該可撓式印刷電路板係若從 上述銅包覆積層板狀態,對本申請案的黑色化表面處理銅箔施行蝕刻加工,便可大幅降低該黑色化表面處理銅箔經溶解部分露出的樹脂薄膜霧度(Haze)。該霧度(Haze)值係依照樹脂薄膜種類而有所差異。但是,在銅包覆積層板所使用樹脂薄膜為相 同的前提下,藉由使用本申請案的黑色化表面處理銅箔,相較於使用習知表面處理銅箔的情況下,可獲得極低的霧度(Haze),大幅提高CCD檢視性、及對AOI的適合性。 Flexible printed circuit board: the flexible printed circuit board In the state of the copper-clad laminate, the blackened surface-treated copper foil of the present application is etched to greatly reduce the haze of the resin film exposed by the dissolved portion of the blackened surface-treated copper foil. The haze value varies depending on the type of the resin film. However, the resin film used in the copper-clad laminate is phase On the same premise, by using the blackened surface-treated copper foil of the present application, a very low haze can be obtained as compared with the case of using a conventional surface-treated copper foil, and the CCD visibility is greatly improved. And suitability for AOI.

[實施例1] [Example 1]

實施例1係製造厚度12μm的電解銅箔,並施行黑色粗化、防銹處理、及矽烷偶合劑處理而製作黑色化表面處理銅箔,並與後述比較例進行對比。 In Example 1, an electrolytic copper foil having a thickness of 12 μm was produced, and blackening, rust-preventing treatment, and decane coupling agent treatment were carried out to prepare a blackened surface-treated copper foil, which was compared with a comparative example described later.

電解銅箔的製造:銅電解液係使用以下所示組成的硫酸酸性硫酸銅溶液,陰極係使用表面粗糙度Ra=0.20μm的鈦製旋轉電極,陽極係使用DSA,依溶液溫度45℃、電流密度55A/dm2施行電解,便獲得厚度12μm的電解銅箔。該電解銅箔的析出面之波浪最大高低差(Wmax)係0.8μm。 Production of electrolytic copper foil: Copper electrolyte solution uses a sulfuric acid acidic copper sulfate solution having the composition shown below, a cathode using a titanium rotating electrode having a surface roughness Ra of 0.20 μm, and an anode system using DSA, depending on a solution temperature of 45 ° C, a current Electrolysis was carried out at a density of 55 A/dm 2 to obtain an electrolytic copper foil having a thickness of 12 μm. The maximum wave height difference (Wmax) of the deposition surface of this electrolytic copper foil was 0.8 μm.

銅濃度:80g/L Copper concentration: 80g/L

自由硫酸濃度:140g/L Free sulfuric acid concentration: 140g/L

雙(3-磺丙基)二硫醚濃度:30mg/L Bis(3-sulfopropyl) disulfide concentration: 30 mg/L

二烯丙基二甲基氯化銨聚合物濃度:50mg/L Diallyldimethylammonium chloride polymer concentration: 50mg/L

氯濃度:40mg/L Chlorine concentration: 40mg/L

黑色粗化:對上述電解銅箔所包括的電極面及析出面內、析出面側,使用以下所示組成的黑色粗化用銅電解溶液,依溶液溫度30℃、電流密度50A/dm2條件施行電解而施行黑色粗化。 Black roughening: The copper electrolytic solution for black roughening having the following composition is used for the electrode surface, the deposition surface, and the deposition surface side of the above-mentioned electrolytic copper foil, depending on the solution temperature of 30 ° C and the current density of 50 A/dm 2 Electrolysis was performed to perform black roughening.

銅濃度:13g/L Copper concentration: 13g / L

自由硫酸濃度:55g/L Free sulfuric acid concentration: 55g/L

9-苯基吖啶濃度:140mg/L 9-phenyl acridine concentration: 140 mg / L

氯濃度:35mg/L Chlorine concentration: 35mg/L

防銹處理:若結束上述黑色粗化,便對該黑色粗化後的電解銅箔雙面施行防銹處理。此處係採用下述條件的無機防銹。使用焦磷酸浴,依焦磷酸鉀濃度80g/L、鋅濃度0.2g/L、鎳濃度2g/L、液溫40℃、電流密度0.5A/dm2施行鋅-鎳合金防銹處理。 Anti-rust treatment: When the above-described black roughening is completed, the blackened electrolytic copper foil is subjected to rustproof treatment on both sides. Here, inorganic rust prevention using the following conditions is employed. A zinc-nickel alloy anti-rust treatment was carried out using a pyrophosphoric acid bath at a concentration of 80 g/L of potassium pyrophosphate, a concentration of 0.2 g/L of zinc, a concentration of 2 g/L of nickel, a temperature of 40 ° C, and a current density of 0.5 A/dm 2 .

再者,防銹處理係經施行鋅-鎳合金防銹處理後,更進一步形成鉻酸鹽層。此時的鉻酸鹽處理條件,係依鉻酸濃度1g/L、pH11、溶液溫度25℃、電流密度1A/dm2實施。 Further, the rust-preventing treatment further forms a chromate layer after the rust-preventing treatment of the zinc-nickel alloy. The chromate treatment conditions at this time were carried out in accordance with a chromic acid concentration of 1 g/L, a pH of 11, a solution temperature of 25 ° C, and a current density of 1 A/dm 2 .

矽烷偶合劑處理:若結束以上的防銹處理,經施行水洗後,馬上施行矽烷偶合劑處理,而施行在黑色粗化面的防銹處理層上吸附矽烷偶合劑。此時的溶液係使用以純水為溶劑,且3-胺丙基三甲氧基矽烷濃度設為3g/L者。又,該溶液利用淋灑方式吹抵於黑色粗化面而施行吸附處理。若結束矽烷偶合劑的吸附,最終利用電熱器使水分蒸散,便獲得厚12μm的黑色化表面處理銅箔。 Treatment with decane coupling agent: When the above rust-preventing treatment is completed, the decane coupling agent treatment is performed immediately after the water washing, and the decane coupling agent is adsorbed on the rust-preventing treatment layer of the black roughened surface. In the solution at this time, pure water was used as a solvent, and the concentration of 3-aminopropyltrimethoxydecane was set to 3 g/L. Further, the solution was sprayed against the black roughened surface by a shower method to carry out an adsorption treatment. When the adsorption of the decane coupling agent was completed, the water was finally evaporated by an electric heater to obtain a blackened surface-treated copper foil having a thickness of 12 μm.

依如上述所獲得本申請案的黑色化表面處理銅箔之掃描式電子顯微鏡觀察影像,係如圖1所示。又,相關所評價的諸項特性,為使與比較例間的對比較為容易,便整理如表1所示。 The scanning electron microscope observation image of the blackened surface-treated copper foil of the present application obtained as described above is shown in FIG. Further, in order to make the comparison with the comparative examples easier, the characteristics of the related evaluations are as shown in Table 1.

[實施例2] [Embodiment 2]

實施例2係製造厚度12μm的電解銅箔,施行與實施例1同樣的黑色粗化、防銹處理及矽烷偶合劑處理,而製作黑色化表面處理銅箔。 In Example 2, an electrolytic copper foil having a thickness of 12 μm was produced, and blackening, rust-preventing treatment, and decane coupling agent treatment in the same manner as in Example 1 were carried out to prepare a blackened surface-treated copper foil.

電解銅箔的製造:銅電解液係使用實施例1之雙 (3-磺丙基)二硫醚濃度20mg/L的硫酸酸性硫酸銅溶液,依照與實施例1同樣的條件獲得厚度12μm的電解銅箔。該電解銅箔析出面的波浪最大高低差(Wmax)係1.2μm。 Production of Electrolytic Copper Foil: Copper Electrolyte System Using the Double of Example 1 An electrolytic copper sulfide solution having a thickness of 12 μm was obtained under the same conditions as in Example 1 except that the (3-sulfopropyl) disulfide concentration was 20 mg/L. The maximum wave height difference (Wmax) of the deposited surface of the electrolytic copper foil was 1.2 μm.

使用上述電解銅箔,施行與實施例1同樣的黑色 粗化、防銹處理、矽烷偶合劑處理,獲得實施例2的黑色化表面處理銅箔。相關所評價的諸項特性,為使與比較例間的對比較為容易,便整理如表1所示。 The same black color as in Example 1 was carried out using the above-mentioned electrolytic copper foil. The blackened surface-treated copper foil of Example 2 was obtained by roughening, rust-proof treatment, and decane coupling agent treatment. The characteristics of the relevant evaluations are as shown in Table 1 in order to make comparison with the comparative examples easier.

[實施例3] [Example 3]

實施例3係使用與實施例1相同的電解銅箔,施行黑色粗化面、防銹處理、及矽烷偶合劑處理,而製作黑色化表面處理銅箔。如下述,僅就與實施例1不同的黑色粗化進行說明。 In Example 3, a blackened surface-treated copper foil was produced by using the same electrolytic copper foil as in Example 1 and applying a black roughening surface, a rustproofing treatment, and a decane coupling agent treatment. As will be described below, only the black roughening different from the first embodiment will be described.

黑色粗化:對上述電解銅箔所包括的電極面及析出面內、析出面側,施行預粗化處理。此時的預粗化處理係依下述2階段製程實施。 Black roughening: Pre-roughening treatment is performed on the electrode surface, the deposition surface, and the deposition surface side of the electrolytic copper foil. The pre-roughening treatment at this time is carried out in accordance with the following two-stage process.

預粗化處理的第1階段係使用銅濃度18g/l、自由硫酸濃度70g/l的粗化處理用銅電解溶液,依溶液溫度25℃、電流密度4A/dm2施行4秒鐘電解,並水洗。然後,第2階段係使用銅濃度65g/l、自由硫酸濃度60g/l的銅電解溶液,依溶液溫度45℃、電流密度5A/dm2施行5秒鐘電解,並水洗,而施行預粗化處理。此階段的電解銅箔析出面,其波浪最大高低差(Wmax)係0.9μm。所以,預粗化處理前的該析出面係波浪最大高低差(Wmax)0.8μm,該波浪並無太大變動,可理解屬於適 當範圍的波浪。 In the first stage of the pre-roughening treatment, a copper electrolytic solution for roughening treatment having a copper concentration of 18 g/l and a free sulfuric acid concentration of 70 g/l was used, and electrolysis was carried out for 4 seconds depending on the solution temperature of 25 ° C and a current density of 4 A/dm 2 . Washed. Then, in the second stage, a copper electrolytic solution having a copper concentration of 65 g/l and a free sulfuric acid concentration of 60 g/l was used, and electrolysis was carried out for 5 seconds according to the solution temperature of 45 ° C and a current density of 5 A/dm 2 , and washed with water to perform pre-coarsening. deal with. At the stage of the electrolytic copper foil deposition surface, the maximum wave height difference (Wmax) was 0.9 μm. Therefore, the precipitation surface before the pre-roughening treatment has a wave maximum height difference (Wmax) of 0.8 μm, and the wave does not greatly change, and waves belonging to an appropriate range can be understood.

再者,對經施行預粗化處理過的該析出面,與實施例1同樣地施行黑色粗化、防銹處理、及矽烷偶合劑處理,便獲得實施例3的黑色化表面處理銅箔。相關所評價的諸項特性,為使與比較例間的對比較為容易,便整理如表1所示。 Further, the precipitated surface subjected to the pre-roughening treatment was subjected to black roughening, rust-preventing treatment, and decane coupling agent treatment in the same manner as in Example 1, to obtain a blackened surface-treated copper foil of Example 3. The characteristics of the relevant evaluations are as shown in Table 1 in order to make comparison with the comparative examples easier.

[比較例1] [Comparative Example 1]

比較例1係對實施例1所使用的電解銅箔析出面,依照不同於實施例1的方法施行粗化處理。所以,因為與實施例1間僅粗化處理不同,因而下述僅相關粗化處理進行詳細說明。 In Comparative Example 1, the surface of the electrolytic copper foil used in Example 1 was subjected to a roughening treatment in accordance with the method different from that of Example 1. Therefore, since only the roughening process is different from that in the first embodiment, only the relevant roughening processing will be described below in detail.

粗化處理:比較例1係對上述電解銅箔的析出面依以下的2階段製程施行粗化處理。粗化處理的第1階段係使用銅濃度8g/l、自由硫酸濃度50g/l、9-苯基吖啶濃度150mg/l、及氯濃度50mg/l的粗化處理用銅電解溶液,依溶液溫度30℃、電流密度19A/dm2施行電解,並水洗。然後,第2階段係使用銅濃度65g/l、及自由硫酸濃度90g/l的銅電解溶液,依溶液溫度48℃、電流密度15A/dm2施行電解,並水洗,而施行粗化處理。 Roughening treatment: In Comparative Example 1, the deposition surface of the above-mentioned electrolytic copper foil was subjected to a roughening treatment in accordance with the following two-stage process. The first stage of the roughening treatment is a copper electrolytic solution for roughening treatment using a copper concentration of 8 g/l, a free sulfuric acid concentration of 50 g/l, a 9-phenylpyridinium concentration of 150 mg/l, and a chlorine concentration of 50 mg/l. Electrolysis was carried out at a temperature of 30 ° C and a current density of 19 A/dm 2 and washed with water. Then, in the second stage, a copper electrolytic solution having a copper concentration of 65 g/l and a free sulfuric acid concentration of 90 g/l was used, and electrolysis was carried out at a solution temperature of 48 ° C and a current density of 15 A/dm 2 , and washed with water to carry out a roughening treatment.

若結束上述粗化處理,便施行與實施例1同樣的防銹處理、矽烷偶合劑處理,獲得比較例1的表面處理銅箔。該比較例1的表面處理銅箔之掃描式電子顯微鏡觀察影像,如圖2所示。又,相關所評價的諸項特性,為使與實施例間的對比較為容易,便整理如表1所示。 When the above-mentioned roughening treatment was completed, the same rust-preventing treatment and decane coupling agent treatment as in Example 1 were carried out to obtain a surface-treated copper foil of Comparative Example 1. The scanning electron microscope observation image of the surface-treated copper foil of Comparative Example 1 is shown in Fig. 2 . Further, in order to make the comparison with the examples easier, the correlations were evaluated as shown in Table 1.

[比較例2] [Comparative Example 2]

比較例2係使用與實施例1相同的電解銅箔,對 與實施例1同樣的析出面,依照不同於實施例1的方法施行粗化處理。所以,因為與實施例1間僅粗化處理不同,因而下述僅相關粗化處理進行詳細說明。 In Comparative Example 2, the same electrolytic copper foil as in Example 1 was used. The deposition surface similar to that of Example 1 was subjected to a roughening treatment in accordance with the method different from that of Example 1. Therefore, since only the roughening process is different from that in the first embodiment, only the relevant roughening processing will be described below in detail.

粗化處理:比較例2係對上述電解銅箔的析出面, 依照以下方法施行粗化處理。粗化處理的第1階段係使用銅濃度18g/l、及自由硫酸濃度70g/l的粗化處理用銅電解溶液,依溶液溫度25℃、電流密度10A/dm2、通電時間10秒施行電解,並水洗。然後,第2階段係使用銅濃度65g/l、及自由硫酸濃度60g/l的銅電解溶液,依液溫45℃、電流密度15A/dm2施行20秒鐘電解而施行粗化處理。 Roughening treatment: In Comparative Example 2, the deposition surface of the above-mentioned electrolytic copper foil was subjected to a roughening treatment in accordance with the following method. The first stage of the roughening treatment is a copper electrolytic solution for roughening treatment using a copper concentration of 18 g/l and a free sulfuric acid concentration of 70 g/l, and electrolysis is carried out according to a solution temperature of 25 ° C, a current density of 10 A/dm 2 , and an energization time of 10 seconds. And washed. Then, in the second stage, a copper electrolytic solution having a copper concentration of 65 g/l and a free sulfuric acid concentration of 60 g/l was used, and electrolysis was performed for 20 seconds at a liquid temperature of 45 ° C and a current density of 15 A/dm 2 to carry out a roughening treatment.

若結束上述粗化處理,便施行與實施例同樣的防 銹處理、矽烷偶合劑處理,獲得比較例2的表面處理銅箔。該比較例2的表面處理銅箔之掃描式電子顯微鏡觀察影像,係如圖4所示。又,相關所評價的諸項特性,為使與實施例間的對比較為容易,便整理如表1所示。 If the above roughening process is completed, the same protection as in the embodiment is performed. The surface treatment copper foil of Comparative Example 2 was obtained by a rust treatment and a decane coupling agent treatment. The scanning electron microscope observation image of the surface-treated copper foil of Comparative Example 2 is shown in Fig. 4 . Further, in order to make the comparison with the examples easier, the correlations were evaluated as shown in Table 1.

[比較例3] [Comparative Example 3]

比較例3係使用與實施例1相同的電解銅箔,對與實施例1所使用析出面背後面的電極面,施行與實施例1同樣的粗化處理、防銹處理、及矽烷偶合劑處理。所以,因為與實施例1間僅就施行粗化處理的面不同而已,因而省略重複詳細說明。該比較例3的表面處理銅箔之掃描式電子顯微鏡觀察影像,係如圖4所示。又,相關所評價的諸項特性,為使與實施例間的對比較為容易,便整理如表1所示。 In Comparative Example 3, the same electrodeposited copper foil as in Example 1 was used, and the electrode surface on the back surface of the deposition surface used in Example 1 was subjected to the same roughening treatment, rust-preventing treatment, and decane coupling agent treatment as in Example 1. . Therefore, since only the surface to be subjected to the roughening treatment is different from that in the first embodiment, the detailed description will be omitted. The scanning electron microscope observation image of the surface-treated copper foil of Comparative Example 3 is shown in Fig. 4 . Further, in order to make the comparison with the examples easier, the correlations were evaluated as shown in Table 1.

[評價方法] [Evaluation method]

波浪最大高低差(Wmax):測定機器係使用zygo New View 5032(Zygo公司製),解析軟體係使用Metro Pro Ver.8.0.2,採用低頻濾波器11μm條件,測定波浪的最大高低差(Wmax)。此時,使表面處理銅箔的被測定面密接於試料台並固定,在試料片的1cm方塊範圍內,從108μm×144μm視野中選擇6處進行測定,並將從6處測定點所獲得波浪最大高低差(Wmax)的平均值,採用為代表值。 Wave maximum height difference (Wmax): The measurement system uses zygo New View 5032 (manufactured by Zygo Co., Ltd.), and the analytical soft system uses Metro Pro Ver. 8.0.2, and the maximum height difference (Wmax) of the wave is measured using a low-frequency filter of 11 μm. . At this time, the surface to be measured of the surface-treated copper foil was adhered to the sample stage and fixed, and 6 points were selected from the field of view of 108 μm × 144 μm in the range of 1 cm square of the sample piece, and waves were obtained from the measurement points at 6 points. The average value of the maximum height difference (Wmax) is taken as the representative value.

明度L*:使用日本電色工業股份有限公司製的型號SE2000,根據JIS Z8729進行測定。 Lightness L * : Measurement was carried out in accordance with JIS Z8729 using a model SE2000 manufactured by Nippon Denshoku Industries Co., Ltd.

平均粗糙度(Ra):使用小坂研究所製的觸針式表面粗糙度計SE3500(觸針曲率半徑:2μm),根據JIS B0601進行測定。 Average roughness (Ra): Measured according to JIS B0601 using a stylus type surface roughness meter SE3500 (contact lens curvature radius: 2 μm) manufactured by Otaru Laboratory.

銅粒子的附著個數:對實施例的黑色化表面處理銅箔之黑色粗化面、及比較例的表面處理銅箔之粗化面,從斜45°方向進行觀察的場效發射型掃描式電子顯微鏡觀察影像(倍率:20000倍)中,目視計數在3μm×3μm區域中能觀察到的 銅粒子附著個數。 The number of copper particles adhered: the blackened surface of the blackened surface-treated copper foil of the example, and the roughened surface of the surface-treated copper foil of the comparative example, and the field-effect emission type scanning type observed from the oblique 45° direction In the electron microscope observation image (magnification: 20000 times), the visual count can be observed in the region of 3 μm × 3 μm. The number of copper particles attached.

動摩擦係數:使用新東科學股份有限公司製的TRIBOGEAR表面性測定機TYPE14進行測定。在測定用平台上固定聚醯亞胺樹脂薄膜(宇部興產股份有限公司製的厚度50μm之UPILEX)。依該聚醯亞胺樹脂薄膜與表面處理銅箔的粗化面呈相對對向方式,將表面處理銅箔固定於摩擦區塊上。然後,依垂直荷重100g、移動速度100mm/min、移動距離10mm的條件,輸出測定時間與摩擦阻力,從在測定值呈穩定2秒~6秒間所測定摩擦力的平均值計算出動摩擦係數。 Dynamic friction coefficient: Measurement was carried out using a TRIBOGEAR surface measuring machine TYPE 14 manufactured by Shinto Scientific Co., Ltd. A polyimine resin film (UPILEX having a thickness of 50 μm manufactured by Ube Industries, Ltd.) was fixed on the measuring platform. The surface-treated copper foil is fixed to the friction block in a manner that the roughened surface of the polyimide film and the surface-treated copper foil are opposed to each other. Then, the measurement time and the frictional resistance were output under the conditions of a vertical load of 100 g, a moving speed of 100 mm/min, and a moving distance of 10 mm, and the dynamic friction coefficient was calculated from the average value of the frictional force measured between the measured values and the stable value of 2 seconds to 6 seconds.

霧度(Haze):將表面處理銅箔與PET薄膜施行熱壓接而製作銅包覆積層板。然後,蝕刻除去該表面處理銅箔,針對殘留的PET薄膜使用測霾計NDH5000(日本電色工業股份有限公司製),根據JIS-K7136(2000),測定23℃下的薄膜霧度(Haze:單位%)計3處,求取平均值。 Haze: A copper-clad laminate is produced by subjecting a surface-treated copper foil to a PET film by thermocompression bonding. Then, the surface-treated copper foil was removed by etching, and the film haze at 23 ° C was measured for a residual PET film using a dynamometer NDH5000 (manufactured by Nippon Denshoku Industries Co., Ltd.) in accordance with JIS-K7136 (2000) (Haze: Unit %) counts 3 places and averages.

[實施例與比較例的對比] [Comparative Example vs. Comparative Example]

首先參照圖式,相關實施例與比較例的「波浪最大高低差(Wmax)」進行對比。比較例的波浪最大高低差(Wmax)值較高於實施例的波浪最大高低差(Wmax),且該等比較例的霧度(Haze)值亦較高於實施例,判斷欠缺透明度。 Referring first to the drawings, the correlation example is compared with the "wave maximum height difference (Wmax)" of the comparative example. The wave maximum height difference (Wmax) value of the comparative example was higher than the wave maximum height difference (Wmax) of the example, and the haze values of the comparative examples were also higher than those of the examples, and the lack of transparency was judged.

但是,比較例2的波浪最大高低差(Wmax)相較於實施例2的波浪最大高低差(Wmax)之下,可認為並無太大差異。然而,若就霧度(Haze)值而言,實施例2係12,相對的比較例2係84,得知實施例2時的樹脂薄膜透明度大幅提高。此處,若就表示實施例1的黑色粗化狀態之圖1、與表示比較例 2的粗化處理狀態之圖3進行對比,則可得知呈現完全不同的表面形狀。由此現象得知,僅降低波浪的最大高低差(Wmax)值,並無法獲得本申請案可撓式印刷電路板製造用之黑色化表面處理銅箔的目標粗化處理表面。 However, the wave maximum height difference (Wmax) of Comparative Example 2 was considered to be not much different from the wave maximum height difference (Wmax) of Example 2. However, in the case of the haze value, Example 2 was 12, and Comparative Comparative Example 2 was 84, and the transparency of the resin film in Example 2 was significantly improved. Here, FIG. 1 showing the black roughening state of the first embodiment, and a comparative example are shown. Comparing Fig. 3 of the roughening state of 2, it can be seen that the surface shape is completely different. From this phenomenon, it was found that only the maximum height difference (Wmax) value of the wave was lowered, and the target roughened surface of the blackened surface-treated copper foil for manufacturing the flexible printed circuit board of the present application could not be obtained.

在此,相關粗化處理面的L*a*b*色度系統之明度 L*,就實施例與比較例進行對比。表1的實施例之明度L*值,實施例1、實施例2、實施例3均包括有「明度L*在30以下」的色調。相對於此,比較例1及比較例2的粗化面則明度L*超過30。所以,得知比較例1及比較例2的霧度(Haze)值變大。 另一方面,比較例3的粗化面較實施例3的黑色粗化面呈現更暗色調,得知習知銅箔中亦有如比較例3包括「明度L*在30以下」的色調者。然而,此時實施例3的霧度(Haze)值係8,相對的比較例3的霧度(Haze)值則為50的非常高,欠缺透明度。所以,得知即便僅L*a*b*色度系統的明度L*值呈良好的黑色,但仍會有無法獲得如本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔般的較佳黑色粗化面情況。 Here, the brightness L * of the L * a * b * chromaticity system of the relevant roughening surface is compared with the comparative example. The lightness L * values of the examples in Table 1 and Examples 1, 2, and 3 all include a color tone of "lightness L * is 30 or less". On the other hand, in the roughened surfaces of Comparative Example 1 and Comparative Example 2, the lightness L * exceeded 30. Therefore, it was found that the haze values of Comparative Example 1 and Comparative Example 2 became large. On the other hand, the roughened surface of Comparative Example 3 exhibited a darker color tone than the black roughened surface of Example 3, and it was found that the conventional copper foil also had a color tone of Comparative Example 3 including "lightness L * of 30 or less". However, at this time, the haze value of Example 3 was 8, and the haze value of Comparative Comparative Example 3 was 50, which was very high, and lacked transparency. Therefore, it is known that even if only the L * a * b * chromaticity system has a good blackness L * value, there is still no blackened surface-treated copper for manufacturing a flexible printed circuit board as in the present application. A foil-like black roughened surface is preferred.

再者,由圖1與圖2~圖4的對比,僅就銅粒子的 附著狀態相較於比較例之下,得知實施例的銅粒子較為微細,且呈均勻附著較多的銅粒子。由表1中得知,實施例、與比較例1及比較例2的銅粒子附著個數明顯不同。由此現象得知,相較於比較例1及比較例2之下,實施例的黑色粗化面藉由附著較多的微細銅粒子,得知可包括有良好的黑色色調,且形成沒有波浪及凹凸的平坦表面。另一方面,比較例3的銅粒子附著個數係471個,滿足本申請案的可撓式印刷電路板製造用黑 色化表面處理銅箔的較佳400個~2500個銅粒子附著之條件。 但是,如同上述,比較例3的霧度(Haze)值係50的非常高,欠缺透明度。所以,得知即便僅使所附著銅粒子的個數適當,但仍無法獲得與本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔為同等級的黑色粗化面。 Furthermore, from the comparison of Figure 1 and Figure 2 to Figure 4, only copper particles The state of adhesion was lower than that of the comparative example, and it was found that the copper particles of the examples were fine and had a large amount of copper particles uniformly attached. As is apparent from Table 1, the number of copper particles attached to the examples and Comparative Examples 1 and 2 was significantly different. From this phenomenon, it was found that the black roughened surface of the example was formed by attaching a large amount of fine copper particles to the black roughened surface, and it was found that a good black color tone was formed and no wave was formed as compared with Comparative Example 1 and Comparative Example 2. And the flat surface of the bump. On the other hand, the number of copper particles attached in Comparative Example 3 was 471, which satisfies the black for manufacturing a flexible printed circuit board of the present application. Preferably, 400 to 2500 copper particles are adhered to the surface treated copper foil. However, as described above, the haze value of Comparative Example 3 is very high, and lacks transparency. Therefore, it has been found that even if only the number of adhered copper particles is appropriate, the black roughened surface of the same grade as the blackened surface-treated copper foil for producing a flexible printed circuit board of the present application cannot be obtained.

由以上現象得知,本申請案的可撓式印刷電路板 製造用之黑色化表面處理銅箔所包括黑色粗化面,必需至少兼具「波浪最大高低差(Wmax)在1.2μm以下」的條件、與「包括L*a*b*色度系統的明度L*在30以下的色調」的條件,若滿足此條件,得知可明顯提升可撓式印刷電路板的CCD檢視性及AOI檢查精度。又,本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔所包括黑色粗化面,兼具附著400個~2500個銅粒子的條件,亦可謂改善本申請案所謂「霧度(Haze)」值的有用條件。 According to the above phenomenon, the blackened surface-treated copper foil for manufacturing a flexible printed circuit board of the present application includes a black roughened surface, and it is necessary to have at least a "wave maximum height difference (Wmax) of 1.2 μm or less". Conditions and conditions for "including a hue of L * a * b * chromaticity system with a brightness L * of 30 or less", if this condition is satisfied, it is known that the CCD visibility and AOI inspection of the flexible printed circuit board can be significantly improved. Precision. Moreover, the blackened surface-treated copper foil for manufacturing a flexible printed circuit board of the present application includes a black roughened surface and a condition of attaching 400 to 2500 copper particles, and can also be said to improve the so-called "fog" in the present application. Useful conditions for the value of Haze.

再者,若著眼於實施例與比較例的動摩擦係數 值,得知實施例與比較例並無太大差異,動摩擦係數均可達0.50以上。由此現象得知,本申請案的黑色化表面處理銅箔之黑色粗化面相較於習知表面處理銅箔之下,即便包括有微細凹凸,但當利用輥層壓法施行樹脂薄膜與黑色化表面處理銅箔的積層時,在黑色化表面處理銅箔與樹脂薄膜間之接著界面處不會發生滑動。又,該接著界面處亦不會發生起皺與氣泡,判斷可進行良好的積層。 Furthermore, if attention is paid to the dynamic friction coefficient of the embodiment and the comparative example It is found that the examples are not much different from the comparative examples, and the dynamic friction coefficient can be up to 0.50 or more. From this phenomenon, it is understood that the black roughened surface of the blackened surface-treated copper foil of the present application is subjected to a resin film and a black film by a roll lamination method even if fine irregularities are included under the conventional surface-treated copper foil. When the surface layer of the copper foil is laminated, no sliding occurs at the interface between the blackened surface treated copper foil and the resin film. Further, wrinkles and bubbles do not occur at the subsequent interface, and it is judged that good lamination can be performed.

由上述實施例及比較例的製造條件對比中得知, 本申請案的黑色化表面處理銅箔藉由使用波浪最大高低差 (Wmax)在1.2μm以下的銅箔,對其表面施行使用含9-苯基吖啶之黑色粗化用銅電解溶液的黑色粗化,便可效率佳地生產。 It is known from the comparison of the manufacturing conditions of the above examples and comparative examples that The blackened surface treated copper foil of the present application uses the maximum height difference of the waves (Wmax) A copper foil having a thickness of 1.2 μm or less is subjected to blackening of a black electrolytic solution for black roughening containing 9-phenylacridine, and can be efficiently produced.

產業上之可利用性 Industrial availability

本申請案的黑色化表面處理銅箔係適用於可撓式印刷電路板製造的表面處理銅箔。因為該黑色化表面處理銅箔包括有能提升CCD檢視性及AOI檢測精度的黑色化表面,因而使液晶顯示器模組的連接端子與可撓式印刷電路板的連接端子間之對位較為容易,且提升所形成電路的檢查精度,能效率佳防止不良品流出。又,本申請案的可撓式印刷電路板製造用之黑色化表面處理銅箔,因為微細黑色粗化粒子係由銅形成,因而包括有良好蝕刻特性,可使電路形成時進行蝕刻的過蝕刻時間縮短化,俾可輕易地削減運轉成本,故屬較佳 The blackened surface-treated copper foil of the present application is suitable for a surface-treated copper foil manufactured by a flexible printed circuit board. Since the blackened surface-treated copper foil includes a blackened surface capable of improving CCD visibility and AOI detection accuracy, alignment between the connection terminal of the liquid crystal display module and the connection terminal of the flexible printed circuit board is relatively easy. Moreover, the inspection accuracy of the formed circuit can be improved, and the efficiency can be prevented to prevent the outflow of defective products. Moreover, the blackened surface-treated copper foil for manufacturing a flexible printed circuit board of the present application, since the fine black roughened particles are formed of copper, includes an overetch which has good etching characteristics and can be etched when the circuit is formed. Time is shortened, and it is easy to reduce operating costs, so it is better

Claims (9)

一種可撓式印刷電路板製造用之黑色化表面處理銅箔,係包括有粗化處理面的表面處理銅箔,其特徵在於:該粗化處理面係波浪的最大高低差(Wmax)在1.2μm以下,且包括有L*a*b*色度系統的明度L*在30以下的色調之黑色粗化面。 A blackened surface-treated copper foil for manufacturing a flexible printed circuit board, comprising a surface-treated copper foil having a roughened surface, wherein the roughened surface has a maximum wave height difference (Wmax) of 1.2 Μm or less, and includes a black roughened surface having a tone L * of 30 or less in the L * a * b * chromaticity system. 如申請專利範圍第1項之可撓式印刷電路板製造用之黑色化表面處理銅箔,其中,上述黑色粗化面係經使附著粒徑10nm~250nm銅粒子而粗化者。 The blackened surface-treated copper foil for manufacturing a flexible printed circuit board according to the first aspect of the invention, wherein the black roughened surface is roughened by attaching copper particles having a particle diameter of 10 nm to 250 nm. 如申請專利範圍第2項之可撓式印刷電路板製造用之黑色化表面處理銅箔,其中,上述黑色粗化面係在3μm×3μm區域中附著400個~2500個銅粒子。 The blackened surface-treated copper foil for manufacturing a flexible printed circuit board according to the second aspect of the invention, wherein the black roughened surface is bonded to 400 to 2500 copper particles in a region of 3 μm × 3 μm. 如申請專利範圍第1項之可撓式印刷電路板製造用之黑色化表面處理銅箔,其中,上述黑色粗化面係平均粗糙度Ra在0.5μm以下。 The blackened surface-treated copper foil for producing a flexible printed circuit board according to the first aspect of the invention, wherein the black roughened surface has an average roughness Ra of 0.5 μm or less. 如申請專利範圍第1項之可撓式印刷電路板製造用之黑色化表面處理銅箔,其中,上述黑色粗化面係動摩擦係數達0.50以上。 The blackened surface-treated copper foil for manufacturing a flexible printed circuit board according to the first aspect of the invention, wherein the black roughening surface has a coefficient of dynamic friction of 0.50 or more. 一種可撓式印刷電路板製造用之黑色化表面處理銅箔的製造方法,係申請專利範圍第1項之可撓式印刷電路板製造用之黑色化表面處理銅箔的製造方法,其特徵在於:於銅箔的波浪最大高低差(Wmax)在1.2μm以下的表面上, 使用銅濃度10g/L~20g/L、自由硫酸濃度15g/L~100g/L、9-苯基吖啶濃度100mg/L~200mg/L、氯濃度20mg/L~100mg/L的黑色粗化用銅電解溶液,使附著微細銅粒子而施行黑色粗化。 A method for producing a blackened surface-treated copper foil for manufacturing a flexible printed circuit board, which is characterized in that the method for producing a blackened surface-treated copper foil for manufacturing a flexible printed circuit board according to claim 1 is characterized in that : The maximum wave height difference (Wmax) of the copper foil on the surface below 1.2 μm, Black coarsening using copper concentration 10g/L~20g/L, free sulfuric acid concentration 15g/L~100g/L, 9-phenyl acridine concentration 100mg/L~200mg/L, chlorine concentration 20mg/L~100mg/L The copper electrolytic solution was applied to adhere fine copper particles to perform blackening. 如申請專利範圍第6項之可撓式印刷電路板製造用之黑色化表面處理銅箔的製造方法,其中,在溶液溫度20℃~40℃的黑色粗化用銅電解溶液中,將銅箔極化為陰極,並利用電流密度30A/dm2~100A/dm2施行電解,便對銅箔表面施行微細銅粒子的附著形成。 The method for producing a blackened surface-treated copper foil for manufacturing a flexible printed circuit board according to claim 6, wherein the copper foil is used in a copper electrolytic solution for black roughening at a solution temperature of 20 ° C to 40 ° C The polarization is a cathode, and electrolysis is performed by using a current density of 30 A/dm 2 to 100 A/dm 2 to form an adhesion of fine copper particles to the surface of the copper foil. 一種銅包覆積層板,其特徵在於:使用申請專利範圍第1項之可撓式印刷電路板製造用之黑色化表面處理銅箔而獲得。 A copper-clad laminate which is obtained by using a blackened surface-treated copper foil for the manufacture of a flexible printed circuit board according to claim 1. 一種可撓式印刷電路板,其特徵在於:使用申請專利範圍第8項之銅包覆積層板而獲得。 A flexible printed circuit board obtained by using a copper-clad laminate of the eighth application of the patent application.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9397343B1 (en) 2015-10-15 2016-07-19 Chang Chun Petrochemical Co., Ltd. Copper foil exhibiting anti-swelling properties
TWI609995B (en) * 2015-07-06 2018-01-01 Furukawa Electric Co Ltd Electrolytic copper foil, negative electrode for lithium ion secondary battery, lithium ion secondary battery, printed circuit board and electromagnetic wave shielding material

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106687623B (en) * 2014-09-02 2019-07-16 三井金属矿业株式会社 Melanism surface treatment copper foil and copper foil with carrier foils
WO2016093109A1 (en) * 2014-12-08 2016-06-16 三井金属鉱業株式会社 Method of manufacturing printed wiring board
KR102031065B1 (en) * 2015-01-22 2019-10-11 미쓰이금속광업주식회사 Ultrathin copper foil with carrier and method for manufacturing same, copper-clad laminate, and method for manufacturing printed-wiring board
JP6487704B2 (en) 2015-02-12 2019-03-20 福田金属箔粉工業株式会社 Treated copper foil, copper-clad laminate using the treated copper foil, and printed wiring board
WO2016158775A1 (en) * 2015-03-31 2016-10-06 三井金属鉱業株式会社 Roughened copper foil, copper foil provided with carrier, copper-clad laminated sheet, and printed wiring board
CN109072472B (en) * 2016-04-14 2020-10-16 三井金属矿业株式会社 Surface-treated copper foil, copper foil with carrier, and copper-clad laminate and printed wiring board manufacturing method using same
CN106229344B (en) 2016-08-19 2019-10-15 京东方科技集团股份有限公司 Thin film transistor (TFT), preparation method and display device
KR102180926B1 (en) 2017-06-28 2020-11-19 에스케이넥실리스 주식회사 Copper foil having improved workability and charge discharge characteristics, electrode comprisng the same, secondary battery comprising the same and method for manufacturing the same
TWI694176B (en) * 2018-08-10 2020-05-21 南韓商Kcf科技有限公司 Copper foil having improved workability and charge/discharge characteristics, electrode including the same, secondary battery including the same and method for manufacturing the same
CN111058063B (en) * 2018-10-16 2021-02-02 长春石油化学股份有限公司 Electrolytic copper foil, electrode comprising same, and lithium ion battery comprising same
US11365486B2 (en) 2018-10-16 2022-06-21 Chang Chun Petrochemical Co., Ltd. Electrolytic copper foil, electrode comprising the same, and lithium ion battery comprising the same
JP7456578B2 (en) * 2019-05-09 2024-03-27 ナミックス株式会社 Copper surface processing equipment
JP7352939B2 (en) * 2019-05-09 2023-09-29 ナミックス株式会社 composite copper parts
JP7409602B2 (en) * 2019-05-09 2024-01-09 ナミックス株式会社 composite copper parts
KR20230160813A (en) 2021-03-26 2023-11-24 미쓰이금속광업주식회사 Roughened copper foil, copper foil with carrier, copper clad laminate and printed wiring board
WO2022202540A1 (en) 2021-03-26 2022-09-29 三井金属鉱業株式会社 Roughened copper foil, copper foil equipped with carrier, copper-cladded laminate board, and printed wiring board
US20240172359A1 (en) 2021-03-29 2024-05-23 Mitsui Mining & Smelting Co., Ltd. Roughened copper foil, copper-cladded laminate board, and printed wiring board
KR20230161954A (en) 2021-03-29 2023-11-28 미쓰이금속광업주식회사 Roughened copper foil, copper clad laminate and printed wiring board
CN115135043B (en) * 2022-07-18 2023-03-07 东莞市国盈电子有限公司 Sensor circuit board and manufacturing process thereof

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3306404B2 (en) * 2000-01-28 2002-07-24 三井金属鉱業株式会社 Method for producing surface-treated copper foil and copper-clad laminate using surface-treated copper foil obtained by the method
JP2004263300A (en) * 2003-02-12 2004-09-24 Furukawa Techno Research Kk Copper foil for fine pattern printed circuit and manufacturing method therefor
JP2004256832A (en) * 2003-02-24 2004-09-16 Mitsui Mining & Smelting Co Ltd Surface treated copper foil provided with blackening treated face, and magnetic shielding conductive mesh for front panel of plasma display obtained by using the surface treated copper foil
TW200535259A (en) * 2004-02-06 2005-11-01 Furukawa Circuit Foil Treated copper foil and circuit board
US7341796B2 (en) * 2004-02-17 2008-03-11 Nippon Mining & Metals Co., Ltd Copper foil having blackened surface or layer
US6979627B2 (en) 2004-04-30 2005-12-27 Freescale Semiconductor, Inc. Isolation trench
JP2006210689A (en) * 2005-01-28 2006-08-10 Fukuda Metal Foil & Powder Co Ltd Copper foil for high frequency printed wiring board and its production method
CN101180178B (en) * 2005-04-04 2011-11-09 宇部兴产株式会社 Copper clad laminate
TW200738913A (en) * 2006-03-10 2007-10-16 Mitsui Mining & Smelting Co Surface treated elctrolytic copper foil and process for producing the same
JP4958045B2 (en) 2006-10-27 2012-06-20 三井金属鉱業株式会社 Surface-treated copper foil for producing flexible copper-clad laminate and flexible copper-clad laminate obtained using the surface-treated copper foil
JP2009004423A (en) * 2007-06-19 2009-01-08 Hitachi Cable Ltd Copper foil with carrier foil
JP5256747B2 (en) * 2008-01-21 2013-08-07 宇部興産株式会社 Manufacturing method of copper wiring insulating film by semi-additive method, and copper wiring insulating film manufactured therefrom
WO2010046804A2 (en) * 2008-10-21 2010-04-29 Alembic Limited A process for preparation of losartan potassium form i
CN103154327A (en) * 2010-10-06 2013-06-12 古河电气工业株式会社 Copper foil and manufacturing method therefor, copper foil with carrier and manufacturing method therefor, printed circuit board, and multilayer printed circuit board

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI609995B (en) * 2015-07-06 2018-01-01 Furukawa Electric Co Ltd Electrolytic copper foil, negative electrode for lithium ion secondary battery, lithium ion secondary battery, printed circuit board and electromagnetic wave shielding material
US9397343B1 (en) 2015-10-15 2016-07-19 Chang Chun Petrochemical Co., Ltd. Copper foil exhibiting anti-swelling properties

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