TW201435378A - Measurement apparatus and optical component thereof and operation method thereof - Google Patents
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Description
本揭露是有關於一種光學裝置，且特別是有關於一種量測裝置及其光學元件與其操作方法。 The present disclosure relates to an optical device, and more particularly to a measuring device and its optical components and methods of operation thereof.
綠色能源是永續發展之重要議題，而風能是其中很大的一個項目。由於風場開發投入資本龐大，如何快速有效的評估、尋找合適的場址是首要重點。在風場評估中所量測的真實風速是重要參考數據。現有趨勢是以都卜勒光達(Doppler Lidar)取代傳統測風塔。在地面的都卜勒光達可以遠距遙測數十至數百公尺高度處的風場(即量測目標)。 Green energy is an important issue for sustainable development, and wind energy is one of the big projects. Due to the huge capital invested in wind farm development, how to quickly and effectively evaluate and find the right site is the primary focus. The actual wind speed measured in the wind field assessment is an important reference data. The current trend is to replace the traditional wind tower with Doppler Lidar. The Doppler light on the ground can remotely measure the wind field at a height of tens to hundreds of meters (ie, the measurement target).
傳統光達在雷射源端使用自由空間(free space)光路。自由空間光路架設符合直覺，理論上幾無傳遞損失，而且使用透鏡或反射鏡可以很容易保持相位波前。因此，自由空間光路被廣為應用於實驗室中的光達設計。然而，自由空間光路應用於戶外量測設備(光達)有許多缺點。在戶外(特別是海上的惡劣環境) 對於一個採用自由空間光路的光學系統是很嚴苛的考驗。例如，自由空間光路中的構件會面臨機械性能的問題(如熱變形、震動位移等機械問題而導致光軸偏移)。為求系統最大效益，組裝傳統光達時，雷射源、鏡面/透鏡、分光片、望遠鏡、濾光片以及光檢知器等眾多元件必須逐一進行光軸校準，並緊固於一光學平面上。外部環境(例如外部不均勻的導熱、震動或是其他不利因素)皆可能會使光軸發生偏移，導致光學效益降低甚或無法運作。 Traditional light uses a free space light path at the source of the laser. Free space optical path erection is intuitive, there is no theoretical transmission loss, and the phase wavefront can be easily maintained using a lens or mirror. Therefore, the free-space optical path is widely used in the design of light in the laboratory. However, the use of free-space optical paths for outdoor measurement equipment (Guangda) has many disadvantages. Outdoors (especially the harsh environment at sea) It is a very rigorous test for an optical system that uses a free-space optical path. For example, components in a free-space optical path can be subject to mechanical performance problems (such as thermal deformation, vibration displacement, etc., causing optical axis shifts). In order to maximize the benefits of the system, when assembling conventional light, many components such as laser source, mirror/lens, beam splitter, telescope, filter and optical detector must be optically aligned one by one and fastened to an optical plane. on. External environments (such as externally uneven heat transfer, vibration, or other unfavorable factors) can cause the optical axis to shift, resulting in reduced optical efficiency or even inoperability.
再者，在進行元件更換或維修時，傳統光達因為採用自由空間光路而需重行校準。例如，在雷射源更換後，必須在實驗室環境中重行校準光軸，而無法於工作現地進行光軸校準。另一方面，為避免外部環境因素的影響，一般光達必須封罩系統。然而，光達內部會因元件內反射，在自由空間光路中漫射形成干擾雜光(stray light)，嚴重影響訊噪比。自由空間光路亦會限制系統空間配置。由於自由空間光路有一定之傳遞順序，自由空間架構會限制主要元件之配置順序。當元件另需安排導熱、電路甚至重心配置時皆會造成影響。 Furthermore, in the case of component replacement or repair, the conventional light is recalibrated because of the free-space optical path. For example, after the laser source is replaced, the optical axis must be recalibrated in a laboratory environment, and the optical axis calibration cannot be performed in the field. On the other hand, in order to avoid the influence of external environmental factors, the general light must cover the system. However, the inside of the light is diffused in the free-space optical path due to internal reflection of the element to form a stray light, which seriously affects the signal-to-noise ratio. Free space light paths also limit system space configuration. Since the free-space optical path has a certain order of transmission, the free-space architecture limits the order in which the main components are configured. When the component needs to be arranged with heat conduction, circuit or even center of gravity configuration, it will affect.
再者，原始雷射光源會因為發熱產生熱飄移現象。例如，在雷射腔的溫度係數為9.1×10-6/℃，且雷射光波長為635 nm的條件下，外界溫度變化將造成雷射共振頻率飄移4.1 GHz/℃。相較於所欲量測風速的都卜勒效益(即量測訊號的頻率偏移量)通常極微小(例如約M Hz)。很明顯地，雷射光源的頻率飄移量將遠大於量測目標所造成的頻率偏移量。雷射光源的頻率飄移明顯為主 要誤差源。如果能發展特定元件簡化內部架構、減少量測誤差，對於光達之應用會是一個很有用的技術。 Furthermore, the original laser source will cause thermal drift due to heat generation. For example, under the condition that the temperature coefficient of the laser cavity is 9.1×10 -6 /°C and the wavelength of the laser light is 635 nm, the external temperature change will cause the laser resonance frequency to drift by 4.1 GHz/°C. The Doppler benefit (i.e., the frequency offset of the measurement signal) compared to the desired wind speed is typically very small (e.g., about M Hz). Obviously, the frequency drift of the laser source will be much larger than the frequency offset caused by the measurement target. The frequency drift of the laser source is clearly the main source of error. If you can develop specific components to simplify the internal architecture and reduce measurement errors, it will be a useful technique for the application of LIGHT.
本揭露提供一種量測裝置及其光學元件與其操作方法，以三組光纖分光部組成三向光纖架構，以光纖連接光源端、發射/接收端與光量測端。 The disclosure provides a measuring device, an optical component thereof and a method for operating the same. The three optical fiber splitting sections form a three-way optical fiber structure, and the optical fiber is connected to the light source end, the transmitting/receiving end and the light measuring end.
本揭露的一種光學元件，包括第一分光部、第二分光部、第三分光部、第一光纖(fiber)、第二光纖以及第三光纖。第一分光部具有光源端、第一分光端與第二分光端。第二分光部具有收發端、第三分光端與第四分光端。第三分光部具有量測端、第五分光端與第六分光端。第一光纖配置於第二分光端與第三分光端之間，其中從該光源端經由該第二分光端、該第一光纖與該第三分光端至該收發端形成第一光路徑。第二光纖配置於該第四分光端與該第六分光端之間，其中從該收發端經由該第四分光端、該第二光纖與該第六分光端至該量測端形成一第二光路徑。第三光纖配置於該第一分光端與該第五分光端之間，其中從該光源端經由該第一分光端、該第三光纖與該第五分光端至該量測端形成第三光路徑。 An optical component of the present disclosure includes a first beam splitting portion, a second beam splitting portion, a third beam splitting portion, a first fiber, a second fiber, and a third fiber. The first beam splitting portion has a light source end, a first splitting end, and a second split end. The second beam splitting unit has a transceiver end, a third split end, and a fourth split end. The third beam splitting portion has a measuring end, a fifth splitting end and a sixth splitting end. The first optical fiber is disposed between the second optical splitting end and the third optical splitting end, wherein the first optical path is formed from the light source end to the transceiver end via the second optical splitting end, the first optical fiber, and the third optical splitting end. a second optical fiber is disposed between the fourth optical splitting end and the sixth optical splitting end, wherein a second is formed from the transmitting end via the fourth splitting end, the second optical fiber, and the sixth splitting end to the measuring end Light path. a third optical fiber is disposed between the first optical splitting end and the fifth optical splitting end, wherein a third optical light is formed from the light source end to the measuring end via the first optical splitting end, the third optical fiber, and the fifth optical splitting end path.
本揭露的一種量測裝置，包括光學元件、光源電路、透鏡組以及光檢知電路。光學元件包括第一分光部、第二分光部、第三分光部、第一光纖、第二光纖以及第三光纖。第一光纖耦接 於第一分光部與第二分光部之間以提供一第一光路徑。第二光纖耦接於第二分光部與第三分光部之間以提供第二光路徑。第三光纖耦接於第一分光部與第二分光部之間以提供第三光路徑。光源電路耦接至第一分光部的光源端以提供第一光束，其中該第一光束被分束至該第一光路徑與該第三光路徑。透鏡組耦接至第二分光部的收發端，其中第一光路徑的第一光束通過該收發端與該透鏡組投射至量測目標，以及該透鏡組將該量測目標的第二光束通過該收發端傳送至第二光路徑。光檢知電路耦接至第三分光部的量測端，其中該光檢知電路通過該量測端偵檢第三光路徑的第一光束，以及通過該量測端偵檢第二光路徑的第二光束。 A measuring device according to the present disclosure includes an optical element, a light source circuit, a lens group, and a light detecting circuit. The optical element includes a first beam splitting portion, a second beam splitting portion, a third beam splitting portion, a first optical fiber, a second optical fiber, and a third optical fiber. First fiber coupling A first light path is provided between the first beam splitting portion and the second beam splitting portion. The second optical fiber is coupled between the second beam splitting portion and the third beam splitting portion to provide a second light path. The third optical fiber is coupled between the first beam splitting portion and the second beam splitting portion to provide a third light path. The light source circuit is coupled to the light source end of the first beam splitting portion to provide a first light beam, wherein the first light beam is split to the first light path and the third light path. The lens group is coupled to the transceiver end of the second beam splitting portion, wherein the first light beam of the first light path is projected to the measurement target through the transceiver end and the lens group, and the lens group passes the second light beam of the measurement target The transceiver is transmitted to the second optical path. The light detecting circuit is coupled to the measuring end of the third beam splitting portion, wherein the light detecting circuit detects the first light beam of the third light path through the measuring end, and detects the second light path through the measuring end The second beam.
本揭露的一種量測裝置的操作方法，包括：提供一光學元件，其包括第一分光部、第二分光部、第三分光部、第一光纖、第二光纖以及第三光纖，其中該第一光纖耦接於該第一分光部與該第二分光部之間以提供第一光路徑，該第二光纖耦接於該第二分光部與該第三分光部之間以提供第二光路徑，而該第三光纖耦接於該第一分光部與該第二分光部之間以提供第三光路徑；提供第一光束至該第一分光部的光源端；由該第一分光部將該第一光束分束至該第一光路徑與該第三光路徑；將該第一光路徑的該第一光束通過該第二分光部的收發端投射至量測目標；由該收發端將該量測目標的第二光束傳送至該第二光路徑；通過該第三分光部的量測端偵檢該第三光路徑的該第一光束，以獲得參考訊號；以及通過該量測端偵檢該第二光路徑的該第二光束，以獲得量測 訊號。 A method of operating a measuring device according to the present disclosure includes: providing an optical component, comprising: a first beam splitting portion, a second beam splitting portion, a third beam splitting portion, a first optical fiber, a second optical fiber, and a third optical fiber, wherein the An optical fiber is coupled between the first beam splitting portion and the second beam splitting portion to provide a first light path, and the second fiber is coupled between the second beam splitting portion and the third beam splitting portion to provide a second light a path, wherein the third fiber is coupled between the first beam splitting portion and the second beam splitting portion to provide a third light path; providing a first light beam to the light source end of the first beam splitting portion; and the first beam splitting portion And splitting the first light beam into the first light path and the third light path; and the first light beam of the first light path is projected to the measurement target through the transceiver end of the second light splitting portion; Transmitting the second light beam of the measurement target to the second light path; detecting, by the measuring end of the third light splitting portion, the first light beam of the third light path to obtain a reference signal; and passing the measurement Detecting the second light beam of the second light path to obtain a measurement Signal.
為讓本揭露的上述特徵和優點能更明顯易懂，下文特舉實施例，並配合所附圖式作詳細說明如下。 The above described features and advantages of the present invention will be more apparent from the following description.
10‧‧‧量測目標 10‧‧‧Measurement target
100‧‧‧量測裝置 100‧‧‧Measurement device
110‧‧‧光學元件 110‧‧‧Optical components
111‧‧‧第一分光部 111‧‧‧First Splitting Department
112‧‧‧第二分光部 112‧‧‧Second Splitting Department
113‧‧‧第三分光部 113‧‧‧ Third Beam Division
114‧‧‧第一光纖 114‧‧‧First fiber
115‧‧‧第二光纖 115‧‧‧second fiber
116‧‧‧第三光纖 116‧‧‧ Third fiber
117‧‧‧衰減器 117‧‧‧Attenuator
120‧‧‧光源電路 120‧‧‧Light source circuit
130‧‧‧透鏡組 130‧‧‧ lens group
140‧‧‧光檢知電路 140‧‧‧Light detection circuit
150‧‧‧處理電路 150‧‧‧Processing circuit
200‧‧‧光纖合束器 200‧‧‧Fibre combiner
圖1是依照本揭露的實施例說明一種量測裝置的功能方塊示意圖。 1 is a functional block diagram illustrating a measuring device in accordance with an embodiment of the present disclosure.
圖2是依照本揭露的實施例說明一種光纖合束器的功能方塊示意圖。 2 is a functional block diagram illustrating an optical fiber combiner in accordance with an embodiment of the present disclosure.
圖3是依照本揭露的實施例說明圖1所示量測裝置的應用情境示意圖。 FIG. 3 is a schematic diagram showing an application scenario of the measuring device shown in FIG. 1 according to an embodiment of the present disclosure.
圖4是依照本揭露另一實施例說明一種量測裝置的功能方塊示意圖。 FIG. 4 is a functional block diagram illustrating a measuring device according to another embodiment of the disclosure.
在本案說明書全文(包括申請專利範圍)中所使用的「耦接」一詞可指任何直接或間接的連接手段。舉例而言，若文中描述第一裝置耦接於第二裝置，則應該被解釋成該第一裝置可以直接連接於該第二裝置，或者該第一裝置可以透過其他裝置或某種連接手段而間接地連接至該第二裝置。另外，凡可能之處，在圖式及實施方式中使用相同標號的元件/構件/步驟代表相同或類似 部分。不同實施例中使用相同標號或使用相同用語的元件/構件/步驟可以相互參照相關說明。 The term "coupled" as used throughout the specification (including the scope of the patent application) may be used in any direct or indirect connection. For example, if the first device is described as being coupled to the second device, it should be construed that the first device can be directly connected to the second device, or the first device can be connected through other devices or some kind of connection means. Connected to the second device indirectly. In addition, wherever possible, the same referenced elements/components/steps in the drawings and embodiments represent the same or similar section. Elements/components/steps that use the same reference numbers or use the same terms in different embodiments may refer to the related description.
本揭露實施例以三組光纖分光器組成三向光纖架構。採用光纖的光學元件不會因為局部的元件位移而影響量測程序，且對於熱變形、震動位移幾乎沒有影響，也可以不需設置一堅固平面。元件維護或更換時，僅是光纖端子連結，沒有光軸的問題，因此無須再進行調校。雷射只於光纖中傳遞，因此外部光線不會進入光纖，光學部分沒有內反射訊號干擾。元件配置也不受限制，在公尺級範圍內光波延遲變化幾乎無須考慮，有助於整體系統之安排。量測裝置可以利用原始光源作為參考訊號，以便校正量測訊號中關於原始光源之頻率飄移成份，同時簡化系統之整合與維修難度。 The disclosed embodiment forms a three-way fiber structure with three sets of fiber splitters. The optical component using the optical fiber does not affect the measurement procedure due to local component displacement, and has little effect on thermal deformation and vibration displacement, and it is not necessary to provide a solid plane. When the components are maintained or replaced, only the fiber terminals are connected, and there is no problem with the optical axis, so there is no need to adjust. The laser is transmitted only in the fiber, so external light does not enter the fiber, and the optical part has no internal reflection signal interference. The component configuration is also unrestricted, and the variation of the optical wave delay in the metric range is almost unnecessary to consider, contributing to the overall system arrangement. The measuring device can use the original light source as a reference signal to correct the frequency drift component of the original signal in the measuring signal, and simplify the integration and maintenance of the system.
圖1是依照本揭露的實施例說明一種量測裝置100的功能方塊示意圖。量測裝置100包括光學元件110、光源電路120、透鏡組130以及光檢知電路140。光學元件110包括第一分光部111、第二分光部112、第三分光部113、第一光纖(fiber)114、第二光纖115以及第三光纖116。第一光纖114、第二光纖115及/或第三光纖116可以是任何形式的光纖，例如玻璃光纖、塑膠光纖或是其他光纖。第一分光部111的第一分光端與第二分光端分別耦接第三光纖116的第一端與第一光纖114的第一端。第二分光部112的第三分光端與第四分光端分別耦接第一光纖114的第二端與第二光纖115的第一端。第三分光部113的第五分光端與 第六分光端分別耦接第二光纖115的第二端與第三光纖116的第二端。第一光纖114耦接於第一分光部111與第二分光部112之間，以提供第一光路徑。第二光纖115耦接於第二分光部112與第三分光部113之間，以提供第二光路徑。第三光纖116耦接於第一分光部111與第三分光部113之間，以提供第三光路徑。 FIG. 1 is a functional block diagram illustrating a measurement device 100 in accordance with an embodiment of the present disclosure. The measuring device 100 includes an optical element 110, a light source circuit 120, a lens group 130, and a light detecting circuit 140. The optical element 110 includes a first beam splitting portion 111, a second beam splitting portion 112, a third beam splitting portion 113, a first fiber 114, a second fiber 115, and a third fiber 116. The first fiber 114, the second fiber 115, and/or the third fiber 116 can be any form of fiber, such as a glass fiber, a plastic fiber, or other fiber. The first split end and the second split end of the first beam splitting portion 111 are respectively coupled to the first end of the third optical fiber 116 and the first end of the first optical fiber 114. The third split end and the fourth split end of the second splitting portion 112 are respectively coupled to the second end of the first optical fiber 114 and the first end of the second optical fiber 115. The fifth split end of the third beam splitting portion 113 is The sixth split end is coupled to the second end of the second optical fiber 115 and the second end of the third optical fiber 116, respectively. The first optical fiber 114 is coupled between the first beam splitting portion 111 and the second beam splitting portion 112 to provide a first light path. The second optical fiber 115 is coupled between the second beam splitting portion 112 and the third beam splitting portion 113 to provide a second light path. The third optical fiber 116 is coupled between the first beam splitting portion 111 and the third beam splitting portion 113 to provide a third light path.
光源電路120耦接至第一分光部111的光源端，以提供第一光束(例如雷射光束)。第一分光部111包括分光器(beam splitter)或光纖合束器(Fiber Combiner)，以便將該光源端的光束分束至該第一分光端與該第二分光端。因此，光源電路120所提供的第一光束被第一分光部111分束至第一光纖114所提供的第一光路徑與第三光纖116所提供的第三光路徑。 The light source circuit 120 is coupled to the light source end of the first beam splitting portion 111 to provide a first light beam (eg, a laser beam). The first beam splitting portion 111 includes a beam splitter or a fiber combiner to split the light beam at the light source end to the first light splitting end and the second light splitting end. Therefore, the first light beam provided by the light source circuit 120 is split by the first beam splitting portion 111 to the first light path provided by the first optical fiber 114 and the third light path provided by the third optical fiber 116.
透鏡組130耦接至第二分光部112的收發端。第二分光部112包括分光器或光纖合束器，以便將該第三分光端的第一光束傳輸至該收發端，以及將該收發端的第二光束傳輸至該第四分光端。因此，第一光纖114所提供第一光路徑的第一光束(即光源電路120所產生的光束)可以通過第二分光部112的收發端與透鏡組130投射至量測目標10。照射至量測目標10的光束會反射至透鏡組130而成為第二光束。透鏡組130將量測目標10的第二光束通過第二分光部112的收發端傳送至第二光纖115所提供的第二光路徑。在本實施例中，從第二分光部112的收發端投射至量測目標10的第一光束，與從量測目標10照射至第二分光部112的收發端的第二光束，二者共用同一光路，但本揭露不以此為限。 The lens group 130 is coupled to the transceiver end of the second beam splitting portion 112. The second beam splitting portion 112 includes a beam splitter or a fiber combiner to transmit the first beam of the third split end to the transceiver end and the second beam of the transceiver end to the fourth split end. Therefore, the first light beam of the first optical path provided by the first optical fiber 114 (ie, the light beam generated by the light source circuit 120) can be projected to the measurement target 10 through the transceiver end of the second light splitting portion 112 and the lens group 130. The light beam that is incident on the measurement target 10 is reflected to the lens group 130 to become the second light beam. The lens group 130 transmits the second light beam of the measurement target 10 to the second light path provided by the second optical fiber 115 through the transceiver end of the second beam splitting portion 112. In the present embodiment, the first light beam projected from the transmitting end of the second beam splitting portion 112 to the measuring target 10 and the second light beam irradiated from the measuring target 10 to the transmitting end of the second beam splitting portion 112 share the same Light path, but this disclosure is not limited to this.
光檢知電路140耦接至第三分光部113的量測端。第三分光部113包括分光器或光纖合束器，以便將該第五分光端的第一光束傳輸至該量測端，以及將該第六分光端的一第二光束傳輸至該量測端。因此，光檢知電路140可以通過第三分光部113的量測端偵檢第三光纖116所提供第三光路徑的第一光束(即光源電路120所產生的光束)，以獲得參考訊號。光檢知電路140可以將此參考訊號傳送給處理電路150。另一方面，光檢知電路140可以通過第三分光部113的量測端偵檢第二光纖115所提供第二光路徑的第二光束(即量測目標10所反射的光束)，以獲得量測訊號。光檢知電路140可以將此量測訊號傳送給處理電路150。利用從原始光源所獲得的參考訊號，處理電路150可以校正所述量測訊號中關於原始光源之頻率飄移成份。 The light detecting circuit 140 is coupled to the measuring end of the third beam splitting portion 113. The third beam splitting portion 113 includes a beam splitter or a fiber combiner to transmit the first beam of the fifth split end to the measuring end, and a second beam of the sixth split end to the measuring end. Therefore, the light detecting circuit 140 can detect the first light beam of the third optical path provided by the third optical fiber 116 (ie, the light beam generated by the light source circuit 120) through the measuring end of the third light splitting portion 113 to obtain a reference signal. The light detection circuit 140 can transmit the reference signal to the processing circuit 150. On the other hand, the light detecting circuit 140 can detect the second light beam of the second light path provided by the second optical fiber 115 (ie, the light beam reflected by the measurement target 10) through the measuring end of the third light splitting portion 113. Measurement signal. The light detection circuit 140 can transmit the measurement signal to the processing circuit 150. Using the reference signal obtained from the original source, the processing circuit 150 can correct the frequency drift component of the measurement signal with respect to the original source.
光檢知電路140與第三分光部113之間可以選擇性地配置抗反射層(例如是有機抗反射層或無機抗反射層)。所述有機抗反射層可以是FPI(fluorinated polyimide)、PAE(polyarylene ether)或是其他抗反射層。另外，光檢知電路140與處理電路150在其他實施例中可能會被合并成同一個積體電路。因此，在所述其他實施例中，光檢知電路140可以依照該參考訊號校正該量測訊號，以及計算量測結果。 An antireflection layer (for example, an organic antireflection layer or an inorganic antireflection layer) may be selectively disposed between the light detecting circuit 140 and the third beam splitting portion 113. The organic anti-reflective layer may be a FPI (fluorinated polyimide), a PAE (polyarylene ether) or other anti-reflective layer. Additionally, optical detection circuit 140 and processing circuit 150 may be combined into the same integrated circuit in other embodiments. Therefore, in the other embodiments, the optical detection circuit 140 can correct the measurement signal according to the reference signal and calculate the measurement result.
依據都卜勒效應，照射至量測目標10的光束與從量測目標10反射的光束，二者的頻率偏移量是相關於量測目標10速度與/或方向。因此，處理電路150可以依據校正後的量測訊號而計 算出量測目標10速度與/或方向。上述量測目標10可以是任何物質或物體，例如固體或流體等。例如，量測目標10可以是風場，則量測裝置100可以量測風場的流速與/或方向。以雷射進行遠距都卜勒光達訊號量測時，雷射源(即光源電路120)之頻率飄移會影響量測之準確度。無論是觀測干涉拍頻或是以光學分頻，原始頻率之飄移會與都卜勒頻移混雜而無從分辨。本實施例所使用的光學元件110具有三向光纖架構，也就是以光纖連接雷射源(光源電路120)、發射/接收端(透鏡組130)與光檢知電路140。因此，光檢知電路140可以檢測原始光源作為參考訊號，以便監控雷射源之頻率飄移量。再者，本實施例所使用的光學元件110可以同時簡化系統之整合與維修難度。 According to the Doppler effect, the light beam that is incident on the measurement target 10 and the light beam reflected from the measurement target 10 are related to the measurement target 10 speed and/or direction. Therefore, the processing circuit 150 can calculate according to the corrected measurement signal. Calculate the target 10 speed and / or direction. The above-described measurement target 10 may be any substance or object such as a solid or a fluid or the like. For example, the measurement target 10 can be a wind field, and the measurement device 100 can measure the flow rate and/or direction of the wind field. When the long-range Doppler light signal measurement is performed by laser, the frequency drift of the laser source (ie, the light source circuit 120) affects the accuracy of the measurement. Whether it is observing the interferometric beat frequency or optically dividing the frequency, the drift of the original frequency will be mixed with the Doppler shift and cannot be resolved. The optical element 110 used in this embodiment has a three-way optical fiber structure, that is, a laser source (light source circuit 120), a transmitting/receiving end (lens group 130), and a light detecting circuit 140. Therefore, the light detecting circuit 140 can detect the original light source as a reference signal to monitor the frequency drift of the laser source. Moreover, the optical component 110 used in this embodiment can simultaneously simplify the integration and maintenance of the system.
上述第一分光部111、第二分光部112與第三分光部113可以用任何方式實現之。例如，在一些實施例中，第一分光部111可以用並束方式合併光纖114與光纖116，第二分光部112可以用並束方式合併光纖114與光纖115，第三分光部113可以用並束方式合併光纖115與光纖116。在另一些實施例中，第一分光部111可以用光纖融接方式合併光纖114與光纖116，第二分光部112可以用光纖融接方式合併光纖114與光纖115，第三分光部113可以用光纖融接方式合併光纖115與光纖116。在其他實施例中，第一分光部111、第二分光部112與/或第三分光部113可以用任何公知的分光器實現之。 The first spectroscopic portion 111, the second spectroscopic portion 112, and the third spectroscopic portion 113 can be realized in any manner. For example, in some embodiments, the first beam splitting portion 111 may combine the optical fiber 114 and the optical fiber 116 in a bundled manner, and the second splitting portion 112 may combine the optical fiber 114 and the optical fiber 115 in a bundled manner, and the third splitting portion 113 may be used in combination. The beam mode combines the fiber 115 with the fiber 116. In other embodiments, the first beam splitting portion 111 may merge the optical fiber 114 and the optical fiber 116 by means of fiber fusion, and the second beam splitting portion 112 may merge the optical fiber 114 and the optical fiber 115 by means of fiber fusion, and the third splitting portion 113 may be used. The fiber fusion mode combines the optical fiber 115 and the optical fiber 116. In other embodiments, the first beam splitting portion 111, the second beam splitting portion 112, and/or the third beam splitting portion 113 can be implemented by any known beam splitter.
圖2是依照本揭露的實施例說明一種光纖合束器200的 功能方塊示意圖。第一分光部111、第二分光部112與/或第三分光部113可以參照圖2所示光纖合束器200實現之。光纖合束器200是以並束方式合併兩條光纖，對光纖合束器200外之設備而言可以視為單一之數值口徑(Numerical aperture，N.A.)。 2 is a block diagram of an optical fiber combiner 200 in accordance with an embodiment of the present disclosure. Functional block diagram. The first beam splitting portion 111, the second beam splitting portion 112, and/or the third beam splitting portion 113 can be realized by referring to the fiber combiner 200 shown in FIG. The fiber combiner 200 combines two fibers in a bundled manner, and can be regarded as a single numerical aperture (N.A.) for devices outside the fiber combiner 200.
圖3是依照本揭露的實施例說明圖1所示量測裝置100的應用情境示意圖。於本實施例中，量測目標10可以是高空中的風場。量測裝置100可以設置在地面，以作為測風光達。當量測裝置100啟動量測程序時，雷射光束由雷射源(光源電路120)發出，且由第一分光部111進入光纖。光源電路120所產生的雷射光束在第一分光部111隨即被分束為兩部份，其中一部分雷射光束經由第一光纖114傳送至第二分光部112，以及另一部份雷射光束經由第三光纖116傳送至第三分光部113。第三光纖116的光束會先到達第三分光部113。傳送至第二分光部112的雷射光束經由透鏡組130(例如望遠鏡或其他物鏡)發射至量測目標10後，反射訊號光束會經由同一組光學系統(透鏡組130)回到第二分光部112，並經由第二光纖115傳送至第三分光部113。 FIG. 3 is a schematic diagram showing an application scenario of the measuring device 100 of FIG. 1 according to an embodiment of the present disclosure. In the present embodiment, the measurement target 10 may be a high altitude wind farm. The measuring device 100 can be placed on the ground to measure wind. When the equivalent measuring device 100 starts the measurement program, the laser beam is emitted from the laser source (the light source circuit 120), and the first beam splitting portion 111 enters the optical fiber. The laser beam generated by the light source circuit 120 is split into two parts in the first beam splitting portion 111, wherein a part of the laser beam is transmitted to the second beam splitting portion 112 via the first optical fiber 114, and another portion of the laser beam is transmitted. The third optical fiber 116 is transmitted to the third spectroscopic portion 113. The light beam of the third optical fiber 116 first reaches the third beam splitting portion 113. After the laser beam transmitted to the second beam splitting portion 112 is emitted to the measurement target 10 via the lens group 130 (for example, a telescope or other objective lens), the reflected signal beam is returned to the second beam splitting portion via the same optical system (lens group 130). 112 is transmitted to the third spectroscopic portion 113 via the second optical fiber 115.
同一個透鏡組130可以將光源電路120所產生的光束投射至高空中的風場，以及接收從高空中的風場所反射回來的光束。對於物鏡之光學系統而言，發射/接收為同一組光學系統，也就是照明與偵測共用同一光路，所接收的反射訊號可以最大化，並且可以免除照明光束與觀測視線交會角度之調整。由於發射與接收為同一光路(同一個透鏡組130)，因此回波強度只與距離與 反射量有關，可以進行穿透率、總含量(Total of Contain)等估算研究。 The same lens group 130 can project a light beam generated by the light source circuit 120 to a wind field in a high altitude, and receive a light beam reflected from a wind place in a high altitude. For the optical system of the objective lens, the transmission/reception is the same optical system, that is, the illumination and detection share the same optical path, the received reflection signal can be maximized, and the adjustment of the angle of intersection of the illumination beam and the observation line of sight can be eliminated. Since the transmission and reception are the same optical path (same lens group 130), the echo intensity is only related to the distance It is related to the amount of reflection, and it is possible to carry out estimation studies such as penetration rate and total content.
因此，光檢知電路140可以通過第三分光部113、第二光纖115與第二分光部112偵檢透鏡組130所接收到的光束(即高空中的風場所反射的光束)，以獲得量測訊號。對於光檢知電路140而言，來自第三光纖116的雷射源訊號與來自第二光纖115的量測訊號會在同一端點(第三分光部113)出現，只有時間上的先後分別。因此，光檢知電路140沒有操作上的量測差異(第一類誤差)。假設光源電路120發出的第一光束為脈衝波雷射，則透鏡組130所接收到的第二光束亦為脈衝波雷射。先後到達光檢知電路140之雷射光確定來自雷射源之同一個(exact)脈衝，差別只有第二個訊號(第二光束)帶有外部(量測目標10)的調制(attenuation)，因此第一個信號(第三光纖116的光束)可作為系統自校訊號，第二個訊號(第二光纖115的光束)是外部量測訊號。依照第三光纖116中的光束與第二光纖115中的光束，二者之間的頻率飄移(頻率差異)，量測裝置100可以計算出高空中的風場的風度與/或方向。 Therefore, the light detecting circuit 140 can detect the light beam received by the lens group 130 (that is, the light beam reflected by the wind in the sky) through the third light splitting portion 113, the second optical fiber 115, and the second light splitting portion 112 to obtain the amount. Test signal. For the optical detection circuit 140, the laser source signal from the third optical fiber 116 and the measurement signal from the second optical fiber 115 appear at the same end point (the third beam splitting portion 113), only in time order. Therefore, the light detecting circuit 140 has no measurement difference (first type of error) in operation. Assuming that the first light beam emitted by the light source circuit 120 is a pulse wave laser, the second light beam received by the lens group 130 is also a pulse wave laser. The laser light that has arrived at the light detecting circuit 140 determines the same exact pulse from the laser source, with the difference that only the second signal (second light beam) has an external (measurement target 10) modulation, so The first signal (the beam of the third fiber 116) can be used as the system self-calibration signal, and the second signal (the beam of the second fiber 115) is the external measurement signal. According to the frequency shift (frequency difference) between the light beam in the third optical fiber 116 and the light beam in the second optical fiber 115, the measuring device 100 can calculate the wind direction and/or direction of the wind field in the high air.
綜上所述，由於光源電路120、透鏡組130與光檢知電路140之間的光路徑不使用自由空間(free space)光路，因此在進行元件更換或維修時，光源電路120、透鏡組130與光檢知電路140之間的光路徑不需重行校準光軸。由於光源電路120、透鏡組130與光檢知電路140之間的光路徑使用光纖光路，因此不會因為局 部的元件位移而影響量測程序，且對於熱變形、震動位移幾乎沒有影響，也可以不需設置一堅固平面。由於光源電路120、透鏡組130與光檢知電路140之間的光路徑使用光纖光路，因此可以簡化系統之空間配置，增加空間配置彈性。由於光檢知電路140可以透過第三光纖116所提供第三光路徑偵檢光源電路120所產生的光束作為參考訊號，因此量測裝置100可以校正所述量測訊號中關於光源電路120之頻率飄移成份。 In summary, since the light path between the light source circuit 120, the lens group 130 and the light detecting circuit 140 does not use a free space optical path, the light source circuit 120 and the lens group 130 are used for component replacement or maintenance. The optical path between the optical detection circuit 140 and the optical detection circuit 140 does not require recalibration of the optical axis. Since the light path between the light source circuit 120, the lens group 130 and the light detecting circuit 140 uses the optical fiber path, it is not because of the bureau. The component displacement affects the measurement procedure, and has little effect on thermal deformation and vibration displacement, and it is not necessary to provide a solid plane. Since the optical path between the light source circuit 120, the lens group 130, and the light detecting circuit 140 uses the optical fiber path, the spatial arrangement of the system can be simplified, and the flexibility of spatial arrangement can be increased. Since the light detecting circuit 140 can transmit the light beam generated by the third light path detecting light source circuit 120 provided by the third optical fiber 116 as a reference signal, the measuring device 100 can correct the frequency of the light source circuit 120 in the measuring signal. Drifting ingredients.
圖4是依照本揭露另一實施例說明一種量測裝置100的功能方塊示意圖。圖4所示實施例可以參照圖1至圖3的相關說明而類推之。與圖1所示實施例不同之處，在於圖4所示量測裝置100更包括衰減器117。衰減器117配置於第三光纖116所提供第三光路徑中。衰減器117可以衰減所述第三光路徑的光束。衰減器117可以用任何方式實現之。例如，衰減器117可以用光纖對位偏移方式衰減所述第三光路徑的光束。 FIG. 4 is a functional block diagram illustrating a measurement apparatus 100 according to another embodiment of the disclosure. The embodiment shown in FIG. 4 can be analogized with reference to the related description of FIGS. 1 to 3. The difference from the embodiment shown in FIG. 1 is that the measuring device 100 shown in FIG. 4 further includes an attenuator 117. The attenuator 117 is disposed in the third optical path provided by the third optical fiber 116. Attenuator 117 can attenuate the beam of the third optical path. The attenuator 117 can be implemented in any manner. For example, the attenuator 117 can attenuate the beam of the third optical path with a fiber alignment offset.
一般而言，從高空中的風場所反射回來的光束訊號強度會小於光源電路120所產生原始光束的訊號強度。在擷取第三光纖116所提供參考訊號作為系統頻率飄移量監控時，若第三光纖116的參考訊號與第二光纖115的量測訊號二者訊號強度差異過大，則可利用衰減器117進行衰減動作(in-line-attenuator,ILA)。例用光纖對位偏移，在同調性(coherence)保持的前提下，本實施例中衰減器117可以線性調校範圍約50dB。 In general, the intensity of the beam signal reflected from the wind scene in the high air is less than the signal intensity of the original beam generated by the light source circuit 120. When the reference signal provided by the third optical fiber 116 is used as the system frequency drift monitoring, if the signal strength difference between the reference signal of the third optical fiber 116 and the measurement signal of the second optical fiber 115 is too large, the attenuator 117 can be used. In-line-attenuator (ILA). For example, the optical fiber aligning offset is used, and the attenuator 117 can be linearly adjusted in the range of about 50 dB in this embodiment under the premise of coherence.
在另一實施例中，在前述兩路(第二光纖115與第三光 纖116)訊號強度需進行調整時，雷射源端(第一分光部111)可以採用不同分束比例之光纖，以調整第一光纖114與第三光纖116的訊號強度比例。以及/或是，發射與接收端(第二分光部112)可以採用不同分束比例之光纖，以調整第一光纖114與第二光纖115的訊號強度比例。 In another embodiment, in the foregoing two paths (second optical fiber 115 and third optical When the signal strength needs to be adjusted, the laser source end (the first beam splitting portion 111) may use different splitting ratio fibers to adjust the signal intensity ratio of the first fiber 114 and the third fiber 116. And/or the transmitting and receiving ends (the second beam splitting portion 112) may use optical fibers of different splitting ratios to adjust the signal intensity ratio of the first optical fiber 114 and the second optical fiber 115.
在其他實施例中，光源電路120發出的第一光束可以是連續波雷射，則透鏡組130所接收到的第二光束亦為連續波雷射。在使用連續波雷射時，兩路訊號(第二光纖115與第三光纖116的訊號)可直接進行干涉操作(例如Heterodyne干涉外插量測或是其他干涉操作)。干涉光強來自三項不同的貢獻，即直流項(常數項)、高頻項和拍頻項(低頻項)。在外插干涉中前兩者(即直流項與高頻項)可用濾波器濾去，只保留較低頻率的拍頻。關於干涉操作為公知技術，故不在此贅述。 In other embodiments, the first beam emitted by the light source circuit 120 may be a continuous wave laser, and the second beam received by the lens group 130 is also a continuous wave laser. When a continuous wave laser is used, the two signals (the signals of the second fiber 115 and the third fiber 116) can directly perform an interference operation (for example, Heterodyne interference interpolation measurement or other interference operation). The interfering light intensity comes from three different contributions, namely the DC term (constant term), the high frequency term and the beat frequency term (low frequency term). In the extrapolation interference, the first two (ie, the DC term and the high frequency term) can be filtered by the filter, leaving only the beat frequency of the lower frequency. The interference operation is a well-known technique, and therefore will not be described here.
綜上所述，本揭露諸實施例以三組光纖分光器組成三向光纖架構。利用原始光源作為參考訊號，量測裝置100可以監控雷射源之頻率飄移量。採用光纖的光學元件不會因為局部的元件位移而影響量測程序，且對於熱變形、震動位移幾乎沒有影響，也可以不需設置一堅固平面。元件維護或更換時，僅是光纖端子連結，沒有光軸的問題，因此無須再進行調校。光束(例如雷射)只於光纖中傳遞，因此外部光線不會進入光纖，光學部分沒有內反射訊號干擾。元件配置也不受限制，在公尺級範圍內光波延遲變化幾乎無須考慮，有助於整體系統之安排。因此，量測裝置100 同時簡化系統之整合與維修難度。 In summary, the embodiments of the present disclosure form a three-way fiber structure by three sets of fiber splitters. Using the original light source as a reference signal, the measuring device 100 can monitor the amount of frequency drift of the laser source. The optical component using the optical fiber does not affect the measurement procedure due to local component displacement, and has little effect on thermal deformation and vibration displacement, and it is not necessary to provide a solid plane. When the components are maintained or replaced, only the fiber terminals are connected, and there is no problem with the optical axis, so there is no need to adjust. The beam (for example, a laser) is transmitted only in the fiber, so external light does not enter the fiber, and the optical portion does not interfere with the internal reflection signal. The component configuration is also unrestricted, and the variation of the optical wave delay in the metric range is almost unnecessary to consider, contributing to the overall system arrangement. Therefore, the measuring device 100 At the same time, it simplifies the integration and maintenance of the system.
雖然本揭露已以實施例揭露如上，然其並非用以限定本揭露，任何所屬技術領域中具有通常知識者，在不脫離本揭露的精神和範圍內，當可作些許的更動與潤飾，故本揭露的保護範圍當視後附的申請專利範圍所界定者為準。 The present disclosure has been disclosed in the above embodiments, but it is not intended to limit the disclosure, and any person skilled in the art can make some changes and refinements without departing from the spirit and scope of the disclosure. The scope of protection of this disclosure is subject to the definition of the scope of the appended claims.
10‧‧‧量測目標 10‧‧‧Measurement target
100‧‧‧量測裝置 100‧‧‧Measurement device
110‧‧‧光學元件 110‧‧‧Optical components
111‧‧‧第一分光部 111‧‧‧First Splitting Department
112‧‧‧第二分光部 112‧‧‧Second Splitting Department
113‧‧‧第三分光部 113‧‧‧ Third Beam Division
114‧‧‧第一光纖 114‧‧‧First fiber
115‧‧‧第二光纖 115‧‧‧second fiber
116‧‧‧第三光纖 116‧‧‧ Third fiber
120‧‧‧光源電路 120‧‧‧Light source circuit
130‧‧‧透鏡組 130‧‧‧ lens group
140‧‧‧光檢知電路 140‧‧‧Light detection circuit
150‧‧‧處理電路 150‧‧‧Processing circuit
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| TWI701454B (en) * | 2019-09-27 | 2020-08-11 | 財團法人國家實驗研究院 | Integrated device for laser measuring and imaging |
| TWI747494B (en) * | 2019-09-17 | 2021-11-21 | 荷蘭商Ａｓｍｌ控股公司 | Laser module as alignment source, metrology system, and lithographic apparatus |
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| TWI747494B (en) * | 2019-09-17 | 2021-11-21 | 荷蘭商Ａｓｍｌ控股公司 | Laser module as alignment source, metrology system, and lithographic apparatus |
| TWI701454B (en) * | 2019-09-27 | 2020-08-11 | 財團法人國家實驗研究院 | Integrated device for laser measuring and imaging |
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